Main furnace cover and single crystal furnace convenient for measuring large-diameter crystal bar in crystal pulling process

Abstract

The present application relates to a kind of main furnace cover of main furnace chamber for measuring large-diameter crystal bar in crystal pulling process, including cover body, throat, first observation window and second observation window are arranged on cover body, first observation window, second observation window and throat are arranged in the shape of triangle on furnace body, first scale and first support are arranged on first observation window, first ocular lens is arranged in sliding mode on first support and can observe the inside of single crystal furnace through first observation window, second scale and second support are arranged on second observation window, second ocular lens is arranged in sliding mode on second support and can observe the inside of single crystal furnace through second observation window, the zero mark line of first scale and the zero mark line of second scale are arranged close to each other.By first ocular lens, the side of crystal bar at molten silicon liquid level is aligned, and then the value L1 is read, second ocular lens is aligned to the other side of crystal bar at molten silicon liquid level, and then the value L2 is read, then three values are added to obtain the diameter value of crystal bar.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and in particular to a main furnace chamber cover and single crystal furnace that facilitates the measurement of large-diameter crystal rods during the crystal pulling process. Background Technology

[0002] A single crystal furnace is a device that melts polycrystalline silicon material in an inert gas environment and produces single crystal silicon using the Czochralski method. Currently, workers use eyepieces to observe the crystal growth inside the furnace. The eyepiece is installed at the observation window on the top of the furnace, with the lens facing inwards to observe the liquid level. The camera's position inside the furnace is determined by adjusting the eyepiece's height and angle in various directions. During the single crystal pulling process, at stages such as temperature control, crystal pulling, shoulder formation, shoulder rotation, and equal diameter, data such as the liquid surface temperature, the distance from the liquid surface to the guide tube, and the diameter of the single crystal silicon rod are measured to provide control parameters for the single crystal pulling process.

[0003] In the crystal pulling process, the diameter of the crystal rod must be measured regularly to ensure that the diameter of the pulled crystal rod meets the customer's specifications. If the diameter of the crystal rod is too large, it will increase the amount of polysilicon material used, resulting in waste of polysilicon material. In subsequent processing, it will also be necessary to process the crystal rod to meet the customer's target diameter. This is because the crystal rod diameter is too large, which will lead to a larger allowance for processing dimensions, resulting in a significant increase in processing time and processing volume. If the diameter of the crystal rod is too small and cannot meet the customer's requirements, it will lead to product scrapping or downgrading. Both of these situations will cause unnecessary losses to production. Normally, the diameter of a crystal rod is measured by moving an eyepiece along a scale on the observation window and reading the difference in value obtained by aligning the eyepiece with both sides of the crystal rod. However, with the increasing demand for large-diameter crystal rods, the diameter of the crystal rods is getting larger and larger. When the diameter of the crystal rod increases to a certain extent, due to the limited space of the main single crystal furnace, it is necessary to design the throat size to be larger than the diameter of the crystal rod in order to remove the crystal rod from the throat after successful drawing. This situation, where the diameter of the single crystal furnace cavity remains unchanged but the throat size is increased, inevitably requires the observation window to be designed towards the periphery of the single crystal furnace. Because the observation window is limited by the throat and the periphery of the single crystal furnace, the length of the observation window will be reduced, and the eyepiece will not be able to be aligned with both sides of the crystal rod during movement, resulting in inaccurate measurement data. This design of the observation window being close to the periphery of the single crystal furnace and the increased throat size makes the distance between the observation window and the throat almost touching, and at the same time, the two ends of the observation window are close to the edge of the single crystal furnace. This leads to a decrease in the support strength at the places where the single crystal furnace and the observation window are close to each other and at the edge of the single crystal furnace, which poses a hidden danger to production safety. Summary of the Invention

[0004] The main objective of this invention is to provide a furnace cover for the main furnace chamber that facilitates the measurement of large-diameter crystal rods during the crystal pulling process. This addresses the problem that, in the existing single crystal furnace, the increased throat size leads to a decrease in the support strength of the single crystal furnace while maintaining the same furnace diameter, and also results in inaccurate measurement of the crystal rod diameter. Consequently, it fails to meet the requirement of producing large-diameter crystal rods while keeping the furnace diameter constant.

