A synchronous lapping machine

Abstract

The application relates to a synchronous polishing grinder, which comprises a table, a polishing wheel rotatably arranged on the table, the upper end of the polishing wheel being provided with a polishing surface, the polishing wheel being arranged on the table in a lifting mode, a support assembly capable of clamping a polishing rod, and a driving assembly comprising a driving source and a transmission mechanism, the driving source being in transmission connection with the polishing wheel, the driving source driving the polishing rod to rotate in a synchronous mode through the transmission mechanism, the polishing wheel performing surface topography transfer on the polishing rod when the linear rotating speeds of the polishing wheel and the tip of the polishing rod are consistent. The relative positions of the polishing wheel and the polishing rod are configured so that the central axis of the polishing wheel passes through the center of the end of the polishing rod, and the polishing wheel and the polishing rod are synchronously driven to rotate by one driving source, so that the synchronous movement of the polishing wheel and the polishing rod can be effectively guaranteed, the problem of speed mismatch between multiple driving sources is avoided, and the requirement of realizing surface topography transfer on the polishing rod is met.

Description

Technical Field

[0001] This invention relates to the field of grinding and printing technology, and specifically to a synchronous printing and grinding machine. Background Technology

[0002] In existing technologies, a grinding machine can be used to grind the end of a grinding rod into a predetermined shape, such as a cone or semi-circle. When there are requirements for the surface morphology of the grinding rod, it is also necessary to perform a tracing function on the surface of the grinding rod. Taking a charged particle beam device including a liquid metal ion source as an example, the electrode of the ion source needs to be ground into a predetermined shape to facilitate the emission of the ion beam. This not only requires grinding the electrode (grinding rod) of the ion source into a cone-shaped tip, but also requires tracing axial grooves on the electrode. Existing technology provides a grinding machine that uses a grinding wheel as the grinding wheel, and two drive sources drive the grinding wheel and the grinding rod to rotate to achieve grinding of the grinding rod, but it cannot meet the requirements for tracing.

[0003] In the existing technology, because the rotation speed of the two independent drive sources cannot be precisely controlled, the linear velocity of each point on the contact surface of the grinding wheel and the grinding rod cannot be guaranteed to be the same, and thus it is impossible to guarantee that the grinding wheel and the grinding rod can move synchronously. The end of the grinding rod moves asynchronously with the grinding wheel, which can achieve grinding, but it is difficult to achieve printing. Summary of the Invention

[0004] Based on the above description, the present invention provides a synchronous printing and grinding machine to solve the technical problems in the prior art.

[0005] The technical solution of the present invention to solve the above-mentioned technical problems is as follows:

[0006] A synchronous printing and grinding machine, comprising

[0007] Table;

[0008] A grinding wheel is rotatably mounted on the table, the upper end of the grinding wheel has a grinding surface, and the grinding wheel is adjustable in height on the table.

[0009] A support assembly capable of holding a grinding rod, wherein the relative positions of the grinding wheel and the grinding rod are configured such that the central axis of the grinding wheel passes through the center of the end of the grinding rod;

[0010] The driving component includes a driving source and a transmission mechanism. The driving source is connected to the grinding wheel and drives the grinding rod to rotate synchronously through the transmission mechanism. When the rotational linear speed of the tip of the grinding wheel and the grinding rod are consistent, the grinding wheel performs surface morphology imprinting on the grinding rod.

[0011] Compared with the prior art, the technical solution of this application has the following beneficial technical effects:

[0012] The synchronous rubbing and grinding machine provided in this application configures the relative positions of the grinding wheel and the grinding rod so that the central axis of the grinding wheel passes through the center of the end of the grinding rod, and drives the grinding wheel and the grinding rod to rotate synchronously through a single drive source. This can effectively ensure the synchronous movement of the grinding wheel and the grinding rod, avoid the problem of speed mismatch between multiple drive sources, and meet the requirements for surface morphology rubbing on the grinding rod.

[0013] Based on the above technical solution, the present invention can be further improved as follows.

[0014] Furthermore, the support assembly includes a rotating support, a rotating tube, and a track. The rotating support is movably connected to the track to adjust the angle between the rotating tube and the grinding surface. The rotating tube is rotatably connected to the rotating support and can hold the grinding rod. The drive source drives the rotating tube to rotate through the transmission mechanism.

[0015] Furthermore, the track is connected to the table; the rotating bracket includes an adjusting component, which includes an angle knob and an adjusting bar movably connected to the track. When the angle of the adjusting bar along the track is adjusted by the angle knob, the adjusting bar drives the rotating tube to rotate relative to the track.

[0016] Furthermore, one side of the adjustment bar is slidably or rollingly connected to the track, and the other side has a friction surface. The outer side of the angle knob has a friction mating surface, and the friction mating surface and the friction surface are in static frictional contact.

[0017] Furthermore, the rotating support also includes a support rod and a support tube. The first end of the support rod is movably connected to the track via the adjusting bar. The support tube is connected to the second end of the support rod. The rotating tube is rotatably connected to the support tube. The support rod is hollow inside and communicates with the support tube. A drive shaft is provided inside the support rod. The transmission mechanism is connected to the rotating tube via the drive shaft.

