A detection method, a detection system and a computer readable storage medium

Abstract

Embodiments of the present application provide a detection method, a detection system and a computer readable storage medium, which are used to improve the convenience of obtaining a measurement position of a to-be-measured point. The detection method in the embodiments of the present application comprises: obtaining a sample and a first detection module, the sample comprising a plurality of reference points, detecting each reference point of the sample by the first detection module respectively, obtaining an initial position relationship, the initial position relationship being a relationship between the measurement position and detection information of the reference points, obtaining a position relationship according to the initial position relationship, the position relationship representing a relationship between the measurement position of a to-be-measured point of the sample and detection information; detecting the to-be-measured point of the sample in a to-be-measured position by the first detection module to obtain detection information of the to-be-measured point, the to-be-measured position being a relative position between the first detection module and the sample along a measurement direction; and obtaining a height difference of the to-be-measured point relative to a reference position along the measurement direction according to the detection information, the position relationship and the reference position.

Description

Technical Field

[0001] This application relates to the field of microscopic imaging, specifically to a detection method, a detection system, and a computer-readable storage medium. Background Technology

[0002] Focusing technology is widely used in scientific research and industrial inspection and processing related to microscopic imaging. High-precision and high-speed focusing are the continuous directions for improvement in focusing technology. In recent years, with the rapid development of the semiconductor chip industry, the demand for sample optical inspection and measurement equipment has been increasing. For example, in film thickness measurement equipment based on the ellipsometer principle, the accuracy of focusing directly affects the accuracy and repeatability of film thickness measurement, and precise focusing generally requires a long time—several seconds—to achieve. Inspecting a single sample usually requires dozens or even hundreds of focusing operations, which greatly limits the improvement of production capacity. Summary of the Invention

[0003] To overcome the shortcomings of slow detection speed in existing technologies, embodiments of this application provide a detection method, including:

[0004] A sample and a first detection module are acquired, wherein the sample includes at least one reference point, and the first detection module is used to detect the sample and output detection information;

[0005] The first detection module performs detection processing on each reference point of the sample to obtain an initial positional relationship. The steps of detecting and processing the reference points include: detecting the sample at different measurement positions along the measurement direction to obtain detection information of the reference points of the sample at each measurement position, wherein the measurement position is the relative position between the sample and the first detection module; and obtaining an initial positional relationship based on the detection information of the reference points of the sample at different measurement positions, wherein the initial positional relationship is the relationship between the detection information of the measurement positions and the reference points.

[0006] When the relative position of the first detection module and the reference point surface along the measurement direction is at a preset position, the relative position of the first detection module and the sample along the measurement direction is used as the reference position, wherein the preset position value is equal to the reference position value;

[0007] Obtain the reference detection information of the reference point when the relative position of the first detection module and the sample is at the reference position;

[0008] The initial position relationship and / or the reference position are calibrated based on the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial position relationship remains unchanged before and after the calibration process.

[0009] After the calibration process, the positional relationship is obtained based on the initial positional relationship, which represents the relationship between the measurement position of the sample test point and the detection information.

[0010] The first detection module detects the test point of the sample at the test position to obtain the detection information of the test point. The test position is the relative position between the first detection module and the sample along the measurement direction.

[0011] Based on the detection information of the point to be measured, the positional relationship, and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained.

[0012] Optionally, the first detection module includes a detector for receiving signal light from the sample and acquiring the detection information based on the signal light;

[0013] The detection information includes the position coordinates of the light spot formed by the signal light on the photosensitive surface of the detector.

[0014] Optionally, the first detection module detects samples at different measurement positions to obtain detection information for each reference point at each measurement position, including: when the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is taken as the focal position, and a range of preset offsets from the focal position in both the positive and negative directions along the measurement direction is set as the sampling range; the sample is moved along the measurement direction within the sampling range, and detection information for each reference point at each measurement position is obtained when the sample moves to different measurement positions.

[0015] Optionally: Set the focus position of the second detection module to the reference position;

[0016] When the relative position of the first detection module and the reference point surface along the measurement direction is at a preset position, the relative position of the first detection module and the sample along the measurement direction is used as the reference position, including: when the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is used as the focal position.

[0017] When the relative positions of the first detection module and the sample are at the reference position, the reference detection information of the reference point includes: when the relative positions of the first detection module and the sample are at the focal position, the detection information output by the first detection module is used as the reference detection information.

[0018] When the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is taken as the focal position. This includes: moving the sample relative to the second detection module along the measurement direction; outputting the detection result through the second detection module during the relative movement; determining the measurement position in the measurement direction that maximizes or exceeds a preset value of the detection result as the focal position. The detection quality includes one or a combination of signal-to-noise ratio, image sharpness, or robustness.

[0019] Optionally, the output of detection results through the second detection module during relative movement includes: setting a preset step size; and outputting a detection result through the second detection module each time the sample moves relative to the second detection module along the measurement direction by the preset step size.

[0020] Optionally, obtaining the positional relationship based on the initial positional relationship includes:

[0021] Based on the initial positional relationship, the detection information of the point to be measured at different measurement positions is interpolated to obtain the detection information of the point to be measured at different measurement positions;

[0022] The positional relationship is obtained based on multiple detection information of the point to be measured at different measurement locations.

[0023] Optionally, if there are multiple reference points, the positional relationship is obtained based on the initial positional relationship, including:

[0024] Select any measurement location as the first measurement location, and perform a first function acquisition operation on the first measurement location. The first function acquisition operation includes: acquiring multiple detection information of each reference point located at different positions within the sample measurement surface at the first measurement location.

[0025] Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained;

[0026] Each measurement location is selected as the first measurement location, and the first function operation is executed to obtain the detection information of the test point of the sample at each measurement location;

[0027] The positional relationship is obtained based on the detection information of the sample test points at each measurement location.

[0028] Optionally, based on the correspondence between the positions of each reference point within the sample measurement surface and the plurality of detection information, the detection information of the sample test point at the first measurement position is obtained, including: fitting the correspondence between the positions of each reference point within the sample measurement surface and the plurality of detection information to obtain a first functional relationship at the first measurement position, wherein the first functional relationship is the relationship between the positions of each reference point within the sample measurement surface and the detection information, and the measurement surface is perpendicular to the measurement direction or has an acute angle; substituting the position of the test point within the measurement surface into the first functional relationship to obtain the detection information of the sample test point at the first measurement position;

[0029] or,

[0030] Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained, including: interpolating the detection information of the test point based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain the detection information of the sample test point at the first measurement position.

[0031] Optionally: Fit the correspondence between each detection information of the test point and each measurement position to obtain the positional relationship; or, obtain the correspondence between each detection information and each measurement position of the test point to obtain the positional relationship.

[0032] Optionally, if there are multiple reference points;

[0033] Obtaining the positional relationship based on the initial positional relationship includes: averaging the initial positional relationships of each reference point to obtain the positional relationship.

[0034] Optionally, the initial positional relationship is obtained based on the detection information of the reference point of the sample at different measurement locations, including: fitting the detection information of the reference point at different measurement locations with an undetermined function to obtain the fitting value of the undetermined coefficient of the undetermined function; and substituting the fitting value into the undetermined function to obtain the initial positional relationship of the reference point.

[0035] Optionally, the undetermined function includes: a linear function, a polynomial, a Fourier series expansion, or a trigonometric function expansion.

[0036] Optionally, the initial positional relationship includes at least one component;

[0037] The initial positional relationships of each reference point are averaged to obtain the positional relationships, including: selecting each component of the initial positional relationship as a reference item; and performing a combination process on each reference item to obtain the combination coefficients of each component of the positional relationship. Specifically, performing the combination process on any reference item includes: selecting a specific item of the initial positional relationship of each reference point as a reference item; obtaining a coefficient set based on the initial positional relationships of each reference point, the coefficient set comprising a set of coefficients of the reference items of each initial positional relationship; and averaging the coefficient set to obtain the combination coefficients.

[0038] The positional relationship is obtained by replacing the coefficients of the corresponding terms in the initial positional relationship with the combination coefficients of each component term.

[0039] Optionally, the coefficient group further includes: position information of each reference point on the sample measurement surface, wherein the measurement surface is perpendicular to the measurement direction or has an acute angle; the mean value processing includes: performing optimization processing based on the correspondence between the position information of each reference point and each coefficient in the coefficient group to obtain the coefficient of the point to be measured and thus obtain the combined coefficient; the optimization processing includes numerical interpolation or function fitting.

[0040] Optionally, the position information of the reference point includes: first position information along a first direction and second position information along a second direction, wherein both the first and second directions are located within the measurement surface, and the first and second directions are perpendicular or have an acute angle between them.

[0041] The numerical interpolation or function fitting includes two-dimensional topography fitting or two-dimensional topography interpolation.

[0042] Optionally, the mean-averaging process includes: obtaining the weighted value or median of each coefficient in the coefficient group.

[0043] Optionally, the reference point is located within a first preset range including the test point; the sample also has other test points located within a second preset range including the test point, the first preset range including the second preset range, and the detection method further includes: detecting the other test points of the test sample to obtain detection information of the other test points; and obtaining the height difference of the other test points relative to the reference position along the measurement direction based on the positional relationship and the detection information of the other test points.

[0044] Optionally, after obtaining the height of the point to be measured relative to the reference position along the measurement direction based on the detection information, the positional relationship, and the reference position, the method further includes:

[0045] Based on the height difference of the point to be measured relative to the reference position along the measurement direction;

[0046] The sample and the first detection module are controlled to move relative to each other to reduce the height difference;

[0047] After the sample and the first detection module move relative to each other, the process returns to the step of detecting the test point of the sample at the test position through the first detection module to obtain the detection information of the test point, where the test position is the relative position between the first detection module and the sample along the measurement direction, and the step of obtaining the height difference of the test point relative to the reference position along the measurement direction based on the detection information of the test point, the positional relationship and the reference position.

[0048] Determine whether the height difference meets the preset accuracy; if not, return to the step of controlling the relative movement of the sample and the first detection module to reduce the height difference, until the number of returns reaches the preset number or the height difference meets the preset accuracy.

[0049] Optionally, if the number of reference points is one, then obtaining the positional relationship based on the initial positional relationship of the reference points includes: using the initial positional relationship as the positional relationship.

[0050] Optionally, calibrating the initial positional relationship based on the reference detection information, such that the measurement position corresponding to the reference detection information is the same as the reference position, includes:

[0051] Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position;

[0052] Obtain the reference deviation between the reference measurement position and the reference position;

[0053] Using the reference deviation, each measurement position in the initial position relationship is compensated so that the reference measurement position of the compensated initial position relationship is the same as the reference position;

[0054] The reference position is calibrated based on the reference detection information so that the measurement position corresponding to the reference detection information is the same as the reference position, including:

[0055] Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position;

[0056] The reference position is compensated so that the compensated reference position is equal to the reference measurement position.

[0057] Optionally, based on the detection information, the positional relationship, and the reference position, the height of the point to be measured relative to the reference position along the measurement direction is obtained, including:

[0058] Based on the detection information and positional relationship, the measurement position of the point to be measured is obtained;

[0059] Based on the difference between the measured position of the point to be measured and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained;

[0060] A second aspect of this application provides a detection system applied to the detection method provided in the first aspect of this application, including:

[0061] A first acquisition module is used to acquire a sample and a first detection module. The sample includes at least one reference point. The first detection module is used to detect the sample and output detection information.

[0062] The first detection module is used to perform detection processing on each reference point of the sample to obtain an initial positional relationship. The first detection module includes a first detection unit and a first acquisition unit. The first detection unit is used to detect the sample at different measurement positions along the measurement direction and acquire the detection information of the reference points of the sample at each measurement position. The measurement position is the relative position between the sample and the first detection module. The first acquisition unit is used to acquire an initial positional relationship based on the detection information of the reference points of the sample at different measurement positions. The initial positional relationship is the relationship between the detection information of the measurement positions and the reference points.

[0063] The second acquisition module is used to acquire the relative position of the first detection module and the sample along the measurement direction when the relative position of the first detection module and the reference point surface along the measurement direction is in a preset position, and the relative position of the first detection module and the sample along the measurement direction is used as the reference position.

[0064] The first detection module is further configured to acquire reference detection information of the reference point when the relative position of the first detection module and the sample is at the reference position;

[0065] The calibration module is used to calibrate the initial position relationship and / or the reference position according to the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial position relationship remains unchanged before and after the calibration process;

[0066] The second acquisition module is further configured to acquire a positional relationship based on an initial positional relationship after the calibration process, wherein the positional relationship represents the relationship between the measurement position of the sample test point and the detection information;

[0067] The first detection module is further configured to detect the test point of the sample at the test position to obtain the detection information of the test point, wherein the test position is the relative position between the first detection module and the sample along the measurement direction;

[0068] The second acquisition module is further configured to acquire the height difference of the test point relative to the reference position along the measurement direction based on the detection information of the test point, the positional relationship, and the reference position.

