Device for detecting vacuum degree inside resonant gyroscope and vacuum exhaust and packaging method

Abstract

The present invention relates to a device for detecting the internal vacuum degree of a resonant gyroscope, and a vacuum exhaust and packaging method. The device comprises a shell, a base, a vacuum gauge, a sealing ring, an exhaust pipe, and a getter; the upper end of the shell and the lower end of the base are transitionally matched and sealed and fixed by laser welding; a plurality of long insulators are vertically arranged on the outer ring of the base, and the lower ends of the long insulators are connected to the combination of the resonator and the electrode; a plurality of short insulators are vertically arranged on the inner ring of the base, and the lower ends of the short insulators are connected to the getter; the exhaust pipe jack at the center of the base is sealed and connected to the lower end of the exhaust pipe; during the vacuum exhaust process, the exhaust pipe is in a conducting state, and after the exhaust is completed, the exhaust pipe is in a pinch-off sealing state; the flange part of the shell is connected to the upper end of the vacuum gauge by bolts, and a sealing ring is installed between the two. The present invention can monitor the vacuum degree of the exhaust process of the resonant gyroscope in real time, and can also realize the measurement of the vacuum degree inside the gyroscope after packaging.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum degree detection inside a resonant gyroscope, and in particular relates to a device for detecting the vacuum degree inside a resonant gyroscope and a vacuum exhaust and packaging method. Background Art

[0002] The quartz resonant gyroscope is a new type of solid-state wave gyroscope that measures angular velocity based on the Coriolis effect. It has the advantages of simple structure, high precision, low power consumption, long life, good reliability, and resistance to space radiation. It is an ideal gyroscope for strapdown inertial navigation systems and is currently the only vibration gyroscope that reaches inertial navigation-level performance.

[0003] Air damping loss is the main loss source of the resonator, the core component of the quartz resonator gyroscope. Reducing the loss of air damping and increasing the Q value are of positive significance to improving the accuracy and resolution of the gyroscope. When the air pressure drops from 100Pa to 1Pa, the Q value of the resonator rises slowly; at 10 -1 Pa to 10 -2 In the Pa stage, the Q value rises sharply; below 10 -3 Pa level, the effect of air pressure on Q value can be ignored. If you want to get a resonator with a Q value close to ten million, the air pressure, that is, the vacuum degree, should be better than 5×10 - 3 Pa.

[0004] After the quartz hemispherical resonator gyroscope is vacuum-exhausted and packaged, its internal vacuum degree cannot be known, and the effect of the exhaust process cannot be judged, and the effectiveness of the exhaust process cannot be accurately evaluated. The measures taken in the past were only to reversely infer the approximate range of its vacuum degree through the Q value. The lack of accurate detection means has restricted the development of quartz resonator gyroscopes, so it is necessary to design a set of special devices to monitor its internal exhaust process and detect the vacuum degree after packaging. Summary of the invention

[0005] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a device for detecting the internal vacuum degree of a resonant gyroscope and a vacuum exhaust and packaging method.

[0006] One of the above-mentioned purposes of the present invention is achieved by the following technical solution:

[0007] A device for detecting the internal vacuum degree of a resonant gyroscope, characterized in that it comprises a housing, a base, a vacuum gauge, a sealing ring, an exhaust pipe, and a getter;

[0008] The shell adopts a flange cylinder structure, and a mounting cavity is formed inside the shell to accommodate the combination of the resonator and the electrode; the base is a disc-shaped base; the upper end of the shell and the lower end of the base are transitionally matched and sealed and fixed by laser welding;

[0009] On the base, a plurality of long insulators are vertically arranged at the outer circle, a plurality of short insulators are vertically arranged at the inner circle, and an exhaust pipe jack is arranged at the center; wherein the long insulators are connected to the flange of the electrode placed in the shell, so that the combination of the resonator and the electrode is firmly fixed in the installation cavity of the shell; the getter is connected to the short insulators and suspended above the combination of the resonator and the electrode;

[0010] The lower end of the exhaust pipe is sealed and connected to the exhaust pipe jack on the base; during the vacuum exhaust process, the exhaust pipe is in a conducting state, and after the exhaust is completed, the exhaust pipe is in a pinched and sealed state;

[0011] The flange portion of the housing is connected to the upper end of the vacuum gauge by bolts, and a sealing ring is installed between the two, so that the lower end of the housing and the upper end of the vacuum gauge form a sealed connection.

[0012] Furthermore: the shell and the base are both made of stainless steel.

[0013] Furthermore: the exhaust pipe and the sealing ring are both made of oxygen-free copper material.

[0014] Furthermore: the vacuum gauge is a cold gauge.

