Laser welding method for components containing flammable metal target materials

Abstract

The present invention relates to a laser welding method for a target assembly containing an inflammable metal, the laser welding method comprising the following steps: (1) focusing a laser on a 0.4-0.6 mm depth of a welding seam of the target assembly containing an inflammable metal for a first bombardment to form a water drop-shaped hole; (2) the water drop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a melting flat treatment to obtain a welding hole; (3) a welding wire is used to melt and fill the welding hole obtained in step (2) until the welding wire is higher than the edge of the welding hole, and then a polishing flat treatment is performed to obtain the target assembly containing an inflammable metal. The present invention places a laser focus point inside a target assembly for high-power bombardment, thereby discharging fine bubbles and melting flat the wrinkles of the molten metal, thereby obtaining a flat and smooth welding hole, which is beneficial to improving the welding strength and sealing of the welding joint.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor technology and relates to a laser welding method, in particular to a laser welding method containing a flammable metal target component. Background Art

[0002] In the processing and manufacturing of semiconductor target components, it is often necessary to combine and weld components containing flammable metals such as zinc, magnesium or aluminum. When the target component has a thin wall (thickness within 1 mm) or a large size, vacuum or shielding gas welding cannot be used. Laser welding or argon arc welding is usually used to weld the target component.

[0003] CN 113909642A provides a method for connecting an aluminum rotating target, wherein the aluminum rotating target comprises an aluminum tube and an aluminum alloy flange end, wherein both ends of the aluminum tube are provided with internal threads, and the aluminum alloy flange end is provided with external threads, wherein the aluminum tube and the aluminum alloy flange end are threadedly connected through the internal threads and the external threads, and the connection between the aluminum tube and the aluminum alloy flange end is subjected to argon arc welding to obtain the aluminum rotating target. However, the invention uses argon arc welding to weld the connection of the components, which will cause oxidation of the aluminum components and discoloration of the appearance, thereby reducing the welding strength and failing to meet the welding requirements.

[0004] CN 107953084A discloses a method for manufacturing a high-purity aluminum rotating target material, comprising the steps of: selecting a high-purity aluminum round ingot, subjecting it to hot perforation and extrusion treatment to obtain a high-purity aluminum tube blank; then performing straightening and annealing treatment; selecting an aluminum alloy as the target end material, subjecting it to surface hard oxidation treatment to obtain an aluminum alloy end; welding the high-purity aluminum tube blank aluminum alloy end to obtain a high-purity aluminum rotating target material. The high-purity aluminum rotating target material prepared by the invention has a fine and uniform microstructure and few internal defects, but when laser welding is used to suppress the gasification of flammable metals to form sputtering, the power will be reduced, resulting in a too shallow melting point and being unable to withstand a large strength.

[0005] CN 107127451A discloses a low-energy laser welding process for power batteries, including the following process steps: a. roughening the surface of the welding area of ​​the metal part with a laser marking machine; b. placing the metal part on the metal shell of the power battery, and adjusting the laser beam focus position of the laser welding head; c. the laser welding head works, emitting laser on the surface of the welding area of ​​the metal part, performing laser welding, and spraying combustion-supporting oxygen on the welding point of the laser welding head in real time; d. welding the metal part on the metal shell of the power battery, and completing the laser welding. When the invention uses laser welding, placing the laser focus on the surface of the material will further reduce the welding strength.

[0006] In view of the shortcomings of the existing technology, it is urgently necessary to provide a welding method with high welding strength and good sealing at the joint of the target assembly. Summary of the invention

[0007] The object of the present invention is to provide a laser welding method for a component containing a flammable metal target material, which uses a high-power laser to weld the component containing the flammable metal target material, and at the same time sets the laser focus point inside the welding material, so that the welding joint of the component containing the flammable metal target material has higher strength and sealing.

[0008] In order to achieve the purpose of the invention, the present invention adopts the following technical solutions:

[0009] The present invention provides a laser welding method for a component containing a flammable metal target material, the laser welding method comprising the following steps:

[0010] (1) Focusing the laser on the weld seam of the flammable metal target assembly at a depth of 0.4-0.6 mm for the first bombardment to form a teardrop-shaped hole;

[0011] (2) The teardrop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a melting treatment to obtain a welding hole;

[0012] (3) Using a molten welding wire to fill the welding hole obtained in step (2) until the welding wire is higher than the edge of the welding hole, and then performing a flattening treatment to obtain the flammable metal target assembly.