[0069] Optionally, the first detection module includes a detector for receiving signal light from the sample and acquiring the detection information based on the signal light;

[0070] The detection information includes the position coordinates of the light spot formed by the signal light on the photosensitive surface of the detector.

[0071] Optionally, the first detection unit includes a setting subunit and an acquisition subunit:

[0072] The setting subunit is used to, when the second detection module focuses on the reference point, take the position of the sample relative to the first detection module along the measurement direction as the focal position, and set the range of the distance from the focal position by a preset offset in both directions along the measurement direction as the sampling range; the acquisition subunit is used to move the sample along the measurement direction within the sampling range, and acquire the detection information of each reference point at each measurement position when the sample moves to different measurement positions.

[0073] Optionally, the system further includes a setting module for setting the focus position of the second detection module to the reference position;

[0074] The setting subunit is specifically used to: when the second detection module focuses on the reference point, take the position of the sample relative to the first detection module along the measurement direction as the focal position;

[0075] The second acquisition module is specifically used to: acquire the detection information output by the first detection module when the relative position of the first detection module and the sample is at the focal position, and use it as the reference detection information;

[0076] The setting subunit is specifically used for: moving the sample relative to the second detection module along the measurement direction; outputting the detection result through the second detection module during the relative movement; determining the measurement position in the measurement direction that maximizes or exceeds the preset value of the detection result, which is the focal position, wherein the detection quality includes one or more of the following: signal-to-noise ratio, image clarity, or robustness.

[0077] Optionally, the setting subunit is specifically used to: set a preset step size; and output a detection result through the second detection module whenever the sample moves relative to the second detection module along the measurement direction by the preset step size.

[0078] Optionally, the second acquisition module is specifically used for:

[0079] Based on the initial positional relationship, the detection information of the point to be measured at different measurement positions is interpolated to obtain the detection information of the point to be measured at different measurement positions;

[0080] The positional relationship is obtained based on multiple detection information of the point to be measured at different measurement locations.

[0081] Optionally, if there are multiple reference points, the initial positional relationship is the discrete correspondence between the spatial positions of each reference point and the detection information. The second acquisition module is specifically used for:

[0082] Select any measurement location as the first measurement location, and perform a first function acquisition operation on the first measurement location. The first function acquisition operation includes: acquiring multiple detection information of each reference point located at different positions within the sample measurement surface at the first measurement location.

[0083] Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained;

[0084] Each measurement location is selected as the first measurement location, and the first function operation is executed to obtain the detection information of the test point of the sample at each measurement location;

[0085] The positional relationship is obtained based on the detection information of the sample test points at each measurement location.

[0086] Optionally, the second acquisition module is specifically used for:

[0087] Fit the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain a first functional relationship of the first measurement position. The first functional relationship is the relationship between the positions of each reference point in the sample measurement surface and the detection information. The measurement surface is perpendicular to the measurement direction or has an acute angle. Substitute the position of the test point in the measurement surface into the first functional relationship to obtain the detection information of the test point of the sample at the first measurement position.

[0088] or,

[0089] Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained, including: interpolating the detection information of the test point based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain the detection information of the sample test point at the first measurement position.

[0090] Optionally, the second acquisition module is specifically used for:

[0091] Obtaining the positional relationship based on the detection information of the sample test point at each measurement location includes: fitting the correspondence between each detection information of the test point and each measurement location to obtain the positional relationship; or, obtaining the correspondence between each detection information and each measurement location of the test point to obtain the positional relationship.

[0092] Optionally, if there are multiple reference points;

[0093] The second acquisition module is specifically used for:

[0094] Obtaining the positional relationship based on the initial positional relationship includes: averaging the initial positional relationships of each reference point to obtain the positional relationship.

[0095] Optionally, the first acquisition unit is specifically used for:

[0096] The detection information of the reference point at different measurement locations is fitted by an undetermined function to obtain the fitted values ​​of the undetermined coefficients of the undetermined function; the fitted values ​​are then substituted into the undetermined function to obtain the initial positional relationship of the reference point.

[0097] Optionally, the undetermined function includes: a linear function, a polynomial, a Fourier series expansion, or a trigonometric function expansion.

[0098] Optionally, the initial positional relationship includes at least one component;

[0099] The second acquisition module is specifically used for:

[0100] Each component of the initial positional relationship is selected as a reference item; and a combination process is performed on each reference item to obtain the combination coefficients of each component of the positional relationship. The combination process for any reference item includes: selecting one item of the initial positional relationship of each reference point as a reference item; obtaining a coefficient set based on the initial positional relationship of each reference point, wherein the coefficient set includes a set of coefficients composed of the reference items of each initial positional relationship; and performing a mean-averaging process on the coefficient set to obtain the combination coefficients.

[0101] The positional relationship is obtained by replacing the coefficients of the corresponding terms in the initial positional relationship with the combination coefficients of each component term.

[0102] Optionally, the coefficient set further includes: position information of each reference point on the sample measurement surface, wherein the measurement surface is perpendicular to the measurement direction or has an acute angle with it;

[0103] The second acquisition module is specifically used for:

[0104] Each component of the initial positional relationship is selected as a reference term; and a combination process is performed on each reference term to obtain the combination coefficients of each component of the positional relationship. The combination process for any reference term includes: selecting one term of the initial positional relationship of each reference point as a reference term; obtaining a coefficient set based on the initial positional relationship of each reference point, wherein the coefficient set includes a set of coefficients of the reference terms of each initial positional relationship and the position information of each reference point on the sample measurement surface; and performing optimization processing based on the correspondence between the position information of each reference point and the coefficients in the coefficient set to obtain the coefficients of the point to be measured, thus obtaining the combination coefficients. The optimization processing includes numerical interpolation or function fitting.

[0105] The positional relationship is obtained by replacing the coefficients of the corresponding terms in the initial positional relationship with the combination coefficients of each component term.

[0106] Optionally, the position information of the reference point includes: first position information along a first direction and second position information along a second direction, wherein both the first and second directions are located within the measurement surface, and the first and second directions are perpendicular or have an acute angle between them.

[0107] The numerical interpolation or function fitting includes two-dimensional topography fitting or two-dimensional topography interpolation.

[0108] Optionally, the mean-averaging process includes: obtaining the weighted value or median of each coefficient in the coefficient group.

[0109] Optionally, the reference point is located within a first preset range including the test point; the sample also has other test points located within a second preset range including the test point, the first preset range including the second preset range;

[0110] The second acquisition module is further configured to: detect other test points of the sample to be tested, and acquire detection information of the other test points; and acquire the height difference of the other test points relative to the reference position along the measurement direction based on the positional relationship and the detection information of the other test points.

[0111] Optionally, the detection system further includes:

[0112] The control module is used to control the relative movement of the sample and the first detection module to reduce the height difference based on the height difference between the test point and the reference position along the measurement direction.

[0113] The judgment module is used to, after the sample and the first detection module have moved relative to each other, return to execute the step of detecting the test point of the sample at the test position through the first detection module to obtain the detection information of the test point, wherein the test position is the relative position between the first detection module and the sample along the measurement direction; and obtain the height difference of the test point relative to the reference position along the measurement direction based on the detection information of the test point, the positional relationship and the reference position; and determine whether the height difference meets the preset accuracy.

[0114] The return module is used to return to the step of controlling the relative movement of the sample and the first detection module to reduce the height difference when the height difference does not meet the preset accuracy, until the number of return times reaches a preset number or the height difference meets the preset accuracy.

[0115] Optionally, if the number of reference points is one, the second acquisition module is specifically used to: use the initial positional relationship as the positional relationship.

[0116] Optionally, the calibration module is specifically used for:

[0117] Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position;

[0118] Obtain the reference deviation between the reference measurement position and the reference position;

[0119] Using the reference deviation, each measurement position in the initial position relationship is compensated so that the reference measurement position of the compensated initial position relationship is the same as the reference position;

[0120] or,

[0121] Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position;

[0122] The reference position is compensated so that the compensated reference position is equal to the reference measurement position.

[0123] Optionally, the second acquisition module is specifically used for:

[0124] Based on the detection information and positional relationship, the measurement position of the point to be measured is obtained;

[0125] Based on the difference between the measured position of the point to be measured and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained.

[0126] A third aspect of this application provides a computer-readable storage medium including a computer program, which, when executed by a processor, is used to implement the detection method provided in the first aspect of this application.

[0127] In this embodiment, the first detection module performs detection processing on each reference point of the sample to obtain an initial positional relationship. Then, when the relative position of the first detection module and the surface of the reference point along the measurement direction is at a preset position, the relative position of the first detection module and the sample along the measurement direction is taken as the reference position. The reference detection information of the reference point at the reference position is obtained. The initial positional relationship and / or the reference position are further calibrated using the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial positional relationship before and after the calibration process remains unchanged. After the calibration process, the positional relationship is obtained according to the initial positional relationship. The positional relationship represents the relationship between the measurement position of the sample's test point and the detection information. Finally, the first detection module detects the test point of the sample at the test position to obtain the detection information of the test point. According to the detection information, the positional relationship, and the reference position, the height difference of the test point relative to the reference position along the measurement direction is obtained.

[0128] Because the embodiments of this application can obtain the positional relationship between the detection information and the measurement position of the test point on the test sample by the initial positional relationship between the measurement position of the reference point of the sample in the measurement direction and the detection information, and calibrate the initial positional relationship and / or the reference position by the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, the detection error caused by the thickness error of the test point relative to the sample measurement surface can be eliminated, thereby improving the detection accuracy.

[0129] Furthermore, by obtaining the positional relationship from multiple reference points to detect the test point, the measurement error caused by the large positional relationship error between the selected reference point and the test point due to the different angles of the sample surface when arbitrarily selecting a reference point to obtain the positional relationship can be reduced, thereby improving the accuracy of obtaining the measurement position and height difference of the test point.

[0130] Furthermore, by averaging the initial positional relationships to obtain the positional relationships, the overall error caused by the errors in the initial positional relationships of multiple reference points can be reduced, thereby improving the accuracy of the positional relationships. Attached Figure Description

[0131] Figure 1 This is a schematic diagram of the structure of the first detection module in the embodiments of this application;

[0132] Figure 2This is a schematic diagram of one embodiment of the detection method in this application;

[0133] Figure 3 For this application Figure 2 Detailed steps of step 202 in the embodiment;

[0134] Figure 4 This is a schematic diagram of the sampling range in an embodiment of this application;

[0135] Figure 5 For this application Figure 2 Detailed steps of step 206 in the embodiment;

[0136] Figure 6 For this application Figure 2 Another detailed step of step 206 in the embodiment;

[0137] Figure 7 For this application Figure 6 Detailed steps of step 602 in the embodiment;

[0138] Figure 8 For this application Figure 6 Another detailed step of step 602 in the embodiment;

[0139] Figure 9 for Figure 2 Another detailed step of step 202 in the embodiment;

[0140] Figure 10 This is a detailed step for averaging the initial positional relationships of each reference point;

[0141] Figure 11 This is another refinement step for averaging the initial positional relationships of each reference point;

[0142] Figure 12 This is a schematic diagram of the first and second preset ranges in the embodiments of this application;

[0143] Figure 13 This is a schematic diagram of another embodiment of the detection method in this application;

[0144] Figure 14 This is a schematic diagram of another embodiment of the detection method in this application;

[0145] Figure 15 This outlines the detailed steps for calibrating the initial positional relationship based on benchmark detection information.

[0146] Figure 16 This outlines the detailed steps involved in calibrating the reference position based on reference detection information.

[0147] Figure 17This is a refinement step to obtain the height difference between the point to be measured and the reference position along the measurement direction;

[0148] Figure 18 This is a schematic diagram of one embodiment of the detection system described in this application. Detailed Implementation

[0149] The terms "first," "second," "third," "fourth," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0150] For ease of understanding, the first detection module in this application will be described below:

[0151] Please see Figure 1 The first detection module in this embodiment includes a detection light source 1, a reflector 2, a first mirror group 3, a sample 4, a second mirror group 5, a detector 6, a controller 7, and a computer 8. In this embodiment, the sample is fixed by a support platform.

[0152] The detection light source is used to emit detection light towards the sample. The first mirror group 3 is used to converge or parallel the detection light onto the sample, and the detection light is reflected by the sample to form signal light. The second mirror group 5 is used to collect the signal light reflected from the sample and converge or parallel the collected signal light onto the detector. The detector is used to receive the signal light from the sample and obtain the detection information based on the signal light; specifically, the detector receives the signal light collected by the second mirror group. In this embodiment, the detection information includes the position coordinates of the light spot formed by the signal light on the photosensitive surface of the detector.

