Hardware synchronization control system and control method thereof, step-scan projection lithography machine

Abstract

The present invention provides a hardware synchronization control system, comprising a host computer, a synchronization controller, a signal acquisition unit, a signal control unit, a signal transceiver unit, and a signal conversion unit; the synchronization controller, signal acquisition unit, and signal control unit are connected to the host computer via a command bus; the signal transceiver unit collects control signals sent by the signal control unit according to the timing of the photolithography process provided by the host computer, and distributes the signals sent by the synchronization controller to the signal control unit; the signal conversion unit is used to receive the signals sent by the signal transceiver unit and send them to the synchronization controller after conversion, and to transmit the signals sent by the synchronization controller to the signal acquisition unit after conversion. The synchronization control architecture is rebuilt using hardware synchronization, and control signals are transmitted via control signal lines, which simplifies the synchronization mechanism of the entire machine and reduces the time it takes for the synchronization software to call the interface.

Description

Technical Field

[0001] The present invention relates to the technical field of lithography machines, and in particular to a hardware synchronization control system and a control method thereof, and a step-scan projection lithography machine. Background Art

[0002] Currently, synchronization control technology for stepper-scan projection lithography systems is based on negotiation and queuing mechanisms. The negotiation mechanism is used during the current scan execution phase to obtain the parameters required for the next scan. The queuing mechanism places the negotiated parameters for the next scan into the submodule's scan queue to ensure continuous execution of multiple scans. The organic combination of these two mechanisms enables continuous exposure and scanning synchronization control for the lithography system. Existing technologies use software-based synchronization control systems to achieve this. However, these systems require frequent calls to negotiation and software interfaces, resulting in lengthy call times and low production efficiency. Summary of the Invention

[0003] The purpose of the present invention is to provide a hardware synchronization control system and a control method thereof, so as to solve the problem that the existing software synchronization control system needs to frequently call negotiation and software interface, and the calling time is long.

[0004] In order to solve the above technical problems, the present invention provides a hardware synchronization control system, comprising a host computer, a synchronization controller, a signal acquisition unit, a signal control unit, a signal transceiver unit, and a signal conversion unit;

[0005] The synchronization controller, the signal acquisition unit and the signal control unit are connected to the host computer via a command bus;

[0006] The signal transceiver unit collects the control signal sent by the signal control unit according to the timing of the photolithography process provided by the host computer, and distributes the signal sent by the synchronization controller to the signal control unit;

[0007] The signal conversion unit is used to receive the signal sent by the signal transceiver unit and send it to the synchronization controller after conversion, and convert the signal sent by the synchronization controller and then transmit it to the signal acquisition unit.

[0008] Optionally, the signal transceiver unit includes a synchronous control sub-board, and the synchronous control sub-board is used to receive feedback signals or send trigger signals and stop signals.

[0009] Optionally, the signal conversion unit includes a synchronous control mainboard level adapter board, and the synchronous control mainboard level adapter board is used to receive the signal sent by the signal transceiver unit and convert the received signal into a format and then send it to the synchronous controller.

[0010] Optionally, the signal acquisition unit includes a first CCD, a second CCD, a first image acquisition card and a second image acquisition card, the first CCD is connected to the command bus via the first image acquisition card, and the second CCD is connected to the command bus via the second image acquisition card.

[0011] Optionally, the signal control unit includes an image quality controller for controlling the operation of the first CCD and the second CCD.

[0012] Optionally, the signal control unit further includes a motion controller, a polarization controller and a vertical measurement controller, wherein the motion controller is used to control the movement of the motion mechanism, the polarization controller is used to control the opening and closing of the polarization shutter, and the vertical measurement controller is used to measure the surface shape of the silicon wafer.

[0013] Optionally, the motion controller is connected to the command bus via a motion control card, the polarization controller is connected to the command bus via a multi-serial port card, and the vertical measurement controller is connected to the command bus via a vertical measurement control card.

[0014] Based on the same inventive concept, the present invention also provides a control method for a hardware synchronization control system, comprising:

[0015] The host computer sends the timing of the luminous etching process to the synchronous controller and motion control;

[0016] The signal transceiver unit collects the control signal sent by the signal control unit according to the timing of the photolithography process provided by the host computer, and distributes the signal sent by the synchronization controller to the signal control unit;

[0017] The signal conversion unit receives the signal sent by the signal transceiver unit and sends it to the synchronization controller after conversion, and converts the signal sent by the synchronization controller and then transmits it to the signal acquisition unit.

