Substrate wet transfer device

Abstract

The present invention provides a wet substrate conveying device. The wet substrate conveying device of the present invention conveys the substrate through a front conveying roller, an intermediate conveying roller, and a rear conveying roller under the action of a driving mechanism, and by setting a first tangent point and a second tangent point on the intermediate conveying roller, and the distances from the first tangent point and the second tangent point to the axis of the intermediate conveying roller are different, so that the angle between the substrate and the horizontal plane can be adjusted as the substrate advances during the conveying process, enabling the substrate on the conveying roller to shake smoothly, creating height differences on the water film surface of the substrate, causing the water film to move reciprocally on the substrate by its own gravity, and automatically laying the water film on the substrate evenly. The conveying device of the present application has a simple structure, a high flatness of the laid water film, and the device structure does not contact the upper surface of the substrate, and will not damage the water film on the substrate, solving the problems in the prior art that the substrate conveying structure is complex, the flatness of the water film is low, and the water film is easily damaged.

Description

Technical Field

[0001] The present invention relates to the technical field of conveying equipment, and particularly to a wet substrate conveying device. Background Art

[0002] During the production and processing of substrates, it is necessary to lay a water film on the surface of the substrate. In the prior art, the common methods for laying the water film are scraping, air flow blowing, etc.

[0003] Laying the water film on the substrate by scraping requires controlling the flatness and pressure between the substrate and the scraping surface, and also requires controlling the conveying speed of the substrate; laying the water film by air flow blowing requires controlling the air flow area, air flow size, and also requires controlling the variable of the air flow within a relative time to be extremely small. Through the above two methods, on the one hand, the requirements for the mechanical structure are relatively high, and on the other hand, the flatness of the laid water film is relatively low.

[0004] In addition, if the internal structure of the equipment comes into contact with the surface of the substrate, it may directly affect the surface water film structure or damage the substrate structure.

[0005] Therefore, it is necessary to design a conveying device with a simple structure, high flatness of the laid water film, and no contact with the water film surface. Summary of the Invention

[0006] The purpose of the present invention is to provide a wet substrate conveying device to improve the problems of complex substrate conveying structure, low flatness of the water film, and easy damage to the water film in the prior art.

[0007] To achieve the above object, the present invention provides a wet substrate conveying device, including a front conveying roller, an intermediate conveying roller, a rear conveying roller, and a driving mechanism; the intermediate conveying roller is arranged between the front conveying roller and the rear conveying roller, the driving mechanism is connected to the front conveying roller, the intermediate conveying roller, and the rear conveying roller, the driving mechanism is used to drive the front conveying roller, the intermediate conveying roller, and the rear conveying roller to rotate, and the driving mechanism is used to convey the substrate along the direction from the front conveying roller to the rear conveying roller; there are a first tangent point and a second tangent point on the cross-section of the intermediate conveying roller, and the distance from the first tangent point to the axis of the intermediate conveying roller is less than or greater than the distance from the second tangent point to the axis of the intermediate conveying roller.

[0008] The beneficial effects of the substrate wet conveying device of the present invention are as follows: Under the action of the driving mechanism, the substrate is conveyed by the front conveying roller, the intermediate conveying roller and the rear conveying roller. By setting the first tangent point and the second tangent point on the intermediate conveying roller, and the distances from the first tangent point and the second tangent point to the axis of the intermediate conveying roller are different, the angle between the substrate and the horizontal plane can be adjusted during the conveying process as the substrate advances, so that the substrate on the conveying roller can shake smoothly, creating height differences on the water film surface of the substrate, enabling the water film to move back and forth on the substrate by its own gravity, and automatically spreading the water film on the substrate evenly. The conveying device of the present application has a simple structure, a high flatness of the spread water film, and the device structure does not contact the upper surface of the substrate, so it will not damage the water film on the substrate, solving the problems of complex substrate conveying structure, low flatness of the water film, and easy damage to the water film in the prior art.

