Crystal production apparatus

Abstract

The application provides a crystal production equipment, which comprises a detachable furnace cover and furnace body, a lifting device capable of lifting, a lifting guide unit for limiting the lifting direction of the lifting device, and a synchronous moving unit movably connected to the lifting guide unit. The lifting device comprises a crystal lifting unit and a cover lifting unit, and the crystal lifting unit and the cover lifting unit are installed on the synchronous moving unit and are respectively used for connecting a seed crystal and a furnace cover. The synchronous moving unit is configured to be capable of lifting along the lifting guide unit and is used for synchronously driving the crystal lifting unit and the cover lifting unit to lift relative to the furnace body.

Description

Technical Field

[0001] This invention relates to the field of crystal preparation technology, and in particular to a crystal production device. Background Technology

[0002] In the photovoltaic and semiconductor industries, artificial crystals produced by the Czochralski method, the Czochralski method, or various modified Czochralski methods are widely used. During crystal growth, the seed crystal and the crystal rod need to be lifted upwards. After crystal growth is complete, the seed crystal and the crystal rod need to be separated to remove the crystal rod. Therefore, crystal production equipment is equipped with a seed crystal lifting structure and a furnace cover separation and lifting structure. The former is used to lift the seed crystal and the crystal rod, while the latter is used to lift the furnace cover and separate the furnace cover from the furnace body to allow the crystal rod to be removed.

[0003] Since crystal lifting and furnace cover lifting occur at different times, existing crystal production equipment uses a separate setup for the seed crystal lifting structure and the furnace cover lifting structure, with each connected to a different lifting guide structure. This results in a complex structure and high operating costs for the crystal production equipment. Furthermore, because the lifting structure is bent and deformed under load, the crystal lifting trajectory and the furnace cover lifting trajectory are deviated from the vertical direction. This can easily cause the seed crystal or the seed crystal lifting structure to scrape the furnace cover or even the furnace cover lifting structure when lifting the crystal. Summary of the Invention

[0004] In view of this, the present invention provides a crystal production equipment with a simpler and more compact structure. The crystal production equipment has a lower operating cost and can improve the problem of seed crystals or seed crystal lifting structures scraping the furnace cover or even scraping the furnace cover and separating the lifting structure during crystal lifting.

[0005] The crystal production equipment provided by the present invention includes a detachable furnace cover and furnace body, and also includes a lifting device that can be raised and lowered, a lifting guide unit that limits the lifting direction of the lifting device, and a synchronous transfer unit that is movably connected to the lifting guide unit. The pulling device includes a crystal pulling unit and a cover pulling unit. The crystal pulling unit and the cover pulling unit are installed in the synchronous transfer unit and are used to connect the seed crystal and the furnace cover, respectively. The synchronous transfer unit is configured to move up and down along the lifting guide unit to synchronously drive the crystal lifting unit and the cover lifting unit to move up and down relative to the furnace body.

[0006] In one embodiment, the synchronous transfer unit includes a lifting seat movably connected to the lifting guide unit, the lifting seat being configured to move along the lifting direction; The synchronous transfer unit also includes a lifting arm that is rotatably connected to the lifting base. The lifting arm rotates relative to the lifting guide unit to change the angle between the two.

[0007] With this configuration, the lifting seat moves up and down relative to the lifting guide unit to drive the lifting arm, crystal lifting unit and cover lifting unit to move up and down synchronously. The rotational connection between the lifting arm and the lifting guide unit allows the lifting arm to rotate after rising to a specified height, thereby driving the furnace cover to leave the outer area facing the furnace opening, making it easier to remove the crystal rod.

[0008] In one embodiment, the lifting arm and the lifting seat have a pivot center and form a pivotal engagement, the extension direction of the pivot center being consistent with the lifting direction.

[0009] With this configuration, the lifting arm can maintain a fixed height position relative to the lifting base and lifting guide unit in the lifting direction, allowing the crystal lifting unit, lid lifting unit, and furnace cover to rotate at a fixed height position. This helps improve the stability and operational safety of the crystal production equipment and avoids collision accidents caused by simultaneous changes in height position due to the rotation of the crystal lifting unit, lid lifting unit, and furnace cover.

