Probe and Probe Card Device

Abstract

The present disclosure provides a probe and a probe card device. The probe card device includes a first chuck and a plurality of probes. The probes are arranged through the first chuck and include a first probe and a second probe. The first probe has a first body and an end portion of the first body. The end portion of the body has a first recess and a first protrusion. The second probe has a second body and an end portion of the second body. The end portion of the second body has a second recess and a second protrusion. The second protrusion extends into the first recess.

Description

Technical Field

[0001] The present disclosure relates to a probe and a probe card device. In particular, it relates to a probe and a probe card device for testing electronic components. Background Art

[0002] Electrical testing is an important step in the manufacturing process of integrated circuit chips (IC chips). Each IC chip needs to be tested at the wafer stage and the packaging stage to ensure its electrical function. To test the electrical function of an IC chip, a tester equipped with a probe card device is introduced.

[0003] Specifically, the probe card device has a plurality of probes (i.e., probing needles), and the tester tests the device under test (DUT) by contacting the DUT through the probes of the probe card device. However, since the spacing between the probes cannot be reduced, the minimum size of the DUT will be limited.

[0004] The above "description of the prior art" only provides background art and does not admit that the above "description of the prior art" discloses the subject matter of the present disclosure, does not constitute the prior art of the present disclosure, and any description of the above "prior art" should not be taken as any part of the present invention. Summary of the Invention

[0005] An object of the present invention is to provide a probe and a probe card device to solve at least one of the above problems.

[0006] An embodiment of the present disclosure provides a probe. The probe includes a main body and an end of the main body. The end of the main body has a protruding portion and a recessed portion. The protruding portion is disposed on a first side of the end. The recessed portion is formed on a second side of the end. The size of the recessed portion of the recessed portion is larger than the size of the top of the protruding portion.

[0007] In some embodiments, the first side is opposite to the second side.

[0008] In some embodiments, the protruding portion protrudes away from the end, and the recessed portion recesses towards the end.

[0009] In some embodiments, the depth of the recessed portion is greater than the thickness of the top of the protruding portion.

[0010] In some embodiments, the depth of the recessed portion is approximately in the range of 5% to 30% of the width of the end.

[0011] In some embodiments, the opening length of the opening of the recessed portion is greater than the length of the top of the protruding portion.

[0012] In some embodiments, the recessed portion tapers from the outside to the inside of the end.

[0013] In some embodiments, the shape of the recess includes a trapezoid, an arc, or a rectangle.

[0014] In some embodiments, the shape of the protrusion corresponds to the shape of the recess.

[0015] Another embodiment of the present disclosure provides a probe. The probe includes a main body and an end of the main body. The end of the main body has a protrusion and a recess. The recess has a recess shape for receiving another protrusion of another probe.

[0016] In some embodiments, when the probe and another probe are arranged in an array and the recess shape of the recess receives another protrusion of another probe, the recess and another protrusion of another probe are close to each other.

[0017] In some embodiments, when the probe and another probe are arranged in an array, the recess position of the recess corresponds to the protrusion position of another protrusion of another probe.

[0018] Another embodiment of the present disclosure provides a probe card device. The probe card device includes a first chuck and a plurality of probes. The probes are arranged through the first chuck and include a first probe and a second probe. The first probe has a first main body and an end of the first main body. The end of the first main body has a first recess and a first protrusion. The second probe has a second main body and an end of the second main body. The end of the second main body has a second recess and a second protrusion. The second protrusion extends into the first recess.

[0019] In some embodiments, there is a distance between the end of the first main body and the end of the second main body, and the distance is less than the thickness of the second protrusion.

[0020] In some embodiments, the protrusion shape of the second protrusion corresponds to the recess shape of the first recess.

[0021] In some embodiments, the protrusion position of the second protrusion corresponds to the recess position of the first recess.

[0022] In some embodiments, the first recess and the second protrusion are close to each other.

[0023] In some embodiments, the first chuck has a plurality of first through holes for receiving the probes.

[0024] In some embodiments, the probe card device further includes a second chuck. The second chuck is parallel to the first chuck and has a plurality of second through holes for receiving the probes.

