Device cleaning device for semiconductor integrated circuits

Abstract

The present invention provides a device cleaning apparatus for semiconductor integrated circuits, and relates to the technical field of semiconductor integrated device production. The device cleaning apparatus for semiconductor integrated circuits comprises a supporting base plate, a first supporting plate is fixedly connected to the top of the supporting base plate, a rotating disk is provided on the top of the first supporting plate, a cleaning box is fixedly connected to the top of the rotating disk, and a placing table is provided inside the cleaning box. The device cleaning apparatus for semiconductor integrated circuits starts a first electric push rod, so that the first electric push rod pushes a connecting frame, so that the cleaning disk outside the connecting frame contacts the device, and a spring is fixedly connected between the pushing frame and the connecting frame, so that the cleaning disk can be retracted by the spring to avoid the cleaning disk from causing damage to the device, and the device is fully cleaned by combining the nozzle and the cleaning disk.

Description

Technical Field

[0001] The invention relates to a semiconductor device cleaning device, in particular to a device cleaning device for semiconductor integrated circuits, belonging to the technical field of semiconductor integrated device production. Background Art

[0002] With the development of planar flash memory, the production process of semiconductors has made great progress. However, in recent years, the development of planar flash memory has encountered various challenges: physical limits, existing development technology limits, and storage electron density limits. In this context, in order to solve the difficulties encountered by planar flash memory and pursue lower production costs per unit storage unit, various three-dimensional (3D) flash memory structures have emerged, such as 3DNOR (3D Not-or) flash memory and 3D NAND (3D Not-and) flash memory.

[0003] During the production process of semiconductor integrated circuit devices, they need to be cleaned by equipment. The following problems exist when cleaning semiconductor integrated circuit devices:

[0004] 1. The nozzles used for cleaning are fixed and cannot clean the device surface in all directions. In addition, flushing is used during cleaning, and a single cleaning method cannot achieve efficient cleaning of the device.

[0005] 2. After the cleaning is completed, the device needs to be picked up manually for the next step of operation. The drying and picking of the device after cleaning cannot be integrated, and human participation is required, which will cause secondary contamination to the device after cleaning. Summary of the invention

[0006] 1. Technical issues to be resolved

[0007] The purpose of the present invention is to provide a device cleaning apparatus for semiconductor integrated circuits in order to solve the above-mentioned problems, so as to solve the problem that in the prior art, the cleaning nozzles are fixed during cleaning and cannot clean the device surface in all directions. Moreover, during cleaning, a flushing method is adopted, and a single cleaning method cannot achieve an efficient cleaning effect on the device. When the cleaning is completed, the device needs to be manually picked up for the next step of operation. The drying and picking up of the device after cleaning cannot be integrated, and personnel participation is required, which will cause secondary contamination to the device after cleaning.

[0008] (II) Technical solution

[0009] To achieve the above objectives, the present invention is implemented through the following technical solutions: a device cleaning device for semiconductor integrated circuits, comprising a supporting base plate, a first supporting plate fixedly connected to the top of the supporting base plate, a rotating disk provided on the top of the first supporting plate, a cleaning box fixedly connected to the top of the rotating disk, a placing table provided inside the cleaning box, a first threaded rod fixedly connected to the bottom of the placing table, the first threaded rod sequentially penetrates the cleaning box and the rotating disk, the first threaded rod is rotatably connected to the cleaning box, the first threaded rod is threadedly connected to the rotating disk, an adjusting component for lifting is provided on the outer side of the first threaded rod, a supporting seat is fixedly connected to the top of the cleaning box, an outer gear ring is rotatably connected to the top of the supporting seat, a cleaning component is provided on the outer side of the outer gear ring, a second supporting plate is fixedly connected to the top of the supporting base plate, a rotating disk is provided on the top of the second supporting plate, a rotating rod is connected to the bottom of the rotating disk, the rotating rod penetrates the second supporting plate and is rotatably connected to the second supporting plate, a second electric push rod and a third electric push rod are fixedly connected to the bottom of the rotating disk, a clamping component is provided at the bottom of the third electric push rod, and a storage frame is fixedly connected to the top of the supporting base plate.

