Valve substrate and method of manufacturing the same, odor reproduction apparatus, and near-eye display device

Abstract

The application discloses a valve substrate and a manufacturing method thereof, an odor reproducing device and a near-eye display device, and belongs to the technical field of display. The valve substrate comprises a substrate, an electrode layer and a plurality of conductive elastic arms. The valve substrate can be assembled with an odor cartridge, and the valve substrate and the odor cartridge can be assembled to form an odor reproducing device. The odor reproducing device does not need to adopt a mechanical valve, but adopts a control valve substrate, so that the odor cartridge can normally release odor when the odor needs to be released, and stop releasing odor when the odor does not need to be released. In addition, the volume of the valve substrate is usually small, so that the volume of the odor reproducing device integrated with the valve substrate is also small, and the volume of the near-eye display device integrated with the odor reproducing device is also small, and the weight is also small.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of display, in particular to a valve substrate, a manufacturing method thereof, an odor reproduction device and a near-eye display device. BACKGROUND

[0002] With the rapid development of near-eye display technology, people's use frequency of near-eye display devices such as virtual reality (VR) devices, augmented reality (AR) devices and the like is also increasing.

[0003] In order to further improve the sensory experience of users using the near-eye display device, an odor reproduction device can be integrated in the near-eye display device. The odor reproduction device can include an odor box and a mechanical valve, the odor box has an odor outlet, and the mechanical valve can be arranged at the odor outlet of the odor box. When the near-eye display device displays a virtual picture, the near-eye display device can control the mechanical valve to open, so that the odor box can release an odor related to the virtual picture through the odor outlet. In this way, the user can have an immersive experience, which can significantly improve the user's impression of the virtual picture and enhance the user's sensory experience.

[0004] However, the volume of the mechanical valve in the current odor reproduction device is usually large, which leads to a large volume and a large weight of the near-eye display device integrated with such an odor reproduction device. SUMMARY

[0005] The present application provides a valve substrate, a manufacturing method thereof, an odor reproduction device and a near-eye display device. The technical solution can solve the problem of large volume and large weight of the prior art near-eye display device, and the technical solution is as follows:

[0006] In one aspect, a valve substrate is provided, comprising:

[0007] a substrate, the substrate having a plurality of first gas outlets;

[0008] an electrode layer located on one side of the substrate, the electrode layer comprising: a plurality of electrode blocks corresponding one-to-one to the first gas outlets, the electrode blocks covering the corresponding first gas outlets on the substrate, and the electrode blocks having a plurality of first air holes in communication with the corresponding first gas outlets;

[0009] and a plurality of conductive elastic arms located on the side of the electrode layer away from the substrate and arranged in insulation with the electrode layer, the plurality of conductive elastic arms corresponding one-to-one to the plurality of electrode blocks, one end of the conductive elastic arm being fixedly connected to the substrate, and the other end being arranged separately from the substrate;

[0010] The conductive elastic arm is configured to rotate towards the substrate when a voltage difference is formed between the corresponding electrode block, so as to cover the plurality of first air holes arranged in the corresponding electrode block; and rotate away from the substrate when no voltage difference is formed between the corresponding electrode block, so as to separate from the corresponding electrode block.

[0011] Optionally, the conductive elastic arm comprises a connecting portion fixed on the substrate, and an elastic portion fixedly connected with the connecting portion, wherein one end of the elastic portion away from the connecting portion is arranged separately from the substrate.

[0012] When no voltage difference is formed between the conductive elastic arm and the corresponding electrode block, the elastic portion in the conductive elastic arm is in a curved shape, and the orthographic projection of the elastic portion on the plane where the substrate is located does not coincide with the orthographic projection of the plurality of first air holes arranged in the corresponding electrode block on the plane where the substrate is located.

[0013] Optionally, when no voltage difference is formed between the conductive elastic arm and the corresponding electrode block, the orthographic projection of the elastic portion in the conductive elastic arm on the plane where the substrate is located overlaps with the orthographic projection of the corresponding electrode block on the plane where the substrate is located.

[0014] Optionally, the valve substrate further comprises a plurality of driving signal lines arranged on the side of the electrode layer away from the substrate and insulated from the electrode layer, wherein the driving signal lines are electrically connected with the connecting portion.

[0015] Optionally, the driving signal lines, the connecting portion and the elastic portion are arranged in the same layer and are made of the same material.

[0016] Optionally, the electrode layer further comprises a connecting electrode arranged between two adjacent electrode blocks, wherein the connecting electrode has a plurality of opening regions corresponding to the plurality of electrode blocks one by one, and the boundary of the orthographic projection of the opening regions on the plane where the substrate is located coincides with the boundary of the orthographic projection of the corresponding electrode blocks on the plane where the substrate is located.

[0017] Optionally, the elastic portion has a plurality of auxiliary openings.

[0018] After the conductive elastic arm covers the plurality of first air holes arranged in the corresponding electrode block, the orthographic projection of the auxiliary openings on the plane where the substrate is located does not coincide with the orthographic projection of the first air holes on the plane where the substrate is located.

[0019] Optionally, the valve substrate further comprises a first insulating layer arranged on the side of the electrode layer away from the substrate, and / or a second insulating layer arranged on the side of the conductive elastic arm close to the substrate.

[0020] When the valve substrate includes the first insulating layer, the first insulating layer has a plurality of second air holes corresponding to the plurality of first air holes;

[0021] When the valve substrate includes the second insulating layer, the second insulating layer includes a first sub-insulating part on the side of the substrate, and a second sub-insulating part abutting the conductive elastic arm.

[0022] Optionally, when the insulating layer between the electrode layer and the plurality of conductive elastic arms is the second insulating layer, the valve substrate further includes a plurality of insulating barriers on the side of the electrode layer away from the substrate, the plurality of insulating barriers correspond to the plurality of electrode blocks one by one, and at least part of the insulating barrier surrounds the corresponding electrode block.

[0023] On the other hand, a manufacturing method of a valve substrate is provided, the method includes:

[0024] forming an electrode layer and a plurality of conductive elastic arms on one side of a substrate;

[0025] The substrate has a plurality of first air outlets;

[0026] The electrode layer includes a plurality of electrode blocks corresponding to the first air outlets, the electrode blocks cover the corresponding first air outlets on the substrate, and the electrode blocks have a plurality of first air holes communicating with the corresponding first air outlets;

[0027] The plurality of conductive elastic arms are located on the side of the electrode layer away from the substrate and are insulated from the electrode layer, the plurality of conductive elastic arms correspond to the plurality of electrode blocks one by one, one end of the conductive elastic arm is fixedly connected to the substrate, and the other end is arranged separately from the substrate;

[0028] The conductive elastic arm is configured to rotate towards the substrate when a voltage difference is formed between the corresponding electrode blocks to cover the plurality of first air holes arranged in the corresponding electrode block, and rotate away from the substrate when no voltage difference is formed between the corresponding electrode blocks.

[0029] In yet another aspect, an odor reproduction device is provided, including an odor cartridge and a valve substrate on one side of the odor cartridge, the valve substrate being the above-mentioned valve substrate;

[0030] The odor cartridge has a plurality of second air outlets, and the plurality of second air outlets correspond to the plurality of first air outlets in the substrate of the valve substrate one by one.

[0031] Optionally, the smell cartridge comprises: a first substrate and a second substrate arranged oppositely, a support isolation column between the first substrate and the second substrate, and a plurality of smell volatilization blocks on a side of the first substrate close to the second substrate.

[0032] The support isolation column is configured to divide a space between the first substrate and the second substrate into a plurality of cavities.

[0033] The plurality of smell volatilization blocks correspond to the plurality of cavities one by one, and the smell volatilization blocks are located in the corresponding cavities.

[0034] The second substrate has the plurality of second air outlets, and the plurality of second air outlets correspond to the plurality of cavities one by one and are in communication.

[0035] Optionally, the smell cartridge further comprises: a plurality of heating units corresponding to the plurality of cavities one by one, the heating units being located in the corresponding cavities, and the heating units being closer to the first substrate than the smell volatilization blocks.

[0036] Optionally, the smell reproduction device further comprises: a baffle between the smell cartridge and the valve substrate, and a driving element connected to the baffle, the baffle being movably connected to the smell cartridge and movably connected to the valve substrate, the baffle having a plurality of switching holes corresponding to the plurality of second air outlets one by one and corresponding to the plurality of first air outlets one by one.

[0037] The driving element is configured to drive the baffle to move between the smell cartridge and the valve substrate, so that the switching hole is in communication with the corresponding second air outlet and the corresponding first air outlet, or the baffle blocks the first air outlet and the second air outlet.

[0038] In another aspect, a near-eye display device is provided, comprising: a display device and the smell reproduction device.