[0153] Specifically, the detection light source 1 can be a highly stable coherent or incoherent light source, such as a laser. The reflector 2 is preferably a plane mirror, used to irradiate the detection beam emitted by the detection light source onto the surface of the sample 4. The first mirror group 3 is used to focus the detection beam and irradiate the surface of the sample 4 with the focused spot. The second mirror group 5 is used to collimate the reflected light from the sample surface. The detector 6 detects the collimated reflected light to obtain the position information of the reflected light from the sample surface in the photosensitive surface of the detector. The controller 7 is used to perform photoelectric conversion on the information detected by the detector and output it through the computer 8. The detector can be a complementary metal oxide semiconductor CMOS, a photoelectric position sensor PSD, or a charge-coupled device CCD, without specific limitations.

[0154] Figure 1 Sample 4 in the embodiment can be along Figure 1 The Z-axis direction is moved up and down, allowing the detector 6 to acquire the detection information of the sample reference point when the sample 4 is at different measurement positions.

[0155] based on Figure 1 The first detection module is described in detail below, along with the detection method in the embodiments of this application. Please refer to [link / reference]. Figure 2 One embodiment of the detection method in this application includes:

[0156] 201. Acquire a sample and a first detection module, wherein the sample includes multiple reference points, and the first detection module is used to detect the sample and output detection information;

[0157] It is easy to understand that before performing testing on a sample, it is necessary to obtain the sample first. The sample in this embodiment includes, but is not limited to, wafers, panels or metal films, as long as the sample has a plane to be tested, and the reference point on the sample is a pre-selected measurement point located on the plane to be tested.

[0158] Furthermore, the first detection module obtained is as follows: Figure 1 As previously mentioned, this will not be repeated here.

[0159] 202. The first detection module performs detection processing on each reference point of the sample to obtain an initial positional relationship; the step of detecting and processing the reference points includes: detecting the sample at different measurement positions along the measurement direction to obtain detection information of the reference points of the sample at each measurement position, wherein the measurement position is the relative position between the sample and the first detection module; and obtaining an initial positional relationship based on the detection information of the reference points of the sample at different measurement positions, wherein the initial positional relationship is the relationship between the detection information of the measurement positions and the reference points.

[0160] In order to obtain the height difference between the test point on the test sample and the reference position along the measurement direction, each reference point on the sample can be detected and processed separately to obtain the initial position relationship corresponding to each reference point, and then step 203 can be executed based on the initial position relationship.

[0161] In this application, the first detection module performs detection processing on each reference point of the sample to obtain the initial positional relationship of each reference point. The initial positional relationship is the relationship between the detection information of the reference point and the measurement position. Here, the measurement position is the relative position between the sample and the first detection module along the measurement direction.

[0162] In other words, the detection information is associated with the relative position of the sample and the first detection module along the measurement direction. When the relative position of the sample and the first detection module along the measurement direction changes, the detection information also changes accordingly. That is, the relative position of the sample and the first detection module along the measurement direction corresponds one-to-one with the detection information.

[0163] Specifically, the initial positional relationship of each reference point can be obtained in the following way: For ease of explanation, reference point A on sample 4 is used as an example. The sample 4 is controlled along... Figure 1 The Z-axis direction is shown as moving up and down. The Z-axis direction is the measurement direction of the sample, which is perpendicular to the plane where the sample reference point is located (i.e., the sample measurement surface). In actual measurement, the measurement direction can also form an acute angle with the sample measurement surface.

[0164] This section explains the situation by assuming the sample measurement surface is perpendicular to the measurement direction:

[0165] As the sample moves along the Z-axis measurement direction, detector 6 measures the detection information at different measurement positions of reference point A along the Z-axis. Based on these multiple measurement positions of point A and the corresponding detection information at each position, the initial positional relationship of point A is determined. The initial positional relationship of each reference point indicates the relationship between its measurement position and the detection information.

[0166] It should be noted that the measurement position in this application refers to the relative position between the sample and the first measurement module, and all measurement positions are relative to a reference origin. That is, the reference origin is relatively fixed relative to the first detection module in this application. Therefore, the reference origin can be located on the first detection module and moves with the movement of the first detection module. Furthermore, the sample has a reference point, which indicates the position of the sample. One sample has one reference point and multiple reference points. The measurement position, being the relative position between the sample and the first measurement module, refers to the relative position between the sample's reference point and the reference origin. The above explanation uses moving the sample as an example; that is, by fixing the first detection module and moving the sample, the measurement position is changed. This is equivalent to fixing the reference origin and changing the sample's reference point to change the measurement position. Specifically, in this embodiment, the reference origin can also be the focal position of the subsequent second detection module.

[0167] In this embodiment, the relative position between the sample and the first detection module can be changed by moving the first detection module or simultaneously moving the first detection module and the sample. When the first detection module and the sample are moved simultaneously, different measurement positions refer to different relative positions of the first detection module and the sample. It should be noted that the initial positional relationship is the correspondence between the detection information of the same reference point and the measurement position when the relative position between the sample and the first detection module is at different measurement positions. The initial positional relationship can be the correspondence between discrete measurement positions and discrete detection information, or it can be a continuous function relationship between the measurement position and the detection information.

[0168] In this embodiment, the first detection module is as follows: Figure 1 As shown, the detection information includes the position coordinates of the light spot formed by the signal light on the photosensitive surface of the detector. In other embodiments of this application, the first detection module may also be a spectral confocal detection module, including a light source and a spectrometer. The light source is used to generate detection light with different wavelengths. The detection light forms signal light after passing through the sample. The spectrometer is used to detect the signal light and acquire the light intensity of the signal light at each wavelength. The detection information includes the wavelength of the signal light with the highest light intensity. The first detection module may also be a WDI autofocusing microscope, including a light source and a detector. The light source is used to form light spots of different sizes at different measurement positions along the measurement direction. The detector is used to acquire the size of the light spots at different measurement positions. The detection information includes the size of the light spots acquired by the detector. The first detection module may also be a confocal microscope, including a detector for detecting signal light from the sample and imaging the sample based on the signal light to form a sample image. The detection information includes the grayscale of the acquired sample image or the light intensity of the acquired signal light.

[0169] 203. When the relative position of the first detection module and the reference point surface along the measurement direction is at a preset position, the relative position of the first detection module and the sample along the measurement direction is used as the reference position, wherein the preset position value is equal to the reference position value;

[0170] In actual measurement, if the relative position of the reference point with respect to the sample measurement surface is zero, then the measurement position in the initial positional relationship, i.e., the relative position between the sample and the first detection module, is the relative position between the reference point and the first detection module. However, if the relative position of the reference point with respect to the sample measurement surface is not zero, then the relative position between the sample and the first detection module is not equivalent to the relative position between the reference point and the first detection module. The initial positional relationship should reflect the correspondence between the relative position between the reference point and the first detection module and the detection information of the reference point.

[0171] Therefore, in this embodiment of the application, the initial positional relationship is calibrated through steps 203 to 205.

[0172] When the relative position of the first detection module and the reference point surface along the measurement direction is at a preset position, the relative position of the first detection module and the sample along the measurement direction is used as the reference position, wherein the value of the preset position is set to be equal to the value of the reference position, and then step 204 is executed.

[0173] 204. Obtain the reference detection information of the reference point when the relative position of the first detection module and the sample is at the reference position;

[0174] When the relative position of the first detection module and the sample is at the reference position, the reference detection information of the reference point is obtained. Since the value of the reference position is the value of the preset position, the value of the relative position between the first detection module and the sample in this step is equal to the value of the relative position between the first detection module and the sample reference point surface. In other words, the correspondence between the reference position and the reference detection information in this step actually reflects the correspondence between the relative position between the sample reference point surface and the first detection module and the reference point detection information.

[0175] 205. The initial position relationship and / or the reference position are calibrated according to the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial position relationship remains unchanged before and after the calibration process;

[0176] Because the correspondence between the reference position and the reference detection information in step 204 essentially reflects the relative position between the sample reference point surface and the first detection module, and the correspondence between the reference point detection information and the reference point detection information, the reference detection information can be used to calibrate the initial positional relationship and / or the reference position, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial positional relationship remains unchanged before and after the calibration process.

[0177] Because in this embodiment, each reference point corresponds to an initial position relationship, the difference between adjacent measurement positions in the initial position relationship remains unchanged before and after the calibration process. In other words, multiple initial position relationships of multiple reference points are calibrated separately so that the difference between adjacent measurement positions in the initial position relationship remains unchanged before and after the calibration process.

[0178] The specific process of calibrating the initial positional relationship and / or the reference position based on the reference detection information will be described in the following embodiments and will not be repeated here.

[0179] 206. After the calibration process, the positional relationship is obtained based on the initial positional relationship, wherein the positional relationship represents the relationship between the measurement position of the sample test point and the detection information;

[0180] After calibrating the initial positional relationship of each reference point on the sample, the positional relationship is obtained based on the initial positional relationship, which represents the relationship between the measurement position of the sample's test point and the detection information.

[0181] The process of obtaining positional relationships based on initial positional relationships will be described in the following embodiments and will not be repeated here.

[0182] 207. The first detection module detects the test point of the sample at the test position to obtain the detection information of the test point, wherein the test position is the relative position between the first detection module and the sample along the measurement direction;

[0183] In order to obtain the height difference between the sample test point and the reference position along the measurement direction, the first detection module can be used to detect the test point of the sample at the test position to obtain the detection information of the test point, and according to the detection information and positional relationship, the test position of the sample can be obtained, wherein the test position is the relative position between the first detection module and the sample along the measurement direction, and then step 208 is executed.

[0184] 208. Based on the detection information of the point to be measured, the positional relationship, and the reference position, obtain the height difference of the point to be measured relative to the reference position along the measurement direction.

[0185] After obtaining the detection information, positional relationship, and reference position of the test point, the test position of the sample can be obtained based on the detection information and positional relationship of the test point. Then, based on the test position and reference position of the sample, the height difference of the test point relative to the reference position along the measurement direction can be obtained.

[0186] In this embodiment, the initial positional relationship of the sample reference point is first obtained, where the initial positional relationship represents the correspondence between the measurement position of the reference point and the detection information of the reference point. Then, the positional relationship is obtained based on the initial positional relationship, where the positional relationship represents the correspondence between the measurement position of the test point and the detection information of the test point. Thus, after obtaining the detection information of the test point, the measurement position of the test point is obtained based on the positional relationship. Based on the measurement position of the test point and the reference position, the height difference of the test point relative to the reference position along the measurement direction is obtained, thereby improving the convenience of obtaining the height difference of the test point relative to the reference position along the measurement direction.

[0187] based on Figure 2 In step 202 of the embodiment, when performing detection processing on each reference point of the sample, as an example, it is possible to utilize... Figure 1 The first detection module shown performs detection processing on each reference point separately. The first detection module includes a detection light source 1, a reflector 2, a first mirror group 3, a sample 4, a second mirror group 5, and a detector 6. The detector 6 is used to receive signal light from the sample and obtain detection information based on the signal light. The signal light is the light reflected from the sample to the light source, and the detection information is the position coordinates of the light spot formed by the signal light on the photosensitive surface of the detector.

[0188] In this embodiment, the position coordinates of the light spot formed by the signal light on the photosensitive surface of the detector are used as specific detection information, which improves the convenience of obtaining detection information.

[0189] Specifically, in step 202, when the first detection module detects samples at different measurement locations and obtains the detection information of the reference point at each measurement location, the following steps can be performed. Please refer to [link to relevant documentation]. Figure 3 , Figure 3 for Figure 2 Detailed steps of step 202 in the embodiment:

[0190] 301. When the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is taken as the focal position, and the range of the distance from the focal position in the positive and negative directions along the measurement direction is set as the sampling range; the sample is moved along the measurement direction within the sampling range, and the detection information of each reference point at each measurement position is obtained when the sample moves to different measurement positions.

[0191] To improve the accuracy of subsequently acquiring the defocus amount of the test point and enable the second detection module to complete the focusing operation of the test point on the sample, a sampling range can be preset when setting the measurement position of the reference point in the measurement direction. The reference point can then be controlled to move within this sampling range, thereby acquiring detection information at different measurement positions of the reference point within the sampling range. In other embodiments of this application, the sampling range may not include the focal point position.

[0192] Specifically, Figure 2 In this embodiment, the height difference represents the height difference between the measurement position of the point to be measured and the reference position along the measurement direction. When the focal position of the second detection module is set as the reference position, the height difference between the measurement position of the point to be measured and the focal position along the measurement direction in this embodiment is the defocus amount.

[0193] It should be noted that the first detection module and the second detection module can be the same module, or they can be different modules.

