Slip member state determination device, slip member state determination method, and laser processing system

Abstract

A slide state determination device determines a state of a plurality of slides that support a workpiece processed by a laser processing machine via a support surface formed by apexes of the plurality of protruding portions, the slide state determination device including a photographing unit capable of photographing at least a portion of a slide stage on which the plurality of slides are disposed, and a state determination unit that determines a state of the slides based on image information obtained by the photographing unit photographing the slide stage, the state determination unit performing first determination processing that determines a state of the slides based on the image information obtained by the photographing unit photographing the slide stage before the workpiece is carried into the slide stage, and second determination processing that determines a state of the slides based on the image information obtained by the photographing unit photographing the slide stage after the workpiece is carried out of the laser processing machine and before a product processed from the workpiece is carried out of the slide stage.

Description

Technical Field

[0001] The present invention relates to a slider state determination device for determining the state of a slider, a slider state determination method, and a laser processing system. Background Art

[0002] In laser processing, a skid table is used, which is provided with a plurality of skids that support a workpiece (a component to be processed) in a planar manner at multiple points of contact. A skid is a workpiece support member that has a structure that allows the forks of a forklift to enter and lift the workpiece. The skid table that supports the workpiece is mounted on a processing pallet and is carried in and out of the laser processing machine together with the processing pallet. In addition, as examples of defects that may occur on the skid table, various processing defects are known, such as the accumulation or welding of molten metal such as spatter generated by laser processing onto the skids, welding of the workpiece or scrap to the skids, poor removal of scrap, damage to the skids by the laser beam, and damage to the product or equipment.

[0003] To prevent such adverse conditions, a sliding member evaluation device for evaluating the condition of a sliding member has been disclosed (see, for example, Patent Document 1). This sliding member evaluation device uses a detection device composed of a light sensor and a linear camera to detect the lateral (longitudinal) condition of the sliding member and changes in its thickness (short-lateral) and determines the difference between the actual detected condition and thickness and a target value. Maintenance such as cleaning or replacement of the sliding member is then performed based on the determination results.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: German Patent Application Publication No. 102017210182 Summary of the Invention

[0007] Problems to be solved by the invention

[0008] However, in the conventional slider evaluation device disclosed in Patent Document 1, while the detection device can detect changes in the slider's longitudinal condition and thickness, it suffers from a structural problem: it cannot detect subtle changes such as spatter accumulated between the slider's multiple protrusions, weld dross, defects in the protrusions themselves, or weld adhesion between the protrusions and the workpiece. Furthermore, if these subtle changes are detected, it cannot be concluded that the slider is in good condition, significantly increasing the likelihood that the aforementioned adverse conditions will occur in the near future.

[0009] Furthermore, in order to prevent adverse conditions as much as possible, even if the condition of the slider is confirmed to be good before the laser processing begins, the time required for one process becomes longer, such as in the case of thick plate processing or multi-sheet processing. Therefore, the condition of the slider sometimes changes significantly during the processing. In such cases, adverse conditions are sometimes discovered only after the processing. If the processed product is still unloaded, the unloading mechanism interferes with the accumulated material, and sometimes the product itself is wasted as a defective product. In addition, when a forklift is trying to remove a workpiece supported by a slider, there are cases where the fork cannot enter the slider due to the accumulated material, or the workpiece and the slider are welded together, making it impossible to remove the workpiece. Therefore, the need to more carefully and accurately identify and grasp the condition of the slider during laser processing increases.

[0010] Means for solving problems

[0011] The sliding member state judgment device of the present invention judges the state of multiple sliding members that support the workpiece processed by the laser processing machine through a support surface formed by the vertices of multiple protrusions. The sliding member state judgment device is characterized in that it has: a shooting unit, which is capable of shooting at least a portion of the sliding member table on which the multiple sliding members are provided; and a state judgment unit, which judges the state of the sliding member based on the image information obtained by the shooting unit shooting the sliding member table, and the state judgment unit performs: a first judgment process, before the workpiece is moved into the sliding member table, judging the state of the sliding member based on the image information obtained by the shooting unit shooting the sliding member table; and a second judgment process, after the workpiece is moved out of the laser processing machine, before the product obtained by processing the workpiece is moved out of the sliding member table, judging the state of the sliding member based on the image information obtained by the shooting unit shooting the sliding member table.

[0012] In one embodiment of the present invention, before the workpiece is moved into the sliding member table, the photographing unit photographs the sliding member table from a position above the supporting surface formed by the vertices of the multiple protrusions formed on the multiple sliding members, and outputs first image information. When the processed workpiece is supported by the sliding member table, the photographing unit photographs the sliding member table from a position below the supporting surface, and outputs second image information.

[0013] In another embodiment of the present invention, the present invention further includes a backlight that irradiates light toward the slider stage from a direction different from the imaging direction of the imaging unit.

[0014] In yet another embodiment of the present invention, the state determination unit stores a reference image and determines the state of the sliding member by performing an image comparison between the image information and the reference image.

[0015] In another embodiment of the present invention, the state determination unit extracts a contour line including a plurality of protrusions of the slider from the image information, and determines the state of the slider by comparing the extracted contour line with a pre-stored reference shape.

[0016] In another embodiment of the present invention, the state determination unit extracts a contour line of the slider including a plurality of protrusions from the image information, determines a route connecting vertices of the plurality of protrusions, and determines the state of the slider based on the route and the contour line.

[0017] In still another embodiment of the present invention, the state determination unit determines the state of the slider based on a distance between a valley portion appearing around the protrusion of the contour line and the route in a height direction of the slider.

[0018] In yet another embodiment of the present invention, the state determination unit determines the state of the slider based on an area of ​​a region surrounded by the contour line and the route.

[0019] In still another embodiment of the present invention, the state determination unit determines the state of the slider based on a thickness of the slider based on the contour line.

[0020] In still another embodiment of the present invention, the device further comprises: a notification unit configured to notify a predetermined warning or alarm based on the determination result of the state determination unit.

[0021] In another embodiment of the present invention, the state determination unit further comprises: a learning unit having a learning model, which is obtained by learning the relationship between the plurality of image information and the states of the sliding parts classified into a plurality of categories; and a fault prediction unit, which determines the state of the sliding part based on the learning model, and determines the necessity and type of warning or alarm, and whether processing can be continued based on the state of the sliding part, and the notification unit comprises: a display unit, which displays the warning or alarm in a visually recognizable manner based on the judgment result of the fault prediction unit.

[0022] The laser processing system of the present invention is characterized in that it comprises: a laser processing machine that processes a workpiece using a laser beam; a slide table that is provided with a plurality of slides that support the workpiece via a support surface formed by the vertices of a plurality of protrusions; a processing pallet that is carried in and out of the laser processing machine together with the slide table and the workpiece; a photographing device that can photograph at least a portion of the slide table on the processing pallet at the position of the processing pallet before being carried into the laser processing machine and after being carried out from the laser processing machine; and a state judgment device that is used to judge the state of the processing pallet based on the state of the processing pallet. The state of the slide is determined based on the image information obtained by photographing the slide table by the photographing device, and the state determination device performs: a first determination process, before the workpiece is moved into the slide, the state of the slide is determined based on the image information obtained by photographing the slide by the photographing device; and a second determination process, after the processing pallet is moved out of the laser processing machine and before the product obtained by processing the workpiece is moved out of the slide, the state of the slide is determined based on the image information obtained by photographing the slide by the photographing device.

[0023] In one embodiment of the present invention, before the workpiece is moved into the sliding member table, the photographing device photographs the sliding member table from a position above the supporting surface formed by the vertices of the multiple protrusions formed on the multiple sliding members, and outputs first image information. When the processed workpiece is supported by the sliding member table, the photographing device photographs the sliding member table from a position below the supporting surface, and outputs second image information.

[0024] In another embodiment of the present invention, the present invention further comprises a backlight that irradiates light toward the slider stage from a direction different from the imaging direction of the imaging device.

[0025] In another embodiment of the present invention, the state determination device stores a reference image and determines the state of the sliding member by performing image comparison between the image information and the reference image.

[0026] In another embodiment of the present invention, the state determination device extracts a contour line including a plurality of protrusions of the slider from the image information, and determines the state of the slider by comparing the extracted contour line with a pre-stored reference shape.

[0027] In another embodiment of the present invention, the state determination device extracts a contour line of the sliding member including a plurality of protrusions from the image information, determines a route connecting the vertices of the plurality of protrusions, and determines the state of the sliding member based on the route and the contour line.

[0028] In still another embodiment of the present invention, the state determining device determines the state of the slider based on a distance between a valley portion appearing around the protruding portion of the contour line and the route in a height direction of the slider.

[0029] In yet another embodiment of the present invention, the state determination device determines the state of the slider based on an area of ​​a region surrounded by the contour line and the route.

[0030] In still another embodiment of the present invention, the state determining device determines the state of the slider based on a thickness of the slider based on the contour line.

