Actuator device, projection device and projection method

Abstract

The present invention provides an actuator device, a projection device including the actuator device, and a projection method suitable for the actuator device. The projection method includes: disposing a first optical element in a first frame, disposing at least one first driving component between a first base and the first frame, disposing a second optical element in a second frame, and disposing at least one second driving component between the second base and the second frame; and controlling the at least one first driving component to drive the first frame by a first signal so that the first optical element swings back and forth relative to the first base based on a first actuating axis and a second actuating axis, and controlling the at least one second driving component to drive the second frame by a second signal so that the second optical element swings back and forth relative to the second base based on a third actuating axis. The actuator device, projection device, and projection method of the present invention can increase the number of actuating axes of the actuator device, thereby increasing the resolution of the projection device.

Description

Technical Field

[0001] The present invention relates to an actuator device, a projection device and a projection method. Background Art

[0002] As the quality of video from cable TV or internet streaming improves, demand for high-resolution projectors is increasing. To increase projector resolution, an actuator can be positioned appropriately within the projector, allowing the projector's light beam to pass through the actuator's optical element. When the actuator is actuated, the optical element supported by the actuator swings back and forth, redirecting the beam to different locations, thereby increasing the resolution of the projected image. Currently, most actuators on the market are single-axis or dual-axis, and therefore can only increase projector resolution by 1 to 4 times.

[0003] The "Background" section is intended only to facilitate understanding of the present invention. Therefore, the information disclosed in this section may contain information that is not known to those skilled in the art. The information disclosed in this section does not imply that the information or the problems to be solved by one or more embodiments of the present invention were known or understood by those skilled in the art prior to the filing of this application. Summary of the Invention

[0004] The present invention provides an actuator device, a projection device and a projection method, which can increase the number of actuating axes of the actuator device and thus increase the resolution of the projection device.

[0005] Other purposes and advantages of the present invention can be further understood from the technical features disclosed in the present invention.

[0006] To achieve one, some, or all of the above objectives, or other objectives, one embodiment of the present invention provides an actuator device comprising a first base, a first frame, a first optical element, at least one first drive assembly, a second base, a second frame, a second optical element, at least one second drive assembly, and a controller. The first frame is disposed within the first base. The first optical element is disposed within the first frame. The at least one first drive assembly is disposed between the first base and the first frame. The second frame is disposed within the second base. The second optical element is disposed within the second frame. The at least one second drive assembly is disposed between the second base and the second frame. The controller is coupled to at least one first drive component and at least one second drive component, wherein the controller is used to control the at least one first drive component to drive the first frame by a first signal so that the first optical element swings back and forth relative to the first base based on the first actuating axis and the second actuating axis, and to control the at least one second drive component to drive the second frame by a second signal so that the second optical element swings back and forth relative to the second base based on the third actuating axis, wherein the first signal includes a first drive signal corresponding to the first actuating axis and a second drive signal corresponding to the second actuating axis, and the second signal includes a third drive signal corresponding to the third actuating axis, wherein the first drive signal and the second drive signal have a first frequency, and the third drive signal has a second frequency different from the first frequency, wherein the phase difference between the first drive signal and the second drive signal is not equal to zero.

[0007] To achieve one, some, or all of the above objectives, or other objectives, another embodiment of the present invention provides a projection device comprising an illumination system, a light valve, a projection lens, and an actuator device. The illumination system is configured to emit an illumination beam. The light valve is located along a first transmission path of the illumination beam and is configured to convert the illumination beam into an image beam. The projection lens is located along a second transmission path of the image beam and is configured to project the image beam. The actuator device is located along the transmission path of the image beam and is disposed between the light valve and the projection lens, or a portion of the actuator device is disposed within the projection lens. The actuator device comprises: a first base, a first frame, at least one first drive assembly, a second base, a second frame, a second optical element, at least one second drive assembly, and a controller. The first frame is disposed within the first base. The first optical element is disposed within the first frame. The at least one first drive assembly is disposed between the first base and the first frame. The second frame is disposed within the second base. The second optical element is disposed within the second frame. The at least one second drive assembly is disposed between the second base and the second frame. The controller is coupled to at least one first drive component and at least one second drive component, wherein the controller is used to control the at least one first drive component to drive the first frame by a first signal so that the first optical element swings back and forth relative to the first base based on the first actuating axis and the second actuating axis, and to control the at least one second drive component to drive the second frame by a second signal so that the second optical element swings back and forth relative to the second base based on the third actuating axis, wherein the first signal includes a first drive signal corresponding to the first actuating axis and a second drive signal corresponding to the second actuating axis, and the second signal includes a third drive signal corresponding to the third actuating axis, wherein the first drive signal and the second drive signal have a first frequency, and the third drive signal has a second frequency different from the first frequency, wherein the phase difference between the first drive signal and the second drive signal is not equal to zero.

[0008] To achieve one, part, or all of the above-mentioned purposes or other purposes, another embodiment of the present invention provides a projection method, which is applicable to an actuator device, wherein the actuator device includes a first base, a first frame, a first optical element, at least one first driving component, a second base, a second frame, a second optical element and at least one second driving component, wherein the projection method includes: disposing the first frame in the first base, disposing the first optical element in the first frame, disposing the at least one first driving component between the first base and the first frame, disposing the second frame in the second base, disposing the second optical element in the second frame, and disposing the at least one second driving component between the second base and the second frame; and by The first signal controls at least one first driving component to drive the first frame so that the first optical element swings back and forth relative to the first base based on the first actuating axis and the second actuating axis, and the second signal controls at least one second driving component to drive the second frame so that the second optical element swings back and forth relative to the second base based on the third actuating axis, wherein the first signal includes a first driving signal corresponding to the first actuating axis and a second driving signal corresponding to the second actuating axis, and the second signal includes a third driving signal corresponding to the third actuating axis, wherein the first driving signal and the second driving signal have a first frequency, and the third driving signal has a second frequency different from the first frequency, wherein the phase difference between the first driving signal and the second driving signal is not equal to zero.

[0009] Based on the foregoing, embodiments of the present invention have at least one of the following advantages or effects. In embodiments of the present invention, the actuator device may include at least three actuating axes. The actuator device can control the optical element to oscillate back and forth along the at least three actuating axes according to corresponding drive frequencies, thereby increasing the resolution of the projection device.

[0010] In order to make the above features and advantages of the present invention more clearly understood, embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1A FIG. 1 is a schematic diagram of a projection device according to an embodiment of the present invention.

[0012] Figure 1B 、 Figure 1C and Figure 1D Schematic diagrams of other projection devices according to other embodiments of the present invention are respectively shown.

[0013] Figure 2A FIG. 1 shows a top view of an actuator device having a single axis according to a comparative example of the prior art.

[0014] Figure 2B To correspond to Figure 2A Schematic diagram of pixels.

[0015] Figure 2C To correspond to Figure 2A Schematic diagram of the driving signal.

[0016] Figure 3A FIG. 1 shows a top view of an actuator device with two axes according to a comparative example of the prior art.

[0017] Figure 3B To correspond to Figure 3A Schematic diagram of pixels.

[0018] Figure 3C To correspond to Figure 3A Schematic diagram of the driving signal.

[0019] Figure 4A FIG. 1 shows a perspective view of an actuator device with three axes according to an embodiment of the present invention.

[0020] Figure 4B To correspond to Figure 4A Schematic diagram of the actuator device pixel.

[0021] Figure 4C To correspond to Figure 4A Schematic diagram of the driving signal of the actuator device.

[0022] Figure 5A FIG. 1 is a schematic diagram of a pixel according to an embodiment of the present invention.

[0023] Figure 5B To correspond to Figure 5A Layout diagram of multiple pixels.

[0024] Figure 6A FIG. 4 is a schematic diagram of a pixel according to another embodiment of the present invention.

[0025] Figure 6B To correspond to Figure 6A Layout diagram of multiple pixels.

[0026] Figure 7A FIG. 4 is a schematic diagram of a pixel according to yet another embodiment of the present invention.

[0027] Figure 7B To correspond to Figure 7A Layout diagram of multiple pixels.

[0028] Figure 8A To correspond to Figure 4A Schematic diagram of the actuator device pixel.

[0029] Figure 8B To correspond to Figure 4A Schematic diagram of the driving signal of the actuator device.

[0030] Figure 9A FIG. 1 is a schematic diagram of a pixel according to an embodiment of the present invention.

[0031] Figure 9B To correspond to Figure 9A Layout diagram of multiple pixels.

[0032] Figure 10A FIG. 4 is a schematic diagram of a pixel according to another embodiment of the present invention.

[0033] Figure 10B To correspond to Figure 10A Layout diagram of multiple pixels.

[0034] Figure 11A FIG. 4 is a schematic diagram of a pixel according to yet another embodiment of the present invention.

[0035] Figure 11B To correspond to Figure 11A Layout diagram of multiple pixels.

[0036] Figure 12A To correspond to Figure 4A Schematic diagram of the actuator device pixel.

[0037] Figure 12B To correspond to Figure 4A Schematic diagram of the driving signal of the actuator device.

[0038] Figure 13A FIG. 1 is a schematic diagram of a pixel according to an embodiment of the present invention.

[0039] Figure 13B To correspond to Figure 13A Layout diagram of multiple pixels.

[0040] Figure 14A FIG. 4 is a schematic diagram of a pixel according to another embodiment of the present invention.

[0041] Figure 14B To correspond to Figure 14A Layout diagram of multiple pixels.

[0042] Figure 15A FIG. 4 is a schematic diagram of a pixel according to yet another embodiment of the present invention.

[0043] Figure 15B To correspond to Figure 15A Layout diagram of multiple pixels.

[0044] Figure 16A FIG. 1 shows a perspective view of an actuator device with four axes according to an embodiment of the present invention.

[0045] Figure 16B To correspond to Figure 16A Schematic diagram of the actuator device pixel.

[0046] Figure 16C To correspond to Figure 16A Schematic diagram of the driving signal of the actuator device.

[0047] Figure 17A FIG. 1 is a schematic diagram of a pixel according to an embodiment of the present invention.

[0048] Figure 17B To correspond to Figure 17A Layout diagram of multiple pixels.

[0049] Figure 18A FIG. 4 is a schematic diagram of a pixel according to another embodiment of the present invention.

[0050] Figure 18B To correspond to Figure 18A Layout diagram of multiple pixels.

[0051] Figure 19A FIG. 4 is a schematic diagram of a pixel according to yet another embodiment of the present invention.

[0052] Figure 19B To correspond to Figure 19A Layout diagram of multiple pixels.

[0053] Figure 20 A flowchart of a projection method according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0054] The foregoing and other technical aspects, features, and functions of the present invention are clearly presented in the following detailed description of a preferred embodiment with reference to the accompanying drawings. Directional terms (e.g., up, down, left, right, front, or back, etc.) mentioned in the following embodiments are intended solely to refer to the directions in the accompanying drawings. Therefore, the directional terms used are for illustrative purposes only and are not intended to limit the present invention.

[0055] Figure 1A FIG2 shows a schematic diagram of a projection device 100A according to an embodiment of the present invention. The projection device 100A may include an illumination system 110, a light valve 120, a projection lens 140, and an actuator device 150. In one embodiment, the actuator device 150 may include multiple frames, such as a frame body 151 and a frame body 152.

[0056] The lighting system 110 can be used to provide an illumination beam L1. The light valve 120 is located in the transmission path of the illumination beam L1. The light valve 120 can be used to convert the illumination beam L1 into an image beam L2. The light valve 120 can be, for example, a reflective light modulator such as a liquid crystal on silicon (LCoS) panel or a digital micro-mirror device (DMD). The light valve 120 can also be a transmissive light modulator such as a transparent liquid crystal panel, an electro-optical modulator, a magneto-optical modulator, or an acousto-optic modulator (AOM). The projection lens 140 is located in the transmission path of the image beam L2. The projection lens 140 can be used to project the image beam L2. For example, the projection lens 140 can project the image beam L2 onto a wall or screen outside the projection device 100A. The projection lens 140 is, for example, a combination of one or more optical lenses having a refractive power. For example, the projection lens 140 may include a combination of non-planar lenses, such as a biconcave lens, a biconvex lens, a meniscus lens, a convex-concave lens, a plano-convex lens, or a plano-concave lens. In one embodiment, the projection lens 140 may also include a planar optical lens. The actuator device 150 is located in the transmission path of the image beam L2 and may be disposed between the light valve 120 and the projection lens 140. The frame 151 or the frame 152 of the actuator device 150 may include an optical element, wherein the optical element can be used to increase the resolution of the image beam. In another embodiment, a portion of the actuator device 150 may be disposed within the projection lens 140. For example, one of the frame 151 (e.g., the first frame) or the frame 152 (e.g., the second frame) of the actuator device 150 may be disposed within the projection lens 140 (not shown).

[0057] Figure 1B 、 Figure 1C and Figure 1D Schematic diagrams of a projection device 100B, a projection device 100C, and a projection device 100D according to other embodiments of the present invention are respectively shown. Figures 1A to 1D ,in Figure 1B 、 Figure 1C and Figure 1D The projection device 100B, the projection device 100C and the projection device 100D are Figure 1AThe projection device 100A is similar to the projection device 100B, and the differences between the projection devices 100B, 100C and 100D and the projection device 100A are further described below. Similar elements are represented by the same symbols and are not repeated here. Figure 1A In the embodiment of the present invention, the projection device 100A may be non-telecentric. Figure 1A The non-telecentric projection device 100A may not include a prism. Figure 1B 、 Figure 1C and Figure 1D In the embodiment, the projection devices 100B, 100C, and 100D may be telecentric. Compared to the non-telecentric projection device 100A, the telecentric projection devices 100B, 100C, and 100D may further include a prism 130. The prism 130 of the projection devices 100B, 100C, and 100D is located on the transmission path of the image beam L2, and the prism 130 may be configured between the light valve 120 and the projection lens 140. Figure 1B In the embodiment of FIG. 1 , the frame 151 and the frame 152 of the actuator device 150 may be disposed between the light valve 120 and the prism 130. Figure 1C In the embodiment of FIG, the frame 151 and the frame 152 of the actuator device 150 may be disposed between the prism 130 and the projection lens 140. Figure 1D In the embodiment, the frame 151 and frame 152 of the actuator device 150 can be respectively disposed between the light valve 120 and the prism 130 and between the prism 130 and the projection lens 140, and the positions of the frame 151 and frame 152 are reversible. In other words, one of the frame 151 and frame 152 can be disposed between the light valve 120 and the prism 130, and the other of the frame 151 and frame 152 can be disposed between the prism 130 and the projection lens 140. Furthermore, in the configurations of telecentric projection devices 100C and 100D, in other embodiments not shown, the one of the frame 151 and frame 152 of the actuator device 150 that is closer to the projection lens 140 can also be disposed within the projection lens 140.