[0010] In one embodiment, the synchronous transfer unit includes a lifting arm that is movably disposed on the side of the lifting guide unit. The crystal lifting unit, the cover lifting unit and the lifting arm are installed as one unit. When the lifting arm moves relative to the lifting guide unit in the lifting direction, the crystal lifting unit and the cover lifting unit are relatively fixed.

[0011] With this configuration, the direction in which the lifting arm moves relative to the lifting guide unit is the same as the direction of movement when the crystal is lifted or the furnace cover is lifted. The relative deviation between the crystal lifting trajectory and the furnace cover lifting trajectory is eliminated. When lifting the crystal or the furnace cover, regardless of whether the lifting direction of the lifting arm is deviated from the vertical direction, there will be no scraping or jamming between the seed crystal and the furnace cover, or between the crystal lifting unit and the furnace cover.

[0012] In one embodiment, the furnace lid includes a hook fitting, and the lid lifting unit includes a hook element for engaging the hook fitting to suspend the furnace lid, wherein: The projection of the hook-and-mount accessory on the outer wall of the furnace cover is located between the center of the outer wall of the furnace cover and the lifting guide unit; or... There are multiple hook-and-hook accessories and hook-and-hook elements, and each one corresponds to the other. The center of the graphic formed by the projection lines of the hook-and-hook accessories on the outer wall of the furnace cover is located between the center of the outer wall of the furnace cover and the lifting guide unit.

[0013] With this configuration, when the furnace cover is lifted by the lifting unit via the hook element, the line of action of the resultant force on the furnace cover does not pass through the center of gravity of the furnace cover. This will cause a slight tilt of the furnace cover. This tilt allows the furnace cover to better adapt to the actual lifting trajectory tilt relative to the vertical direction caused by the bending of the lifting arm. Ultimately, the furnace cover will present an attitude in which the semicircular edge closer to the lifting guide unit is higher than the semicircular edge farther away from the lifting guide unit. At this time, the axis of the furnace cover and the axis of the crystal lifting unit have the same tilting trend, which will not cause the furnace cover and the crystal lifting unit to jam.

[0014] In one embodiment, the lifting unit further includes a pneumatic telescopic element with a degree of freedom of extension and retraction, a hook element rotatably connected to the lifting arm, the pneumatic telescopic element being rotatably connected to the lifting arm and the hook element, and together with the lifting arm forming a linkage mechanism.

[0015] With this configuration, the action of connecting or releasing the furnace lid by the lid-lifting unit is faster and easier.

[0016] In one embodiment, the crystal production equipment further includes a counterweight structure detachably connected to the synchronous transfer unit, the counterweight structure being connected to the synchronous transfer unit on the side of the synchronous transfer unit relatively away from the crystal lifting unit and the cap lifting unit.

[0017] With this configuration, the counterweight structure can balance the pulling force of the synchronous transfer unit on the weight of the crystal lifting unit, the lid lifting unit, the crystal, or the furnace lid when connected to the synchronous transfer unit. This helps to offset or reduce the deviation between the actual lifting trajectory and the ideal lifting trajectory defined by the corresponding lifting guide unit when lifting the crystal or the furnace lid. This allows the furnace lid to be reattached to the furnace body more smoothly and accurately after the crystal rod is removed.

[0018] In one embodiment, the furnace body includes a detachable top furnace and a bottom furnace, the furnace cover and the top furnace are detachably connected, and the lifting device also includes a furnace lifting unit for connecting the top furnace, the furnace lifting unit being movably connected to the lifting guide unit and configured to be able to move up and down along the lifting guide unit.

[0019] This configuration, with the top furnace detached from the bottom furnace, makes it easier to remove the crystal rods, and the furnace body's design, consisting of multiple modular structures, makes cleaning the furnace body easier.

[0020] In one embodiment, the crystal manufacturing apparatus further includes a cap alignment mechanism, which includes: The alignment element is connected to either the top furnace or the furnace cover; A sliding element, connecting the top furnace to the other in the furnace cover; The sliding element can move along the correction element and form a sliding fit with it until the furnace cover and the top furnace form a sealed fit and are fixed.

