A micro-plate pulsating heat pipe with a coupled one-way valve structure

Abstract

The present invention relates to the technical field of pulsating heat pipes, and particularly to a micro-plate pulsating heat pipe coupled with a check valve structure, which includes a bottom plate, a cover plate fixedly connected to the top of the bottom plate, a channel pipeline is provided on the bottom plate, the channel pipeline is communicated with a plurality of check valves, a working medium is filled in the channel pipeline, the check valve includes an accommodation cavity, the accommodation cavity is opened on the bottom plate, both the top and the bottom of the accommodation cavity are communicated with the channel pipeline, and a one-way flow structure is provided in the accommodation cavity. The present invention can achieve the purpose of strengthening the pressure imbalance in the pipeline and improving the starting performance.

Description

Technical Field

[0001] The present invention relates to the technical field of pulsating heat pipes, and in particular to a micro-plate pulsating heat pipe coupled with a check valve structure. Background Art

[0002] The miniaturization of electronic devices in terms of scale, the high integration, thinness and lightness, the complexity of 3D assembly structures, and the extremeness of physical fields and working environments have posed new challenges to traditional thermal management methods and technologies, and it is necessary to comprehensively consider the local heat dissipation of devices and the sensitivity of heat dissipation devices. Most of the existing heat dissipation devices are applied under high-power and high-temperature conditions, but there is little research on the heat dissipation of low-power local micro-spaces at the micro-scale of mobile devices. At the same time, the current solutions are single and lack new heat dissipation strategies. Currently, the common heat dissipation methods mainly include air cooling, water cooling, and heat dissipation device cooling. The heat dissipation capacity that air cooling can achieve is relatively limited, and additional fin space is required. The stability of water cooling is poor and it is not suitable for heat dissipation of electronic devices, and external pumping is required with low economy; therefore, the development of efficient heat dissipation devices is particularly important. The micro-pulsating heat pipe is a highly integrated heat pipe with a completely different working mechanism from traditional heat pipes. It has the advantages of simple structure, high thermal conductivity, and wide application scenarios, and has become one of the economical, effective and fast heat dissipation methods for local high heat fluxes.

[0003] The heat transfer of the micro-pulsating heat pipe mainly relies on the latent heat transfer of the gas-liquid phase change in the heat pipe pipeline and the sensible heat transfer of the oscillation movement of the liquid slug. The pipeline structure and working fluid properties of the pulsating heat pipe can significantly affect its heat transfer performance. However, the common pulsating heat pipe is a tubular pulsating heat pipe, but the tubular pulsating heat pipe has poor contact with the heating area, while the plate pulsating heat pipe can be closely attached to the heating area. Due to its small size, the micro-pulsating heat pipe often has problems such as difficult startup and oscillation stagnation. How to design and optimize the structure to directionally solve the limitations of the micro-pulsating heat pipe has become the main research direction. For this reason, the present invention proposes a micro-plate pulsating heat pipe coupled with a check valve structure. The research on the check valve micro-plate pulsating heat pipe provides a new method and idea for solving local space micro-heat dissipation and efficient space utilization. Summary of the Invention

[0004] The purpose of the present invention is to provide a micro-plate pulsating heat pipe coupled with a check valve structure to solve at least one of the above problems, and achieve the purpose of strengthening the pressure imbalance in the pipeline, improving the startup performance and heat transfer performance.

[0005] To achieve the above object, the present invention provides the following solution: A micro-plate pulsating heat pipe with a coupled one-way valve structure, including a bottom plate, a cover plate fixedly connected to the top of the bottom plate, a channel pipeline provided on the bottom plate, the channel pipeline communicating with a plurality of one-way valves, a working fluid filled in the channel pipeline, the one-way valve including a receiving cavity, the receiving cavity being opened on the bottom plate, both the top and the bottom of the receiving cavity communicating with the channel pipeline, and a one-way flow structure provided in the receiving cavity.

[0006] Preferably, the one-way flow structure includes:

[0007] Symmetrically arranged flow-around columns, the flow-around columns being fixedly connected to the bottom of the receiving cavity and located on both sides of the top opening of the receiving cavity;

[0008] Symmetrically arranged rectifying baffles, the two rectifying baffles being in a V-shaped structure, the rectifying baffles being located below the flow-around columns, and the rectifying baffles being fixedly connected to the bottom of the receiving cavity;

[0009] Symmetrically arranged side blocks, the side blocks being in a trapezoidal structure, the side blocks being fixedly connected to the bottom of the receiving cavity, the side blocks being located below the rectifying baffles, an intermediate block being provided between the two side blocks, the intermediate block being fixedly connected to the bottom of the receiving cavity, and the gap between the intermediate block and the side blocks forming a tapered tube.

