Method of aligning and aligning system for an optical device

Abstract

The embodiment of the application discloses an optical equipment adjusting method and an adjusting system. The adjusting method comprises the following steps: providing a first test light source, mounting the first test light source at a detector position; mounting a first optical element at a first optical element position; emitting a first test light signal to the first optical element through the first test light source; and adjusting the detector and / or the first optical element based on a transmission light path of the first test light signal and an optical path central axis. According to the reversible principle of the light path, when the optical equipment adjusted by the adjusting method is detected, the detection light signal in the optical equipment can be detected by the detector through the first optical element, so that the detector and the first optical element have higher adjusting precision, and the adjusting method can effectively improve the adjusting precision of the optical equipment.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical equipment, in particular to an optical equipment assembling and adjusting method and system. BACKGROUND

[0002] With the gradual development of semiconductor technology, semiconductor devices have been widely used in various technical fields. In the actual application of semiconductor devices, detecting whether the semiconductor devices have defects is an important means to ensure the normal operation of semiconductor devices.

[0003] Optical equipment is a common detection device for detecting whether semiconductor devices have defects. In order to ensure the accuracy of detecting semiconductor devices, the optical equipment needs to be assembled and adjusted before being used to detect semiconductor devices, so as to ensure the installation accuracy of the optical equipment and the accuracy of detecting semiconductor devices by the optical equipment. Therefore, in order to ensure the assembly accuracy of the optical equipment and the accuracy of detecting semiconductor devices by the optical equipment, it has become the research focus of the technical personnel in the field to provide an optical equipment assembling and adjusting method capable of assembling and adjusting the optical equipment. SUMMARY

[0004] To solve the above technical problems, the embodiment of the present application provides an optical equipment assembling and adjusting method, which can effectively improve the assembly accuracy of the optical equipment, and further improve the detection accuracy of the optical equipment when detecting semiconductor devices.

[0005] To solve the above problems, the embodiment of the present application provides the following technical solutions:

[0006] An optical equipment assembling and adjusting method, the optical equipment comprising a mounting plate, a first optical element and a detector, the detector being used to detect the outgoing light of a workpiece to be detected through the first optical element, the mounting plate having an optical route map of the optical equipment, the optical route map comprising a light path center axis and a first optical element position and a detector position on the light path center axis, the method comprising:

[0007] providing a first test light source, and installing the first test light source at the detector position;

[0008] installing the first optical element at the first optical element position;

[0009] emitting a first test light signal to the first optical element through the first test light source, and assembling and adjusting the detector and / or the first optical element based on the transmission light path of the first test light signal and the light path center axis.

[0010] Optionally, the step of adjusting the position of the first optical element based on the transmission path of the first test light signal and the optical path central axis comprises:

[0011] a plurality of first light barriers are arranged along the transmission path of the first test light signal, optical centers of the plurality of first light barriers are located on the optical path central axis;

[0012] the position of the light outlet of the first test light source and / or the position of the first optical element are adjusted so that the first test light signal passes through the plurality of first light barriers.

[0013] Optionally, the position of the first optical element comprises a position of a reflecting element, the first optical element comprises a reflecting element, and the reflecting element is used to change the transmission path of the first test light signal;

[0014] mounting the first optical element at the position of the first optical element comprises mounting the reflecting element at the position of the reflecting element;

[0015] the step of adjusting the position of the first optical element based on the transmission path of the first test light signal and the optical path central axis comprises:

[0016] the position of the light outlet of the first test light source is adjusted so that the first test light signal emitted by the first test light source passes through the plurality of first light barriers, and then the position of the reflecting element is adjusted so that the first test light signal after passing through the reflecting element passes through the plurality of first light barriers.

[0017] Optionally, the position of the first optical element further comprises a position of a lens group, the first optical element further comprises a lens group, and the lens group is used to converge light signals passing through the lens group to the detector when the optical device detects a workpiece to be measured;

[0018] mounting the first optical element at the position of the first optical element comprises mounting the lens group at the position of the lens group;

[0019] the step of adjusting the position of the first optical element based on the transmission path of the first test light signal and the optical path central axis comprises:

[0020] a first light spot monitoring element is arranged along the transmission path of the first test light signal after passing through the lens group;

[0021] a plurality of first light spot sizes are obtained by monitoring the light spot size of the first test light signal at a plurality of positions on the transmission path of the first test light signal through the first light spot monitoring element;

[0022] Adjusting a position of the lens group according to the plurality of first spot sizes, so that the plurality of first spot sizes are the same.

[0023] Optionally, the first optical element position further comprises a lens group position, and the first optical element further comprises a lens group.

[0024] Mounting the first optical element at the first optical element position comprises mounting the lens group at the lens group position.

[0025] The step of adjusting and processing the first optical element based on the transmission optical path of the first test light signal and the optical path central axis comprises:

[0026] A first spot monitoring element is arranged on the transmission optical path of the first test light signal after the lens group.

[0027] Adjusting a position of the first test light source so that the first test light signal emitted by the first test light source passes through the plurality of first diaphragms, and monitoring spot sizes of the first test light signal at a plurality of positions on the transmission optical path of the first test light signal by the first spot monitoring element, to obtain a plurality of first spot sizes.

[0028] Adjusting a position of the lens group according to the plurality of first spot sizes, so that the plurality of first spot sizes are the same.

[0029] Optionally, the first spot monitoring element is a beam quality analyzer or an imaging detector, and monitoring the spot sizes of the first test light signal by the first spot monitoring element comprises monitoring the spot sizes of the first test light signal at a plurality of positions on the transmission optical path of the first test light signal by the first spot monitoring element, and determining whether the plurality of first spot sizes are the same.

[0030] Or, the first spot monitoring element is a spot blocking piece, and monitoring the spot sizes of the first test light signal by the first spot monitoring element comprises monitoring the spot sizes of the first test light signal at a plurality of positions on the transmission optical path of the first test light signal by the first spot monitoring element, and determining whether the plurality of first spot sizes are the same by human eyes.

[0031] Optionally, monitoring the spot sizes of the first test light signal at a plurality of positions on the transmission optical path of the first test light signal by the first spot monitoring element comprises:

[0032] A first beam splitter is arranged on the transmission optical path of the first test light signal after the lens group, and the first test light signal is divided into a plurality of sub-test light signals by the first beam splitter.

[0033] monitoring, by the first light spot monitoring element, the light spot size of each of the sub-test light signals, wherein the first light spot monitoring element monitors the light spot size of each of the sub-test light signals at different optical paths of the first light spot monitoring element.

[0034] Optionally, the monitoring, by the first light spot monitoring element, the light spot size of the first test light signal at multiple positions of the first test light signal transmission optical path comprises:

[0035] providing the first light spot monitoring element at the first position, monitoring, by the first light spot monitoring element, the light spot size of the first test light signal at the first position, and obtaining the first light spot size at the first position;

[0036] providing the first light spot monitoring element at the second position after the monitoring, by the first light spot monitoring element, the light spot size of the first test light signal at the first position, monitoring, by the first light spot monitoring element, the light spot size of the first test light signal at the second position, and obtaining the first light spot size at the second position;

[0037] wherein the first position and the second position are both located on the first test light signal transmission optical path, and an arrangement direction from the second position to the first position is opposite to a transmission direction of the first test light signal, or the first light spot monitoring element at the first position is removed before the monitoring, by the first light spot monitoring element, the light spot size of the first test light signal at the second position.

[0038] Optionally, the optical route map comprises a plurality of detector positions, the first optical element position comprises a second beam splitter position, the optical device comprises a plurality of detectors, the first optical element comprises a second beam splitter, and the second beam splitter is used for splitting a light signal incident on the second beam splitter into a plurality of sub-light signals, and the plurality of detectors are used for detecting the plurality of sub-light signals by the second beam splitter when the optical device detects a workpiece to be detected.

[0039] installing the first test light source at the detector position comprises: providing a plurality of first test light sources, and installing the plurality of first test light sources at the plurality of detector positions, respectively;

[0040] installing the first optical element at the first optical element position comprises: installing the second beam splitter at the second beam splitter position;

[0041] The step of adjusting the first optical element based on the transmission path of the first test light signal and the optical path central axis comprises: arranging a plurality of second diaphragms, the plurality of second diaphragms are arranged in sequence on the transmission path of the first test light signal after the second beam splitter, and optical centers of the plurality of second diaphragms are located on the optical path central axis; and adjusting an included angle between the second beam splitter and the optical path central axis, so that the plurality of first test light signals after the second beam splitter pass through the plurality of second diaphragms.