[0018] Furthermore, the transmission mechanism includes a transmission gear set, a transmission belt, a speed-changing pulley, and a transmission wheel. The transmission wheel is rotatably mounted on the rotating bracket and drivenly connected to the rotating tube. The power input end of the transmission gear set is connected to a drive source, and the power output end of the transmission gear set is connected to the speed-changing pulley. The transmission belt connects the speed-changing pulley and the transmission wheel. When the angle is adjusted by the angle knob, the angle knob is also used to adjust the radius at the connection between the speed-changing pulley and the transmission belt.

[0019] Furthermore, the gear shift wheel includes a gear shift wheel shaft and two gear shift wheel bodies rotatably sleeved on the gear shift wheel shaft. Each of the two gear shift wheel bodies has a variable diameter surface at one opposite end. The two sides of the transmission belt are respectively connected to the two variable diameter surfaces. The angle knob is connected to the gear shift wheel body and is used to adjust the distance between the two gear shift wheel bodies. The radius of the variable diameter surface at the connection point increases as the distance decreases.

[0020] Furthermore, the transmission mechanism also includes a transmission box connected to the table. The transmission gear set includes at least a power gear, a driven gear, and a speed-changing gear built into the transmission box and connected in sequence. The speed-changing wheel shaft is fixed to the transmission box and extends out of the transmission box. A rotating sleeve is rotatably sleeved on the speed-changing wheel shaft. One end of the rotating sleeve extends into the transmission box and is coaxially fixed with the speed-changing gear. The other end of the rotating sleeve extends out of the transmission box and is coaxially connected to a speed-changing wheel body.

[0021] Furthermore, the angle knob is cylindrical and coaxially threaded to the outside of the gearbox axle. One end of the angle knob is connected to the end of the gearbox body away from the transmission box and is rotatably connected to the gearbox body. A bearing is provided between the angle knob and the corresponding gearbox body, and the angle knob and the gearbox body are respectively connected to the outer ring and inner ring of the bearing.

[0022] Furthermore, the transmission mechanism also includes a guide rod, a spring sleeve, a spring wheel, a spring, and a guide wheel. The transmission box is connected to the table via a boss. The guide rod is disposed on the boss. The sleeve is elastically and vertically fitted onto the guide rod via the spring. The spring wheel is rotatably mounted on the outside of the sleeve. The guide wheel is rotatably connected to the end of the track away from the table. The transmission belt is also connected to the guide wheel and the spring wheel.

[0023] Furthermore, the synchronous printing and grinding machine also includes a lens holder and a microscope. The lens holder is set on the table, and the microscope is connected to the lens holder and the observation position of the microscope can be adjusted through the lens holder. The grinding wheel is a grinding wheel, or the grinding wheel includes a rotating wheel and sandpaper, and the rotating wheel is provided with a clamp for holding the sandpaper. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of a synchronous printing and grinding machine provided in an embodiment of the present invention;

[0025] Figure 2 for Figure 1 A schematic diagram of the transmission;

[0026] Figure 3This is a schematic diagram of the internal motor drive of the table provided in an embodiment of the present invention;

[0027] Figure 4 This is a schematic diagram of a gearbox state provided in an embodiment of the present invention;

[0028] Figure 5 This is a schematic diagram of another state of the gear shifter provided in an embodiment of the present invention;

[0029] Figure 6 This is a schematic diagram showing the connection and disassembly of the gear shift wheel and angle knob provided in an embodiment of the present invention;

[0030] Figure 7 This is a schematic diagram of the structure of the rotating bracket provided in an embodiment of the present invention;

[0031] Figure 8 This is a schematic diagram of the connection of the support assembly provided in an embodiment of the present invention;

[0032] Figure 9 This is a schematic diagram of the transmission box portion provided in an embodiment of the present invention;

[0033] Figure 10 This is a schematic diagram of synchronous imprinting and grinding of the grinding rod and the grinding surface provided in an embodiment of the present invention.

[0034] Figure 11 A top view of the grinding wheel provided in an embodiment of the present invention;

[0035] Figure 12 This is a schematic diagram illustrating the synchronous printing and grinding effect of the grinding rod provided in an embodiment of the present invention;

[0036] Figure 13 This is a schematic diagram showing the relative positional relationship between the grinding rod and the grinding wheel provided in an embodiment of the present invention;

[0037] Figure 14 This is a schematic diagram of the theoretical morphology of the variable diameter surface provided in an embodiment of the present invention.

