An explosion-proof source bottle for diffusion processes

Abstract

The application discloses an anti-explosion source bottle for a diffusion process, which comprises a source bottle body, an air inlet pipe and an air outlet pipe, an automatic pressure valve capable of being automatically opened and closed according to the air pressure value in the source bottle body is connected to the air inlet pipe, the automatic pressure valve is vertically fixed to the upper wall of the source bottle body, and the end of the automatic pressure valve in contact with the source bottle body is connected with the inside of the source bottle body. The application not only can be automatically opened and closed according to the air pressure value in the source bottle body, avoids the danger caused by the explosion of the source bottle, but also can adjust the size of the set pressure threshold, so as to be suitable for source bottle bodies made of different materials, and has high safety, high practicability and strong universality.

Description

Technical Field

[0001] This invention relates to the field of solar cell fabrication technology, specifically to an explosion-proof source bottle for diffusion processes. Background Technology

[0002] The solar energy and integrated circuit industries, among others, all require liquid POCl3 as a phosphorus source for diffusion to form PN junctions. The phosphorus source is placed in a diffusion source bottle.

[0003] The source bottle contains liquid POCl3. N2 is passed through the liquid POCl3, carrying the gaseous POCl3 into the diffusion furnace to complete the phosphorus diffusion process. If the source bottle explodes, causing the POCl3 inside to leak, POCl3, being a colorless, transparent, and toxic liquid with a pungent odor, will react violently with water after the source bottle breaks, producing H3PO4 and HCl. These reaction products are sprayed out in a mist, rapidly spreading in the surrounding area, posing a significant danger. The generated mist of phosphoric acid and hydrochloric acid are toxic substances, irritating the respiratory tract, causing burns and permanent damage to the eyes upon contact, and severe burns upon skin contact. Furthermore, phosphoric acid and hydrochloric acid are corrosive substances that will corrode equipment, instruments, and factory facilities.

[0004] However, if the inlet and outlet pipes are connected in reverse, or the N2 inlet pressure is too high, or the outlet pipe is blocked, the pressure inside the source cylinder may become too high, potentially leading to an explosion. In existing technology, the source cylinder's inlet pipe cannot automatically close and open according to changes in internal pressure. Summary of the Invention

[0005] To address the aforementioned technical shortcomings, the purpose of this invention is to provide an explosion-proof source bottle for diffusion processes. The automatic pressure valve can not only automatically open and close according to the internal air pressure of the source bottle to avoid the danger of source bottle explosion, but also adjust the set pressure threshold to be suitable for source bottles made of different materials. It is highly safe, practical, and versatile.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution.

[0007] The present invention provides an explosion-proof source bottle for diffusion processes, comprising a source bottle body, an inlet pipe and an outlet pipe. The inlet pipe is connected to an automatic pressure valve that can automatically open and close according to the internal air pressure value of the source bottle body. The automatic pressure valve is vertically fixed to the upper wall of the source bottle body, and the end of the automatic pressure valve that contacts the source bottle body is connected to the inside of the source bottle body.

[0008] Preferably, the automatic pressure valve includes a piston tube, an inlet valve pipe, and an outlet valve pipe. The piston tube is hollow, and its internal space is a piston cavity. The inlet valve pipe is fixed to the side wall of the piston tube and communicates with the piston cavity. The outlet valve pipe is fixed to the side wall of the piston tube and communicates with the piston cavity. The inlet valve pipe and the outlet valve pipe are arranged on the same horizontal line. The ends of the inlet valve pipe and the outlet valve pipe away from the piston cavity are respectively connected to the inlet pipe.

[0009] Preferably, the piston chamber is provided with a piston rod that can slide up and down, and a first sealing plug and a second sealing plug fixed on the piston rod. The first sealing plug and the second sealing plug can slide closely against the inner wall of the piston chamber and are sealed to it. The lower end of the first sealing plug is always located above the inlet valve pipe and the outlet valve pipe, and the lower end of the second sealing plug is always located below the inlet valve pipe and the outlet valve pipe. The upper end of the second sealing plug can be located above or below the inlet valve pipe and the outlet valve pipe. The lower wall of the second sealing plug is connected to the inside of the source bottle body.

