Parallel positioning device for photo mask edge cleaning equipment

Abstract

The present application relates to a kind of parallel positioning device of photo mask edge cleaning equipment, including mounting bracket, two sliding range finding mechanisms, strip nozzle and rotary drive mechanism;Two sliding range finding mechanisms are located in the two sides of the mounting bracket, including sliding piece on the mounting bracket and the range finding sensor for measuring the distance between it and calibration piece and installed on the sliding piece;The middle position of strip nozzle is rotatably installed on the mounting bracket, and each end is connected with a sliding piece by a linkage mechanism, and the sliding piece is driven to slide by the linkage mechanism in the process of rotating the strip nozzle;Rotary drive mechanism is installed between the mounting bracket and the strip nozzle, for driving the strip nozzle to rotate to the position that the distance measured by two range finding sensors is equal.The present application can conveniently position the strip nozzle in parallel.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photomask cleaning, in particular to a parallel positioning device for photomask edge cleaning equipment. BACKGROUND

[0002] In the process of photomask production, there is an edge cleaning process. The process of cleaning the edge of the photomask is as follows: first, clean a pair of side edges of the photomask; after cleaning, rotate the photomask by 90 degrees; and then clean the other pair of side edges of the photomask. This cleaning process requires that the strip-shaped nozzle used to spray liquid to the side edge of the photomask maintains a very close distance with the photomask. Therefore, in order to avoid the strip-shaped nozzle from colliding with the photomask due to tilting, the strip-shaped nozzle needs to be positioned in parallel before the photomask edge cleaning equipment cleans the first piece of photomask, or after the photomask edge cleaning equipment has been put into operation for a period of time.

[0003] However, the existing photomask edge cleaning equipment is not convenient for positioning the strip-shaped nozzle in parallel. It needs to be adjusted, compared, and measured repeatedly by hand. Therefore, there is an urgent need to develop a device that can conveniently position the strip-shaped nozzle in parallel. SUMMARY

[0004] The technical problem to be solved by the present application is to overcome the defects of the prior art and provide a parallel positioning device for photomask edge cleaning equipment, which can conveniently position the strip-shaped nozzle in parallel.

[0005] To solve the above technical problems, the technical solution of the present application is as follows: a parallel positioning device for photomask edge cleaning equipment, comprising:

[0006] a mounting frame;

[0007] two sliding distance measuring mechanisms located on both sides of the mounting frame, comprising a sliding member slidingly fitted on the mounting frame and a distance measuring sensor installed on the sliding member and used to measure the distance between the sliding member and a calibration member;

[0008] a strip-shaped nozzle rotatably installed at a middle position of the mounting frame, each end of the strip-shaped nozzle being connected to a sliding member through a linkage mechanism, the strip-shaped nozzle being slid by the linkage mechanism to drive the sliding member to slide during rotation;

[0009] a rotation driving mechanism installed between the mounting frame and the strip-shaped nozzle, used to drive the strip-shaped nozzle to rotate to a position where the distances measured by the two distance measuring sensors are equal.

[0010] Further provided is a specific structure of a rotating driving mechanism, which comprises a linear module, one end of which is hinged to the mounting frame and the other end of which is hinged to the strip-shaped nozzle.

[0011] Further provided is a specific structure of a linkage mechanism, which comprises a linkage plate, one end of which is hinged to the strip-shaped nozzle and the other end of which is hinged to the sliding member.

[0012] Further, the included angle between the ranging paths of the two ranging sensors is an acute angle.

[0013] Further, the parallel positioning device for the photo mask edge cleaning equipment further comprises:

[0014] A first moving driving mechanism is connected to the mounting frame and used to drive the mounting frame to move up and down;

[0015] A second moving driving mechanism is connected to the first moving driving mechanism and used to drive the first moving driving mechanism, the mounting frame and the strip-shaped nozzle to move towards or away from the photo mask.

[0016] Further, the parallel positioning device for the photo mask edge cleaning equipment further comprises:

[0017] A tray is used to support the photo mask;

[0018] A frame is provided with a deviation rectifying part at the position corresponding to the four corners of the photo mask on the inner wall of the frame, and the deviation rectifying part comprises an inverted conical concave surface;

[0019] A lifting driving mechanism is connected to the frame and used to drive the frame to move up and down, and the inverted conical concave surface is used to guide the photo mask to be in the right position during the process of rising and contacting the photo mask.