[0038] In the diagram, 10: table, 20: grinding wheel, 201: grinding surface, 21: rotating wheel, 22: sandpaper, 30: support assembly, 31: rotating support, 311: support connecting rod, 312: support tube, 313: adjusting bar, 314: angle knob, 315: scale pointer, 32: rotating tube, 33: track, 40: drive assembly, 41: motor, 411: output shaft, 412: first drive wheel, 413: second drive wheel, 42: transmission mechanism, 421: transmission gear. Wheel assembly, 4211: drive gear, 4212: driven gear, 4213: speed change gear, 4214: rotating sleeve, 422: transmission belt, 423: speed change wheel, 4231: speed change wheel shaft, 4232: speed change wheel body, 424: transmission wheel, 425: transmission box, 4210: guide wheel, 4251: boss, 426: guide rod, 427: sleeve, 428: elastic wheel, 51: lens holder, 52: microscope, 100: grinding rod, 101: dotted line. Detailed Implementation

[0039] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0040] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0041] It is understood that spatial relation terms such as "below," "under," "below," "below," "above," "above," etc., can be used here to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as "below" or "below" of the other element or feature will be oriented "above" the other element or feature. Therefore, the exemplary terms "below" and "below" can include both upper and lower orientations. Furthermore, the device may also include other orientations (e.g., rotated 90° or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0042] It should be noted that when one element is considered to be "connected" to another element, it can be directly connected to the other element or connected to the other element through an intermediary element. In the following embodiments, "connection" should be understood as "electrical connection," "communication connection," etc., if the connected circuits, modules, units, etc., have the transmission of electrical signals or data between them.

[0043] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising,” “including,” or “having,” etc., specify the presence of the stated feature, whole, step, operation, component, part, or combination thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof.

[0044] like Figure 1 As shown in the figure, this application provides a synchronous printing and grinding machine, which includes a table 10, a grinding wheel 20, a support assembly 30 and a drive assembly 40.

[0045] The table 10 serves as the main support for the entire grinding machine, and the grinding wheel 20, support assembly 30, and drive assembly 40 are all directly or indirectly mounted on the table 10.

[0046] In this embodiment, the grinding wheel 20 is driven to rotate by the driving component 40 to ensure that the grinding rod 100 is ground and imprinted. The grinding wheel 20 is rotatably mounted on the table 10. The upper end of the grinding wheel 20 has a grinding surface 201. The grinding wheel 20 is raised and lowered on the table 10. It can be seen that the rotation and rising of the grinding wheel 20 causes the grinding surface 201 to grind the grinding rod 100 at its upper end (when the grinding machine is used to grind the electrode of the charged particle beam device, the grinding rod 100 is also called the electrode rod or electrode). The relative position of the grinding wheel 20 and the grinding rod 100 is configured such that the central axis of the grinding wheel 20 passes through the center of the end of the grinding rod 100, that is, the center of the end of the grinding rod 100 and the center of the grinding wheel 20 are aligned (in the embodiment, they are aligned in the vertical direction). After the end of the grinding rod 100 is ground, a tip is formed. The tip is usually conical, but not limited to this. For example, it can also be hemispherical. When the rotational linear speed of the tip of the grinding wheel 20 and the grinding rod 100 reaches the same, the grinding wheel 20 begins to imprint the surface morphology of the grinding rod 100. The grinding surface 201 has a surface morphology, such as several protrusions, and the surface morphology on the grinding surface 201 can be imprinted onto the grinding rod 100.

[0047] In this embodiment, the grinding rod 100 is columnar and serves as the cathode in a charged particle beam device. For example, the charged particle beam device includes a focused ion beam apparatus with a liquid metal ion source, and the cathode of the ion source in the focused ion beam apparatus can be ground and imprinted by a grinding machine to facilitate the emission of an ion beam.

[0048] like Figure 13 Before grinding begins, as shown in 13a, the center C1 of the end of the grinding rod 100 and the center C2 of the grinding wheel 20 are aligned vertically. For the outer surface on the same grinding rod 100, the linear velocity with the same angular velocity and radius is v. The linear velocity of the intersection of the dashed line 101 and the outer surface of the grinding rod 100 is v. The linear velocity of the contact point P between the grinding rod 100 and the grinding wheel 20 on the grinding rod 100 is also v. However, the angular velocities of all points on the grinding wheel 20 are the same. Due to the different radii, the contact points of the grinding rods are... The linear velocity of point P on the grinding wheel 20 is different from the linear velocity of the contact point Q (with linear velocity v) between the surface of the grinding wheel 20 and the dashed line 101. From the moment the grinding rod 100 contacts the grinding wheel 20, friction will occur at the contact point P between the grinding rod and the grinding wheel 20 due to the difference in linear velocity at the contact point, as shown in 13b. Grinding is achieved through friction until the grinding wheel moves upward a certain distance, as shown in 13c. When the surface of the grinding rod 100 is ground to the required angle, the surface linear velocities match, and the surface morphology imprinting of the grinding wheel begins.

[0049] In this embodiment, the grinding wheel 20 can translate in at least one direction. By adjusting the position of the grinding wheel 20, the center of the grinding wheel 20 and the center of the end of the grinding rod 100 can have the aforementioned relative positional relationship, i.e., alignment is achieved. For example, the grinding wheel 20 can move along any one or more of the x, y, and z directions to achieve the aforementioned alignment, wherein the x, y, and z directions are mutually perpendicular, the x and y directions are both in the horizontal plane, and the z direction is vertical. In this embodiment, the grinding wheel 20 is controlled by a motion mechanism (not shown) to achieve three-dimensional motion, enabling the grinding wheel 20 to move along the x, y, and z directions. The motion mechanism is, for example, disposed within the table 10. In this embodiment, the grinding wheel 20 can move along the z direction to achieve the aforementioned lifting and lowering to ensure the grinding effect. When the aforementioned alignment is required, the grinding wheel 20 is controlled to move along the x and / or y directions.

