Visual base assembly and visual positioning system

Abstract

The application relates to the technical field of semiconductor process equipment, in particular to a visual base assembly and a visual positioning system. The visual base assembly comprises a visual base, a first linear driving element, a second linear driving element, an air float block and first and second guide rail assemblies. The first linear driving element comprises a first fixed part and a first movable part, and the first fixed part is connected to a mounting platform. The second linear driving element comprises a second fixed part and a second movable part, the second fixed part is connected to the first movable part, and the second movable part is connected to the visual base. The air float block is arranged between the visual base and the mounting platform. The first and second guide rail assemblies are respectively arranged between the first movable part and the mounting platform and between the second movable part and the visual base. At least one of the first and second guide rail assemblies is provided with an air float bearing. In this way, the air float bearing and the air float block are inflated to generate rigid air films, so that the friction between the sliding surfaces is eliminated, and the movement accuracy and static accuracy are improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor process equipment technology, and more specifically, to a vision base assembly and a vision positioning system. Background Technology

[0002] As the demands for semiconductor chip functionality continue to increase, improving performance by shrinking transistor size becomes increasingly difficult. Therefore, integrated circuit technology is gradually evolving from 2D planar integration to 3D integration. In 3D integration technology, wafer fabrication and bonding are among the most crucial steps.

[0003] During wafer bonding, it is necessary to photograph the calibration marks of the upper and lower wafers, and use the coordinates of the calibration marks as the data source for precise wafer position adjustment before wafer bonding. Therefore, the positioning and static accuracy of the vision base structure before and after photographing the upper and lower wafers are one of the important indicators of wafer bonding accuracy. It can be seen that the position adjustment accuracy of the vision base is crucial. However, the position adjustment of the existing vision base is usually achieved through a rigid sliding connection. There is friction on the sliding mating surface. Due to the resistance of this friction, the operational accuracy during the position adjustment process is affected. That is, in the existing technology, the positional accuracy of the vision base is affected by friction during the alignment of the upper and lower wafers. Summary of the Invention

[0004] The purpose of this application is to provide a vision base assembly and a vision positioning system for use in the wafer stacking process of semiconductor wafers and packaging processes, in order to solve the technical problem that the positional accuracy of the vision base adjustment is affected by friction during the alignment process of the upper and lower wafers.

[0005] The visual base assembly provided in this application includes:

[0006] A visual base is used to support the visual system.

[0007] A first linear drive includes a first fixed part and a first movable part that are telescopically retractable, the first fixed part being configured to be connected to a mounting platform;

[0008] The second linear drive includes a second fixed part and a second movable part that can extend and retract relative to each other. The second fixed part is connected to the first movable part, and the second movable part is connected to the visual base. The extension and retraction directions of the first linear drive and the second linear drive are set at an angle.

[0009] An air-floating block is disposed between the visual base and the mounting platform;

[0010] A first guide rail assembly is disposed between the first movable part and the mounting platform; and...

[0011] The second guide rail assembly is disposed between the second fixing part and the visual base;

[0012] At least one of the first guide rail assembly and the second guide rail assembly has an air bearing.

[0013] Optionally, in the first linear drive member, the first fixed part is the first power output end of the first linear drive member, and the first movable part is the first drive body of the first linear drive member.

[0014] And / or, in the second linear drive member, the second movable part is the second power output end of the second linear drive member, and the second fixed part is the second drive body of the second linear drive member.

[0015] Optionally, the first guide rail assembly includes a first slider fixed to the first drive body and a linear guide rail fixed to the mounting platform, wherein the first slider is slidably connected to the linear guide rail.

[0016] The second guide rail assembly includes a second slider fixed to the vision base and an air bearing disposed on the second slider, the air bearing being disposed between the second drive body and the second slider.

[0017] Optionally, it further includes a first support and a first elastic body; the first support is configured to be fixed to the mounting platform and abut against the first power output end; one end of the first elastic body is connected to the first support and the other end is connected to the first drive body, so that the first drive body always has a tendency to move toward the first support;

[0018] And / or, it also includes a second support and a second elastic body; the second support is fixed to the vision base and abuts against the second power output end; one end of the second elastic body is connected to the second support and the other end is connected to the second drive body, so that the second support always has a tendency to move toward the second drive body.

[0019] Optionally, a first roller is pivotally connected to the first power output end, a first wear-resistant strip is fixedly provided on the first support, the first roller abuts against the first wear-resistant strip, and the hardness of at least the end face of the first wear-resistant strip is higher than the hardness of the first support.

[0020] The second power output end is pivotally connected to a second roller, and the second support is fixedly provided with a second wear-resistant strip. The second roller abuts against the second wear-resistant strip, and the hardness of at least the end face of the second wear-resistant strip is higher than the hardness of the second support.

[0021] Optionally, it further includes a first bracket, which is fixed to the first support and extends away from the first drive body along the linear extension and retraction direction of the first linear drive member; the first elastic body is a first tension spring, one end of which is connected to the first drive body and the other end of which is connected to the extended end of the first bracket.