[0010] Preferably, a rotating rod is fixedly connected to the bottom of the rotating disk, and the rotating rod passes through the first support plate and is rotatably connected to the first support plate. A second motor is fixedly connected to the top of the support bottom plate, and the output shaft of the second motor is fixedly connected to the rotating rod. The rotating rod is driven to rotate by the second motor, so that the rotating rod drives the rotating disk to rotate, and the cleaning box on the rotating disk is moved.

[0011] Preferably, the adjustment assembly includes a first threaded barrel, the first threaded barrel is threadedly connected to the outside of the first threaded rod, the first threaded barrel is rotatably connected to the first support plate, and the first gear is fixedly connected to the outside of the first threaded barrel.

[0012] Preferably, the adjusting assembly also includes a fixed gear ring, which is meshed with the first gear, a limiting ring is fixedly connected to the top of the rotating disk, a limiting block is fixedly connected to the inner wall of the limiting ring, a sliding groove is opened on the outer side of the first threaded rod, the limiting block is arranged inside the sliding groove and is slidably connected to the first threaded rod, and the first threaded rod is limited by the limiting block so that the first threaded rod cannot rotate and can only move upward.

[0013] Preferably, the cleaning assembly includes a mounting plate, which is fixedly connected to the outside of the cleaning box, the outside of the outer gear ring is meshingly connected to a second gear, the inner wall of the outer gear ring is fixedly connected to a connecting plate, one side of the connecting plate is fixedly connected to a first electric push rod, and one end of the first electric push rod is fixedly connected to a connecting frame.

[0014] Preferably, the cleaning assembly also includes a pushing frame, which is arranged inside the connecting frame and slidably connected to the connecting frame, one end of the pushing frame is fixedly connected to a cleaning disk, a spring is fixedly connected between the connecting frame and the pushing frame, and a first motor is fixedly connected to the bottom of the mounting plate, and the output shaft of the first motor is fixedly connected to the second gear, and the second gear is driven to rotate by the first motor, so that the outer gear ring rotates around the cleaning box to achieve a comprehensive cleaning effect.

[0015] Preferably, a nozzle is fixedly connected to the inner wall of the support seat, a mounting bracket is fixedly connected to the outer side of the cleaning box, a water tank is fixedly connected to the bottom of the mounting bracket, a water pump is installed inside the water tank, one end of the nozzle is fixedly connected to a retractable water pipe, one end of the retractable water pipe is connected to the water outlet end of the water pump, a water outlet pipe is fixedly connected between the cleaning box and the water tank, a filtering device is installed on the outer side of the water outlet pipe, and the used cleaning liquid is purified by the filtering device.

[0016] Preferably, a third motor is fixedly connected to the top of the support base plate, the output shaft of the third motor is fixedly connected to the rotating rod, the bottom of the second electric push rod is fixedly connected to a connecting disk, the bottom of the connecting disk is fixedly connected to an air outlet head, the top of the rotating disk is fixedly connected to a blowing device, and an air outlet pipe is connected between the air outlet end of the blowing device and the air outlet head.

[0017] Preferably, the clamping assembly includes a fixed frame, the fixed frame is fixedly connected to the bottom of the third electric push rod, the bottom of the fixed frame is rotatably connected to a transmission gear ring, the transmission gear ring is fixedly connected to a bevel gear ring, the outer side of the bevel gear ring is meshed and connected to two bevel gears, the two bevel gears are arranged opposite to each other, one side of the bevel gear is fixedly connected to a first telescopic rod, the outer side of the first telescopic rod is rotatably connected to a vertical plate, the vertical plate is fixedly connected to the fixed frame, the outer side of the first telescopic rod is meshed and connected to a second threaded cylinder, one end of the second threaded cylinder is fixedly connected to a clamping plate, a second telescopic rod is fixedly connected between the clamping plate and the vertical plate, the clamping plate is limited by the second telescopic rod to allow the clamping plate to move horizontally.