[0194] Specifically, the process for determining the sampling range is as follows:

[0195] Obtain the focal position of the second detection module along the measurement direction. Set the range of preset offsets from the focal position in both the positive and negative directions along the measurement direction as the sampling range. For ease of understanding, please refer to [link to documentation]. Figure 4 Assuming Figure 4 Position B in the diagram represents the focal point of the second detection module. A sampling range of ΔL can be taken above and below position B, thus the sampling range is the area ΔL above and below B. The second detection module can be a system requiring focusing on the sample, such as a microscope, confocal spectral analyzer, reflectance spectrometer, or ellipsometer. The above explanation uses the focal point as the midpoint of the sampling range as an example; in other embodiments, the focal point may not be the midpoint of the sampling range.

[0196] As one embodiment, when the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is taken as the focal position, which includes: moving the sample and the second detection module relative to each other along the measurement direction; outputting the detection result through the second detection module during the relative movement; determining the sample position that maximizes or exceeds the signal-to-noise ratio of the detection result in the measurement direction, thereby obtaining the focal position.

[0197] As one embodiment, the focal position can be used as Figure 2 The reference position in the embodiment.

[0198] When determining the focal position of the second detection module along the measurement direction, the sample and the second detection module can also be controlled to move relative to each other along the measurement direction. Specifically, controlling the relative movement of the sample and the second detection module along the measurement direction includes moving one of the sample and the second detection module or moving both simultaneously.

[0199] During the relative movement, the output of the second detection module is acquired, and the measurement position of the sample corresponding to the maximum detection quality or a detection quality greater than a preset value is determined as the focal position of the second detection module. The detection quality includes one or a combination of signal-to-noise ratio, image sharpness, or robustness.

[0200] Specifically, when the second detection module is an imaging device, such as a microscope, image quality can be used as the detection result. The image quality includes the signal-to-noise ratio, sharpness, or robustness of the image. The detection quality of the detection result can also be comprehensively evaluated using the signal-to-noise ratio, sharpness, or robustness. When the second detection module is not an imaging device, the signal-to-noise ratio or robustness of the detection result is used as the detection result.

[0201] As one embodiment, the sample is moved from one end of the sampling range to the other end of the sampling range in a direction toward the focal point. Alternatively, it can be moved back and forth from the focal point.

[0202] When controlling the relative movement of the sample and the second detection module along the measurement direction, a preset step size can be set, such as 3mm. When moving one step, the second detection module acquires a corresponding detection result, thus avoiding repeated movement of the second detection module and / or the sample when determining the focal position of the second detection module, improving the convenience of obtaining the focal position. Specifically, when controlling the relative movement of the sample and the second detection module along the measurement direction, it can start from the focal position, move upwards first, then downwards, or move from a preset distance from the focal position towards the focal position. The specific method of relative movement is not limited here.

[0203] In this embodiment of the application, in order to facilitate the second detection module to quickly focus on the test point, a preset range is taken above and below the focus of the second detection module as the sampling range, and the reference point of the sample is controlled to move within the sampling range, thereby improving the accuracy of the second detection module in focusing on the sample reference point.

[0204] Specifically, Figure 3 The sampling range in the embodiment may also exclude the focal position of the second detection module.

[0205] based on Figure 2In the aforementioned embodiment, when performing step 206, the following steps may be specifically executed; please refer to [link / reference]. Figure 5 , Figure 5 for Figure 2 Detailed steps of step 206 in the embodiment:

[0206] 501. Based on the initial positional relationship, interpolate the detection information of the point to be measured at different measurement positions to obtain the detection information of the point to be measured at different measurement positions;

[0207] After obtaining the initial positional relationship of each reference point, where the initial positional relationship is the correspondence between the measurement position of the reference point and the detection information, the detection information of the sample test point at different measurement positions can be interpolated to obtain the detection information of the test point at different measurement positions.

[0208] 502. The positional relationship is obtained based on multiple detection information of the point to be measured at different measurement positions.

[0209] After obtaining multiple detection information of the point to be measured at different measurement positions, the positional relationship can be obtained. The positional relationship represents the correspondence between the measurement position of the point to be measured and the detection information of the point to be measured. This positional relationship can be a discrete correspondence between discrete points and discrete detection information, or a continuous function relationship between continuous points and detection information.

[0210] When the positional relationship is a continuous function relationship between the measurement position of the test point and the detection information, obtaining the positional relationship based on multiple detection information of the test point at different measurement positions further includes: performing function fitting on the correspondence between the measurement position and the detection information of the test point to obtain the positional relationship.

[0211] In this embodiment of the application, the process of obtaining positional relationships based on initial positional relationships is described in detail, which improves the accuracy of obtaining positional relationships.

[0212] based on Figure 2 In the aforementioned embodiment, when performing step 206, the following steps may also be specifically performed; please refer to [link / reference]. Figure 6 , Figure 6 for Figure 2 Another detailed step of step 206 in the embodiment:

[0213] 601. Select any measurement position as the first measurement position, and perform a first function acquisition operation on the first measurement position. The first function acquisition operation includes: acquiring multiple detection information of each reference point located at different positions within the sample measurement surface at the first measurement position.

[0214] Because the initial position relationship reflects the correspondence between the measurement position of the reference point and the detection information, when there are multiple reference points for the sample, for each initial position relationship of each reference point, any measurement position in the initial position relationship can be selected as the first measurement position, and at the first measurement position, the first function acquisition operation is executed. The first function acquisition operation includes: acquiring multiple detection information of each reference point located at different positions within the sample measurement surface at the first measurement position.

[0215] 602. Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, obtain the detection information of the sample test point at the first measurement position;

[0216] Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, and the position of the test point in the sample measurement surface, the detection information of the test point at the first measurement position is obtained.

[0217] 603. Select each measurement location as the first measurement location, and execute the first function operation to obtain the detection information of the test point of the sample at each measurement location;

[0218] Each measurement location is selected as the first measurement location, and steps 601 to 602 are repeated to obtain the detection information of the sample test point at each measurement location.

[0219] 604. Obtain the positional relationship based on the detection information of the sample test points at each measurement location.

[0220] After obtaining multiple detection information of the point to be measured at different measurement positions, the positional relationship can be obtained. The positional relationship represents the correspondence between the measurement position of the point to be measured and the detection information of the point to be measured. This positional relationship can be a discrete correspondence between discrete points and discrete detection information, or a continuous function relationship between continuous points and detection information.

[0221] In this embodiment of the application, the process of obtaining positional relationships based on initial positional relationships is described in detail, which improves the accuracy of obtaining positional relationships.

[0222] against Figure 6 In step 602 of the embodiment, when obtaining the detection information of the sample test point at the first measurement position, it can be obtained in the following two ways:

[0223] I. Function Fitting

[0224] Please see Figure 7 , Figure 7 A specific embodiment for obtaining detection information of the sample test point at the first measurement position:

[0225] 701. Fit the correspondence between the position of each reference point in the sample measurement surface and the multiple detection information to obtain the first functional relationship of the first measurement position. The first functional relationship is the relationship between the position of each reference point in the sample measurement surface and the detection information. The measurement surface is perpendicular to the measurement direction or has an acute angle.

[0226] After obtaining the first measurement position, the multiple positions of multiple reference points on the sample measurement surface, and multiple detection information, a first functional relationship at the first measurement position can be fitted. The first functional relationship represents the relationship between the position of each reference point in the sample measurement surface and the detection information. The measurement surface is perpendicular to the measurement direction or has an acute angle.

[0227] 702. Substitute the position of the test point within the measurement surface into the first functional relationship to obtain the detection information of the test point at the first measurement position.

[0228] After obtaining the first functional relationship and the position of the test point in the measurement surface, substitute the position of the test point in the measurement surface into the first functional relationship to obtain the detection information of the test point at the first measurement position.

[0229] In this embodiment, the first functional relationship is obtained through function fitting, which improves the convenience of obtaining the first functional relationship.

[0230] II. Numerical Interpolation:

[0231] Please see Figure 8 , Figure 8 Another specific embodiment for obtaining detection information of the sample test point at the first measurement position:

[0232] 801. Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, interpolate the detection information of the test point to be measured to obtain the detection information of the test point of the sample at the first measurement position.

[0233] After obtaining the positions of each reference point within the sample measurement surface and the correspondence between the detection information of each reference point and the position of the test point on the sample measurement surface, the detection information of the test point can be interpolated to obtain the detection information of the test point at the first measurement position.

[0234] The specific calculation process for numerical interpolation is described in detail in existing technologies and will not be repeated here.

[0235] against Figure 6 Step 604 in the embodiment, when obtaining the positional relationship based on the detection information of the sample test points at each measurement location, is specifically executed in the following two ways:

[0236] 1. Fit the correspondence between each detection information of the point to be measured and each measurement position to obtain the positional relationship;

[0237] It is easy to understand that after obtaining the correspondence between discrete points, function fitting can be performed based on the correspondence between discrete points to obtain the functional correspondence between discrete points.

[0238] That is, after obtaining the correspondence between the detection information of each point to be measured and each measurement position, a function fitting is performed based on the correspondence to obtain the positional relationship.

[0239] Second, obtain the correspondence between the test point and each detection information and each measurement position to obtain the positional relationship.

[0240] After obtaining the correspondence between each detection information of the point to be measured and each measurement position, the positional relationship can be obtained based on this discrete correspondence.

[0241] based on Figure 2 In the described embodiment, when obtaining the initial positional relationship based on the detection information of reference points of samples at different measurement locations, the following steps may also be specifically performed; please refer to [link to relevant documentation]. Figure 9 , Figure 9 for Figure 2 Another detailed step of step 202 in the embodiment:

[0242] 901. Fit the detection information of the reference point of the sample at different measurement positions using the undetermined function to obtain the fitting value of the undetermined coefficient of the undetermined function; substitute the fitting value into the undetermined function to obtain the initial positional relationship of the reference point.

[0243] When the detector acquires detection information of each reference point at different measurement locations, it can also use an undetermined function to fit the different measurement locations and detection information to obtain the initial positional relationship of each reference point. This fitting function can be a linear function, a polynomial, a Fourier series expansion, or a trigonometric function expansion; no specific restrictions are imposed here.

[0244] Specifically, when fitting the measurement location and detection information, the undetermined function can be fitted using either the measurement location or the detection information as the independent variable and the other as the dependent variable. That is, it can be fitted using the measurement location as the independent variable and the detection information as the dependent variable, or vice versa.

[0245] It is easy to understand that when using an undetermined function to fit the detection information of reference points at different measurement locations, it is necessary to first determine the fitting values ​​of the undetermined coefficients of the undetermined function, and then further determine the initial positional relationship based on the fitting values ​​of the undetermined coefficients.

[0246] For example: when the fitted function is Y = CZ 2 When +DZ+W, where Z represents the different measurement positions of the reference point in the measurement direction and Y represents the detection information at each measurement position, then when fitting the above function, it is necessary to first fit the coefficients C, D, and W of the above function, and then determine the specific form of the fitting function based on C, D, and W.

[0247] In this embodiment, the process of determining the initial positional relationship using an undetermined function is described in detail, which improves the feasibility of determining the initial positional relationship in this embodiment.

[0248] based on Figure 2 In the aforementioned embodiment, when performing step 206 to obtain the positional relationship based on the initial positional relationship, the initial positional relationships of each reference point may be averaged to obtain the positional relationship. For details of the averaging process, please refer to [link to relevant documentation]. Figure 10 , Figure 10 Detailed steps for averaging the initial positional relationships of each reference point:

[0249] 1001. Select each component of the initial positional relationship as a reference item; and perform combination processing on each reference item to obtain the combination coefficients of each component of the positional relationship. The combination processing for any reference item includes: selecting one item of the initial positional relationship of each reference point as a reference item; obtaining a coefficient set based on the initial positional relationship of each reference point, wherein the coefficient set includes a set of coefficients composed of the reference items of each initial positional relationship; and performing mean averaging on the coefficient set to obtain the combination coefficients.

[0250] The initial positional relationship includes at least one component.

[0251] To make it easier to understand, the following example will be used to illustrate:

[0252] Assume there are three reference points on the sample, and the initial positional relationship of the three reference points is Y = C1Z. 2 +D1Z+W1、Y=C2Z 2 +D2Z+W2、Y=C3Z 2 +D3Z+W3, where each initial positional relation includes three terms: a quadratic term, a linear term, and a constant term.

[0253] The coefficients of the quadratic term of the initial position relationship of the three reference points are C1, C2, and C3, the coefficients of the linear term are D1, D2, and D3, and the coefficients of the constant term are W1, W2, and W3.

[0254] The following describes the process of combining the quadratic, linear, and constant terms as reference terms, respectively. Here, Z represents the different measurement positions of the reference point in the measurement direction, and Y represents the detection information at each measurement position.

[0255] First, taking the quadratic term as the reference term, the coefficient group includes all the coefficients of the quadratic term, namely C1, C2, and C3. The coefficients in the coefficient group are averaged. This averaged process can be to obtain the average or median of each coefficient. As one implementation method, the average of C1, C2, and C3 can be calculated to obtain the combined coefficient C0 of the quadratic term.