[0010] Preferably, the upper end of the piston rod passes through the upper wall of the piston tube and is located above the piston tube, and a counterweight structure is provided at the upper end of the piston rod.

[0011] Preferably, the counterweight structure includes a support frame on which a plurality of weights are provided, and the number of weights is adjustable.

[0012] Preferably, the counterweight structure includes a counterweight bottle, and the counterweight bottle has scale lines on its side wall.

[0013] Preferably, the lower end of the piston tube is threadedly connected to the upper wall of the source bottle body.

[0014] The specific advantages of the explosion-proof source bottle for diffusion processes according to the present invention are as follows:

[0015] 1. The automatic pressure valve in this invention can automatically open and close according to the internal air pressure value of the source bottle body. When the pressure of the source bottle body is greater than the set pressure threshold, it automatically blocks the air source from entering. When the pressure of the source bottle body returns to below the set pressure threshold, it automatically opens the air source to enter, successfully avoiding the danger caused by the explosion of the source bottle.

[0016] 2. Since the materials of the source bottle body are different, the pressure that it can withstand inside is different. Users can adjust the set pressure threshold by modifying the weight of the counterweight structure, so that the present invention can be applied to source bottle bodies of different materials, thereby improving the practicality and versatility of the present invention and thus improving work efficiency. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 This is a cross-sectional view of the automatic pressure valve in the open state in Embodiment 1 of the present invention;

[0020] Figure 3 This is a cross-sectional view of the automatic pressure valve in the closed state in Embodiment 1 of the present invention;

[0021] Figure 4 This is a cross-sectional view of the automatic pressure valve in the open state in Embodiment 2 of the present invention.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1. Source bottle body, 2. Inlet pipe, 3. Outlet pipe, 4. Liquid phosphorus oxychloride, 5. Automatic pressure valve, 6. Piston tube, 7. Inlet valve pipe, 8. Outlet valve pipe, 9. Piston chamber, 10. Piston rod, 11. First sealing plug, 12. Second sealing plug, 13. Exhaust convex pipe, 14. Counterweight structure, 15. Counterweight bottle, 16. Scale line, 17. Support frame, 18. Weight. Detailed Implementation

[0024] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0025] Example 1:

[0026] like Figures 1 to 3 As shown, the present invention provides an explosion-proof source bottle for diffusion processes, including a source bottle body 1, an inlet pipe 2, and an outlet pipe 3. The source bottle body 1 contains liquid phosphorus oxychloride 4, i.e., POCl3. One end of the inlet pipe 2 is located inside the source bottle body 1 and is positioned below the liquid surface of the liquid phosphorus oxychloride 4. The other end of the outlet pipe 3 is located inside the source bottle body 1 and is positioned above the liquid surface of the liquid phosphorus oxychloride 4. An N2 gas source is introduced into the liquid POCl3 inside the source bottle body 1 through the inlet pipe 2, and the gaseous POCl3 is carried into the diffusion furnace through the outlet pipe 3 to complete the phosphorus diffusion process.

[0027] As a further aspect of the present invention: an automatic pressure valve 5 is connected to the air inlet pipe 2. The automatic pressure valve 5 is vertically fixed to the upper wall of the source bottle body 1, and the end of the automatic pressure valve 5 that contacts the source bottle body 1 is connected to the inside of the source bottle body 1. The automatic pressure valve 5 can automatically open and close according to the air pressure value inside the source bottle body 1.

[0028] Specifically:

[0029] The automatic pressure valve 5 includes a piston tube 6, an inlet valve air pipe 7, and an outlet valve air pipe 8. The ends of the inlet valve air pipe 7 and the outlet valve air pipe 8 that are away from the piston chamber 9 are respectively connected to the inlet air pipe 2.

