Ultrasonic scanning platform and method for quickly determining focal length

Abstract

The present invention proposes an ultrasonic scanning carrier and a method for quickly determining the focal length, which solves the problems of being unable to synchronously zoom during conventional probe detection, limited photographing clarity, inability to re-inspect products, and low accuracy. The main technical scheme is as follows: the carrier includes a positioning mechanism for determining the focal length, a discharging mechanism, and a re-inspection mechanism for product reflow re-inspection in sequence along the horizontal direction. The positioning mechanism includes a SAT probe and an inclined plane for determining its focal length. The SAT probe is horizontally located at the top of the inclined plane and is driven by a screw. The inclined plane is inclined corresponding to the SAT probe, its bottom is driven by a screw, and a bracket for placing products is provided on its top. The movement process of the inclined plane includes multiple fixed-point slope positions. The SAT probe can inductively correspond to each slope position and take photos to fix the focus. The discharging mechanism and the re-inspection mechanism can reflow the products that are initially determined to be intact to the inclined plane for secondary re-inspection and classify the products and send them to the external transportation line.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor packaging technology, and in particular to an ultrasonic scanning carrier stage and a method for quickly determining focal length. Background Art

[0002] CSAM ultrasonic testing is a non-destructive testing method that uses the difference in acoustic properties of materials and their defects to detect the energy changes of ultrasonic propagation waveform reflection and penetration time to inspect internal defects of materials. In semiconductor packaging, it is mainly used for non-destructive flaw detection of LGA / BGA products.

[0003] At present, there are the following problems in non-destructive testing of semiconductor products:

[0004] 1. The position of the product inspection probe is fixed. When facing the entire product line, different products have different probe focal lengths, and the probe focal length cannot be determined synchronously, so it is easy to have local image clarity, affecting the overall product inspection efficiency;

[0005] 2. After the first non-destructive testing of the product, the product cannot be reflowed for re-inspection, and the detection accuracy is low. Summary of the invention

[0006] The technical problem to be solved by the present invention is to overcome the defects of the prior art. The present invention proposes an ultrasonic scanning carrier and a method for quickly determining the focal length, which can improve the accuracy of non-destructive testing of products.

[0007] In order to solve the above technical problems, the technical solution adopted by the present invention is: an ultrasonic scanning carrier, the carrier includes a positioning mechanism for determining the focal length, a discharging mechanism and a re-inspection mechanism for product reflow re-inspection in sequence along the horizontal direction,

[0008] The positioning mechanism includes a SAT probe and an inclined plane for determining its focal length. The SAT probe is horizontally located at the top of the inclined plane and is driven by a screw. The inclined plane is inclined corresponding to the SAT probe, and its bottom is driven by a screw. A bracket for placing products is provided on its top. The movement process of the inclined plane includes a plurality of fixed-point slope positions. The SAT probe can correspond to each slope position by induction and take photos to fix the focus.

[0009] The re-inspection mechanism includes a push plate and a top block corresponding to the two ends of the bracket respectively. The push plate can move linearly along the horizontal direction of the carrier platform, and the bottom of the top block can be pneumatically lifted and lowered.

[0010] The discharging mechanism includes a partition plate, a connecting plate, a clamping cylinder and a sorting cylinder. The connecting plate is fixedly connected to the carrier platform and is parallel to the inclined surface. The bottom of the sorting cylinder is hinged to the carrier platform, and the top is fixedly connected to the partition plate. One end of the partition plate is movably engaged with the connecting plate, and the other end is rotatably connected to the carrier platform. The clamping cylinder is used to drive the bracket to be transported on the inclined surface, the connecting plate and the partition plate in sequence.

[0011] The horizontal heights of the carrier platform are, from high to low, the lowest point of the lifting range of the top block, the highest point of the top surface of the partition plate, the highest point of the top surface of the connecting plate, and the vertex of the highest point of the inclined surface movement range.

