Device and method for batch polishing of workpieces

Abstract

A polishing device and method are provided. The device includes a polishing container (7) for containing a polishing liquid; a cover member (6) capable of closing the upper opening of the polishing container (7); a sun gear (4) rotatably fixed to the cover member (6); a plurality of planet gears (5) rotatably fixed to the cover member (6) and meshing with the sun gear (4); wherein the sun gear (4) and each planet gear (5) can be lifted and lowered. After the sun gear (4) and each planet gear (5) are lifted, the end of the rotation axis of each planet gear (5) can be detachably fixed to the workpiece to be polished; when the sun gear (4) and each planet gear (5) are lowered, the workpiece can be immersed in the polishing liquid in the polishing container (7); wherein when the sun gear (4) rotates, it drives each of the meshing planet gears (5) to rotate simultaneously, so that the workpiece (16) fixed to the end of the rotation axis of each planet gear (5) rotates in the polishing liquid, and thus is polished by the polishing liquid.

Description

Technical Field

[0001] The present invention relates to a polishing machine and a polishing method, and more particularly to a polishing device and method for batch high-precision polishing of multiple workpieces. Background Art

[0002] Optical elements or other workpieces with complex curved surfaces have a wide range of applications in the fields of biomedicine, aerospace, optical imaging, jewelry, etc. due to their superior optical and mechanical properties. The complex curved surfaces mentioned here include aspherical surfaces, curved surfaces with specific structures, and irregularly shaped surfaces. The polishing process of the surface of an optical element or workpiece is the last processing step for deburring, polishing, and grinding the surface of the workpiece, and plays an important role in determining the accuracy of the workpiece. The high-precision polishing process not only requires reducing the surface roughness (i.e., improving the surface smoothness), but also requires conformal polishing, that is, maintaining the shape accuracy of the workpiece surface unchanged, or even modifying the workpiece surface into the desired shape. In order to achieve precision polishing of complex surfaces, a variety of polishing processes have been proposed. Magnetic field-assisted polishing is a method widely used for deburring and surface finishing in recent decades.

[0003] However, the current magnetic field-assisted polishing process is mainly piece-by-piece precision polishing, which is difficult to be applied to batch polishing of complex surfaces and is not conducive to actual batch production. Although researchers have also developed new magnetic field-assisted polishing methods, there are still defects such as uneven polishing and changing the surface curvature of the workpiece to be polished. In addition, various new precision polishing methods have been proposed, including barrel finishing, vibratory finishing, centrifugal finishing, etc. But these methods also have problems of reducing the surface shape accuracy of the workpiece to be polished and being difficult to achieve high smoothness. Summary of the Invention

[0004] In view of the above-mentioned defects of the prior art, the inventors of the present invention have proposed a new device and method for magnetic field-assisted batch polishing, which can not only achieve batch polishing of complex curved surfaces, but also inherit the high-precision polishing characteristics of magnetic field-assisted polishing. This method can be used for polishing irregular curved surfaces such as artificial implants, turbine blades, and optical molds, and the inventors of the present application have also proposed a control method for uniformly removing surface materials to reduce the damage to the curved surface shape.

[0005] According to one aspect of the present invention, there is provided a polishing apparatus including a polishing container (7) for containing a polishing liquid and having an upper opening; a lid member (6) capable of closing the upper opening of the polishing container (7); a sun gear (4) rotatably fixed to the lid member (6); a plurality of planet gears (5) rotatably fixed to the lid member (6) and meshing with the sun gear (4); each planet gear (5) having a rotating shaft; and wherein the sun gear (4) and each planet gear (5) are capable of lifting and lowering, and after the sun gear (4) and each planet gear (5) are lifted, the end of the rotating shaft of each planet gear (5) can be detachably fixed to the workpiece to be polished; when the sun gear (4) and each planet gear (5) are lowered, the workpiece can be immersed in the polishing liquid in the polishing container (7); wherein when the sun gear (4) rotates, it drives each of the meshing planet gears (5) to rotate simultaneously, so that the workpiece (16) fixed to the end of the rotating shaft of each planet gear (5) rotates in the polishing liquid and is polished by the polishing liquid.