[0020] Further, in order to expand the size range of the applicable photo mask, the parallel positioning device for the photo mask edge cleaning equipment further comprises four lifting parts fixed on the bottom of the frame and used to support the corner of the photo mask after being rectified by the deviation rectifying part.

[0021] Further, in order to expand the rectifying range, the deviation rectifying part further comprises two inclined surfaces located on both sides of the inverted conical concave surface, which are connected with the inverted conical concave surface and located in the tangent direction of the corresponding side of the inverted conical concave surface.

[0022] Further, the parallel positioning device for the photo mask edge cleaning equipment further comprises a retractable ejector pin, which is installed on the frame and used to push the photo mask to move towards the side of the strip-shaped nozzle.

[0023] Further to prevent the frame from contacting the photomask at positions other than the corners, each internal corner of the frame is an obtuse angle.

[0024] With the above technical solution, the present application has the following advantages:

[0025] In the process of parallel positioning the strip-shaped nozzle, first, the distance between the strip-shaped nozzle and the calibration piece in the normal position is measured by two distance measuring sensors, then the strip-shaped nozzle is driven to rotate by the rotating driving mechanism according to the difference between the two distances until the distances measured by the two distance measuring sensors are equal. The present application can conveniently and easily position the strip-shaped nozzle in parallel. The two sliding distance measuring mechanisms are slidably arranged on the mounting frame. In the process of rotating the strip-shaped nozzle, the distance measuring sensors slide linearly along the mounting frame under the driving of the linkage mechanism and do not rotate with the strip-shaped nozzle, thereby ensuring the accuracy of the distance measuring results. On the other hand, the distance measuring sensors are not fixed on the strip-shaped nozzle, which can reduce the weight on the strip-shaped nozzle and further reduce the amount of deviation of the strip-shaped nozzle after being used for a period of time.

[0026] In the process of cleaning the photomask, the photomask is first transferred to the tray, after cleaning one pair of side edges, it is rotated by 90 degrees, and then the other pair of side edges is cleaned. After the strip-shaped nozzle is in the normal position, the photomask also needs to be in the normal position to ensure that the strip-shaped nozzle and the photomask are parallel. However, after the photomask is transferred to the tray each time, it is difficult to ensure that the photomask is exactly in the normal position. After the photomask is rotated by 90 degrees each time, it is also difficult to ensure that the photomask has been rotated by exactly 90 degrees. Therefore, before cleaning, the present application also corrects the deviation of the photomask by the deviation correction part on the frame, thereby effectively ensuring that the photomask and the strip-shaped nozzle are parallel, thereby preventing the strip-shaped nozzle from colliding with the photomask when moving to a position close to the photomask. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 FIG. 1 is a structural schematic view of the parallel positioning device for the photomask edge cleaning equipment in the first embodiment of the present application;

[0028] Figure 2 FIG. 2 is a top view of the parallel positioning device for the photomask edge cleaning equipment in the first embodiment of the present application; Figure 1

[0029] Figure 3 FIG. 3 is a structural schematic view of the parallel positioning device for the photomask edge cleaning equipment in the second embodiment of the present application;

[0030] Figure 4 FIG. 4 is a top view of the parallel positioning device for the photomask edge cleaning equipment in the second embodiment of the present application; Figure 3

[0031] Figure 5 ​​A structural schematic view of the frame in Embodiment Two of the present application;

[0032] Figure 6 A structural schematic view of the frame in Embodiment Two of the present application; Figure 5 An enlarged view of A part of the frame in Embodiment Two of the present application. DETAILED DESCRIPTION

[0033] In order to make the content of the present application more easily understood, the present application is further described in detail below according to specific embodiments and in conjunction with the accompanying drawings. Embodiment

[0034] As shown in Figs. 1, 2, 3 and 4, a parallel positioning device for a photo mask plate edge cleaning apparatus comprises: Figure 1 、 2 A mounting frame 1;

[0035] Two slide distance measuring mechanisms are located on both sides of the mounting frame 1 and comprise a slide 21 slidably fitted on the mounting frame 1 and a distance measuring sensor 22 installed on the slide 21 and used for measuring the distance between the slide 21 and a calibration piece;

[0036] A strip-shaped nozzle 3 is rotatably installed on the mounting frame 1 at a middle position and each end thereof is connected with a slide 21 through a linkage mechanism, and the strip-shaped nozzle 3 drives the slide 21 to slide through the linkage mechanism during rotation;

[0037] A rotary driving mechanism 4 is installed between the mounting frame 1 and the strip-shaped nozzle 3 and used for driving the strip-shaped nozzle 3 to rotate to a position at which the distances measured by the two distance measuring sensors 22 are equal.

