An ultrasonic generating panel and a manufacturing method thereof

Abstract

The present application relates to an ultrasonic wave generating screen and a manufacturing method thereof, comprising a transparent substrate and a vibrating diaphragm stretched on the outside of the transparent substrate, a first transparent electrode is arranged on the inner side of the vibrating diaphragm, a second transparent electrode is arranged on the outside of the transparent substrate, there is an overlapping area between the first transparent electrode and the second transparent electrode, and a transparent insulating medium layer or an air layer is arranged between the first transparent electrode and the second transparent electrode; a hardening block is arranged on the inner side of the first transparent electrode; the hardening block is formed by a patterning process of exposure, development and curing after a photosensitive resin coating layer is coated on the surface of the ITO film. The vibrating diaphragm in the same electrode overlapping area has good consistency of the vibration amplitude of the edge position and the middle position when vibrating, so that the ultrasonic wave can be more close to the ideal situation for directional emission, thereby improving the directivity.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ultrasonic wave, in particular to an ultrasonic wave generating screen and a manufacturing method thereof. BACKGROUND

[0002] The ultrasonic wave generating screen can emit ultrasonic wave and load common sound signals in the ultrasonic wave, so as to realize directional transmission of sound according to the directivity of the ultrasonic wave. The ultrasonic wave generating screen is generally transparent, so as to be combined with a display screen (such as an LCD, OLED or LED screen) to realize common output of images and directional sound.

[0003] The existing ultrasonic wave generating screen generally comprises a transparent substrate and a vibrating diaphragm arranged outside the transparent substrate. The inner side of the vibrating diaphragm and the outer side of the transparent substrate are respectively provided with a first transparent electrode and a second transparent electrode. The first transparent electrode and the second transparent electrode have an overlapping area therebetween. A transparent insulating medium or an air layer is arranged between the first transparent electrode and the second transparent electrode. When an alternating voltage in an ultrasonic frequency band is applied between the first transparent electrode and the second transparent electrode, an alternating electrostatic force is generated between the first transparent electrode and the second transparent electrode. The vibrating diaphragm vibrates under the action of the electrostatic force and emits ultrasonic wave to the front of the screen body.

[0004] In an ideal state, when the voltage is applied between the first transparent electrode and the second transparent electrode, the vibration of the vibrating diaphragm in the same electrode overlapping area has the same phase and amplitude, so that the ultrasonic wave emitted thereby has good directivity. However, in an actual device, when the vibrating diaphragm in the same electrode overlapping area vibrates, the vibration amplitude of the edge position of the vibrating diaphragm is inconsistent with that of the middle position of the vibrating diaphragm due to the pulling action of the film layer outside the area. Therefore, the ultrasonic wave cannot be emitted in the ideal direction, which reduces the directivity of the ultrasonic wave generating screen. SUMMARY

[0005] The present application aims to provide an ultrasonic wave generating screen and a manufacturing method thereof. The vibrating diaphragm in the same electrode overlapping area has good consistency in vibration amplitude between the edge position and the middle position when vibrating, so that the ultrasonic wave can be emitted in the ideal direction, thereby improving the directivity. The technical scheme adopted is as follows.

[0006] An ultrasonic generating screen comprises a transparent substrate and a vibrating diaphragm stretched on the outside of the transparent substrate, a first transparent electrode is arranged on the inner side of the vibrating diaphragm, a second transparent electrode is arranged on the outside of the transparent substrate, and an overlapping area is formed between the first transparent electrode and the second transparent electrode, and a transparent insulating medium layer or an air layer is arranged between the first transparent electrode and the second transparent electrode; characterized in that a hardening block is arranged on the inner side of the first transparent electrode.

[0007] When an alternating voltage in the ultrasonic frequency band is applied between the first transparent electrode and the second transparent electrode, an alternating electrostatic force is generated between the first transparent electrode and the second transparent electrode, the vibrating diaphragm vibrates under the action of the electrostatic force and emits ultrasonic waves to the front of the screen body. In the structure of the ultrasonic transparent screen, the hardening block arranged on the inner side of the first transparent electrode can enhance the shear force at the lateral position of the first transparent electrode, so that the vibrating diaphragm in the overlapping area of the same electrode has better consistency in vibration amplitude between the edge position and the middle position when vibrating, thereby being closer to the ideal vibration state, so that the ultrasonic waves can be emitted in a more ideal directional manner, thereby making the ultrasonic generating screen have good directivity.