[0018] Optionally, after the signal transceiver unit receives the stage in-position feedback signal, the synchronization controller sends a polarization shutter trigger signal and simultaneously sends a vertical measurement stop trigger signal to open the polarization shutter and close the autofocus detector shutter;

[0019] After the image quality controller receives the polarization shutter fully open feedback signal and the second CCD exposure and image acquisition trigger signal at the same time, the second CCD performs exposure and image acquisition; after the second CCD exposure and image acquisition is completed, the polarization shutter is closed and an exposure and image acquisition completion feedback signal is issued;

[0020] After receiving the exposure and image acquisition completion feedback signal, the signal transceiver unit sends a stage movement trigger signal to start the measurement of the next point, and sends a self-focus detector shutter opening trigger signal;

[0021] The signal transceiver unit sends a trigger signal for the autofocus detector to start measuring after receiving the polarization shutter closing feedback signal;

[0022] After the vertical measurement controller receives the autofocus detector start measurement trigger signal and the autofocus detector shutter opening trigger signal at the same time, the vertical measurement controller controls the autofocus detector to start measuring the silicon wafer surface shape.

[0023] Optionally, before the signal transceiver unit receives the carrier in position feedback signal, the motion controller controls the movement of the carrier after receiving the motion controller trigger signal, and the carrier outputs the in position feedback signal to the signal transceiver unit after moving to the preset position.

[0024] Optionally, when measuring the first point in the queue, the motion controller trigger signal is triggered by the host computer software.

[0025] Optionally, the measurement queue starts from the second point, and the motion controller trigger signal is triggered by the signal transceiver unit.

[0026] Optionally, after the synchronization controller sends a polarization shutter trigger signal and simultaneously sends a vertical measurement stop trigger signal, the vertical measurement controller stops measuring the silicon wafer surface shape and controls the shutter to start closing after receiving the vertical measurement stop trigger signal.

[0027] Optionally, after receiving the stage in-position feedback signal, the signal transceiver unit sends a comparison trigger signal to the signal conversion unit. The signal conversion unit sends the comparison trigger signal to the synchronization controller for counting and comparison, sends a polarization shutter trigger signal, and simultaneously sends a vertical measurement stop trigger signal.

[0028] Optionally, the signal conversion unit is a synchronous control mainboard level adapter board.

[0029] Optionally, the vertical measurement controller controls the shutter to be fully closed and then sends a shutter fully closed feedback signal to the signal transceiver unit.

[0030] Optionally, after receiving the shutter fully closed feedback signal, the signal transceiver unit sends a second CCD exposure and image acquisition trigger signal to the image quality controller.

[0031] Optionally, the signal transceiver unit is a synchronous control sub-board.

[0032] Compared with the prior art, the present invention has the following beneficial effects:

[0033] The hardware synchronization control system provided by the present invention includes a host computer, a synchronization controller, a signal acquisition unit, a signal control unit, a signal transceiver unit, and a signal conversion unit. The signal conversion unit converts the acquired signal and sends it to the synchronization controller, and the signal sent by the synchronization controller is converted and then transmitted to each signal acquisition unit, solving the problem that different formats of control signals cannot be directly transmitted through hardware. The signal transceiver unit collects the control signal sent by the signal control unit according to the timing of the lithography process, and distributes the signal sent by the synchronization controller to the signal control unit, without calling the software interface, simplifying the system synchronization control process and reducing the time overhead of calling the software interface. The present invention uses hardware synchronization to rebuild the synchronization control architecture, transmits the control signal through the control signal line, simplifies the whole machine synchronization mechanism, and reduces the time of the synchronization software calling the interface. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 2. It is a schematic diagram of the hardware synchronization control system architecture according to an embodiment of the present invention;

[0035] Figure 2 This is a flow chart of a control method of a hardware synchronization control system according to an embodiment of the present invention;

[0036] Figure 3 is a timing diagram of hardware synchronization control according to an embodiment of the present invention;

[0037] Figure 4 is an integrated measurement path diagram of an embodiment of the present invention;

