A flexible temperature and humidity sensor based on a molybdenum and its oxide nanocluster lattice and its applications

Abstract

The present invention discloses a flexible temperature and humidity sensor based on a nanocluster lattice of molybdenum and its oxides and its application. The sensor includes a flexible thin film substrate, microelectrodes, etc. Two groups of microelectrodes are printed on the upper and lower surfaces at the same planar position of the flexible thin film substrate; a nanocluster lattice of molybdenum and its oxides with similar coverage rates is assembled on the two groups of microelectrodes; leads are used to connect the pins of the microelectrodes to an external circuit for conductance measurement; a flexible encapsulation substrate is covered on the surface of one group of microelectrodes for sealing treatment. The present invention utilizes the sensitivity of the quantum conductance of the nanocluster lattice to temperature and air humidity to simultaneously sense changes in ambient temperature and humidity; one of the nanocluster lattices is exposed to the environment to sense changes in temperature and humidity; the other nanocluster lattice is only sensitive to temperature changes due to the sealing treatment. By differentially comparing the conductance signals of the two molybdenum and its oxide nanocluster lattices, the stimulation decoupling and synchronous measurement of ambient temperature and humidity can be achieved.

Description

Technical Field

[0001] The invention belongs to the field of sensors and detection instruments, and in particular relates to a flexible temperature and humidity sensor based on a nanocluster lattice of molybdenum and its oxides and an application thereof. Background Art

[0002] Temperature and humidity sensors are mainly used to measure and collect temperature and humidity information in the environment. They are currently widely used in many fields such as agricultural production, meteorological measurement, logistics and transportation, and food storage. Traditional temperature and humidity sensors simply integrate temperature-sensitive chips and humidity-sensitive chips into a single test probe, and expect the temperature-sensitive chips and humidity-sensitive chips to detect temperature and humidity changes in the environment independently, accurately, and synchronously. However, these devices often have defects such as low response accuracy and slow response speed when measuring temperature and humidity. In addition, these sensitive chips will more or less respond to other stimuli besides the main sensitive quantity. For example, the calibration curves of humidity-sensitive chips at different ambient temperatures are often different, and the temperature sensor test process will also cause distortion of detection data due to moisture in the air. These detection errors need to be eliminated by mutual calibration between chips. However, when constructing temperature and humidity sensors, the various sensitive chips are distributed in different positions. The calibration process will not only fail to completely eliminate measurement interference, but also introduce more complex calibration errors. In addition, the test probes of traditional temperature and humidity sensors have complex internal structures and are relatively large in size. They are also limited by the rigid sensitive materials and packaging shells. These composite sensors lack flexibility during the measurement process and can hardly fit the surface of the measured object, which reduces the effectiveness and accuracy of the test. In summary, the current commercial traditional multifunctional temperature and humidity sensors are still limited by materials, usage environment, and appearance design. It is urgent to develop a new type of temperature and humidity sensor to achieve more accurate and flexible temperature and humidity measurement.

[0003] The electronic transmission performance of sensitive materials based on percolation nanocluster arrays often changes with temperature, substrate deformation, etc., and can be used to develop a variety of flexible sensor devices with ultra-high sensitivity and resolution. In nanocluster arrays based on molybdenum and molybdenum oxide, electrons are transmitted between clusters in the form of tunneling and jumping. Among them, temperature will determine the distribution of electron energy, thereby affecting the probability of electron tunneling and jumping through the gaps between clusters, thereby changing the macroscopic conductivity of the nanocluster array.

[0004] The mechanism of molybdenum and its oxides responding to humidity is as follows: there are a certain number of oxygen vacancies in molybdenum and its oxide clusters, which can easily capture water molecules in the air and dissociate them into oxygen ions to fill the vacancies, and the two released protons will be adsorbed on the surface of the cluster to form holes. The newly formed holes will increase the conductivity as carriers; when water molecules are desorbed, the carriers decrease and the conductivity decreases. Based on this, the applicant designed a flexible temperature and humidity sensor based on molybdenum and its oxide nanocluster lattices. The sensor responds to the changes in temperature and humidity in the environment through the upper layer of the flexible film substrate. The nanocluster lattices of molybdenum and molybdenum oxide covered with the encapsulation film substrate are only affected by the temperature in the environment, while the nanocluster lattices of molybdenum and molybdenum oxide not covered with the encapsulation film substrate can sense the changes in temperature and humidity in the environment. Since the two nanocluster lattices are in almost the same temperature environment, the real-time changes in temperature and humidity in the environment can be synchronously sensed by signal differential comparison. Summary of the invention