[0039] The technical scheme provided by the embodiments of the present application has at least the following beneficial effects:

[0040] A valve substrate includes a substrate, an electrode layer, and a plurality of conductive elastic arms. The valve substrate can be assembled with an odor cartridge, and the two can be assembled to form an odor reproduction device. A voltage difference is formed between a certain conductive elastic arm in the valve substrate and a corresponding electrode block, and after the two are completely attached together, the conductive elastic arm can cover a plurality of first air holes provided in the corresponding electrode block, so that the conductive elastic arm can block a first air outlet corresponding to the electrode block, thereby ensuring that the odor gas in the odor cartridge cannot be released through the first air outlet. When a certain conductive elastic arm in the valve substrate and a corresponding electrode block do not form a voltage difference, and after the two are separated, the odor gas in the odor cartridge can be released through the corresponding second air outlet, the corresponding first air outlet, and a plurality of first air holes provided in the corresponding electrode block. Therefore, the odor reproduction device does not need to use a mechanical valve, but by controlling the valve substrate, the odor cartridge can normally release odor when it needs to release odor, and stop releasing odor when it does not need to release odor. Moreover, the volume of the valve substrate is usually small, which can ensure that the volume of the odor reproduction device integrated with the valve substrate is also small, thereby ensuring that the volume of the near-eye display device integrated with the odor reproduction device is small, and the weight is also small. BRIEF DESCRIPTION OF DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0042] Figure 1 is a top view of a valve substrate provided by an embodiment of the present application;

[0043] Figure 2 is Figure 1 is a schematic diagram of the film layer structure of the valve substrate at A-A';

[0044] Figure 3 is a schematic diagram of the position relationship between a conductive elastic arm and an electrode block provided by an embodiment of the present application;

[0045] Figure 4 is another schematic diagram of the position relationship between a conductive elastic arm and an electrode block provided by an embodiment of the present application;

[0046] Figure 5 is a top view of another valve substrate provided by an embodiment of the present application;

[0047] Figure 6 is a top view of an electrode layer provided by an embodiment of the present application;

[0048] Figure 7 is a top view of an electrode block provided by an embodiment of the present application;

[0049] Figure 8 is a top view of another electrode block provided by an embodiment of the present application;

[0050] Figure 9 is a top view of a conductive elastic arm in a closed state provided by an embodiment of the present application;

[0051] Figure 10 is a structural schematic view of an array substrate provided by another embodiment of the present application;

[0052] Figure 11 is a structural schematic view of another array substrate provided by another embodiment of the present application;

[0053] Figure 12 is a structural schematic view of yet another array substrate provided by another embodiment of the present application;

[0054] Figure 13 is a structural schematic view of still another array substrate provided by another embodiment of the present application;

[0055] Figure 14 is a top view of an insulating barrier wall cooperating with a corresponding electrode block provided by an embodiment of the present application;

[0056] Figure 15 is a top view of another insulating barrier wall cooperating with a corresponding electrode block provided by an embodiment of the present application;

[0057] Figure 16 is a structural schematic view of an odor reproducing device provided by an embodiment of the present application;

[0058] Figure 17 is a structural schematic view of another odor reproducing device provided by an embodiment of the present application;

[0059] Figure 18 is a structural schematic view of yet another odor reproducing device provided by an embodiment of the present application;

[0060] Figure 19 is Figure 18 is an effect diagram of the odor reproducing device in another state;

[0061] Figure 20 is a flow chart of a manufacturing method of a valve substrate provided by an embodiment of the present application;

[0062] Figure 21 is a schematic view of forming an electrode layer and a first insulating layer on one side of a substrate provided by an embodiment of the present application;

[0063] Figure 22 is a schematic diagram of forming a sacrificial layer on the side of the first insulating layer away from the substrate provided by an embodiment of the present application;

[0064] Figure 23 is a schematic diagram of forming a metal conductive layer on the side of the sacrificial layer away from the substrate provided by an embodiment of the present application;

[0065] Figure 24 is a schematic diagram of patterning the side of the substrate away from the electrode layer provided by an embodiment of the present application;

[0066] Figure 25 is a schematic diagram of the elastic portion curling outward provided by an embodiment of the present application;

[0067] Figure 26 is a flowchart of a manufacturing method of the odor cartridge provided by an embodiment of the present application;

[0068] Figure 27 is a schematic diagram of forming a plurality of odor volatilization blocks on the first substrate provided by an embodiment of the present application;

[0069] Figure 28 is a schematic diagram of forming a support isolation column on the second substrate provided by an embodiment of the present application;

[0070] Figure 29 is a schematic diagram of the first substrate and the second substrate after the alignment processing provided by an embodiment of the present application. DETAILED DESCRIPTION

[0071] To make the purpose, technical solutions and advantages of the present application clearer, the embodiments of the present application will be further described in detail below with reference to the drawings.

[0072] Please refer to Figure 1 and Figure 2 , Figure 1 is a top view of the valve substrate provided by an embodiment of the present application, Figure 2 is Figure 1 a schematic diagram of the film layer structure of the valve substrate at A-A’ is shown. The valve substrate 100 can include: a substrate 101, an electrode layer 102 and a plurality of conductive elastic arms 103.

[0073] The substrate 101 in the valve substrate 100 has a plurality of first gas outlets K1.

[0074] The electrode layer 102 in the valve substrate 100 is located on one side of the substrate 101, and the electrode layer 102 comprises: a plurality of electrode blocks 1021 corresponding to the first air outlets K1, the electrode blocks 1021 cover the corresponding first air outlets K1 on the substrate 101, and the electrode blocks 1021 have a plurality of first air holes K2 in communication with the corresponding first air outlets K1. In this application, in order to ensure that the substrate 101 can stably support the electrode layer 102, it is necessary to ensure that the first air outlets K1 are distributed on the side of the substrate 101 away from the electrode layer 102, and it is necessary to ensure that the depth of the first air outlet K1 is less than the thickness of the substrate 101. That is, the first air outlet K1 is a slot opened on the side of the substrate 101 away from the electrode layer 102. In this way, the electrode blocks 1021 in the electrode layer 102 can still be supported by the substrate 101. In this case, a plurality of third air holes K8 can be provided on the side of the substrate 101 close to the electrode layer 102, and the plurality of third air holes K8 can be in communication with the first air outlets K1 and the plurality of first air holes K2 one by one. In this way, the odor released through the first air outlet K1 subsequently can be released through the third air hole K8 and the first air hole K2 in turn. For example, the opening size of each third air hole K8 can be the same as the opening size of the corresponding first air hole K2.

[0075] The plurality of conductive elastic arms 103 in the valve substrate 100 are located on the side of the electrode layer 102 away from the substrate 101 and are insulated from the electrode layer 102, the plurality of conductive elastic arms 103 correspond to the plurality of electrode blocks 1021 one by one, one end of the conductive elastic arm 103 is fixedly connected with the substrate 101, and the other end is arranged separately from the substrate 101. Here, the conductive elastic arm 103 is equivalent to a metal plate with a certain elasticity, and the conductive elastic arm 103 can rotate around the fixed position of the substrate 101.

[0076] The conductive elastic arm 103 is configured to rotate towards the substrate 101 when a voltage difference is formed between the corresponding electrode block 1021, so as to cover the plurality of first air holes K2 arranged in the corresponding electrode block 1021; and rotate away from the substrate 101 when no voltage difference is formed between the corresponding electrode block 1021, so as to be separated from the corresponding electrode block 1021.

[0077] In the embodiment of the present application, the conductive elastic arm 103 and the electrode block 1021 both belong to conductive structures, so that corresponding electric signals can be applied to the conductive elastic arm 103 and the electrode block 1021 respectively, so that a voltage difference can be formed between the conductive elastic arm 103 and the electrode block 1021; when the electric signals applied to the conductive elastic arm 103 and the electrode block 1021 are stopped, the voltage difference between the conductive elastic arm 103 and the electrode block 1021 is no longer formed.

[0078] In this case, as Figure 3 shown, Figure 3 is a schematic diagram of the positional relationship between the conductive elastic arm and the electrode block provided by the embodiment of the present application. When a voltage difference is formed between a certain conductive elastic arm 103 and the corresponding electrode block 1021 in the valve substrate 100, electrostatic adsorption can be generated between the conductive elastic arm 103 and the corresponding electrode block 1021. Since the conductive elastic arm 103 can rotate with the substrate 101, and the electrode layer 102 is fixed on the substrate 101. Therefore, under the action of electrostatic adsorption, the conductive elastic arm 103 can rotate towards the substrate 101 until the conductive elastic arm 103 can completely contact the corresponding electrode block 1021. At this time, the conductive elastic arm 103 can cover the plurality of first air holes K2 arranged in the corresponding electrode block 1021.

[0079] When the voltage difference formed between a certain conductive elastic arm 103 and the corresponding electrode block 1021 in the valve substrate 100 is cancelled, that is, no voltage difference is formed between the conductive elastic arm 103 and the corresponding electrode block 1021, the electrostatic adsorption between the conductive elastic arm 103 and the corresponding electrode block 1021 no longer occurs. Under the action of the rebound force stored in the conductive elastic arm 103, the conductive elastic arm 103 can rotate away from the substrate 101, so that the conductive elastic arm 103 can be separated from the corresponding electrode block 1021.

