An OLED Visualization Array Respiratory Sensor and Its Preparation Method

Abstract

The present invention relates to the technical field of organic light-emitting semiconductors, and provides an OLED visual array respiration sensor and a preparation method thereof. The OLED visual array respiration sensor of the present invention is characterized in that it includes a substrate, an anode layer, a humidity-sensitive material thin film layer, a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a cathode layer arranged in sequence; a plurality of vacancies arranged in an array are etched on the anode layer, and a humidity-sensitive material thin film layer is provided in each vacancy. Each of the humidity-sensitive material thin film layers has the same size as the corresponding vacancy and can completely cover the vacancy. Since human respiration will change the humidity of the surrounding environment, the OLED visual array respiration sensor of the present invention realizes the detection of humidity changes during respiration through the humidity-sensitive material thin film layer, and converts this change into an electrical signal, thereby controlling the light emission intensity of the OLED to realize the visualization of respiration, and making an OLED visual array respiration sensor.

Description

Technical Field

[0001] The present invention belongs to the technical field of organic light-emitting semiconductors, and particularly relates to an OLED visual array respiration sensor and a preparation method thereof. Background Art

[0002] Organic electroluminescence devices (Organic Electroluminescence Devices or Organic Light Emitting Diodes, hereinafter referred to as OLEDs) belong to a current-type organic light-emitting device, which has the characteristics of ultra-thin, light weight, wide viewing angle, self-luminescence, good temperature characteristics, and can achieve flexible display. In recent years, it has received a lot of attention and is applied in multiple fields. OLEDs are devices that emit light through the injection and recombination of carriers, and the luminous intensity is proportional to the injection current.

[0003] In the existing technologies for preparing sensors using OLED devices, the luminous intensity of OLEDs needs to be controlled by other factors such as pressure or temperature, but its accuracy and comfort are poor. Moreover, with the rampant spread of viruses and bacteria, the above-mentioned contact sensors have a certain degree of infectivity.

[0004] Chinese Patent Application CN108984015 discloses an OLED integrated touch sensor and an OLED display device including the OLED integrated touch sensor, which can receive signals through touch and drive the OLED device; although this method prepares a sensor by applying the characteristics of OLED devices, due to the need for human contact, this solution has a certain degree of infectivity.

[0005] Chinese Patent CN111458052 discloses a color-changing OLED temperature sensor component, and the luminous color of the device changes with the temperature, so as to determine the temperature of the detected object or the surrounding environment; although the change in the ambient temperature will cause the color of the device to change in this solution, during the use of the OLED device, the device itself will also generate heat, and the heat generated by the device will cause the change in the ambient temperature;

[0006] Therefore, how to prepare a more reliable visual sensor by using the self-luminescence characteristic of OLED devices under non-contact conditions has become a technical difficulty to be solved in this field. Summary of the Invention

[0007] In order to overcome the deficiencies of the prior art, the present invention provides an OLED visual array respiration sensor and a preparation method thereof.

[0008] The technical solution for the present invention to solve the technical problems is as follows:

[0009] In the first aspect of the present invention, an OLED visual array respiration sensor is provided.

[0010] The OLED visual array respiration sensor of the present invention includes a substrate, an anode layer, a humidity-sensitive material thin film layer, a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a cathode layer arranged in sequence;

[0011] A plurality of vacancies arranged in an array are etched on the anode layer, and a humidity-sensitive material thin film layer is provided in each vacancy. Each humidity-sensitive material thin film layer has the same size as the corresponding vacancy and can completely cover the vacancy; a corresponding hole injection layer, hole transport layer, organic light-emitting layer, electron transport layer, electron injection layer, and metal cathode layer are sequentially provided on each humidity-sensitive material thin film layer to form an array of devices. The array of devices shares the same substrate and anode layer;

[0012] The substrate is a glass substrate, and the anode layer is a transparent metal oxide ITO thin film with a thickness of 100 - 200 nm;

[0013] The material of the humidity-sensitive material thin film layer is a two-dimensional layered transition metal carbon / nitride family Mxene or a graphene two-dimensional material, with a thickness of 50 - 100 nm.

[0014] Further, the material of the hole injection layer is NPB or other arylamine materials, etc., and the thickness of the hole injection layer should be 30 - 300 nm.

[0015] Further, the material of the hole transport layer is TCTA or other arylamine materials, etc., and the thickness of the hole transport layer is 5 - 50 nm.