[0022] And / or, it also includes a second bracket, which is fixed to the second support and extends away from the second drive body along the linear extension direction of the second linear drive member; the second elastic body is a second tension spring, one end of which is connected to the second drive body and the other end of which is connected to the extended end of the second bracket.

[0023] Optionally, the first bracket includes at least one elongated first arm, which extends away from the first drive body along the linear extension direction of the first linear drive member. The proximal end of the first arm is fixed to the first support based on the distance from the first drive body. One end of the first tension spring is connected to the distal end of the first arm, and the other end is connected to the first drive body.

[0024] And / or, the second bracket includes at least one elongated second arm that extends away from the second drive body along the linear extension direction of the second linear drive member. The proximal end of the second arm is fixed to the second support based on the distance from the second drive body; one end of the second tension spring is connected to the distal end of the second arm, and the other end is connected to the second drive body.

[0025] Optionally, the first arm has at least two parts and is fixedly connected to each other, and the first tension spring has at least two parts and is adapted to the first arm;

[0026] And / or, the second arm has at least two and is fixed to each other, and the second tension spring has at least two and is adapted to the second arm.

[0027] Optionally, it further includes a first bracket, which is fixed to the first drive body and extends toward the first support along the linear extension direction of the first linear drive member. The extended end of the first bracket is located on the side of the first support away from the first drive body. The first elastic body is a first compression spring, one end of which abuts against the extended end of the first bracket and the other end of which abuts against the first support.

[0028] And / or, it also includes a second bracket, which is fixed to the second drive body and extends toward the second support along the linear extension direction of the second linear drive member, with the extended end of the second bracket located on the side of the second support away from the second drive body; the second elastic body is a second compression spring, one end of which abuts against the extended end of the second bracket and the other end of which abuts against the second support.

[0029] Optionally, the first support is a long strip support, with one end abutting against the first power output end, and the portion near the other end configured to connect to the mounting platform;

[0030] And / or, the second support is an L-shaped support, with one arm abutting against the second power output end and the other arm connected to the vision base.

[0031] Optionally, the second drive body is provided with a limiting seat, the limiting seat has a limiting hole, a limiting rod passes through the limiting hole, there is an adjustment gap between the outer peripheral wall of the limiting rod and the hole wall of the limiting hole, the limiting rod is fixed with a limiting block, there are two limiting blocks and they are respectively located on both sides of the limiting seat, and the limiting rod is fixed to the second support.

[0032] Optionally, the vision base assembly further includes a connecting arm, one end of which is fixed to the second slider and the other end of which is fixed to the vision base.

[0033] The visual base assembly provided in this application has the following beneficial effects:

[0034] In this embodiment, when adjusting the position of the vision base, the first linear drive component adjusts the position in the first direction, and the second linear drive component adjusts the position in the second direction. During the adjustment process, through the vertical cooperation between the air bearing and the air block, a rigid air film is generated after air is filled inside the corresponding guide rail assembly (air bearing) and the air block. This ensures that there is no friction between the relative sliding surfaces, and the position adjustment of the vision base is not affected by friction. This improves the motion accuracy and static accuracy of the vision base during the position adjustment process, thereby ensuring the precise adjustment data source of the wafer position during the wafer bonding process, ensuring the positioning and static accuracy of the vision system before and after taking pictures of the upper and lower wafers, and thus ensuring the bonding accuracy of the wafer.

[0035] The visual positioning system provided in this application includes a control module, an air source module, and the aforementioned visual base assembly. The air source module is connected to the air float and the air bearing to realize the inflation and deflation of the air float and the air bearing. The air source module, the first linear drive, and the second linear drive are all electrically connected to the control module to realize their coordinated actions and complete the position adjustment of the visual base assembly.

[0036] The visual positioning system provided in this application has the following beneficial effects:

[0037] Since the visual positioning system includes the aforementioned visual base assembly, it possesses all the advantages of the aforementioned visual base assembly, which will not be elaborated upon here. Attached Figure Description

[0038] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0039] Figure 1 This is a front view schematic diagram of the visual base assembly according to an embodiment of this application;

[0040] Figure 2 This is a top view of the visual base assembly according to an embodiment of this application;

[0041] Figure 3 This is a perspective view of the sensory base assembly according to an embodiment of this application;

[0042] Figure 4 This is a partial top view of the sensory base assembly according to the application embodiment, which mainly shows a partial cross-sectional view of the first power output end;

[0043] Figure 5 This is a partial perspective view of the sensory base assembly in an embodiment of the application, which mainly shows the structural diagram of the second power output end, but does not show the second tension spring;

[0044] Figure 6 This is a partial top view of the visual base according to an embodiment of this application, wherein the first elastic body is a compression spring and the first linear drive member is in its original retracted state;

[0045] Figure 7 This is a partial top view of the visual base according to an embodiment of this application, wherein the first elastic body is a compression spring and the first linear drive member is in an extended state;

[0046] Figure 8 This is a partial top view of the visual base according to an embodiment of this application, wherein the second elastic body is a compression spring and the second linear drive member is in its original retracted state;

[0047] Figure 9 This is a partial top view of the visual base according to an embodiment of this application, wherein the second elastic body is a compression spring and the second linear drive member is in an extended state.