[0018] Preferably, the clamping assembly also includes a transverse plate, which is fixedly connected to the outside of the fixed frame, a fourth motor is fixedly connected to the top of the transverse plate, a transmission gear is meshedly connected to the outside of the transmission gear ring, and the output shaft of the fourth motor is fixedly connected to the transmission gear.

[0019] The present invention provides a device cleaning apparatus for semiconductor integrated circuits, which has the following beneficial effects:

[0020] 1. The device for cleaning semiconductor integrated circuits starts a first electric push rod to push a connection frame, so that a cleaning disk on the outside of the connection frame contacts the device, and a brush on the outside of the cleaning disk contacts the device, so as to brush away dust on the device. A spring is fixedly connected between the push frame and the connection frame, and the cleaning disk can be retracted by the spring to avoid damage to the device by the cleaning disk. The device can be fully cleaned by combining a nozzle and a cleaning disk.

[0021] 2. The device for cleaning semiconductor integrated circuits, when the first gear rotates, drives the fixedly connected first threaded cylinder to rotate. Since the first threaded cylinder is threadedly connected to the first threaded rod, a slide groove is opened on the outside of the first threaded rod, and a limit ring is sleeved on the outside of the first threaded rod. The limit block fixedly connected to the inner wall of the limit ring is set in the slide groove opened on the outside of the first threaded rod, and the first threaded rod is limited to make the first threaded rod rise, so that the placement table at the top of the first threaded rod lifts the device from the cleaning box, and as the rotating disk rotates, the device is pushed to the top of the cleaning box, and the cleaning box moves to the lower part of the turntable, so that the device is automatically pushed out of the cleaning box, and the next step is achieved, which is convenient for subsequent drying operations.

[0022] 3. The device for cleaning semiconductor integrated circuits starts the fourth motor so that the output shaft of the fourth motor drives the transmission gear to rotate. When the transmission gear rotates, it drives the meshing transmission gear ring to rotate. When the transmission gear ring rotates, it drives the fixedly connected bevel gear ring to rotate. The rotation of the bevel gear ring drives the meshing bevel gear to rotate. When the bevel gear rotates, it drives the fixedly connected first telescopic rod to rotate. The first telescopic rod drives the threaded second threaded cylinder to rotate. Since the second threaded cylinder is fixedly connected to the clamping plate, and the second telescopic rod is fixedly connected between the clamping plate and the vertical plate, the two clamping plates move relative to each other to clamp and fix the device. Then, by starting the third motor to rotate the turntable, the device is placed inside the storage frame for storage, thereby taking out and storing the device, avoiding pollution caused by manual removal, saving labor costs, and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0024] Figure 2 It is a schematic diagram of the structure of the rotating disk of the present invention;

[0025] Figure 3 It is a schematic diagram of the structure of the cleaning box of the present invention;

[0026] Figure 4 This is a schematic diagram of the structure of the outer gear ring of the present invention;

[0027] Figure 5 This is a schematic diagram of the connecting plate structure of the present invention;

[0028] Figure 6 This is a schematic diagram of the structure of the cleaning disk of the present invention;

[0029] Figure 7 This is a schematic diagram of the structure of the placement table of the present invention;

[0030] Figure 8 This is a schematic diagram of the structure of the connection disk of the present invention;

[0031] Fig. 9 It is a schematic diagram of the fixing frame structure of the present invention;

[0032] Fig.10 This is a schematic diagram of the transmission gear ring structure of the present invention;

[0033] Fig.11 It is a schematic diagram of the structure of the second threaded barrel of the present invention;

[0034] Fig.12 This is a schematic diagram of the structure of the first support plate of the present invention;

[0035] Fig.13 It is a schematic diagram of the structure of the turntable of the present invention;

[0036] Fig.14 It is a schematic diagram of the structure of the bevel gear ring of the present invention.