[0042] Optionally, the step of adjusting the first optical element based on the transmission path of the first test light signal and the optical path central axis comprises:

[0043] arranging a second spot monitoring element on the transmission path of the first test light signal after the second beam splitter;

[0044] monitoring the spot of the first test light signal at a plurality of positions on the transmission path of the plurality of first test light signals by the second spot monitoring element;

[0045] adjusting the included angle between the second beam splitter and the optical path central axis according to the monitored spot of the first test light signal, so that the monitored spots of the first test light signal at the plurality of positions coincide.

[0046] Optionally, the optical device further comprises a light emitting assembly and a second optical element, and the optical route map further comprises a light emitting assembly position and a second optical element position, the light emitting assembly is configured to emit an incident light signal to the workpiece to be measured through the second optical element, and the adjustment method further comprises:

[0047] providing a second test light source, and mounting the second test light source at the light emitting assembly position;

[0048] mounting the second optical element at the second optical element position;

[0049] emitting a second test light signal to the second optical element by the second test light source;

[0050] adjusting the light emitting assembly and / or the second optical element based on the transmission path of the second test light signal and the optical path central axis.

[0051] Optionally, the step of adjusting the light emitting assembly and / or the second optical element based on the transmission path of the second test light signal and the optical path central axis comprises:

[0052] a plurality of third apertures are arranged along a transmission path of the second test light signal, optical centers of the plurality of third apertures are located on the optical path central axis;

[0053] a position of an emission port of the second test light source and / or a position of the second optical element are adjusted so that the second test light signal passes through the plurality of third apertures.

[0054] Optionally, the optical device comprises a plurality of light emitting assemblies, the second optical element comprises a beam combiner, the beam combiner is configured to combine light signals emitted by the plurality of light emitting assemblies so that the light signals emitted by the plurality of light emitting assemblies are transmitted along the same path, the optical route map comprises a plurality of light emitting assembly positions, and the second optical element position comprises a beam combiner position.

[0055] The second test light source is installed at the light emitting assembly position, which comprises: providing a plurality of second test light sources, and installing the plurality of second test light sources at the plurality of light emitting assembly positions respectively.

[0056] The second optical element is installed at the second optical element position, which comprises: installing the beam combiner at the beam combiner position.

[0057] The step of adjusting the second optical element based on the transmission path of the second test light signal and the optical path central axis comprises:

[0058] a plurality of fourth apertures are arranged on the transmission path of the second test light signal after the beam combiner, and optical centers of the plurality of fourth apertures are located on the optical path central axis;

[0059] An included angle between the beam combiner and the optical path central axis is adjusted so that the plurality of second test light signals after the beam combiner all pass through the plurality of fourth apertures.

[0060] Optionally, the step of adjusting the second optical element based on the transmission path of the second test light signal and the optical path central axis comprises:

[0061] a third spot monitoring element is arranged on the transmission path of the second test light signal after the beam combiner;

[0062] The third spot monitoring element monitors spots of the second test light signal at a plurality of positions on the transmission path of the plurality of second test light signals.

[0063] Based on the monitored spots of the second test light signal, the included angle between the beam combiner and the optical path central axis is adjusted so that the monitored spots of the second test light signal at the plurality of positions coincide.

[0064] Optionally, the second optical element position further comprises a third beamsplitter position, the second optical element comprises a third beamsplitter, when the optical device detects the workpiece to be tested, the third beamsplitter is configured to reflect the light signal emitted by the light emitting assembly to a common light path and transmit the light signal passing through the workpiece to be tested along the common light path, or the third beamsplitter is configured to transmit the light signal emitted by the light emitting assembly along the common light path and reflect the light signal passing through the workpiece to be tested to the common light path, wherein the common light path is a common light path of the light signal emitted by the light emitting assembly and the light signal passing through the workpiece to be tested;

[0065] The mounting of the second optical element in the second optical element position comprises mounting the third beamsplitter in the third beamsplitter position;

[0066] The mounting method further comprises:

[0067] A plurality of fifth diaphragms are arranged on the common light path after the third beamsplitter, wherein the common light path is a common light path of the first test light signal and the second test light signal, and optical centers of the plurality of fifth diaphragms are located on the light path center axis;

[0068] An angle between the third beamsplitter and the light path center axis is adjusted so that the first test light signal and the second test light signal after the third beamsplitter both pass through the plurality of fifth diaphragms;

[0069] Or,

[0070] The mounting method further comprises:

[0071] A fourth light spot monitoring element is arranged on the common light path after the third beamsplitter;

[0072] The first test light signal and the second test light signal are monitored by the fourth light spot monitoring element at a plurality of positions on the common light path;

[0073] According to the monitored light spot of the first test light signal and the light spot of the second test light signal, an angle between the third beamsplitter and the light path center axis is adjusted so that the monitored light spot of the first test light signal and the light spot of the second test light signal at the plurality of positions coincide.

[0074] An assembling system, the optical device comprising a mounting plate, a first optical element and a detector, the detector being used to detect emergent light of a workpiece to be measured through the first optical element, the mounting plate having an optical route map of the optical device, the optical route map comprising a light path central axis and a first optical element position and a detector position on the light path central axis, the assembling system comprising:

[0075] a first mounting module, when the optical device is assembled, the first mounting module being used to mount a first test light source at the detector position and mount the first optical element at the first optical element position;

[0076] a first assembling module, when the optical device is assembled, the first assembling module being used to assemble the detector and / or the first optical element based on a transmission light path of a light signal emitted by the first test light source and the light path central axis.

[0077] Optionally, the optical device further comprises a light emitting assembly and a second optical element, the optical route map further comprising a light emitting assembly position and a second optical element position, the light emitting assembly being used to emit incident light signals to the workpiece to be measured through the second optical element, the assembling system further comprising:

[0078] a second mounting module, when the optical device is assembled, the second mounting module being used to mount a second test light source at the light emitting assembly position and mount the second optical element at the second optical element position;

[0079] a second assembling module, when the optical device is assembled, the second assembling module being used to assemble the light emitting assembly and / or the second optical element based on a transmission light path of a light signal emitted by the second test light source and the light path central axis.

[0080] Compared with the prior art, the above technical solution has the following advantages:

[0081] The technical scheme provided by the embodiment of the application comprises: the optical equipment comprises a mounting plate, a first optical element and a detector, the mounting plate is provided with an optical route map of the optical equipment, the optical route map comprises a light path central axis and a first optical element position and a detector position on the light path central axis, and the mounting method comprises the following steps: providing a first test light source, mounting the first test light source at the detector position, mounting the first optical element at the first optical element position; emitting a first test light signal to the first optical element through the first test light source, and mounting the detector and / or the first optical element based on a transmission light path of the first test light signal and the light path central axis. The first test light source is mounted so that the transmission light path of the first test light signal emitted by the first test light source is transmitted along the light path central axis, so as to complete the mounting of the detector. The first optical element is mounted so that the first test light signal is transmitted along the light path central axis after passing through the first optical element, so as to complete the mounting of the first optical element.

[0082] In summary, when the mounting method is used for mounting the optical equipment, the transmission light path of the first test light signal and the light path central axis are used to mount the detector and the first optical element. According to the principle of optical path reversibility, when the optical equipment mounted by the mounting method is detected, the detection light signal in the optical equipment will be detected by the detector through the first optical element, so that the detector and the first optical element have high mounting accuracy, and the mounting method can effectively improve the mounting accuracy of the optical equipment. BRIEF DESCRIPTION OF DRAWINGS

[0083] In order to more clearly illustrate the technical schemes in the embodiments of the application or the prior art, the drawings needed in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0084] Figure 1 A structural diagram of an optical equipment to which a mounting method of an optical equipment provided by an embodiment of the application is applied;

[0085] Figure 2 A flowchart of a mounting method of an optical equipment provided by an embodiment of the application;

[0086] Figures 3-5 and Figures 7-8 A structural diagram of an optical equipment corresponding to different mounting steps of a mounting method of an optical equipment provided by an embodiment of the application;

[0087] Figure 6 A structural diagram of another optical device to which the alignment method of the optical device provided by the embodiment of the present application is applied;

[0088] Figure 9 A structural diagram of another optical device to which the alignment method of the optical device provided by the embodiment of the present application is applied. DETAILED DESCRIPTION

[0089] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0090] In the following description, a large number of specific details are set forth in order to facilitate a thorough understanding of the present application, but the present application can also be implemented in other ways different from those described herein, and a person of ordinary skill in the art can make similar generalizations without departing from the connotation of the present application, therefore the present application is not limited by the specific embodiments disclosed below.