[0006] In a preferred embodiment, the polishing container (7) includes an annular outer wall and an annular inner wall concentrically arranged with the annular outer wall, and a bottom wall connecting the annular outer wall and the annular inner wall, so as to form a polishing chamber for containing the polishing liquid between the annular outer wall, the annular inner wall and the bottom wall; and wherein the polishing apparatus further includes a rotating table (14) and a pair of magnets fixed to the rotating table (14), one magnet (12) of each pair of magnets is arranged outside the annular outer wall of the polishing container (7), the other magnet (12) of each pair of magnets is arranged inside the annular inner wall of the polishing container (7), and the opposite magnetic poles of each pair of magnets face each other, so as to apply a magnetic field to the polishing liquid in the polishing container (7); wherein the polishing liquid contains magnetic particles.

[0007] In a preferred embodiment, the polishing apparatus further includes a first motor (A) for driving the sun gear (4) to rotate; a second motor (B) for driving the rotating table (14) and the magnet (12) to rotate along the annular outer wall or the annular inner wall of the polishing container (7).

[0008] According to another aspect of the present invention, there is provided a method for polishing a workpiece, including the steps of: fixing each workpiece (16) to be polished to a corresponding planet gear (5) meshing with the sun gear (4); immersing the workpiece (16) to be polished fixed to the planet gear (5) in the polishing liquid; rotating the sun gear (4) to drive a plurality of the planet gears (5) meshing with the sun gear (4) to rotate, so as to drive each workpiece (16) to rotate in the polishing liquid.

[0009] In one embodiment, the method for polishing a workpiece further includes applying a magnetic field to the polishing liquid by a magnet and driving the magnet to rotate; wherein, the polishing liquid contains magnetic particles, and when the magnet rotates, the magnetic particles are driven to move.

[0010] In a preferred embodiment, driving the magnet to rotate includes: driving the magnet to rotate at a speed of 50 to 5000 revolutions per minute.

[0011] In a preferred embodiment, driving each workpiece (16) to rotate itself in the polishing liquid includes driving each workpiece (16) to rotate itself alternately in two opposite directions.

[0012] In a preferred embodiment, driving each workpiece (16) to rotate itself in the polishing liquid includes driving each workpiece (16) to rotate itself in a certain direction by a certain arc, staying for a period of time, and then continuing to rotate itself in the same direction by the same arc.

[0013] In a preferred embodiment, driving each workpiece (16) to rotate itself in the polishing liquid includes driving each workpiece (16) to rotate itself in a certain direction by a certain arc, staying for a period of time, and then continuing to rotate itself in the opposite direction by the same arc. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The following describes in detail each embodiment of the present invention with reference to the accompanying drawings, and the accompanying drawings include: Figure 1 is a schematic diagram of related components for simultaneously rotating a plurality of workpieces in a polishing device according to an embodiment of the present invention;

[0015] Figure 2a is a longitudinal sectional schematic diagram of a polishing container according to an embodiment of the present invention, in which no polishing liquid is injected;

[0016] Figure 2b is Figure 2a a longitudinal sectional schematic diagram of the polishing container shown after injecting the polishing liquid;

[0017] Figure 3 is a top view schematic diagram of the magnet distribution according to an embodiment of the present invention;

[0018] Figure 4a 、 4b 、4c are schematic diagrams of different shapes of magnets in the present invention;

[0019] Figure 5 is a schematic perspective view of a polishing device according to an embodiment of the present invention;

[0020] Figure 6 is a schematic front view of a polishing device according to an embodiment of the present invention;

[0021] Figure 7Yes Figure 6 Longitudinal sectional view of the polishing device shown Detailed implementation manners

[0022] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the following further describes the present invention in detail through embodiments in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention

[0023] When polishing a workpiece (such as an optical lens) using a polishing liquid, the workpiece needs to be immersed in the polishing liquid, and the workpiece moves relative to the polishing particles in the polishing liquid, so that the polishing particles in the polishing liquid impact the surface of the workpiece to polish the surface of the workpiece. In the polishing process, the workpiece needs to be continuously rotated or swung to polish different surfaces of the workpiece, or to make the polishing particles in the polishing liquid impact the same part on the surface of the workpiece from different angles to remove the tiny protrusions on the surface of the workpiece and make the surface smooth. In order to polish multiple workpieces simultaneously in batches, it is necessary to make the multiple workpieces immersed in the polishing liquid rotate or swing simultaneously. For this reason, the inventor of the present invention designed a workpiece movement device