[0005] The purpose of the present invention is to provide a flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides and its application. The present invention utilizes the different response behaviors of the quantum conductivity of two nanocluster lattices in the same group to the changes of air temperature and humidity, thereby realizing the differentiated measurement of air temperature and humidity. It is a composite structure of a temperature sensor and a humidity sensor, which mainly solves the problems of low response accuracy, slow response speed, measurement signal crosstalk, inaccurate calibration, etc. in traditional integrated temperature and humidity sensors. Moreover, the present invention is a flexible composite sensor device, which has incomparable advantages such as flexible measurement, accuracy, and lightness compared to the currently commercially available rigid sensor devices.

[0006] The technical solution adopted by the present invention is as follows:

[0007] The flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides comprises a flexible film substrate, microelectrodes, nanocluster lattices of molybdenum and its oxides, wires, an external circuit for conductivity measurement and a flexible packaging substrate. A group of two microelectrodes are respectively arranged at the same positions corresponding to the upper and lower surfaces of the flexible film substrate. A nanocluster lattice of molybdenum and its oxides is assembled on the flexible film substrate in each group of microelectrodes (the positions of the nanocluster lattices of molybdenum and its oxides on the upper and lower surfaces of the flexible film substrate should correspond to each other). The pins of the microelectrodes are connected to the external circuit for conductivity measurement through wires, so that the conductivity of the nanocluster lattice of molybdenum and its oxides can be measured and read. The surface of one group of microelectrodes is covered with a layer of flexible packaging substrate, and the flexible packaging substrate is fixed on the flexible film substrate to achieve a sealing effect. Since the molybdenum and its oxide nanocluster lattices on the upper and lower surfaces of the flexible film substrate are almost in the same plane position and the film thickness is negligible, the temperature environment of the molybdenum and its oxide nanocluster lattices on the upper and lower surfaces is basically the same; and the flexible packaging substrate covers and seals one of the molybdenum and its oxide nanocluster lattices, isolating the humidity in the environment from affecting only the macroscopic quantum conductivity of the other molybdenum and its oxide nanocluster point; then, by comprehensively measuring the changes in the macroscopic quantum conductance of the two molybdenum and its oxide nanocluster lattices and through corresponding differential comparison, the temperature and humidity changes of the environment can be synchronously measured.

[0008] The flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides is characterized in that the elastic modulus of the flexible film substrate is 0.1-4000 MPa, the thickness is 0.05-0.1 mm, and the material is a polymer material or an inorganic film material. The polymer material includes polydimethylsiloxane (PDMS), polyethylene terephthalate (PET), polyimide (PI) or polyurethane (PU), and the inorganic film material includes mica.

[0009] The flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides is characterized in that the electrode gap of the microelectrode is 0.01-0.2 mm, the thickness is 50-500 nm, the material is gold, silver, copper, iron, aluminum or indium tin oxide, and the microelectrode is printed on a flexible film substrate, and the printing scheme is inkjet printing, screen printing, photolithography coating or mask coating.

[0010] The flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides is characterized in that the nanocluster lattices of molybdenum and its oxides have an average particle size of 3-15 nm and a coverage rate of cluster particles of 60%-90%; there are sub-nanometer gaps between the nanoclusters of molybdenum and its oxides, and the transmission mode of electrons is quantum tunneling or jumping; the conductivity of each nanocluster lattice of molybdenum and its oxides is between 1-100 nS.

[0011] The flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides is characterized in that the nanocluster lattices of molybdenum and its oxides are obtained by growing nanocluster lattices of high-purity elemental molybdenum on a flexible thin film substrate in each group of two microelectrodes by physical vapor deposition, chemical vapor deposition or chemical liquid phase synthesis, and then placing them in the air for natural oxidation.

