A sealing and filling helium device and method

Abstract

The application discloses a sealing and welding helium filling device, which comprises a gas nozzle, a first gas source, a first gas path valve group, a second gas source and a second gas path valve group, wherein the gas nozzle is provided with a first gas path interface, a second gas path interface and a laser and mixed gas nozzle; the first gas source is connected with the first gas path interface, and the second gas source is connected with the second gas path interface; during continuous sealing and welding, mixed gas is formed in the gas nozzle and injected from the laser and mixed gas nozzle from the gap between the cover plate and the cavity. The application also discloses a sealing and welding helium filling method, which comprises the following steps: welding the cover plate on the cavity by spot welding, wherein the first gas path valve group is in an open state during the spot welding; welding the cover plate on the cavity by continuous sealing and welding, wherein the first gas path valve group and the second gas path valve group are both in the open state during the continuous sealing and welding, and the mixed gas in the gas nozzle is injected into the cavity from the gap between the cover plate and the cavity. The sealing and welding and the helium filling can be simultaneously completed, and the working efficiency is high.

Description

Technical Field

[0001] This application relates to the field of welding technology, and in particular to a sealing welding helium filling device and method. Background Technology

[0002] In microwave components / hybrid integrated circuits, bare chip assembly is required, necessitating hermetic treatment of the product's metal cavity to ensure internal atmosphere stability. Common sealing methods include solder joint sealing, laser soldering, and parallel soldering. After sealing, the hermeticity is tested according to method 1014.2 of GJB 548B-2005 Microelectronic Device Test Methods and Procedures. This standard provides the following two testing methods:

[0003] One method involves pressurizing the product with helium before filling it with helium for sealing testing, followed by airtightness testing. However, this method has the disadvantages of long pressurization time and very low testing efficiency. Also, if the cover plate is large, insufficient consideration may be given to its strength, which can easily lead to plastic deformation and affect the use of the product.

[0004] Another method involves filling the sealing process with helium first, and then using a mass spectrometer to directly test the airtightness. The advantage of this method is that it does not require helium pressurization and can be tested directly, which greatly improves the testing efficiency. At the same time, regardless of the size of the cover plate, it is less likely to experience plastic deformation due to strength issues.

[0005] Currently, the main method for filling hermetic packages with helium involves pre-installing a helium filling port on the shell, completing the shell sealing process, filling the shell with helium, and finally sealing the filling port for final hermeticity testing. However, this process requires a second sealing of the filling port after the shell is sealed, making the manufacturing process relatively complex. Furthermore, controlling the internal atmosphere is difficult for products with specific requirements. Additionally, existing ordinary sealing equipment cannot complete the sealing-helium filling-sealing process in one step, and custom-designed equipment would be very costly. Summary of the Invention

[0006] The purpose of this application is to provide a sealing and helium-filling device and method that can effectively simplify the helium-filling process, facilitate rapid and efficient subsequent testing, and thus effectively reduce the cost of sealing and helium-filling.

[0007] To solve the above-mentioned technical problems, this application provides the following technical solution:

[0008] A helium-filled sealing device, comprising:

[0009] The nozzle is equipped with a first air path interface, a second air path interface, and a laser and mixed air nozzle;

[0010] The first gas source and the first gas path valve group are connected to the first gas path interface through the first gas path valve group. The first gas source is used to provide nitrogen.

[0011] The second gas source and the second gas path valve group are connected to the second gas path interface through the second gas path valve group. The second gas source is used to provide helium.

[0012] The first and second gas path valve groups are used to open simultaneously during continuous sealing welding to form a mixed gas in the gas nozzle, which is then injected into the cavity from the gap between the cover plate to be sealed and the cavity through the laser and the mixed gas nozzle.

[0013] Preferably, the first air circuit valve group includes a first air circuit shut-off valve, a first air circuit pressure regulating valve, and a first air circuit solenoid valve connected in sequence.

