Plate breakage detection device and plate coating machine equipped with the same
By using at least two sets of vertically arranged laser mechanisms in plate detection, combining the principle of total reflection and a movable gantry, efficient and accurate plate crushing detection is achieved, and the problems of low efficiency and accuracy in the prior art are solved.
Patent Information
- Application Number
- CN202211365621.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-10-31
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2042-10-31
AI Technical Summary
In the prior art, the panel crushing detection efficiency is low and the accuracy is low, making it difficult to fully cover the entire glass substrate for inspection in a short period of time, and it is easy to miss inspection.
At least two sets of laser mechanisms are adopted, and the beams are arranged perpendicularly to each other. Using the principle of total reflection of light, the broken surface is detected through the total reflection of the laser beam inside the plate, and combined with the movable gantry structure, a fast and all-round scanning is achieved.
It improves the efficiency and accuracy of plate crushing detection, reduces the risk of missed inspection, and reduces the production and use costs.
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Figure CN115656218B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of substrate detection devices, and in particular to a plate breakage detection device and a flat plate coating machine equipped with the device. Background Art
[0002] Currently, transparent substrates are widely used as carriers in the panel, packaging, and flexible film manufacturing industries. The most commonly used transparent substrate is a flat glass substrate. Flat glass substrates offer advantages such as high flatness, uniform thickness, and low cost. However, glass substrates are easily broken, which can cause coating irregularities and contaminate equipment with coating material. In severe cases, fragments can even impact the die, damaging the die lip and preventing proper operation.
[0003] Most current coating equipment lacks a device to detect broken glass substrates. A small number of coating systems are equipped with light sensors to detect whether the glass substrate is broken. However, these sensors can only detect a small spot area at a time, requiring a significant amount of time to inspect the entire glass substrate, resulting in very low efficiency. Furthermore, it is difficult to fully cover the entire glass substrate during the inspection process, making it easy to miss detections, resulting in low detection accuracy.
[0004] Application Contents
[0005] Therefore, the present application aims to solve the technical problems of low detection efficiency and low detection accuracy when detecting plate breakage, thereby providing a plate breakage detection device and a flat plate coating machine equipped with the device.
[0006] To solve the above technical problems, the technical solution of the present application is as follows: A plate breakage detection device, comprising:
[0007] A platform for placing the board to be tested;
[0008] At least two groups of laser mechanisms are mounted on the platform and are suitable for being arranged on the periphery of the board to be tested, each group of the laser mechanisms includes a transmitting end and a receiving end arranged on opposite sides of the board to be tested, and the light beams emitted by the transmitting ends of the at least two groups of laser mechanisms pass through the board to be tested and are arranged perpendicular to each other;
[0009] Among them, the plate breakage detection device has all the receiving ends receiving the light beam from the transmitting end side to form complete plate information or at least one receiving end does not receive the light beam emitted by the corresponding transmitting end side to form plate breakage information.
[0010] Preferably, it comprises a first laser mechanism and a second laser mechanism, wherein the first light beam emitted by the first laser mechanism is arranged perpendicular to the second light beam emitted by the second laser mechanism; the first laser mechanism comprises a first transmitting end and a first receiving end, and the second laser mechanism comprises a second transmitting end and a second receiving end;
[0011] The first transmitting end and the first receiving end are slidably arranged on the platform along a direction perpendicular to the first light beam, and the second transmitting end and the second receiving end are fixedly mounted on the platform; or the first transmitting end and the first receiving end are fixedly mounted on the platform, and the second transmitting end and the second receiving end are slidably arranged on the platform along a direction perpendicular to the second light beam; or the first transmitting end and the first receiving end are slidably arranged on the platform along a direction perpendicular to the first light beam, and the second transmitting end and the second receiving end are slidably arranged on the platform along a direction perpendicular to the second light beam.
[0012] Preferably, the plate to be tested is a rectangular plate; the first light beam and the second light beam are respectively arranged parallel to two vertical sides of the rectangular plate.