[0037] In the figure: 1, supporting bottom plate; 2, first supporting plate; 3, rotating rod; 4, rotating disk; 5, cleaning box; 6, placing table; 7, first threaded rod; 8, first threaded cylinder; 9, limiting ring; 10, limiting block; 11, first gear; 12, fixed gear ring; 13, mounting plate; 14, second gear; 15, outer gear ring; 16, connecting plate; 17, first electric push rod; 18, connecting frame; 19, pushing frame; 20, cleaning disk; 21, spring; 22, mounting frame; 23, retractable water pipe; 24, water outlet pipe; 25, supporting seat; 26, first motor; 27, second motor ; 28. Second support plate; 29. ​​Turntable; 30. Connecting plate; 31. Air outlet; 32. Second electric push rod; 33. Air outlet pipe; 34. Blowing device; 35. Third electric push rod; 36. Fixed frame; 37. Horizontal plate; 38. Transmission gear; 39. Bevel gear ring; 40. Vertical plate; 41. First telescopic rod; 42. Second threaded cylinder; 43. Clamping plate; 44. Second telescopic rod; 45. Bevel gear; 46. Filter device; 47. Third motor; 48. Storage frame; 49. Fourth motor; 50. Turntable; 51. Spray head; 52. Transmission gear ring; 53. Water tank. DETAILED DESCRIPTION

[0038] An embodiment of the present invention provides a device cleaning apparatus for a semiconductor integrated circuit.

[0039] See also Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 , including a supporting bottom plate 1, a first supporting plate 2 is fixedly connected to the top of the supporting bottom plate 1, a rotating disk 4 is provided on the top of the first supporting plate 2, a cleaning box 5 is fixedly connected to the top of the rotating disk 4, a placing table 6 is provided inside the cleaning box 5, a first threaded rod 7 is fixedly connected to the bottom of the placing table 6, the first threaded rod 7 passes through the cleaning box 5 and the rotating disk 4 in sequence, the first threaded rod 7 is rotatably connected to the cleaning box 5, the first threaded rod 7 is threadedly connected to the rotating disk 4, an adjusting component for lifting is provided on the outer side of the first threaded rod 7, and a supporting seat is fixedly connected to the top of the cleaning box 5 25, the top of the support seat 25 is rotatably connected to the outer gear ring 15, and a cleaning assembly is provided on the outer side of the outer gear ring 15. The top of the support base 1 is fixedly connected to the second support plate 28, and a turntable 50 is provided on the top of the second support plate 28. The bottom of the turntable 50 is connected to a rotating rod 29, which penetrates the second support plate 28 and is rotatably connected to the second support plate 28. The bottom of the turntable 50 is fixedly connected to the second electric push rod 32 and the third electric push rod 35, and a clamping assembly is provided at the bottom of the third electric push rod 35. The top of the support base 1 is fixedly connected to a storage frame 48.

[0040] A rotating rod 3 is fixedly connected to the bottom of the rotating disk 4, and the rotating rod 3 passes through the first support plate 2 and is rotatably connected to the first support plate 2. A second motor 27 is fixedly connected to the top of the supporting bottom plate 1, and the output shaft of the second motor 27 is fixedly connected to the rotating rod 3. The rotating rod 3 is driven to rotate by the second motor 27, so that the rotating rod 3 drives the rotating disk 4 to rotate, and the cleaning box 5 on the rotating disk 4 is moved.