[0048] Explanation of reference numerals in the attached figures:

[0049] 010 - Installation platform;

[0050] 100-Visual Base;

[0051] 200 - First linear drive component;

[0052] 210 - First power output end; 211 - First roller;

[0053] 220 - First drive unit;

[0054] 230 - First support; 231 - First wear-resistant strip;

[0055] 240 - First support; 241 - First arm; 242 - First tension spring; 243 - First compression spring;

[0056] 250 - First slider; 260 - Linear guide rail;

[0057] 300 - Second linear drive component;

[0058] 310 - Second power output end; 311 - Second roller;

[0059] 320 - Second drive unit;

[0060] 330 - Second support; 331 - Second wear-resistant strip;

[0061] 340 - Second support; 341 - Second arm; 342 - Second tension spring; 343 - Second compression spring;

[0062] 350 - Second slider; 360 - Limiting seat;

[0063] 370 - Limit rod; 371 - Limit block;

[0064] 380 - Connecting arm; 390 - Air bearing;

[0065] 400-Air flotation block. Detailed Implementation

[0066] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0067] The present application will now be described in further detail with reference to specific embodiments and accompanying drawings.

[0068] This application provides a vision base assembly and a vision positioning system, which are applied in the wafer stacking process of semiconductor wafers and packaging processes. The following description is in conjunction with the accompanying drawings.

[0069] The visual base assembly provided in the embodiments of this application, such as Figures 1-9 As shown, it includes: a vision base 100, a first linear drive 200, a second linear drive 300, an air float 400, a first guide rail assembly, and a second guide rail assembly.

[0070] The vision base 100 is used to support the vision system.

[0071] The first linear drive member 200 includes a first fixed part and a first movable part that are capable of relative extension and retraction, the first fixed part being configured to be connected to the mounting platform 010.

[0072] The second linear drive member 300 includes a second fixed part and a second movable part that can extend and retract relative to each other. The second fixed part is fixedly connected to the first movable part, and the second movable part is connected to the visual base 100. The extension and retraction directions of the first linear drive member 200 and the second linear drive member 300 are set at an angle.

[0073] The air flotation block 400 is positioned between the vision base 100 and the mounting platform 010;

[0074] The first guide rail assembly is disposed between the first movable part and the mounting platform 010;

[0075] The second guide rail assembly is disposed between the second fixing part and the visual base 100;

[0076] At least one of the first guide rail assembly and the second guide rail assembly has an air bearing 390.

[0077] As described above, in this embodiment, when adjusting the position of the visual base 100, the first linear drive 200 adjusts the position in the first direction, and the second linear drive 300 adjusts the position in the second direction. During the adjustment process, the air bearing 390 and the air buoy 400 are simultaneously inflated. At this time, the visual base 100 and the components directly or indirectly fixedly connected to it will move vertically upwards synchronously. That is, the vertical cooperation between the air bearing 390 and the air buoy 400 in the first guide rail assembly or the second guide rail assembly after inflation can... The step drive drives the corresponding vision base 100 to move vertically. During this process, a rigid air film is generated after the air bearing 390 and the air block 400 are filled with air, ensuring no friction between the relative sliding surfaces. The position adjustment of the vision base is not affected by friction, which improves the motion accuracy and static accuracy of the vision base 100 during the position adjustment process. This ensures the precise adjustment data source of the wafer position during the wafer bonding process, and ensures the positioning and static accuracy of the vision system before and after taking pictures of the upper and lower wafers, thereby ensuring the bonding accuracy of the wafer.

[0078] In this embodiment, the first direction and the second direction are perpendicular to each other on the horizontal plane. That is, the extension and retraction direction of the first linear drive member 200 and the extension and retraction direction of the second linear drive member 300 are perpendicular to each other on the horizontal plane. For example, if the extension and retraction direction of the first linear drive member 200 is defined as the Y-axis direction, the extension and retraction direction of the second linear drive member 300 is defined as the X-axis direction, and the vertical direction is defined as the Z-direction, then the first linear drive member 200, the second linear drive member 300, the floating block 400, and the corresponding air bearings work together on the vision base 100 to achieve high-precision adjustment of the frictionless spatial position of the vision base 100. It should be noted that the first direction and the second direction can not only be perpendicular to each other, but can also be other angles, which are not limited here.

[0079] The air-floating block 400 can adopt a conventional structure in the art. For example, the upper end of the air-floating block 400 is ball-jointed to the vision base 100, and the lower end has an air film layer between it and the mounting platform 010. When the position of the vision base needs to be adjusted, the air film layer is inflated to generate a rigid air film. Of course, the air-floating block 400 can also be other conventional structures in the art. For example, the air-floating block 400 includes an air-floating base and an air-floating component. The space between the air-floating base and the air-floating component is used to contain gas to generate a rigid air film. The air-floating base is configured to be fixed to the mounting platform. Specifically, the fixing method can be a suction cup or fastener connection. The air-floating component is fixedly connected to the vision base 100. With this configuration, when the air-floating base and the air-floating component are inflated to generate a rigid air film, the vision base 100 can be adjusted in position under force. Here, this application does not limit the specific structure and configuration of the air-floating block.