[0025] In some embodiments, the first through hole and the second through hole for receiving the same probe are offset in a direction perpendicular to the first chuck and the second chuck.

[0026] The technical features and advantages of the present disclosure have been outlined quite extensively above so as to provide a better understanding of the detailed description of the present disclosure below. Other technical features and advantages constituting the subject matter of the claims of the present disclosure will be described below. Those skilled in the art to which the present disclosure pertains should understand that the concepts disclosed below and the specific embodiments can be quite easily utilized as a basis for modifying or designing other structures or processes to achieve the same purpose as the present disclosure. Those skilled in the art to which the present disclosure pertains should also understand that such equivalent constructs cannot depart from the spirit and scope of the present disclosure as defined by the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] A more complete understanding of the disclosure of the present invention can be obtained when the embodiments and the claims are considered in conjunction with the accompanying drawings, in which like reference numerals refer to like elements.

[0028] Figure 1A Schematic diagram of a probe illustrating some embodiments of the present disclosure.

[0029] Figure 1B Enlarged schematic diagram of an end of a main body of a probe illustrating some embodiments of the present disclosure.

[0030] Figure 1C Schematic diagram of a probe array illustrating some embodiments of the present disclosure.

[0031] Figure 2A Schematic diagram of a probe illustrating some embodiments of the present disclosure.

[0032] Figure 2B Enlarged schematic diagram of an end of a main body of a probe illustrating some embodiments of the present disclosure.

[0033] Figure 2C Schematic diagram of a probe array of a probe illustrating some embodiments of the present disclosure.

[0034] Figure 3A Schematic diagram of a probe illustrating some embodiments of the present disclosure.

[0035] Figure 3B Schematic diagram of a probe array illustrating some embodiments of the present disclosure.

[0036] Figure 3C Schematic diagram of a probe illustrating some embodiments of the present disclosure.

[0037] Figure 3D Schematic diagram of a probe array illustrating some embodiments of the present disclosure.

[0038] Figure 3E Schematic diagram of a probe illustrating some embodiments of the present disclosure.

[0039] Figure 3F Schematic diagram of a probe array illustrating some embodiments of the present disclosure.

[0040] Figure 3G Schematic diagram illustrating a probe according to some embodiments of the present disclosure.

[0041] Figure 3H Schematic diagram illustrating probe arrays according to some embodiments of the present disclosure.

[0042] Figure 4A Schematic diagram illustrating a probe card apparatus according to some embodiments of the present disclosure.

[0043] Figure 4B Schematic diagram illustrating probes of a probe card apparatus according to some embodiments of the present disclosure.

[0044] Figure 4C An enlarged schematic diagram illustrating the end of the body of a probe according to some embodiments of the present disclosure.

[0045] Figure 4D A schematic diagram illustrating two adjacent probes of a probe card apparatus according to some embodiments of the present disclosure.

[0046] The reference numerals are as follows:

