Drawing system, drawing method, and storage medium having a program recorded

Abstract

The present application provides a kind of drawing system.Matching position decision part sets the same size temporary template area (951a) corresponding to the template of temporary matching position (95a), set the larger collation area (952a) than the camera view of camera unit with temporary template area (951a) as center.Matching position decision part also confirms whether there is repeat area indicating the same pattern as temporary template area (951a) in collation area (952a).Then, in the case where there is repeat area in collation area (952a), matching position decision part repeatedly moves temporary matching position (95a) to the specified direction to set temporary template area (951a) and collation area (952a) again, and confirms whether there is repeat area.On the other hand, in the case where there is no repeat area in collation area (952a), matching position decision part determines temporary matching position (95a) as matching position.

Description

[0001] Refer to related applications

[0002] This application claims the benefit of priority to Japanese Patent Application JP2021-139064, filed on August 27, 2021, the entire disclosure of which is incorporated herein by reference. Technical Field

[0003] This invention relates to a technique for drawing patterns on a substrate by irradiating it with light. Background Technology

[0004] Traditionally, patterns are drawn by irradiating light onto a photosensitive material formed on a semiconductor substrate, printed circuit board, or glass substrate for an organic EL display device or liquid crystal display device (hereinafter referred to as "substrate"). In the drawing apparatus used for this drawing, an alignment process is performed to detect the position of alignment marks provided on the substrate and automatically adjust the drawing position of the pattern.

[0005] In recent years, when drawing relative to a printed circuit board, in order to increase the number of items that can be obtained from a single board, it has been necessary to reduce the space used for configuring alignment marks. Therefore, instead of setting dedicated alignment marks on the board, a portion of the pattern on the board is used as the alignment mark.

[0006] For example, in the exposure apparatus disclosed in JP Patent Application Publication No. 2013-171988 (Document 1), a portion of the pattern obtained by photographing the pattern on the substrate is set as a reference mark model (i.e., template) to be used in the alignment process and is pre-recorded. Then, when the substrate to be exposed is moved into the exposure apparatus, a portion of the pattern on the substrate is photographed, and the obtained image is matched with the pattern of the aforementioned reference mark model to perform the alignment process of the substrate.

[0007] Furthermore, in the exposure apparatus of Reference 1, in order to obtain a template for pattern matching, a substrate is placed at a predetermined position in the exposure apparatus to photograph the pattern on the substrate, and a local pattern that becomes the template needs to be extracted from the obtained image. Therefore, the amount of work required to generate the template increases, and the operation time also increases.

[0008] Furthermore, when using a portion of a pattern on a substrate as a template, the designer needs to select the portion from that pattern to serve as the template. The portion chosen as the template must be one where no pattern identical or similar to the template exists in the surrounding area. Therefore, the designer's workload increases when selecting the portion to serve as the template. Summary of the Invention

[0009] This invention provides a drawing system aimed at reducing the workload of designers required to generate templates.

[0010] A preferred aspect of the present invention includes a drawing system comprising: a drawing apparatus for drawing a pattern by irradiating a substrate with light; and a data processing apparatus for creating template generation information and sending it to the drawing apparatus. The drawing apparatus comprises: a stage holding the substrate on which a first pattern is pre-formed on its upper surface; a drawing head irradiating the upper surface of the substrate with modulated light; a scanning mechanism for moving the stage relative to the drawing head in a scanning direction parallel to the upper surface of the substrate; an imaging unit for capturing a portion of the first pattern; a position detection unit for detecting the position of the substrate by performing pattern matching using a template relative to the image captured by the imaging unit; a storage unit for storing second CAD data, which is CAD data of a second pattern drawn on the first pattern; a data generation unit for rasterizing the second CAD data to generate second raster data; and a drawing control unit for controlling the drawing head and the scanning mechanism based on the second raster data and the position of the substrate detected by the position detection unit, thereby performing the drawing of the second pattern on the substrate, which is moving relative to the drawing head in the scanning direction. The storage unit also stores template generation information including coordinates of the matching position on the first pattern where the position detection unit performs pattern matching. The data generation unit rasterizes the CAD data of the first pattern to create intermediate data, and generates image data of a region of a predetermined size corresponding to the matching position from the intermediate data as the template. The data processing device includes: an initial setting unit for setting a temporary matching position on the first pattern; a matching position determination unit that sets a temporary template region of the same size as the template corresponding to the temporary matching position, sets a verification region centered on the temporary template region that is larger than the field of view of the camera unit, checks whether there is a repeating region in the verification region that represents the same pattern as the temporary template region, and if there is a repeating region, repeatedly moves the temporary matching position in a predetermined direction and sets the temporary template region and the verification region again to check whether there is a repeating region, and if there is no repeating region, determines the temporary matching position as the matching position; and an information creation unit that creates template generation information including coordinates of the matching position determined by the matching position determination unit.

[0011] This drawing system can reduce the amount of work required by operators to generate templates.

[0012] Preferably, in the case of the repeated region, the moving direction of the temporary matching position determined by the matching position determination unit is the scanning direction.

[0013] Preferably, the initial setting unit sets a group of temporary matching positions in which a plurality of temporary matching position columns are arranged at equal intervals in a width direction perpendicular to the scanning direction, and the intervals in the width direction of the plurality of temporary matching position columns are set below a predetermined value, wherein the plurality of temporary matching position columns are sets of temporary matching positions arranged in the scanning direction.

[0014] Preferably, the initial setting unit is configured to set a group of temporary matching positions in which a plurality of temporary matching position columns are arranged at equal intervals in a width direction perpendicular to the scanning direction, and the number of the plurality of temporary matching position columns is set to a predetermined number, wherein the plurality of temporary matching position columns are sets of temporary matching positions arranged in the scanning direction.

[0015] Preferably, a plurality of partial drawing areas are provided on the upper surface of the substrate. These partial drawing areas are arranged in a matrix in the scanning direction and in a width direction perpendicular to the scanning direction, and the same pattern is drawn in each partial drawing area. The initial setting unit sets a temporary matching position in one of the partial drawing areas. The matching position determination unit determines the matching position in the one partial drawing area based on the temporary matching position. In other partial drawing areas of the plurality of partial drawing areas, the matching position is determined in such a way that the relative position with respect to the other partial drawing areas is the same as the relative position of the matching position with respect to the one partial drawing area.

[0016] Preferably, a plurality of partial drawing areas are provided on the upper surface of the substrate, arranged in a matrix in the scanning direction and in the width direction perpendicular to the scanning direction. In the partial drawing area furthest to the side in both the scanning direction and the width direction, the temporary matching position is adjacent to the corner of that side in both the scanning direction and the width direction. In the partial drawing area furthest to the side in both the scanning direction and the other side in the width direction, the temporary matching position is adjacent to the corner of that side in both the scanning direction and the width direction. In the partial drawing area furthest to the side in both the scanning direction and the width direction, the temporary matching position is adjacent to the corner of that side in both the scanning direction and the width direction. In the partial drawing area furthest to the side in both the scanning direction and the width direction, the temporary matching position is adjacent to the corner of that side in both the scanning direction and the width direction.

[0017] Preferably, the data processing device edits a portion of the data and sends it to the drawing device. This portion of the data is CAD data corresponding to a defined area in the first pattern, including the matching position. The data generation unit of the drawing device rasterizes only this portion of the data to create the intermediate data.

[0018] Preferably, a plurality of partial drawing areas are provided on the upper surface of the substrate, arranged in a matrix in the scanning direction and in a width direction perpendicular to the scanning direction. The partial data corresponds to the partial drawing areas, including the matching position.

[0019] Preferably, the template generation information also includes coordinates representing other matching positions determined by the designer.

[0020] The present invention also provides a method for drawing patterns by irradiating a substrate with light. A preferred aspect of the drawing method includes: a) a step of holding a substrate on which a first pattern is pre-formed on its upper surface; b) a step of generating a template for position detection of the substrate; c) a step of photographing a portion of the first pattern; d) a step of detecting the position of the substrate by performing pattern matching using the template relative to the photographic image acquired in step c); e) a step of rasterizing second CAD data to generate second raster data, the second CAD data being CAD data of a second pattern drawn on the first pattern; and f) a step of controlling a drawing head and a scanning mechanism based on the second raster data and the position of the substrate detected in step d) to perform drawing the second pattern on the substrate, which is moving relative to the drawing head in a scanning direction, wherein the drawing head irradiates modulated light onto the upper surface of the substrate, and the scanning device moves the substrate relative to the drawing head in a scanning direction parallel to the upper surface of the substrate. Step b) comprises: step b1), preparing template generation information including coordinates of a matching position on the first pattern for pattern matching; and step b2), rasterizing the CAD data of the first pattern to create intermediate data, and generating image data of a region of a predetermined size corresponding to the matching position from the intermediate data as the template. Step b1) comprises: step b3), setting a temporary matching position on the first pattern; step b4), setting a temporary template region of the same size as the template corresponding to the temporary matching position, setting a verification region centered on the temporary template region that is larger than the field of view in step c), confirming whether there is a repeating region in the verification region that represents the same pattern as the temporary template region, and if there is a repeating region, repeatedly moving the temporary matching position in a predetermined direction and setting the temporary template region and the verification region again to confirm whether there is a repeating region, and if there is no repeating region, determining the temporary matching position as the matching position; and step b5), creating the template generation information including coordinates of the matching position determined in step b4).

