Detection device

By combining the threaded connection between the frame and the photodetector with the dichroic mirror, flexible configuration of the photodetector is achieved, solving the problem of insufficient detection accuracy caused by fixed configuration and improving the adaptability and flexibility of the detection device.

CN115876729BActive Publication Date: 2026-06-02TOYOTA JIDOSHA KK

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
TOYOTA JIDOSHA KK
Filing Date
2022-07-26
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

The fixed configuration of the photodetector in existing detection devices cannot be changed appropriately, resulting in insufficient detection accuracy and flexibility.

Method used

By employing multiple interconnectable frame structures, combined with threaded connections and dichroic mirrors, flexible configuration of the photodetectors can be achieved. The photodetectors are fixed to the frame via threaded connections, and dichroic mirrors are used to guide light of different wavelengths to the corresponding photodetectors.

Benefits of technology

It enables flexible configuration of photodetectors, improves detection accuracy and adaptability, and allows adjustment of the position and number of photodetectors as needed, thereby reducing manufacturing costs.

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Abstract

A detection device according to an embodiment of the present disclosure includes two or more frame bodies that can be connected to each other, a first light detector that can be connected to the frame bodies, and a second light detector that can be connected to the frame bodies. The frame bodies have a first connection portion that can be connected to the first light detector, a second connection portion that can be connected to the second light detector, and a third opening portion that faces the first connection portion. At least one of the frame bodies has a dichroic mirror disposed between the first opening portion and the third opening portion. The dichroic mirror transmits light having a first wavelength of light incident from the third opening portion to the first opening portion and reflects light having a second wavelength of the incident light to the second opening portion.
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Description

Technical Field

[0001] This disclosure relates to detection apparatus, such as a detection apparatus for detecting the reflected light of a laser beam that has been incident on a reflector. Background Technology

[0002] Typically, when determining the fusion state at a laser welding processing point, as disclosed in Japanese Patent Application Publication No. 2012-35307, a detection device detects the reflected light from the laser at the processing point, and the quality of the fusion state at that processing point is determined based on the intensity of the detected light.

[0003] At this point, the typical detection device uses a frame to guide light to the sensor (photodetector) via a mirror, and the configuration of the photodetector is fixed. Summary of the Invention

[0004] The applicant of this application has discovered the following problem. Conventional detection devices, due to the fixed configuration of the photodetector, suffer from issues such as the inability to appropriately modify the photodetector configuration.

[0005] This disclosure was made in view of the following problems, and realizes a detection device that allows for appropriate changes to the configuration of the photodetector.

[0006] One aspect of this disclosure relates to a detection device for detecting the reflected light of laser light irradiated onto a reflector, said detection device comprising:

[0007] Two or more frames that can be connected to each other;

[0008] A first photodetector that can be connected to the frame; and

[0009] A second photodetector that can be connected to the frame; and

[0010] The frame includes: a first opening formed therein; a first connecting portion disposed on the surface of the frame with the first opening, capable of connecting to a first photodetector so that the first photodetector can detect light incident on the first opening; a second opening formed therein; a second connecting portion disposed on the surface of the frame with the second opening, capable of connecting to a second photodetector so that the second photodetector can detect light incident on the second opening; and a third opening formed therein facing the first connecting portion.

[0011] At least one frame has a dichroic mirror disposed between the first opening and the third opening.

[0012] The dichroic mirror allows light with a first wavelength incident from the third opening to be transmitted to the first opening, and reflects light with a second wavelength incident from the third opening to the second opening.

[0013] In the above-described detection device, preferably, the first connecting portion has a first internal thread formed on the circumferential surface of the first opening in the frame.

[0014] The frame is connected to the first photodetector by screwing the male threaded portion formed on the first photodetector into the first female threaded portion.

[0015] In the above-described detection device, preferably, the second connecting portion has a second internal thread formed on the circumferential surface of the second opening of the frame.

[0016] The frame is connected to the second photodetector by screwing the male threaded portion formed on the second photodetector into the second female threaded portion.

