Concentric off-axis goniometer for use in a vertical x-ray diffractometer

Abstract

The application relates to a concentric different-axis goniometer device for a vertical X-ray diffractometer, which specifically comprises the following steps: sequentially arranging a first hollow shaft and a second hollow shaft on the inner wall of a through hole of a goniometer shell through bearings I, arranging a bearing II in the inner hole of the second hollow shaft, assembling a central shaft in the bearing II, connecting the two ends of the central shaft with the top of front and rear supports, and positioning the bottom of the front and rear supports on the goniometer shell through bolts; connecting a first detection component to the outer circumference of one end of the first hollow shaft through an arm support, arranging a driving device I on the outer circumference of the other end of the first hollow shaft; connecting a second detection component to the outer circumference of one end of the second hollow shaft through another arm support, and arranging a driving device II on the outer circumference of the other end of the second hollow shaft. The goniometer device adopts a three-axis concentric different-axis design structure of the first hollow shaft, the second hollow shaft and the central shaft, which not only meets the technical index of the diffractometer in the market, but also ensures the product quality reliability.

Description

Technical Field

[0001] The invention relates to a concentric and non-uniaxial angle measuring device used in a vertical X-ray diffractometer, belonging to a detection device in the field of flaw detection. Background Art

[0002] Vertical X-ray diffractometer is suitable for qualitative and quantitative analysis of various single crystals and polycrystalline crystals, grain size, micro stress analysis, crystallinity analysis and crystallinity analysis. With the development of science and technology, the market has higher and higher requirements for the technical indicators of diffractometers. The angle measurement accuracy has been improved from the original ±0.02° to ±0.005°; the repeatability error has been improved from the original ±0.001° to ±0.0001°; the minimum step angle has been increased from the original 0.001° to 0.0001°; such as Figure 1 As shown, in a conventional goniometer, the three axes of the first hollow shaft 1, the second hollow shaft 2, and the sample stage component shaft 3 are designed, machined, installed, and debugged before being inspected with a micrometer. The three axes must maintain concentricity of ≤φ0.005, and the first hollow shaft 1 and the second hollow shaft 2 must rotate and scan in opposite directions without interference to achieve the aforementioned technical specifications of the diffractometer. The goniometer structure, however, comprises a goniometer housing with a bearing I mounted in its bore, the first hollow shaft 1 mounted in its inner bore, the first hollow shaft 1 with a bearing II mounted in its inner bore, the second hollow shaft 2 with a bearing III mounted in its inner bore, and the shaft 3 mounted in its inner bore. This repeated shaft-sleeve-bearing and bearing-sleeve-shaft design results in poor overall accuracy after assembly, failing to achieve a three-axis concentricity of ≤φ0.005. Furthermore, the first hollow shaft 1 and the second hollow shaft 2 interfere with each other during their opposite rotational scanning, preventing the two axes from rotating to the same angle simultaneously, and the product fails to meet quality requirements. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a concentric and non-coaxial angle measurement device for a vertical X-ray diffractometer. The angle measurement device adopts a design structure of three concentric and non-coaxial axes: a first hollow shaft, a second hollow shaft and a central shaft. It not only meets the market technical indicators for diffractometers, but also ensures product quality and reliability.

[0004] To address the above issues, the present invention provides the following specific technical solutions: a concentric, non-coaxial goniometer device for use in a vertical X-ray diffractometer, comprising a horizontal through-hole provided in the goniometer housing. A first hollow shaft is coaxially mounted on the inner wall of the through-hole via a bearing I. A second hollow shaft is coaxially mounted within the first hollow shaft, with bearings II positioned at each end of the inner hole of the second hollow shaft. A central shaft is coaxially assembled within the bearings II, with both ends of the central shaft connected to the tops of the front and rear supports, respectively. The bottoms of the front and rear supports are secured to the goniometer housing via bolts. A first detection component is connected to the outer circumference of one end of the first hollow shaft via a rotating arm bracket, and a drive device I is mounted to the outer circumference of the other end of the first hollow shaft. A second detection component is connected to the outer circumference of one end of the second hollow shaft via another rotating arm bracket, and a drive device II is mounted to the outer circumference of the other end of the second hollow shaft.