[0008] Generally, the transparent substrate is a glass substrate; the first transparent electrode and the second transparent electrode are ITO electrodes.

[0009] As a preferred scheme of the present application, the hardening block is composed of a hardening layer formed by patterning a photosensitive resin coating layer coated on the inner side of the vibrating diaphragm.

[0010] As a further preferred scheme of the present application, the thickness of the hardening layer is 0.25-1 times the thickness of the vibrating diaphragm.

[0011] As a further preferred scheme of the present application, the thickness of the vibrating diaphragm is not more than 20 μm, and the thickness of the hardening layer is 5-20 μm.

[0012] As a further preferred scheme of the present application, the hardening layer has a pattern corresponding to the first transparent electrode and the second transparent electrode.

[0013] As a further preferred scheme of the present application, the hardening block is a hardening frame consistent with the outline of the first transparent electrode and the second transparent electrode. The shape of the hardening frame can also be formed by inwardly retracting or outwardly expanding the outline of the first transparent electrode and the second transparent electrode by not more than 2 mm.

[0014] As a preferred scheme of the present application, a plurality of the second transparent electrodes are arranged on the outer side of the transparent substrate, and the inner side of each second transparent electrode is provided with the stiffening block. By arranging a plurality of second transparent electrodes on the outer side of the transparent substrate and providing the stiffening block, the direction of the emitted ultrasonic waves can be controlled by the phase difference between the adjacent second transparent electrodes.

[0015] As a preferred scheme of the present application, the diaphragm is made of colorless polyimide.

[0016] As a preferred scheme of the present application, the material constituting the transparent insulating medium layer is silica gel.

[0017] As a preferred scheme of the present application, the transparent insulating medium layer is arranged between the middle region of the inner side of the diaphragm and the transparent substrate, the periphery region of the inner side of the diaphragm is coated with the fixing adhesive layer, and the periphery of the inner side of the diaphragm is bonded to the transparent substrate through the fixing adhesive layer.

[0018] As a further preferred scheme of the present application, the material constituting the fixing adhesive layer is ultraviolet curing resin.

[0019] The present application also provides a manufacturing method of the ultrasonic transparent screen, which comprises the following steps:

[0020] (1) coating a coating layer made of colorless polyimide or polyimide precursor on the surface of the glass mother plate, and forming a diaphragm through semi-curing;

[0021] (2) plating an ITO thin film on the surface of the diaphragm and patterning to form a first transparent electrode;

[0022] (3) coating a photosensitive resin coating layer on the surface of the ITO thin film, and forming a stiffening block through the patterning process of exposure, development and curing;

[0023] (4) coating an insulating medium material on the surface of the diaphragm to form a medium layer, the medium layer covering the stiffening block, and coating a fixing adhesive layer on the periphery region of the medium layer;

[0024] (5) plating an ITO thin film on the transparent substrate and patterning to form a second transparent electrode, then covering the transparent substrate with the second transparent electrode on the glass mother plate, so that the first transparent electrode and the second transparent electrode are sandwiched between the transparent substrate and the diaphragm, and curing the fixing adhesive layer and the medium layer to bond the outer side of the transparent substrate and the second transparent electrode to the inner side of the diaphragm through the fixing adhesive layer;

[0025] (6) peeling off all the material layers attached to the glass mother plate from the glass mother plate to obtain the ultrasonic transparent screen.

[0026] As a preferred scheme of the present application, in the step (2), after the ITO film is plated, a metal film is plated on the surface of the ITO film and is patterned to form a metal peripheral circuit.

[0027] In the present specification, the inner and outer are as follows: the side close to the transparent substrate is the inner, and the side close to the diaphragm is the outer.