[0047] 4: Probe card device

[0048] 11: Probe

[0049] 21: Probe

[0050] 31: Probe

[0051] 41: Probe

[0052] 43: First Chuck

[0053] 45: Second chuck

[0054] 111: Subject

[0055] 113:End

[0056] 115:End

[0057] 211: Subject

[0058] 213:End

[0059] 215:End

[0060] 311: Subject

[0061] 313:End

[0062] 315:End

[0063] 411: Subject

[0064] 413:End

[0065] 415: End

[0066] 430: First through-hole

[0067] 450: Second through-hole

[0068] 1131: Protrusion

[0069] 1132: Recess

[0070] 2131: Protrusion

[0071] 2132: Recess

[0072] 3131: Protrusion

[0073] 3132: Recess

[0074] 4131: Protrusion

[0075] 4132: Recess

[0076] 1131T: Top

[0077] 11A: Probe array

[0078] 21A: Probe array

[0079] 31A: Probe array

[0080] 4131B: Protrusion

[0081] 4132A: Recess

[0082] 413A: End

[0083] 413B: End

[0084] 41A: Probe

[0085] 41B: Probe

[0086] D1: Depth

[0087] D1: Depth

[0088] D2: Depth

[0089] D4: Depth

[0090] d4: Distance

[0091] L11: Length

[0092] L12: Length

[0093] L21: Length

[0094] L22: Length

[0095] L41: Length

[0096] L42: Length

[0097] S11: Side

[0098] S12: Side

[0099] S21: Side

[0100] S22: Side

[0101] S41: Side

[0102] S42: Side

[0103] T1: Thickness

[0104] T1: Thickness

[0105] t4: Thickness

[0106] W1: Width

[0107] W2: Width Detailed implementation manners

[0108] The following description of the present disclosure is accompanied by the drawings that are incorporated in and constitute a part of the specification, which illustrate embodiments of the present disclosure. However, the present disclosure is not limited to these embodiments. In addition, the following embodiments can be appropriately integrated with the following embodiments to complete another embodiment.

[0109] "An embodiment", "embodiment", "exemplary embodiment", "other embodiments", "another embodiment", etc. mean that the embodiments described in the present disclosure may include specific features, structures or characteristics. However, not every embodiment must include the specific features, structures or characteristics. Furthermore, the repeated use of the phrase "in an embodiment" does not necessarily refer to the same embodiment, but may be the same embodiment.

[0110] In order to make the present disclosure fully understood, the following description provides detailed steps and structures. Obviously, the implementation of the present disclosure does not limit the specific details known to those skilled in the art. In addition, the known structures and steps are not described in detail so as not to unnecessarily limit the present disclosure. The preferred embodiments of the present disclosure are described in detail below. However, in addition to the detailed description, the present disclosure can also be widely implemented in other embodiments. The scope of the present disclosure is not limited to the content of the detailed description, but is defined by the claims.

[0111] It should be understood that the following disclosure provides many different embodiments or examples for implementing different features of the present invention. Specific embodiments or examples of components and arrangements are set forth below to simplify the present disclosure. Of course, these are merely examples and are not intended to be limiting. For example, the dimensions of the elements are not limited to the disclosed ranges or values, but may depend on process conditions and / or the desired properties of the device. Additionally, in the following description, forming a first feature "on" or "above" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. For simplicity and clarity, various features may be drawn arbitrarily to different scales. In the drawings, some layers / features may be omitted for simplicity.

[0112] In addition, for ease of explanation, spatially relative terms such as "beneath", "below", "lower", "above", "upper", etc. may be used herein to describe the relationship of one element or feature shown in the figures to another (other) element or feature. The spatially relative terms are intended to encompass different orientations of the element in use or operation in addition to the orientation shown in the figures. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatially relative descriptive terms used herein may be interpreted accordingly.

[0113] Reference Figure 1A and 1B, Figure 1A Schematic diagrams of a probe 11 illustrating some embodiments of the present disclosure. The probe 11 may include a body 111 and two ends 113, 115 of the body 111. The end 113 may be relative to the end 115. The end 115 may be a tip for contacting a tested integrated circuit (IC) chip (not shown). Figure 1B An enlarged schematic diagram of the end 113 of the body 111 of the probe illustrating some embodiments of the present disclosure. The end 113 may include a protrusion 1131 and a recess 1132. In this embodiment, the protrusion 1131 and the recess 1132 may have a rectangular shape.

[0114] Specifically, the end 113 may have two opposite sides S11 and S12. The protrusion 1131 may be disposed on the side S11 of the end 113 and protrude away from the end 113. The recess 1132 may be formed on the side S12 of the end 113 and recess toward the end 113.

[0115] In some embodiments, the size of the recess 1132 may be larger than the size of the top 1131T of the protrusion 1131. In some embodiments, the length L12 of an opening of the recess 1132 may be greater than the length L11 of the top 1131T of the protrusion 1131. In some embodiments, the depth D1 of the recess 1132 may be greater than the thickness T1 of the top 1131T of the protrusion 1131.