[0005] A furnace cover for a main furnace chamber, designed for easy measurement of large-diameter crystal rods during crystal pulling, includes a cover body. The cover body has a throat, a first observation window, and a second observation window. The first and second observation windows are located on one side of the throat and are arranged in a triangular pattern on the furnace body, with the first and second observation windows symmetrically positioned. A first scale is mounted on the first observation window, along with a first support. A first eyepiece is mounted on the first support and is slidably mounted on the first support, allowing observation of the interior of the single crystal furnace through the first observation window. A first pointer pointing to the first scale is mounted on the first support. A second scale is mounted on the second observation window, along with a second support. A second eyepiece is mounted on the second support and is slidably mounted on the second support, allowing observation of the interior of the single crystal furnace through the second observation window. A second pointer pointing to the second scale is mounted on the second support. The zero lines of the first and second scales are positioned close to each other, with a distance L0 between them.

[0006] Preferably, the first support includes a first base, a first slide rail, and a first slider. The first base is mounted on the front sidewall of the first observation window. The first slide rail is disposed on the front sidewall of the first base. A first slider and a second slider are disposed on the rear sidewall of the first slider. The first slider is fastened to the upper edge of the first slide rail, and the second slider is clamped to the lower edge of the first slide rail. A first pointer is disposed on the rear sidewall of the first slider, and the first pointer is located above the first slider. The front end of the first pointer is close to the scale of the first scale. A first extension arm is disposed on the first slider, and the first extension arm is located above the upper surface of the first observation window. The first eyepiece and the first extension arm are rotatably connected.

[0007] Preferably, the second support includes a second base, a second slide rail, and a second sliding member. The second base is mounted on the front side wall of the second observation window, the second slide rail is disposed on the front side wall of the second base, and a third slider and a fourth slider are disposed on the rear side wall of the second sliding member. The third slider is fastened to the upper edge of the second slide rail, and the fourth slider is clamped to the lower edge of the second slide rail. A second pointer is disposed on the rear side wall of the second sliding member, and the second pointer is located above the third slider. The front end of the second pointer is close to the scale of the second scale. A second extension arm is disposed on the second sliding member, and the second extension arm is located above the upper surface of the second observation window. The second eyepiece and the second extension arm are rotatably connected.

[0008] Preferably, a third observation window is also provided on the cover. The third observation window, the first observation window, and the second observation window are located on the same side of the throat. The third observation window is located between the first and second observation windows. The third observation window and the throat are directly opposite each other. The first, second, and third observation windows are arranged in a triangular pattern on the cover. The distance between the first and second observation windows is less than the diameter of the throat.

[0009] Preferably, the first observation window and the second observation window are arranged in an axially symmetrical manner, and the axis of symmetry is the line connecting the midpoint of the third observation window and the midpoint of the throat.

[0010] Preferably, the line connecting the rear sidewalls of the first and second observation windows intersects the edge of the throat.

[0011] Preferably, the first scale is disposed on the upper surface of the first observation window, and the first scale is located at the edge of the first observation window near the front side wall.

[0012] Preferably, the second scale is disposed on the upper surface of the second observation window, and the second scale is located at the edge of the second observation window near the front side wall.

[0013] Preferably, the first eyepiece is provided with a first support, which is located at the lower end of the first eyepiece, and the first support and the first extension arm are connected by a pivot; the second eyepiece is provided with a second support, which is located at the lower end of the second eyepiece, and the second support and the second extension arm are connected by a pivot.

[0014] The present invention also provides a single crystal furnace, which includes a main furnace chamber cover that facilitates the measurement of large-diameter crystal rods during the crystal pulling process, as described above.