[0080] Please continue to refer to this. Figures 1-3 In this embodiment of the application, for the first linear drive member 200, the first fixed part is the power output end of the first linear drive member 200, which is defined here as the first power output end 210, and the first movable part is the drive body of the first linear drive member 200, which is defined here as the first drive body 220.

[0081] In this embodiment of the application, for the second linear drive member 300, the second movable part is the power output end of the second linear drive member 300, which is defined here as the second power output end 310, and the second fixed part is the drive body of the second linear drive member 300, which is defined here as the second drive body 320.

[0082] Specifically, the first linear drive 200 and the second linear drive 300 can be selected as electric actuator assemblies, respectively.

[0083] In this embodiment, at least one of the first guide rail assembly and the second guide rail assembly has an air bearing; that is, only the first guide rail assembly may have an air bearing, only the second guide rail assembly may have an air bearing, or both the first and second guide rail assemblies may have air bearings. Specifically, this embodiment will be described using the second guide rail assembly having an air bearing as an example. Figures 1-3 As shown.

[0084] The first guide rail assembly includes a first slider 250 fixed to the first drive body 220 and a linear guide rail 260 fixed to the mounting platform 010. The first slider 250 is slidably connected to the linear guide rail 260. With this configuration, the first drive body 220 can move smoothly and effortlessly under the guidance of the first slider 250 and the linear guide rail 260.

[0085] The second guide rail assembly includes a second slider 350 fixed to the vision base 100 and an air bearing 390 disposed on the second slider 350. The air bearing 390 is positioned between the second drive body 320 and the second slider 350. After the air bearing 390 and the air block 400 are inflated, they can synchronously raise the vision base 100, the second slider 350, and other components directly or indirectly fixed to the vision base 100 by a micro-movement distance. With this configuration, the vision base 100 can move smoothly and smoothly along the extension and retraction direction of the second drive body 320 under the guidance of the second slider 350 and its air bearing 390. During this movement, due to the action of the air bearing 390, a rigid air film is formed, eliminating friction and ensuring that the vision base 100 moves smoothly along the extension and retraction direction of the second linear drive member 300. It should be noted that in this embodiment, the second drive body 320 has the function of a slide rail, that is, the second slider 350 and the air bearing 390 are adapted to the second drive body 320. In addition, other structures can be adopted, such as fixing a slide rail on the second drive body 320 so that the slide rail is adapted to the second slider 350 and the air bearing 390, so that the visual base 100 can be smoothly adjusted in position.

[0086] The above content describes the guiding structure related to driving the vision base 100 to move along the first direction and the second direction. The following describes the connection structure between the first power output end 210 of the first linear drive 200 and the mounting platform 010, and the connection structure between the power output end 310 of the second linear drive 300 and the vision base 100.

[0087] In this embodiment, a first support 230 and a first elastic body are also included. The first support 230 is configured to be fixedly connected to the mounting platform 010 and abut against the first power output end 210. One end of the first elastic body is connected to the first support 230, and the other end is connected to the first drive body 220, so that the first drive body 220 always has a tendency to move towards the first support 230, thereby ensuring that the first power output end 210 is always tightly abutted against the first support 230. With this configuration, during the extension and retraction of the first linear drive member 200, the first power output end 210 and the first support 230 can be kept relatively fixed, ensuring the working stability of the first linear drive member 200.

[0088] Regarding the specific structure of the first support 230, it can be set as a long strip support, such as... Figures 1-3 As shown, its upper end abuts against the first power output end 210, and the part near the lower end is fixedly connected to the mounting platform 010. For example, it can be fixedly installed on the mounting platform 010 by fasteners.

[0089] Specifically, in this embodiment, a first bracket 240 is also included. The first bracket 240 is fixed to the first support 230 and extends away from the first drive body 220 along the linear extension and retraction direction of the first linear drive member 200. The first elastic body is a first tension spring 242, one end of which is connected to the first drive body 220 and the other end is connected to the extended end of the first bracket 240. This arrangement can adapt to the extension and retraction stroke requirements of the first linear drive member 200.

[0090] The first support 240 includes at least one elongated first arm 241, which extends away from the first drive body 220 along the linear extension direction of the first linear drive member 200. The proximal end of the first arm 241 is fixed to the first support 230 based on its distance from the first drive body 220. One end of the first tension spring 242 is connected to the distal end of the first arm 241, and the other end is connected to the first drive body 220. Specifically, there are at least two first arms 241 fixed to each other, and at least two first tension springs 242 adapted to the first arms 241. In this embodiment, two first arms 241 and two first tension springs 242 are used as an example. The first arm 241 has a through hole penetrating its end face. Multiple through holes can be provided to reduce its weight while ensuring the strength of the first arm 241 as much as possible. The first arm 241 extends from the first power output end 210 in a direction away from the first drive body 220, thereby appropriately extending the length of the first tension spring 242, making it easier to adapt to the extension and retraction stroke requirements of the first linear drive member 200.