[0014] Preferably, the first air path solenoid valve is installed inside the glove box of the sealing and welding machine, the electrical part of the first air path solenoid valve is connected to the control circuit of the sealing and welding machine, and the air path outlet of the first air path solenoid valve is connected to the first air path interface; the first air path pressure regulating valve is installed outside the glove box of the sealing and welding machine, and the first air path pressure regulating valve is connected to the air path inlet of the first air path solenoid valve.

[0015] Preferably, the second air circuit valve group includes a second air circuit shut-off valve, a second air circuit pressure regulating valve, and a second air circuit solenoid valve connected in sequence.

[0016] Preferably, the second air path solenoid valve is installed inside the glove box of the sealing and welding machine, the electrical part of the second air path solenoid valve is connected to the control circuit of the sealing and welding machine, and the air path outlet of the second air path solenoid valve is connected to the second air path interface; the second air path pressure regulating valve is installed outside the glove box of the sealing and welding machine, and the second air path pressure regulating valve is connected to the air path inlet of the second air path solenoid valve.

[0017] A method for sealing and purging with helium includes:

[0018] The cover plate is welded to the cavity by spot welding. During the spot welding process, the first air circuit valve group on the first air circuit is in the open state.

[0019] The cover plate is welded to the cavity by continuous sealing welding. During the continuous sealing welding process, the first gas valve group on the first gas line and the second gas valve group on the second gas line are both in the open state. The first gas source for providing nitrogen forms a mixed gas in the nozzle through the first gas line and the second gas source for providing helium through the second gas line. The mixed gas is injected into the cavity from the gap between the cover plate and the cavity through the laser and the mixed gas nozzle.

[0020] Preferably, before spot welding the cover plate onto the cavity, the method further includes:

[0021] The pressure of the first air circuit regulating valve in the first air circuit valve group is set to 0.2–0.4 MPa;

[0022] The pressure of the second air circuit regulating valve in the second air circuit valve group is set to 0.05–0.2 MPa;

[0023] Set up a spot welding program, which includes a spot welding path and workbench movement program, a laser spot welding start and stop program, and a first air path solenoid valve spot welding start and stop program for the first air path valve group. During the spot welding process, the laser spot welding start and stop program and the first air path solenoid valve spot welding start and stop program are kept synchronized.

[0024] A continuous sealing welding program is set up, which includes a continuous sealing welding path and worktable movement program, a laser continuous sealing welding start and stop program, a first air path solenoid valve continuous sealing welding start and stop program of the first air path valve group, and a second air path solenoid valve continuous sealing welding start and stop program of the second air path valve group. During the continuous sealing welding process, the start and stop time of the first air path solenoid valve continuous sealing welding start and stop program and the second air path solenoid valve continuous sealing welding start and stop program shall not be less than the start and stop time of the laser continuous sealing welding start and stop program.

[0025] Set the welding origin point and align the center of the air nozzle with the center of the weld.

[0026] Preferably, after the cover plate is welded onto the cavity by continuous sealing welding, the method further includes:

[0027] The laser, the first gas path solenoid valve, and the second gas path solenoid valve are turned off in sequence.

[0028] Preferably, the initial pressure of the first gas source is not less than 5 MPa, and the initial pressure of the second gas source is not less than 2 MPa.

[0029] Compared with existing technologies, the above technical solution has the following advantages:

[0030] The sealing and helium filling device provided in this application can modify the gas nozzle on the basis of the original sealing and welding equipment and add a second gas path to realize the helium filling operation. Therefore, the sealing and helium filling device has a low cost. In addition, through the first gas path valve group, the second gas path valve group and the gas nozzle, sealing and helium filling can be completed simultaneously, which is more efficient than the traditional helium filling method.