[0038] In the figure,

[0039] 101 - Host computer; 102 - Command bus; 103 - First image acquisition card; 104 - Second image acquisition card; 105 - Multi-serial port card; 106 - Synchronization controller; 107 - Motion control card; 108 - Vertical measurement control card; 109 - First CCD; 110 - Second CCD; 111 - X polarization controller; 112 - Y polarization controller; 113 - Signal conversion unit; 114 - Motion controller; 115 - Vertical measurement controller; 116 - Polarization shutter X; 117 - Polarization shutter Y; 118 - Signal transceiver unit; 119 - Image quality controller. DETAILED DESCRIPTION

[0040] The hardware synchronization control system and control method proposed by the present invention are further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description and claims. It should be noted that the drawings are greatly simplified and not to exact scale, and are intended solely to facilitate and clearly illustrate the embodiments of the present invention.

[0041] Figure 1 FIG is a schematic diagram of the hardware synchronization control system architecture of an embodiment of the present invention. Figure 1 As shown, this embodiment provides a hardware synchronization control system, including a host computer 101, a synchronization controller 106, a signal acquisition unit, a signal control unit, a signal transceiver unit 118 and a signal conversion unit 113. The synchronization controller 106, the signal acquisition unit, and the signal control unit are connected to the host computer 101 via Ethernet for command processing. The synchronization controller 106, the signal acquisition unit, and the signal control unit are connected via a command bus 102 for data stream transmission, wherein the command bus is, for example, a PCI bus (Peripheral Component Interconnect Bus, PCI Bus). The signal transceiver unit 118 is connected to the signal acquisition unit and the signal control unit for receiving signals fed back by the signal acquisition unit and the signal control unit or for sending signals to the signal acquisition unit and the signal control unit. The signal conversion unit 113 is connected to the synchronization controller 106, the signal acquisition unit, the signal control unit, and the signal transceiver unit 118. The signal conversion unit 113 receives the signal sent by the signal transceiver unit 118 and converts it and sends it to the synchronization controller 106, the signal acquisition unit, and the signal control unit.

[0042] In this embodiment, the signal transceiver unit 118 is, for example, a synchronous control sub-board, configured to receive feedback signals or send trigger signals and stop signals.

[0043] In this embodiment, the signal conversion unit 113 is, for example, a synchronous control mainboard level adapter board, which is used to convert the received signal format and send it to the synchronous controller 106. The signal conversion unit converts the acquired signal and sends it to the synchronous controller 106, and the signal sent by the synchronous controller 106 is converted and then transmitted to the signal acquisition unit, thus solving the problem of being unable to directly transmit control signals of different formats through hardware.

[0044] The signal acquisition unit includes a first CCD 109, a second CCD 110, a first image acquisition card 103, and a second image acquisition card 104. The first CCD 109 is connected to the command bus via the first image acquisition card 103, and the second CCD 110 is connected to the command bus via the second image acquisition card 104. The first CCD 109 is used for coaxial alignment measurement before measurement, and the second CCD 110 is used for exposure and image acquisition.

[0045] The signal control unit includes a motion controller 114 , a polarization controller, a vertical measurement controller 115 and an image quality controller 119 .

[0046] The motion controller 114 is used to control the movement of the stage, and the motion controller 114 is connected to the command bus via the motion control card 107 .

[0047] The polarization controller includes an X polarization controller 111 and a Y polarization controller 112. The X polarization controller 111 is used to control the opening and closing of a polarization shutter X 116, and the Y polarization controller 112 is used to control the opening and closing of a polarization shutter Y 117. The X polarization controller 111 and the Y polarization controller 112 are connected to a command bus via a multi-serial port card 105. For example, the model of the multi-serial port card 105 is a 232 multi-serial port card.

[0048] The vertical measurement controller 115 is used to control the Focus Sensor (FS) to measure the surface shape of the silicon wafer. The vertical measurement controller 115 is connected to the command bus through the vertical measurement control card 108.

[0049] The image quality controller 119 and the first CCD 109 and the second CCD 110 are used to control the operation of the first CCD 109 and the second CCD 110 .