[0016] Further, the organic light-emitting layer is three layers of DPAVB layer and TCTA layer, TPBi layer, or π-conjugated system materials, etc., arranged at intervals between the DPAVB layers, and the thickness of the organic light-emitting layer is 5 - 50 nm.

[0017] Further, the material of the electron transport layer is TPBi or an aluminum complex, etc., and the thickness of the electron transport layer is 10 - 80 nm.

[0018] Further, the material of the electron injection layer is Liq or an alkali metal, etc., and the thickness of the electron injection layer is 1 - 10 nm.

[0019] Further, the material of the cathode layer is a metal aluminum or a magnesium-silver alloy with a low work function.

[0020] In the present invention, the materials used for the substrate, anode layer, humidity-sensitive material thin film layer, hole injection layer, hole transport layer, organic light-emitting layer, electron transport layer, electron injection layer, and metal cathode layer are all existing materials and can be directly purchased.

[0021] In the second aspect of the present invention, there is provided a method for preparing the OLED visual array respiration sensor as described in the first aspect.

[0022] The method for preparing the OLED visual array respiration sensor is to successively fabricate a humidity-sensitive thin film layer, a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a cathode on a glass substrate ITO, and connect the fabricated devices into an array, including the following steps:

[0023] 1) Pretreat the glass substrate ITO with acetone and isopropyl alcohol. Before use, clean the substrate with a liquid detergent, and after washing, put the wafer into deionized water, acetone, and isopropanol successively and ultrasonically clean them with an ultrasonic cleaner for 60 min each; meanwhile, wipe the culture dish with an alcohol swab, clean the culture dish, and dry it at a high temperature; place the ultrasonically cleaned ITO substrate face up in the culture dish, and dry it with a high-temperature baking lamp for about 5 min and irradiate it with ultraviolet light for about 10 min;

[0024] 2) Wrap the pretreated glass substrate with tape and leave an etching vacancy, then put it into aqua regia for etching, and the etching time is about 5 min; after etching, put it into a NaOH solution and deionized water successively for simple rinsing; remove the tape and repeat the cleaning process in step 1);

[0025] 3) Drop the humidity-sensitive material into the vacancy of the treated glass substrate and ensure that the vacancy is completely covered; then put the glass substrate into an oven and dry it for about 30 min;

[0026] 4) Under vacuum conditions, successively deposit a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a cathode on the ITO glass substrate to obtain a visual respiration sensor;

[0027] 5) Connect the above devices into an array to fabricate a visual respiration array sensor.

[0028] The working principle and technical effects of the present invention are as follows:

[0029] 1) Since human respiration will change the humidity of the surrounding environment, the OLED visual array respiration sensor of the present invention realizes the detection of humidity changes during respiration through the humidity-sensitive material thin film layer, and converts this change into an electrical signal, thereby controlling the light emission intensity of the OLED to realize the visualization of respiration and fabricating an OLED visual array respiration sensor.

[0030] 2) In the present invention, the humidity-sensitive material thin film is prepared on the anode layer and connects the anode layer and the organic light-emitting layer. When the device detects an increase in local humidity, its resistance increases / decreases accordingly, thereby affecting the local display brightness of the device.

[0031] 3) In the present invention, through the provision of the humidity-sensitive material thin film layer, the contact between the organic light-emitting layer and the anode layer is buffered, reducing the risk that the spikes of the anode layer directly pierce the organic layer, thereby causing device short circuit. Description of the Drawings

[0032] Figure 1 It is a schematic structural diagram of the OLED visual array respiration sensor of the present invention, where region 1 is a resistor block, region 2 is a humidity-sensitive material, and region 3 is an OLED device.

[0033] Figure 2 It is a schematic diagram of the light emission of the OLED visual array respiration sensor of the present invention, where region 4 is an object with humidity.

[0034] Figure 3 It is a schematic structural diagram of Example 1.

[0035] Figure 4 It is an array layout diagram of Example 1.

[0036] Figure 3-4 Among them: 10 is a substrate, 20 is an anode layer, 30 is a humidity-sensitive material thin film layer, 41 is a hole injection layer, 42 is a hole transport layer, 43 is an organic light-emitting layer, 44 is an electron transport layer, 45 is an electron injection layer, and 50 is a cathode layer. Detailed Embodiments

[0037] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the drawings and embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments.