[0091] Secondly, the present application is described in detail in combination with the schematic diagram, in the detailed description of the embodiments of the present application, for the convenience of description, the cross-sectional view showing the structure of the device will be partially enlarged without the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present application herein. In addition, the three-dimensional spatial dimensions of length, width and depth should be included in actual manufacture.

[0092] As described in the background section, it has become the research focus of a person skilled in the art to provide an alignment method capable of effectively improving the alignment accuracy of an optical device.

[0093] The optical device is a commonly used detection device for detecting whether a semiconductor device has defects, and the alignment accuracy of the optical device has a crucial influence on the detection accuracy of the optical device when the semiconductor device is detected by using the optical device, so it is particularly important to provide an alignment method capable of effectively improving the alignment accuracy of the optical device.

[0094] Generally, the optical device includes a detection system and an imaging system, wherein the detection system is used to output a detection light signal, the detection light signal carries detection information of a to-be-detected semiconductor device, and the imaging system is used to obtain a detection image of the to-be-detected semiconductor device based on the detection light signal, so as to realize detection of the to-be-detected semiconductor device.

[0095] The existing optical equipment adjustment method needs to use the light signal emitted by the inherent light source in the detection system of the optical equipment to adjust the imaging system of the optical equipment. Since the light signal emitted by the inherent light source in the detection system of the optical equipment is used to adjust the imaging system of the optical equipment, the light signal emitted by the inherent light source in the detection system of the optical equipment needs to pass through each optical element of the detection system before entering the imaging system of the optical equipment, thereby causing the adjustment precision of the detection system of the optical equipment to have an important influence on the adjustment precision of the imaging system of the optical equipment. When the adjustment precision of any one or several of the optical elements in the detection system deviates, the light signal emitted by the inherent light source will deviate when passing through the detection system and entering the imaging system, thereby causing the light signal emitted by the inherent light source in the detection system of the optical equipment to deviate when entering the imaging system of the optical equipment. When the light signal is used to adjust the imaging system, the adjustment precision is low, which is not conducive to accurately adjusting the elements of the imaging system of the optical equipment, thereby not conducive to ensuring the installation precision of the elements of the imaging system of the optical equipment, and affecting the accuracy of the optical equipment when detecting the semiconductor device.

[0096] Therefore, the embodiment of the present application provides an optical equipment adjustment method applied to an optical equipment, wherein the optical equipment comprises a mounting plate, and the mounting plate has an optical route map of the optical equipment, and the optical route map comprises a light path center axis and a first optical element position and a detector position on the light path center axis. As shown in Figure 1 The optical equipment comprises a first optical element 00 and a detector 20. As shown in Figure 2 The adjustment method comprises the following steps.

[0097] S1: as shown in Figure 3 A first test light source 30 is provided, and the first test light source 30 is installed at the detector position.

[0098] S2: as shown in Figure 3 The first optical element 00 is installed at the first optical element position.

[0099] S3: the first test light source emits a first test light signal to the first optical element, and the detector and / or the optical element are adjusted based on the transmission light path of the first test light signal and the light path center axis.

[0100] It should be noted that in the embodiment of the present application, the mounting and adjusting method mounts the first test light source at the detector position, and according to the principle of optical path reversibility, the transmission optical path of the first test light signal is the same as the transmission optical path of the detection light signal when the optical equipment is used for detection, and the directions are opposite, so that the first test light signal can be used for mounting and adjusting the detector and the first optical element.

[0101] Optionally, in an embodiment of the present application, the detector can be a spectrometer or an imaging sensor, but the present application does not limit this, and the specific conditions are determined accordingly.

[0102] Specifically, when the mounting and adjusting method of the embodiment of the present application is used for mounting and adjusting the optical equipment, the transmission optical path of the first test light signal and the optical path central axis are used for mounting and adjusting the detector and / or the first optical element, and according to the principle of optical path reversibility, when the optical equipment adjusted by the mounting and adjusting method is used for detection, the detection light signal in the optical equipment will be detected by the detector through the first optical element, so that the detector and the first optical element have high mounting and adjusting precision, thereby the mounting and adjusting method can effectively improve the mounting and adjusting precision of the optical equipment.

[0103] It should be noted that the first detector and the first optical element belong to the imaging system of the optical equipment, and the mounting and adjusting method uses the transmission optical path of the first test light signal and the optical path central axis to realize the mounting and adjusting of the first detector and the first optical element. Compared with the existing mounting and adjusting method of using the inherent light source of the detection system in the optical equipment to detect the imaging system, the mounting and adjusting method realizes independent mounting and adjusting of the imaging system, avoids the influence of the mounting precision of the detection system in the optical equipment on the mounting precision of the imaging system of the optical equipment, effectively improves the mounting and adjusting precision of the imaging system of the optical equipment, and further helps to improve the mounting and adjusting precision of the optical equipment, so that the mounting and adjusting method can effectively improve the mounting and adjusting precision of the optical equipment, and help to ensure the detection precision when the semiconductor device is detected by using the optical equipment.

[0104] On the basis of the above embodiment, in an embodiment of the present application, mounting and adjusting the detector and / or the first optical element based on the transmission optical path of the first test light signal and the optical path central axis comprises: Figure 3As shown, a plurality of first light barriers 31 are arranged along a transmission light path of the first test light signal, optical centers of the plurality of first light barriers 31 are located on the optical path central axis; the position of the light outlet of the first test light source 30 and / or the position of the first optical element 00 are adjusted so that the first test light signal passes through the plurality of first light barriers 31, that is, the first test light signal is transmitted along the optical path central axis, so as to realize the adjustment and processing of the detector and / or the first optical element, in particular, the adjustment of the detector, the adjustment of the position of the light outlet of the first test light source, the adjustment of the first optical element, the adjustment of the detector and the first optical element, and the adjustment of the position of the light outlet of the first test light source and the position of the first optical element. When the optical equipment is used for detection, the position of the receiving port of the detector is the position of the light outlet of the first test light source, and the position of the first optical element is the adjusted position of the first optical element. It is known that the transmission light path of the first test light signal is the same as the transmission light path of the light signal of the imaging system when the optical equipment is used for detection, and the directions are opposite, so that when the optical equipment adjusted by the adjustment method is used for detection, the detection light signal in the optical equipment can be detected by the detector after passing through the first optical element, that is, the adjustment accuracy of the optical equipment adjusted by the adjustment method is high, so that the adjustment method can effectively improve the adjustment accuracy of the optical equipment. It should be noted that in an embodiment of the present application, the light outlet of the first test light source is a fiber head, and the position of the light outlet of the first test light source is adjusted by adjusting the position of the fiber head, but the embodiment of the present application does not limit this, and the specific adjustment is determined according to the situation.