[0012] The flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides is characterized in that the wire should have a certain anti-electromagnetic shielding effect, and its diameter is 10-100 μm, including acetal enameled wire, polyester enameled wire or polyurethane enameled wire;

[0013] The flexible packaging substrate is a flexible film material with certain flexibility and strength, an elastic modulus of 0.1-4000 MPa, a thickness of 0.01-1 mm, and a polymer material or an inorganic film material. The polymer material includes PDMS, PET, PI or PU film, and the inorganic film material includes mica.

[0014] The flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides is characterized in that the measurement range of the conductivity measurement is 0.1-10 6 nS, the sampling frequency of the circuit is 1-2000Hz.

[0015] The flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides is characterized in that the sensor measures temperature in the range of -20-60°C and humidity in the range of 10-98%RH.

[0016] The flexible temperature and humidity sensor based on nanocluster lattices of molybdenum and its oxides is characterized in that its manufacturing method comprises the following steps:

[0017] Step A: Select a polymer with certain elasticity and flexibility as the flexible film substrate, and a clean, flat and scratch-free polymer can be selected.

[0018] Step B: Printing microelectrodes at corresponding positions on the upper and lower surfaces of the high molecular polymer film as a flexible film substrate can be done by inkjet printing, photolithography coating or mask coating. The materials can be common metals such as gold, silver, copper, iron, aluminum, etc., or metal oxides such as indium tin oxide.

[0019] Step C: Mo and oxide nanocluster lattices are generated by magnetron plasma gas clustering and deposited between microelectrodes by nanocluster beam under the pressure difference. The microelectrodes on the upper and lower surfaces of the flexible film substrate should be deposited with nanocluster lattices of similar coverage. During deposition, both ends of the electrode are connected to a conductive nanocluster lattice conductivity real-time monitoring system to control the deposition coverage.

[0020] Step D: After the deposition of the nanocluster lattices of molybdenum and oxides is completed, after confirming that the wire connection between the pins of the microelectrodes and the input end of the conductivity measurement external circuit is normal, a group of two microelectrodes on the flexible film substrate and the nanocluster lattices of molybdenum and oxides therein are packaged using a flexible packaging substrate.

[0021] Step E: Place the flexible film substrate with the flexible packaging substrate fixed in an environment with changing temperature, measure the relative conductivity changes of the conductive nanocluster lattices on the upper and lower surfaces of the flexible film substrate at different ambient temperatures, draw curves, calculate the sensitivity coefficient of each lattice to temperature and input it into the external conductivity measurement circuit to realize the temperature calibration of the sensor.

[0022] Step F: Place the flexible film substrate with the flexible packaging substrate fixed in an environment with changing humidity, measure the relative conductance changes of the conductive nanocluster dot arrays on the upper and lower surfaces of the flexible film substrate under different ambient humidities, draw curves, calculate the sensitivity coefficient of each dot array to temperature and input it into the conductivity measurement external circuit to realize the calibration of the sensor to humidity.

[0023] The flexible temperature and humidity sensor based on the nanocluster lattice of molybdenum and its oxides provided by the present invention can be well applied in the fields of agricultural production, meteorological measurement, logistics transportation or food storage.

[0024] The beneficial effects achieved by the present invention are as follows:

[0025] 1) The upper and lower molybdenum and its oxide nanocluster lattices of the same group of sensor units respond very differently to changes in air temperature and humidity. Through differential comparison, the changes in ambient temperature and humidity at the location of the sensor unit can be easily obtained without any external calibration, which greatly improves the accuracy and convenience of sensor measurement.

[0026] 2) Flexible sensitive chips make sensor testing flexible and portable.

[0027] 3) The impedance of the nanocluster lattices of molybdenum and its oxides is in the megaohm range, with low energy consumption.

[0028] 4) The assembly method is simple, the material cost is low, and industrial mass production can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the structure of a flexible temperature and humidity sensor based on molybdenum and its oxide nanocluster lattice of the present invention:

[0030] Flexible film substrate 1, microelectrode 2, nanocluster lattice of molybdenum and its oxide 3, wire 4, conductivity measurement external circuit 5, flexible packaging substrate 6.

[0031] Figure 2 It is a transmission electron microscope image of the sensor of the present invention to the nano cluster lattice of molybdenum and oxide;

[0032] Figure 3 is a calibration curve of the sensor of the present invention to temperature;

[0033] Figure 4 is a calibration curve of the sensor of the present invention to humidity;

[0034] Figure 5 It is the real-time conductivity response curve of the sensor of the present invention when temperature and humidity are coupled. DETAILED DESCRIPTION

[0035] The present invention will be further described below in conjunction with specific embodiments, but the protection scope of the present invention is not limited thereto.

