Single crystal isometric deformation detection method and device

Abstract

The application provides a single crystal isometric deformation detection method and device, comprising: monitoring the deformation of the single crystal surface during the isometric process, and obtaining a group of crystal growth shape images; extracting the deformation area of the crystal surface in each crystal growth shape image in each group, and calculating the area of the deformation area; judging the type of the deformation area in each crystal growth shape image; superimposing multiple crystal growth shape images in each group, grouping multiple deformation areas in each group according to the type of the deformation area in each crystal growth shape image, and obtaining the number of images in which the single crystal is deformed; obtaining the proportion of the number of images in which the single crystal surface is deformed in the total number of images in each group, judging whether the proportion meets a preset condition, and outputting an alarm signal if the proportion meets the preset condition. The application has the beneficial effects of realizing real-time monitoring and early warning, reducing the labor intensity of workers, improving the automation level, and avoiding abnormal expansion.

Description

Technical Field

[0001] This invention belongs to the field of photovoltaic technology, and in particular relates to a method and device for detecting the deformation of single crystals with equal diameter. Background Technology

[0002] During the single crystal growth process, the constant diameter step can lead to single crystal deformation due to inconsistent crucible positions, varying thermal insulation performance, and low degree of adaptive matching of process parameters. Currently, there is no constant diameter deformation detection system, requiring visual inspection of single crystal deformation at both the local and centralized control terminals. This consumes a lot of time and energy for operators, increasing their workload and difficulty. Summary of the Invention

[0003] In view of the above problems, the present invention provides a method and apparatus for detecting single crystal constant diameter deformation, so as to solve the above or other problems existing in the prior art.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a method for detecting single-crystal constant-diameter deformation, comprising,

[0005] Monitor the deformation of the single crystal surface during the constant diameter process and obtain a set of images of the crystal growth shape;

[0006] Extract the deformed region of the crystal surface from each image of the crystal growth shape in each group, and calculate the area of ​​the deformed region;

[0007] Determine the type of the deformed region in each image of crystal growth shape;

[0008] Multiple crystal growth shape images in each group are superimposed, and multiple deformation regions in each group are grouped according to the type of deformation region in each crystal growth shape image to obtain the number of images of single crystal deformation.

[0009] The proportion of images showing deformation on the single crystal surface to the total number of images in each group is obtained. The proportion is then checked to see if it meets a preset condition. If it does, an alarm signal is output.

[0010] Furthermore, when monitoring the deformation of the single crystal surface during the constant diameter process, the single crystal surface near the crystal line at the solid-liquid interface is monitored; and

[0011] Monitor the single crystal surface between two adjacent crystal lines.

[0012] Furthermore, in the step of determining the type of the deformed region in each image of the crystal growth shape, the area of ​​the deformed region in each image of the crystal growth shape is compared with a preset area threshold. If the area of ​​the deformed region is greater than the preset area threshold, then the deformed region in the image of the crystal growth shape is a deformed type.

[0013] Otherwise, the deformed regions in the image of the crystal growth shape are of the non-deformed type.

[0014] Furthermore, the preset area threshold is the area of ​​the image growing shape multiplied by a scaling factor, where the scaling factor is 1 / 8 to 1 / 6.

[0015] Furthermore, when multiple crystal growth shape images in each group are superimposed, the first image acquired in each group is used as the basis, and the images are superimposed sequentially in the order of acquisition. Each group contains 2-60 images of crystal growth shapes.

[0016] Furthermore, in the step of obtaining the proportion of the number of images of deformation on the single crystal surface to the total number of images in each group, and judging whether the proportion meets the preset conditions, if it does, an alarm signal is output. In the step of comparing the proportion with the preset standard proportion, if the proportion is greater than the preset standard proportion, an alarm signal is output.

[0017] Otherwise, output the normal case.

[0018] Furthermore, the preset standard ratio is 0.6-1.

[0019] A single-crystal constant-diameter deformation detection device, comprising:

[0020] The image acquisition module monitors the deformation of the single crystal surface during the constant diameter process and acquires a set of images of the crystal growth shape;

[0021] The image processing module is used to extract the deformed region of the crystal surface in each image of the crystal growth shape in each group and calculate the area of ​​the deformed region.

[0022] The type determination module is used to determine the type of the deformed region in each image of crystal growth shape.

[0023] The image overlay module is used to overlay multiple crystal growth shape images in each group, and to group multiple deformation regions in each group according to the type of deformation region in each crystal growth shape image, so as to obtain the number of images of single crystal deformation.