[0031] In still another embodiment of the present invention, the present invention further comprises: a notification device for notifying a predetermined warning or alarm based on the determination result of the state determination device.

[0032] In another embodiment of the present invention, the state determination device further comprises: a learning unit having a learning model, which is obtained by learning the relationship between the plurality of image information and the states of the sliding parts classified into a plurality of categories; and a fault prediction device, which determines the state of the sliding part based on the learning model, and determines the necessity and type of warning or alarm, and whether processing can be continued based on the state of the sliding part, and the notification device comprises: a display unit, which displays the warning or alarm in a visually recognizable manner based on the judgment result of the fault prediction device.

[0033] In another embodiment of the present invention, the learning unit performs at least one of the following learning processes to generate the learning model: a learning process using multiple image information of accumulated spatters accumulated between the protrusions of the sliding member, the distance from the route connecting the vertices of the multiple protrusions in each image information to the valley appearing between the protrusions, and / or the area of ​​the background area of ​​the sliding member as learning samples; a learning process using multiple image information of accumulated spatters accumulated on the wall surface of the sliding member and the thickness of the accumulated spatters as learning samples; a learning process using multiple image information of sliding member attachments attached to the sliding member and the area of ​​the sliding member attachments as learning samples; and a learning process using image information of multiple sliding members that have defects in the sliding member and the defect rate of the sliding member as learning samples, the defect prediction device inputs the image information obtained by the shooting device shooting the sliding member table into the learning model, and displays a prediction score representing the state of the sliding member.

[0034] The method for determining the state of a slider of the present invention is a method for determining the state of a slider executed in a laser processing system, the laser processing system comprising: a laser processing machine that processes a workpiece using a laser beam; a slider table that is provided with a plurality of sliders that support the workpiece via a support surface formed by vertices of a plurality of protrusions; a processing pallet that is moved in and out of the laser processing machine together with the slider table and the workpiece; a photographing device that is capable of photographing at least a portion of the slider table on the processing pallet at the position of the processing pallet before being moved into the laser processing machine and after being moved out of the laser processing machine; and a state determination device that photographs the state of the slider table based on the position of the slider table. The state of the slide member is determined by using image information obtained by photographing the slide member table by a photographing device. The method for determining the state of the slide member is characterized in that it includes: a first determination step, using the state determination device to determine the state of the slide member based on the image information obtained by photographing the slide member table by the photographing device before the workpiece is moved into the slide member table; and a second determination step, using the state determination device to determine the state of the slide member based on the image information obtained by photographing the slide member table by the photographing device after the processing pallet is moved out of the laser processing machine and before the product obtained by processing the workpiece is moved out of the slide member table.

[0035] Effects of the Invention

[0036] According to one aspect of the present invention, the state of the slider can be recognized and understood in more detail and accurately, and a malfunction caused by the state of the slider can be determined with high accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 This is an explanatory diagram showing a schematic configuration of a laser processing system including a slider state determination device according to an embodiment of the present invention.

[0038] Figure 2 This is a diagram for explaining how to operate the imaging device.

[0039] Figure 3 This is a diagram for explaining how to operate the imaging device.

[0040] Figure 4 This is a diagram for explaining how to operate the imaging device.

[0041] Figure 5 1 is a flowchart showing the monitoring operation of the slider state determination device.

[0042] Figure 6 A diagram for explaining an example of setting up an imaging device.

[0043] Figure 7A diagram for explaining an example of a captured image.

[0044] Figure 8 A diagram for explaining an example of a captured image.

[0045] Figure 9 This is a diagram for explaining how to set a route.

[0046] Figure 10 This is a diagram for explaining how to set a route.

[0047] Figure 11 A diagram for explaining an example of setting up an imaging device.

[0048] Figure 12 A diagram for explaining an example of a captured image.

[0049] Figure 13 A diagram for explaining an example of setting up an imaging device.

[0050] Figure 14 A diagram for explaining an example of a captured image.

[0051] Figure 15 This is a diagram for explaining the detection targets of fault conditions.

[0052] Figure 16 This is a diagram for explaining the detection targets of fault conditions.

[0053] Figure 17 This is a diagram for explaining the detection targets of fault conditions.

[0054] Figure 18 This is a diagram for explaining an example of a method for identifying deposited spatter.

[0055] Figure 19 This is a diagram for explaining an example of a method for identifying deposited spatter.

[0056] Figure 20 This is a diagram for explaining an example of a method for identifying deposited spatter.

[0057] Figure 21 This is a diagram for explaining the prediction of a malfunction due to the accumulation of spatter.

[0058] Figure 22 This is a diagram for explaining a method for detecting sliding member consumption.

[0059] Figure 23 It is a diagram for explaining the distribution of the defective portion area of ​​the slider.

[0060] Figure 24 It is a diagram for explaining the distribution of the defective portion area of ​​the slider.

[0061] Figure 25 This is a diagram for explaining a method for detecting weld spatter.

[0062] Figure 26 This is a diagram for explaining a method for detecting deposited waste. DETAILED DESCRIPTION

[0063] The following describes in detail, with reference to the accompanying drawings, a slider state determination device, a slider state determination method, and a laser processing system according to embodiments of the present invention. However, the following embodiments do not limit the inventions to the scope of protection of the respective claims, and not all combinations of features described in the embodiments are necessarily essential to the solutions provided by the inventions.

[0064] Figure 1 1 is an explanatory diagram showing a schematic configuration of a laser processing system 100 including a slider state determination device according to an embodiment of the present invention. Figures 2 to 4 This figure illustrates the operation of the imaging device. The basic structure and construction of the laser processing system 100 are already known, so only a brief description will be given here, except for those required. Furthermore, the laser processing system 100 also implements the slider state determination method according to one embodiment of the present invention.

[0065] In the following description, the "X direction" refers to the short side direction of the slider (the thickness direction of the slider), the "Y direction" refers to the long side direction of the slider (the length direction of the slider), and the "Z direction" refers to the vertical direction (vertical direction) intersecting the X and Y directions. Furthermore, in this embodiment, the scale and dimensions of various components may be exaggerated, and some components may be omitted.

[0066] like Figure 1 As shown, the laser processing system 100 includes a laser processing machine 1, a reciprocating table 2, and an automatic frame 3. The laser processing machine 1, the reciprocating table 2, and the automatic frame 3 are configured to cooperate with each other through computer automation, for example.

[0067] In addition, the laser processing system 100 has, for example: a photographing device 7, which is arranged at a position closer to the reciprocating workbench 2 than the loading and unloading port (not shown) of the laser processing machine 1, that is, it is arranged outside the laser processing machine 1; a loading and unloading fork 8; and a cleaning brush 9, which is used to clean the sliding part 10 described later.

[0068] A laser processing machine 1 is a machine that processes (cuts, drills, etc.) a workpiece (material) W using a laser beam. The workpiece W processed by the laser processing machine 1 is, for example, a plate-shaped metal base material (sheet metal). The laser processing machine 1 primarily comprises a laser oscillator (not shown), a laser processing head 4, an NC device 5 that controls the laser processing head 4 according to the processing conditions for processing the workpiece W, and an assist gas supply device (not shown) that supplies assist gas.

[0069] Specifically, the NC device 5 functions as a processing control device for the laser processing machine 1 and also as a control device responsible for overall control of the laser processing system 100, including the slider state determination device of this embodiment. Therefore, the NC device 5 is provided with a state determination device 6 capable of determining the state of the slider 10. Furthermore, a display device (not shown) capable of displaying various information on a display, and a sound output device (not shown) capable of outputting sound information are connected to the NC device 5 as notification means.

[0070] The reciprocating table 2 has, for example, a free stage (not shown) and a processing tray (see Figure 2 The slider table 11 mounted on the processing pallet 2a is driven to be movable together with the processing pallet 2a in at least the X direction of the X direction and the Y direction.

[0071] Furthermore, on the slider table 11 mounted on the processing pallet 2a, a plurality of sliders 10 are arranged at intervals in the X direction so that the longitudinal direction thereof is along the Y direction. The sliders 10 have a plurality of protrusions 12 (see FIG. 1 ) in a jianshan shape or a pin-shaped (comb-shaped) shape with a pointed end (apex). Figure 10 、 Figure 11 and Figure 12 In other words, the plurality of sliders 10 are arranged on the slider table 11 at predetermined intervals in the thickness direction (X direction), and are mounted so that the tips of the protrusions 12 are distributed on the same plane (support surface). Therefore, the slider table 11 is configured to support the lower surface of the workpiece W using the tips of the protrusions 12 of the plurality of sliders 10.

[0072] Specifically, the reciprocating table 2 carries the workpiece W placed on the slide table 11 together with the processing pallet 2a into the laser processing machine 1 through the loading and unloading port of the laser processing machine 1. Furthermore, the reciprocating table 2 carries the workpiece W, which has been laser-processed by the laser processing machine 1, out of the laser processing machine 1 together with the slide table 11 and the processing pallet 2a.