[0091] With this configuration, under the tension of the first tension spring 242, the first power output end 210 always abuts against the first support 230. Furthermore, this connection method allows for relative positional deviations between the first support 230 and the first power output end 210 caused by positional errors between the first support 230 and the linear guide 260 or other factors. This allows the relative position between the first support 230 and the first power output end 210 to be adaptively adjusted according to site conditions, thereby avoiding lateral / radial stress between the components of the first linear drive member 200. For example, it avoids...

[0092] The lateral / radial stress between the power output end 210 and the first drive body 220 can also prevent the first linear drive component 200 from generating lateral stress with other components. For example, it can prevent the first power output end 210 from generating lateral stress with the first support 230, thereby ensuring the structural stability and service life of the first linear drive component 200 and even the entire vision base assembly.

[0093] In the embodiments of this application, such as Figure 4As shown, a first roller 211 is pivotally connected to the first power output end 210, and a first wear-resistant strip 231 is fixedly provided on the first support 230. The first roller 211 abuts against the first wear-resistant strip 231, and the first wear-resistant strip 231 has a higher hardness at least at its end face than the first support 230. This arrangement ensures that, during the adjustment of the visual base 100, even if there is a relative positional error or offset between the first support 230 and the linear guide 260, or a relative positional movement between the first support 230 and the first power output end 210, for example, a vertical relative positional shift...

[0094] The first roller 211 rolls or slides on the first wear-resistant strip 231, which, relative to the sliding of the surface contact 5, significantly reduces wear and makes it easier to adapt to or adjust relative positional movement; on the other hand...

[0095] Since the hardness of the first wear-resistant strip 231, at least at its end face, is higher than that of the first support 230, it is only necessary for the first wear-resistant strip 231 to abut against the first roller 211. The high wear resistance of this abutment extends its service life. When the first wear-resistant strip 231 experiences significant wear after long-term operation, it can be directly...

[0096] The wear-resistant strip can be replaced without replacing the entire first support 230, thus improving maintenance efficiency; and the material of the first support 230 does not need to be of high hardness, thus reducing manufacturing costs.

[0097] In this embodiment of the application, a second support 330 and a second elastic body are further included; the second support 330 is fixedly connected to the vision base 100 and abuts against the second power output end 310; one end of the second elastic body is connected to the second support 330, and the other end is connected to the second drive body 320, so as to...

[0098] The second support 330 is designed to always have a tendency to move toward the second drive body 320, thereby ensuring that the second power output end 310 is always tightly abutted against the second support 330. This configuration allows the second power output end 310 and the second support 330 to remain relatively fixed during the extension and retraction of the second linear drive member 300, thus guaranteeing the operational stability of the second linear drive member 300.

[0099] Regarding the specific structure of the second support 330, such as Figures 1-3 As shown, it can be configured as an L-shaped support, with one arm being a vertical arm whose end abuts against the second power output end 310, and the other arm being a horizontal arm whose end is fixedly connected to the visual base 100.

[0100] In this embodiment, a second bracket 340 is also included. The second bracket 340 is fixed to the second support 330 and extends away from the second drive body 320 along the linear extension and retraction direction of the second linear drive member 300. The second elastic body is a second tension spring 342, one end of which is connected to the second drive body 320 and the other end is connected to the extended end of the second bracket 340.

[0101] In this embodiment, the second support 340 includes at least one elongated second arm 341, extending away from the second drive body 320 along the linear extension / retraction direction of the second linear drive member 300. The proximal end of the second arm 341 is fixed to the second support 330, based on its distance from the second drive body 300. One end of the second tension spring 342 is connected to the distal end of the second arm 341, and the other end is connected to the second drive body 320. Specifically, there are at least two second arms 341 fixed to each other, and at least two second tension springs 342 adapted to the second arms 341. The second arm 341 has a through hole penetrating its end face; multiple through holes can be provided to reduce its weight while ensuring the strength of the second arm 341 as much as possible. The second arm 341 extends from the second power output end 310 away from the second drive body 320, thereby allowing for an appropriate extension of the second tension spring 342, making it easier to adapt to the extension / retraction stroke requirements of the second linear drive member 300.

[0102] With this configuration, under the tension of the second tension spring 342, the second power output end 310 always abuts against the second support 330. Furthermore, this connection method allows for positional errors between the second support 330 and the second drive body 320, or other factors that could cause relative positional deviations between the second support 330 and the second power output end 310. This allows the relative position between the second support 330 and the second power output end 310 to be adaptively adjusted according to site conditions, thereby avoiding lateral / radial stress between the components of the second linear drive member 300 itself (e.g., avoiding lateral / radial stress between the second power output end 310 and the second drive body 320), and also avoiding lateral stress between the second linear drive member 300 and other components (e.g., avoiding lateral stress between the second power output end 310 and the second support 330). This ensures the structural stability and service life of the second linear drive member 300, and even the entire vision base assembly.