[0015] As can be seen from the above technical solution, with the increasing production demand for crystal rod diameter, the first and second observation windows are arranged side by side and spaced apart on the cover. This satisfies the requirement that, without increasing the furnace diameter of the single crystal furnace, the first eyepiece is slid across the first observation window to align with one side of the crystal rod at the molten silicon surface to read the value L1, and the second eyepiece is slid across the second observation window to align with the other side of the crystal rod at the molten silicon surface to read the value L2. Then, by adding the values ​​L0, L1, and L2, the diameter of the crystal rod can be obtained. At the same time, the first and second observation windows are reserved with respect to the throat to ensure that the supporting strength of the cover meets the requirements of single crystal production. Attached Figure Description

[0016] Figure 1 This is a perspective view of the present invention.

[0017] Figure 2 This is a top view of the present invention.

[0018] Figure 3 yes Figure 1 A magnified view of the first observation window.

[0019] Figure 4 yes Figure 1 A magnified view of the second observation window.

[0020] Figure 5 This is a stereoscopic view of the first eyepiece and the first support after assembly.

[0021] Figure 6 This is a stereoscopic view of the second eyepiece and the second support after assembly.

[0022] In the diagram: cover 10, throat 20, first observation window 30, first scale 31, first bracket 32, first pointer 321, first base 322, first slide rail 323, first slider 324, first slider 3241, second slider 3242, first extension arm 3243, first eyepiece 33, first support 331, second observation window 40, second scale 41, second bracket 42, second pointer 421, second base 422, second slide rail 423, second slider 424, third slider 4241, fourth slider 4242, second extension arm 4243, second eyepiece 43, second support 431, third observation window 50. Detailed Implementation

[0023] The technical solutions and effects of the embodiments of the invention will be further described in detail below with reference to the accompanying drawings.

[0024] Please see Figures 1 to 6The main furnace chamber cover for facilitating the measurement of large-diameter crystal rods during crystal pulling includes a cover body 10. The cover body 10 has a throat 20, a first observation window 30, and a second observation window 40. The first and second observation windows 30 and 40 are located on one side of the throat 20. The first observation window 30, second observation window 40, and throat 20 are arranged in a triangular pattern on the furnace body, with the first and second observation windows 30 symmetrically positioned. A first scale 31 and a first support 32 are provided on the first observation window 30. A first eyepiece 33 is mounted on the first support 32 and is slidably mounted on the first support 32, allowing observation of the single crystal furnace interior through the first observation window 30. The first support 32 is equipped with a first pointer 321 pointing to the first scale 31; the second observation window 40 is equipped with a second scale 41, the second observation window 40 is equipped with a second support 42, the second support 42 is equipped with a second eyepiece 43, the second eyepiece 43 is slidably mounted on the second support 42 and can observe the inside of the single crystal furnace through the second observation window 40, the second support 42 is equipped with a second pointer 421 pointing to the second scale 41, the zero mark of the first scale 31 and the zero mark of the second scale 41 are set close to each other, and the distance between the zero mark of the first scale 31 and the zero mark of the second scale 41 is L0. During the crystal pulling process, the first eyepiece 33 is slid across the first observation window 30 and aligned with one side of the crystal pulling rod to read the value L1. Then, the second eyepiece 43 is slid across the second observation window 40 and aligned with the other side of the crystal pulling rod to read the value L2. The diameter of the crystal pulling rod is obtained by adding the values ​​L0, L1 and L2. At the same time, a gap is reserved between the first observation window 30, the second observation window 40 and the throat 20 to ensure that the support strength of the cover 10 meets the requirements of single crystal production.

[0025] Furthermore, the first support 32 includes a first base 322, a first slide rail 323, and a first slider 324. The first base 322 is mounted on the front side wall of the first observation window 30. The first slide rail 323 is disposed on the front side wall of the first base 322. A first slider 3241 and a second slider 3242 are disposed on the rear side wall of the first slider 324. The first slider 3241 is fastened to the upper edge of the first slide rail 323, and the second slider 3242 is clamped on the lower edge of the first slide rail 323. A first pointer 321 is disposed on the rear side wall of the first slider 324. The first pointer 321 is located above the first slider 3241, and the front end of the first pointer 321 is close to the scale of the first scale 31. A first extension arm 3243 is disposed on the first slider 324. The first extension arm 3243 is located above the upper surface of the first observation window 30. The first eyepiece 33 and the first extension arm 3243 are rotatably connected.