[0041] The cleaning assembly includes a mounting plate 13, which is fixedly connected to the outside of the cleaning box 5, a second gear 14 is meshedly connected to the outside of the outer gear ring 15, a connecting plate 16 is fixedly connected to the inner wall of the outer gear ring 15, a first electric push rod 17 is fixedly connected to one side of the connecting plate 16, and a connecting frame 18 is fixedly connected to one end of the first electric push rod 17. The cleaning assembly also includes a pushing frame 19, which is arranged inside the connecting frame 18 and is slidably connected to the connecting frame 18, a cleaning disk 20 is fixedly connected to one end of the pushing frame 19, a spring 21 is fixedly connected between the connecting frame 18 and the pushing frame 19, a first motor 26 is fixedly connected to the bottom of the mounting plate 13, and the output shaft of the first motor 26 is fixedly connected to the second gear 14, and the second gear 14 is driven to rotate by the first motor 26, so that the outer gear ring 15 rotates around the cleaning box 5 to achieve a comprehensive cleaning effect.

[0042] A nozzle 51 is fixedly connected to the inner wall of the support seat 25, a mounting frame 22 is fixedly connected to the outer side of the cleaning box 5, a water tank 53 is fixedly connected to the bottom of the mounting frame 22, a water pump is installed inside the water tank 53, one end of the nozzle 51 is fixedly connected to a retractable water pipe 23, one end of the retractable water pipe 23 is connected to the water outlet end of the water pump, a water outlet pipe 24 is fixedly connected between the cleaning box 5 and the water tank 53, a filtering device 46 is installed on the outer side of the water outlet pipe 24, and the used cleaning liquid is purified by the filtering device 46.

[0043] Specifically, when the device is to be cleaned, the operator places the device on the placement table 6 inside the cleaning box 5, and starts the first motor 26 so that the output shaft of the first motor 26 drives the second gear 14 to rotate. When the second gear 14 rotates, it drives the meshing connection plate 16 to rotate on the top of the cleaning box 5. At this time, since the inner wall of the outer gear ring 15 is fixedly connected with the nozzle 51, the nozzle 51 rotates with the outer gear ring 15. At this time, the water pump inside the water tank 53 is started, and the cleaning liquid inside the water tank 53 is injected into the nozzle 51 through the retractable water pipe 23, so that the nozzle 51 rotates around the outer gear ring 15 to evenly rinse the outside of the device, so that the device cleaning is more comprehensive, and the water outlet pipe 24 is fixedly connected to the outside of the cleaning box 5. By connecting the water outlet pipe 24 with the water tank 53, the used cleaning liquid flows back to the water tank 53 for full use, and is purified and filtered by the filtering device 46 installed on the outside of the water outlet pipe 24. The water outlet pipe 24 adopts an existing filter or a simple filtering device, which will not be further elaborated here to achieve the purpose of recycling.

[0044] When the outer gear ring 15 rotates, a connecting plate 16 is fixedly connected to the inner wall of the outer gear ring 15, and a first electric push rod 17 is fixedly connected to the outer side of the connecting plate 16. By starting the first electric push rod 17, the first electric push rod 17 pushes the connecting frame 18, so that the cleaning disk 20 on the outer side of the connecting frame 18 contacts the device (a brush is installed on the outer side of the cleaning disk 20), and the brush on the outer side of the cleaning disk 20 contacts the device, so as to brush off the dust on the device, and a spring 21 is fixedly connected between the pushing frame 19 and the connecting frame 18, and the cleaning disk 20 can be retracted by the spring 21 to prevent the cleaning disk 20 from causing damage to the device, and the device is fully cleaned by combining the nozzle 51 and the cleaning disk 20.

[0045] See also Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 ,and Figure 7The adjusting component includes a first threaded barrel 8, which is threadedly connected to the outside of the first threaded rod 7, and the first threaded barrel 8 is rotatably connected to the first support plate 2. The outside of the first threaded barrel 8 is fixedly connected with a first gear 11. The adjusting component also includes a fixed gear ring 12, and the fixed gear ring 12 is meshed with the first gear 11. The top of the rotating disk 4 is fixedly connected to a limiting ring 9, and the inner wall of the limiting ring 9 is fixedly connected to a limiting block 10. A sliding groove is provided on the outside of the first threaded rod 7. The limiting block 10 is arranged inside the sliding groove and is slidably connected to the first threaded rod 7. The first threaded rod 7 is limited by the limiting block 10, so that the first threaded rod 7 cannot rotate and can only move upward.