[0028] Compared with the prior art, the present application has the following advantages:

[0029] The present application adds the hardening block on the inner side of the first transparent electrode, the hardening block can enhance the shear force of the lateral position of the first transparent electrode, so that the diaphragm in the same electrode overlapping area has better consistency of vibration amplitude between the edge position and the middle position when vibrating, thereby it is closer to the ideal vibration state, so that the ultrasonic wave can be more close to the directional emission in the ideal case, thereby the ultrasonic wave generating screen has good directivity. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 is a structural schematic view of the ultrasonic wave generating screen provided by the first embodiment of the preferred embodiment of the present application.

[0031] Figure 2 is a perspective view of Figure 1 .

[0032] Figure 3 is a flowchart of the manufacturing method provided by the first embodiment of the preferred embodiment of the present application.

[0033] Figure 4 is a structural schematic view of the second embodiment of the preferred embodiment of the present application. DETAILED DESCRIPTION

[0034] Embodiment One

[0035] As shown in Figure 1 , Figure 2 , the ultrasonic wave generating screen comprises a transparent substrate 1 and a diaphragm 2 arranged on the outer side of the transparent substrate 1, the inner side of the diaphragm 2 is provided with a first transparent electrode 3, the outer side of the transparent substrate 1 is provided with a second transparent electrode 4, the first transparent electrode 3 and the second transparent electrode 4 have an overlapping area, and the first transparent electrode 3 and the second transparent electrode 4 are clamped with a transparent insulating medium layer 5; the inner side of the first transparent electrode 3 is provided with a hardening block 61 composed of a hardening layer 6.

[0036] In the present embodiment, the transparent substrate 1 is a glass substrate; the first transparent electrode 3 and the second transparent electrode 4 are ITO electrodes.

[0037] In the present embodiment, the diaphragm 2 is composed of colorless polyimide.

[0038] In the present embodiment, a transparent insulating medium layer 5 is provided between the middle region of the inner side surface of the diaphragm 2 and the transparent substrate 1, and a fixed adhesive layer 7 is coated on the peripheral region of the inner side surface of the diaphragm 2, so that the periphery of the inner side surface of the diaphragm 2 is bonded to the transparent substrate 1 through the fixed adhesive layer 7.

[0039] In the present embodiment, the thickness of the diaphragm 2 is not more than 20 μm, and the thickness of the hardened layer 6 is 5-20 μm.

[0040] In the present embodiment, the hardened layer 6 is formed by coating a photosensitive resin coating on the inner side surface of the diaphragm 2 and then patterning, and the hardened layer 6 has a pattern corresponding to the first transparent electrode 3 and the second transparent electrode 4.

[0041] Reference Figure 3 The present embodiment also provides a manufacturing method of the above-mentioned ultrasonic transparent screen, comprising the following steps:

[0042] (1) A coating layer composed of colorless polyimide or polyimide precursor (such as polyamic acid) is coated on the surface of the glass mother plate 10, and a semi-cured diaphragm 2 is formed;

[0043] (2) A layer of ITO film (i.e. indium tin oxide film) is plated on the surface of the diaphragm 2 and patterned to form the first transparent electrode 3 (a metal peripheral circuit can be further plated on the surface of the ITO film and patterned);

[0044] (3) A photosensitive resin coating is coated on the surface of the ITO film, and a hardened block 61 is formed by the patterning process of exposure, development and curing;

[0045] (4) An insulating medium material (such as silica gel) is coated on the surface of the diaphragm 2 to form a medium layer 5, the medium layer 5 covers the hardened block 61, and an ultraviolet light cured resin is coated on the peripheral region of the medium layer 5 to form a fixed adhesive layer 7;

[0046] (5) A layer of ITO film is plated on the transparent substrate 1 and patterned to form the second transparent electrode 4, the transparent substrate 1 with the second transparent electrode 4 is then covered on the glass mother plate 10, so that the first transparent electrode 3 and the second transparent electrode 4 are sandwiched between the transparent substrate 1 and the diaphragm 2, and the fixed adhesive layer 7 and the medium layer 5 are cured, so that the outer side surface of the transparent substrate 1 and the second transparent electrode 4 is bonded to the inner side surface of the diaphragm 2 through the fixed adhesive layer 7;

[0047] (6) All the material layers attached to the glass mother plate 10 are peeled off from the glass mother plate 10, and the ultrasonic transparent screen is obtained.