[0080] It should be noted that the valve substrate 100 in the present application can be assembled with the smell box, and the two can be assembled to form a smell reproduction device. Wherein, the smell box has a plurality of second gas outlets which are communicated with the plurality of first gas outlets one by one. In this way, a voltage difference is formed between a certain conductive elastic arm 103 in the valve substrate 100 and the corresponding electrode block 1021, and after the two are completely attached together, the plurality of first air holes K2 provided in the corresponding electrode block 1021 are covered by the conductive elastic arm 103, which can ensure that the conductive elastic arm 103 can block the first gas outlet K1 corresponding to the electrode block 1021, and in turn can ensure that the smell gas in the smell box cannot be released through the first gas outlet K1. When there is no voltage difference between a certain conductive elastic arm 103 in the valve substrate 100 and the corresponding electrode block 1021, and after the two are separated, the smell gas in the smell box can be released in turn through the corresponding second gas outlet, the corresponding first gas outlet K1, and the plurality of first air holes K2 provided in the corresponding electrode block 1021. Therefore, the smell reproduction device does not need to use a mechanical valve, but uses a control valve substrate 100 to control the smell box to normally release the smell when it is needed to release the smell, and stop releasing the smell when it is not needed to release the smell. Moreover, the volume of the valve substrate 100 is usually small, which can ensure that the volume of the smell reproduction device integrated with the valve substrate 100 is also small, and in turn can ensure that the volume of the near-eye display device integrated with the smell reproduction device is small, and the weight is also small.

[0081] In summary, the valve substrate provided by the embodiments of the present application includes a substrate, an electrode layer and a plurality of conductive elastic arms. The valve substrate can be assembled with the smell box, and the two can be assembled to form a smell reproduction device. When a voltage difference is formed between a certain conductive elastic arm in the valve substrate and the corresponding electrode block, and after the two are completely attached together, the conductive elastic arm can cover a plurality of first air holes provided in the corresponding electrode block, so that the conductive elastic arm can block the first gas outlet corresponding to the electrode block, and in turn can ensure that the smell gas in the smell box cannot be released through the first gas outlet. When there is no voltage difference between a certain conductive elastic arm in the valve substrate and the corresponding electrode block, and after the two are separated, the smell gas in the smell box can be released in turn through the corresponding second gas outlet, the corresponding first gas outlet, and the plurality of first air holes provided in the corresponding electrode block. Therefore, the smell reproduction device does not need to use a mechanical valve, but uses a control valve substrate to control the smell box to normally release the smell when it is needed to release the smell, and stop releasing the smell when it is not needed to release the smell. Moreover, the volume of the valve substrate is usually small, which can ensure that the volume of the smell reproduction device integrated with the valve substrate is also small, and in turn can ensure that the volume of the near-eye display device integrated with the smell reproduction device is small, and the weight is also small.

[0082] It should be noted that a voltage difference is formed between the conductive elastic arm 103 and the corresponding electrode block 1021, and after the conductive elastic arm 103 and the corresponding electrode block 1021 are completely attached together, the state of the conductive elastic arm 103 can be referred to as a closed state, at this time, the odor in the odor box cannot be released from the plurality of first air holes K2 arranged in the corresponding electrode block 1021 of the conductive elastic arm 103. A voltage difference is not formed between the conductive elastic arm 103 and the corresponding electrode block 1021, and after the conductive elastic arm 103 and the corresponding electrode block 1021 are completely separated, the state of the conductive elastic arm 103 can be referred to as an open state, at this time, the odor in the odor box can be released from the plurality of first air holes K2 arranged in the corresponding electrode block 1021 of the conductive elastic arm 103.

[0083] Optionally, as shown in Figure 4 Figure 4 is another schematic diagram of the positional relationship between the conductive elastic arm and the electrode block provided by the embodiment of the present application. The conductive elastic arm 103 can include a connecting portion 1031 fixed on the substrate 101, and an elastic portion 1032 fixedly connected to one end of the connecting portion 1031. Here, the end of the elastic portion 1032 away from the connecting portion 1031 can be arranged separately from the substrate 101.

[0084] Wherein, when a voltage difference is not formed between a certain conductive elastic arm 103 in the valve substrate 100 and the corresponding electrode block 1021, the elastic portion 1032 in the conductive elastic arm 103 is in a curved shape, and the orthogonal projection of the elastic portion 1032 in the conductive elastic arm 103 on the plane of the substrate 101 does not coincide with the orthogonal projection of the plurality of first air holes K2 arranged in the corresponding electrode block 1021 on the plane of the substrate 101. At this time, the conductive elastic arm 103 is in an open state, and the elastic portion 1032 in the conductive elastic arm 103 does not block the plurality of first air holes K2 arranged in the corresponding electrode block 1021, so as to ensure that the odor in the odor box can be normally released through the first air holes K2. And in the present application, the orthogonal projection of the elastic portion 1032 in the conductive elastic arm 103 on the plane of the substrate 101 overlaps with the orthogonal projection of the corresponding electrode block 1021 on the plane of the substrate 101.

[0085] ​In this case, when it is needed to switch the conductive elastic arm 103 from the open state to the closed state, since the normal projection of the elastic part 1032 in the conductive elastic arm 103 on the plane where the substrate 101 is located overlaps with the normal projection of the corresponding electrode block 1021 on the plane where the substrate 101 is located, after corresponding electric signals are loaded on the conductive elastic arm 103 and the corresponding electrode block 1021, a voltage difference can be formed between the elastic part 1032 in the conductive elastic arm 103 and the corresponding electrode block 1021. In this way, electrostatic adsorption can be generated between the elastic part 1032 and the electrode block 1021, and under the action of the electrostatic adsorption, the electrode block 1021 can exert a pulling force on the elastic part 1032, so that the elastic part 1032 can rotate in the direction towards the substrate 101 until the elastic part 1032 and the electrode block 1021 are completely attached together. At this time, the conductive elastic arm 103 can be switched to the closed state. It should be noted that in the process of the elastic part 1032 in the conductive elastic arm 103 rotating in the direction close to the substrate 101, the elastic part 1032 can store a rebound force, and the size of the rebound force is positively correlated with the rotation angle of the elastic part 1032. In this case, as shown in FIG. 8, the smell released by the smell box is blocked by the elastic part 1032 in the conductive elastic arm 103 after sequentially passing through the first air outlet K1, the third air hole K8 and the first air hole K1, so as to ensure that the smell is not released. Figure 3

[0086] When it is needed to switch the conductive elastic arm 103 from the closed state to the open state, the corresponding electric signals can be stopped from being loaded on the conductive elastic arm 103 and the corresponding electrode block 1021, so that the voltage difference between the elastic part 1032 in the conductive elastic arm 103 and the corresponding electrode block 1021 is no longer formed. In this way, the electrostatic adsorption between the elastic part 1032 and the electrode block 1021 is no longer generated, and under the action of the rebound force of the elastic part 1032, the elastic part 1032 can rotate in the direction away from the substrate 101 until the elastic part 1032 releases all the rebound force stored therein. At this time, the conductive elastic arm 103 can be switched to the open state. In this case, as shown in FIG. 9, the smell released by the smell box is released after sequentially passing through the first air outlet K1, the third air hole K8 and the first air hole K1, and the elastic part 1032 in the conductive elastic arm 103 does not hinder the release of the smell, so as to ensure that the smell release effect is better. Figure 4

[0087] It should be noted that the direction of the dashed arrow in Figure 3 and Figure 4 is the direction of the smell release of the smell released in the smell box when passing through the valve substrate 100.

[0088] ​​In the embodiment of the present application, the valve substrate 100 can further include a plurality of driving signal lines 104 disposed on the side of the electrode layer 102 away from the substrate 101 and insulated from the electrode layer 101. The driving signal lines 104 can be electrically connected with the connecting portions 1031 in the conductive elastic arms 103. For example, as shown in Figure 5 Figure 5 is a top view of another valve substrate provided by the embodiment of the present application. The plurality of driving signal lines 104 can correspond to the plurality of conductive elastic arms 103 one by one, and the first end of each driving signal line 104 can be electrically connected with the connecting portion 1031 in the corresponding conductive elastic arm 103. Here, the driving chip 001 can be bound on the valve substrate 100, and the second end of each driving signal line 104 can be connected with the driving chip 001. In this way, when a certain conductive elastic arm 103 needs to be loaded with an electrical signal, the driving chip 001 can load the electrical signal on the conductive elastic arm 103 connected with the corresponding driving signal line 104 by applying an electrical signal to the corresponding driving signal line 104.