[0024] The output module is used to obtain the proportion of the number of images showing deformation on the single crystal surface to the total number of images in each group, and to determine whether the proportion meets the preset conditions. If it does, an alarm signal is output.

[0025] An electronic device includes a memory, a processor, and one or more programs stored in the memory and executable on the processor. When the processor executes the one or more programs, the electronic device performs the single-crystal equal-diameter deformation detection method described above.

[0026] A computer-readable storage medium storing computer instructions, which, when executed on a processor of an electronic device, cause the device containing the computer storage medium to perform the single-crystal equal-diameter deformation detection method described above.

[0027] By adopting the above technical solution, during the equal diameter process, the crystal lines of the single crystal at the solid-liquid interface and the surface of the single crystal between adjacent crystal lines are detected, and a set of images of the single crystal growth shape are obtained. Multiple images in each set are processed to extract the deformation area of ​​the single crystal surface in each image and calculate the area of ​​the deformation area. The type of deformation area in the image is determined based on the area of ​​the deformation area. Multiple images in each set are superimposed sequentially, and each image is grouped. Images with deformation are assigned to a group, and the proportion of the number of deformed images to the total number of images in a group is obtained. This proportion is compared with a preset standard proportion to determine whether the single crystal has undergone equal diameter deformation. This solves the problem of personnel inspection of single crystal deformation in the equal diameter process, realizes real-time monitoring and early warning, reduces the labor intensity of operators, improves the level of automation, improves work efficiency, avoids the expansion of abnormalities, reduces waste of action, saves manpower and time, improves the automation level of the furnace, and reduces the difficulty of personnel operation. Attached Figure Description

[0028] Figure 1 This is a flowchart illustrating an embodiment of the present invention;

[0029] Figure 2 This is an image of a single crystal growth shape without constant diameter deformation according to an embodiment of the present invention;

[0030] Figure 3 This is an image of a single crystal growth shape exhibiting constant diameter deformation according to an embodiment of the present invention. Detailed Implementation

[0031] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0032] Figure 1 The flowchart of one embodiment of the present invention is shown. One embodiment of the present invention relates to a method and apparatus for detecting deformation of single crystals under constant diameter, used in the constant diameter process of Czochralski single crystals. During the constant diameter process, the surface of the single crystal is monitored to detect whether deformation occurs at the crystal lines of the single crystal near the solid-liquid interface and between adjacent crystal lines. An alarm is triggered based on whether deformation occurs. This solves the problem of personnel inspection of single crystal deformation in the constant diameter process, realizes real-time monitoring and early warning, reduces the labor intensity and difficulty of operators, improves the automation level of the furnace, improves work efficiency, and avoids the escalation of abnormalities.

[0033] A method for detecting constant diameter deformation in single crystals, such as Figure 1As shown, this is used in the process of Czochralski single crystal constant diameter growth. During the constant diameter growth process, the surface of the single crystal is inspected to detect whether constant diameter deformation occurs on the single crystal surface, including...

[0034] Monitoring the deformation of the single crystal surface during the constant-diameter process yields a set of images of the crystal growth shape. During the constant-diameter process of Czochralski single crystal growth, a halo appears at the solid-liquid interface between the single crystal and the silicon solution. This halo reflects whether constant-diameter deformation occurs during the process. Typically, such as... Figure 2 As shown, the crystal growth shape is circular (displayed as elliptical in the image), consistent with the shape of the single crystal. However, during the constant diameter process, due to factors such as inconsistent crucible position, differences in thermal insulation performance, and low degree of adaptive matching of process parameters, the single crystal growth shape will be deformed, such as... Figure 3 As shown, the shape of the aperture changes, indicating that the single crystal undergoes constant-diameter deformation, and the surface of the single crystal is deformed (e.g., Figure 3 The area marked in the box indicates the location where the single crystal surface deforms, either concave inward or convex outward. Therefore, during the equal diameter process, the single crystal surface is monitored, and adjustments are made when equal diameter deformation occurs. This enables real-time detection and early warning of equal diameter deformation, preventing abnormal expansion and ensuring the quality of the single crystal.