[0015] The second object of the present invention is achieved by the following technical solution:

[0016] A vacuum exhaust and packaging method based on the above-mentioned device for detecting the internal vacuum degree of the resonant gyroscope is characterized by comprising the following steps:

[0017] Step 1, assembling the device and fixing the assembly of the resonator and the electrode in the mounting cavity of the housing;

[0018] Step 2: Vacuum exhaust treatment

[0019] The device is installed together with the combination of the resonator and the electrode to the exhaust equipment for baking and exhaust. When the vacuum degree reaches a certain level, the internal vacuum degree is measured by a vacuum gauge. When the vacuum degree measured by the device reaches a preset value, it indicates that the exhaust is completed, and the packaging operation can be carried out after the getter is activated.

[0020] Step 3: Vacuum packaging

[0021] Pinch off the exhaust pipe to complete the vacuum packaging of the device; during the use of the resonant gyroscope, the vacuum degree is monitored by a vacuum gauge.

[0022] Further: Step 1 is specifically:

[0023] 1.1. Install the getter under the base through several short insulators, fix the combination of the resonator and the electrode under the base through several long insulators, and insert the lower end of the exhaust pipe and fix it in the exhaust pipe socket on the base by welding;

[0024] 1.2. After the lower end of the base is plugged into the upper end of the shell, it is sealed and fixed by laser welding;

[0025] 1.3. The lower flange of the housing is connected to the upper end of the vacuum gauge by bolts, and a sealing ring is installed between the two.

[0026] The present invention has the advantages and positive effects:

[0027] 1. The present invention forms an exhaust chamber through the outer shell, the base and the vacuum gauge. The three are used as inspection samples of the resonant gyroscope during the exhaust process and after the exhaust is completed and packaged. It can not only monitor the vacuum degree of the resonant gyroscope during the exhaust process in real time, but also measure the vacuum degree inside the gyroscope after packaging. On the one hand, it provides data support for the selection of the exhaust process; on the other hand, it provides a monitoring method for the life of the gyroscope.

[0028] 2. The materials of the parts of each part of the device of the present invention are the same as those of the gyroscope, and the sizes match those of the gyroscope. The processes from processing to assembly are the same as those of the gyroscope. Therefore, it can be ensured that the deflation condition inside the gyroscope is consistent with the actual gyroscope, and the whole process monitoring can be realized. It has the advantages of simple structure and good applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a structural schematic diagram of a device for detecting the internal vacuum degree of a resonant gyroscope according to the present invention. DETAILED DESCRIPTION

[0030] The structure of the present invention is further described below with reference to the accompanying drawings and by way of examples. It should be noted that the present examples are descriptive rather than restrictive.

[0031] A device for detecting the vacuum inside a resonant gyroscope, see Figure 1 The invention point is: it includes a shell 4, a base 2, a vacuum gauge 5, a sealing ring 6, an exhaust pipe 1, a long insulator 10, a short insulator 12, and a getter 11.

[0032] The shell adopts a flange cylinder structure, and a mounting cavity is formed inside the shell to accommodate the resonator and the electrode fixed together. The base is a disc-shaped base, and the shell and the base are both made of stainless steel. The upper end of the shell and the lower end of the base are transitionally matched and sealed and fixed by laser welding. The position of the weld 3 is shown in the attached figure.

[0033] On the base, a plurality of long insulators are vertically arranged in the outer circle, a plurality of short insulators are vertically arranged in the inner circle, and an exhaust pipe jack is arranged in the center. The inner ends of the plurality of long insulators are connected to the flange portion of the electrode placed in the outer shell, so that the combination of the resonator and the electrode is firmly fixed in the mounting cavity of the outer shell. The getter is connected to the short insulator and suspended above the combination of the resonator and the electrode. Specifically, the getter is a packaged combination structure, and a resistive getter can be used, and filaments are arranged at both ends of the outside for connection with the lower end of the short insulator. Both ends of the long / short insulator are sealed and connected to the corresponding structural parts by sintering.

[0034] The lower end of the exhaust pipe is inserted into the exhaust pipe jack on the base and is sealed by welding. The exhaust pipe is preferably made of oxygen-free copper. During the vacuum exhaust process, the exhaust pipe is in a conducting state, and after the exhaust is completed, the exhaust pipe is in a pinch-off sealing state, completing the vacuum packaging of the device.

[0035] The flange of the housing is connected to the upper end of the vacuum gauge by bolts 7, and a sealing ring is installed between the two, so that the lower end of the housing and the upper end of the vacuum gauge form a sealed connection. The vacuum gauge uses a cold gauge with little interference to the measurement environment, and the material of the sealing ring is oxygen-free copper.