[0073] The automatic rack 3 is configured to automatically accommodate, for example, a plurality of unprocessed workpieces W in its lower portion 3A and a plurality of processed products FP in its upper portion 3B during laser processing, using computer automation. Furthermore, the loading and unloading (handover) of workpieces W and products FP between the reciprocating table 2 and the automatic rack 3 is performed using an automatically driven loading and unloading fork 8.

[0074] In the laser processing system 100 thus constructed, laser processing is automatically performed, for example, by the following actions. First, when the system is started and begins to operate, as shown in FIG. Figure 1 As shown by the hollow arrow ( 1 ), the unprocessed workpiece W is conveyed from the lower portion 3A of the automatic frame 3 to the processing pallet 2 a of the reciprocating table 2 and is placed on the slider table 11 .

[0075] Then, if Figure 1 As shown by the hollow arrow (2), the workpiece W on the slide table 11 is moved along with the processing tray 2a in the direction toward the laser processing machine 1 in the reciprocating table 2 according to the processing sequence, and is loaded into the laser processing machine 1 from the loading and unloading port. Then, the workpiece W is laser processed according to the processing conditions in the laser processing machine 1. Figure 1 As shown by the hollow arrow (3), the product FP obtained by processing the workpiece W is unloaded from the loading and unloading port to the outside of the laser processing machine 1 together with the processing tray 2a. The product FP unloaded together with the processing tray 2a moves in the reciprocating table 2 together with the processing tray 2a in a direction away from the laser processing machine 1, as shown in FIG. Figure 1 As shown by the hollow arrow (4), the workpiece W is removed from the slide table 11 by the loading and unloading fork 8 and stored in the upper portion 3B of the automatic frame 3. In the case of continuous processing, the next workpiece W is loaded onto the slide table 11 from which the product FP was unloaded, and waits for loading into the laser processing machine 1. Thereafter, the same operation is repeated.

[0076] In the laser processing system 100 operating in this manner, in order to identify and grasp the status of the sliding member 10 in a shorter time during system operation, the status judgment device 6 of this embodiment monitors (supervises) the status of the sliding member 10 by photographing at least a portion (specified photographing range) of the sliding member table 11 through the photographing device 7 before it is moved into the laser processing machine 1 and after it is moved out of the laser processing machine 1.

[0077] Specifically, the imaging device 7 is configured to capture the slider 10 within the imaging range of the slider table 11 set on the processing tray 2a from outside the laser processing machine 1. The imaging device 7 can be composed of, for example, a known optical camera that captures visible light, a three-dimensional distance image sensor that transmits a laser beam for scanning, receives reflected light, and obtains a three-dimensional distance image.

[0078] Here, "surroundings" is used to include directions from any point in the three-dimensional space defined by the X, Y, and Z directions toward the origin (directions of any orientation). Therefore, the imaging device 7 is configured to be able to use the direction of any orientation as the imaging direction, for example, to be able to capture the imaging range not only from the X, Y, and Z directions, but also from at least a direction that intersects the Z direction and the horizontal direction formed by the X and Y directions (hereinafter collectively referred to as "oblique directions").

[0079] In addition, the imaging device 7 can be configured in either a fixed or movable (mobile) manner. In addition, the imaging device 7 preferably has the ability to obtain image information of the entire imaging range through a single shot. However, for example, in the case where the required image information cannot be obtained through a single shot, a movable imaging device 7 that can capture the imaging range while moving may be configured, or in the case where the imaging performance such as the imaging range and pixel accuracy is limited due to being configured in one place, a plurality of fixed imaging devices 7 that can capture the imaging range from multiple locations may be configured. The laser processing system 100 of this embodiment determines the state of the slide 10 of the slide table 11 based on the image information captured by the imaging device 7 configured in this way.

[0080] As actual operation modes of the imaging device 7 , for example, the following modes are listed. Figures 2 to 4 The example shown shows an example of dividing the imaging range on the slider stage 11 in order to obtain the pixel accuracy required for determining the state of the slider 10. In the example shown, the Z direction and the Y direction are respectively shown as imaging directions, but the imaging directions naturally also include the above-mentioned inclined directions and are not limited to these.

[0081] As an example of dividing the shooting range, Figure 2 as well as Figure 3 As shown, for example, the imaging range of the slider table 11 on the work pallet 2a is divided into divided areas A1 and A2. The slider 10 in each divided area A1 and A2 is imaged from above and from the side (in the Z and Y directions of the slider table 11). After the imaging, the image information of the divided areas A1 and A2 is combined to obtain image information of the slider 10 in the entire imaging range. The number and range of the divided areas A1 and A2 can be appropriately set based on the imaging performance of the imaging device 7 (such as the imaging range, pixel accuracy, and configuration).

[0082] On the other hand, as another example of dividing the shooting range, for example, in order to achieve the efficiency of the image processing in the state determination device 6, Figure 4As shown, for example, the shooting range of the sliding member table 11 is divided into areas according to the order of the processing steps (the parts indicated by the oblique lines in the sliding member 10), and after the previous processing area B1 is photographed from the top and the side, the next processing area B2 is photographed from the top and the side. Thus, the sliding member 10 of each processing step is photographed from the top and the side respectively.

[0083] In this way, image information of the slider 10 within the imaging range of the processing areas B1 and B2 captured in each processing step can be sequentially obtained and image processed, thereby reducing the amount of data processed in each step. In addition, by using multiple imaging devices 7 to capture images in the Z and Y directions at once, or by moving the imaging device 7 capable of capturing images in the Z and Y directions in the X direction to capture images, the divided areas A1 and A2 and the processing areas B1 and B2 can be captured.

[0084] In addition, it is preferable that the imaging device 7 has a backlight source 7a (see FIG. 1 ) that illuminates the imaging range (illuminates the imaging range) from a direction different from the above-mentioned imaging direction (for example, a direction symmetrical to the imaging direction with respect to the vertical direction, a direction opposite to the imaging direction, etc., hereinafter collectively referred to as the "illumination direction"). Figure 1 By including the backlight 7a, the imaging device 7 can illuminate the imaging range from the irradiation direction. This allows the slider 10 within the imaging range to be captured with its outline more clearly defined and prominently highlighted, thus providing image information useful for determining the condition of the slider 10. A specific example of the installation of the imaging device 7 will be described later.

[0085] The image information captured by the imaging device 7 is then input, for example, into the state determination device 6 within the NC device 5 connected to the imaging device 7. The inspection image (hereinafter referred to as the "inspection image") input to the state determination device 6 is subjected to image processing and image analysis. Image processing enables edge (contour) detection of the slider 10 and image comparison, and image analysis enables, for example, extraction of positional information representing the coordinates of multiple points forming the contour line connecting the edges of the sliders 10. Thus, the state determination device 6 includes a CPU and a GPU, and functions as a known image processing unit capable of general image processing and image analysis.

[0086] Here, the monitoring operation of the state of the slider 10 by the state determination device 6 will be described. Figure 5This is a flowchart illustrating the monitoring operation of the status determination device 6. While this description describes a method for determining the status of the slider 10 within the imaging range by comparing an inspection image of the slider table 11 with a previously captured reference image (hereinafter referred to as a "reference image"), determining the status of the slider 10 is not limited to image comparison; various methods described below may be employed. The reference image refers to an initial image captured in an initial state, such as immediately after a plurality of sliders 10 are arranged on the slider table 11 and the spacing between them is adjusted.

[0087] First, before the monitoring operation begins, the state determination device 6 uses the imaging device 7 to capture the slide table 11, for example, from above in a direction oblique to the X direction and from above in the Z direction. This captures an image of the slide table 11 within the imaging range, where the slides 10 are arranged in the initial state, as a reference image, and stores it in a storage unit (not shown) within the NC device 5. Furthermore, image analysis based on the stored reference image may be performed simultaneously to obtain a reference detection value (a value indicating the reference shape of the slide 10, etc.) that enables the reference state of the slide 10 to be identified and grasped.

[0088] Next, when the laser processing system 100 is in operation and laser processing is started, the imaging device 7 starts imaging and the first (initial) slide monitoring (1) is performed (step S100). This slide monitoring (1) is performed, for example, before the workpiece W is loaded onto the slide table 11. The reason for performing the slide monitoring (1) before the workpiece W is loaded onto the slide table 11 is to detect defects that cannot be detected by monitoring after the previous processing during continuous processing. That is, if it is the slide table 11 before the workpiece W is loaded, it is easy to grasp the state of the protrusion 12 on the upper part of the slide 10 from above. In addition, during continuous processing, sometimes waste generated during the previous processing is melted onto the slide 10, but sometimes it cannot be detected until the product FP is unloaded in the previous processing step. In this case, if the workpiece W is directly loaded onto the slide table 11, it may cause damage to the product FP or cause processing defects. The purpose of the slide monitoring (1) is to avoid such defects. In the slider monitoring (1), an image captured within the imaging range of the slider table 11 before loading is obtained as an inspection image and stored in the storage unit within the NC device 5. In addition, image analysis based on the stored inspection image can also be performed to obtain an inspection detection value (a value indicating the shape of the slider 10 during inspection, etc.) that can identify and grasp the state of the slider 10 during inspection.

