A method and system for fine detection of surface condition of rotating body component

Abstract

The present invention discloses a method and system for fine detection of the surface state of a rotating body component, which relates to the technical field of fine detection of workpiece surfaces, and includes the following contents: moving a manipulator to avoid spatial interference with the rotating body component, so that the detection probe coincides with the axis of a holding seat; placing the rotating body component on the holding seat and coinciding with its axis; moving the manipulator up and down until the focal plane of the detection probe coincides with the highest or lowest point on the axis of the rotating body component, fine-tuning the rotating body component and ensuring that the three axes of the rotating body component, the holding seat, and the detection probe are unified, and calculating the coordinate zero point of the rotating body component; inputting the intended detection site and planning the moving path to perform surface state detection; confirming that the detection information meets the detection requirements and processing the data. The present invention achieves precise positioning of the surface of the rotating body component and fine detection of the surface state by clamping the detection probe with a manipulator, and during detection, by adjusting the focal plane of the detection probe to coincide with the section of the detection site.

Description

Technical Field

[0001] The present invention relates to the technical field of workpiece surface fine detection, and in particular to a method and system for fine detection of the surface state of a rotating component. Background Art

[0002] With the development of modern precision machining and manufacturing, the accuracy and quality requirements for the surface state of workpieces in the industrial and defense fields are getting higher and higher, especially the measurement of the surface morphology, surface defects, surface oxide layer thickness, and surface composition of workpieces is particularly important. At present, for large-sized rotating workpieces, due to the existence of a certain curvature, it is impossible to achieve accurate optical imaging of the workpiece surface.

[0003] The Chinese patent application publication number CN 109767497A discloses a method for automatically detecting the surface quality of aviation blades. The method collects three-dimensional data of the surface of the aviation blades, establishes a three-dimensional model, and then plans a path for the three-dimensional model. The surface of the aviation blades is photographed through the path, and the photo information is transmitted to the algorithm server for surface quality analysis. The analysis results are obtained and fed back to the user to complete the detection. This solution drives the aviation blades to rotate around the length direction of the aviation blades through the positioner, and the mechanical arm drives the three-dimensional profilometer to measure the aviation blades, obtains the three-dimensional data point cloud of the aviation blades, and digitizes the physical model. However, the aviation blades are not rotating components. Moreover, the resolution of this solution is low and cannot meet the needs of fine detection of surface defects, oxide layer thickness, etc. of rotating components.

[0004] In addition, the Chinese patent with the authorization publication number CN 211060881 U discloses a three-dimensional detection system for workpieces, which uses a precision manipulator with a three-dimensional scanner to realize three-dimensional detection of workpieces. The scheme includes a computer server, a three-dimensional scanner, a manipulator and an adjustable three-dimensional detection indexing rotary table. The adjustable three-dimensional detection indexing rotary table is provided with a rotating mechanism and a multi-claw chuck, and the multi-claw chuck is arranged on the rotating mechanism; the manipulator is arranged on one side of the adjustable three-dimensional detection indexing rotary table, and the three-dimensional scanner is installed on the manipulator. The adjustable three-dimensional detection indexing rotary table, the three-dimensional scanner and the manipulator are respectively connected to the computer server, and the three-dimensional scanner is used to collect information of the workpiece to be measured and send the collected information of the workpiece to be measured to the computer server; the computer server is used to control the adjustable three-dimensional detection indexing rotary table to quickly clamp the workpiece to be measured and drive the workpiece to be measured to rotate and control the manipulator to drive the three-dimensional scanner to scan the workpiece to be measured up and down. This scheme also has no record on how to detect the rotating body component, and the three-dimensional scanner mainly detects the macroscopic geometric characteristics of the workpiece, and it is difficult to detect surface defects, oxide layer thickness and other surface conditions. Summary of the invention

[0005] The purpose of the present invention is to provide a method and system for fine detection of the surface state of a rotating component to solve the problems existing in the above-mentioned prior art. By using a manipulator to clamp the detection probe and adjusting the focal plane of the detection probe to coincide with the section of the detection site during detection, precise positioning of the surface of the rotating component and fine detection of the surface state can be achieved.