[0256] Secondly, taking the linear term as the reference term, the coefficient group includes all the coefficients of the linear term, namely D1, D2, and D3. The coefficients in the coefficient group are averaged, such as calculating the average of D1, D2, and D3, to obtain the combination coefficient D0 of the linear term.

[0257] Then, taking the constant term as a reference term, the coefficient group includes all the constant term coefficients, namely W1, W2, and W3. The coefficients in the coefficient group are averaged, such as by calculating the average of W1, W2, and W3, to obtain the combined coefficient W0 of the constant term.

[0258] Specifically, the mean-averaging process in this embodiment can be the calculation of the weighted average or median of each coefficient in the coefficient group.

[0259] 1002. Replace the coefficients of the corresponding terms in the initial positional relation with the combination coefficients of each component term to obtain the positional relation.

[0260] After step 1001, the coefficients of the initial positional relationship of the reference point are replaced with the combination coefficients C0 of the quadratic term, D0 of the linear term, and W0 of the constant term to obtain the positional relationship. For example, Y = C1Z is replaced with the combination coefficients C0 of the quadratic term, D0 of the linear term, and W0 of the constant term. 2 The quadratic coefficient C1, linear coefficient D1, and constant coefficient W1 in +D1Z+W1 give the positional relationship Y=C0Z 2 +D0Z+W0.

[0261] In this embodiment of the application, the process of obtaining the positional relationship between the measurement position and the detection information of the point to be measured is described in detail, which improves the reliability of the positional relationship acquisition process.

[0262] based on Figure 10 Please refer to the averaging process described above. Figure 11 , Figure 11 Another refinement step for averaging the initial positional relationships of each reference point:

[0263] 1101. Combine the coefficients of each term in the initial positional relationship to obtain the combined coefficients of each term in the initial positional relationship. The combination process includes: selecting a term of the initial positional relationship of each reference point as a reference term; obtaining a coefficient group based on the initial positional relationship of each reference point, the coefficient group including the coefficients of the reference term of each initial positional relationship and the position information of each reference point on the sample measurement surface, the measurement surface being perpendicular to the measurement direction or having an acute angle; performing mean averaging on the coefficient group to obtain the combined coefficients; replacing the coefficients of the corresponding terms in the initial positional relationship with each combined coefficient to obtain the positional relationship. The mean averaging process includes: performing optimization processing based on the correspondence between the position information of each reference point and the coefficients in the coefficient group to obtain the coefficients of the test point to obtain the combined coefficients. The optimization processing includes numerical interpolation or function fitting.

[0264] To make it easier to understand, the following example is provided:

[0265] Assume there are four reference points on the sample, with initial positional relationships of Y = D1Z + W1, Y = D2Z + W2, Y = D3Z + W3, and Y = D4Z + W4. Each initial positional relationship includes two terms: a linear term and a constant term. The coefficients of the linear term are D1, D2, D3, and D4, and the coefficients of the constant term are W1, W2, W3, and W4. Z represents the different measurement positions of the reference points along the measurement direction, and Y represents the detection information at each measurement position.

[0266] The following describes the location information of the reference point in the sample measurement surface. Specifically, the measurement surface is... Figure 1 The measurement direction (Z-axis direction) shown is perpendicular to or has an acute angle with the plane. Within the measurement plane, coordinate axes can be established through the first and second directions, and the position information of the sample in the measurement plane can be described by the coordinate position. If the coordinate system is a rectangular coordinate system, the first and second directions within the measurement plane are perpendicular to each other. If the coordinate system is a non-direct coordinate system, the first and second directions within the measurement plane have an acute angle.

[0267] It should be noted that any measuring surface is perpendicular to the measuring direction, has an acute angle between it and the measuring direction, or is parallel to it. In this embodiment, the measuring surface is any other surface that is not parallel to the measuring direction (Z-axis direction). Specifically, the measuring surface is perpendicular to the measuring direction.

[0268] Furthermore, assuming a rectangular coordinate system is established within the measurement surface, with the first direction as the U-axis and the second direction as the V-axis, the position information of the four reference points within the measurement surface are K1(U1, V1), K2(U2, V2), K3(U3, V3), and K4(U4, V4).

[0269] The following describes the process of combination by selecting the linear term and the constant term as reference terms in turn:

[0270] First, a two-dimensional shape fitting is performed on the linear term of the positional relationship of the four reference points. The positional information of the reference points in the measurement surface is used as the independent variable, and the coefficient of the linear term is used as the dependent variable. The objective function for the two-dimensional shape fitting is constructed as D = EU + FV + G. The points on the objective function can be represented as a three-dimensional array (U, V, D).

[0271] Construct four sets of three-dimensional arrays (U1, V1, D1), (U2, V2, D2), (U3, V3, D3), and (U4, V4, D4). Use these four sets of three-dimensional arrays to perform function fitting to obtain the fitted values ​​E0, F0, and G0 of the coefficients of the objective function D = EU + FV + G, and obtain the fitted function of the linear term coefficients D = E0U + F0V + G0.

[0272] Substitute the location information K0(U0, V0) of the point to be measured into the linear coefficient fitting function D=E0U+F0V+G0 to obtain the linear coefficient D0 of the position relationship of the point to be measured.

[0273] Similarly, the constant coefficient W0 of the positional relationship of the point to be measured can be obtained, and thus the positional relationship Y = D0Z + W0 of the point to be measured can be obtained.

[0274] The above four reference points are for illustrative purposes only. In this embodiment, the number of reference points may be greater than 10.

[0275] The above describes in detail the process of obtaining the positional relationship of the test points using two-dimensional topography fitting, which improves the reliability of the process. In addition, the positional relationship of the test points can also be obtained using two-dimensional topography interpolation, which is described in detail in existing technologies and will not be repeated here.

[0276] based on Figure 2 In step 206 of the embodiment, when obtaining the positional relationship based on the initial positional relationship, since this positional relationship characterizes the relationship between the detection information of the test point F of the sample and the measurement position, the reference point is generally located within a first preset range containing the test point F. For ease of understanding, Figure 12 A schematic diagram of the first preset range is provided.

[0277] If the sample to be tested also has other test points located within a second preset range including test point F, for ease of understanding, Figure 12 A diagram illustrating the second preset range is also provided. If the second preset range is less than or equal to the first preset range, the following steps can also be performed. Please refer to [link / reference]. Figure 13 , Figure 13This is another embodiment of the detection method in the embodiments of this application:

[0278] 1301. Detect the other test points of the sample to be tested, obtain the detection information of the other test points, and obtain the height difference of the other test points relative to the reference position along the measurement direction based on the positional relationship and the detection information of the other test points.

[0279] Because the first preset range includes both the test point and the reference point, and the second preset range is less than or equal to the first preset range, other test points located within the second preset range can also be utilized. Figure 2 The positional relationship in the embodiment is used to obtain the height difference of other test points relative to the reference position along the measurement direction, thereby saving the step of re-determining the positional relationship of other test points within the second preset range, thus improving the convenience of obtaining the height difference of other test points relative to the reference position along the measurement direction.

[0280] In addition, other test points within a third preset range that are larger than the first preset range can also be tested using this method. Figure 2 The positional relationship in the embodiment is used to obtain the height difference of other test points within the third preset range relative to the reference position along the measurement direction.

[0281] The following describes another embodiment of the detection method in this application. Please refer to [link to relevant documentation]. Figure 14 , Figure 14 This is another embodiment of the detection method in the embodiments of this application:

[0282] 1401. Acquire a sample and a first detection module, wherein the sample includes multiple reference points, and the first detection module is used to detect the sample and output detection information;

[0283] 1402. The first detection module performs detection processing on each reference point of the sample to obtain an initial positional relationship; the step of detecting and processing the reference points includes: detecting the sample at different measurement positions along the measurement direction to obtain detection information of the reference points of the sample at each measurement position, wherein the measurement position is the relative position between the sample and the first detection module; and obtaining an initial positional relationship based on the detection information of the reference points of the sample at different measurement positions, wherein the initial positional relationship is the relationship between the detection information of the measurement positions and the reference points.

[0284] 1403. When the relative position of the first detection module and the reference point surface along the measurement direction is at a preset position, the relative position of the first detection module and the sample along the measurement direction is taken as the reference position, wherein the value of the preset position is equal to the value of the reference position.

[0285] 1404. Obtain the reference detection information of the reference point when the relative position of the first detection module and the sample is at the reference position;

[0286] 1405. The initial position relationship and / or the reference position are calibrated according to the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial position relationship before and after the calibration process remains unchanged;

[0287] 1406. After the calibration process, the positional relationship is obtained according to the initial positional relationship, wherein the positional relationship represents the relationship between the measurement position of the sample test point and the detection information;

[0288] 1407. The first detection module detects the test point of the sample at the test position to obtain the detection information of the test point, wherein the test position is the relative position between the first detection module and the sample along the measurement direction.

[0289] 1408. Based on the detection information of the point to be measured, the positional relationship, and the reference position, obtain the height difference of the point to be measured relative to the reference position along the measurement direction;

[0290] It should be noted that steps 1401 to 1408 in the embodiments of this application are different from those in the present application. Figure 2 The examples described are similar and will not be repeated here.

[0291] 1409. Based on the height difference between the test point and the reference position along the measurement direction, control the relative movement of the sample and the first detection module to reduce the height difference;

[0292] In order to enable the second detection module to quickly focus on the sample test point, the relative movement of the test sample and the first detection module can be controlled to reduce the height difference between the position of the test point in the measurement direction and the focal position of the second detection module, that is, to move the test sample to the position of the focal point of the second detection module.

[0293] 1410. After the sample and the first detection module have moved relative to each other, return to steps 1407 and 1408 to reacquire the height difference and determine whether the height difference meets the preset accuracy. If not, return to step 1409 until the number of returns reaches the preset number or the height difference meets the preset accuracy.

[0294] After the sample and the first detection module move relative to each other, the step of obtaining the height difference is repeated, that is, steps 1407 and 1408 are repeated. After obtaining the height difference of the test point relative to the reference position along the measurement direction, it is determined whether the height difference meets the preset accuracy. If not, the process returns to step 1409 until the number of returns reaches the preset number or the height difference meets the preset accuracy.

[0295] When controlling the relative movement of the sample to be tested and the first detection module, that is, moving the test point of the sample to the focal position of the second detection module, due to errors in positional relationship and operational errors of mechanical components, it is necessary to determine whether the height difference between the measurement position of the test point along the measurement direction and the focal position of the second detection module along the measurement direction meets the preset accuracy during the relative movement of the sample to be tested and the first detection module. If not, based on the height difference of the test point relative to the reference position along the measurement direction, the sample and the first detection module are controlled to move relative to each other again until the height difference between the test point along the measurement direction and the focal position of the second detection module along the measurement direction meets the preset accuracy.

[0296] based on Figure 2 Step 205 in the embodiment is described in detail below as the process of calibrating the initial position relationship or reference position based on the reference detection information:

[0297] 1. Calibrate the initial positional relationship;

[0298] Please see Figure 15 , Figure 15 Detailed steps for calibrating the initial positional relationship based on benchmark detection information:

[0299] 1501. Based on the reference detection information and the initial position relationship, obtain the measurement position corresponding to the reference detection information as the reference measurement position;

[0300] Since the initial position relationship is the correspondence between the measurement position of the reference point and the detection information, the reference measurement position corresponding to the reference detection information can be obtained based on the reference detection information and the initial position relationship.

[0301] 1502. Obtain the reference deviation between the reference measurement position and the reference position;

[0302] After obtaining the reference measurement position and the reference position, the reference deviation between the reference measurement position and the reference position is calculated. The reference deviation is the relative position between the sample reference point surface and the sample measurement surface.

[0303] 1503. Using the reference deviation, compensate for each measurement position in the initial position relationship so that the reference measurement position of the compensated initial position relationship is the same as the reference position;

[0304] After obtaining the reference deviation, compensation is performed on each measurement position after the initial position relationship so that the reference measurement position of the compensated initial position relationship is the same as the reference position.

[0305] The embodiments of this application provide a detailed description of the process of calibrating the initial positional relationship using benchmark detection information, which improves the accuracy of the calibration process in this application.

[0306] II. Calibration reference position

[0307] Please see Figure 16 , Figure 16 Detailed steps for calibrating the reference position based on the reference detection information:

[0308] 1601. Based on the reference detection information and the initial position relationship, obtain the measurement position corresponding to the reference detection information as the reference measurement position;

[0309] Since the initial position relationship is the correspondence between the measurement position of the reference point and the detection information, the reference measurement position corresponding to the reference detection information can be obtained based on the reference detection information and the initial position relationship.

[0310] 1602. Compensate the reference position so that the compensated reference position is equal to the reference measurement position.

[0311] Because there is a difference between the reference measurement position and the reference position, where the difference is the relative position between the sample reference point surface and the sample measurement surface.

[0312] Therefore, the reference position can be compensated so that the compensated reference position is equal to the reference measurement position.