[0009] In a feasible embodiment, the plane where the outer tangents of the front conveying roller and the rear conveying roller are located is the first plane. The distance from the first tangent point to the axis of the intermediate conveying roller is greater than the distance from the intermediate conveying roller to the first plane, and the distance from the second tangent point to the axis of the intermediate conveying roller is less than or equal to the distance from the intermediate conveying roller to the first plane. The beneficial effects are as follows: By setting the distance from the first tangent point to the axis to be greater than the distance between the intermediate conveying roller and the first plane, and setting the distance from the second tangent point to the axis to be less than the distance between the intermediate conveying roller and the first plane, the substrate has a process of pitching down and pitching up during the conveying process, increasing the range of angle change during the conveying process of the substrate, and promoting the water film on the substrate to be more uniform.

[0010] In a feasible embodiment, the diameters of the front conveying roller and the rear conveying roller are different. The beneficial effects are as follows: Such a setting makes the conveying speeds of the substrate on the front conveying roller and the rear conveying roller different, facilitating adaptation to the speed differences brought about by the different tangent points of the intermediate conveying roller acting on the substrate.

[0011] In a feasible embodiment, the front conveying roller, the intermediate conveying roller and the rear conveying roller are arranged in the same plane. The beneficial effects are as follows: Such a setting facilitates the arrangement and driving of each conveying roller.

[0012] In a feasible embodiment, the intermediate conveying roller is provided with an arc surface section and a flat surface section, and both the arc surface section and the flat surface section are used to support the substrate. The beneficial effects are as follows: The setting of the arc section and the flat surface section can make the angle change between the substrate and the horizontal plane during the conveying process vary at different speeds, increasing the shaking of the moisture on the substrate.

[0013] In a feasible embodiment, the cross-section of the intermediate conveying roller is in the shape of a waist-shaped hole or a circular cam.

[0014] In a feasible embodiment, the distance between the front conveying roller and the middle conveying roller is less than the distance between the middle conveying roller and the rear conveying roller. The beneficial effect is that: such a setting can advance the time point when the substrate angle changes while the distance between the front conveying roller and the rear conveying roller remains unchanged, and relatively can increase the process of substrate angle change.

[0015] In a feasible embodiment, the middle conveying roller is arranged to be at least two. The beneficial effect is that: arranging the middle conveying roller to be at least two can enhance the diversity of angle change during the substrate conveying process.

[0016] In a feasible embodiment, a fixing frame is further included; both the front conveying roller and the rear conveying roller are fixedly arranged on the fixing frame, and the middle conveying roller is movably arranged on the fixing frame. The beneficial effect is that: such a setting facilitates adjusting the distance between the middle conveying roller and the front conveying roller, and can increase the range of angle change.

[0017] In a feasible embodiment, an elastic member is further included; the elastic member is arranged between the middle conveying roller and the fixing frame. The beneficial effect is that: setting the elastic member can relieve the impact between the substrate and the middle conveying roller through the elastic member when the angle of the substrate on the middle conveying roller changes suddenly, and reduce the possibility of substrate damage.

[0018] In a feasible embodiment, an inclined conveying roller is further included; the inclined conveying roller is arranged between the front conveying roller and the rear conveying roller, the front conveying roller is horizontally arranged, the inclined conveying roller is inclined relative to the horizontal plane, the driving mechanism is connected to the inclined conveying roller, and the driving mechanism is used to drive the inclined conveying roller to rotate. The beneficial effect is that: setting the inclined conveying roller enables the substrate to be inclined along the axis direction of the inclined conveying roller when moving onto the inclined conveying roller. Combining with the function of the middle conveying roller, the water on the substrate can be subjected to the acting forces in two non-parallel directions, promoting the uniformity of the water film on the substrate.

[0019] In a feasible embodiment, the inclined conveying roller is arranged to be at least two, and the inclination direction of at least one of the inclined conveying rollers is opposite to the inclination direction of at least one of the other inclined conveying rollers. The beneficial effect is that: arranging the inclination directions of at least two inclined conveying rollers to be opposite enables the water on the substrate to be automatically laid flat in two opposite directions.

[0020] In a feasible embodiment, the inclined conveying roller is arranged to be several, and the included angles of each inclined conveying roller with the horizontal plane gradually increase and then gradually decrease in sequence. The beneficial effect is that: conveying the substrate through the inclined conveying rollers with smooth angle changes in this way promotes the uniformity of the water film on the substrate.

[0021] In a feasible embodiment, a flexible layer is provided on at least one of the front conveying roller, the intermediate conveying roller, and the rear conveying roller. The beneficial effects are as follows: on the one hand, it can reduce the stress when the substrate initially contacts the conveying roller, avoiding damage to the substrate; on the other hand, it can increase the contact area between the substrate and the conveying roller, enhancing the conveying force.