[0089] In the present application, as shown in Figure 6 Figure 6 is a top view of an electrode layer provided by the embodiment of the present application. The electrode layer 102 can not only include a plurality of electrode blocks 1021, but also include a connecting electrode 1022 between two adjacent electrode blocks 1021. The connecting electrode 1022 can have a plurality of opening regions 1022a corresponding to the plurality of electrode blocks 1021. That is, the connecting electrode 1022 can be a grid-shaped electrode. The boundary of the orthographic projection of each opening region 1022a on the plane of the substrate 100 can coincide with the boundary of the orthographic projection of the corresponding electrode block 1021 on the plane of the substrate 100. In this way, each electrode block 1021 in the electrode layer 102 can be connected together through the grid-shaped connecting electrode 1022, and the potential at each position of the electrode layer 102 is consistent after the electrode layer 102 is loaded with an electrical signal. That is, the electrode layer 102 is equivalent to a common electrode layer arranged as a whole layer. For example, the potential of the common voltage loaded on the electrode layer 102 can be 0 volts.

[0090] In this case, when a certain conductive elastic arm 103 in the valve substrate 100 needs to be in a closed state, the valve substrate 100 only needs to apply an electrical signal to the driving signal line 104 electrically connected with the conductive elastic arm 103, so as to ensure that the conductive elastic arm 103 is loaded with a driving voltage different from the common voltage loaded on the electrode layer 102. In this way, a voltage difference can be formed between the conductive elastic arm 103 and the corresponding electrode block 1021 in the electrode layer 102, so as to ensure that the conductive elastic arm 103 can be attached to the corresponding electrode block 1021. ​​

[0091] When it is required to keep a certain conductive elastic arm 103 in the valve substrate 100 in an open state, the valve substrate 100 only needs to stop applying an electrical signal to the driving signal line 104 electrically connected with the conductive elastic arm 103, that is, stop loading a driving voltage to the conductive elastic arm 103, to ensure that the conductive elastic arm 103 and the corresponding electrode block 1021 in the electrode layer 102 no longer form a voltage difference, and thus the conductive elastic arm 103 and the corresponding electrode block 1021 can be separated.

[0092] In the embodiment of the present application, since the normal projection of the elastic part 1032 in the conductive elastic arm 103 on the plane where the substrate 100 is located does not coincide with the normal projection of the plurality of first air holes K2 arranged in the corresponding electrode block 1021 on the plane where the substrate 101 is located when the conductive elastic arm 103 is in an open state. Therefore, the overlapping area of the normal projection of the conductive elastic arm 103 on the plane where the substrate 100 is located and the normal projection of the corresponding electrode block 1021 on the plane where the substrate 100 is located is small. In order to improve the stability of the conductive elastic arm 103 during the switching process of the conductive elastic arm 103 from the open state to the closed state, the voltage loaded on the conductive elastic arm 103 can be a gradually increasing gradient voltage. For example, the gradient voltage loaded on the conductive elastic arm 103 can be a gradually increasing voltage with a sine voltage, a cosine voltage or other waveforms.

[0093] In addition, the voltage loaded on the conductive elastic arm 103 is positively correlated with the electrostatic adsorption force generated between the elastic part 1032 in the conductive elastic arm 103 and the electrode block 1021. Therefore, when the voltage loaded on the conductive elastic arm 103 is a gradually increasing gradient voltage, the electrostatic adsorption force generated between the elastic part 1032 in the conductive elastic arm 103 and the electrode block 1021 is also gradually increasing. In this way, it can be ensured that the elastic part 1032 can gradually rotate towards the direction of the substrate 101. After the elastic part 1032 and the electrode block 1021 are completely attached together, the conductive elastic arm 103 can no longer load the gradient voltage, but load a fixed voltage, to ensure that the elastic part 1032 and the electrode block 1021 can be firmly attached together.

[0094] Optionally, the driving signal line 104 in the valve substrate 100 is arranged in the same layer and made of the same material as the connecting part 1031 and the elastic part 1032 in the conductive elastic arm 103. For example, the driving signal line 104, the connecting part 1031 and the elastic part 1032 are formed by the same patterning process. In this way, the manufacturing difficulty of the valve substrate 100 can be effectively simplified, so as to reduce the manufacturing cost of the valve substrate 100.

[0095] In the embodiment of the present application, as shown in Figure 7 Figure 7 ​This is a top view of an electrode block provided in an embodiment of this application. Multiple first vent holes K2 disposed within the electrode block 1021 can be arranged in an array of multiple rows and columns, and the shapes of each first vent hole K2 can be identical. For example, in... Figure 7 In this embodiment, each of the first vent holes K2 is square in shape. In other possible implementations, each of the first vent holes K2 can also be circular in shape, which is not limited here.

[0096] In one possible implementation, such as Figure 7 As shown, the dimensions of each first vent hole K2 provided in the electrode block 1021 are the same.

[0097] In another possible implementation, such as Figure 8 As shown, Figure 8 This is a top view of another electrode block provided in this application embodiment. The dimensions of the various first vent holes K2 provided within the electrode block 1021 are not exactly the same. Here, within any column of first vent holes K2, the dimensions of each first vent hole K2 are the same, while within any row of first vent holes K2, the dimensions of each first vent hole K2 gradually increase from both ends towards the middle. This ensures that when odors are released through the multiple first vent holes K2 within this electrode block 1021, the odors are released as much as possible from the center, ensuring that the released odors have a certain directionality, thereby ensuring a better odor release effect.

[0098] Optional, such as Figure 9 As shown, Figure 9 This is a top view of a conductive elastic arm in a closed state, according to an embodiment of this application. The elastic portion 1032 of the conductive elastic arm 103 has multiple auxiliary openings K3. During the manufacturing process of the valve substrate 101, a sacrificial layer is formed between the elastic portion 1032 and the electrode block 1021, and this sacrificial layer needs to be completely removed subsequently. Therefore, when auxiliary openings K3 are provided on the conductive elastic portion 1032, during the removal of the sacrificial layer, etching material can enter through the auxiliary openings K3 to react with the sacrificial layer. This effectively improves the removal efficiency of the sacrificial layer, thereby improving the manufacturing efficiency of the valve substrate 100.

[0099] In this application, after the conductive elastic arm 103 covers the multiple first vent holes K2 provided in the corresponding electrode block 1021, the elastic part 1032 in the conductive elastic arm 103 can be attached to the electrode block 1021. In order to ensure that the elastic part 1032 can properly seal the first vent holes K2 provided in the electrode block 1021, it is necessary to ensure that the orthographic projection of the auxiliary opening K3 provided in the elastic part 1032 on the plane of the substrate 101 does not coincide with the orthographic projection of the first vent hole K2 provided in the electrode block 1021 on the plane of the substrate 101. In this way, the odor released by the first vent hole K2 will not be released from the auxiliary opening K3 provided in the elastic part 1032, so as to ensure that when the conductive elastic arm 103 is in the closed state, it can properly seal the first vent hole K2 provided in the corresponding electrode block 1021, so as to ensure that the first vent hole K2 will not release odor to the outside.

[0100] Optionally, when the conductive elastic arm 103 is in the closed state, the size of the orthographic projection of the elastic part 1032 onto the plane of the substrate 101 needs to be at least 5 micrometers larger than the size of the orthographic projection of the electrode block 1021 onto the plane. Furthermore, the minimum distance between the boundary of the orthographic projection of the auxiliary opening K3 onto the plane of the substrate 101 and the boundary of the orthographic projection of the adjacent first vent K2 onto the plane of the substrate 101 needs to be greater than or equal to 5 micrometers. This ensures that the elastic part 1032 effectively seals the first vent K2.

[0101] In this embodiment, the valve substrate 100 may further include: a first insulating layer 105 located on the side of the electrode layer 102 facing away from the substrate 101, and / or a second insulating layer 106 located on the side of the conductive elastic portion 103 near the substrate 101. Therefore, this embodiment will be described using the following three possible implementations as examples:

[0102] The first optional implementation method, such as Figure 10 As shown, Figure 10 This is a schematic diagram of an array substrate according to another embodiment of this application. When the valve substrate 101 includes a first insulating layer 105, the first insulating layer 105 has a plurality of second vent holes K4 corresponding to and communicating with a plurality of first vent holes K2. Here, the plurality of conductive elastic arms 103 in the valve substrate 100 can all be located on the side of the first insulating layer 105 facing away from the substrate 101, so that the conductive elastic arms 103 and the electrode layer 200 can be insulated from each other by the first insulating layer 105. Furthermore, by providing a plurality of second vent holes K4 corresponding to and communicating with a plurality of first vent holes K2 on the first insulating layer 105, it can be ensured that the first insulating layer 101 will not block the odor released from the first vent holes K2. For example, the opening size of each first vent hole K2 can be the same as the opening size of the corresponding second vent hole K4.

