An intelligent auxiliary device based on precise positioning of a graphite base and its usage method

Abstract

The present invention discloses an intelligent auxiliary device based on precise positioning of a graphite base, comprising a main shaft structure and a positioning structure. The main shaft is connected to one end of a fixed screw cap through a thread, and a vision sensor is connected to the other end of the fixed screw cap. At the same time, the fixed screw cap and a main shaft sleeve are connected through a bracket, and the main shaft sleeve is sleeved outside the main shaft. In the present invention, the auxiliary device realizes automation and visualization during the operation of the main shaft by combining with an intelligent robotic arm. By means of the auxiliary device, the present invention further discloses a method for precise positioning of the graphite base and a method for taking out the graphite base.

Description

Technical Field

[0001] The present invention relates to a process technology in the field of liquid phase epitaxy, and specifically to an intelligent auxiliary device based on precise positioning of a graphite base and a method for using the same. Background Art

[0002] The use of liquid phase epitaxy technology to prepare single crystal materials has been widely applied in fields such as optics, magnetism, and electricity. However, in the actual production process of this technology, some manual operation links are prone to problems such as defects, cracks, or dislocations in the grown materials, which will also have a greater adverse impact on the performance of the materials.

[0003] Specifically, in actual production, liquid phase epitaxy technology has relatively strict requirements for operations such as the initial sample placement at the beginning of the growth of the epitaxial furnace and the replacement of other parts. In the prior art, the placement stability of the graphite base in the epitaxial furnace is poor. Generally, the graphite base is placed in the epitaxial furnace through iron wires. During this process, the graphite base is very likely to tilt and touch the quartz tube, resulting in the dropping of graphite powder. If the tilt is serious, the graphite base may directly fall, causing damage to the graphite base or the quartz tube. This not only is not conducive to the smooth progress of the growth process but also increases the risk of damage to the graphite base and the quartz tube. In addition, in the prior art, the width of the card slot at the lower part of the graphite base is designed to be relatively narrow, making it difficult to align the width of the card slot with the metal baffle at the bottom of the quartz tube, and making it very difficult to accurately install the graphite base into the quartz tube. Summary of the Invention

[0004] The purpose of the present invention is to provide an intelligent auxiliary device based on precise positioning of a graphite base and a method for using the same to solve the problem of difficult installation of the graphite base and the quartz tube in the prior art. The specific technical solutions are as follows.

[0005] An intelligent auxiliary device based on precise positioning of a graphite base, comprising a spindle structure and a positioning structure. The spindle structure includes a spindle (1), a spindle sleeve (5), a fixing screw cap (2), a first bracket (4), and a second bracket (3). The positioning structure includes a controller, an intelligent robotic arm, and a vision sensor (6). The lower end of the spindle (1) is connected to the fixing screw cap (2) by threading. The spindle sleeve (5) is sleeved on the upper end outside the spindle (1) and can move up and down along the spindle (1). The spindle sleeve (5) and the fixing screw cap (2) are connected by the first bracket (4) and the second bracket (3). Multiple vertical grooves (15) are provided on the spindle sleeve (5) and the fixing screw cap (2). The upper end of the first bracket (4) can slide up and down in the vertical groove of the spindle sleeve (5), and the lower end of the second bracket (3) can slide up and down in the vertical groove of the fixing screw cap (2). One end of the fixing screw cap (2) is connected to (1), and the other end is connected to the vision sensor (6). The graphite base (11) is provided with a central hole (13). Under the control of the controller, the intelligent robotic arm can control the movement of the spindle (1) and the spindle sleeve (5) to insert the spindle structure and the vision sensor (6) into the interior of the central hole (13) of the graphite base (11) to carry the graphite base (11) and install the graphite base (11) into the quartz tube. The vision sensor (6) can collect the image of its lower part to obtain the state of the graphite base (11) and the quartz tube where the graphite base (11) is to be installed.

[0006] Preferably, the second bracket (3) is fixed to the fixing screw cap (2) by a thin iron wire. The first bracket (4) is connected to the spindle sleeve (5) by a first micro bolt (7), and the first bracket (4) is connected to the second bracket (3) by a second micro bolt (8).