[0035] Specifically, during the equal-diameter process, the surface of the single crystal is inspected to detect whether deformation has occurred. Generally, during the equal-diameter stage, deformation of the single crystal surface mainly occurs at the crystal lines. If the deformation area is large, it will extend from the crystal lines to both sides, meaning deformation will also occur on the surfaces between adjacent crystal lines. Therefore, when monitoring the single crystal surface, the focus is on the crystal lines and the surfaces between adjacent crystal lines. When acquiring images for monitoring the single crystal surface, the crystal surface near the solid-liquid interface is monitored and photographed during the equal-diameter process. If equal-diameter deformation occurs, adjustments can be made quickly and accurately to prevent abnormal expansion. During monitoring, the surface of the single crystal near the solid-liquid interface is photographed continuously to acquire images of the crystal growth shape. Multiple images of the crystal growth shape are grouped together, and the group of crystal growth shape images is processed to determine whether deformation has occurred during the equal-diameter stage, and the judgment result is output.

[0036] When acquiring images of each set of crystal growth shapes, they can be acquired in real-time. When acquiring multiple sets of crystal growth shape images in real-time, the images of the first set of crystal growth shapes are acquired, and then the images of the second set of crystal growth shapes are acquired, with no time interval between adjacent sets of images. Alternatively, they can be acquired at intervals of a certain time change. After acquiring the images of the first set of crystal growth shapes, the images of the second set of crystal growth shapes are acquired after a certain time change, with a time change between adjacent sets of crystal growth shape images. The method of acquiring multiple sets of crystal growth shape images can be selected according to actual needs, and no specific requirements are specified here.

[0037] Preferably, in this embodiment, when the images of two adjacent sets of crystal growth shapes are acquired, there is a time change amount. This time change amount can be constant, that is, the time change amount between any two adjacent sets of crystal growth shape images is the same, or the time change amount can be different. The selection and setting can be made according to actual needs, and no specific requirements are made here.

[0038] Preferably, in this embodiment, a set of images of the single crystal growth shape is acquired at intervals of 1-10 minutes, which is selected according to actual needs.

[0039] The deformation region of the crystal surface is extracted from each image of the crystal growth shape in each group, and the area of ​​the deformation region is calculated. Image processing is performed on the acquired crystal growth shape images to extract the deformation region of the crystal surface. This deformation region is the basis for determining whether a single crystal has undergone equal-diameter deformation, and can show whether equal-diameter deformation has occurred at the edge of the single crystal. When extracting the deformation region of the crystal surface in each image of each group, an extraction region is defined, and image processing is performed on the extraction region to obtain the data of the deformation region of the crystal surface. This extraction region is the single crystal surface near the solid-liquid interface in the image, including all deformation regions. The remaining areas of the image are single crystal surfaces without deformation. Therefore, when extracting the deformation region of the crystal surface, the image of the extraction region is processed, including grayscale conversion and grayscale brightness adjustment. An image processing algorithm is used to extract the crystal surface deformation region from the image of the extraction region. This image processing algorithm is an existing algorithm; a suitable algorithm is selected for image processing according to actual needs, and no specific requirements are specified here.

[0040] During image extraction, the deformed area on the crystal surface is extracted for each image of the crystal growth shape in each group.

[0041] The number of crystal growth shape images in each group ranges from 2 to 60, depending on the actual needs. Multiple images of crystal growth shape in each group are acquired sequentially.

[0042] When acquiring images of the crystal growth shape, multiple sets of images are acquired, with each set containing multiple images. This is because during the constant diameter process, the crystal rotates during growth. In this embodiment, images are captured using an imaging device installed on the sub-chamber of the single crystal furnace. Therefore, without changing the existing single crystal furnace structure, it is generally only possible to acquire images of the single crystal surface from one side, and it is not possible to simultaneously acquire images of the single crystal surface at all four crystal lines. Thus, it is necessary to acquire a set of images that can capture images of the single crystal surface from different angles, making the constant diameter deformation detection results more accurate.

[0043] The determination of the deformation region type in each image of the crystal growth shape is as follows: Deformation region type includes: deformation type and non-deformation type. Deformation type indicates that the single crystal surface in the image undergoes uniform diameter deformation; non-deformation type indicates that the single crystal surface in the image does not undergo uniform diameter deformation, or the deformation region area is extremely small and requires no adjustment. When determining the deformation region type, the area of ​​the deformation region in each image of the crystal growth shape is compared with a preset area threshold. If the area of ​​the deformation region is greater than the preset area threshold, then the deformation region in the image of the crystal growth shape is of the deformation type; otherwise, the deformation region in the image of the crystal growth shape is of the non-deformation type. The preset area threshold is the area of ​​the image of the crystal growth shape multiplied by a scaling factor, i.e., preset area threshold = area of ​​the image of the crystal growth shape multiplied by a scaling factor. The scaling factor is between 1 / 8 and 1 / 6, and is selected according to actual needs; no specific requirements are specified here.

