A magnetic force detection device and a magnetic force detection method for a target material magnetic core used in vacuum evaporation

Abstract

The application provides a magnetic force detection device and method for a target material magnetic core used in vacuum evaporation, which comprises: a support, a magnetic force plate is arranged on the top of the support; a magnetic core detection seat, which comprises: a connecting plate connected with the magnetic force plate on the support; a plurality of supports are arranged at intervals on the connecting plate, each support comprises an upper support and a lower support; a detection rod is fixedly arranged on the upper support, a plurality of holes are arranged at intervals on the detection rod; and a to-be-detected magnetic core in the target material is arranged on the lower support. In the embodiment of the application, the upper support in the support is used for positioning the detection rod, and the lower support is used for positioning the to-be-detected magnetic core in the target material. Because the magnetic field of the magnetic core is divergent from the middle position to both sides, the middle position is the strongest, and the plurality of holes can be aligned with the middle position of the to-be-detected magnetic core so as to measure the strongest magnetic field part in the to-be-detected magnetic core.

Description

Technical Field

[0001] This invention relates to the field of thin film vacuum evaporation technology, and specifically to a magnetic force detection device and method for a target core used in vacuum evaporation. Background Technology

[0002] Vacuum deposition refers to the process of forming a metal thin film on the surface of a thin film in a vacuum environment. It includes various deposition methods, such as vacuum deposition and magnetron sputtering. Taking magnetron sputtering as an example, the magnetron sputtering equipment contains a target material with the metal to be deposited onto the thin film. The target material contains a magnetic core. In a vacuum environment, an inert gas is introduced into the magnetron sputtering equipment. The inert gas is treated to become charged ions, which are accelerated towards the target material under the magnetic force of the magnetic core. The metal on the target surface absorbs energy, and the surface atoms escape from the target surface, depositing onto the thin film under vacuum. However, the magnetic force on different parts of the existing target material is inconsistent, causing the atoms deposited on the thin film to experience uneven forces. Some atoms may receive excessive energy, causing the thin film to break down, resulting in burn-through and affecting product quality. Summary of the Invention

[0003] In view of this, the purpose of this invention is to provide a magnetic force detection device and a magnetic force detection method for a target core used in vacuum evaporation, so as to solve the technical problem in the prior art where the magnetic force of different parts of the target is not uniform, resulting in uneven forces on the atoms deposited on the thin film, leading to excessive local energy and breaking down the thin film.

[0004] To achieve the above objectives, in a first aspect, embodiments of the present invention provide a magnetic force detection device for a target core used in vacuum evaporation, comprising:

[0005] A magnetic core testing base, comprising: a plurality of supports spaced apart on the same horizontal line, each support comprising an upper support and a lower support;

[0006] The detection rod is fixedly mounted on the upper support, and the detection rod is provided with a number of holes at intervals.

[0007] The magnetic core to be tested inside the target material is mounted on the lower support.

[0008] In some possible implementations, a support is also included, the top of which is provided with a magnetic plate;

[0009] The magnetic core testing base further includes: a connecting plate, which is connected to a magnetic plate on the bracket; and a plurality of supports are fixed at intervals on the connecting plate.

[0010] The upper support is a high-low stepped structure, and the side surface of the high step part of the high-low stepped structure is used for positioning the detection rod, so that the holes on the detection rod are aligned with the middle position of the width direction of the to-be-detected magnetic core.

[0011] In some possible embodiments, further comprising: a cooling pipe arranged on the lower support and below the to-be-detected magnetic core, and the cooling pipe is provided with a support for supporting the to-be-detected magnetic core;

[0012] The cooling pipe is movably connected to the to-be-detected magnetic core through an adjusting member, and the cooling pipe is provided with a condensing substance.

[0013] In some possible embodiments, a fitting step is arranged between the upper support and the lower support, the width of the fitting step is smaller than the width of the upper support and the lower support, and the fitting step is used for fitting the cooling pipe.

[0014] In some possible embodiments, the magnetic force detection device for the target magnetic core for vacuum evaporation further comprises a detection mechanism, and the detection mechanism comprises a magnetic force display panel and a detection probe connected to the magnetic force display panel.