[0050] like Figure 1As shown, the support assembly 30 includes a rotating support 31, a rotating tube 32, and a track 33. The track 33 is connected to the table 10. In this embodiment, the track 33 is an arc-shaped track and is vertically arranged on one side of the table 10. The grinding wheel 20 is horizontally arranged. The rotating support 31 is movably connected to the track 33 to adjust the angle between the rotating tube 32 and the grinding surface 201. The rotating support 31 and the track 33 can form a sliding connection or a rolling connection. In one embodiment of the present invention, the rotating support 31 is slidably connected to the track 33. In another embodiment of the present invention, the rotating support 31 is rollingly connected to the track 33 through a ball bearing structure or a roller structure. The rotating tube 32 is rotatably connected to the rotating support 31. One end of the rotating tube 32 faces the grinding surface 201 and can hold the grinding rod 100. The drive source drives the rotating tube 32 to rotate through a transmission mechanism, thereby driving the grinding rod 100 to rotate.

[0051] Combination Figure 2 ( Figure 2 (A schematic diagram of the grinding machine with the transmission box hidden) and Figure 3 As shown, the drive assembly 40 includes a drive source and a transmission mechanism 42. In this embodiment, the drive source is preferably a motor 41. In other embodiments, other types of rotation drive mechanisms can also be used. The motor 41 is connected to the grinding wheel 20. The motor 41 drives the grinding rod 100 to rotate synchronously through the transmission mechanism 42. In this embodiment, the motor 41 drives the rotating tube 32 to rotate synchronously through the transmission mechanism 42, so that the grinding rod 100 rotates. The rotational linear speed of the rotating tube 32 can be adjusted by the transmission mechanism 42.

[0052] Specifically, the transmission mechanism 42 includes a transmission gear set 421, a transmission belt 422, a speed change wheel 423, and a transmission wheel 424. The transmission wheel 424 is rotatably mounted on the rotating bracket 31 and drivenly connected to the rotating tube 32, that is, the rotation of the transmission wheel 424 causes the rotating tube 32 to rotate.

[0053] The power input end of the transmission gear set 421 is connected to the motor 41, and the power output end of the transmission gear set 421 is connected to the speed change wheel 423. It can be understood that the transmission gear set 421 is a set of gears connected to the gear transmission. It is mainly used to transmit the rotational power of the motor 41 to the speed change wheel 423. In actual use, the number of gears and the connection sequence can be set independently according to the power transmission ratio.

[0054] The transmission belt 422 connects the gear shift pulley 423 and the transmission pulley 424. When the angle is adjusted by the adjusting member (specifically the angle knob mentioned later in this embodiment), the adjusting member (e.g., the angle knob) is also used to adjust the radius at the connection between the gear shift pulley 423 and the transmission belt 422.

[0055] It is understandable that when the radius of the connection between the gear shift pulley 423 and the transmission belt 422 (i.e., the radius of the outline of the connection of the gear shift pulley 423) increases, the length of the belt driven by the gear shift pulley 423 for each rotation increases, resulting in a larger rotation angle of the transmission pulley 424. Since the time for the gear shift pulley 423 to rotate once remains constant, the larger rotation angle of the transmission pulley 424 means it has a greater angular velocity, thereby achieving the effect of accelerating the rotation of the rotating tube 32. Conversely, when the radius of the connection between the gear shift pulley 423 and the transmission belt 422 decreases, the rotation of the rotating tube 32 decelerates, thus achieving the effect of speed change.

[0056] In this embodiment, combined with Figures 4 to 6 As shown, Figure 4 and Figure 5 This is a top view taken at a 45-degree angle to the vertical, rather than a frontal top view. The gear shift wheel 423 includes a gear shift wheel shaft 4231 and two gear shift wheel bodies 4232 rotatably mounted on the gear shift wheel shaft 4231. The distance between the two gear shift wheel bodies 4232 is adjustable. As one option for the distance, both gear shift wheel bodies 4232 can slide axially on the gear shift wheel shaft 4231. As another option for the distance, one gear shift wheel body 4232 is relatively fixed on the gear shift wheel shaft 4231, while the other can slide axially. In this embodiment, the latter connection method is preferred.

[0057] In this embodiment, each of the two gear-shifting pulleys 4232 has a variable-diameter surface at one end facing each other. The radius of the variable-diameter surface (i.e., the radius of the contour at the connection point of the gear-shifting pulleys 4232) gradually increases towards the other gear-shifting pulley 4232. The two sides of the transmission belt 422 overlap the two variable-diameter surfaces respectively. In this embodiment, the adjusting component (specifically, the angle knob mentioned later) is connected to the gear-shifting pulleys 4232 and is used to adjust the distance between the two gear-shifting pulleys 4232. The radius of the variable-diameter surface at the connection point increases as the distance decreases.