[0036] Example 1

[0037] We prepared a flexible sensor that can simultaneously measure air temperature and air humidity using nanocluster lattices. The preparation steps are as follows:

[0038] 1) A piece of flexible polymer film is used as the flexible film substrate 1, the selected film is a PET film, the film thickness is 0.05 mm, the film elastic modulus is 2800 MPa, and the surface is clean and smooth without obvious scratches;

[0039] 2) Printing microelectrodes 2 at corresponding positions on the upper and lower surfaces of the flexible film substrate 1; the microelectrodes 2 used are interdigitated electrodes with an electrode gap of 0.1 mm, prepared by vacuum mask evaporation process, the electrode material is silver, the thickness is 100 nm, and the blank electrode resistance is higher than 10 11 Ω;

[0040] 3) Nanocluster lattices 3 of molybdenum and its oxides with the same coverage should be deposited on the microelectrodes 2 on the upper and lower surfaces of the flexible film substrate. The deposition process of the nanocluster lattices of molybdenum and its oxides used is nanocluster beam deposition, where atoms generated by sputtering of a metal molybdenum target with a purity of 99.999% nucleate and grow into molybdenum clusters after colliding with a buffer gas, and are deposited between the interdigitated electrodes; the particle size of the deposited nanoclusters is controlled at 3-5 nm, the coverage is 70%, and the conductivity is 300 nS; when the deposition of one side of the flexible film substrate 1 is completed, turn the other side over, and deposit another nanocluster lattice of molybdenum and its oxides with the same parameters.

[0041] 4) The flexible film substrate 1 on which the nanocluster lattices of molybdenum and its oxides are deposited is placed in a normal pressure environment to form the nanocluster lattices of molybdenum and its oxides 3 by oxidation; the pins of the microelectrodes 2 on the upper and lower surfaces and the input end of the conductivity measurement external circuit 5 are connected one by one by a wire 4 (the wire 4 is an enameled wire), and a piece of flexible packaging substrate 6 is covered on one group of microelectrodes 2 and the surface of the nanocluster lattices of molybdenum and its oxides 3 therein. Here, we designate the nanocluster lattices of molybdenum and its oxides on the lower surface as the sealed nanocluster lattices. The flexible packaging substrate used is a piece of PDMS with a thickness of 0.1 mm and an elastic modulus of 10 MPa, which is clean, smooth and without obvious scratches. We regard the nanocluster lattices of molybdenum and its oxides on the upper surface as the unsealed nanocluster lattices.

[0042] 4) The flexible film substrate 1 with the flexible packaging substrate 6 fixed thereon is placed in an environment with fixed humidity and adjustable temperature. By changing the ambient temperature, the corresponding response behavior of the nanocluster lattice 3 of molybdenum and its oxide in an environment of 25-60°C is tested, and a temperature calibration curve is drawn as follows: Figure 3 As shown, Figure 3 The figure shows the corresponding curves of the unsealed nanocluster lattice on the upper surface of the sensor and the sealed nanocluster lattice on the lower surface to temperature changes. The upper surface temperature sensitivity is ; .

[0043] 5) The flexible film substrate 1 with the flexible packaging substrate 6 fixed thereon is placed in an environment with a fixed temperature and variable humidity. By changing the air humidity, the corresponding response behavior of the nanocluster lattice 3 of molybdenum and its oxides formed by oxidation in an environment with a relative humidity of 10-98% is tested, and a humidity calibration curve is drawn as follows: Figure 4 As shown, Figure 4 The corresponding curves of the unsealed nanocluster lattice on the upper surface of the sensor and the sealed nanocluster lattice on the lower surface to humidity changes are shown in FIG.