[0021] The present invention also provides a storage medium recording a program executed in a drawing system for drawing patterns by irradiating a substrate with light. The drawing system comprises: a drawing apparatus for drawing a pattern by irradiating a substrate with light; and a data processing apparatus for creating template generation information and sending it to the drawing apparatus. The drawing apparatus comprises: a stage for holding a substrate on which a first pattern is pre-formed on its upper surface; a drawing head for irradiating the upper surface of the substrate with modulated light; a scanning mechanism for moving the stage relative to the drawing head in a scanning direction parallel to the upper surface of the substrate; a camera unit for capturing a portion of the first pattern; a position detection unit for detecting the position of the substrate by performing pattern matching using a template relative to the camera image acquired by the camera unit; a storage unit for storing second CAD data, which is CAD data of a second pattern drawn on the first pattern; a data generation unit for rasterizing the second CAD data to generate second raster data; and a drawing control unit for controlling the drawing head and the scanning mechanism based on the second raster data and the position of the substrate detected by the position detection unit, and performing the drawing of the second pattern on the substrate, which is moving relative to the drawing head in the scanning direction. The program is executed by a computer, and the following steps are performed in the data processing device: g) Step, setting a temporary matching position on the first pattern; h) Step, setting a temporary template area of ​​the same size as the template corresponding to the temporary matching position, setting a verification area centered on the temporary template area that is larger than the field of view of the camera unit, confirming whether there is a repeating area in the verification area that represents the same pattern as the temporary template area, and if there is a repeating area, repeatedly moving the temporary matching position in a predetermined direction and setting the temporary template area and the verification area again to confirm whether there is a repeating area, and if there is no overlapping area, determining the temporary matching position as the matching position; i) Step, creating template generation information including the coordinates of the matching position determined in step h), and performing step j) in the data generation unit of the drawing device, in which the CAD data of the first pattern is rasterized to create intermediate data, and image data of a predetermined size area corresponding to the matching position is generated from the intermediate data as the template.

[0022] The aforementioned objectives, as well as their features, forms, and advantages, will become clear from the following detailed description of the invention with reference to the accompanying drawings. Attached Figure Description

[0023] Figure 1 This is a perspective view illustrating a drawing system according to one embodiment.

[0024] Figure 2 This is a plan view showing the substrate.

[0025] Figure 3 This is a diagram showing the configuration of the computer included in the control unit of the drawing device.

[0026] Figure 4 This is a block diagram illustrating the functions of the control unit of the drawing device.

[0027] Figure 5A This is a diagram illustrating the process of drawing patterns relative to a substrate.

[0028] Figure 5B This is a diagram illustrating the process of drawing patterns relative to a substrate.

[0029] Figure 6 This is a diagram showing the matching locations and the extracted regions.

[0030] Figure 7 This is a diagram showing an example of a template.

[0031] Figure 8 This is a diagram illustrating an example of a configuration with multiple matching positions.

[0032] Figure 9 This is another example of a configuration that shows multiple matching positions.

[0033] Figure 10 This is a diagram showing the configuration of a data processing device.

[0034] Figure 11 This is a block diagram illustrating the functions of a data processing device.

[0035] Figure 12 This is a diagram illustrating the process of creating template generation information.

[0036] Figure 13 This is a diagram illustrating an example of a configuration with multiple temporary matching positions.

[0037] Figure 14 This is another example of a configuration that shows multiple temporary matching positions.

[0038] Figure 15 This is a diagram showing the temporary matching location, the temporary template area, and the verification area.

[0039] Figure 16 This is a diagram showing the temporary matching location, the temporary template area, and the verification area.

[0040] Figure 17 This is another example of a configuration that shows multiple matching positions.

[0041] Figure 18 This is a plan view showing the substrate.

[0042] The reference numerals in the attached figures are explained as follows:

[0043] 1 Drawing device

[0044] 3 Camera Department

[0045] 5. Drawing System

[0046] 6 Data Processing Device

[0047] 9 substrates

[0048] 21 platforms

[0049] 22-station mobile mechanism

[0050] 41 Drawing Head

[0051] 90 (substrate) upper surface

[0052] 94 drawing areas

[0053] 95 matching position

[0054] 95a Temporary Matching Position

[0055] 96 Extraction Area

[0056] 97 Templates

[0057] The 109 and 609 procedures

[0058] 111 Storage Department

[0059] 113 Position Detection Department

[0060] 114 Drawing Control Section

[0061] 115 Data Generation Department

[0062] 612 Initial Setting Department

[0063] 613 Matching Position Determination Department

[0064] 614 Information Creation Department

[0065] 950a Temporary Match Position Column

[0066] 951a Temporary Template Area

[0067] 952a verification area

[0068] Steps S11~S16, S21~S29, S121~S122 Detailed Implementation

[0069] Figure 1This is a perspective view showing a drawing system 5 according to an embodiment of the present invention. The drawing system 5 includes a drawing device 1 and a data processing device 6. The drawing device 1 is a direct drawing device that draws a pattern by scanning an irradiated area on a substrate 9 by irradiating a photosensitive material with spatially modulated, generally beam-shaped light onto the substrate 9. The data processing device 6 is a device for preprocessing, etc., the data used for drawing in the drawing device 1. The data processing device 6 is, for example, a conventional computer, but... Figure 1 It is drawn using a roughly rectangular concept. Figure 1 In the diagram, arrows are used to indicate three mutually orthogonal directions as the X, Y, and Z directions. Figure 1 In the example shown, the X and Y directions are horizontal directions perpendicular to each other, and the Z direction is vertical. The same applies to the other figures.

[0070] Figure 2 This is a plan view showing the main surface (hereinafter also referred to as "upper surface 90") of the (+Z) side of the substrate 9. The substrate 9 is, for example, a plate-shaped member that is approximately rectangular in shape when viewed from above. The substrate 9 is, for example, a multilayer printed wiring substrate (hereinafter simply referred to as "printed substrate"). In this embodiment, a circuit pattern formed of copper (Cu) or the like is formed in advance on the upper surface 90 of the substrate 9, and a resist film formed of a photosensitive material is provided on the circuit pattern. Then, in the drawing apparatus 1, a solder pattern is drawn (i.e., formed) on the resist film of the substrate 9. The solder pattern is drawn on the circuit pattern corresponding to the circuit pattern.

[0071] In the following description, the pattern (i.e., circuit pattern) pre-formed on the upper surface 90 of the substrate 9 will be referred to as the "first pattern," and the predetermined pattern (i.e., solder pattern) drawn on the upper surface 90 of the substrate 9 in the drawing apparatus 1 will be referred to as the "second pattern." Furthermore, the type and shape of the substrate 9 can be varied in many ways. Additionally, the pattern drawn on the substrate 9 using the drawing apparatus 1 is not limited to a solder pattern and can be varied in many ways.

[0072] exist Figure 2 The upper surface 90 of the illustrated substrate 9 is provided with multiple approximately rectangular drawing areas 94, each divided by a grid-like predetermined dividing line 93. Identical patterns are drawn in each of the multiple drawing areas 94. Each drawing area 94 corresponds to the final device (piece) obtained from the substrate 9. Figure 2 In the example shown, each drawn region 94 is approximately square. Multiple drawn regions 94 are arranged in a matrix pattern along the X and Y directions. Figure 2In the diagram, each drawing area 94 is drawn in a larger quantity than the actual drawing area, and the number of drawing areas 94 is drawn in a smaller quantity than the actual drawing area. Alignment marks are provided on the substrate 9 for the position detection processing (i.e., alignment processing) described later.

[0073] like Figure 1 As shown, the drawing apparatus 1 includes a stage 21, a stage moving mechanism 22, an imaging unit 3, a drawing unit 4, and a control unit 10. The control unit 10 controls the stage moving mechanism 22, the imaging unit 3, and the drawing unit 4. The stage 21 is a generally flat substrate holding part that holds a substrate 9 horizontally below the imaging unit 3 and the drawing unit 4 from the lower side. The stage 21 is, for example, a vacuum chuck that adsorbs and holds the lower surface of the substrate 9. The stage 21 may also have a structure other than a vacuum chuck. The upper surface 90 of the substrate 9 placed on the stage 21 is generally perpendicular to the Z direction and generally parallel to the X and Y directions.

[0074] The stage moving mechanism 22 is a moving mechanism that moves the stage 21 relative to the camera unit 3 and the drawing unit 4 in a horizontal direction (i.e., a direction substantially parallel to the upper surface 90 of the substrate 9). The stage moving mechanism 22 includes a first moving mechanism 23 and a second moving mechanism 24. The second moving mechanism 24 moves the stage 21 linearly along a guide rail in the X direction. The first moving mechanism 23 moves the stage 21 and the second moving mechanism 24 linearly along the guide rail in the Y direction. The drive source for the first moving mechanism 23 and the second moving mechanism 24 is, for example, a linear servo motor, or a motor mounted on a ball screw. The construction of the first moving mechanism 23 and the second moving mechanism 24 can be modified in various ways.

[0075] In the drawing apparatus 1, a stage rotation mechanism may also be provided to rotate the stage 21 around a rotation axis extending in the Z direction. Additionally, a stage lifting mechanism for moving the stage 21 in the Z direction may also be provided in the drawing apparatus 1. For example, a servo motor can be used as the stage rotation mechanism. For example, a linear servo motor can be used as the stage lifting mechanism. The construction of the stage rotation mechanism and the stage lifting mechanism can be modified in various ways.

[0076] The camera unit 3 has multiple (in) arranged in the X direction. Figure 1 The example shown uses two cameras 31. Each camera 31 is supported above the platform 21 and the platform moving mechanism 22 by a head support 30 that spans the platform 21 and the platform moving mechanism 22. One of the two cameras 31 is fixed to the head support 30, while the other camera 31 can move along the X-direction on the head support 30. This allows the distance between the two cameras 31 in the X-direction to be changed. Furthermore, the number of cameras 31 in the imaging unit 3 can be one, or it can be three or more.

[0077] Each camera 31 is a camera or video camera having an image sensor (not shown) and an optical system. Each camera 31 is, for example, an area scan camera for acquiring two-dimensional images. The image sensor includes, for example, multiple CCD (Charge Coupled Device) elements arranged in a matrix. In each camera 31, reflected light from illumination light (not shown) directed to the upper surface 90 of the substrate 9 from a light source is directed to the image sensor via the optical system. The image sensor receives the reflected light from the upper surface 90 of the substrate 9 and acquires an image of an approximately rectangular imaging area. Various light sources, such as LEDs (Light Emitting Diodes), can be used as the light source. Furthermore, each camera 31 can be a line scan camera or other types of cameras.