[0021] With this configuration, the alignment mechanism makes it easier and faster for the furnace cover to reconnect with the furnace body, and it is also conducive to achieving a good and stable seal. Even if the synchronous transfer unit bends under the pulling force of the crystal lifting unit, the cover lifting unit, and the weight of the furnace cover, causing a deviation between the actual descent trajectory of the furnace cover and the ideal lifting trajectory defined by the corresponding lifting guide unit, this deviation can be eliminated by the relative sliding between the correction element and the sliding element. Ultimately, the furnace cover and the top furnace can still form a tight seal.

[0022] In one embodiment, the crystal production equipment further includes a furnace alignment mechanism, which comprises: The centering element is connected to one of the top furnace and the bottom furnace; A sliding contact element, connecting the top furnace to the other furnace in the bottom furnace; The sliding contact element can move along the centering element and form a sliding fit with it until the top furnace and the bottom furnace form a sealed fit and are fixed.

[0023] This configuration makes it easier and faster for the top and bottom furnaces to reconnect and rejoin, and also facilitates a good seal. Even if the lifting unit bends under the pull of the top furnace's weight, causing a deviation between the actual descent trajectory of the top furnace and the ideal lifting trajectory defined by the corresponding lifting guide unit, this deviation can be eliminated by the relative sliding between the sliding contact element and the centering element. Ultimately, the top and bottom furnaces can still form a tight seal.

[0024] Compared with existing technologies, the crystal production equipment provided by this invention eliminates the design concept of connecting the seed crystal lifting structure and the furnace cover lifting structure to different lifting guide structures. Both the crystal lifting unit and the cover lifting unit can rise and fall according to the lifting direction defined by the lifting guide unit. Even if the crystal lifting trajectory and the furnace cover lifting trajectory are deviated from the vertical direction, it will not cause the seed crystal or the crystal lifting unit to scrape the furnace cover or the cover lifting unit when being lifted. Therefore, it is not necessary to adjust the structure or posture of the crystal lifting unit or the cover lifting unit before lifting the crystal or the furnace cover, which reduces time consumption and reduces manual adjustment costs, making the crystal production equipment easier to use. It also makes the structure of the crystal production equipment simpler and more compact, and occupies less space. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a crystal production device according to an embodiment of the present invention; Figure 2 for Figure 1 A magnified view of a portion of the crystal production equipment shown at point A; Figure 3for Figure 1 A magnified view of a portion of the crystal production equipment shown at point B; Figure 4 This is a cross-sectional view of a crystal production apparatus according to an embodiment of the present invention.

[0026] Explanation of reference numerals in the attached figures: 200. Crystal; 210. Seed crystal; 220. Crystal rod; 10. Crystal furnace; 11. Furnace lid; 111. Lifting opening; 112. Hook and fitting accessories; 113. Outer wall of furnace lid; 12. Furnace body; 121. Top furnace; 122. Bottom furnace; 13. Furnace cavity; 14. Crucible; 15. Furnace bottom; 151. Lifting through hole; 16. Furnace felt; 17. Lid closing and alignment mechanism; 20. Lifting device; 21. Crystal lifting unit; 211. Upper shaft 212. Pole; 22. Seed crystal connecting section; 22. Lifting cover unit; 221. Hook element; 222. Pneumatic telescopic element; 30. Lifting guide unit; 31. Side column; 32. Lifting guide rail; 33. Screw transmission mechanism; 40. Synchronous transfer unit; 41. Lifting seat; 411. Pivot seat; 42. Lifting cantilever; 421. Reinforcing rib; 43. Pivot center shaft; 44. Crystal rotation drive component; 50. Lifting unit; 60. Frame. Detailed Implementation

[0027] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "or / and" as used herein includes any and all combinations of one or more of the associated listed items.

[0029] This invention provides a crystal production apparatus, which is an industrial facility that uses molten material to obtain artificial crystals through the Czochralski process, the Czochralski process, or a modified Czochralski process. The artificial crystal can be sapphire crystal 200, or other metal compound or non-metal compound crystal 200. The sapphire crystal 200 produced using the crystal production apparatus of this application can be used as a material in the photovoltaic or semiconductor industries, such as an LED display substrate; of course, this apparatus can also be used to prepare other types of crystal 200.