[0058] In order to enable readers to more clearly understand the differences between the technology of the present invention and the prior art, comparative examples of the prior art are listed below for illustration. Figure 2A FIG. 1 shows a top view of an actuator device 200 having a single axis according to a comparative example of the prior art. Figure 2B To correspond to Figure 2A Schematic diagram of pixel 231. Figure 2C To correspond to Figure 2A Schematic diagram of a driving signal 250, wherein the driving signal 250 is, for example, an analog signal or a digital signal. Figure 2A 、 Figure 2B and Figure 2C . The actuator device 200 may include a frame 211 and an optical element 213, wherein the optical element 213 may be configured in the frame 211. Assume that the actuator device 200 has an actuating axis 215 parallel to the W direction, wherein the W direction may be parallel to the angular bisector of the negative X-axis direction and the Y-axis direction (or the angular bisector of the X-axis direction and the Y-axis direction). The image light beam may be transmitted by the optical element 213 onto the virtual plane 230 and form a light spot on the virtual plane 230. When the actuator device 200 receives the driving signal 250, the actuator device 200 may drive the frame 211 to cause the optical element 213 to swing back and forth (reciprocally swing) based on the actuating axis 215. When the optical element 213 swings back and forth based on the actuating axis 215, the light spot formed by the image light beam on the virtual plane 230 can move back and forth along the radial direction of the axis 235, where the axis 235 is the projection of the actuating axis 215 on the virtual plane 230, and the axis 235 can be parallel to the W direction.

[0059] Time interval 251 can be a period for generating pixel 231. Taking time interval 251 as an example, at time t1, the drive signal 250 remains at a high voltage (represented by "1"). Therefore, the drive signal 250 does not drive the frame 211, preventing the optical element 213 from swinging about the actuating axis 215. Consequently, the light spot formed by the image beam on the virtual plane 230 remains at position 1. At time t2, the drive signal 250 transitions from a high voltage to a low voltage (represented by "0"), driving the frame 211 to swing the optical element 213 in the negative direction (which can be considered a counterclockwise rotation) about the actuating axis 215. Consequently, the light spot formed by the image beam on the virtual plane 230 moves along the X-axis and Y-axis to position 2. At time t3, the drive signal 250, which transitions from a low voltage to a high voltage, drives the frame 211, causing the optical element 213 to swing in the positive direction (which can be considered a clockwise rotation) about the actuating axis 215. Consequently, the light spot formed by the image beam on the virtual plane 230 can move along the negative X-axis and the negative Y-axis to position 1. Based on the above, during time interval 251, the light spot formed by the image beam on the virtual plane 230 can move between positions 1 and 2 to form pixel 231.

[0060] Figure 3A FIG. 1 shows a top view of an actuator device 300 with two axes according to a comparative example of the prior art. Figure 3B To correspond to Figure 3A Schematic diagram of pixel 331. Figure 3C To correspond to Figure 3ASchematic diagram of driving signals 350 and 370, wherein the driving signal 350 (or driving signal 370) is, for example, an analog signal or a digital signal. Figure 3A 、 Figure 3B and Figure 3C The actuator device 300 may include a frame 311 and an optical element 313, wherein the optical element 313 may be disposed within the frame 311. Assume that the actuator device 300 has an actuating axis 315 parallel to the X-axis direction and an actuating axis 317 parallel to the Y-axis direction. The image light beam may be transmitted by the optical element 313 onto the virtual plane 330 and form a light spot on the virtual plane 330. When the actuator device 300 receives a driving signal 350, the actuator device 300 may drive the frame 311 to cause the optical element 313 to swing back and forth based on the actuating axis 315. When the optical element 313 swings back and forth based on the actuating axis 315, the light spot formed by the image light beam on the virtual plane 330 may move back and forth along the radial direction of an axis 335, wherein the axis 335 is the projection of the actuating axis 315 on the virtual plane 330, and the axis 335 may be parallel to the X-axis direction. On the other hand, when the actuator device 300 receives the driving signal 370, the actuator device 300 can drive the frame 311 to cause the optical element 313 to swing back and forth about the actuation axis 317. When the optical element 313 swings back and forth about the actuation axis 317, the light spot formed by the image beam on the virtual plane 330 can move back and forth along the radial direction of the axis 337. The axis 337 is the projection of the actuation axis 317 on the virtual plane 330, and the axis 337 can be parallel to the Y-axis direction.

[0061] The frequencies of drive signal 350 and drive signal 370 may be the same. That is, the swing speed of optical element 313 when it swings back and forth about actuating axis 315 and the swing speed of optical element 313 when it swings back and forth about actuating axis 317 may be the same. Furthermore, the phases of drive signal 350 and drive signal 370 may be different. In this embodiment, the phase difference between drive signal 350 and drive signal 370 is assumed to be 90 degrees.

[0062] Time interval 351 can be a period for generating pixel 331. Taking time interval 351 as an example, at time t1, the drive signal 350, which is maintained at a high voltage, may not drive the frame 311, preventing the optical element 313 from oscillating about the actuating axis 315. Consequently, the light spot formed by the image beam on the virtual plane 330 may not move radially along the axis 335. On the other hand, the drive signal 370, which is also maintained at a high voltage, may not drive the frame 311, preventing the optical element 313 from oscillating about the actuating axis 317. Consequently, the light spot formed by the image beam on the virtual plane 330 may move in the negative X-axis direction. Therefore, during time t1, the light spot on the virtual plane 330 may not move radially along the axis 337 and remain at position 1.

[0063] At time t2, drive signal 350 remains at a high voltage, so it does not drive frame 311, preventing optical element 313 from oscillating about actuating axis 315. Consequently, the light spot formed by the image beam on virtual plane 330 does not move radially along axis 335. On the other hand, drive signal 370, having transitioned from a high voltage to a low voltage, drives frame 311, causing optical element 313 to oscillate in the negative direction (which can be considered a counterclockwise rotation) about actuating axis 317. Consequently, the light spot formed by the image beam on virtual plane 330 moves along the X-axis. Therefore, during time t2, the light spot on virtual plane 330 moves along the X-axis and ultimately settles at position 2.

[0064] At time t3, the drive signal 350, which transitions from a high potential to a low potential, drives the frame 311 to cause the optical element 313 to swing in the negative direction about the actuating axis 315. Consequently, the light spot formed by the image beam on the virtual plane 330 moves in the negative Y-axis direction. The drive signal 370 remains at a low potential, so it does not drive the frame 311, preventing the optical element 313 from swinging about the actuating axis 317. Consequently, the light spot formed by the image beam on the virtual plane 330 does not move radially along the axis 337. Therefore, during time t3, the light spot on the virtual plane 330 moves in the negative Y-axis direction and ultimately settles at position 3.

[0065] At time t4, drive signal 350 remains at a low voltage, so it does not drive frame 311, preventing optical element 313 from oscillating about actuating axis 315. Consequently, the light spot formed by the image beam on virtual plane 330 does not move radially along axis 335. On the other hand, drive signal 370, transitioning from a low voltage to a high voltage, drives frame 311, causing optical element 313 to oscillate in the positive direction (which can be considered a clockwise rotation) about actuating axis 317. Consequently, the light spot formed by the image beam on virtual plane 330 moves toward the negative X-axis. Therefore, during time t4, the light spot on virtual plane 330 moves toward the negative X-axis and ultimately settles at position 4.

[0066] At time t5, the drive signal 350, which transitions from a low potential to a high potential, drives the frame 311, causing the optical element 313 to swing in the positive direction about the actuating axis 315. Consequently, the light spot formed by the image beam on the virtual plane 330 moves in the Y-axis direction. Meanwhile, the drive signal 370 remains at a high potential, so the drive signal 350 does not drive the frame 311, preventing the optical element 313 from swinging about the actuating axis 317. Consequently, the light spot formed by the image beam on the virtual plane 330 does not move radially along the axis 337. Therefore, during time t5, the light spot on the virtual plane 330 moves in the Y-axis direction and ultimately settles at position 1.

[0067] At time t6, the drive signal 350 remains at a high level, so the drive signal 370 does not drive the frame 311, preventing the optical element 313 from oscillating about the actuating axis 315. Consequently, the light spot formed by the image beam on the virtual plane 330 does not move radially along the axis 335. On the other hand, the drive signal 370 remains at a high level, so the drive signal 350 does not drive the frame 311, preventing the optical element 313 from oscillating about the actuating axis 317. Consequently, the light spot formed by the image beam on the virtual plane 330 does not move radially along the axis 337. Therefore, during time t6, the light spot on the virtual plane 330 does not move and remains at position 1.

[0068] Depend on Figure 2A 、 Figure 2B 、 Figure 2C As can be seen from the comparative example, the single-axis actuator device 200 can move the light spot formed by the image beam on the virtual plane 220 between at most two positions, thereby increasing the resolution of the image beam. Figure 3A 、 Figure 3B and Figure 3CAs can be seen from the comparative example, the dual-axis actuator device 300 can move the light spot formed by the image beam on the virtual plane 330 between up to four positions, thereby further increasing the resolution of the image beam. However, the resolution increase that can be achieved with the above-mentioned prior art solutions is limited. If the number of actuating axes of the actuator device can be increased, the resolution of the image beam of the projection device can be further improved.

[0069] Back to Figures 1A to 1D , Figures 1A to 1D The actuator device 150 is, for example, Figure 4A The actuator device 400 has three axes. In other words, Figure 4A The actuator device 400 can be used for Figure 1A Projection device 100A to Figure 1D Any one of the projection devices 100D. Or, Figure 4A The portion of the actuator device 400 may also be configured to Figure 1A or Figure 1C or Figure 1D The housing 151 of the actuator device 150 is, for example, the housing 420 (for example, the first housing) of the actuator device 400, and the housing 152 of the actuator device 150 is, for example, the housing 421 (for example, the second housing) of the actuator device 400. Figure 4A A perspective view of an actuator device 400 with three axes according to an embodiment of the present invention is shown. Figure 4B To correspond to Figure 4A Schematic diagram of a pixel 491 of the actuator device 400. Figure 4C To correspond to Figure 4A Schematic diagram of drive signals 461, 462 and 463 of the actuator device 400, wherein the drive signal 461 (or the drive signals 462, 463) is, for example, an analog signal or a digital signal. Figures 1A to 1D 、 Figure 4A 、 Figure 4B and Figure 4C .

[0070] The actuator device 400 may include a base 411 (eg, a second base), a base 412 (eg, a first base), and a controller 40 (shown in FIG. Figures 1A to 1D). The actuator device 400 may further include a frame 421 (e.g., a second frame) corresponding to the base 411 and an optical element 431 (e.g., a second optical element). The frame 421 may be configured in the base 411, and the optical element 431 may be configured in the frame 421. The frame 421 may be connected to the base 411 via a rotating shaft 441. On the other hand, the actuator device 400 may further include a frame 420 (e.g., a first frame) corresponding to the base 412 and an optical element 432 (e.g., a first optical element). The frame 420 may include a moving frame 422 (e.g., a second moving frame) and a moving frame 423 (e.g., a first moving frame). The moving frame 422 may be configured in the base 412 and may be connected to the base 412 via a rotating shaft 442. The actuating frame 423 can be disposed within the actuating frame 422 and connected to the actuating frame 422 via a rotating shaft 443. The optical element 432 can be disposed within the actuating frame 423. The optical element 431 and the optical element 432 can be disposed on the optical axis OA of the image beam. In one embodiment, the optical element 431 (or optical element 432) can be disposed such that the normal to the center point of the optical element 431 (or optical element 432) coincides with the optical axis OA of the image beam. In other words, the frame 421 and the frame 420 can be stacked along the optical axis OA of the image beam, so that the optical element 431 and the optical element 432 can be stacked along the optical axis OA of the image beam.

[0071] The actuator device 400 may further include at least one driving assembly disposed between the base 411 and the frame 421, wherein the at least one driving assembly is, for example, a voice coil motor or a piezoelectric material. Figures 1A to 1D) can be coupled to at least one driving component and can be used to control the at least one driving component to drive the frame 421 via a signal (e.g., a second signal) to cause the optical element 431 to reciprocally swing relative to the base 411 based on the actuating axis 41 (e.g., the third actuating axis). The signal includes a driving signal 461 (e.g., the third actuating signal). On the other hand, the actuator device 400 can further include at least one driving component disposed between the base 412 and the frame 420, wherein the at least one driving component is, for example, a voice coil motor or a piezoelectric material. The controller 40 can be coupled to the at least one driving component and can be used to control the at least one driving component to drive the frame 420 via a signal (e.g., a first signal) to cause the optical element 432 to reciprocally swing relative to the base 412 based on the actuating axis 42 (e.g., the second actuating axis) and the actuating axis 43 (e.g., the first actuating axis). The signal includes a driving signal 462 and a driving signal 463 (e.g., the second actuating signal and the first actuating signal). In this embodiment, assuming that the optical axis OA of the image beam is parallel to the Z-axis, the actuation axis 42 can be parallel to the X-axis, the actuation axis 43 can be parallel to the Y-axis, and the actuation axis 41 can be parallel to the W-direction. The W-direction can be parallel to the angle bisector between the negative X-axis and the Y-axis (or the angle bisector between the X-axis and the Y-axis). In other words, the actuation axis 42 can be perpendicular to the actuation axis 43, and the actuation axis 41 can extend along the angle bisector between the actuation axes 42 and 43.

[0072] Specifically, the driving component 451 (e.g., the third driving component) can be disposed between the base 411 and the frame 421. The controller 40 can control the driving component 451 to drive the frame 421 by means of a driving signal 461 (e.g., the third driving signal) so that the optical element 431 swings back and forth relative to the base 411 based on the actuating axis 41. When the optical element 431 swings back and forth based on the actuating axis 41, the image beam passing through the optical element 431 can be transmitted to the virtual plane 490 to form a moving light spot on the virtual plane 490, and the movement trajectory of the light spot is similar to Figure 2B The movement trajectory of the light spot in the virtual plane 230 is shown in FIG. The number of driving components 451 can be 1, 2, or N (N is any positive integer). When the number of driving components 451 is 2, the two driving components 451 can be respectively arranged on opposite sides of the actuating shaft 41.

[0073] On the other hand, the at least one driving component between the base 412 and the frame 420 may include a driving component 452 (e.g., a second driving component) disposed between the base 412 and the actuating frame 422. The controller 40 may control the driving component 452 via a driving signal 462 (e.g., a second driving signal) to drive the actuating frame 422 so that the optical element 432 oscillates back and forth relative to the base 412 about the actuating axis 42. The at least one driving component between the base 412 and the frame 420 may further include a driving component 453 (e.g., a first driving component) disposed between the actuating frame 422 and the actuating frame 423. The controller 40 may control the driving component 453 via a driving signal 463 (e.g., a first driving signal) to drive the actuating frame 423 so that the optical element 432 oscillates back and forth relative to the base 412 about the actuating axis 43. When the optical element 432 swings back and forth based on the actuating shaft 42 and the actuating shaft 43, the image light beam passing through the optical element 432 can be transmitted to the virtual plane 490 to form a moving light spot on the virtual plane 490, and the moving trajectory of the light spot is similar to Figure 3B The moving trajectory of the light spot in the virtual plane 330.