[0013] The laser welding method provided by the present invention places the laser focus point inside the target material component and bombards the water droplet-shaped holes multiple times, thereby discharging small bubbles formed by high-power dissipated energy and flattening the wrinkles formed by the molten metal, thereby obtaining a flat and smooth welding hole with no oxide layer on the surface, which significantly improves the welding strength and sealing of the welding joint.

[0014] The teardrop-shaped hole in step (1) is a hole with a large interior and a small mouth.

[0015] In step (1), part of the molten metal is formed at the bottom of the water droplet-shaped hole.

[0016] The depth of the laser focused on the welding seam is 0.4-0.6 mm, for example, it can be 0.4 mm, 0.45 mm, 0.5 mm, 0.55 mm or 0.6 mm, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0017] When the laser focus is set on the surface of a target component containing a flammable metal, the sputtered pit is shallow; while the laser focus is pre-buried and the initial groove is located below the surface. The focus is larger, but the higher power can melt the flammable metal and sputter to form a deeper pit. At the bottom of the pit, i.e. the focus, multiple bombardments and subsequent treatments are performed to obtain a smooth welding hole without an oxide layer.

[0018] Preferably, the flammable metal target assembly in step (1) comprises a flammable metal target assembly or a flammable metal alloy target assembly.

[0019] Preferably, the flammable metal in the flammable metal target assembly includes any one of zinc, magnesium or aluminum.

[0020] Preferably, the combustible metal alloy in the combustible metal alloy target assembly includes a combination of at least two of magnesium, titanium, tin or zinc. Typical but non-limiting combinations include a combination of magnesium and titanium, a combination of titanium, tin and zinc, or a combination of magnesium, titanium, tin and zinc.

[0021] Preferably, the laser melting power of the flammable metal is 30-60 W, for example, 30 W, 35 W, 40 W, 50 W or 60 W, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0022] Preferably, the laser melting power of the flammable metal alloy is 30-60 W, for example, 30 W, 35 W, 40 W, 50 W or 60 W, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0023] Preferably, the power of the first bombardment in step (1) is 390-410% of the laser melting power of the flammable metal alloy, for example, it can be 390%, 395%, 400%, 405% or 410%, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0024] Preferably, the first bombardment in step (1) is performed in a protective atmosphere, and the protective atmosphere comprises argon.

[0025] During the first bombardment, if severe sputtering occurs, protective gas may be added to suppress sputtering caused by metal vaporization.

[0026] The power of the first bombardment adopts a relatively high power, specifically set to 390-410% of the laser melting power of the flammable metal alloy, because high-power welding can obtain a deeper welding groove, the cross-section of the welding groove is circular or triangular, and the top is slightly shrunk due to the pores, which can increase the melting area and strength of the welding material after welding is completed.

[0027] Preferably, the depth of the teardrop-shaped hole in step (1) is 1.8-2.2 mm, for example, 1.8 mm, 1.9 mm, 2 mm, 2.1 mm or 2.2 mm, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0028] Preferably, the power of the second bombardment in step (2) is 73-77% of the power of the first bombardment, for example, it can be 73%, 74%, 75%, 76% or 77%, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0029] Preferably, the power of the third bombardment in step (2) is 48-52% of the power of the first bombardment, for example, it can be 48%, 49%, 50%, 51% or 52%, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0030] Preferably, the power of the fourth bombardment in step (2) is 99-101% of the laser melting power of the flammable metal alloy, for example, it can be 99%, 99.5%, 100%, 100.5% or 101%, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0031] Preferably, the power of the flattening treatment in step (2) is 68-72% of the laser melting power of the flammable metal alloy, for example, it can be 68%, 69%, 70%, 71% or 72%, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0032] After forming a teardrop-shaped hole under the first high-power bombardment, the present invention performs a second bombardment, a third bombardment, a fourth bombardment and a melting treatment with successively decreasing powers on the teardrop-shaped hole, so that the bubbles formed under the high-power bombardment can be broken and discharged from the teardrop-shaped hole, and at the same time, the wrinkles of part of the molten metal formed at the bottom of the hole due to residual heat can be melted and flattened, and finally a smooth welding hole that is beneficial to improving the welding strength can be obtained.