[0078] The drawing unit 4 has multiple (in) arranged in the X and Y directions. Figure 1 The example shown has five drawing heads 41. Each drawing head 41 is supported above the stage 21 and the stage moving mechanism 22 by a head support 40 that spans the stage 21 and the stage moving mechanism 22. The head support 40 is positioned on the (+Y) side compared to the head support 30 of the camera unit 3. Furthermore, the drawing unit 4 may have one or more drawing heads 41.

[0079] Each drawing head 41 includes a light source, an optical system, and a spatial light modulation element (not shown in the diagram). Various components such as a DMD (Digital Micro Mirror Device) and a GLV (Grating Light Valve) (a registered trademark of Silicon Photonics (Sunnyvale, California)) can be used as the spatial light modulation element. Various light sources such as an LD (Laser Diode) can be used as the light source. The multiple drawing heads 41 have a substantially identical structure.

[0080] In the drawing apparatus 1, modulated (i.e., spatially modulated) light from multiple drawing heads 41 of the drawing unit 4 is irradiated onto the upper surface 90 of the substrate 9, and the substrate 9 is moved in the Y direction by a stage moving mechanism 22. Thus, the irradiated area of ​​the light from the multiple drawing heads 41 is scanned along the Y direction on the substrate 9, and a pattern is drawn relative to the substrate 9. In the following description, the Y direction will also be referred to as the "scanning direction," and the X direction will be referred to as the "width direction." The stage moving mechanism 22 is a scanning mechanism that moves the irradiated area of ​​the light from each drawing head 41 on the substrate 9 along the scanning direction.

[0081] In the drawing apparatus 1, drawing relative to the substrate 9 is performed using a so-called one-pass method. Specifically, the stage 21 is moved relative to multiple drawing heads 41 in the Y direction using the stage moving mechanism 22, and the illumination area of ​​the light from the multiple drawing heads 41 is scanned only once along the Y direction (i.e., the scanning direction) on the upper surface 90 of the substrate 9. Thus, the drawing relative to the substrate 9 is completed. Alternatively, in the drawing apparatus 1, drawing relative to the substrate 9 can also be performed using a multi-pass method, which involves repeatedly moving the stage 21 in the Y direction and stepping it in the X direction. Furthermore, in the case of multi-pass drawing in the drawing apparatus 1, the Y direction is the main scanning direction, and the X direction is the sub-scanning direction. Additionally, the first moving mechanism 23 of the stage moving mechanism 22 is a main scanning mechanism that moves the stage 21 along the main scanning direction, and the second moving mechanism 24 is a sub-scanning mechanism that moves the stage 21 along the sub-scanning direction.

[0082] Figure 3 This diagram illustrates the configuration of the computer 100 included in the control unit 10. The computer 100 is a typical computer including a processor 101, a memory 102, an input / output unit 103, and a bus 104. The bus 104 is a signal circuit connecting the processor 101, the memory 102, and the input / output unit 103. The memory 102 stores various types of information. The memory 102 reads and stores, for example, a program 109 pre-stored in a storage medium 81, which is a program product. The storage medium 81 is, for example, a USB memory or a CD-ROM.

[0083] The processor 101 performs various processes (e.g., numerical calculations or image processing) using the memory 102 and the program 109 stored therein. The input / output unit 103 includes a keyboard 105 and a mouse 106 for receiving input from the operator, and a display 107 for displaying output from the processor 101. Furthermore, the control unit 10 can be a programmable logic controller (PLC) or a circuit board, or a combination of these devices with one or more computers.

[0084] Figure 4 This is a block diagram illustrating the functions of the control unit 10 implemented by executing the aforementioned program 109 using a computer 100. Figure 4 Also shown are the components other than the control unit 10. The control unit 10 includes a storage unit 111, a camera control unit 112, a position detection unit 113, a drawing control unit 114, and a data generation unit 115.

[0085] The storage unit 111 is mainly implemented by the memory 102, which stores various information related to the pattern being drawn by the drawing device 1 in advance. The information stored in the storage unit 111 includes, for example, information sent from the data processing device 6 to the drawing device 1. The data processing device 6 sends, for example, CAD data of a predetermined second pattern drawn on the substrate 9 (hereinafter also referred to as "second CAD data"), and template generation information, which is used as information for generating the template as described later, to the drawing device 1.

[0086] The camera control unit 112, position detection unit 113, drawing control unit 114, and data generation unit 115 are mainly implemented by the processor 101. The camera control unit 112 controls the camera unit 3 and the stage moving mechanism 22 to make the camera unit 3 capture images of the upper surface 90 of the substrate 9 (see reference). Figure 2 The data generation unit 115 acquires a portion of the image of the first pattern (hereinafter also referred to as "the captured image") and sends the captured image to the storage unit 111 to save it. The data generation unit 115 rasterizes the second CAD data stored in the storage unit 111 to generate raster data (hereinafter also referred to as "the second raster data") used by the drawing device 1 to draw the second pattern. The second raster data is, for example, run-length data. In addition, the data generation unit 115 generates a template (i.e., a reference image) used for position detection of the substrate 9.

[0087] The position detection unit 113 detects the stage 21 (see reference 1) by performing pattern matching using the template relative to the image captured by the camera relative to the first pattern described above. Figure 1 The position of the substrate 9 on the substrate (i.e., the relative position of the substrate 9 with respect to the drawing unit 4). Based on the second grid data and the position of the substrate 9 detected by the position detection unit 113, the drawing control unit 114 controls the drawing unit 4 and the stage moving mechanism 22, thereby adjusting the drawing position on the substrate 9 and causing the drawing unit 4 to draw the second pattern relative to the substrate 9.

[0088] Next, refer to Figure 5A as well as Figure 5B The process of drawing a pattern onto a substrate 9 using the drawing apparatus 1 is explained. When drawing relative to the substrate 9, firstly, the substrate 9 is moved onto... Figure 1 The drawing apparatus 1 shown is held by a stage 21 (step S11). The stage 21 is located on the (-Y) side compared to the imaging unit 3 and the drawing unit 4. A first pattern is pre-formed on the upper surface 90 of the substrate 9 held on the stage 21. The upper surface 90 of the substrate 9 is substantially parallel to the X and Y directions.

[0089] Then, using the data generation unit 115 of the control unit 10 (see reference) Figure 4The template used for pattern matching is generated (step S12). In step S12, firstly, template generation information is created in the data processing device 6. The creation of the template generation information in the data processing device 6 will be described later. Then, the second CAD data and the template generation information are sent from the data processing device 6 to the drawing device 1 and stored in the storage unit 111. Thus, the second CAD data and the template generation information are prepared in the drawing device 1 (step S121). The template generation information includes the first CAD data, which is the CAD data of the first pattern, and coordinates indicating the position (hereinafter also referred to as the "matching position") on the first pattern where the pattern matching is performed by the position detection unit 113. In addition, the template generation information also includes template size information indicating the size of the template used for pattern matching.

[0090] In the control unit 10, the data generation unit 115 reads the template generation information stored in the storage unit 111. The data generation unit 115 rasterizes the first CAD data contained in the template generation information to generate first raster data (hereinafter also referred to as "intermediate data"). The first raster data is, for example, run length data.

[0091] Additionally, the data generation unit 115 extracts a region of a predetermined size (i.e., the size shown in the template size information) corresponding to the matching position from the first grid data based on the coordinates of the matching position and the template size information included in the template generation information. For example... Figure 6 As shown, the region extracted from the first raster data (hereinafter also referred to as "extracted region 96") is, for example, 2 mm centered at the matching position 95 indicated by a crosshair. 2 An approximately square-shaped region. Figure 6 The image shows a magnified view of the area near the upper left vertex of the upper left portion of the drawing area 94 (i.e., the vertex on the (-X) and (+Y) sides) of the drawing area 94 on the substrate 9 with the first pattern drawn on it. Furthermore, the extraction area 96 does not necessarily have to be centered on the matching position 95; for example, it can be an approximately square-shaped area with the matching position 95 set as the upper left vertex. Additionally, the shape and size of the extraction area 96 can be varied in many ways.

[0092] The data generation unit 115 generates a template by converting the data of the extraction area 96 extracted from the first raster data into image data in a form that can be used for pattern matching (step S122). Figure 7 This diagram illustrates an example of a template 97 generated by the data generation unit 115. As described above, template 97 includes a portion of the first pattern. Furthermore, the shape of the pattern included in template 97 is not limited to... Figure 7The shape shown can be modified in various ways. In this embodiment, the template is bitmap data. However, the template data can be in a format other than bitmap.

[0093] The template generation information typically includes the coordinates of multiple (e.g., four or more) matching positions 95. These multiple matching positions 95 are pre-defined in the data processing device 6 and included within the template generation information. In step S12, multiple templates 97 corresponding to each of the multiple matching positions 95 are generated by the data generation unit 115 and stored in the storage unit 111.

[0094] Figure 8 This is a diagram illustrating an example of the configuration of multiple mating positions 95 on substrate 9. Figure 8 In the example shown, the four matching positions 95 are respectively disposed in four partial drawing areas 94 located at the four corners of a plurality of partial drawing areas 94 arranged in a matrix on the substrate 9. In addition, in each partial drawing area 94 for which the matching positions 95 are disposed, the matching position 95 is disposed near the corner furthest from the center of the substrate 94 among the four corners of that partial drawing area 94.