[0050] This embodiment also provides a control method for a hardware synchronization control system, including:

[0051] The host computer sends the timing of the luminous etching process to the synchronous controller and motion control;

[0052] The signal transceiver unit collects the control signal sent by the signal control unit according to the timing of the photolithography process provided by the host computer, and distributes the signal sent by the synchronization controller to the signal control unit;

[0053] The signal conversion unit receives the signal sent by the signal transceiver unit and sends it to the synchronization controller after conversion, and converts the signal sent by the synchronization controller and then transmits it to the signal acquisition unit.

[0054] Specific, combined Figure 1 As shown, the control method includes the following steps:

[0055] The host computer sends the timing of the lithography process to the synchronization controller and motion control, and triggers the first point of the measurement queue; the timing of the lithography process is the queue parameter sent by the host computer.

[0056] After the signal transceiver unit 118 receives the stage in position feedback signal, the synchronization controller 106 sends a polarization shutter trigger signal and a vertical measurement stop trigger signal to open polarization shutter X and polarization shutter Y and close the autofocus detector shutter.

[0057] After the image quality controller 119 receives the feedback signal indicating that the polarization shutter X and the polarization shutter Y are fully opened and the second CCD exposure and image acquisition trigger signal, the second CCD performs exposure and image acquisition. After the second CCD exposure and image acquisition is completed, the polarization shutter X and the polarization shutter Y are simultaneously closed and an exposure and image acquisition completion feedback signal is issued.

[0058] After receiving the exposure and image acquisition completion feedback signal, the signal transceiver unit 118 sends a stage movement trigger signal to start measurement of the next point, and sends a self-focus detector shutter opening trigger signal.

[0059] The signal transceiver unit 118 sends a trigger signal for the autofocus detector to start measuring after receiving the feedback signal indicating that the polarization shutter X and the polarization shutter Y are closed.

[0060] After the vertical measurement controller 115 receives the autofocus detector measurement start trigger signal and the autofocus detector shutter opening trigger signal at the same time, the vertical measurement controller 115 controls the autofocus detector to start measuring the silicon wafer surface shape.

[0061] The signal conversion unit 118 is, for example, a synchronous control mainboard level adapter board, and the signal transceiver unit is, for example, a synchronous control daughter board.

[0062] Figure 2 is a flow chart of a control method of a hardware synchronization control system according to an embodiment of the present invention. Figure 3 This is a hardware synchronization control timing diagram of an embodiment of the present invention. Figure 1-Figure 3 The control method of hardware synchronous control system is introduced in detail.

[0063] Please refer to Figure 1 and Figure 2 In this embodiment, before measuring the surface shape of the silicon wafer, the first CCD109 first performs an alignment measurement to calibrate the error between the coordinates of the image quality subsystem (Angle-Resolved Spectrum, AS) and the motion stage subsystem (WaferStage, WS). After completing the alignment measurement of the image quality subsystem and the motion stage subsystem, the point-by-point measurement of the silicon wafer surface shape begins. The host computer 101 sends the queue parameters to the synchronous controller 106 and the motion control card 107. The host computer 101 software triggers the measurement of the first point in the queue, and starting from the second point in the measurement queue, it is triggered by the synchronous controller 106. The host computer 101 software triggers the measurement of the first point in the queue and sends a motion trigger signal WS_Trigger (Wafer Stage Trigger, stage trigger) to the synchronous controller 106 and the motion control card 107.

[0064] Next, follow these steps:

[0065] In step S01 , the motion controller 114 controls the movement of the stage after receiving the motion trigger signal WS_Trigger generated by the motion control card 107 . After the stage reaches a preset position, it outputs a position feedback signal XY_POS_Feedback (XY_POSition_Feedback, position feedback signal).

[0066] In step S02, after receiving the in-position feedback signal XY_POS_Feedback, the synchronization control subboard generates a CMP_Trigger (Compare Trigger) signal and sends the CMP_Trigger signal to the synchronization controller 106 via the synchronization control mainboard level adapter board. After receiving the CMP_Trigger signal, the synchronization controller 106 counts and compares, and then outputs the X shutter trigger signal X_Trigger or the Y shutter trigger signal Y_Trigger to the X polarization controller 111 or the Y polarization controller 112. At the same time, the synchronization controller 106 generates a trigger FS (focus sensor) to stop vertical measurement signal FS_Stop.

[0067] In step S03 , after receiving the X shutter trigger signal X_Trigger or the Y shutter trigger signal Y_Trigger, the X polarization controller 111 or the Y polarization controller 112 controls the polarization shutter X 116 or the polarization shutter Y 117 to open.

