Detection device and detection method

Abstract

Embodiments of the present application provide a detection device and a detection method. The detection device includes an optical transmitter, a first beam splitting component, a second beam splitting component, and a sensor. The optical transmitter is configured to emit a reference light and a detection light; the first beam splitting component is configured to split the reference light into a first reference light in a first state and a second reference light in a second state, where the first state and the second state are different; the second beam splitting component is configured to split the detection light into a first detection light in the first state and a second detection light in the second state, where the angles of incidence of the first detection light and the second detection light on the component to be measured are different; the sensor is configured to receive the first reference light and the second reference light, and receive the first detection light and the second detection light reflected by the component to be measured, so as to generate a detection image. Through the detection image generated by the sensor, the images of the detection lights at different angles can be accurately distinguished, and thus the information of the component to be measured can be obtained more completely, and the detection effect is better.

Description

Technical Field

[0001] This application relates to the field of detection technologies, and more particularly, to a detection device and a detection method. Background Art

[0002] Currently, when detecting a workpiece, an illumination light source is usually used to irradiate the workpiece to be detected, so that an image sensor can obtain a relatively clear image of the workpiece to be detected for detecting the workpiece. However, for a workpiece to be detected with a three-dimensional structure on its surface, due to the existence of dead angles in the light source irradiation, the information collection of the workpiece to be detected is incomplete, affecting the detection effect of the workpiece to be detected. Summary of the Invention

[0003] Embodiments of this application provide a detection device and a detection method.

[0004] The detection device according to the embodiments of this application includes a light emitter, a first beam splitting component, a second beam splitting component, and a sensor. The light emitter is used to emit a reference light and a detection light; the first beam splitting component is used to split the reference light into a first reference light in a first state and a second reference light in a second state, where the first state and the second state are different; the second beam splitting component is used to split the detection light into a first detection light in the first state and a second detection light in the second state, where the angles of incidence of the first detection light and the second detection light on the workpiece to be detected are different; the sensor is used to receive the first reference light and the second reference light, and receive the first detection light and the second detection light reflected by the workpiece to be detected to generate a detection image.

[0005] The detection method according to the embodiments of this application emits a reference light and a detection light; splits the reference light into a first reference light in a first state and a second reference light in a second state, where the first state and the second state are different; splits the detection light into a first detection light in the first state and a second detection light in the second state, where the angles of incidence of the first detection light and the second detection light on the workpiece to be detected are different; receives the first reference light and the second reference light, and receives the first detection light and the second detection light reflected by the workpiece to be detected to generate a detection image.

[0006] In the detection device according to the embodiments of the present application, a reference light and a detection light are emitted by a light emitter. Then, the reference light is divided into reference lights in a first state and a second state by a first beam splitting component, and the detection light is divided into detection lights in a first state and a second state for irradiating a workpiece to be measured by a second beam splitting component. Moreover, the incident angles of the detection lights in the first state and the second state on the workpiece to be measured are different, so as to irradiate the workpiece to be measured at different angles respectively, reduce the dead angle of light irradiation, and the reference light and the detection light in the same state incident on the sensor will form interference fringes, while the interference fringes formed by the reference light and the detection light in different states are different. Therefore, in the detection image generated by the sensor, the images of the detection lights at different angles can be accurately distinguished, and further, the information of the workpiece to be measured can be obtained more completely, and the detection effect is better.

[0007] Additional aspects and advantages of the embodiments of the present application will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the embodiments of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The above and / or additional aspects and advantages of the present application will become apparent and be readily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0009] Figure 1 is a schematic structural diagram of a detection device according to some embodiments of the present application;

[0010] Figure 2 is a schematic structural diagram of a detection device according to some embodiments of the present application;

[0011] Figure 3 is a schematic plan view of a detection image according to some embodiments of the present application;

[0012] Figure 4 is a schematic plan view of a bright field image according to some embodiments of the present application;

[0013] Figure 5 is a schematic plan view of a dark field image according to some embodiments of the present application; and

[0014] Figure 6 is a schematic flow chart of a detection method according to some embodiments of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0015] The following further describes the embodiments of the present application with reference to the accompanying drawings. The same or similar reference numerals in the drawings denote the same or similar elements or elements having the same or similar functions throughout. In addition, the embodiments of the present application described below with reference to the accompanying drawings are exemplary only for explaining the embodiments of the present application and should not be construed as limiting the present application.