[0013] Preferably, it further comprises a third laser mechanism, wherein a third light beam emitted by the third laser mechanism is arranged perpendicularly to the second light beam, and the third light beam is arranged parallel to the first light beam, and the third laser mechanism comprises a third transmitting end and a third receiving end;
[0014] The third transmitting end and the third receiving end are fixedly mounted on the platform, or the third transmitting end and the third receiving end are slidably arranged on the platform along a direction perpendicular to the third light beam.
[0015] Preferably, the first laser mechanism and the third laser mechanism are fixedly arranged on the platform;
[0016] The first light beam is disposed close to an edge of a first side of the rectangular plate, and the third light beam is disposed close to an edge of a second side opposite to the first side.
[0017] Preferably, it further comprises a fourth laser mechanism, wherein a fourth light beam emitted by the fourth laser mechanism is arranged perpendicular to the first light beam, and the fourth light beam is arranged parallel to the second light beam, and the fourth laser mechanism comprises a fourth transmitting end and a fourth receiving end;
[0018] The fourth transmitting end and the fourth receiving end are fixedly mounted on the platform, or the fourth transmitting end and the fourth receiving end are slidably arranged on the platform along a direction perpendicular to the fourth light beam.
[0019] Preferably, the second laser mechanism and the fourth laser mechanism are fixedly arranged on the platform;
[0020] The second light beam is arranged close to the edge of the third side of the rectangular plate; and the fourth light beam is arranged close to the edge of the fourth side opposite to the third side.
[0021] A coating device is also provided, comprising: a plate breakage detection device as described in any one of the above items.
[0022] Preferably, it further comprises an alarm mechanism, which is electrically connected to the laser mechanism and sends an alarm signal to the outside world based on the detected plate breakage information.
[0023] Preferably, it comprises a fuselage body, on which a translatable gantry is provided, and the transmitting end and the receiving end of any group of the laser mechanisms are respectively arranged at opposite ends of the gantry.
[0024] The technical solution of this application has the following advantages:
[0025] 1. In the present invention, a laser beam is transmitted through the interior of the board to be tested. If the board to be tested is broken and the incident angle of the laser beam on the broken surface is within a certain range, total reflection will occur. Based on the principle of total reflection, whether the board to be tested is broken can be quickly detected, thereby improving detection efficiency.
[0026] 2. In the present invention, by setting at least two mutually perpendicular lasers, when these two laser beams illuminate the same broken surface, the incident angle of one beam must be greater than or equal to 45° (the critical angle of glass entering the air is about 44°, and the critical angle of most other transparent plates entering the air is not much different from this), so that total reflection occurs, thereby avoiding the problem of not being able to detect the broken surface due to the total reflection not occurring because the incident angle of the light beam is not within the corresponding range.
[0027] 3. Because the board to be tested is generally easy to break from the edge, setting a fixed laser mechanism at the edge of the board to be tested will help improve the detection efficiency.
[0028] 4. A set of laser mechanisms is set on a translatable gantry. The laser mechanism moves with the gantry, and there is no need to set up a driving mechanism, which saves production costs and use costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0029] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.
[0030] Figure 1 Schematic diagram of the overall structure of the plate breakage detection device in an embodiment of the present application;
[0031] Figure 2 This is a working principle diagram of a plate breakage detection device in an embodiment of the present application;
[0032] Figure 3 This is a working principle diagram of a plate breakage detection device in an embodiment of the present application;
[0033] Figure 4 This is a working principle diagram of a plate breakage detection device in an embodiment of the present application;
[0034] Figure 5 This is a schematic diagram of the overall structure of the flat coating machine in Example 7 of the present application.
[0035] Explanation of the reference numerals: 11, first transmitting end; 12, first receiving end; 21, second transmitting end; 22, second receiving end; 31, third transmitting end; 32, third receiving end; 41, fourth transmitting end; 42, fourth receiving end; 5, board to be tested; 6, gantry; 7, fuselage body. DETAILED DESCRIPTION
[0036] The following will clearly and completely describe the technical solution of this application in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of this application.
[0037] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.
