Standard sample dynamic simulator

Abstract

The present invention relates to a standard sample dynamic simulator, comprising: an air inlet (1), an air filling chamber (2) connected to the air inlet (1), a sample delivery chamber (4), a sample delivery outlet (5) connected to the sample delivery chamber (4), a vacuum linear motion mechanism (9) and a standard volume (6), wherein standard sample gas uniformly enters the air filling chamber (2) from the air inlet (1) and fills the standard volume (6), completing the sampling of the standard sample gas; the vacuum linear motion mechanism (9) drives the standard volume (6) to move downward, discharges the standard sample gas in the standard volume (6) into the sample delivery chamber (4), and completes the delivery of the standard sample gas through the sample delivery outlet (5). The present invention dynamically introduces the standard sample gas in the standard volume into the analysis chamber pipeline, ensures the consistency and knowability of the standard sample gas in the standard volume and the upstream gas source parameters, and can correctly perform value traceability.

Description

Technical Field

[0001] The present invention relates to the technical field of calibration sampling, and in particular to a standard sample dynamic simulator used for calibrating a water vapor content analysis device inside an electronic component. Background Art

[0002] The device for analyzing water vapor content inside electronic components is a high-resolution analytical device used to analyze and detect the water vapor content inside the sealed cavity of electronic components. The device mainly consists of a sampling chamber, an analysis chamber (including a quadrupole mass spectrometer QMS, a full-range vacuum gauge, etc.), an expansion chamber, a sample clamp, a puncture mechanism, an exhaust system, a data processing system, etc. The device determines the volumetric water vapor content by using a quadrupole mass spectrometer QMS to measure the ion flow I of the QMS corresponding to the water vapor (18 amu) released after the sample is punctured. The quadrupole mass spectrometer QMS generally uses standard substances for quantity value transfer. The packaging simulator is a standard component of the device for analyzing water vapor content inside electronic components and can provide it with standard gas samples.

[0003] Water vapor content analyzers on the market include the IPI EDA407 and ORS IVA-210S series, and there are also some mature packaging simulator designs. Water vapor content analyzers primarily obtain standard gas samples by encapsulating a standard gas in a standard volume and then puncturing it to simulate sample puncture. However, since the parameters of the standard gas, including water vapor content and pressure, are completely characterized by upstream pressure gauges and dew point meters, the parameters of the gas in the standard volume are unknown once encapsulated. If puncture is not performed immediately after encapsulation, there is no guarantee that the gas parameters before and after encapsulation are consistent, making it impossible to accurately trace the measurement value, and thus, the accuracy of water vapor analysis within sealed devices cannot be guaranteed. Summary of the Invention

[0004] In order to solve the technical problems existing in the above-mentioned prior art, the purpose of the present invention is to provide a standard sample dynamic simulator used for calibrating the water vapor content analysis device inside electronic components, ensuring the consistency and knowability of the standard sample gas and upstream gas source parameters in the standard volume.

[0005] In order to achieve the above-mentioned object of the invention, the technical solution of the present invention is:

[0006] The present invention provides a standard sample dynamic simulator, comprising: an air inlet, an air filling chamber connected to the air inlet, a sample delivery chamber, a sample delivery outlet connected to the sample delivery chamber, a vacuum linear motion mechanism and a standard volume.

[0007] The standard sample gas evenly enters the gas filling cavity from the gas inlet and fills the standard volume, thereby completing the sampling of the standard sample gas;

[0008] The vacuum linear motion mechanism drives the standard volume to move downward, discharges the standard sample gas in the standard volume into the sample delivery cavity, and completes the delivery of the standard sample gas through the sample delivery outlet.

[0009] According to one aspect of the present invention, the vacuum linear motion mechanism is a bellows dynamic sealing structure.

[0010] According to one aspect of the present invention, the present invention further comprises: an exhaust port,

[0011] The inflation cavity is connected to the exhaust port, and excess standard sample gas in the inflation cavity is discharged through the exhaust port.

[0012] According to one aspect of the present invention, the present invention further comprises: a rubber sealing pad, a sample delivery pipe and a simulator housing.

[0013] The simulator shell is a pipe with flanges at both ends, and a boss is provided inside the pipe;

[0014] The simulator housing is connected to the vacuum linear motion mechanism via a flange;

[0015] A sample delivery cavity is provided inside the sample delivery pipe;

[0016] The rubber sealing gasket is an annular flat sealing gasket. When the sample delivery pipe and the flange of the simulator housing are connected, the sample delivery cavity and the boss jointly press and fix the rubber sealing gasket.

[0017] According to one aspect of the present invention, the standard volume is provided with two rows of small holes, one in an upper row and one in an lower row. When the standard volume is driven, the standard sample gas enters the standard volume through the two rows of small holes, and moves downward with the standard volume. The two rows of small holes pass through the rubber sealing gasket in turn and are blocked, and then expose the plane of the rubber sealing gasket in turn.

[0018] According to one aspect of the present invention, two 4VCR joint pipes are provided on the side wall of the simulator housing.