[0016] Generally, bright-field imaging or dark-field imaging is used to detect defects in workpieces. Bright-field imaging can provide images with good contrast within the resolution range of the optical system, while dark-field imaging can provide images of tiny defects smaller than the resolution ability of the optical system. During detection, bright-field imaging is usually carried out first, followed by dark-field imaging, so as to detect the defects of the workpiece to be tested through the bright-field image and the dark-field image, which can improve the detection effect. However, the differences in light source brightness, imaging angle, etc. between the bright-field imaging system and the dark-field imaging system are relatively large. If bright-field imaging and dark-field imaging are carried out simultaneously, the obtained bright-field image and dark-field image are likely to be mixed together and difficult to distinguish.

[0017] Please refer to Figure 1 , the detection device 100 according to the embodiment of the present application includes a light emitter 10, a first beam splitting component 20, a second beam splitting component 30 and a sensor 40. The light emitter 10 is used to emit a reference light 11 and a detection light 12; the first beam splitting component 20 is used to split the reference light 11 into a first reference light 13 in a first state and a second reference light 14 in a second state, and the first state and the second state are different; the second beam splitting component 30 is used to split the detection light 12 into a first detection light 15 in a first state and a second detection light 16 in a second state, and the incident angles of the first detection light 15 and the second detection light 16 on the workpiece 200 to be tested are different; the sensor 40 is used to receive the first reference light 13 and the second reference light 14, and receive the first detection light 15 and the second detection light 16 reflected by the workpiece 200 to be tested, so as to generate a detection image.

[0018] In the detection device 100 according to the embodiment of the present application, the reference light 11 and the detection light 12 are emitted by the light emitter 10, and then the reference light 11 is split into reference lights 11 in a first state and a second state by the first beam splitting component 20, and the detection light 12 is split into detection lights 12 in a first state and a second state for irradiating the workpiece 200 by the second beam splitting component 30, and the incident angles of the detection lights 12 in the first state and the second state on the workpiece 200 are different, so as to irradiate the workpiece 200 at different angles respectively, reducing the dead angle of light irradiation, and the reference light 11 and the detection light 12 in the same state incident on the sensor 40 will form interference fringes, and the interference fringes formed by the reference light 11 and the detection light 12 in different states are different. Therefore, the images of the detection lights 12 at different angles (such as distinguishing the bright-field image and the dark-field image from the detection image) can be accurately distinguished from the detection image generated by the sensor 40, and further, more complete information of the workpiece 200 can be obtained, and the detection effect is better.

[0019] Please continue to refer to Figure 1, the detection device 100 includes a light emitter 10, a first beam splitting component 20, a second beam splitting component 30, a sensor 40, and a first beam splitter 50. The first beam splitter 50 can be a prism. The first beam splitter 50 can split the light emitted by the light emitter 10 into a reference light 11 and a detection light 12. The ratio of the intensity of the detection light 12 to the intensity of the reference light 11 is 1:1, that is, the intensity of the detection light 12 is the same as the intensity of the reference light 11, so as to ensure the interference effect after the subsequent detection light 12 and reference light 11 are incident on the sensor 40. In other embodiments, there are multiple light emitters 10, such as two. The two light emitters 10 respectively emit the reference light 11 and the detection light 12.

[0020] The light emitter 10 can be a fiber laser. The light emitted by the fiber laser is little affected by external factors, can achieve high-brightness light output, and has a good illumination effect on the workpiece 200 to be measured.

[0021] In some embodiments, the detection device 100 further includes a first lens 61. The first lens 61 is disposed on the outgoing light path of the light emitter 10. The light emitted by the light emitter 10 first passes through the first lens 61. The first lens 61 expands the light beam and forms parallel light to increase the irradiation range of the light.

[0022] After the light emitted by the light emitter 10 is split into the reference light 11 and the detection light 12 by the first beam splitter 50, the reference light 11 and the detection light 12 are emitted at different angles. The reference light 11 and the detection light 12 enter the sensor 40 along different light paths. The light path of the reference light 11 does not pass through the workpiece 200 to be measured and is only used to form interference fringes with the detection light 12. The light path of the detection light 12 passes through the workpiece 200 to be measured to irradiate the workpiece 200. The detection light 12 reflected by the workpiece 200 carries the information of the workpiece 200 and enters the sensor 40.

