A device for cryogenic separation and purification of neon

Abstract

The application discloses a neon cryogenic separation and purification device, which comprises a vacuumizing device, a hollow box body and a gas collecting ball, and further comprises an inner pressure-resistant cover, a middle pressure-resistant cover and an outer pressure-resistant cover; the inner pressure-resistant cover is arranged in the middle pressure-resistant cover, the middle pressure-resistant cover is arranged in the outer pressure-resistant cover, a spiral flow guide mechanism is arranged between the outer side surface of the inner pressure-resistant cover and the inner side surface of the middle pressure-resistant cover, a liquid nitrogen cooling cabin is arranged between the outer side surface of the middle pressure-resistant cover and the inner side surface of the outer pressure-resistant cover, the outer side surface of the inner pressure-resistant cover and the inner side surface of the middle pressure-resistant cover form a purification cabin, and the upper end surface of the purification cabin is connected with a gas conveying pipe; the neon cryogenic separation and purification device can continuously liquefy impurity gas in neon through the liquid nitrogen cooling mode, the liquefied impurity gas can be easily separated by an adsorption device, and the purity and yield of the neon are effectively improved.

Description

Technical Field

[0001] This invention relates to the technical field of purification equipment for cryogenic separation of neon gas, specifically a cryogenic separation and purification device for neon gas. Background Technology

[0002] With the development of industrial production and science and technology, rare gases are increasingly widely used in industry, medicine, cutting-edge science and technology, and daily life. Neon, as a member of the rare gases, has many applications in reality, such as urban neon lights and excimer lasers in DUV lithography machines.

[0003] Neon is a byproduct of steel mills. The main reason is that steel mills need a large amount of oxygen to produce steel, and it is not cost-effective to buy this oxygen. Therefore, steel mills usually build their own air fractionation plants. In addition to obtaining the oxygen needed for production, air fractionation plants can also produce byproducts such as nitrogen, argon, neon, and helium. The neon produced by the air fractionation plants of steel mills has a high impurity content. To obtain high-purity neon, cryogenic separation technology is required.

[0004] The commonly used process for preparing high-purity neon gas is as follows: cryogenic air separation equipment concentration - hydrogen removal - nitrogen removal - low-temperature adsorption - neon-helium separation, etc. Theoretically, neon gas can also be purified through fractional distillation. However, high-purity neon gas used in the chip industry cannot be obtained through simple fractional distillation because various impurities in crude neon cannot be completely removed by simple fractional distillation. Since the purity requirement for high-purity neon gas is no less than 99.999%, the purity of neon gas obtained by traditional fractional distillation methods is approximately 99.95%, which does not meet the standard for high-purity neon gas. Therefore, to obtain high-purity neon gas, traditional fractional distillation methods must be further purified to remove impurities to below 0.001%. Existing technology proposes a low-temperature adsorption method: its principle is based on the fact that neon gas has a very low boiling point relative to impurities such as oxygen, nitrogen, carbon monoxide, carbon dioxide, and methane. Therefore, low-temperature adsorption can be used to remove all these impurities in one step. The adsorption temperature is the liquid nitrogen temperature, and the adsorbent can be fine-porous silica gel, alumina, or molecular sieves. The purity of neon gas after adsorption can reach 99.999%. However, the aforementioned cryogenic adsorption purification method uses an adsorbent. In order to increase the contact area and contact time between the gas flow and the adsorbent, the flow velocity of the gas flow cannot be too high. When existing cryogenic separation and purification devices for neon are in use, the liquefied impurity gas is easily carried away by the gas flow and cannot be adsorbed by the adsorbent in time, resulting in the purity of neon gas often not reaching 99.999%. Moreover, in order to increase the contact time and contact area between the adsorbent and the gas during the crude neon purification process, the volume of the adsorption equipment is often made relatively large, resulting in a large overall footprint. At the same time, the crude neon gas cannot be cooled by liquid nitrogen in time when it comes into contact with the adsorbent, resulting in extremely low production of high-purity neon gas and extremely high liquid nitrogen consumption, thus leading to high overall energy consumption of the equipment. Summary of the Invention