[0058] When the two gear shifting pulleys 4232 move away from each other, the radius at the position where the variable diameter surface contacts both sides of the transmission belt 422 becomes smaller, that is, the radius at the connection between the gear shifting pulley 423 and the transmission belt 422 becomes smaller. When the two gear shifting pulleys 4232 move closer to each other, the radius at the connection between the gear shifting pulley 423 and the transmission belt 422 becomes larger.

[0059] Specifically, in this embodiment, combined with Figure 7As shown, the rotating support 31 includes a support rod 311, a support tube 312, and an adjusting member. The first end of the support rod 311 is movably connected to the track 33 via the adjusting member (specifically, the adjusting bar described later in this embodiment). The adjusting member is used to adjust the position of the support rod 311 on the track 33. The support tube 312 is connected to the second end of the support rod 311, and the rotating tube 32 is rotatably connected to the support tube 312. The rotating tube 32 and the support tube 312 can be coaxially arranged. The support rod 311 is hollow inside and communicates with the support tube 312. A transmission shaft (not shown) is provided inside the support rod 311, and the transmission mechanism is connected to the rotating tube 32 via the transmission shaft. In this embodiment, the transmission wheel 424 is coaxially connected to the transmission shaft and located at the first end of the support rod 311. The end of the transmission shaft near the second end of the support rod 311 is connected to the rotating tube 32 via a gear set. The gear set is located inside the support tube 312, and the gear set is, for example, a bevel gear set.

[0060] That is, the drive shaft drives the rotating tube 32 to rotate through the internal bevel gear set. It can be understood that the end of the drive shaft near the second end extends into the support tube 312. The rotating tube 32 is rotatably installed in the rotating support 31 through the bearing, specifically inside the support tube 312. The internal bevel gear set includes a first bevel gear coaxially sleeved on the outside of the rotating tube 32 and a second bevel gear coaxially connected to the end of the drive shaft. The first bevel gear and the second bevel gear mesh and transmit power to realize the change of transmission direction.

[0061] Combination Figure 9 As shown, the transmission mechanism 42 also includes a transmission box 425, a guide rod 426, a sleeve 427, a spring wheel 428, and a spring (not shown).

[0062] The transmission box 425 is connected to the table 10, for example, to the side of the table 10 near the track 33. The transmission box 425 is hollow inside. Figure 2 The transmission gear set 421 includes a power gear 4211, a driven gear 4212, and a speed-changing gear 4213, which are built into the transmission box 425 and connected in sequence. The speed-changing gear shaft 4231 is fixed to the transmission box 425 and extends out of the transmission box 425. A rotating sleeve 4214 is rotatably sleeved on the speed-changing gear shaft 4231. One end of the rotating sleeve 4214 extends into the transmission box 425 and is coaxially fixed with the speed-changing gear 4213. The other end of the rotating sleeve 4214 extends out of the transmission box 425 and is coaxially connected with a speed-changing gear body 4232, thereby realizing the synchronous rotation of the speed-changing gear body 4232 and the speed-changing gear 4213.

[0063] In this embodiment, the transmission box 425 is connected to the table 10 via a boss 4251, and the guide rod 426 is disposed on the boss 4251. Exemplarily, the lower end of the transmission box 425 has a boss 4251, which is connected to the table 10. The boss 4251 is, for example, a transverse boss disposed in the horizontal direction (e.g., the y-direction). The guide rod 426 is vertically disposed on the transverse boss 4251. A sleeve 427 is elastically mounted on the guide rod 426 via a spring. A spring wheel 428 is rotatably mounted on the outside of the sleeve 427. A transmission belt 422 connects the speed-changing wheel 423, the transmission wheel 424, and the spring wheel 428. In this embodiment, one end of the spring is fixed inside the sleeve 427, and the other end is fixed on the boss 4251. When the spring moves up and down along the guide rod 426, the spring can be completely contained within the sleeve 427.

[0064] Among them, the elastic wheel 428 can slide up and down the guide rod 426. There is a spring between the elastic wheel 428 and the guide rod 426. The spring provides the up and down movement capability of the elastic wheel 428 and the sleeve 427 as a whole structure. The setting of the elastic wheel 428 can keep the belt taut when the rotating bracket 31 adjusts the angle and the speed change wheel 423 changes speed. If the length of the transmission belt 422 is redundant, the force of the built-in spring drives the wheel shaft to move downward to keep the belt taut.

[0065] The transmission box 425 is mainly used to house and install the transmission gear set 421 to prevent the transmission gear set 421 from contaminating the external environment of the transmission box 425 due to wear and tear.

[0066] More preferably, refer to Figure 2 The transmission mechanism 42 also includes a guide wheel 4210, which is rotatably connected to the end of the track 33 away from the table 10. The transmission belt 422 is also connected to the guide wheel 4210 and the elastic wheel 428. The transmission belt 422 is connected from the transmission wheel 424 through the guide wheel 4210 to the elastic wheel 428, and then to the speed change wheel 423. The guide wheel 4210 plays a guiding role for the transmission belt 422.