[0022] In a feasible embodiment, a spraying mechanism is further included; the spraying mechanism is arranged corresponding to the substrate conveyed by the front conveying roller or the intermediate conveying roller, and the spraying mechanism is used to spray water on the substrate. The beneficial effect is that by arranging the spraying mechanism, water is sprayed on the substrate on the conveying roller to achieve the purpose of laying a water film.

[0023] In a feasible embodiment, the spraying mechanism includes a spray head and a water source pumping mechanism; the spray head is arranged corresponding to the substrate conveyed by the front conveying roller or the intermediate conveying roller, the water source pumping mechanism is communicated with the spray head, the water source pumping mechanism is used to supply water to the spray head, and the spray head is used to spray water on the substrate. The beneficial effect is that water is supplied by the water source pumping mechanism, and the spray head sprays water on the substrate to achieve the purpose of laying a water film on the substrate.

[0024] In a feasible embodiment, a plurality of spray heads are provided. The beneficial effect is that by providing a plurality of spray heads, the spraying area of the spraying mechanism on the substrate is increased, and the processing efficiency can be improved.

[0025] In a feasible embodiment, the spraying mechanism further includes a detector and a controller; the detector is arranged at the front conveying roller, the detector is electrically connected to the controller, the detector is used to detect the position of the substrate and generate a detection signal, and the detector transmits the detection signal to the controller; the controller is electrically connected to the water source pumping mechanism, and the controller is used to control the opening and closing of the water source pumping mechanism according to the detection signal. The beneficial effect is that the position of the substrate is detected by the detector, and a detection signal is obtained through the detection of the detector. The controller controls the opening and closing of the water source pumping mechanism according to the detection signal, which can reduce water consumption. Brief Description of the Drawings

[0026] Figure 1 Structural schematic diagram of the wet conveying device for substrates in the first embodiment of the present invention;

[0027] Figure 2 is Figure 1 Partial structural schematic diagram of the intermediate conveying roller and the spraying mechanism;

[0028] Figure 3 is Figure 1Schematic diagram of the structure of the middle substrate located on the front conveying roller and the intermediate conveying roller;

[0029] Figure 4 is Figure 1 Schematic diagram of the structure of the middle substrate located on the intermediate conveying roller and the rear conveying roller;

[0030] Figure 5 Partial schematic diagram of the wet conveying device for the substrate in the second embodiment of the present invention;

[0031] Figure 6 Partial schematic diagram of the wet conveying device for the substrate in the third embodiment of the present invention;

[0032] Figure 7 Partial schematic diagram of the wet conveying device for the substrate in the fourth embodiment of the present invention;

[0033] Figure 8 Partial schematic diagram of the wet conveying device for the substrate in the fifth embodiment of the present invention;

[0034] Figure 9 Partial schematic diagram of the wet conveying device for the substrate in the sixth embodiment of the present invention;

[0035] Figure 10 is Figure 9 Partial enlarged schematic diagram of the structure at A;

[0036] Figure 11 Partial schematic diagram of the wet conveying device for the substrate in the seventh embodiment of the present invention.

[0037] Reference numerals in the figure:

[0038] 1. Front conveying roller;

[0039] 2. Intermediate conveying roller; 201. Arc surface section; 202. Plane section;

[0040] 3. Rear conveying roller;

[0041] 4. Driving mechanism;

[0042] 5. Spraying mechanism; 501. Spray head; 502. Water source pumping mechanism;

[0043] 6. Fixed frame;

[0044] 7. Elastic member;

[0045] 8. Inclined conveying roller;

[0046] 9. Flexible layer. Detailed implementation manners

[0047] To make the objectives, technical solutions, and advantages of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings of the present invention. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the art to which the present invention pertains. The words such as "including" used herein mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects.

[0048] In view of the problems existing in the prior art, an embodiment of the present invention provides a wet substrate conveying device.

