Ion stripping membrane replacement mechanism

Abstract

The present disclosure provides a membrane replacement mechanism for an ion stripping membrane, comprising: a lifting transmission assembly, comprising at least a vacuum membrane replacement chamber, a vacuum membrane storage chamber, and a lifting transmission power assembly; the vacuum membrane storage chamber is disposed below the vacuum membrane replacement chamber; the lifting transmission power assembly is disposed below the vacuum membrane storage chamber, connected to a membrane support plate for storing a carbon membrane disposed within the vacuum membrane storage chamber, and used to transfer the carbon membrane between the vacuum membrane replacement chamber and the vacuum membrane storage chamber; a telescopic transmission assembly, comprising at least a guide vacuum chamber, a telescopic transmission power assembly, and a rear guide vacuum chamber; the guide vacuum chamber is vertically connected to the vacuum membrane replacement chamber; the telescopic transmission power assembly is disposed between the guide vacuum chamber and the rear guide vacuum chamber, and used to transfer the carbon membrane between the rear guide vacuum chamber, the guide vacuum chamber, and the vacuum membrane replacement chamber. This membrane replacement mechanism shortens the mechanism length, saves structural space and saves motor motion system space, and can protect the carbon membrane from damage.

Description

Technical Field

[0001] The present disclosure relates to the technical field of medical devices, and in particular to a membrane replacement mechanism for an ion stripping membrane. Background Art

[0002] In the carbon ion therapy system, when ions are injected into the synchrotron from the medium energy transfer system, the stripping injection method is used to make the injected beam ( 12 C 5+ ) bombarding carbon film (15ug / cm 2 ), the beam is stripped of its outer electrons, and we get 12 C 6+ ion.

[0003] In practice, the film stripping device delivers a carbon film into the synchrotron accelerator's vacuum chamber to strip electrons from the beam. If the carbon film becomes damaged, the film stripping and replacement mechanism retrieves it from the synchrotron vacuum chamber, replaces it with the carbon film stored within the device, and delivers the new carbon film to the synchrotron vacuum chamber.

[0004] There are at least three problems with the existing stripping film changing mechanism: First, the existing stripping film changing mechanism uses a motor, a ball screw, and a bellows to realize the telescopic movement of the carbon film, and the overall size and length direction occupy a large space; Second, the circular film storage disk of the existing stripping film changing mechanism can store 12 pieces of carbon film at a time, which is too many carbon films to store. In fact, only about 3 pieces are needed, and the film disk moves in a rotating and lifting manner during film changing, which makes the film changing process complicated; Third, the vacuum chamber where the carbon film is stored in the existing stripping film changing mechanism is connected to the synchronous ring vacuum chamber. If the synchrotron vacuum is broken, all stored carbon films will be destroyed. Summary of the Invention

[0005] In view of the above problems, the present invention provides a membrane replacement mechanism for an ion stripping membrane to solve the above technical problems.

[0006] One aspect of the present disclosure provides a membrane changing mechanism for an ion stripping membrane, comprising: a lifting transmission assembly, comprising at least a vacuum membrane changing chamber, a vacuum membrane storage chamber, and a lifting transmission power assembly; the vacuum membrane storage chamber is arranged below the vacuum membrane changing chamber; the lifting transmission power assembly is arranged below the vacuum membrane storage chamber, connected to a membrane support plate for storing a carbon membrane arranged in the vacuum membrane storage chamber, and is used for, when changing the membrane, sending the new carbon membrane on the membrane support plate into the vacuum membrane changing chamber, and when the membrane changing is completed, retracting the membrane support plate into the vacuum membrane storage chamber; a telescopic transmission assembly, comprising at least a guide vacuum chamber, a telescopic transmission power assembly and a rear end guide vacuum chamber; the guide vacuum chamber is vertically connected to the vacuum membrane changing chamber; the telescopic transmission power assembly is arranged between the guide vacuum chamber and the rear end guide vacuum chamber, and is used for, when changing the membrane, sending the old carbon film along the rear end guide vacuum chamber and the guide vacuum chamber to the vacuum membrane changing chamber, placing the old carbon film on the membrane support plate, and removing the new carbon film from the membrane support plate and sending it back along the original route.