[0006] To achieve the above object, the present invention provides the following solutions:

[0007] The present invention provides a method for finely detecting the surface state of a rotating component, comprising the following contents:

[0008] The detection probe is mounted on the manipulator, and the manipulator is moved so that the axis of the detection probe coincides with the axis of the containing seat. At this time, the spatial position coordinates and posture of the manipulator are set to the zero time point to avoid spatial interference with the rotating body component at the zero time point;

[0009] Placing the rotating body component on the placing seat, and ensuring that the axis of the rotating body component coincides with the axis of the placing seat;

[0010] Move the manipulator up and down until the focal plane of the detection probe coincides with the highest or lowest point on the axis of the rotating component, fine-tune the position of the rotating component according to the detection parameters, ensure that the axes of the rotating component, the holding seat, and the detection probe are aligned, set the coincidence point as a feature point, and calculate the spatial position coordinates of the reference point of the rotating component relative to the manipulator coordinate system according to the characteristics of the rotating component, and set the reference point as the coordinate zero point of the rotating component;

[0011] Inputting a location to be inspected and planning a moving path to inspect the surface condition of the rotating component;

[0012] Confirm that the test information obtained meets the test requirements and process the data.

[0013] Preferably, after completing one surface condition detection, the detection probe is replaced to perform the next surface condition detection, and after each replacement of the detection probe, the coordinate zero point is calculated according to the detection probe and the size of the fixture.

[0014] Preferably, the surface state detection includes surface morphology detection, and the detection probe adopts a stereo microscope, and the magnification is selected to be 20-500X. The lens of the stereo microscope is brought close to the surface of the rotating body component for detection, focusing, selecting a clear field of view, taking pictures and saving them.

[0015] Preferably, the surface state detection includes oxide film thickness detection, and the detection probe is a spectral probe, which is aimed at the surface of the rotating body component, and the distance between the spectral probe and the rotating body component is adjusted between 1 and 5 mm. The change of the original spectrum intensity in the software is observed, and when the spectrum intensity reaches the strongest, the reflection spectrum is obtained to obtain an obvious interference peak.

[0016] Preferably, the holding seat is driven to rotate by a rotation drive mechanism, and the holding seat drives the rotating body component to rotate along the central axis of the rotating body component, and the movement path of the detection probe driven by the manipulator is limited to the plane where the central axis is located.

[0017] The present invention also provides a precise detection system for the surface condition of a rotating component, comprising a carrying platform and a receiving seat and a manipulator arranged on the carrying platform, wherein the receiving seat is used to place the rotating component, and the receiving seat is connected to a rotation driving mechanism, and the rotation driving mechanism is used to drive the rotating component to rotate along the central axis of the rotating component, and the manipulator holds a detection probe for performing surface condition detection on the rotating component through a clamp.

[0018] Preferably, the placing seat includes a placing plate and a plurality of clamping assemblies, a positioning hole is provided in the middle of the placing plate, and the clamping assembly includes a guide rail radially arranged with the positioning hole as the center, a clamping claw slidably arranged on the guide rail, and a linear drive mechanism for driving the clamping claw to move.

[0019] Preferably, the clamping claw includes a slider slidably arranged on the guide rail, and the slider is hinged with a first connecting rod and a second connecting rod in sequence, and the free end of the second connecting rod is provided with a wedge-shaped support block for abutting the rotating body component, and the end of the first connecting rod hinged to the slider is provided with a first rotation limiting portion, and the end of the second connecting rod hinged to the first connecting rod is provided with a second rotation limiting portion, and the first rotation limiting portion and the second rotation limiting portion are both located on a side close to the positioning hole, and the first connecting rod and the second connecting rod can form a cantilever beam support structure.

[0020] Preferably, the clamp includes a first clamp for clamping the stereo microscope, the first clamp includes a first quick-change connector connected to the manipulator, the first quick-change connector is connected to a lens holder through a position adjustment mechanism, the lens holder is used to fix the stereo microscope, and the plug-in direction of the first quick-change connector is parallel to the axial direction of the stereo microscope.

[0021] Preferably, the clamp includes a second clamp for clamping the spectral probe, the second clamp includes a second quick-change connector connected to the manipulator, the second quick-change connector is connected to a probe holder via a connecting block, the probe holder is used to fix the spectral probe, and the plugging direction of the second quick-change connector is parallel to the axial direction of the spectral probe.