[0015] The magnetic force display panel is arranged on the magnetic force panel.

[0016] The detection probe is arranged in the hole.

[0017] In some possible embodiments, the distance between the detection probe and the surface of the to-be-detected magnetic core is the same as the thickness of the target material.

[0018] The interval between any two adjacent holes on the detection rod is 40-50 cm.

[0019] In some possible embodiments, the magnetic force display panel is provided with a storage medium for storing the detection positions of the to-be-detected magnetic core detected by the detection probe and the magnetic force corresponding to each detection position.

[0020] The magnetic force corresponding to each detection position is displayed on the magnetic force display panel.

[0021] In some possible embodiments, the magnetic force display panel is further provided with an alarm, and when the detection probe detects that the magnetic force is abnormal, the alarm is used to issue an alarm to adjust the detection position of the detection probe.

[0022] In a second aspect, the present application provides a magnetic force detection method for a target magnetic core for vacuum evaporation, comprising:

[0023] Place the detection rod on the upper support of the magnetic core detection seat, and place the to-be-detected magnetic core on the lower support of the magnetic core detection seat;

[0024] Place the magnetic force display panel of the detection mechanism on the magnetic force panel of the support, and connect the detection probe of the detection mechanism with the magnetic force display panel through a wire;

[0025] Place the detection probe in the holes of the detection rod in sequence, and the needle tip of the detection probe is aligned with the middle position of the to-be-detected magnetic core in the width direction;

[0026] Display the magnetic force of the to-be-detected magnetic core detected by the detection probe in each hole in sequence through the magnetic force display panel.

[0027] In some possible implementation manners, the magnetic force detection device further comprises a cooling pipe arranged on the lower support and located below the to-be-detected magnetic core, a support member is arranged on the cooling pipe and used for supporting the to-be-detected magnetic core, the cooling pipe is movably connected with the to-be-detected magnetic core through an adjusting member, and a condensing substance is arranged in the cooling pipe and used for cooling the to-be-detected magnetic core; the condensing substance is cooling water; and the method further comprises the following steps of:

[0028] A condensing substance is arranged in the cooling pipe below the to-be-detected magnetic core and used for cooling the to-be-detected magnetic core;

[0029] Controlling the cooling water to enter from one end of the cooling pipe and flow out from the other end of the cooling pipe.

[0030] The above technical solution has the following beneficial technical effects:

[0031] The magnetic force detection device and the magnetic force detection method for the target material magnetic core in vacuum evaporation provided by the embodiment of the application comprise a support, a magnetic force panel is arranged on the top of the support, a magnetic core detection seat, the magnetic core detection seat comprises a connecting plate, the connecting plate is connected with the magnetic force panel on the support, a plurality of supports are arranged on the connecting plate at intervals, each support comprises an upper support and a lower support, a detection rod is fixedly arranged on the upper support, a plurality of holes are arranged on the detection rod at intervals, and a to-be-detected magnetic core in a target material is arranged on the lower support. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0033] Figure 1 The overall structure of a magnetic force detection device for a target material magnetic core for vacuum evaporation according to an embodiment of the present application is shown in a perspective view.

[0034] Figure 2 The structure of a magnetic core detection seat according to an embodiment of the present application is shown in a schematic view.

[0035] Figure 3 The overall structure of a magnetic force detection device for a target material magnetic core for vacuum evaporation according to an embodiment of the present application is shown in a front view.

[0036] Figure 4 The overall structure of a magnetic force detection device for a target material magnetic core for vacuum evaporation according to an embodiment of the present application is shown in a rear view.

[0037] Figure 5 The overall structure of a magnetic force detection device for a target material magnetic core for vacuum evaporation according to an embodiment of the present application is shown in a side view.

[0038] Figure 6 The structure of a detection rod according to an embodiment of the present application is shown in a schematic view.

[0039] Figure 7 The structure of a detection rod according to an embodiment of the present application is shown in a partial enlarged view.

[0040] Figure 8 The structure of a probe according to an embodiment of the present application is shown in a schematic view.