[0103] In the embodiments of this application, such as Figure 5As shown, a second roller 311 is pivotally connected to the second power output end 310, and a second wear-resistant strip 331 is fixedly provided on the second support 330. The second roller 311 abuts against the second wear-resistant strip 331, and the hardness of the second wear-resistant strip 331 is higher than that of the second support 330 at least at its end face. This design offers several advantages. First, during the adjustment of the visual base 100, even if there are relative positional errors or offsets between the second support 330 and the second drive body 320, or relative positional movements between the second support 330 and the second power output end 310 (e.g., vertical offset), the second roller 311 rolls or slides on the second wear-resistant strip 331. Compared to surface-to-surface sliding, this significantly reduces wear and makes it easier to adapt to or adjust relative positional movements. Second, since the hardness of the second wear-resistant strip 331, at least at its end face, is higher than that of the second support 330, only the second wear-resistant strip 331 needs to abut against the second roller 311. The high wear resistance of this abutment extends its service life. When the second wear-resistant strip 331 wears significantly after long-term operation, it can be directly replaced without replacing the entire second support 330, thus improving maintenance efficiency. Furthermore, the material of the second support 330 does not require high hardness, thereby reducing manufacturing costs.

[0104] Specifically, when the air flotation block 400 and the air bearing 390 are inflated, they both generate a rigid air film. During this process, the vision base 100, the second support 330, and the second slider 350 will gradually rise a certain distance under the support of this rigid air film. This distance is small and can be simply referred to as the micro-motion distance, which can be ignored. However, for a rigid connection structure, a small distance deviation may cause internal stress in the connection structure. In the embodiment of this application, since the second support 330 and the second power output end 310 are in contact, such as Figure 5 As shown, the second roller 311 abuts against the second wear-resistant strip 331. When the second support 330 rises slightly with the vision base 100, the second roller 311 can roll on the end face of the second wear-resistant strip 331, so that the second support 330 rises slightly relative to the second power output end 310 according to the site conditions, so that no lateral stress is generated in the corresponding part (e.g., between the second support 330 and the second power output end 310), thereby ensuring the structural stability and service life of the entire vision base assembly.

[0105] In other embodiments of this application, in addition to the tension spring described above, a compression spring can also be used as the elastic element. The difference between this structure and the structure described above is as follows: Figures 6-9As shown, the first bracket 240 is fixed to the first drive body 220 and extends towards the first support 230 along the linear extension direction of the first linear drive member 200. The extended end of the first bracket 240 is located on the side of the first support 230 away from the first drive body 220. The first elastic body is a first compression spring 243, one end of which abuts against the extended end of the first bracket 240 and the other end of which abuts against the first support 230. The second bracket 340 is fixed to the second drive body 320 and extends towards the second support 330 along the linear extension direction of the second linear drive member 300. The extended end of the second bracket 340 is located on the side of the second support away from the second drive body 320. The second elastic body is a second compression spring 343, one end of which abuts against the extended end of the second bracket 340 and the other end of which abuts against the second support 330. With this configuration, the first power output end 210 can always be abutted against the first support 210, and the second power output end 310 can always be abutted against the second support 310. It should be noted that the specific structures of the first bracket 240 and the second bracket 340 can be referred to the structures of the corresponding first bracket 240 and second bracket 340 described above, and will not be repeated here.

[0106] In the embodiments of this application, such as Figures 1-3 As shown, the second drive body 320 is provided with a limiting seat 360, which has a limiting hole through which a limiting rod 370 passes. An adjustment gap exists between the outer peripheral wall of the limiting rod 370 and the wall of the limiting hole. Two limiting blocks 371 are fixedly mounted on the limiting rod 370, located on opposite sides of the limiting seat 360. The limiting rod 370 is fixedly connected to the second support 330. With this configuration, when the visual base 100 moves slightly upward, the second support 330 can drive the limiting rod 370 and its limiting blocks 371 to move slightly upward synchronously. The adjustment gap can accommodate this slight movement distance. Furthermore, the limiting blocks 371 ensure the range of motion of the visual base 100 along the extension / retraction direction of the second linear drive member 300.

[0107] In this embodiment, the vision base assembly further includes a connecting arm 380, one end of which is fixedly connected to the second slider 350, and the other end is fixedly connected to the vision base 100. This configuration enables a stable connection between the vision base 100 and the second slider 350.