[0105] It should be noted that in order to avoid the size of the optical equipment being too large, the optical equipment usually includes a reflecting element for folding the transmission light path of the detection light signal. Therefore, on the basis of the above-mentioned embodiment, in an embodiment of the present application, the first optical element position includes a reflecting element position, the first optical element includes a reflecting element, and the reflecting element is used to change the transmission light path of the first test light signal; the step of mounting the first optical element at the first optical element position includes: mounting the reflecting element 34 at the reflecting element position as shown; and the step of adjusting and processing the first optical element based on the transmission light path of the first test light signal and the optical path central axis includes: adjusting the position of the light outlet of the first test light source 30 so that the first test light signal emitted by the first test light source 30 passes through the plurality of first light barriers 31, adjusting the position of the reflecting element 34 so that the first test light signal passing through the reflecting element 34 passes through the plurality of first light barriers, and completing the adjustment of the reflecting element. Figure 3 As shown, a plurality of first light barriers 31 are arranged along a transmission light path of the first test light signal, optical centers of the plurality of first light barriers 31 are located on the optical path central axis; the position of the light outlet of the first test light source 30 and / or the position of the first optical element 00 are adjusted so that the first test light signal passes through the plurality of first light barriers 31, that is, the first test light signal is transmitted along the optical path central axis, so as to realize the adjustment and processing of the detector and / or the first optical element, in particular, the adjustment of the detector, the adjustment of the position of the light outlet of the first test light source, the adjustment of the first optical element, the adjustment of the detector and the first optical element, and the adjustment of the position of the light outlet of the first test light source and the position of the first optical element. When the optical equipment is used for detection, the position of the receiving port of the detector is the position of the light outlet of the first test light source, and the position of the first optical element is the adjusted position of the first optical element. It is known that the transmission light path of the first test light signal is the same as the transmission light path of the light signal of the imaging system when the optical equipment is used for detection, and the directions are opposite, so that when the optical equipment adjusted by the adjustment method is used for detection, the detection light signal in the optical equipment can be detected by the detector after passing through the first optical element, that is, the adjustment accuracy of the optical equipment adjusted by the adjustment method is high, so that the adjustment method can effectively improve the adjustment accuracy of the optical equipment. It should be noted that in an embodiment of the present application, the light outlet of the first test light source is a fiber head, and the position of the light outlet of the first test light source is adjusted by adjusting the position of the fiber head, but the embodiment of the present application does not limit this, and the specific adjustment is determined according to the situation.

[0106] Typically, the optical device includes a lens group. During operation, the detection light signal from the semiconductor device under test passes through the lens group and is focused onto the detector. Therefore, based on the above embodiments, in one embodiment of this application, the first optical element position includes a lens group position. The first optical element includes a lens group, and when the optical device detects the workpiece under test, the lens group is used to focus the light signal passing through the lens group onto the detector. Installing the first optical element at the first optical element position includes: as follows... Figure 4 As shown, the lens group 10 is installed at the lens group position; the assembly and adjustment of the first optical element based on the transmission optical path of the first test optical signal and the central axis of the optical path includes: setting a first spot monitoring element 11, the first spot monitoring element 11 being located in the transmission optical path of the first test optical signal after passing through the lens group 10; monitoring the spot size of the first test optical signal at multiple positions in the transmission optical path of the first test optical signal through the first spot monitoring element 11, and obtaining multiple first spot sizes; adjusting the position of the lens group according to the multiple first spot sizes so that the multiple first spot sizes are the same, so that the first test optical signal after passing through the lens group 10 is a parallel optical signal, thus completing the assembly and adjustment of the lens group 10. It should be noted that when using the optical device for detection, the detection light signal in the optical device is usually parallel light. According to the principle of optical path reversibility, when the optical device is used for detection, the lens group after being assembled and adjusted using the above-mentioned assembly and adjustment method can converge the parallel light signal incident on the lens group to the detector, so that the lens group has high assembly and adjustment accuracy. Therefore, the assembly and adjustment method can effectively improve the assembly and adjustment accuracy of the optical device. It should also be noted that the first spot monitoring element only exists in the transmission optical path of the first test light signal after passing through the lens group when the lens group is being assembled and adjusted. After the assembly and adjustment of the lens group is completed, the first spot monitoring element will be removed.

[0107] Optionally, in one embodiment of this application, the first test light source is an LED light source, a laser light source, or a xenon lamp light source, but this application does not limit this and it depends on the specific circumstances. Furthermore, in one embodiment of this application, the plurality of first apertures includes two first apertures sequentially arranged along the transmission optical path of the first test light signal, but this application does not limit this and it depends on the specific circumstances.

[0108] Based on the above embodiments, in one embodiment of this application, the first optical element position includes a lens group position, and the first optical element includes a lens group; mounting the first optical element at the first optical element position includes: continuing as follows Figure 4 As shown, the steps of installing the lens group 10 at the lens group position and adjusting the first optical element based on the transmission optical path of the first test light signal and the central axis of the optical path include: setting a first spot monitoring element 11, the first spot monitoring element 11 being located in the transmission optical path of the first test light signal after passing through the lens group 10; adjusting the position of the light outlet of the first test light source 30 so that after the first test light signal emitted by the first test light source passes through the plurality of first apertures, the first spot monitoring element 11 monitors the spot size of the first test light signal at multiple positions in the transmission optical path of the first test light signal to obtain a plurality of first spot sizes; adjusting the position of the lens group 10 according to the plurality of first spot sizes so that the plurality of first spot sizes are the same, so that the first test light signal after passing through the lens group 10 is a parallel light signal, thereby completing the adjustment of the lens group 10.

[0109] Optionally, in one embodiment of this application, the first spot monitoring element can be a beam profiler or a charge-coupled device (CCD). Monitoring the spot size of the first test light signal using the first spot monitoring element includes: monitoring the spot size of the first test light signal at multiple locations along the transmission optical path of the first test light signal using the first spot monitoring element, and determining whether the multiple first spot sizes are the same; or, the first spot monitoring element can be a spot blocking plate. Monitoring the spot size of the first test light signal using the multiple first spot monitoring elements includes: monitoring the spot size of the first test light signal at multiple locations along the transmission optical path of the first test light signal using the first spot monitoring element, and determining whether the multiple first spot sizes are the same by human eye. However, this application is not limited to this. In other embodiments of this application, the first spot monitoring element can also be other elements, depending on the specific circumstances.

[0110] On the basis of the above-mentioned embodiments, in one embodiment of the present application, the first spot monitoring element monitors the spot size of the first test light signal at multiple positions of the first test light signal transmission path includes: a first beam splitter is arranged on the transmission path of the first test light signal after the lens group, and the first test light signal is divided into multiple sub-test light signals by the first beam splitter; the spot size of each sub-test light signal is monitored by the first spot monitoring element respectively, so as to realize the monitoring of the spot size of the first test light signal by the first spot monitoring element at multiple positions of the first test light signal transmission path; wherein, when the first spot monitoring element monitors the sub-test light signals, the optical path of different sub-test light signals reaching the first spot monitoring element is different. It should be noted that when the first beam splitter divides the first test light signal to obtain multiple sub-test light signals, the spot sizes of the multiple sub-test light signals obtained are the same as that of the first test light signal, so that the spot size of each sub-test light signal can be monitored by the first spot monitoring element respectively, so as to realize the monitoring of the first test light signal spot.

[0111] Specifically, the first beam splitter is a half-transmission half-reflection mirror, and the included angle between the half-transmission half-reflection surface of the first beam splitter and the first test light signal transmission path is 45°; or, the number of the first beam splitter is multiple, and multiple first beam splitters are arranged at different positions of the first test light signal transmission path respectively, and the half-transmission half-reflection surfaces of the multiple first beam splitters are parallel.

[0112] In another embodiment of the present application, the monitoring of the spot size of the first test light signal at multiple positions of the first test light signal transmission path by the first spot monitoring element comprises: disposing the first spot monitoring element at a first position, monitoring the spot size of the first test light signal at the first position by the first spot monitoring element, and obtaining the first spot size at the first position; after monitoring the spot size of the first test light signal at the first position by the first spot monitoring element, disposing the first spot monitoring element at a second position, monitoring the spot size of the first test light signal at the second position by the first spot monitoring element, and obtaining the first spot size at the second position; wherein the first position and the second position are both located on the transmission path of the first test light signal, and the arrangement direction from the second position to the first position is opposite to the transmission direction of the first test light signal, or the first spot monitoring element at the first position is removed before monitoring the spot size of the first test light signal at the second position by the first spot monitoring element, so as to prevent the first spot monitoring element from being blocked when monitoring the spot size of the first test light signal at multiple positions of the first test light signal transmission path, thereby achieving the monitoring of the spot at multiple positions of the first test light signal transmission path by the first spot monitoring element.