[0031] The helium-filling sealing method provided in this application does not require additional filling holes to be machined on the cavity, thus preserving the original design of the cavity. Utilizing the gap passage formed between the cover plate and the cavity, and a high-pressure airflow, a mixture of helium and nitrogen is filled into the cavity to meet the helium filling requirements, simultaneously completing the gas-tight sealing of the cavity, thereby achieving the helium filling process within the gas-tight cavity. The helium filling and sealing processes are superimposed and do not interfere with each other, allowing for simultaneous completion. This helium-filling sealing method is simple in process, low in cost, and suitable for mass production applications. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 A schematic diagram of a sealing and helium-filling device provided for a specific embodiment of this application;

[0034] Figure 2 A schematic diagram of the nozzle mounting position of a sealing and helium filling device according to a specific embodiment of this application;

[0035] Figure 3 This is a flowchart of a sealing and helium-filling method provided for one specific embodiment of this application.

[0036] The attached figures are labeled as follows:

[0037] Air nozzle 1, cylindrical section 1-1, first air passage interface 1-1-1, second air passage interface 1-1-2, fixed threaded hole 1-1-3, conical section 1-2; laser 2, glove box 3;

[0038] First gas source 4, first gas circuit shut-off valve 5, first gas circuit pressure regulating valve 6, first gas circuit solenoid valve 7;

[0039] Second air source 8, second air circuit shut-off valve 9, second air circuit pressure regulating valve 10, second air circuit solenoid valve 11. Detailed Implementation

[0040] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0041] Specific details are set forth in the following description to provide a full understanding of this application. However, this application can be implemented in many ways other than those described herein, and those skilled in the art can make similar extensions without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0042] Please refer to Figure 1 and Figure 2 , Figure 1 A schematic diagram of a sealing and helium-filling device provided for a specific embodiment of this application; Figure 2 This is a structural schematic diagram of the nozzle installation position of a sealing and helium filling device provided in a specific embodiment of this application.

[0043] One specific embodiment of this application provides a helium-filling sealing device, including: a gas nozzle 1, a first gas source 4, a first gas valve group, a second gas source 8, and a second gas valve group. The gas nozzle 1 is provided with a first gas path interface 1-1-1, a second gas path interface 1-1-2, and a laser and mixed gas nozzle. Specifically, the gas nozzle 1 includes a cylindrical section 1-1 and a conical section 1-2. The first gas path interface 1-1-1 and the second gas path interface 1-1-2 are located on the cylindrical section 1-1. The laser and mixed gas nozzles are located on the conical section 1-2. The cylindrical section 1-1 is provided with a fixing threaded hole 1-1-3. The cylindrical section 1-1 is installed on the laser 2 of the laser head of the sealing welding machine through the fixing threaded hole 1-1-3. That is, the laser head can drive the gas nozzle 1 to move synchronously, ensuring that the sealing path coincides with the helium filling path. The inner cavity of the cylindrical section 1-1 is connected to the inner cavity of the cylindrical section 1-1. The large end of the conical section 1-2 is connected to the lower end of the cylindrical section 1-1. The first gas source 4 is connected to the first gas path interface 1-1-1 via the first gas path valve group, and is used to provide nitrogen. The second gas source 8 is connected to the second gas path interface 1-1-2 via the second gas path valve group, and is used to provide helium. The first and second gas path valve groups are used to open simultaneously during continuous sealing welding to form a mixed gas in the gas nozzle 1. The mixed gas is then injected into the cavity through the gap between the cover plate to be sealed and the cavity by the laser and the mixed gas nozzle. The gas nozzle 1 can be modified by adding a second gas path to the existing sealing welding equipment to achieve helium filling. Therefore, the cost of the sealing welding helium filling device is relatively low. Furthermore, the sealing welding and helium filling can be completed simultaneously through the first and second gas path valve groups and the gas nozzle 1, resulting in higher work efficiency compared to traditional helium filling methods.