[0074] The image beam is transmitted by optical elements 431 and 432 to virtual plane 490, forming a light spot on virtual plane 490. When optical element 431 oscillates back and forth about actuating axis 41, and optical element 432 oscillates back and forth about actuating axes 42 and 43, the movement trajectory of the light spot in virtual plane 490 appears to be a superposition of the movement trajectory of the light spot in virtual plane 230 and the movement trajectory of the light spot in virtual plane 330. The image beam passing through optical elements 431 and 432 forms a light spot on virtual plane 490 that moves in the order of positions 1 to 8, and the moving light spots form pixels 491.

[0075] In one embodiment, the drive assembly 452 may be disposed on the actuating shaft 43. The number of drive assemblies 452 may be 1, 2, or N (N is any positive integer). When there are two drive assemblies 452, the two drive assemblies 452 may be disposed on opposite sides of the actuating frame 422. In one embodiment, the drive assembly 453 may be disposed on the actuating shaft 42. The number of drive assemblies 453 may be 1, 2, or N (N is any positive integer). When there are two drive assemblies 453, the two drive assemblies 453 may be disposed on opposite sides of the actuating frame 423.

[0076] The frequencies of the drive signal 462 and the drive signal 463 (e.g., the first frequency) may be the same, and the phase difference between the drive signal 462 and the drive signal 463 may not be zero. For example, the phase difference between the drive signal 462 and the drive signal 463 may be 90 degrees. The frequency of the drive signal 462 (or the drive signal 463) may be different from the frequency of the drive signal 461 (e.g., the second frequency). The frequency of the drive signal 462 (or the drive signal 463) may be an integer multiple of the frequency of the drive signal 461. Figure 4C As shown, the frequency of the driving signal 462 (or the driving signal 463 ) may be twice the frequency of the driving signal 461 .

[0077] Time interval 465 can be a period for generating pixel 491. Taking time interval 465 as an example, at time t1, the drive signal 461, transitioning from a low voltage, can drive the frame 421 to cause the optical element 431 to oscillate in the positive direction of the actuating axis 41 (which can be considered as rotating clockwise around the actuating axis 41). When the optical element 431 oscillates in the positive direction of the actuating axis 41, the light spot formed by the image beam on the virtual plane 490 can move radially along an axis 492 in the negative X-axis and negative Y-axis directions. Axis 492 can be the projection of the actuating axis 41 onto the virtual plane 490 and can be parallel to the W direction. The drive signal 462, transitioning from a high voltage to a low voltage, can drive the actuating frame 422 to cause the optical element 432 to oscillate in the negative direction of the actuating axis 42 (which can be considered as rotating counterclockwise around the actuating axis 42). When the optical element 432 oscillates in the negative direction relative to the actuating axis 42, the light spot formed by the image beam on the virtual plane 490 can move radially along the axis 472 toward the Y-axis. Axis 472 can be the axis on the virtual plane 490 relative to the actuating axis 42 when the optical element 431 oscillates in the positive direction relative to the actuating axis 41. The drive signal 463, maintained at a high voltage, can prevent the actuating frame 423 from oscillating the optical element 432 relative to the actuating axis 43. Consequently, the light spot formed by the image beam on the virtual plane 490 can be prevented from moving radially along axis 473. Axis 473 can be the axis on the virtual plane 490 relative to the actuating axis 43 when the optical element 431 oscillates in the positive direction relative to the actuating axis 41. Based on the above, at time t1, the light spot formed by the image beam on the virtual plane 490 can move and remain at position 1.

[0078] At time t2, drive signal 461 remains at a high level, preventing it from driving frame 421 and preventing optical element 431 from oscillating about actuating axis 41. Consequently, the light spot formed by the image beam on virtual plane 490 does not move radially along axis 492. Drive signal 462 remains at a low level, preventing it from driving actuating frame 422 and preventing optical element 432 from oscillating about actuating axis 42. Consequently, the light spot formed by the image beam on virtual plane 490 does not move radially along axis 472. Drive signal 463, transitioning from a high level to a low level, drives actuating frame 423, causing optical element 432 to oscillate in the negative direction of actuating axis 43 (which can be considered as counterclockwise rotation about actuating axis 43). When optical element 432 oscillates in the negative direction of actuating axis 43, the light spot formed by the image beam on virtual plane 490 can move radially along axis 473 toward the X-axis. Based on the above, at time t2, the light spot formed by the image beam on virtual plane 490 can move and remain at position 2.

[0079] At time t3, drive signal 461 remains at a high level, preventing it from driving frame 421 and preventing optical element 431 from oscillating about actuating axis 41. Consequently, the image beam's spot on virtual plane 490 does not move radially along axis 492. Drive signal 462, transitioning from a low level to a high level, drives actuating frame 422, causing optical element 432 to oscillate in the positive direction of actuating axis 42. When optical element 432 oscillates in the positive direction of actuating axis 42, the image beam's spot on virtual plane 490 moves radially along axis 472 toward the negative Y-axis. Drive signal 463 remains at a low level, preventing it from driving actuating frame 423 and preventing optical element 432 from oscillating about actuating axis 43. Consequently, the image beam's spot on virtual plane 490 does not move radially along axis 473. Based on the above, at time point t3 , the light spot formed by the image light beam on the virtual plane 490 may move and stay at position 3 .

[0080] At time t4, drive signal 461 remains at a high voltage, preventing it from driving frame 421 and preventing optical element 431 from oscillating about actuating axis 41. Consequently, the image beam's spot on virtual plane 490 does not move radially along axis 492. Drive signal 462 remains at a high voltage, preventing it from driving actuating frame 422 and preventing optical element 432 from oscillating about actuating axis 42. Consequently, the image beam's spot on virtual plane 490 does not move radially along axis 472. Drive signal 463, transitioning from a low voltage to a high voltage, drives actuating frame 423, causing optical element 432 to oscillate in the positive direction about actuating axis 43. When optical element 432 oscillates in the positive direction about actuating axis 43, the image beam's spot on virtual plane 490 moves radially along axis 473 toward the negative X-axis. Based on the above, at time point t4 , the light spot formed by the image light beam on the virtual plane 490 may move and stay at position 4 .

[0081] At time t5, the drive signal 461, which transitions from a high potential to a low potential, drives the frame 421 to cause the optical element 431 to swing in the negative direction of the actuating axis 41. When the optical element 431 swings in the negative direction of the actuating axis 41, the light spot formed by the image beam on the virtual plane 490 moves in the X-axis and Y-axis directions along the radial direction of the axis 492. The drive signal 462, which transitions from a high potential to a low potential, drives the actuating frame 422 to cause the optical element 432 to swing in the negative direction of the actuating axis 42. When the optical element 432 swings in the negative direction of the actuating axis 42, the light spot formed by the image beam on the virtual plane 490 moves in the Y-axis direction along the radial direction of the axis 482. Axis 482 can be the axis of the virtual plane 490 relative to the actuating axis 42 when the optical element 431 swings in the negative direction of the actuating axis 41. Drive signal 463 remains at a high voltage, so it prevents the actuator frame 423 from being driven, preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the image beam spot formed on the virtual plane 490 does not move radially along axis 483. Axis 483 can be the axis of the virtual plane 490 relative to the actuator axis 43 when the optical element 431 oscillates in the negative direction about the actuator axis 41. Based on this, at time t5, the image beam spot formed on the virtual plane 490 moves to and remains at position 5.

[0082] At time t6, the drive signal 461 remains at a low level, preventing the frame 421 from being driven, preventing the optical element 431 from oscillating about the actuating axis 41. Consequently, the light spot formed by the image beam on the virtual plane 490 does not move radially along the axis 492. The drive signal 462 remains at a low level, preventing the actuating frame 422 from being driven, preventing the optical element 432 from oscillating about the actuating axis 42. Consequently, the light spot formed by the image beam on the virtual plane 490 does not move radially along the axis 482. The drive signal 463, transitioning from a high level to a low level, drives the actuating frame 423 to oscillate the optical element 432 in the negative direction of the actuating axis 43. When the optical element 432 oscillates in the negative direction of the actuating axis 43, the light spot formed by the image beam on the virtual plane 490 moves radially along the axis 483 toward the positive X-axis. Based on the above, at time point t6 , the light spot formed by the image light beam on the virtual plane 490 can move and stay at position 6 .

[0083] At time t7, drive signal 461 remains at a low level, preventing it from driving frame 421 and preventing optical element 431 from oscillating about actuating axis 41. Consequently, the image beam's spot on virtual plane 490 does not move radially along axis 492. Drive signal 462, transitioning from a low level to a high level, drives actuating frame 422, causing optical element 432 to oscillate in the positive direction of actuating axis 42. When optical element 432 oscillates in the positive direction of actuating axis 42, the image beam's spot on virtual plane 490 moves radially along axis 482 toward the negative Y-axis. Drive signal 463 remains at a low level, preventing it from driving actuating frame 423 and preventing optical element 432 from oscillating about actuating axis 43. Consequently, the image beam's spot on virtual plane 490 does not move radially along axis 483. Based on the above, at time point t7 , the light spot formed by the image light beam on the virtual plane 490 can move and stay at position 7 .

[0084] At time t8, the drive signal 461 remains at a low level, preventing the frame 421 from being driven, preventing the optical element 431 from oscillating about the actuating axis 41. Consequently, the light spot formed by the image beam on the virtual plane 490 does not move radially along the axis 492. The drive signal 462 remains at a high level, preventing the frame 422 from being driven, preventing the optical element 432 from oscillating about the actuating axis 42. Consequently, the light spot formed by the image beam on the virtual plane 490 does not move radially along the axis 482. The drive signal 463, transitioning from a low level to a high level, drives the actuating frame 423, causing the optical element 432 to oscillate in the positive direction about the actuating axis 43. When the optical element 432 oscillates in the positive direction about the actuating axis 43, the light spot formed by the image beam on the virtual plane 490 moves radially along the axis 483 toward the negative X-axis. Based on the above, at time point t8 , the light spot formed by the image light beam on the virtual plane 490 can move and stay at position 8 .

[0085] At time t9, the drive signal 461, transitioning from a low potential to a high potential, drives the frame 421 to cause the optical element 431 to oscillate in the positive direction of the actuating axis 41. When the optical element 431 oscillates in the positive direction of the actuating axis 41, the light spot formed by the image beam on the virtual plane 490 moves radially from the axis 492 toward the negative X-axis and the negative Y-axis. The drive signal 462, transitioning from a high potential to a low potential, drives the actuating frame 422 to cause the optical element 432 to oscillate in the negative direction of the actuating axis 42. When the optical element 432 oscillates in the negative direction of the actuating axis 42, the light spot formed by the image beam on the virtual plane 490 moves radially from the axis 472 toward the Y-axis. The drive signal 463 remains at a high potential, so the drive signal 463 does not drive the actuating frame 423, preventing the optical element 432 from oscillating about the actuating axis 43. Therefore, the light spot formed by the image beam on the virtual plane 490 may not move along the radial direction of the axis 473. Based on the above, at time point t9, the light spot formed by the image beam on the virtual plane 490 may return to position 1.

[0086] Controller 40 (shown in Figures 1A to 1D ) can adjust the swing angle of the frame 421 or the frame 420 by at least one driving component, thereby achieving the effect of changing the appearance of the pixel 491. Figure 5A FIG. 4 shows a schematic diagram of a pixel 491 according to an embodiment of the present invention. The light spot formed by the image beam on the virtual plane 490 can be moved in the order of position 1 to position 8 to form the pixel 491. Since position 2 overlaps with position 8, Figure 5A Position 2 is not shown. Figure 5A The pixels are mainly (other component numbers can refer to Figure 4A and Figure 4B ), in this embodiment, the swing angle corresponding to the actuating shaft 41 may be the swing angle corresponding to the actuating shaft 42. times, and the swing angle corresponding to the actuating axis 42 may be the same as the swing angle corresponding to the actuating axis 43. Therefore, when the image light beam passes through the optical element 431 and the optical element 432 that are swinging back and forth and is transmitted to the virtual plane 490 to form a light spot moving on the virtual plane 490, the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 492 corresponding to the actuating axis 41 (for example, the third actuating axis) may be the displacement (for example, the second displacement) of the light spot in the radial direction (for example, the second radial direction) of the axis 472 (or axis 482) corresponding to the actuating axis 42 (for example, the second actuating axis). times, and the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 492 of the corresponding actuating shaft 41 (for example, the third actuating shaft) may be the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 473 (or the axis 483) of the corresponding actuating shaft 43 (for example, the first actuating shaft). times.

[0087] Figure 6A FIG. 4 is a schematic diagram of a pixel 491 according to another embodiment of the present invention. The light spot formed by the image beam on the virtual plane 490 can be moved in the order of position 1 to position 8 to form the pixel 491. Figure 6A The pixels are mainly (other component numbers can refer to Figure 4A and Figure 4B ), in this embodiment, the swing angle corresponding to the actuating shaft 41 may be the swing angle corresponding to the actuating shaft 42. times, and the swing angle corresponding to the actuating axis 42 may be the same as the swing angle corresponding to the actuating axis 43. Therefore, when the image light beam passes through the optical element 431 and the optical element 432 that are swinging back and forth and is transmitted to the virtual plane 490 to form a light spot moving on the virtual plane 490, the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 492 corresponding to the actuating axis 41 (for example, the third actuating axis) may be the displacement (for example, the second displacement) of the light spot in the radial direction (for example, the second radial direction) of the axis 472 (or axis 482) corresponding to the actuating axis 42 (for example, the second actuating axis). times, and the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 492 of the corresponding actuating shaft 41 (for example, the third actuating shaft) may be the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 473 (or the axis 483) of the corresponding actuating shaft 43 (for example, the first actuating shaft). times.

[0088] Figure 7A FIG. 4 is a schematic diagram of a pixel 491 according to another embodiment of the present invention. The light spot formed by the image beam on the virtual plane 490 can be moved in the order of position 1 to position 8 to form the pixel 491. Figure 7A The pixels are mainly (other component numbers can refer to Figure 4A and Figure 4B ), in this embodiment, the swing angle corresponding to the actuating shaft 41 may be the swing angle corresponding to the actuating shaft 42. times, and the swing angle corresponding to the actuating axis 42 may be the same as the swing angle corresponding to the actuating axis 43. Therefore, when the image light beam passes through the optical element 431 and the optical element 432 that are swinging back and forth and is transmitted to the virtual plane 490 to form a light spot moving on the virtual plane 490, the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 492 corresponding to the actuating axis 41 (for example, the third actuating axis) may be the displacement (for example, the second displacement) of the light spot in the radial direction (for example, the second radial direction) of the axis 472 (or axis 482) corresponding to the actuating axis 42 (for example, the second actuating axis). times, and the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 492 of the corresponding actuating shaft 41 (for example, the third actuating shaft) may be the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 473 (or the axis 483) of the corresponding actuating shaft 43 (for example, the first actuating shaft). times.

[0089] Figure 5B To correspond to Figure 5A Layout diagram of multiple pixels 491. Figure 6B To correspond to Figure 6A Layout diagram of multiple pixels 491. Figure 7B To correspond to Figure 7A Layout diagram of multiple pixels 491. Figure 5B 、 Figure 6B and Figure 7B It can be seen that there are multiple Figure 6B The layout produced by the illustrated pixels 491 may have a greater pixel density.