[0033] Preferably, the material of the welding wire in step (3) is the same as the flammable metal contained in the flammable metal target assembly.

[0034] According to the welding strength requirements of the welding joint, welding wire of corresponding material can be selected for molten filling.

[0035] Preferably, the melt filling method in step (3) includes stacked melt filling.

[0036] Preferably, the welding wire in step (3) is 0.5-2 mm higher than the edge of the welding hole, for example, it can be 0.5 mm, 0.8 mm, 1 mm, 1.5 mm or 2 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0037] Preferably, the polishing step in step (3) includes: trimming the protrusion higher than the edge of the welding hole until the welding wire is flush with the edge of the welding hole.

[0038] As a preferred technical solution of the laser welding method described in the present invention, the laser welding method comprises the following steps:

[0039] (1) Focusing the laser on the weld seam of the flammable metal target component at a depth of 0.4-0.6 mm, the first bombardment is performed in a protective atmosphere to form a teardrop-shaped hole with a depth of 1.8-2.2 mm;

[0040] The flammable metal target assembly includes a flammable metal target assembly or a flammable metal alloy target assembly; the flammable metal in the flammable metal target assembly includes any one of zinc, magnesium or aluminum; the flammable metal alloy in the flammable metal alloy target assembly includes a combination of at least two of magnesium, titanium, tin or zinc; the laser melting power of the flammable metal is 30-60W; the laser melting power of the flammable metal alloy is 30-60W; the power of the first bombardment is 390-410% of the laser melting power of the flammable metal alloy;

[0041] (2) The teardrop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a melting treatment to obtain a welding hole;

[0042] The power of the second bombardment is 73-77% of the power of the first bombardment; the power of the third bombardment is 48-52% of the power of the first bombardment; the power of the fourth bombardment is 99-101% of the laser melting power of the flammable metal alloy; the power of the flattening treatment is 68-72% of the laser melting power of the flammable metal alloy;

[0043] (3) Using stacked welding wires to melt fill the welding hole obtained in step (2) until the welding wire is 0.5-2 mm higher than the edge of the welding hole, and then trimming the protrusion above the edge of the welding hole until the welding wire is flush with the edge of the welding hole, thereby obtaining the flammable metal target assembly.

[0044] Compared with the prior art, the present invention has the following beneficial effects:

[0045] The laser welding method provided by the present invention places the laser focus point inside the target material component and simultaneously performs multiple high-power bombardments, thereby discharging fine bubbles formed by high-power dissipated energy and flattening wrinkles formed by molten metal, thereby obtaining a flat and smooth welding hole with no oxide layer on the surface, which is beneficial to improving the welding strength and sealing of the welding joint. The welding strength can reach 302MPa and the sealing is good, which can meet the use requirements of the target material component. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 is a schematic diagram of a magnesium-titanium alloy target assembly in the laser welding method provided in Example 1 of the present invention;

[0047] Figure 2 is a schematic diagram of a magnesium-titanium alloy target assembly after the first bombardment in the laser welding method provided in Example 1 of the present invention;

[0048] Figure 3 is a schematic diagram of a magnesium-titanium alloy target assembly after flattening treatment in the laser welding method provided in Example 1 of the present invention;

[0049] Figure 4 It is a schematic diagram of a magnesium-titanium alloy target assembly after the welding wire is melted and filled in the laser welding method provided in Example 1 of the present invention;

[0050] Figure 5 is a schematic diagram of a magnesium-titanium alloy target assembly when the welding wire is higher than the edge of the welding hole in the laser welding method provided in Example 1 of the present invention;

[0051] Figure 6 It is a schematic diagram of the magnesium-titanium alloy target assembly after polishing in the laser welding method provided in Example 1 of the present invention. DETAILED DESCRIPTION

[0052] The technical solution of the present invention is further described below by specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0053] Example 1

[0054] This embodiment provides a laser welding method for a magnesium-titanium alloy target assembly. The schematic diagram of the magnesium-titanium alloy target assembly is shown in FIG. Figure 1 As shown, the laser welding method comprises the following steps:

[0055] (1) Focus the laser on the 0.5 mm depth of the weld seam of the magnesium-titanium alloy target assembly and perform the first bombardment in argon gas to form a teardrop-shaped hole with a depth of 2 mm, such as Figure 2 As shown;