[0012] Furthermore, the SAT probe is driven by a first screw assembly, which includes a first motor, a first screw, a limit rod, a nut seat and a connecting block. Both ends of the first screw are rotatably connected to the carrier platform, the first motor is fixedly connected to the carrier platform, and its output end is coaxially fixed to the first screw. Both ends of the limit rod are fixedly connected to the carrier platform, the nut seat is threadedly matched with the first screw, and the connecting block is fixedly connected to the nut seat, which is slidably connected to the first screw and the limit rod respectively, and the SAT probe is fixed to the bottom screw of the connecting block.

[0013] Furthermore, a lifting cylinder is fixed on the top of the clamping cylinder, the first screw rod includes a threaded section and a shaft section, the threaded end is threadedly matched with the nut seat, the length of the shaft section corresponds to the horizontal length of the connecting plate, the top of the lifting cylinder is slidably connected to the shaft section through a slider, and a pushing cylinder corresponding to the slider is also fixed on the top of the carrier platform.

[0014] Furthermore, the bottom of the inclined surface is driven by a second screw assembly, which includes a second motor, a second screw and a slide rail. The second motor is fixed to the carrier platform, and its output end is coaxially fixed to the second screw. The two ends of the inclined surface are slidably connected to the slide rail, and its center is threaded with the second screw.

[0015] Furthermore, a support platform is protruded from one end of the top surface of the inclined surface close to the second motor, the bracket is in compression contact with the support platform, and the inclined surface is inclined at an angle of 15° to 45° to the ground.

[0016] Furthermore, a push-back cylinder is fixed at the bottom of the carrier platform corresponding to the push plate, and the push-back cylinder is connected and fixed to the push plate through a connecting rod. A push groove corresponding to the connecting rod is also provided on the carrier platform. Both ends of the push plate are slidably connected to the carrier platform, and the center thereof is in reciprocating extrusion contact with the end of the bracket.

[0017] Furthermore, the top surface of the connecting plate is a smooth plane, and one end close to the inclined plane is protruded with an anti-slip block which is lower than the top point of the highest point of the inclined plane movement amplitude. The partition plate is composed of three sliding rods, and the top surface of the sliding rod is a smooth plane and corresponds to the bottom of the bracket.

[0018] A method for quickly determining focal length according to the above-mentioned method comprises the following steps:

[0019] S1. Place the product to be inspected on an inclined plane. The unidirectional servo motion process on the inclined plane includes at least three points. When located at each point, the SAT probe moves linearly to the corresponding point and takes pictures in sequence.

[0020] S2, upload all photos and the servo position corresponding to each photo to the background image processing module, the image processing module then compares and selects the picture with the highest image clarity, and feeds back the servo position corresponding to the picture with the highest clarity to the servo system in the form of an electrical signal,

[0021] S3. The servo system determines this position as the detection focal length of the current product, and uses this focal length to detect subsequent products of the same batch. When the product is replaced, repeat steps 1 and 2 to refocus.

[0022] Furthermore, the image processing module is a combination of a TMS320F28335 chip and a TVP5150 chip.

[0023] Compared with the prior art, the beneficial effects of the present invention include: by taking photos and focusing at different slope positions on the slope for multiple times, the focal length required for radar detection is determined to ensure the improvement of damage detection accuracy, and the products that are initially judged to be damageless can be returned to the slope for a second time, re-focused and inspected, and confirmed to be damageless for a second time, thereby improving the overall accuracy of the finished products in LGA. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The disclosure of the present invention is described with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of the present invention. In the accompanying drawings, the same reference numerals are used to refer to the same components. Among them:

[0025] Figure 1 Schematically shows a front view according to an embodiment of the present invention;

[0026] Figure 2 A schematic diagram shows a top view according to an embodiment of the present invention;

[0027] Figure 3 A right side view according to an embodiment of the present invention is schematically shown.