[0049] Figure 1 It is a schematic structural diagram of the wet substrate conveying device in the first embodiment of the present invention. Figure 2 is Figure 1 a partial schematic structural diagram of the middle conveying roller and the spraying mechanism. Figure 3 is Figure 1 a schematic structural diagram of the substrate located on the front conveying roller and the middle conveying roller in Figure 4 is Figure 1 a schematic structural diagram of the substrate located on the middle conveying roller and the rear conveying roller in

[0050] In some embodiments of the present invention, referring to Figures 1 to 4 , the wet substrate conveying device includes a front conveying roller 1, a middle conveying roller 2, a rear conveying roller 3, and a driving mechanism 4; the middle conveying roller 2 is arranged between the front conveying roller 1 and the rear conveying roller 3, the driving mechanism 4 is connected to the front conveying roller 1, the middle conveying roller 2, and the rear conveying roller 3, the driving mechanism 4 is used to drive the front conveying roller 1, the middle conveying roller 2, and the rear conveying roller 3 to rotate, and the driving mechanism 4 is used to convey the substrate in the direction from the front conveying roller 1 to the rear conveying roller 3; there are a first tangent point and a second tangent point on the cross-section of the middle conveying roller 2, and the distance from the first tangent point to the axis of the middle conveying roller 2 is less than or greater than the distance from the second tangent point to the axis of the middle conveying roller 2.

[0051] In some specific embodiments of the present invention, the driving mechanism 4 is a wheel-type conveying mechanism. In some specific embodiments, the wheel-type conveying mechanism is a sprocket and chain mechanism driven by a motor. In still some other embodiments, the wheel-type conveying mechanism is a belt and pulley conveying mechanism driven by a motor.

[0052] In some embodiments, the device further includes a spraying mechanism 5; the spraying mechanism 5 is arranged corresponding to the substrate conveyed by the front conveying roller 1 or the intermediate conveying roller 2, and the spraying mechanism 5 is used to spray water on the substrate.

[0053] In some embodiments, the front conveying roller 1, the intermediate conveying roller 2, and the rear conveying roller 3 are horizontally arranged in the front-rear direction from left to right. The front conveying roller 1, the intermediate conveying roller 2, and the rear conveying roller 3 are rotatably arranged on a fixed frame 6, and sprockets or pulleys cooperating with the driving mechanism 4 are provided at the ends of the front conveying roller 1, the intermediate conveying roller 2, and the rear conveying roller 3.

[0054] In some embodiments, when the left end of the substrate is located on the front conveying roller 1 and its position remains unchanged, when the right part of the substrate is tangent to the horizontal direction where the first tangent point is located, the angle between the substrate and the horizontal plane is the first angle, and when the right part of the substrate is tangent to the horizontal direction where the second tangent point is located, the angle between the substrate and the horizontal plane is the second angle. Due to the influence of the different distances of the two tangent points from the axis center, the first angle and the second angle are not equal. And as the intermediate conveying roller 2 rotates, when the position of the substrate remains unchanged, the angle between the substrate and the horizontal plane will change reciprocally between the first angle and the second angle.

[0055] In some embodiments, as the substrate is conveyed from left to right, the angle between the substrate and the horizontal plane will gradually change.

[0056] In some embodiments, the front conveying roller 1, the intermediate conveying roller 2, and the rear conveying roller 3 are all columnar rollers. In some specific embodiments, the front conveying roller 1 and the rear conveying roller 3 are both cylindrical rollers.

[0057] In some embodiments, the spraying mechanism 5 is arranged above the front conveying roller 1.

[0058] In some embodiments, the spraying mechanism 5 is arranged above the position between the front conveying roller 1 and the intermediate conveying roller 2.

[0059] In some embodiments, both the first tangent point and the second tangent point are the points on the cross-section of the intermediate conveying roller 2 in contact with the substrate when the substrate contacts the intermediate conveying roller 2.

[0060] In some embodiments, the distance from the first tangent point to the axis center of the intermediate conveying roller 2 is the point on the surface of the intermediate conveying roller 2 with the farthest distance from the axis center of the intermediate conveying roller 2.

[0061] In some embodiments, the distance from the "first person" tangent point to the axis center of the intermediate conveying roller 2 is the point on the surface of the intermediate conveying roller 2 with the closest distance from the axis center of the intermediate conveying roller 2.

[0062] In some embodiments, the substrate is a silicon wafer or a base plate.

[0063] In some embodiments of the present invention, with reference to Figures 1 to 4 , the plane where the outer tangents of the front conveying roller 1 and the rear conveying roller 3 are located is the first plane. The distance from the first tangent point to the axis of the intermediate conveying roller 2 is greater than the distance from the intermediate conveying roller 2 to the first plane, and the distance from the second tangent point to the axis of the intermediate conveying roller 2 is less than or equal to the distance from the intermediate conveying roller 2 to the first plane.