[0007] According to an embodiment of the present disclosure, the lifting transmission assembly also includes: a plug-in valve, which is arranged between the vacuum film changing chamber and the vacuum film storage chamber, and is used to connect the vacuum film changing chamber and the vacuum film storage chamber when the film is changed, and to separate the vacuum film changing chamber and the vacuum film storage chamber when the film change is completed.

[0008] According to an embodiment of the present disclosure, the film support plate includes three mold frames, and the mold frames are used to place the carbon film.

[0009] According to an embodiment of the present disclosure, the lifting transmission power assembly includes: a first servo motor, a first planetary gear reducer, a first coupling, a first magnetic fluid sealing device, a second coupling, a first transmission shaft, a first gear and a first circular rack, which are connected in sequence; wherein, the first circular rack rotates in coordination with the first gear, is sleeved in a first self-lubricating sleeve sleeved on the top of the vacuum film storage chamber, and is connected to the film support plate in the vacuum film changing chamber.

[0010] According to an embodiment of the present disclosure, the lifting transmission power assembly also includes: a lifting transmission vacuum chamber, which is arranged below the vacuum film storage chamber, is sealed and connected to the vacuum film storage chamber, and a first vacuum wall-penetrating part is provided on the side wall; the first gear is arranged in the lifting transmission vacuum chamber, the first circular rack sleeve passes through the lifting transmission vacuum chamber, and is sleeved in the second self-lubricating sleeve on the top of the lifting transmission vacuum chamber, and the first transmission shaft extends into the lifting transmission vacuum chamber from the outside to drive the first gear to rotate.

[0011] According to an embodiment of the present disclosure, the lifting transmission assembly also includes: a first rear end sealed vacuum chamber, connected to the bottom of the lifting transmission vacuum chamber; the part of the first circular rack extending out of the lifting transmission vacuum chamber is located in the first rear end sealed vacuum chamber.

[0012] According to an embodiment of the present disclosure, the telescopic transmission power assembly includes: a second servo motor, a second planetary gear reducer, a third coupling, a second magnetic fluid sealing device, a third coupling, a second transmission shaft, a second gear and a second circular rack, which are connected in sequence; the second circular rack rotates in coordination with the second gear, and one end is sleeved in the third self-lubricating sleeve and is connected to a sampling block. The sampling block is used to perform the operations of placing the old carbon film and clamping the new carbon film on the film support plate when the second circular rack transmits the sampling block to the vacuum film exchange chamber.

[0013] According to an embodiment of the present disclosure, the telescopic transmission power assembly also includes: a telescopic transmission vacuum chamber, which is arranged between the guide vacuum chamber and the rear end guide vacuum chamber, is sealed with the guide vacuum chamber and the rear end guide vacuum chamber, and is provided with a second vacuum wall-penetrating part on the side wall; the second gear is arranged in the telescopic transmission vacuum chamber, the third self-lubricating sleeve is arranged at the end of the telescopic transmission vacuum chamber, the second circular rack sleeve passes through the telescopic transmission vacuum chamber, and the second transmission shaft extends into the telescopic transmission vacuum chamber from the outside to drive the second gear to rotate.

[0014] According to an embodiment of the present disclosure, the telescopic transmission assembly also includes: a second rear end sealed vacuum chamber, connected to the rear of the rear end guide vacuum chamber; the part of the second circular rack extending out of the telescopic transmission vacuum chamber is located in the second rear end sealed vacuum chamber.

[0015] According to an embodiment of the present disclosure, a molecular pump is provided in the vacuum film storage chamber to maintain a vacuum environment in the vacuum film storage chamber.

