Scraper mechanism, film stripper and method of lifting film stock edges

Abstract

Scraper mechanism, film stripper and method for lifting off a film edge. A scraper mechanism for a film stripper comprises a scraper and a movement assisting element. The scraper is tapered at the end in the direction of extension. The movement assisting element is arranged adjacent to the scraper.

Description

TECHNICAL FIELD

[0001] The present invention relates to a doctor blade mechanism, in particular, a doctor blade mechanism of a film stripping machine and a method of lifting an edge of a film attached to a substrate using the same. BACKGROUND

[0002] Currently, in the industry of semiconductor or electronic components, a film (e.g. Mylar film) is attached to a substrate in some processes to prevent dust from adhering, to achieve electrostatic protection or to prevent contact with air. Nowadays, automated machines are commonly used to tear off the film attached to the substrate. Since the film of some products is very thin and highly adhesive, tearing off the film directly can leave residue or even damage the electronic components on the surface of the substrate. Therefore, for products with such characteristics, the corners of the film are lifted first, and then the entire film is torn off.

[0003] Currently, the tools commonly used in the industry to lift the corners of the film are knurl wheels and doctor blades. For highly adhesive films, the effect of lifting the corners of the film using knurl wheels is not good. Although the method of lifting the corners of the film using a doctor blade can meet the needs of most products, the problem of easily scratching the surface of the substrate is faced. SUMMARY

[0004] The present invention is to provide a doctor blade mechanism to help solve the problem of the method of lifting the corners of the film using a doctor blade currently used, which easily scratches the surface of the substrate.

[0005] The doctor blade mechanism disclosed in the present invention comprises a doctor blade and at least one movement assisting element. The doctor blade forms a tapered portion at the end along the extension direction. The movement assisting element is arranged adjacent to the doctor blade.

[0006] The film stripping machine disclosed in the present invention comprises a substrate stage and a doctor blade mechanism, and the doctor blade mechanism is arranged corresponding to the substrate stage. The doctor blade mechanism comprises a carrier, a doctor blade and at least one movement assisting element. The doctor blade is arranged on the carrier. The movement assisting element is arranged on the carrier adjacent to the doctor blade, and the carrier can drive the doctor blade and the movement assisting element to move together.

[0007] The method of lifting the edge of the film attached to the substrate disclosed in the present invention comprises: placing the substrate with the film attached thereon on the substrate stage of the aforementioned film stripping machine; abutting the movement assisting element of the doctor blade mechanism against the substrate or the film; driving the carrier of the doctor blade mechanism to move relative to the substrate, so that the doctor blade extends into between the substrate and the film or between two film layers of the film, thereby lifting the edge of the film.

[0008] The doctor blade mechanism disclosed in the present invention comprises a carrier, a doctor blade and at least one movement assisting element. The carrier comprises a main body and a secondary body, and the secondary body is movably arranged on the main body. The doctor blade is arranged on the secondary body. The movement assisting element is arranged on the main body adjacent to the doctor blade.

[0009] According to the disclosed blade mechanism, film stripping machine and method for lifting the edge of a film from a substrate, the film stripping machine comprises a blade mechanism, and the blade mechanism comprises a moving auxiliary element and a blade disposed adjacent to the moving auxiliary element. In addition, according to the disclosed method for lifting the edge of a film from a substrate, the moving auxiliary element of the blade mechanism is first abutted against the substrate or the film, and then the blade and the moving auxiliary element are moved to extend into the space between the substrate and the film, and the edge of the film is lifted. In this way, the height of the blade is maintained by abutting the moving auxiliary element against the substrate or the film, and the tapered portion of the blade is aligned with the interface between the substrate and the film adhered to each other, so that the substrate and the film can be prevented from being scratched when the blade extends.

[0010] The above description and the following description of embodiments are intended to demonstrate and explain the spirit and principle of the present application, and to further explain the claims of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 A schematic view of a film stripping machine according to an embodiment of the present application.

[0012] Figure 2 A perspective view of a blade mechanism. Figure 1

[0013] Figure 3 A front view of a blade mechanism. Figure 2

[0014] A schematic view of a film stripping machine using the blade mechanism. Figures 4 to 7 Figure 1 A schematic view of a film stripping machine using the blade mechanism.