[0313] The embodiments of this application provide a detailed description of the process of calibrating the reference position using reference detection information, which improves the accuracy of the calibration process in this application.

[0314] based on Figure 15 The following describes in detail the process of obtaining the height difference between the point to be measured and the reference position along the measurement direction in the embodiment described above. Please refer to [link to relevant documentation]. Figure 17 , Figure 17 To refine the steps for obtaining the height difference between the measured point and the reference position along the measurement direction:

[0315] 1701. Based on the detection information and positional relationship of the point to be measured, obtain the measurement position of the point to be measured;

[0316] exist Figure 15 In the embodiments, the initial positional relationship was calibrated so that in the compensated positional relationship, the value of the relative position between the sample and the first detection module is equal to the value of the relative position between the reference point surface of the sample and the first detection module. Therefore, the compensated positional relationship essentially reflects the correspondence between the relative position between the reference point surface of the sample and the first detection module and the detection information of the reference point.

[0317] Therefore, the positional relationship in this embodiment is the positional relationship obtained based on the compensated initial positional relationship, and the measurement position of the test point can be obtained based on the detection information and positional relationship of the test point.

[0318] 1702. Based on the measured position of the point to be measured and the reference position, obtain the height difference of the point to be measured relative to the reference position along the measurement direction;

[0319] After obtaining the measurement position of the point to be measured, the difference between the measurement position of the point to be measured and the reference position is the height difference of the point to be measured relative to the reference position along the measurement direction.

[0320] To make it easier to understand, the following example is provided:

[0321] Assuming the initial positional relationship is Y = MZ, where Z is the measured position of the reference point, Y is the detection information of the reference point, and the relative position of the reference point surface with respect to the sample is ΔZ, then the compensated initial position is Y = M(Z - ΔZ).

[0322] The positional relationship is then Y = M1(Z - ΔZ);

[0323] Assuming the detection information of the point to be measured is Y, then based on the relationship between Y and position Y = M1(Z-ΔZ), the measurement position of the point to be measured is obtained as Z-ΔZ.

[0324] If the reference position is Z0, then the height difference between the point to be measured and the reference position along the measurement direction is Z-ΔZ-Z0.

[0325] This application embodiment describes in detail the process of obtaining the height difference between the point to be measured and the reference position along the measurement direction, which improves the accuracy of the height difference calculation in this application embodiment.

[0326] The detection method in the embodiments of this application has been described in detail above. The detection system in the embodiments of this application will now be described, wherein the detection system is used to implement… Figures 2 to 17 For the detection method described in the embodiments, please refer to [link / reference needed]. Figure 18 One embodiment of the detection system in this application includes:

[0327] The first acquisition module 1801 and the first detection module are used to acquire a sample, the sample including at least one reference point, and the first detection module is used to detect the sample and output detection information.

[0328] The first detection module 1802 is used to perform detection processing on each reference point of the sample to obtain an initial positional relationship. The first detection module includes a first detection unit 18021 and a first acquisition unit 18022. The first detection unit is used to detect the sample at different measurement positions along the measurement direction and acquire the detection information of the reference points of the sample at each measurement position. The measurement position is the relative position between the sample and the first detection module. The first acquisition unit is used to acquire an initial positional relationship based on the detection information of the reference points of the sample at different measurement positions. The initial positional relationship is the relationship between the detection information of the measurement positions and the reference points.

[0329] The second acquisition module 1803 is used to acquire the relative position of the first detection module and the reference point surface along the measurement direction as a reference position when the relative position of the first detection module and the sample along the measurement direction is at a preset position, wherein the value of the preset position is equal to the value of the reference position.

[0330] The first detection module 1802 is also used to acquire reference detection information of the reference point when the relative position of the first detection module and the sample is at the reference position;

[0331] The calibration module 1804 is used to calibrate the initial position relationship and / or the reference position according to the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial position relationship before and after the calibration process remains unchanged.

[0332] The second acquisition module 1803 is further configured to acquire a positional relationship based on an initial positional relationship after the calibration process, wherein the positional relationship represents the relationship between the measurement position of the sample test point and the detection information;

[0333] The first detection module 1802 is further configured to detect the test point of the sample at the test position to obtain the detection information of the test point, wherein the test position is the relative position between the first detection module and the sample along the measurement direction;

[0334] The second acquisition module 1803 is further configured to acquire the height difference of the test point relative to the reference position along the measurement direction based on the detection information of the test point, the positional relationship, and the reference position.

[0335] Optionally, the first detection module includes a detector for receiving signal light from the sample and acquiring the detection information based on the signal light;

[0336] The detection information includes the position coordinates of the light spot formed by the signal light on the photosensitive surface of the detector.

[0337] Optionally, the first detection unit 18021 includes a setting subunit 180211 and an acquisition subunit 180212:

[0338] The setting subunit 180211 is used to, when the second detection module 1805 focuses on the reference point, take the position of the sample relative to the first detection module along the measurement direction as the focal position, and set the range of the distance from the focal position by a preset offset in both directions along the measurement direction as the sampling range; the acquisition subunit 180212 is used to move the sample along the measurement direction within the sampling range, and acquire the detection information of each reference point at each measurement position when the sample moves to different measurement positions.

[0339] Optionally, the system further includes a setting module 1806, used to set the focus position of the second detection module to the reference position;

[0340] The second acquisition module 1803 is specifically used to: acquire the reference detection information of the reference point when the relative position of the first detection module and the sample is at the focal position;

[0341] The setting subunit 180211 is specifically used to: when the second detection module focuses on the reference point, take the position of the sample relative to the first detection module along the measurement direction as the focal position;

[0342] The setting subunit 180211 is specifically used for: moving the sample relative to the second detection module along the measurement direction; outputting the detection result through the second detection module during the relative movement; determining the measurement position in the measurement direction that maximizes or exceeds the preset value of the detection result, which is the focal position, wherein the detection quality includes one or more of the following: signal-to-noise ratio, image clarity, or robustness.

[0343] Optionally, the setting subunit 180211 is specifically used for: setting a preset step size; and outputting a detection result through the second detection module whenever the sample moves relative to the second detection module along the measurement direction by the preset step size.

[0344] Optionally, the second acquisition module 1803 is specifically used for:

[0345] Based on the initial positional relationship, the detection information of the point to be measured at different measurement positions is interpolated to obtain the detection information of the point to be measured at different measurement positions;

[0346] The positional relationship is obtained based on multiple detection information of the point to be measured at different measurement locations.

[0347] Optionally, if there are multiple reference points, the initial positional relationship is the discrete correspondence between the spatial positions of each reference point and the detection information. The second acquisition module 1803 is specifically used for:

[0348] Select any measurement location as the first measurement location, and perform a first function acquisition operation on the first measurement location. The first function acquisition operation includes: acquiring multiple detection information of each reference point located at different positions within the sample measurement surface at the first measurement location.

[0349] Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained;

[0350] Each measurement location is selected as the first measurement location, and the first function operation is executed to obtain the detection information of the test point of the sample at each measurement location;

[0351] The positional relationship is obtained based on the detection information of the sample test points at each measurement location.

[0352] Optionally, the second acquisition module 1803 is specifically used for:

[0353] Fit the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain a first functional relationship of the first measurement position. The first functional relationship is the relationship between the positions of each reference point in the sample measurement surface and the detection information. The measurement surface is perpendicular to the measurement direction or has an acute angle. Substitute the position of the test point in the measurement surface into the first functional relationship to obtain the detection information of the test point of the sample at the first measurement position.

[0354] or,

[0355] Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained, including: interpolating the detection information of the test point based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain the detection information of the sample test point at the first measurement position.

[0356] Optionally, the second acquisition module 1803 is specifically used for:

[0357] Obtaining the positional relationship based on the detection information of the sample test point at each measurement location includes: fitting the correspondence between each detection information of the test point and each measurement location to obtain the positional relationship; or, obtaining the correspondence between each detection information and each measurement location of the test point to obtain the positional relationship.

[0358] Optionally, if there are multiple reference points;

[0359] The second acquisition module 1803 is specifically used for:

[0360] Obtaining the positional relationship based on the initial positional relationship includes: averaging the initial positional relationships of each reference point to obtain the positional relationship.

[0361] Optionally, the first acquisition unit 18022 is specifically used for:

[0362] The detection information of the reference point at different measurement locations is fitted by an undetermined function to obtain the fitted values ​​of the undetermined coefficients of the undetermined function; the fitted values ​​are then substituted into the undetermined function to obtain the initial positional relationship of the reference point.

[0363] Optionally, the undetermined function includes: a linear function, a polynomial, a Fourier series expansion, or a trigonometric function expansion.

[0364] Optionally, the initial positional relationship includes at least one component;

[0365] The second acquisition module 1803 is specifically used for:

[0366] Each component of the initial positional relationship is selected as a reference item; and a combination process is performed on each reference item to obtain the combination coefficients of each component of the positional relationship. The combination process for any reference item includes: selecting one item of the initial positional relationship of each reference point as a reference item; obtaining a coefficient set based on the initial positional relationship of each reference point, wherein the coefficient set includes a set of coefficients composed of the reference items of each initial positional relationship; and performing a mean-averaging process on the coefficient set to obtain the combination coefficients.

[0367] The positional relationship is obtained by replacing the coefficients of the corresponding terms in the initial positional relationship with the combination coefficients of each component term.

[0368] Optionally, the coefficient set further includes: position information of each reference point on the sample measurement surface, wherein the measurement surface is perpendicular to the measurement direction or has an acute angle with it;

[0369] The second acquisition module 1803 is specifically used for:

[0370] Each component of the initial positional relationship is selected as a reference term; and a combination process is performed on each reference term to obtain the combination coefficients of each component of the positional relationship. The combination process for any reference term includes: selecting one term of the initial positional relationship of each reference point as a reference term; obtaining a coefficient set based on the initial positional relationship of each reference point, wherein the coefficient set includes a set of coefficients of the reference terms of each initial positional relationship and the position information of each reference point on the sample measurement surface; and performing optimization processing based on the correspondence between the position information of each reference point and the coefficients in the coefficient set to obtain the coefficients of the point to be measured, thus obtaining the combination coefficients. The optimization processing includes numerical interpolation or function fitting.

[0371] The positional relationship is obtained by replacing the coefficients of the corresponding terms in the initial positional relationship with the combination coefficients of each component term.

[0372] Optionally, the position information of the reference point includes: first position information along a first direction and second position information along a second direction, wherein both the first and second directions are located within the measurement surface, and the first and second directions are perpendicular or have an acute angle between them.

[0373] The numerical interpolation or function fitting includes two-dimensional topography fitting or two-dimensional topography interpolation.

[0374] Optionally, the mean-averaging process includes: obtaining the weighted value or median of each coefficient in the coefficient group.

[0375] Optionally, the reference point is located within a first preset range including the test point; the sample also has other test points located within a second preset range including the test point, the first preset range including the second preset range;

[0376] The second acquisition module 1803 is further configured to: detect other test points of the sample to be tested, and acquire detection information of the other test points; and acquire the height difference of the other test points relative to the reference position along the measurement direction based on the positional relationship and the detection information of the other test points.

[0377] Optionally, the detection system further includes:

[0378] The control module 1807 is used to control the relative movement of the sample and the first detection module to reduce the height difference based on the height difference between the test point and the reference position along the measurement direction.

[0379] The judgment module 1808 is used to repeat the step of acquiring the height difference after the sample and the first detection module have moved relative to each other, and to determine whether the height difference meets the preset accuracy.

[0380] The return module 1809 is used to return to the step of detecting the test point of the sample at the test position through the first detection module to obtain the detection information of the test point when the height difference does not meet the preset accuracy, until the number of return times reaches the preset number or the height difference meets the preset accuracy.

[0381] Optionally, if the number of reference points is one, the second acquisition module 1803 is specifically used to: use the initial positional relationship as the positional relationship.

[0382] Optionally, the calibration module 1804 is specifically used for:

[0383] Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position;

[0384] Obtain the reference deviation between the reference measurement position and the reference position;

[0385] Using the reference deviation, each measurement position in the initial position relationship is compensated so that the reference measurement position of the compensated initial position relationship is the same as the reference position;

[0386] or,

[0387] Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position;

[0388] The reference position is compensated so that the compensated reference position is equal to the reference measurement position.

[0389] Optionally, the second acquisition module 1803 is specifically used for:

[0390] Based on the detection information and positional relationship, the measurement position of the point to be measured is obtained;

[0391] Based on the difference between the measured position of the point to be measured and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained;

[0392] The present invention also provides a computer-readable storage medium for implementing the functions of a detection system, wherein a computer program is stored thereon, and when the computer program is executed by a processor, the processor can perform the following steps:

[0393] A sample and a first detection module are acquired, wherein the sample includes at least one reference point, and the first detection module is used to detect the sample and output detection information;

[0394] The first detection module performs detection processing on each reference point of the sample to obtain an initial positional relationship. The steps of detecting and processing the reference points include: detecting the sample at different measurement positions along the measurement direction to obtain detection information of the reference points of the sample at each measurement position, wherein the measurement position is the relative position between the sample and the first detection module; and obtaining an initial positional relationship based on the detection information of the reference points of the sample at different measurement positions, wherein the initial positional relationship is the relationship between the detection information of the measurement positions and the reference points.