[0044] Multiple crystal growth shape images from each group are superimposed. The deformed regions in each group are grouped according to their type in each crystal growth shape image to obtain the number of images showing deformation in a single crystal. When superimposing multiple crystal growth shape images from each group, the first image in each group is used as the base, and the images are superimposed sequentially according to the acquisition order. The superposition is performed based on the time point in which each crystal growth shape image was acquired; the second image is superimposed on the first image, the third image on the second image, and so on, for each group of multiple images.

[0045] For each superimposed image of the crystal growth shape, the area of ​​the deformed region on the crystal surface in the newly superimposed image is obtained, and the area of ​​the deformed region is compared with a preset area threshold to determine the type of the deformed region in the newly superimposed image. This process continues until the last image is superimposed, thus obtaining the type of the deformed region in each image.

[0046] Group the multiple images in each group, grouping images belonging to the same type into one group, then divide the multiple images in each group into two groups, and calculate the number of images in each group.

[0047] The proportion of images showing deformation on the single crystal surface relative to the total number of images in each group is determined. If this proportion meets a preset condition, an alarm signal is output. This proportion is then compared to a preset standard proportion. If the proportion is greater than the preset standard proportion, an alarm signal is output, and parameters such as single crystal rotation speed and pulling speed are adjusted to prevent abnormal expansion. Otherwise, a normal state is output, and the next group of single crystal growth shape images is acquired. The above steps are repeated until the constant diameter process is completed. Specifically, the proportion of images showing deformation on the single crystal surface relative to the total number of images in each group is calculated by dividing the number of images showing deformation on the single crystal surface by the total number of images in each group. The preset standard proportion is 0.6-1, and the selection is based on actual needs; no specific requirements are specified here.

[0048] A single-crystal constant-diameter deformation detection device, comprising:

[0049] The image acquisition module monitors the deformation of the single crystal surface during the constant diameter process and acquires a set of images of the crystal growth shape;

[0050] The image processing module is used to extract the deformed region of the crystal surface in each image of the crystal growth shape in each group and calculate the area of ​​the deformed region.

[0051] The type determination module is used to determine the type of the deformed region in each image of crystal growth shape.

[0052] The image overlay module is used to overlay multiple crystal growth shape images in each group, and to group multiple deformation regions in each group according to the type of deformation region in each crystal growth shape image, so as to obtain the number of images of single crystal deformation.

[0053] The output module is used to obtain the proportion of the number of images showing deformation on the single crystal surface to the total number of images in each group, and to determine whether the proportion meets the preset conditions. If it does, an alarm signal is output.

[0054] During the constant-diameter process of Czochralski single crystal growth, the image acquisition module acquires a set of images of the crystal growth shape at regular time intervals and transmits multiple images from this set to the image processing module. The image processing module processes each image, extracts the deformed area on the crystal surface in each image, and calculates the area of ​​the deformed area on the crystal surface in that image. After processing each image, the image processing module transmits it to the type judgment module. The type judgment module compares the area of ​​the deformed area in the image with a preset area threshold to determine the type of the deformed area in the image, classifying it as either a deformed or non-deformed type. The judgment result is then transmitted to the image overlay module, which overlays the images and acquires the number of deformed images during the overlay process. The judgment output module calculates the proportion of the number of deformed images on the single crystal surface to the total number of images in each set and compares this proportion with a preset standard proportion to determine if the proportion meets the preset conditions. If it does, an alarm signal is output, and the crystal pulling system adjusts the relevant crystal pulling parameters to reduce the constant-diameter deformation of the single crystal. Otherwise, a normal state is output, and the next set of single crystal growth shape images is acquired until the constant-diameter process ends.

[0055] An electronic device includes a memory, a processor, and one or more programs stored in the memory and executable on the processor. When the processor executes the one or more programs, the electronic device performs the above-described method for detecting single-crystal equal-diameter deformation.

[0056] A computer-readable storage medium storing computer instructions, which, when executed on a processor of an electronic device, cause the device containing the computer storage medium to perform the aforementioned single-crystal equal-diameter deformation detection method.

[0057] The aforementioned functional modules can be integrated into one processing module, or each module can exist physically separately, or two or more modules can be integrated into one module. The integrated module can be implemented in hardware or as a software functional unit.