[0005] This invention provides a cryogenic separation and purification device for neon gas, which can rapidly and continuously liquefy impurity gases in neon gas by cooling with liquid nitrogen. The liquefied impurity gases are easily adsorbed and separated by an adsorption device, effectively improving the purity and yield of neon gas and effectively solving the problems in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a cryogenic separation and purification device for neon gas, comprising a vacuum pump, a hollow box, and a collecting balloon, and further comprising an inner pressure-resistant shield, a middle pressure-resistant shield, and an outer pressure-resistant shield; the inner pressure-resistant shield is disposed inside the middle pressure-resistant shield, the middle pressure-resistant shield is disposed inside the outer pressure-resistant shield, a spiral flow guiding mechanism is provided between the outer side of the inner pressure-resistant shield and the inner side of the middle pressure-resistant shield, a liquid nitrogen cooling chamber is provided between the outer side of the middle pressure-resistant shield and the inner side of the outer pressure-resistant shield, and a purification chamber is formed between the outer side of the inner pressure-resistant shield and the inner side of the middle pressure-resistant shield, the upper end face of the purification chamber being connected to a gas delivery pipe.

[0007] The spiral guiding mechanism consists of an adsorption tank, a slope, a spiral guide groove, a spiral cooling tank, and a liquid nitrogen guiding cavity. The spiral guide groove is located on the upper inner side of the liquid nitrogen guiding cavity, the adsorption tank is located on the upper outer side of the spiral guide groove, and the slope is located on the upper outer side of the spiral cooling tank.

[0008] The hollow box is equipped with a hollow cylindrical circulation section and a power circulation device. The upper and lower ends of the hollow cylindrical circulation section are connected to the upper and lower ends of the spiral guide groove through circulation pipes. A vacuum tube is provided at the lower end of the outer side of the hollow cylindrical circulation section, and an electric heating device is provided on the outer side of the hollow cylindrical circulation section near the vacuum tube.

[0009] The hollow cylindrical circulation section, circulation pipe and spiral guide groove constitute the circulation guiding device. The inside of the circulation guiding device is tightly filled with an adsorption module. The main frame of the adsorption module is composed of silicone rubber polymer plugs. The outer left end of the silicone rubber polymer plug is provided with an annular force groove. The outer side of the silicone rubber polymer plug is provided with an array of annular silicone rubber polymer partitions. The adjacent annular silicone rubber polymer partitions form an annular storage tank. The inside of the annular storage tank is filled with an adsorption screen.

[0010] The outer side of the hollow cylindrical circulation section near the power circulation device is provided with a rectangular groove and an arc-shaped guard plate. The power circulation device includes a linear motor, an electrically controlled telescopic rod, and a locking block. The locking block is correspondingly set to engage with the annular force application groove. The slide of the linear motor is connected to the electrically controlled telescopic rod, and the telescopic end of the electrically controlled telescopic rod is connected to the locking block.

[0011] The upper end face of the liquid nitrogen cooling chamber is connected to an exhaust pipe, which is connected to an external liquid nitrogen cooling circulation device. The upper end face of the liquid nitrogen guiding cavity is connected to an external liquid material inlet, and the upper end face of the liquid nitrogen guiding cavity is connected to the lower end face of the liquid nitrogen cooling chamber.

[0012] Preferably, the outer surface of the outer pressure-resistant cover is provided with a heat insulation layer.

[0013] Preferably, the collecting balloon is connected to the lower outer side of the purification chamber via an external air compressor.

[0014] Preferably, the silicone rubber polymer plug is an ellipsoidal phenyl silicone rubber plug.

[0015] Preferably, the annular force-applying groove is provided with a flow guide hole inside, and the left end face of the silicone rubber polymer plug is provided with a cylindrical storage tank, which communicates with the flow guide hole.

[0016] Preferably, the left end face of the silicone rubber polymer plug is provided with a cross-shaped groove, and the right end face of the silicone rubber polymer plug is provided with a cross-shaped locking block that is correspondingly engaged with the cross-shaped groove.

[0017] Preferably, the interior of the cylindrical storage tank is filled with a columnar adsorption screen.

[0018] Preferably, the arc-shaped protective plate is detachable, and the length of the arc-shaped protective plate is consistent with the length of the adsorption module.

[0019] Preferably, the locking block includes an arc-shaped silicone rubber polymer locking block and a connecting plate, the connecting plate being connected to the electrically controlled telescopic rod, and the arc-shaped silicone rubber polymer locking block being correspondingly engaged with the annular force-applying groove.