[0090] Figure 8A To correspond to Figure 4A Schematic diagram of the actuator device 400 of the pixel 891. Figure 8B To correspond to Figure 4A Schematic diagram of drive signals 861, 862 and 863 of the actuator device 400, wherein the drive signal 861 (or drive signals 862, 863) is, for example, an analog signal or a digital signal. Figures 1A to 1D 、 Figure 4A 、 Figure 8A and Figure 8B In this embodiment, the drive signal 861 (e.g., the third drive signal) can be used to control the drive component 451 to drive the frame 421 so that the optical element 431 swings back and forth about the actuating axis 41. The drive signal 862 (e.g., the second drive signal) can be used to control the drive component 452 to drive the actuating frame 422 so that the optical element 432 swings back and forth about the actuating axis 42. The drive signal 863 (e.g., the first drive signal) can be used to control the drive component 453 to drive the actuating frame 423 so that the optical element 432 swings back and forth about the actuating axis 43. The frequencies of the drive signals 862 and 863 (e.g., the first frequency) can be the same, and the phase difference between the drive signals 862 and 863 can be non-zero. For example, the phase difference between the drive signals 862 and 863 can be 90 degrees. The frequency of the drive signal 861 (e.g., the second frequency) can be different from the frequency of the drive signal 862 (or the drive signal 863). The frequency of the driving signal 861 may be an integer multiple of the frequency of the driving signal 862 (or the driving signal 863). Figure 8B As shown, the frequency of the driving signal 861 may be four times the frequency of the driving signal 862 (or the driving signal 863 ).

[0091] Time interval 865 can be a period for generating pixel 891. Taking time interval 865 as an example, at time t1, the drive signal 862, transitioning from a low voltage to a high voltage, can drive the actuator frame 422 to cause the optical element 432 to oscillate in the positive direction of the actuator axis 42 (which can be considered as rotating clockwise around the actuator axis 42). When the optical element 432 oscillates in the positive direction of the actuator axis 42, the light spot formed by the image beam on the virtual plane 890 can move radially along the axis 820 toward the Y-axis. Axis 820 can be the projection of the actuator axis 42 onto the virtual plane 890 and can be parallel to the X-axis. The drive signal 863, maintained at a high voltage, can prevent the actuator frame 423 from oscillating, preventing the optical element 432 from oscillating in the positive direction of the actuator axis 42. Accordingly, the light spot formed by the image beam on virtual plane 890 may not move radially along axis 830. Axis 830 may be the projection of the actuating axis 43 on virtual plane 890 and may be parallel to the Y-axis. The drive signal 861, transitioning from a high potential to a low potential, drives the frame 421 to cause the optical element 431 to swing in the negative direction of the actuating axis 41 (which can be considered as rotating counterclockwise around the actuating axis 41). When the optical element 431 swings in the negative direction of the actuating axis 41, the light spot formed by the image beam on virtual plane 890 may move radially along axis 811 toward the negative X-axis and negative Y-axis. Axis 811 may be the axis of the virtual plane 890 relative to the actuating axis 41 when the optical element 432 swings in the positive direction of the actuating axes 42 and 43. Based on the above, at time t1, the light spot formed by the image beam on virtual plane 890 may move and remain at position 1.

[0092] During time interval 865, at time t2, drive signal 862 remains at a high level. Therefore, drive signal 862 does not drive actuator frame 422, preventing optical element 432 from oscillating about actuator axis 42. Consequently, the image beam spot formed on virtual plane 890 does not move radially along axis 820. Drive signal 863 remains at a high level. Therefore, drive signal 863 does not drive actuator frame 423, preventing optical element 432 from oscillating about actuator axis 43. Consequently, the image beam spot formed on virtual plane 890 does not move radially along axis 830. Drive signal 861, transitioning from a low level to a high level, drives frame 421, causing optical element 431 to oscillate in the positive direction of actuator axis 41. When optical element 431 oscillates in the positive direction of actuator axis 41, the image beam spot formed on virtual plane 890 moves radially along axis 811 in the X-axis and Y-axis directions. Based on the above, at time point t2, the light spot formed by the image light beam on the virtual plane 890 can move and stay at position 2.

[0093] At time t3, the drive signal 862 remains at a high level. Therefore, the drive signal 862 does not drive the actuator frame 422, preventing the optical element 432 from oscillating about the actuator axis 42. Consequently, the light spot formed by the image beam on the virtual plane 890 does not move radially along the axis 820. The drive signal 863, transitioning from a high level to a low level, drives the actuator frame 423 to oscillate the optical element 432 in the negative direction about the actuator axis 43 (which can be considered as rotating counterclockwise about the actuator axis 43). When the optical element 432 oscillates in the negative direction about the actuator axis 43, the light spot formed by the image beam on the virtual plane 890 moves radially along the axis 830 toward the X-axis. The drive signal 861, transitioning from a high level to a low level, drives the frame 421 to oscillate the optical element 431 in the negative direction about the actuator axis 41. When optical element 431 oscillates in the negative direction of actuating axis 41, the light spot formed by the image beam on virtual plane 890 can move radially along axis 812 in the negative X-axis and negative Y-axis directions. Axis 812 can be the axis of virtual plane 890 relative to actuating axis 41 when optical element 432 oscillates in the positive direction of actuating axis 42 and the negative direction of actuating axis 43. Based on the above, at time t3, the light spot formed by the image beam on virtual plane 890 can move and remain at position 3.

[0094] At time t4, drive signal 862 remains at a high level, preventing it from driving the actuator frame 422, preventing the optical element 432 from oscillating about the actuator axis 42. Consequently, the light spot formed by the image beam on the virtual plane 890 does not move radially along the axis 820. Drive signal 863 remains at a low level, preventing it from driving the actuator frame 423, preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the light spot formed by the image beam on the virtual plane 890 does not move radially along the axis 830. Drive signal 861, transitioning from a low level to a high level, drives the frame 421, causing the optical element 431 to oscillate in the positive direction about the actuator axis 41. When the optical element 431 oscillates in the positive direction about the actuator axis 41, the light spot formed by the image beam on the virtual plane 890 moves radially along the axis 812 in the X-axis and Y-axis directions. Based on the above, at time point t4, the light spot formed by the image light beam on the virtual plane 890 can move and stay at position 4.

[0095] At time t5, the drive signal 862, which transitions from a high potential to a low potential, drives the actuator frame 422 to cause the optical element 432 to oscillate in the negative direction of the actuator axis 42. When the optical element 432 oscillates in the negative direction of the actuator axis 42, the light spot formed by the image beam on the virtual plane 890 moves radially from the axis 820 toward the negative Y-axis. The drive signal 863 remains at a low potential, so the drive signal 863 does not drive the actuator frame 423, preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the light spot formed by the image beam on the virtual plane 890 does not move radially from the axis 830. The drive signal 861, which transitions from a high potential to a low potential, drives the frame 421 to cause the optical element 431 to oscillate in the negative direction of the actuator axis 41. When optical element 431 oscillates in the negative direction about actuating axis 41, the light spot formed by the image beam on virtual plane 890 can move radially along axis 813 in the negative X-axis and negative Y-axis directions. Axis 813 can be the projection of optical element 431 onto virtual plane 890 relative to actuating axis 41 when the optical element 431 oscillates in the negative direction about actuating axes 42 and 43. Based on the above, at time t5, the light spot formed by the image beam on virtual plane 890 can move and remain at position 5.

[0096] At time t6, drive signal 862 remains at a low level, preventing it from driving the actuator frame 422, preventing the optical element 432 from oscillating about the actuator axis 42. Consequently, the light spot formed by the image beam on virtual plane 890 does not move radially relative to axis 820. Drive signal 863 remains at a low level, preventing it from driving the actuator frame 423, preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the light spot formed by the image beam on virtual plane 890 does not move radially relative to axis 830. Drive signal 861, transitioning from a low level to a high level, drives frame 421, causing the optical element 431 to oscillate in the positive direction relative to the actuator axis 41. When the optical element 431 oscillates in the positive direction relative to the actuator axis 41, the light spot formed by the image beam on virtual plane 890 moves radially relative to axis 813 in the X-axis and Y-axis directions. Based on the above, at time point t6 , the light spot formed by the image light beam on the virtual plane 890 can move and stay at position 6 .

[0097] At time t7, the drive signal 862 remains at a low voltage, so the drive signal 862 does not drive the actuator frame 422, preventing the optical element 432 from swinging about the actuator axis 42. Consequently, the light spot formed by the image beam on the virtual plane 890 does not move radially along the axis 820. The drive signal 863, transitioning from a low voltage to a high voltage, drives the actuator frame 423 to swing the optical element 432 in the positive direction about the actuator axis 43. When the optical element 432 swings in the positive direction about the actuator axis 43, the light spot formed by the image beam on the virtual plane 890 moves radially toward the negative X-axis along the axis 830. The drive signal 861, transitioning from a high voltage to a low voltage, drives the frame 421 to swing the optical element 431 in the negative direction about the actuator axis 41. When optical element 431 oscillates in the negative direction of actuating axis 41, the light spot formed by the image beam on virtual plane 890 can move radially along axis 814 in the negative X-axis and negative Y-axis directions. Axis 814 can be the axis of virtual plane 890 relative to actuating axis 41 when optical element 432 oscillates in the negative direction of actuating axis 42 and the positive direction of actuating axis 43. Based on the above, at time t7, the light spot formed by the image beam on virtual plane 890 can move to and remain at position 7.

[0098] At time t8, drive signal 862 remains at a low level, preventing it from driving the actuator frame 422, preventing the optical element 432 from oscillating about the actuator axis 42. Consequently, the image beam's spot on virtual plane 890 does not move radially relative to axis 820. Drive signal 863 remains at a high level, preventing it from driving the actuator frame 423, preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the image beam's spot on virtual plane 890 does not move radially relative to axis 830. Drive signal 861, transitioning from a low level to a high level, drives frame 421, causing the optical element 431 to oscillate in the positive direction relative to the actuator axis 41. When the optical element 431 oscillates in the positive direction relative to the actuator axis 41, the image beam's spot on virtual plane 890 moves radially relative to axis 814 in the X-axis and Y-axis directions. Based on the above, at time point t8 , the light spot formed by the image light beam on the virtual plane 890 can move and stay at position 8 .

[0099] At time t9, the drive signal 862, which transitions from a low potential to a high potential, drives the actuator frame 422 to cause the optical element 432 to oscillate in the positive direction of the actuator axis 42. When the optical element 432 oscillates in the positive direction of the actuator axis 42, the light spot formed by the image beam on the virtual plane 890 moves radially from the axis 820 toward the Y-axis. The drive signal 863 remains at a low potential, so the drive signal 863 does not drive the actuator frame 423, preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the light spot formed by the image beam on the virtual plane 890 does not move radially from the axis 830. The drive signal 861, which transitions from a high potential to a low potential, drives the frame 421 to cause the optical element 431 to oscillate in the negative direction of the actuator axis 41. When optical element 431 oscillates in the negative direction relative to actuating axis 41, the light spot formed by the image beam on virtual plane 890 can move radially relative to axis 811 in the negative X-axis and negative Y-axis directions. Based on the above, at time t9, the light spot formed by the image beam on virtual plane 890 can return to position 1.

[0100] Controller 40 (shown in Figures 1A to 1D ) can adjust the swing angle of the frame 410 or the frame 420 by at least one driving component, thereby achieving the effect of changing the appearance of the pixel 891. Figure 9A FIG. 8 is a schematic diagram of a pixel 891 according to an embodiment of the present invention. The light spot formed by the image beam on the virtual plane 890 can be moved in the order of position 1 to position 8, thereby forming the pixel 891. Figure 9A The pixels are mainly (other component numbers can refer to Figure 4A and Figure 8A ), in this embodiment, the swing angle corresponding to the actuating shaft 41 may be the swing angle corresponding to the actuating shaft 42. times, and the swing angle corresponding to the actuating axis 42 may be the same as the swing angle corresponding to the actuating axis 43. Therefore, when the image light beam passes through the optical element 431 and the optical element 432 that are swinging back and forth and is transmitted to the virtual plane 890 to form a light spot moving on the virtual plane 890, the displacement (e.g., the third displacement) of the light spot in the radial direction (e.g., the third radial direction) of the axis 811 (or axis 812, axis 813, axis 814) corresponding to the actuating axis 41 (e.g., the third actuating axis) may be a factor of the displacement (e.g., the second displacement) of the light spot in the radial direction (e.g., the second radial direction) of the axis 820 corresponding to the actuating axis 42 (e.g., the second actuating axis). times, and the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 811 (or the axis 812, the axis 813, the axis 814) corresponding to the actuating shaft 41 (for example, the third actuating shaft) may be the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 830 corresponding to the actuating shaft 43 (for example, the first actuating shaft). times.

[0101] Figure 10A FIG. 8 is a schematic diagram of a pixel 891 according to another embodiment of the present invention. The light spot formed by the image beam on the virtual plane 890 can be moved in the order of position 1 to position 8, thereby forming the pixel 891. Figure 10A The pixels are mainly (other component numbers can refer to Figure 4A and Figure 8A ), in this embodiment, the swing angle corresponding to the actuating shaft 41 may be the swing angle corresponding to the actuating shaft 42. times, and the swing angle corresponding to the actuating axis 42 may be the same as the swing angle corresponding to the actuating axis 43. Therefore, when the image light beam passes through the optical element 431 and the optical element 432 that are swinging back and forth and is transmitted to the virtual plane 890 to form a light spot moving on the virtual plane 890, the displacement (e.g., the third displacement) of the light spot in the radial direction (e.g., the third radial direction) of the axis 811 (or axis 812, axis 813, axis 814) corresponding to the actuating axis 41 (e.g., the third actuating axis) may be a factor of the displacement (e.g., the second displacement) of the light spot in the radial direction (e.g., the second radial direction) of the axis 820 corresponding to the actuating axis 42 (e.g., the second actuating axis). times, and the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 811 (or the axis 812, the axis 813, the axis 814) corresponding to the actuating shaft 41 (for example, the third actuating shaft) may be the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 830 corresponding to the actuating shaft 43 (for example, the first actuating shaft). times.

[0102] Figure 11A FIG. 8 is a schematic diagram of a pixel 891 according to another embodiment of the present invention. The light spot formed by the image beam on the virtual plane 890 can be moved in the order of position 1 to position 8, thereby forming the pixel 891. Figure 11A The pixels are mainly (other component numbers can refer to Figure 4A and 8A ), in this embodiment, the swing angle corresponding to the actuating shaft 41 may be the swing angle corresponding to the actuating shaft 42. times, and the swing angle corresponding to the actuating axis 42 may be the same as the swing angle corresponding to the actuating axis 43. Therefore, when the image light beam passes through the optical element 431 and the optical element 432 that are swinging back and forth and is transmitted to the virtual plane 890 to form a light spot moving on the virtual plane 890, the displacement (e.g., the third displacement) of the light spot in the radial direction (e.g., the third radial direction) of the axis 811 (or axis 812, axis 813, axis 814) corresponding to the actuating axis 41 (e.g., the third actuating axis) may be a factor of the displacement (e.g., the second displacement) of the light spot in the radial direction (e.g., the second radial direction) of the axis 820 corresponding to the actuating axis 42 (e.g., the second actuating axis). times, and the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 811 (or the axis 812, the axis 813, the axis 814) corresponding to the actuating shaft 41 (for example, the third actuating shaft) may be the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 830 corresponding to the actuating shaft 43 (for example, the first actuating shaft). times.

