Perpendicularity detection method, system, device, apparatus and readable storage medium

Abstract

The present application provides a kind of perpendicularity detection method, system, device, equipment and readable storage medium, perpendicularity detection method is applied to including the perpendicularity detection system of measured system, indicating light source, focusing mirror, light receiving cylinder, double flat crystal, half mirror and charge coupled device, measured system includes light beam emission port and reference surface;Including: record the first light spot position of the indicating light of indicating light source projection on charge coupled device;Adjust the pitch position of measured system, determine the second light spot position of indicating light projection on charge coupled device after adjustment;In the case where first light spot position and second light spot position coincide, according to the thickness and refractive index of half mirror, the perpendicularity deviation amount of the optical axis of light beam emission port and reference surface and the perpendicularity detection result of measured system are determined.The present application realizes the perpendicularity detection of the optical axis of measured system and reference surface.

Description

Technical Field

[0001] This invention relates to the field of detection technology, and in particular to a method, system, apparatus, equipment, and readable storage medium for detecting perpendicularity. Background Technology

[0002] In applications requiring high beam directivity, the perpendicularity of the optical system's optical axis to a reference plane is often specified. This perpendicularity is typically achieved through mechanical design to ensure the accuracy of the reference plane and lens mounting surface, demanding high precision in manufacturing and assembly. During assembly and acceptance testing, the perpendicularity of the optical axis to the reference plane is frequently checked, but current testing methods are limited. Existing systems for testing the optical axis perpendicularity to the reference plane require multiple optical devices, including a high-precision adjustment platform, collimator, and autocollimator, making the systems complex and costly. Summary of the Invention

[0003] This invention provides a method, system, device, equipment, and readable storage medium for verticality detection, in order to solve the technical problems of existing verticality detection schemes being complex and costly.

[0004] This invention provides a perpendicularity detection method, which is applied to a perpendicularity detection system including a system under test, an indicator light source, a semi-reflective mirror, and a charge-coupled device. The system under test includes a beam emission port and a reference plane. The perpendicularity detection method includes:

[0005] Record the position of the first spot of the indicator light from the indicator light source projected onto the charge-coupled device;

[0006] Adjust the elevation of the system under test to determine the position of the second spot of the indicator light projected onto the charge-coupled device after adjustment;

[0007] When the position of the first light spot coincides with the position of the second light spot, the perpendicularity deviation between the beam emission port and the reference plane is determined according to the thickness and refractive index of the semi-reflective mirror.

[0008] The verticality detection result of the tested system is determined based on the verticality deviation.

[0009] According to a verticality detection method provided by the present invention, the verticality detection system further includes a light-collecting tube; the step of recording the position of the first light spot projected by the indicator light of the indicator light source onto the charge-coupled device includes:

[0010] The light-collecting tube processes the indicator light transmitted through the semi-reflective lens from the indicator light source;

[0011] The indicator light reflected by the semi-reflective lens is projected onto the charge-coupled device to obtain the position of the first light spot.

[0012] According to the present invention, a verticality detection method and a verticality detection system further include a focusing lens and a double-sided flat crystal; the step of adjusting the pitch azimuth of the system under test and determining the position of the second spot of the indicator light projected onto the charge-coupled device after adjustment includes:

[0013] The indicator light is projected onto the double-sided flat crystal that is in close contact with the reference surface through the semi-reflective lens and the focusing lens;

[0014] Adjust the elevation of the system under test, and project the indicator light reflected by the double-sided flat crystal onto the charge-coupled device to obtain the position of the second spot.

[0015] According to a perpendicularity detection method provided by the present invention, the step of determining the perpendicularity deviation between the optical axis of the emitted light from the beam emission port and the reference plane based on the thickness and refractive index of the semi-reflective mirror when the positions of the first and second light spots coincide includes:

[0016] When the position of the first spot coincides with the position of the second spot, the light to be tested from the beam emission port is reflected onto the charge-coupled device by the focusing lens, thereby determining the position of the third spot projected onto the charge-coupled device by the light to be tested.

[0017] The spot position deviation is calculated based on the thickness and refractive index of the semi-reflective lens;

[0018] Based on the focal length of the focusing lens, the position deviation of the light spot, the position of the second light spot, and the position of the third light spot, the perpendicularity deviation between the optical axis of the light emitted from the beam emission port and the reference plane is determined.