[0019] The joint pipe is connected to the inflation hole and the exhaust hole respectively;

[0020] The joint pipes are in the same plane, and the angle between adjacent joint pipes is 180°.

[0021] According to one aspect of the present invention, the simulator housing adopts a sealing connection structure of a knife-edge flange and is connected to the sample delivery pipe through a copper gasket.

[0022] According to one aspect of the present invention, the overall leakage rate of the sealing connection structure of the simulator housing is less than 1×10 -10 Pa·m 3 / s.

[0023] According to one aspect of the present invention, the volume range of the standard volume is 0.1 to 10 cm 3 .

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] According to the solution of the present invention, the designed dynamic packaging simulator can provide standard gas samples within a certain volume range for the water vapor content analysis device inside the electronic components by dynamically introducing standard gas into the analysis cavity pipeline, thereby ensuring the consistency and knowability of the standard gas in the standard volume and the upstream gas source parameters, and can correctly perform measurement traceability to ensure that the gas parameters in the standard volume can be traced back to the pressure gauge and dew point meter.

[0026] According to one embodiment of the present invention, standard gas sampling is achieved by ensuring that the standard gas enters the inflation chamber evenly from the inlet and fills the standard volume, while simultaneously flowing through the exhaust port, maintaining a uniform gas flow. A standard sample dynamic simulator utilizes a vacuum linear motion mechanism to drive the perforated standard volume downward. Combined with the sealing effect of a rubber gasket, the standard gas is discharged into the sample delivery chamber, flows through the sample delivery outlet, and is delivered to the analysis chamber of a water vapor content analyzer within an electronic component, completing the standard gas delivery.

[0027] According to one solution of the present invention, the rubber sealing gasket is compressed and fixed by the special design of the boss inside the simulator shell and the sample delivery cavity in the sample delivery pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be derived from these drawings without inventive effort.

[0029] Figure 1 The figure schematically shows the structure of a standard sample dynamic simulator provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0030] The description of the embodiments in this specification should be combined with the corresponding drawings, which should be considered a complete part of this specification. In the drawings, the shapes and thicknesses of the embodiments may be exaggerated and indicated for simplicity or convenience. Furthermore, the various structural components in the drawings will be described separately. It is worth noting that components not shown in the drawings or not described in words are known to those of ordinary skill in the art.

[0031] The description of the embodiments herein and any references to directions and orientations are for ease of description only and are not to be construed as limiting the scope of the present invention. The following description of the preferred embodiments may involve combinations of features, which may exist independently or in combination. The present invention is not specifically limited to the preferred embodiments. The scope of the present invention is defined by the claims.

[0032] According to the present invention, this embodiment discloses a standard sample dynamic simulator for use in calibrating water vapor content analysis devices within electronic components. As a standard component for such devices, the simulator can provide a standard gas sample within a certain volume range. By dynamically introducing the standard gas, the standard gas within the standard volume is dynamically introduced into the analysis chamber pipeline, ensuring consistency and understandability between the standard gas within the standard volume and the upstream gas source parameters. This ensures accurate traceability of the values and ensures that the gas parameters within the standard volume can be traced back to a pressure gauge and dew point meter.

[0033] like Figure 1 As shown, the dynamic simulator for labeled samples includes: an air inlet 1, an air filling chamber 2 connected to the air inlet 1, a rubber sealing gasket 3, a sample delivery chamber 4, a sample delivery outlet 5 connected to the sample delivery chamber 4, an exhaust port 8 connected to the air filling chamber 2, a vacuum linear motion mechanism 9, a standard volume 6, a sample delivery pipe 7 and a simulator housing 10. The air inlet 1, the exhaust port 8, the sample delivery pipe 7, the vacuum linear motion mechanism 9 and the standard volume 6 are all connected to the simulator housing 10, and the air inlet 1 and the exhaust port 8 are horizontally arranged on the left and right sides of the simulator housing 10, respectively. The standard sample gas enters the air filling chamber 2 evenly from the air inlet 1 and fills the standard volume 6, completing the sampling of the standard sample gas. The vacuum linear motion mechanism 9 drives the standard volume 6 to move downward, discharges the standard sample gas in the standard volume 6 into the sample delivery chamber 4, and enters the analysis chamber of the water vapor content analysis device inside the electronic component through the sample delivery outlet 5, completing the sampling of the standard sample gas. While the standard sample gas fills the standard volume 6, the excess standard sample gas in the inflation cavity 2 flows out through the exhaust port 8, which can maintain the uniform flow of gas inside the simulator, ensure the consistency and knowability of the standard sample gas in the standard volume and the upstream gas source parameters, and correctly perform traceability of the measurement value.

[0034] In one embodiment, the simulator housing 10 is a pipe with flanges at both ends, and a boss is provided inside the pipe, which is used in conjunction with the rubber sealing gasket 3. Two 4VCR joint pipes are provided on the side wall of the simulator housing 10, and the joint pipes are respectively connected to the air inlet 1 and the exhaust port 8. The joint pipes are in the same plane, and the angle between adjacent joint pipes is 180°. The simulator housing 10 adopts a knife-edge flange sealing connection structure, and is connected to the sample delivery pipe 7 through a copper gasket.