[0022] Compared with the prior art, the present invention has achieved the following technical effects:

[0023] (1) The present invention uses a manipulator to clamp the detection probe, and during detection, by adjusting the focal plane of the detection probe to coincide with the section of the detection site, the surface of the rotating body component can be accurately positioned and the surface state can be finely detected; in addition, the use of a manipulator to control the detection probe can improve the efficiency of path planning and reduce the risk of spatial interference, that is, to avoid physical interference between the detection probe and the rotating body component during detection, and to accurately find the site and optimize the path to achieve omnidirectional scanning of the rotating body component, with high efficiency and good repeatability;

[0024] (2) The present invention uses a stereo microscope to detect the surface morphology of the rotating body component, which can take advantage of its ultra-depth of field to clearly image the entire field of view within a certain depth range, and can also form a local fine three-dimensional image of the surface defects that deserve attention;

[0025] (3) The detection probe of the present invention is connected to the manipulator by a quick-change connector, which can realize the replacement of various detection probes (stereo microscope, spectral probe, component probe, etc.), taking into account replacement, clamping, positioning and integrated control, and realizing the information fusion of multiple detection results at the same site;

[0026] (4) The present invention limits the movement path of the detection probe driven by the manipulator to the plane where the central axis of the rotating component is located, thereby reducing the movement path, improving the detection efficiency, and realizing efficient path planning for fine detection of the surface state of the rotating component; by combining the manipulator with the rotating drive mechanism connected to the placing seat, accurate positioning of the entire surface of the rotating component can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0028] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0029] Figure 2 This is a schematic diagram of the structure of the holding seat of the present invention;

[0030] Figure 3 This is a schematic diagram of the structure of the clamping claw of the present invention;

[0031] Figure 4 This is a schematic diagram of the structure of a first clamp holding a stereo microscope according to the present invention;

[0032] Figure 5 This is a schematic diagram of the structure of the second fixture holding the spectrum probe of the present invention;

[0033] Figure 6 It is the detection position of the rotating body component (hemispherical shell component) of the present invention;

[0034] Figure 7 This is a microscopic morphology of the outer surface of the hemispherical shell;

[0035] Figure 8 is the reflection spectrum interference diagram of the outer surface of the hemispherical shell;

[0036] Among them, 1. bearing platform; 2. manipulator; 3. fixture; 311. lens holder; 312. position adjustment mechanism; 313. first quick-change joint; 321. probe holder; 322. connecting block; 323. second quick-change joint; 4. detection probe; 41. stereo microscope; 42. spectrum probe; 5. holding seat; 51. placement plate; 511. positioning hole; 52. clamping claw; 521. slider; 522. first connecting rod; 5221. first rotation limit part; 523. second connecting rod; 5231. second rotation limit part; 524. wedge support block; 53. guide rail; 54. linear drive mechanism; 541. fixed block; 542. screw; 6. rotation drive mechanism; 7. external support platform; 8. microscope system controller; 9. manipulator controller; 10. rotating body component. DETAILED DESCRIPTION

[0037] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] The purpose of the present invention is to provide a method for fine detection of the surface state of a rotating component to solve the problems existing in the prior art. The method uses a manipulator to clamp the detection probe and, during detection, adjusts the focal plane of the detection probe to coincide with the section of the detection site, thereby achieving precise positioning of the surface of the rotating component and fine detection of the surface state.

[0039] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0040] like Figures 1 to 5 As shown, the present invention provides a method for finely detecting the surface state of a rotating component 10, comprising the following contents:

[0041] Install the detection probe 4 on the manipulator 2, move the manipulator 2 so that the axis of the detection probe 4 coincides with the axis of the receiving seat 5, and at this time, the spatial position coordinates and posture of the manipulator 2 are set to the zero time point. The zero time point mentioned here refers to the spatial point that the manipulator 2 must first reach before each detection. It should be noted that when the manipulator 2 is initially moved, the rotating body component 10 has not yet been placed on the receiving seat 5, but in order to avoid interference with the rotating body component 10 caused by the movement of the manipulator 2, it is necessary to reserve space for the placement of the rotating body component 10, that is, at the zero time point, the manipulator 2 and its accessories, the detection probe 4, etc. should be prevented from having spatial interference with the rotating body component 10 to be placed.

[0042] Place the rotating body component 10 on the receiving seat 5, and ensure that the axis of the rotating body component 10 coincides with the axis of the receiving seat 5. Different coincidence methods are used according to different rotating body components 10. Specifically, for the rotating body component 10 with the curved surface downward, a positioning hole 511 (with smooth edges) concentric with the receiving seat 5 is opened in the center of the receiving seat 5. The principle that the gravitational potential energy is the lowest when the axis of the rotating body component 10 coincides with the axis of the receiving seat 5 is used, and combined with the detection of the reference plane of the rotating body component 10 by the level meter, it is ensured that the axis coincides with the axial direction of the receiving seat 5 after placement; for the rotating body component 10 with the reference plane downward, after being placed on the surface of the receiving seat 5, it is pushed by the clamping claw 52 to move it to a position where the axis coincides with the axis of the receiving seat 5.

