A temperature detection method based on a two-dimensional grating structure

Abstract

This application discloses a temperature detection method based on a two-dimensional grating structure. When the temperature of electrical equipment changes, different wavelengths of infrared electromagnetic waves are emitted. Based on the unique resonance characteristics of the two-dimensional grating structure, infrared electromagnetic waves of different wavelengths will have different transmission intensities after passing through the grating structure. There is a one-to-one correspondence between the temperature of the electrical equipment and the transmission intensity of the two-dimensional grating structure. By measuring the transmission intensity using an infrared detector, the corresponding temperature of the electrical equipment can be deduced. The advantage of this application is that by measuring the transmission intensity of electromagnetic waves of different wavelengths through the two-dimensional grating structure, the operating temperature of the electrical equipment can be deduced. Based on the strong wavelength dependence of the two-dimensional grating structure and utilizing the one-to-one physical relationship between temperature and transmission intensity, real-time and efficient monitoring of changes in the operating temperature of electrical equipment can be achieved. Furthermore, by adjusting the structural parameters of the micro / nano structure used in the two-dimensional grating structure, different measurement sensitivities can be achieved.

Description

Technical Field

[0001] This application relates to a temperature detection method based on a two-dimensional grating structure, belonging to the field of temperature detection technology. Background Technology

[0002] Currently, assessing the normal operation of a power system typically relies on temperature monitoring. This is because the operating temperature of electrical equipment is the most direct indicator of its operational status. Common electrical equipment includes power generation equipment such as steam turbines, generators, transformers, and hydro turbines; power supply equipment such as transmission lines of various voltage levels; and power transformers and contactors. Abnormal operating temperatures in these devices often indicate internal problems. Currently, infrared thermometers are used for temperature detection in electrical equipment. However, this method, relying on manual measurement, lacks sensitivity and cannot provide higher sensitivity for specific electrical equipment. To ensure the normal and stable operation of power equipment, it is crucial to provide temperature detection methods that can meet varying sensitivity requirements. Summary of the Invention

[0003] The purpose of this application is to provide a temperature detection method with flexible control over sensitivity.

[0004] To achieve the above objectives, the technical solution of this application provides a temperature detection method based on a two-dimensional grating structure. When the temperature of a power device changes, different temperatures will radiate infrared electromagnetic waves of different wavelengths. Based on the unique resonance characteristics of the two-dimensional grating structure, infrared electromagnetic waves of different wavelengths will have different transmission intensities after penetrating the two-dimensional grating structure. There is a one-to-one correspondence between the temperature of the power device and the transmission intensity of the two-dimensional grating structure. By measuring the transmission intensity using an infrared detector, the corresponding temperature of the power device at that time can be deduced.

[0005] Specifically, the steps for manufacturing a temperature monitoring device that implements the above method are as follows:

[0006] Step 1: Determine the wavelength range of infrared electromagnetic waves emitted by the electrical equipment based on its temperature range.

[0007] Step 2: Select micro / nano structures with strong wavelength-dependent characteristics as the basic unit of the two-dimensional grating structure.

[0008] Step 3: Fine-tune the structural parameters of the micro / nano structure, select spectral lines with strong wavelength-dependent characteristics, and use the corresponding structures for the final two-dimensional grating structure.

[0009] Step 4: The designed two-dimensional grating structure is fabricated using photolithography and etching processes to obtain a sample. The sample is then integrated and packaged with an infrared detector, which is used to measure the intensity of light transmitted through it.

[0010] Step 5: Calibrate the temperature detection device. By measuring the transmission intensity of different incident wavelengths after passing through the two-dimensional grating structure, fit the corresponding relationship between wavelength and transmission intensity based on the measurement results, and then obtain the relationship between the operating temperature of the power equipment and the transmission intensity.

[0011] The micro / nano structure is a germanium tetragonal prism structure with strong wavelength-dependent characteristics. The germanium tetragonal prism structure includes a square substrate and tetragonal prisms protruding from the upper surface of the substrate. The structural parameters of the germanium tetragonal prism structure include the period p, the height h of the tetragonal prisms, the gap s between the tetragonal prisms, and the width b of the prisms. By adjusting the structural parameters of the micro / nano structure used for the two-dimensional grating structure, different measurement sensitivities can be achieved.