[0026] Furthermore, the second support 42 includes a second base 422, a second slide rail 423, and a second slider 424. The second base 422 is mounted on the front side wall of the second observation window 40. The second slide rail 423 is disposed on the front side wall of the second base 422. A third slider 4241 and a fourth slider 4242 are disposed on the rear side wall of the second slider 424. The third slider 4241 is fastened to the upper edge of the second slide rail 423, and the fourth slider 4242 is clamped on the lower edge of the second slide rail 423. A second pointer 421 is disposed on the rear side wall of the second slider 424. The second pointer 421 is located above the third slider 4241, and the front end of the second pointer 421 is close to the scale of the second scale 41. A second extension arm 4243 is disposed on the second slider 424. The second extension arm 4243 is located above the upper surface of the second observation window 40. The second eyepiece 43 and the second extension arm 4243 are rotatably connected.

[0027] Furthermore, a third observation window 50 is also provided on the cover 10. The third observation window 50, the first observation window 30, and the second observation window 40 are located on the same side of the throat 20. The third observation window 50 is located between the first observation window 30 and the second observation window 40, and the third observation window 50 is directly opposite the throat 20. The first observation window 30, the second observation window 40, and the third observation window 50 are arranged in a triangular pattern on the cover 10. The distance L between the first observation window 30 and the second observation window 40 is less than the diameter R of the throat 20. The third observation window 50 allows for observation of more positions inside the single crystal furnace, such as the area near the throat 20 and the position directly below the third observation window 50.

[0028] Furthermore, the first observation window 30 and the second observation window 40 are set in an axially symmetrical manner, and the axis of symmetry is the line connecting the midpoint of the third observation window 50 and the midpoint of the throat 20.

[0029] Furthermore, the line connecting the rear sidewalls of the first observation window 30 and the second observation window 40 intersects the edge of the throat 20.

[0030] Furthermore, the first scale 31 is disposed on the upper surface of the first observation window 30, and the first scale 31 is located at the edge of the first observation window 30 near the front side wall.

[0031] Furthermore, the second scale 41 is disposed on the upper surface of the second observation window 40, and the second scale 41 is located at the edge of the second observation window 40 near the front side wall.

[0032] Furthermore, the first eyepiece 33 is provided with a first support 331, which is located at the lower end of the first eyepiece 33. The first support 331 and the first extension arm 3243 are connected by a pivot. The second eyepiece 43 is provided with a second support 431, which is located at the lower end of the second eyepiece 43. The second support 431 and the second extension arm 4243 are connected by a pivot. The above-mentioned rotating connection structure facilitates the maintenance of the first eyepiece 33 and the second eyepiece 43.

[0033] The present invention also provides a single crystal furnace, which includes a main furnace chamber cover that facilitates the measurement of large-diameter crystal rods during the crystal pulling process, as described above.

[0034] In use, during the crystal pulling process, the user slides the first eyepiece 33 on the first observation window 30 to align with one side of the crystal pulling rod, and reads the value L1 by pointing the first pointer 321 to the corresponding scale of the first scale 31. Then, the user slides the second eyepiece 43 on the second observation window 40 to align with the other side of the crystal pulling rod, and reads the value L2 by pointing the second pointer 421 to the corresponding scale of the second scale 41. The diameter of the crystal rod is obtained by adding the values ​​L0, L1 and L2.

Claims

1. A furnace cover for the main furnace chamber, which facilitates the measurement of large-diameter crystal rods during crystal pulling, characterized in that: The furnace includes a cover, on which a throat, a first observation window, and a second observation window are provided. The first and second observation windows are located on one side of the throat. The first, second, and throat are arranged in a triangular pattern on the furnace body. The first and second observation windows are symmetrically arranged, and the distance between the first and second observation windows is less than the diameter of the throat. A first scale is provided on the first observation window, and a first bracket is provided on the first observation window. A first eyepiece is mounted on the first bracket. The first eyepiece is slidably mounted on the first bracket and can observe the interior of the single crystal furnace through the first observation window. A first pointer pointing to the first scale is provided on the first bracket. A second scale is set on the second observation window, a second bracket is set on the second observation window, and a second eyepiece is installed on the second bracket. The second eyepiece is slidably set on the second bracket and can observe the inside of the single crystal furnace through the second observation window. A second pointer is set on the second bracket to point to the second scale. The zero line of the first scale and the zero line of the second scale are set close to each other, and the distance between the zero line of the first scale and the zero line of the second scale is L0.