[0067] In this embodiment, preferably, reference Figure 3-6 The adjusting component includes an angle knob 314 and an adjusting bar 313 movably connected to the track 33. When the angle of rotation of the adjusting bar 313 along the track 33 is adjusted by the angle knob 314, the adjusting bar 313 drives the rotating tube 32 to rotate synchronously relative to the track. The adjusting bar 313 is connected to the support connecting rod 311. Exemplarily, the adjusting bar 313 is connected to the first end of the support connecting rod 311. One side of the adjusting bar 313 is slidably or rollingly connected to the track 33, and the other side has a friction surface. The adjusting bar 313 is, for example, an arc-shaped component. The angle knob 314 is cylindrical and coaxially threaded to the outside of the gearbox axle 4231. The outside of the angle knob 314 has a friction mating surface, and the friction mating surface and the friction surface are in static friction contact.

[0068] Preferably, the friction surface and the friction mating surface are made of materials with a high coefficient of friction, such as silicone surfaces.

[0069] One end of the angle knob 314 is connected to the end of the gearbox 4232 away from the transmission box 425 and is rotatably connected to the gearbox 4232.

[0070] It is understood that in this embodiment, the gearbox 4232 near the transmission box 425 is relatively fixed on the gearbox shaft 4231 and cannot move axially, while the gearbox 4232 away from the transmission box 425 can move axially along the gearbox shaft 4231.

[0071] When the angle knob 314 rotates on the gearbox shaft 4231, it moves along the axial direction of the gearbox shaft 4231, which in turn drives the gearbox body 4232 to move on the gearbox shaft 4231, thereby changing the distance between the gearbox bodies 4232. Specifically, a bearing is connected to the end of the angle knob 314 near the transmission box 425. The outer ring and inner ring of the bearing are connected to the angle knob 314 and the gearbox body 4232, respectively. At the same time, the static friction between the friction mating surface and the friction surface will push the adjusting bar 313, which in turn drives the rotating bracket 31 to move on the track 33, thereby adjusting the angle between the grinding rod 100 and the grinding surface. As can be seen from the above description, the gear change will bring about a change in angular velocity, and the rotation of the rotating bracket 31 will bring about a change in the angle. Therefore, the angle knob 314 can adjust the speed and the angle at the same time.

[0072] To better determine the included angle, refer to Figure 2 and Figure 8 In this embodiment, the track 33 has an angle scale, and the rotating bracket 31 has a scale pointer 315 for indicating the position of the rotating bracket 31. For example, the angle scale corresponding to the vertical position of the scale pointer 315 is set to 0°, and the scale is marked in sequence according to the angle size. In this embodiment, the track 33 is a 1 / 4 arc structure, which can realize the angle adjustment from 0 to 90°. The scale pointer 315 on the rotating bracket 31 can be positioned at any acute angle between 0 and 90° on the scale track (0° in the vertical direction), so that the tip of the grinding rod 100 after grinding has a controllable angle of 0 to 180°.

[0073] In this embodiment, reference Figure 3The motor 41 is preferably installed in the following manner: the table 10 is hollow inside, the motor 41 is built into the table 10 and located below the grinding wheel 20, the output shaft 411 of the motor 41 is connected to a first power wheel 412, the first power wheel 412 is connected to a power gear 4211 to drive the grinding rod 100 to rotate. In this embodiment, the first power wheel 412 is connected to the power gear 4211 through a first transmission structure (not shown), and a second power wheel 413 is also provided on the output shaft 411 of the motor 41, which is connected to the grinding wheel 20 through a second transmission structure (not shown) to drive the grinding wheel 20 to rotate. Thus, the motor drives the first power wheel 412 and the second power wheel 413 to move synchronously, so that the grinding rod 100 and the grinding wheel 20 move synchronously (i.e., they have the same linear velocity and rotate synchronously).

[0074] The theoretical morphological structure of the variable diameter surface can be derived through mathematical models and physical motion relationships.

[0075] Assuming that motor 41 provides the initial angular velocity ω0, the rotational angular velocity ω1 of grinding wheel 20 is directly proportional to the initial angular velocity ω0, that is, ω1=C×ω0, where C is a constant.

[0076] like Figure 10 As shown, assuming the angle between the central axis of the grinding rod 100 and the central axis of the grinding surface 201 (in this embodiment, the direction of the central axis of the grinding surface 201 is the z-direction) is θ, to make the linear velocity of the tip surface consistent with that of the grinding wheel 20 and to achieve surface imprinting, the required linear velocity ω1R = ω y r, where R is the generatrix length of the cone at the tip of the grinding rod 100, r is the radius of the base of the cone, and ω y The angular velocity of the grinding rod is 100°.

[0077] but: Among them, θ can be read directly from the pointer scale;

[0078] Furthermore, θ is directly proportional to the distance the angle knob moves axially.