[0024] The following refers to Figure 1 introduces a workpiece movement device for simultaneously polishing multiple workpieces in an embodiment of the present invention

[0025] Figure 1 The device shown includes a central sun gear 4, and a plurality of planet gears 5 arranged around the sun gear 4 and meshing with the sun gear 4. The sun gear 4 and the plurality of planet gears 5 arranged around it are mounted on a substrate 6. In an embodiment of the present invention, the substrate 6 is the lid of a polishing container 7, that is, a lid member. The sun gear 4 is coupled to a motor (referred to herein as workpiece motor A, or the first motor, shown in Figure 3 、 5 ). The workpiece motor A is used to drive the rotation of each workpiece to be polished through the sun gear 4 and the plurality of planet gears 5. First, driven by the workpiece motor A, the sun gear 4 rotates, and then drives the plurality of planet gears 5 meshing with it to rotate

[0026] Refer again to Figure 1 , the rotation axis of each planet gear 5 extends downward through the lid member 6 of the polishing container 7, and each workpiece 16 to be polished is attached to the end of the rotation axis of the corresponding planet gear 5. When the planet gear 5 rotates, the workpiece 16 attached to the end of its rotation axis also rotates accordingly

[0027] After each workpiece 16 is attached to the end of the rotation axis of the planet gear 5 on the lower side of the lid member 6, the lid member 6 is moved downward so that the workpiece 16 enters the polishing container 7 (in Figure 2a 、2b As shown in (not shown), the polishing container 7 can be filled with a polishing liquid, and the workpiece 1 to be polished moves downward from above into the polishing liquid. In this way, driven by the workpiece motor A, the star gear 4 and each planetary gear 5 drive each workpiece 16 to rotate in the polishing liquid in the polishing container 7. It is easy to understand that the workpiece motor A can rotate alternately in two opposite directions (clockwise and counterclockwise), thereby driving each workpiece 16 to rotate in two opposite directions alternately in the polishing liquid in the polishing container 7.

[0028] Figure 2a 、 2b Fig. shows a longitudinal sectional view of the polishing container 7 in an embodiment of the present invention; Figure 2b It also shows the polishing liquid contained in the polishing container 7. Figure 2a The polishing liquid is not injected into the shown polishing container 7. In Figure 2a 、 2b In the shown embodiment, the polishing container 7 includes an annular outer wall, an annular inner wall and a bottom wall, and the annular outer wall and the annular inner wall are concentrically arranged. A chamber for containing the polishing liquid is defined between the annular outer wall, inside the annular inner wall and outside the annular inner wall and the bottom wall. In addition, the space inside the annular inner wall is used to accommodate other components such as magnets (described in detail below).

[0029] The upper part of the polishing container 7 has an opening. Figure 1 The cover member 6 in can cover the opening of the polishing container 7 to close the polishing container 7. As described above, each workpiece 16 is attached to the end of the rotating shaft of the planetary gear 5 on the lower side of the cover member 6. After the cover member 6 closes the upper opening of the polishing container 7, each workpiece 16 to be polished is immersed in the polishing liquid in the polishing container 7. Driven by the workpiece motor A, each workpiece 16 rotates in the polishing liquid through the star gear 4 and each planetary gear 5 for polishing.

[0030] In addition, in Figure 2a 、 2b In, the distance between the annular outer wall and the annular inner wall of the polishing container 7 is d (see Figure 2a ). Obviously, the transverse dimension of the workpiece 16 to be polished entering the polishing container 7 should be less than d. In Figure 2a 、 2b In, the above distance d remains constant from top to bottom, so that this part of the cross-section is rectangular, but the present invention is not limited thereto. The distance d can gradually increase from bottom to top, so that this part of the cross-section is trapezoidal or triangular in reverse. In addition, the above cross-section of the polishing container 7 can also be semi-circular or semi-elliptical, or any other shape convenient for accommodating the workpiece to be polished.

[0031] In Figure 2a 、 2bIn this case, a coolant passage for allowing coolant to flow through is formed in the annular outer wall of the polishing container 7. The coolant is used to cool down the polishing container 7 and the polishing liquid contained therein. However, this is not necessary.

[0032] In another embodiment, the coolant pipe is spirally wound around the outer surface of the annular outer wall of the polishing container 7, so that the coolant flows along the spiral coolant pipe, thereby cooling down the polishing container 7.