2. The furnace cover of the main furnace chamber for facilitating the measurement of large-diameter crystal rods during the crystal pulling process as described in claim 1, characterized in that: The first support includes a first base, a first slide rail, and a first slider. The first base is mounted on the front side wall of the first observation window. The first slide rail is disposed on the front side wall of the first base. A first slider and a second slider are disposed on the rear side wall of the first slider. The first slider is fastened to the upper edge of the first slide rail, and the second slider is clamped on the lower edge of the first slide rail. A first pointer is disposed on the rear side wall of the first slider, and the first pointer is located above the first slider. The front end of the first pointer is close to the scale of the first scale. A first extension arm is disposed on the first slider, and the first extension arm is located above the upper surface of the first observation window. The first eyepiece and the first extension arm are rotatably connected.

3. The furnace cover of the main furnace chamber for facilitating the measurement of large-diameter crystal rods during the crystal pulling process as described in claim 2, characterized in that: The second support includes a second base, a second slide rail, and a second sliding member. The second base is mounted on the front side wall of the second observation window. The second slide rail is located on the front side wall of the second base. A third slider and a fourth slider are located on the rear side wall of the second sliding member. The third slider is fastened to the upper edge of the second slide rail, and the fourth slider is clamped to the lower edge of the second slide rail. A second pointer is located on the rear side wall of the second sliding member, above the third slider, with the front end of the second pointer close to the scale of the second scale. A second extension arm is located on the second sliding member, above the upper surface of the second observation window. The second eyepiece and the second extension arm are rotatably connected.

4. The furnace cover of the main furnace chamber for facilitating the measurement of large-diameter crystal rods during the crystal pulling process as described in claim 1, characterized in that: A third observation window is also provided on the cover. The third observation window, the first observation window, and the second observation window are located on the same side of the throat. The third observation window is located between the first and second observation windows. The third observation window and the throat are directly opposite each other. The first, second, and third observation windows are arranged in a triangular pattern on the cover.

5. The furnace cover of the main furnace chamber for facilitating the measurement of large-diameter crystal rods during the crystal pulling process as described in claim 1, characterized in that: The first and second observation windows are set in an axially symmetrical manner, and the aforementioned axis of symmetry is the line connecting the midpoint of the third observation window and the midpoint of the throat.

6. The furnace cover of the main furnace chamber for facilitating the measurement of large-diameter crystal rods during the crystal pulling process as described in claim 5, characterized in that: The line connecting the rear sidewalls of the first and second observation windows intersects with the edge of the throat.

7. The furnace cover of the main furnace chamber for facilitating the measurement of large-diameter crystal rods during the crystal pulling process as described in claim 2, characterized in that: The first scale is set on the upper surface of the first observation window, and the first scale is located at the edge of the first observation window near the front side wall.

8. The furnace cover of the main furnace chamber for facilitating the measurement of large-diameter crystal rods during the crystal pulling process as described in claim 3, characterized in that: The second scale is set on the upper surface of the second observation window, and the second scale is located at the edge of the second observation window near the front side wall.

9. The main furnace chamber cover for facilitating the measurement of large-diameter crystal rods during the crystal pulling process as described in claim 3, characterized in that: The first eyepiece is provided with a first support, which is located at the lower end of the first eyepiece. The first support and the first extension arm are connected by a pivot. The second eyepiece is provided with a second support, which is located at the lower end of the second eyepiece. The second support and the second extension arm are connected by a pivot.

10. A single crystal furnace, characterized in that: The single crystal furnace includes a main furnace chamber cover as described in any one of claims 1 to 9, which facilitates the measurement of large-diameter crystal rods during the crystal pulling process.

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