[0048] Embodiment Two

[0049] Reference Figure 4In other parts, they are the same as the first embodiment, but the difference is that, in this embodiment, the hardening block 61 is a hardening frame consistent with the outline of the first transparent electrode 3 and the second transparent electrode 4.

[0050] In addition, it should be noted that the specific embodiments described in the specification, the name of each part, etc. can be different, and any equivalent or simple change made in accordance with the structure, features and principles described in the patent concept of the present application are included in the protection scope of the present application. Those skilled in the art can make various modifications or supplements to the described specific embodiments or use similar ways to replace them, as long as they do not deviate from the structure of the present application or exceed the scope defined by the present claims, which shall belong to the protection scope of the present application.

Claims

1. An ultrasonic generating panel comprising a transparent substrate and a diaphragm stretched on the outer side of the transparent substrate, a first transparent electrode being provided on the inner side of the diaphragm, a second transparent electrode being provided on the outer side of the transparent substrate, an overlapping area being provided between the first transparent electrode and the second transparent electrode, and a transparent insulating medium layer or an air layer being provided between the first transparent electrode and the second transparent electrode; characterized in that: The inner side of the first transparent electrode is provided with a hardening block, which is composed of a hardening layer formed by patterning a photosensitive resin coating on the inner side of the diaphragm.

2. An ultrasonic generating panel according to claim 1, wherein: The thickness of the hardening layer is 0.25-1 times the thickness of the diaphragm.

3. An ultrasonic generating panel according to claim 1, wherein: The hardening layer has a pattern corresponding to the first transparent electrode and the second transparent electrode.

4. The ultrasonic generating panel according to claim 1, wherein: The hardening block is a hardening frame consistent with the profile of the first transparent electrode and the second transparent electrode.

5. An ultrasonic generating panel according to any one of claims 1 to 4, characterized in that: The outer side of the transparent substrate is provided with a plurality of the second transparent electrodes, and the inner side of each second transparent electrode is provided with the hardening block.

6. An ultrasonic generating panel according to any one of claims 1 to 4, characterized in that: The transparent insulating medium layer is arranged between the middle region of the inner side of the diaphragm and the transparent substrate, and the periphery region of the inner side of the diaphragm is coated with a fixing adhesive layer, so that the periphery of the inner side of the diaphragm is bonded to the transparent substrate through the fixing adhesive layer.

7. An ultrasonic generating panel according to claim 6, wherein: The diaphragm is composed of colorless polyimide, and the fixing adhesive layer is made of ultraviolet curing resin.

8. A method of manufacturing an ultrasonic wave generating panel, characterized by The method comprises the following steps: (1) coating a coating layer composed of colorless polyimide or polyimide precursor on the surface of a glass mother plate, and forming a diaphragm through semi-curing; (2) plating an ITO thin film on the surface of the diaphragm and patterning to form a first transparent electrode; (3) coating a photosensitive resin coating on the surface of the ITO thin film, and forming a hardening block through the patterning process of exposure, development and curing; (4) coating an insulating medium material on the surface of the diaphragm to form a medium layer, which covers the hardening block, and coating a fixing adhesive layer on the periphery region of the medium layer; (5) plating an ITO thin film on the transparent substrate and patterning to form a second transparent electrode, then covering the transparent substrate with the second transparent electrode on the glass mother plate, so that the first transparent electrode and the second transparent electrode are sandwiched between the transparent substrate and the diaphragm, and then curing the fixing adhesive layer and the medium layer, so that the outer side of the transparent substrate and the second transparent electrode is bonded to the inner side of the diaphragm through the fixing adhesive layer; (6) peeling off all the material layers attached to the glass mother plate from the glass mother plate to obtain the ultrasonic generating screen.

9. A method of manufacturing an ultrasonic panel according to claim 8, wherein: In the step (2), after plating the ITO thin film, a metal film is plated on the surface of the ITO thin film and patterned to form a metal periphery circuit.

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