[0395] When the relative position of the first detection module and the reference point surface along the measurement direction is at a preset position, the relative position of the first detection module and the sample along the measurement direction is used as the reference position, wherein the value of the preset position is equal to the value of the reference position.

[0396] Obtain the reference detection information of the reference point when the relative position of the first detection module and the sample is at the reference position;

[0397] The initial position relationship and / or the reference position are calibrated based on the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial position relationship remains unchanged before and after the calibration process.

[0398] After the calibration process, the positional relationship is obtained based on the initial positional relationship, which represents the relationship between the measurement position of the sample test point and the detection information.

[0399] The first detection module detects the test point of the sample at the test position to obtain the detection information of the test point. The test position is the relative position between the first detection module and the sample along the measurement direction.

[0400] Based on the detection information of the point to be measured, the positional relationship, and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained.

[0401] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0402] The first detection module includes a detector for receiving signal light from the sample and acquiring the detection information based on the signal light;

[0403] The detection information includes the position coordinates of the light spot formed by the signal light on the photosensitive surface of the detector.

[0404] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0405] The first detection module detects samples at different measurement positions to obtain detection information of reference points at each measurement position. This includes: when the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is taken as the focal position, and a range of preset offsets from the focal position in both the positive and negative directions along the measurement direction is set as the sampling range; the sample is moved along the measurement direction within the sampling range, and detection information of each reference point at each measurement position is obtained when the sample moves to different measurement positions.

[0406] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0407] Set the focus position of the second detection module to the reference position;

[0408] When the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is taken as the focal position;

[0409] When the relative position of the first detection module and the sample is at the focal position, the detection information output by the first detection module is used as the reference detection information.

[0410] When the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is taken as the focal position. This includes: moving the sample relative to the second detection module along the measurement direction; outputting the detection result through the second detection module during the relative movement; determining the measurement position in the measurement direction that maximizes or exceeds a preset value of the detection result as the focal position. The detection quality includes one or a combination of signal-to-noise ratio, image sharpness, or robustness.

[0411] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0412] Set a preset step size; whenever the sample moves relative to the second detection module along the measurement direction by the preset step size, the second detection module outputs a detection result.

[0413] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0414] Based on the initial positional relationship, the detection information of the point to be measured at different measurement positions is interpolated to obtain the detection information of the point to be measured at different measurement positions;

[0415] The positional relationship is obtained based on multiple detection information of the point to be measured at different measurement locations.

[0416] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0417] Select any measurement location as the first measurement location, and perform a first function acquisition operation on the first measurement location. The first function acquisition operation includes: acquiring multiple detection information of each reference point located at different positions within the sample measurement surface at the first measurement location.

[0418] Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained;

[0419] Each measurement location is selected as the first measurement location, and the first function operation is executed to obtain the detection information of the test point of the sample at each measurement location;

[0420] The positional relationship is obtained based on the detection information of the sample test points at each measurement location.

[0421] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0422] Fit the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain a first functional relationship of the first measurement position. The first functional relationship is the relationship between the positions of each reference point in the sample measurement surface and the detection information. The measurement surface is perpendicular to the measurement direction or has an acute angle. Substitute the position of the test point in the measurement surface into the first functional relationship to obtain the detection information of the test point of the sample at the first measurement position.

[0423] or,

[0424] Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained, including: interpolating the detection information of the test point based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain the detection information of the sample test point at the first measurement position.

[0425] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0426] The positional relationship is obtained by fitting the correspondence between each detection information of the test point and each measurement position; or, the positional relationship is obtained by obtaining the correspondence between each detection information and each measurement position of the test point.

[0427] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0428] If there are multiple reference points;

[0429] Obtaining the positional relationship based on the initial positional relationship includes: averaging the initial positional relationships of each reference point to obtain the positional relationship.

[0430] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0431] The detection information of the reference point at different measurement locations is fitted by an undetermined function to obtain the fitted values ​​of the undetermined coefficients of the undetermined function; the fitted values ​​are then substituted into the undetermined function to obtain the initial positional relationship of the reference point.

[0432] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0433] The undetermined functions include: linear functions, polynomials, Fourier series expansions, or trigonometric function expansions.

[0434] In some embodiments of the present invention, the initial positional relationship includes at least one component; when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0435] The initial positional relationships of each reference point are averaged to obtain the positional relationships, including: selecting each component of the initial positional relationship as a reference item; and performing a combination process on each reference item to obtain the combination coefficients of each component of the positional relationship. Specifically, performing the combination process on any reference item includes: selecting a specific item of the initial positional relationship of each reference point as a reference item; obtaining a coefficient set based on the initial positional relationships of each reference point, the coefficient set comprising a set of coefficients of the reference items of each initial positional relationship; and averaging the coefficient set to obtain the combination coefficients.

[0436] The positional relationship is obtained by replacing the coefficients of the corresponding terms in the initial positional relationship with the combination coefficients of each component term.

[0437] In some embodiments of the present invention, the coefficient set further includes: position information of each reference point on the sample measurement surface, wherein the measurement surface is perpendicular to the measurement direction or has an acute angle; the initial position relationship includes at least one component; when a computer program stored in a computer-readable storage medium is executed by a processor, the processor may specifically be used to perform the following steps:

[0438] The optimization process is performed based on the correspondence between the location information of each reference point and the coefficients in the coefficient group to obtain the coefficients of the test point and thus the combined coefficients; the optimization process includes numerical interpolation or function fitting.

[0439] In some embodiments of the present invention, the reference point is located within a first preset range including the test point; the sample also has other test points located within a second preset range including the test point, the first preset range including the second preset range, and when a computer program stored in a computer-readable storage medium is executed by a processor, the processor may specifically be used to perform the following steps:

[0440] The other test points of the sample to be tested are detected to obtain the detection information of the other test points; the height difference of the other test points relative to the reference position along the measurement direction is obtained based on the positional relationship and the detection information of the other test points.

[0441] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0442] Based on the height difference between the test point and the reference position along the measurement direction, the sample and the first detection module are controlled to move relative to each other to reduce the height difference;

[0443] After the sample and the first detection module move relative to each other, the process returns to the step of detecting the test point of the sample at the test position through the first detection module to obtain the detection information of the test point, where the test position is the relative position between the first detection module and the sample along the measurement direction, and the step of obtaining the height difference of the test point relative to the reference position along the measurement direction based on the detection information of the test point, the positional relationship and the reference position.

[0444] Determine whether the height difference meets the preset accuracy; if not, return to the step of controlling the relative movement of the sample and the first detection module to reduce the height difference, until the number of returns reaches the preset number or the height difference meets the preset accuracy.

[0445] In some embodiments of the present invention, if there is only one reference point, when a computer program stored in a computer-readable storage medium is executed by a processor, the processor may specifically perform the following steps:

[0446] The initial positional relationship is taken as the positional relationship.

[0447] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0448] Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position;

[0449] Obtain the reference deviation between the reference measurement position and the reference position;

[0450] Using the reference deviation, each measurement position in the initial position relationship is compensated so that the reference measurement position of the compensated initial position relationship is the same as the reference position;

[0451] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0452] Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position;

[0453] The reference position is compensated so that the compensated reference position is equal to the reference measurement position.

[0454] In some embodiments of the present invention, when a computer program stored on a computer-readable storage medium is executed by a processor, the processor may specifically be configured to perform the following steps:

[0455] Based on the detection information and the compensated initial position relationship, the measurement position of the point to be measured is obtained;

[0456] Based on the measurement position of the point to be measured and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained;

[0457] It is understood that if the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a corresponding computer-readable storage medium. Based on this understanding, all or part of the processes in the above-described embodiments of the present invention can also be implemented by a computer program instructing related hardware. The computer program can be stored in a computer-readable storage medium, and when executed by a processor, it can implement the steps of the above-described method embodiments. The computer program includes computer program code, which can be in the form of source code, object code, executable file, or some intermediate form. The computer-readable medium can include: any entity or device capable of carrying the computer program code, recording media, USB flash drive, portable hard drive, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signals, telecommunication signals, and software distribution media, etc. It should be noted that the content included in the computer-readable medium can be appropriately added or removed according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, computer-readable media do not include electrical carrier signals and telecommunication signals.

[0458] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0459] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection between apparatuses or units through some interfaces, and may be electrical, mechanical, or other forms.

[0460] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0461] In addition, the functional units in the various embodiments of the present invention can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0462] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A detection method, characterized in that, include: The sample and a first detection module are acquired. The sample includes at least one reference point. The first detection module is used to detect the sample and output detection information. The first detection module performs detection processing on each reference point of the sample to obtain the initial positional relationship; The steps for detecting and processing the reference point include: detecting samples at different measurement positions along the measurement direction, obtaining detection information of the reference point of the sample at each measurement position, wherein the measurement position is the relative position between the sample and the first detection module; and obtaining an initial positional relationship based on the detection information of the reference point of the sample at different measurement positions, wherein the initial positional relationship is the relationship between the detection information of the measurement position and the reference point. When the relative position between the first detection module and the reference point surface along the measurement direction is at a preset position, the relative position between the first detection module and the sample along the measurement direction is used as the reference position, wherein the preset position value is equal to the reference position value; The reference detection information of the reference point is obtained when the relative position of the first detection module and the sample is at the reference position; wherein, the reference detection information is used together with the initial position relationship to determine the measurement position corresponding to the reference detection information, so as to determine the reference deviation between the measurement position corresponding to the reference detection information and the reference position; the reference deviation is the relative position between the sample reference point surface and the sample measurement surface; the reference deviation is used to calibrate the initial position relationship and / or the reference position, so that the measurement position corresponding to the reference detection information is the same as the reference position; The initial position relationship and / or the reference position are calibrated based on the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial position relationship remains unchanged before and after the calibration process. After the calibration process, the positional relationship is obtained according to the initial positional relationship, which represents the relationship between the measurement position of the sample test point and the detection information; the test point of the sample at the test position is detected by the first detection module to obtain the detection information of the test point, where the test position is the relative position between the first detection module and the sample along the measurement direction; Based on the detection information of the point to be measured, the positional relationship, and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained.

2. The detection method according to claim 1, characterized in that, The first detection module includes a detector for receiving signal light from the sample and acquiring the detection information based on the signal light; The detection information includes the position coordinates of the light spot formed by the signal light on the photosensitive surface of the detector.

3. The detection method according to claim 1, characterized in that, The first detection module detects samples at different measurement positions to obtain detection information for each reference point at each measurement position. This includes: when the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is taken as the focal position, and a range of preset offsets from the focal position in both the positive and negative directions along the measurement direction is set as the sampling range; the sample is moved along the measurement direction within the sampling range, and detection information for each reference point at each measurement position is obtained when the sample moves to different measurement positions.

4. The detection method according to claim 1 or 3, characterized in that, The method further includes: setting the focal position of the second detection module as the reference position; When the relative position of the first detection module and the reference point surface along the measurement direction is at a preset position, the relative position of the first detection module and the sample along the measurement direction is used as the reference position, including: when the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is used as the focal position; when the relative position of the first detection module and the sample is at the reference position, the reference detection information of the reference point is obtained, including: when the relative position of the first detection module and the sample is at the focal position, the detection information output by the first detection module is used as the reference detection information; When the second detection module focuses on the reference point, the position of the sample relative to the first detection module along the measurement direction is taken as the focal position. This includes: moving the sample relative to the second detection module along the measurement direction; outputting the detection result through the second detection module during the relative movement; determining the measurement position in the measurement direction that maximizes or exceeds a preset value of the detection result as the focal position. The detection quality includes one or a combination of signal-to-noise ratio, image sharpness, or robustness.

5. The detection method according to claim 1, characterized in that, Obtaining the positional relationship based on the initial positional relationship includes: Based on the initial positional relationship, the detection information of the point to be measured at different measurement positions is interpolated to obtain the detection information of the point to be measured at different measurement positions; The positional relationship is obtained based on multiple detection information of the point to be measured at different measurement locations.

6. The detection method according to claim 1, characterized in that, If there are multiple reference points, the positional relationship is obtained based on the initial positional relationship, including: Select any measurement location as the first measurement location, and perform a first function acquisition operation on the first measurement location. The first function acquisition operation includes: acquiring multiple detection information of each reference point located at different positions within the sample measurement surface at the first measurement location. Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained; Each measurement location is selected as the first measurement location, and the first function operation is executed to obtain the detection information of the test point of the sample at each measurement location; The positional relationship is obtained based on the detection information of the sample test points at each measurement location.