[0103] Figure 9B To correspond to Figure 9A Layout diagram of multiple pixels 891. Figure 10B To correspond to Figure 10A Layout diagram of multiple pixels 891. Figure 11B To correspond to Figure 11A Layout diagram of multiple pixels 891. Figure 9B 、 Figure 10B and Figure 11B It can be seen that there are multiple Figure 10B The layout produced by the pixels 891 shown may have a greater pixel density.

[0104] Figure 12A To correspond to Figure 4A Schematic diagram of the actuator device 400 of pixel 1291. Figure 12B To correspond to Figure 4A Schematic diagram of the drive signals 1261, 1262 and 1263 of the actuator device 400, wherein the drive signal 1261 (or the drive signals 1262, 1263) is, for example, an analog signal or a digital signal. Figures 1A to 1D 、 Figure 4A 、 Figure 12A and Figure 12BIn this embodiment, the drive signal 1261 (e.g., the third drive signal) can be used to control the drive component 451 to drive the frame 421 so that the optical element 431 swings back and forth about the actuating axis 41. The drive signal 1262 (e.g., the second drive signal) can be used to control the drive component 452 to drive the actuating frame 422 so that the optical element 432 swings back and forth about the actuating axis 42. The drive signal 1263 (e.g., the first drive signal) can be used to control the drive component 453 to drive the actuating frame 423 so that the optical element 432 swings back and forth about the actuating axis 43. The frequencies of the drive signals 1262 and 1263 (e.g., the first frequency) can be the same, and the phase difference between the drive signals 1262 and 1263 can be non-zero. For example, the phase difference between the drive signals 1262 and 1263 can be 90 degrees. The frequency of the drive signal 1261 (e.g., the second frequency) can be different from the frequency of the drive signal 1262 (or the drive signal 1263). The frequency of the driving signal 1261 may be an integer multiple of the frequency of the driving signal 1262 (or the driving signal 1263). Figure 12B As shown, the frequency of the driving signal 1261 may be twice the frequency of the driving signal 1262 (or the driving signal 1263 ).

[0105] Time interval 1265 can be a period for generating pixel 1291. Taking time interval 1265 as an example, at time t1, the drive signal 1262, transitioning from a low voltage to a high voltage, can drive the actuator frame 422 to cause the optical element 432 to oscillate in the positive direction of the actuator axis 42 (which can be considered as rotating clockwise around the actuator axis 42). When the optical element 432 oscillates in the positive direction of the actuator axis 42, the light spot formed by the image beam on the virtual plane 1290 can move radially along the axis 1220 toward the Y-axis. Axis 1220 can be the projection of the actuator axis 42 onto the virtual plane 1290 and can be parallel to the X-axis. The drive signal 1263, maintained at a high voltage, can prevent the actuator frame 423 from oscillating, preventing the optical element 432 from oscillating in the positive direction of the actuator axis 42. Accordingly, the light spot formed by the image beam on virtual plane 1290 may not move radially along axis 1230. Axis 1230 may be the projection of actuating axis 43 on virtual plane 1290 and may be parallel to the Y-axis. The drive signal 1261, maintained at a high voltage, may not drive frame 421, preventing optical element 431 from oscillating about actuating axis 41. Accordingly, the light spot formed by the image beam on virtual plane 1290 may not move radially along axis 1211. Axis 1211 may be the axis on virtual plane 1290 relative to actuating axis 41 when optical element 432 oscillates in the positive direction of actuating axis 42 and actuating axis 43. Based on the above, at time t1, the light spot formed by the image beam on virtual plane 1290 may move and remain at position 1.

[0106] During time interval 1265, at time t2, drive signal 1262 remains at a high level. Therefore, drive signal 1262 does not drive actuator frame 422, preventing optical element 432 from oscillating about actuator axis 42. Consequently, the light spot formed by the image beam on virtual plane 1290 does not move radially relative to axis 1220. Drive signal 1263 remains at a high level. Therefore, drive signal 1263 does not drive actuator frame 423, preventing optical element 432 from oscillating about actuator axis 43. Consequently, the light spot formed by the image beam on virtual plane 1290 does not move radially relative to axis 1230. Drive signal 1261, transitioning from a high level to a low level, drives frame 421, causing optical element 431 to oscillate in the negative direction relative to actuator axis 41 (which can be considered as counterclockwise rotation about actuator axis 41). When optical element 431 oscillates in the negative direction of actuating axis 41, the light spot formed by the image beam on virtual plane 1290 can move radially along axis 1211 in the X-axis and Y-axis directions. Based on the above, at time t2, the light spot formed by the image beam on virtual plane 1290 can move and remain at position 2.

[0107] At time t3, drive signal 1262 remains high, preventing the actuator frame 422 from oscillating the optical element 432 about the actuator axis 42. Consequently, the image beam's spot on the virtual plane 1290 does not move radially relative to the axis 1220. Drive signal 1263, transitioning from high to low, drives the actuator frame 423 to oscillate the optical element 432 in the negative direction relative to the actuator axis 43 (which can be considered as rotating counterclockwise relative to the axis 43). When the optical element 432 oscillates in the negative direction relative to the actuator axis 43, the image beam's spot on the virtual plane 1290 moves radially relative to the axis 1230 toward the X-axis. Drive signal 1261 remains low, preventing the actuator frame 421 from oscillating the optical element 431 about the actuator axis 41. Accordingly, the light spot formed by the image beam on virtual plane 1290 may not move radially along axis 1212. Axis 1212 may be the axis on virtual plane 1290 relative to actuating axis 41 when optical element 432 oscillates in the positive direction of actuating axis 42 and the negative direction of actuating axis 43. Based on the above, at time t3, the light spot formed by the image beam on virtual plane 1290 may move and remain at position 3.

[0108] At time t4, drive signal 1262 remains at a high level, preventing it from driving the actuator frame 422, preventing the optical element 432 from oscillating about the actuator axis 42. Consequently, the image beam's spot on virtual plane 1290 does not move radially relative to axis 1220. Drive signal 1263 remains at a low level, preventing drive signal 863 from driving the actuator frame 423, preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the image beam's spot on virtual plane 1290 does not move radially relative to axis 1230. Drive signal 1261, transitioning from a low level to a high level, drives frame 421, causing the optical element 431 to oscillate in the positive direction relative to the actuator axis 41. When the optical element 431 oscillates in the positive direction relative to the actuator axis 41, the image beam's spot on virtual plane 1290 moves radially relative to axis 1212 toward the negative X-axis and negative Y-axis. Based on the above, at time point t4, the light spot formed by the image light beam on the virtual plane 1290 can move and stay at position 4.

[0109] At time t5, the drive signal 1262, transitioning from a high potential to a low potential, drives the actuator frame 422 to cause the optical element 432 to oscillate in the negative direction of the actuator axis 42. When the optical element 432 oscillates in the negative direction of the actuator axis 42, the light spot formed by the image beam on the virtual plane 1290 moves radially from the axis 1220 toward the negative Y-axis. The drive signal 1263 remains at a low potential, preventing the actuator frame 423 from oscillating the optical element 432 about the actuator axis 43. Consequently, the light spot formed by the image beam on the virtual plane 1290 does not move radially from the axis 1230. The drive signal 1261 remains at a high potential, preventing the frame 421 from oscillating the optical element 431 about the actuator axis 41. Consequently, the light spot formed by the image beam on the virtual plane 1290 does not move radially from the axis 1213. Axis 1213 may be the axis relative to actuating axis 41 on virtual plane 1290 when optical element 432 oscillates in the negative direction relative to actuating axis 42 and actuating axis 43. Based on the above, at time t5, the light spot formed by the image beam on virtual plane 1290 may move to and remain at position 5.

[0110] At time t6, drive signal 1262 remains at a low level, preventing it from driving the actuator frame 422, preventing the optical element 432 from oscillating about the actuator axis 42. Consequently, the image beam's spot on the virtual plane 1290 does not move radially relative to axis 1220. Drive signal 1263 remains at a low level, preventing it from driving the actuator frame 423, preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the image beam's spot on the virtual plane 1290 does not move radially relative to axis 1230. Drive signal 1261, transitioning from a high level to a low level, drives the frame 421, causing the optical element 431 to oscillate in the negative direction relative to the actuator axis 41. When the optical element 431 oscillates in the negative direction relative to the actuator axis 41, the image beam's spot on the virtual plane 1290 moves radially relative to axis 1213 in the X- and Y-axis directions. Based on the above, at time point t6 , the light spot formed by the image light beam on the virtual plane 1290 can move and stay at position 6 .

[0111] At time t7, drive signal 1262 remains at a low level, preventing it from driving the actuator frame 422, preventing the optical element 432 from oscillating about the actuator axis 42. Consequently, the image beam's spot on the virtual plane 1290 does not move radially along the axis 1220. Drive signal 1263, transitioning from a low level to a high level, drives the actuator frame 423 to oscillate the optical element 432 in the positive direction of the actuator axis 43. When the optical element 432 oscillates in the positive direction of the actuator axis 43, the image beam's spot on the virtual plane 1290 moves radially along the axis 1230 toward the negative X-axis. Drive signal 1261 remains at a low level, preventing it from driving the frame 421, preventing the optical element 431 from oscillating about the actuator axis 41. Consequently, the image beam's spot on the virtual plane 1290 does not move radially along the axis 1214. Axis 1214 may be the axis relative to actuating axis 41 on virtual plane 1290 when optical element 432 oscillates in the negative direction of actuating axis 42 and the positive direction of actuating axis 43. Based on the above, at time t7, the light spot formed by the image beam on virtual plane 1290 may move to and remain at position 7.

[0112] At time t8, drive signal 1262 remains at a low voltage, preventing it from driving the actuator frame 422, preventing the optical element 432 from oscillating about the actuator axis 42. Consequently, the light spot formed by the image beam on the virtual plane 1290 does not move radially relative to the axis 1220. Drive signal 1263 remains at a high voltage, preventing it from driving the actuator frame 423, preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the light spot formed by the image beam on the virtual plane 1290 does not move radially relative to the axis 1230. Drive signal 1261, transitioning from a low voltage to a high voltage, drives the frame 421, causing the optical element 431 to oscillate in the positive direction relative to the actuator axis 41. When optical element 431 oscillates in the positive direction of actuating axis 41, the light spot formed by the image beam on virtual plane 1290 can move radially along axis 1214 in the negative X-axis and negative Y-axis directions. Based on the above, at time t8, the light spot formed by the image beam on virtual plane 1290 can move and remain at position 8.

[0113] At time t9, the drive signal 1262, transitioning from a low potential to a high potential, drives the actuator frame 422 to cause the optical element 432 to oscillate in the positive direction of the actuator axis 42. When the optical element 432 oscillates in the positive direction of the actuator axis 42, the light spot formed by the image beam on the virtual plane 1290 moves radially from the axis 1220 toward the Y-axis. The drive signal 1263 remains at a high potential, preventing it from driving the actuator frame 423 and preventing the optical element 432 from oscillating about the actuator axis 43. Consequently, the light spot formed by the image beam on the virtual plane 1290 does not move radially from the axis 1230. The drive signal 1261 remains at a high potential, preventing it from driving the frame 421 and preventing the optical element 431 from oscillating about the actuator axis 41. Consequently, the light spot formed by the image beam on the virtual plane 1290 does not move radially from the axis 1211. Based on the above, at time point t9, the light spot formed by the image light beam on the virtual plane 1290 can return to position 1.

[0114] Controller 40 (shown in Figures 1A to 1D ) can adjust the swing angle of the frame 421 or the frame 420 by at least one driving component, thereby achieving the effect of changing the appearance of the pixel 1291. Figure 13A FIG2 shows a schematic diagram of a pixel 1291 according to an embodiment of the present invention. The light spot formed by the image beam on the virtual plane 1290 can be moved in the order of position 1 to position 8 to form the pixel 1291. Figure 13A The pixels are mainly (other component numbers can refer to Figure 4A and Figure 12A), in this embodiment, the swing angle corresponding to the actuating shaft 41 may be the swing angle corresponding to the actuating shaft 42. times, and the swing angle corresponding to the actuating axis 42 may be the same as the swing angle corresponding to the actuating axis 43. Therefore, when the image light beam passes through the optical element 431 and the optical element 432 that are swinging back and forth and is transmitted to the virtual plane 1290 to form a light spot moving on the virtual plane 1290, the displacement (e.g., the third displacement) of the light spot in the radial direction (e.g., the third radial direction) of the axis 1211 (or the axis 1212, the axis 1213, the axis 1214) corresponding to the actuating axis 41 (e.g., the third actuating axis) may be a factor of the displacement (e.g., the second displacement) of the light spot in the radial direction (e.g., the second radial direction) of the axis 1220 corresponding to the actuating axis 42 (e.g., the second actuating axis). times, and the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 1211 (or the axis 1212, the axis 1213, the axis 1214) corresponding to the actuating shaft 41 (for example, the third actuating shaft) may be the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 1230 corresponding to the actuating shaft 43 (for example, the first actuating shaft). times.

[0115] Figure 14A FIG2 shows a schematic diagram of a pixel 1291 according to another embodiment of the present invention. The light spot formed by the image beam on the virtual plane 1290 can be moved in the order of position 1 to position 8 to form the pixel 1291. Figure 14A The pixels are mainly (other component numbers can refer to Figure 4A and Figure 12A ), in this embodiment, the swing angle corresponding to the actuating shaft 41 may be the swing angle corresponding to the actuating shaft 42. times, and the swing angle corresponding to the actuating axis 42 may be the same as the swing angle corresponding to the actuating axis 43. Therefore, when the image light beam passes through the optical element 431 and the optical element 432 that are swinging back and forth and is transmitted to the virtual plane 1290 to form a light spot moving on the virtual plane 1290, the displacement (e.g., the third displacement) of the light spot in the radial direction (e.g., the third radial direction) of the axis 1211 (or the axis 1212, the axis 1213, the axis 1214) corresponding to the actuating axis 41 (e.g., the third actuating axis) may be a factor of the displacement (e.g., the second displacement) of the light spot in the radial direction (e.g., the second radial direction) of the axis 1220 corresponding to the actuating axis 42 (e.g., the second actuating axis). times, and the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 1211 (or the axis 1212, the axis 1213, the axis 1214) corresponding to the actuating shaft 41 (for example, the third actuating shaft) may be the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 1230 corresponding to the actuating shaft 43 (for example, the first actuating shaft). times.