[0046] Specifically, after the cleaning of the components inside the cleaning box 5 is completed, the second motor 27 is started to drive the rotating rod 3 to rotate. When the rotating rod 3 rotates, the fixedly connected rotating disk 4 rotates. When the rotating disk 4 rotates, the fixedly connected cleaning box 5 is driven to rotate. When the cleaning box 5 rotates with the rotating disk 4, since a fixed gear ring 12 is fixedly connected to the top of the first support plate 2, the first gear 11 meshingly connected to the outer side of the fixed gear ring 12 causes the first gear 11 to rotate. When the first gear 11 rotates, it drives the fixedly connected first threaded cylinder 8 to rotate. Since the first threaded cylinder 8 is meshed with the first threaded cylinder 8, the first threaded cylinder 8 is meshed with the first threaded cylinder 8. The rod 7 is threadedly connected, a slide groove is opened on the outer side of the first threaded rod 7, and a limit ring 9 is sleeved on the outer side of the first threaded rod 7. The limit block 10 fixedly connected to the inner wall of the limit ring 9 is arranged in the slide groove opened on the outer side of the first threaded rod 7, and the first threaded rod 7 is limited to make the first threaded rod 7 rise, so that the placement table 6 at the top of the first threaded rod 7 lifts the device from the cleaning box 5, and as the rotating disk 4 rotates, the device is pushed to the top of the cleaning box 5, and the cleaning box 5 moves to the lower part of the turntable 50, so that the device is automatically pushed out of the cleaning box 5, and the next step is reached, which is convenient for subsequent drying operations.

[0047] See also Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 , Fig.10 , Fig.11 , Fig.12 , Fig.13 and Fig.14 A third motor 47 is fixedly connected to the top of the supporting base plate 1, and the output shaft of the third motor 47 is fixedly connected to the rotating rod 29. A connecting disk 30 is fixedly connected to the bottom of the second electric push rod 32, and an air outlet head 31 is fixedly connected to the bottom of the connecting disk 30. A blowing device 34 is fixedly connected to the top of the rotating disk 50, and an air outlet pipe 33 is connected between the air outlet end of the blowing device 34 and the air outlet head 31.

[0048] The clamping assembly includes a fixed frame 36, which is fixedly connected to the bottom of the third electric push rod 35. The bottom of the fixed frame 36 is rotatably connected to a transmission gear ring 52. The transmission gear ring 52 is fixedly connected to a bevel gear ring 39. The outer side of the bevel gear ring 39 is meshed and connected to two bevel gears 45. The two bevel gears 45 are arranged opposite to each other. One side of the bevel gear 45 is fixedly connected to a first telescopic rod 41. The outer side of the first telescopic rod 41 is rotatably connected to a vertical plate 40. The vertical plate 40 is fixedly connected to the fixed frame 36. The outer side of the first telescopic rod 41 is meshed and connected to A second threaded cylinder 42, one end of which is fixedly connected to a clamping plate 43, a second telescopic rod 44 is fixedly connected between the clamping plate 43 and the vertical plate 40, the second telescopic rod 44 limits the clamping plate 43 so that the clamping plate 43 can move horizontally, the clamping assembly also includes a transverse plate 37, the transverse plate 37 is fixedly connected to the outside of the fixed frame 36, a fourth motor 49 is fixedly connected to the top of the transverse plate 37, a transmission gear 38 is meshedly connected to the outside of the transmission gear ring 52, and the output shaft of the fourth motor 49 is fixedly connected to the transmission gear 38.

[0049] Specifically, a second electric push rod 32 is fixedly connected to the bottom of the turntable 50. By starting the second electric push rod 32, the second electric push rod 32 pushes the connecting disk 30 so that the connecting disk 30 is close to the device on the top of the placement table 6. At this time, the blowing device 34 is used. The blowing device 34 exhaust device sets a heating wire inside the blowing device 34 so that the blown gas has a certain higher temperature and is exhausted through the exhaust pipe 33, so that the exhaust head 31 dries the device.