[0015] Figure 8 A schematic view of a blade mechanism according to another embodiment of the present application.

[0016] Figure 9 Figure 8 A front view of a blade mechanism.

[0017] Figures 10 to 13 A schematic view of a film stripping machine using the blade mechanism. Figure 8 DETAILED DESCRIPTION

[0018] The detailed features and advantages of the present application are described in detail in the embodiments below, which are sufficient for those skilled in the art to understand the technical content of the present application and to implement it. According to the content disclosed in the specification, claims and drawings, those skilled in the art can easily understand the related purposes and advantages of the present application. The following embodiments further illustrate the ideas of the present application, but do not limit the scope of the present application in any way.

[0019] Please refer to​​​​Figure 1 This is a schematic diagram of a film peeling machine according to an embodiment of the present invention. In this embodiment, the film peeling machine 1 includes a substrate carrier 10, a scraper mechanism 20, and a film peeling device 30.

[0020] The substrate stage 10 is, for example, but not limited to, a metal stage with vacuum suction holes formed on its surface, used to support the substrate. The substrate can be stably adsorbed by the vacuum suction holes of the substrate stage 10.

[0021] The scraper mechanism 20 is disposed corresponding to the substrate stage 10, and includes a support 210, a scraper 220, and a movement auxiliary element 230. In this embodiment, the scraper mechanism 20 is mounted on a robotic arm (not shown) and is normally located above the substrate stage 10. The scraper 220 and the movement auxiliary element 230 are disposed on the support 210, and the movement auxiliary element 230 is disposed adjacent to the scraper 220. Furthermore, the scraper 220 is fixed to the support 210, and the movement auxiliary element 230 is pivotally disposed on the support 210. The scraper mechanism 20 of this embodiment includes two movement auxiliary elements 230, but the number of movement auxiliary elements 230 is not intended to limit the invention.

[0022] The central axis of the moving auxiliary element 230 is not substantially intersecting the extending direction of the scraper 220. Please refer to [the relevant documentation / reference]. Figure 2 ,for Figure 1 A schematic diagram of the scraper mechanism. The scraper 220 forms a tapered portion 221 at its end along the extending direction D, and the central axis A of the moving auxiliary element 230 is substantially parallel to the extending direction D of the scraper 220. At the tapered portion 221, the thickness of the scraper 220 gradually decreases towards the end. In this embodiment, the moving auxiliary element 230 is a roller, and the central axis A is the roller's pivot, but the invention is not limited thereto. In other embodiments, the moving auxiliary element can be a component made of a material with a low coefficient of friction or good self-lubricating properties, such as Teflon sheet, polyoxymethylene (POM) bumps, etc.

[0023] The film peeling device 30 is set to correspond to the substrate stage 10. Figure 1 and Figure 2 The illustrated film-peeling device 30 includes tape movement assist elements as an example, but the invention is not limited thereto. In other embodiments, the film-peeling device 30 may include suction cups or grippers.

[0024] Please refer to Figure 3 ,for Figure 2A front view of the scraper mechanism. In this embodiment, in the vertical direction H of the vertical displacement, the tapered portion 221 of the scraper 220 is flush with the bottom of the moving auxiliary element 230. Furthermore, in the vertical direction H of the vertical displacement, the two moving auxiliary elements 230 are positioned at the same height, and the tapered portion 221 of the scraper 220 is located between the two moving auxiliary elements 230. In some embodiments, in the vertical direction of the vertical displacement, the tapered portion of the scraper may be slightly lower than the bottom of the moving auxiliary element.

[0025] The following describes the process of the film peeling machine removing the film from the substrate. Please refer to this description. Figures 4 to 7 ,use Figure 1 A schematic diagram of a film peeling machine removing film from a substrate. (See diagram) Figure 4 As shown, a substrate 40 with a film 41 attached to its surface is placed on a substrate stage 10 of a film peeling machine. The substrate 40 is, for example, but not limited to, a printed circuit board, a silicon wafer, or a glass substrate, and the film 41 is, for example, but not limited to, an ABF film, an adhesive film, or a polyester (PET) film. The film 41 can be a single-layer film (i.e., a single film material) or a multi-layer film structure (i.e., multiple films stacked, such as a stack of Mylar film layers and ABF film layers).