[0103] A second alternative implementation, as shown in Figure 11 Figure 11 is another schematic diagram of an array substrate according to another embodiment of the present application. When the valve substrate 101 includes the second insulating layer 106, the second insulating layer 106 can include a first sub-insulating layer portion 1061 located on one side of the substrate 101, and a second sub-insulating layer portion 1062 abutting the conductive elastic arm 103. Here, the first sub-insulating layer portion 1061 can be located on the side of the electrode layer 102 facing away from the substrate 101, and the connecting portion 1031 in the conductive elastic arm 103 can be fixed on the side of the first sub-insulating layer portion 1061 facing away from the substrate 101; the second sub-insulating layer portion 1062 can abut the side of the elastic portion 1032 in the conductive elastic arm 103 close to the substrate 101. In this way, the connecting portion 1031 and the electrode layer 102 can be insulated by the first sub-insulating layer portion 1061, and the elastic portion 1032 and the electrode layer 102 can be insulated by the second sub-insulating layer portion 1062.

[0104] A third alternative implementation, as shown in Figure 12 Figure 12 is still another schematic diagram of an array substrate according to another embodiment of the present application. When the valve substrate 101 includes both the first insulating layer 105 and the second insulating layer 106, the first insulating layer 105 has a plurality of second air holes K4, and the second insulating layer 106 includes a first sub-insulating layer portion 1061 and a second sub-insulating layer portion 1062. Here, the structures and principles of the second air holes K4, the first sub-insulating layer portion 1061 and the second sub-insulating layer portion 1062 can refer to the corresponding contents in the above embodiments, which will not be described here.

[0105] In the embodiments of the present application, as shown in Figure 13 Figure 13 is still another schematic diagram of an array substrate according to another embodiment of the present application. When the insulating layer between the electrode layer 102 and the plurality of conductive elastic arms 103 is the second insulating layer 106, the valve substrate 100 can further include a plurality of insulating barrier walls 107 located on the side of the electrode layer 102 facing away from the substrate 101. Among them, the plurality of insulating barrier walls 107 can correspond one-to-one to the plurality of electrode blocks 1021 in the electrode layer 102, and at least part of each insulating barrier wall 107 can be distributed around the corresponding electrode block 1021.

[0106] An example, as shown in Figure 14 Figure 14 ​​​​is a top view of an insulating barrier wall cooperating with a corresponding electrode block provided in an embodiment of the present application. Each insulating barrier wall 107 at least includes a ring-shaped sub-barrier wall 1071. The ring-shaped sub-barrier wall 1071 in each insulating barrier wall 107 can surround the periphery of the corresponding electrode block 1021. For example, the orthogonal projection of the electrode block 1021 on the plane of the substrate 101 can be located within the area surrounded by the orthogonal projection of the ring-shaped sub-barrier wall 1071 on the plane of the substrate 101. In this case, by arranging the ring-shaped sub-barrier wall 1071 on the side of the electrode layer 102 away from the substrate 101, the contact area between the elastic portion 1032 and the electrode block 1021 can be reduced when the conductive elastic arm 103 is in the closed state, so that the elastic portion 1032 can be separated from the electrode block 1021 more quickly when the conductive elastic arm 103 needs to be switched from the closed state to the open state. Moreover, the ring-shaped sub-barrier wall 1071 does not affect the plugging effect of the elastic portion 1032 on the first air hole K2 arranged in the electrode block 1021.

[0107] Optionally, as shown in Figure 15 Figure 15 is another top view of an insulating barrier wall cooperating with a corresponding electrode block provided in an embodiment of the present application. Each insulating barrier wall 107 can include not only a ring-shaped sub-barrier wall 1071 but also an auxiliary sub-barrier wall 1072 located in the area surrounded by the ring-shaped sub-barrier wall 1071. In this way, the contact area between the elastic portion 1032 and the electrode block 1021 can be further reduced by arranging the auxiliary sub-barrier wall 1072.

[0108] In the present application, the orthogonal projection of the auxiliary sub-barrier wall 1072 on the plane of the substrate 101 does not coincide with the orthogonal projection of the first air hole K2 arranged in the electrode block 102 on the plane of the substrate 101. In this way, the auxiliary sub-barrier wall 1072 does not interfere with the process of releasing odor from the first air hole K2. It should be noted that the auxiliary sub-barrier wall 1072 can be in the form of a strip, and the number of auxiliary sub-barrier walls 1072 can be multiple, and the end portions of the auxiliary sub-barrier walls 1072 can be connected to the ring-shaped sub-barrier wall 1072. Figure 15 is schematically illustrated by taking the parallel arrangement of the auxiliary sub-barrier walls 1072 as an example. In other possible implementation manners, different auxiliary sub-barrier walls 1072 can also be arranged in a cross manner, which is not limited in the embodiments of the present application.

[0109] ​In summary, the valve substrate provided by the embodiments of the present application includes a substrate, an electrode layer, and a plurality of conductive elastic arms. The valve substrate can be assembled with the smell cartridge, and the two can be assembled to form a smell reproduction device. A voltage difference is formed between a certain conductive elastic arm in the valve substrate and a corresponding electrode block, and after the two are completely attached together, the conductive elastic arm can cover a plurality of first air holes arranged in the corresponding electrode block, so that the conductive elastic arm can block the first air outlet corresponding to the electrode block, thereby ensuring that the smell gas in the smell cartridge cannot be released through the first air outlet. When a certain conductive elastic arm in the valve substrate and a corresponding electrode block do not form a voltage difference, and after the two are separated, the smell gas in the smell cartridge can be released through the corresponding second air outlet, the corresponding first air outlet, and a plurality of first air holes arranged in the corresponding electrode block in sequence. Therefore, the smell reproduction device does not need to use a mechanical valve, but by controlling the valve substrate, the smell cartridge can normally release smell when it needs to release smell, and stop releasing smell when it does not need to release smell. Moreover, the volume of the valve substrate is usually small, which can ensure that the volume of the smell reproduction device integrated with the valve substrate is also small, thereby ensuring that the volume of the near-eye display device integrated with the smell reproduction device is small, and the weight is also small.

[0110] The embodiments of the present application also provide a smell reproduction device. Please refer to Figure 16 , Figure 16 is a structural schematic diagram of a smell reproduction device provided by the embodiments of the present application. The smell reproduction device 000 can include a valve substrate 100 and a smell cartridge 200. Wherein, the valve substrate 100 can be the valve substrate 100 in the above embodiments, for example, the valve substrate 100 can be Figure 1 the valve substrate shown in the figure.

[0111] In the present application, the smell cartridge 200 has a plurality of second air outlets K5. The plurality of second air outlets K5 can be in one-to-one correspondence with the plurality of first air outlets K1 in the substrate 101 in the valve substrate 100. Therefore, the plurality of second air outlets K5 in the smell cartridge 200 can also be in one-to-one correspondence with the plurality of conductive elastic arms 103 arranged in the valve substrate 100.

[0112] In this case, when the smell reproducing device 000 does not need to release the smell, the valve substrate 100 can control each conductive elastic arm 103 in it to be in a closed state, so that each conductive elastic arm 103 can block the first air hole K2 arranged in the corresponding electrode block 1021, and then the smell released from the corresponding second air outlet K5 and the corresponding first air outlet K1 can be blocked by the conductive elastic arm 103, so as to ensure that the smell cannot be released from the smell reproducing device 000. When the smell reproducing device needs to release the smell, the valve substrate 100 can control the conductive elastic arm 103 corresponding to the second air outlet K5 which needs to release the smell to be in an open state, so that the smell released by these second air outlets K5 can pass through the corresponding first air outlet K1 and the first air hole K2 arranged in the corresponding electrode block 1021 in sequence, and then be released from the smell reproducing device 000.

[0113] Optionally, as shown in Figure 16 The smell box 200 can include a first substrate 201 and a second substrate 202 arranged opposite to each other, a support isolation column 203 located between the first substrate 201 and the second substrate 202, and a plurality of smell volatilization blocks 204 located on the side of the first substrate 201 close to the second substrate 202.

[0114] The support isolation column 203 in the smell box 200 is used to divide the space between the first substrate 201 and the second substrate 202 into a plurality of cavities 200a. The plurality of smell volatilization blocks 204 in the smell box 200 correspond to the plurality of cavities 200a one by one, and each smell volatilization block 204 is located in the corresponding cavity 200a. The second substrate 202 in the smell box 200 has a plurality of second air outlets K5, that is, the plurality of second air outlets K5 in the smell box 200 are distributed in the second substrate 202. Here, the plurality of second air outlets K5 of the second substrate 202 can communicate with the plurality of cavities 200a one by one.

[0115] In the present application, each smell volatilization block 204 in the smell box 200 is in a solid state. Here, the smell volatilization film can be first formed on the side of the first substrate 201 close to the second substrate 202, and then a patterning process can be performed on the smell volatilization film, so as to obtain a plurality of second smell volatilization blocks 204. Since the volatilization speed of the solid smell volatilization block 204 is slower than that of the liquid smell volatilization liquid, when the smell volatilization block 204 in a solid state is used to release the smell in the smell box 200, the service life of the smell box 200 can be ensured to be longer, and then the use cost of the smell reproducing device 000 can be reduced.

[0116] Optionally, the plurality of cavities 200a in the smell cartridge 200 can be divided into a plurality of types of smell cavities. The smells released by the smell volatilization blocks 204 in a type of smell cavity are the same, and the smells released by the smell volatilization blocks 204 in different types of smell cavities are different. In this way, a plurality of different smells can be released by the smell cartridge 200.