[0079] Since the bevel gear set inside the support tube 312 is a transmission structure with a fixed transmission ratio, the angular velocity of the transmission wheel is directly proportional to the rotational angular velocity of the grinding rod 100, that is: ω j =B*ω y , where ω j This refers to the angular velocity of the transmission wheel.

[0080] Assume the radius of the transmission wheel 424 is R. c It can be seen that the linear velocity v on the surface of the transmission wheel c =Bω y R cSince the drive gear 4211 and the transmission gear 4213 are driven by gear meshing, and the transmission wheel 4232 and the drive wheel 424 are connected by a belt, the linear velocity v on the surface of the drive gear 4211 is... d With the linear velocity v of the transmission wheel surface c Equal, i.e., v c =Bω y R c =v d .

[0081] Since the power gear 4211 is driven by the motor 41 and its transmission ratio is fixed, the angular velocity ω of the transmission gear is... b It is directly proportional to the initial angular velocity ω0, that is, ω b =kω0, where k is the proportional coefficient of the power gear and the transmission gear.

[0082] Assume R b Given a variable equivalent radius for a transmission gear to achieve continuously variable transmission, we have Bω. y R c =kω0R b ,Right now Substituting it in, we can see that...

[0083] Where B, k, and C are all constants, and R c Assuming the initial angular velocity ω0 remains constant, the above equation can be simplified to: It is also a constant.

[0084] Therefore, the variable equivalent radius R of the gearbox can be obtained to achieve continuously variable transmission. b The relationship between the grinding angle θ and the effective radius of the gearbox is such that, during the design and production of the gearbox morphology, as long as the effective radius of the gearbox satisfies this formula when the grinding angle θ changes, the theoretical morphological structure of the variable diameter surface can be obtained, such as... Figure 14 As shown, a synchronous rubbing and grinding effect with continuously variable speed can be obtained.

[0085] like Figure 1 As shown, the synchronous printing and grinding machine also includes a lens holder 51 and a microscope 52. The lens holder 51 is set on the table 10, and the microscope 52 is connected to the lens holder 51 and its observation position can be adjusted through the lens holder 51.

[0086] By controlling the fixed position of the microscope 52 and the lens fixing bracket 51, the microscope 52 can be aligned with and observe the rotation center position of the grinding rod 100 and the grinding wheel 20, so as to ensure that the rubbing function can be realized.

[0087] In some embodiments of this application, the grinding wheel 20 is a grinding wheel, and the surface of the grinding wheel includes a grinding surface 201.

[0088] In a preferred embodiment of this application, combined with Figure 11 As shown, the grinding wheel 20 includes a rotating wheel 21 and sandpaper 22. The rotating wheel 21 is equipped with a clamp 211 for holding the sandpaper 22. The surface of the sandpaper 22 includes a grinding surface 201. Different grinding effects can be achieved by changing the sandpaper 22 of different grits, thus realizing the simultaneous imprinting of the grinding rod 100 after grinding. Figure 12 As shown, the end of the grinding rod 100 is ground to form a conical tip, and grooves extending along the axial direction of the grinding rod 100 are imprinted on the tip. When the ground and imprinted grinding rod 100 is applied to a focused ion beam device with a liquid metal ion source, the grooves can guide the liquid metal, thus facilitating the emission of the ion beam. The center of the grinding surface 201 coincides with the center of the rotating wheel 21, but this is not a limitation.

[0089] The synchronous imprinting and polishing machine provided in this application embodiment observes the polishing wheel 20 and polishing rod 100 under a microscope to align the center of the polishing wheel 20 with the center of the end of the polishing rod 100, and uses a single drive source to ensure synchronous movement between the polishing wheel 20 and the polishing rod 100, ultimately achieving the goal of imprinting the surface morphology of the polishing wheel onto the polishing rod 100.

[0090] In order to solve the problem of adjusting the angle of the grinding rod 100, the rotating bracket 31 is rotated by the angle knob 314 to adjust the grinding angle of the grinding rod 100 so that the shape of the tip of the grinding rod 100 meets the preset requirements.

[0091] In order to maintain synchronous movement between the grinding wheel 20 and the grinding rod 100 after adjusting the angle of the grinding rod 100, the speed is changed by the speed change wheel 423. Under the condition that the diameter of the speed change wheel meets the specific requirements, the linear velocity of the grinding wheel 20 can be adaptively changed after adjusting the grinding rod 100, and the two continue to maintain synchronous movement during the angle adjustment process.

[0092] In summary, this patent solves the problem of adaptive matching of linear velocity under different grinding angles. By using a single drive source, it avoids the problem of mismatched linear velocities between the grinding rod and grinding wheel caused by speed mismatches between multiple drive sources. After the relative positions of the grinding wheel and grinding rod are properly positioned and adjusted, the speed change function can be implemented when adjusting the grinding angle, without the need for complex pre-calculation or computer assistance. As long as the shape design of the speed-changing wheel conforms to the pre-production calculation results, the linear velocity matching between the grinding rod and grinding wheel can be maintained.