[0030] The piston tube 6 is hollow, and its internal space is the piston chamber 9. The inlet valve air pipe 7 is fixed on the side wall of the piston tube 6, and the outlet valve air pipe 8 is fixed on the side wall of the piston tube 6. The inlet valve air pipe 7 and the outlet valve air pipe 8 are connected through the piston chamber 9. The inlet valve air pipe 7 and the outlet valve air pipe 8 are arranged on the same horizontal line to facilitate the opening and closing of the automatic pressure valve 5.

[0031] The piston chamber 9 is provided with a piston rod 10 that can slide up and down, and a first sealing plug 11 and a second sealing plug 12 fixed on the piston rod 10. The first sealing plug 11 and the second sealing plug 12 are made of rubber. The first sealing plug 11 and the second sealing plug 12 can slide tightly against the inner wall of the piston chamber 9 and be sealed to it.

[0032] Among them, such as Figure 2 and Figure 3 As shown, during the process of the first sealing plug 11 and the second sealing plug 12 moving up and down with the piston rod, the lower end of the first sealing plug 11 is always above the inlet valve air pipe 7 and the outlet valve air pipe 8, and the lower end of the second sealing plug 12 is always below the inlet valve air pipe 7 and the outlet valve air pipe 8. The upper end of the second sealing plug 12 can be located above or below the inlet valve air pipe 7 and the outlet valve air pipe 8.

[0033] The lower wall of the second sealing plug 12 is connected to the interior of the source bottle body 1, and the upper wall of the source bottle body 1 is provided with an exhaust convex pipe 13 connected to its interior. The lower end of the piston tube 6 is threadedly sealed to the exhaust convex pipe 13.

[0034] like Figure 2 As shown, at this time, the pressure generated by the gas inside the source bottle body 1 on the second sealing plug 12 is insufficient to make it rise. Therefore, the inlet valve pipe 7 and the outlet valve pipe 8 are connected through the piston chamber 9. At this time, the automatic pressure valve 5 is in the open state.

[0035] like Figure 3As shown, at this time, the pressure generated by the gas inside the source bottle body 1 on the second sealing plug 12 causes it to rise along the axial direction of the piston tube 6, so that the side wall of the second sealing plug 12 simultaneously blocks the inlet valve air pipe 7 and the outlet valve air pipe 8. The inlet valve air pipe 7 and the outlet valve air pipe 8 are not connected, and the automatic pressure valve 5 is in the closed state at this time.

[0036] As a further aspect of the present invention: the upper end of the piston rod 10 passes through the upper wall of the piston tube 6 and is located above the piston tube 6. A counterweight structure 14 is provided at the upper end of the piston rod 10. The weight of the counterweight structure 14 can be adjusted. Since the source bottle body 1 is made of different materials, the pressure it can withstand inside is different. Users can modify the weight of the counterweight structure 14 according to the pressure range that the source bottle body 1 of different materials can withstand during normal operation, thereby improving the practicality and versatility of the present invention and thus improving work efficiency.

[0037] Specifically: The counterweight structure 14 includes a counterweight bottle 15. The counterweight bottle 15 has a scale line 16 on its side wall. The counterweight bottle 15 is made of a transparent material, such as plastic or glass. Users can observe the liquid volume inside the counterweight bottle 15 according to the value of the scale line 16. By adding a certain amount of liquid to the counterweight bottle 15, the gravity of the counterweight structure 14 can be adjusted, thereby adjusting the air pressure threshold inside the source bottle body 1 that triggers the automatic opening and closing of the automatic pressure valve 5.

[0038] Working principle:

[0039] To prevent the source bottle body 1 from exploding due to excessive gas pressure caused by factors such as excessive N2 intake pressure, we set a gas pressure threshold of Y for the source bottle body 1. That is, when the gas pressure inside the source bottle body 1 is less than Y, such as... Figure 2 As shown, at this time, the pressure generated by the gas inside the source bottle body 1 on the second sealing plug 12 is insufficient to cause it to rise. Therefore, the inlet valve pipe 7 and the outlet valve pipe 8 are connected through the piston chamber 9, and the automatic pressure valve 5 is in the open state. That is, when the gas pressure inside the source bottle body 1 is greater than Y, such as... Figure 3 As shown, at this time, the pressure generated by the gas inside the source bottle body 1 on the second sealing plug 12 causes it to rise along the axial direction of the piston tube 6, so that the side wall of the second sealing plug 12 simultaneously blocks the inlet valve pipe 7 and the outlet valve pipe 8. The inlet valve pipe 7 and the outlet valve pipe 8 are not connected. At this time, the automatic pressure valve 5 is in a closed state, which prevents N2 from continuing to enter the source bottle body 1 and prevents the source bottle body 1 from exploding due to excessive gas pressure.