[0017] In the above-described detection device, preferably, the frame has a third connecting portion disposed on the surface of the frame where the third opening is formed, which can be connected to the first photodetector or the second photodetector so that the first photodetector or the second photodetector can detect light incident on the third opening.

[0018] In the above-described detection device, preferably, the third connecting portion has a third internal thread formed on the circumferential surface of the third opening of the frame.

[0019] The frame is connected to the first photodetector or the second photodetector by screwing the male thread portion formed in the first photodetector or the male thread portion formed in the second photodetector into the third female thread portion.

[0020] Preferably, the above-mentioned detection device includes a connecting plate that connects the two or more frames.

[0021] The connecting plate is configured to clamp two or more frames.

[0022] According to this disclosure, a detection device is available in which the configuration of the photodetector can be appropriately modified. Attached Figure Description

[0023] The features, advantages, and technical and industrial significance of exemplary embodiments of the present invention will be described with reference to the accompanying drawings, in which the same reference numerals denote the same parts, wherein:

[0024] Figure 1 This is a perspective view showing the detection device according to the embodiment.

[0025] Figure 2 This is an exploded view showing the detection device according to the embodiment.

[0026] Figure 3 This is a diagram illustrating the light path of the detection device in the embodiment.

[0027] Figure 4 This is a perspective view illustrating the first photodetector of the embodiment.

[0028] Figure 5 This is a perspective view illustrating the second photodetector of the embodiment.

[0029] Figure 6 This is a diagram illustrating the system configuration for detecting the return light from the laser welding processing point using the detection device of the implementation method.

[0030] Figure 7 This is a perspective view showing the detection device of Assembly Example 1.

[0031] Figure 8 This is a perspective view showing the detection device of combination example 2. Detailed Implementation

[0032] Hereinafter, specific embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. However, the present disclosure is not limited to the embodiments described below. In addition, for clarity of explanation, the following description and drawings have been appropriately simplified.

[0033] <Implementation Method 1>

[0034] First, the configuration of the detection device of this embodiment will be described. The detection device of this embodiment is, for example, suitable for detecting the reflected light from a laser-welded processing point when determining the quality of the weld deposition at that point.

[0035] Figure 1 This is a perspective view showing the detection device according to the embodiment. Figure 2 This is an exploded view showing the detection device of this embodiment. Figure 3 This is a diagram illustrating the light path of the detection device in this embodiment. Figure 4 This is a perspective view showing the first photodetector of this embodiment. Figure 5 This is a perspective view showing the second photodetector of this embodiment. Additionally, in Figure 2 Bolts are omitted from the original text. For clarity, a three-dimensional (XYZ) coordinate system will be used in the following explanation.

[0036] For example, such as Figure 1 and Figure 2 As shown, the detection device 1 includes a first frame 2, a first photodetector 3, a second photodetector 4, a second frame 5, and a connecting plate 6. Figures 1 to 3 As shown, the first frame 2 has a frame body 21 and a dichroic mirror 22.

[0037] For example, the main body of the frame 21 Figure 2 As shown, the device is based on a hollow parallelepiped and includes a first planar portion 21a, a second planar portion 21b, a third planar portion 21c, a fourth planar portion 21d, a fifth planar portion 21e, a sixth planar portion 21f, a first opening portion 21g, a second opening portion 21h, and a third opening portion 21i. Furthermore, the arrangement of each planar portion and opening portion described later is only one example and can be appropriately modified through combinations with other frames used to constitute the detection device.

[0038] For example, the first planar portion 21a and the second planar portion 21b are arranged substantially parallel to the XY plane and are opposite to each other. The third planar portion 21c and the fourth planar portion 21d are arranged substantially parallel to the XZ plane and are opposite to each other. The fifth planar portion 21e and the sixth planar portion 21f are arranged substantially parallel to the YZ plane and are opposite to each other.

[0039] The first opening 21g extends through the first flat portion 21a in the Z-axis direction. The first opening 21g is, for example, cylindrical in shape, and has a female thread portion 21j formed on its circumferential surface.