[0108] In this embodiment, when the position of the vision base 100 needs to be adjusted, the air bearing 390 and the air block 400 are simultaneously inflated. Due to the limiting hole of the limiting seat 360 and the ability of the second roller 311 to roll on the second wear-resistant strip 331, the second support 330, vision base 100, second bracket 340, second limiting rod 370, connecting arm 380, and second slider 350 can rise synchronously by a small distance to accommodate the inflation command. Then, the position of the vision base 100 can be adjusted. Because there is a rigid air film between the vision base 100 and the mounting platform 010, and between the second slider 350 and the second drive body 320, there is no friction between the second slider 350 and the second drive body 320 (or the slide rail on it), and there is no friction between the vision base 100 and the mounting platform 010. This improves the motion and static accuracy of the vision base 100 during the adjustment process, ensures the source of precise adjustment data for the wafer position during wafer bonding, and guarantees the bonding accuracy of the wafer. After the position of the vision base 100 is adjusted to the correct position, the air bearing 390 and the air block 400 are depressurized. The vision base 100 and the components directly or indirectly fixed to it then descend synchronously by a micro-motion distance, achieving the fixed or positioned position after adjustment.

[0109] The visual positioning system provided in this application includes a control module, an air source module, and the aforementioned visual base assembly. The air source module is connected to the air float and the air bearing to realize the inflation and deflation of the air float and the air bearing. The air source module, the first linear drive and the second linear drive are all electrically connected to the control module to realize their cooperative actions and complete the position adjustment of the visual base assembly.

[0110] Since the visual positioning system includes the aforementioned visual base assembly, it possesses all the advantages of the aforementioned visual base assembly, which will not be elaborated upon here.

[0111] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A visual mount assembly, comprising: The application relates to a visual base (100) for carrying a visual system, a first linear drive (200) comprising a first fixed part and a first movable part capable of relative extension and contraction, the first fixed part being configured to be connected to a mounting platform (010), a second linear drive (300) comprising a second fixed part and a second movable part capable of relative extension and contraction, the second fixed part being connected to the first movable part, the second movable part being connected to the visual base (100), the second fixed part being a second drive body (320) of the second linear drive (300), the first linear drive (200) and the second linear drive (300) being arranged at an angle to the extension and contraction direction of the second linear drive (300), an air float block (400) being arranged between the visual base (100) and the mounting platform (010), a first guide rail assembly being arranged between the first movable part and the mounting platform (010), and a second guide rail assembly being arranged between the second fixed part and the visual base (100), at least one of the first guide rail assembly and the second guide rail assembly having an air float bearing (390), the second guide rail assembly comprising a second sliding block (350) fixed to the visual base (100) and an air float bearing (390) arranged on the second sliding block (350), the air float bearing (390) being arranged between the second drive body (320) and the second sliding block (350), the air float block (400) and the air float bearing (390) being inflated to form a rigid air film between the visual base (100) and the mounting platform (010) and between the second sliding block (350) and the second drive body (320). In the first linear drive (200), the first fixed part is a first power output end (210) of the first linear drive (200), and the first movable part is a first drive body (220) of the first linear drive (200). In the second linear drive (300), the second movable part is a second power output end (310) of the second linear drive (300). The first guide rail assembly comprises a first sliding block (250) fixed to the first drive body (220) and a linear guide rail (260) fixed to the mounting platform (010), and the first sliding block (250) is slidingly connected to the linear guide rail (260). The first guide rail assembly comprises a first sliding block (250) fixed to the first drive body (220) and a linear guide rail (260) fixed to the mounting platform (010), and the first sliding block (250) is slidingly connected to the linear guide rail (260). The first guide rail assembly comprises a first sliding block (250) fixed to the first drive body (220) and a linear guide rail (260) fixed to the mounting platform (010), and the first sliding block (250) is slidingly connected to the linear guide rail (260). ​ ​ 2. The visual mount assembly of claim 1, wherein, ​ ​ 3. The visual mount assembly of claim 2, wherein, ​ 4. The visual mount assembly of claim 3, wherein, ​ And / or, further comprising a second support (330) and a second elastic body; the second support (330) is fixedly connected to the visual base (100) and abuts against the second power output end (310); one end of the second elastic body is connected to the second support (330) and the other end is connected to the second driving body (320), so that the second support (330) always has a movement trend to the second driving body (320).

5. The visual mount assembly of claim 4, wherein, The first power output end (210) is pivoted with a first roller (211), the first support (230) is fixedly provided with a first wear-resistant strip (231), the first roller (211) abuts against the first wear-resistant strip (231), and the hardness of at least the end surface part of the first wear-resistant strip (231) is higher than that of the first support (230); The second power output end (310) is pivoted with a second roller (311), the second support (330) is fixedly provided with a second wear-resistant strip (331), the second roller (311) abuts against the second wear-resistant strip (331), and the hardness of at least the end surface part of the second wear-resistant strip (331) is higher than that of the second support (330).

6. The visual mount assembly of claim 4 or 5, wherein, Further comprising a first support (240), the first support (240) is fixedly connected to the first support (230) and extends away from the first driving body (220) along the linear extension direction of the first linear drive (200); the first elastic body is a first tension spring (242), one end of which is connected to the first driving body (220) and the other end is connected to the extended end of the first support (240); And / or, further comprising a second support (340), the second support (340) is fixedly connected to the second support (330) and extends away from the second driving body (320) along the linear extension direction of the second linear drive (300); the second elastic body is a second tension spring (342), one end of which is connected to the second driving body (320) and the other end is connected to the extended end of the second support (340).