[0005] The drive device I and drive device II have the same structure, respectively comprising a motor, a worm gear and a worm, wherein the motor is positioned on the goniometer housing, the output shaft of the motor is connected to the worm, and the worm is meshed with the worm gear provided at the corresponding position of the drive device I or the drive device II.

[0006] The rotating arm bracket is composed of a first radial arm, a second radial arm and a crossbeam. The first radial arm and the second radial arm are arranged in parallel, and the crossbeam vertically connects the outer ends of the first radial arm and the second radial arm; the first radial arm is connected to the tail of the central shaft through a bearing sleeve; the second radial arm is connected to the corresponding position of the corresponding first hollow shaft or the second hollow shaft.

[0007] In the two sets of rotating arm brackets, one second radial arm is connected to a first detection component, which is a ray tube component, and the other second radial arm is connected to a second detection component, which is a scintillation detector.

[0008] The bearing sleeve is provided with a counterweight block, which is on the reverse extension line of the counterweight block and the first radial support arm.

[0009] The front end of the central shaft is connected to the sample stage component.

[0010] The concentric and non-uniaxial angle measurement device for a vertical X-ray diffractometer of the present application adopts a first hollow shaft, a second hollow shaft and a central shaft, which are designed, processed, installed, adjusted and debugged with three concentric and non-uniaxial axes, and then tested with a micrometer. The concentricity of the three axes is: ≤φ0.005, and the first hollow shaft and the second hollow shaft rotate and scan in opposite directions without interference, meeting the market requirements for the technical indicators of the diffractometer to be improved to: 1. The angle measurement accuracy is improved from the original ±0.02° to ±0.005°; 2. The repeatability error is improved from the original ±0.001° to ±0.0001°; 3. The minimum step angle is improved from the original 0.001° to 0.0001°, ensuring product quality and reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a structural diagram of a traditional angle measuring device.

[0012] Figure 2 This is the main view of the structure of this application.

[0013] Figure 3 This is a top view of the structure of this application.

[0014] Figure 4 It is the left view of the structure of this application. Implementation Method

[0015] like Figures 2 to 4 As shown, a concentric and non-coaxial goniometer device for use in a vertical X-ray diffractometer comprises a goniometer housing 4 having a horizontal through-hole. A first hollow shaft 1 is coaxially mounted on the inner wall of the through-hole via a bearing I21. A second hollow shaft 2 is coaxially mounted within the first hollow shaft 1. Bearings II22 are provided at each end of the inner hole of the second hollow shaft 2. A central shaft 3 is coaxially assembled within the bearings II22. The ends of the central shaft 3 are respectively connected to the tops of a front support 5 and a rear support 6. The bottoms of the front support 5 and the rear support 6 are positioned on the goniometer housing 4 via bolts 20. One end of the first hollow shaft 1 is connected to a first detection component via a rotating arm bracket 9, and the other end of the first hollow shaft 1 is provided with a driving device I11. One end of the second hollow shaft 2 is connected to a second detection component via another rotating arm bracket 9, and the other end of the second hollow shaft 2 is provided with a driving device II13. Because the first hollow shaft 1 is supported by bearing I within the horizontal inner hole of the goniometer housing 4 and driven for rotation by the drive device I, and the second hollow shaft 2 is supported by bearing II on the outer circumference of the central shaft 3 and driven for rotation by the drive device II, a concentric but non-coaxial structure is achieved for the first hollow shaft 1, the second hollow shaft 2, and the central shaft 3, ensuring that their rotations do not interfere with each other and improving measurement accuracy.

[0016] Drive devices I11 and II13 have identical structures, each comprising a motor 15, a worm gear 16, and a worm 19. Motor 15 is positioned on the goniometer housing 4, and its output shaft is connected to worm 19. Worm 19 meshes with worm gear 16 located in a corresponding position on drive device I11 or II13. Drive devices I11 and II13 can independently move, enabling relative rotational motion between the first hollow shaft 1 and the second hollow shaft 2.