[0036] The method for vacuum exhaust and packaging using the above-mentioned device for detecting the internal vacuum degree of the resonant gyroscope comprises the following steps:

[0037] Step 1: assemble the device and fix the assembly of the resonator 8 and the electrode 9 in the mounting cavity of the housing, specifically including:

[0038] 1.1. Install the getter under the base through several short insulators, fix the combination of the resonator and the electrode under the base through several long insulators, and insert the lower end of the exhaust pipe and fix it in the exhaust pipe socket on the base by welding;

[0039] 1.2. After the lower end of the base and the upper end of the shell are transitionally matched, they are sealed and fixed by laser welding;

[0040] 1.3. The lower flange of the housing is connected to the upper end of the vacuum gauge by bolts, and a sealing ring is installed between the two.

[0041] Step 2: Vacuum exhaust treatment

[0042] The device is installed together with the combination of the resonator and the electrode to the exhaust equipment for baking and exhaust. When the vacuum degree reaches a certain level, the internal vacuum degree is measured by a vacuum gauge. When the vacuum degree measured by the device reaches the preset value, it indicates that the exhaust is completed. After the getter is activated (according to the product manual provided by the manufacturer, the main factors are the power-on time, which is about 10 minutes; the power-on current is 4-5 amperes), the packaging operation can be carried out.

[0043] Step 3: Vacuum packaging

[0044] Pinch off the exhaust pipe to complete the vacuum packaging of the device. Specifically, use a special hydraulic pliers with arc-shaped cutting edges to pinch off the exhaust pipe at the lower middle part of the exhaust pipe, so that it undergoes plastic deformation at the fracture, and achieves cold welding and sealing of the exhaust pipe. At this time, the entire device is in a self-sealed state, and the vacuum gauge can still measure the vacuum degree. The vacuum degree measured at this time is the vacuum degree after the gyro is packaged, and it can be re-measured at any time thereafter to detect the vacuum retention life of the gyro.

[0045] Although the embodiments and drawings of the present invention are disclosed for illustrative purposes, those skilled in the art will appreciate that various substitutions, changes and modifications are possible without departing from the spirit and scope of the present invention and the appended claims. Therefore, the scope of the present invention is not limited to the contents disclosed in the embodiments and drawings.

Claims

1. A device for detecting the internal vacuum degree of a resonant gyroscope, characterized in that: Including shell, base, vacuum gauge, sealing ring, exhaust pipe, getter; The shell adopts a flange cylinder structure, and a mounting cavity is formed inside the shell to accommodate the combination of the resonator and the electrode; the base is a disc-shaped base; the upper end of the shell and the lower end of the base are transitionally matched and sealed and fixed by laser welding; On the base, a plurality of long insulators are vertically arranged on the outer circle, a plurality of short insulators are vertically arranged on the inner circle, and an exhaust pipe jack is arranged in the center; wherein the long insulators are connected to the flange part of the electrode placed in the shell, so that the combination of the resonator and the electrode is firmly fixed in the installation cavity of the shell; the getter is connected to the short insulators and suspended above the combination of the resonator and the electrode; The lower end of the exhaust pipe is sealed and connected to the exhaust pipe jack on the base; during the vacuum exhaust process, the exhaust pipe is in a conducting state, and after the exhaust is completed, the exhaust pipe is in a pinched-off and sealed state; The flange portion of the housing is connected to the upper end of the vacuum gauge by bolts, and a sealing ring is installed between the two, so that the lower end of the housing and the upper end of the vacuum gauge form a sealed connection; The process of vacuum exhaust and packaging of the device is as follows: Step 1, assembling the device and fixing the assembly of the resonator and the electrode in the mounting cavity of the housing; Step 2: Vacuum exhaust treatment The device is installed together with the combination of the resonator and the electrode to the exhaust equipment for baking and exhaust. When the vacuum degree reaches a certain level, the internal vacuum degree is measured by a vacuum gauge. When the vacuum degree measured by the device reaches a preset value, it indicates that the exhaust is completed, and the packaging operation can be carried out after the getter is activated. Step 3: Vacuum packaging Pinch off the exhaust pipe to complete the vacuum packaging of the device; during the use of the resonant gyroscope, the vacuum degree is monitored by a vacuum gauge.

2. The device for detecting the internal vacuum degree of a resonant gyroscope according to claim 1, characterized in that: The shell and the base are both made of stainless steel.

3. The device for detecting the internal vacuum degree of a resonant gyroscope according to claim 1, characterized in that: The exhaust pipe and the sealing ring are both made of oxygen-free copper.

4. The device for detecting the internal vacuum degree of a resonant gyroscope according to claim 1, characterized in that: The vacuum gauge is a cold gauge.

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