[0064] In some specific embodiments of the present invention, the plane where the outer tangents are located refers to the plane that is simultaneously tangent to the upper surface of the front conveying roller 1 and the upper side surface of the rear conveying roller 3, and this tangent plane is the first plane.

[0065] In some embodiments, the distance from the first tangent point to the intermediate conveying roller 2 is greater than the distance between the intermediate conveying roller 2 and the first plane. When the intermediate conveying roller 2 rotates to a position where the first tangent point is above, the substrate on the front conveying roller 1 and the intermediate conveying roller 2 at the current position is in a state of being lower on the left and higher on the right, and the substrate on the intermediate conveying roller 2 and the rear conveying roller 3 at the current position is in a state of being higher on the left and lower on the right.

[0066] In some embodiments, the distance from the second tangent point to the intermediate conveying roller 2 is less than the distance between the intermediate conveying roller 2 and the first plane. When the intermediate conveying roller 2 rotates to a position where the second tangent point is above, the substrate on the front conveying roller 1 and the intermediate conveying roller 2 at the current position is in a state of being higher on the left and lower on the right, and the substrate on the intermediate conveying roller 2 and the rear conveying roller 3 at the current position is in a state of being lower on the left and higher on the right.

[0067] In some embodiments, the first plane is arranged parallel to the horizontal plane.

[0068] In some embodiments, the first plane is arranged inclined with respect to the horizontal plane.

[0069] In some embodiments, the distance from the first tangent point to the axis of the intermediate conveying roller 2 is less than the distance from the second tangent point to the axis of the intermediate conveying roller 2.

[0070] In some embodiments, the distance from the first tangent point to the axis of the intermediate conveying roller 2 and the distance from the second tangent point to the axis of the intermediate conveying roller 2 are greater than the distance from the first plane to the axis of the intermediate conveying roller 2.

[0071] In some embodiments, a third tangent point is provided on the intermediate conveying roller 2, and the distance from the third tangent point to the axis of the intermediate conveying roller 2 is greater than the distance from the first tangent point to the axis of the intermediate conveying roller 2.

[0072] In some embodiments, a fourth tangent point is provided on the intermediate conveying roller 2, and the distance from the fourth tangent point to the axis of the intermediate conveying roller 2 is less than the distance from the second tangent point to the axis of the intermediate conveying roller 2.

[0073] In some embodiments of the present invention, referring to Figures 1 to 4 , the diameters of the front conveying roller 1 and the rear conveying roller 3 are different.

[0074] In some specific embodiments of the present invention, the diameter of the front conveying roller 1 is greater than the diameter of the rear conveying roller 3.

[0075] In some embodiments of the present invention, referring to Figures 1 to 4 , the front conveying roller 1, the intermediate conveying roller 2 and the rear conveying roller 3 are arranged in the same plane.

[0076] In some specific embodiments of the present invention, the front conveying roller 1, the intermediate conveying roller 2 and the rear conveying roller 3 are all horizontally arranged in the front-rear direction, and the axes of the front conveying roller 1, the intermediate conveying roller 2 and the rear conveying roller 3 are located in the same horizontal plane.

[0077] Figure 5 It is a partial structural schematic diagram of the substrate wet conveying device in the second embodiment of the present invention, Figure 6 It is a partial structural schematic diagram of the substrate wet conveying device in the third embodiment of the present invention.

[0078] In some embodiments of the present invention, referring to Figures 1 to 6 , the intermediate conveying roller 2 is provided with an arc surface section 201 and a flat surface section 202, and both the arc surface section 201 and the flat surface section 202 are used to support the substrate.

[0079] In some specific embodiments of the present invention, the surface of the intermediate conveying roller 2 is sequentially provided with an arc surface section 201, a flat surface section 202, an arc surface section 201 and a flat surface section 202.

[0080] In some embodiments of the present invention, referring to Figures 1 to 6 , the cross-section of the intermediate conveying roller 2 is in the shape of a waist-shaped hole or a circular cam.