[0095] Specifically, in the partial drawing area 94 located at the corner on the (-X) and (+Y) sides (i.e., the outermost partial drawing area 94 in both the width and scanning directions), the matching position 95 is configured adjacent to the corner on the (-X) and (+Y) sides of the partial drawing area 94. Furthermore, the extraction area 96 corresponding to this matching position 95 is also configured adjacent to this corner of the partial drawing area 94. The entire extraction area 96 is located within the partial drawing area 94 (i.e., on the outer periphery and inside the outer periphery of the partial drawing area 94). Preferably, the corner on the (-X) and (+Y) sides of the extraction area 96 overlaps with the corner on the (-X) and (+Y) sides of the partial drawing area 94, and the edges on the (-X) and (+Y) sides of the extraction area 96 overlap with the edges on the (-X) and (+Y) sides of the partial drawing area 94.

[0096] Furthermore, the extraction region 96 can also be separated from the outer periphery of the partial drawing region 94 inwards. In this case, the distance between the (-X) side edge of the extraction region 96 and the (-X) side edge of the partial drawing region 94 is, for example, 2 mm or less (i.e., less than 100% of the length of one side of the extraction region 96), preferably less than 1 mm (i.e., less than 50% of the length of one side of the extraction region 96). The distance between the (+Y) side edge of the extraction region 96 and the (+Y) side edge of the partial drawing region 94 is also the same.

[0097] In the partial drawing region 94 located at the corner on the (+X) and (+Y) sides (i.e., the partial drawing region 94 furthest to the other side in the width direction and furthest to the other side in the scanning direction), the matching position 95 and the extraction region 96 are arranged adjacent to the corner on the (+X) and (+Y) sides of the partial drawing region 94. The entire extraction region 96 is located within the partial drawing region 94. Preferably, the corner on the (+X) and (+Y) sides of the extraction region 96 overlaps with the corner on the (+X) and (+Y) sides of the partial drawing region 94, and the edges on the (+X) and (+Y) sides of the extraction region 96 overlap with the edges on the (+X) and (+Y) sides of the partial drawing region 94, respectively. Furthermore, similarly as described above, the extraction region 96 can also be separated from the outer periphery of the partial drawing region 94 inward. In this case, the distance between the extraction region 96 and the partial drawing region 94 is approximately the same as that between the extraction region 96 and the partial drawing region 94 located on the (-X) and (+Y) sides.

[0098] In the partial drawing region 94 located at the corner on the (+X) and (-Y) sides (i.e., the other side of the partial drawing region 94 in both the width and scanning directions), the matching position 95 and the extraction region 96 are arranged adjacent to the corner on the (+X) and (-Y) sides of the partial drawing region 94. The entire extraction region 96 is located within the partial drawing region 94. Preferably, the corner on the (+X) and (-Y) sides of the extraction region 96 overlaps with the corner on the (+X) and (-Y) sides of the partial drawing region 94, and the edges on the (+X) and (-Y) sides of the extraction region 96 overlap with the edges on the (+X) and (-Y) sides of the partial drawing region 94, respectively. Furthermore, as described above, the extraction region 96 is separated inward from the outer periphery of the partial drawing region 94. In this case, the distance between the extraction region 96 and the partial drawing region 94 is approximately the same as that between the extraction region 96 and the partial drawing region 94 located on the (-X) and (+Y) sides.

[0099] In the partial drawing region 94 located at the corners on both the (-X) and (-Y) sides (i.e., the partial drawing region 94 on the farthest side in the width direction and the farthest side in the scanning direction), the matching position 95 and the extraction region 96 are arranged adjacent to the corners on both the (-X) and (-Y) sides of the partial drawing region 94. The entire extraction region 96 is located within the partial drawing region 94. Preferably, the corners on both the (-X) and (-Y) sides of the extraction region 96 overlap with the corners on both the (-X) and (-Y) sides of the partial drawing region 94, and the edges on both the (-X) and (-Y) sides of the extraction region 96 overlap with the edges on both the (-X) and (-Y) sides of the partial drawing region 94, respectively. Furthermore, as described above, the extraction region 96 is separated inward from the outer periphery of the partial drawing region 94. In this case, the distance between the extraction region 96 and the partial drawing region 94 is approximately the same as that between the extraction region 96 and the partial drawing region 94 located on the (-X) side and the (+Y) side.

[0100] The number and configuration of matching positions 95 on substrate 9 are not limited to Figure 8 The situation shown can be modified in various ways. For example, matching positions 95 can be configured in the partial drawing areas 94 outside the four corner partial drawing areas 94 among multiple partial drawing areas 94. For example, as Figure 9 As shown, two matching positions 95 can be configured in each of the multiple partial drawing regions 94 arranged in a matrix. Figure 9 In the example shown, in each of the multiple partial drawing regions 94 located on the (-Y) side, the matching position 95 is arranged adjacent to the edge on the (-Y) side; in each of the partial drawing regions 94 located on the (+Y) side, the matching position 95 is arranged adjacent to the edge on the (+Y) side. Additionally, in each of the partial drawing regions 94 located on the (-X) side, the matching position 95 is arranged adjacent to the edge on the (-X) side; in each of the partial drawing regions 94 located on the (+X) side, the matching position 95 is arranged adjacent to the edge on the (+X) side.

[0101] In step S12, when generating multiple templates 97 corresponding to multiple matching positions 95 respectively, using... Figure 1 The stage moving mechanism 22 shown moves the substrate 9 and the stage 21 together in the (+Y) direction, moving them downwards from the camera unit 3. Furthermore, step S12 can be performed before the substrate 9 is moved in and held in step S11, or it can be performed in parallel with step S11.

[0102] Then, by utilizing the camera control unit 112 (see reference 112) Figure 4The camera unit 3 and the stage moving mechanism 22 are controlled to capture images of a predetermined size on the substrate 9 corresponding to each matching position 95, obtaining an image including a portion of the first pattern (step S13). This camera area is an approximately rectangular area centered on the matching position 95, provided the substrate 9 is accurately held in the designed position on the stage 21. This camera area has a pair of sides parallel to both the X and Y directions, and is larger than the extraction area 96 described above in both the X and Y directions.

[0103] For example, the imaging area has an approximately rectangular shape that enlarges the extraction area 96 by a predetermined size on the (+X), (-X), (+Y), and (-Y) sides. For example, the lengths of the imaging area in the X and Y directions (i.e., the lengths of the field of view of the camera 31 in the X and Y directions) are 14 mm and 7 mm, respectively. Therefore, even if the position of the substrate 9 on the stage 21 is slightly offset from the designed position, the image captured contains a pattern corresponding to the template 97. In step S13, multiple imaging images corresponding to multiple matching positions 95 are acquired and stored in the storage unit 111. Furthermore, step S13 can be performed before step S12 or in parallel with step S12. In addition, the size of the imaging area can be varied in various ways.

[0104] Next, the position detection unit 113 of the control unit 10 performs pattern matching with respect to the image corresponding to each matching position 95 using the template 97 corresponding to that matching position 95. This pattern matching is performed using a known pattern matching method (e.g., geometric shape pattern matching or normalized correlation search). Then, based on the position of the pattern identical to the template 97 in each image, and the relative position of the substrate 9 and the camera unit 3 when acquiring each image, the position detection unit 113 (see reference 113) performs pattern matching. Figure 4 To detect the position of the substrate 9 on the stage 21 (step S14).

[0105] In step S14, the position of the substrate 9 detected by the position detection unit 113 includes the coordinates of the substrate 9 in the X and Y directions on the stage 21, the orientation of the substrate 9, and information indicating the deformation caused by distortion of the substrate 9. Furthermore, the information indicating the deformation of the substrate 9 includes the shape of the deformed substrate 9 and the positions of the multiple partial drawing areas 94 on the substrate 9.

[0106] In the control unit 10, the data generation unit 115 (see reference) is also used. Figure 4The second CAD data is read from storage unit 111 and rasterized to generate second raster data (step S15). The second raster data is, for example, run length data. Step S15 can be performed after step S14, in parallel with step S14, or after step S14. If step S15 is performed before step S14, for example, step S15 can be performed in parallel with one of steps S11 to S13, between two steps S11 to S14, or before step S11.

[0107] When the second grid data is generated, based on the second grid data and the position of the substrate 9 detected in step S14, the drawing control unit 114 (see reference) is used. Figure 4 The drawing unit 4 and the stage moving mechanism 22 are controlled. As a result, the modulated light described above is irradiated onto the substrate 9, which moves relative to the drawing head 41 of the drawing unit 4 in the Y direction, and a second pattern is drawn on the upper surface 90 of the substrate 9 (step S16). In step S16, based on the position of the substrate 9 detected in step S14, the modulation interval and modulation timing of the light beam irradiated from the drawing unit 4 onto the substrate 9, as well as the scanning position of the light beam on the substrate 9, are mechanically and automatically corrected using correction methods known in the drawing unit 4 and the stage moving mechanism 22. Therefore, the second pattern can be drawn on the first pattern with excellent positional accuracy.

[0108] In the above description, in step S12, the first raster data obtained by rasterizing all of the first CAD data (i.e., the entire first pattern) is used as intermediate data, and the extraction region 96 corresponding to the matching position 95 is extracted from this intermediate data to generate the template 97, but this is not limited to this. For example, in step S12, the intermediate data can be created by rasterizing only a portion of the data that is a part of the first CAD data using the data generation unit 115. In this case, the partial data is CAD data corresponding to a region of a predetermined size (hereinafter also referred to as a "clipping region"), including each matching position 95 in the first pattern. As described above, when multiple matching positions 95 are set, the partial data is CAD data corresponding to a set of multiple clipping regions that correspond to each of the multiple matching positions 95.

[0109] The data processing device 6 pre-sets the positions and sizes of multiple clipping regions and includes them in the template generation information. In other words, the data processing device 6 clips the data corresponding to the clipping regions in the first CAD data and sends it to the drawing device 1.