[0040] The second opening 21h extends through the fifth planar portion 21e in the X-axis direction. The second opening 21h is, for example, in a cylindrical shape, and a female thread portion 21k is formed on the circumferential surface of the second opening 21h.

[0041] The third opening 21i extends through the second flat portion 21b in the Z-axis direction. At this time, the first opening 21g and the third opening 21i are arranged such that they substantially coincide when viewed from the Z-axis direction. The third opening 21i is, for example, in a cylindrical shape, and is arranged such that the central axis of the first opening 21g and the central axis of the third opening 21i substantially coincide. Furthermore, it is preferable that a female thread portion capable of connecting a photodetector or the like is also formed on the circumferential surface of the third opening 21i.

[0042] like Figure 3 As shown, the dichroic mirror 22 is disposed inside the frame body 21. In detail, the dichroic mirror 22 transmits light with a first wavelength incident from the third opening 21i to the first opening 21g, and reflects light with a second wavelength incident from the third opening 21i to the second opening 21h.

[0043] The first photodetector 3 is configured to detect light through photoelectric conversion, for example, by incorporating a photodiode. Figure 4As shown, the Z-axis end of the first photodetector 3 is cylindrical, and a male threaded portion 3a is formed on the circumferential surface of the Z-axis end.

[0044] The first photodetector 3 is connected to the first frame 2 by screwing the male threaded portion 3a of the first photodetector 3 into the female threaded portion 21j of the first opening portion 21g of the first frame 2. Therefore, the female threaded portion 21j of the first opening portion 21g of the first frame 2 functions as a connecting portion for connecting to the first photodetector 3.

[0045] The second photodetector 4 is also configured to detect light through photoelectric conversion, for example, it includes a photodiode. Figure 5 As shown, the end of the second photodetector 4 on the X-axis side is cylindrical, and a male threaded portion 4a is formed on the circumferential surface of the end on the X-axis side.

[0046] The second photodetector 4 is connected to the first frame 2 by screwing the male threaded portion 4a of the second photodetector 4 into the female threaded portion 21k of the second opening portion 21h of the first frame 2. Therefore, the female threaded portion 21k of the second opening portion 21h of the first frame 2 functions as a connecting portion for connecting to the second photodetector 4.

[0047] like Figures 1 to 3 As shown, the second frame 5 is positioned relative to the first frame 2 on the Z-axis side. The second frame 5 includes a frame body 51 and a semi-transparent, semi-reflective mirror 52. The frame body 51 is, for example, as shown in... Figure 2 As shown, the basic shape is a hollow parallelepiped, which is roughly the same as the main body 21 of the first frame 2.

[0048] The frame body 51 includes a first flat portion 51a, a second flat portion 51b, a third flat portion 51c, a fourth flat portion 51d, a fifth flat portion 51e, a sixth flat portion 51f, a first opening portion 51g, a second opening portion 51h, and a third opening portion 51i. Furthermore, the arrangement of each flat portion and opening portion described later is only one example and can be appropriately modified through combination with other frames used to constitute the detection device.

[0049] For example, the first planar portion 51a and the second planar portion 51b are arranged substantially parallel to the XY plane and are opposite to each other. The third planar portion 51c and the fourth planar portion 51d are arranged substantially parallel to the XZ plane and are opposite to each other. The fifth planar portion 51e and the sixth planar portion 51f are arranged substantially parallel to the YZ plane and are opposite to each other.

[0050] The first opening 51g extends through the first planar portion 51a in the Z-axis direction. The first opening 51g is, for example, cylindrical in shape, and is arranged such that, when the first frame 2 and the second frame 5 are connected, the first opening 21g and the third opening 21i of the first frame 2 substantially overlap with the first opening 51g of the second frame 5.

[0051] At this time, for example, as described later, the central axis of the first opening 21g of the first frame 2, the central axis of the third opening 21i of the first frame 2, and the central axis of the first opening 51g of the second frame 5 are arranged such that, when the first frame 2 and the second frame 5 are connected, the central axis of the first opening 21g of the first frame 2 and the central axis of the first opening 51g of the second frame 5 are substantially coincident.