[0017] The pivot arm support 9 is composed of a first radial arm 9-1, a second radial arm 9-2, and a crossbeam 9-3. The first radial arm 9-1 and the second radial arm 9-2 are arranged in parallel, and the crossbeam 9-3 vertically connects the outer ends of the first radial arm 9-1 and the second radial arm 9-2. The first radial arm 9-1 is connected to the tail end of the central shaft 3 via a bearing sleeve 17, and the second radial arm 9-2 is connected to the corresponding first hollow shaft 1 or second hollow shaft 2. In the two sets of pivot arm supports 9, one second radial arm 9-2 is connected to the first detection component, which is the X-ray tube component 7, and the other second radial arm 9-2 is connected to the second detection component, which is the scintillation detector 10. The relative rotation of the first hollow shaft 1 and the second hollow shaft 2 enables relative rotation of the X-ray tube component 7 and the scintillation detector 10, completing the detection content.

[0018] The bearing sleeve 17 is provided with a counterweight 18 on the reverse extension line of the counterweight 18 and the first radial support arm 9 - 1 , and the counterweight 18 ensures the smooth operation of the entire equipment.

[0019] The front end of the central shaft 3 is connected to the sample stage component 14 to complete the connection with the external equipment.

Claims

1. A concentric and non-concentric angle measuring device for a vertical X-ray diffractometer, characterized in that: A horizontal through hole is provided on the goniometer housing (4), and a first hollow shaft (1) is coaxially supported on the inner wall of the through hole of the goniometer housing (4) through a bearing I (21); a second hollow shaft (2) is coaxially arranged in the first hollow shaft (1), and there is a gap between the first hollow shaft (1) and the second hollow shaft (2) and no bearing is matched; both ends of the inner hole of the second hollow shaft (2) are coaxially supported on the central shaft (3) through bearings II (22), and both ends of the central shaft (3) are respectively connected to the front support (5) and the rear support (6). ), the bottoms of the front support (5) and the rear support (6) are positioned on the goniometer housing (4) by bolts (20); the outer circumference of one end of the first hollow shaft (1) is connected to the first detection component through a rotating arm bracket (9), and the outer circumference of the other end of the first hollow shaft (1) is provided with a driving device I (11); the outer circumference of one end of the second hollow shaft (2) is connected to the second detection component through another rotating arm bracket (9), and the outer circumference of the other end of the second hollow shaft (2) is provided with a driving device II (13).

2. The concentric and non-concentric angle measuring device for a vertical X-ray diffractometer according to claim 1, wherein: The driving device I (11) and the driving device II (13) have the same structure, and respectively include a motor (15), a worm gear (16) and a worm (19), wherein the motor (15) is positioned on the goniometer housing (4), the output shaft of the motor (15) is connected to the worm (19), and the worm (19) is meshed with the worm gear (16) provided at the corresponding position of the driving device I (11) or the driving device II (13) for transmission.

3. The concentric and non-concentric angle measuring device for a vertical X-ray diffractometer according to claim 1, wherein: The swing arm bracket (9) is composed of a first radial arm (9-1), a second radial arm (9-2) and a crossbeam (9-3), wherein the first radial arm (9-1) and the second radial arm (9-2) are arranged in parallel, and the crossbeam (9-3) vertically connects the outer ends of the first radial arm (9-1) and the second radial arm (9-2); wherein the first radial arm (9-1) is connected to the tail of the central shaft (3) through a bearing sleeve (17); and the second radial arm (9-2) is connected to the corresponding position of the corresponding first hollow shaft (1) or the second hollow shaft (2).

4. The concentric and non-concentric angle measuring device for a vertical X-ray diffractometer according to claim 3, wherein: In the two sets of rotating arm supports (9), one second radial support arm (9-2) is connected to a first detection component, which is a ray tube component (7), and the other second radial support arm (9-2) is connected to a second detection component, which is a scintillation detector (10).

5. The concentric and non-concentric angle measuring device for a vertical X-ray diffractometer according to claim 3, wherein: A counterweight (18) is provided on the bearing sleeve (17), and the counterweight (18) is located on the reverse extension line of the first radial support arm (9-1).

6. The concentric and non-concentric angle measuring device for a vertical X-ray diffractometer according to claim 1, wherein: The front end of the central axis (3) is connected to the sample stage component (14).

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