[0038] In the present embodiment, the photo mask plate 10 is used as the calibration piece. When the strip-shaped nozzle 3 is in a normal position, the two slide distance measuring mechanisms are symmetrical about the mounting frame 1 and the two linkage mechanisms are also symmetrical about the mounting frame 1.

[0039]

[0040] ​Specifically, in the process of parallel positioning the strip-shaped nozzle 3, first, the distance between the strip-shaped nozzle 3 and the calibration piece in the normal position is measured by the two distance measuring sensors 22, then the strip-shaped nozzle 3 is driven to rotate by the rotary driving mechanism 4 according to the difference between the two distances, until the distances measured by the two distance measuring sensors 22 are equal. The strip-shaped nozzle 3 can be conveniently and easily positioned in parallel. The two sliding distance measuring mechanisms of the embodiment are slidably arranged on the mounting frame 1. In the process of rotating the strip-shaped nozzle 3, the distance measuring sensors 22 slide linearly along the mounting frame 1 under the driving of the linkage mechanism, and do not rotate with the strip-shaped nozzle 3, thereby ensuring the accuracy of the distance measurement. On the other hand, the distance measuring sensors 22 are not fixed on the strip-shaped nozzle 3, compared with the case that the distance measuring sensors 22 are fixed on the strip-shaped nozzle 3, the weight on the strip-shaped nozzle 3 can be reduced, and the amount of deviation of the strip-shaped nozzle 3 after being used for a period of time can be reduced as much as possible.

[0041] As shown in Figure 1 , 2 , 3, 4, the rotary driving mechanism 4 comprises a linear module, one end of the linear module is hingedly connected with the mounting frame 1, and the other end is hingedly connected with the strip-shaped nozzle 3. The linear module has relatively high precision and is convenient to control.

[0042] As shown in Figure 1 , 2 , 3, 4, the linkage mechanism comprises a linkage plate 5, one end of the linkage plate 5 is hingedly connected with the strip-shaped nozzle 3, and the other end is hingedly connected with the sliding piece 21.

[0043] As shown in Figure 1 , 2 , 3, 4, the included angle between the distance measuring paths of the two distance measuring sensors 22 is an acute angle. In this way, in the case that the size of the photomask 10 is relatively small and the distance between the two distance measuring sensors 22 is greater than the length of the photomask 10, the two distance measuring sensors 22 can also perform distance measurement. In the embodiment, the two distance measuring sensors 22 are obliquely arranged on the sliding piece 21.

[0044] As shown in Figure 1 , 2 , 3, 4, the parallel positioning device for the photomask edge cleaning equipment further comprises:

[0045] A first moving driving mechanism 6 is connected with the mounting frame 1 and used for driving the mounting frame 1 to move up and down;

[0046] A second moving driving mechanism 7 is connected with the first moving driving mechanism 6 and used for driving the first moving driving mechanism 6, the mounting frame 1 and the strip-shaped nozzle 3 to move towards or away from the photomask 10.

[0047] In the embodiment, the first moving driving mechanism 6 and the second moving driving mechanism 7 can be, but are not limited to, linear modules. Embodiment

[0048] As shown in Figure 3 , 4 , 5, 6, the parallel positioning device for the photo mask edge cleaning equipment in the embodiment further comprises, on the basis of the first embodiment:

[0049] A tray 81 for supporting the photo mask 10;

[0050] A frame 82, the inner wall of the frame 82 is provided with a correction part at the positions corresponding to the four corners of the photo mask 10, and the correction part comprises an inverted conical concave surface 841;

[0051] A lifting driving mechanism 83 connected to the frame 82 for driving the frame 82 to lift, and the inverted conical concave surface 841 is used to guide the photo mask 10 to be in the correct position during the process of lifting and contacting the photo mask 10.

[0052] In the embodiment, the lifting driving mechanism 83 can be, but is not limited to, an electric cylinder.