[0044] In some embodiments of this application, the first air path valve group includes a first air path shut-off valve 5, a first air path pressure regulating valve 6, and a first air path solenoid valve 7 connected in sequence. The first air path shut-off valve 5 is installed at the outlet of the first air source 4 to control the output of the first air path. The first air path solenoid valve 7 is installed inside the glove box 3 of the sealing machine, and its electrical components are connected to the control circuit of the sealing machine. The air path outlet of the first air path solenoid valve 7 is connected to the first air path interface 1-1-1. The first air path pressure regulating valve 6 is installed outside the glove box 3 of the sealing machine. The first air path shut-off valve 5 and the first air path pressure regulating valve 6 can be integrated valves, and the first air path pressure regulating valve 6 is connected to the air path inlet of the first air path solenoid valve 7. The first air path pressure regulating valve 6 can control the input air pressure entering the input port of the first air path solenoid valve 7 inside the glove box 3, which is the input air pressure reaching the first air path interface 1-1-1 of the air nozzle 1.

[0045] In some embodiments of this application, the second air circuit valve group includes a second air circuit shut-off valve 9, a second air circuit pressure regulating valve 10, and a second air circuit solenoid valve 11 connected in sequence. The second air circuit shut-off valve 9 is installed at the outlet of the second air source 8 to control its output. The second air circuit solenoid valve 11 is installed inside the glove box 3 of the sealing machine, and its electrical components are connected to the control circuit of the sealing machine. The air circuit outlet of the second air circuit solenoid valve 11 is connected to the second air circuit interface 1-1-2. The second air circuit pressure regulating valve 10 is installed outside the glove box 3 of the sealing machine. The second air circuit shut-off valve 9 and the second air circuit pressure regulating valve 10 can be integrated valves, and the second air circuit pressure regulating valve 10 is connected to the air circuit inlet of the second air circuit solenoid valve 11. The second air circuit pressure regulating valve 10 can control the input air pressure entering the input port of the second air circuit solenoid valve 11 inside the glove box 3, which is the input air pressure reaching the second air circuit interface 1-1-2 of the air nozzle 1.

[0046] This application also provides a helium-filling sealing method, including the following steps:

[0047] Step 1: Set the pressure of the first air pressure regulating valve 6 of the first air valve group to 0.2-0.4 MPa.

[0048] Step 2: Set the pressure of the second air circuit regulating valve 10 of the second air circuit valve group to 0.05-0.2MPa.

[0049] Step 3: Set the spot welding program. The spot welding program includes the spot welding path and workbench movement program, the spot welding start and stop program of laser 2, and the spot welding start and stop program of the first air solenoid valve 7 of the first air valve group. During the spot welding process, the spot welding start and stop program of laser 2 and the spot welding start and stop program of the first air solenoid valve 7 are kept synchronized.

[0050] Step 4: Set up the continuous sealing program. The continuous sealing program includes the continuous sealing path and worktable movement program, the continuous sealing start and stop program of laser 2, the continuous sealing start and stop program of the first air path solenoid valve 7 of the first air path valve group, and the continuous sealing start and stop program of the second air path solenoid valve 11 of the second air path valve group. During the continuous sealing process, the start and stop time of the continuous sealing start and stop program of the first air path solenoid valve 7 and the continuous sealing start and stop program of the second air path solenoid valve 11 shall not be less than the start and stop time of the continuous sealing start and stop program of laser 2.

[0051] Step 5: Set the welding origin by aligning the center of nozzle 1 with the center of the weld. Depending on the sealing requirements, there may be a certain deviation between the center of nozzle 1 and the center of the weld, but the deviation should not exceed 0.1mm.

[0052] Step 6: Weld the cover plate to the cavity by spot welding. During the spot welding process, the first gas path valve group on the first gas path is in the open state. The first gas path valve group includes a first gas path shut-off valve 5, a first gas path pressure regulating valve 6, and a first gas path solenoid valve 7. The first gas path solenoid valve 7 can be switched on and off by the sealing and welding machine system via software. The first gas path shut-off valve 5 and the first gas path pressure regulating valve 6 can be opened manually.

[0053] Step 7: The cover plate is welded to the cavity by continuous sealing welding. During the continuous sealing welding process, the first gas valve group on the first gas line and the second gas valve group on the second gas line are both in the open state. The first gas source 4 for providing nitrogen gas forms a mixed gas in the gas nozzle 1 through the first gas line and the second gas source 8 for providing helium gas through the second gas line. The mixed gas is injected into the cavity from the gap between the cover plate and the cavity through the laser and the mixed gas nozzle.