[0056] The laser melting power of the magnesium-titanium alloy is 60W; the power of the first bombardment is 400% of the laser melting power of the magnesium-titanium alloy;

[0057] (2) The teardrop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a flattening treatment to obtain a welding hole, such as Figure 3 As shown;

[0058] The power of the second bombardment is 75% of the power of the first bombardment; the power of the third bombardment is 50% of the power of the first bombardment; the power of the fourth bombardment is 100% of the laser melting power of the magnesium-titanium alloy; the power of the flattening treatment is 70% of the laser melting power of the magnesium-titanium alloy;

[0059] (3) Using magnesium-titanium alloy welding wire to stack and melt the welding hole obtained in step (2), such as Figure 4 As shown, the stacked molten filling is until the welding wire is 1mm higher than the edge of the welding hole. Figure 5 Then trim the protrusion above the edge of the welding hole until the welding wire is flush with the edge of the welding hole, as shown in Figure 6 As shown, the magnesium-titanium alloy target assembly is obtained.

[0060] Example 2

[0061] This embodiment provides a laser welding method for a magnesium-titanium alloy target assembly, the laser welding method comprising the following steps:

[0062] (1) The laser was focused at a depth of 0.55 mm on the weld seam of the magnesium-titanium alloy target assembly, and the first bombardment was performed in argon gas to form a teardrop-shaped hole with a depth of 2.1 mm;

[0063] The laser melting power of the magnesium-titanium alloy is 60W; the power of the first bombardment is 405% of the laser melting power of the magnesium-titanium alloy;

[0064] (2) The teardrop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a melting treatment to obtain a welding hole;

[0065] The power of the second bombardment is 76% of the power of the first bombardment; the power of the third bombardment is 51% of the power of the first bombardment; the power of the fourth bombardment is 100.5% of the laser melting power of the magnesium-titanium alloy; the power of the flattening treatment is 71% of the laser melting power of the magnesium-titanium alloy;

[0066] (3) Using a magnesium-titanium alloy welding wire stack to melt fill the welding hole obtained in step (2) until the welding wire is 0.8 mm higher than the edge of the welding hole, and then trimming the protrusion above the edge of the welding hole until the welding wire is flush with the edge of the welding hole, thereby obtaining the magnesium-titanium alloy target assembly.

[0067] Example 3

[0068] This embodiment provides a laser welding method for a magnesium-titanium alloy target assembly, the laser welding method comprising the following steps:

[0069] (1) The laser was focused at a depth of 0.45 mm on the weld seam of the magnesium-titanium alloy target assembly, and the first bombardment was performed in argon gas to form a teardrop-shaped hole with a depth of 1.9 mm;

[0070] The laser melting power of the magnesium-titanium alloy is 60W; the power of the first bombardment is 395% of the laser melting power of the magnesium-titanium alloy;

[0071] (2) The teardrop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a melting treatment to obtain a welding hole;

[0072] The power of the second bombardment is 74% of the power of the first bombardment; the power of the third bombardment is 49% of the power of the first bombardment; the power of the fourth bombardment is 99.5% of the laser melting power of the magnesium-titanium alloy; the power of the flattening treatment is 69% of the laser melting power of the magnesium-titanium alloy;

[0073] (3) Using magnesium-titanium alloy welding wire stacking and melting to fill the welding hole obtained in step (2) until the welding wire is 1.5 mm higher than the edge of the welding hole, and then trimming the protrusion higher than the edge of the welding hole until the welding wire is flush with the edge of the welding hole, to obtain the magnesium-titanium alloy target assembly.

[0074] Example 4

[0075] This embodiment provides a laser welding method for a magnesium-titanium alloy target assembly, the laser welding method comprising the following steps:

[0076] (1) The laser was focused at a depth of 0.6 mm on the weld seam of the magnesium-titanium alloy target assembly and the first bombardment was performed in argon gas to form a teardrop-shaped hole with a depth of 2.2 mm;

[0077] The laser melting power of the magnesium-titanium alloy is 60W; the power of the first bombardment is 410% of the laser melting power of the magnesium-titanium alloy;

[0078] (2) The teardrop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a melting treatment to obtain a welding hole;

[0079] The power of the second bombardment is 77% of the power of the first bombardment; the power of the third bombardment is 52% of the power of the first bombardment; the power of the fourth bombardment is 101% of the laser melting power of the magnesium-titanium alloy; the power of the flattening treatment is 72% of the laser melting power of the magnesium-titanium alloy;

[0080] (3) Using magnesium-titanium alloy welding wire stacking and melting to fill the welding hole obtained in step (2) until the welding wire is 0.5 mm higher than the edge of the welding hole, and then trimming the protrusion higher than the edge of the welding hole until the welding wire is flush with the edge of the welding hole, to obtain the magnesium-titanium alloy target assembly.