[0010] Preferably, the channel pipeline includes a plurality of U-shaped tubes communicating with each other, the two U-shaped tubes located at the sides communicating with each other, a plurality of the U-shaped tubes being in the same plane, and the U-shaped tubes located at the sides communicating with the receiving cavity.

[0011] Preferably, the number of the one-way valves is at least one.

[0012] Preferably, the number of the U-shaped tubes is at least four.

[0013] Preferably, the cross-section of the U-shaped tube is any one of a rectangle, a square, a triangle, and a trapezoid.

[0014] Preferably, the working fluid is any one or more of deionized water, electronic fluorinated liquid, surfactant, and self-wetting fluid, and the working fluid filling ratio is 10%-90%.

[0015] Preferably, the materials of the bottom plate, the cover plate, and the one-way valve are any one of polymethyl methacrylate, copper, stainless steel, and Teflon.

[0016] Preferably, the bottom plate, the channel pipeline, and the one-way valve are on the same plane, and the angle between the plane and the horizontal plane is 0°-150°.

[0017] Preferably, the hydraulic diameter of the U-shaped tube is 0.2 mm - 3 mm.

[0018] The present invention has the following technical effects:

[0019] 1. The one-way valve micro-plate pulsating heat pipe provided by the present invention for directionally solving local heat dissipation of electronic chips strengthens the pressure imbalance state by improving the pulsating heat pipe configuration, realizes the non-steady-state pressure distribution, solves the problems of difficult start-up and running stagnation of the micro-pulsating heat pipe, and significantly improves the heat transfer capacity of the pulsating heat pipe.

[0020] 2. The one-way valve structure micro-plate pulsating heat pipe provided by the present invention and its design concept. The introduced one-way valve check structure can limit the fluid flow direction, and the working medium pulsates unidirectionally in the channel pipeline, strengthening the pressure imbalance in the pipeline, improving the heat dissipation capacity of the pulsating heat pipe. The start-up temperature and start-up time of the one-way valve micro-plate micro-pulsating heat pipe are both reduced, improving its start-up performance.

[0021] 3. The one-way valve structure micro-plate pulsating heat pipe provided by the present invention and its design concept. The plate material is polymethyl methacrylate with low thermal conductivity, avoiding heat dissipation in the pipeline direction, being beneficial to the concentrated boiling of the working medium in the evaporation section, having an obvious temperature difference between the hot and cold ends, a strong driving force of the vapor bullet pressure difference, and a good oscillation motion effect. In the stable operation stage of the pulsating heat pipe, the one-way valve check structure of the one-way valve structure micro-plate pulsating heat pipe can avoid the pulsation stagnation phenomenon caused by the average pressure distribution. The present invention can effectively solve the problem of difficult heat dissipation in a local space of a small scale, and prepare a highly integrated and miniaturized micro-pulsating heat pipe. Brief Description of the Drawings

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required to be used in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0023] Figure 1 It is a schematic structural diagram of the present invention;

[0024] Figure 2 It is a schematic structural diagram of the one-way flow structure of the present invention;

[0025] Figure 3 It is a schematic structural diagram of Embodiment 2 of the present invention;

[0026] Figure 4 It is a schematic structural diagram of Embodiment 3 of the present invention;

[0027] Figure 5 It is a schematic structural diagram of Embodiment 4 of the present invention;

[0028] Figure 6 Schematic diagram of the condensation section, evaporation section and adiabatic section structures of the present invention;

[0029] Figure 7 Distribution diagram of the working fluid flow direction inside the check valve of the present invention;

[0030] Figure 8 Schematic diagram of flow patterns inside pipes with different hydraulic diameters;

[0031] Figure 9 Thermal resistance and slug flow velocity diagram of the check valve micro-plate pulsating heat pipe;

[0032] Figure 10 Comparison diagram of the start-up time of the pulsating heat pipe with the same size as the present invention;

[0033] Figure 11 In the present invention Figure 1 Schematic diagram of the heat dissipation direction principle of the pulsating heat pipe shown;