[0050] After the device is dried, the third motor 47 is started to drive the rotating rod 29 to rotate. When the rotating rod 29 rotates, it drives the fixedly connected rotating disk 50 to rotate, so that the third electric push rod 35 fixedly connected to the bottom of the rotating disk 50 is above the cleaning box 5. At this time, the third electric push rod 35 is started to push the fixed frame 36 to descend. When the two clamping plates 43 at the bottom of the fixed frame 36 are on both sides of the device, the fourth motor 49 is started to drive the output shaft of the fourth motor 49 to rotate the transmission gear 38. When the transmission gear 38 rotates, it drives the meshing transmission ring gear 52 to rotate. When the transmission ring gear 52 rotates, it drives the fixedly connected bevel gear The ring 39 rotates, and the bevel gear ring 39 rotates to drive the meshing bevel gear 45 to rotate. When the bevel gear 45 rotates, it drives the fixedly connected first telescopic rod 41 to rotate, so that the first telescopic rod 41 drives the threaded second threaded cylinder 42 to rotate. Since the second threaded cylinder 42 is fixedly connected to the clamping plate 43, and the second telescopic rod 44 is fixedly connected between the clamping plate 43 and the vertical plate 40, the two clamping plates 43 move relative to each other to clamp and fix the device. Then, by starting the third motor 47, the turntable 50 rotates, and the device is placed in the storage frame 48 for storage, thereby achieving the removal and storage of the device, avoiding pollution caused by manual removal, saving labor costs, and improving work efficiency.

[0051] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A device cleaning apparatus for a semiconductor integrated circuit, comprising a supporting base plate (1), characterized in that: The top of the support bottom plate (1) is fixedly connected to a first support plate (2), the top of the first support plate (2) is provided with a rotating disk (4), the top of the rotating disk (4) is fixedly connected to a cleaning box (5), the inside of the cleaning box (5) is provided with a placement table (6), the bottom of the placement table (6) is fixedly connected to a first threaded rod (7), the first threaded rod (7) passes through the cleaning box (5) and the rotating disk (4) in sequence, the first threaded rod (7) is rotatably connected to the cleaning box (5), the first threaded rod (7) is threadedly connected to the rotating disk (4), the outer side of the first threaded rod (7) is provided with an adjustment component for lifting, the top of the cleaning box (5) is fixedly connected to a support seat (25 ), the top of the support seat (25) is rotatably connected to an outer gear ring (15), the outer side of the outer gear ring (15) is provided with a cleaning assembly, the top of the support base plate (1) is fixedly connected to a second support plate (28), the top of the second support plate (28) is provided with a turntable (50), the bottom of the turntable (50) is connected to a rotating rod (29), the rotating rod (29) passes through the second support plate (28) and is rotatably connected to the second support plate (28), the bottom of the turntable (50) is fixedly connected to a second electric push rod (32) and a third electric push rod (35), the bottom of the third electric push rod (35) is provided with a clamping assembly, and the top of the support base plate (1) is fixedly connected to a storage frame (48); The clamping assembly comprises a fixed frame (36), the fixed frame (36) being fixedly connected to the bottom of the third electric push rod (35), the bottom of the fixed frame (36) being rotatably connected to a transmission gear ring (52), the transmission gear ring (52) being fixedly connected to a bevel gear ring (39), the outer side of the bevel gear ring (39) being meshingly connected to two bevel gears (45), the two bevel gears (45) being arranged opposite to each other, one side of the bevel gear (45) being fixedly connected to a first telescopic rod (41), the outer side of the first telescopic rod (41) being rotatably connected to a vertical plate (40), the vertical plate (40) being fixedly connected to the fixed frame (36), the outer side of the first telescopic rod (41) being meshingly connected to a second threaded cylinder (42), one end of the second threaded cylinder (42) being fixedly connected to a clamping plate (43), and a second telescopic rod (44) being fixedly connected between the clamping plate (43) and the vertical plate (40); The clamping assembly further comprises a transverse plate (37), the transverse plate (37) being fixedly connected to the outside of the fixed frame (36), a fourth motor (49) being fixedly connected to the top of the transverse plate (37), a transmission gear (38) being meshingly connected to the outside of the transmission gear ring (52), and an output shaft of the fourth motor (49) being fixedly connected to the transmission gear (38); The adjustment assembly comprises a first threaded barrel (8), the first threaded barrel (8) being threadedly connected to the outside of the first threaded rod (7), the first threaded barrel (8) being rotatably connected to the first support plate (2), and a first gear (11) being fixedly connected to the outside of the first threaded barrel (8); The adjustment assembly further comprises a fixed gear ring (12), the fixed gear ring (12) being meshedly connected with the first gear (11), the top of the rotating disk (4) being fixedly connected with a limit ring (9), the inner wall of the limit ring (9) being fixedly connected with a limit block (10), a sliding groove being provided on the outer side of the first threaded rod (7), the limit block (10) being arranged inside the sliding groove and being slidably connected with the first threaded rod (7); A third motor (47) is fixedly connected to the top of the support base plate (1); an output shaft of the third motor (47) is fixedly connected to the rotating rod (29); a connecting disk (30) is fixedly connected to the bottom of the second electric push rod (32); an air outlet head (31) is fixedly connected to the bottom of the connecting disk (30); a blowing device (34) is fixedly connected to the top of the rotating disk (50); an air outlet pipe (33) is connected between the air outlet end of the blowing device (34) and the air outlet head (31).