[0026] After the substrate 40 is placed on the substrate stage 10, the moving auxiliary element 230 of the scraper mechanism 20 is pressed against the substrate 40. Figure 5 As shown, the support 210 of the scraper mechanism 20 can be driven by a motor (not shown) or manually to move the scraper 220 and the moving auxiliary element 230 together, thereby approaching the upper surface of the substrate 40. Furthermore, the upper surface of the substrate 40 can be divided into a central region 40a covered by the film 41 and an edge region 40b not covered by the film 41, and the moving auxiliary element 230 of the scraper mechanism 20 can abut against the edge region 40b of the upper surface of the substrate 40. When the moving auxiliary element 230 abuts against the upper surface of the substrate 40, the tapered portion 221 of the scraper 220 can precisely correspond to the interface where the substrate 40 and the film 41 adhere.

[0027] After the moving auxiliary element 230 of the scraper mechanism 20 abuts against the substrate 40, it drives the support seat 210 of the scraper mechanism 20 to move relative to the substrate 40, so that the edge of the film 41 separates from the substrate 40. Figure 6As shown, the carrier 210 moves along a direction orthogonal to the central axis of the movement assisting element 230, and more particularly, along the edge of the film material 41. When the carrier 210 moves relative to the substrate 40 and the substrate stage 10, the movement assisting element 230 of the scraper mechanism 20 rolls on the upper surface of the substrate 40, and the scraper 220 extends into the space between the substrate 40 and the film material 41. As a result of the penetration of the scraper 220, the edge of the film material 41 separates from the substrate 40, i.e. a small portion of the edge of the film material 41 is torn off, while the remaining portion of the film material 41 still adheres to the upper surface of the substrate 40.

[0028] Next, the film material is completely torn off the substrate using the film stripping device 30. As shown, Figure 7 the film stripping device 30 (adhesive tape roller) adheres to the small portion of the film material 41 that has been separated from the substrate 40, and the film stripping device 30 moves relative to the substrate 40, thereby continuously separating the film material 41 from the substrate 40 along the moving direction of the film stripping device 30. The small portion of the film material 41 that has been separated from the substrate 40 can serve as a force application point of the film stripping device 30 and become the starting position of the film stripping operation, which helps to complete the film stripping operation more quickly and improve the film stripping quality. In the embodiment in which the film stripping device 30 comprises a suction cup, the small portion of the film material 41 that has been separated from the substrate 40 can be adsorbed by the suction cup. In the embodiment in which the film stripping device 30 comprises a gripper, the corner portion of the small portion of the film material 41 that has been separated from the substrate 40 can be gripped by the gripper.

[0029] The present embodiment discloses using Figure 1 the film stripping machine 1 to separate the film material 41 from the substrate 40, but the present application is not limited thereto. In other embodiments, in the case where the film material 41 comprises a multi-layer film structure, the film stripping machine 1 can be used to separate two film layers in the multi-layer film structure. That is, the scraper 220 can extend into the space between the two film layers of the film material 41, and as a result of the penetration of the scraper 220, the two film layers are separated.

[0030] Please refer to Figure 8 and Figure 9 , wherein Figure 8 is a schematic view of a scraper mechanism according to another embodiment of the present application, Figure 9 is Figure 8 a front view of the scraper mechanism in . In the present embodiment, the scraper mechanism 20A of the film stripping machine comprises a carrier 210A, a scraper 220 and a movement assisting element 230. The carrier 210A comprises a main body 211 and a secondary body 212, and the secondary body 212 is movably arranged on the main body 211.

[0031] The scraper 220 is disposed on the sub-body 212, and the movement assisting elements 230 are disposed on the main body 211, and the movement assisting elements 230 are disposed adjacent to the scraper 220. Further, the scraper 220 is fixed on the sub-body 212, and the movement assisting elements 230 are pivotally disposed on the main body 211. The scraper mechanism 20A of the present embodiment includes two movement assisting elements 230, but the number of movement assisting elements 230 is not intended to limit the present application. In addition, the main body 211 of the present embodiment has a groove 213 extending from the bottom. The sub-body 212 is movably disposed in the groove 213, and the groove 213 is between the two movement assisting elements 230.