[0016] At least one of the above technical solutions adopted in the embodiments of the present disclosure can achieve the following beneficial effects:

[0017] According to the membrane replacement mechanism of the ion stripping membrane provided in the embodiment of the present disclosure, the length of the mechanism is relatively short, which can effectively save the space occupied by the mechanism; the structure of the membrane replacement mechanism has been simplified, and two sets of motor motion systems are eliminated compared with the existing membrane replacement mechanism; the membrane replacement mechanism isolates the stored carbon film into the vacuum film storage chamber to ensure that the stored carbon film is not affected when the vacuum environment of the synchronous ring vacuum chamber is destroyed. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] For a more complete understanding of the present disclosure and its advantages, reference will now be made to the following description taken in conjunction with the accompanying drawings, in which:

[0019] Figure 1 The structure diagram of a membrane replacement mechanism of an ion stripping membrane provided by an embodiment of the present disclosure is schematically shown;

[0020] Figure 2The following schematically shows a structural diagram of a lifting transmission assembly provided by an embodiment of the present disclosure;

[0021] Figure 3 The structure diagram of a vacuum film storage chamber provided by an embodiment of the present disclosure is schematically shown;

[0022] Figure 4 The following schematically shows a structural diagram of a lifting transmission power assembly provided by an embodiment of the present disclosure;

[0023] Figure 5 The following schematically shows a structural diagram of a telescopic transmission assembly 2 provided in an embodiment of the present disclosure;

[0024] Figure 6 The following schematically shows a structural diagram of a telescopic transmission power assembly provided by an embodiment of the present disclosure;

[0025] Figures 7A to 7I The membrane replacement process of a membrane replacement mechanism of an ion stripping membrane provided by an embodiment of the present disclosure is schematically shown.

[0026] Reference numerals:

[0027] 1-lifting transmission assembly; 2-telescopic transmission assembly; 3-bracket; 4-vacuum membrane changing chamber; 5-gate valve; 6-vacuum mold storage chamber; 7-lifting transmission power assembly; 8-first rear end sealing vacuum chamber; 9-first electrode bracket; 10-first self-lubricating sleeve; 11-vacuum mold storage chamber wall; 12-first servo motor; 13-first planetary gear reducer; 14-first coupling; 15-first magnetic fluid sealing device; 16-second coupling; 17-first gear; 18-first circular rack; 19-first transmission shaft; 20-second self-lubricating sleeve; 21-membrane support plate; 22-mold Frame; 23-first safety protection switch; 24-first vacuum wall penetration member; 25-guide vacuum chamber; 26-telescopic transmission power assembly; 27-rear-end guide vacuum chamber; 28-second rear-end sealed vacuum chamber; 29-second servo motor; 30-second planetary gear reducer; 31-third coupling; 32-second magnetic fluid sealing device; 33-fourth coupling; 34-second transmission shaft; 35-second gear; 36-sampling block; 37-third self-lubricating sleeve; 38-telescopic transmission vacuum chamber; 39-second circular rack; 40-second vacuum wall penetration member; 41-second motor bracket; DETAILED DESCRIPTION

[0028] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and are not intended to limit the scope of the present disclosure. In the detailed description below, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of well-known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0029] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise," "include," etc. used herein indicate the presence of the features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0030] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0031] Figure 1 The structural diagram of the membrane replacement mechanism of an ion stripping membrane provided by an embodiment of the present disclosure is schematically shown.

[0032] like Figure 1 As shown, the membrane changing mechanism of the ion stripping membrane provided by the embodiment of the present disclosure includes a lifting transmission assembly 1 and a telescopic transmission assembly 2. The lifting transmission assembly 1 is used to transmit the carbon film in the vertical direction. The lifting transmission assembly 1 at least includes a vacuum membrane changing chamber 4, a vacuum film storage chamber 6, and a lifting transmission power assembly 7; the vacuum film storage chamber 6 is arranged below the vacuum membrane changing chamber 4; the lifting transmission power assembly 7 is arranged below the vacuum film storage chamber 6, and is connected to the membrane support plate 21 for storing the carbon film arranged in the vacuum film storage chamber 6, and is used to send the new carbon film on the membrane support plate 21 into the vacuum membrane changing chamber 4 when changing the membrane, and retract the membrane support plate 21 into the vacuum film storage chamber 6 after the membrane change is completed. The telescopic transmission assembly 2 is used to transmit the carbon film in the horizontal direction. The telescopic transmission assembly 2 at least includes a guide vacuum chamber 25, a telescopic transmission power assembly 26 and a rear-end guide vacuum chamber 27; the guide vacuum chamber 25 is vertically connected to the vacuum film-changing chamber 4; the telescopic transmission power assembly 26 is arranged between the guide vacuum chamber 25 and the rear-end guide vacuum chamber 27, and is used to transmit the old carbon film along the rear-end guide vacuum chamber 27 and the guide vacuum chamber 25 to the vacuum film-changing chamber 4 when changing the film, place the old carbon film on the film-supporting plate, and remove the new carbon film from the film-supporting plate and send it back along the original route.