[0030] Please see Figures 1-4 The crystal production equipment includes a crystal furnace 10, which houses a crucible 14 and a heating zone. The crucible 14 holds the raw materials for growing crystals 200, and the heating zone heats the crucible 14 to melt the raw materials for crystal growth. The crystal furnace 10 includes a hollow furnace body 12, a furnace bottom 15 and a furnace cover 11 located at both ends of the furnace body 12. The furnace bottom 15 and the furnace cover 11 are sealed to the edges of the openings at both ends of the furnace body 12, and the three together form a furnace cavity 13. A furnace felt 16 is also provided inside the furnace cavity 13 to surround the crucible 14.

[0031] The furnace body 12 is cylindrical, preferably a cylindrical structure. In this case, the axis of the furnace body 12 extends vertically, and the openings at both ends are vertically upward and vertically downward, respectively. The direction of the extension of the axis of the furnace body 12 is the height direction of the furnace body 12. The furnace cover 11 and the furnace bottom 15 extend horizontally. It can be understood that the furnace body 12 can also be a prismatic hollow structure, as long as it allows the crucible 14 to be placed horizontally inside the furnace body 12.

[0032] The crystal production equipment also includes a frame 60 and a support unit 50. The frame 60 is used to support the crystal furnace 10. The furnace body 12 can be placed horizontally on the frame 60, thus being suspended relative to the ground. After the furnace body 12 is placed on the frame 60, its sidewalls extend vertically. The bottom 15 of the crystal furnace 10 has a support through hole 151. The support unit 50 passes through the support through hole 151 and extends into the crystal furnace 10 to support the crucible 14. In addition, it can also drive the crucible 14 to rotate at a low speed around the vertically extending axis so that the molten material in the crucible 14 can be mixed more thoroughly.

[0033] Specifically, the furnace body 12 includes a detachably connected top furnace 121 and a bottom furnace 122. Both the top furnace 121 and the bottom furnace 122 are hollow cylindrical structures, which are joined together axially to form the furnace body 12. After joining, they are coaxially arranged and can form a sealed fit. The top furnace 121 is higher than the bottom furnace 122. The bottom furnace 122 is placed directly on the frame 60 to form the furnace bottom 15. The top furnace 121 is detachably connected to the furnace cover 11, and the furnace cover 11 can cover the opening of the top furnace 121 away from the bottom furnace 122 and the frame 60 to form a sealed fit with the edge of the opening. To improve the heating effect of the crucible 14 and the crystallization effect of the molten material inside, the furnace felt 16 extends away from the furnace bottom 15 to a height higher than the bottom furnace 122 and partially extends into the top furnace 121.

[0034] The crystal production equipment also includes a lifting device 20 and a lifting guide unit 30. The lifting device 20 is configured to move up and down relative to the ground and the crystal furnace 10. The lifting guide unit 30 defines the direction of the lifting movement of the lifting device 20. Here, the lifting direction defined by the lifting guide unit 30 is an idealized lifting direction, and the trajectory formed by the lifting device 20 moving along the said lifting direction is an ideal lifting trajectory. The lifting guide unit 30 is located to the side of the crystal furnace 10, and the axis of the crystal furnace 10 does not pass through the lifting guide unit 30. Furthermore, there is a predetermined distance between the lifting guide unit 30 and the crystal furnace 10 in the radial direction of the furnace body 12.

[0035] After crystal 200 is grown, a seed crystal 210 and a crystal rod 220 are formed, which are coaxially or substantially coaxially connected. The lifting device 20 includes a lifting unit 21 for connecting the seed crystal 210 to lift the entire crystal 200, and a lifting unit 22 for connecting the furnace cover 11 to lift the furnace cover 11. The lifting unit 21 mainly drives the seed crystal 210 to rise gradually during the crystal 200 growth process, and the crystal rod 220 rises together with the seed crystal 210. The movement of the lifting unit 21 in lifting the crystal 200 passes through the narrow neck, shoulder, and equal diameter sections. To achieve the lifting of the crystal 200, the furnace cover 11 has a lifting opening 111 for the lifting unit 21 to pass through and extend into the crystal furnace 10. The lid lifting unit 22 is set up to lift the furnace lid 11 after the crystal 200 has grown, so as to separate the furnace lid 11 from the furnace body 12, thereby preparing for the removal of the crystal rod 220. During the crystal 200 growth process, the lid lifting unit 22 is not connected to the furnace lid 11, and the furnace lid 11 and the furnace body 12 remain connected and sealed. During this period, only the crystal lifting unit 21 drives the crystal 200 to rise.