[0007] Preferably, the spindle (1) is provided with multiple holes at its position between the spindle sleeve (5) and the fixing screw cap (2) for inserting a baffle (10).

[0008] Preferably, the vision sensor (6) is connected to the fixing screw cap (2) by threading or by a hanging hook connection.

[0009] Preferably, two holes are provided on the second bracket (3).

[0010] A method for precise positioning based on a graphite base is realized by the above intelligent auxiliary device for precise positioning based on a graphite base, and includes the following steps.

[0011] Step 1: Assemble the graphite base (11) with the spindle structure and the vision sensor (6); control the intelligent robotic arm to insert the fixing screw cap (2) of the auxiliary device into the central hole (13) of the graphite base (11), control the intelligent robotic arm to slowly unfold the first bracket (4) and the second bracket (3) outside the spindle (1). After the unfolding is completed, control the intelligent robotic arm to lift the second bracket (3) upward to contact the lower edge of the opening of the central hole (13) of the graphite base (11), so as to carry the graphite base (11).

[0012] Step 2: Taking the position of the vision sensor (6) as the origin O, use the vision sensor (6) to obtain the contour of the quartz tube nozzle to be installed on the graphite base (11), perform image processing on the obtained contour, and obtain the central position (x 0 , y 0 ) of the quartz tube nozzle, and obtain the vector pointing from the origin O to the central position (x 0 , y 0 ) of the quartz tube nozzle, forming the movement vector of the spindle (1). Control the intelligent robotic arm through the controller to move the spindle (1) to the central position (x 0 , y 0 ) of the quartz tube nozzle according to the movement vector.

[0013] Step 3: Measure the distance h 1 between the vision sensor (6) and the metal baffle (14) at the bottom of the quartz tube to be installed on the graphite base (11). Control the intelligent robotic arm through the controller to lower the spindle (1) until the height between the vision sensor (6) and the metal baffle (14) is h 2 , h 2 being the difference between the measured distance h 1 and the height of the graphite base (11).

[0014] Step 4: Use the vision sensor (6) to collect an image of the bottom of the quartz tube to be installed on the graphite base (11), and process the bottom image of the quartz tube to obtain the position of the metal baffle (14) at the bottom of the installation tube. The controller calculates the position of the metal baffle (14) to obtain the included angle θ between the card slot (12) of the graphite base (11) and the metal baffle (14). Control the intelligent robotic arm through the controller to rotate the spindle (1) so that the included angle θ between the card slot (12) of the graphite base (11) and the metal baffle (14) is zero, and continue to lower the graphite base (11) so that the card slot (12) of the graphite base (11) is engaged and fixed with the metal baffle (14) at the bottom of the installation tube.

[0015] Step 5: Control the intelligent robotic arm to move the spindle sleeve (5) and the spindle (1) in opposite directions relative to each other, so that the first bracket (4) is embedded in the vertical groove (15) of the spindle sleeve (5), and the second bracket (3) is embedded in the vertical groove (15) of the fixed screw cap (2). The first bracket (4) and the second bracket (3) contract and separate from the graphite base (11). Control the intelligent robotic arm to lift the spindle sleeve (5) upward until the spindle structure and the vision sensor (6) are completely pulled out of the quartz tube.

[0016] A method for removing the graphite base is realized by the above-mentioned intelligent auxiliary device based on the precise positioning of the graphite base, and includes the following steps.

[0017] Step 1: Use the vision sensor (6) of the auxiliary device to collect the image of the orifice of the quartz tube, and process the collected orifice image to obtain the center position of the orifice of the quartz tube. Control the intelligent robotic arm to move the spindle (1) to the center position of the orifice of the quartz tube through the controller.

[0018] Step 2: Control the intelligent robotic arm to lower the spindle (1) inside the quartz tube. Use the vision sensor (6) to collect the opening image of the central hole (13) of the graphite base (11). The controller processes the opening image to obtain the opening position of the central hole (13). Control the intelligent robotic arm to make the first bracket (4) and the second bracket (3) of the spindle structure reach the opening of the central hole and penetrate into the central hole (13) of the graphite base.

[0019] Step 3: Control the first bracket (4) and the second bracket (3) on the spindle structure to expand by controlling the intelligent robotic arm, and control the spindle (1) to move upward, so that the second bracket (3) contacts the lower edge of the opening of the central hole (13) of the graphite base (11), thereby carrying the graphite base (11).