[0033] In this embodiment, the lifting transmission assembly 1 and the telescopic transmission assembly 2 are arranged on a bracket.

[0034] Figure 2 The structural diagram of a lifting transmission assembly 1 provided by an embodiment of the present disclosure is schematically shown.

[0035] like Figure 2 As shown, the lifting and conveying assembly may include a vacuum film-changing chamber 4, a gate valve 5, a vacuum film storage chamber 6, and a lifting and conveying power assembly 7. The gate valve 5 is disposed between the vacuum film-changing chamber 4 and the vacuum film storage chamber 6. It connects the vacuum film-changing chamber 4 and the vacuum film storage chamber 6 during film changing and isolates the vacuum film-changing chamber 4 and the vacuum film storage chamber 6 after film changing is complete. The gate valve 5 separates the vacuum film storage chamber 6 from the vacuum film-changing chamber 4, ensuring that the stored carbon film is not affected if the vacuum environment of the synchronizer ring vacuum chamber is disrupted.

[0036] In this embodiment, a molecular pump is provided in the vacuum film storage chamber 6 to maintain the vacuum environment in the vacuum film storage chamber 6.

[0037] Figure 3 The structural diagram of a vacuum film storage chamber 6 provided in an embodiment of the present disclosure is schematically shown.

[0038] like Figure 3 As shown, in the embodiment of the present disclosure, a first self-lubricating sleeve 10 is provided on the vacuum film storage chamber 6 for positioning and guiding the first circular rack 18 .

[0039] Figure 4 The structural diagram of a lifting transmission power assembly provided by an embodiment of the present disclosure is schematically shown.

[0040] like Figure 4 As shown, a lifting transmission power assembly 7 provided by an embodiment of the present disclosure includes a first servo motor 12, a first planetary gear reducer 13, a first coupling 14, a first magnetic fluid sealing device 15, a second coupling 16, a first transmission shaft 19, a first gear 17 and a first circular rack 18, which are connected in sequence; wherein, the first circular rack 18 rotates in conjunction with the first gear 17, is sleeved in a first self-lubricating sleeve 10 provided at the top of the vacuum film storage chamber 6, and is connected to the film support plate 21. wherein, the first servo motor 12 drives the first gear 17 to rotate, thereby realizing the up and down movement of the first circular rack 18. The film support plate 21 is fixed to the upper end of the first circular rack 18, thereby realizing the lifting movement of the carbon film. The lifting transmission power assembly can also be supported by the first motor bracket 9.

[0041] In this embodiment, three mold frames 22 can be mounted on the film support plate 21. Each mold frame 22 holds a carbon film sheet, with one sheet in use and two stored. This design, while meeting the carbon film requirements, significantly simplifies the film replacement mechanism, eliminating two motor motion systems compared to existing mechanisms.

[0042] In this embodiment, the lifting transmission power assembly 7 further includes: a lifting transmission vacuum chamber, located below the vacuum film storage chamber 6 and sealed therewith, with a first vacuum wall penetration member 24 provided on its sidewall; a first gear 17 disposed within the lifting transmission vacuum chamber; a first circular rack 18 extending through the lifting transmission vacuum chamber and mounted on a second self-lubricating sleeve 20 at the top of the lifting transmission vacuum chamber; and a first transmission shaft 19 extending from the outside into the lifting transmission vacuum chamber to drive the rotation of the first gear 17. A first rear sealed vacuum chamber 8 is also provided below the lifting transmission vacuum chamber, with the portion of the first circular rack 18 extending from the lifting transmission vacuum chamber located within the first rear sealed vacuum chamber 8.