[0038] Example 1
[0039] This embodiment provides a plate breakage detection device comprising a platform and at least two laser mechanisms. The platform is horizontally positioned and is used to place a plate 5 to be tested. The laser mechanisms include a transmitter and a receiver positioned opposite each other, the transmitter for emitting laser light and the receiver for receiving laser light. The laser mechanisms are mounted horizontally on the platform, with the transmitter and receiver positioned at opposing positions on the periphery of the plate 5 to be tested. The laser beams emitted by the at least two laser mechanisms pass horizontally through the interior of the plate 5 to be tested, with at least two of the laser beams being perpendicular to each other.
[0040] A control center is provided in the plate breakage detection device, which is connected to each group of laser mechanisms. The control center is used to receive information from the receiving end. If the receiving end does not receive the corresponding laser, a prompt signal is transmitted to the control center.
[0041] The working principle of the plate breakage detection device provided in this embodiment is as follows: based on the total reflection phenomenon of light, that is, when light is incident from a denser medium to a less dense medium, reflection and refraction usually occur. However, when the angle of incidence is greater than a certain angle, the light will be completely reflected back to the denser medium, and no refraction will be formed, that is, no light will be emitted from the side of the less dense medium. This phenomenon is called total reflection. It is known that air is a less dense medium, and the refractive index of air is n1 = 1.0029. The plate 5 to be tested is mostly a denser medium. Taking the most common glass plate as an example, the refractive index of glass is about n2 = 1.5. The critical angle for total reflection when a light beam is incident from glass to air is That is to say, when the incident angle of the light beam from the glass to the air is greater than or equal to 44°, total internal reflection will occur.
[0042] For the convenience of description, it is assumed that there are two sets of laser mechanisms in this embodiment. Figure 2 As shown, Figure 2 This is a top view of the plate breakage detection device. Figure 2 In the embodiment, the light beams emitted by the two laser mechanisms respectively pass through the board to be tested 5 and are in a perpendicular relationship. The light beams emitted by the two laser mechanisms will pass through the broken surface of the board to be tested 5 (if a broken surface is formed on the board to be tested 5, the broken surface will be filled with air). The incident angle of one light beam when passing through the broken surface is θ1, and the incident angle of the other light beam when passing through the broken surface is θ2. According to Figure 2It can be seen that θ1 + θ2 = 90°. Assuming Maxθ is the larger of the two angles (θ1, θ2), then: In a special case, when the angle of the broken surface is 45°, Maxθ can reach its minimum value, in which case Maxθ = θ1 = θ2 = 45°. When the angle of the broken surface is not 45°, one of θ1 and θ2 will definitely be greater than 45°, and the other will be less than 45°, so Maxθ will definitely be greater than 45°. In summary, the minimum value of Maxθ will definitely be greater than or equal to 45°. In other words, when two light beams pass through the same broken surface, at least one of the light beams will have an incident angle greater than or equal to 45° with this broken surface. Because the broken surface is filled with air, at least one of the light beams will undergo total internal reflection. The light beam that undergoes total internal reflection will not be refracted again, and will not continue to penetrate the test board 5, nor will it pass through the test board 5 to the receiving end. When the receiving end fails to receive the laser beam, the receiving end transmits a prompt message to the control center, and the control center then issues a warning to indicate that there is a broken surface in the board to be tested 5 .
[0043] If only one set of laser mechanisms is set up to detect the board 5 to be tested, if the incident angle of the laser beam and the broken surface is less than the critical angle of total reflection, total reflection will not occur, and the beam will continue to penetrate the board 5 to be tested. The receiving end at the other end will continue to receive the beam, and the receiving end will not transmit prompt information to the control center, and the broken surface will not be identified, so there is a relatively large risk of missed detection. The biggest improvement of this embodiment is that: using at least two sets of mutually perpendicular laser mechanisms to detect a board 5 to be tested is equivalent to two mutually perpendicular light beams performing a full-scale "scan" on the board 5 to be tested. Both light beams will sweep across any area of the board 5 to be tested, and the entire board 5 to be tested can be detected in a relatively short time, thereby improving detection efficiency. When two light beams pass through the same broken surface, the incident angle of at least one light beam with the broken surface is greater than or equal to the critical angle of total reflection, which means that at least one light beam will undergo total reflection, which means that at least one receiving end cannot receive the laser beam, which means that at least one receiving end transmits prompt information to the control center, so there will be no missed broken surface, thereby improving the detection accuracy of the broken surface of the test plate 5.