[0033] In another embodiment, instead of using a coolant pipe, at least one coolant spray head may be arranged outside the annular outer wall of the polishing container 7, and the at least one coolant spray head is capable of spraying coolant onto the outer surface of the annular outer wall of the polishing container 7. Additionally, a coolant collection tank may be arranged below the polishing container 7, so that the coolant sprayed onto the annular outer wall of the polishing container 7 flows downward along the outer wall and finally flows into the coolant collection tank.

[0034] The coolant may be water or any commercially viable coolant.

[0035] In each embodiment, the workpiece motor A can rotate at a controllable speed, or repeatably swing within a certain angular range (e.g., 180°), or rotate through a certain angle in one direction (clockwise or counterclockwise), stop for a period of time, and then continue to rotate in the same direction, constantly repeating such a motion pattern. The above various different motion patterns of the workpiece motor A drive each workpiece to be polished to rotate at a controllable speed, or repeatably swing within a certain angular range, or rotate through a certain angle in one direction (clockwise or counterclockwise), stop for a period of time, and then continue to rotate in the same direction through the sun gear 4 and each planet gear 5, so that the polishing particles in the workpiece to be polished continuously impact at different speeds and different angles, thereby polishing each part of the workpiece surface.

[0036] In a preferred embodiment of the present invention, on the basis of the above various embodiments, a magnetic field assisted polishing process may be further applied to further improve the polishing fineness, so that the surface of the polished workpiece has ultra-high smoothness. Next, the magnetic field assisted polishing process will be introduced.

[0037] As is well known, a polishing liquid contains a large number of tiny particles for polishing or grinding. When the workpiece to be polished rotates, swings, or moves relative to the polishing liquid in any way understood by those skilled in the art, the tiny particles in the polishing liquid impact the surface of the workpiece to be processed, so as to polish or grind the workpiece. In the magnetic field assisted polishing process, the polishing liquid contains granular magnetic abrasives, and the magnetic abrasives used include consolidated abrasive type and loose abrasive type. The consolidated abrasive type magnetic abrasive is sintered from ferromagnetic particles (such as iron powder) and polishing powder, and the polishing powder includes, but is not limited to, one or more of alumina, silicon carbide, and diamond microparticles. The diameter (or linear dimension) of the consolidated abrasive type magnetic abrasive is in the range of several micrometers to several hundred micrometers. A lubricating liquid or other liquid can be mixed with the granular magnetic abrasive as the polishing liquid to polish the workpiece, or the powder of the granular magnetic abrasive (excluding lubricants or other liquids) can be used alone to polish the workpiece. In addition, the loose abrasive type magnetic abrasive is directly formed by mixing ferromagnetic particles (such as carbonyl iron powder) with a polishing liquid, and the polishing liquid contains a lubricant (or other liquid) and polishing powder, and the powder diameter can be 10 nanometers to 1 micrometer, and the powder materials include, but are not limited to, one or more of alumina, silicon carbide, diamond, and cerium oxide.

[0038] A magnetic field is applied to the polishing liquid using a permanent magnet or an electromagnet, such that the permanent magnet or the electromagnet moves, and the magnetic particles in the polishing liquid move accordingly. At the same time, the workpiece to be processed immersed in the polishing liquid rotates or moves in other ways, so that the polishing liquid polishes the surface of the workpiece more evenly.

[0039] Figure 3 Fig. shows a schematic top view of four pairs of magnets 12 arranged inside and outside a polishing container 7 in an embodiment of the present invention, and a plurality of workpieces 16 to be polished are also schematically shown therein. The four pairs of magnets 12 are all fixed on a rotating table 14 ( Figures 5 - 7 shown). One magnet in each pair of magnets 12 is arranged outside the outer wall of the polishing container 7, and the other magnet is arranged inside the inner wall of the polishing container 7, and the opposite magnetic poles of the two magnets face each other, so that the magnetic field between the opposite magnetic poles passes through the polishing liquid contained in the polishing container 7. Driven by another motor (referred to as magnet motor B, or the second motor herein, shown in Figures 5 - 7 ), each pair of magnets rotates relative to the polishing container 7, and the granular magnetic abrasive in the polishing container 7 is dragged along the annular polishing chamber by magnetic force. At the same time, each workpiece 16 rotates on its own under the drive of a workpiece motor A, so that each workpiece 16 is ground and polished.