[0041] Figure 9 The structure of a cooling pipe according to an embodiment of the present application is shown in a partial cross-sectional view.

[0042] Figure 10 The partial structure of a magnetic force detection device for a target material magnetic core for vacuum evaporation according to an embodiment of the present application is shown in a cross-sectional view.

[0043] Figure 11 The flow chart of a magnetic force detection method for a target material magnetic core for vacuum evaporation according to an embodiment of the present application is shown.

[0044] Explanation of reference numerals:

[0045] 1, support; 11, magnetic force plate

[0046] 2, magnetic core detection seat; 21, connecting plate; 22, support; 22a, upper support; 22b, lower support; 22c, let go of the step;

[0047] 3, detection rod; 31, hole;

[0048] 4, to be measured magnetic core;

[0049] 5, detection mechanism; 51, magnetic force display panel; 52, detection probe;

[0050] 6, cooling pipe; 61, support; 62, adjusting piece. DETAILED DESCRIPTION

[0051] The features and exemplary embodiments of various aspects of the present application will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, it will be apparent to one of ordinary skill in the art that the present application can be practiced without some of these specific details. The description of the embodiments is merely intended to provide a better understanding of the present application by showing examples of the present application. In the drawings and the following description, at least some well-known structures and techniques are not shown in order to avoid unnecessary obscuring of the present application; and, for clarity, the dimensions of some structures can be exaggerated. In addition, the features, structures or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0052] As Figures 1 to 7 shown, the magnetic force detection device comprises a magnetic core detection seat 2 and a detection rod 3 arranged on the magnetic core detection seat 2, wherein the magnetic core detection seat 2 comprises a plurality of supports 22 arranged at intervals on the same horizontal line, each support 22 comprising an upper support 22a and a lower support 22b; the detection rod 3 is fixedly arranged on the upper support 22a, and a plurality of holes 31 are arranged at intervals on the detection rod 3; a to-be-measured magnetic core 4 inside the target material is arranged on the lower support 22b. Specifically, since the to-be-measured magnetic core 4 is placed inside the target material, in order to ensure that the surface of the target material obtains the maximum magnetic force, so that after the inert gas ions obtain energy to bombard the surface of the target material, the metal ions on the surface of the target material can have the same energy to accumulate on the film. In the embodiment of the present application, the upper support 22a in the support 22 positions the detection rod 3, and the lower support 22b positions the to-be-measured magnetic core 4 inside the target material, because the magnetic field of the magnetic core is divergent upward and left and right from the middle position of the width direction of the to-be-measured magnetic core 4, and the middle position is the strongest, the plurality of holes 31 in the embodiment of the present application can be aligned with the middle position of the to-be-measured magnetic core 4 to measure the strongest magnetic field part in the to-be-measured magnetic core 4.

[0053] As Figure 2As shown in the drawings, in some embodiments, the magnetic force detection device can further comprise a bracket 1, a magnetic force plate 11 is arranged on the top of the bracket 1, and the magnetic core detection seat 2 can further comprise a connecting plate 21, and a plurality of supports 22 are arranged at intervals on the connecting plate 21; the upper support 22a is in a high-low step structure. The bracket 1 is arranged in the embodiment of the present application, and the magnetic core detection seat 2 is arranged on the top of the bracket 1, which not only facilitates the magnetic force test of the tester, but also can fix a plurality of supports 22 on the connecting plate 21 at intervals, so that the shaking of the support 22 in the test process can be avoided, and the test precision is affected; in addition, the upper support 22a is arranged in a high-low step shape, so that the side surface of the high step can play a positioning role on the detection rod 3, and ensure that a plurality of holes 31 arranged at intervals on the detection rod 3 are aligned with the center (i.e. the middle position in the width direction) of the to-be-tested magnetic core 4.

[0054] As shown in the drawings, Figure 6 In some embodiments, in order to make the measurement more accurate, the interval between any two adjacent holes 31 on the detection rod 3 in the embodiment of the present application is 40-50 cm, so as to accurately measure the magnetic force of each part of the to-be-tested magnetic core 4, and ensure that the magnetic forces of each part of the target material are uniform.