[0038] The present invention provides an OLED visual array respiration sensor, including a substrate, an anode layer, a humidity-sensitive material thin film layer, a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a cathode layer arranged in sequence.

[0039] In the present invention, the ITO is Indium tin oxide, a metal oxide indium tin oxide, used as a transparent anode; the thickness is preferably 150 nm;

[0040] In the present invention, the Mxene is a two-dimensional layered transition metal carbon / nitride family, used as a humidity-sensitive material thin film layer; the thickness is preferably 100 nm;

[0041] In the present invention, the NPB is N,N'-diphenyl-N,N'-(1-naphthyl)-1,1'-biphenyl-4,4'-diamine. In the present invention, the thickness of the NPB is limited to 40 nm for the hole injection layer, increasing the conductivity of the hole injection layer, reducing the hole injection barrier, and thus improving the electronic performance of the device;

[0042] In the present invention, the TCTA is 4,4',4”-tris(carbazol-9-yl)triphenylamine, which is used as a hole transport layer with a thickness preferably of 10 nm. When used in combination with the NPB as a hole injection layer, it can enhance hole injection, thereby improving the electronic performance of the device;

[0043] In the present invention, the DPAVB is 4-(Di-p-tolylamino)-4'-[(di-p-tolylamino)styryl]stilbene, which is the blue light host material of the device;

[0044] In the present invention, a TCTA layer is provided as an isolation layer for the DPAVB layer in the light-emitting layer. The isolation layer can provide a good electron transport channel, balance the carrier flow in the emission layer, thereby achieving the maximum current efficiency, maximum power efficiency, and maximum external quantum efficiency. In the present invention, the thickness of the light-emitting layer is preferably 10.6 nm.

[0045] In the present invention, the material of the electron transport layer is preferably TPBi which is 1,3,5-tris(1-phenyl-1H-benzo[d]imidazol-2-yl)phenyl, and the thickness of the electron transport layer is preferably 40 nm.

[0046] In the present invention, the material of the electron injection layer is preferably Liq, which is lithium 8-hydroxyquinoline. In the present invention, the thickness of the electron injection layer is preferably 1 nm.

[0047] In the present invention, the cathode is preferably aluminum. In the present invention, the thickness of the cathode is preferably 120 nm.

[0048] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following will further describe in detail the embodiments of the present invention with reference to the accompanying drawings.

[0049] The present invention can be implemented in many different forms and should not be construed as limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the present invention to those skilled in the art. The present invention will only be defined by the claims. In the drawings, for clarity, the dimensions and relative dimensions of layers and regions are exaggerated. It should be understood that when an element such as a layer, region, or substrate is referred to as being "formed on" or "disposed on" another element, the element can be directly disposed on the other element, or there can also be an intermediate element. On the contrary, when an element is referred to as being "directly formed on" or "directly disposed on" another element, there is no intermediate element.

[0050] Example 1

[0051] AsFigure 3 As shown, the specific structure of the OLED visualized array respiratory sensor includes a substrate 10, an anode layer 20, a moisture-sensitive material film layer 30, a hole injection layer 41, a hole transport layer 42, an organic light-emitting layer 43, an electron transport layer 44, an electron injection layer 45 and a cathode layer 50 arranged in sequence.

[0052] like Figure 1 As shown, 9 vacancies arranged in a 3X3 array are etched on the anode layer, and a moisture-sensitive material film layer is provided in each vacancy. Each moisture-sensitive material film layer is the same size as the corresponding vacancy and can completely cover the vacancy; each moisture-sensitive material film layer is sequentially provided with a corresponding hole injection layer, hole transport layer, organic light-emitting layer, electron transport layer, electron injection layer and metal cathode layer to form an array-arranged device, and the array device shares the same substrate and anode layer. In this embodiment, 9 vacancies arranged in a 3X3 array are etched on the anode layer 20, so as to obtain a visualized breathing array sensor with a 3X3 array arrangement. The 3X3 array arrangement diagram is shown in FIG. Figure 4 shown.

[0053] in,

[0054] The substrate 10 is a glass substrate.

[0055] The anode layer 20 is made of ITO with a thickness of 150 nm and is used as a transparent anode.