[0117] In the embodiments of the present application, please refer to Figure 17 , Figure 17 is a structural schematic diagram of another smell reproduction device provided by the embodiments of the present application. The smell cartridge 200 can further include a plurality of heating units 205 corresponding to the plurality of cavities 200a. Each heating unit 205 can be located in the corresponding cavity 200a, and the heating unit 205 is closer to the first substrate 201 than the smell volatilization block 204.

[0118] In the present application, when the heating unit 205 is in a heating state, the heat generated by the heating unit 205 can heat the smell volatilization block 204 to accelerate the rate of smell volatilization of the smell volatilization block 204. In this case, when the smell volatilization block 204 in a cavity 200a in the smell cartridge 200 is needed to release a smell, the smell reproduction device 000 can control the corresponding conductive elastic arm 103 in the valve substrate 100 to be in an open state, and control the heating unit 205 in the cavity 200a to be in a heating state, so that the smell volatilization block 204 in the cavity 200a can quickly volatilize the smell outward. When the smell volatilization block 204 in the cavity 200a in the smell cartridge 200 is not needed to release a smell, the smell reproduction device 000 can control the corresponding conductive elastic arm 103 in the valve substrate 100 to be in a closed state, and control the heating unit 205 in the cavity 200a to be in a stop heating state, so that the rate of smell volatilization of the smell volatilization block 204 in the cavity 200a is slowed down, thereby the service life of the smell volatilization block 204 can be improved.

[0119] For example, the heating unit 205 is a heating electrode, a heating resistor, or a PTC heater, etc., which can generate heat after being powered on. Therefore, the smell reproduction device 000 can apply a driving signal to the heating unit 205 to ensure that the heating unit 205 is in a heating state. Correspondingly, after the smell reproduction device 000 stops applying the driving signal to the heating unit 205, the heating unit 205 can be in a stop heating state.

[0120] Optionally, a flat layer 206 is arranged between the heating unit 205 and the smell volatilization block 204 in each cavity 200a in the smell cartridge 200. The flat layer 206 can ensure that the smell volatilization block 204 has good flatness, so that the smell volatilization block 204 can volatilize the smell outward uniformly.

[0121] In the embodiments of this application, please refer to Figure 18 , Figure 18 This is a schematic diagram of another odor reproduction device provided in this application embodiment. The odor reproduction device 000 may further include: a baffle 300 located between the odor box 200 and the valve base plate 100, and a driving element (not shown) connected to the baffle 300. The baffle 300 can be movably connected to the odor box 200 and also movably connected to the valve base plate 100. The baffle 300 has multiple transition holes K6, which can correspond one-to-one with multiple second air outlets K5 and one-to-one with multiple first air outlets K1.

[0122] The driving element can be configured to: drive the baffle 300 to move between the odor box 200 and the valve base plate 100, so that the transition hole K6 is connected to the corresponding second air outlet K5 and to the corresponding first air outlet K1, or to make the baffle 300 block the first air outlet K1 and block the second air outlet K5.

[0123] In this application, as Figure 18 As shown, when the odor reproduction device 300 needs to operate, the baffle 300 can be moved horizontally between the odor box 200 and the valve base plate 100 by a driving element, so that each transition hole K6 can communicate with the corresponding second air outlet K5 and the corresponding first air outlet K1. In this way, each odor evaporation block 204 in the odor box 200 can release gas through the corresponding first air outlet K1 and the corresponding second air outlet K5.

[0124] like Figure 19 As shown, Figure 19 yes Figure 18 The diagram shows the effect of the odor reproduction device in another state. When the odor reproduction device 300 is not required to operate, the baffle 300 can be moved between the odor box 200 and the valve base plate 100 by a driving element, so that the baffle 300 can block the first air outlet K1 and the second air outlet K5. In this way, the odors emitted by each odor evaporating block 204 in the odor box 200 are blocked by the baffle 300, so as to ensure that these odor evaporating blocks 204 do not release odors to the outside. At this time, even if each conductive elastic arm 103 in the valve base plate 103 is in the open state, it can be ensured that the odor box 200 will not release odors to the outside.

[0125] Optionally, this driving element may include a micro motor and a transmission structure connected to the micro motor. The transmission structure may be connected to the baffle 300. This transmission structure may include a belt transmission structure, a lead screw and nut structure, or a gear transmission structure, etc. In this way, the micro motor can drive the baffle 300 to translate between the valve base plate 100 and the odor box 200 via the transmission structure.

[0126] In the embodiments of the present application, since the smell volatilization block 204 in the smell cartridge 200 has a certain service life, after the smell volatilization block 204 reaches the service life, the smell volatilization block 204 can no longer volatilize smell. Therefore, the valve substrate 100 and the smell cartridge 200 in the smell reproduction device 000 can be detachably connected. In this way, when the smell volatilization block 204 in the smell cartridge 200 can no longer volatilize smell, the smell cartridge 200 can be detached from the valve substrate 100, and a new smell cartridge can be assembled on the valve substrate 100, so as to ensure that the smell reproduction device 000 can normally release smell.

[0127] Optionally, as shown in Figure 16 、 Figure 17 and Figure 18 , the smell reproduction device 000 can further include a protective shell 400. The valve substrate 100 and the smell cartridge 200 in the smell reproduction device 000 can be installed in the protective shell 400. Here, the protective shell 400 has a smell release hole K7. When the smell reproduction device 000 needs to release smell, the conductive elastic arm 103 in the valve substrate 100 is in an open state, so that the smell volatilized by the smell volatilization block 204 in the smell cartridge 200 can be released through the second air outlet K5, the first air outlet K1, the first air hole K2 and the smell release hole K7 in sequence.

[0128] The embodiments of the present application also provide a near-eye display device. The near-eye display device can be an AR device or a VR device, etc. The near-eye display device can include a display device and the smell reproduction device 000 in the above embodiments. For example, the smell reproduction device 000 can be the smell reproduction device 000 shown in Figure 16 、 Figure 17 or Figure 18 .

[0129] In this case, when the display device in the near-eye display device displays a virtual picture, the near-eye display device can control the smell reproduction device 000 to release smell related to the virtual picture according to the virtual picture displayed by the display device. In this way, the user can have an immersive experience, which can significantly improve the user's impression of the virtual picture and enhance the user's sensory experience.

[0130] The embodiments of the present application also provide a manufacturing method of a valve substrate. The manufacturing method of the valve substrate is used to prepare the valve substrate shown in the above embodiments. The manufacturing method of the valve substrate can include:

[0131] forming an electrode layer and a plurality of conductive elastic arms on one side of a substrate;

[0132] The substrate has a plurality of first gas outlets; the electrode layer includes a plurality of electrode blocks corresponding to the first gas outlets one by one, the electrode blocks cover the corresponding first gas outlets on the substrate, and the electrode blocks have a plurality of first air holes communicating with the corresponding first gas outlets; a plurality of conductive elastic arms are located on the side of the electrode layer away from the substrate and are insulated from the electrode layer, the plurality of conductive elastic arms correspond to the plurality of electrode blocks one by one, one end of the conductive elastic arm is fixedly connected with the substrate, and the other end is arranged separately from the substrate; wherein the conductive elastic arm is configured to rotate towards the substrate when a voltage difference is formed between the corresponding electrode blocks, so as to cover the plurality of first air holes arranged in the corresponding electrode block; and rotate away from the substrate when no voltage difference is formed between the corresponding electrode blocks, so as to separate from the corresponding electrode block.

[0133] In summary, the manufacturing method of the valve substrate provided by the embodiments of the present application includes: forming an electrode layer and a plurality of conductive elastic arms on one side of a substrate. Such a valve substrate can be assembled with a scent cartridge, and the two can be assembled to form a scent reproduction device. When a voltage difference is formed between a certain conductive elastic arm in the valve substrate and the corresponding electrode block, and the two are completely attached together, the conductive elastic arm can cover the plurality of first air holes arranged in the corresponding electrode block, so that the conductive elastic arm can block the first gas outlet corresponding to the electrode block, thereby ensuring that the scent gas in the scent cartridge cannot be released through the first gas outlet. When no voltage difference is formed between a certain conductive elastic arm in the valve substrate and the corresponding electrode block, and the two are separated, the scent gas in the scent cartridge can be released through the corresponding second gas outlet, the corresponding first gas outlet, and the plurality of first air holes arranged in the corresponding electrode block in turn. Therefore, the scent reproduction device does not need to use a mechanical valve, but by controlling the valve substrate, it can control the scent cartridge to normally release scent when it needs to release scent, and stop releasing scent when it does not need to release scent. Moreover, the volume of the valve substrate is usually small, which can ensure that the volume of the scent reproduction device integrated with such a valve substrate is also small, thereby ensuring that the volume of the near-eye display device integrated with such a scent reproduction device is small, and the weight is also small.