[0035] In one embodiment, the vacuum linear motion mechanism 9 is a bellows dynamic sealing structure, which is connected to the simulator housing 10 via a flange.

[0036] In one embodiment, the sample delivery tube 7 includes a protruding sample delivery cavity 4, and the rubber gasket 3 is an annular, flat gasket. When the sample delivery tube 7 is flange-connected to the simulator housing 10, the sample delivery cavity 4 and a boss within the simulator housing 10 compress and secure the rubber gasket 3. The specific design of the boss within the simulator housing 10 and the sample delivery cavity 4 within the sample delivery tube 7 achieves compression and securement of the rubber gasket 3.

[0037] In one embodiment, the standard volume 6 is provided with two upper and lower rows of small holes. When the standard volume 6 is driven by the vacuum linear motion mechanism 9, the standard sample gas enters the standard volume 6 through the upper and lower rows of small holes and moves downward with the standard volume 6. The upper and lower rows of small holes pass through the rubber sealing gasket 3 in turn and are blocked, and then the plane of the rubber sealing gasket 3 is exposed in turn, and the filled standard sample gas is discharged into the sample delivery chamber 4.

[0038] In this embodiment, the standard sample dynamic simulator uses a vacuum linear motion mechanism 9 to drive the standard volume 6 with a hole to move downward. Combined with the sealing effect of the rubber sealing gasket 3, the standard sample gas is discharged from the inflation chamber 2 into the sample delivery chamber 4, and then sent into the analysis chamber of the water vapor content analysis device inside the electronic component through the sample delivery outlet, completing the sample delivery of the standard sample gas.

[0039] Preferably, the overall leakage rate of the sealed connection structure of the simulator housing 10 is less than 1×10 -10 Pa·m 3 / s. The volume range of the standard volume 6 is 0.1 to 10 cm 3 .

[0040] All components in the standard sample dynamic simulator of this embodiment are first subjected to a baking and degassing treatment before use, and the baking temperature is set to 100°C.

[0041] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A standard sample dynamic simulator, characterized in that: include: An air inlet (1), an air filling chamber (2) connected to the air inlet (1), a rubber sealing gasket (3), a sample delivery chamber (4), a sample delivery outlet (5) connected to the sample delivery chamber (4), a sample delivery pipe (7), an exhaust port (8), a vacuum linear motion mechanism (9), a simulator housing (10), and a standard volume (6); The standard sample gas evenly enters the gas filling chamber (2) from the gas inlet (1) and fills the standard volume (6); the gas filling chamber (2) is connected to the gas exhaust port (8); and excess standard sample gas in the gas filling chamber (2) is discharged through the gas exhaust port (8); thus, sampling of the standard sample gas is completed; A sample delivery cavity (4) is provided inside the sample delivery pipe (7); The simulator housing (10) is a pipe with flanges at both ends, and a boss is provided inside the pipe; The rubber sealing gasket (3) is an annular flat sealing gasket. When the sample delivery pipe (7) and the flange of the simulator housing (10) are connected, the sample delivery cavity (4) and the boss together press and fix the rubber sealing gasket (3). The vacuum linear motion mechanism (9) drives the standard volume (6) to move downward. The standard volume (6) is provided with two rows of small holes, one above the other. When the standard volume (6) is driven, the standard sample gas enters the standard volume (6) through the two rows of small holes, and moves downward with the standard volume (6). The two rows of small holes pass through the rubber sealing gasket (3) in sequence and are blocked, and then expose the plane of the rubber sealing gasket (3) in sequence. The standard sample gas in the standard volume (6) is discharged into the sample delivery chamber (4), and the sample delivery of the standard sample gas is completed through the sample delivery outlet (5).

2. The standard sample dynamic simulator according to claim 1, characterized in that: The vacuum linear motion mechanism (9) is a bellows dynamic sealing structure.

3. The standard sample dynamic simulator according to claim 1, characterized in that: The simulator housing (10) is connected to the vacuum linear motion mechanism (9) via a flange.

4. The standard sample dynamic simulator according to claim 3, characterized in that: Two 4VCR joint pipes are provided on the side wall of the simulator housing (10). The joint pipe is connected to the air inlet (1) and the air outlet (8) respectively; The joint pipes are in the same plane, and the angle between adjacent joint pipes is 180°.

5. The standard sample dynamic simulator according to claim 3, characterized in that: The simulator housing (10) adopts a knife-edge flange sealing connection structure and is connected to the sample delivery pipe (7) via a copper gasket.

6. The standard sample dynamic simulator according to claim 5, characterized in that: The overall leakage rate of the sealed connection structure of the simulator housing (10) is less than 1×10 -10 Pa·m 3 / s.

7. The standard sample dynamic simulator according to claim 1, characterized in that: The volume range of the standard volume (6) is 0.1 to 10 cm 3 .

8. The standard sample dynamic simulator according to any one of claims 1 to 7, characterized in that: Before sampling and sample delivery, the standard sample dynamic simulator is subjected to baking and degassing treatment.

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