[0040] When the air pressure inside the source bottle body 1 is less than Y again, under the pressure of the counterweight structure 14, the second sealing plug 12 descends, the inlet valve air pipe 7 and the outlet valve air pipe 8 are reconnected through the piston chamber 9, and the automatic pressure valve 5 is reset to the open state, realizing the automatic opening and closing of the automatic pressure valve 5.

[0041] Example 2

[0042] Based on Example 1, the specific structure of the counterweight structure 14 has been modified. Since the material of the source bottle body 1 is different, the pressure it can withstand inside is different. Users can modify the weight of the counterweight structure 14 according to the pressure range that the source bottle body 1 of different materials can withstand to work normally, thereby improving the practicality and versatility of the present invention and improving work efficiency.

[0043] See details Figure 4 The counterweight structure 14 includes a support frame 17, on which several weights 18 are provided. The number of weights 18 can be adjusted. By placing different numbers of weights 18 on the support frame 17, we can adjust the gravity of the counterweight structure 14, thereby adjusting the air pressure threshold inside the source bottle body 1 that triggers the automatic opening and closing of the automatic pressure valve 5.

[0044] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. An explosion-proof source bottle for diffusion processes, comprising a source bottle body (1), an inlet pipe (2), and an outlet pipe (3), characterized in that, The air inlet pipe (2) is connected to an automatic pressure valve (5) that can automatically open and close according to the internal air pressure value of the source bottle body (1). The automatic pressure valve (5) is vertically fixed on the upper wall of the source bottle body (1), and the end of the automatic pressure valve (5) that contacts the source bottle body (1) is connected to the inside of the source bottle body (1). The automatic pressure valve (5) includes a piston tube (6), an inlet valve pipe (7), and an outlet valve pipe (8). The piston tube (6) is hollow, and its internal space is a piston cavity (9). The inlet valve pipe (7) is fixed on the side wall of the piston tube (6) and communicates with the piston cavity (9). The outlet valve pipe (8) is fixed on the side wall of the piston tube (6) and communicates with the piston cavity (9). The inlet valve pipe (7) and the outlet valve pipe (8) are arranged on the same horizontal line. The ends of the inlet valve pipe (7) and the outlet valve pipe (8) away from the piston cavity (9) are respectively connected to the inlet pipe (2). The piston chamber (9) is provided with a piston rod (10) that can slide up and down, and a first sealing plug (11) and a second sealing plug (12) fixed on the piston rod (10). The first sealing plug (11) and the second sealing plug (12) can slide close to the inner wall of the piston chamber (9) and are sealed to it. The lower end of the first sealing plug (11) is always above the inlet valve pipe (7) and the outlet valve pipe (8), and the lower end of the second sealing plug (12) is always below the inlet valve pipe (7) and the outlet valve pipe (8). The upper end of the second sealing plug (12) can be above or below the inlet valve pipe (7) and the outlet valve pipe (8). The lower wall of the second sealing plug (12) is connected to the inside of the source bottle body (1). The upper end of the piston rod (10) passes through the upper wall of the piston tube (6) and is located above the piston tube (6). The upper end of the piston rod (10) is provided with a counterweight structure (14), and the weight of the counterweight structure (14) can be adjusted. The counterweight structure (14) includes a support frame (17), on which a plurality of weights (18) are provided, and the number of weights (18) can be adjusted. The counterweight structure (14) includes a counterweight bottle (15), and the counterweight bottle (15) has scale lines (16) on its side wall.

2. The explosion-proof source bottle for diffusion processes according to claim 1, characterized in that, The lower end of the piston tube (6) is threaded to the upper wall of the source bottle body (1).

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