[0020] Step 4: Control the intelligent robotic arm to move the spindle (1) upward, and the graphite base (11) moves upward together with the auxiliary device. Monitor the upward movement position of the graphite base (11) through the vision sensor (6) until the graphite base (11) is completely pulled out of the orifice of the quartz tube.

[0021] Step 5: Control the intelligent robotic arm to move the spindle sleeve (5) and the spindle (1) in opposite directions relative to each other, so that the first bracket (4) is embedded in the vertical groove (15) of the spindle sleeve (5), and the second bracket (3) is embedded in the vertical groove (15) of the fixed screw cap (2). The first bracket (4) and the second bracket (3) contract and separate from the graphite base (11). Control the intelligent robotic arm to lift the spindle sleeve (5) upward until the spindle structure and the vision sensor (6) are completely pulled out of the quartz tube.

[0022] In the present invention, the auxiliary device combines an intelligent robotic arm, a control device, and a spindle sleeve, a fixing nut, a first bracket, and a second bracket outside the spindle. Through the expansion of the brackets, the graphite base is stably carried, driving the graphite base to move smoothly within the quartz tube; by setting a vision sensing device, the movement position of the graphite base within the tube after being inserted into the quartz tube is detected, so that the included angle between the card slot of the graphite base and the metal baffle at the bottom of the quartz tube is zero, enabling the graphite base to be accurately and conveniently clamped and fixed to the metal baffle at the bottom of the quartz tube. Therefore, through the design of the spindle structure and the positioning structure, the two cooperate with each other, enabling the graphite base to be accurately and conveniently fixed to or removed from the quartz tube, and avoiding the risk of damage to the graphite base due to tilting and collision during movement within the quartz tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for description in the embodiments. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 (a) is a schematic structural diagram of the auxiliary device according to an embodiment of the present invention, Figure 1 (b) is a partial enlarged view of part I in Figure (a).

[0025] Figure 2 (a) is a schematic structural diagram of the spindle part according to an embodiment of the present invention, Figure 2 (b) is a partial enlarged view of part II in Figure (a).

[0026] Figure 3 (a) is a schematic structural diagram of the vision sensor part according to an embodiment of the present invention. Figures (b) and (c) are two connection methods of the vision sensor and the fixing nut respectively.

[0027] Figure 4 (a) is a schematic structural diagram of the bracket part according to an embodiment of the present invention. Figure (b) is a partial enlarged view of part III in Figure (a).

[0028] Figure 5 Schematic diagram of the graphite base structure.

[0029] Figure 6 Schematic diagram of the principle of the auxiliary device of this embodiment.

[0030] Figure 7 Model diagram of the center position of the orifice of the quartz tube collected using the vision sensor. Among them, point O is the position of the vision sensor, the circular dotted line is the contour of the orifice of the quartz tube, and the intersection point of the cross dotted lines (x0 , y 0 is the center of the quartz tube nozzle.

[0031] Figure 8 is a model diagram of the position of the metal baffle at the bottom of the quartz tube collected by using a vision sensor. Among them, point O is the position of the vision sensor, the circular dotted line is the contour of the quartz tube nozzle, the black solid rectangle is the position of the metal baffle at the bottom of the quartz tube, the dotted rectangle is the position of the card slot at the bottom of the graphite base, and the included angle between the baffle and the card slot is θ.

[0032] In the figure: 1 - main shaft, 2 - fixed screw cap, 3 - second bracket, 4 - first bracket, 5 - main shaft sleeve, 6 - vision sensor, 7 - first micro bolt, 8 - second micro bolt, 9 - iron wire, 10 - baffle, 11 - graphite base, 12 - card slot, 13 - central hole, 14 - metal baffle, 15 - vertical groove. Specific embodiments

[0033] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0034] As shown in the specification appendix Figures 1 to 5 As shown, this embodiment provides an auxiliary device for precise positioning based on a graphite base, which includes a main shaft structure and a positioning structure.