[0019] This invention provides a perpendicularity detection system, comprising a system under test, an indicator light source, a semi-reflective mirror, a focusing lens, a light-collecting tube, a double-sided flat crystal, and a charge-coupled device; the system under test includes a beam emission port and a reference surface; wherein:

[0020] The semi-reflective lens is disposed at the light outlet of the indicator light source, and the semi-reflective lens is also disposed on the surface of the charge-coupled device.

[0021] The double-sided flat crystal is closely attached to the reference plane, and the charge-coupled device and the double-sided flat crystal are located at the focal plane of the focusing lens;

[0022] The light-collecting tube is positioned in the light-emitting direction of the indicator light source.

[0023] The present invention also provides a verticality detection device, comprising:

[0024] The first spot position recording module is used to record the position of the first spot projected by the indicator light of the indicator light source onto the charge-coupled device;

[0025] The second spot position determination module is used to adjust the elevation of the system under test and determine the position of the second spot projected by the indicator light on the charge-coupled device after adjustment, so that the position of the first spot coincides with the position of the second spot.

[0026] The perpendicularity deviation determination module is used to determine the perpendicularity deviation between the beam emission port and the reference plane based on the thickness and refractive index of the semi-reflective mirror when the positions of the first and second beam spots coincide.

[0027] The verticality detection result determination module is used to determine the verticality detection result of the tested system based on the verticality deviation.

[0028] The present invention also provides an electronic device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the program to implement the verticality detection method as described above.

[0029] The present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the perpendicularity detection method as described above.

[0030] The present invention also provides a computer program product, including a computer program that, when executed by a processor, implements the verticality detection method as described above.

[0031] The perpendicularity detection method, system, device, equipment, and readable storage medium provided by this invention record the position of the first spot projected by the indicator light of the indicator light source onto the charge-coupled device, then adjust the elevation of the system under test to determine the position of the second spot projected by the indicator light onto the charge-coupled device after adjustment. When the positions of the first and second spots coincide, the perpendicularity deviation between the optical axis of the emitted light from the beam emitter and the reference plane is determined based on the thickness and refractive index of the semi-reflective mirror. Finally, the perpendicularity detection result of the system under test is determined based on the perpendicularity deviation. By utilizing the positional connection relationship of each component in the perpendicularity detection system and the perpendicularity detection scheme based on the perpendicularity detection system, the perpendicularity detection of the optical axis of the system under test and the reference plane is realized. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0033] Explanation of reference numerals in the attached figures:

[0034] label name label name 1 Beam emission port 6 45° half-reflective mirror 2 Reference plane 7 Light receiver 3 Double-sided flat crystal 8 Charge-coupled devices 4 Focusing lens 9 0° half-reflective mirror 5 Indicator Light Source

[0035] Figure 1 This is one of the flowcharts of the verticality detection method provided by the present invention;

[0036] Figure 2 This is one of the structural schematic diagrams of the verticality detection system provided by the present invention;

[0037] Figure 3 This is the second schematic diagram of the verticality detection system provided by the present invention;

[0038] Figure 4 This is the second flowchart of the verticality detection method provided by the present invention;

[0039] Figure 5 This is a schematic diagram of a semi-reflective lens in the perpendicularity detection system provided by the present invention;

[0040] Figure 6 This is a schematic diagram of the verticality detection device provided by the present invention;

[0041] Figure 7 This is a schematic diagram of the structure of the electronic device provided by the present invention. Detailed Implementation

[0042] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0043] The following is combined with Figures 1-4 The verticality detection method of the present invention is described.

[0044] Please refer to Figure 1 The present invention provides a method for detecting verticality, comprising:

[0045] Step 100: Record the position of the first spot of the indicator light from the indicator light source projected onto the charge-coupled device;

[0046] Specifically, the verticality detection method provided by this invention is applied to, for example... Figure 2 The perpendicularity detection system shown has one semi-reflective mirror at a 45° angle to the light-emitting plane of the indicator light source, and another semi-reflective mirror in close contact with the charge-coupled device (CCD) at a 0° angle. The indicator light emitted from the indicator light source is reflected by the semi-reflective mirror and then perpendicularly illuminates the other semi-reflective mirror in close contact with the CCD. After transmission through this second semi-reflective mirror, the indicator light hits the CCD, and the center position of the indicator light is recorded as the position of the first light spot.