[0034] Figure 12 In the present invention Figure 1 Flow pattern distribution diagram during the operation of the micro pulsating heat pipe shown;

[0035] Figure 13 Comparison diagram of the two-way performance of the check valve structure of the present invention and other check valve structures;

[0036] Among them, 1, condensation section; 2, channel pipeline; 3, evaporation section; 4, adiabatic section; 5, cover plate; 21, check valve; 22, flow-around column; 23, tapered pipe; 24, return groove; 25, rectifying baffle; 11, bottom plate; 12, accommodation cavity; 13, side block; 14, intermediate block; 15, U-shaped pipe; 16, first flow disturbance column; 17, second flow disturbance column; 18, third flow disturbance column; 19, first rectifying baffle; 20, return block; 6, liquid-phase working fluid; 7, vapor-phase working fluid. Detailed implementation manners

[0037] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts belong to the scope of protection of the present invention.

[0038] To make the above objects, features and advantages of the present invention more obvious and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific implementation manners.

[0039] Embodiment 1

[0040] Refer to Figure 1-2and Figure 6-13 , this embodiment provides a microplate pulsating heat pipe with a coupled one-way valve structure, including a bottom plate 11, a cover plate 5 fixedly connected to the top of the bottom plate 11, a channel pipeline 2 provided on the bottom plate 11, and a plurality of one-way valves 21 communicated with the channel pipeline 2. The channel pipeline 2 is filled with a working fluid. The one-way valve 21 includes a receiving cavity 12, which is opened on the bottom plate 11. Both the top and bottom of the receiving cavity 12 are communicated with the channel pipeline 2, and a one-way flow structure is provided in the receiving cavity 12. Refer to Figure 6 , the bottom of this embodiment is an evaporation section 3, the middle is an adiabatic section 4, and the top is a condensation section 1. The area of the condensation section 1 is larger than that of the evaporation section 3; such a setting can effectively improve the rapid heat dissipation ability of the small-area hot spots of the present invention; the working fluid includes a liquid-phase working fluid 6 and a vapor-phase working fluid 7; the present invention is mainly applied to the heat dissipation of electronic chips. The one-way valve 21 is a topology optimization efficient heat transfer model, using the resistance flow as a penalty function to optimize the minimum resistance in the pipe.

[0041] Further optimized scheme, the one-way flow structure includes:

[0042] Symmetrically arranged flow-around columns 22, the flow-around columns 22 are fixedly connected to the bottom of the receiving cavity 12, and the flow-around columns 22 are located on both sides of the top opening of the receiving cavity 12;

[0043] Symmetrically arranged flow-rectifying baffles 25, the two flow-rectifying baffles 25 are in a V-shaped structure, the flow-rectifying baffles 25 are located below the flow-around columns 22, and the flow-rectifying baffles 25 are fixedly connected to the bottom of the receiving cavity 12;

[0044] Symmetrically arranged side blocks 13, the side blocks 13 are trapezoidal structures, the side blocks 13 are fixedly connected to the bottom of the receiving cavity 12, the side blocks 13 are located below the flow-rectifying baffles 25, and an intermediate block 14 is provided between the two side blocks 13. The intermediate block 14 is fixedly connected to the bottom of the receiving cavity 12, and the gap between the intermediate block 14 and the side blocks 13 forms a tapered tube 23. Both sides of the bottom of the receiving cavity 12 are of a return groove 24 structure. The flow-around columns 22 play a role in blocking the reflux of the working fluid and generating a flow-around effect, the tapered tube 23 plays a role in throttling the flow of the working fluid, the return groove 24 plays a role in receiving the reverse flow of the working fluid, and the flow-rectifying baffles 25 play a role in rectifying the flow of the working fluid. After optimization, the one-way valve 21 can be scaled according to the pipeline design ratio. The rounded length ratio of the flow-around columns 22: the tapered tube 23: the return groove 24: the flow-rectifying baffles 25: the one-way valve 21 is 2:3:6:6:16. By restricting and regularizing the flow direction of the one-way valve, refer to Figure 7 For the specific flow direction of the fluid in the one-way valve 21, the working fluid pulsates unidirectionally in the channel pipeline 2, strengthening the pressure imbalance in the pipeline, increasing the steam bullet driving force, enhancing the heat dissipation ability of the pulsating heat pipe, and reducing both the starting temperature and starting time of the pulsating heat pipe. Refer to Figure 10, the temperature of the evaporation section can be reduced from 43 °C to 37 °C, the start-up time is shortened by about 150 s, and the check valve 21 can effectively improve the rapid heat dissipation ability of its small-area hot spots. The anisotropy value of the check valve structure designed in the present invention is Refer to Figure 13 , which are the performance of check valve heat pipes studied by different authors internationally. The abscissa is the experiments or simulations of different authors and years, and the ordinate is the anisotropy value. Compared with the check valve structure designs of other current researchers, the check valve of the present invention has obvious unidirectionality, excellent check valve effect, smooth flow, and high effective thermal conductivity.