[0055] As shown in the drawings, Figure 1 , Figure 4 , Figure 5 and Figure 8 In some embodiments, the detection mechanism 5 further comprises a magnetic force display panel 51 and a detection probe 52 connected with the magnetic force display panel 51; the magnetic force display panel 51 is arranged on the magnetic force plate 11; and the detection probe 52 is arranged in the hole 31. Specifically, as shown in the drawings, Figure 6 and Figure 7 When measuring, the detection probe 52 is placed in the hole 31 on the detection rod 3, and the needle tip of the detection probe 52 is aligned with the to-be-tested magnetic core 4, so as to measure the strongest magnetic field part in the to-be-tested magnetic core 4; in addition, the magnetic force of the magnetic force plate 11 can directly attract the magnetic force display panel 51 to the magnetic force plate 11, so that the magnetic force display panel 51 can be kept stable without additional connecting members. The detection mechanism 5 in the embodiment of the present application can be a gauss meter or a tesla meter or other detection devices.

[0056] In the embodiment, the distance between the detection probe 52 and the surface of the to-be-tested magnetic core 4 is the same as the thickness of the target material. Specifically, the distance between the detection probe 52 and the surface of the to-be-tested magnetic core 4 is equivalent to the actual thickness of the target material, and the tip of the detection probe 52 just contacts the surface of the outer diameter of the target material. That is, in the embodiment of the present application, the distance between the detection probe 52 and the middle of the to-be-tested magnetic core 4 is determined according to the thickness of the target material, and the distance between the detection probe 52 and the middle of the to-be-tested magnetic core 4 is as far as the thickness of the target material is set, so that the maximum power can be given to the metal atoms on the target material, and the thin film evaporation quality is improved.

[0057] In some embodiments, in order to ensure that the distance between the detection probe 52 and the surface of the magnetic core 4 to be detected is equivalent to the actual thickness of the target material, a gasket can be arranged on the lower support 22b to adjust the distance between the detection probe 3 and the magnetic core 4 to be detected. Optionally, in some embodiments, the support 22 can also be an adjustable distance support, that is, the distance between the upper support 22a and the lower support 22b can be adjusted arbitrarily to adapt to target materials of different thicknesses.

[0058] In some embodiments, the magnetic force display panel 51 is provided with a storage medium for storing the detection positions of the magnetic core 4 to be detected detected by the detection probe 52 and the magnetic force corresponding to each detection position, and the magnetic force corresponding to each detection position will be displayed on the magnetic force display panel 51. In order to intuitively display the magnetic force detection data and record and analyze the magnetic force detection data.

[0059] In some embodiments, the magnetic force display panel 51 is also provided with an alarm, which is used to issue an alarm when the detection probe 52 detects that the magnetic force is abnormal, so as to adjust the relative detection position of the detection probe 52 on the magnetic core 4 to be detected. For example, when the detection probe 52 detects a certain position, if the detected magnetic force is abnormal (for example, the magnetic force is too large or too small), the relative position of the detection probe 52 and the magnetic core 4 to be detected can be adjusted to re-detect, so as to ensure that the magnetic force of each position of the magnetic core 4 to be detected is equal.

[0060] In some embodiments, since metal can be affected by the magnetic core, measurement inaccuracy is avoided, and the detection probe 3 and the support 22 in the embodiment of the present application are both non-metal materials, so as to improve the accuracy of the magnetic force measurement.

[0061] In some embodiments, the detection probe 3 and the upper support 22a are fixedly connected through screws, so as to avoid that the detection probe 3 falls off during the measurement and damages the magnetic force detection device.