[0047] Step 200: Adjust the pitch of the system under test and determine the position of the second spot of the indicator light projected onto the charge-coupled device after adjustment;

[0048] Specifically, the semi-reflective lens, which is in close contact with the charge-coupled device (CCD), reflects the vertically illuminating indicator light back along its original path. The light then passes through the semi-reflective lens, which forms a 45° angle with the light-emitting plane of the indicator light source, and hits the focusing lens. After being reflected by the focusing lens, the light then illuminates the double-sided flat crystal, which is in close contact with the reference plane. The double-sided flat crystal is located at the focal plane of the focusing lens. At this point, the pitch of the system under test is adjusted so that the indicator light reflected by the double-sided flat crystal hits the CCD, and its center position is recorded as the position of the second spot.

[0049] Step 300: When the position of the first light spot coincides with the position of the second light spot, determine the perpendicularity deviation between the optical axis of the light emitted from the beam emission port and the reference plane based on the thickness and refractive index of the semi-reflective mirror.

[0050] Specifically, when the positions of the first and second light spots coincide, the indicator light source, the semi-reflective mirror forming a 45° angle with the output plane of the indicator light source, and the light-collecting tube are removed. The beam emission port of the system under test is then opened, emitting the light to be tested. This light is reflected by the focusing lens onto the charge-coupled device (CCD), and the center position of the light hitting the CCD is recorded as the position of the third light spot. The angular deviation between the optical axes of the indicator light and the light to be tested is calculated; this angular deviation is the perpendicularity deviation between the optical axis of the light to be tested and the reference plane. Based on the thickness and refractive index of the semi-reflective mirror forming a 45° angle with the output plane of the indicator light source, the light spot position deviation caused by the semi-reflective mirror can be calculated. Finally, based on the positions of the second and third light spots, the light spot position deviation, and the focal length of the focusing lens, the perpendicularity deviation between the optical axis of the light emitted from the beam emission port and the reference plane is calculated.

[0051] Step 400: Determine the verticality detection result of the tested system based on the verticality deviation.

[0052] Specifically, based on the calculated perpendicularity deviation between the optical axis of the emitted light from the beam emission port and the reference plane, the perpendicularity test result between the optical axis of the emitted light from the beam emission port and the reference plane in the system under test is determined.

[0053] This embodiment records the position of the first spot projected by the indicator light from the indicator light source onto the charge-coupled device (CCD), then adjusts the elevation of the system under test to determine the position of the second spot projected by the indicator light onto the CCD after adjustment. When the positions of the first and second spots coincide, the perpendicularity deviation between the optical axis of the emitted light from the beam emitter and the reference plane is determined based on the thickness and refractive index of the semi-reflective mirror. Finally, the perpendicularity detection result of the system under test is determined based on the perpendicularity deviation. By considering the positional connection relationship of each component in the perpendicularity detection system and the perpendicularity detection scheme based on the perpendicularity detection system, the perpendicularity detection of the optical axis of the system under test and the reference plane is realized.

[0054] In one embodiment, the verticality detection method provided in this application may further include:

[0055] Step 110: The indicator light transmitted through the semi-reflective lens from the indicator light source is processed by the light-collecting tube;

[0056] Step 120: Project the indicator light reflected by the semi-reflective lens onto the charge-coupled device to obtain the position of the first light spot.

[0057] Specifically, the verticality detection system also includes a light-collecting tube. The indicator light emitted by the indicator light source passes through a semi-reflective lens and is processed by the light-collecting tube. After being reflected by the semi-reflective lens, the indicator light emitted by the indicator light source is perpendicularly irradiated onto another semi-reflective lens that is in close contact with the charge-coupled device. After being transmitted through this semi-reflective lens, the indicator light hits the charge-coupled device, and the center position of the indicator light is recorded as the position of the first light spot.

[0058] In this embodiment, the position of the first light spot is determined by a semi-reflective mirror and a charge-coupled device.

[0059] In one embodiment, the verticality detection method provided in this application may further include:

[0060] Step 210: Project the indicator light onto the double-sided flat crystal that is in close contact with the reference surface through the semi-reflective lens and the focusing lens;

[0061] Step 220: Adjust the pitch of the system under test, and project the indicator light reflected by the double-sided flat crystal onto the charge-coupled device to obtain the position of the second spot.