7. The detection method according to claim 6, characterized in that, Based on the correspondence between the positions of each reference point within the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained, including: fitting the correspondence between the positions of each reference point within the sample measurement surface and the multiple detection information to obtain a first functional relationship at the first measurement position, wherein the first functional relationship is the relationship between the positions of each reference point within the sample measurement surface and the detection information, and the measurement surface is perpendicular to the measurement direction or has an acute angle; substituting the position of the test point within the measurement surface into the first functional relationship to obtain the detection information of the sample test point at the first measurement position; or, Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained, including: interpolating the detection information of the test point based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain the detection information of the sample test point at the first measurement position.

8. The detection method according to claim 6, characterized in that, Obtaining the positional relationship based on the detection information of the sample test point at each measurement location includes: fitting the correspondence between each detection information of the test point and each measurement location to obtain the positional relationship; or, obtaining the correspondence between each detection information and each measurement location of the test point to obtain the positional relationship.

9. The detection method according to claim 1, characterized in that, If there are multiple reference points; Obtaining the positional relationship based on the initial positional relationship includes: averaging the initial positional relationships of each reference point to obtain the positional relationship.

10. The detection method according to claim 9, characterized in that, Based on the detection information of reference points at different measurement locations, the initial positional relationship is obtained, including: fitting the detection information of the reference points at different measurement locations using an undetermined function to obtain the fitting values ​​of the undetermined coefficients of the undetermined function; and substituting the fitting values ​​into the undetermined function to obtain the initial positional relationship of the reference points.

11. The detection method according to claim 10, characterized in that, The initial positional relationship includes at least one component; The initial positional relationships of each reference point are averaged to obtain the positional relationships, including: selecting each component of the initial positional relationship as a reference item; and performing a combination process on each reference item to obtain the combination coefficients of each component of the positional relationship. Specifically, performing the combination process on any reference item includes: selecting a specific item of the initial positional relationship of each reference point as a reference item; obtaining a coefficient set based on the initial positional relationships of each reference point, the coefficient set comprising a set of coefficients of the reference items of each initial positional relationship; and averaging the coefficient set to obtain the combination coefficients. The positional relationship is obtained by replacing the coefficients of the corresponding terms in the initial positional relationship with the combination coefficients of each component term.

12. The detection method according to claim 11, characterized in that, The coefficient group further includes: position information of each reference point on the sample measurement surface, wherein the measurement surface is perpendicular to the measurement direction or has an acute angle; the mean value processing includes: performing optimization processing based on the correspondence between the position information of each reference point and each coefficient in the coefficient group to obtain the coefficient of the point to be measured and thus obtain the combined coefficient; the optimization processing includes numerical interpolation or function fitting; Alternatively, the mean-averaging process may include: obtaining the weighted value or median of each coefficient in the coefficient group.

13. The detection method according to claim 12, characterized in that, The location information of the reference point includes: first location information along a first direction and second location information along a second direction, wherein both the first and second directions are located within the measurement surface, and the first and second directions are perpendicular or have an acute angle between them. The numerical interpolation or function fitting includes two-dimensional topography fitting or two-dimensional topography interpolation.

14. The detection method according to any one of claims 1 to 3, characterized in that, After obtaining the height of the point to be measured relative to the reference position along the measurement direction based on the detection information, the positional relationship, and the reference position, the method further includes: Based on the height difference of the point to be measured relative to the reference position along the measurement direction; The sample and the first detection module are controlled to move relative to each other to reduce the height difference; After the sample and the first detection module move relative to each other, the process returns to the step of detecting the test point of the sample at the test position through the first detection module to obtain the detection information of the test point, where the test position is the relative position between the first detection module and the sample along the measurement direction, and the step of obtaining the height difference of the test point relative to the reference position along the measurement direction based on the detection information of the test point, the positional relationship and the reference position. Determine whether the height difference meets the preset accuracy; if not, return to the step of controlling the relative movement of the sample and the first detection module to reduce the height difference, until the number of returns reaches the preset number or the height difference meets the preset accuracy.

15. The detection method according to any one of claims 5 to 13, characterized in that, After obtaining the height of the point to be measured relative to the reference position along the measurement direction based on the detection information, the positional relationship, and the reference position, the method further includes: Based on the height difference of the point to be measured relative to the reference position along the measurement direction; The sample and the first detection module are controlled to move relative to each other to reduce the height difference; After the sample and the first detection module move relative to each other, the process returns to the step of detecting the test point of the sample at the test position through the first detection module to obtain the detection information of the test point, where the test position is the relative position between the first detection module and the sample along the measurement direction, and the step of obtaining the height difference of the test point relative to the reference position along the measurement direction based on the detection information of the test point, the positional relationship and the reference position. Determine whether the height difference meets the preset accuracy; if not, return to the step of controlling the relative movement of the sample and the first detection module to reduce the height difference, until the number of returns reaches the preset number or the height difference meets the preset accuracy.

16. The detection method according to claim 1, characterized in that, If there is only one reference point, then obtaining the positional relationship based on the initial positional relationship of the reference points includes: using the initial positional relationship as the positional relationship.

17. The detection method according to claim 1, characterized in that, The initial positional relationship is calibrated based on the reference detection information so that the measurement position corresponding to the reference detection information is the same as the reference position, including: Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position; Obtain the reference deviation between the reference measurement position and the reference position; Using the reference deviation, each measurement position in the initial position relationship is compensated so that the reference measurement position of the compensated initial position relationship is the same as the reference position; The reference position is calibrated based on the reference detection information so that the measurement position corresponding to the reference detection information is the same as the reference position, including: Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position; The reference position is compensated so that the compensated reference position is equal to the reference measurement position.

18. The detection method according to claim 17, characterized in that, Based on the detection information of the point to be measured, the positional relationship, and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained, including: Based on the detection information of the point to be measured and the positional relationship, the measurement position of the point to be measured is obtained; Based on the difference between the measured position of the point to be measured and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained.

19. A detection system applied to any one of the detection methods of claims 1 to 18, characterized in that, include: A first acquisition module is used to acquire a sample and a first detection module. The sample includes at least one reference point. The first detection module is used to detect the sample and output detection information. The first detection module is used to perform detection processing on each reference point of the sample to obtain an initial positional relationship. The first detection module includes a first detection unit and a first acquisition unit. The first detection unit is used to detect the sample at different measurement positions along the measurement direction and acquire the detection information of the sample reference points at each measurement position. The measurement position is the relative position between the sample and the first detection module. The first acquisition unit is used to acquire an initial positional relationship based on the detection information of the reference points of the sample at different measurement positions. The initial positional relationship is the relationship between the detection information of the measurement positions and the reference points. The second acquisition module is used to acquire the relative position of the first detection module and the sample along the measurement direction when the relative position of the first detection module and the reference point surface along the measurement direction is at a preset position, and the relative position of the first detection module and the sample along the measurement direction is used as a reference position, wherein the value of the preset position is equal to the value of the reference position. The first detection module is further configured to acquire reference detection information of the reference point when the relative positions of the first detection module and the sample are at a reference position; wherein, the reference detection information is used together with the initial positional relationship to determine the measurement position corresponding to the reference detection information, so as to determine the reference deviation between the measurement position corresponding to the reference detection information and the reference position; the reference deviation is the relative position between the sample reference point surface and the sample measurement surface; the reference deviation is used to calibrate the initial positional relationship and / or the reference position, so that the measurement position corresponding to the reference detection information is the same as the reference position; The calibration module is used to calibrate the initial position relationship and / or the reference position according to the reference detection information, so that the measurement position corresponding to the reference detection information is the same as the reference position, and the difference between adjacent measurement positions in the initial position relationship remains unchanged before and after the calibration process; The second acquisition module is further configured to acquire a positional relationship based on an initial positional relationship after the calibration process, wherein the positional relationship represents the relationship between the measurement position of the sample test point and the detection information; The first detection module is further configured to detect the test point of the sample at the test position to obtain the detection information of the test point, wherein the test position is the relative position between the first detection module and the sample along the measurement direction; The second acquisition module is further configured to acquire the height difference of the test point relative to the reference position along the measurement direction based on the detection information of the test point, the positional relationship, and the reference position.

20. The detection system according to claim 19, characterized in that, If there are multiple reference points, the initial positional relationship is the discrete correspondence between the spatial positions of each reference point and the detection information. The second acquisition module is specifically used for: Select any measurement location as the first measurement location, and perform a first function acquisition operation on the first measurement location. The first function acquisition operation includes: acquiring multiple detection information of each reference point located at different positions within the sample measurement surface at the first measurement location. Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained; Each measurement location is selected as the first measurement location, and the first function operation is executed to obtain the detection information of the test point of the sample at each measurement location; The positional relationship is obtained based on the detection information of the sample test points at each measurement location.

21. The detection system according to claim 20, characterized in that, The second acquisition module is specifically used for: Fit the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain a first functional relationship of the first measurement position. The first functional relationship is the relationship between the positions of each reference point in the sample measurement surface and the detection information. The measurement surface is perpendicular to the measurement direction or has an acute angle. Substitute the position of the test point in the measurement surface into the first functional relationship to obtain the detection information of the test point of the sample at the first measurement position. or, Based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information, the detection information of the sample test point at the first measurement position is obtained, including: interpolating the detection information of the test point based on the correspondence between the positions of each reference point in the sample measurement surface and the multiple detection information to obtain the detection information of the sample test point at the first measurement position.

22. The detection system according to claim 20, characterized in that, The second acquisition module is specifically used for: Obtaining the positional relationship based on the detection information of the sample test point at each measurement location includes: fitting the correspondence between each detection information of the test point and each measurement location to obtain the positional relationship; or, obtaining the correspondence between each detection information and each measurement location of the test point to obtain the positional relationship.

23. The detection system according to claim 19, characterized in that, If there are multiple reference points; The second acquisition module is specifically used for: Obtaining the positional relationship based on the initial positional relationship includes: averaging the initial positional relationships of each reference point to obtain the positional relationship.

24. The detection system according to claim 23, characterized in that, The first acquisition unit is specifically used for: The detection information of the reference point at different measurement locations is fitted by an undetermined function to obtain the fitted values ​​of the undetermined coefficients of the undetermined function; the fitted values ​​are then substituted into the undetermined function to obtain the initial positional relationship of the reference point.

25. The detection system according to claim 24, characterized in that, The initial positional relationship includes at least one component; The second acquisition module is specifically used for: Each component of the initial positional relationship is selected as a reference item; and a combination process is performed on each reference item to obtain the combination coefficients of each component of the positional relationship. The combination process for any reference item includes: selecting one item of the initial positional relationship of each reference point as a reference item; obtaining a coefficient set based on the initial positional relationship of each reference point, wherein the coefficient set includes a set of coefficients composed of the reference items of each initial positional relationship; and performing a mean-averaging process on the coefficient set to obtain the combination coefficients. The positional relationship is obtained by replacing the coefficients of the corresponding terms in the initial positional relationship with the combination coefficients of each component term.

26. The detection system according to claim 24, characterized in that, The coefficient set also includes: position information of each reference point on the sample measurement surface, wherein the measurement surface is perpendicular to the measurement direction or has an acute angle with it; The second acquisition module is specifically used for: Each component of the initial positional relationship is selected as a reference term; and a combination process is performed on each reference term to obtain the combination coefficients of each component of the positional relationship. The combination process for any reference term includes: selecting one term of the initial positional relationship of each reference point as a reference term; obtaining a coefficient set based on the initial positional relationship of each reference point, wherein the coefficient set includes a set of coefficients of the reference terms of each initial positional relationship and the position information of each reference point on the sample measurement surface; and performing optimization processing based on the correspondence between the position information of each reference point and the coefficients in the coefficient set to obtain the coefficients of the point to be measured, thus obtaining the combination coefficients. The optimization processing includes numerical interpolation or function fitting. The positional relationship is obtained by replacing the coefficients of the corresponding terms in the initial positional relationship with the combination coefficients of each component term.

27. The detection system according to claim 19, characterized in that, The calibration module is specifically used for: Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position; Obtain the reference deviation between the reference measurement position and the reference position; Using the reference deviation, each measurement position in the initial position relationship is compensated so that the reference measurement position of the compensated initial position relationship is the same as the reference position; or, Based on the reference detection information and the initial position relationship, the measurement position corresponding to the reference detection information is obtained as the reference measurement position; The reference position is compensated so that the compensated reference position is equal to the reference measurement position.

28. The detection system according to claim 27, characterized in that, The second acquisition module is specifically used for: Based on the detection information and positional relationship, the measurement position of the point to be measured is obtained; Based on the measured position of the point to be measured and the reference position, the height difference of the point to be measured relative to the reference position along the measurement direction is obtained.

29. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it is used to implement the detection method as described in any one of claims 1 to 18.

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