[0056] The moisture sensitive material thin film layer 30 is selected from Mxene (purchased from Zhongke Leiming Technology Co., Ltd.), which is a two-dimensional layered transition metal carbon / nitride family with a thickness of 100 nm;

[0057] The hole injection layer 41 is made of NPB, and the thickness of NPB is 40 nm.

[0058] The hole transport layer 42 is made of TCTA (purchased from Aladdin Holdings Group) with a thickness of 10 nm;

[0059] The light-emitting layer 43 is a DPAVB layer (purchased from Xi'an Qiyue Biotechnology Co., Ltd.) and a TCTA (purchased from Aladdin Holding Group) spaced between the DPAVB layers. The thickness of the light-emitting layer is 10.6 nm.

[0060] The material of the electron transport layer 44 is TPBi (purchased from Hubei Hengjingrui Chemical Co., Ltd.) with a thickness of 40 nm;

[0061] The material of the electron injection layer 45 is Liq (purchased from Hubei Fangde New Materials Co., Ltd.) with a thickness of 1 nm;

[0062] The material of the cathode layer 50 is aluminum, and the thickness is 120 nm.

[0063] The preparation method of this embodiment is as follows:

[0064] On the ITO glass substrate, a humidity-sensitive material thin film layer, a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a cathode layer are sequentially fabricated. The specific steps are as follows:

[0065] 1. Pre-treat the ITO glass substrate with acetone and isopropyl alcohol. Before use, clean the substrate with a liquid detergent, and then put the wafer into deionized water, acetone, and isopropanol successively and perform ultrasonic cleaning for 60 minutes each with an ultrasonic instrument. Meanwhile, wipe the petri dish with an alcohol swab to clean it, and then dry it at a high temperature; place the ultrasonic-cleaned ITO substrate face up in the petri dish, and dry it with a high-temperature baking lamp for about 5 minutes and irradiate it with ultraviolet light for about 10 minutes.

[0066] 2. After winding the pre-treated glass substrate with tape and leaving an etching vacancy, put it into aqua regia for etching, and the etching time is about 5 minutes. After etching, rinse it briefly with NaOH solution and deionized water successively. Remove the tape and repeat the cleaning process in step 1.

[0067] 3. Drop the humidity-sensitive material into the vacancy of the treated glass substrate and ensure complete coverage of the vacancy. Then put the glass substrate into an oven and dry it for about 30 minutes.

[0068] 4. Under vacuum conditions, deposit NPB, TCTA, DPAVB, TCTA, DPAVB, TCTA, DPAVB, TPBi, Liq, and Al successively on the ITO glass substrate to obtain a visual respiratory sensor. Among them, control the thickness of the NPB deposition layer to be 40 nm; the thickness of the NPB deposition layer is 10 nm; the thickness of the TCTA deposition layer is 10 nm; the thickness of the DPAVB deposition layer is 0.2 nm; the thickness of the TCTA deposition layer is 5 nm; the thickness of the TPBi deposition layer is 40 nm; the thickness of the Liq deposition layer is 1 nm; the thickness of the Al deposition layer is 120 nm.

[0069] 5. Connect the above devices in a 3×3 arrangement to form an array to make a visual respiratory array sensor.

[0070] When the device works, an external power supply is connected to the position of resistor 1, and the current flows into the device from the position of resistor 1. By measuring its brightness, the change in environmental humidity is fed back.

[0071] As Figure 1-2 shown, for the visual respiratory array sensor prepared by the above preparation method, when there is a humid object in some array areas, the brightness of the corresponding array area decreases, and the decreasing ratio changes with the change of the approaching distance, as shown in the following table:

[0072] Array area Proximity distance of the humidity object Brightness of the corresponding array area Proximity distance of the humidity object Brightness of the corresponding array area Area A / <![CDATA[2869cd / m 2 > / <![CDATA[2869cd / m 2 > Area B / <![CDATA[2912cd / m 2 > / <![CDATA[2912cd / m 2 > Area C 10 cm <![CDATA[2314cd / m 2 > 5 cm <![CDATA[1878cd / m 2 > Area D / <![CDATA[2903cd / m 2 > / <![CDATA[2903cd / m 2 > Area E / <![CDATA[2885cd / m 2 > / <![CDATA[2885cd / m 2 > Area F / <![CDATA[2883cd / m 2 > / <![CDATA[2883cd / m 2 > Area G / <![CDATA[2845cd / m 2 > / <![CDATA[2845cd / m 2 > Area H 10 cm <![CDATA[2208cd / m 2 > 5 cm <![CDATA[1776cd / m 2 > Area I / <![CDATA[2830cd / m 2 > / <![CDATA[2830cd / m 2 >

[0073] From the above test results, it can be obtained that when there is a humidity problem near the visual breathing array sensor, the brightness of the corresponding area decreases significantly, and increases as the distance between the humidity object and the visual breathing array sensor decreases.