[0089] In the slider monitoring (1), the inspection image before loading is compared with the reference image to determine whether there is a slider abnormality (1) in the state of the slider 10 (step S101). The slider abnormality (1) includes, for example, the accumulation of molten metal on the slider 10, welding, welding of scrap, and deformation of the protrusion 12 caused by damage to the protrusion 12, and the coordinate shift of the end position of the protrusion 12 in the X and Y directions.

[0090] Then, in step S101, when it is determined that there is no slide abnormality (1) (step S101 No), the workpiece W is transported from the automatic frame 3 to the slide table 11 on the processing pallet 2a of the reciprocating worktable 2 as described above (step S102), and the workpiece W is moved into the laser processing machine 1 together with the processing pallet 2a (step S103).

[0091] Then, laser processing is performed by the laser processing machine 1 (step S104), and the processed workpiece W (product FP) is unloaded from the laser processing machine 1 together with the processing pallet 2a (step S105). After unloading, the imaging device 7 starts photographing the slide table 11 again, for example, from below in an inclined direction relative to the Y direction and the horizontal direction, and performs the second (next) slide monitoring (2) (step S106). In this way, the slide monitoring (2) is performed after the slide table 11 is unloaded from the laser processing machine 1 and before the product FP is unloaded from the slide table 11. The reason for performing the slide monitoring (2) at this time is that depending on the different welding states of the sputtering material after laser processing on the slide 10 or the workpiece W, if the product FP is directly unloaded using the loading and unloading fork 8, there is a possibility that the product FP, the loading and unloading fork 8, etc. will be damaged. The image processing in the slide monitoring (2) is the same as that of the above-mentioned slide monitoring (1), so the description is omitted here.

[0092] In this slider monitoring (2), the inspection image after unloading is compared with the reference image to determine whether there is a slider abnormality (2) in the state of the slider 10 (step S107). In addition, since the workpiece W is still placed on the slider table 11 before the product FP is unloaded after unloading, the image is taken from the bottom of the inclined direction as described above (the lower side of the workpiece W).

[0093] Slider abnormality (2) includes, for example, scrap material melting and rising from the slider 10, scrap material melting and depositing onto the workpiece W, or accumulation of spatter exceeding the allowable range. That is, during the execution of slider monitoring (2), if the above-mentioned rising, melting, or accumulation is confirmed, it is determined that the slider abnormality (2) exists.

[0094] Then, in step S107, if it is determined that there is no slider abnormality (2) (step S107: No), the product FP (workpiece W) is unloaded (removed) from the slider table 11 and unloaded to the automatic rack 3 (step S108). In this way, a series of monitoring operations are completed.

[0095] Furthermore, during laser processing, when the next workpiece W to be processed is loaded onto the slide table 11, the flowchart of this embodiment may be executed in parallel with a time difference.

[0096] On the other hand, in the above-mentioned step S101, when it is determined that there is a slider abnormality (1) (step S101 is yes), it is determined whether the laser processing machine 1 needs to be stopped, for example, based on the degree of the slider abnormality (1) (step S110). If it is determined that it is not necessary to stop (step S110 is no), a predetermined warning indicating that the slider abnormality (1) has occurred but the processing machine does not need to be stopped is output to a display device (step S111), and the process proceeds to the above-mentioned step S102 to convey the workpiece W, and the subsequent processing is repeated.

[0097] Furthermore, when it is determined that the machine needs to stop (Yes in step S110), a predetermined alarm indicating that a slider abnormality (1) has occurred and the machine needs to stop is notified from, for example, a sound output device (step S112), and the laser processing machine 1 is stopped in cooperation with the NC device 5 (step S113). The machine stop conditions in the slider monitoring (1) include, for example, a case where damage to the workpiece W due to attachment of scrap is predicted, and a case where, for example, contamination of the product FP due to rebound of spatter, welding of the workpiece W, or gouging is predicted if laser processing is performed directly, based on the accumulation of spatter on the slider 10 and the processing time and processing position of the laser processing to be performed thereafter.

[0098] After that, after replacing the slide 10 on the slide table 11, determine whether the laser processing system 100 has been restored (step S114), and make the processing machine continue to stop until it is restored (step S114 no). If it is restored (step S114 yes), transfer to the above-mentioned step S102 and repeat the subsequent processing.

[0099] On the other hand, in the above-mentioned step S107, if it is determined that there is a slider abnormality (2) (step S107 is yes), the same processing as in the case of slider abnormality (1) is performed. In other words, in this case, the process moves to step S120, and it is determined whether the laser processing machine 1 needs to be stopped, for example, based on the degree of the slider abnormality (2) (step S120). The processing machine stop conditions in the slider monitoring (2) include, for example, the possibility that weld spatter on the side of the slider 10 interferes with the loading and unloading fork 8 and damages the equipment or product FP.

[0100] If it is determined that the machine does not need to stop (step S120: No), a predetermined warning indicating that the slider abnormality (2) has occurred but the processing machine does not need to stop is output (step S121), and the process moves to the above-mentioned step S108 to unload the product FP to the automatic rack 3, and a series of monitoring operations are completed. On the other hand, if it is determined that the machine needs to stop (step S120: Yes), a predetermined alarm indicating that the slider abnormality (2) has occurred and the processing machine needs to stop is notified (step S122), and the laser processing machine 1 is stopped (step S123), and waits until it is restored (step S124: No). If it is restored (step S114: Yes), the process moves to the above-mentioned step S108, and a series of monitoring operations are completed.

[0101] In this way, the state determination device 6 of this embodiment is used to monitor the state of the sliding member 10, thereby being able to determine the state of the sliding member 10, that is, whether there is any abnormality caused by the variation of the sliding member 10, in at least two stages, namely, the stage before the workpiece W is moved onto the sliding member table 11 and the stage before the product FP is moved out of the sliding member table 11.

[0102] This allows for quick identification and understanding of variations in the slider 10 that may occur during repeated laser processing. This allows for more detailed and accurate identification and understanding of the slider 10's status than ever before, enabling highly accurate determination of the occurrence of defects caused by the slider 10's status. Furthermore, since prescribed warnings and alarms can be issued based on the slider 10's status, operators (users) can identify and address the causes of processing defects that may arise from the slider 10's status without directly monitoring the site. Furthermore, even in situations where it is difficult to predict the processing quality of a product FP during long-term system operation, operators can easily predict the occurrence of processing defects, thereby enabling the prevention of processing defects and achieving stable laser processing.

[0103] Next, a method of capturing an inspection image and a reference image for determining the state of the slider 10 will be described in more detail. First, a method of capturing an image used in the above-mentioned slider monitoring (1) will be described. Figure 6is a diagram for explaining an example of setting the imaging device 7. Figure 6 (a) is the side view, Figure 6 (b) is a top view.

[0104] In the above-mentioned slider monitoring (1), the monitoring is performed when the workpiece W is not placed on the slider table 11. Therefore, Figure 6 (a) and Figure 6 As shown in (b), the image is taken from above in an oblique direction. That is, the image capture device 7 and the backlight 7a are arranged in a position where they can capture images from above in a direction oblique to the Z direction and oblique to the X direction. In addition, the number of image capture devices 7 and backlights 7a can be increased or decreased as needed.

[0105] like Figure 7 As shown, the image (captured image) captured by the imaging device 7 thus configured has depth within the imaging range in the direction in which the sliders 10 are arranged (the X direction), and is a captured image 19 capable of accurately detecting the contour shape of the protrusion 12 from one surface side of each slider 10 arranged in the Y direction. Furthermore, a captured image 19 from the other surface side of each slider 10 in the X direction can also be obtained.

[0106] In addition, in the slider monitoring (1), the workpiece W is not placed on the slider table 11, so it can also be monitored by Figure 2 The imaging device 7 configured as shown in FIG. 1 is used to capture images from above in the Z direction. Figure 8 shown.

[0107] In this captured image 19A, the uneven shape of the protrusion 12 of the slider 10 in the height direction is difficult to identify, but variations in the thickness direction (X direction) of the slider 10 can be identified and grasped. Therefore, if the captured image 19 captured from above in the oblique direction and the captured image 19A captured from above in the Z direction are used as the reference image and the inspection image, respectively, various faults described below can be detected.

[0108] Furthermore, in the state determination device 6, the route PL is set in the captured image 19. Here, a method of setting the route PL will be described. Figure 9 1 and 2 are diagrams for explaining a method of setting a route PL. The route PL is set based on the apex (end position) of the protrusion 12 of each slider 10 accurately set on the slider base 11 in advance.

[0109] like Figure 9 As shown in (a), a plurality of sliders 10 having a depth in the X direction are shown in the captured image 18 before the setting of the route PL. The captured image 18 is temporarily stored. Figure 9 As shown in (b), for example, a predetermined route PL (PL1, PL2, PL3, ...) is set on a screen 17 displayed on a display of a display device.