[0053] Specifically, during the cleaning process of the photo mask 10, the photo mask 10 is first transferred to the tray 81, after the cleaning of one pair of side edges is completed, the photo mask 10 is rotated by 90 degrees, and then the other pair of side edges is cleaned. After the strip-shaped nozzle 3 is in the correct position, it is also necessary to ensure that the photo mask 10 is also in the correct position, so as to ensure that the strip-shaped nozzle 3 and the photo mask 10 are parallel. However, after the photo mask 10 is transferred to the tray 81 each time, it is difficult to ensure that the photo mask 10 is exactly in the correct position, and after the photo mask 10 is rotated by 90 degrees each time, it is also difficult to ensure that the photo mask 10 has been rotated by 90 degrees. Therefore, before cleaning, the photo mask 10 is corrected by the correction part on the frame 82, so as to effectively ensure that the photo mask 10 and the strip-shaped nozzle 3 are parallel, thereby preventing the strip-shaped nozzle 3 from colliding with the photo mask 10 when moving to a position very close to the photo mask 10.

[0054] As shown in Figure 3 , 4 , 5, 6, the parallel positioning device for the photo mask edge cleaning equipment further comprises four lifting parts fixed on the bottom of the frame 82 for receiving the corner of the photo mask 10 corrected by the correction part. During the lifting process of the frame 82, if the photo mask 2 cannot be clamped by the four correction parts, it can fall onto the lifting parts. Such arrangement makes the frame 82 in the embodiment applicable to photo masks 10 with smaller sizes within a certain limit.

[0055] As shown in Figure 3、 4 As shown in Figs. 5 and 6, the deviation rectifying part further comprises two inclined surfaces 842 located on both sides of the inverted conical concave surface 841, which are connected with the inverted conical concave surface 841 and located in the tangent direction of the corresponding side of the inverted conical concave surface 841. In the case of serious deflection of the photomask 2, the four corners deviate from the inverted conical concave surface 841. In this case, the photomask 2 can fall within the deviation rectifying range of the inclined surface 842. Such arrangement greatly improves the deviation rectifying range of the photomask 10 in this embodiment.

[0056] As shown in Figs. 5 and 6, the deviation rectifying part further comprises two inclined surfaces 842 located on both sides of the inverted conical concave surface 841, which are connected with the inverted conical concave surface 841 and located in the tangent direction of the corresponding side of the inverted conical concave surface 841. In the case of serious deflection of the photomask 2, the four corners deviate from the inverted conical concave surface 841. In this case, the photomask 2 can fall within the deviation rectifying range of the inclined surface 842. Such arrangement greatly improves the deviation rectifying range of the photomask 10 in this embodiment. Figure 3 、 4 As shown in Figs. 5 and 6, the parallel positioning device for photomask edge cleaning equipment further comprises a retractable ejector pin 9, which is installed on the frame 82 and used to push the photomask 10 to move towards the side of the strip-shaped nozzle 3. Such arrangement makes the rectified photomask 2 have the same reference as far as possible, so that the distance between the strip-shaped nozzle 3 and all the photomasks 10 can be kept consistent as far as possible.

[0057] In this embodiment, in the process of deviation rectification, the frame 82 is first lifted by the lifting driving mechanism 83, and the frame 82 lifts the corner of the photomask 10 by the deviation rectifying part in the process of lifting. The corner of the photomask 10 is guided into a small space at the bottom by the deviation rectifying part in the process of being lifted, and then the retractable ejector pin 9 is extended to push the photomask 10 so that the photomask 10 reaches or as close as possible to the same reference. Then the retractable ejector pin 9 is retracted, the frame 82 is lowered by the lifting driving mechanism 83, and the photomask 10 falls on the tray 81, thereby completing the deviation rectification of the photomask 10.

[0058] As shown in Figs. 5 and 6, the parallel positioning device for photomask edge cleaning equipment further comprises a retractable ejector pin 9, which is installed on the frame 82 and used to push the photomask 10 to move towards the side of the strip-shaped nozzle 3. Such arrangement makes the rectified photomask 2 have the same reference as far as possible, so that the distance between the strip-shaped nozzle 3 and all the photomasks 10 can be kept consistent as far as possible. Figure 3 、 4 As shown in Figs. 5 and 6, each internal angle of the frame 82 is an obtuse angle. In this embodiment, the frame 82 is a hexagonal frame. Such arrangement can prevent other parts of the frame 82 except the deviation rectifying part from contacting the photomask 10, and can reduce the contact area between the frame 82 and the photomask 10 as far as possible to avoid damaging or contaminating the photomask 10.