[0074] The above content is a further detailed description of the present invention in combination with specific / preferred embodiments, and it cannot be determined that the specific implementation of the present invention is only limited to these descriptions. For those of ordinary skill in the technical field to which the present invention pertains, without departing from the concept of the present invention, several alternatives or modifications can be made to these described embodiments, and these alternative or modified forms should all be regarded as falling within the protection scope of the present invention.

Claims

1. An OLED visual array respiration sensor, characterized in that, It includes a substrate, an anode layer, a humidity-sensitive material thin film layer, a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a cathode layer arranged in sequence; Multiple vacancies arranged in an array are etched on the anode layer. A humidity-sensitive material thin film layer is provided in each vacancy. Each humidity-sensitive material thin film layer has the same size as the corresponding vacancy and can completely cover the vacancy. A corresponding hole injection layer, hole transport layer, organic light-emitting layer, electron transport layer, electron injection layer, and metal cathode layer are sequentially provided on each humidity-sensitive material thin film layer to form a device arranged in an array. The devices arranged in an array share the same substrate and anode layer; The substrate is a glass substrate, and the anode layer is a transparent metal oxide ITO thin film with a thickness of 100 - 200 nm; The material of the humidity-sensitive material thin film layer is a two-dimensional layered transition metal carbon / nitride family Mxene or graphene two-dimensional material with a thickness of 50 - 100 nm; The material of the hole injection layer is NPB, and the thickness of the hole injection layer is 30 - 300 nm; The material of the hole transport layer is TCTA, and the thickness of the hole transport layer is 5 - 50 nm; The organic light-emitting layer is composed of three layers of DPAVB layers and TCTA layers, TPBi layers, or π-conjugated system materials arranged at intervals between the DPAVB layers. The thickness of the organic light-emitting layer is 5 - 50 nm.

2. The OLED visual array respiration sensor according to claim 1, characterized in that, The electron transport layer material is TPBi or an aluminum complex, and the thickness of the electron transport layer is 10 - 80 nm; 3. The OLED visual array respiration sensor according to claim 1, characterized in that, The electron injection layer material is Liq or an alkali metal, and the thickness of the electron injection layer is 1 - 10 nm; 4. The OLED visual array respiration sensor according to claim 1, characterized in that, The cathode layer material is a metal aluminum or magnesium-silver alloy with a low work function.

5. A preparation method of the OLED visual array respiration sensor according to any one of claims 1-4, characterized in that: On the ITO of the glass substrate, a humidity-sensitive thin film layer, a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a cathode are sequentially fabricated, and the prepared devices are connected into an array. The specific steps are as follows: 1) Pretreat the ITO of the glass substrate with acetone and isopropyl alcohol. Before use, clean the substrate with a liquid detergent. After cleaning, put the wafer into deionized water, acetone, and isopropanol successively and perform ultrasonic cleaning with an ultrasonic instrument for 60 min each; meanwhile, wipe the culture dish with an alcohol cotton ball to clean the culture dish, and dry it at a high temperature; place the ultrasonic-completed ITO substrate face up in the culture dish, dry it with a high-temperature baking lamp for 5 min, and irradiate it with ultraviolet light for 10 min; 2) Wind the pretreated glass substrate with tape and leave the etching vacancies, then put it into aqua regia for etching for 5 min; after etching, put it into a NaOH solution and deionized water for simple rinsing; remove the tape and repeat the cleaning process in step 1); 3) Drop the humidity-sensitive material into the vacancies of the processed glass substrate and ensure complete coverage of the vacancies; then put the glass substrate into an oven and dry it for 30 min; 4) Under vacuum conditions, sequentially evaporate the hole injection layer, hole transport layer, organic light-emitting layer, electron transport layer, electron injection layer, and cathode on the ITO glass substrate to obtain a visual breath sensor; 5) Connect the above-mentioned devices into an array to fabricate a visual respiration array sensor.

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