[0062] As Figure 1 , Figure 3 , Figure 4 , Figure 5 , Figure 9 and Figure 10As shown in the drawings, in some embodiments, the magnetic force detection device further comprises: a cooling pipe 6 arranged on the lower support 22b and below the to-be-detected magnetic core 4, a support 61 is arranged on the cooling pipe 6, and the to-be-detected magnetic core 4 is supported by the support 61, so that the cooling pipe 6 and the to-be-detected magnetic core 4 can be supported when being installed into or pulled out of the target material, the action of the cooling pipe 6 and the to-be-detected magnetic core 4 is avoided, and the cooling pipe 6 and the to-be-detected magnetic core 4 are movably connected through an adjusting part 62, which can be an adjusting screw assembly, the distance between the cooling pipe 6 and the to-be-detected magnetic core 4 is adjusted through the adjusting screw assembly, that is, when the cooling pipe 6 and the to-be-detected magnetic core 4 are installed into the target material, the distance between the to-be-detected magnetic core 4 and the target material is adjusted, so that the to-be-detected magnetic core 4 can have the maximum magnetic force based on the target material, and optionally, the support 61 can be an insulating object such as a rubber ring or a plastic ring, and a condensing substance is arranged in the cooling pipe 6. Specifically, since the to-be-detected magnetic core 4 is installed inside the target material, after a cooling pipe 6 is fixed below the to-be-detected magnetic core, a cooling pipe 6 is arranged inside the target material. Because the target material will heat up after being bombarded by inert gas ions, the heat will be transferred to the to-be-detected magnetic core 4, thereby affecting the performance of the to-be-detected magnetic core 4. Therefore, the condensing substance in the cooling pipe 6 can cool the target material and the to-be-detected magnetic core 4 to improve the detection performance. Of course, in some embodiments, the condensing substance can also be cooling water or low-temperature gas, and the cooling water is controlled to flow into one end of the cooling pipe 6 and flow out from the other end. The present embodiment can cool the target material and the to-be-detected magnetic core 4 through the condensing substance in the cooling pipe 6 to improve the detection performance.

[0063] As shown in the drawings, Figure 2 In some embodiments, since the width of the cooling pipe 6 is different from the width of the to-be-detected magnetic core 4 and is often larger than the width of the to-be-detected magnetic core 4, in order not to affect the position of the to-be-detected magnetic core 4 on the lower support 22b and to ensure that the hole 31 of the detection rod 3 is aligned with the middle position of the to-be-detected magnetic core 4, in the present embodiment, a let-go step 22c is arranged between the upper support 22a and the lower support 22b, the width of the let-go step 22c is smaller than the width of the upper support 22a and the lower support 22b, that is, the support 22 is in the shape of E. The present embodiment can let go of the cooling pipe 6 by arranging the let-go step 22c on the support 22, so as to avoid affecting the position of the to-be-detected magnetic core 4 on the lower support 22b and to ensure that the hole 31 of the detection rod 3 is aligned with the middle position of the to-be-detected magnetic core 4.

[0064] As shown in the drawings, Figure 11 The present embodiment further provides a magnetic force detection method for a target material magnetic core used in vacuum evaporation, which comprises the following steps:

[0065] S1: Place the detection rod 3 on the upper support 22a of the magnetic core detection seat 2, and place the to-be-detected magnetic core 4 on the lower support 22b of the magnetic core detection seat 2;

[0066] S2: Place the magnetic force display panel 51 of the detection mechanism 5 on the magnetic force panel 11 of the support 1, and connect the detection probe 52 of the detection mechanism 5 to the magnetic force display panel 51 through a wire;

[0067] S3: Place the detection probe 52 in the plurality of holes 31 of the detection rod 3 in sequence, and the needle tip of the detection probe 52 is aligned with the center position (i.e., the middle position in the width direction) of the to-be-detected magnetic core 4;

[0068] S4: The magnetic force display panel 51 sequentially displays the magnetic force of the to-be-detected magnetic core 4 detected by the detection probe 52 in each hole 31.

[0069] In some embodiments, the method further comprises:

[0070] A condensing substance is arranged in the cooling pipe 6 below the to-be-detected magnetic core 4 for cooling the to-be-detected magnetic core 4; the condensing substance is cooling water, which enters from one end of the cooling pipe 6 and flows out from the other end of the cooling pipe 6.