[0043] In this embodiment, the connections between the chambers are sealed and docked via vacuum flanges to ensure that the storage and transmission of the carbon film are both in a vacuum state.

[0044] Optionally, a first safety protection switch 23 may be provided above the lifting transmission vacuum chamber to limit the first circular rack 18 .

[0045] According to the disclosed embodiment, when the carbon film is in storage, a gate valve 5 separates the vacuum film exchange chamber 4 from the vacuum film storage chamber 6. When replacing the carbon film, the gate valve 5 opens, connecting the vacuum film exchange chamber 4 and the vacuum film storage chamber 6. The membrane support plate 21 rises from the vacuum film storage chamber 6 to the vacuum film exchange chamber 4 to perform the film replacement. After the film replacement is complete, the membrane support plate 21 descends back into the vacuum film storage chamber 6, and the gate valve 5 closes, separating the upper and lower vacuum chambers. A separate molecular pump is installed in the vacuum chamber below the gate valve 5 to maintain a vacuum environment in the vacuum chamber below the gate valve 5.

[0046] Figure 5 The structural diagram of a telescopic transmission assembly 2 provided by an embodiment of the present disclosure is schematically shown.

[0047] like Figure 5 As shown, in the embodiment of the present disclosure, the telescopic transmission assembly may include a guide vacuum chamber 25, a telescopic transmission power assembly 26, a rear guide vacuum chamber 27, and a second rear sealed vacuum chamber 28, which are sequentially connected. Each component is sealed and connected via a vacuum flange.

[0048] In this embodiment, the telescopic transmission assembly 2 mainly functions to deliver the carbon film to the synchrotron vacuum chamber. When the carbon film needs to be replaced, the telescopic transmission assembly 2 retracts the carbon film into the vacuum film changing chamber 4 and cooperates with the lifting transmission assembly 1 to complete the film changing process. After the film changing is completed and the spare film returns to the vacuum film storage chamber 6, the telescopic transmission assembly 2 delivers the new carbon film to the synchronous ring vacuum chamber.

[0049] Figure 6 The structural diagram of a telescopic transmission power assembly 26 provided in an embodiment of the present disclosure is schematically shown.

[0050] like Figure 6 As shown, in the embodiment of the present disclosure, the telescopic transmission power assembly 26 may include: a second servo motor 29, a second planetary gear reducer 30, a third coupling 31, a second magnetic fluid sealing device 32, a fourth coupling 33, a second transmission shaft 34, a second gear 35, a second circular rack 39 and a third self-lubricating sleeve 37, which are connected in sequence; the second circular rack 39 rotates in coordination with the second gear 35, one end of which is sleeved in the self-lubricating sleeve and is connected to a sampling block 36. The sampling block 36 is used to perform the operations of placing the old carbon film and clamping the new carbon film on the film support plate 21 when the second circular rack 39 transmits the sampling block 36 to the vacuum film exchange chamber.

[0051] The telescopic transmission power assembly 26 may also include: a telescopic transmission vacuum chamber 38, which is located between the guide vacuum chamber 25 and the rear guide vacuum chamber 27, is sealed and connected to the guide vacuum chamber 25 and the rear guide vacuum chamber 27, and has a second vacuum wall penetration member 40 on the side wall; a second gear 35 is located in the telescopic transmission vacuum chamber 38, a third self-lubricating sleeve 37 is located at the end of the telescopic transmission vacuum chamber 38, a second circular rack 39 is sleeved through the telescopic transmission vacuum chamber 38, and a second transmission shaft 34 extends from the outside into the telescopic transmission vacuum chamber 38 to drive the second gear 35 to rotate; the portion of the second circular rack 39 that extends out of the telescopic transmission vacuum chamber 38 is located in the second rear sealed vacuum chamber 28. The second servo motor 29 drives the second gear 35 to rotate, realizing the telescopic movement of the second circular rack 39. The sampling block 36 is fixed to the upper end of the second circular rack 39 to realize the telescopic movement of the carbon film.

[0052] Optionally, a second motor bracket 41 is provided below the telescopic transmission vacuum chamber 38 .