[0062] Specifically, the semi-reflective lens, which is in close contact with the charge-coupled device (CCD), reflects the vertically illuminating indicator light back along its original path. The light then passes through the semi-reflective lens, which forms a 45° angle with the light-emitting plane of the indicator light source, and hits the focusing lens. After being reflected by the focusing lens, the light then illuminates the double-sided flat crystal, which is in close contact with the reference plane. The double-sided flat crystal is located at the focal plane of the focusing lens. At this time, the pitch of the system under test is adjusted so that the indicator light reflected by the double-sided flat crystal hits the CCD, and its center position is recorded as the position of the second spot.

[0063] In this embodiment, the position of the second spot is determined by a double-sided flat crystal and a charge-coupled device.

[0064] Please refer to Figure 4 In one embodiment, the verticality detection method provided in this application may further include:

[0065] Step 310: When the position of the first light spot coincides with the position of the second light spot, the light to be tested from the beam emission port is reflected onto the charge-coupled device by the focusing lens to determine the position of the third light spot projected onto the charge-coupled device by the light to be tested.

[0066] Step 320: Calculate the spot position deviation based on the thickness and refractive index of the semi-reflective mirror;

[0067] Step 330: Determine the perpendicularity deviation between the optical axis of the light emitted from the beam emission port and the reference plane based on the focal length of the focusing lens, the position deviation of the light spot, the position of the second light spot, and the position of the third light spot.

[0068] Specifically, when the positions of the first and second light spots coincide, remove... Figure 2 After steps 5, 6, and 7, the beam emission port of the system under test is opened to emit the test light. The test light is reflected onto the charge-coupled device (CCD) by the focusing lens. The position of the third spot projected onto the CCD is determined. Based on the thickness and refractive index of the semi-reflective mirror (SMM) forming a 45° angle with the light-emitting plane of the indicator light, the spot position deviation caused by the SMM can be calculated. The angular deviation between the optical axes of the indicator light and the test light is then calculated; this angular deviation is the perpendicularity deviation between the optical axis of the test light and the reference plane. Finally, based on the focal length of the focusing lens, the spot position deviation, the position of the second spot, and the position of the third spot, the perpendicularity deviation between the beam emission port and the reference plane is calculated.

[0069] refer to Figure 5The thickness and refractive index of the semi-reflective lens forming a 45° angle with the light-emitting plane of the indicator light source are d and n, respectively. The position deviation of the light spot caused by the semi-reflective lens forming a 45° angle with the light-emitting plane of the indicator light source is Δd. The focal length of the focusing lens is f. The position of the second light spot is D2, the position of the third light spot is D3, the parallelism deviation between the optical axis of the light to be measured and the indicator light is α. The angular deviation α between the optical axis of the indicator light and the optical axis of the light to be measured is the perpendicularity deviation between the optical axis of the light to be measured and the reference plane.

[0070]

[0071]

[0072]

[0073] In this embodiment, the perpendicularity deviation between the optical axis of the emitted light from the beam emission port and the reference plane is calculated by using the focal length of the focusing lens, the position deviation of the light spot, the position of the second light spot, and the position of the third light spot.

[0074] The present invention also provides a perpendicularity detection system, which includes a system under test, an indicator light source, a semi-reflective mirror, a focusing lens, a double-sided flat crystal, a light-collecting tube, and a charge-coupled device (CCD). The system under test includes a beam exit port and a reference surface. The semi-reflective mirror is disposed at the exit port of the indicator light source and is also disposed on the surface of the CCD. The double-sided flat crystal is in close contact with the reference surface, and the CCD and the double-sided flat crystal are located at the focal plane of the focusing lens. The light-collecting tube is disposed in the light-emitting direction of the indicator light source.

[0075] Specifically, such as Figure 2 and Figure 3 As shown, the perpendicularity detection system includes a system under test, an indicator light source 5, a semi-reflective mirror 6 / 9, a focusing lens 4, a light-collecting tube 7, and a charge-coupled device (CCD) 8. The system under test includes a double-sided flat crystal 3 and a reference surface 2. The semi-reflective mirror 6 is positioned at the light outlet of the indicator light source 5, forming a 45° angle with the light-emitting surface of the indicator light source 5. The semi-reflective mirror 9 is also positioned on the surface of the CCD 8, in close contact with the surface of the CCD 8. The CCD 8 and the double-sided flat crystal 3 are located at the focal plane of the focusing lens 4. The light-collecting tube 7 is positioned in the light-emitting direction of the indicator light source 5. The system under test also includes a beam emission port 1.