[0134] Please refer to Figure 20 , Figure 20 is a manufacturing method flow chart of a valve substrate provided by the embodiments of the present application. The manufacturing method of the valve substrate is used to prepare the valve substrate shown in the above Figure 10 The manufacturing method of the valve substrate can include:

[0135] Step S101, sequentially forming an electrode layer and a first insulating layer on one side of a substrate.

[0136] Optionally, the material of the substrate can be silicon-based material, glass material or acrylic plastic, etc. The material of the electrode layer can be metal material such as aluminum, copper, silver, gold, molybdenum or alloy, or transparent conductive material such as indium tin oxide. The thickness of the electrode layer can range from 0.1 microns to 2 microns. The material of the first insulating layer can be inorganic material such as silicon nitride, silicon oxynitride or silicon oxide. The thickness of the first insulating layer can range from 20 nanometers to 500 nanometers.

[0137] For example, refer to Figure 21 , Figure 21 is a schematic diagram of forming an electrode layer and a first insulating layer on one side of a substrate provided by the embodiment of the present application. The first conductive thin film layer and the first inorganic insulating layer 105 can be sequentially formed on one side of the substrate 101 by any one of various methods such as deposition, coating and sputtering. Then, a patterning process is performed on the first inorganic insulating layer 105 to form a plurality of second air holes K4. After that, the first conductive thin film layer is etched with the first inorganic insulating layer 105 with the plurality of second air holes K4 as a mask to form the electrode layer 102. The electrode layer 102 can include a plurality of electrode blocks 1021 and a connecting electrode 1022 between two adjacent electrode blocks 1021. Each electrode block 1021 has a plurality of first air holes K2. The plurality of first air holes K2 in the electrode layer 102 can be in one-to-one correspondence with the plurality of second air holes K4 in the first insulating layer 105.

[0138] In step S102, a sacrificial layer is formed on the side of the first insulating layer away from the substrate.

[0139] Optionally, the material of the sacrificial layer is photosensitive organic material such as photoresist or optically transparent adhesive. The thickness of the sacrificial layer needs to be greater than the thickness of the electrode layer. For example, the thickness of the sacrificial layer can range from 1 microns to 3 microns.

[0140] For example, refer to Figure 22 , Figure 22is a schematic view of forming a sacrificial layer on the side of the first insulating layer away from the substrate provided by the embodiment of the present application. A layer of organic thin film with photosensitivity can be coated on the side of the first insulating layer 105 away from the substrate 101, and then the organic thin film is subjected to exposure treatment and development treatment, so as to obtain the sacrificial layer 108. The sacrificial layer 108 has a sacrificial block 1081 corresponding to each of the plurality of electrode blocks 1021, and the orthographic projection of each of the electrode blocks 1021 on the substrate 101 is located in the orthographic projection of the corresponding sacrificial block 1081 on the substrate 101. Here, the sacrificial layer 108 also has a certain flattening effect, and for this purpose, part of each of the sacrificial blocks 1081 is filled in the first air hole K2 provided in the corresponding electrode block 1021, so as to ensure that the flatness of the side of the sacrificial block 1081 away from the substrate 101 is good. In this way, it can be ensured that the conductive elastic arm can be subsequently manufactured on the sacrificial block 1081.

[0141] Step S103, forming a metal conductive layer on the side of the sacrificial layer away from the substrate.

[0142] Optionally, the material of the metal conductive layer can be aluminum, copper, silver, gold, molybdenum or alloy metal material. The thickness range of the metal conductive layer can be 50 nanometers to 5 microns.

[0143] For example, refer to Figure 23 , Figure 23 is a schematic view of forming a metal conductive layer on the side of the sacrificial layer away from the substrate provided by the embodiment of the present application. The second conductive thin film layer can be formed on the side of the sacrificial layer 108 away from the substrate 101 by any one of a plurality of ways such as deposition, coating and sputtering. Then, the second conductive thin film is subjected to a patterning process, so as to obtain the conductive metal layer. The conductive metal layer can include a plurality of conductive elastic arms 103 and a plurality of drive signal lines 104. Here, the plurality of conductive elastic arms 103 can correspond to the plurality of electrode blocks 1021 one by one, and each of the conductive elastic arms 103 can include a connecting part 1031 located on the side of the first insulating layer 105 away from the substrate 101, and an elastic part 1032 located on the side of the sacrificial block 1081 away from the substrate 101, and the plurality of drive signal lines 104 can be electrically connected to the connecting parts 1031 in the plurality of conductive elastic arms 103 one by one.

[0144] Step S104, performing a patterning process on the side of the substrate away from the electrode layer, so as to form a plurality of first air holes on the side of the substrate away from the electrode layer.

[0145] For example, refer to Figure 24 , Figure 24is a schematic view of patterning the side of the substrate away from the electrode layer provided by the embodiments of the present application. A patterning process can be performed on the side of the substrate 101 away from the electrode layer 102 to achieve the patterning of the side of the substrate 101 away from the electrode layer 102. After the patterning of the side of the substrate 101 away from the electrode layer 102, a plurality of first gas outlets K1 can be formed on the side of the substrate 101 away from the electrode layer 102. The plurality of first gas outlets K1 correspond to the plurality of electrode blocks 1021 in the electrode layer 102 one by one, and each electrode block 1021 can cover a corresponding first gas outlet K1 on the substrate 101.

[0146] Optionally, in order to ensure that the substrate 101 can stably support the electrode layer 102, it is necessary to ensure that the depth of the first gas outlet K1 is less than the thickness of the substrate 101. In this way, the electrode blocks 1021 in the electrode layer 102 can still be supported by the substrate 101. In this case, after the plurality of first gas outlets K1 are formed on the side of the substrate 101 away from the electrode layer 102, a communication process can be performed again on the side of the substrate 101 away from the electrode layer 102 to form a plurality of third air holes K8 in each first gas outlet K1. The plurality of third air holes K8 in the substrate 101 can be in one-to-one correspondence with the plurality of first air holes K2 in the electrode layer 102.

[0147] Step S105, removing the sacrificial layer between the first insulating layer and the elastic arm.

[0148] Optionally, the etching substance can be used to remove the sacrificial layer 108 between the first insulating layer 104 and the elastic portion 1032. Here, the etching substance can react with the sacrificial layer 108 through the first gas outlet K1 and the third air hole K8 in sequence, and then the sacrificial layer 108 can be removed to obtain Figure 10 The valve substrate is shown.

[0149] Optionally, during the patterning process of the second conductive film, a plurality of auxiliary openings can also be formed in the elastic portion 1032 at the same time. In this way, during the removal of the sacrificial layer, the etching substance can also react with the sacrificial layer 108 through the auxiliary openings, thereby accelerating the removal efficiency of the sacrificial layer 108.

[0150] Here, before the removal of the sacrificial layer 108, the elastic portion 1031 in the conductive elastic arm 103 is only attached to the sacrificial layer 108. After the removal of the sacrificial layer 108, the elastic portion 1031 in the conductive elastic arm 103 can be suspended, and the internal stress of the elastic portion 1031 will change, which will automatically curl outward. For example, please refer to Figure 25 , Figure 25This is a schematic diagram of an elastic portion curling outwards according to an embodiment of this application. After the elastic portion 1031 curls outwards, it stores a rebound force when actively moved closer to the substrate 101 by an external force. After the external force is removed, the elastic portion 1031 can return to its previous curled state under the action of the rebound force. Therefore, the elastic portion 1031 in the conductive elastic arm 103 can be used to block or unblock the multiple first vent holes K2 provided in the corresponding electrode block 1021.

[0151] It should be noted that a patterning process in the above embodiments may include: photoresist coating, exposure, development, etching, and photoresist stripping.

[0152] It should also be noted that the working principle of the valve substrate shown in the above embodiments can be referred to the corresponding part in the aforementioned embodiments of the valve substrate. This will not be repeated here.

[0153] Please refer to Figure 26 , Figure 26 This is a flowchart illustrating a method for manufacturing a scent box according to an embodiment of this application. The method for manufacturing this scent box is used to prepare the aforementioned... Figure 16 The odor box shown is an example within an odor reproduction device. The manufacturing method of this odor box may include:

[0154] Step S201: Form a plurality of odor evaporation blocks on the first substrate.

[0155] For example, such as Figure 27 As shown, Figure 27 This is a schematic diagram of forming multiple odor evaporating blocks on a first substrate according to an embodiment of this application. A photoresist or photosensitive gel material mixed with a specific odor concentrate can be coated on the first substrate 201, and then the material can be exposed and developed to pattern it. After that, it can be UV cured or thermally cured to obtain multiple odor evaporating blocks 204.

[0156] Step S202: Form support isolation pillars on the second substrate.

[0157] Optionally, the material supporting the isolation pillar can be a photoresist with a relatively large thickness. For example, the thickness of the support pillar can range from 2 micrometers to 200 micrometers.