[0110] Each clipping region, as described above, includes a matching position 95 and the entirety of the extraction region 96 corresponding to that matching position 95. For example, a clipping region has a pair of sides parallel to the X and Y directions, forming an approximately rectangular region having a size greater than or equal to the extraction region 96 in both the X and Y directions. For example, a clipping region has a shape that enlarges the extraction region 96 by only a predetermined size (e.g., the maximum positional offset of the substrate 9 in the X and Y directions) on the (+X), (-X), (+Y), and (-Y) sides. Alternatively, as... Figure 8 As shown, when the matching position 95 is configured only in a portion of the multiple partial drawing areas 94, the clipping area can be the same area as one of the partial drawing areas 94, including the matching position 95. In this case, the aforementioned partial data is CAD data corresponding to multiple partial drawing areas 94, each including one of the multiple matching positions 95 (i.e., the set of partial drawing areas 94 including the matching positions 95). In this way, only a portion of the first CAD data is rasterized in the data generation unit 115, thereby shortening the time required for rasterization.

[0111] Next, the data processing device 6 and the creation of template generation information will be explained. The data processing device 6 is the device that creates the aforementioned template generation information and sends it to the drawing device 1. For example... Figure 10 As shown, the data processing device 6 is a typical computer equipped with a processor 601, a memory 602, an input / output unit 603, and a bus 604. The bus 604 is a signal circuit connecting the processor 601, the memory 602, and the input / output unit 603. The memory 602 stores various types of information. For example, the memory 602 reads and stores a program 609 pre-stored in a storage medium 82, which is a program product. The storage medium 82 is, for example, a USB memory or a CD-ROM.

[0112] The processor 601 performs various processes (e.g., numerical calculations or image processing) using the memory 602, following the program 609 and the like stored in the memory 602. The input / output unit 603 includes a keyboard 605 and a mouse 606 for receiving input from the operator, a display 607 for displaying output from the processor 601, and a transmission unit 608 for sending information to the drawing device 1, etc.

[0113] Figure 11This is a block diagram illustrating the functions achieved by executing the aforementioned program 609 in the data processing device 6. The data processing device 6 includes a storage unit 611, an initial setting unit 612, a matching position determination unit 613, and an information creation unit 614. The storage unit 611 is primarily implemented by a memory 602, which stores various information related to the creation of template generation information in advance. The information stored in the storage unit 611 includes, for example, first CAD data and second CAD data. The initial setting unit 612, the matching position determination unit 613, and the information creation unit 614 are primarily implemented by a processor 601. The initial setting unit 612 sets a temporary matching position on the first pattern. The temporary matching position is an initial position temporarily set on the first pattern to determine the matching position 95. The matching position determination unit 613 determines the matching position 95 based on the temporary matching position. The information creation unit 614 creates template generation information including coordinates representing the matching position 95 determined by the matching position determination unit 613.

[0114] Next, refer to Figure 12 This describes the process of creating template generation information in data processing device 6. Figure 12 Steps S21 to S29 shown are described in detail. Figure 5B The steps shown are steps S121, S21 to S28, and step S29, S29, respectively.

[0115] When creating template generation information, firstly, the initial setting unit 612 (see reference) is used. Figure 11 Set a temporary matching position on the first pattern (step S21). Figure 13 as well as Figure 14 These are diagrams showing examples of the configuration of temporary mating positions 95a on substrate 9. Figure 13 as well as Figure 14 In the diagram, an X-shaped marker is used to indicate a temporary matching position 95a.

[0116] In the data processing device 6, multiple configuration modes for temporary matching positions 95a are prepared, and the designer selects one of these configuration modes. The initial setting unit 612 sets the coordinates of the multiple temporary matching positions 95a according to the configuration mode selected by the designer. Figure 13 This corresponds to a configuration mode (hereinafter also referred to as "first configuration mode") in which temporary matching positions 95a are arranged only at the four corners of the drawing area on the substrate 9 (i.e., the four corners of the smallest rectangle circumscribed by the multiple partial drawing areas 94 arranged in a matrix). The first configuration mode is used to determine Figure 8 The configuration mode for matching position 95 is shown.

[0117] exist Figure 13In the example shown, four temporary matching positions 95a are respectively disposed in four partial drawing areas 94 located at the four corners of a plurality of partial drawing areas 94 arranged in a matrix on the substrate 9. In addition, in each partial drawing area 94 for which the temporary matching positions 95a are disposed, the temporary matching position 95a is disposed near the corner of the partial drawing area 94 that is furthest from the center of the substrate 9.

[0118] Specifically, in the partial drawing area 94 located at the corner on both the (-X) and (+Y) sides, the temporary matching position 95a is arranged adjacent to the corner on both the (-X) and (+Y) sides of the partial drawing area 94. (This is repeated four times in the original text.)

[0119] Figure 14 This corresponds to a configuration mode (hereinafter also referred to as "second configuration mode") in which multiple temporary matching positions 95a are arranged in a matrix along the X and Y directions in the drawing area of ​​substrate 9. The second configuration mode is used to determine... Figure 9 The shown matching position 95. In the second configuration mode, a group of temporary matching positions 950a arranged at approximately equal intervals in the X direction is configured, and the interval in the X direction of the multiple temporary matching position columns 950a is set to a predetermined upper limit value (e.g., 200 mm) or less. Each temporary matching position column 950a is a set of multiple temporary matching positions 95a arranged approximately parallel in the Y direction. Figure 14 Enclosed in double-dotted lines.

[0120] In the second configuration mode, temporary matching position columns 950a are arranged on the (+X) and (-X) sides of the drawing area on the substrate 9, and other temporary matching position columns 950a are arranged at equal intervals between the two temporary matching position columns 950a. Figure 14In the example shown, three temporary mating position rows 950a are provided on the substrate 9. However, if the length of the substrate 9 in the X direction increases, the number of temporary mating position rows 950a increases. Conversely, if the length of the substrate 9 in the X direction decreases, the number of temporary mating position rows 950a increases. Furthermore, the upper limit of the spacing between the multiple temporary mating position rows 950a in the X direction can be appropriately changed; for example, the upper limit of the spacing can be appropriately determined within the range of 50mm to 300mm.

[0121] In each temporary matching position column 950a, a plurality of temporary matching positions 95a arranged along the Y direction are configured at approximately equal intervals. The interval in the Y direction of the plurality of temporary matching positions 95a in each temporary matching position column 950a can be a predetermined fixed value (e.g., 50 mm), or it can be automatically matched to the length of the substrate 9 in the Y direction, or appropriately determined by the designer. In addition, in each temporary matching position column 950a, temporary matching positions 95a can be arranged on the outermost (+Y) side and the outermost (-Y) side of the drawing area on the substrate 9, and a predetermined number of temporary matching positions 95a are arranged at equal intervals between these two temporary matching positions 95a.

[0122] In the data processing device 6, it can be configured to also select configuration modes other than the first configuration mode and the second configuration mode described above. For example, with Figure 14 Similarly, multiple temporary matching position columns 950a are arranged at approximately equal intervals in the X direction. Alternatively, a configuration mode (hereinafter referred to as "the third configuration mode") can be configured where the number of multiple temporary matching position columns 950a is set to a predetermined number (e.g., three). In the third configuration mode, similar to the second configuration mode, temporary matching position columns 950a are also arranged on the closest (+X) and closest (-X) sides of the drawing area on the substrate 9, and other temporary matching position columns 950a are arranged at equal intervals between these two temporary matching position columns 950a. In the third configuration mode, the length of the substrate 9 in the X direction also changes, while the number of temporary matching position columns 950a arranged in the X direction remains unchanged. Furthermore, the number of multiple temporary matching position columns 950a arranged along the X direction can be appropriately changed, for example, appropriately determined to be two to six.

[0123] Then, as Figure 15 As shown, the matching position determination unit 613 (see reference) is used. Figure 11 Set the temporary template region 951a corresponding to each temporary matching position 95a (step S22). Figure 15 In the middle, a magnified view shows the configuration in Figure 8 as well as Figure 9The temporary matching position 95a is located near the corner of the upper left part of the drawing area 94 on both the (-X) and (+Y) sides. The temporary template area 951a is an area of ​​the same size as the template 97 described above. The relative position of the temporary template area 951a with respect to the temporary matching position 95a is the same as the relative position of the extraction area 96 with respect to the matching position 95 described above. The temporary template area 951a is, for example, 2mm centered on the temporary matching position 95a. 2 An approximately square-shaped region.

[0124] Furthermore, in the matching position determination unit 613, a verification area 952a is set centered on the temporary template area 951a, which is larger than the field of view of the camera 31 of the imaging unit 3 (in the above example, an approximately rectangular area of ​​14mm x 7mm) (step S23). The verification area 952a is an approximately rectangular shape with a pair of sides parallel to the X and Y directions, and is larger than the aforementioned field of view in both the X and Y directions. For example, the verification area 952a magnifies the field of view by only a predetermined size (e.g., the maximum positional offset of the substrate 9 in the X and Y directions) on the (+X), (-X), (+Y), and (-Y) sides. When the maximum positional offset is, for example, 3mm, the verification area 952a is an approximately rectangular area of ​​20mm x 13mm. In addition, the size of the verification area 952a can be varied in various ways.

[0125] When step S23 ends, the matching position determination unit 613 confirms the existence of a repeating region in the verification area 952a that represents the same pattern as the temporary template area 951a (step S24). This repeating region is a region with the same shape as the temporary template area 951a located at a different position than the temporary template area 951a.

[0126] Specifically, the matching position determination unit 613 extracts a region (hereinafter referred to as the "comparison region") with the same shape as the temporary template region 951a from the verification region 952a. Based on the first CAD data, it compares the pattern represented by the comparison region with the pattern represented by the temporary template region 951a using a known method. Then, if the two patterns are the same, the comparison region is identified as a duplicate region; if the two patterns are different, the comparison region is identified as not a duplicate region. The matching position determination unit 613 performs the extraction of the comparison region and the pattern comparison of the temporary template region 951a over the entire verification region 952a. If no comparison region identified as a duplicate region appears, it is determined that no duplicate region exists in the verification region 952a. On the other hand, if a comparison region identified as a duplicate region appears during the extraction of the comparison region in the verification region 952a and the pattern comparison of the temporary template region 951a, the matching position determination unit 613 determines that a duplicate region exists in the verification region 952a and stops extracting the comparison region.