[0012] The advantage of this application lies in its proposed two-dimensional grating structure, designed to address the issue of adjusting the sensitivity of real-time monitoring of power equipment operating temperature. By measuring the transmission intensity of electromagnetic waves of different wavelengths through the structure, the operating temperature of the power equipment can be deduced. Based on the strong wavelength dependence of the two-dimensional grating structure and utilizing the one-to-one physical relationship between temperature and transmission intensity, real-time and efficient monitoring of changes in the operating temperature of power equipment can be achieved. Furthermore, by adjusting the structural parameters of the micro / nano structure used in the two-dimensional grating structure, different measurement sensitivities can be achieved. Attached Figure Description

[0013] Figure 1 This is a top view of the germanium tetragonal prism structure provided in the embodiment;

[0014] Figure 2 This is a side view of the germanium tetragonal prism structure provided in the embodiment. Detailed Implementation

[0015] To make this application more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings.

[0016] Example

[0017] This embodiment provides a temperature detection method based on a two-dimensional grating structure. The two-dimensional grating structure has resonant characteristics. When the temperature of the power equipment changes, different temperatures will radiate infrared electromagnetic waves of different wavelengths. Due to the unique resonant characteristics of the two-dimensional grating structure, infrared electromagnetic waves of different wavelengths will have different transmission intensities after penetrating the two-dimensional grating structure. There is a one-to-one correspondence between the temperature of the power equipment and the transmission intensity of the two-dimensional grating structure. By measuring the transmission intensity using an infrared detector, the corresponding temperature of the power equipment at this time can be deduced, thereby realizing real-time, efficient and highly sensitive temperature monitoring of the power equipment.

[0018] The steps for manufacturing a temperature monitoring device based on the above method are as follows:

[0019] Step 1: Determine the wavelength range λ1~λ2 of the electromagnetic waves radiated by the electrical equipment based on its temperature range.

[0020] Step 2: Select micro / nano structures with strong wavelength-dependent characteristics as the basic unit of the two-dimensional grating structure, and splice the micro / nano structures horizontally and vertically to obtain the two-dimensional grating structure. In order to make the incident wavelength and the transmitted intensity of the structure have a monotonically one-to-one correspondence, the grating period is adjusted according to the theoretical model and numerical calculations to make the two-dimensional grating structure resonate at the minimum or maximum wavelength.

[0021] Step 3: Fine-tune the structural parameters of the micro / nano structure and calculate the transmission spectrum of the two-dimensional grating structure under different structural parameters. Specifically, the transmission spectrum can be calculated using the finite element method or the finite-difference time-domain method. Import the model of the micro / nano structure into software such as Comsol or CST for the finite element method or software such as Lumerical or Eastwave for the finite-difference time-domain method to calculate the transmission spectrum. Select the spectral lines with strong wavelength dependence characteristics and use their corresponding structures for the final two-dimensional grating structure.

[0022] Step 4: The designed two-dimensional grating structure is fabricated using photolithography and etching processes to obtain a sample. The sample is then integrated and packaged with an infrared detector, which is used to measure the intensity of light transmitted through the grating.

[0023] Step 5: Finally, calibrate the temperature detection device. By measuring the transmission intensity of different incident wavelengths through the two-dimensional grating structure, the correlation between wavelength and transmission intensity is fitted based on the measurement results, and thus the relationship between the operating temperature of the power equipment and the transmission intensity is obtained.

[0024] Specifically, the maximum wavelength of infrared electromagnetic waves was set to 10 μm, and a germanium tetragonal prism structure with strong wavelength dependence was selected as the micro / nano structure. (See [reference needed]). Figure 1 and Figure 2 The germanium tetragonal prism structure consists of a square substrate of a certain thickness and tetragonal prisms protruding from the upper surface of the substrate, made of germanium. The tetragonal prisms are distributed in a square pattern. The structural parameters of the germanium tetragonal prism structure include the period p (substrate width), the height h of the tetragonal prisms, the gap s between the tetragonal prisms, and the width b of the tetragonal prisms. A two-dimensional grating structure is obtained by arranging the micro-nano structures in a horizontal and vertical array. By adjusting the structural parameters of the micro-nano structures, the transmission spectrum of the two-dimensional grating structure is modulated, and spectral lines with strong wavelength-dependent characteristics are selected. The corresponding structural parameters are used for the final designed two-dimensional grating structure. In this embodiment, the period p = 8 μm, the height h = 4 μm, and the width b and gap s vary from 0.4 μm to 7.6 μm, ultimately resulting in a width b = 2.5 μm and a gap s = 1.5 μm.