[0113] It should be noted that the optical device can include multiple detectors, and in order to reasonably arrange the space and prevent the optical device from occupying too much space, when the optical device can include multiple detectors, the optical device includes a beam splitting element. Therefore, on the basis of the above-mentioned embodiments, in an embodiment of the present application, the optical roadmap includes multiple detector positions, the first optical element position includes a second beam splitter position, the optical device includes multiple detectors and a second beam splitter, and when the optical device detects the workpiece to be detected, the second beam splitter is used to split the light signal incident on the second beam splitter into multiple sub-light signals, and the multiple detectors detect the multiple sub-light signals; for example, Figure 5As shown, the step of installing the first test light source at the detector position comprises: providing a plurality of first test light sources 30, and installing the plurality of first test light sources 30 at the plurality of detector positions respectively; the step of installing the first optical element at the first optical element position comprises: installing the second beam splitter 32 at the second beam splitter position; the step of adjusting the first optical element based on the transmission light path of the first test light signal and the light path central axis comprises: providing a plurality of second diaphragms 33, which are sequentially arranged on the transmission light path of the first test light signal after the second beam splitter 32, and the optical centers of the plurality of second diaphragms 33 are located on the light path central axis; and adjusting the included angle between the second beam splitter 32 and the light path central axis, so that the first test light signal passes through the plurality of second diaphragms 33 after passing through the second beam splitter 32, thereby completing the adjustment of the second beam splitter 32. According to the principle of optical path reversibility, when the optical equipment is used for detection, the detection light signal incident on the second beam splitter will be split into a plurality of sub-light signals by the second beam splitter, and detected by the corresponding detector, so that the second beam splitter has high adjustment accuracy, that is, the adjustment method can effectively improve the adjustment method of the optical equipment.

[0114] In another embodiment of the present application, the first optical element comprises a second beam splitter, and the step of adjusting the first optical element based on the transmission light path of the first test light signal and the light path central axis comprises: Figure 4 As shown, a second spot monitoring element 12 is arranged on the transmission light path of the first test light signal after the second beam splitter 32; the second spot monitoring element 12 monitors the spot of the first test light signal at a plurality of positions on the transmission light path of the plurality of first test light signals; and according to the monitored spot of the first test light signal, the included angle between the second beam splitter 32 and the light path central axis is adjusted, so that the monitored spots of the first test light signal at the plurality of positions coincide. According to the principle of optical path reversibility, when the optical equipment is used for detection, the detection light signal incident on the second beam splitter will be split into a plurality of sub-light signals by the second beam splitter, and detected by the corresponding detector, so that the second beam splitter has high adjustment accuracy, that is, the adjustment method can effectively improve the adjustment method of the optical equipment.

[0115] It should be noted that the second spot monitoring element is arranged on the transmission light path of the second test light signal after the second beam splitter only when the second beam splitter is adjusted, and is removed from the transmission light path of the second test light signal after the second beam splitter after adjustment.

[0116] Optionally, in an embodiment of the present application, the plurality of second apertures comprises two second apertures arranged in sequence along the transmission light path of the first test light signal, but the present application does not make a limitation in this regard, which is subject to the specific circumstances. Moreover, in an embodiment of the present application, the beam splitter can be a half-transmission half-reflection mirror or a plane mirror, the second light spot monitoring element can be a beam profiler or an imaging detector (Charge-coupled Device, referred to as CCD) or a light spot shielding plate, but the present application does not make a limitation in this regard, which is subject to the specific circumstances. The second beam splitter is a half-transmission half-reflection mirror, and adjusting the included angle between the beam splitter and the central axis of the light path comprises adjusting the included angle between the half-transmission half-reflection surface of the beam splitter and the central axis of the light path.

[0117] It should be noted that, as Figure 6 indicated, the optical device further comprises a plurality of light-emitting assemblies 40 and a plurality of second optical elements 50, the plurality of light-emitting assemblies 40 and the plurality of second optical elements 50 correspond one-to-one, and the light-emitting assemblies are used to emit light signals incident to the workpiece to be detected when the optical device detects. The second optical elements are used to collimate the light signals emitted by the light-emitting assemblies and enhance the directivity of the light signals emitted by the light-emitting assemblies. On the basis of the above-mentioned embodiment, in an embodiment of the present application, the optical route map comprises light-emitting assembly positions and second optical element positions, the optical elements comprise light-emitting assemblies and second optical elements, and the light-emitting assemblies are used to emit light signals to the workpiece to be detected when the optical device detects the workpiece to be detected. The second optical elements are used to collimate the light signals emitted by the light-emitting assemblies, and the method further comprises:

[0118] S4: as Figure 7 indicated, a second test light source 60 is provided, and the second test light source 60 is installed at the light-emitting assembly position;

[0119] S5: as Figure 7 indicated, the second optical element 50 is installed at the second optical element position;

[0120] S6: a second test light signal is emitted by the second test light source 60 to the second optical element 50, and the light-emitting assemblies and / or the second optical elements are adjusted and processed based on the transmission light path of the second test light signal and the central axis of the light path.

[0121] On the basis of the above-mentioned embodiment, in an embodiment of the present application, the step of adjusting and processing the light-emitting assemblies and / or the second optical elements based on the transmission light path of the second test light signal and the central axis of the light path comprises: as Figure 7As shown, a plurality of third diaphragms 61 are arranged along the transmission light path of the second test light signal, and optical centers of the plurality of third diaphragms 61 are located on the optical path central axis; the light outlet position of the second test light source 60 and / or the position of the second optical element 50 are adjusted so that the second test light signal passes through the plurality of third diaphragms 61 to adjust and assemble the light emitting assembly and / or the second optical element. According to the principle of optical path reversibility, when the optical equipment is detected, the light emitting assembly and the second optical element adjusted and assembled by the adjustment method can make the light signal emitted by the light emitting assembly transmit along the optical path central axis, and make the light signal passing through the second optical element transmit along the optical path central axis, so that the light emitting assembly and the second optical element adjusted and assembled by the adjustment method have high adjustment precision, thereby the adjustment method can effectively improve the adjustment precision of the optical equipment.

[0122] It should be noted that in an embodiment of the present application, the second test light source is provided, the second test light source is installed at the light emitting assembly position, and the second test light signal emitted by the second test light source is used for adjustment and assembly. The second test light source and the light emitting assembly are different light emitting elements, but the present application does not make any limitation thereon. In other embodiments of the present application, the light emitting assembly can be directly used as the second test light source, that is, the second test light source and the light emitting assembly are the same light emitting element, and the light signal emitted by the light emitting assembly is used for adjustment and assembly. The specific conditions are determined accordingly.

[0123] Optionally, in an embodiment of the present application, the second test light source is an LED light source, a laser light source or a xenon lamp light source, and the plurality of third diaphragms includes two third diaphragms, but the present application does not make any limitation thereon, and the specific conditions are determined accordingly.

[0124] It should be noted that the optical equipment can include a plurality of light emitting assemblies and a beam combiner. Therefore, on the basis of the above-mentioned embodiments, in an embodiment of the present application, the first beam combiner is used to combine the light signals emitted by the plurality of light emitting assemblies so that the light signals emitted by the plurality of light emitting assemblies transmit along the same path, the optical route map includes a plurality of light emitting assembly positions, and the second optical element position includes a beam combiner position; continue as Figure 7As shown, the installing the second test light source at the light emitting component position comprises: providing a plurality of second test light sources 60, and installing the plurality of second test light sources 60 at the plurality of light emitting component positions respectively; the installing the second optical element 50 at the second optical element position comprises: installing the beam combiner 62 at the beam combiner position; the adjusting the second optical element based on the transmission light path of the second test light signal and the light path central axis comprises: setting a plurality of fourth diaphragms 65, the plurality of fourth diaphragms 65 are sequentially located on the transmission light path of the second test light signal after the beam combiner 62, and the optical centers of the plurality of fourth diaphragms 65 are located on the light path central axis; adjusting the included angle between the beam combiner 62 and the light path central axis until the plurality of second test light signals after the beam combiner 62 all pass through the plurality of fourth diaphragms 65, that is, making the beam combiner 62 can combine the plurality of second test light signals to complete the adjustment of the beam combiner 62. According to the principle of light path reversibility, when the optical equipment is detected, the beam combiner adjusted by the adjustment method can combine the light signals emitted by the light emitting component, so that the beam combiner has high adjustment precision, thereby the adjustment method can effectively improve the adjustment precision of the optical equipment.