[0116] Figure 15A FIG2 shows a schematic diagram of a pixel according to another embodiment of the present invention. The light spot formed by the image beam on the virtual plane 1290 can be moved in the order of position 1 to position 8, thereby forming a pixel 1291. Figure 15A The pixels are mainly (other component numbers can refer to Figure 4A and Figure 12A ), in this embodiment, the swing angle corresponding to the actuating shaft 41 may be the swing angle corresponding to the actuating shaft 42. times, and the swing angle corresponding to the actuating axis 42 may be the same as the swing angle corresponding to the actuating axis 43. Therefore, when the image light beam passes through the optical element 431 and the optical element 432 that are swinging back and forth and is transmitted to the virtual plane 1290 to form a light spot moving on the virtual plane 1290, the displacement (e.g., the third displacement) of the light spot in the radial direction (e.g., the third radial direction) of the axis 1211 (or the axis 1212, the axis 1213, the axis 1214) corresponding to the actuating axis 41 (e.g., the third actuating axis) may be a factor of the displacement (e.g., the second displacement) of the light spot in the radial direction (e.g., the second radial direction) of the axis 1220 corresponding to the actuating axis 42 (e.g., the second actuating axis). times, and the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 1211 (or the axis 1212, the axis 1213, the axis 1214) corresponding to the actuating shaft 41 (for example, the third actuating shaft) may be the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 1230 corresponding to the actuating shaft 43 (for example, the first actuating shaft). times.

[0117] Figure 13B To correspond to Figure 13A Layout diagram of multiple pixels 1291. Figure 14B To correspond to Figure 14A Layout diagram of multiple pixels 1291. Figure 15B To correspond to Figure 15A Layout diagram of multiple pixels 1291. Figure 13B 、 Figure 14B and Figure 15B It can be seen that there are multiple Figure 14B The layout produced by the illustrated pixels 1291 may have a greater pixel density.

[0118] Depend on Figures 4A to 15B As can be seen from the embodiment of the present invention shown, the three-axis actuator device 400 can move the light spots formed by the image beam on the virtual planes 490, 890, and 1290 between 8 positions to form pixels 491, 891, and 129 respectively by using the various driving methods described above. Figure 2A 、 Figure 2B and Figure 2C Comparative Examples and Figure 3A 、 Figure 3B and Figure 3C The comparative example can further increase the resolution of the image beam.

[0119] Back to Figures 1A to 1D , Figures 1A to 1D The actuator device 150 is, for example, Figure 16A The actuator device 400 has four axes. In other words, Figure 16A The actuator device 600 can be used for Figure 1A Projection device 100A to Figure 1D Any one of the projection devices 100D. Or, Figure 16A The portion of the actuator device 600 may also be configured to Figure 1A or Figure 1C or Figure 1D The housing 151 of the actuator device 150 is, for example, the housing 620 (for example, the first housing) of the actuator device 600, and the housing 152 of the actuator device 150 is, for example, the housing 610 (for example, the second housing) of the actuator device 600. Figure 16A A top view of an actuator device 600 with four axes according to an embodiment of the present invention is shown. Figure 16B To correspond to Figure 16A Schematic diagram of the actuator device 600 of pixel 1691. Figure 16C To correspond to Figure 16A Schematic diagram of drive signals 1661, 1662, 1663 and 1664 of the actuator device 600, wherein the drive signal 1661 (or the drive signals 1662, 1663, 1664) is, for example, an analog signal or a digital signal. Figures 1A to 1D 、 Figure 16A 、 Figure 16B and Figure 16C .

[0120] The actuator device 600 may include a base 1611 (eg, a second base), a base 1612 (eg, a first base), and a controller 160 (shown in FIG. Figures 1A to 1D). The actuator device 600 may further include a frame 610 (e.g., a second frame) corresponding to the base 1611 and an optical element 1631 (e.g., a second optical element). The frame 610 may be disposed within the base 1611, and the optical element 1631 may be disposed within the frame 610. The frame 610 may be connected to the base 1611 via a rotating shaft 1641. The frame 610 may include an actuating frame 1621 (e.g., a fourth actuating frame) and an actuating frame 1622 (e.g., a third actuating frame). The actuating frame 1621 may be disposed within the base 1611 and may be connected to the base 1611 via a rotating shaft 1641. The actuating frame 1622 may be disposed within the actuating frame 1621 and may be connected to the actuating frame 1621 via a rotating shaft 1642. The optical element 1631 may be disposed in the actuating frame 1622. On the other hand, the actuator device 600 may further include a frame 620 (e.g., a first frame) corresponding to the base 1612 and an optical element 1632 (e.g., a first optical element). The frame 620 may be disposed within the base 1612, and the optical element 1632 may be disposed within the frame 620. The frame 620 may be connected to the base 1612 via a rotating shaft 1643. The frame 620 may include an actuating frame 1623 (e.g., a second actuating frame) and an actuating frame 1624 (e.g., a first actuating frame). The actuating frame 1623 may be disposed within the base 1612 and may be connected to the base 1612 via a rotating shaft 1643. The actuating frame 1624 may be disposed within the actuating frame 1623 and may be connected to the actuating frame 1623 via a rotating shaft 1644. The optical element 1632 may be disposed within the actuating frame 1624. The optical element 1631 and the optical element 1632 can be arranged on the optical axis OA of the image beam. In one embodiment, the optical element 1631 (or optical element 1632) can be arranged so that the normal to the center point of the optical element 1631 (or optical element 1632) coincides with the optical axis OA of the image beam. In other words, the frame 610 and the frame 620 can be stacked along the optical axis OA of the image beam, so that the optical element 1631 and the optical element 1632 can be stacked along the optical axis OA of the image beam.

[0121] The actuator device 600 may further include at least one driving component disposed between the base 1611 and the frame 610, wherein the at least one driving component is, for example, a voice coil motor or a piezoelectric material. Figures 1A to 1D) can be coupled to at least one driving component and can be used to control the at least one driving component to drive the frame 610 via a signal (e.g., a second signal) to cause the optical element 1631 to swing back and forth relative to the base 1611 based on the actuating axis 161 (e.g., the fourth actuating axis) and the actuating axis 162 (e.g., the third actuating axis). The aforementioned signal includes a driving signal 1661 and a driving signal 1662 (e.g., the fourth actuating signal and the third actuating signal). On the other hand, the actuator device 600 may further include at least one driving component disposed between the base 1612 and the frame 620, wherein the at least one driving component is, for example, a voice coil motor or a piezoelectric material. The controller 160 can be coupled to at least one drive component and can be configured to control the at least one drive component to drive the frame 620 via a signal (e.g., a first signal) to cause the optical element 1632 to oscillate back and forth relative to the base 1612 along an actuating axis 163 (e.g., a second actuating axis) and an actuating axis 164 (e.g., a first actuating axis). The signal includes a drive signal 1663 and a drive signal 1664 (e.g., a second actuating signal and a first actuating signal). In this embodiment, assuming that the optical axis OA of the image beam is parallel to the Z-axis, the actuating axis 161 or the actuating axis 163 can be parallel to the X-axis, and the actuating axis 162 or the actuating axis 164 can be parallel to the Y-axis. In other words, the actuating axis 161 (or the actuating axis 163) can be perpendicular to the actuating axis 162 (or the actuating axis 164). The actuating axis 161 and the actuating axis 163 can be coincident. The actuating axis 162 and the actuating axis 164 can be coincident.

[0122] Specifically, the at least one driving component between the base 1611 and the frame 610 may include a driving component 1651 (e.g., a fourth driving component) disposed between the base 1611 and the actuating frame 1621. The controller 160 may control the driving component 1651 via a driving signal 1661 (e.g., a fourth driving signal) to drive the frame 1621 so that the optical element 1631 oscillates back and forth relative to the base 1611 about the actuating axis 161. The number of driving components 1651 may be one, two, or N (N being any positive integer). When there are two driving components 1651, the two driving components 1651 may be disposed on opposite sides of the actuating frame 1621. Furthermore, the at least one driving component between the base 1611 and the frame 610 may further include a driving component 1652 (e.g., a third driving component) disposed between the actuating frame 1621 and the actuating frame 1622. The controller 160 can control the driving component 1652 to drive the frame 1622 by means of a driving signal 1662 (for example, a third driving signal) so that the optical element 1631 swings back and forth relative to the base 1611 based on the actuating axis 162. The number of driving components 1652 can be 1, 2, or N (N is an arbitrary positive integer). When the number of driving components 1652 is 2, the two driving components 1652 can be respectively arranged on opposite sides of the actuating frame 1622. When the optical element 1631 swings back and forth based on the actuating axis 161 and the actuating axis 162, the image light beam passing through the optical element 1631 can be transmitted to the virtual plane 1690 to form a moving light spot on the virtual plane 1690, and the moving trajectory of the light spot is similar to Figure 3B In one embodiment, the driving component 1651 may be disposed on the actuating shaft 162. The driving component 1652 may be disposed on the actuating shaft 161.

[0123] On the other hand, the at least one driving component between the base 1612 and the frame 620 may include a driving component 1653 (e.g., a second driving component) disposed between the base 1612 and the actuating frame 1623. The controller 160 may control the driving component 1653 via a driving signal 1663 (e.g., a second driving signal) to drive the frame 1623 so that the optical element 1632 oscillates back and forth relative to the base 1612 about the actuating axis 163. The number of driving components 1653 may be one, two, or N (N being any positive integer). When there are two driving components 1653, the two driving components 1653 may be disposed on opposite sides of the actuating frame 1623. Furthermore, the at least one driving component between the base 1612 and the frame 620 may further include a driving component 1654 (e.g., a first driving component) disposed between the actuating frame 1623 and the actuating frame 1624. The controller 160 can control the driving component 1654 to drive the frame 1624 by means of a driving signal 1664 (e.g., a first driving signal) so that the optical element 1632 swings back and forth relative to the base 1612 based on the actuating axis 164. The number of driving components 1654 can be 1, 2, or N (N is an arbitrary positive integer). When the number of driving components 1654 is 2, the two driving components 1654 can be respectively arranged on opposite sides of the actuating frame 1624. When the optical element 1632 swings back and forth based on the actuating axis 163 and the actuating axis 164, the image light beam passing through the optical element 1632 can be transmitted to the virtual plane 1690 to form a moving light spot on the virtual plane 1690, and the moving trajectory of the light spot is similar to Figure 3B The moving trajectory of the light spot in the virtual plane 330 is shown in FIG. 1 . In one embodiment, the driving component 1653 may be disposed on the actuating shaft 164 . The driving component 1654 may be disposed on the actuating shaft 163 .

[0124] The image beam is transmitted by optical elements 1631 and 1632 to virtual plane 1690, forming a light spot on virtual plane 1690. When optical element 1631 oscillates back and forth along actuating axes 161 and 162, and optical element 1632 oscillates back and forth along actuating axes 163 and 164, the movement trajectory of the light spot in virtual plane 1690 appears to be a superposition of two identical movement trajectories of the light spot in virtual plane 330. The image beam passing through optical elements 1631 and 1632 forms a light spot on virtual plane 1690 that moves in the order of position 1 to position 16, and the moving light spots form pixels 1691.

[0125] The frequencies of drive signal 1661 and drive signal 1662 (e.g., the second frequency) may be the same, and the phase difference between drive signal 1661 and drive signal 1662 may be non-zero. For example, the phase difference between drive signal 1661 and drive signal 1662 may be 90 degrees. The frequencies of drive signal 1663 and drive signal 1664 (e.g., the first frequency) may be the same, and the phase difference between drive signal 1663 and drive signal 1664 may be non-zero. For example, the phase difference between drive signal 1663 and drive signal 1664 may be 90 degrees. The frequency of drive signal 1661 (or drive signal 1662) (e.g., the second frequency) and the frequency of drive signal 1663 (or drive signal 1664) (e.g., the first frequency) may differ. In one embodiment, the frequency of drive signal 1661 (or drive signal 1662) may be an integer multiple of the frequency of drive signal 1663 (or drive signal 1664). For example, the frequency of the driving signal 1661 (or the driving signal 1662) may be four times the frequency of the driving signal 1663 (or the driving signal 1664). In another embodiment, the frequency of the driving signal 1663 (or the driving signal 1664) may be an integer multiple of the frequency of the driving signal 1661 (or the driving signal 1662). For example, the frequency of the driving signal 1663 (or the driving signal 1664) may be four times the frequency of the driving signal 1661 (or the driving signal 1662). Figure 16C shown.

[0126] Time interval 1665 can be a period for generating pixel 1691. Taking time interval 1665 as an example, at time t1, the drive signal 1661 transitioning from a low voltage to a high voltage can drive the actuator frame 1621 to cause the optical element 1631 to oscillate in the positive direction of the actuator axis 161 (which can be considered as rotating clockwise around the actuator axis 161). When the optical element 1631 oscillates in the positive direction of the actuator axis 161, the light spot formed by the image beam on the virtual plane 1690 can move radially along an axis 1670 toward the Y-axis. Axis 1670 can be the projection of the actuator axis 161 onto the virtual plane 1690 and can be parallel to the X-axis. The drive signal 1662, maintained at a high voltage, can prevent the actuator frame 1622 from oscillating, preventing the optical element 1631 from oscillating in the positive direction of the actuator axis 161. Accordingly, the light spot formed by the image beam on virtual plane 1690 may not move radially along axis 1680. Axis 1680 may be the projection of the actuating axis 162 on virtual plane 1690 and may be parallel to the Y-axis. The drive signal 1663, transitioning from a high potential to a low potential, drives the actuating frame 1623 to cause the optical element 1632 to swing in the negative direction relative to the actuating axis 163 (which can be considered as rotating counterclockwise around the actuating axis 163). When the optical element 1632 swings in the negative direction relative to the actuating axis 163, the light spot formed by the image beam on virtual plane 1690 may move radially along axis 71 toward the Y-axis. Axis 71 may be the axis on virtual plane 1690 relative to the actuating axis 163 when the optical element 1631 swings in the positive direction relative to the actuating axes 161 and 162. Axis 71 may be parallel to the X-axis. Maintaining a high level of drive signal 1664 prevents the actuator frame 1624 from being driven, preventing the optical element 1632 from oscillating about the actuator axis 164. Consequently, the light spot formed by the image beam on the virtual plane 1690 does not move radially along axis 72. Axis 72 may be the axis on the virtual plane 1690 relative to the actuator axis 164 when the optical element 1631 oscillates in the positive direction about the actuator axes 161 and 162. Axis 72 may be parallel to the Y-axis. Based on the above, at time t1, the light spot formed by the image beam on the virtual plane 1690 may move and remain at position 1.

[0127] At time t2, drive signal 1661 remains at a high voltage, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a high voltage, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663 remains at a low voltage, preventing it from driving frame 1623 and preventing optical element 1632 from oscillating about actuating axis 163. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 71. Drive signal 1664, transitioning from a high voltage to a low voltage, drives actuator frame 1624, causing optical element 1632 to swing in the negative direction of actuator axis 164 (which can be considered as rotating counterclockwise around actuator axis 164). As optical element 1632 swings in the negative direction of actuator axis 164, the light spot formed by the image beam on virtual plane 1690 moves radially from axis 72 toward the X-axis. Based on the above, at time t2, the light spot formed by the image beam on virtual plane 1690 moves to and remains at position 2.