[0093] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A synchronous printing and grinding machine, characterized in that, include Table; A grinding wheel is rotatably mounted on the table, the upper end of the grinding wheel has a grinding surface, and the grinding wheel is adjustable in height on the table. A support assembly capable of holding an electrode, wherein the relative positions of the grinding wheel and the electrode are configured such that the central axis of the grinding wheel passes through the center of the end of the electrode; The driving component includes a driving source and a transmission mechanism. The driving source is connected to the grinding wheel and drives the electrode to rotate synchronously through the transmission mechanism. When the rotational linear speed of the tip of the grinding wheel and the electrode reaches the same speed, the grinding wheel performs surface morphology imprinting on the electrode.

2. The synchronous printing and grinding machine according to claim 1, characterized in that, The support assembly includes a rotating support, a rotating tube, and a track. The rotating tube is rotatably connected to the rotating support, and the rotating support is movably connected to the track to adjust the angle between the rotating tube and the grinding surface. The rotating tube can hold the electrode, and the drive source drives the rotating tube to rotate through the transmission mechanism.

3. The synchronous printing and grinding machine according to claim 2, characterized in that, The track is connected to the table; the rotating bracket includes an adjusting component, which includes an angle knob and an adjusting bar movably connected to the track. When the angle of the adjusting bar along the track is adjusted by the angle knob, the adjusting bar drives the rotating tube to rotate relative to the track.

4. The synchronous printing and grinding machine according to claim 3, characterized in that, One side of the adjustment bar is slidably or rollingly connected to the track, and the other side has a friction surface. The outer side of the angle knob has a friction mating surface, and the friction mating surface and the friction surface are in static frictional contact.

5. The synchronous printing and grinding machine according to claim 3, characterized in that, The rotating support also includes a support rod and a support tube. The first end of the support rod is movably connected to the track via the adjusting bar. The support tube is connected to the second end of the support rod. The rotating tube is rotatably connected to the support tube. The support rod is hollow inside and communicates with the support tube. A drive shaft is provided inside the support rod. The transmission mechanism is connected to the rotating tube via the drive shaft.

6. The synchronous printing and grinding machine according to claim 3, characterized in that, The transmission mechanism includes a transmission gear set, a transmission belt, a speed-changing pulley, and a transmission wheel. The transmission wheel is rotatably mounted on the rotating bracket and drivenly connected to the rotating tube. The power input end of the transmission gear set is connected to a drive source, and the power output end of the transmission gear set is connected to the speed-changing pulley. The transmission belt connects the speed-changing pulley and the transmission wheel. When the angle is adjusted by the angle knob, the angle knob is also used to adjust the radius at the connection between the speed-changing pulley and the transmission belt.

7. The synchronous printing and grinding machine according to claim 6, characterized in that, The gear shift wheel includes a gear shift wheel shaft and two gear shift wheel bodies rotatably sleeved on the gear shift wheel shaft. Each of the two gear shift wheel bodies has a variable diameter surface at one end facing each other. The two sides of the transmission belt are respectively connected to the two variable diameter surfaces. The angle knob is connected to the gear shift wheel bodies and is used to adjust the distance between the two gear shift wheel bodies. The radius of the variable diameter surface at the connection point increases as the distance decreases.

8. The synchronous printing and grinding machine according to claim 7, characterized in that, The transmission mechanism further includes a transmission box connected to the table. The transmission gear set includes at least a power gear, a driven gear, and a speed-changing gear built into the transmission box and connected in sequence. The speed-changing wheel shaft is fixed to the transmission box and extends out of the transmission box. A rotating sleeve is rotatably sleeved on the speed-changing wheel shaft. One end of the rotating sleeve extends into the transmission box and is coaxially fixed with the speed-changing gear. The other end of the rotating sleeve extends out of the transmission box and is coaxially connected to a speed-changing wheel body.

9. The synchronous printing and grinding machine according to claim 8, characterized in that, The angle knob is cylindrical and coaxially threaded to the outside of the gearbox shaft. One end of the angle knob is connected to the end of the gearbox body away from the transmission box and is rotatably connected to the gearbox body. A bearing is provided between the angle knob and the corresponding gearbox body. The angle knob and the gearbox body are respectively connected to the outer ring and inner ring of the bearing.

10. The synchronous printing and grinding machine according to claim 8, characterized in that, The transmission mechanism further includes a guide rod, a spring sleeve, a spring wheel, a spring, and a guide wheel. The transmission box is connected to the table via a boss. The guide rod is disposed on the boss. The sleeve is elastically and vertically fitted onto the guide rod via the spring. The spring wheel is rotatably mounted on the outside of the sleeve. The guide wheel is rotatably connected to the end of the track away from the table. The transmission belt is also connected to the guide wheel and the spring wheel.

11. The synchronous printing and grinding machine according to any one of claims 1-10, characterized in that, The synchronous printing and grinding machine also includes a lens holder and a microscope. The lens holder is set on the table, and the microscope is connected to the lens holder and the observation position of the microscope can be adjusted through the lens holder. The grinding wheel is a grinding wheel, or the grinding wheel includes a rotating wheel and sandpaper, and the rotating wheel is provided with a clamp for holding the sandpaper.

Images