[0127] If a repetitive region exists in step S24, the matching position determination unit 613 moves the temporary matching position 95a only a predetermined distance in a predetermined direction (step S25). This predetermined direction is, for example, the X direction or the Y direction. Figure 15 In the example shown, there is almost no drawing area on the (+Y) side and (-X) side of the temporary matching position 95a. Therefore, the movement direction of the temporary matching position 95a is essentially the (-Y) direction or the (+X) direction. Furthermore, this specified distance is, for example, 0.5 to 1 times the length of the temporary template area 951a in the X or Y direction. Moreover, in the case of the temporary matching position 95a located near the center of the substrate 9, the aforementioned movement direction of the temporary matching position 95a can also be set to one of the (-Y), (+Y), (-X), and (+X) directions.

[0128] In this embodiment, such as Figure 16 As shown, the temporary matching position 95a is from Figure 15 The position shown moves only 0.5 times the length of the temporary template region 951a in the Y direction in the (-Y) direction (i.e., the direction parallel to the scanning direction). Figure 16 In the diagram, the temporary matching position 95a after the move is shown by a solid line, and the temporary matching position 95a before the move is shown by a double-dotted line. Then, returning to step S22, the matching position determination unit 613 sets the temporary template area 951a and the verification area 952a corresponding to the new temporary matching position 95a (steps S22, S23). In other words, the matching position determination unit 613 moves the temporary matching position 95a and sets the temporary template area 951a and the verification area 952a again. Figure 16 In the diagram, the newly set temporary template area 951a and the verification area 952a are represented by solid lines, and the temporary template area 951a and the verification area 952a before the reset are represented by double-dotted lines. Then, it is confirmed again that there are no duplicate areas in the verification area 952a (step S24).

[0129] In the data processing apparatus 6, steps S22 to S25 are repeatedly performed until it is confirmed that no duplicate area exists in the verification area 952a. Then, in step S24, if no duplicate area exists in the verification area 952a, the matching position determination unit 613 determines a temporary matching position 95a at this time as the matching position 95 (step S26). In the data processing apparatus 6, steps S22 to S26 are performed for each of the multiple temporary matching positions 95a, and multiple matching positions 95 corresponding to each of the multiple temporary matching positions 95a are determined.

[0130] Subsequently, using Information Creation Department 614 (see reference) Figure 11 Step S27 involves creating template generation information, including the coordinates of the multiple matching positions 95 determined in step S26. As described above, the template generation information also includes first CAD data, second CAD data, and template size information. Additionally, the template generation information may also include, for example, clipping information related to the aforementioned clipping area. The template generation information created in step S27 is transmitted from the data processing device 6 to the transmission unit 608 (see reference 608). Figure 10 The data is sent to the drawing device 1 (step S28) and stored in the storage unit 111 of the drawing device 1 (step S29).

[0131] As described above, the drawing system 5 includes a drawing device 1 and a data processing device 6. The drawing device 1 illuminates a substrate 9 with light to draw a pattern. The data processing device 6 creates template generation information and sends it to the drawing device 1. The drawing device 1 includes a stage 21, a drawing head 41, a scanning mechanism (in the above example, a stage moving mechanism 22), a camera unit 3, a position detection unit 113, a storage unit 111, a data generation unit 115, and a drawing control unit 114. The stage 21 holds the substrate 9, on which a first pattern has been pre-formed on its upper surface 90. The drawing head 41 illuminates the upper surface 90 of the substrate 9 with modulated light. The scanning mechanism moves the stage 21 relative to the drawing head 41 along a scanning direction parallel to the upper surface 90 of the substrate 9 (in the above example, the Y direction). The camera unit 3 captures a portion of the first pattern.

[0132] The position detection unit 113 detects the position of the substrate 9 by performing pattern matching using template 97 relative to the image captured by the imaging unit 3. The storage unit 111 stores second CAD data as CAD data for a second pattern drawn on the first pattern. The data generation unit 115 rasterizes the second CAD data to generate second raster data. The drawing control unit 114 controls the drawing head 41 and the scanning mechanism based on the second raster data and the position of the substrate 9 detected by the position detection unit 113, and executes the drawing of the second pattern onto the substrate 9, which moves relative to the drawing head 41 in the scanning direction.

[0133] The storage unit 111 also stores template generation information, including the coordinates of the matching position 95, which represents the pattern matching performed by the position detection unit 113 on the first pattern. The data generation unit 115 rasterizes the CAD data of the first pattern to create intermediate data, and generates image data of a region of a predetermined size corresponding to the matching position 95 (i.e., the extraction region 96) from the intermediate data as a template 97.

[0134] The data processing device 6 includes an initial setting unit 612, a matching position determination unit 613, and an information creation unit 614. The initial setting unit 612 sets a temporary matching position 95a on the first pattern. The matching position determination unit 613 sets a temporary template area 951a of the same size as the template 97 corresponding to the temporary matching position 95a, and sets a verification area 952a centered on the temporary template area 951a, larger than the field of view of the camera unit 3. The matching position determination unit 613 also checks whether there is a repeating area in the verification area 952a that represents the same pattern as the temporary template area 951a. Then, if a repeating area exists in the verification area 952a, the matching position determination unit 613 repeatedly moves the temporary matching position 95a in a predetermined direction and sets the temporary template area 951a and the verification area 952a again to check whether a repeating area exists. On the other hand, if there is no repeating area in the verification area 952a, the matching position determination unit 613 determines the temporary matching position 95a as the matching position 95. The information creation unit 614 creates template generation information, including the coordinates of the matching position 95 determined by the matching position determination unit 613.

[0135] In this way, in the drawing system 5, when generating the template 97 used for pattern matching at the position of the detection substrate 9, the drawing device 1 does not photograph the first pattern on the substrate 9, but can generate the template 97 from the CAD data of the first pattern. Therefore, when generating the template 97, it is not necessary to accurately place the substrate 9 on the stage 21 at the design position, or to photograph the first pattern on the substrate 9 using the camera unit 3. Therefore, the template 97 can be generated easily and quickly. In addition, the data processing device 6 can automatically determine the position for the above-mentioned pattern matching (i.e., the matching position 95), so the work of determining the matching position 95 by the designer can be omitted. As a result, the workload of the designer required to generate the template can also be reduced.

[0136] As described above, in the data processing apparatus 6, when there are overlapping areas in the verification area 952a, the movement direction of the temporary matching position 95a determined by the matching position determination unit 613 is preferably the scanning direction (Y direction in the above example). Therefore, the multiple matching positions 95 are at the same position in the width direction (X direction in the above example), and thus, when the drawing apparatus 1 captures these multiple matching positions 95, relative movement of the imaging unit 3 in the width direction is not required. As a result, the time required for the drawing apparatus 1 to detect the position of the substrate 9 can be shortened.

[0137] As described above, preferably, the initial setting unit 612 sets a plurality of temporary matching position columns 950a that are arranged at equal intervals in the width direction perpendicular to the scanning direction. These plurality of temporary matching position columns 950a are sets of temporary matching positions 95a arranged in the scanning direction. Furthermore, the interval in the width direction of these plurality of temporary matching position columns 950a is preferably set to a predetermined value or less. This allows an appropriate number of matching positions 95 to be set at appropriate positions on the substrate 9. As a result, the accuracy of position detection of the substrate 9 can be improved.

[0138] Alternatively, as described above, the number of the plurality of temporary matching position columns 950a is preferably a predetermined number. In this case, roughly in the same manner as described above, an appropriate number of matching positions 95 can be set at appropriate positions on the substrate 9, thereby improving the accuracy of the position detection of the substrate 9. Furthermore, by setting the number of temporary matching position columns 950a to a fixed number regardless of the size of the substrate 9, the setting operation of the temporary matching positions 95a can be simplified.

[0139] like Figure 13As shown, when a plurality of partial drawing regions 94 are provided on the upper surface 90 of the substrate 9 in a matrix arrangement in the scanning direction and the width direction perpendicular to the scanning direction, in the partial drawing region 94 that is the closest to the scanning direction and the closest to the width direction (in the above example, the closest to the (+Y) side and the closest to the (-X) side), the temporary matching position 95a is preferably arranged adjacent to the corner of that side in the scanning direction and the side in the width direction (in the above example, the (+Y) side and the (-X) side). Furthermore, in the partial drawing region 94 that is the closest to the scanning direction and the other closest to the width direction (in the above example, the closest to the (+Y) side and the closest to the (+X) side), the temporary matching position 95a is preferably arranged adjacent to the corner of that side in the scanning direction and the other side in the width direction (in the above example, the (+Y) side and the (+X) side). Furthermore, in the partial drawing area 94 that is the furthest side in the scanning direction and the furthest side in the width direction (in the above example, the furthest (-Y) side and the furthest (+X) side), the temporary matching position 95a is preferably configured adjacent to the corner of the furthest side in the scanning direction and the furthest side in the width direction (in the above example, the (-Y) side and the (+X) side). Then, in the partial drawing area 94 that is the furthest side in the scanning direction and the furthest side in the width direction (in the above example, the furthest (-Y) side and the furthest (-X) side), the temporary matching position 95a is preferably configured adjacent to the corner of the furthest side in the scanning direction and the furthest side in the width direction (in the above example, the (-Y) side and the (-X) side).