[0081] Example 5

[0082] This embodiment provides a laser welding method for a magnesium-titanium alloy target assembly, the laser welding method comprising the following steps:

[0083] (1) The laser was focused at a depth of 0.4 mm on the weld seam of the magnesium-titanium alloy target assembly, and the first bombardment was performed in argon gas to form a teardrop-shaped hole with a depth of 1.8 mm;

[0084] The laser melting power of the magnesium-titanium alloy is 60W; the power of the first bombardment is 390% of the laser melting power of the magnesium-titanium alloy;

[0085] (2) The teardrop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a melting treatment to obtain a welding hole;

[0086] The power of the second bombardment is 73% of the power of the first bombardment; the power of the third bombardment is 48% of the power of the first bombardment; the power of the fourth bombardment is 99% of the laser melting power of the magnesium-titanium alloy; the power of the flattening treatment is 68% of the laser melting power of the magnesium-titanium alloy;

[0087] (3) Using magnesium-titanium alloy welding wire stacking and melting to fill the welding hole obtained in step (2) until the welding wire is 2 mm higher than the edge of the welding hole, and then trimming the protrusion above the edge of the welding hole until the welding wire is flush with the edge of the welding hole, thereby obtaining the magnesium-titanium alloy target assembly.

[0088] Example 6

[0089] This embodiment provides a laser welding method for a magnesium-titanium alloy target assembly, which differs from Embodiment 1 in that the power of the first bombardment in step (1) is adjusted to 350% of the laser melting power of the magnesium-titanium alloy, and the rest is the same as Embodiment 1.

[0090] Example 7

[0091] This embodiment provides a laser welding method for a magnesium-titanium alloy target assembly, which differs from Embodiment 1 in that the power of the first bombardment in step (1) is adjusted to 450% of the laser melting power of the magnesium-titanium alloy, and the rest is the same as Embodiment 1.

[0092] Example 8

[0093] This embodiment provides a laser welding method for a tin-zinc alloy target assembly. The difference from Embodiment 1 is that the magnesium-titanium alloy target assembly is replaced with a tin-zinc alloy target assembly, the laser melting power of the tin-zinc alloy is adjusted to 50 W, and the rest is the same as Embodiment 1.

[0094] Example 9

[0095] This embodiment provides a laser welding method for a magnesium target assembly. The difference from Embodiment 1 is that the magnesium-titanium alloy target assembly is replaced with a magnesium target assembly, the laser melting power of the magnesium is adjusted to 30 W, and the rest is the same as Embodiment 1.

[0096] Comparative Example 1

[0097] This comparative example provides a laser welding method for a magnesium-titanium alloy target assembly, which is different from Example 1 in that, except for focusing the laser in step (1) at a depth of 0.2 mm of the weld seam of the magnesium-titanium alloy target assembly, the rest is the same as Example 1.

[0098] Comparative Example 2

[0099] This comparative example provides a laser welding method for a magnesium-titanium alloy target assembly, which is different from Example 1 in that, except for focusing the laser in step (1) at a depth of 0.8 mm of the weld seam of the magnesium-titanium alloy target assembly, the rest is the same as Example 1.

[0100] Comparative Example 3

[0101] This comparative example provides a laser welding method for a magnesium-titanium alloy target assembly, which differs from Example 1 in that, except for adjusting the power of the first bombardment in step (1) to 100% of the laser melting power of the magnesium-titanium alloy, there is no step (2) of the second bombardment, the third bombardment, and the fourth bombardment, and the rest is the same as Example 1.

[0102] Comparative Example 4

[0103] The present comparative example provides a laser welding method for a magnesium-titanium alloy target assembly, which differs from Example 1 in that step (2) and step (3) are combined and adjusted as follows: the teardrop-shaped hole obtained in step (1) is filled with magnesium-titanium alloy welding wire stacking, a second bombardment, welding wire stacking filling, a third bombardment, welding wire stacking filling and a fourth bombardment until the welding wire is 1 mm higher than the edge of the welding hole, and then the protrusion higher than the edge of the welding hole is trimmed until the welding wire is flush with the edge of the welding hole to obtain the magnesium-titanium alloy target assembly, and the rest is the same as Example 1.