[0025] Then, the designed two-dimensional grating structure is fabricated using photolithography and etching processes, and then integrated and packaged with an infrared detector to obtain a power equipment temperature monitoring device. When the operating temperature of the power equipment changes, it radiates infrared electromagnetic waves of different wavelengths. The infrared electromagnetic waves act on the two-dimensional grating structure, and the transmission intensity of the electromagnetic waves is measured by the infrared detector. Then, based on the calibrated relationship between temperature and intensity, the operating temperature of the power equipment is calculated.

[0026] This embodiment proposes a two-dimensional grating structure to monitor the operating temperature changes of power equipment by measuring the transmission intensity of electromagnetic waves through the structure. Due to the strong wavelength dependence of the two-dimensional grating structure, its transmission intensity is highly sensitive to the wavelength of the incident electromagnetic wave. Furthermore, different measurement sensitivities can be achieved by changing the structural parameters of the two-dimensional grating structure. Integrating the two-dimensional grating structure with an infrared detector enables real-time monitoring of the operating temperature of power equipment. This temperature monitoring method based on the two-dimensional grating structure provides a novel solution for the real-time monitoring of the operating status of power equipment.

Claims

1. A temperature detection method based on a two-dimensional grating structure, characterized in that, As the temperature of electrical equipment changes, different wavelengths of infrared electromagnetic waves are emitted. Based on the unique resonance characteristics of a two-dimensional grating structure, infrared electromagnetic waves of different wavelengths will have different transmission intensities after penetrating the two-dimensional grating structure. There is a one-to-one correspondence between the temperature of the electrical equipment and the transmission intensity of the two-dimensional grating structure. By measuring the transmission intensity using an infrared detector, the temperature of the electrical equipment at that time can be deduced, achieving real-time, efficient, and highly sensitive temperature monitoring of the electrical equipment. The two-dimensional grating structure is obtained by splicing together a horizontal and vertical array of micro-nano structures. By adjusting the structural parameters of the micro-nano structures, the transmission spectrum of the two-dimensional grating structure is modulated, and spectral lines with strong wavelength-dependent characteristics are selected. The corresponding structural parameters are then used in the final designed two-dimensional grating structure. Changing the structural parameters of the two-dimensional grating structure achieves different measurement sensitivities. The micro / nano structure is configured as a germanium tetragonal prism structure with strong wavelength-dependent characteristics. The germanium tetragonal prism structure includes a square substrate and tetragonal prisms protruding from the upper surface of the substrate.

2. The temperature detection method based on a two-dimensional grating structure as described in claim 1, the steps for fabricating the temperature monitoring device to implement the temperature detection method are as follows: Step 1: Determine the wavelength range of infrared electromagnetic waves emitted by the electrical equipment based on its temperature range. Step 2: Select micro / nano structures with strong wavelength-dependent characteristics as the basic unit of the two-dimensional grating structure. Step 3: Fine-tune the structural parameters of the micro / nano structure, select spectral lines with strong wavelength-dependent characteristics, and use the corresponding structures for the final two-dimensional grating structure. Step 4: The designed two-dimensional grating structure is fabricated using photolithography and etching processes to obtain a sample. The sample is then integrated and packaged with an infrared detector, which is used to measure the intensity of light transmitted through it. Step 5: Calibrate the temperature detection device. By measuring the transmission intensity of different incident wavelengths after passing through the two-dimensional grating structure, fit the corresponding relationship between wavelength and transmission intensity based on the measurement results, and then obtain the relationship between the operating temperature of the power equipment and the transmission intensity.

3. A temperature detection method based on a two-dimensional grating structure as described in claim 1 or 2, wherein the structural parameters of the germanium tetragonal prism structure include the period p, the height h of the tetragonal prism, the gap s between the tetragonal prisms, and the width b of the tetragonal prism.

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