[0020] Preferably, the outer pressure-resistant cover has a spherical protective cover and an emergency pressure relief device on its upper outer surface. The spherical protective cover is connected to an external air compressor via a conduit. The emergency pressure relief device includes a cylindrical outer cover, a spring, a cylindrical sealing plug, a hollow external threaded positioning block, and a pressure relief vent. The hollow external threaded positioning block is threadedly connected to the inner surface of the cylindrical outer cover. The threaded positioning block presses the spring and the cylindrical sealing plug tightly against the inner surface of the cylindrical outer cover. The pressure relief vent is located on the outer surface of the cylindrical outer cover near the cylindrical sealing plug.

[0021] Compared with the prior art, the beneficial effects of the present invention are:

[0022] 1. This cryogenic separation and purification device for neon gas can quickly and continuously liquefy impurity gases in neon gas by cooling with liquid nitrogen. The liquefied impurity gases are easily adsorbed and separated by the adsorption device, which effectively improves the purity and yield of neon gas.

[0023] 2. Both the inner and middle pressure-resistant covers are made of materials with good thermal conductivity. The neon gas to be purified is sent into the purification chamber through the gas supply pipe. While the crude neon gas flows downward along the spiral guide mechanism on the inner side of the purification chamber, the adsorbent set inside the spiral guide mechanism removes the impurity gas in the crude neon gas.

[0024] 3. The adsorption screen is used to adsorb impurities in neon gas. The array of adsorption screens can effectively increase the contact time and contact area between the impurities and the adsorption screen. The annular storage tank is used to fix the adsorption screen. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of the present invention;

[0026] Figure 2 This is a schematic diagram of an emergency pressure relief device;

[0027] Figure 3 This is a schematic diagram showing the connection between the circulation guide device and the power circulation device.

[0028] Figure 4 for Figure 3 Enlarged view of a portion of point A in the middle;

[0029] Figure 5 This is a schematic diagram of a spiral flow guiding mechanism.

[0030] Figure 6 for Figure 5 Enlarged view of a portion of point B in the middle;

[0031] Figure 7 This is a schematic diagram showing the working state of the power circulation device.

[0032] Figure 8 This is a schematic diagram of the adsorption module without adsorbent.

[0033] Figure 9 A schematic diagram of the structure of the adsorption module after it has been filled with adsorbent;

[0034] Figure 10 This is a left view of the adsorption module;

[0035] Figure 11 This is a schematic diagram of the card block structure;

[0036] Figure 12 This is a schematic diagram of the series adsorption module structure.

[0037] In the diagram: 1. Gas supply pipe; 2. Spherical protective cover; 3. Middle layer pressure-resistant cover; 4. Evacuation pipe; 5. Hollow box; 6. Liquid nitrogen cooling chamber; 7. Collecting ball; 8. Spiral flow guiding mechanism; 801. Adsorption tank; 802. Slope; 803. Spiral guide channel; 804. Spiral cooling tank; 805. Liquid nitrogen flow guiding cavity; 9. Outer pressure-resistant cover; 10. Purification chamber; 11. Emergency pressure relief device; 1101. Cylindrical outer cover; 1102. Spring; 1103. Cylindrical sealing plug; 1104. Hollow external thread positioning block; 1105. Pressure relief outlet; 12. Vacuum equipment; 13. Hollow cylindrical circulation section; 14. Power unit. Circulation device, 141 linear motor, 142 electrically controlled telescopic rod, 143 clamping block, 1431 arc-shaped silicone rubber polymer clamping block, 1432 connecting plate, 15 vacuum tube, 16 circulation tube, 17 electric heating device, 18 adsorption module, 1801 silicone rubber polymer plug, 1802 annular force application groove, 1803 annular storage tank, 1804 annular silicone rubber polymer partition, 1805 cross clamping block, 1806 cross clamping groove, 1807 cylindrical storage tank, 1808 guide hole, 1809 adsorption screen, 19 series adsorption module, 20 inner pressure-resistant cover. Detailed Implementation

[0038] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] In the description of this invention, when a feature is referred to as "setting", "fixing", or "connecting" to another feature, it can be set, fixed, or connected to the other feature directly, or it can be set, fixed, or connected to the other feature indirectly.