[0125] In another embodiment of the present application, the optical equipment can comprise a beam combiner and a plurality of light emitting components, and the adjusting the second optical element based on the transmission light path of the second test light signal and the light path central axis comprises: Figure 8 As shown, a third light spot monitoring element 13 is arranged on the transmission light path of the second test light signal after the beam combiner 62; the third light spot monitoring element 13 monitors the light spots of the second test light signal at a plurality of positions on the transmission light path of the plurality of second test light signals; and the included angle between the beam combiner 62 and the light path central axis is adjusted according to the monitored light spots of the second test light signal, so that the light spots of the second test light signal at the plurality of positions are overlapped to complete the adjustment of the beam combiner 62. According to the principle of light path reversibility, when the optical equipment is detected, the beam combiner adjusted by the adjustment method can combine the light signals emitted by the light emitting component, so that the beam combiner has high adjustment precision, thereby the adjustment method can effectively improve the adjustment precision of the optical equipment.

[0126] Optionally, in an embodiment of the present application, the beam combiner can be a half-transmission half-reflection mirror or a plane mirror, and the third light spot monitoring element can be a beam profiler or an imaging detector (CCD) or a light spot blocking plate, but the present application is not limited thereto, and the specific selection depends on the case. In addition, in an embodiment of the present application, the plurality of fourth diaphragms include two fourth diaphragms, but the present application is not limited thereto, and the specific selection depends on the case. It should be noted that when the beam combiner is a half-transmission half-reflection mirror, adjusting the included angle between the beam combiner and the central axis of the optical path is adjusting the included angle between the half-transmission half-reflection surface of the half-transmission half-reflection mirror and the central axis of the optical path.

[0127] It should be noted that when the optical device detects, the light signal emitted by the light emitting element is incident on the workpiece to be detected, and the light signal incident on the workpiece to be detected is reflected by the workpiece to be detected and detected by the detector. In order to avoid the size of the optical device being too large, the optical device further comprises a third beam splitter for transmitting the light signal emitted by the light emitting element and the light signal reflected by the workpiece to be detected along the same optical path. Therefore, on the basis of the above-mentioned embodiments, in an embodiment of the present application, the second optical element position further comprises a third beam splitter position, and the second optical element comprises a third beam splitter. When the optical device detects the workpiece to be detected, the third beam splitter is used to reflect the light signal emitted by the light emitting assembly to the common optical path, and to transmit the light signal passing through the workpiece to be detected along the common optical path, or the third beam splitter is used to transmit the light signal emitted by the light emitting assembly along the common optical path, and to reflect the light signal passing through the workpiece to be detected to the common optical path, wherein the common optical path is the common optical path of the light signal emitted by the light emitting assembly and the light signal passing through the workpiece to be detected; continue as follows Figure 7As shown, mounting the second optical element at the second optical element position comprises mounting the third beam splitter 63 at the third beam splitter position; the mounting and adjusting method further comprises: disposing a plurality of fifth diaphragms 64 on the common light path after the third beam splitter 63, wherein the common light path is the common light path of the first test light signal and the second test light signal, and the optical centers of the plurality of fifth diaphragms 64 are located on the light path center axis; adjusting the included angle between the third beam splitter 63 and the light path center axis until the first test light signal and the second test light signal after the third beam splitter 63 both pass through the plurality of fifth diaphragms 64, that is, the third beam splitter 63 can make the first test light signal and the second test light signal have the same transmission light path, that is, the common light path. According to the principle of light path reversibility, when the optical equipment is detected, the third beam splitter adjusted by the mounting and adjusting method can make the light signal emitted by the light emitting element and the light signal reflected by the workpiece to be detected have a common light path, so that the third beam splitter has high mounting and adjusting precision, thereby the mounting and adjusting method can effectively improve the mounting and adjusting precision of the optical equipment.

[0128] In another embodiment of the present application, in order to avoid the volume of the optical equipment being too large, the optical equipment further comprises a third beam splitter for making the transmission light path of the light signal emitted by the light emitting element and the light signal reflected by the workpiece to be detected the same, and the mounting and adjusting method further comprises: Figure 8 As shown, a fourth light spot monitoring element 14 is disposed on the common light path after the third beam splitter 63; the fourth light spot monitoring element 14 monitors the light spots of the first test light signal and the second test light signal at a plurality of positions on the common light path; according to the monitored light spots of the first test light signal and the second test light signal, the included angle between the third beam splitter 63 and the light path center axis is adjusted so that the monitored light spots of the first test light signal and the second test light signal at the plurality of positions coincide, that is, the third beam splitter 60 can make the first test light signal and the second test light signal have the same transmission light path.

[0129] According to the principle of optical path reversibility, when the optical device is detected, the third beam splitter adjusted by the adjusting method can make the light signal emitted by the light emitting element and the light signal reflected by the workpiece to be detected exist in the common optical path, so that the third beam splitter has higher adjustment accuracy, thereby the adjusting method can effectively improve the adjustment accuracy of the optical device. It should be noted that the fourth light spot monitoring element is only arranged on the common optical path after the third beam splitter when the third beam splitter is adjusted, and is removed from the common optical path after the adjustment.

[0130] Optionally, in an embodiment of the present application, the fourth light spot monitoring element can be a beam profiler or an imaging detector (Charge-coupled Device, referred to as CCD) or a light spot shielding plate, and the third beam splitter can be a half-transmission half-reflection mirror, but the present application does not limit this, and the specific conditions are determined accordingly. Moreover, in an embodiment of the present application, the plurality of fifth diaphragms includes two fifth diaphragms, but the present application does not limit this, and the specific conditions are determined accordingly.

[0131] It should be noted that when the third beam splitter is a half-transmission half-reflection mirror, adjusting the included angle between the third beam splitter and the optical path center axis is adjusting the included angle between the half-transmission half-reflection surface of the half-transmission half-reflection mirror and the optical path center axis.

[0132] On the basis of any of the above embodiments, in an embodiment of the present application, as shown in Figure 9 The optical device includes a detection system 200, the detection system includes an objective lens 201, a plurality of detectors 202, a plurality of light emitting assemblies 203, a first optical element 204 corresponding to each of the plurality of detectors 202, and a second optical element 205 corresponding to each of the plurality of light emitting assemblies 203. The adjusting method provided in the embodiment of the present application can also be used to adjust each element in the detection system of the optical device. It should be noted that the specific process of the adjusting method has been described in detail in any of the above embodiments, and will not be repeated here.

[0133] It should be noted that, in the assembling method, the light outlet position of the first test light source is adjusted first, and then the first optical element is adjusted; in the process of adjusting the first optical element, the position of each first optical element is adjusted and / or the included angle between each first optical element and the optical path center axis is adjusted in the direction opposite to the propagation direction of the outgoing light of the optical equipment; the light outlet position of the second test light source is adjusted, and then the second optical element is adjusted; in the process of adjusting the second optical element, the position of each second optical element is adjusted and / or the included angle between each second optical element and the optical path center axis is adjusted in the propagation direction of the incident light of the optical equipment.

[0134] Correspondingly, the embodiment of the present application provides an assembling system applied to an optical equipment, the optical equipment comprising a mounting plate, a first optical element and a detector, the detector being used for detecting outgoing light of a workpiece to be measured through the first optical element, the mounting plate having an optical route map of the optical equipment, the optical route map comprising an optical path center axis and a first optical element position and a detector position on the optical path center axis, the assembling system comprising: a first mounting module, when the optical equipment is assembled, the first mounting module being used for mounting a first test light source at the detector position and mounting the first optical element at the first optical element position; and a first assembling module, when the optical equipment is assembled, the first assembling module being used for assembling the detector or the first optical element based on a transmission optical path of a light signal emitted by the first test light source and the optical path center axis.

[0135] Specifically, in one embodiment of the present application, the optical equipment comprises a detector, the first optical element comprises a reflecting element, a beam splitter, a beam combiner, a lens group and the like, the first assembling module of the assembling system comprises a plurality of diaphragms and a first light spot monitoring unit, the optical centers of the plurality of diaphragms are located on the optical path center axis, and the assembling system can assemble the detector and the optical element by using the first mounting module and the first assembling module. It should be noted that the assembling system is used for implementing the assembling step of the assembling method of any one of the above-mentioned embodiments, and the process of assembling the detector and the first optical element has been described in detail in the above-mentioned embodiments, which will not be repeated here.