[0028] Numbers in the figure: 1. carrier platform; 2. positioning mechanism; 21. SAT probe; 22. inclined plane; 23. bracket; 24. first screw rod assembly; 241. first motor; 242. first screw rod; 243. limit rod; 244. nut seat; 245. connecting block; 246. threaded section; 247. shaft section; 25. second screw rod assembly; 251. second motor; 252. second screw rod; 253. slide rail; 26. platform; 3. discharging mechanism; 31. partition plate; 32. connecting plate; 33. clamping cylinder; 34. sorting cylinder; 35. lifting cylinder; 36. slider; 37. pushing cylinder; 38. anti-slip block; 39. slide rod; 4. re-inspection mechanism; 41. push plate; 42. top block; 43. push back cylinder; 44. connecting rod; 45. push groove. DETAILED DESCRIPTION

[0029] It is easy to understand that according to the technical solution of the present invention, without changing the essential spirit of the present invention, a person skilled in the art can propose a variety of interchangeable structural modes and implementation modes. Therefore, the following specific implementation modes and drawings are only exemplary descriptions of the technical solution of the present invention, and should not be regarded as the whole of the present invention or as a limitation or restriction to the technical solution of the present invention.

[0030] According to one embodiment of the present invention, Figure 1-Figure 3 Shown.

[0031] like Figure 1 As shown, an ultrasonic scanning carrier 1 includes a positioning mechanism for determining the focal length, a discharging mechanism 3 and a re-inspection mechanism 4 for reflow re-inspection of products in the horizontal direction. The specific structure is as follows:

[0032] The positioning mechanism 2 includes a SAT probe 21 and an inclined plane 22 for determining its focal length. The SAT probe 21 is horizontally located at the top of the inclined plane 22 and is a screw rod.

[0033] Drive, the inclined plane 22 is inclined corresponding to the SAT probe 21, the bottom of which is driven by a screw, and the top is provided with a bracket 23 for placing the product. The movement process of the inclined plane 22 includes multiple fixed slope positions, and the SAT probe 21 can sense and correspond to each slope position and take pictures with a fixed focus. The driving of the SAT probe 21 and the inclined plane 22 can finally be realized by PLC overall programming control. The motion driving structures of the two can include multiple ones, not limited to the screw drive. In this embodiment, the screw structure is further introduced.

[0034] The SAT probe 21 is driven by a first screw assembly 24, which includes a first motor 241, a first screw 242, a limit rod 243, a nut seat 244 and a connecting block 245. Both ends of the first screw 242 are rotatably connected to the carrier platform 1, the first motor 241 is fixedly connected to the carrier platform 1, and its output end is coaxially fixed to the first screw 242, both ends of the limit rod 243 are fixedly connected to the carrier platform 1, the nut seat 244 is threadedly matched with the first screw 242, and the connecting block 245 is connected and fixed to the nut seat 244, which is respectively slidably connected to the first screw 242 and the limit rod 243, and the SAT probe 21 is fixed to the bottom screw of the connecting block 245.

[0035] After the external servo system is electrically controlled, the first motor 241 is turned on, and the first screw rod 242 is positioned and rotated. The nut seat 244 that cooperates with its thread can move linearly back and forth on the first screw rod 242, and then drives the connecting block 245 that is slidingly connected to the limit rod 243 to move synchronously. The movement process drives the bottom SAT probe 21 to move to the corresponding inclined surface 22 for taking pictures.

[0036] The bottom of the inclined surface 22 is driven by a second screw assembly 25, which includes a second motor 251, a second screw 252 and a slide rail 253. The second motor 251 is fixed to the carrier platform 1, and its output end is coaxially fixed to the second screw 252. The two ends of the inclined surface 22 are slidably connected to the slide rail 253, and its center is threadedly matched with the second screw 252.

[0037] The second motor 251 servo drives the second screw rod 252 to rotate, and the inclined plane 22 can move linearly along the axis of the second screw rod 252 under the limit of the slide rail 253. Since the overall inclined plane 22 and the second screw rod assembly 25 are inclined to the ground, the movement process of the inclined plane 22 can be set to multiple fixed-point stops after PLC programming, that is, multiple slope positions with different slopes. The specific number can be set by the later external human-computer interaction programming equipment. This is beneficial to the detection needs of different products to be tested. Due to different product sizes, more slope positions should be set for larger size specifications to locate and take pictures.