[0104] Comparative Example 5

[0105] This comparative example provides a laser welding method for a magnesium-titanium alloy target assembly, which differs from Example 1 in that the flattening treatment described in step (2) is omitted, and the rest is the same as Example 1.

[0106] Comparative Example 6

[0107] This comparative example provides a welding method for a magnesium-titanium alloy target assembly, wherein the welding method uses 1600W argon arc welding to weld the magnesium-titanium alloy target assembly.

[0108] The welding methods provided in Examples 1-9 and Comparative Examples 1-6 were used to obtain an assembly containing a flammable metal target material, which was processed into two metal cylinders of the same material. Cylinder No. 1 had a diameter of 32 mm, a thickness of 15 mm, and a 12 mm through hole in the middle; Cylinder No. 2 had a diameter of 20 mm, a thickness of 10 mm, and a 2 mm chamfer was processed on the welding surface. The cylindrical surfaces were bonded together, and 2 mm grooves were formed on the upper and lower bonding surfaces. After filling, a sealing inspection was performed, and the sealing effect was divided into three levels: "good", "general" and "poor", and then a welding strength test was performed. The results are shown in Table 1.

[0109] Table 1

[0110] Welding strength (MPa) Sealing effect Example 1 302 good Example 2 242 good Example 3 226 good Example 4 176 generally Example 5 158 generally Example 6 126 Poor Example 7 118 Poor Example 8 372 good Example 9 368 good Comparative Example 1 132 Poor Comparative Example 2 158 generally Comparative Example 3 96 Poor Comparative Example 4 154 generally Comparative Example 5 102 Poor Comparative Example 6 Material splashes and welding is impossible -

[0111] It can be seen from Table 1 that by using the laser welding method provided by the present invention, the obtained flammable metal alloy target assembly has good welding strength and sealing performance;

[0112] By comparing Example 1 with Examples 6 and 7, it can be seen that the power of the first bombardment is too small or too large, which has an adverse effect on the welding strength and sealing of the subsequent target assembly; by comparing Example 1 with Examples 8 and 9, it can be seen that the welding strength and sealing can still be well guaranteed by using different types of flammable metal alloys for laser welding;

[0113] From the comparison between Example 1 and Comparative Examples 1 and 2, it can be seen that if the laser focus point is focused on a too small depth of the weld, the welding strength and sealing of the target assembly will be reduced; if the depth is too large, the effect cannot be guaranteed;

[0114] From the comparison between Example 1 and Comparative Example 3, it can be seen that when the laser melting power of the flammable metal alloy is used for bombardment, the lower power will further reduce the welding strength of the welding joint, and in the absence of multiple bombardments, the bubbles in the water drop-shaped holes cannot be completely discharged, and the metal wrinkles are difficult to smooth, thereby reducing the welding strength and sealing effect of the welding joint; from the comparison between Example 1 and Comparative Example 4, it can be seen that the method of filling solder and then bombarding cannot form a deeper welding pit. If the welding power of laser melting is used, the welding strength is too low. If the power is increased, the welding pit surface will be rough, and more pores will be generated, thereby affecting the sealing; from the comparison between Example 1 and Comparative Example 5, it can be seen that without the flattening treatment, the surface of the obtained welding hole is rough and uneven, which will cause the welding strength to be significantly reduced; from the comparison between Example 1 and Comparative Example 6, it can be seen that the use of argon arc welding of flammable metal alloy target components will cause splashing on the surface of the target component, and the welding requirements cannot be met.

[0115] In summary, the laser welding method provided by the present invention places the laser focus point inside the target material assembly and simultaneously performs multiple high-power bombardments, thereby discharging fine bubbles formed by high-power dissipated energy and flattening the wrinkles formed by the molten metal, thereby obtaining a flat and smooth welding hole with no oxide layer on the surface, which is beneficial to improving the welding strength and sealing of the welding joint. The welding strength can reach 302MPa, and the sealing is good, which can meet the use requirements of the target material assembly.

[0116] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention are within the protection scope and disclosure scope of the present invention.