[0035] The main shaft structure is specifically composed of: the lower end of the main shaft 1 is connected and fixed with the fixed screw cap 2 by thread, and the main shaft sleeve 5 is sleeved on the upper end outside the main shaft 1 and can move up and down along the main shaft 1. The main shaft structure also includes a first bracket 4 and a second bracket 3. The main shaft sleeve 5 is connected to the first bracket 4 by the second micro bolt 8, the second bracket 3 is fixed on the fixed screw cap 2 by a thin iron wire, and the first bracket 4 is connected to the second bracket 3 by the first micro bolt 7.

[0036] A plurality of vertical grooves 15 are provided on the main shaft sleeve 5 and the fixed screw cap 2. The upper end of the first bracket 4 can slide up and down in the vertical groove of the main shaft sleeve 5, the lower end of the second bracket 3 can slide up and down in the vertical groove of the fixed screw cap 2, the first bracket 4 can be retracted and embedded into the vertical groove 15 of the main shaft sleeve 5, and the second bracket 3 can be retracted and embedded into the vertical groove 15 of the fixed screw cap 2.

[0037] The positioning structure includes a vision sensor 6, a controller, and an intelligent robotic arm. One end of the fixed screw cap 2 of the main shaft structure is connected to the main shaft, and the other end is connected to the vision sensor 6. As shown in the specification appendixFigure 3 As shown, the vision sensor 6 is connected to the fixed screw cap 2 by means of threading or hooking. The intelligent robotic arm is located above the orifice of the quartz tube to be installed on the graphite base. Under the control of the controller, the movement of the main shaft and the main shaft sleeve 5 can be controlled to insert the main shaft structure and the vision sensor 6 deep into the graphite base 11 to carry the graphite base 11 and install the graphite base 11 into the quartz tube. When the main shaft moves, the vision sensor 6 can collect the image below it to obtain the status of the graphite base 11 and the quartz tube to which the graphite base 11 is to be installed.

[0038] As shown in the attached specification Figure 5 As shown, a through center hole 13 is provided in the center of the graphite base 11. After the first bracket 4 and the second bracket 3 on the main shaft structure are inserted into the vertical groove 15, the main shaft structure and the vision sensor 6 can be inserted into or removed from the center hole 13. After the main shaft structure and the vision sensor 6 are inserted into the center hole 13, control the intelligent robotic arm to slowly expand the first bracket 4 and the second bracket 3 outside the main shaft. After the expansion is completed, control the intelligent robotic arm to lift the second bracket 3 upward until it contacts the lower edge of the opening of the center hole 13 of the graphite base 11, so as to carry the graphite base 11, and finally control the intelligent robotic arm to drive the graphite base 11 to move in the quartz tube to be installed through the controller.

[0039] A vertical slot 12 is provided at the bottom of the graphite base 11, and a metal baffle 14 protruding in the vertical direction is provided at the bottom of the quartz tube in which the graphite base 11 is installed. When the intelligent control arm drives the graphite base 11 to descend inside the quartz tube, and finally the slot 12 of the graphite base is engaged with the protruding metal baffle 14 at the bottom of the installation tube, the installation and fixation of the graphite base inside the installation tube is completed, thereby achieving the purpose of accurately and stably placing the graphite base.

[0040] After the graphite base 11 is installed in the quartz tube, by contracting the first bracket 4 and the second bracket 3 and respectively inserting them into the vertical grooves 15 of the main shaft sleeve 5 and the fixed screw cap 2, the maximum moving diameter of the main shaft structure in the horizontal direction is the diameter of the main shaft sleeve 5, and thus the entire auxiliary device can be conveniently removed.

[0041] Further, a plurality of rectangular holes are provided at the lower end of the main shaft 1. The baffle 10 can be inserted into the rectangular holes. Each time the auxiliary device of this embodiment is used, the baffle 10 is inserted into one of the rectangular holes, and its function is to prevent the main shaft sleeve 5 from further sliding downward along the main shaft direction. After the graphite base 11 is mounted on the second bracket 3 outside the main shaft sleeve 5, under the action of the gravity of the graphite base 11, the main shaft sleeve 5 moves downward. When the lower end of the main shaft sleeve 5 touches the baffle 10, it will no longer move downward, thus achieving a stabilizing effect. By providing a plurality of rectangular holes, the lower end of the main shaft sleeve 5 can descend to different positions to contact different baffles 10 and be blocked, so that the retracting and extending angles of the first bracket 4 and the second bracket 3 are reduced, and further the maximum moving diameter of the bracket in the horizontal direction is reduced. Similarly, two holes are provided on the second bracket 3, which can also reduce the maximum moving diameter of the bracket in the horizontal direction and facilitate the removal of the entire auxiliary device.