[0116] Therefore, since the size of the recess 1132 is larger than the size of the top 1131T of the protrusion 1131, when the probes 11 are arranged in a probe array, the recesses 1132 of the probes 11 can accommodate the protrusions 1131 of another probe 11.

[0117] Please refer to Figure 1C , Figure 1C FIG. Schematic diagram of a probe array 11A illustrating some embodiments of the present disclosure. Specifically, when the probes 11 are arranged in the probe array 11A, the position of the recess 1132 may correspond to the position of the protrusion 1131 of another probe 11, and the recess 1132 may have a shape that can accommodate another probe 1131.

[0118] In addition, when the recess 1132 accommodates the protrusion 1131 of another probe 11, the recess 1132 and the protrusion 1131 of another probe 11 are close to each other and should be separated to prevent the probes 11 from short-circuiting. In other words, the recess 1132 and the protrusion 1131 of another probe 11 are not in contact.

[0119] In some embodiments, to control the good operation of the electrical properties of the probe 11, the ratio of the depth D1 of the recess 1132 to the width W1 of the end 113 should not be greater than a critical value.

[0120] For example, the depth D1 of the recess 1132 may be in the range of about 5% to 30% of the width W1 of the end 113. Another example, the depth D1 of the recess 1132 may be in the range of about 10% to 20% of the width W1 of the end 113.

[0121] Refer to Figure 2A and Figure 2B , Figure 2A FIG. Schematic diagram of a probe 21 illustrating some embodiments of the present disclosure. The probe 21 may include a main body 211 and two ends 213, 215 of the main body 211. The end 213 may be relative to the end 215. The end 215 may be a tip for contacting a tested integrated circuit chip (not shown). Figure 2B FIG. Enlarged schematic diagram of the end 213 of the main body 211 of a probe 21 illustrating some embodiments of the present disclosure. The end 213 may include a protrusion 2131 and a recess 2132. In this embodiment, the recess 2132 may taper from the outside to the inside of the end 213.

[0122] Specifically, the end portion 213 may have opposite sides S21 and S22. The protruding portion 2131 may be disposed on the side S21 of the end portion 213 and protrude away from the end portion 213. The recessed portion 2132 may be formed on the side S22 of the end portion 213 and recess toward the end portion 213.

[0123] In some embodiments, the size of the recessed portion 2132 may be greater than the size of a part of the protruding portion 2131. In some embodiments, the length L22 of an opening of the recessed portion 1132 may be greater than the length L21 of a part of the protruding portion 2131.

[0124] Therefore, since the size of the recessed portion 2132 is greater than the size of that part of the protrusion 2131, when the probes 21 are arranged in a probe array, the recessed portion 2132 of the probe 21 can accommodate that part of the protrusion 2131 of another probe 21.

[0125] Please refer to Figure 2C , Figure 2C a schematic diagram of a probe array 21A of the probe 21 illustrating some embodiments of the present disclosure. Specifically, when the probes 21 are arranged in the probe array 21A, the position of the recessed portion 2132 may correspond to the position of the protruding portion 2131 of another probe 21, and the recessed portion 2132 may have a shape that can accommodate that part of another probe 2131.

[0126] In addition, when the recessed portion 2132 accommodates that part of the protruding portion 2131 of another probe 21, the recessed portion 2132 and the protruding portion 2131 of another probe are close to each other and should be separated to prevent the probes 21 from short - circuiting. In other words, the recessed portion 2132 and the protruding portion 2131 of another probe 21 are not in contact.

[0127] In some embodiments, to control the good operation of the electrical properties of the probe 11, the ratio of the depth D2 of the recessed portion 1132 to the width W2 of the end portion 213 should not be greater than a critical value.

[0128] For example, the depth D2 of the recessed portion 2132 may be in the range of about 5% to 30% of the width W1 of the end portion 113. Another example, the depth D2 of the recessed portion 2132 may be in the range of about 10% to 20% of the width W2 of the end portion 213.