[0043] Move the manipulator 2 up and down until the focal plane of the detection probe 4 coincides with the highest or lowest point on the axis of the rotating component 10, fine-tune the position of the rotating component 10 according to the detection parameters, ensure that the three axes of the rotating component 10, the holding seat 5, and the detection probe 4 are aligned, set the coincidence point as the feature point, calculate the reference point of the rotating component 10 according to the characteristics of the rotating component 10, determine the spatial position coordinates of the reference point of the rotating component 10 relative to the coordinate system of the manipulator 2, and set the reference point as the coordinate zero point of the rotating component 10.

[0044] Input the intended detection site and plan the moving path to perform surface state detection on the rotating component 10. Based on the characteristics of the rotating component 10, the coordinate system adopts a polar coordinate system. After determining the spatial position coordinates of the zero point of the rotating component 10 relative to the coordinate system of the manipulator 2, any detection point on the surface of the component can be expressed as (r, θ, φ), where r is the straight-line distance from the detection point to the zero point, θ is the angle between the line connecting the detection point to the zero point and the horizontal plane, and φ is the angle between the projection of the line connecting the detection point to the zero point on the horizontal plane and the specified direction of the horizontal plane. After inputting the intended detection site, φ is controlled by the rotation drive mechanism 6, and the manipulator 2 only needs to perform two-dimensional movement in a single plane. Two-dimensional movement includes position positioning and end swing (end swing control is to ensure that the focal plane of the detection probe 4 coincides with the section of the detection point), which can improve the efficiency of path planning and reduce the risk of spatial interference. When moving from one detection point to another, first move upward in the Z-axis direction, then move to a safe point (according to the size and structure of the rotating body component 10 to ensure that no spatial interference occurs), and then move to the detection point.

[0045] It is confirmed that the obtained detection information meets the detection requirements, and the data is processed, including polarity data processing, spectrum analysis, and fusion, so as to complete the surface state detection of the rotating body component 10.

[0046] The present invention utilizes a manipulator 2 to clamp the detection probe 4, and during detection, by adjusting the focal plane of the detection probe 4 to coincide with the section of the detection site, accurate positioning of the surface of the rotating component 10 and fine detection of the surface state are achieved; in addition, the use of the manipulator 2 to control the detection probe 4 can improve the efficiency of path planning and reduce the risk of spatial interference, thereby avoiding physical interference between the detection probe 4 and the rotating component 10 during detection, and accurately finding the site and optimizing the path, thereby achieving all-round scanning of the rotating component 10 with high efficiency and good repeatability.

[0047] After completing a surface condition detection, the detection probe 4 can be replaced to perform the next surface condition detection. After each replacement of the detection probe 4, the coordinate zero point is calculated according to the size of the detection probe 4 and its fixture 3. It should be noted that replacing the detection probe 4 does not require re-zero point positioning, but re-zero point positioning is required after replacing or flipping the rotating body component 10.

[0048] Specifically, the surface state detection may include surface morphology detection. At this time, the detection probe 4 uses a stereo microscope 41, selects a suitable magnification, such as 50X, and brings the lens of the stereo microscope 41 close to the surface of the rotating body component 10 for detection, and takes pictures and saves them. By using the stereo microscope 41 to detect the surface morphology of the rotating body component 10, the advantage of its super depth of field can be used to automatically focus and image within a certain depth range, and a three-dimensional image can be formed for the surface defects that deserve attention, thereby improving the precision of the detection.

[0049] Surface state detection can also include oxide film thickness detection. At this time, the detection probe 4 uses a spectral probe 42, aligns the spectral probe 42 with the surface of the rotating component 10, adjusts the distance between the spectral probe 42 and the rotating component 10 to between 1 and 5 mm, observes the change of the original spectral intensity in the software, and when the spectral intensity reaches the strongest, obtains the reflection spectrum and obtains an obvious interference peak.

[0050] During the inspection, the holder 5 drives the rotating body component 10 to rotate along the central axis of the rotating body component 10, and at the same time, the manipulator 2 drives the detection probe 4 to move. By using the manipulator 2 in conjunction with the rotation drive mechanism 6 connected to the holder 5, the full surface of the rotating body component 10 can be accurately positioned. In addition, the movement path of the detection probe 4 driven by the manipulator 2 is limited to the plane where the central axis of the rotating body component 10 is located. Through the above-mentioned setting method, the movement path of the manipulator 2 is reduced, the detection efficiency is improved, and efficient path planning for fine detection of the surface state of the rotating body component 10 is achieved.