[0038] like Figure 2 and Figure 3 As shown, similarly, in order to ensure more accurate damage detection of different products, the present application is also provided with a re-inspection mechanism 4 and a discharging mechanism 3 for product reflow re-inspection. The re-inspection mechanism 4 includes a push plate 41 and a top block 42 corresponding to the two ends of the bracket 23 respectively. The push plate 41 can move linearly horizontally along the carrier platform 1, and the bottom of the top block 42 is pneumatically raised and lowered.

[0039] The discharging mechanism 3 includes a partition plate 31, a connecting plate 32, a clamping cylinder 33 and a sorting cylinder 34. The connecting plate 32 is fixedly connected to the carrier platform 1 and is parallel to the inclined surface 22. The bottom of the sorting cylinder 34 is hinged to the carrier platform 1, and the top is fixedly connected to the partition plate 31. One end of the partition plate 31 is movably engaged with the connecting plate 32, and the other end is rotatably connected to the carrier platform 1. The clamping cylinder 33 is used to drive the bracket 23 to be transported on the inclined surface 22, the connecting plate 32 and the partition plate 31 in sequence.

[0040] Similarly, in order to ensure the stability of the overall product discharge and reflux processes, the horizontal heights of the carrier platform 1 are, from high to low, the lowest point of the lifting range of the top block 42, the highest point of the top surface of the partition plate 31, the highest point of the top surface of the connecting plate 32, and the vertex of the highest point of the movement range of the inclined surface 22.

[0041] A lifting cylinder 35 is also fixed on the top of the clamping cylinder 33. The first screw rod 242 includes a threaded section 246 and a shaft section 247. The threaded end is threadedly matched with the nut seat 244. The length of the shaft section 247 corresponds to the horizontal length of the connecting plate 32. The top of the lifting cylinder 35 is slidably connected to the shaft section 247 through a slider 36. A pushing cylinder 37 corresponding to the slider 36 is also fixed on the top of the carrier platform 1.

[0042] A support platform 26 is protruded from one end of the top surface of the inclined surface 22 close to the second motor 251 , and the bracket 23 is in compression contact with the support platform 26 . The inclined surface 22 is inclined at an angle of 15° to 45° to the ground.

[0043] A push-back cylinder 43 is fixed at the bottom of the carrier platform 1 corresponding to the push plate 41. The push-back cylinder 43 is connected and fixed to the push plate 41 through a connecting rod 44. A push groove 45 corresponding to the connecting rod 44 is also provided on the carrier platform 1. Both ends of the push plate 41 are slidably connected to the carrier platform 1, and its center is in reciprocating extrusion contact with the end of the bracket 23.

[0044] The top surface of the connecting plate 32 is a smooth plane, and one end thereof close to the inclined plane 22 is protruded with an anti-slip block 38 which is lower than the top point of the highest movement amplitude of the inclined plane 22. The partition plate 31 is composed of three sliding rods 39, and the top surface of the sliding rods 39 is a smooth plane and corresponds to the bottom of the bracket 23.

[0045] In combination with the above specific structure, the steps and methods for testing the product are described in detail as follows:

[0046] S1. Place the product to be inspected on the inclined plane 22. The unidirectional servo motion process of the inclined plane 22 includes at least three points. When located at each point, the SAT probe 21 moves linearly to the corresponding point and takes pictures in sequence, that is, the second screw assembly 25 drives the inclined plane 22 to move upward at an angle of 15° to 45°. The motion process is variably set with more than three continuous fixed-point slope positions by PLC programming. When moving to each slope position, the first screw assembly 24 drives the SAT probe 21 to move to the top of the corresponding slope position and take pictures.

[0047] S2, upload all photos and the servo position corresponding to each photo to the background image processing module, and the image processing module

[0048] The image with the highest image clarity is selected through comparison, and the servo position corresponding to the image with the highest image clarity is fed back to the servo system in the form of an electrical signal.