[0044] Example 2
[0045] This embodiment, supplementing Embodiment 1, includes a first laser mechanism and a second laser mechanism. The first laser mechanism emits a first beam perpendicular to the second beam emitted by the second laser mechanism. The first laser mechanism includes a first transmitting end 11 and a first receiving end 12 positioned opposite each other, while the second laser mechanism includes a second transmitting end 21 and a second receiving end 22 positioned opposite each other. The panel 5 to be tested is a rectangular plate, and the first and second beams are positioned parallel to the two vertical sides of the rectangular plate.
[0046] The first laser mechanism and the second laser mechanism may be arranged in any of the following three ways:
[0047] 1. The first transmitting end 11 and the first receiving end 12 can slide horizontally on the platform, and the sliding direction of the first transmitting end 11 and the first receiving end 12 is perpendicular to the first light beam. The second transmitting end 21 and the second receiving end 22 are fixedly installed on the platform.
[0048] 2. The first transmitting end 11 and the first receiving end 12 are fixedly mounted on the platform. The second transmitting end 21 and the second receiving end 22 can slide horizontally on the platform, and the sliding direction of the second transmitting end 21 and the second receiving end 22 is perpendicular to the direction of the second light beam.
[0049] 3. The first transmitting end 11 and the first receiving end 12 can slide horizontally on the platform, and the sliding direction of the first transmitting end 11 and the first receiving end 12 is perpendicular to the direction of the first light beam. The second transmitting end 21 and the second receiving end 22 can slide horizontally on the platform, and the sliding direction of the second transmitting end 21 and the second receiving end 22 is perpendicular to the direction of the second light beam.
[0050] Each of the above three settings has its advantages and disadvantages. In settings 1 and 2, only one set of laser mechanisms needs to be slid, so only one set of sliding mechanisms needs to be set up, which saves production costs and use costs. However, there is a set of laser mechanisms that does not slide relative to the board 5 to be tested. The light beams of this set of laser mechanisms cannot "scan" the board 5 to be tested, and there is a certain risk of missed detection. In setting method 3, the two light beams of the two sets of laser mechanisms can "scan" the board 5 to be tested in all directions, so missed detection will not occur. However, because two sets of sliding mechanisms need to be set up, the production cost and use cost are relatively high. Based on the above three settings, you can choose according to your actual needs. It is more flexible and convenient and suitable for a variety of usage scenarios.
[0051] Example 3
[0052] As a further supplement to Example 2, this embodiment further includes a third laser mechanism. The third light beam emitted by the third laser mechanism is arranged perpendicular to the second light beam, and the third light beam is arranged parallel to the first light beam. The third laser mechanism includes a third transmitting end 31 and a third receiving end 32 arranged opposite to each other.
[0053] The third transmitting end 31 and the third receiving end 32 are fixedly mounted on the platform, or the third transmitting end 31 and the third receiving end 32 are slidably arranged on the platform along a direction perpendicular to the third light beam.
[0054] The third laser mechanism may be arranged in any of the following two ways:
[0055] 1. The third transmitting end 31 and the third receiving end 32 are fixedly installed on the platform.
[0056] 2. The third transmitting end 31 and the third receiving end 32 can slide horizontally on the platform, and the sliding direction of the third transmitting end 31 and the third receiving end 32 is perpendicular to the direction of the third light beam.
[0057] The third laser mechanism in this embodiment is used in conjunction with the first and second laser mechanisms. Similar to the purpose of multiple configurations in Example 2, when the third transmitting end 31 and the third receiving end 32 are fixedly mounted on the platform, the production and operating costs of the plate breakage detection device are lower, but the detection accuracy is slightly lower. When the third transmitting end 31 and the third receiving end 32 are slidably mounted on the platform, the production and operating costs are higher, but the detection accuracy is better. The choice of configuration should be based on actual needs.