[0052] The second opening 51h extends through the fifth planar portion 51e in the X-axis direction. Here, as... Figure 3 As shown, the fifth planar portion 51e of the second frame 5 is preferably configured to be connected to a camera (i.e., a photodetector) 7, etc., for confirming the irradiation position of the laser irradiating the processing point via the second opening portion 51h.

[0053] On the other hand, if the camera 7 is not connected to the fifth plane portion 51e of the second frame 5, such as Figure 1 As shown, the fifth planar portion 51e is preferably configured such that the second opening portion 51h can be covered by the cover 8.

[0054] The third opening 51i extends through the sixth planar portion 51f in the X-axis direction. At this time, the second opening 51h and the third opening 51i are arranged in a manner that substantially overlaps when viewed from the X-axis direction. Alternatively, the frame body 21 of the first frame 2 can be used as the frame body 51 of the second frame 5.

[0055] like Figure 3 As shown, a semi-transparent and semi-reflective mirror 52 is disposed inside the frame body 51. In detail, the semi-transparent and semi-reflective mirror 52 transmits light incident from the third opening 51i to the second opening 51h and reflects the light to the first opening 51g.

[0056] like Figure 1 and Figure 2 As shown, the connecting plate 6 connects the first frame 2 and the second frame 5 stacked in the Z-axis direction. Furthermore, the connecting plate 6 is configured to clamp the first frame 2 and the second frame 5 stacked in the Z-axis direction in the Y-axis direction. That is, the connecting plate 6 clamps the first frame 2 and the second frame 5 from a direction approximately orthogonal to the stacking direction of the first frame 2 and the second frame 5.

[0057] In detail, in this embodiment, such as Figure 2As shown, the connecting plate 6 includes a first connecting plate 61 and a second connecting plate 62. The first connecting plate 61 and the second connecting plate 62 have approximately the same shape, with a basic form being a flat plate having a long side in the Z-axis direction.

[0058] When the first connecting plate 61 is positioned on the Y-axis+ side relative to the first frame 2 and the second frame 5 stacked in the Z-axis direction, it is connected to the third plane portion 21c of the first frame 2 and the third plane portion 51c of the second frame 5 via bolts 9, spanning across the first frame 2 and the second frame 5.

[0059] The second connecting plate 62, in a state where it is positioned on the Y-axis side relative to the first frame 2 and the second frame 5 stacked in the Z-axis direction, is connected to the fourth plane portion 21d of the first frame 2 and the fourth plane portion 51d of the second frame 5 via bolts 9, in a manner that spans the first frame 2 and the second frame 5.

[0060] Next, the steps for assembling the detection device 1 of this embodiment will be described. First, the first frame 2 is arranged on the Z-axis+ side of the second frame 5 such that the first flat portion 51a of the second frame 5 is in approximately surface contact with the second flat portion 21b of the first frame 2.

[0061] Next, the first connecting plate 61 is positioned on the Y-axis+ side relative to the first frame 2 and the second frame 5, and the first connecting plate 61 is connected to the third plane portion 21c of the first frame 2 and the third plane portion 51c of the second frame 5 via bolts 9.

[0062] In addition, the second connecting plate 62 is disposed on the Y-axis side relative to the first frame 2 and the second frame 5, and the second connecting plate 62 is connected to the fourth plane portion 21d of the first frame 2 and the fourth plane portion 51d of the second frame 5 via bolts 9.

[0063] Thus, the first frame 2 and the second frame 5 can be connected. At this time, when viewed from the Z-axis direction, the first opening 21g of the first frame 2, the third opening 21i of the first frame 2, and the first opening 51g of the second frame 5 are arranged in a manner that is approximately overlapping.

[0064] Here, by clamping and connecting the first frame 2 and the second frame 5 of the parallelepiped structure described above with the first connecting plate 61 and the second connecting plate 62, the rotation of the dichroic mirror 22 and the semi-transparent mirror 52 around the Z-axis can be suppressed.