[0053] Optionally, a second safety protection switch is provided at the end of the telescopic transmission vacuum chamber 38 to limit the second circular rack 39 .

[0054] In this embodiment, the entire film replacement process can be briefly described as follows: the sampling block 36 places the existing mold frame 22 on the empty space of the film support plate 21 and clamps a new mold frame 22 from the film support plate 21 .

[0055] Figures 7A to 7I The membrane replacement process of a membrane replacement mechanism of an ion stripping membrane provided by an embodiment of the present disclosure is schematically shown.

[0056] When the carbon film needs to be replaced, the first step is as shown, the sampling block 36 is withdrawn from the synchronous ring vacuum chamber, and the gate valve 5 is opened; the second step is as shown, the film support plate 21 rises to position 4; the third step is as shown, the sampling block 36 moves forward to the film placement position; the fourth step is as shown Figure 7D As shown, the membrane support plate 21 rises to position 3, and the mold frame 22 is clamped into the membrane support plate 21; the fifth step, as shown Figure 7EAs shown, the sampling block 36 is retracted and the mold frame 22 is separated from the sampling block 36; Step 6, as shown Figure 7F As shown, the membrane support plate 21 rises to position 1; Step 7, as shown Figure 7G As shown, the sampling block 36 advances and clamps the new mold frame 22; Step 8, as shown Figure 7H As shown, the film support plate 21 is lowered to position 2, and the mold frame 22 is separated from the film support plate 21; Step 9, as shown Figure 7I As shown, the sampling block 36 is retracted to complete the membrane replacement, after which the membrane support plate descends to position 6, the gate valve 5 is closed, and the sampling block 36 delivers the new mold frame 22 into the synchrotron vacuum chamber.

[0057] The membrane replacement mechanism for the ion stripping membrane provided in this disclosure utilizes a rack and pinion system to achieve expansion and contraction of the carbon membrane, eliminating the conventional ball screw and bellows structure. The entire mechanism is 2550mm long, 1000mm shorter than existing membrane stripping and replacement mechanisms, effectively saving space.

[0058] Those skilled in the art will appreciate that the features described in the various embodiments and / or claims of this disclosure may be combined and / or coupled in various ways, even if such combinations and / or couplings are not explicitly described in this disclosure. In particular, the features described in the various embodiments and / or claims of this disclosure may be combined and / or coupled in various ways without departing from the spirit and teachings of this disclosure. All such combinations and / or couplings are intended to fall within the scope of this disclosure.

[0059] Although the present disclosure has been shown and described with reference to certain exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made to the present disclosure without departing from the spirit and scope of the present disclosure as defined by the appended claims and their equivalents. Therefore, the scope of the present disclosure should not be limited to the above-described embodiments, but should be determined not only by the appended claims but also by the equivalents of the appended claims.

Claims

1. A membrane replacement mechanism for an ion stripping membrane, characterized in that: include: A lifting transmission assembly (1) at least comprises a vacuum film changing chamber (4), a vacuum film storage chamber (6), and a lifting transmission power assembly (7); the vacuum film storage chamber (6) is arranged below the vacuum film changing chamber (4); the lifting transmission power assembly (7) is arranged below the vacuum film storage chamber (6), and is connected to a film support plate (21) for storing a carbon film arranged in the vacuum film storage chamber (6), and is used for sending a new carbon film on the film support plate (21) into the vacuum film changing chamber (4) when changing the film, and retracting the film support plate (21) into the vacuum film storage chamber (6) after the film changing is completed; The telescopic transmission assembly (2) comprises at least a guide vacuum chamber (25), a telescopic transmission power assembly (26) and a rear guide vacuum chamber (27); the guide vacuum chamber (25) is vertically connected to the vacuum film changing chamber (4); the telescopic transmission power assembly (26) is arranged between the guide vacuum chamber (25) and the rear guide vacuum chamber (27), and is used to, when changing the film, transmit the old carbon film along the rear guide vacuum chamber (27) and the guide vacuum chamber (25) to the vacuum film changing chamber (4), place the old carbon film on the film support plate, and remove the new carbon film from the film support plate and return it along the original path; The lifting transmission power assembly (7) comprises: A first servo motor (12), a first planetary gear reducer (13), a first coupling (14), a first magnetic fluid sealing device (15), a second coupling (16), a first transmission shaft (19), a first gear (17) and a first circular rack (18) are sequentially connected and arranged; The first circular rack (18) is sleeved in a first self-lubricating sleeve (10) provided on the top of the vacuum film storage chamber (6) and rotates in conjunction with the first gear (17); The telescopic transmission power assembly (26) comprises: A second servo motor (29), a second planetary gear reducer (30), a third coupling (31), a second magnetic fluid sealing device (32), a fourth coupling (33), a second transmission shaft (34), a second gear (35) and a second circular rack (39) are sequentially connected and arranged; The second circular rack (39) rotates in conjunction with the second gear (35), is sleeved in the third self-lubricating sleeve (37), and is connected to a sampling block (36). The sampling block (36) is used to place the old carbon film and clamp the new carbon film on the film support plate (21) when the second circular rack (39) transmits the sampling block (36) to the vacuum film exchange chamber.