[0040] This invention provides a technical solution:

[0041] Please see Figure 1 A cryogenic separation and purification device for neon gas includes a vacuum pump 12, a hollow housing 5, and a collecting balloon 7. It also includes an inner pressure-resistant cover 20, a middle pressure-resistant cover 3, and an outer pressure-resistant cover 9. The inner pressure-resistant cover 20 is disposed inside the middle pressure-resistant cover 3, and the middle pressure-resistant cover 3 is disposed inside the outer pressure-resistant cover 9. A spiral flow guiding mechanism 8 is provided between the outer surface of the inner pressure-resistant cover 20 and the inner surface of the middle pressure-resistant cover 3. A liquid nitrogen cooling chamber 6 is provided between the outer surface of the middle pressure-resistant cover 3 and the inner surface of the outer pressure-resistant cover 9. A purification chamber 10 is formed between the outer surface of the inner pressure-resistant cover 20 and the inner surface of the middle pressure-resistant cover 3. The upper end of the purification chamber 10 is connected to a gas delivery pipe 1.

[0042] Specifically, both the inner pressure shield 20 and the middle pressure shield 3 are made of materials with good thermal conductivity. The neon gas to be purified is sent into the purification chamber 10 through the gas supply pipe 1. While the crude neon gas flows downward along the spiral guide mechanism 8 on the inner side of the purification chamber 10, the adsorbent set inside the spiral guide mechanism 8 removes the impurity gas in the crude neon gas.

[0043] More specifically, liquid nitrogen is fed into the interior of the liquid nitrogen cooling chamber 6 through the sealed flow channel of the spiral flow guide mechanism 8. The spiral flow guide mechanism 8 and the outer wall of the liquid nitrogen cooling chamber 6 can increase the contact area with the crude neon gas, so that the crude neon gas can be fully cooled.

[0044] Please see Figure 5 and 6 The spiral guiding mechanism 8 is composed of an adsorption tank 801, a slope 802, a spiral guide groove 803, a spiral cooling groove 804, and a liquid nitrogen guiding cavity 805. The spiral guide groove 803 is located on the upper inner side of the liquid nitrogen guiding cavity 805, the adsorption tank 801 is located on the upper outer side of the spiral guide groove 803, and the slope 802 is located on the upper outer side of the spiral cooling groove 804.

[0045] Specifically, the adsorption tank 801 is designed to allow the liquefied impurity gas to quickly come into contact with the adsorbent, the slope 802 is designed to allow the liquefied impurity gas to quickly flow into the adsorption tank 801, the spiral guide channel 803 is used as a circulation channel for the adsorbent, and the liquid nitrogen guide cavity 805 is used for liquid nitrogen guidance.

[0046] More specifically, molecular sieve adsorption mesh is selected as the adsorbent.

[0047] Please see Figure 3 and 4 The hollow box 5 is provided with a hollow cylindrical circulation section 13 and a power circulation device 14 inside. The upper and lower ends of the hollow cylindrical circulation section 13 are connected to the upper and lower ends of the spiral guide groove 803 through circulation pipes 16. The lower end of the outer side of the hollow cylindrical circulation section 13 is provided with a vacuum pipe 15. The outer side of the hollow cylindrical circulation section 13 near the vacuum pipe 15 is provided with an electric heating device 17.

[0048] Specifically, the electric heating device 17 heats the adsorbent, allowing the gas in the adsorbent to be separated quickly, thus enabling the adsorbent to be recycled.

[0049] More specifically, the power circulation device 14 is used to provide power for the circulation of the adsorbent.

[0050] Please see Figure 8 , 9The hollow cylindrical circulation section 13, circulation pipe 16, and spiral guide groove 803 constitute a circulation guiding device. The interior of the circulation guiding device is tightly filled with an adsorption module 18. The main frame of the adsorption module 18 is composed of a silicone rubber polymer plug 1801. The outer left end of the silicone rubber polymer plug 1801 is provided with an annular force groove 1802. The outer side of the silicone rubber polymer plug 1801 is provided with an array of annular silicone rubber polymer partitions 1804. The adjacent annular silicone rubber polymer partitions 1804 form an annular storage tank 1803. The interior of the annular storage tank 1803 is filled with an adsorption screen 1809.

[0051] Specifically, the adsorption screen 1809 is used to adsorb impurity gases in neon gas. The arrayed adsorption screen 1809 can effectively increase the contact time and contact area between the impurity gases and the adsorption screen. The annular storage tank 1803 is used to fix the adsorption screen 1809.