[0081] In some specific embodiments of the present invention, the cross-section of the intermediate conveying roller 2 is in the shape of a waist-shaped hole, that is, the surface of the intermediate conveying roller 2 is sequentially provided with an arc surface section 201, a flat surface section 202, an arc surface section 201 and a flat surface section 202, and the two arc surface sections 201 are of equal size, and the planes where the two flat surface sections 202 are located are parallel.

[0082] In some embodiments, the cross-section of the intermediate conveying roller 2 is in the shape of a circular cam, that is, the surface of the intermediate conveying roller 2 is successively provided with an arc surface section 201, a flat surface section 202, an arc surface section 201 and a flat surface section 202, and the sizes of the two arc surface sections 201 are not equal, and the planes where the two flat surface sections 202 are located are not parallel.

[0083] In some embodiments, the distance between the front conveying roller 1 and the intermediate conveying roller 2 is less than the distance between the intermediate conveying roller 2 and the rear conveying roller 3.

[0084] In some embodiments, by setting the distances between the intermediate conveying roller 2 and the front conveying roller 1 and the rear conveying roller 3 to be different, when the substrate detaches from the front conveying roller 1, the sizes on the left and right sides of the substrate located on the intermediate conveying roller 2 are different, so that the substrate can change from the state of being lower on the left and higher on the right to the state of being higher on the left and lower on the right due to its own gravity, avoiding the phenomenon of the substrate slipping on the intermediate conveying roller 2.

[0085] In some embodiments, when the cross-section of the arc surface section 201 is circular arc-shaped, and the first tangent point is located on this arc surface section 201, or in other words, the distance from the first tangent point to the axis of the intermediate conveying roller 2 is equal to the distance from the tangent point on this arc surface section 201 to the axis of the intermediate conveying roller 2, any tangent point on this arc surface section 201 can be regarded as the first tangent point.

[0086] In some embodiments, there are two or more second tangent points.

[0087] Figure 7 It is a partial structural schematic diagram of the wet conveying device for substrates in the fourth embodiment of the present invention.

[0088] In some embodiments of the present invention, referring to Figures 1 to 7 , the intermediate conveying roller 2 is provided with at least two.

[0089] In some specific embodiments of the present invention, the intermediate conveying roller 2 is provided with two, and the two intermediate conveying rollers 2 are both horizontally arranged in the front-rear direction.

[0090] In some embodiments of the present invention, referring to Figures 1 to 7 , it further includes a fixing frame 6; the front conveying roller 1 and the rear conveying roller 3 are both fixedly arranged on the fixing frame 6, and the intermediate conveying roller 2 is movably arranged on the fixing frame 6.

[0091] In some specific embodiments of the present invention, the fixing frame 6 is provided with a waist hole extending in the left-right direction, and the intermediate conveying roller 2 is movably arranged at the waist hole, so that the position of the intermediate conveying roller 2 relative to the front conveying roller 1 can be adjusted.

[0092] In some embodiments, the waist holes fixing the intermediate conveying roller 2 are arranged vertically or obliquely.

[0093] In some embodiments, the intermediate conveying roller 2 is arranged on the fixing frame 6 through a bearing seat, and the bearing seat is movably and fixably arranged on the fixing frame 6.

[0094] Figure 8 It is a partial structural schematic diagram of the substrate wet conveying device in the fifth embodiment of the present invention. Figure 9 It is a partial structural schematic diagram of the substrate wet conveying device in the sixth embodiment of the present invention. Figure 10 is Figure 9 the partial enlarged structural schematic diagram at A in

[0095] In some embodiments of the present invention, referring to Figures 1 to 10 , it further includes an elastic member 7; the elastic member 7 is arranged between the intermediate conveying roller 2 and the fixing frame 6.

[0096] In some specific embodiments of the present invention, the elastic member 7 is a spring, one end of the elastic member 7 abuts against the side wall of the intermediate conveying roller 2, and the other end of the elastic member 7 is fixedly arranged in the waist hole of the fixing frame 6.

[0097] In some embodiments of the present invention, referring to Figures 1 to 10 , it further includes an inclined conveying roller 8; the inclined conveying roller 8 is arranged between the front conveying roller 1 and the rear conveying roller 3, the front conveying roller 1 is arranged horizontally, the inclined conveying roller 8 is arranged obliquely relative to the horizontal plane, the driving mechanism 4 is connected to the inclined conveying roller 8, and the driving mechanism 4 is used to drive the inclined conveying roller 8 to rotate.