[0044] Example 2

[0045] This example tests the ability of the flexible sensor prepared in Example 1 to simultaneously detect changes in temperature and humidity in the environment. In the test process, the environment with a temperature of 41.8°C and a humidity of 20% RH is used as the initial environment, and the conductance of the two molybdenum and its oxide nanocluster lattices in the sensor in this environment is used as the basic conductance. G 0 Afterwards, the sensor is placed in a new environment, where the temperature and humidity are different from the initial environment. Figure 5 The output signal changes of the sensor during the changes of ambient temperature and humidity were recorded, and it was found that in the new temperature and humidity environment, the relative conductivity of the sealed molybdenum and its oxide nanocluster lattices changed to -0.3589. Figure 3 According to the corresponding data, the ambient temperature dropped from 41.8 ℃ to 24.1 ℃, a decrease of 17.7 ℃. The new ambient temperature measured by the thermocouple is 24.6 ℃. Figure 3 It can be seen that the relative conductivity change of the unsealed molybdenum and its oxide nanocluster lattice affected by temperature is 0.7992. The relative conductivity change of the unsealed molybdenum and its oxide nanocluster lattice deducted the temperature-affected part, and the Figure 4 , it can be determined that the new ambient humidity is 82.2% RH. The new ambient humidity is measured by a commercial hygrometer HW-100 and is 81.7% RH.

[0046] The above experiments prove that the flexible sensor of the present invention can synchronously measure changes in ambient temperature and humidity.

[0047] The contents described in this specification are merely an enumeration of implementation forms of the inventive concept, and the protection scope of the present invention should not be regarded as being limited to the specific forms described in the embodiments.

Claims

1. A flexible temperature and humidity sensor based on a nanocluster lattice of molybdenum and its oxides, characterized in that it includes a flexible thin film substrate (1), microelectrodes (2), a nanocluster lattice of molybdenum and its oxides (3), wires (4), an external circuit for conductance measurement (5) and a flexible encapsulation substrate (6). On the upper and lower surfaces of the flexible thin film substrate (1) at corresponding same positions, a set of two microelectrodes (2) are provided respectively. On the flexible thin film substrate (1) within each set of microelectrodes (2), a nanocluster lattice of molybdenum and its oxides (3) is assembled. The pins of the microelectrodes (2) are led out through wires (4) and connected to the external circuit for conductance measurement (5) so that the conductance of the nanocluster lattice of molybdenum and its oxides (3) can be measured and read. A flexible encapsulation substrate (6) covers the surface of one set of microelectrodes (2) to hermetically cover the nanocluster lattice of molybdenum and its oxides (3) within this set of microelectrodes (2). The hermetically treated nanocluster lattice of molybdenum and its oxides (3) is only sensitive to temperature changes. The nanocluster lattice of molybdenum and its oxides (3) within the other set of microelectrodes (2) is exposed to the environment and can sense temperature and humidity changes. By differentially comparing the signals of the two cluster lattices, the decoupling and synchronous measurement of environmental temperature and humidity stimuli can be achieved.

2. A flexible temperature and humidity sensor based on a nanocluster lattice of molybdenum and its oxides according to claim 1, characterized in that the elastic modulus of the flexible thin film substrate (1) is 0.1 - 4000 MPa, the thickness is 0.05 - 0.1 mm, and its material is a polymer material or an inorganic thin film material. The polymer materials include polydimethylsiloxane PDMS, polyethylene terephthalate PET, polyimide PI or polyurethane PU, and the inorganic thin film materials include mica.

3. A flexible temperature and humidity sensor based on a nanocluster lattice of molybdenum and its oxides according to claim 1, characterized in that the electrode gap of the microelectrodes (2) is 0.01 - 0.2 mm, the thickness is 50 - 500 nm, and the material is gold, silver, copper, iron, aluminum or indium tin oxide. The microelectrodes (2) are printed on the flexible thin film substrate (1), and the printing methods include inkjet printing, screen printing, photolithography coating or mask coating.

4. A flexible temperature and humidity sensor based on a nanocluster lattice of molybdenum and its oxides according to claim 1, characterized in that for the nanocluster lattice of molybdenum and its oxides (3), the average size of the clusters is 3 - 15 nm, and the coverage rate of the cluster particles is 60% - 90%; there are sub-nanometer gaps between the nanoclusters of molybdenum and its oxides, and the electron transport mode is quantum tunneling or hopping; the conductance of the nanocluster lattice of molybdenum and its oxides (3) is between 1 - 100 nS.

5. A flexible temperature and humidity sensor based on a nanocluster lattice of molybdenum and its oxides according to claim 4, characterized in that The nano-cluster lattice (3) of molybdenum and its oxides is obtained by growing a nano-cluster lattice of high-purity elemental molybdenum on a flexible thin-film substrate (1) within each set of two microelectrodes (2) by physical vapor deposition, chemical vapor deposition or chemical liquid-phase synthesis methods, and then naturally oxidizing it in air.