[0049] After all the photos of the slope are taken, the SAT probe 21 transmits the pictures to the background image processing module. The image processing module is a combination of the existing TMS320F28335 chip and the TVP5150 chip, which will not be described in detail here. The purpose is to select the highest-definition picture from multiple pictures, and determine the current product radar detection position with the servo position corresponding to the highest-definition picture, and re-position the first product for detection.

[0050] Subsequent products of the same batch are inspected for damage according to this inspection position to ensure the improvement of inspection accuracy. Subsequent processing of product inspection is driven by the clamping cylinder 33, the pushing cylinder 37 and the lifting cylinder 35 servo. The clamping cylinder 33 now clamps the bracket 23 and the product on the bracket 23 and sends them to the connecting plate. The anti-falling block 38 at the end of the connecting plate 32 can prevent the bracket 23 from falling off. The background image processing module synchronously determines whether the current product is damaged. If it is determined that there is damage, the clamping cylinder 33 clamps the bracket again. When the partition plate 31 is reached, the partition plate 31 formed by smooth sliding rods 39 can be in smooth contact with the bracket 23, and then the bottom selection cylinder 34 drives the partition plate 31 to rotate downward, and the bracket 23 carries the product to the external transportation line (not shown in the figure) for unified recycling. If the product is determined to be intact, the clamping cylinder 33 also clamps the bracket to the partition plate 31, and the bottom selection cylinder 34 drives the partition plate 31 to rotate upward to a certain angle, and the bracket 23 slides to the top block 42 for temporary storage.

[0051] After the inspection of the same batch of products is completed, the top block 42 is stacked with products that are determined to be non-destructive. In order to ensure the accuracy of non-destructive testing, the bottom of the top block 42 is raised and lowered by a pneumatic servo. Every time it descends a gear, the push-back cylinder 43 drives the push plate 41 to move toward the inclined surface 22, that is, each bracket 23 is pushed to slide back onto the partition plate 31. The partition plate 31 is now back in place, that is, parallel to the connecting plate 32 and the inclined surface 22. Then the clamping cylinder 33 clamps the bracket 23 and sends it back to the inclined surface 22. The inclined surface 22 now drives the first non-destructive product to refocus from top to bottom, and the background adds a photo slope position to re-determine the radar detection position. After determination, the subsequent non-destructive products are processed synchronously. After being judged to be non-destructive again, they are sent out from the external transportation line at the bottom of the inclined surface 22 to determine the finished product. If a damage judgment is made, it is sent back to the partition plate 31 and to the external damage transportation line.

[0052] S3. The servo system determines this position as the detection focal length of the current product, and uses this focal length to detect subsequent products of the same batch. When the product is replaced, repeat steps 1 and 2 to refocus.

[0053] The technical scope of the present invention is not limited to the contents in the above description. Those skilled in the art can make various deformations and modifications to the above embodiments without departing from the technical idea of ​​the present invention, and these deformations and modifications should all fall within the protection scope of the present invention.

Claims

1. An ultrasonic scanning carrier, characterized in that: The carrier platform includes a positioning mechanism for determining the focal length, a discharging mechanism and a re-inspection mechanism for reflow re-inspection of the product in sequence along the horizontal direction. The positioning mechanism includes a SAT probe and an inclined plane for determining its focal length. The SAT probe is horizontally located at the top of the inclined plane and is driven by a screw. The inclined plane is inclined corresponding to the SAT probe, and its bottom is driven by a screw. A bracket for placing products is provided on its top. The movement process of the inclined plane includes a plurality of fixed-point slope positions. The SAT probe can correspond to each slope position by induction and take photos to fix the focus. The re-inspection mechanism includes a push plate and a top block corresponding to the two ends of the bracket respectively. The push plate can move linearly along the horizontal direction of the carrier platform, and the bottom of the top block can be pneumatically lifted and lowered. The discharging mechanism includes a partition plate, a connecting plate, a clamping cylinder and a sorting cylinder. The connecting plate is fixedly connected to the carrier platform and is parallel to the inclined surface. The bottom of the sorting cylinder is hinged to the carrier platform, and the top is fixedly connected to the partition plate. One end of the partition plate is movably engaged with the connecting plate, and the other end is rotatably connected to the carrier platform. The clamping cylinder is used to drive the bracket to be transported on the inclined surface, the connecting plate and the partition plate in sequence. The horizontal heights of the carrier platform are, from high to low, the lowest point of the lifting range of the top block, the highest point of the top surface of the partition plate, the highest point of the top surface of the connecting plate, and the vertex of the highest point of the inclined surface movement range.