[0052] More specifically, multiple adsorption modules 18 can be connected in series to form a long strip, which facilitates replacement.

[0053] Please see Figure 7 The outer side of the hollow cylindrical circulation section 13 near the power circulation device 14 is provided with a rectangular groove and an arc-shaped guard plate. The power circulation device 14 includes a linear motor 141, an electrically controlled telescopic rod 142, and a locking block 143. The locking block 143 is correspondingly engaged with the annular force application groove 1802. The slide of the linear motor 141 is connected to the electrically controlled telescopic rod 142, and the telescopic end of the electrically controlled telescopic rod 142 is connected to the locking block 143.

[0054] Specifically, opening the arc-shaped protective plate allows for the removal and replacement of the adsorption module 18.

[0055] More specifically, the electronically controlled telescopic rod 142 extends to engage the locking block 143 into the annular force-applying groove 1802, and then the linear motor 141 operates to push the adsorption module 18 to move along the inner side of the circulation guide device.

[0056] Please see Figure 1 The upper end face of the liquid nitrogen cooling chamber 6 is connected to an exhaust pipe 4, which is connected to an external liquid nitrogen cooling circulation device. The upper end face of the liquid nitrogen guiding cavity 805 is connected to an external liquid material inlet, and the upper end face of the liquid nitrogen guiding cavity 805 is connected to the lower end face of the liquid nitrogen cooling chamber 6.

[0057] Specifically, the nitrogen gas that has been vaporized and absorbed heat at the top of the liquid nitrogen cooling chamber 6 is sent to the condensation equipment through the extraction pipe 4 for condensation, and can be recycled after condensation.

[0058] Furthermore, the outer pressure-resistant cover 9 has an insulation layer on its outer surface.

[0059] Specifically, the installation of an insulation layer can effectively reduce interference from the external environment.

[0060] Furthermore, the collecting balloon 7 is connected to the lower end of the outer side of the purification chamber 10 via an external air compressor.

[0061] Specifically, the air compressor compresses the purified neon gas and sends it into the inside of the collecting balloon 7.

[0062] Furthermore, the silicone rubber polymer plug 1801 is preferably an ellipsoidal phenyl silicone rubber plug.

[0063] Specifically, phenyl silicone rubber can maintain its elasticity even at low temperatures without direct contact with liquid nitrogen, and can be used for sealing in ultra-low temperature environments.

[0064] Furthermore, the annular force-applying groove 1802 is provided with a flow guide hole 1808 inside, and the left end face of the silicone rubber polymer plug 1801 is provided with a cylindrical storage tank 1807, which communicates with the flow guide hole 1808.

[0065] Specifically, a cylindrical adsorption mesh is inserted inside the cylindrical storage tank 1807 for collecting the liquefied gas that flows into the annular force-applying tank 1802.

[0066] Furthermore, the left end face of the silicone rubber polymer plug 1801 is provided with a cross groove 1806, and the right end face of the silicone rubber polymer plug 1801 is provided with a cross block 1805 that is correspondingly engaged with the cross groove 1806.

[0067] Specifically, the cross-shaped slot 1806 engages with the cross-shaped block 1805 of another adjacent silicone rubber polymer plug 1801, which can improve the stability of the silicone rubber polymer plug 1801 during cycling.

[0068] Furthermore, the interior of the cylindrical storage tank 1807 is filled with a cylindrical adsorption screen.

[0069] Specifically, columnar adsorption screens are used to adsorb impurity gases after liquefaction.

[0070] Furthermore, the arc-shaped protective plate is detachable, and the length of the arc-shaped protective plate is consistent with the length of the adsorption module 18.

[0071] Specifically, after the arc-shaped protective plate is removed, it can be used to disassemble and replace the adsorption module 18.

[0072] Furthermore, the locking block 143 includes an arc-shaped silicone rubber polymer locking block 1431 and a connecting plate 1432. The connecting plate 1432 is connected to the electrically controlled telescopic rod 142, and the arc-shaped silicone rubber polymer locking block 1431 is correspondingly engaged with the annular force-applying groove 1802.

[0073] Specifically, the curved silicone rubber polymer block 1431 can prevent the power circulation device 14 from scratching the adsorption module 18 during use.