[0051] like Figures 1 to 5As shown, the present invention also provides a fine detection system for the surface state of a rotating body component 10. The overall system is integrated in an integrated manner, has a desktop layout, and integrates an industrial computer with a manipulator 2 and a variety of detection probes 4. It integrates the detection light sources that meet the needs of a variety of detection probes 4, improves space utilization, reduces the volume and weight of the system, and can meet the needs of dynamic and complex detection tasks. Specifically, it includes a bearing platform 1 and a holding seat 5 and a manipulator 2 arranged on the bearing platform 1. Among them, the bearing platform 1 can adopt a cart structure with a double-layer support plate, and the holding seat 5 and the manipulator 2 are both installed on the upper support plate. The lower support plate is used to install a manipulator controller 9 or other cabinets, and the manipulator controller 9 is used to control the movement of the manipulator 2. In addition, for the convenience of operation, an external support platform 7 that is easy to disassemble and extends toward the operator can also be installed on the upper support plate, and a microscopic system controller 8 can be installed on the external support platform 7. The microscopic system controller 8 is used to control the detection probe 4, and can perform imaging display and related operations. The holding seat 5 is used to place the rotating body component 10, and the holding seat 5 is connected to a rotation drive mechanism 6, and the rotation drive mechanism 6 can be located below the upper support plate. The rotation drive mechanism 6 is used to drive the holding seat 5 to rotate and then drive the rotating body component 10 to rotate along the central axis of the rotating body component 10. The manipulator 2 can use a multi-joint manipulator 2 with more than four joints. The manipulator 2 clamps a detection probe 4 for surface state detection of the rotating body component 10 through a clamp 3. The detection probe 4 can be a stereo microscope 41, a spectral probe 42, a component probe, etc. The detection probe 4 is connected to the manipulator 2 with a quick-change connector, which can realize the replacement of multiple detection probes 4, taking into account replacement, clamping, positioning and integrated control, and can realize multi-information fusion at the same site. The manipulator 2 of the present invention is equipped with an ultra-depth-of-field stereo microscope 41, a spectral probe 42, an emission spectral probe, an infrared spectral probe, a Raman spectral probe, etc. through a quick-release connection structure, thereby solving the problem that the above-mentioned detection probe 4 can only detect small flat samples and is difficult to cover complex components. The precise repeated positioning function of the manipulator 2 is used to accurately obtain the spatial position information corresponding to different surface state detections, and multi-source information fusion of surface state information such as surface morphology, geometric contour, oxide layer thickness, and attachment composition is realized based on spatial coordinates.

[0052] Combination Figure 2 As shown, the placing seat 5 may include a placing plate 51 and a plurality of clamping assemblies, a positioning hole 511 is provided in the middle of the placing plate 51, and the bottom of the rotating body component 10 can cooperate with the positioning hole 511 to limit the position. The clamping assemblies are evenly distributed along the circumferential direction, and at least three groups are provided, including a guide rail 53 radially arranged with the positioning hole 511 as the center, a clamping claw 52 slidably arranged on the guide rail 53, and a linear driving mechanism 54 driving the clamping claw 52 to move. The linear driving mechanism 54 can drive the clamping claw 52 to move centripetally or centrifugally, thereby adapting to rotating body components 10 of different diameters.