[0040] Each magnet can have a different shape to enhance the magnetic field between each pair of magnetic poles. Figure 4a 、 4b, 4c shows examples of magnets of several different shapes. In one embodiment, the magnetic field strength applied to the polishing liquid is from 0.01 Tesla to 5 Tesla.

[0041] In Figure 3 the embodiment, 4 pairs of magnets 12 are arranged, but the present invention is not limited thereto, and 2 pairs, 3 pairs, 5 pairs, 6 pairs or more pairs of magnets 12 can be arranged.

[0042] In the above embodiment, the magnets 12 are arranged in pairs, that is, the magnets are arranged along two concentric rings, but the present invention is not limited thereto. The magnets 12 can be arranged without being paired. For example, the magnets 12 are only arranged outside the outer wall of the polishing container 7, or the magnets 12 are only arranged inside the inner wall of the polishing container 7, and the magnetic field strength applied to the polishing liquid is from 0.01 Tesla to 5 Tesla.

[0043] Figure 5 is a schematic perspective view of a polishing device according to an embodiment of the present invention; Figure 6 is a schematic front view of the polishing device of this embodiment; Figure 7 is Figure 6 the longitudinal sectional view of the polishing device shown. The following combines Figures 5 - 7 to introduce the structure of a polishing device according to an embodiment of the invention.

[0044] The polishing device according to an embodiment includes a frame 15 having a hollow structure. The magnet motor B is installed at the bottom of the frame 15. The turntable 14 is arranged inside the frame 15, above the magnet motor B, and multiple pairs of magnets 12 are fixedly installed on the turntable 14. The magnet motor B can drive the turntable 14 to rotate around its vertical axis, thereby driving the pairs of magnets 12 on the turntable 14 to rotate. In one embodiment, each magnet 12 is fixed to the turntable 14 through a magnet fixing member 13, and the respective magnets 12 are distributed along two concentric rings. The fixing member 13 can be any device known to those skilled in the art that can fix the magnet. The polishing container 7 is fixed inside the frame 15 through a fixing plate 11, such that one of each pair of magnets 12 is located outside the outer wall of the polishing container 7, and the other magnet 12 is located inside the inner wall of the polishing container 7. When the turntable 14 rotates under the drive of the magnet motor B, driving the respective magnets 12 mounted thereon to rotate, the polishing container 7 is stationary, so the magnets 12 rotate relative to the polishing container 7.

[0045] In one embodiment, the magnet motor B drives the turntable 14 and the magnets 12 to rotate at a speed of 50 - 5000 revolutions per minute.

[0046] In the illustrated embodiment, the fixed plate 11 is located above the rotating table 14 and is parallel to the rotating table 14. The outer periphery of the fixed plate 11 is fixed to the frame 15. The center of the fixed plate 11 has a hole, and the polishing container 7 is mounted on the fixed plate 11 through this hole.

[0047] As described above, the upper part of the polishing container 7 has an opening, and the lid member 6 can cover this opening. The lid member 6 and the workpiece motor A for driving the lid member 6 to rotate are arranged on a lifting device that can move up and down in the vertical direction. The lifting device includes a lifting screw 1 extending in the vertical direction, and also includes a motor base 10 mechanically coupled to the lifting screw 1. The workpiece motor A is fixed to the motor base 10. In one embodiment, the lifting screw 1 has a handle. When the handle is manually rotated, the lifting screw 1 rotates, thereby driving the motor base 10 and the workpiece motor A mounted thereon, as well as the lid member 6 and the respective workpieces 16 mounted on the lid member to move up and down in the vertical direction.

[0048] As described above, a sun gear 4 is mounted at the central position on the upper side of the lid member 6, and the workpiece motor A can drive the sun gear 4 to rotate. On the upper side of the lid member 6, a plurality of planet gears 5 meshing with the sun gear 4 are arranged around the sun gear 4. In the starting step, the handle of the lifting screw 1 can be manually rotated to raise the workpiece motor A and the lid member 6, and then the respective workpieces 16 are fixed to the lower side of the lid member 6, respectively located below the respective planet gears 5. Each workpiece 16 is fixed to the end of the rotating shaft of each planet gear 5 extending to the lower side of the lid member 6 through a workpiece mounting member 17 (see Figure 7 ). The workpiece mounting member 17 can be any mechanism well-known to those skilled in the art that can fix the workpiece 16 to the end of the rotating shaft of the planet gear 5 and can remove the workpiece 16 from the end of the rotating shaft of the planet gear 5.