[0110] In addition, the set route PL includes theoretical lines in the laser processing machine 1 or lines drawn in advance on the image displayed on the screen 17. As for the theoretical line, for example, the coordinate value of the vertex 12a of the protrusion 12 of the slider 10 in real space is known, so it can also be set using this coordinate value. For the route PL set on the screen 17, as shown in FIG. Figure 9 As shown in (c) of FIG. 1 , by adjusting the captured image 18 so that the apex of each protrusion 12 coincides with the route PL, a captured image 19 in which the route PL ( PL1 , PL2 , PL3 , . . . ) is set can be obtained.

[0111] In addition, as a method of setting the route PL, Figure 10 The method shown in FIG. Specifically, for example, image processing is performed on the captured image 18 to detect the contour of the slider 10. Then, only the vertices 12a of each protrusion 12 are extracted, and a point is assigned to each vertex 12a. A straight line (which coincides with) three or more of these assigned points is found, and this straight line is set as the route PL, as indicated by the hollow arrow in the figure. This method can also be used to set the route PL.

[0112] Next, a method of capturing an image used in the above-mentioned slider monitoring (2) will be described. Figure 11 is a diagram for explaining an example of setting the imaging device 7. Figure 11 (a) is a top view, Figure 11 (b) is a side view.

[0113] In the above-mentioned slide monitoring (2), the workpiece W is monitored while being placed on the slide table 11. Therefore, Figure 11 (a) and Figure 11 That is, the imaging device 7 and the backlight 7a are arranged at positions where imaging can be performed from below in a direction that is inclined with respect to the Y direction and inclined with respect to the horizontal direction (line PL).

[0114] Specifically, the imaging device 7 is arranged so as to have a predetermined angle θ1 with respect to the Y direction (see Figure 11 (a)) is photographed and is configured to have a predetermined angle θ2 relative to the horizontal direction (path PL) (refer to Figure 11(b)) captures the image. Furthermore, the backlight 7a is set, for example, at an angle symmetrical to the predetermined angle θ1 with respect to the Y direction, in accordance with the number of sliders 10 within the capture range, and is arranged parallel to the horizontal direction. The backlight 7a sequentially emits light when set according to the number of sliders 10, and the camera 7 sequentially captures the image in synchronization with this illumination. Furthermore, the predetermined angles θ1 and θ2 can be set according to the capture range of the camera 7.

[0115] like Figure 12 As shown, the image captured by the imaging device 7 thus arranged is a captured image 19B that enables three-dimensional detection of the contour shape of each protrusion 12 extending in an oblique direction with respect to the Y direction on one surface side of each slider 10 arranged in the X direction within the imaging range below the workpiece W. Furthermore, a captured image 19B of the other surface side of each slider 10 in the X direction can also be obtained.

[0116] In addition, in the sliding member monitoring (2), if Figure 13 As shown in FIG. 1 , the slide table 11 with the workpiece W placed thereon is photographed from the Y direction. The photographed image 19C photographed from the Y direction is as shown in FIG. Figure 14 As shown. In this captured image 19C, the contour shape of the protrusion 12 of the slider 10 is difficult to identify, but the variation in the thickness direction (X direction) of the slider 10 can be identified and grasped. Therefore, if the captured image 19B captured from the bottom in the oblique direction and the captured image 19C captured from the Y direction are used as the reference image and the inspection image, respectively, then, as in the case of the slider monitoring (1), various faults described later can be determined.

[0117] Next, detection targets of malfunctions of the slider 10 related to the above-mentioned slider abnormalities (1) and (2) will be described. Figures 15 to 17 This is a diagram for explaining a detection target for a malfunction of the slider 10 .

[0118] As the detection object of the fault of the sliding member 10, for example, Figure 15 As shown in (a) of FIG. 1 , the accumulated spatter 31a is accumulated between the protrusions 12 of the slider 10 below the path PL, as shown in FIG. Figure 15 (b) and Figure 15 As shown in FIG. 5 (c), the slider attachment is caused by the deposited spatter 31b and the like deposited on the wall surface (the surface facing in the X direction) of the slider 10.

[0119] In addition, as the detection objects of the bad situation, the following are listed: Figure 16 As shown in (a) of FIG. 1 , the deposited waste material 32 is deposited on the upper side of the sliding member 10. Figure 16As shown in (b) of FIG, the sliding member 10 is welded with the weld spatter (scum) 33 and the like. Figure 17 (a) and Figure 17 As shown in FIG. 1 (b), the slider 10 is worn out due to burnout (chipping) 34 of the protrusion 12 of the slider 10. The state determination device 6 of this embodiment can recognize these detection targets with high accuracy and determine the state of the slider 10.

[0120] First, the sliding parts are deposited on the Figure 15 A method for identifying the accumulated spatter 31a between the protrusions 12 as shown in (a) of FIG. Here, to identify the accumulated spatter 31a, the distance (gap) S between the path PL and the accumulated spatter 31a is detected. When detecting the accumulated spatter 31a, a reference image and an inspection image captured with the same composition as the captured image 19 described above can be used.

[0121] First, if Figure 18 As shown in (a), the contour of the protrusion 12 of the slider 10 is extracted, and the position d / 2 is marked, where the distance between the vertices 12a of each protrusion 12 is d. In the slider 10 of the reference image, the marked position d / 2 becomes the valley point 12b between the protrusions 12. However, if there is accumulated spatter 31a, it becomes the measurement point 35 of the accumulated spatter 31a.

[0122] Then, the gap S between the measurement point 35 and the path PL is calculated, and the accumulated spatter 31a is identified based on the calculated gap S. Specifically, when there is no accumulated spatter 31a, the gap S takes the maximum value as the reference detection value. On the other hand, when there is accumulated spatter 31a, the gap S becomes a smaller value than the reference detection value as the inspection detection value.

[0123] In addition, the gap amount S is determined using a threshold value (user threshold value: for example, S1, S2, ..., Sn, etc.) arbitrarily set according to the degree of the defect (processing defect), thereby enabling prescribed warnings and alarms corresponding to the degree of the defect in the sliding part abnormality (1) and (2).

[0124] Thus, for example, the following countermeasures can be taken: in the case of a fault that does not immediately cause a bad effect on laser processing, a predetermined warning is displayed, and in the case of a high-risk fault, a predetermined alarm is outputted. This user threshold can be set according to the state of the accumulated spatter 31a, for example, according to the fault type such as the fault obstructing gas flow, the fault caused by workpiece deposition, the fault caused by gouging, and the fault caused by spatter rebound.

[0125] On the other hand, in order to identify the deposited spatter 31a, a method using the outline of the protrusion 12 of the slider 10 can also be used. When the outline is used, first, an image 19 of the slider 10 captured by the imaging device 7 and the backlight 7a before laser processing is obtained as a reference image. Then, image processing such as binary processing is performed on the reference image. Figure 19 As shown in (a) of FIG. 3 , the reference image is divided into a slider region 36 and a background region 37 .

[0126] Then, the boundary portions of these regions 36 and 37 are extracted to obtain a plurality of coordinates 38a, and a line connecting these coordinates 38a is set as a reference contour line 38 of the protrusion 12. Next, an image 19 of the slider 10 captured by the imaging device 7 and the backlight 7a after laser processing is obtained as an inspection image, and image processing is performed in the same manner as in the case of the reference image, such as Figure 19 As shown in (b), the slider region 36 and the background region 37 are extracted, coordinates 38b are obtained, and an inspection contour line 39 is set.

[0127] The amount of upward displacement of the coordinates 38b of the inspection contour line 39 from the coordinates 38a of the reference contour line 38 in the Z direction is calculated, and the accumulated spatter 31a is identified based on the calculated upward displacement. In particular, by focusing on the area between the vertices 12a of the protrusion 12 for identification, identification accuracy can be further improved. Furthermore, the user threshold value described above can be used to determine the displacement amount and issue the aforementioned prescribed warning or alarm.

[0128] Furthermore, in order to identify the deposited spatter 31a, a method using the area of ​​the above-mentioned background region 37 may also be adopted. In this case, first, as shown in FIG. Figure 20 As shown in (a) of FIG. 1 , the area of ​​the background region 37 surrounded by the reference contour line 38 of the reference image and the route PL is calculated (indicated by oblique lines in the figure). Figure 20As shown in (b), the area of ​​the background region 37 enclosed by the inspection contour line 39 and the path PL of the inspection image is calculated (indicated by diagonal lines in the figure). These areas are then compared, and the accumulated spatter 31a is identified based on the difference in area. Alternatively, the user threshold value described above can be used to determine the difference and issue the aforementioned prescribed warning or alarm.

[0129] Next, based on Figure 15 (b) and Figure 15 The following describes the prediction of the fault caused by the accumulation of the spatter 31b on the wall surface of the slider 10 as shown in (c). Here, the accumulation thickness t of the identified accumulation spatter 31b (refer to Figure 15 (c)) and the distance L between each slider 10 in the X direction. Furthermore, when detecting the accumulated spatter 31b, a reference image and a test image captured with the same composition as the captured image 19C described above are used. The captured images 19A and 19B can also be used, but their description is omitted here.