[0054] Step 8: After continuous sealing is completed, sequentially turn off laser 2, first gas path solenoid valve 7, and second gas path solenoid valve 11. At this point, the sealing and helium filling process of one product is completed. Repeat steps 6 to 8 above to complete the sealing and helium filling process of the next product.

[0055] The initial pressure of the first gas source 4 is preferably not less than 5 MPa, and the initial pressure of the second gas source 8 is preferably not less than 2 MPa.

[0056] The sealing and helium filling method provided in the above embodiments does not require additional gas filling holes to be machined on the cavity, thus ensuring the original design of the cavity. By utilizing the gap passage formed between the cover plate and the cavity and the high-pressure gas flow, a mixture of helium and nitrogen is filled into the cavity to meet the helium filling requirements, and the cavity is simultaneously sealed for airtightness, thereby realizing the helium filling process within the airtight cavity. The helium filling process and the sealing process are superimposed and do not interfere with each other, and can be completed simultaneously. This sealing and helium filling method is simple in process, low in cost, and suitable for mass production applications.

[0057] Using the sealing and helium purging apparatus and method provided in this application, six process samples were prepared. The process samples were divided into two groups, and the He composition and content in the internal atmosphere of the samples were detected according to GJB548B.

[0058] Characterization of the validity of test results:

[0059] 1) Following procedure VI of condition C in method 112 of GJB360B-2009, the unpressurized airtightness test was performed. After testing with a helium mass spectrometer leak detector, the leak rates of all six samples were less than 5 × 10⁻⁶. -9 Pa·m 3 / s, meeting the experimental requirements. The leakage rate results are shown in the first column of Table 1;

[0060] 2) Following procedure IIIa of condition C in method 112 of GJB360B-2009, pressurized airtightness testing was performed. After testing with a helium mass spectrometer, the leak rates of all six samples were less than 5 × 10⁻⁶. -9 Pa·m 3 / s, meeting the experimental requirements. The leakage rate results are shown in the second column of Table 1;

[0061] 3) The fluorinated oil rough leak test was carried out according to the GJB360B-2009 method 112 condition E. After the fluorinated oil rough leak test, it was found that there were still no bubbles at the weld position of the 6 prepared samples after helium pressurization and pressure holding. The rough leak test was qualified. Therefore, the airtightness sealing test results of these 6 samples were deemed qualified and accurate.

[0062] The comparison of leak detection data showed that the device and method proposed in this application can guarantee the validity of subsequent detection results.

[0063] Table 1. Helium mass spectrometry leak detection data of 6 samples before and after helium pressurization.

[0064]

[0065] Characterization of the timeliness of test results:

[0066] The samples prepared using the sealing and helium-filling apparatus and method provided in this application have been tested for airtightness, and the validity of the test results has been proven. The timeliness of the test results refers to the ability of the internal helium atmosphere content to meet the dosage required for airtightness testing even after a certain period of time. Therefore, the internal atmosphere content is characterized by comparing the initial content and the content after a certain time interval, and the results are as follows:

[0067] The internal atmosphere content of these six prepared samples was tested, and the results are shown in Table 2:

[0068] Table 2. Changes in internal helium atmosphere content.

[0069]

[0070] As shown in Table 2, the helium content in the cavity gradually decreases with the passage of time, but the trend gradually slows down. According to condition C of method 112 in GJB360B-2009, the tracer gas is a mixture of helium, argon, or other inert gas with nitrogen (e.g., 90% nitrogen and 10% helium). In procedure IV, the sealing element is checked to ensure that a certain percentage of tracer gas has been filled into the cavity during processing. Therefore, the minimum helium content inside the cavity must be greater than 10%. According to the atmosphere detection results, after 60 days and 180 days after sealing, the helium content inside the cavity is much greater than 10%, which meets the testing requirements.