[0140] In this way, four temporary matching positions 95a are arranged at the four corners of the smallest rectangle that is circumscribed by multiple partial drawing areas 94 arranged in a matrix on the substrate 9, and four matching positions 95 are arranged in the area near these four corners. Thus, the area where the second pattern is drawn can be substantially enclosed by these four matching positions 95. As a result, the substantial area where the second pattern is drawn can be aligned with high precision, improving the drawing accuracy of the second pattern.

[0141] The number and configuration of matching positions 95 on substrate 9 are not limited to Figure 8 as well as Figure 9 The situation shown can be modified in various ways. For example, such as Figure 17As shown, in the four corner partial drawing regions 94 located in a matrix arrangement of multiple partial drawing regions 94, the matching positions 95 within each partial drawing region 94 can also be the same relative to each partial drawing region 94 (for example, setting the relative coordinates of the corners on the (-X) and (+Y) sides of the partial drawing region 94 as the origin). Figure 17 In the example shown, in each of the four partial drawing regions 94, the matching position 95 is configured adjacent to the corner of the partial drawing region 94 on the (-X) side and (+Y) side.

[0142] In this case, in the data generation unit 115 of the drawing device 1, instead of extracting four extraction regions 96 corresponding to the four matching positions 95 and generating four templates 97, one template 97 is generated corresponding to the matching position 95 of one of the partial drawing regions 94 located at the four corners. Then, the pattern matching in the matching positions 95 of the four partial drawing regions 94 performed by the position detection unit 113 shares this one template 97. As a result, the time required to generate the template 97 can be shortened.

[0143] Furthermore, in the initial setting unit 612 of the data processing device 6, a temporary matching position 95a is set only for one of the four partial drawing areas 94. In the matching position determination unit 613, a matching position 95 within that one partial drawing area 94 is determined based on the temporary matching position 95a. Then, for the remaining three partial drawing areas 94, the matching position 95 having the same relative position as the matching position 95 with respect to one partial drawing area 94 is determined by the matching position determination unit 613. That is, for the remaining three partial drawing areas 94, the setting of the temporary matching position 95a is not performed, and the determination of the matching position 95 based on the temporary matching position 95a is also omitted. As a result, the time required to create template generation information including the coordinates of the matching position 95 can be shortened.

[0144] In addition, Figure 17 The example shown illustrates the case where matching positions 95 are configured at the same position in each of the four corner partial drawing regions 94 located in multiple partial drawing regions 94. However, the same effect is achieved when matching positions 95 are configured at the same position in two or more partial drawing regions 94 that are unrelated to their positions in the multiple partial drawing regions 94.

[0145] That is, in two or more partial drawing areas 94 among a plurality of partial drawing areas 94, when the relative positions of the matching positions 95 in each partial drawing area 94 are the same, the data generation unit 115 generates a template 97 corresponding to the matching position 95 of one of the two or more partial drawing areas 94. The pattern matching in the matching positions 95 of the two or more partial drawing areas 94 performed by the position detection unit 113 preferably uses the same template 97. As a result, the time required to generate the template 97 can be shortened.

[0146] Furthermore, the matching position determination unit 613 sets a temporary matching position 95a in one of the two or more partial drawing areas 94, and determines the matching position 95 within that partial drawing area 94 based on the temporary matching position 95a. Then, preferably, in the other partial drawing areas 94 among the two or more partial drawing areas 94, the matching position 95 in the other partial drawing areas 94 is determined in such a way that the relative position with respect to the other partial drawing areas 94 is the same as the relative position of the matching position 95 with respect to one partial drawing area 94. This shortens the time required to create template generation information.

[0147] In the above description, during the process of the data processing device 6 determining the matching position 95, steps S22 to S25 are repeated until it is confirmed that there is no duplicate area in the verification area 952a. However, the number of repetitions of steps S22 to S25 can be limited to a predetermined upper limit. In this case, if steps S22 to S25 reach the upper limit without determining the matching position 95, then, for example, on the display 607 (refer to...), ... Figure 10 This situation is displayed and the designer is notified. When the designer confirms the missing position of the matching position 95 on the substrate 9 (i.e., the position of the matching position 95 has not been determined) and determines that the impact of the missing position on the alignment process is small, the data processing device 6 continues to create template generation information even when the matching position 95 is missing. In this case, the drawing device 1 does not perform pattern matching for the missing position.

[0148] On the other hand, when designers determine that the missing position has a significant impact on the alignment process, they will place the missing position in an area (e.g., 5mm away from the missing position). 2The appropriate position within the range is determined as the matching position 95, and the coordinates of this matching position 95 are included in the template generation information. The aforementioned appropriate position refers to a location in the verification area 952a where, when this position is set as a temporary matching position 95a, there is no repeating area in the verification area 952a that represents the same pattern as the temporary template area 951a. The designer determines whether such a repeating area exists by visual inspection or the like. In this way, by including the coordinates of other matching positions 95 determined by the designer in the template generation information, it is possible to prevent the absence of templates 97 at high-importance locations such as the corners of the drawing area on the substrate 9. As a result, it is possible to suppress the decrease in the accuracy of the position detection of the substrate 9.

[0149] As described above, the method for drawing a pattern by irradiating a substrate with light includes: a step of holding a substrate 9 on its upper surface 90 with a first pattern pre-formed thereon (step S11); a step of generating a template 97 for position detection of the substrate 9 (step S12); a step of photographing a portion of the first pattern (step S13); a step of detecting the position of the substrate 9 by matching the pattern using the template 97 with the photographic image obtained in step S13 (step S14); and a step of rasterizing the CAD data of the second pattern drawn on the first pattern, i.e., the second CAD data, to generate a second grid. The data processing step (step S15); and the process of drawing a second pattern onto the substrate 9, which is moving relative to the drawing head 41 in the scanning direction, by controlling the drawing head 41 and the scanning mechanism (in the above example, the stage moving mechanism 22) based on the second grid data and the position of the substrate 9 detected in step S14 (step S16), wherein the drawing head 41 irradiates modulated light onto the upper surface 90 of the substrate 9, and the scanning mechanism moves the substrate 9 relative to the drawing head 41 in a scanning direction (in the above example, the Y direction) parallel to the upper surface 90 of the substrate 9.

[0150] Step S12 includes: a process of preparing coordinates representing the matching position 95 on the first pattern for pattern matching (step S121); and a process of rasterizing the CAD data of the first pattern to create intermediate data, and generating image data of a region of a specified size corresponding to the matching position 95 from the intermediate data as a template 97 (step S122).

[0151] Step S121 includes: setting a temporary matching position 95a on the first pattern (step S21); setting a temporary template area 951a of the same size as the template 97 corresponding to the temporary matching position 95a; setting a verification area 952a larger than the camera field of view in step S13 with the temporary template area 951a as the center; confirming in the verification area 952a whether there is a repeating area representing the same pattern as the temporary template area 951a; if there is a repeating area, repeatedly moving the temporary matching position 95a in a predetermined direction to set the temporary template area 951a and the verification area 952a again, and confirming whether there is a repeating area; if there is no repeating area, deciding the temporary matching position 95a as the matching position 95 (steps S22 to S26); and creating template generation information including the coordinates of the matching position 95 determined in steps S22 to S26 (step S27). Thus, similarly to the above, the template 97 can be generated easily and quickly, and the workload of the designer required to generate the template can also be reduced.

[0152] In the above example, the drawing device 1 has a program 609 that stores template generation information in advance, and the computer 100 of the drawing device 1 has a program 109 that stores template 97 in advance, but this is not the only example. For instance, the programs 109 and 609 can be imported (i.e., assembled) from a drawing system 5 that has already been used. In this case, by having the data processing device 6 execute the program 609, the following steps are performed: a step of setting a temporary matching position 95a on the first pattern (step S21); setting a temporary template area 951a of the same size as the template 97 corresponding to the temporary matching position 95a; setting a verification area 952a centered on the temporary template area 951a that is larger than the field of view of the camera unit 3; confirming whether there is a repeating area in the verification area 952a that represents the same pattern as the temporary template area 951a; if there is a repeating area, repeatedly moving the temporary matching position 95a in a predetermined direction to set the temporary template area 951a and the verification area 952a again, and confirming whether there is a repeating area; if there is no repeating area, determining the temporary matching position 95a as the matching position 95 (steps S22 to S26); and creating template generation information including the coordinates of the matching position 95 determined in steps S22 to S26 (step S27).

[0153] Therefore, similarly to the above, the workload required for generating the template can also be reduced. Furthermore, the computer 100 executes the aforementioned program 109, whereby the data generation unit 115 rasterizes the CAD data of the first pattern to create intermediate data, and generates image data from this intermediate data for a region of a predetermined size corresponding to the matching position 95 (i.e., the extraction region 96), which serves as the template 97. Thus, similarly to the above, the template 97 can be generated easily and quickly.

[0154] Various modifications can be made to the above-mentioned drawing system 5, drawing method, and programs 109 and 609.

[0155] For example, in the above example, it is described that the upper surface 90 of the substrate 9 is provided with multiple approximately rectangular drawing areas 94 divided by grid-like predetermined dividing lines 93, but if... Figure 18 As shown, multiple drawing regions 92, divided into approximately rectangular shapes by dividing lines 91, can be set on the upper surface 90 of the substrate 9, and multiple partial drawing regions 94 arranged in a matrix within each drawing region 92 in the same configuration. In this case, after determining the matching position relative to one drawing region 92 using the same actions as S21 to S26 described above, the matching positions in other drawing regions 92 can be determined in such a way that the relative position of the matching position with respect to that one drawing region 92 is the same, and template generation information can be created. Therefore, compared to calculating the matching positions for all drawing regions 92, the time required to create template generation information can be shortened.

[0156] Furthermore, for example, in the above example, it was described that the drawing was performed relative to one main surface of the substrate 9, but the drawing device 1 can also be used to draw the pattern relative to both main surfaces of the substrate 9. In this case, when drawing relative to the other main surface of the substrate 9, the same as above, the data processing device 6 automatically creates a template for pattern matching from the CAD data of the pattern previously formed on the other main surface.