[0130] First, if Figure 21 As shown, the contour is extracted from the captured image 19C, and the distance L between the walls of the slider 10 is calculated. Furthermore, the accumulated spatter 31b is identified based on the contour, and its accumulated thickness t is calculated. Furthermore, when the fork width of the loading / unloading fork 8 is La, the predicted failure thickness is set to t'.

[0131] Furthermore, the predicted failure thickness t' can be calculated by adding a predetermined margin β to a value 1 / 2 times the value obtained by subtracting the fork width La from the distance L (t' = (L - La) / 2 + β). Furthermore, for example, if the predicted failure thickness t' is smaller than the stacking thickness t (t < t'), a predetermined warning or alarm is issued to notify that the loading / unloading forks 8 are interfering with the slide table 11.

[0132] Furthermore, the user-set value related to interference is set to α (0 < α < 1). When the accumulation thickness t is greater than the value obtained by multiplying the thickness t′ predicted for a failure by α (t > t′ × α), a predetermined warning or alarm is issued to notify that the loading and unloading fork 8 is about to interfere with the slide table 11. Even in this manner, a predetermined warning or alarm corresponding to the degree of the failure in the slide abnormality (1) and (2) can be issued.

[0133] Next, the detection of the slider wear caused by the burnout (defect) 34 of the protrusion 12 of the slider 10 will be described. Figure 19 The outline of the description. That is, Figure 22As shown in FIG. 1 ( a ), a plurality of coordinates 38 a are obtained in the reference image, and a reference contour line 38 of the protrusion 12 is set.

[0134] Then, if Figure 22 As shown in (b), multiple coordinates 38b are obtained from the inspection image to define an inspection contour 39. The amount of downward displacement of coordinates 38b of inspection contour 39 from coordinates 38a of reference contour 38 in the Z direction is then calculated, and slider wear is detected based on the calculated downward displacement. In particular, slider wear can be easily detected by focusing on the coordinates of vertices 12a of protrusions 12 of reference contour 38 and the coordinates of vertices 12c of protrusions 12 of inspection contour 39.

[0135] Furthermore, the position (defective portion) of the defect 34 in the protrusion 12 on the slider table 11 can be determined based on the detected slider wear, thereby determining the support condition of the slider 10 on the plate surface (back surface) of the workpiece W. Furthermore, the defect rate N of the protrusion 12 of the slider 10 can be calculated to also determine the support condition.

[0136] The defect rate N (%) of the protrusions 12 can be calculated, for example, by dividing the number f of defective protrusions 12 of the slider 10 located below the workpiece W by the total number g of protrusions 12 of the slider 10 located below the workpiece W and multiplying the resulting value by 100 (N = (f / g) × 100). Based on this defect rate N, the quality of the support condition of the workpiece W can be determined.

[0137] Specifically, if the defect rate N is, for example, lower than the defect tolerance h set in advance by the user (N < h), the support condition can be determined to be good. On the other hand, if the defect rate N is higher than the defect tolerance h (N ≥ h), the support condition of the workpiece W by the slider 10 can be determined to be poor, and problems such as tilting of the plate surface of the workpiece W or shaking of the workpiece W can be predicted.

[0138] Furthermore, by adding the defective portion of the protrusion 12 to the determination result, the support state of the specific workpiece W can be determined in more detail. That is, under the premise that the defect rate N is greater than the defect tolerance h (N ≥ h), as shown in FIG. Figure 23 As shown, when the defective area m in the slider 10 is widely distributed near the four end faces Wa of the workpiece W and outside the end faces Wa, it is expected that the workpiece W will bend convexly when viewed from the horizontal direction. Figure 24 As shown, when the defect area m is widely distributed near the center of the workpiece W or inside the end surface Wa, the workpiece W is expected to bend in a concave shape when viewed from the horizontal direction.

[0139] If the workpiece W is expected to bend convexly, the warning or alarm specified in the slider anomalies (1) and (2) can be used to notify the user of undesirable conditions such as deflection of the workpiece W or vibration of the workpiece W caused by the assist gas. Furthermore, if the workpiece W is expected to bend concavely, the warning or alarm can be used to notify the user of undesirable conditions such as deflection of the workpiece W or the presence of objects falling onto the workpiece W.

[0140] Then, Figure 16 The following describes the detection of the slide deposit caused by the weld spatter (scum) 33 welded on the wall surface of the slide 10 as shown in (b). Figure 19 The outline of the description. That is, Figure 25 As shown in (a), the sliding part area 36 and the background area 37 are extracted from the reference image, a plurality of coordinates 38a are obtained, the reference contour line 38 of the protrusion 12 is set, and the area of ​​the background area 37 under the route PL of the portion enclosed by the route PL and the reference contour line 38 is calculated (the area of ​​the portion shown by the oblique lines in the figure).

[0141] In addition, if Figure 25 As shown in (b), an inspection contour line 39 is extracted from the inspection image, separating the slider region 36, the region containing scum 33, and the accumulated spatter 31a from the background region 37. Multiple coordinates 38b defining the inspection contour line 39 are then determined. Furthermore, based on the coordinates 38b of each inspection contour line 39, the inspection contour lines 39 are classified into closed inspection contour lines 39 that include the route PL and closed inspection contour lines 39 that do not include the route PL. A closed inspection contour line 39 that does not include the route PL may have scum 33 attached to it, while a closed inspection contour line 39 that includes the route PL may have accumulated spatter 31a beneath it. Therefore, the n background regions 37 between the n+1 protrusions 12 arranged in the Y direction are classified into n1 background regions 37 including the inspection contour line 39 that does not include the route PL and n2 background regions 37 including the inspection contour line 39 that includes the route PL. Next, the entire area B of the background region 37 surrounded by the inspection contour line 39 excluding the route PL and the entire area C of the background region 37 surrounded by the inspection contour line 39 including the route PL are calculated.

[0142] Furthermore, assuming the area of ​​a background region 37 between a pair of protrusions 12, which can be calculated from the reference contour line 38, is represented by A, then the area A×n1 is compared with the area B. If the area B of the inspection image is smaller than the area A×n1 of the reference image, an erroneously identified portion (a portion erroneously identified as the slider region 36) is detected along the route PL, connecting to the route PL and connected to the slider region 36. This detected erroneously identified portion corresponds to the scum 33 being a slider deposit. Furthermore, by calculating the area A×n1-B of the detected erroneously identified portion, the amount of scum 33 deposited in the background region 37 can be calculated, enabling the issuance of a warning or alarm based on the amount of deposited scum 33. Furthermore, by calculating the area A×n2-C, the amount of accumulated spatter 31a can be roughly estimated.

[0143] On the other hand, regarding Figure 16 The detection of the slide deposit caused by the deposited waste 32 deposited on the upper side of the slide 10 as shown in (a) is performed as follows. Figure 26 As shown in (a), a plurality of coordinates 38a are obtained in the reference image, and a reference contour line 38 of the protrusion 12 is set. Figure 26 As shown in FIG. 2( b ), a plurality of coordinates 38 b are obtained in the inspection image, and an inspection contour line 39 of the protrusion 12 is set.

[0144] Furthermore, when setting the inspection contour line 39, a plurality of coordinates 38c are obtained on and above the route PL, and a contour line 50 of a geometric shape connecting these coordinates 38c is detected. In this case, the portion enclosed by the contour line 50 is detected as the deposited waste 32. Thus, if the deposited waste 32 is detected on the route PL, it is predicted that a machining defect will occur due to an increase in the thickness of the workpiece W. Therefore, a predetermined warning or alarm is issued, and the slider 10 is cleaned by the cleaning brush 9.

[0145] Furthermore, the state determination device 6 may also include, for example, a machine learning function. In this case, the state determination device 6 may include, for example, a learning unit having a learning model obtained by learning the relationship between the plurality of image information obtained by the imaging device 7 and the states of the plurality of sliders 10 classified in the above-described embodiment; and a failure prediction unit that determines the state of the slider 10 based on the learning model, and determines the necessity and type of a warning or alarm, and whether processing can be continued, based on the state of the slider 10.

[0146] Furthermore, the NC device 5 displays a warning or alarm in a visually recognizable manner on the display of the display device, for example, based on the determination result of the failure prediction unit. An example of a warning or alarm is a prediction score that represents how close (or how far) the determined state of the slider 10 is to the reference state, expressed in the form of visually recognizable points.