[0065] Moreover, it is possible to connect the first frame 2 and the second frame 5 while suppressing the offset of the central axis of the first opening 21g of the first frame 2, the central axis of the third opening 21i of the first frame 2, and the central axis of the first opening 51g of the second frame 5.

[0066] Next, the male thread 3a of the first photodetector 3 is screwed into the female thread 21j of the first opening 21g of the first frame 2. At the same time, the male thread 4a of the second photodetector 4 is screwed into the female thread 21k of the second opening 21h of the first frame 2. Thus, the first photodetector 3 and the second photodetector 4 can be connected to the first frame 2.

[0067] In this way, since the first photodetector 3 and the second photodetector 4 are connected to the first frame 2 by the threaded structure, the center of the first photodetector 3 can be positioned with high precision on the central axis of the first opening 21g of the first frame 2, and the center of the second photodetector 4 can be positioned with high precision on the central axis of the second opening 21h of the first frame 2.

[0068] Next, the process of using the detection device 1 of this embodiment to determine the quality of the weld deposit at the laser welding processing point will be explained. Figure 6 This is a diagram illustrating the system configuration for detecting return light from a laser welding processing point using the detection device of this embodiment.

[0069] Here, as Figure 6 As shown, when laser LB is irradiated to perform lap joint welding on a first metal plate (i.e., reflector) 11 made of aluminum, iron, etc. and a second metal plate 12 made of aluminum, iron, etc. using welding head 10, the detection device 1 is connected to welding head 10 in such a way that the return light RL reflected at the molten pool MP, which is the processing point, is incident on the center of the third opening 51i of the second frame 5 of detection device 1.

[0070] At this time, the first photodetector 3 and the second photodetector 4 of the detection device 1 are electrically connected to the determination device 13, which determines the quality of the weld at the processing point based on the intensity of the detected light. Additionally, the detection device 1 can be connected via the bracket 14 (see reference 14). Figure 3 It is connected to the welding head 10.

[0071] First, the laser LB incident on the frame 102 via the semi-transparent mirror 101 of the welding head 10 is guided to the scanner 103. Then, the laser LB is irradiated to the desired position of the first metal plate 11 by the scanner 103.

[0072] At this time, the reflected light RL from the molten pool MP is incident on the semi-transparent mirror 101 via the scanner 103, and is guided to the opening of the frame 102 through the semi-transparent mirror 101, and then incident on the third opening 51i of the second frame 5 of the detection device 1 from the opening of the frame 102.

[0073] Then, as Figure 3As shown, the returning light RL is reflected by the semi-transparent mirror 52 of the second frame 5 and guided to the dichroic mirror 22 of the first frame 2 via the first opening 51g and the third opening 21i of the first frame 2.

[0074] On the other hand, the returned light RL is guided to the second opening 51h through the semi-transparent mirror 52 of the second frame 5. At this time, with the camera 7 connected to the third plane portion 51c of the second frame 5, the irradiation position of the laser LB can be observed through the camera 7.

[0075] Then, the light RL1 with the first wavelength of the returning light RL passes through the dichroic mirror 22 and is guided to the first photodetector 3 through the first opening 21g. On the other hand, the light RL2 with the second wavelength of the returning light RL is reflected by the dichroic mirror 22 and is guided to the second photodetector 4 through the second opening 21h.

[0076] At this time, in the detection device 1 of this embodiment, the rotation of the dichroic mirror 22 and the semi-transparent mirror 52 around the Z-axis is suppressed. Moreover, in the detection device 1 of this embodiment, the central axis of the first opening 21g of the first frame 2, the central axis of the third opening 21i of the first frame 2, and the central axis of the first opening 51g of the second frame 5 are arranged such that they substantially coincide.

[0077] Furthermore, in the detection device 1 of this embodiment, generally speaking, the center of the first photodetector 3 is disposed on the central axis of the first opening 21g of the first frame 2, and the center of the second photodetector 4 is disposed on the central axis of the second opening 21h of the first frame 2.