[0053] Combination Figure 3 As shown, the clamping claw 52 may include a slider 521 slidably disposed on the guide rail 53, and the slider 521 may be a T-shaped slider 521 or an I-shaped slider 521, and the shape of the guide rail 53 is correspondingly disposed thereto. The slider 521 is provided with a threaded hole, and a screw rod 542 is threadedly connected to the threaded hole. The slider 521 can be driven to move along the guide rail 53 by the rotation of the screw rod 542. In order to ensure the rotation of the screw rod 542 rather than the axial movement, a fixing block 541 may be provided at the end of the screw rod 542, and the fixing block 541 is provided with a through hole penetrating the screw rod 542, and has a stopper for limiting the axial movement. The slider 521 is hinged with a first connecting rod 522 and a second connecting rod 523 in sequence. The free end of the second connecting rod 523 is provided with a wedge-shaped support block 524 for abutting against the rotating body component 10. The wedge-shaped support block 524 can be made of soft material so as not to cause damage to the rotating body component 10 when clamping and positioning it. It also has the function of anti-skid and improving elastic clamping force. The first connecting rod 522 and the second connecting rod 523 can rotate around their hinged positions respectively. After the detection is completed, they can be folded and stored in the centrifugal direction. When used, they can form a support structure in the centripetal direction. The structure is simple and easy to use. Furthermore, one end of the first connecting rod 522 hinged with the slider 521 is provided with a first rotation limiter 5221. The first rotation limiter 5221 cooperates with the top surface of the I-shaped slider 521 to limit the first connecting rod 522 from continuing to rotate. A second rotation limiting portion 5231 is provided at one end of the second connecting rod 523 hinged to the first connecting rod 522, and the second rotation limiting portion 5231 cooperates with the side surface of the first connecting rod 522 to limit the second connecting rod 523 from continuing to rotate. It should be noted that the first rotation limiting portion 5221 and the second rotation limiting portion 5231 are both located on the side close to the positioning hole 511, and after the first connecting rod 522 and the second connecting rod 523 are deployed in place toward the positioning hole 511, they are locked by the reset latch, and at this time, the two can form a cantilever beam support structure.

[0054] like Figure 4 As shown, the fixture 3 may include a first fixture for clamping the stereo microscope 41, the first fixture includes a first quick-change joint 313 connected to the manipulator 2, the first quick-change joint 313 is connected to a lens frame 311 through a position adjustment mechanism 312, the position adjustment mechanism 312 and the lens frame 311 are connected through a connecting rod and locked by a nut, the lens frame 311 is used to fix the stereo microscope 41, the plugging direction of the first quick-change joint 313 (including a male head and a female head) is parallel to the axial direction of the stereo microscope 41, and the purpose of replacing the stereo microscope 41 is achieved by disassembling the male head or the female head. The position of the lens frame 311 can be adjusted by the position adjustment mechanism 312, and then the focus of the stereo microscope 41 can be adjusted.

[0055] like Figure 5 As shown, the clamp 3 may include a second clamp for clamping the spectral probe 42, the second clamp includes a second quick-change connector 323 connected to the manipulator 2, the second quick-change connector 323 is connected to the probe holder 321 through a connecting block 322, the connecting block 322 and the probe holder 321 are connected by another connecting rod and locked by another nut, the probe holder 321 is used to fix the spectral probe 42, and the plug-in direction of the second quick-change connector 323 is parallel to the axial direction of the spectral probe 42.

[0056] The surface state fine detection system of the rotating body component 10 of the present invention can be applied in an assembled manner, and the specific application method is as follows:

[0057] 1. Unboxing

[0058] The system's supporting platform 1 and manipulator 2, manipulator 2 and detection probe 4, manipulator 2 and controller, detection probe 4 and light source and controller all adopt quick-release connection structures to facilitate rapid disassembly and integration of the system; special earthquake-resistant packaging boxes are designed for the disassembled components, and contoured grooves are opened in the packaging boxes for the structures of each component, which improves the protection performance of the system in complex transportation environments.

[0059] 2. Assembly of Robot 2

[0060] After moving the carrying platform 1 to the test area, fix the casters. Take out the components of the manipulator 2 in the box, and place the manipulator controller 9 and other components on the designated installation position of the lower support plate; place the manipulator 2 on the upper support plate, and drive the positioning pins into the installation holes; fold open the external support platform 7, and place the microscope system controller 8, industrial computer, etc. on the external support platform 7; connect the power line and communication line of the manipulator 2.

[0061] 3. Testing equipment assembly

[0062] Place the light source, spectrometer, controller, etc. of the detection equipment on the designated installation positions of the lower support plate; connect the power lines, optical fibers, communication lines, etc. of each detection equipment. Connect the detection probe 4 to the corresponding clamp 3 and lock it, and connect the clamp 3 to the quick-change connector and lock it.

[0063] 4. Joint test of testing equipment and robot 2 software

[0064] Microscopic morphology detection: Select an ultra-depth-of-field stereo microscope 41 according to the detection requirements, connect and tighten the male and female heads of the quick-change connector, turn on the power of the manipulator 2 and the stereo microscope 41, and perform a motion status check of the manipulator 2, a basic parameter check of the stereo microscope 41, a basic software function check, and a light source check.

[0065] 5. Assembly of the container 5

[0066] Select the holder 5 for testing the hemispherical shell, align the mounting holes and fix them with screws.