[0045] In a further optimized solution, the channel pipeline 2 includes a number of interconnected U-shaped pipes 15. The two U-shaped pipes 15 located at the edges are interconnected. A number of U-shaped pipes 15 are located in the same plane, and the U-shaped pipes 15 located at the edges are connected to the accommodation cavity 12.

[0046] In a further optimized solution, the number of check valves 21 is at least one. In this embodiment, 2 check valves are preferably used to achieve the overall counterclockwise cyclic pulsating flow of the flow direction in the pipeline.

[0047] In a further optimized solution, the number of U-shaped pipes 15 is at least four. The present invention is provided with 9 U-shaped pipes 15. The 9 U-shaped pipes 15 are manufactured by micro-machining and are bonded into a sealed plate-like structure using polymethyl methacrylate cover plates of the same size.

[0048] In a further optimized solution, the cross-section of the U-shaped pipe 15 is any one of a rectangle, a square, a triangle, and a trapezoid.

[0049] In a further optimized solution, the working fluid is any one or more of deionized water, electronic fluorinated liquids (HFE-7000, HFE-7100), surfactants, and self-wetting fluids. The volume filling ratio of the working fluid is 10%-90%; HFE-7000 is a low-boiling-point and low-surface-tension fluid and is widely used in the heat dissipation of electronic devices. It is non-toxic and harmless and will not cause ozone depletion; the self-wetting fluid is a low-concentration aqueous solution of alcohols with more than 4 carbon atoms (pentanol, hexanol, heptanol, etc.) and can form the Marangoni effect. In this example, the base materials of the cover plate 5, the check valve 21, and the bottom plate 11 are polymethyl methacrylate. The surfaces of the channel pipeline 2 and the check valve 21 are processed by micro-machining. The polymethyl methacrylate material has high strength and light weight, which is suitable for the efficient utilization of micro-region space and the weight reduction of portable devices. The present invention uses HFE-7000 to form a super-hydrophilic property on the polymethyl methacrylate material, which can effectively prevent the evaporation section of the pulsating heat pipe from drying out and strengthen the gravity reflux of the working fluid, thereby expanding the operating range of the pulsating heat pipe.

[0050] For a further optimized solution, the materials of the bottom plate 11, the cover plate 5, and the one-way valve 21 are any one of polymethyl methacrylate (acrylic glass, PMMA), copper, stainless steel, and Teflon.

[0051] For a further optimized solution, the bottom plate 11, the channel pipeline 2, and the one-way valve 21 are located on the same plane, and the angle between the plane and the horizontal plane is 0° - 150°.

[0052] For a further optimized solution, the hydraulic diameter of the U-shaped tube 15 is 0.2 mm - 3 mm.

[0053] During the stable operation stage of the one-way valve microplate pulsating heat pipe of the present invention, the movement laws and flow pattern distributions of the liquid-phase working medium 6 and the vapor-phase working medium 7 in the one-way valve microplate pulsating heat pipe are obtained through high-speed photography, and the flow pattern type results are analyzed and processed to analyze the influence of the channel design on the heat transfer performance; the high-speed camera used is Photron Fastcam Apx-Rs (Japan).

[0054] Example 2

[0055] Refer to Figure 3 , the difference between this embodiment and Embodiment 1 is only that two first spoiler columns 16 are fixedly connected to both sides of the top of the accommodation cavity 12. The first spoiler columns 16 are right-angled triangle structures, the hypotenuses of the two first spoiler columns 16 face each other, and a first rectifying baffle 19 is provided below the first spoiler columns 16. The first rectifying baffle 19 is an obtuse triangle structure.

[0056] Example 3

[0057] Refer to Figure 4 , the difference between this embodiment and Embodiment 2 is only that the right-angled sides of the two first spoiler columns 16 face each other.