[0147] For example, the learning unit (1) collects a plurality of image information of the accumulated spatter 31a between the protrusions 12 of the slider 10 and the image information of the accumulated spatter 31a. Figure 15 The gap S from the route PL to the measuring point 35 described in Figure 25 (1) The numerical values ​​such as the area A, B, and C of the background area 37 described in the above are learned as learning samples, (2) multiple image information including the accumulated spatter 31b accumulated on the wall surface of the sliding part 10 and the thickness t of the accumulated spatter 31b are learned as learning samples, (3) multiple image information including the sliding part attachments such as the molten waste 32 melted on the top of the sliding part 10 and the molten spatter (scum) 33 melted on the wall surface of the sliding part 10, and the numerical values ​​such as the area surrounded by the contour line 50 detected on the route PL or the thickness of the side are learned as learning samples, (4) multiple image information of the sliding parts 10 that have defects 34 caused by burning of the sliding parts 10 and their defect rate N are learned as learning samples, etc., and learning is performed in a defective manner.

[0148] Furthermore, the failure prediction unit inputs the inspection image to the learning model of the learning unit and performs calculation processing, thereby being able to display the prediction score as a reference when the operator (user) determines whether the state of the slider 10 photographed by the imaging device 7 is suitable for continuing laser processing. Figure 18 As shown in (b), if the gap S between the measurement point 35 corresponding to the valley bottom of the slider 10 and the path PL becomes narrower, the predicted score becomes lower because it is far from the reference state. Figure 22 As shown in FIG. 3 , the inspection contour line 39 of the slider 10 is cut off relative to the reference contour line 38, and the slider 10 is further away from the reference state, so the prediction score becomes lower. Figure 25 As shown in FIG, the smaller the area of ​​the background region 37 is, the further away from the reference state it is, and therefore, the lower the prediction score becomes. Figure 15 As shown in (c), the thicker the deposition thickness t of the deposited sputtered matter 31b is, the further away from the reference state it is, and therefore the prediction score becomes lower.

[0149] The failure prediction unit can evaluate the condition of the slider 10 by individually observing the predicted scores of each of the aforementioned items to be checked, or it can evaluate the condition of the slider 10 by comprehensively determining the predicted scores of these items. These predicted scores are displayed, for example, on a display device as needed. Thus, the user can also determine the condition of the slider 10 based on the actual conditions at the processing site, for example, by considering the predicted scores displayed on the display device.

[0150] As described above, according to this embodiment, the state of the slider 10 is determined by using the inspection image of the slider table 11 taken from an oblique direction in at least two stages, before the slider 1 is moved into the laser processing machine 1 and after the slider 1 is moved out of the laser processing machine 1. Therefore, the state of the slider 10 can be determined in a short span, and the occurrence of an adverse condition caused by the state of the slider 10 can be determined with high precision.

[0151] While the embodiments of the present invention have been described above, these embodiments are provided as examples and are not intended to limit the scope of the invention. The new embodiments can be implemented in various other ways, and various omissions, substitutions, and modifications can be made without departing from the gist of the invention. These embodiments or modifications thereof are included within the scope or gist of the invention and are included within the scope of the invention described in the claimed patent application and its equivalents.

[0152] [Remark]

[0153] In this specification, for example, the following items are described.

[0154] [Project 1]

[0155] A sliding member state determination device for determining the state of a plurality of sliding members supporting a workpiece processed by a laser processing machine on a support surface formed by vertices of a plurality of protrusions, characterized in that:

[0156] The slider state determination device includes: an imaging unit capable of imaging at least a portion of a slider stage on which the plurality of sliders are installed; and

[0157] a state determination unit configured to determine the state of the slider based on image information obtained by the imaging unit when the slider table is imaged;

[0158] The status determination unit performs: a first determination process of determining the status of the slide member based on the image information obtained by the shooting unit when the slide member is photographed before the workpiece is moved onto the slide member table; and a second determination process of determining the status of the slide member based on the image information obtained by the shooting unit when the slide member is photographed after the workpiece is moved out of the laser processing machine and before the product obtained by processing the workpiece is moved out of the slide member table.

[0159] [Project 2]

[0160] The sliding member state determination device according to item 1 is characterized in that:

[0161] Before the workpiece is moved onto the sliding member table, the photographing unit photographs the sliding member table from a position above the supporting surface formed by the vertices of the multiple protrusions formed on the multiple sliding members, and outputs first image information. When the processed workpiece is supported by the sliding member table, the photographing unit photographs the sliding member table from a position below the supporting surface, and outputs second image information.

[0162] [Item 3]

[0163] The sliding member state determination device according to item 1 or 2 is characterized in that:

[0164] The slider state determination device further includes a backlight that irradiates light toward the slider stage from a direction different from an imaging direction of the imaging unit.

[0165] [Item 4]

[0166] The slider state determination device according to any one of items 1 to 3 is characterized in that:

[0167] The state determination unit stores a reference image and determines the state of the slider by performing image comparison between the image information and the reference image.

[0168] [Item 5]

[0169] The slider state determination device according to any one of items 1 to 3 is characterized in that:

[0170] The state determination unit extracts a contour line including a plurality of protrusions of the slider from the image information, and determines the state of the slider by comparing the extracted contour line with a pre-stored reference shape.

[0171] [Item 6]

[0172] The slider state determination device according to any one of items 1 to 3 is characterized in that:

[0173] The state determination unit extracts a contour line including a plurality of protrusions of the slider from the image information, determines a route connecting vertices of the plurality of protrusions, and determines the state of the slider based on the route and the contour line.

[0174] [Item 7]

[0175] The sliding member state determination device according to item 6 is characterized in that:

[0176] The state determination unit determines the state of the slider based on a distance between a valley portion appearing around the protrusion of the contour line and the slider of the route in a height direction.

[0177] [Item 8]

[0178] The sliding member state determination device according to item 6 is characterized in that:

[0179] The state determination unit determines the state of the slider based on an area of ​​a region surrounded by the contour line and the route.

[0180] [Item 9]

[0181] The sliding member state determination device according to item 5 is characterized in that:

[0182] The state determination unit determines the state of the slider based on a thickness of the slider based on the contour line.

[0183] [Item 10]

[0184] The slider state determination device according to any one of items 1 to 9 is characterized in that:

[0185] The slider state determination device further includes a notification unit configured to notify a predetermined warning or alarm based on a determination result of the state determination unit.

[0186] [Item 11]

[0187] The sliding member state determination device according to item 10 is characterized in that:

[0188] The state determination unit further comprises:

[0189] a learning unit including a learning model obtained by learning a relationship between the plurality of image information and the states of the plurality of sliders classified therein; and

[0190] a failure prediction unit that determines the state of the slider based on the learning model, and determines the necessity and type of a warning or alarm, and whether the machining can be continued based on the state of the slider;

[0191] The notification unit includes a display unit configured to display the warning or alarm in a visually recognizable manner based on the determination result of the malfunction prediction unit.

[0192] [Item 12]

[0193] A laser processing system, characterized by having:

[0194] Laser processing machines, which use laser beams to process workpieces;

[0195] a sliding member table provided with a plurality of sliding members supporting the workpiece via a supporting surface formed by vertices of a plurality of protrusions;

[0196] a processing pallet, which is moved into and out of the laser processing machine together with the slide table and the workpiece;

[0197] an imaging device capable of imaging at least a portion of the slider table on the processing pallet at the position of the processing pallet before being loaded into the laser processing machine and after being unloaded from the laser processing machine; and

[0198] a state determination device for determining the state of the slide member based on image information obtained by the imaging device photographing the slide member stage;

[0199] The status judgment device performs: a first judgment process, before the workpiece is moved into the sliding member table, judging the status of the sliding member based on the image information obtained by the shooting device when shooting the sliding member table; and a second judgment process, after the processing pallet is moved out of the laser processing machine, before the product obtained by processing the workpiece is moved out of the sliding member table, judging the status of the sliding member based on the image information obtained by the shooting device when shooting the sliding member table.

[0200] [Item 13]

[0201] The laser processing system according to item 12 is characterized in that

[0202] Before the workpiece is moved into the sliding member table, the photographing device photographs the sliding member table from a position above the supporting surface formed by the vertices of the multiple protrusions formed on the multiple sliding members, and outputs first image information. When the processed workpiece is supported by the sliding member table, the photographing device photographs the sliding member table from a position below the supporting surface, and outputs second image information.

[0203] [Item 14]

[0204] The laser processing system according to item 12 or 13 is characterized in that

[0205] The laser processing system further includes a backlight that irradiates light toward the slider stage from a direction different from the imaging direction of the imaging device.

[0206] [Item 15]

[0207] The laser processing system according to any one of items 12 to 14 is characterized in that

[0208] The state determination device stores a reference image and determines the state of the slider by comparing the image information with the reference image.

[0209] [Item 16]

[0210] The laser processing system according to any one of items 12 to 14 is characterized in that

[0211] The state determination device extracts a contour line including a plurality of protrusions of the slider from the image information, and determines the state of the slider by comparing the extracted contour line with a pre-stored reference shape.

[0212] [Item 17]

[0213] The laser processing system according to any one of items 12 to 14 is characterized in that

[0214] The state determination device extracts a contour line including a plurality of protrusions of the slider from the image information, determines a route connecting vertices of the plurality of protrusions, and determines the state of the slider based on the route and the contour line.