[0058] When integrated modules are implemented as software functional units, they can be stored in a computer-readable storage medium. The technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the single-crystal equal-diameter deformation detection method described in the embodiments of this application.

[0059] The aforementioned storage media include various media that can store program code, such as USB flash drives, portable hard drives, read-only memory, random access memory, magnetic disks, or optical disks.

[0060] Preferably, in this embodiment, the image acquisition module is a CCD camera, which is installed on the single crystal furnace to take pictures of the silicon solution surface in real time and acquire surface images.

[0061] The following is a specific embodiment for illustration.

[0062] The control system for Czochralski single crystal growth includes a server, an industrial control unit, and a centralized control unit. The industrial control unit includes a CCD camera, which is installed on the single crystal furnace and used to photograph the surface of the single crystal during the Czochralski process to obtain an image of the single crystal growth shape. The acquired image of the single crystal growth shape is then transmitted to the server. The CCD camera and the server can be electrically connected, connected via a network, or through other connection methods, depending on the actual needs. No specific requirements are specified here.

[0063] The server includes a control unit with preset image processing, image overlay, type judgment, and judgment output modules. It analyzes and processes each image of the single crystal growth shape in each group, extracts the deformation region on the single crystal surface, calculates the area of ​​the deformation region, and determines the type of deformation region in the image based on the area. Multiple images in each group are overlaid, and the images in each group are grouped according to the type of deformation region in each image. The number of deformed images is obtained, and the proportion of deformed images to the total number of images in each group is calculated. This proportion is compared with a preset standard proportion to determine whether the single crystal exhibits constant diameter deformation, and the corresponding judgment result is output. The judgment result is transmitted to the alarm device on the industrial control terminal, where a buzzer sounds an alarm. Simultaneously, the industrial control terminal transmits the alarm signal to the central control terminal, which records the alarm and transmits the alarm information to the client. The client outputs an alarm signal, furnace information, and relevant information such as the overlaid single crystal surface image for each group. Operators adjust the parameters of the corresponding furnace based on the information output by the client to prevent the abnormality from escalating.

[0064] When growing single crystals in Czochralski, after entering the constant diameter process, the surface of the single crystal is photographed to obtain an image of the single crystal growth shape. During image acquisition, multiple images are continuously acquired to obtain a set of images of the single crystal growth shape.

[0065] As the equal diameter process proceeds, a set of images of the single crystal growth shape is acquired every 5 minutes. Throughout the equal diameter process, the occurrence of equal diameter deformation on the single crystal surface is monitored.

[0066] Set the number of images of the single crystal growth shape in a group to 50. Process the images of the single crystal growth shape in each group and output whether equal diameter deformation has occurred. If equal diameter deformation has occurred, adjust the relevant parameters of the Czochralski single crystal system to reduce the equal diameter deformation of the single crystal and avoid abnormal expansion.

[0067] When processing the images of the single crystal growth shape in each group, each single crystal growth shape image is processed to extract the single crystal surface deformation area in each image and calculate the area of ​​the single crystal surface deformation area in each image.

[0068] The area of ​​the deformed region in the image is calculated and compared with a preset area threshold to determine the type of deformed region in the image.

[0069] Based on the first image, images are superimposed: the second image is superimposed on the first, the third image on the second, and so on, until the last image. Furthermore, during the superposition process, images in each group are grouped according to the type of deformed region, into deformed and undeformed groups. The proportion of images in the deformed group relative to the total number of images in each group is calculated and compared with a preset standard proportion. If the proportion meets the preset conditions, an alarm signal is output; otherwise, a normal state is output, and the process continues to acquire the next group of images showing the single crystal growth shape, further determining whether equal-diameter deformation has occurred.

[0070] By adopting the above technical solution, during the equal diameter process, the crystal lines of the single crystal at the solid-liquid interface and the surface of the single crystal between adjacent crystal lines are detected, and a set of images of the single crystal growth shape are obtained. Multiple images in each set are processed to extract the deformation area of ​​the single crystal surface in each image and calculate the area of ​​the deformation area. The type of deformation area in the image is determined based on the area of ​​the deformation area. Multiple images in each set are superimposed sequentially, and each image is grouped. Images with deformation are assigned to a group, and the proportion of the number of deformed images to the total number of images in a group is obtained. This proportion is compared with a preset standard proportion to determine whether the single crystal has undergone equal diameter deformation. This solves the problem of personnel inspection of single crystal deformation in the equal diameter process, realizes real-time monitoring and early warning, reduces the labor intensity of operators, improves the level of automation, improves work efficiency, avoids the expansion of abnormalities, reduces waste of action, saves manpower and time, improves the automation level of the furnace, and reduces the difficulty of personnel operation.