[0023] The first beam splitting component 20 is located on the light path of the reference light 11. The first beam splitting component 20 includes a first polarization beam splitter 21, a first reflector 22, a second reflector 23, and a third reflector 24. The first beam splitting component 20 is used to split the reference light 11 into a reference light 11 in a first state (i.e., a first reference light 13) and a reference light 11 in a second state (i.e., a second reference light 14) to enter the sensor 40 respectively.

[0024] The reference light 11 first passes through the first polarization beam splitter 21. The first polarization beam splitter 21 is a polarization beam splitting prism and can split the reference light 11 into polarized light in a horizontal polarization state and a vertical polarization state. Among them, the reference light 11 in the first state is the first reference light 13 in the first polarization state (such as the horizontal polarization state), and the reference light 11 in the second state is the second reference light 14 in the second polarization state (such as the vertical polarization state).

[0025] In other embodiments, the first polarization beam splitter 21 can be replaced by a filter which can split the incident reference light 11 into reference lights 11 of different wavelengths. For example, the reference light 11 in the first state is the reference light 11 of the first wavelength, and the reference light 11 in the second state is the reference light 11 of the second wavelength, where the first wavelength is different from the second wavelength. For example, if the reference light 11 is white light, the filter can only filter red light and blue light, that is, the reference light 11 of the first wavelength is red light, and the reference light 11 in the second state is blue light.

[0026] The first reference light 13 and the second reference light 14 are emitted at different angles. In order to make both the first reference light 13 and the second reference light 14 enter the sensor 40, it is necessary to adjust the angles of the first reference light 13 and the second reference light 14.

[0027] Among them, the first reflector 22 reflects the first reference light 13 to the third reflector 24, and then the third reflector 24 reflects it towards the sensor 40. The second reflector 23 reflects the second reference light 14 to the third reflector 24, and then the third reflector 24 reflects it towards the sensor 40. The first reflector 22 and the third reflector 24 cooperate to make the first reference light 13 cover (such as partially cover or completely cover) the field of view range of the sensor 40. The second reflector 23 and the third reflector 24 cooperate to make the second reference light 14 cover (such as partially cover or completely cover) the field of view range of the sensor 40, so as to make full use of the reference light 11.

[0028] The first reflector 22 can be a mirror or a prism. The mirror is, for example, a plane mirror that can completely reflect the first reference light 13, and the prism can partially reflect the first reference light 13. Similarly, the second reflector 23 can also be a mirror or a prism. The mirror is, for example, a plane mirror that can completely reflect the second reference light 14, and the prism can partially reflect the second reference light 14. The third reflector 24 can be a prism, and the third reflector 24 can be arranged on the optical axis O of the sensor 40. The prism can not only reflect the first reference light 13 and the second reference light 14, but also transmit light, so that even if the third reflector 24 is arranged on the optical axis O of the sensor 40, it will not affect the detection light 12 from entering the sensor 40; the third reflector 24 can also be a mirror, and the third reflector 24 is not arranged on the optical axis O to prevent the third reflector 24 from blocking the detection light 12 from entering the sensor 40.

[0029] The first beam splitting component 20 further includes a first attenuator 25. The first attenuator 25 can be an adjustable attenuation film, which can adjust the ratio of the light incident on the first attenuator 25 to the light exiting from the first attenuator 25. The first attenuator 25 is disposed between the first reflector 22 and the first polarization beam splitter 21, and the first attenuator 25 can adjust the intensity of the first reference light 13. For example, in order to make the interference effect between the first reference light 13 and the first detection light 15 better, it is necessary to adjust the intensities of the first reference light 13 and the first detection light 15 to be substantially the same, or the difference between the intensities of the two is within a preset range.

[0030] The second beam splitting component 30 includes a second polarization beam splitter 31, a fourth reflector 32, and a fifth reflector 33. The second beam splitting component 30 is configured to split the detection light 12 into a first state of detection light 12 (i.e., the first detection light 15) and a second state of detection light 12 (the second detection light), so as to enter the sensor 40 respectively.