[0128] At time t3, drive signal 1661 remains at a high voltage, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a high voltage, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663, transitioning from a low voltage to a high voltage, drives actuating frame 1623, causing optical element 1632 to oscillate in the positive direction relative to actuating axis 163. When optical element 1632 oscillates in the positive direction about actuating axis 163, the light spot formed by the image beam on virtual plane 1690 can move radially from axis 71 toward the negative Y-axis. Drive signal 1664 remains at a low voltage, so it does not drive frame 1624, preventing optical element 1632 from oscillating about actuating axis 164. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially from axis 72. Based on the above, at time t3, the light spot formed by the image beam on virtual plane 1690 can move and remain at position 3.

[0129] At time t4, drive signal 1661 remains at a high voltage, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a high voltage, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663 remains at a high voltage, preventing it from driving frame 1623 and preventing optical element 1632 from oscillating about actuating axis 163. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 71. Drive signal 1664, transitioning from a low voltage to a high voltage, drives actuator frame 1624 to swing optical element 1632 in the positive direction of actuator axis 164. As optical element 1632 swings in the positive direction of actuator axis 164, the image beam's spot on virtual plane 1690 moves radially from axis 72 toward the negative X-axis. Based on the above, at time t4, the image beam's spot on virtual plane 1690 moves to and remains at position 4.

[0130] At time t5, drive signal 1661 remains at a high voltage, so it does not drive frame 1621, preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially along axis 1670. Drive signal 1662, transitioning from a high voltage to a low voltage, drives actuating frame 1622, causing optical element 1631 to oscillate in the negative direction about actuating axis 162 (which can be considered as rotating counterclockwise about actuating axis 162). When optical element 1631 oscillates in the negative direction about actuating axis 162, the light spot formed by the image beam on virtual plane 1690 moves radially along axis 1680 toward the X-axis. Drive signal 1663, transitioning from a high voltage to a low voltage, drives actuating frame 1623, causing optical element 1632 to oscillate in the negative direction about actuating axis 163. When the optical element 1632 oscillates about the negative direction of the actuating axis 163, the light spot formed by the image beam on the virtual plane 1690 can move radially along axis 73 toward the Y-axis. Axis 73 can be the axis on the virtual plane 1690 relative to the actuating axis 163 when the optical element 1631 oscillates about the positive direction of the actuating axis 161 and the negative direction of the actuating axis 162. Axis 73 can be parallel to the X-axis. Drive signal 1664 is maintained at a high voltage, so drive signal 1664 does not drive frame 1624, preventing the optical element 1632 from oscillating about the actuating axis 164. Consequently, the light spot formed by the image beam on the virtual plane 1690 does not move radially along axis 74. Axis 74 can be the axis on the virtual plane 1690 relative to the actuating axis 164 when the optical element 1631 oscillates about the positive direction of the actuating axis 161 and the negative direction of the actuating axis 162. The axis 74 may be parallel to the Y-axis direction. Based on the above, at time point t5, the light spot formed by the image light beam on the virtual plane 1690 may move and stay at position 5.

[0131] At time t6, drive signal 1661 remains at a high level, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially along axis 1670. Drive signal 1662 remains at a low level, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially along axis 1680. Drive signal 1663 remains at a low level, preventing it from driving frame 1623 and preventing optical element 1632 from oscillating about actuating axis 163. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially along axis 73. Drive signal 1664, transitioning from a high voltage to a low voltage, drives actuator frame 1624 to swing optical element 1632 in the negative direction of actuator axis 164. As optical element 1632 swings in the negative direction of actuator axis 164, the image beam's spot on virtual plane 1690 moves radially from axis 74 toward the X-axis. Based on the above, at time t6, the image beam's spot on virtual plane 1690 moves to and remains at position 6.

[0132] At time t7, drive signal 1661 remains at a high voltage, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a low voltage, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663, transitioning from a low voltage to a high voltage, drives actuating frame 1623, causing optical element 1632 to oscillate in the positive direction relative to actuating axis 163. When optical element 1632 oscillates in the positive direction of actuating axis 163, the image beam's spot on virtual plane 1690 moves radially from axis 73 toward the negative Y-axis. Drive signal 1664 remains at a low voltage, preventing it from driving frame 1624 and preventing optical element 1632 from oscillating about actuating axis 164. Consequently, the image beam's spot on virtual plane 1690 does not move radially from axis 74. Based on this, at time t7, the image beam's spot on virtual plane 1690 moves to and remains at position 7.

[0133] At time t8, drive signal 1661 remains at a high level, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a low level, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663 remains at a high level, preventing it from driving frame 1623 and preventing optical element 1632 from oscillating about actuating axis 163. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 73. Drive signal 1664, transitioning from a low voltage to a high voltage, drives actuator frame 1624 to swing optical element 1632 in the positive direction of actuator axis 164. As optical element 1632 swings in the positive direction of actuator axis 164, the image beam's spot on virtual plane 1690 moves radially from axis 74 toward the negative X-axis. Based on the above, at time t8, the image beam's spot on virtual plane 1690 moves to and remains at position 8.

[0134] At time t9, drive signal 1661, transitioning from a high potential to a low potential, drives actuator frame 1621 to cause optical element 1631 to oscillate in the negative direction of actuator axis 161. When optical element 1631 oscillates in the negative direction of actuator axis 161, the light spot formed by the image beam on virtual plane 1690 moves radially from axis 1670 toward the negative Y-axis. Drive signal 1662 remains at a low potential, preventing it from driving frame 1622, preventing optical element 1631 from oscillating about actuator axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially from axis 1680. Drive signal 1663, transitioning from a high potential to a low potential, drives actuator frame 1623 to cause optical element 1632 to oscillate in the negative direction of actuator axis 163. When optical element 1632 oscillates in the negative direction about actuating axis 163, the light spot formed by the image beam on virtual plane 1690 can move radially along axis 75 toward the Y-axis. Axis 75 can be the axis on virtual plane 1690 relative to actuating axis 163 when optical element 1631 oscillates in the negative direction about actuating axis 161 and actuating axis 162. Axis 75 can be parallel to the X-axis. Drive signal 1664 is maintained at a high voltage, so drive signal 1664 does not drive frame 1624, preventing optical element 1632 from oscillating about actuating axis 164. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially along axis 76. Axis 76 can be the axis on virtual plane 1690 relative to actuating axis 164 when optical element 1631 oscillates in the negative direction about actuating axis 161 and actuating axis 162. Axis 76 can be parallel to the Y-axis. Based on the above, at time point t9, the light spot formed by the image light beam on the virtual plane 1690 can move and stay at position 9.

[0135] At time t10, drive signal 1661 remains at a low level, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a low level, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663 remains at a low level, preventing it from driving frame 1623 and preventing optical element 1632 from oscillating about actuating axis 163. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 75. Drive signal 1664, transitioning from a high voltage to a low voltage, drives actuator frame 1624 to swing optical element 1632 in the negative direction of actuator axis 164. As optical element 1632 swings in the negative direction of actuator axis 164, the image beam's spot on virtual plane 1690 moves radially from axis 76 toward the X-axis. Based on the above, at time t10, the image beam's spot on virtual plane 1690 moves to and remains at position 10.

[0136] At time t11, drive signal 1661 remains at a low voltage, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a low voltage, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663, transitioning from a low voltage to a high voltage, drives actuating frame 1623, causing optical element 1632 to oscillate in the positive direction relative to actuating axis 163. When optical element 1632 oscillates in the positive direction about actuating axis 163, the image beam spot formed on virtual plane 1690 can move radially from axis 75 toward the negative Y-axis. Drive signal 1664 remains at a low voltage, so it does not drive frame 1624, preventing optical element 1632 from oscillating about actuating axis 164. Consequently, the image beam spot formed on virtual plane 1690 can remain radially from axis 76. Based on the above, at time t11, the image beam spot formed on virtual plane 1690 can move and remain at position 11.

[0137] At time t12, drive signal 1661 remains at a low level, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a low level, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663 remains at a high level, preventing it from driving frame 1623 and preventing optical element 1632 from oscillating about actuating axis 163. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 75. Drive signal 1664, transitioning from a low voltage to a high voltage, drives actuator frame 1624 to swing optical element 1632 in the positive direction of actuator axis 164. As optical element 1632 swings in the positive direction of actuator axis 164, the image beam's spot on virtual plane 1690 moves radially from axis 76 toward the negative X-axis. Based on the above, at time t12, the image beam's spot on virtual plane 1690 moves to and remains at position 12.

[0138] At time t13, drive signal 1661 remains at a low voltage, so it does not drive frame 1621, preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially along axis 1670. Drive signal 1662, transitioning from a low voltage to a high voltage, drives actuating frame 1622, causing optical element 1631 to oscillate in the positive direction about actuating axis 162. When optical element 1631 oscillates in the positive direction about actuating axis 162, the light spot formed by the image beam on virtual plane 1690 moves radially along axis 1680 toward the negative X-axis. Drive signal 1663, transitioning from a high voltage to a low voltage, drives actuating frame 1623, causing optical element 1632 to oscillate in the negative direction about actuating axis 163. When the optical element 1632 oscillates in the negative direction of the actuating axis 163, the light spot formed by the image beam on the virtual plane 1690 can move radially along axis 77 toward the Y-axis. Axis 77 can be the axis on the virtual plane 1690 relative to the actuating axis 163 when the optical element 1631 oscillates in the negative direction of the actuating axis 161 and the positive direction of the actuating axis 162. Axis 77 can be parallel to the X-axis. The drive signal 1664 is maintained at a high voltage, so that the drive signal 1664 does not drive the frame 1624, preventing the optical element 1632 from oscillating about the actuating axis 164. Consequently, the light spot formed by the image beam on the virtual plane 1690 does not move radially along axis 78. Axis 78 can be the axis on the virtual plane 1690 relative to the actuating axis 164 when the optical element 1631 oscillates in the negative direction of the actuating axis 161 and the positive direction of the actuating axis 162. The axis 78 may be parallel to the Y-axis direction. Based on the above, at time point t13 , the light spot formed by the image light beam on the virtual plane 1690 may move and stay at position 13 .

[0139] At time t14, drive signal 1661 remains at a low level, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a high level, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663 remains at a low level, preventing it from driving frame 1623 and preventing optical element 1632 from oscillating about actuating axis 163. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 77. Drive signal 1664, transitioning from a high voltage to a low voltage, drives actuator frame 1624 to swing optical element 1632 in the negative direction of actuator axis 164. As optical element 1632 swings in the negative direction of actuator axis 164, the image beam spot formed on virtual plane 1690 moves radially from axis 78 toward the X-axis. Based on the above, at time t14, the image beam spot on virtual plane 1690 moves to and remains at position 14.

[0140] At time t15, drive signal 1661 remains at a low voltage, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a high voltage, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663, transitioning from a low voltage to a high voltage, drives actuating frame 1623, causing optical element 1632 to oscillate in the positive direction relative to actuating axis 163. When optical element 1632 oscillates in the positive direction about actuating axis 163, the light spot formed by the image beam on virtual plane 1690 can move radially from axis 77 toward the negative Y-axis. Drive signal 1664 remains at a low voltage, so it does not drive frame 1624, preventing optical element 1632 from oscillating about actuating axis 164. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially from axis 78. Based on the above, at time t15, the light spot formed by the image beam on virtual plane 1690 can move and remain at position 15.

[0141] At time t16, drive signal 1661 remains at a low level, preventing it from driving frame 1621 and preventing optical element 1631 from oscillating about actuating axis 161. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1670. Drive signal 1662 remains at a high level, preventing it from driving frame 1622 and preventing optical element 1631 from oscillating about actuating axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 1680. Drive signal 1663 remains at a high level, preventing it from driving frame 1623 and preventing optical element 1632 from oscillating about actuating axis 163. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially relative to axis 77. Drive signal 1664, transitioning from a low voltage to a high voltage, drives actuator frame 1624 to swing optical element 1632 in the positive direction of actuator axis 164. As optical element 1632 swings in the positive direction of actuator axis 164, the image beam spot formed on virtual plane 1690 moves radially from axis 78 toward the negative X-axis. Based on the above, at time t16, the image beam spot on virtual plane 1690 moves to and remains at position 16.

[0142] At time t17, drive signal 1661, transitioning from a low potential to a high potential, drives actuator frame 1621 to cause optical element 1631 to oscillate in the positive direction of actuator axis 161. When optical element 1631 oscillates in the positive direction of actuator axis 161, the light spot formed by the image beam on virtual plane 1690 moves radially from axis 1670 toward the Y-axis. Drive signal 1662 remains at a high potential, preventing it from driving frame 1622, preventing optical element 1631 from oscillating about actuator axis 162. Consequently, the light spot formed by the image beam on virtual plane 1690 does not move radially from axis 1680. Drive signal 1663, transitioning from a high potential to a low potential, drives actuator frame 1623 to cause optical element 1632 to oscillate in the negative direction of actuator axis 163. When optical element 1632 oscillates in the negative direction of actuating axis 163, the image beam's spot on virtual plane 1690 moves radially from axis 71 toward the Y-axis. Drive signal 1664 remains at a high voltage, preventing it from driving frame 1624 and preventing optical element 1632 from oscillating about actuating axis 164. Consequently, the image beam's spot on virtual plane 1690 does not move radially from axis 72. Based on this, at time t17, the image beam's spot on virtual plane 1690 returns to position 1.

[0143] Controller 160 (shown in Figures 1A to 1D ) can adjust the swing angle of the frame 610 or the frame 620 by at least one driving component, thereby achieving the effect of changing the appearance of the pixel 1691. Figure 17A FIG1 shows a schematic diagram of a pixel 1691 according to an embodiment of the present invention. The light spot formed by the image beam on the virtual plane 1690 can be moved in the order of position 1 to position 16, thereby forming pixel 1691. Since position 2 overlaps with position 5, position 4 overlaps with position 13, position 7 overlaps with position 10, position 3, position 8 and position 9 overlap with position 14, and position 12 overlaps with position 15, Figure 17A Position 2, position 3, position 4, position 7, position 8, position 9 and position 12 are not shown. Figure 17A The pixels are mainly (other component numbers can refer to Figure 16A and Figure 16B ), in this embodiment, the swing angle corresponding to the actuating shaft 161, the swing angle corresponding to the actuating shaft 162, the swing angle corresponding to the actuating shaft 163, and the swing angle corresponding to the actuating shaft 164 may be the same. Therefore, when the image light beam passes through the optical element 1631 and the optical element 1632 that are swinging back and forth and is transmitted to the virtual plane 1690 to form a light spot moving on the virtual plane 1690, the displacement (for example, the fourth displacement) of the light spot in the radial direction (for example, the fourth radial direction) of the axis 1670 corresponding to the actuating axis 161 (for example, the fourth actuating axis), the displacement (for example, the third displacement) of the light spot in the radial direction (for example, the third radial direction) of the axis 1680 corresponding to the actuating axis 162 (for example, the third actuating axis), the displacement (for example, the second displacement) of the light spot in the radial direction (for example, the second radial direction) of the axis 71 (or axis 73, axis 75, axis 77) corresponding to the actuating axis 163 (for example, the second actuating axis), and the displacement (for example, the first displacement) of the light spot in the radial direction (for example, the first radial direction) of the axis 72 (or axis 74, axis 76, axis 78) corresponding to the actuating axis 164 (for example, the first actuating axis) may be the same.