2. The membrane replacement mechanism according to claim 1, characterized in that: The lifting transmission assembly (1) further comprises: The plug valve (5) is provided between the vacuum membrane changing chamber (4) and the vacuum membrane storage chamber (6), and is used to connect the vacuum membrane changing chamber (4) and the vacuum membrane storage chamber (6) when the membrane is changed, and to isolate the vacuum membrane changing chamber (4) and the vacuum membrane storage chamber (6) after the membrane change is completed.

3. The membrane replacement mechanism according to claim 1, characterized in that: The film support plate (21) comprises three mold frames (22), and the mold frames (22) are used to place the carbon film.

4. The membrane replacement mechanism according to claim 1, characterized in that: The lifting transmission power assembly (7) further includes: A lifting transmission vacuum chamber is provided below the vacuum film storage chamber (6), is sealed and connected to the vacuum film storage chamber (6), and has a first vacuum wall penetration member (24) provided on its side wall; The first gear (17) is arranged in the lifting transmission vacuum chamber, the first circular rack (18) passes through the lifting transmission vacuum chamber, and extends into the vacuum film storage chamber (6) through the second self-lubricating sleeve (20) on the top of the lifting transmission vacuum chamber, and the first transmission shaft (19) extends into the lifting transmission vacuum chamber from the outside to drive the first gear (17) to rotate.

5. The membrane replacement mechanism according to claim 4, characterized in that: The lifting transmission assembly (1) further comprises: A first rear end sealed vacuum chamber (8) connected below the lifting transmission vacuum chamber; The portion of the first circular rack (18) extending out of the lifting transmission vacuum chamber is located in the first rear end sealed vacuum chamber (8).

6. The membrane replacement mechanism according to claim 1, characterized in that: The telescopic transmission power assembly (26) further includes: A telescopic transmission vacuum chamber (38) is provided between the guide vacuum chamber (25) and the rear guide vacuum chamber (27), is sealedly connected to the guide vacuum chamber (25) and the rear guide vacuum chamber (27), and has a second vacuum wall penetration member (40) provided on its side wall; The second gear (35) is arranged in the telescopic transmission vacuum chamber (38), the third self-lubricating sleeve (37) is arranged at the end of the telescopic transmission vacuum chamber (38), the second circular rack (39) sleeve passes through the telescopic transmission vacuum chamber (38), and the second transmission shaft (34) extends into the telescopic transmission vacuum chamber (38) from the outside to drive the second gear (35) to rotate.

7. The membrane replacement mechanism according to claim 6, characterized in that: The telescopic transmission assembly (2) further comprises: a second rear end sealed vacuum chamber (28) connected to the rear of the rear end guide vacuum chamber (27); The portion of the second circular rack (39) extending out of the telescopic transmission vacuum chamber (38) is located in the second rear end sealed vacuum chamber (28).

8. The membrane replacement mechanism according to claim 1, characterized in that: A molecular pump is provided in the vacuum film storage chamber (6) for maintaining a vacuum environment in the vacuum film storage chamber (6).

Images