[0129] Refer to Figures 3A to 3H , Figures 3A to 3HSchematic diagram of a probe 31 and a probe array 31A showing different structures of some embodiments of the present disclosure. In particular, each probe 31 may include a body 311 and ends 313, 315 of the body 311. The end 313 may be relative to the end 315. The end 315 may be a tip for contacting a tested integrated circuit chip (not shown). The end 313 may include a protrusion 3131 and a recess 3132.

[0130] In some embodiments, the shape of the protrusion 3131 may correspond to the shape of the recess 3132. As Figure 3A and Figure 3B illustrated, the shapes of the protrusion 3131 and the recess 3132 may be trapezoidal. As Figure 3C and Figure 3D illustrated, the shapes of the protrusion 3131 and the recess 3132 may be arc-shaped.

[0131] In some embodiments, the shape of the protrusion 3131 may be different from the shape of the recess 3132. As Figure 3E and Figure 3F illustrated, the shape of the protrusion 3131 may be arc-shaped and the shape of the recess 3132 may be rectangular. As Figure 3G and Figure 3H illustrated, the shape of the protrusion 3131 may be arc-shaped, and the shape of the recess 3132 may be trapezoidal.

[0132] It should be understood that the above embodiments of the protrusion 3131 and the recess 3132 are not intended to limit the protrusion 3131 and the recess 3132 to any shape. The concept of the present disclosure is that the shape of the recess of the probe can have sufficient space to accommodate the shape of the protrusion of another probe, thereby reducing the pitch between the probes of the probe array.

[0133] Please refer to Figure 4A , Figure 4A Schematic diagram of a probe card device 4 showing some embodiments of the present disclosure. The probe card device 4 may include a plurality of probes 41, a first chuck 43, and a second chuck 45. The probes 41 may have the same shape and may be arranged through the first chuck 43 and the second chuck 45.

[0134] In some embodiments, the first chuck 43 may have a plurality of first through holes 430 for accommodating the probes 41. The second chuck 45 may have a plurality of second through holes 450 for accommodating the probes 41. The first chuck 43 may be parallel to the second chuck 45.

[0135] In some embodiments, the first through-hole 430 and the second through-hole 450 that accommodate the same probe 41 are offset in a direction perpendicular to the first chuck 43 and the second chuck 45. In other words, the first through-hole 430 and the second through-hole 450 that accommodate the same probe 41 may be arranged in a misaligned manner. Therefore, as Figure 4A illustrated, the probe 41 can be bent when passing through the first chuck 43 and the second chuck 45 in an arrangement.

[0136] Please refer to Figure 4B , Figure 4B a schematic diagram of the probe 41 illustrating some embodiments of the present disclosure. The probe 41 may include a main body 411 and ends 413, 415 of the main body 411. The end 413 may be relative to the end 415. In some embodiments, the end 413 may be the head of the probe 41, and the end 415 may be the tip of the probe 41 to contact an IC chip (not shown) for testing.

[0137] Please refer to Figure 4C , Figure 4C an enlarged schematic diagram of the end 413 of the main body 411 of the probe 41 illustrating some embodiments of the present disclosure. The end 413 may include a protruding portion 4131 and a recessed portion 4132.

[0138] Specifically, the end 413 may have opposite sides S41 and S42. The protruding portion 4131 may be disposed on the side S41 of the end 413 and protrude away from the end 413. The recessed portion 4132 may be formed on the side S42 of the end 413 and recess toward the end 413.

[0139] In some embodiments, the size of the recessed portion 4132 may be greater than the size of the top of the protruding portion 4131. In some embodiments, the length L42 of an opening of the recessed portion 4132 may be greater than the length L41 of the protruding portion 4131. In some embodiments, the depth D4 of the recessed portion 4132 may be greater than the thickness of the top of the protruding portion 4131.

[0140] Please refer to Figure 4D , Figure 4D a schematic diagram of two adjacent probes 41A and 41B of the probe 41 illustrating some embodiments of the present disclosure.

[0141] Since the size of the recessed portion 4132A is greater than the size of the top of the protruding portion 4131B, when the probes 41A and 41B pass through the first chuck 43 in an arrangement, the protruding portion 4131B of the probe 41B can extend into the recessed portion 4132A of the probe 41A.