[0071] The embodiments of the present invention have been described in detail above, but the content described is only a preferred embodiment of the present invention and should not be considered as limiting the scope of the present invention. All equivalent changes and improvements made in accordance with the scope of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A method for detecting constant-diameter deformation in single crystals, characterized in that: include, The deformation of the single crystal surface during the constant diameter process is monitored, and multiple sets of images of the crystal growth shape are obtained, each set of which can acquire images of the single crystal surface at different angles; the single crystal surface near the crystal line at the solid-liquid interface is monitored. Extract the deformed region of the crystal surface from each image of the crystal growth shape in each group, and calculate the area of ​​the deformed region; Determine the type of the deformed region in each image of the crystal growth shape, and compare the area of ​​the deformed region in each image of the crystal growth shape with a preset area threshold. If the area of ​​the deformed region is greater than the preset area threshold, then the deformed region in the image of the crystal growth shape is a deformed type; otherwise, the deformed region in the image of the crystal growth shape is a non-deformed type. Multiple crystal growth shape images in each group are superimposed, and the multiple deformation regions in each group are grouped according to the type of deformation region in each crystal growth shape image to obtain the number of images of deformation on the single crystal surface. The proportion of images showing deformation of the single crystal surface to the total number of images in each group is obtained. It is then determined whether the proportion meets a preset condition. If it does, an alarm signal is output.

2. The method for detecting single-crystal constant-diameter deformation according to claim 1, characterized in that: Monitoring the deformation of a single crystal surface during the constant diameter process also includes: Monitor the single crystal surface between two adjacent crystal lines.

3. The method for detecting single-crystal constant-diameter deformation according to claim 1, characterized in that: The preset area threshold is the area of ​​the image growing shape multiplied by a scaling factor, where the scaling factor is 1 / 8 to 1 / 6.

4. The method for detecting single-crystal constant-diameter deformation according to any one of claims 1-3, characterized in that: When multiple crystal growth shape images in each group are superimposed, the first image acquired in each group is used as the basis, and the images are superimposed sequentially in the order of acquisition. Each group contains 2-60 images of crystal growth shapes.

5. The method for detecting single-crystal constant-diameter deformation according to claim 4, characterized in that: In the step of determining whether the proportion of the number of images of deformation of the single crystal surface to the total number of images in each group meets the preset conditions, and if it does, an alarm signal is output, the proportion is compared with a preset standard proportion. If the proportion is greater than the preset standard proportion, an alarm signal is output. Otherwise, output the normal case.

6. The method for detecting single-crystal constant-diameter deformation according to claim 5, characterized in that: The preset standard ratio is 0.6-1.

7. A single-crystal constant-diameter deformation detection device, characterized in that: include: The image acquisition module monitors the deformation of the single crystal surface during the constant diameter process and acquires multiple sets of images of the crystal growth shape. Each set can acquire images of the single crystal surface at different angles and monitor the single crystal surface near the crystal line at the solid-liquid interface. An image processing module is used to extract the deformed region of the crystal surface in each image of the crystal growth shape in each group, and to calculate the area of ​​the deformed region; The type determination module is used to determine the type of the deformed region in each image of the crystal growth shape. The area of ​​the deformed region in each image of the crystal growth shape is compared with a preset area threshold. If the area of ​​the deformed region is greater than the preset area threshold, then the deformed region in the image of the crystal growth shape is a deformed type; otherwise, the deformed region in the image of the crystal growth shape is a non-deformed type. The image overlay module is used to overlay multiple crystal growth shape images in each group, and to group the multiple deformation regions in each group according to the type of deformation region in each crystal growth shape image, so as to obtain the number of images of deformation of single crystal surface. The output judgment module is used to obtain the proportion of the number of images of deformation on the single crystal surface to the total number of images in each group, and to determine whether the proportion meets the preset conditions. If it does, an alarm signal is output.

8. An electronic device, characterized in that: The device includes a memory, a processor, and one or more programs stored in the memory and executable on the processor, wherein when the processor executes the one or more programs, the electronic device performs the single-crystal equal-diameter deformation detection method as described in any one of claims 1-6.

9. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer instructions that, when executed on a processor of an electronic device, cause the device containing the computer-readable storage medium to perform the single-crystal equal-diameter deformation detection method as described in any one of claims 1-6.

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