[0058] Example 4
[0059] This embodiment is a further supplement to embodiment 3. The first laser mechanism and the third laser mechanism are fixedly arranged on the platform. The first light beam is arranged near the edge of the first side of the rectangular plate, and the third light beam is arranged near the edge of the second side opposite to the first side.
[0060] The second laser mechanism can be fixedly arranged on the platform, or can be slidably arranged on the platform along a direction perpendicular to the second light beam.
[0061] Since the board to be tested 5 generally breaks at the edge, the first laser mechanism and the third laser mechanism are fixedly arranged on two opposite sides of the board to be tested 5. Without adding a new moving device, the detection requirements are met, and missed detection in the direction of the first light beam and the third light beam can be avoided to a large extent.
[0062] Example 5
[0063] As a further supplement to Example 4, this embodiment further includes a fourth laser mechanism. The fourth light beam emitted by the fourth laser mechanism is arranged perpendicular to the first light beam, and the fourth light beam is arranged parallel to the second light beam. The fourth laser mechanism includes a fourth transmitting end 41 and a fourth receiving end 42.
[0064] The fourth transmitting end 41 and the fourth receiving end 42 are fixedly mounted on the platform, or the fourth transmitting end 41 and the fourth receiving end 42 are slidably arranged on the platform along a direction perpendicular to the fourth light beam.
[0065] Including the fourth laser mechanism, the plate breakage detection device provided in this embodiment is equipped with a total of four groups of laser mechanisms. The four groups of laser mechanisms are used in conjunction with each other, and fixed-setting laser mechanisms and smoothly-setting laser mechanisms can be flexibly selected, which not only improves the detection accuracy but also makes the plate breakage detection device have a wider range of applications.
[0066] Example 6
[0067] This embodiment is a further supplement to embodiment 5. Figure 4 As shown, the second laser mechanism and the fourth laser mechanism are fixedly arranged on the platform. The second light beam is arranged near the edge of the third side of the rectangular plate, and the fourth light beam is arranged near the edge of the fourth side opposite to the third side. It has been mentioned before that the first light beam is arranged near the edge of the first side of the rectangular plate, and the third light beam is arranged near the edge of the second side opposite to the first side. That is to say, the four groups of laser mechanisms are respectively arranged on the four side plate edges of the rectangular plate to be tested 5, that is, the four groups of laser mechanisms can immediately complete the detection of the four side edges of the plate to be tested 5. Because the plate to be tested 5 is generally broken from the edge when it is broken, the four groups of laser mechanisms can complete the detection of the plate to be tested 5 in a short time, without waiting for the sliding mechanism to drive the laser mechanism to "scan" the plate to be tested 5, shortening the detection time and improving the detection efficiency. There is no need to set up a sliding mechanism, saving production cost and use cost.
[0068] Example 7
[0069] like Figure 5 As shown, this embodiment provides a coating device, which includes the plate breakage detection device provided by any one of embodiments 1-6, and also includes an alarm mechanism and a body 7. The alarm mechanism is arranged in a control center and is electrically connected to the laser mechanism through the control center. The alarm mechanism sends an alarm signal to the outside world based on the detected plate breakage information. A translatable gantry 6 is provided on the body 7. In the initial state, the gantry 6 is at the left end. During operation, the gantry 6 slides from left to right. The transmitting end and the receiving end of any group of laser mechanisms are respectively arranged at opposite ends of the gantry 6. In this embodiment, the first laser mechanism is specifically selected to be arranged at opposite ends of the gantry 6. The gantry 6 coats the plate 5 to be tested during the sliding process. The first laser mechanism slides on the platform along with the gantry 6, and no separate sliding mechanism is required, thereby saving production and use costs.
[0070] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of this application.