[0136] In the above embodiment, in an embodiment of the present application, the optical device further comprises a light-emitting assembly and a second optical element, the optical route map further comprises a light-emitting assembly position and a second optical element position, the light-emitting assembly is configured to emit an incident light signal to the workpiece to be measured through the second optical element, the alignment system further comprises: a second mounting module, when the optical device is aligned, the second mounting module is configured to mount a second test light source at the light-emitting assembly position and mount the second optical element at the second optical element position; and a second alignment module, when the optical device is aligned, the second alignment module is configured to align the light-emitting assembly or the second optical element based on a transmission light path of the light signal emitted by the second test light source and the optical path central axis.

[0137] Specifically, in an embodiment of the present application, the optical device comprises a light-emitting assembly and a second optical element, the alignment system comprises a plurality of diaphragms and a second light spot monitoring unit, the optical centers of the plurality of diaphragms are located on the optical path central axis, and the alignment system is capable of aligning the light-emitting assembly and the second optical element by using the second mounting module and the second alignment module. It should be noted that the alignment system is used to implement the alignment steps of the alignment method described in any of the above embodiments for aligning the optical device, and the alignment process of the light-emitting assembly and the second optical element has been described in detail in the embodiments of the alignment method, which will not be described here.

[0138] In the above embodiment, in an embodiment of the present application, the second optical element comprises a third beam splitter, the third beam splitter is configured to reflect the light signal emitted by the light-emitting assembly to a common light path and transmit the light signal passing through the workpiece to be measured along the common light path, or the third beam splitter is configured to transmit the light signal emitted by the light-emitting assembly along the common light path and reflect the light signal passing through the workpiece to be measured to the common light path, wherein the common light path is a common light path of the light signal emitted by the light-emitting assembly and the light signal passing through the workpiece to be measured, and the alignment system can align the third beam splitter by using the first mounting module, the first alignment module, the second mounting module and the second alignment module. It should be noted that the alignment system is used to implement the steps of the alignment method described in any of the above embodiments for aligning the optical device, and the specific process of aligning the third beam splitter has been described in detail in the embodiments of the alignment method, which will not be described here.

[0139] In summary, the embodiment of the present application provides an optical equipment adjustment method and an adjustment system for implementing the adjustment method. The adjustment method comprises the following steps: providing a first test light source, mounting the first test light source at the detector position, and mounting a first optical element at the first optical element position; emitting a first test light signal to the first optical element through the first test light source, and adjusting the detector and / or the first optical element based on the transmission light path of the first test light signal and the optical path central axis. The adjustment of the first test light source is to make the transmission light path of the first test light signal emitted by the first test light source transmit along the optical path central axis, so as to complete the adjustment of the detector. The adjustment of the first optical element is to make the first test light signal transmit along the optical path central axis after passing through the first optical element, so as to complete the adjustment of the first optical element.

[0140] In summary, when the adjustment method provided by the embodiment of the present application is used to adjust the optical equipment, the transmission light path of the first test light signal and the optical path central axis are used to adjust the detector and the first optical element. According to the principle of optical path reversibility, when the optical equipment adjusted by the adjustment method is detected, the detection light signal in the optical equipment will be detected by the detector through the first optical element, so that the detector and the first optical element have high adjustment accuracy, thereby the adjustment method can effectively improve the adjustment accuracy of the optical equipment.

[0141] In addition, compared with the existing adjustment method for detecting the imaging system by using the inherent light source of the detection system in the optical equipment, the adjustment method can realize independent and accurate adjustment of the imaging system, avoid the influence of the installation accuracy of the detection system in the optical equipment on the installation accuracy of the imaging system in the optical equipment, effectively improve the adjustment accuracy of the imaging system in the optical equipment, and further help to improve the adjustment accuracy of the optical equipment, so that the adjustment method can effectively improve the adjustment accuracy of the optical equipment and help to ensure the detection accuracy when the semiconductor device is detected by using the optical equipment.

[0142] In the present specification, each part is described in a parallel and progressive manner, and each part mainly explains the difference from other parts. The same or similar parts can be referred to each other.

[0143] Having described above several embodiments of the disclosure, features of the various embodiments described in this specification can be combined with each other, or substituted for each other or combined with each other, to realize or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An alignment method of an optical device, characterized by, The optical device comprises a mounting plate, a first optical element and a detector for detecting outgoing light of a workpiece to be detected through the first optical element, the mounting plate has an optical route map of the optical device thereon, the optical route map comprises a light path central axis and a first optical element position and a detector position on the light path central axis, and the mounting method comprises the following steps: a first test light source is provided and installed at the detector position; the first optical element is installed at the first optical element position; a first test light signal is emitted to the first optical element by the first test light source installed at the detector position, and the detector and / or the first optical element are adjusted based on a transmission light path of the first test light signal and the light path central axis, a receiving port position of the detector is the position of an outgoing port of the first test light source after adjustment, and a position of the first optical element is the position of the first optical element after adjustment; the adjustment of the detector and / or the first optical element based on the transmission light path of the first test light signal and the light path central axis comprises: a plurality of first light barriers are arranged along the transmission light path of the first test light signal, and optical centers of the plurality of first light barriers are located on the light path central axis; the outgoing port position of the first test light source and / or the first optical element position are adjusted so that the first test light signal passes through the plurality of first light barriers.

2. The method of aligning according to claim 1, wherein, the first optical element position comprises a reflective element position, and the first optical element comprises a reflective element for changing the transmission light path of the first test light signal; the installation of the first optical element at the first optical element position comprises the installation of the reflective element at the reflective element position; the step of adjusting the detector and / or the first optical element based on the transmission light path of the first test light signal and the light path central axis comprises: the outgoing port position of the first test light source and / or the reflective element position are adjusted so that the first test light signal passes through the plurality of first light barriers.

3. The method of aligning according to claim 1, wherein, the first optical element position further comprises a lens group position, and the first optical element further comprises a lens group, the lens group being used to converge light signals passing through the lens group to the detector when the optical device detects a workpiece; the installation of the first optical element at the first optical element position comprises the installation of the lens group at the lens group position; the step of adjusting the first optical element based on the transmission light path of the first test light signal and the light path central axis comprises: a first light spot monitoring element is arranged on the transmission light path of the first test light signal after the lens group; light spot sizes of the first test light signal are monitored at a plurality of positions on the transmission light path of the first test light signal by the first light spot monitoring element, and a plurality of first light spot sizes are obtained. Adjusting the position of the lens group according to the plurality of first spot sizes so that the plurality of first spot sizes are the same.

4. The method of aligning according to claim 1, wherein, The first optical element position further comprises a lens group position, and the first optical element further comprises a lens group; Mounting the first optical element at the first optical element position comprises mounting the lens group at the lens group position; The step of adjusting the first optical element based on the transmission optical path of the first test light signal and the optical path central axis comprises: A first spot monitoring element is arranged on the transmission optical path of the first test light signal after the lens group; Adjusting the light outlet position of the first test light source so that the first test light signal emitted by the first test light source passes through the plurality of first diaphragms, and monitoring the spot size of the first test light signal at a plurality of positions on the transmission optical path of the first test light signal by the first spot monitoring element to obtain a plurality of first spot sizes; Adjusting the position of the lens group according to the plurality of first spot sizes so that the plurality of first spot sizes are the same.

5. The method of aligning according to claim 3, wherein, The first spot monitoring element is a beam quality analyzer or an imaging detector, and monitoring the spot size of the first test light signal by the first spot monitoring element comprises monitoring the spot size of the first test light signal at a plurality of positions on the transmission optical path of the first test light signal by the first spot monitoring element, and determining whether the plurality of first spot sizes are the same; Or, the first spot monitoring element is a spot blocking piece, and monitoring the spot size of the first test light signal by the plurality of first spot monitoring elements comprises monitoring the spot size of the first test light signal at a plurality of positions on the transmission optical path of the first test light signal by the first spot monitoring element, and determining whether the plurality of first spot sizes are the same by the human eye.