[0074] Furthermore, the outer pressure-resistant cover 9 has a spherical protective cover 2 and an emergency pressure relief device 11 on its outer upper surface. The spherical protective cover 2 is connected to an external air compressor through a conduit. The emergency pressure relief device 11 includes a cylindrical outer cover 1101, a spring 1102, a cylindrical sealing plug 1103, a hollow external thread positioning block 1104, and a pressure relief vent 1105. The hollow external thread positioning block 1104 is threadedly connected to the inner surface of the cylindrical outer cover 1101. The thread positioning block 1104 presses the spring 1102 and the cylindrical sealing plug 1103 tightly against the inner surface of the cylindrical outer cover 1101. The pressure relief vent 1105 is located on the outer surface of the cylindrical outer cover 1101 near the cylindrical sealing plug 1103.

[0075] Specifically, when the pressure inside the liquid nitrogen cooling chamber 6 exceeds the set value, the emergency pressure relief device 11 is opened, and the high-pressure nitrogen gas inside the liquid nitrogen cooling chamber 6 is discharged into the spherical protective cover 2 through the emergency pressure relief device 11.

[0076] In use: Connect the exhaust pipe 4 to the external liquid nitrogen condensation and circulation device. Send the neon gas to be purified into the purification chamber 10 through the gas supply pipe 1. Start the air compressor connected to the collecting balloon 7. The crude neon gas spirals down along the outer side of the spiral guide mechanism 8, and simultaneously sends liquid nitrogen into the liquid nitrogen guide cavity 805. The liquid nitrogen spirals down in the liquid nitrogen guide cavity 805 and enters the liquid nitrogen cooling chamber 6. The impurities such as oxygen, nitrogen, carbon monoxide, carbon dioxide and methane contained in the crude neon gas are rapidly liquefied after contacting the outer wall of the spiral guide mechanism 8. The gas liquefied on the outer surface of the spiral guide mechanism 8 enters the adsorption tank 801 through the slope 802, and is finally adsorbed by the adsorption screen 1809 set inside the adsorption tank 801.

[0077] The electrically controlled telescopic rod 142 extends to engage the locking block 143 into the annular force-applying groove 1802. Then, the linear motor 141 operates, which can push the adsorption module 18 to move along the inner side of the circulation guide device. When the adsorption module 18 with the adsorption screen 1809 moves to the vacuum tube 15, the electric heating device 17 heats the adsorption screen 1809, and the heat-absorbing impurity gas is extracted through the vacuum tube 15.

[0078] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for cryogenic separation and purification of neon gas, comprising a vacuum pumping device (12), a hollow box (5) and a gas collecting bulb (7), characterized in that: Also include the inner layer pressure shell (20), middle layer pressure shell (3) and outer layer pressure shell (9); The inner layer pressure shell (20) is arranged in the inside of middle layer pressure shell (3), middle layer pressure shell (3) is arranged in the inside of outer layer pressure shell (9), and the outer side of inner layer pressure shell (20) and the inner side of middle layer pressure shell (3) are provided with spiral flow guide mechanism (8), and the outer side of middle layer pressure shell (3) and the inner side of outer layer pressure shell (9) are provided with liquid nitrogen cooling cabin (6), and the outer side of inner layer pressure shell (20) and the inner side of middle layer pressure shell (3) constitute purification cabin (10), and the upper end surface of purification cabin (10) is connected with gas pipe (1); The spiral flow guide mechanism (8) is composed of adsorption groove (801), slope (802), spiral guide groove (803), spiral cooling groove (804) and liquid nitrogen flow guide cavity (805), the spiral guide groove (803) is arranged on the inner side of the upper end of the liquid nitrogen flow guide cavity (805), the adsorption groove (801) is arranged on the outer side of the upper end of the spiral guide groove (803), and the slope (802) is arranged on the outer side of the upper end of the spiral cooling groove (804); The inside of the hollow box body (5) is provided with hollow cylindrical circulating section (13) and power circulating device (14), the upper and lower ends of the hollow cylindrical circulating section (13) are connected with the upper and lower ends of the spiral guide groove (803) through circulating pipes (16), the lower end of the outer side of the hollow cylindrical circulating section (13) is provided with a vacuum pump (15), and the side of the outer side of the hollow cylindrical circulating section (13) close to the vacuum pump (15) is provided with an electric heating device (17); The hollow cylindrical circulating section (13), the circulating pipe (16) and the spiral guide groove (803) constitute a circulating flow guide device, the inside of the circulating flow guide device is tightly filled with an adsorption module (18), the main frame of the adsorption module (18) is composed of a silicone rubber polymer plug body (1801), the outer side of the left end of the silicone rubber polymer plug body (1801) is provided with an annular force applying groove (1802), the outer side of the silicone rubber polymer plug body (1801) is provided with an array of annular silicone rubber polymer partition plates (1804), the adjacent annular silicone rubber polymer partition plates (1804) constitute an annular storage groove (1803), and the inside of the annular storage groove (1803) is filled with an adsorption screen (1809); The outer side of the hollow cylindrical circulating section (13) is provided with a rectangular groove and an arc-shaped guard plate close to the power circulating device (14), the power circulating device (14) includes a linear motor (141), an electric control telescopic rod (142) and a clamping block (143), the clamping block (143) is correspondingly arranged in clamping connection with the annular force applying groove (1802); The sliding table of the linear motor (141) is connected with the electric control telescopic rod (142), and the telescopic end of the electric control telescopic rod (142) is connected with the clamping block (143); The upper end surface of the liquid nitrogen cooling cabin (6) is connected with an air exhaust pipe (4) which is connected with an external liquid nitrogen cooling circulation device, the upper end surface of the liquid nitrogen flow guide cavity (805) is connected with an external liquid inlet, and the upper end surface of the liquid nitrogen flow guide cavity (805) is connected with the lower end surface of the liquid nitrogen cooling cabin (6).