[0042] Using the auxiliary device based on precise positioning of the graphite base in this embodiment to position the graphite base, as shown in the attached Figures 6 to 8 of the specification, the positioning method includes the following steps.

[0043] Step 1: Assemble the graphite base 11 with the main shaft structure and the vision sensor 6. Control the intelligent robotic arm to insert the fixing screw cap 2 of the auxiliary device into the central hole of the graphite base 11. Control the intelligent robotic arm to slowly unfold the first bracket 4 and the second bracket 3 outside the main shaft. After the unfolding is completed, control the intelligent robotic arm to lift the second bracket 3 upward to contact the lower edge of the opening of the central hole 13 of the graphite base, so as to carry the graphite base.

[0044] Step 2: As shown in the attached Figure 7 of the specification, taking the position of the vision sensor 6 as the origin O, use the vision sensor 6 to obtain the contour of the quartz tube nozzle of the graphite base 11 to be installed, perform image processing on the obtained nozzle contour, and obtain the central position (x 0 , y 0 ) of the quartz tube nozzle, and obtain the vector pointing from the origin O to the central position (x 0 , y 0 ) of the quartz tube nozzle, form the movement vector of the main shaft 1, and control the intelligent robotic arm to move the main shaft 1 to the central position (x 0 , y 0 ) of the quartz tube nozzle according to the movement vector through the controller;

[0045] Step 3: Measure the distance h 1 between the vision sensor 6 and the metal baffle 14 at the bottom of the quartz tube to be installed on the graphite base at this time. Control the intelligent robotic arm to lower the main shaft through the controller until the height of the vision sensor 6 from the metal baffle 14 is h 2 , h2 To measure the distance h 1 And the height difference from the graphite base.

[0046] Step 4: As shown in the attached instructions Figure 8 As shown, use the vision sensor 6 to collect an image of the bottom of the quartz tube to be installed on the graphite base 11, and process the bottom image of the quartz tube to obtain the position of the metal baffle 14 at the bottom of the installation tube. Use the controller to calculate the position of this metal baffle 14 to obtain the angle θ between the slot 12 of the graphite base and the metal baffle 14. Control the intelligent robotic arm through the controller to rotate the main shaft so that the angle θ between the slot 12 of the graphite base and the metal baffle 14 is zero, and continue to lower the graphite base so that the slot 12 of the graphite base is engaged and fixed with the metal baffle 14 at the bottom of the installation tube.

[0047] Step 5: Control the intelligent robotic arm to move the main shaft sleeve 5 and the main shaft 1 in the opposite direction relative to each other, so that the first bracket 4 is inserted into the vertical groove 15 of the main shaft sleeve 5, and the second bracket 3 is inserted into the vertical groove 15 of the fixed screw cap 2, so that the two brackets contract and separate from the graphite base. Then, control the intelligent robotic arm through the controller to lift the main shaft sleeve 5 upward until the main shaft structure and the vision sensor 6 are completely pulled out of the quartz tube.

[0048] In addition, the graphite base already installed in the quartz tube can also be removed using the auxiliary device of this embodiment. The specific method is as follows.

[0049] Step 1: Use the vision sensor 6 of the auxiliary device to collect an image of the tube orifice of the quartz tube, and process the collected tube orifice image to obtain the center position of the quartz tube orifice. Control the intelligent robotic arm through the controller to move the main shaft to the center position of the quartz tube orifice.

[0050] Step 2: Control the intelligent robotic arm to lower the main shaft in the quartz tube. Use the vision sensor 6 to collect an image of the opening of the central hole 13 of the graphite base. The controller processes this opening image to obtain the opening position of the central hole 13, and controls the intelligent control arm so that the first bracket 4 and the second bracket 3 of the main shaft structure reach the opening of the central hole and further penetrate into the central hole 13 of the graphite base.

[0051] Step 3: Control the first bracket 4 and the second bracket 3 on the main shaft structure to expand through the control arm, and control the main shaft to move upward so that the second bracket 3 contacts the lower edge of the opening of the central hole 13 of the graphite base 11, thereby carrying the graphite base 11.