[0215] [Item 18]

[0216] The laser processing system according to item 17 is characterized in that

[0217] The state determination device determines the state of the slider based on the distance between a valley portion appearing around the protruding portion of the contour line and the slider of the route in a height direction.

[0218] [Item 19]

[0219] The laser processing system according to item 17 is characterized in that

[0220] The state determination device determines the state of the slider based on the area of ​​a region surrounded by the contour line and the route.

[0221] [Item 20]

[0222] The laser processing system according to item 16 is characterized in that

[0223] The state determination device determines the state of the slider based on the thickness of the slider based on the contour line.

[0224] [Item 21]

[0225] The laser processing system according to any one of items 12 to 20 is characterized in that:

[0226] The laser processing system further includes a notification device that notifies a predetermined warning or alarm based on the determination result of the state determination device.

[0227] [Item 22]

[0228] The laser processing system according to item 21 is characterized in that

[0229] The state determination device further comprises:

[0230] a learning unit including a learning model obtained by learning a relationship between the plurality of image information and the states of the plurality of sliders classified therein; and

[0231] A failure prediction device determines the state of the sliding member based on the learning model, and determines the necessity and type of warning or alarm, and whether the processing can be continued based on the state of the sliding member.

[0232] The notification device includes a display unit that displays the warning or alarm in a visually recognizable manner based on the determination result of the failure prediction device.

[0233] [Item 23]

[0234] The laser processing system according to item 22 is characterized in that

[0235] The learning unit generates the learning model by performing at least one of the following learning processes: a learning process using a plurality of image information of accumulated spatters accumulated between the protrusions of the slider, a distance from a route connecting the vertices of the plurality of protrusions to a valley appearing between the protrusions in each image information, and / or an area of ​​a background region of the slider as learning samples; a learning process using a plurality of image information of accumulated spatters accumulated on a wall surface of the slider and a thickness of the accumulated spatters as learning samples; a learning process using a plurality of image information of slider attachments attached to the slider and an area of ​​the slider attachments as learning samples; and a learning process using image information of a plurality of sliders on which defects of the slider occur and a defect rate of the slider as learning samples.

[0236] The failure prediction device inputs the image information of the slider table captured by the imaging device into the learning model, and displays a prediction score indicating the state of the slider.

[0237] [Item 24]

[0238] A method for determining the state of a slide member performed in a laser processing system, the laser processing system comprising: a laser processing machine that processes a workpiece using a laser beam; a slide member table that is provided with a plurality of slide members that support the workpiece through a supporting surface formed by vertices of a plurality of protrusions; a processing pallet that is moved in and out of the laser processing machine together with the slide member table and the workpiece; a photographing device that is capable of photographing at least a portion of the slide member table on the processing pallet at a position of the processing pallet just before being moved into the laser processing machine and just after being moved out of the laser processing machine; and a state determination device that determines the state of the slide member based on image information obtained by the photographing device photographing the slide member table, characterized in that

[0239] The sliding member state determination method includes:

[0240] A first determination step is to determine the state of the slider using the state determination device based on the image information obtained by the imaging device capturing the slider stage before the workpiece is loaded onto the slider stage; and

[0241] In the second judgment process, the state judgment device is used to judge the state of the slide based on the image information obtained by the camera shooting the slide after the processing pallet is unloaded from the laser processing machine and before the product obtained by processing the workpiece is unloaded from the slide.

Claims

1. A slider state determination device for determining the state of a plurality of sliders supporting a workpiece processed by a laser processing machine via a support surface formed by vertices of a plurality of protrusions, characterized in that: The sliding member state determination device comprises: a photographing unit capable of photographing at least a portion of the slider stage on which the plurality of sliders are provided; and a state determination unit configured to determine the state of the slider based on image information obtained by the imaging unit when the slider table is imaged; The status determination unit performs: a first determination process of determining the status of the slide member based on the image information obtained by the photographing unit shooting the slide member table from above the slide member table before the workpiece is moved onto the slide member table; and a second determination process of determining the status of the slide member based on the image information obtained by the photographing unit shooting the slide member table from below the product after the workpiece is moved out of the laser processing machine and before the product obtained by processing the workpiece is moved out of the slide member table.

2. The sliding member state determination device according to claim 1, characterized in that: Before the workpiece is moved onto the sliding member table, the photographing unit photographs the sliding member table from a position above the supporting surface formed by the vertices of the multiple protrusions formed on the multiple sliding members, and outputs first image information. When the processed workpiece is supported by the sliding member table, the photographing unit photographs the sliding member table from a position below the supporting surface, and outputs second image information.

3. The sliding member state determination device according to claim 1 or 2, characterized in that: The slider state determination device further includes a backlight that irradiates light toward the slider stage from a direction different from an imaging direction of the imaging unit.

4. The sliding member state determination device according to claim 1 or 2, characterized in that: The state determination unit stores a reference image and determines the state of the slider by performing image comparison between the image information and the reference image.

5. The sliding member state determination device according to claim 1 or 2, characterized in that: The state determination unit extracts a contour line including a plurality of protrusions of the slider from the image information, and determines the state of the slider by comparing the extracted contour line with a pre-stored reference shape.

6. The sliding member state determination device according to claim 1 or 2, characterized in that: The state determination unit extracts a contour line including a plurality of protrusions of the slider from the image information, determines a route connecting vertices of the plurality of protrusions, and determines the state of the slider based on the route and the contour line.

7. The sliding member state determination device according to claim 1 or 2, characterized in that: The slider state determination device further includes a notification unit configured to notify a predetermined warning or alarm based on a determination result of the state determination unit.

8. A laser processing system, characterized in that: have: Laser processing machines, which use laser beams to process workpieces; a sliding member table provided with a plurality of sliding members supporting the workpiece via a supporting surface formed by vertices of a plurality of protrusions; a processing pallet, which is moved into and out of the laser processing machine together with the slide table and the workpiece; an imaging device capable of imaging at least a portion of the slider table on the processing pallet at a position of the processing pallet immediately before being loaded into the laser processing machine and immediately after being unloaded from the laser processing machine; and a state determination device for determining the state of the slider based on image information obtained by the imaging device when the slider table is photographed; The status judgment device performs: a first judgment process, before the workpiece is moved into the sliding member table by the loading and unloading fork, the status of the sliding member is judged based on the image information obtained by the shooting device shooting the sliding member table from above the sliding member table; and a second judgment process, after the processing pallet is moved out of the laser processing machine, before the product obtained by processing the workpiece is moved out of the sliding member table by the loading and unloading fork, the status of the sliding member is judged based on the image information obtained by the shooting device shooting the sliding member table from below the product.

9. The laser processing system according to claim 8, characterized in that: Before the workpiece is moved into the sliding member table, the photographing device photographs the sliding member table from a position above the supporting surface formed by the vertices of the multiple protrusions formed on the multiple sliding members, and outputs first image information. When the processed workpiece is supported by the sliding member table, the photographing device photographs the sliding member table from a position below the supporting surface, and outputs second image information.

10. The laser processing system according to claim 8 or 9, characterized in that: The laser processing system further includes a backlight that irradiates light toward the slider stage from a direction different from the imaging direction of the imaging device.

11. The laser processing system according to claim 8 or 9, characterized in that: The state determination device stores a reference image and determines the state of the slider by comparing the image information with the reference image.

12. The laser processing system according to claim 8 or 9, characterized in that: The state determination device extracts a contour line including a plurality of protrusions of the slider from the image information, and determines the state of the slider by comparing the extracted contour line with a pre-stored reference shape.

13. The laser processing system according to claim 8 or 9, characterized in that: The state determination device extracts a contour line including a plurality of protrusions of the slider from the image information, determines a route connecting vertices of the plurality of protrusions, and determines the state of the slider based on the route and the contour line.

14. The laser processing system according to claim 8 or 9, characterized in that: The laser processing system further includes a notification device that notifies a predetermined warning or alarm based on the determination result of the state determination device.

15. A method for determining the state of a slide member performed in a laser processing system, the laser processing system comprising: a laser processing machine that processes a workpiece using a laser beam; a slide member table that is provided with a plurality of slide members that support the workpiece through a support surface formed by vertices of a plurality of protrusions; a processing pallet that is moved in and out of the laser processing machine together with the slide member table and the workpiece; a photographing device that is capable of photographing at least a portion of the slide member table on the processing pallet at a position of the processing pallet just before being moved into the laser processing machine and just after being moved out of the laser processing machine; and a state determination device that determines the state of the slide member based on image information obtained by the photographing device photographing the slide member table, characterized in that The sliding member state determination method includes: A first determination step comprises determining the state of the slide member by the state determination device based on the image information obtained by the imaging device photographing the slide member table from above the slide member table before the workpiece is loaded onto the slide member table by the loading / unloading fork; as well as In the second judgment process, the status judgment device is used to judge the status of the sliding part based on the image information obtained by the camera shooting the sliding part table from below the product after the processing pallet is unloaded from the laser processing machine and before the product obtained by processing the workpiece is unloaded from the sliding part table by the loading and unloading fork.

Images