[0071] Specifically, the magnetic force display panel 51 of the detection mechanism 5 is placed on the magnetic force panel 11 of the support 1, the detection probe 52 is connected to the magnetic force display panel 51 through a wire, and then the detection probe 52 is placed in each hole 31 of the detection rod 3 in sequence, the magnetic force of each position on the to-be-detected magnetic core 4 inside the target material is measured in sequence, and the magnetic force of each detected position is displayed on the magnetic force display panel 51; a storage medium inside the magnetic force display panel 51 stores each detection position and the corresponding magnetic force of each detection position; when an abnormality occurs in a certain detection position, an alarm on the magnetic force display panel 51 will issue an alarm to adjust the relative detection position of the detection probe 52 and the to-be-detected magnetic core 4, and re-measure to ensure that the magnetic force of each position is uniform.

[0072] The beneficial effects of the embodiments of the present application are as follows:

[0073] In the embodiments of the present application, the upper support 22a in the support 22 positions the detection rod 3, and the lower support 22b positions the to-be-detected magnetic core 4 inside the target material; because the magnetic field of the magnetic core diverges from the middle position to both sides, the middle position is the strongest, and the embodiments of the present application can align the plurality of holes 31 with the middle position of the to-be-detected magnetic core 4 to measure the strongest magnetic field position in the to-be-detected magnetic core 4;

[0074] The upper support 22a is arranged as a high-low stepped shape, so that the side of the high step can just play a positioning role on the detection rod 3, and ensure that the several holes 31 arranged at intervals on the detection rod 3 are aligned with the center of the to-be-detected magnetic core 4;

[0075] The interval between any two adjacent holes 31 on the detection rod 3 in the embodiment of the application is 40-50 cm, so as to accurately measure the magnetic force of each part of the to-be-detected magnetic core 4 and ensure that the magnetic forces of each part of the target material are uniform;

[0076] The embodiment of the application can directly attract the magnetic force display panel 51 to the magnetic force plate 11 through the magnetic force of the magnetic force plate 11, without the need of an additional support to fix the magnetic force display panel 51 and keep it stable;

[0077] In order to ensure that the distance between the detection probe 52 and the surface of the to-be-detected magnetic core 4 is equivalent to the actual thickness of the target material, a gasket can be arranged on the lower support 22b to adjust the distance between the to-be-detected magnetic core 4 and the detection rod 3;

[0078] The detection rod 3 and the support 22 in the embodiment of the application are both non-metal materials, so as to improve the accuracy of the magnetic force measurement;

[0079] The detection rod 3 and the upper support 22a in the embodiment of the application are fixedly connected through screws, so as to avoid falling of the detection rod 3 and damage to the magnetic force detection device during the measurement process;

[0080] In the embodiment of the application, a cooling pipe 6 is fixed below the to-be-detected magnetic core, and the condensed substance in the cooling pipe 6 can cool the target material and the to-be-detected magnetic core 4, so as to improve the detection performance;

[0081] In the embodiment of the application, a displacement step 22c is arranged on the support 22, which just displaces the cooling pipe 6, so as to avoid affecting the position of the to-be-detected magnetic core 4 on the lower support 22b, and ensure that the holes 31 of the detection rod 3 are just aligned with the middle position of the to-be-detected magnetic core 4.