7. The visual mount assembly of claim 6, wherein, The first support (240) comprises at least one long strip-shaped first support arm (241) and extends away from the first driving body (220) along the linear extension direction of the first linear drive (200), so that the proximal end of the first support arm (241) is fixedly connected to the first support (230) based on the distance of the first driving body (220); one end of the first tension spring (242) is connected to the distal end of the first support arm (241) and the other end is connected to the first driving body (220); The first power output end (210) is pivoted with a first roller (211), the first support (230) is fixedly provided with a first wear-resistant strip (231), the first roller (211) abuts against the first wear-resistant strip (231), and the hardness of at least the end surface part of the first wear-resistant strip (231) is higher than that of the first support (230); The second power output end (310) is pivoted with a second roller (311), the second support (330) is fixedly provided with a second wear-resistant strip (331), the second roller (311) abuts against the second wear-resistant strip (331), and the hardness of at least the end surface part of the second wear-resistant strip (331) is higher than that of the second support (330). Further comprising a first support (240), the first support (240) is fixedly connected to the first support (230) and extends away from the first driving body (220) along the linear extension direction of the first linear drive (200); the first elastic body is a first tension spring (242), one end of which is connected to the first driving body (220) and the other end is connected to the extended end of the first support (240); And / or, further comprising a second support (340), the second support (340) is fixedly connected to the second support (330) and extends away from the second driving body (320) along the linear extension direction of the second linear drive (300); the second elastic body is a second tension spring (342), one end of which is connected to the second driving body (320) and the other end is connected to the extended end of the second support (340). The first support (240) comprises at least one long strip-shaped first support arm (241) and extends away from the first driving body (220) along the linear extension direction of the first linear drive (200), so that the proximal end of the first support arm (241) is fixedly connected to the first support (230) based on the distance of the first driving body (220); one end of the first tension spring (242) is connected to the distal end of the first support arm (241) and the other end is connected to the first driving body (220); And / or, the second support (340) comprises at least one long strip-shaped second support arm (341), and extends away from the second driving body (320) along the linear extension direction of the second linear driving member (300), and the proximal end of the second support arm (341) is fixedly connected to the second support base (330) based on the distance from the second driving body (320); one end of the second tension spring (342) is connected to the distal end of the second support arm (341), and the other end is connected to the second driving body (320).

8. The visual mount assembly of claim 7, wherein, The first support arm (241) has at least two and is fixedly connected to each other, and the first tension spring (242) has at least two and is adapted to the first support arm (241); And / or, the second support arm (341) has at least two and is fixedly connected to each other, and the second tension spring (342) has at least two and is adapted to the second support arm (341).

9. The visual mount assembly of claim 4 or 5, wherein, Further comprising a first support (240) fixedly arranged on the first driving body (220) and extending towards the first support base (230) along the linear extension direction of the first linear driving member (200), and the extended end of the first support (240) is located on the side of the first support base (230) away from the first driving body (220); the first elastic body is a first compression spring (243) with one end abutting against the extended end of the first support (240) and the other end abutting against the first support base (230); And / or, further comprising a second support (340) fixedly arranged on the second driving body (320) and extending towards the second support base (330) along the linear extension direction of the second linear driving member (300), and the extended end of the second support (340) is located on the side of the second support base (330) away from the second driving body (320); the second elastic body is a second compression spring (343) with one end abutting against the extended end of the second support (340) and the other end abutting against the second support base (330).

10. The visual mount assembly of claim 4 or 5, wherein, The first support base (230) is a long strip-shaped support base with one end abutting against the first power output end (210) and the other end arranged to be connected to the mounting platform (010); And / or, the second support base (330) is an L-shaped support base with one end of one arm abutting against the second power output end (310) and the other end of the other arm connected to the visual base (100).

11. The visual mount assembly of claim 4 or 5, wherein, The second driving body (320) is provided with a limiting seat (360) having a limiting hole, the limiting hole is provided with a limiting rod (370), the limiting rod (370) has an adjusting gap between the outer peripheral wall and the hole wall of the limiting hole, the limiting rod (370) is fixedly provided with a limiting block (371), the limiting block (371) has two and is respectively located on both sides of the limiting seat (360), and the limiting rod (370) is fixedly connected to the second support base (330).

12. The visual mount assembly of any of claims 3-5, wherein, The visual base assembly further comprises a connecting arm (380), one end of the connecting arm (380) being fixedly connected to the second slider (350), and the other end being fixedly connected to the visual base (100).

13. A vision positioning system characterized by, The visual base assembly comprises a control module, an air source module and the visual base assembly of any one of claims 1-12, the air source module being connected to the air float block and the air float bearing to realize air charging and air extraction of the air float block and the air float bearing, the air source module, the first linear drive and the second linear drive being electrically connected to the control module to realize coordinated action therebetween and complete position adjustment of the visual base assembly.

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