[0052] Step 4: Control the intelligent control arm to move the main shaft upward, and the graphite base 11 moves upward together with the auxiliary device. Monitor the upward movement position of the graphite base 11 through the vision sensor 6 until the graphite base 11 is completely pulled out of the tube orifice of the quartz tube.

[0053] Step 5: Control the intelligent robotic arm to move the spindle sleeve 5 relative to the spindle 1 in the opposite direction, so that the first bracket 4 is embedded in the vertical groove of the spindle sleeve 5, and the second bracket 3 is embedded in the vertical groove 15 of the fixed screw cap 2, thereby the two brackets contract and separate from the graphite base. Then, control the intelligent robotic arm to lift the spindle sleeve 5 upward through the controller until the spindle structure and the vision sensor 6 are completely pulled out of the quartz tube.

[0054] Obviously, the above embodiments are merely examples for clearly illustrating the technical solutions of the present invention, rather than limitations on the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. An intelligent auxiliary device based on precise positioning of a graphite base, comprising a spindle structure and a positioning structure. The spindle structure includes a spindle (1), a spindle sleeve (5), a fixing screw cap (2), a first bracket (4), and a second bracket (3). The positioning structure includes a controller, an intelligent robotic arm, and a vision sensor (6); It is characterized in that The lower end of the spindle (1) is connected to the fixing screw cap (2) by threading. The spindle sleeve (5) is sleeved on the upper end of the outside of the spindle (1) and can move up and down along the spindle (1). The spindle sleeve (5) and the fixing screw cap (2) are connected by the first bracket (4) and the second bracket (3). A plurality of vertical grooves (15) are provided on the spindle sleeve (5) and the fixing screw cap (2). The upper end of the first bracket (4) can slide up and down in the vertical groove of the spindle sleeve (5), and the lower end of the second bracket (3) can slide up and down in the vertical groove of the fixing screw cap (2). One end of the fixing screw cap (2) is connected to the spindle (1), and the other end is connected to the vision sensor (6). The graphite base (11) is provided with a central hole (13). Under the control of the controller, the intelligent robotic arm can control the movement of the spindle (1) and the spindle sleeve (5) to insert the spindle structure and the vision sensor (6) into the inside of the central hole (13) of the graphite base (11) to carry the graphite base (11) and install the graphite base (11) into the quartz tube. The vision sensor (6) can collect the image of its lower part to obtain the state of the graphite base (11) and the quartz tube to which the graphite base (11) is to be installed; Wherein: The first bracket (4) is connected to the second bracket (3) by a second micro-bolt (8).

2. An intelligent auxiliary device based on precise positioning of a graphite base according to claim 1, It is characterized in that The second bracket (3) is fixed on the fixing screw cap (2) by a thin iron wire, and the first bracket (4) is connected to the spindle sleeve (5) by a first micro-bolt (7).

3. An intelligent auxiliary device based on precise positioning of a graphite base according to claim 1, It is characterized in that A plurality of holes are provided in the spindle (1) at the position between the spindle sleeve (5) and the fixing screw cap (2) for inserting a baffle (10).

4. An intelligent auxiliary device based on precise positioning of a graphite base according to claim 1, It is characterized in that The vision sensor (6) is connected to the fixing screw cap (2) by threading or by a hanging hook connection method.

5. An intelligent auxiliary device based on precise positioning of a graphite base according to claim 1, It is characterized in that Two holes are provided on the second bracket (3).