[0068] In step S04 , after the polarization shutter X 116 or the polarization shutter Y 117 is fully opened, an internal feedback signal is generated to the image quality controller 119 .

[0069] In step S05 , the vertical measurement controller 115 receives a vertical measurement stop signal FS_Stop, and the vertical measurement controller 115 controls the autofocus detector to stop measuring the wafer surface shape, and controls the vertical measurement shutter to start closing.

[0070] In step S06 , when the vertical measurement controller 115 controls the vertical measurement shutter to be completely closed, the vertical measurement controller 115 sends a vertical measurement shutter closing feedback signal FS_Off_Feedback.

[0071] In step S07 , after the synchronization control sub-board receives the vertical measurement shutter closing feedback signal FS_Off_Feedback sent by the vertical measurement controller 115 , the synchronization control sub-board sends a second CCD trigger signal PCO_PG_Trigger to the image quality controller 119 .

[0072] In step S08 , when the image quality controller 119 receives the feedback signal indicating that the polarization shutter X 116 or the polarization shutter Y 117 is fully opened and receives the second CCD trigger signal PCO_PG_Trigger, the second CCD 110 is triggered to expose and capture images.

[0073] In step S09 , after the second CCD 110 completes exposure and image acquisition, the image quality controller 119 controls the polarization shutter X 116 or the polarization shutter Y 117 to close, and outputs an image acquisition completion feedback signal PCO_PG_Feedback.

[0074] In step S10 , when the polarization shutter X 116 or the polarization shutter Y 117 is completely closed, the image quality controller 119 outputs a polarization shutter completely closed feedback signal XY_Feedback.

[0075] In step S11 , the synchronous control sub-board receives the second CCD110 image acquisition completion feedback signal PCO_PG_Feedback, and converts the second CCD110 image acquisition completion feedback signal PCO_PG_Feedback into a stage motion triggering signal WS_Trigger and a vertical measurement shutter opening triggering signal FS_Shut_On.

[0076] In step S12 , the synchronous control sub-board receives the polarization shutter fully closed feedback signal XY_Feedback, converts the polarization shutter fully closed feedback signal XY_Feedback into a vertical measurement start triggering signal FS_Trigger, and outputs the signal to the vertical measurement controller 115 .

[0077] In step S13, the vertical measurement controller 115 receives the FS_Shut_On signal for triggering the vertical measurement shutter to open, and controls the vertical measurement shutter to open. When the vertical measurement shutter is fully opened, the vertical measurement controller 115 generates an internal feedback signal.

[0078] In step S14 , when the vertical measurement controller 115 receives the feedback signal indicating that the vertical measurement shutter is fully opened and the vertical measurement start trigger signal FS_Trigger, the vertical measurement controller 115 controls the autofocus detector to start measurement.

[0079] After the motion controller 106 receives the image acquisition completion feedback signal PCO_PG_Feedback converted into the trigger stage motion signal WS_Trigger by the synchronization control sub-board 118, it triggers the second point of the measurement queue and tests according to the above steps, which will not be repeated here. The signal transceiver unit 118 collects the control signal sent by the signal control unit according to the timing of the lithography process, and distributes the signal sent by the synchronization controller 106 to the signal control unit. There is no need to call the software interface, which simplifies the system synchronization control process and reduces the time overhead of calling the software interface. This embodiment uses hardware synchronization to rebuild the synchronization control architecture, transmits the control signal through the control signal line, simplifies the synchronization mechanism of the whole machine, and reduces the time for the synchronization software to call the interface.

[0080] Please refer to Figure 3 Once the stage reaches its designated position, a signal indicating it has reached its designated position is fed back to the synchronization control subboard. Simultaneously, the vertical measurement controller signals the end of vertical measurement and begins closing the shutter. Simultaneously, the X or Y polarization trigger signal controls polarization shutter X or Y to open. The vertical measurement shutter fully closed feedback signal and the polarization shutter X or Y opening completion feedback signal are generated simultaneously with the second CCD exposure acquisition signal. After the second CCD exposure acquisition is complete, the vertical measurement shutter begins opening, and the stage begins its second point cycle. Once the vertical measurement shutter is fully open, vertical measurement begins measuring the wafer profile.