[0076] The verticality detection device provided by the present invention is described below. The verticality detection device described below and the verticality detection method described above can be referred to in correspondence.

[0077] Please refer to Figure 6 The present invention also provides a verticality detection device, comprising:

[0078] The first spot position recording module 601 is used to record the position of the first spot projected by the indicator light of the indicator light source onto the charge-coupled device;

[0079] The second spot position determination module 602 is used to adjust the elevation of the system under test and determine the position of the second spot projected by the indicator light on the charge-coupled device after adjustment, so that the position of the first spot coincides with the position of the second spot.

[0080] The perpendicularity deviation determination module 603 is used to determine the perpendicularity deviation between the optical axis of the light emitted from the beam emission port and the reference plane based on the thickness and refractive index of the semi-reflective mirror when the positions of the first light spot and the second light spot coincide.

[0081] The verticality detection result determination module 604 is used to determine the verticality detection result of the tested system based on the verticality deviation.

[0082] Optionally, the verticality detection system further includes a light-collecting tube; the first light spot position recording module includes:

[0083] An indicator light processing unit is used to process the indicator light transmitted from the indicator light source through the semi-reflective lens via the light-collecting tube;

[0084] The first indicator light projection unit is used to project the indicator light reflected by the semi-reflective lens from the indicator light source onto the charge-coupled device to obtain the position of the first light spot.

[0085] Optionally, the perpendicularity detection system further includes a focusing lens and a double-sided flat crystal; the second spot position determination module includes:

[0086] The second indicator light projection unit is used to project the indicator light onto a double-sided flat crystal that is in close contact with the reference surface through the semi-reflective lens and the focusing lens;

[0087] The system under test adjustment unit is used to adjust the pitch of the system under test and project the indicator light reflected by the double-sided flat crystal onto the charge-coupled device to obtain the position of the second spot.

[0088] Optionally, the verticality deviation determination module includes:

[0089] The test light reflection unit is used to reflect the test light from the beam emission port onto the charge-coupled device through the focusing lens when the first light spot position coincides with the second light spot position, thereby determining the position of the third light spot projected by the test light onto the charge-coupled device;

[0090] The spot position deviation calculation unit is used to calculate the spot position deviation based on the thickness and refractive index of the semi-reflective lens.

[0091] The perpendicularity deviation determination unit is used to determine the perpendicularity deviation between the beam emission port and the reference plane based on the focal length of the focusing lens, the spot position deviation, the second spot position, and the third spot position.

[0092] Figure 7 An example is a schematic diagram of the physical structure of an electronic device, such as... Figure 7 As shown, the electronic device may include a processor 710, a communications interface 720, a memory 730, and a communication bus 740. The processor 710, communications interface 720, and memory 730 communicate with each other via the communication bus 740. The processor 710 can call logical instructions from the memory 730 to execute a perpendicularity detection method.

[0093] Furthermore, the logical instructions in the aforementioned memory 730 can be implemented as software functional units and, when sold or used as independent products, can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention, essentially, or the part that contributes to the prior art, or a part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of the present invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0094] On the other hand, the present invention also provides a computer program product, the computer program product including a computer program, the computer program being stored on a non-transitory computer-readable storage medium, and when the computer program is executed by a processor, the computer is able to execute the verticality detection methods provided by the above methods.

[0095] In another aspect, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, is implemented to perform the perpendicularity detection methods provided by the methods described above.

[0096] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0097] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods described in the various embodiments or some parts of the embodiments.

[0098] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method of detecting perpendicularity, characterized by, The perpendicularity detection method is applied to a perpendicularity detection system, and the perpendicularity detection system comprises a measured system, an indicating light source, a semi-reflective semi-transmissive lens and a charge coupled device; the measured system comprises a light beam emitting port and a reference surface; wherein: A first light spot position of the indicating light of the indicating light source projected on the charge coupled device is recorded; An elevation position of the measured system is adjusted, and a second light spot position of the indicating light projected on the charge coupled device after adjustment is determined; In the case that the first light spot position coincides with the second light spot position, a perpendicularity deviation amount of the light beam emitting port and the reference surface is determined according to a thickness and a refractive index of the semi-reflective semi-transmissive lens; the semi-reflective semi-transmissive lens comprises a first semi-reflective semi-transmissive lens and a second semi-reflective semi-transmissive lens; the first semi-reflective semi-transmissive lens is arranged at a light emitting port of the indicating light source and forms a 45° angle with a light emitting surface of the indicating light source; the second semi-reflective semi-transmissive lens is arranged on a surface of the charge coupled device and is in close contact with the surface of the charge coupled device; A perpendicularity detection result of the measured system is determined according to the perpendicularity deviation amount.