[0078] Therefore, while suppressing the optical path deviation of the returning light RL, it is possible to guide the light RL1 with the first wavelength of the returning light RL to the center of the first photodetector 3 with high precision, and to guide the light RL2 with the second wavelength of the returning light RL to the center of the second photodetector 4 with high precision. Thus, the detection device 1 of this embodiment can improve the detection accuracy of the returning light RL.

[0079] Next, the first photodetector 3 performs photoelectric conversion on the light RL1 with a first wavelength of the returned light RL, and outputs a signal indicating the intensity of the light to the determination device 13. On the other hand, the second photodetector 4 performs photoelectric conversion on the light RL2 with a second wavelength of the returned light RL, and outputs a signal indicating the intensity of the light to the determination device 13.

[0080] Next, the determination device 13 determines the quality of the welded point based on the intensity of the light represented by the input signal. For example, if the difference between the waveform of the light intensity represented by the time-series input signal and a preset reference waveform at each moment is greater than a preset threshold, the determination device 13 determines that the welded point is defective.

[0081] On the other hand, the determining device 13 determines that the melting state of the processing point is good, for example, when the difference between the waveform of the light intensity represented by the signal input in a time sequence and the preset reference waveform at each moment is below a preset threshold.

[0082] Next, different combinations of the detection device using the first frame 2, the first photodetector 3, and the second photodetector 4 will be described. Figure 7 This is a perspective view showing the detection device of Assembly Example 1. Figure 8 This is a perspective view showing the detection device of combination example 2.

[0083] The detection device 201 of Example 1 is as follows Figure 7 As shown, a third frame 202 is disposed between the first frame 2 and the second frame 5 of the detection device 1. The third frame 202 includes, for example, a frame body 203 and a dichroic mirror.

[0084] As the frame body 203, for example, the frame body 21 of the first frame 2 can be used. Furthermore, the third photodetector 204 is connected to the third frame 202 by screwing the male threaded portion of the third photodetector 204 into the female threaded portion formed in the second opening of the frame body 203.

[0085] The dichroic mirror is disposed inside the frame body 203. Specifically, the dichroic mirror reflects light with a third wavelength that is incident from the third opening of the frame body 203 and guides it to the second opening, and guides light with other wavelengths that is incident from the third opening to the first opening.

[0086] With this configuration, the detection device 201, which includes a third frame 202 and a third photodetector 204, can be easily assembled.

[0087] The detection device 301 in Example 2 is as follows Figure 8 As shown, the first frame 2 of the detection device 1 is positioned on the Z-axis side relative to the second frame 5. In this case, the frame body 21 of the first frame 2 can be used as the frame body 51 of the second frame 5.

[0088] In detail, for example, the second frame 5 is arranged on the Z-axis+ side of the first frame 2 such that the first flat portion 21a of the first frame 2, in a state where the first photodetector 3 connected to the first frame 2 of the detection device 1 is removed, and the sixth flat portion 51f of the second frame 5, in a state where the second frame 5 of the detection device 1 is rotated 90° counterclockwise around the Y-axis and 180° around the Z-axis, are in approximately face contact. At this time, it is arranged such that the first opening 21g of the first frame 2 and the third opening 51i of the second frame 5 are connected in the Z-axis direction.

[0089] Then, for example, the male thread 3a of the first photodetector 3 is screwed into the female thread formed in the first opening 51g of the second frame 5, and the first photodetector 3 is connected to the second frame 5. According to the detection device 301 configured in this way, the return light RL is incident from the welding head 10 onto the third opening 21i of the first frame 2 disposed on the Z-axis side of the detection device 301.

[0090] In this way, the detection devices 1, 201 and 301 of this embodiment can be constructed by combining a frame with a semi-transparent mirror or other photodetectors, based on the first frame 2 with a dichroic mirror 22, the first photodetector 3 and the second photodetector 4.

[0091] Therefore, the configuration of the photodetectors can be appropriately changed according to conditions such as the space around the welding head 10. Furthermore, the first photodetector 3 and the second photodetector 4 can be interchanged relative to the first frame 2 for connection. Moreover, the required number of photodetectors can be easily increased or decreased.