[0144] Figure 18A FIG1 shows a schematic diagram of a pixel 1691 according to another embodiment of the present invention. The light spot formed by the image beam on the virtual plane 1690 can be moved in the order of position 1 to position 16, thereby forming the pixel 1691. Figure 18A The pixels are mainly (other component numbers can refer to Figure 16A and Figure 16B), in this embodiment, the swing angle corresponding to the actuating shaft 161 (or the swing angle corresponding to the actuating shaft 162) may be twice the swing angle corresponding to the actuating shaft 163 (or the swing angle corresponding to the actuating shaft 164). Therefore, when the image light beam passes through the optical element 1631 and the optical element 1632 that are swinging back and forth and is transmitted to the virtual plane 1690 to form a light spot moving on the virtual plane 1690, the displacement (for example, the fourth displacement or the third displacement) of the light spot in the radial direction (for example, the fourth radial direction or the third radial direction) of the axis 1670 of the corresponding actuating axis 161 (for example, the fourth actuating axis) or the axis 1680 of the corresponding actuating axis 162 (for example, the third actuating axis) may be twice the displacement (for example, the second displacement or the first displacement) of the light spot in the radial direction (for example, the second radial direction or the first radial direction) of the axis 71 (or axis 73, axis 75, axis 77) of the corresponding actuating axis 163 (for example, the second actuating axis) or the axis 72 (or axis 74, axis 76, axis 78) of the corresponding actuating axis 164 (for example, the first actuating axis).

[0145] Figure 19A FIG1 shows a schematic diagram of a pixel 1691 according to another embodiment of the present invention. The light spot formed by the image beam on the virtual plane 1690 can be moved in the order of position 1 to position 16, thereby forming the pixel 1691. Figure 19A The pixels are mainly (other component numbers can refer to Figure 16A and Figure 16B ), in this embodiment, the swing angle corresponding to the actuating shaft 161 (or the swing angle corresponding to the actuating shaft 162) may be 1 / 2 times the swing angle corresponding to the actuating shaft 163 (or the swing angle corresponding to the actuating shaft 164). Therefore, when the image light beam passes through the optical element 1631 and the optical element 1632 that are swinging back and forth and is transmitted to the virtual plane 1690 to form a light spot moving on the virtual plane 1690, the displacement (for example, the fourth displacement or the third displacement) of the light spot in the radial direction (for example, the fourth radial direction or the third radial direction) of the axis 1670 of the corresponding actuating axis 161 (for example, the fourth actuating axis) or the axis 1680 of the corresponding actuating axis 162 (for example, the third actuating axis) can be 1 / 2 times the displacement (for example, the second displacement or the first displacement) of the light spot in the radial direction (for example, the second radial direction or the first radial direction) of the axis 71 (or axis 73, axis 75, axis 77) of the corresponding actuating axis 163 (for example, the second actuating axis) or the axis 72 (or axis 74, axis 76, axis 78) of the corresponding actuating axis 164 (for example, the first actuating axis) Figure 17B To correspond to Figure 17A Layout diagram of multiple pixels 1691. Figure 18B To correspond to Figure 18A Layout diagram of multiple pixels 1691. Figure 19B To correspond to Figure 19ALayout diagram of multiple pixels 1691. Figure 17B 、 Figure 18B and Figure 19B It can be seen that there are multiple Figure 18B The layout produced by the pixels 1691 shown may have a greater pixel density.

[0146] Depend on Figures 16A to 19B As can be seen from the embodiment of the present invention shown, the actuator device 600 with four axes can move the light spot formed by the image beam on the virtual plane 1690 between 16 positions to form pixels 1691 by using the various driving methods mentioned above. Figure 2A 、 Figure 2B and Figure 2C Comparative Examples and Figure 3A 、 Figure 3B and Figure 3C The comparative example can further increase the resolution of the image beam.

[0147] Figure 20 A flowchart of a projection method according to an embodiment of the present invention is shown, wherein the projection method can be performed as follows: Figures 1A to 1D The actuator device 150 shown, Figure 4A The actuator device 400 shown or Figure 16A In step S221, the first frame is disposed within the first base, the first optical element is disposed within the first frame, at least one first driving assembly is disposed between the first base and the first frame, the second frame is disposed within the second base, the second optical element is disposed within the second frame, and at least one second driving assembly is disposed between the second base and the second frame. In step S223, at least one first driving component is controlled by a first signal to drive the first frame so that the first optical element swings back and forth relative to the first base based on the first actuating axis and the second actuating axis, and at least one second driving component is controlled by a second signal to drive the second frame so that the second optical element swings back and forth relative to the second base based on the third actuating axis, wherein the first signal includes a first driving signal corresponding to the first actuating axis and a second driving signal corresponding to the second actuating axis, and the second signal includes a third driving signal corresponding to the third actuating axis, wherein the first driving signal and the second driving signal have a first frequency, and the third driving signal has a second frequency different from the first frequency, wherein the phase difference between the first driving signal and the second driving signal is not equal to zero.

[0148] In summary, the two frames of the actuator device of the present invention can be respectively configured in the projection device, and the two frames are actuated based on at least three actuating axes. The actuator device can control the optical elements in each frame to swing back and forth based on each actuating axis according to the corresponding driving frequency. The light beam passing through the two optical elements generates a light spot on the virtual plane that moves along a fixed path, thereby forming a pixel. Compared with traditional actuators, the actuator device of the present invention includes more actuating axes. Therefore, the present invention can make the light spot formed by the image light beam on the virtual plane move between more positions, thereby further increasing the resolution of the projection device. The actuator device can generate pixels of specific shapes by configuring the driving frequencies of each actuating axis. The user can adjust the driving frequency of the actuator device according to the requirements of the pixel layout, thereby adjusting the shape of the pixel to facilitate increasing the pixel density.

[0149] The above description is only a preferred embodiment of the present invention, and it cannot be used to limit the scope of implementation of the present invention. That is, all simple equivalent changes and modifications made in accordance with the claims and the description of the invention are still within the scope of the patent of the present invention. In addition, any embodiment or claim of the present invention does not need to achieve all the purposes, advantages or features disclosed in the present invention. In addition, the abstract of the specification and the name of the invention are only used to assist in the retrieval of patent documents, and are not used to limit the scope of rights of the present invention. In addition, the terms "first", "second", etc. mentioned in this specification or claims are only used to name the name of the element or to distinguish different embodiments or scopes, and are not used to limit the upper or lower limit of the number of elements.

[0150] Reference Signs List

[0151] 100A, 100B, 100C, 100D: Projection device

[0152] 110: Lighting system

[0153] 120: Light valve

[0154] 130: Prism

[0155] 140: Projection lens

[0156] 150, 200, 300, 400, 600: actuator device

[0157] 151, 152, 211, 311, 421, 420, 610, 620: frame

[0158] 213, 313, 431, 432, 1631, 1632: Optical components

[0159] 215, 315, 317, 41, 42, 43, 161, 162, 163, 164: Actuating shaft

[0160] 230, 330, 490, 890, 1290, 1690: Virtual plane

[0161] 231, 331, 491, 891, 1291, 1691: pixels

[0162] 71, 72, 73, 74, 75, 76, 77, 78, 235, 335, 337, 472, 473, 482, 483, 492, 811, 812, 813, 814, 820, 830, 1211, 1212, 1213, 1214, 1220, 1230, 1670, 1680: axis

[0163] 250, 350, 370, 461, 462, 463, 861, 862, 863, 1261, 1262, 1263, 1661, 1662, 1663, 1664: drive signal

[0164] 251, 351, 465, 865, 1265, 1665: time interval

[0165] 40, 160: Controller

[0166] 411, 412, 1611, 1612: base

[0167] 422, 423, 1621, 1622, 1623, 1624: Action frame

[0168] 441, 442, 443, 1641, 1642, 1643, 1644: shaft

[0169] 451, 452, 453, 1651, 1652, 1653, 1654: drive components

[0170] L1: illumination beam

[0171] L2: Projection beam

[0172] OA: Optical Axis

[0173] S221, S223: Steps

[0174] t1, t2, t3, t4, t5, t6, t7, t8, t9, t10, t11, t12, t13, t14, t15, t16, t17: time points

[0175] W: direction

[0176] X: axis

[0177] Y:axis.

Claims

1. An actuator device, characterized in that: The actuator device includes a first base, a first frame, a first optical element, at least one first driving assembly, a second base, a second frame, a second optical element, at least one second driving assembly and a controller, wherein: The first frame is configured in the first base; The first optical element is disposed in the first frame; The at least one first driving component is disposed between the first base and the first frame; The second frame is configured in the second base; The second optical element is disposed in the second frame; The at least one second driving component is disposed between the second base and the second frame; and The controller is coupled to the at least one first driving component and the at least one second driving component. The controller is configured to control the at least one first driving component to drive the first frame by a first signal so that the first optical element swings back and forth relative to the first base based on the first actuating axis and the second actuating axis, and to control the at least one second driving component to drive the second frame by a second signal so that the second optical element swings back and forth relative to the second base based on the third actuating axis. wherein the first signal includes a first drive signal corresponding to the first actuating axis and a second drive signal corresponding to the second actuating axis, and the second signal includes a third drive signal corresponding to the third actuating axis, wherein the first drive signal and the second drive signal have a first frequency, and the third drive signal has a second frequency different from the first frequency, Wherein, a phase difference between the first driving signal and the second driving signal is not equal to zero.

2. The actuator device according to claim 1, characterized in that One of the first frequency and the second frequency is an integer multiple of the other of the first frequency and the second frequency.

3. The actuator device according to claim 2, characterized in that The integer multiple includes two times or four times.

4. The actuator device according to claim 1, characterized in that The image beam is transmitted to the virtual plane through the first optical element and the second optical element in the back-and-forth swinging, so as to form a light spot moving on the virtual plane, wherein the third displacement of the light spot in the third radial direction of the third actuating axis is the first displacement of the light spot in the first radial direction of the first actuating axis. times.

5. The actuator device according to claim 1, characterized in that The first actuating axis is perpendicular to the second actuating axis.

6. The actuator device according to claim 5, characterized in that The third actuating axis extends along an angle bisector between the first actuating axis and the second actuating axis.

7. The actuator device according to claim 1, characterized in that The first frame includes a first actuation frame and a second actuation frame, wherein: The first optical element is disposed in the first actuation frame; The first actuation frame is disposed in the second actuation frame and connected to the second actuation frame; and The second actuating frame is disposed in the first base and connected to the first base.

8. The actuator device according to claim 7, characterized in that The at least one first driving assembly includes at least one first driving element and at least one second driving element. Wherein, the at least one first driving element is located between the first actuating frame and the second actuating frame; and The at least one second driving element is located between the second actuating frame and the first base.

9. The actuator device according to claim 8, characterized in that The at least one first driving element comprises two first driving elements respectively located on two opposite sides of the first actuating frame; and The at least one second driving element includes two second driving elements respectively located on two opposite sides of the second actuating frame.

10. The actuator device according to claim 8, characterized in that The at least one first driving element is located on the second actuating shaft; and The at least one second driving element is located on the first actuating shaft.

11. The actuator device according to claim 1, characterized in that The at least one second driving assembly includes two third driving elements respectively located on opposite sides of the third actuating shaft.

12. The actuator device according to claim 1, characterized in that The second signal also includes a fourth drive signal corresponding to a fourth actuating axis, wherein the controller is used to control the at least one second drive component to drive the second frame by means of the fourth drive signal so that the second optical element swings back and forth relative to the second base based on the fourth actuating axis.

13. The actuator device according to claim 12, characterized in that The fourth driving signal has the second frequency, wherein a phase difference between the third driving signal and the fourth driving signal is not equal to zero.

14. The actuator device according to claim 12, characterized in that The third actuating axis is parallel to the first actuating axis, and the fourth actuating axis is parallel to the second actuating axis.

15. The actuator device according to claim 1, characterized in that The at least one first driving component includes a voice coil motor or a piezoelectric material.

16. A projection device, characterized in that: The projection device comprises an illumination system, a light valve, a projection lens and an actuator device, wherein: The lighting system is used to emit a lighting beam; The light valve is located on the first transmission path of the illumination light beam, and the light valve is used to convert the illumination light beam into an image light beam; The projection lens is located on the second transmission path of the image light beam, and the projection lens is used to project the image light beam; and The actuator device is located on the transmission path of the image light beam and is configured between the light valve and the projection lens, or a portion of the actuator device is configured within the projection lens. The actuator device includes a first base, a first frame, a first optical element, at least one first driving component, a second base, a second frame, a second optical element, at least one second driving component, and a controller, wherein: The first frame is configured in the first base; The first optical element is disposed in the first frame; The at least one first driving component is disposed between the first base and the first frame; The second frame is configured in the second base; The second optical element is disposed in the second frame; The at least one second driving component is disposed between the second base and the second frame; and The controller is coupled to the at least one first driving component and the at least one second driving component. The controller is configured to control the at least one first driving component to drive the first frame by a first signal so that the first optical element swings back and forth relative to the first base based on the first actuating axis and the second actuating axis, and to control the at least one second driving component to drive the second frame by a second signal so that the second optical element swings back and forth relative to the second base based on the third actuating axis. wherein the first signal includes a first drive signal corresponding to the first actuating axis and a second drive signal corresponding to the second actuating axis, and the second signal includes a third drive signal corresponding to the third actuating axis, wherein the first drive signal and the second drive signal have a first frequency, and the third drive signal has a second frequency different from the first frequency, Wherein, a phase difference between the first driving signal and the second driving signal is not equal to zero.

17. The projection device according to claim 16, wherein: One of the first frame body and the second frame body is disposed in the projection lens.

18. The projection device according to claim 16, wherein: The projection device further includes a prism, the prism being located on the transmission path of the image light beam and being disposed between the light valve and the projection lens. One of the first frame body and the second frame body is disposed between the prism and the light valve.

19. The projection device according to claim 16, wherein: The projection device further includes a prism, the prism being located on the transmission path of the image light beam and being disposed between the light valve and the projection lens. Wherein, one of the first frame body and the second frame body is disposed between the prism and the projection lens.

20. A projection method, characterized in that: The projection method is applicable to an actuator device, wherein the actuator device includes a first base, a first frame, a first optical element, at least one first driving assembly, a second base, a second frame, a second optical element, and at least one second driving assembly, wherein the projection method includes: Disposing the first frame in the first base, disposing the first optical element in the first frame, disposing the at least one first driving assembly between the first base and the first frame, disposing the second frame in the second base, disposing the second optical element in the second frame, and disposing the at least one second driving assembly between the second base and the second frame; and The at least one first driving component is controlled by a first signal to drive the first frame so that the first optical element swings back and forth relative to the first base based on the first actuating axis and the second actuating axis, and the at least one second driving component is controlled by a second signal to drive the second frame so that the second optical element swings back and forth relative to the second base based on the third actuating axis. wherein the first signal includes a first drive signal corresponding to the first actuating axis and a second drive signal corresponding to the second actuating axis, and the second signal includes a third drive signal corresponding to the third actuating axis, wherein the first drive signal and the second drive signal have a first frequency, and the third drive signal has a second frequency different from the first frequency, Wherein, a phase difference between the first driving signal and the second driving signal is not equal to zero.

Images