[0098] In some specific embodiments of the present invention, the vertical plane where the axis of the inclined conveying roller 8 is located is arranged parallel to the vertical plane where the axis of the front conveying roller 1 is located.

[0099] In some embodiments, the inclined conveying roller 8 is arranged in the front-rear direction, and the position of the front end face of the inclined conveying roller 8 is higher than the position of the rear end face thereof.

[0100] In some embodiments, the driving mechanism 4 is connected to the inclined conveying roller 8 through a universal shaft to drive the inclined conveying roller 8 to rotate.

[0101] In some embodiments, the inclined conveying roller 8 is driven by a separate motor.

[0102] In some embodiments of the present invention, referring to Figures 1 to 10 , the inclined conveying roller 8 is arranged as at least two, and the inclination direction of at least one of the inclined conveying rollers 8 is opposite to the inclination direction of at least one of the other inclined conveying rollers 8.

[0103] In some specific embodiments of the present invention, two inclined conveying rollers 8 are provided. One of the inclined conveying rollers 8 is arranged with a lower front end and a higher rear end, and the other inclined conveying roller 8 is arranged with a higher front end and a lower rear end.

[0104] In some embodiments, a plurality of inclined conveying rollers 8 are provided, and the angles between each of the inclined conveying rollers 8 and the horizontal plane gradually increase and then gradually decrease in sequence.

[0105] Figure 11 It is a partial structural schematic diagram of the substrate wet conveying device in the seventh embodiment of the present invention.

[0106] In some embodiments of the present invention, referring to Figures 1 to 11 , a flexible layer 9 is provided on at least one of the front conveying roller 1, the intermediate conveying roller 2, and the rear conveying roller 3.

[0107] In some specific embodiments of the present invention, flexible layers 9 are provided on all of the front conveying roller 1, the intermediate conveying roller 2, and the rear conveying roller 3.

[0108] In some embodiments of the present invention, referring to Figures 1 to 11 , the spraying mechanism 5 includes a spray head 501 and a water source pumping mechanism 502; the spray head 501 is arranged corresponding to the substrate conveyed by the front conveying roller 1 or the intermediate conveying roller 2, the water source pumping mechanism 502 is communicated with the spray head 501, the water source pumping mechanism 502 is used to supply water to the spray head 501, and the spray head 501 is used to spray water on the substrate.

[0109] In some specific embodiments of the present invention, the spray head 501 is arranged above the front conveying roller 1.

[0110] In some embodiments, the water source pumping mechanism 502 includes a water pump and a pipeline. One end of the pipeline is communicated with a water source, the other end of the pipeline is communicated with the spray head 501, the water pump is arranged on the pipeline, and when the water pump is started, the water of the water source is transported through the pipeline to the spray head 501.

[0111] In some embodiments, the spray head 501 is arranged above the position between the front conveying roller 1 and the intermediate conveying roller 2.

[0112] In some embodiments of the present invention, referring to Figures 1 to 11 , a plurality of spray heads 501 are provided.

[0113] In some specific embodiments of the present invention, a plurality of spray heads 501 are provided, the plurality of spray heads 501 are uniformly arranged in the front-rear direction, and each of the spray heads 501 is communicated with the water source pumping mechanism 502.

[0114] In some embodiments of the present invention, referring toFigure 1 , the spraying mechanism 5 further includes a detector (not shown in the figure) and a controller (not shown in the figure); the detector is disposed at the front conveying roller 1, the detector is electrically connected to the controller, the detector is configured to detect the position of the substrate and generate a detection signal, and the detector transmits the detection signal to the controller; the controller is electrically connected to the water source pumping mechanism 502, and the controller is configured to control the opening and closing of the water source pumping mechanism 502 according to the detection signal.

[0115] In some specific embodiments of the present invention, the detector (not shown in the figure) is a sensor, the detector is fixedly disposed above or below the left side of the front conveying roller 1, and the detector is vertically disposed, and the detector emits detection light downward or upward. When the substrate blocks the detection light, the detector generates the detection signal, and the controller (not shown in the figure) controls the water source pumping mechanism 502 to open according to the detection signal. When the substrate does not block the detection light, the controller controls the water source pumping mechanism 502 to close. Although the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in various ways.