[0082] In the description of the embodiment of the application, it should be noted that the directions or position relationships of the terms "up, down, inner and outer" and the like are based on the directions or position relationships shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the application. In addition, the terms "first, second or third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0083] Unless otherwise defined, the terms "mounting, connecting, connection" in the embodiments of the present application should be interpreted in a broad sense, for example: it can be fixed connection, detachable connection or integral connection; it can also be mechanical connection, electrical connection or direct connection, it can also be indirectly connected through intermediate medium, or it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0084] Although the present application has been described with reference to the preferred embodiments, various modifications can be made to the application and equivalents thereof without departing from the scope of the application. In particular, the technical features mentioned in each embodiment can be combined in any way as long as there is no structural conflict. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A magnetic force detection device for a target core used in vacuum evaporation, characterized in that, It includes: The magnetic core detection seat (2) includes: a plurality of supports (22) arranged at intervals on the same horizontal line, each support (22) includes an upper support (22a) and a lower support (22b); A detection rod (3) is fixedly arranged on the upper support (22a), and a plurality of holes (31) are arranged at intervals on the detection rod (3); The target material inside the measured magnetic core (4) is arranged on the lower support (22b); It also includes: The bracket (1) is provided with a magnetic plate (11) on the top; The magnetic core detection seat (2) further includes: a connecting plate (21) connected with the magnetic plate (11) on the bracket (1); The plurality of supports (22) are fixedly arranged on the connecting plate (21); The upper support (22a) is a high-low step structure, the side surface of the high step part of the high-low step is used for positioning the detection rod (3), so that the plurality of holes (31) on the detection rod (3) are aligned with the middle position of the width direction of the measured magnetic core (4); The distance between the detection probe (52) and the surface of the measured magnetic core (4) is the same as the thickness of the target material; It also includes a detection mechanism (5), which includes a magnetic force display panel (51) and a detection probe (52) connected with the magnetic force display panel (51); The magnetic force display panel (51) is arranged on the magnetic plate (11), and the detection probe (52) is arranged in the hole (31). It also includes: A cooling pipe (6) is arranged on the lower support (22b) and below the measured magnetic core (4), and a supporting piece (61) is arranged on the cooling pipe (6) for supporting the measured magnetic core (4); 2. The magnetic force detection device for a target magnetic core for vacuum evaporation according to claim 1, characterized by The cooling pipe (6) and the measured magnetic core (4) are movably connected through an adjusting piece (62); The cooling pipe (6) is provided with a condensate. A displacement step (22c) is arranged between the upper support (22a) and the lower support (22b), the width of the displacement step (22c) is smaller than the width of the upper support (22a) and the lower support (22b), and the displacement step (22c) is used for displacement of the cooling pipe (6).

4. The magnetic force detection device for the target material magnetic core of the vacuum evaporation according to claim 1, wherein 3. The magnetic force detection device for a target magnetic core of a vacuum deposition apparatus according to claim 2, characterized by The interval between any two adjacent holes (31) on the detection rod (3) is 40-50 cm. The magnetic force display panel (51) is provided with a storage medium, which is used for storing the detection position of the measured magnetic core (4) detected by the detection probe (52) and the corresponding magnetic force of each detection position; The magnetic force display panel (51) displays the corresponding magnetic force of each detection position.

5. The magnetic force detecting apparatus for a target magnetic core of a vacuum evaporation device according to claim 1, wherein The magnetic force display panel (51) is also provided with an alarm, which is used for issuing an alarm when the detection probe (52) detects that the magnetic force is abnormal, so as to adjust the detection position of the detection probe (52). ​ 6. The magnetic force detecting apparatus for a target magnetic core of a vacuum evaporation device according to claim 5, wherein ​ 7. A method of detecting a magnetic force of a magnetic core of a target material for vacuum evaporation, characterized by, The method is based on the magnetic force detection device according to any one of claims 1-6, and the magnetic force detection method comprises: placing the detection rod (3) on the upper support (22a) of the magnetic core detection seat (2), and placing the to-be-detected magnetic core (4) on the lower support (22b) of the magnetic core detection seat (2); placing the magnetic force display panel (51) of the detection mechanism (5) on the magnetic force plate (11) of the support (1), and connecting the detection probe (52) of the detection mechanism (5) with the magnetic force display panel (51) through a wire; placing the detection probe (52) in the holes (31) of the detection rod (3) in sequence, and aligning the needle tip of the detection probe (52) with the middle position of the to-be-detected magnetic core (4) in the width direction; displaying the magnetic force of the to-be-detected magnetic core (4) detected by the detection probe (52) in each hole (31) in sequence through the magnetic force display panel (51).

8. The method according to claim 7, wherein the method is characterized by: The magnetic force detection device further comprises a cooling pipe (6) arranged on the lower support (22b) and below the to-be-detected magnetic core (4), the cooling pipe (6) is provided with a support (61) for supporting the to-be-detected magnetic core (4), the cooling pipe (6) is movably connected with the to-be-detected magnetic core (4) through an adjusting member (62), and a condensed substance is arranged in the cooling pipe (6) for cooling the to-be-detected magnetic core (4), the condensed substance being cooling water; and the method further comprises: controlling the cooling water to enter from one end of the cooling pipe (6) and flow out from the other end of the cooling pipe (6).

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