Claims

1. A laser welding method for a component containing a flammable metal target, characterized in that: The laser welding method comprises the following steps: (1) focusing the laser at a depth of 0.4-0.6 mm of the weld seam of the flammable metal target assembly to perform a first bombardment to form a teardrop-shaped hole; the power of the first bombardment is 390-410% of the laser melting power of the flammable metal alloy; (2) The teardrop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a melting treatment to obtain a welding hole; (3) Using a molten welding wire to fill the welding hole obtained in step (2) until the welding wire is higher than the edge of the welding hole, and then performing a flattening treatment to obtain the flammable metal target assembly.

2. The laser welding method according to claim 1, characterized in that: The flammable metal target assembly in step (1) includes a flammable metal target assembly or a flammable metal alloy target assembly.

3. The laser welding method according to claim 2, characterized in that: The flammable metal in the flammable metal target assembly includes any one of zinc, magnesium or aluminum.

4. The laser welding method according to claim 2, characterized in that: The combustible metal alloy in the combustible metal alloy target assembly includes a combination of at least two of magnesium, titanium, tin or zinc.

5. The laser welding method according to claim 3, characterized in that: The laser melting power of the flammable metal is 30-60W.

6. The laser welding method according to claim 4, characterized in that: The laser melting power of the flammable metal alloy is 30-60W.

7. The laser welding method according to claim 1, characterized in that: Step (1) The first bombardment is performed in a protective atmosphere, which includes argon.

8. The laser welding method according to claim 1, characterized in that: The depth of the water drop-shaped hole in step (1) is 1.8-2.2 mm.

9. The laser welding method according to claim 1, characterized in that: Step (2) The power of the second bombardment is 73-77% of the power of the first bombardment.

10. The laser welding method according to claim 1, characterized in that The power of the third bombardment in step (2) is 48-52% of the power of the first bombardment.

11. The laser welding method according to claim 1, characterized in that The power of the fourth bombardment in step (2) is 99-101% of the laser melting power of the flammable metal alloy.

12. The laser welding method according to claim 1, characterized in that: The power of the flattening treatment in step (2) is 68-72% of the laser melting power of the flammable metal alloy.

13. The laser welding method according to claim 1, characterized in that: The material of the welding wire in step (3) is the same as the flammable metal contained in the flammable metal target assembly.

14. The laser welding method according to claim 1, characterized in that The melt filling method in step (3) includes stacked melt filling.

15. The laser welding method according to claim 1, characterized in that In step (3), the welding wire is 0.5-2 mm higher than the edge of the welding hole.

16. The laser welding method according to claim 1, characterized in that: The polishing step in step (3) includes: trimming the protrusion that is higher than the edge of the welding hole until the welding wire is flush with the edge of the welding hole.

17. The laser welding method according to claim 1, characterized in that: The laser welding method comprises the following steps: (1) Focusing the laser on the weld seam of the flammable metal target component at a depth of 0.4-0.6 mm, the first bombardment is performed in a protective atmosphere to form a teardrop-shaped hole with a depth of 1.8-2.2 mm; The flammable metal target assembly includes a flammable metal target assembly or a flammable metal alloy target assembly; the flammable metal in the flammable metal target assembly includes any one of zinc, magnesium or aluminum; the flammable metal alloy in the flammable metal alloy target assembly includes a combination of at least two of magnesium, titanium, tin or zinc; the laser melting power of the flammable metal is 30-60W; the laser melting power of the flammable metal alloy is 30-60W; the power of the first bombardment is 390-410% of the laser melting power of the flammable metal alloy; (2) The teardrop-shaped hole obtained in step (1) is subjected to a second bombardment, a third bombardment, a fourth bombardment and a melting treatment to obtain a welding hole; The power of the second bombardment is 73-77% of the power of the first bombardment; the power of the third bombardment is 48-52% of the power of the first bombardment; the power of the fourth bombardment is 99-101% of the laser melting power of the flammable metal alloy; the power of the flattening treatment is 68-72% of the laser melting power of the flammable metal alloy; (3) Using stacked welding wires to melt fill the welding hole obtained in step (2) until the welding wire is 0.5-2 mm higher than the edge of the welding hole, and then trimming the protrusion above the edge of the welding hole until the welding wire is flush with the edge of the welding hole, thereby obtaining the flammable metal target assembly.

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