[0059] In this embodiment, the material of the frame 82 is aluminum alloy, and the material of the deviation rectifying part is PP. The frame 82 is made of aluminum alloy as a whole, which has relatively high strength. The deviation rectifying part is made of PP material, which can effectively avoid damaging the photomask 10 in the process of contacting the photomask 10.

[0060] With the above ideal embodiments according to the present application as the inspiration, through the above description, relevant staff can make various changes and modifications without deviating from the technical idea of the present application. The technical scope of the present application is not limited to the content of the specification, and must be determined according to the scope of the claims.

Claims

1. A parallel positioning device for a photo mask plate edge cleaning apparatus, characterized in that it comprises: a mounting frame (1); two slide distance measuring mechanisms located on both sides of the mounting frame (1) and comprising a slide (21) fitted on the mounting frame (1) and a distance measuring sensor (22) installed on the slide (21) and used to measure the distance between the slide (21) and a calibration piece; a strip-shaped nozzle (3) rotationally mounted on the mounting frame (1) at a middle position, each end of the strip-shaped nozzle (3) being connected to a slide (21) through a linkage mechanism, the strip-shaped nozzle (3) driving the slide (21) to slide through the linkage mechanism during rotation; a rotation driving mechanism (4) installed between the mounting frame (1) and the strip-shaped nozzle (3) and used to drive the strip-shaped nozzle (3) to rotate to a position where the distances measured by the two distance measuring sensors (22) are equal; a tray (81) used to support a photo mask plate (10); a frame (82), the inner wall of the frame (82) being provided with a correction part at positions corresponding to the four corners of the photo mask plate (10), the correction part comprising an inverted conical concave surface (841); a lifting driving mechanism (83) connected to the frame (82) and used to drive the frame (82) to lift, the inverted conical concave surface (841) being used to guide the photo mask plate (10) to be in a normal position during lifting and contacting the photo mask plate (10).

2. The parallel positioning device for a photo mask plate edge cleaning apparatus according to claim 1, characterized in that the rotation driving mechanism (4) comprises a linear module, one end of the linear module being hinged to the mounting frame (1) and the other end being hinged to the strip-shaped nozzle (3).

3. The parallel positioning device for a photo mask plate edge cleaning apparatus according to claim 1, characterized in that the linkage mechanism comprises a linkage plate (5), one end of the linkage plate (5) being hinged to the strip-shaped nozzle (3) and the other end being hinged to the slide (21).

4. The parallel positioning device for a photo mask plate edge cleaning apparatus according to claim 1, characterized in that the included angle between the distance measuring paths of the two distance measuring sensors (22) is an acute angle.

5. The parallel positioning device for a photo mask plate edge cleaning apparatus according to claim 1, characterized in that it further comprises: a first moving driving mechanism (6) connected to the mounting frame (1) and used to drive the mounting frame (1) to lift; a second moving driving mechanism (7) connected to the first moving driving mechanism (6) and used to drive the first moving driving mechanism (6), the mounting frame (1) and the strip-shaped nozzle (3) to move towards or away from the photo mask plate (10).

6. The parallel positioning device for a photo mask plate edge cleaning apparatus according to claim 1, characterized in that it further comprises four lifting parts fixed on the bottom of the frame (82) and used to support the corners of the photo mask plate (10) after correction by the correction part.

7. The parallel positioning device for a photo mask plate edge cleaning apparatus according to claim 6, characterized in that ​ ​ ​ ​ ​ ​ The deviation rectifying part further comprises two slope surfaces (842) located on both sides of the inverted conical concave surface (841), the slope surfaces (842) are connected with the inverted conical concave surface (841) and are located in the tangent direction of the corresponding side of the inverted conical concave surface (841). 8.The parallel positioning device for photo mask edge cleaning equipment according to claim 1, wherein, A retractable ejector pin (9) is installed on the frame (82) and used to push the photo mask (10) to move towards the side of the strip-shaped nozzle (3). 9.The parallel positioning device for photo mask edge cleaning equipment according to claim 1, wherein, Each internal angle of the frame (82) is an obtuse angle.

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