[0081] Figure 4 This is an integrated measurement path diagram of an embodiment of the present invention. Please refer to Figure 4 In this embodiment, the pads (points) on the silicon wafer to be measured can be divided into X polarization state and Y polarization state, such as Figure 4 As shown, PAD1 and PAD2 are in the X polarization state, PAD3 and PAD4 are in the Y polarization state, PAD5 and PAD6 are in the X polarization state, PAD7 and PAD8 are in the Y polarization state, and the cycle continues in sequence.

[0082] From the above, it can be seen that the hardware synchronization control system and control method thereof provided in the embodiment of the present invention include a host computer, a synchronization controller, a signal acquisition unit, a signal control unit, a signal transceiver unit, and a signal conversion unit. The signal transceiver unit is connected to the signal acquisition unit and the signal control unit, and the signal conversion unit is connected to the synchronization controller, the signal acquisition unit, the signal control unit, and the signal transceiver unit. The signal conversion unit converts the acquired signal and sends it to the synchronization controller, and the signal sent by the synchronization controller is converted and then transmitted to each signal acquisition unit, thereby solving the problem that different formats of control signals cannot be directly transmitted through hardware. The signal transceiver unit collects the control signal sent by the signal control unit according to the timing of the lithography process, and distributes the signal sent by the synchronization controller to the signal control unit, without calling the software interface, simplifying the system synchronization control process and reducing the time overhead of calling the software interface. The present invention uses hardware synchronization to rebuild the synchronization control architecture, transmits the control signal through the control signal line, simplifies the whole machine synchronization mechanism, and reduces the time of the synchronization software calling the interface.

[0083] The above description is only a description of the preferred embodiments of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A hardware synchronization control system, characterized in that: It includes a host computer, a synchronous controller, a signal acquisition unit, a signal control unit, a signal transceiver unit, and a signal conversion unit; The synchronization controller, the signal acquisition unit, and the signal control unit are connected to the host computer via a command bus; the signal acquisition unit includes a second CCD; the signal control unit includes an image quality controller for controlling the operation of the second CCD; the signal control unit also includes a vertical measurement controller, which is used to measure the surface shape of the silicon wafer; The signal transceiver unit collects the control signal sent by the signal control unit according to the timing of the photolithography process provided by the host computer, and distributes the signal sent by the synchronization controller to the signal control unit; The signal conversion unit is used to receive the signal sent by the signal transceiver unit and send it to the synchronization controller after conversion, and to convert the signal sent by the synchronization controller and then transmit it to the signal acquisition unit; After the signal transceiver unit receives the stage in-position feedback signal, the synchronization controller sends a polarization shutter trigger signal and simultaneously sends a vertical measurement stop trigger signal to open the polarization shutter and close the autofocus detector shutter; After the image quality controller receives the polarization shutter fully open feedback signal and the second CCD exposure acquisition trigger signal at the same time, the second CCD performs exposure acquisition; after the second CCD exposure acquisition is completed, the polarization shutter is closed and an exposure acquisition completion feedback signal is issued; After receiving the exposure and image acquisition completion feedback signal, the signal transceiver unit sends a stage movement trigger signal to start measurement of the next point, and sends a self-focus detector shutter opening trigger signal; The signal transceiver unit sends a trigger signal for the autofocus detector to start measuring after receiving the polarization shutter closing feedback signal; After the vertical measurement controller receives the autofocus detector start measurement trigger signal and the autofocus detector shutter open trigger signal at the same time, the vertical measurement controller controls the autofocus detector to start measuring the silicon wafer surface shape.

2. The hardware synchronization control system according to claim 1, characterized in that: The signal transceiver unit includes a synchronous control sub-board, and the synchronous control sub-board is used to receive feedback signals or send trigger signals and stop signals.

3. The hardware synchronization control system according to claim 1, characterized in that: The signal conversion unit includes a synchronous control mainboard level adapter board, which is used to receive the signal sent by the signal transceiver unit and convert the received signal into a format before sending it to the synchronous controller.

4. The hardware synchronization control system according to claim 1, characterized in that: The signal acquisition unit further includes a first CCD, a first image acquisition card and a second image acquisition card. The first CCD is connected to the command bus via the first image acquisition card, and the second CCD is connected to the command bus via the second image acquisition card.