[0067] 6. Hemispherical shell placement

[0068] Place the hemispherical shell into the positioning hole 511 of the receiving seat 5 to ensure that it is stable.

[0069] 7. Zero point positioning

[0070] By operating the control panel or moving the manipulator 2 in the drag mode, the axis of the detection probe 4 is made to coincide with the axis of the holding seat 5, and there is no interference with the space of the hemispherical shell, and the zero time point is set. Then the manipulator 2 is controlled to drive the detection probe 4 to move in the vertical direction until the focal plane of the detection probe 4 coincides with the highest or lowest point on the axis of the hemispherical shell, and the coordinate zero point of the hemispherical shell is calculated.

[0071] 8. Surface condition detection

[0072] Enter the site to be tested (such as Figure 6 The system plans the moving path by itself.

[0073] Surface state detection: The detection probe 4 uses a stereo microscope 41, selects a magnification of 50X, and brings the lens of the stereo microscope 41 close to the surface of the hemispherical shell for detection, focuses, selects a clear field of view, and takes pictures and saves them.

[0074] Oxide film thickness detection: The detection probe 4 uses a spectrum probe 42, which is aimed at the surface of the hemispherical shell. The distance between the spectrum probe 42 and the hemispherical shell is adjusted between 1 and 5 mm. The change of the original spectrum intensity in the software is observed. When the spectrum intensity reaches the strongest, the reflection spectrum is obtained to obtain an obvious interference peak.

[0075] IX. Data Processing and Information Fusion

[0076] Confirm that the obtained test information meets the test requirements and process the data. Figure 7 As shown, the reflection spectrum interference diagram of the outer surface of the hemispherical shell is as follows Figure 8 shown.

[0077] Calculation of oxide film thickness:

[0078] a) If there is only one trough in the reflection spectrum curve within the measurement range, then according to the wavelength λ1 corresponding to the trough, the oxide film thickness d = λ1 / 4n can be obtained;

[0079] b) If there is only one peak in the reflection spectrum curve within the measurement range, then according to the wavelength λ2 corresponding to the trough, the oxide film thickness d = λ2 / 2n can be obtained;

[0080] c) If there are more than two extreme points (such as point m and point m-1) in the reflection spectrum curve within the measurement range, and the corresponding wavelengths are λ3 and λ4, the order m is calculated according to formula (1) and rounded, and then the film thickness is calculated by formula (2) or formula (3):

[0081] m=λ3 / (λ3-λ4) (1)

[0082] d=mλ3 / 4n (2)

[0083] d=(m-1)λ4 / 4n (3)

[0084] Where: λ3, λ4: wavelengths corresponding to point m and point m-1, nm;

[0085] n: standard refractive index of the oxide film being measured;

[0086] m: the order corresponding to the extreme point on the spectrum curve;

[0087] d: thickness of oxide film, nm.

[0088] 10. Remove the hemispherical shell

[0089] After the detection is completed, the robot arm 2 is stored and the hemispherical shell is removed.

[0090] 11. Shutdown

[0091] Turn off the detection equipment control software, light source, robot 2 control software, controller power, and system power in sequence.