[0158] For example, such as Figure 28 As shown, Figure 28 This is a schematic diagram illustrating the formation of a support isolation pillar on a second substrate according to an embodiment of this application. A relatively thick layer of photoresist can be coated onto the second substrate 202, and then the photoresist can be exposed and developed to obtain the support isolation pillar 203.

[0159] In step S203, the first substrate and the second substrate are aligned, and the second substrate is patterned to form a plurality of second air outlets on the second substrate.

[0160] As shown in Figure 29 , Figure 29 is a schematic diagram of the first substrate and the second substrate after alignment according to an embodiment of the present application. During the alignment of the first substrate 201 and the second substrate 202, it is necessary to ensure that the plurality of smell volatilization blocks 204 formed on one side of the first substrate 201 face the second substrate 202, and it is necessary to ensure that the support isolation columns 203 formed on one side of the second substrate 202 face the first substrate 201. In this way, after the first substrate 201 and the second substrate 202 are aligned, the support isolation columns 203 can divide the space between the first substrate 201 and the second substrate 202 into a plurality of cavities 200a. The plurality of cavities 200a can correspond one-to-one to the plurality of smell volatilization blocks 204, and each smell volatilization block 204 is located in a corresponding cavity 200a.

[0161] Then, a plurality of second air outlets K5 can be formed in the second substrate 202 by laser drilling, and the plurality of second air outlets K5 can communicate one-to-one with the plurality of cavities 200a. In this way, the smell box 200 is obtained.

[0162] It should be noted that in the drawings, the dimensions of layers and regions can be exaggerated for clarity. Also, it can be understood that when a component or layer is referred to as being "on" another component or layer, it can be directly on the other component or layer, or intervening layers can also be present. Further, it can be understood that when a component or layer is referred to as being "under" another component or layer, it can be directly under the other component or layer, or one or more intervening layers or components can also be present. In addition, it can be understood that when a layer or component is referred to as being "between" two layers or components, it can be the only layer or component between the two layers or components, or one or more intervening layers or components can also be present. Similar reference numerals can be used throughout the specification for like components.

[0163] In the present application, the terms "first" and "second" are used only for descriptive purposes and should not be construed as indicating or implying relative importance. The term "plurality" refers to two or more, unless otherwise explicitly limited.

[0164] The above description is only some optional embodiments of the present application, and is not used to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A valve base plate, characterized by include: A substrate having a plurality of first vent ports; An electrode layer located on one side of the substrate, the electrode layer comprising: a plurality of electrode blocks corresponding one-to-one with the first air outlet, the electrode blocks covering the corresponding first air outlet on the substrate, and the electrode blocks having a plurality of first vent holes communicating with the corresponding first air outlet; In addition, a plurality of conductive elastic arms are located on the side of the electrode layer away from the substrate and are insulated from the electrode layer. The plurality of conductive elastic arms correspond one-to-one with the plurality of electrode blocks. One end of the conductive elastic arm is fixedly connected to the substrate, and the other end is separated from the substrate. The conductive elastic arm is configured to: rotate toward the substrate when a voltage difference is formed with the corresponding electrode block to cover a plurality of first vent holes provided in the corresponding electrode block; and rotate away from the substrate when no voltage difference is formed with the corresponding electrode block to separate from the corresponding electrode block.

2. The valve substrate of claim 1, wherein, The conductive elastic arm includes: a connecting portion fixed on the substrate, and an elastic portion with one end fixedly connected to the connecting portion, wherein the end of the elastic portion opposite to the connecting portion is separately disposed from the substrate; When no voltage difference is formed between the conductive elastic arm and the corresponding electrode block, the elastic part in the conductive elastic arm is bent, and the orthographic projection of the elastic part on the plane of the substrate does not coincide with the orthographic projection of the plurality of first vent holes provided in the corresponding electrode block on the plane of the substrate.

3. The valve substrate of claim 2, wherein, When no voltage difference is formed between the conductive elastic arm and the corresponding electrode block, the orthographic projection of the elastic part in the conductive elastic arm onto the plane of the substrate overlaps with the orthographic projection of the corresponding electrode block onto the plane of the substrate.

4. The valve substrate of claim 2, wherein, The valve substrate further includes: a plurality of drive signal lines located on the side of the electrode layer away from the substrate and insulated from the electrode layer, the drive signal lines being electrically connected to the connection portion.

5. The valve substrate of claim 4, wherein, The drive signal line, the connecting part, and the elastic part are arranged in the same layer and are made of the same material.

6. The valve substrate of claim 4, wherein, The electrode layer further includes a connecting electrode located between two adjacent electrode blocks, the connecting electrode having a plurality of opening regions corresponding one-to-one with the plurality of electrode blocks, the boundary of the orthographic projection of the opening region on the plane where the substrate is located coincides with the boundary of the orthographic projection of the corresponding electrode block on the plane where the substrate is located.

7. The valve substrate of any one of claims 2 to 6, wherein, The elastic part has multiple auxiliary openings; Wherein, after the conductive elastic arm covers the corresponding electrode block and provides multiple first vent holes, the orthographic projection of the auxiliary opening on the plane of the substrate does not coincide with the orthographic projection of the first vent hole on the plane of the substrate.

8. The valve substrate of any one of claims 1 to 6, wherein, The valve substrate further includes: a first insulating layer located on the side of the electrode layer away from the substrate, and / or a second insulating layer located on the side of the conductive elastic arm close to the substrate; Wherein, when the valve substrate includes the first insulating layer, the first insulating layer has a plurality of second vent holes that are connected to the plurality of first vent holes one by one; When the valve substrate comprises the second insulating layer, the second insulating layer comprises: a first sub-insulating part on the side of the substrate, and a second sub-insulating part abutting the conductive elastic arm.

9. The valve substrate of claim 8, wherein, When the insulating layer between the electrode layer and the plurality of conductive elastic arms is the second insulating layer, the valve substrate further comprises: a plurality of insulating barrier walls on the side of the electrode layer away from the substrate, the plurality of insulating barrier walls correspond one-to-one to the plurality of electrode blocks, and at least part of the insulating barrier walls surround the corresponding electrode blocks.

10. A method of manufacturing a valve substrate, characterized by, The method comprises: forming an electrode layer and a plurality of conductive elastic arms on one side of a substrate; wherein the substrate has a plurality of first air outlets; the electrode layer comprises: a plurality of electrode blocks corresponding one-to-one to the first air outlets, the electrode blocks covering the corresponding first air outlets on the substrate, and the electrode blocks having a plurality of first air holes communicating with the corresponding first air outlets; the plurality of conductive elastic arms are located on the side of the electrode layer away from the substrate and are insulated from the electrode layer, the plurality of conductive elastic arms correspond one-to-one to the plurality of electrode blocks, one end of the conductive elastic arm is fixedly connected to the substrate, and the other end is arranged separately from the substrate; wherein the conductive elastic arm is configured to: when a voltage difference is formed between the corresponding electrode blocks, rotate towards the substrate to cover the plurality of first air holes arranged in the corresponding electrode blocks; when no voltage difference is formed between the corresponding electrode blocks, rotate away from the substrate to separate from the corresponding electrode blocks.

11. An odor reproduction apparatus characterized by comprising: comprises: an odor cartridge and a valve substrate on one side of the odor cartridge, the valve substrate being any one of claims 1 to 9; wherein the odor cartridge has a plurality of second air outlets, and the plurality of second air outlets correspond one-to-one to the plurality of first air outlets in the substrate in the valve substrate.

12. The odor reproduction apparatus according to claim 11, wherein The odor cartridge comprises: a first substrate and a second substrate arranged opposite to each other, a support isolation column between the first substrate and the second substrate, and a plurality of odor volatilization blocks on one side of the first substrate close to the second substrate; wherein the support isolation column is used to divide the space between the first substrate and the second substrate into a plurality of cavities; the plurality of odor volatilization blocks correspond one-to-one to the plurality of cavities, and the odor volatilization blocks are located in the corresponding cavities; the second substrate has the plurality of second air outlets, and the plurality of second air outlets correspond one-to-one to the plurality of cavities.

13. The odor reproduction apparatus according to claim 12, wherein The odor cartridge further comprises: a plurality of heating units corresponding one-to-one to the plurality of cavities, the heating units being located in the corresponding cavities, and the heating units being closer to the first substrate than the odor volatilization blocks.

14. The odor reproduction apparatus according to any one of claims 11 to 13, wherein The odor reproduction device further comprises: a baffle between the odor cartridge and the valve substrate, and a driving element connected to the baffle, the baffle being movably connected to the odor cartridge and movably connected to the valve substrate, the baffle having a plurality of adapter holes, the plurality of adapter holes corresponding one-to-one to the plurality of second air outlets and one-to-one to the plurality of first air outlets; The driving element is configured to drive the baffle to move between the smell cartridge and the valve base plate, so as to make the switching hole communicate with the corresponding second air outlet and the corresponding first air outlet, or make the baffle shield the first air outlet and the second air outlet.

15. A near-eye display device, comprising: The method comprises: The display device and the smell reproduction device according to any one of claims 11 to 14.

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