[0031] The detection light 12 first passes through the second polarization beam splitter 31. The second polarization beam splitter 31 is similar to the first polarization beam splitter 21 and is a polarization beam splitting prism, which can split the detection light 12 into polarized light in a horizontal polarization state and a vertical polarization state. Among them, the first state of the detection light 12 is the first detection light 15 in the first polarization state (such as the horizontal polarization state), and the second state of the detection light 12 is the second detection light 16 in the second polarization state (such as the vertical polarization state). In other embodiments, the second polarization beam splitter 31 can be replaced by a filter. The filter can split the incident detection light 12 into reference lights 11 of different wavelengths. For example, the first state of the reference light 11 is the reference light 11 of the first wavelength, and the second state of the reference light 11 is the reference light 11 of the second wavelength. The first wavelength and the second wavelength are different. For example, if the reference light 11 is white light, the filter can only filter out green light and blue light, that is, the first state of the reference light 11 is green light, and the second state of the reference light 11 is blue light.

[0032] The first detection light 15 and the second detection light 16 exit at different angles. In order to make both the first detection light 15 and the second reference light 14 irradiate the workpiece 200, it is necessary to adjust the angles of the first reference light 13 and the second reference light 14.

[0033] Among them, the fourth reflector 32 reflects the first detection light 15 to the workpiece 200, and the fifth reflector 33 reflects the second detection light 16 to the workpiece 200. The first reflector 22 and the third reflector 24 cooperate to make the first reference light 13 substantially incident on the workpiece 200, so as to make full use of the detection light 12 for illumination.

[0034] The fourth reflector 32 can be a mirror or a prism. The mirror, such as a plane mirror, can completely reflect the first detection light 15, while the prism can partially reflect the first detection light 15. Similarly, the fifth reflector 33 can be a mirror or a prism. The mirror, such as a plane mirror, can completely reflect the second detection light 16, while the prism can partially reflect the second detection light 16.

[0035] The first detection light 15 can be used for dark-field illumination. The fourth reflector 32 can obliquely incident the first detection light 15 on the workpiece 200 to achieve dark-field illumination.

[0036] To achieve dark-field illumination, the second beam splitting component 30 further includes a second attenuator 34. The second attenuator 34 can be an adjustable attenuation film, which can adjust the ratio of the light incident on the second attenuator 34 to the light emitted from the second attenuator 34. It can be understood that the intensities of the first detection light 15 and the second detection light 16 split by the second polarization beam splitter 31 are basically the same, and the intensity of the light for dark-field illumination is relatively low. Therefore, it is necessary to reduce the intensity of the first detection light 15 so that the intensity of the first detection light 15 is less than that of the second detection light 16. The second attenuator 34 is arranged between the fourth reflector 32 and the second polarization beam splitter 31, and the second attenuator 34 can adjust the intensity of the first detection light 15. For example, the ratio of the light emitted from the second attenuator 34 to the light incident on the second attenuator 34 is adjusted to be less than 1, such as 1 / 2, 1 / 3, 1 / 5, 1 / 9, etc., so as to adjust the intensity of the first detection light 15 to an intensity suitable for dark-field illumination. Similarly, the ratio of the light emitted from the first attenuator 25 to the light incident on the first attenuator 25 can be adjusted to be the same as the ratio of the light emitted from the second attenuator 34 to the light incident on the second attenuator 34.

[0037] The second detection light 16 can be used for bright-field illumination. At this time, in order to make the second detection light 16 perpendicularly incident on the workpiece 200, the fifth reflector 33 is arranged on the normal line of the workpiece 200 (the normal line passes through the center of the workpiece 200 and is perpendicular to the workpiece 200). The fifth reflector 33 is a prism. While reflecting the second detection light 16, it enables the light reflected by the workpiece 200 to pass through the prism and be incident on the sensor 40 also arranged on this normal line.