2. The neon cryogenic separation purification unit according to claim 1, wherein: The outer surface of the outer pressure-resistant cover (9) is provided with a heat preservation layer.

3. The neon cryogenic separation purification unit of claim 1, wherein: The gas collecting ball (7) is connected with the lower end of the outer surface of the purification cabin (10) through an external air compression device.

4. The neon cryogenic separation purification unit of claim 1, wherein: The silicone rubber polymer plug body (1801) is preferably an ellipsoidal phenyl silicone rubber plug body.

5. The neon cryogenic separation and purification unit of claim 1, wherein: The inner part of the annular force applying groove (1802) is provided with a flow guide hole (1808), the left end surface of the silicone rubber polymer plug body (1801) is provided with a cylindrical storage groove (1807), and the cylindrical storage groove (1807) is communicated with the flow guide hole (1808).

6. The neon cryogenic separation purification unit of claim 1, wherein: The left end surface of the silicone rubber polymer plug body (1801) is provided with a cross-shaped clamping groove (1806), and the right end surface of the silicone rubber polymer plug body (1801) is provided with a cross-shaped clamping block (1805) which is correspondingly arranged in clamping connection with the cross-shaped clamping groove (1806).

7. The neon cryogenic separation purification unit of claim 5, wherein: The inner part of the cylindrical storage groove (1807) is filled with a cylindrical adsorption screen.

8. The neon cryogenic separation purification unit of claim 1, wherein: The arc-shaped protective plate is detachable, and the length of the arc-shaped protective plate is consistent with the length of the adsorption module (18).

9. The neon cryogenic separation purification unit of claim 1, wherein: The clamping block (143) comprises an arc-shaped silicone rubber polymer clamping block (1431) and a connecting plate (1432), the connecting plate (1432) is connected with the electric control telescopic rod (142), and the arc-shaped silicone rubber polymer clamping block (1431) is correspondingly arranged in clamping connection with the annular force applying groove (1802).

10. The neon cryogenic separation and purification unit of claim 1, wherein: The outer surface of the outer pressure-resistant cover (9) is provided with a spherical protective cover (2) and an emergency pressure relief device (11), the spherical protective cover (2) is connected with an external air compression device through a pipeline, the emergency pressure relief device (11) comprises a cylindrical outer cover (1101), a spring (1102), a cylindrical sealing plug (1103), a hollow outer threaded positioning block (1104) and a pressure relief gas outlet hole (1105), the hollow outer threaded positioning block (1104) is in threaded connection with the inner surface of the cylindrical outer cover (1101), the threaded positioning block (1104) tightly presses the spring (1102) and the cylindrical sealing plug (1103) against the inner surface of the cylindrical outer cover (1101), and the pressure relief gas outlet hole (1105) is arranged on the outer surface of the cylindrical outer cover (1101) close to the cylindrical sealing plug (1103).

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