[0092] In addition, a detection device can be constructed inexpensively by combining a first frame 2 with a dichroic mirror 22, a first photodetector 3, a second photodetector 4, a frame with a semi-transparent mirror or other photodetectors.

[0093] Furthermore, by reusing the frame body 21 of the first frame 2 for other frames, that is, by making the frames shared (universal), the detection device can be constructed more cost-effectively. At this time, if the second plane portion 21b of the frame body 21 in the first frame 2 also has a configuration that allows connection to photodetectors, etc., the first frame 2 with dichroic mirror 22, the first photodetector 3, the second photodetector 4, the frame with a semi-transparent mirror, or other photodetectors can be arranged more freely.

[0094] When the first photodetector 3 or the second photodetector 4 is connected to the frame by screwing the male thread of the first photodetector 3 or the second photodetector 4 into the female thread of the frame, the center of the first photodetector 3 or the second photodetector 4 can be positioned with high precision on the central axis of the opening of the frame. Therefore, the detection devices 1, 201 and 301 of this embodiment can improve the detection accuracy of the return light RL.

[0095] Furthermore, when the frame is connected by clamping the parallelepiped with the connecting plate 6, for example, the rotation of the dichroic mirror 22 and the semi-transparent mirror 52 around the Z-axis can be suppressed. Moreover, for example, the offset of the central axis of the first opening 21g of the first frame 2, the central axis of the third opening 21i of the first frame 2, and the central axis of the first opening 51g of the second frame 5 can be suppressed. Therefore, the optical path offset of the return light RL can be minimized, and the detection accuracy of the return light RL can be improved.

[0096] This disclosure is not limited to the above-described embodiments, and appropriate modifications may be made without departing from the spirit of the invention.

[0097] For example, in the above embodiment, each frame is designed as a parallelepiped, but the shape of each frame is not limited. Furthermore, the shape of the opening of the frame is not limited. In short, any shape that can guide the return light from the processing point to the first photodetector 3 and the second photodetector 4 when multiple frames are connected is acceptable.

Claims

1. A detection device for detecting reflected light from a laser beam incident on a reflector, the detection device comprising: Two or more frames that can be connected to each other; A first photodetector that can be connected to the frame; and A second photodetector that can be connected to the frame; The frame includes: a first opening formed therein; a first connecting portion disposed on the surface of the frame with the first opening, capable of connecting to a first photodetector so that the first photodetector can detect light incident on the first opening; a second opening formed therein; a second connecting portion disposed on the surface of the frame with the second opening, capable of connecting to a second photodetector so that the second photodetector can detect light incident on the second opening; and a third opening formed therein facing the first connecting portion. At least one frame has a dichroic mirror disposed between the first opening and the third opening. The dichroic mirror allows light with a first wavelength incident from the third opening to pass through to the first opening, and reflects light with a second wavelength incident from the third opening to the second opening. The first connecting portion has a first internal thread formed on the circumferential surface of the first opening in the frame. The frame is connected to the first photodetector by screwing the male threaded portion formed on the first photodetector into the first female threaded portion. The second connecting portion has a second internal thread portion formed on the circumferential surface of the second opening in the frame. The frame is connected to the second photodetector by screwing the male threaded portion formed on the second photodetector into the second female threaded portion.

2. The detection device according to claim 1, wherein, The frame has a third connecting portion disposed on the surface of the frame where the third opening is formed, and can be connected to the first photodetector or the second photodetector so that the first photodetector or the second photodetector can detect light incident on the third opening.

3. The detection device according to claim 2, wherein, The third connecting portion has a third internal thread formed on the circumferential surface of the third opening of the frame. The frame is connected to the first photodetector or the second photodetector by screwing the male thread portion formed in the first photodetector or the male thread portion formed in the second photodetector into the third female thread portion.

4. The detection device according to any one of claims 1 to 3, wherein, It includes a connecting plate that connects the two or more frames stacked in the first direction. The connecting plate is configured to clamp the two or more frames from a direction that is substantially orthogonal to the first direction.