[0038] Please refer to Figure 2, in other embodiments, the second detection light 16 can also perform dark-field illumination. The fifth reflector 33 is a mirror to completely reflect the second detection light 16 to the workpiece 200 to be measured. The fifth reflector 33 is not arranged on the normal line of the workpiece 200 to be measured to prevent the fifth reflector 33 from blocking the light reflected by the workpiece 200 from entering the sensor 40. The second detection light 16 reflected by the fifth reflector 33 is incident obliquely on the workpiece 200 to be measured, and the incident angles of the first detection light 15 and the second detection light 16 on the workpiece 200 to be measured are different, so as to achieve dark-field illumination at different angles to obtain more information about the workpiece 200 to be measured.

[0039] Please refer to again Figure 1 , it can be understood that the first detection light 15 can perform bright-field illumination, while the second detection light 16 performs dark-field illumination, or the first detection light 15 performs dark-field illumination and the second detection light 16 performs bright-field illumination, or the first detection light 15 and the second detection light 16 achieve dark-field illumination at different angles. During bright-field illumination, the detection light 12 needs to be perpendicularly incident on the workpiece 200 to be measured, and its corresponding reflector also needs to be a prism. During dark-field illumination, the detection light 12 needs to be obliquely incident on the workpiece 200 to be measured, so its reflector is a mirror or a prism. In this embodiment, the first detection light 15 performs dark-field illumination and the second detection light 16 performs bright-field illumination.

[0040] Please refer to again Figure 1 , the first detection light 15 is obliquely incident on the workpiece 200 to be measured, and the second detection light 16 is perpendicularly incident on the workpiece 200 to be measured. In order to enable the workpiece 200 to obtain bright-field images and dark-field images simultaneously, the angle of the fourth reflector 32 needs to be adjusted so that the irradiation ranges of the first detection light 15 and the second detection light 16 on the workpiece 200 to be measured at least partially overlap, so as to be able to perform bright-field detection and dark-field detection on the part of the workpiece 200 corresponding to the overlapping part. The overlapping part can also cover the entire workpiece 200 to be measured, and the entire workpiece 200 to be measured can be detected through one-time illumination; or, the overlapping part can partially cover the workpiece 200 to be measured, and the workpiece 200 to be measured can be moved by the moving platform 70 so that the overlapping part sweeps across the entire workpiece 200 to be measured, thereby realizing the detection of the entire workpiece 200 to be measured.

[0041] Between the second detection light 16 and the fourth reflector 32, the detection device 100 is also provided with a second lens 62. The second lens 62 is used to converge the second detection light 16 to the fourth reflector 32. The divergent light reflected by the fourth reflector 32 is converged again by a third lens 63 arranged between the fourth reflector 32 and the workpiece 200 to be measured, so that the second detection light 16 is parallel and perpendicularly incident on the workpiece 200 to be measured, thereby improving the illumination effect and improving the imaging effect.

[0042] The light rays reflected by the device under test 200 (including the first detection light 15 and the second detection light 16) are converged by the third lens 63, pass through the fourth reflector 32, diverge and are incident on the fourth lens 64 disposed on the optical axis O of the sensor 40. After being converged by the fourth lens 64, they are emitted parallelly, and finally pass through the third reflector 24 and then are incident on the sensor 40.

[0043] Please refer to Figures 3 to 5 , the first detection light 15 incident on the sensor 40 interferes with the first reference light 13, and the first interference fringe T1 is formed in the detection image P. The second detection light 16 and the second reference light 14 interfere to form the second interference fringe T2. Since the first detection light 15 and the first reference light 13 are in the first state, while the second detection light 16 and the second reference light 14 are in the second state different from the first state, the first interference fringe T1 and the second interference fringe T2 are different, such as the spacing between the two fringes is different, the brightness of the two fringes is different, the color of the two fringes is different, etc. Thus, from the detection image P generated by the sensor 40, the bright-field image P1 (such as Figure 4 ) and the dark-field image P2 (such as Figure 5 ) are separated, realizing the bright-field detection and dark-field detection of the device under test 200 and improving the detection effect of the device under test 200.

[0044] The sensor 40 includes a time delay integration line array camera, and the long axis of the time delay integration line array camera is perpendicular to the first interference fringe T1 and the second interference fringe T2. The time delay integration line array camera has only one row of pixels, and the long axis direction is the arrangement direction of the pixels.