[0032] The central axis of the movement assisting elements 230 is substantially not intersected with the extending direction of the scraper 220. The scraper 220 has a tapered portion 221 at the end along the extending direction D, and the central axis A of the movement assisting elements 230 is substantially parallel to the extending direction D of the scraper 220. At the tapered portion 221, the thickness of the scraper 220 gradually decreases toward the end. In the present embodiment, the movement assisting elements 230 are rollers pivotally disposed on the carrier 210A, and the central axis A is the rotation axis of the rollers, but the present application is not limited thereto. In other embodiments, the movement assisting elements can be elements made of materials with low friction coefficient or good self-lubricating property, such as Teflon plate, polyoxymethylene (POM) block, etc. In addition, in the vertical direction H of the upward and downward displacement, the tapered portion 221 of the scraper 220 is slightly lower than the bottom of the movement assisting elements 230, but in other embodiments, the tapered portion of the scraper can be at the same level as the bottom of the movement assisting elements 230.

[0033] Figures 10 to 13 To use Figure 8 the scraper mechanism to peel the film material from the substrate. As shown in Figure 10 and Figure 11 , after the substrate 40 is placed on the substrate stage, the main body 211 of the carrier 210A is driven to descend by a motor (not shown) or manually operated, so that the movement assisting elements 230 of the scraper mechanism 20A abut against the upper surface of the film material 41 adhered to the substrate 40. When the movement assisting elements 230 abut against the upper surface of the film material 41, the scraper 220 can be just corresponding to the junction between the substrate 40 and the film material 41.

[0034] As shown in Figure 12 , the sub-body 212 of the carrier 210A moves relative to the main body 211 along the direction parallel to the central axis (or along the extending direction of the scraper 220). The sub-body 212 moves to bring the scraper 220 close to the substrate 40 and the film material 41, and to make the scraper 220 extend into the space between the substrate 40 and the film material 41. Then, as shown in Figure 13As shown, the main body 211 of the carrier 210A moves along a direction orthogonal to the central axis of the moving auxiliary element 230 on the film material 41, and more specifically, along the edge of the film material 41. Figure 13 As shown, the main body 211 of the carrier 210A moves along a direction orthogonal to the central axis of the moving auxiliary element 230 on the film material 41, and more specifically, along the edge of the film material 41. Figure 12 As shown, the main body 211 of the carrier 210A moves along a direction orthogonal to the central axis of the moving auxiliary element 230 on the film material 41, and more specifically, along the edge of the film material 41.

[0035] The present embodiment discloses using the scraper mechanism 20A to lift the edge of the film material 41 from the substrate 40, but the present application is not limited thereto. In other embodiments, the film material 41 comprises a multi-layer film structure, and the scraper mechanism 20A can be used to separate two film layers in the multi-layer film structure. That is, the scraper 220 can be inserted between two film layers of the film material 41, and the two film layers are separated due to the insertion of the scraper 220. Figure 8 The present embodiment discloses using the scraper mechanism 20A to lift the edge of the film material 41 from the substrate 40, but the present application is not limited thereto. In other embodiments, the film material 41 comprises a multi-layer film structure, and the scraper mechanism 20A can be used to separate two film layers in the multi-layer film structure. That is, the scraper 220 can be inserted between two film layers of the film material 41, and the two film layers are separated due to the insertion of the scraper 220.

[0036] In summary, according to the scraper mechanism and the film stripping machine disclosed by the present application, the film stripping machine comprises a scraper mechanism. The scraper mechanism comprises a moving auxiliary element and a scraper arranged adjacent to the moving auxiliary element. In addition, according to the method for lifting the edge of the film material disclosed by the present application, the moving auxiliary element of the scraper mechanism is first abutted against the substrate, and then the scraper and the moving auxiliary element are moved to be inserted between the substrate and the film material or two film layers of the film material, thereby separating the edge of the film material from the substrate or the film layers. Since the central axis of the moving auxiliary element is substantially orthogonal to the moving direction of the scraper when the scraper lifts the edge of the film material, the moving auxiliary element can roll on the substrate. In this way, the height of the scraper in the vertical direction of the up-and-down displacement is maintained by abutting the moving auxiliary element against the substrate or the film material, and the tapered portion (or the blade) of the scraper is aligned with the junction between the substrate and the film material adhered thereto, so that the film material and the substrate can be prevented from being scratched when the scraper is inserted.