[0071] Comparison of helium gas detection atmosphere data revealed that the sealing and helium purging device and method proposed in this application can ensure the timeliness of subsequent test results.

[0072] It should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0073] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A sealing and helium-filling device, characterized in that, include: The nozzle is equipped with a first air path interface, a second air path interface, and a laser and mixed air nozzle; A first gas source and a first gas path valve group, wherein the first gas source is connected to the first gas path interface through the first gas path valve group, and the first gas source is used to provide nitrogen. The second gas source and the second gas path valve group are connected to the second gas path interface through the second gas path valve group. The second gas source is used to provide helium. The first gas valve group and the second gas valve group are used to open simultaneously during continuous sealing welding to form a mixed gas in the gas nozzle, which is injected into the cavity from the gap between the cover plate to be sealed and the cavity through the laser and mixed gas nozzle. The first air circuit valve group includes a first air circuit shut-off valve, a first air circuit pressure regulating valve, and a first air circuit solenoid valve connected in sequence; The first gas path solenoid valve is installed inside the glove box of the sealing and welding machine. The electrical part of the first gas path solenoid valve is connected to the control circuit of the sealing and welding machine. The gas path outlet of the first gas path solenoid valve is connected to the first gas path interface. The first gas path pressure regulating valve is installed outside the glove box of the sealing and welding machine. The first gas path pressure regulating valve is connected to the gas path inlet of the first gas path solenoid valve. The second air circuit valve group includes a second air circuit shut-off valve, a second air circuit pressure regulating valve, and a second air circuit solenoid valve connected in sequence. The second air path solenoid valve is installed inside the glove box of the sealing and welding machine. The electrical part of the second air path solenoid valve is connected to the control circuit of the sealing and welding machine. The air path outlet of the second air path solenoid valve is connected to the second air path interface. The second air path pressure regulating valve is installed outside the glove box of the sealing and welding machine. The second air path pressure regulating valve is connected to the air path inlet of the second air path solenoid valve.

2. A method for sealing and purging with helium, utilizing the sealing and purging device described in claim 1, characterized in that, The sealing and helium purging method includes: The pressure of the first air circuit regulating valve in the first air circuit valve group is set to 0.2~0.4MPa; The pressure of the second air circuit regulating valve in the second air circuit valve group is set to 0.05~0.2MPa; The spot welding program is set up, which includes a spot welding path and workbench movement program, a laser spot welding start and stop program, and a first air solenoid valve spot welding start and stop program of the first air valve group. During the spot welding process, the laser spot welding start and stop program and the first air solenoid valve spot welding start and stop program are kept synchronized. A continuous sealing welding program is set up, which includes a continuous sealing welding path and worktable movement program, a laser continuous sealing welding start-stop program, a first air path solenoid valve continuous sealing welding start-stop program of the first air path valve group, and a second air path solenoid valve continuous sealing welding start-stop program of the second air path valve group. During the continuous sealing welding process, the start-stop time of the first air path solenoid valve continuous sealing welding start-stop program and the second air path solenoid valve continuous sealing welding start-stop program is not less than the start-stop time of the laser continuous sealing welding start-stop program. Set the welding origin point and align the center of the air nozzle with the center of the weld. The cover plate is welded to the cavity by spot welding. During the spot welding process, the first air circuit valve group on the first air circuit is in the open state. The cover plate is welded onto the cavity by continuous sealing welding. During the continuous sealing welding process, the first gas path valve group on the first gas path and the second gas path valve group on the second gas path are both in the open state. The first gas source for providing nitrogen gas forms a mixed gas in the nozzle through the first gas path and the second gas source for providing helium gas through the second gas path. The mixed gas is injected into the cavity from the gap between the cover plate and the cavity by the laser and the mixed gas nozzle. The laser, the first gas path solenoid valve, and the second gas path solenoid valve are turned off in sequence.

3. The sealing and helium purging method according to claim 2, characterized in that, The initial pressure of the first gas source is not less than 5 MPa, and the initial pressure of the second gas source is not less than 2 MPa.

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