2. The device cleaning apparatus for semiconductor integrated circuits according to claim 1, characterized in that: A rotating rod (3) is fixedly connected to the bottom of the rotating disk (4); the rotating rod (3) passes through the first supporting plate (2) and is rotatably connected to the first supporting plate (2); a second motor (27) is fixedly connected to the top of the supporting bottom plate (1); an output shaft of the second motor (27) is fixedly connected to the rotating rod (3).

3. The device cleaning apparatus for semiconductor integrated circuits according to claim 1, characterized in that: The cleaning assembly comprises a mounting plate (13), the mounting plate (13) being fixedly connected to the outside of the cleaning box (5), the outside of the outer gear ring (15) being meshingly connected to a second gear (14), the inner wall of the outer gear ring (15) being fixedly connected to a connecting plate (16), one side of the connecting plate (16) being fixedly connected to a first electric push rod (17), and one end of the first electric push rod (17) being fixedly connected to a connecting frame (18).

4. The device cleaning apparatus for semiconductor integrated circuits according to claim 3, characterized in that: The cleaning assembly further comprises a pushing frame (19), the pushing frame (19) being arranged inside the connecting frame (18) and being slidably connected to the connecting frame (18), a cleaning disc (20) being fixedly connected to one end of the pushing frame (19), a spring (21) being fixedly connected between the connecting frame (18) and the pushing frame (19), a first motor (26) being fixedly connected to the bottom of the mounting plate (13), and an output shaft of the first motor (26) being fixedly connected to the second gear (14).

5. The device cleaning apparatus for semiconductor integrated circuits according to claim 4, characterized in that: A nozzle (51) is fixedly connected to the inner wall of the support seat (25); a mounting frame (22) is fixedly connected to the outer side of the cleaning box (5); a water tank (53) is fixedly connected to the bottom of the mounting frame (22); a water pump is installed inside the water tank (53); one end of the nozzle (51) is fixedly connected to a retractable water pipe (23); one end of the retractable water pipe (23) is connected to a water outlet end of the water pump; a water outlet pipe (24) is fixedly connected between the cleaning box (5) and the water tank (53); a filtering device (46) is installed on the outer side of the water outlet pipe (24).

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