6. A flexible temperature and humidity sensor based on a nano-cluster lattice of molybdenum and its oxides as described in claim 1, characterized in that the wire (4) should have a certain electromagnetic shielding effect, with a diameter of 10 - 100 μm, including acetal enameled wire, polyester enameled wire or polyurethane enameled wire; the flexible encapsulation substrate (6) is a flexible thin-film material with a certain flexibility and strength, an elastic modulus of 0.1 - 4000 MPa, a thickness of 0.01 - 1 mm, and the material is a polymer material or an inorganic thin-film material. The polymer materials include PDMS, PET, PI or PU films, and the inorganic thin-film materials include mica.

7. A flexible temperature and humidity sensor based on a nano-cluster lattice of molybdenum and its oxides as described in claim 1, characterized in that The measurement range of the conductance measurement is 0.1 - 10 6 nS, and the acquisition frequency of the circuit is 1 - 2000 Hz.

8. A flexible temperature and humidity sensor based on a nano-cluster lattice of molybdenum and its oxides as described in claim 1, characterized in that the temperature measurement range of the sensor is -20 - 60 °C, and the humidity measurement range is 10 - 98 %RH.

9. A flexible temperature and humidity sensor based on a nano-cluster lattice of molybdenum and its oxides as described in claim 1, characterized in that its manufacturing method includes the following steps: Step A: Select a polymer film as the flexible thin-film substrate (1), with a smooth and clean surface and no obvious scratches; Step B: Print microelectrodes (2) at corresponding positions on the upper and lower surfaces of the polymer film used as the flexible thin-film substrate (1), using inkjet printing, photolithography coating or mask coating, and the materials are selected from metals such as gold, silver, copper, iron, aluminum or indium tin oxide; Step C: Deposit a certain coverage rate of the nano-cluster lattice (3) of molybdenum and its oxides between the microelectrodes (2) on one surface of the polymer film used as the flexible thin-film substrate (1). The nano-cluster lattice (3) of molybdenum and its oxides is generated by magnetron plasma gas aggregation clusters and deposited between the microelectrodes (2) under the drive of air pressure difference through a nano-cluster beam. During the deposition process, both ends of the corresponding microelectrodes (2) are connected to an external conductance measurement circuit (5) to realize real-time monitoring of the conductance of the nano-cluster lattice (3) of molybdenum and its oxides. After the deposition of the nano-cluster lattice (3) of molybdenum and its oxides on one side is completed, the polymer film is turned over and the nano-cluster lattice (3) of molybdenum and its oxides on the other side is deposited with the same deposition parameters; Step D: After the deposition of the nano-cluster lattice (3) of molybdenum and its oxides is completed, after confirming that the wire connection between the pins of the microelectrodes (2) and the input end of the external conductance measurement circuit (5) is normal, use the flexible encapsulation substrate (6) to encapsulate a certain set of two microelectrodes (2) and the nano-cluster lattice (3) of molybdenum and its oxides therein on the flexible thin-film substrate (1); Step E: Place the flexible thin film substrate (1) with the flexible encapsulation substrate (6) fixed therein in an environment with varying temperature, measure the relative conductance changes of the conductive nanocluster lattices (3) on the upper and lower surfaces of the flexible thin film substrate (1) at different ambient temperatures respectively, plot curves, obtain the sensitivity coefficients of each lattice to temperature and input them into the conductance measurement external circuit (5) to achieve the calibration of the sensor to temperature; Step F: Place the flexible thin film substrate (1) with the flexible encapsulation substrate (6) fixed therein in an environment with varying humidity, measure the relative conductance changes of the conductive nanocluster lattices (3) on the upper and lower surfaces of the flexible thin film substrate (1) at different ambient humidities respectively, plot curves, obtain the sensitivity coefficients of each lattice to temperature and input them into the conductance measurement external circuit (5) to achieve the calibration of the sensor to humidity.

10. Application of the flexible temperature and humidity sensor based on molybdenum and its oxide nanocluster lattices according to any one of claims 1 to 9 in agricultural production, meteorological measurement, logistics transportation or food storage.

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