[0049] After the respective workpieces 16 are fixed to the lower side of the lid member 6, the handle of the lifting screw 1 is rotated to lower the workpiece motor A and the lid member 6, so that the lid member 6 covers the upper opening of the polishing container 7, and the respective workpieces 16 are immersed in the polishing liquid in the polishing container 7.

[0050] The lifting device preferably has a stopper 2. After the lid member 6 is lifted or lowered in place, the stopper 2 is toggled so that the lifting device cannot continue to move up and down. When the stopper 2 is toggled again in the opposite direction, the lifting device can continue to move up and down.

[0051] In the above embodiments, a manual lifting device is described, but the present invention is not limited thereto. Those skilled in the art can understand that an electric lifting device can be used to replace the above manual lifting device.

[0052] The following describes the method for batch polishing a plurality of workpieces to be polished according to the present invention.

[0053] Step 1: Inject a polishing liquid containing magnetic abrasive into the polishing chamber of the annular polishing container 7. Among them, the magnetic abrasive can be, for example, the consolidated magnetic abrasive and the free magnetic abrasive as described above.

[0054] Step 2: Arrange a magnet 12 on the turntable 14 around the annular polishing container 7. The turntable 14 can rotate relative to the polishing container 7. The magnet 12 can be a permanent magnet or an electromagnet. The magnet 12 applies a magnetic field to the polishing liquid in the polishing container 7.

[0055] Step 3: Immerse a plurality of workpieces 16 fixed on a plurality of planetary gears 5 into the polishing liquid.

[0056] Step 4: Drive the sun gear 4 to rotate, thereby driving a plurality of planetary gears 5 meshing with the sun gear 4 to rotate, so that the plurality of workpieces 16 rotate on their own axes.

[0057] Step 5: Drive the turntable 14 and the magnet 12 mounted on the turntable 14 to rotate around the polishing container 7, so that the granular magnetic abrasive in the polishing liquid moves.

[0058] Those skilled in the art can understand that the order of the above steps is not restrictive. Each step can be executed in a changed order, or two or more steps can be executed simultaneously without affecting the polishing of the workpiece. For example, Step 4 and Step 5 are executed simultaneously.

[0059] In a preferred embodiment, the magnetic field strength applied to the polishing liquid by the above magnet is in the range of 0.01 Tesla to 5 Tesla.

[0060] In a preferred embodiment, in the above Step 5, the rotation rate of the magnet 12 around the polishing container 7 is 50 - 5000 revolutions per minute.

[0061] In a preferred embodiment, in the above Step 4, the plurality of workpieces 16 rotate on their own axes alternately in the clockwise and counterclockwise directions.

[0062] In a preferred embodiment, in the above Step 4, between the alternate rotations of the plurality of workpieces 16 in opposite directions, a period of time is paused. The period of time paused can be 1 second, 2 seconds, or other time intervals.

[0063] In a preferred embodiment, in the above Step 4, the plurality of workpieces 16 rotate on their own axes in a certain direction, then pause for a period of time, and then continue to rotate on their own axes in the same direction, repeating the rotation in this way. The period of time can be 1 second, 2 seconds, or other time intervals.

[0064] Although the present invention is described by way of specific embodiments, those skilled in the art should understand that various changes and equivalent substitutions can be made to the present invention without departing from the scope of the present invention. Additionally, various modifications can be made to the present invention for specific situations or materials without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed, but should include all embodiments falling within the scope of the claims of the present invention.