2. The ultrasonic scanning platform according to claim 1, characterized in that: The SAT probe is driven by a first screw assembly, which includes a first motor, a first screw, a limit rod, a nut seat and a connecting block. Both ends of the first screw are rotatably connected to the carrier platform, the first motor is fixedly connected to the carrier platform, and its output end is coaxially fixed to the first screw. Both ends of the limit rod are fixedly connected to the carrier platform, the nut seat is threadedly matched with the first screw, and the connecting block is fixedly connected to the nut seat, which is slidably connected to the first screw and the limit rod respectively, and the SAT probe is fixed to the bottom screw of the connecting block.

3. The ultrasonic scanning carrier according to claim 2, characterized in that: A lifting cylinder is also fixed on the top of the clamping cylinder. The first screw rod includes a threaded section and a shaft section. The threaded section is threadedly matched with the nut seat. The length of the shaft section corresponds to the horizontal length of the connecting plate. The top of the lifting cylinder is slidably connected to the shaft section through a slider. A pushing cylinder corresponding to the slider is also fixed on the top of the carrier platform.

4. The ultrasonic scanning platform according to claim 1, characterized in that: The bottom of the inclined surface is driven by a second screw assembly, which includes a second motor, a second screw and a slide rail. The second motor is fixed to the carrier platform, and its output end is coaxially fixed to the second screw. The two ends of the inclined surface are slidably connected to the slide rail, and its center is threadedly matched with the second screw.

5. The ultrasonic scanning carrier according to claim 1, characterized in that: The top surface of the inclined surface is protruded with a platform at one end close to the second motor, and the bracket is in compression contact with the platform. The inclined surface is inclined at an angle of 15° to 45° to the ground.

6. The ultrasonic scanning carrier according to claim 1, characterized in that: A push-back cylinder is fixed at the bottom of the carrier platform corresponding to the push plate. The push-back cylinder is connected and fixed to the push plate through a connecting rod. A push groove corresponding to the connecting rod is also provided on the carrier platform. Both ends of the push plate are slidably connected to the carrier platform, and the center thereof is in reciprocating extrusion contact with the end of the bracket.

7. The ultrasonic scanning carrier according to claim 1, characterized in that: The top surface of the connecting plate is a smooth plane, and one end close to the inclined plane is protruded with an anti-slip block which is lower than the top point of the highest point of the inclined plane movement. The partition plate is made up of three sliding rods, and the top surface of the sliding rods is a smooth plane and corresponds to the bottom of the bracket.

8. A method for quickly determining the focal length of an ultrasonic scanning platform according to any one of claims 1 to 7, characterized in that The steps include: S1. Place the product to be inspected on an inclined plane. The unidirectional servo motion process on the inclined plane includes at least three points. When located at each point, the SAT probe moves linearly to the corresponding point and takes pictures in sequence. S2, upload all photos and the servo position corresponding to each photo to the background image processing module, the image processing module then compares and selects the picture with the highest image clarity, and feeds back the servo position corresponding to the picture with the highest clarity to the servo system in the form of an electrical signal, S3. The servo system determines this position as the detection focal length of the current product, and uses this focal length to detect subsequent products of the same batch. When the product is replaced, repeat steps 1 and 2 to refocus.

9. A method for quickly determining focal length according to claim 8, characterized in that The method comprises the following steps: the image processing module is a combination of a TMS320F28335 chip and a TVP5150 chip.

Images