[0142] In some embodiments, since the protrusion 4131B of the probe 41B can extend into the recess 4132A of the probe 41A, the distance d4 between the end 413A and the end 413B can be less than the thickness t4 of the protrusion 4131B.

[0143] In addition, when the recess 4132A of the probe 41A accommodates the protrusion 4131B of the probe 41B, the recess 4132A of the probe 41A and the protrusion 4131B of the probe 41B are close to each other and should be separated to prevent the probes 41A and 41B from short-circuiting. In other words, the recess 4132A of the probe 41A and the protrusion 4131B of the probe 41B are non-contact.

[0144] Although the present disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions, and alternatives can be made without departing from the spirit and scope of the present disclosure as defined by the claims. For example, many of the above processes can be implemented in different ways, and many of the above processes can be replaced by other processes or combinations thereof.

[0145] Furthermore, the scope of the present invention is not limited to the specific embodiments of the processes, machines, manufactures, compositions of matter, means, methods, and steps described in the specification. Those skilled in the art can understand from the disclosure of the present disclosure that existing or future-developed processes, machines, manufactures, compositions of matter, means, methods, or steps that have the same function or achieve substantially the same result as the corresponding embodiments described herein can be used according to the present disclosure. Accordingly, such processes, machines, manufactures, compositions of matter, means, methods, or steps are included in the claims of the present invention.

Claims

1. A probe, comprising: A main body; And One end of the main body, the end having: A protruding portion disposed on a first side of the end; And A recess formed on a second side of the end, the first side being opposite to the second side; wherein the protruding portion protrudes away from the end, the recess recesses towards the end, and a dimension of the recess is greater than a dimension of a top of the protruding portion, and wherein the recess is for receiving a protruding portion of another probe.

2. The probe according to claim 1, wherein a depth of the recess is greater than a thickness of the top of the protruding portion.

3. The probe according to claim 1, wherein the depth of the recess is in a range of 5% to 30% of a width of the end.

4. The probe according to claim 1, wherein an opening length of an opening of the recess is greater than a length of the top of the protruding portion.

5. The probe according to claim 1, wherein the recess tapers from an outer side to an inner side of the end.

6. The probe according to claim 1, wherein the shape of the recess includes a trapezoid, an arc, or a rectangle.

7. The probe according to claim 1, wherein a protruding portion shape of the protruding portion corresponds to a recessed portion shape of the recess.

8. A probe, comprising: A main body; And One end of the main body, the end having: A protruding portion; And A recess having a recessed portion shape for receiving a protruding portion of another probe; Wherein when the probe and the other probe are arranged in an array and the recessed portion shape receives the protruding portion of the other probe, the recess is close to the protruding portion of the other probe.

9. The probe according to claim 8, wherein when the probe and the other probe are arranged in an array, a recessed portion position of the recess corresponds to a protruding portion position of the protruding portion of the other probe.

10. A probe card device, comprising: A first chuck; And A plurality of probes arranged through the first chuck, including: A first probe having: A first main body; And One end of the first main body, and the end having: A first recess; and [[ID=�1]]A first protruding portion; and A second probe having: A second main body; and One end of the second main body, and the end having: A second recess; and A second protruding portion extending into the first recess; Wherein the first recess is close to the second protruding portion, and a protruding portion position of the second protruding portion corresponds to a recessed portion position of the first recess.

11. The probe card device according to claim 10, wherein a distance is between the end of the first main body and the end of the second main body, and the distance is less than a thickness of the second protruding portion.

12. The probe card device according to claim 10, wherein a protruding portion shape of the second protruding portion corresponds to a recessed portion shape of the first recess.

13. The probe card device according to claim 10, wherein the first chuck has a plurality of first through holes for receiving the probes.

14. The probe card device according to claim 13, further comprising: A second chuck parallel to the first chuck and having a plurality of second through holes for receiving the probes.

15. The probe card device according to claim 14, wherein the first through hole and the second through hole accommodating the same probe are offset in a direction perpendicular to the first chuck and the second chuck.

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