[0045] By moving the workpiece 200 to be measured along the vertical long axis direction by the motion platform 70, so that each time the sensor 40 takes a picture, a row of the detection image P can be obtained until the detection image P of the entire workpiece 200 to be measured is acquired. The first interference fringe T1 and the second interference fringe T2 are arranged along the column direction of the detection image P, so that the image information obtained by the sensor 40 each time includes a part of all the first interference fringes T1 and the second interference fringes T2, which helps to quickly distinguish the first interference fringe T1 and the second interference fringe T2. In other embodiments, the sensor 40 can also be an area array camera. The pixels of the area array camera include multiple rows, and the entire detection image P can be taken at one time. For a time delay integration line array camera, since there is only one row of pixels, the first reference light 13 and the second reference light 14 need to be both located in the plane where the optical axis O and the long axis of the sensor 40 are located, so that the time delay integration line array camera can receive the first reference light 13 and the second reference light 14. For the area array camera, the incident angle of the reference light 11 is not limited. The first reference light 13 and the second reference light 14 do not need to be both located in the plane where the optical axis O and the long axis of the sensor 40 are located and can also be received by the area array camera. It is only necessary that the angle between the first reference light 13 and the optical axis O of the sensor 40 is different from the angle between the second reference light 14 and the optical axis O of the sensor 40, so as to ensure that the interference angle between the first reference light 13 and the first detection light 15 is different from the interference angle between the second reference light 14 and the second detection light 16, which is beneficial to the distinction between the first interference fringe T1 and the second interference fringe T2.

[0046] In some embodiments, the first beam splitting component 20 can also split the reference light 11 into the first reference light 13 in the first state, the second reference light 14 in the second state, and the third reference light 11 in the third state, and the first state, the second state, and the third state are different from each other; the second beam splitting component 30 is also used to split the detection light 12 into the first detection light 15 in the first state, the second detection light 16 in the second state, and the third detection light 12 in the third state, and the incident angles of the first detection light 15, the second detection light 16, and the third detection light 12 on the workpiece 200 to be measured are different. For example, the first detection light 15 realizes bright field illumination, and the second detection light 16 and the third detection light 12 realize dark field illumination at different angles. In this way, more angles of illumination can be realized, and the information of the workpiece 200 to be measured obtained is more complete.

[0047] Please refer to Figure 1 and Figure 6 , in some embodiments, the detection method further includes:

[0048] 011: Transmit the reference light 11 and the detection light 12;

[0049] 012: Split the reference light 11 into the first reference light 13 in the first state and the second reference light 14 in the second state, and the first state and the second state are different;

[0050] 013: Divide the detection light 12 into a first detection light 15 in a first state and a second detection light 16 in a second state;

[0051] 014: Receive the first reference light 13 and the second reference light 14, and receive the first detection light 15 and the second detection light 16 reflected by the device under test 200 to generate a detection image P.

[0052] Specifically, please refer to Figures 3 to 5 , when detecting the device under test 200, first, the light emitter 10 emits the reference light 11 and the detection light 12. Then, the first beam splitting component 20 divides the reference light 11 into a first reference light 13 in a first state and a second reference light 14 in a second state, and makes the first reference light 13 and the second reference light 14 incident on the sensor 40. The second beam splitting component 30 divides the detection light 12 into a first detection light 15 in a first state and a second detection light 16 in a second state, and makes the first detection light 15 and the second detection light 16 incident on the sensor 40. Then, the sensor 40 receives the first reference light 13 and the second reference light 14, and receives the first detection light 15 and the second detection light 16 reflected by the device under test 200 to generate a detection image P. In the detection image P, the first reference light 13 and the first detection light 15 interfere to form a first interference fringe T1, and the second reference light 14 and the second detection light 16 interfere to form a second interference fringe T2. By the difference between the first interference fringe T1 and the second interference fringe T2, the first interference fringe T1 and the second interference fringe T2 in the detection image P are separated, so as to generate two images of the device under test 200 when irradiated at two different angles. Through the detection of the two images of the device under test 200, accurate detection of the device under test 200 is achieved.

[0053] In the description of this specification, the descriptions with reference to terms such as "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples" or "some examples", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiments or examples are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without conflict, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0054] Any process or method description, whether in a flowchart or otherwise described herein, can be understood to represent a module, segment, or portion of code including one or more executable instructions for implementing a specific logical function or process. The scope of the preferred embodiments of the present application includes additional implementations, where functions may be performed in a substantially simultaneous manner or in a reverse order according to the involved functions, rather than in the order shown or discussed. This should be understood by those skilled in the art to which the embodiments of the present application pertain.