[0037] Although the present application is disclosed with the above-mentioned embodiments, it is not intended to limit the present application. Any modifications and improvements made without departing from the spirit and scope of the present application shall fall within the scope of the patent protection of the present application. For the scope of protection of the present application, please refer to the appended claims.

[0038]

Symbol Description

[0039] 1…Film stripping machine

[0040] 10…Substrate carrier

[0041] 20, 20A…Scraper mechanism

[0042] 210, 210A …… Carrying seat

[0043] 211 …… Main body

[0044] 212 …… Sub-body

[0045] 220 …… Scraper

[0046] 221 …… Tapered portion

[0047] 230 …… Movement assisting element

[0048] 231 …… Bottom portion

[0049] 30 …… Film peeling device

[0050] 40 …… Substrate

[0051] 40a …… Central region

[0052] 40b Edge region

[0053] 41 …… Film material

[0054] A …… Center axis

[0055] D …… Extension direction

[0056] H …… Up-down displacement vertical direction

Claims

1. A film stripper characterized by comprising: A substrate stage; A substrate comprising a film material placed on the substrate stage; and A scraper mechanism arranged corresponding to the substrate stage, the scraper mechanism comprising: A carrier; A scraper arranged on the carrier; and At least one moving auxiliary element arranged on the carrier and adjacent to the scraper, a central axis of the at least one moving auxiliary element is not intersected with an extending direction of the scraper, and the carrier can drive the scraper and the at least one moving auxiliary element to move together; Wherein the scraper forms a tapered portion at the end along the extending direction; Wherein when the carrier moves relative to the substrate, the moving auxiliary element rolls on the upper surface of the substrate, and the scraper extends into between the substrate and the film material or between two film layers of the film material.

2. The film stripping machine according to claim 1, wherein the central axis of the at least one moving auxiliary element is parallel to the extending direction of the scraper.

3. The film stripping machine according to claim 1, wherein the tapered portion of the scraper and the bottom of the at least one moving auxiliary element are flush in the vertical direction of up and down displacement.

4. The film stripping machine according to claim 1, wherein the tapered portion of the scraper is lower than the bottom of the at least one moving auxiliary element in the vertical direction of up and down displacement.

5. The film stripping machine according to claim 1, wherein the carrier comprises a main body and a secondary body, the secondary body is movably arranged on the main body.

6. The film stripping machine according to claim 5, wherein the central axis of the at least one moving auxiliary element is not intersected with the extending direction of the scraper.

7. The film stripping machine according to claim 6, wherein the central axis of the at least one moving auxiliary element is parallel to the extending direction of the scraper.

8. The film stripping machine according to claim 6, wherein the secondary body is movable relative to the main body along a direction parallel to the central axis of the at least one moving auxiliary element.

9. The film stripping machine according to claim 5, wherein the main body has a groove extending from the bottom, and the secondary body is arranged in the groove.

10. The film stripping machine according to claim 9, wherein the number of the at least one moving auxiliary element is two, and the groove of the main body is between the two moving auxiliary elements.

11. The film stripping machine according to claim 5, wherein the scraper forms a tapered portion at the end along the extending direction, and the tapered portion of the scraper is lower than the bottom of the at least one moving auxiliary element in the vertical direction of up and down displacement.

12. The film stripping machine according to claim 5, wherein the at least one moving auxiliary element is rotatably arranged on the main body of the carrier. Placing the substrate with the film material attached thereon on the substrate stage; 13. A method of lifting an edge of a film stock attached to a substrate using the film stripper of claim 1, wherein, Abutting the at least one moving auxiliary element of the scraper mechanism against the substrate or the film material; And Driving the carrier of the scraper mechanism to move relative to the substrate, so that the scraper extends into between the substrate and the film material or between two film layers of the film material, thereby lifting off the edge of the film material. When the carrier moves relative to the substrate, the at least one moving auxiliary element rolls on the substrate. When the carrier moves relative to the substrate, the at least one moving auxiliary element rolls on the film material.

14. The method of claim 13, wherein, ​ 15. The method of claim 13, wherein, ​ 16. The method of claim 13, wherein the carrier is moved along the edge of the film stock.

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