6. The method of aligning according to claim 5, wherein, Monitoring the spot size of the first test light signal at a plurality of positions on the transmission optical path of the first test light signal by the first spot monitoring element comprises: A first beam splitter is arranged on the transmission optical path of the first test light signal after the lens group, and the first test light signal is divided into a plurality of sub-test light signals by the first beam splitter; The spot size of each sub-test light signal is monitored by the first spot monitoring element, wherein the first spot monitoring element monitors the plurality of sub-test light signals, and the optical path of different sub-test light signals to the first spot monitoring element is different.

7. The method of aligning according to claim 5, wherein, Monitoring the spot size of the first test light signal at a plurality of positions on the transmission optical path of the first test light signal by the first spot monitoring element comprises: The first spot monitoring element is arranged at the first position, and the spot size of the first test light signal at the first position is monitored by the first spot monitoring element to obtain the first spot size at the first position; After the step of monitoring the spot size of the first test light signal at the first position by the first spot monitoring element, the first spot monitoring element is arranged at a second position, the spot size of the first test light signal at the second position is monitored by the first spot monitoring element, and the first spot size at the second position is obtained; The first position and the second position are both located on the transmission light path of the first test light signal, and the arrangement direction from the second position to the first position is opposite to the transmission direction of the first test light signal, or the first spot monitoring element at the first position is removed before the step of monitoring the spot size of the first test light signal at the second position by the first spot monitoring element.

8. The method of aligning according to claim 1, wherein, The optical layout includes a plurality of detector positions, the first optical element position includes a second beam splitter position, the optical device includes a plurality of detectors, the first optical element includes a second beam splitter, and when the optical device detects a workpiece to be measured, the second beam splitter is used to divide the light signal incident on the second beam splitter into a plurality of sub-light signals, and the plurality of detectors are used to detect the plurality of sub-light signals through the second beam splitter. The step of installing the first test light source at the detector position includes: providing a plurality of first test light sources, and installing the plurality of first test light sources at the plurality of detector positions, respectively. The step of installing the first optical element at the first optical element position includes: installing the second beam splitter at the second beam splitter position. The step of adjusting the first optical element based on the transmission light path of the first test light signal and the optical path central axis includes: arranging a plurality of second diaphragms, the plurality of second diaphragms are arranged on the transmission light path of the first test light signal after the second beam splitter, and the optical centers of the plurality of second diaphragms are located on the optical path central axis; and adjusting the included angle between the second beam splitter and the optical path central axis, so that the plurality of first test light signals after the second beam splitter all pass through the plurality of second diaphragms.

9. The method of setting up according to claim 8, characterized in that, The step of adjusting the first optical element based on the transmission light path of the first test light signal and the optical path central axis includes: A second spot monitoring element is arranged on the transmission light path of the first test light signal after the second beam splitter; The second spot monitoring element is used to monitor the spot of the first test light signal at a plurality of positions on the transmission light path of the plurality of first test light signals; According to the monitored spot of the first test light signal, the included angle between the second beam splitter and the optical path central axis is adjusted, so that the monitored spots of the first test light signal at the plurality of positions coincide.

10. The method of aligning according to claim 1, wherein, The optical device further includes a light emitting assembly and a second optical element, the optical layout further includes a light emitting assembly position and a second optical element position, the light emitting assembly is used to emit an incident light signal to the workpiece to be measured through the second optical element, and the adjustment method further includes: providing a second test light source, and mounting the second test light source at the light emitting component position; mounting the second optical element at the second optical element position; emitting a second test light signal from the second test light source to the second optical element; adjusting the light emitting component and / or the second optical element based on the transmission path of the second test light signal and the optical path central axis.

11. The method of aligning according to claim 10, wherein, The step of adjusting the light emitting component and / or the second optical element based on the transmission path of the second test light signal and the optical path central axis comprises: disposing a plurality of third light stops along the transmission path of the second test light signal, optical centers of the plurality of third light stops being located on the optical path central axis; adjusting the light emitting port position of the second test light source and / or the position of the second optical element so that the second test light signal passes through the plurality of third light stops.

12. The method of aligning according to claim 10, wherein, The optical device comprises a plurality of light emitting components, the second optical element comprises a beam combiner for combining light signals emitted by the plurality of light emitting components so that the light signals emitted by the plurality of light emitting components are transmitted along the same path, and the optical path map comprises a plurality of light emitting component positions and a beam combiner position; mounting the second test light source at the light emitting component position comprises: providing a plurality of second test light sources, and mounting the plurality of second test light sources at the plurality of light emitting component positions respectively; mounting the second optical element at the second optical element position comprises: mounting the beam combiner at the beam combiner position; The step of adjusting the second optical element based on the transmission path of the second test light signal and the optical path central axis comprises: disposing a plurality of fourth light stops on the transmission path of the second test light signal after the beam combiner, and optical centers of the plurality of fourth light stops being located on the optical path central axis; adjusting the included angle between the beam combiner and the optical path central axis so that the plurality of second test light signals after the beam combiner all pass through the plurality of fourth light stops.

13. The method of aligning according to claim 12, wherein, The step of adjusting the second optical element based on the transmission path of the second test light signal and the optical path central axis comprises: disposing a third light spot monitoring element on the transmission path of the second test light signal after the beam combiner; monitoring the light spots of the second test light signal at a plurality of positions on the transmission path of the plurality of second test light signals by the third light spot monitoring element; adjusting the included angle between the beam combiner and the optical path central axis according to the monitored light spots of the second test light signal so that the monitored light spots of the second test light signal at the plurality of positions coincide.

14. The method of aligning according to claim 12, wherein, The second optical element position further comprises a third beam splitter position, the second optical element comprises a third beam splitter, when the optical device detects a workpiece to be detected, the third beam splitter is used for reflecting the light signal emitted by the light emitting assembly to a common light path and transmitting the light signal passing through the workpiece to be detected along the common light path, or the third beam splitter is used for transmitting the light signal emitted by the light emitting assembly along the common light path and reflecting the light signal passing through the workpiece to be detected to the common light path, wherein the common light path is a common light path of the light signal emitted by the light emitting assembly and the light signal passing through the workpiece to be detected; The mounting of the second optical element in the second optical element position comprises mounting the third beam splitter in the third beam splitter position; The mounting and adjusting method further comprises: A plurality of fifth diaphragms are arranged on the common light path after the third beam splitter, wherein the common light path is a common light path of the first test light signal and the second test light signal, and optical centers of the plurality of fifth diaphragms are located on the light path center axis; An included angle between the third beam splitter and the light path center axis is adjusted, so that the first test light signal and the second test light signal after the third beam splitter both pass through the plurality of fifth diaphragms; Or, The mounting and adjusting method further comprises: A fourth light spot monitoring element is arranged on the common light path after the third beam splitter; Light spots of the first test light signal and the second test light signal are monitored at a plurality of positions on the common light path by the fourth light spot monitoring element; According to the monitored light spots of the first test light signal and the second test light signal, the included angle between the third beam splitter and the light path center axis is adjusted, so that the monitored light spots of the first test light signal and the second test light signal at the plurality of positions coincide.

15. An adjustment system characterized by The mounting and adjusting method of any one of claims 1-14 is used for mounting and adjusting an optical device based on the mounting and adjusting system, the optical device comprises a mounting plate, a first optical element and a detector, the detector is used for detecting outgoing light of a workpiece to be detected through the first optical element, the mounting plate has an optical route map of the optical device, the optical route map comprises a light path center axis and a first optical element position and a detector position on the light path center axis, and the mounting and adjusting system comprises: A first mounting module, when the optical device is mounted and adjusted, the first mounting module is used for mounting a first test light source at the detector position and mounting the first optical element at the first optical element position, so that the first test light source mounted at the detector position emits a first test light signal to the first optical element; The first installation module is configured to install the first test light source at the first test light source position and install the first optical element at the first optical element position.

16. The rigging system of claim 15, wherein, The optical device further comprises a light emitting assembly and a second optical element, and the optical route map further comprises a light emitting assembly position and a second optical element position, the light emitting assembly being configured to emit an incident light signal to the workpiece to be measured through the second optical element, and the installation system further comprises: The second installation module is configured to install the second test light source at the light emitting assembly position and install the second optical element at the second optical element position. The second installation module is configured to install the second test light source at the light emitting assembly position and install the second optical element at the second optical element position. The second installation module is configured to install the second test light source at the light emitting assembly position and install the second optical element at the second optical element position.

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