[0157] In step S24 above, if there is a duplicate area in the verification area 952a that overlaps with the temporary template area 951a, the movement direction of the temporary matching position 95a in step S25 is not limited to the X or Y direction, and can be changed in various ways. For example, the temporary matching position 95a can also move in both the X and Y directions (i.e., tilted). Alternatively, the temporary matching position 95a can also be moved in a spiral shape centered on the initially set temporary matching position 95a.

[0158] It is not necessary to set multiple partial drawing areas 94 on the substrate 9. In addition, the substrate 9 does not have to be a printed substrate. In the drawing apparatus 1, for example, it can be drawn on a glass substrate for a flat panel display device such as a semiconductor substrate, a glass substrate for a photomask, or a substrate for a solar cell panel.

[0159] The above-described embodiments and their variations can be appropriately combined as long as they do not contradict each other.

[0160] The invention has been described and illustrated in detail, but the description is illustrative only and not limiting. Therefore, various modifications can be achieved without departing from the scope of the invention.

Claims

1. A drawing system, characterized in that, have: A drawing apparatus for drawing patterns by irradiating a substrate with light; and The template generation information is created and sent to the data processing unit of the drawing device. The drawing device includes: A stage that holds the substrate on which a first pattern has been pre-formed on its upper surface; A drawing head that illuminates the upper surface of the substrate with modulated light; A scanning mechanism that moves the stage relative to the drawing head in a scanning direction parallel to the upper surface of the substrate; A camera unit that captures a portion of the first pattern; The position detection unit detects the position of the substrate by performing pattern matching using a template relative to the image captured by the camera unit; The storage unit stores second CAD data, which is the CAD data of a second pattern drawn on the first pattern; The data generation unit generates second raster data by rasterizing the second CAD data; as well as The drawing control unit controls the drawing head and the scanning mechanism based on the second grid data and the position of the substrate detected by the position detection unit, and performs the drawing of the second pattern on the substrate that is moving relative to the drawing head in the scanning direction. The storage unit also stores template generation information, including coordinates representing the matching position on the first pattern obtained by the position detection unit. The data generation unit rasterizes the CAD data of the first pattern to create intermediate data, and generates image data of a region of a specified size corresponding to the matching position from the intermediate data as the template. The data processing device includes: An initial setting section for setting temporary matching positions on the first pattern; The matching position determination unit sets a temporary template area of ​​the same size as the template corresponding to the temporary matching position, sets a verification area centered on the temporary template area that is larger than the camera field of view of the camera unit, and checks whether there is a repeating area in the verification area that represents the same pattern as the temporary template area. If there is a repeating area, the temporary matching position is repeatedly moved in a predetermined direction and the temporary template area and the verification area are set again to check whether there is a repeating area. If there is no repeating area, the temporary matching position is determined as the matching position. as well as The information creation unit creates template generation information, including coordinates representing the matching position determined by the matching position determination unit.

2. The drawing system according to claim 1, characterized in that, In the presence of the repeated region, the direction of movement of the temporary matching position determined by the matching position determination unit is the scanning direction.

3. The drawing system according to claim 1, characterized in that, The initial setting unit sets a group of temporary matching positions in which multiple temporary matching position columns are arranged at equal intervals in a width direction perpendicular to the scanning direction. The intervals in the width direction of the multiple temporary matching position columns are set to a value below a predetermined value. The multiple temporary matching position columns are sets of temporary matching positions arranged in the scanning direction.

4. The drawing system according to claim 1, characterized in that, The initial setting unit is configured to set a group of temporary matching positions in which multiple temporary matching position columns are arranged at equal intervals in a width direction perpendicular to the scanning direction. The number of the multiple temporary matching position columns is set to a predetermined number, and the multiple temporary matching position columns are sets of temporary matching positions arranged in the scanning direction.

5. The drawing system according to any one of claims 1 to 4, characterized in that, A plurality of partial drawing areas are provided on the upper surface of the substrate. These partial drawing areas are arranged in a matrix in the scanning direction and in the width direction perpendicular to the scanning direction, and the same pattern is drawn in each partial drawing area. The initial setting unit sets a temporary matching position in one of the multiple partial drawing areas. The matching position determination unit determines the matching position in the one partial drawing area based on the temporary matching position, and in other partial drawing areas among the plurality of partial drawing areas, determines the matching position in other partial drawing areas in such a way that the relative position with respect to the other partial drawing areas is the same as the relative position of the matching position with respect to the one partial drawing area.

6. The drawing system according to any one of claims 1 to 4, characterized in that, The upper surface of the substrate has a plurality of partial drawing areas arranged in a matrix in the scanning direction and in the width direction perpendicular to the scanning direction. In the partial drawing area that is furthest to the side in both the scanning direction and the width direction among the plurality of partial drawing areas, the temporary matching position is configured adjacent to the corner of one side in both the scanning direction and the width direction. In the partial drawing area that is furthest to the side in the scanning direction and furthest to the side in the width direction among the plurality of partial drawing areas, the temporary matching position is configured adjacent to the corner of one side in the scanning direction and the other side in the width direction. In the partial drawing area that is furthest to the other side in the scanning direction and furthest to the other side in the width direction among the plurality of partial drawing areas, the temporary matching position is configured adjacent to the corner of the other side in the scanning direction and the other side in the width direction. In the partial drawing area on the farthest side in the scanning direction and the farthest side in the width direction among the plurality of partial drawing areas, the temporary matching position is configured adjacent to the corner of the other side in the scanning direction and the other side in the width direction.

7. The drawing system according to any one of claims 1 to 4, characterized in that, The data processing device edits a portion of the data and sends it to the drawing device. This portion of the data is CAD data corresponding to a specified area in the first pattern, including the matching position. The data generation unit of the drawing device rasterizes only the portion of the data to create the intermediate data.

8. The drawing system according to claim 7, characterized in that, The upper surface of the substrate has a plurality of partial drawing areas arranged in a matrix in the scanning direction and in the width direction perpendicular to the scanning direction. The data corresponds to a portion of the drawing area, including the matching position.

9. The drawing system according to any one of claims 1 to 4, characterized in that, The template generation information also includes coordinates representing other matching positions determined by the designer.

10. A drawing method for drawing a pattern by irradiating a substrate with light, the drawing method being characterized by comprising: a) Process: Maintaining a substrate with a first pattern pre-formed on its upper surface; b) Step: Generate a template for position detection of the substrate; c) Step: Photograph a portion of the first pattern; Step d) involves detecting the position of the substrate by performing pattern matching using the template relative to the camera image acquired in step c). e) A step of rasterizing the second CAD data to generate second raster data, wherein the second CAD data is the CAD data of a second pattern drawn on the first pattern; and In step f), the drawing head and scanning mechanism are controlled based on the second grid data and the position of the substrate detected in step d), and the second pattern is drawn onto the substrate, which is moving relative to the drawing head in the scanning direction. The drawing head illuminates the upper surface of the substrate with modulated light, and the scanning mechanism moves the substrate relative to the drawing head in the scanning direction parallel to the upper surface of the substrate. The process described in step b) includes: b1) Step, preparing template generation information including coordinates representing the matching positions on the first pattern; and Step b2) involves rasterizing the CAD data of the first pattern to create intermediate data, and generating image data of a specified size region corresponding to the matching position from the intermediate data as the template. The b1) process includes: b3) Step, setting a temporary matching position on the first pattern; Step b4) involves setting a temporary template area of ​​the same size as the template corresponding to the temporary matching position, and setting a verification area centered on the temporary template area that is larger than the camera field of view in step c). The verification area is then used to confirm whether there is a repeating area representing the same pattern as the temporary template area. If a repeating area exists, the temporary matching position is repeatedly moved in a predetermined direction to re-set the temporary template area and the verification area to confirm the existence of the repeating area. If no repeating area exists, the temporary matching position is determined as the matching position. Step b5) creates template generation information including coordinates representing the matching position determined in step b4).

11. A storage medium storing a program, said program being executed in a drawing system that draws a pattern by irradiating a substrate with light, the storage medium being characterized in that, The drawing system has the following features: A drawing apparatus for drawing patterns by irradiating a substrate with light; and The template generation information is created and sent to the data processing unit of the drawing device. The drawing device includes: A stage that holds a substrate on which a first pattern is pre-formed on its upper surface; A drawing head that illuminates the upper surface of the substrate with modulated light; A scanning mechanism that moves the stage relative to the drawing head in a scanning direction parallel to the upper surface of the substrate; A camera unit that captures a portion of the first pattern; The position detection unit detects the position of the substrate by performing pattern matching using a template relative to the image captured by the camera unit; The storage unit stores second CAD data, which is the CAD data of a second pattern drawn on the first pattern; The data generation unit generates second raster data by rasterizing the second CAD data; as well as The drawing control unit controls the drawing head and the scanning mechanism based on the second grid data and the position of the substrate detected by the position detection unit, and performs the drawing of the second pattern on the substrate that is moving relative to the drawing head in the scanning direction. The program is executed by a computer. The following steps are performed in the data processing apparatus: g) Step, setting a temporary matching position on the first pattern; h) Step: Set a temporary template area of ​​the same size as the template corresponding to the temporary matching position; set a verification area centered on the temporary template area that is larger than the field of view of the camera unit; confirm whether there is a repeating area in the verification area that represents the same pattern as the temporary template area; if there is a repeating area, repeatedly move the temporary matching position in a predetermined direction and set the temporary template area and the verification area again to confirm whether there is a repeating area; if there is no repeating area, determine the temporary matching position as the matching position. Step i) Creates template generation information including coordinates representing the matching position determined in step h). In the data generation unit of the drawing device, step j) is performed, in which the CAD data of the first pattern is rasterized to create intermediate data, and image data of a region of a specified size corresponding to the matching position is generated from the intermediate data as the template.

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