Claims
1. A plate breakage detection device, characterized in that: include: a platform for placing the test board (5); At least two groups of laser mechanisms are mounted on the platform and are suitable for being arranged on the periphery of the board to be tested (5), each group of the laser mechanisms comprises an emitting end and a receiving end arranged on opposite sides of the board to be tested (5), and the light beams emitted by the emitting ends of the at least two groups of the laser mechanisms pass through the board to be tested (5) and are arranged perpendicular to each other; The plate breakage detection device has the following features: all the receiving ends receive the light beams from the transmitting end side to form complete plate information, or at least one receiving end does not receive the light beams emitted from the corresponding transmitting end side to form plate breakage information; the plate breakage detection device is based on the total reflection principle. When the plate to be tested (5) has a broken surface, the incident angle of the light beams emitted by the transmitting end of at least one group of laser mechanisms on the broken surface is greater than or equal to the critical angle of the total reflection phenomenon, resulting in the corresponding receiving end being unable to receive the light beam, thereby generating plate breakage information.
2. The plate breakage detection device according to claim 1, characterized in that: The invention comprises a first laser mechanism and a second laser mechanism, wherein a first light beam emitted by the first laser mechanism and a second light beam emitted by the second laser mechanism are arranged perpendicularly; the first laser mechanism comprises a first transmitting end (11) and a first receiving end (12), and the second laser mechanism comprises a second transmitting end (21) and a second receiving end (22); The first transmitting end (11) and the first receiving end (12) are slidably arranged on the platform along a direction perpendicular to the first light beam, and the second transmitting end (21) and the second receiving end (22) are fixedly mounted on the platform; or the first transmitting end (11) and the first receiving end (12) are fixedly mounted on the platform, and the second transmitting end (21) and the second receiving end (22) are slidably arranged on the platform along a direction perpendicular to the second light beam; or the first transmitting end (11) and the first receiving end (12) are slidably arranged on the platform along a direction perpendicular to the first light beam, and the second transmitting end (21) and the second receiving end (22) are slidably arranged on the platform along a direction perpendicular to the second light beam.
3. The plate breakage detection device according to claim 2, characterized in that: The plate to be tested (5) is a rectangular plate; the first light beam and the second light beam are respectively arranged parallel to two vertical sides of the rectangular plate.
4. The plate breakage detection device according to claim 3, characterized in that: It also includes a third laser mechanism, wherein a third light beam emitted by the third laser mechanism is arranged perpendicular to the second light beam, and the third light beam is arranged parallel to the first light beam, and the third laser mechanism includes a third transmitting end (31) and a third receiving end (32); The third transmitting end (31) and the third receiving end (32) are fixedly mounted on the platform, or the third transmitting end (31) and the third receiving end (32) are slidably arranged on the platform along a direction perpendicular to the third light beam.
5. The plate breakage detection device according to claim 4, characterized in that: The first laser mechanism and the third laser mechanism are fixedly arranged on the platform; The first light beam is disposed close to an edge of a first side of the rectangular plate, and the third light beam is disposed close to an edge of a second side opposite to the first side.
6. The plate breakage detection device according to claim 5, characterized in that: It also includes a fourth laser mechanism, wherein a fourth light beam emitted by the fourth laser mechanism is arranged perpendicular to the first light beam, and the fourth light beam is arranged parallel to the second light beam, and the fourth laser mechanism includes a fourth emitting end (41) and a fourth receiving end (42); The fourth transmitting end (41) and the fourth receiving end (42) are fixedly mounted on the platform, or the fourth transmitting end (41) and the fourth receiving end (42) are slidably arranged on the platform along a direction perpendicular to the fourth light beam.
7. The plate breakage detection device according to claim 6, characterized in that: The second laser mechanism and the fourth laser mechanism are fixedly arranged on the platform; The second light beam is arranged close to the edge of the third side of the rectangular plate; and the fourth light beam is arranged close to the edge of the fourth side opposite to the third side.
8. A coating device, characterized in that: include: The plate breakage detection device according to any one of claims 1 to 7.
9. The coating device according to claim 8, characterized in that It also includes an alarm mechanism, which is electrically connected to the laser mechanism and sends an alarm signal to the outside world based on the detected plate breakage information.
10. The coating device according to claim 8 or 9, characterized in that: It comprises a body (7), a gantry (6) that can be moved in a translation is provided on the body (7), and a transmitting end and a receiving end of any group of the laser mechanisms are respectively arranged at two opposite ends of the gantry (6).
Citation Information
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CN202693496U
Inspection method of flat sample and inspection device of flat sample used therefor
JP2005164458A