6. A method for precise positioning of a graphite base, implemented by the intelligent auxiliary device for precise positioning of a graphite base according to any one of claims 1 to 5, It is characterized in that Includes the following steps; Step 1: Assemble the graphite base (11) with the spindle structure and the visual sensor (6); control the intelligent robotic arm to insert the fixing screw nut (2) of the auxiliary device into the central hole (13) of the graphite base (11), and control the intelligent robotic arm to slowly unfold the first bracket (4) and the second bracket (3) on the outer side of the spindle (1). After the unfolding is completed, control the intelligent robotic arm to pull the second bracket (3) upward to contact the lower edge of the opening of the central hole (13) of the graphite base (11), thereby supporting the graphite base (11); Step 2: Taking the position of the vision sensor (6) as the origin O, use the vision sensor (6) to obtain the contour of the quartz tube nozzle to be installed on the graphite base (11), perform image processing on the obtained contour, and obtain the center position (x 0 , y 0 ) of the quartz tube nozzle, and obtain the vector pointing from the origin O to the center position (x 0 , y 0 ) of the quartz tube nozzle, forming the movement vector of the main shaft (1). Control the intelligent robotic arm through the controller to move the main shaft (1) to the center position (x 0 , y 0 ) of the quartz tube nozzle according to the movement vector; Step 3: Measure the distance h between the vision sensor (6) and the metal baffle (14) at the bottom of the quartz tube to be installed on the graphite base (11). 1 , and control the intelligent robotic arm through the controller to lower the main shaft (1) until the height of the vision sensor (6) from the metal baffle (14) is h. 2 , h 2 is the difference in height between the measured distance h 1 and the graphite base (11). Step 4: using a visual sensor (6) to collect an image of the bottom of the quartz tube to be installed on the graphite base (11), and processing the bottom image of the quartz tube to obtain the position of the metal baffle (14) at the bottom of the installation tube; the controller calculates the position of the metal baffle (14) to obtain the angle θ between the slot (12) of the graphite base (11) and the metal baffle (14); the controller controls the intelligent mechanical arm to rotate the main shaft (1) so that the angle θ between the slot (12) of the graphite base (11) and the metal baffle (14) is zero; and the graphite base (11) is further lowered so that the slot (12) of the graphite base (11) is engaged and fixed with the metal baffle (14) at the bottom of the installation tube; Step 5: Control the intelligent robot arm to move the spindle sleeve (5) and the spindle (1) in opposite directions relative to each other, so that the first bracket (4) is embedded in the vertical groove (15) of the spindle sleeve (5), and the second bracket (3) is embedded in the vertical groove (15) of the fixing nut (2). The first bracket (4) and the second bracket (3) are contracted and separated from the graphite base (11); the controller controls the intelligent robot arm to pull the spindle sleeve (5) upward until the spindle structure and the visual sensor (6) are completely pulled out of the quartz tube.

7. A method for removing a graphite base, which is implemented by the intelligent auxiliary device based on precise positioning of the graphite base as claimed in any one of claims 1 to 5, It is characterized in that The steps include: Step 1: using the visual sensor (6) of the auxiliary device to collect an image of the tube mouth of the quartz tube, and processing the collected tube mouth image to obtain the center position of the tube mouth of the quartz tube, and controlling the intelligent robot arm through the controller to move the main axis (1) to the center position of the tube mouth of the quartz tube; Step 2: Controlling the intelligent robot arm to make the spindle (1) descend in the quartz tube, using the visual sensor (6) to collect the opening image of the central hole (13) of the graphite base (11), the controller processes the opening image to obtain the opening position of the central hole (13), and controlling the intelligent robot arm to make the first bracket (4) and the second bracket (3) of the spindle structure reach the opening of the central hole and penetrate into the central hole (13) of the graphite base; Step 3: controlling the first bracket (4) and the second bracket (3) on the main shaft structure to unfold by controlling the intelligent robot arm, and controlling the main shaft (1) to move upward, so that the second bracket (3) contacts the lower edge of the opening of the central hole (13) of the graphite base (11), thereby supporting the graphite base (11); Step 4: Control the intelligent robotic arm to move the main shaft (1) upward, and the graphite base (11) moves upward together with the auxiliary device. Monitor the upward movement position of the graphite base (11) through the vision sensor (6) until the graphite base (11) is completely pulled out of the nozzle of the quartz tube. Step 5: Control the intelligent robotic arm to move the main shaft sleeve (5) and the main shaft (1) relatively in the opposite direction, so that the first bracket (4) is embedded in the vertical groove (15) of the main shaft sleeve (5), and the second bracket (3) is embedded in the vertical groove (15) of the fixed screw cap (2). The first bracket (4) and the second bracket (3) contract and separate from the graphite base (11). By controlling the intelligent robotic arm to lift the main shaft sleeve (5) upward until the main shaft structure and the vision sensor (6) are completely pulled out of the quartz tube.

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