Claims

1. A polishing device, Comprising, A polishing container (7) for containing a polishing liquid and having a lid member (6) closing the upper opening of the polishing container (7), wherein the polishing container (7) is stationary; A sun gear (4) rotatably fixed to the lid member (6); A plurality of planet gears (5) rotatably fixed to the lid member (6) and meshing with the sun gear (4); each planet gear (5) has a rotating shaft; Wherein: The sun gear (4) and each planet gear (5) can be lifted and lowered. After the sun gear (4) and each planet gear (5) are lifted, the end of the rotating shaft of each planet gear (5) can be detachably fixed to the workpiece to be polished; when the sun gear (4) and each planet gear (5) are lowered, the workpiece can be immersed in the polishing liquid in the polishing container (7); When the sun gear (4) rotates, it drives each of the meshing planet gears (5) to rotate simultaneously, so that the workpiece (16) fixed to the end of the rotating shaft of each planet gear (5) rotates in the polishing liquid and is polished by the polishing liquid; The polishing container (7) includes an annular outer wall and an annular inner wall concentrically arranged with the annular outer wall, and a bottom wall connecting the annular outer wall and the annular inner wall, so as to form a polishing chamber for containing the polishing liquid between the annular outer wall, the annular inner wall and the bottom wall; and The polishing device further includes a rotating table (14) and a pair of magnets fixed to the rotating table (14). One magnet (12) in each pair of magnets is arranged outside the annular outer wall of the polishing container (7), and the other magnet (12) in each pair of magnets is arranged inside the annular inner wall of the polishing container (7). The opposite magnetic poles of each pair of magnets face each other, so as to apply a magnetic field to the polishing liquid in the polishing container (7). The polishing liquid contains magnetic abrasives, Wherein, the polishing device further includes: a first motor (A) for driving the sun gear (4) to rotate; and a second motor (B) for driving the rotating table (14) and the magnet (12) to rotate along the annular outer wall or the annular inner wall of the polishing container (7) and relative to the polishing container (7).

2. The polishing device according to claim 1, wherein, The second motor (B) drives the magnet to rotate at a speed of 50 to 5000 revolutions per minute.

3. The polishing device according to any one of claims 1-2, wherein, The magnetic field strength applied by the magnet to the polishing liquid is in the range of 0.01 Tesla to 5 Tesla.

4. The polishing apparatus according to claim 1, wherein, The number of pairs of magnets is 2, 3, 4, 5 or 6 pairs.

5. The polishing apparatus according to claim 1, wherein, The magnetic abrasive is one of the fixed abrasive type and the loose abrasive type.

6. The polishing apparatus according to claim 1, wherein, The linear dimension of the magnetic abrasive is in the range of several micrometers to several hundred micrometers.

7. The polishing device according to any one of claims 1-2, further comprising a lifting mechanism capable of controlling the lifting and lowering of the lid member (6).

8. The polishing device according to any one of claims 1-2, further comprising a cooling device for cooling the polishing device.

9. A method for polishing a workpiece based on the polishing device according to any one of claims 1-8, comprising the steps of: Fixing each workpiece (16) to be polished to the corresponding planet gear (5) meshing with the sun gear (4); Immerse the workpiece (16) to be polished, which is fixed to the planetary gear (5), into the polishing liquid; Rotate the sun gear (4) to drive the multiple planet gears (5) meshing with the sun gear (4) to rotate on their own axes, thereby driving each workpiece (16) to rotate on its own axis in the polishing liquid, wherein, The polishing container (7) for containing the polishing liquid is stationary, and the sun gear (4) and a plurality of the planetary gears (5) are rotatably fixed to a cover member (6) for closing the upper opening of the polishing container (7); And Apply a magnetic field to the polishing liquid by a magnet, and drive the magnet to rotate relative to the polishing container (7), wherein the polishing liquid contains magnetic particles, and the magnetic particles are driven to move when the magnet rotates.

10. The method for polishing a workpiece according to claim 9, Among them, Driving the magnet to rotate includes: driving the magnet to rotate at a speed of 50 to 5000 revolutions per minute.

11. The method for polishing a workpiece according to claim 9, Among them, Driving each workpiece (16) to rotate itself in the polishing liquid includes driving each workpiece (16) to rotate itself alternately in two opposite directions.

12. The method for polishing a workpiece according to claim 9, Among them, Driving each workpiece (16) to rotate itself in the polishing liquid includes driving each workpiece (16) to rotate itself in a certain direction by a certain arc, staying for a period of time, and then continuing to rotate itself in the same direction by the same arc.

13. The method for polishing a workpiece according to claim 9, Among them, Driving each workpiece (16) to rotate itself in the polishing liquid includes driving each workpiece (16) to rotate itself in a certain direction by a certain arc, staying for a period of time, and then continuing to rotate itself in the opposite direction by the same arc.

14. The method for polishing a workpiece according to claim 9, Among them, The magnetic field intensity applied to the polishing liquid is 0.01 Tesla to 5 Tesla.

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