[0055] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present application. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present application.

Claims

1. A detection device, characterized in that, Comprising: A light emitter for emitting a reference light and a detection light; A first beam splitting component for splitting the reference light into a first reference light in a first state and a second reference light in a second state, the first state and the second state being different, wherein the first state includes a first wavelength, the second state includes a second wavelength, the first wavelength and the second wavelength being different, or the first state includes a first polarization state, the second state includes a second polarization state, the first polarization state and the second polarization state being different; A second beam splitting component for splitting the detection light into a first detection light in the first state and a second detection light in the second state, the angles of incidence of the first detection light and the second detection light on the component under test being different; A sensor for receiving the first reference light and the second reference light, and receiving the first detection light and the second detection light reflected by the component under test to generate a detection image.

2. The detection device according to claim 1, wherein The detection device further includes a first beam splitter for splitting the laser light emitted by the light emitter into the reference light and the detection light; or, there are two light emitters, and the two light emitters respectively emit the reference light and the detection light.

3. The detection device according to claim 1, wherein The first beam splitting component includes a first polarization beam splitter, a first reflector, a second reflector and a third reflector. After the reference light enters the first polarization beam splitter, it is split into the first reference light in the first polarization state and the second reference light in the second polarization state. The first reflector and the third reflector cooperate to adjust the angle of incidence of the first reference light on the sensor; The second reflector and the third reflector cooperate to adjust the angle of incidence of the second reference light on the sensor.

4. The detection device according to claim 3, wherein The first beam splitting component further includes a first attenuator disposed between the first reflector and the first polarization beam splitter to adjust the intensity of the first reference light.

5. The detection device according to claim 1, characterized in that The second beam splitting component includes a second polarization beam splitter, a fourth reflector and a fifth reflector. After the detection light enters the second polarization beam splitter, it is split into the first detection light in the first polarization state and the second detection light in the second polarization state. The first detection light is reflected by the fourth reflector and then irradiates the component under test, and the second detection light is reflected by the fifth reflector and then irradiates the component under test.

6. The detection device according to claim 5, characterized in that, The first detection light reflected by the fourth reflector is incident on the component under test obliquely or perpendicularly, and the second detection light reflected by the fifth reflector is incident on the component under test obliquely.

7. The detection device according to claim 5, characterized in that The second beam splitting component further includes a second attenuator disposed between the second polarization beam splitter and the fourth reflector to adjust the intensity of the first detection light.

8. The detection device according to claim 7, characterized in that, The intensity of the first detection light is less than the intensity of the second detection light.

9. The detection device according to claim 5, wherein, The irradiation ranges of the first detection light and the second detection light on the component under test overlap.

10. The detection device according to claim 1, characterized in that, The ratio of the intensity of the detection light to the intensity of the reference light is 1:

1.

11. The detection device according to claim 1, characterized in that, The sensor includes a time delay integration line array camera, and the long axis of the time delay integration line array camera is perpendicular to the first interference fringe formed by the first reference light and the first detection light in the detection image, and the second interference fringe formed by the second reference light and the second detection light in the detection image.

12. The detection device according to claim 11, wherein, The component to be measured is arranged on a moving platform, and the moving direction of the moving platform is perpendicular to the long axis direction.

13. The detection device according to claim 1, characterized in that, The first beam splitting component is further configured to split the reference light into a first reference light in a first state, a second reference light in a second state, and a third reference light in a third state, where the first state, the second state, and the third state are different from each other; the second beam splitting component is further configured to split the detection light into a first detection light in a first state, a second detection light in a second state, and a third detection light in a third state, and the incident angles of the first detection light, the second detection light, and the third detection light on the component to be measured are different.

14. A detection method, characterized in that, Comprising: Emitting reference light and detection light; Splitting the reference light into a first reference light in a first state and a second reference light in a second state, where the first state and the second state are different; Splitting the detection light into a first detection light in a first state and a second detection light in a second state; Receiving the first reference light and the second reference light, and receiving the first detection light and the second detection light reflected by the component to be measured to generate a detection image.

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