Claims

1. A wet substrate conveying device, characterized in that, It includes a front conveying roller, an intermediate conveying roller, a rear conveying roller and a driving mechanism; The intermediate conveying roller is arranged between the front conveying roller and the rear conveying roller. The driving mechanism is connected to the front conveying roller, the intermediate conveying roller and the rear conveying roller. The driving mechanism is used to drive the front conveying roller, the intermediate conveying roller and the rear conveying roller to rotate, and the driving mechanism is used to convey the substrate along the direction from the front conveying roller to the rear conveying roller; There are a first tangent point and a second tangent point on the cross-section of the intermediate conveying roller. The distance from the first tangent point to the axis of the intermediate conveying roller is less than or greater than the distance from the second tangent point to the axis of the intermediate conveying roller; It further includes a spraying mechanism. The spraying mechanism is arranged corresponding to the substrate conveyed by the front conveying roller or the intermediate conveying roller. The spraying mechanism is used to spray water on the substrate.

2. The device according to claim 1, characterized in that, The plane where the outer tangent lines of the front conveying roller and the rear conveying roller are located is the first plane. The distance from the first tangent point to the axis of the intermediate conveying roller is greater than the distance from the intermediate conveying roller to the first plane. The distance from the second tangent point to the axis of the intermediate conveying roller is less than or equal to the distance from the intermediate conveying roller to the first plane.

3. The device according to claim 1, characterized in that, The diameters of the front conveying roller and the rear conveying roller are different.

4. The device according to claim 1, characterized in that, The front conveying roller, the intermediate conveying roller and the rear conveying roller are arranged in the same plane.

5. The device according to claim 1, characterized in that, The intermediate conveying roller is provided with an arc-shaped surface section and a flat surface section. Both the arc-shaped surface section and the flat surface section are used to support the substrate.

6. The device according to claim 1, characterized in that, The cross-section of the intermediate conveying roller is in the shape of a kidney-shaped hole or a circular cam.

7. The device according to claim 1, characterized in that, The distance between the front conveying roller and the intermediate conveying roller is less than the distance between the intermediate conveying roller and the rear conveying roller.

8. The device according to claim 1, wherein The intermediate conveying roller is arranged as at least two.

9. The device according to claim 1, characterized in that, It further includes a fixing frame; Both the front conveying roller and the rear conveying roller are fixedly arranged on the fixing frame, and the intermediate conveying roller is movably arranged on the fixing frame.

10. The device according to claim 9, characterized in that, It further includes an elastic member; The elastic member is arranged between the intermediate conveying roller and the fixing frame.

11. The device according to claim 1, characterized in that It further includes an inclined conveying roller; The inclined conveying roller is arranged between the front conveying roller and the rear conveying roller. The front conveying roller is horizontally arranged, the inclined conveying roller is inclined relative to the horizontal plane, and the driving mechanism is connected to the inclined conveying roller. The driving mechanism is used to drive the inclined conveying roller to rotate.

12. The device according to claim 11, characterized in that, The inclined conveying roller is arranged as at least two, and the inclination direction of at least one of the inclined conveying rollers is opposite to the inclination direction of at least one of the other inclined conveying rollers.

13. The device according to claim 11, characterized in that, The inclined conveying roller is arranged as several. The angles between each inclined conveying roller and the horizontal plane gradually increase and then gradually decrease in sequence.

14. The device according to claim 1, characterized in that, At least one of the front conveying roller, the intermediate conveying roller and the rear conveying roller is provided with a flexible layer.

15. The device according to claim 1, characterized in that, The spraying mechanism includes a spray head and a water source pumping mechanism; The spray head is arranged corresponding to the substrate conveyed by the front conveying roller or the intermediate conveying roller. The water source pumping mechanism is communicated with the spray head. The water source pumping mechanism is used to supply water to the spray head, and the spray head is used to spray water on the substrate.

16. The device according to claim 15, characterized in that, The spray head is arranged as several.

17. The device according to claim 15, characterized in that, The spraying mechanism further includes a detector and a controller; The detector is disposed at the front conveying roller, the detector is electrically connected to the controller, the detector is used to detect the position of the substrate and generate a detection signal, and the detector transmits the detection signal to the controller; The controller is electrically connected to the water source pumping mechanism, and the controller is used to control the opening and closing of the water source pumping mechanism according to the detection signal.

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