[0058] Example 4

[0059] Refer to Figure 5 , the difference between this embodiment and Embodiment 1 is only that two third spoiler columns 18 are fixedly connected to both sides of the top of the accommodation cavity 12. The third spoiler columns 18 are right-angled triangle structures, the hypotenuses of the two third spoiler columns 18 face each other, and a reflux baffle 20 is provided at the bottom of the side block 13. The reflux baffle 20 is a triangle structure.

[0060] Example 5

[0061] The difference between this embodiment and Embodiment 1 is only that the number of U-shaped tubes 15 is 6. At this time, the hydraulic diameter of the U-shaped tubes 15 is 0.92 mm. At this time, the flow in the U-shaped tubes 15 is mostly bubble flow, and local boiling occurs in the tubes. At this time, due to the relatively large diameter, the liquid cannot form slug flow, but is the so-called "pool boiling" in general. At this time, the working fluid in the U-shaped tubes 15 cannot flow, the heat transfer effect decreases significantly, the thermal resistance increases, and the heat transfer deteriorates. When the hydraulic diameter of the U-shaped tubes 15 is 0.56 mm, obvious slug flow can be captured by high-speed camera visualization. At this time, the vapor slugs push the liquid slugs to perform cyclic pulsation. The vapor slugs release latent heat during condensation in the condensation section, and the liquid slugs release sensible heat. The heat transfer effect is excellent, and the wall temperature can be significantly reduced. Refer to Figure 10 , the temperature of the evaporation section 3 can be reduced from 43 °C to 37 °C, and the startup time can be shortened by about 150 s, realizing rapid heat dissipation.

[0062] Embodiment 6

[0063] The difference between this embodiment and Embodiment 1 is only that it is a pulsating heat pipe for coupling the structures of two one-way valves 21. Figure 10 Figure 10 is a comparison chart of the startup times of a common micro-pulsating heat pipe and a one-way valve micro-pulsating heat pipe under the same heating power. The basic experimental conditions of the two pulsating heat pipes are the same, that is, the base material is polymethyl methacrylate, the number of U-shaped tubes 15 is 9, and the included angle between the operating direction and the horizontal direction is 90°. The cross-sectional shapes of the channels of the two pulsating heat pipes are rectangular, and the hydraulic diameter of the channels is 0.56 mm. The working medium of the two pulsating heat pipes is HFE-7000, and the liquid filling rate is 62%. Figure 9 Figure 11 is a graph of the thermal resistance and liquid slug flow velocity of a one-way valve micro-plate pulsating heat pipe. The thermal resistance is:

[0064] where R represents the thermal resistance of the one-way valve micro-plate micro-pulsating heat pipe, represents the average temperature of the evaporation section during the operation of the micro-pulsating heat pipe, represents the average temperature of the condensation section during the operation of the micro-pulsating heat pipe. Q represents the input heating power. Thermal resistance is an important parameter for evaluating the heat transfer performance of a heat pipe. The smaller the thermal resistance, the better the heat transfer performance of the heat pipe.

[0065] From Figure 10It can be seen that during the startup process, the startup time of the one-way valve micro-plate pulsating heat pipe is only 105 s, while that of the micro-pulsating heat pipe without the one-way valve structure is 274 s. The use of the one-way valve 21 can significantly shorten the startup time. This is because the restrictive effect of the one-way valve 21 makes the resistance of the working fluid flowing against the flow direction of the one-way valve 21 large, and the working fluid accumulates in the one-way valve 21. The liquid can continuously be pressed from the condensation section 1 to the evaporation section 3. The liquid entering the evaporation section 3 is quickly heated and violently vaporized, generating a new driving force, and the micro-pulsating heat pipe starts up. For the micro-pulsating heat pipe without the one-way valve 21 structure, the liquid in the evaporation section 3 is vaporized and dried out. At this time, the pressure in the pipe is in an equilibrium state, and the liquid accumulates in the condensation section 1 and cannot flow back, resulting in insufficient liquid supply and "false dry-out" in the evaporation section 3, and the startup fails. It is not until the total gravity generated by the liquid accumulation is greater than the flow resistance in the pipe that the falling liquid film flows back, and then the working fluid can return to the evaporation section 3 again, and the micro-pulsating heat pipe can start up.