[0092] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A method for fine detection of the surface state of a rotating component, based on a system for fine detection of the surface state of a rotating component, characterized in that: The surface state fine detection system of the rotating body component includes a bearing platform, a holding seat and a manipulator arranged on the bearing platform, the holding seat is used to place the rotating body component, and the holding seat is connected to a rotation drive mechanism, the rotation drive mechanism is used to drive the rotating body component to rotate along the central axis of the rotating body component, and the manipulator holds a detection probe for performing surface state detection on the rotating body component through a clamp; it includes a manipulator controller and a microscopic system controller, the manipulator controller is used to control the movement of the manipulator, and the microscopic system controller is used to control the detection probe, and perform imaging display and related operations; The method for fine detection of the surface state of the rotating body component comprises: installing a detection probe on a manipulator, moving the manipulator so that the axis of the detection probe coincides with the axis of the containing seat, at which time the spatial position coordinates and posture of the manipulator are set to the zero time point, avoiding spatial interference with the rotating body component at the zero time point, and the zero time point is the spatial point that the manipulator must first reach before each detection; Placing the rotating body component on the placing seat, and ensuring that the axis of the rotating body component coincides with the axis of the placing seat; Move the manipulator up and down until the focal plane of the detection probe coincides with the highest or lowest point on the axis of the rotating component. According to different rotating components, different coincidence methods are used to obtain the coincidence point. The position of the rotating component is fine-tuned according to the detection parameters to ensure that the three axes of the rotating component, the holding seat, and the axis of the detection probe are aligned. The coincidence point is set as a feature point, and the spatial position coordinates of the reference point of the rotating component relative to the manipulator coordinate system are calculated according to the characteristics of the rotating component, and the reference point is set as the coordinate zero point of the rotating component. Inputting a location to be inspected and planning a moving path to inspect the surface condition of the rotating component; Confirm that the test information obtained meets the test requirements and process the data; The rotation drive mechanism is used to drive the holding seat to rotate, and the holding seat drives the rotating body component to rotate along the central axis of the rotating body component, and the movement path of the detection probe driven by the manipulator is limited to the plane where the central axis is located; Based on the characteristics of the rotating component, the coordinate system adopts polar coordinates. After determining the spatial position coordinates of the zero point of the rotating component relative to the manipulator coordinate system, any detection point on the component surface is expressed as (r, θ, φ), wherein r is the straight-line distance from the detection point to the zero point, θ is the angle between the line connecting the detection point to the zero point and the horizontal plane, and φ is the angle between the projection of the line connecting the detection point to the zero point on the horizontal plane and the specified direction of the horizontal plane. After inputting the intended detection site, φ is controlled by the rotation drive mechanism, and the manipulator performs two-dimensional motion in a single plane. The two-dimensional motion includes position positioning and end deflection, and the end deflection is controlled to ensure that the focal plane of the detection probe coincides with the section of the detection point.

2. The method for finely detecting the surface state of a rotating component according to claim 1, characterized in that: After completing one surface condition inspection, the inspection probe is replaced to perform the next surface condition inspection. After each replacement of the inspection probe, the coordinate zero point is calculated according to the size of the inspection probe and its fixture.

3. The method for finely detecting the surface state of a rotating component according to claim 2, characterized in that: The surface state detection includes surface morphology detection. The detection probe adopts a stereo microscope, and the magnification is selected to be 20-500X. The lens of the stereo microscope is placed close to the surface of the rotating body component for detection, and the image is photographed and saved.

4. The method for finely detecting the surface state of a rotating component according to claim 2, characterized in that: The surface state detection includes the detection of the oxide film thickness. The detection probe uses a spectral probe. The spectral probe is aimed at the surface of the rotating body component. The distance between the spectral probe and the rotating body component is adjusted between 1 and 5 mm. The change of the original spectrum intensity in the software is observed. When the spectrum intensity reaches the strongest, the reflection spectrum is obtained to obtain an obvious interference peak.

5. The method for finely detecting the surface state of a rotating component according to any one of claims 1 to 4, characterized in that: The placing seat includes a placing plate and a plurality of clamping assemblies, a positioning hole is arranged in the middle of the placing plate, and the clamping assembly includes a guide rail arranged radially with the positioning hole as the center, a clamping claw slidably arranged on the guide rail, and a linear drive mechanism driving the clamping claw to move.

6. The method for finely detecting the surface state of a rotating component according to claim 5, characterized in that: The clamping claw includes a slider slidably arranged on the guide rail, and a first connecting rod and a second connecting rod are hinged on the slider in sequence, and a wedge-shaped support block for abutting the rotating body component is provided at the free end of the second connecting rod, a first rotation limiting portion is provided at the end of the first connecting rod hinged to the slider, and a second rotation limiting portion is provided at the end of the second connecting rod hinged to the first connecting rod, the first rotation limiting portion and the second rotation limiting portion are both located on a side close to the positioning hole, and the first connecting rod and the second connecting rod can form a cantilever beam support structure.

7. The method for finely detecting the surface state of a rotating component according to claim 5, characterized in that: The clamp includes a first clamp for clamping a stereo microscope, the first clamp includes a first quick-change joint connected to the manipulator, the first quick-change joint is connected to a lens holder through a position adjustment mechanism, the lens holder is used to fix the stereo microscope, and the plug-in direction of the first quick-change joint is parallel to the axial direction of the stereo microscope.

8. The method for finely detecting the surface state of a rotating component according to claim 5, characterized in that: The clamp includes a second clamp for clamping the spectrum probe, the second clamp includes a second quick-change connector connected to the manipulator, the second quick-change connector is connected to a probe holder via a connecting block, the probe holder is used to fix the spectrum probe, and the plugging direction of the second quick-change connector is parallel to the axial direction of the spectrum probe.

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