2. The method of detecting perpendicularity according to claim 1, wherein The perpendicularity detection system further comprises a light collecting cylinder; the step of recording the first light spot position of the indicating light of the indicating light source projected on the charge coupled device comprises: The indicating light of the indicating light source transmitted through the semi-reflective semi-transmissive lens is processed through the light collecting cylinder; The indicating light of the indicating light source reflected by the semi-reflective semi-transmissive lens is projected on the charge coupled device to obtain the first light spot position.

3. The method of detecting perpendicularity according to claim 1, wherein The perpendicularity detection system further comprises a focusing mirror and a double-sided flat crystal; the step of adjusting the elevation position of the measured system to determine the second light spot position of the indicating light projected on the charge coupled device after adjustment comprises: The indicating light is projected on the double-sided flat crystal in close contact with the reference surface through the semi-reflective semi-transmissive lens and the focusing mirror; The elevation position of the measured system is adjusted, and the indicating light reflected by the double-sided flat crystal after adjustment is projected on the charge coupled device to obtain the second light spot position.

4. The method of detecting perpendicularity according to claim 3, wherein In the case that the first light spot position coincides with the second light spot position, the step of determining the perpendicularity deviation amount of the light beam emitting port and the reference surface according to the thickness and the refractive index of the semi-reflective semi-transmissive lens comprises: In the case that the first light spot position coincides with the second light spot position, the light to be measured of the light beam emitting port is reflected on the charge coupled device through the focusing mirror to determine a third light spot position of the light to be measured projected on the charge coupled device; A light spot position deviation is calculated according to the thickness and the refractive index of the semi-reflective semi-transmissive lens; The perpendicularity deviation amount of the light beam emitting port and the reference surface is determined according to a focal length of the focusing mirror, the light spot position deviation, the second light spot position and the third light spot position.

5. A plumbness detection system characterized by, The perpendicularity detection system comprises a measured system, an indicating light source, a focusing mirror, a light collecting cylinder, a double-sided flat crystal, a semi-reflective semi-transmissive lens and a charge coupled device; the measured system comprises a light beam emitting port and a reference surface; wherein: The half mirror includes a first half mirror and a second half mirror; the first half mirror is arranged at the light outlet of the indicator light source and forms a 45° angle with the light outlet surface of the indicator light source; and the second half mirror is arranged on the surface of the charge coupled device and is in close contact with the surface of the charge coupled device. The double flat crystal is in close contact with the reference surface, and the charge coupled device and the double flat crystal are located on the focal plane of the focusing mirror. The light collecting cylinder is arranged in the light emitting direction of the indicator light source.

6. A perpendicularity detection device characterized by comprising: The method comprises the following steps: The first light spot position recording module records the first light spot position of the indicator light of the indicator light source on the charge coupled device; The second light spot position determining module adjusts the pitch of the measured system, and determines the second light spot position of the indicator light on the charge coupled device after adjustment, so that the first light spot position coincides with the second light spot position; The perpendicularity deviation amount determining module determines the perpendicularity deviation amount of the optical axis of the light emitted by the light emitting port from the reference surface according to the thickness and refractive index of the half mirror when the first light spot position coincides with the second light spot position; the half mirror includes a first half mirror and a second half mirror; the first half mirror is arranged at the light outlet of the indicator light source and forms a 45° angle with the light outlet surface of the indicator light source; and the second half mirror is arranged on the surface of the charge coupled device and is in close contact with the surface of the charge coupled device; The perpendicularity detection result determining module determines the perpendicularity detection result of the measured system according to the perpendicularity deviation amount.

7. An electronic device comprising a memory, a processor, and a computer program stored on the memory and executable on the processor, characterized in that, The processor executes the program to realize the perpendicularity detection method of any one of claims 1 to 4.

8. A non-transitory computer-readable storage medium having stored thereon a computer program, characterized in that, The computer program is executed by the processor to realize the perpendicularity detection method of any one of claims 1 to 4.

9. A computer program product comprising a computer program, characterized in that, The computer program is executed by the processor to realize the perpendicularity detection method of any one of claims 1 to 4.

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