[0066] Refer to Figure 9 , the flow rate and thermal resistance of the liquid slug in the one-way valve micro-plate pulsating heat pipe were statistically analyzed. As the heating power increases, the rate of the liquid slug significantly accelerates. When the heating power is 7 W, the instantaneous velocity of the liquid slug is 480 mm / s. At the same time, the thermal resistance of the one-way valve micro-plate pulsating heat pipe also decreases with the increase of the heating power, and the lowest thermal resistance is 0.7 °C / W. This shows that the one-way check valve structure can significantly improve the startup performance of the micro-pulsating heat pipe. During the normal operation stage, it can regularize the flow direction, form a cyclic pulsating flow, and enhance the heat transfer effect.

[0067] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0068] The embodiments described above are only for describing the preferred mode of the present invention, and do not limit the scope of the present invention. Without departing from the design spirit of the present invention, various deformations and improvements made by those of ordinary skill in the art to the technical solution of the present invention shall fall within the protection scope determined by the claims of the present invention.

Claims

1. A micro-plate pulsating heat pipe with a coupled check valve structure, characterized in that: It includes a bottom plate (11), a cover plate (5) is fixedly connected to the top of the bottom plate (11), a channel pipeline (2) is provided on the bottom plate (11), the channel pipeline (2) is communicated with a plurality of one-way valves (21), a working medium is filled in the channel pipeline (2), the one-way valve (21) includes a receiving cavity (12), the receiving cavity (12) is opened on the bottom plate (11), both the top and the bottom of the receiving cavity (12) are communicated with the channel pipeline (2), and a one-way flow structure is provided in the receiving cavity (12). The one-way flow structure includes: Symmetrically arranged flow-around columns (22), the flow-around columns (22) are fixedly connected to the bottom of the receiving cavity (12), and the flow-around columns (22) are located on both sides of the top opening of the receiving cavity (12); Symmetrically arranged rectifying baffles (25), the two rectifying baffles (25) are in an eight-shaped structure, the rectifying baffles (25) are located below the flow-around columns (22), and the rectifying baffles (25) are fixedly connected to the bottom of the receiving cavity (12); Symmetrically arranged side blocks (13), the side blocks (13) are in a trapezoidal structure, the side blocks (13) are fixedly connected to the bottom of the receiving cavity (12), the side blocks (13) are located below the rectifying baffles (25), an intermediate block (14) is provided between the two side blocks (13), the intermediate block (14) is fixedly connected to the bottom of the receiving cavity (12), and a tapered pipe (23) is formed by the gap between the intermediate block (14) and the side blocks (13).

2. The micro-plate pulsating heat pipe with a coupled one-way valve structure according to claim 1, wherein: The channel pipeline (2) includes a plurality of U-shaped pipes (15) that are interconnected, the two U-shaped pipes (15) located at the sides are interconnected, a plurality of the U-shaped pipes (15) are in the same plane, and the U-shaped pipes (15) located at the sides are communicated with the receiving cavity (12).

3. The micro-plate pulsating heat pipe with a coupled check valve structure according to claim 1, characterized in that: The number of the one-way valves (21) is at least one.

4. The micro-plate pulsating heat pipe with a coupled one-way valve structure according to claim 2, characterized in that: The number of the U-shaped pipes (15) is at least four.

5. The microplate pulsating heat pipe with a coupled one-way valve structure according to claim 2, characterized in that: The cross-section of the U-shaped pipe (15) is any one of a rectangle, a square, a triangle, and a trapezoid.

6. The micro-plate pulsating heat pipe with a coupled one-way valve structure according to claim 1, wherein: The working medium is any one or more of deionized water, electronic fluorinated liquid, surfactant, and self-wetting fluid, and the working medium filling rate is 10%-90%.

7. The micro-plate pulsating heat pipe with a coupled check valve structure according to claim 1, wherein: The materials of the bottom plate (11), the cover plate (5), and the one-way valve (21) are any one of polymethyl methacrylate (acrylic glass, PMMA), copper, stainless steel, and Teflon.

8. The microplate pulsating heat pipe with a coupled one-way valve structure according to claim 1, characterized in that: The bottom plate (11), the channel pipeline (2), and the one-way valve (21) are in the same plane, and the angle between the plane and the horizontal plane is 0°-150°.

9. The micro-plate pulsating heat pipe with a coupled one-way valve structure according to claim 2, characterized in that: The hydraulic diameter of the U-shaped pipe (15) is 0.2 mm-3 mm.

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