5. The hardware synchronization control system according to claim 4, characterized in that: The image quality controller is also used to control the operation of the first CCD.

6. The hardware synchronization control system according to claim 1, characterized in that: The signal control unit further includes a motion controller and a polarization controller. The motion controller is used to control the movement of the motion mechanism, and the polarization controller is used to control the opening and closing of the polarization shutter.

7. The hardware synchronization control system according to claim 6, characterized in that: The motion controller is connected to the command bus via a motion control card, the polarization controller is connected to the command bus via a multi-serial port card, and the vertical measurement controller is connected to the command bus via a vertical measurement control card.

8. A control method for a hardware synchronous control system, characterized in that: include The host computer sends the timing of the luminous etching process to the synchronous controller and motion control; The signal transceiver unit collects the control signal sent by the signal control unit according to the timing of the photolithography process provided by the host computer, and distributes the signal sent by the synchronization controller to the signal control unit; The signal conversion unit receives the signal sent by the signal transceiver unit and sends it to the synchronization controller after conversion, and transmits the signal sent by the synchronization controller to the signal acquisition unit after conversion; After the signal transceiver unit receives the stage in-position feedback signal, the synchronization controller sends a polarization shutter trigger signal and simultaneously sends a vertical measurement stop trigger signal to open the polarization shutter and close the autofocus detector shutter; After the image quality controller receives the polarization shutter fully open feedback signal and the second CCD exposure acquisition trigger signal at the same time, the second CCD performs exposure acquisition; after the second CCD exposure acquisition is completed, the polarization shutter is closed and an exposure acquisition completion feedback signal is issued; After receiving the exposure and image acquisition completion feedback signal, the signal transceiver unit sends a stage movement trigger signal to start the measurement of the next point, and sends a self-focus detector shutter opening trigger signal; The signal transceiver unit sends a trigger signal for the autofocus detector to start measuring after receiving the polarization shutter closing feedback signal; After the vertical measurement controller receives the autofocus detector start measurement trigger signal and the autofocus detector shutter opening trigger signal at the same time, the vertical measurement controller controls the autofocus detector to start measuring the silicon wafer surface shape.

9. The control method of the hardware synchronization control system according to claim 8, characterized in that: Before the signal transceiver unit receives the stage in-position feedback signal, the motion controller controls the stage movement after receiving the motion controller trigger signal. After the stage moves to the preset position, it outputs the in-position feedback signal to the signal transceiver unit.

10. The control method of the hardware synchronization control system according to claim 8, characterized in that: When measuring the first point of the queue, the motion controller trigger signal is triggered by the host computer software.

11. The control method of the hardware synchronization control system according to claim 8, characterized in that: The measurement queue starts from the second point, and the motion controller trigger signal is triggered by the signal transceiver unit.

12. The control method of the hardware synchronization control system according to claim 8, characterized in that: After the synchronization controller sends a polarization shutter trigger signal and simultaneously sends a vertical measurement stop trigger signal, the vertical measurement controller stops measuring the silicon wafer surface shape and controls the shutter to start closing after receiving the vertical measurement stop trigger signal.

13. The control method of the hardware synchronization control system according to claim 11, characterized in that: After receiving the stage in-position feedback signal, the signal transceiver unit sends a comparison trigger signal to the signal conversion unit. The signal conversion unit sends the comparison trigger signal to the synchronization controller for counting and comparison, and sends a polarization shutter trigger signal and a vertical measurement stop trigger signal at the same time.

14. The control method of the hardware synchronization control system according to claim 12, wherein: The signal conversion unit is a synchronous control mainboard level adapter board.

15. The control method of the hardware synchronization control system according to claim 11, wherein: The vertical measurement controller controls the shutter to be fully closed and then sends a shutter fully closed feedback signal to the signal transceiver unit.

16. The control method of the hardware synchronization control system according to claim 13, characterized in that: After receiving the shutter fully closed feedback signal, the signal transceiver unit sends a second CCD exposure and image acquisition trigger signal to the image quality controller.

17. The control method of the hardware synchronization control system according to claim 8, characterized in that: The signal transceiver unit is a synchronous control sub-board.

18. A step-and-scan projection lithography machine, characterized in that: The method comprises the hardware synchronization control system according to any one of claims 1 to 7.

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