[0036] Specifically, the crystal extraction unit 21 includes a fixedly connected upper shaft 211 and a seed crystal connecting section 212. The upper shaft 211 is suspended relative to the furnace bottom 15 of the crystal furnace 10. Optionally, both the upper shaft 211 and the seed crystal connecting section 212 are cylindrical long rods and are coaxially connected. The seed crystal connecting section 212 is fixedly connected to the side of the upper shaft 211 that is closer to the furnace body 12 of the crystal furnace 10. The seed crystal connecting section 212 passes through the lifting opening 111 and extends at least partially into the crystal furnace 10. The upper shaft 211 may extend partially into the crystal furnace 10 or not, and may extend into or out of the crystal furnace 10 at different times through lifting and lowering movements. When the crystal extraction unit 21 is not connected to the crystal 200, the axis of the crystal extraction unit 21 extends vertically, consistent with the lifting and lowering direction defined by the lifting guide unit 30.

[0037] In one embodiment, the lid-lifting unit 22 includes a hook element 221 and a pneumatic telescopic element 222. The hook element 221 is rotatable, and the pneumatic telescopic element 222 has a degree of freedom of extension and contraction and can also rotate. The pneumatic telescopic element 222 drives the hook element 221 to rotate through its extension and contraction, thereby hooking the furnace lid 11. Correspondingly, the furnace lid 11 includes a hook adapter 112 installed on the outer wall 113 of the furnace lid. The outer wall 113 of the furnace lid is located on the side of the furnace lid 11 away from the furnace bottom 15. The hook adapter 112 has a hook hole. The pneumatic telescopic element 222 drives the hook element 221 to rotate and extend into or out of the hook hole, thereby hooking or disengaging from the hook adapter 112. The lid-lifting unit 22 suspends the furnace lid 11 by hooking the hook adapter 112 with the hook element 221.

[0038] It is understood that in other embodiments, the lid lifting unit 22 can also be connected to and suspend the furnace lid 11 in other ways, such as by generating negative pressure adsorption force or magnetic attraction force to adsorb the furnace lid 11.

[0039] The lifting device 20 also includes a lifting unit for connecting the top furnace 121. The lifting unit is movably connected to the lifting guide unit 30 and is configured to move up and down in the lifting direction defined by the lifting guide unit 30. The purpose of the lifting unit is to further lift the top furnace 121 away from the bottom furnace 122 after the furnace cover 11 has been lifted away from the top furnace 121. The minimum lifting height of the top furnace 121 must be no less than the furnace felt 16 so that it can smoothly leave the outside of the opening facing the bottom furnace 122 away from the frame 60 after reaching the minimum lifting height, avoiding collisions between the top furnace 121 and the furnace felt 16 during movement. When the lifting unit is not connected to the top furnace 121, the lifting unit can move up and down along the axial direction of the crystal furnace 10, i.e., in the vertical direction.

[0040] Traditional crystal production equipment uses a separate seed crystal lifting structure and a furnace cover separation lifting structure to perform crystal lifting and furnace cover lifting respectively. The seed crystal lifting structure and the furnace cover separation lifting structure are movably connected to different lifting guide structures, such as two sets of lifting guide rails, which slide in cooperation with the seed crystal lifting structure and the furnace cover separation lifting structure respectively.

[0041] The reason why traditional crystal production equipment adopts the above method is that crystal lifting and furnace cover lifting are carried out in different time periods, and the movement strokes of crystal lifting and furnace cover lifting are not consistent. More importantly, after the crystal growth is completed, the seed crystal lifting structure will first descend to bring the crystal rod back into the crucible. Then, the seed crystal is cut off while the crucible supports the crystal rod. Next, the seed crystal lifting structure will bring the remaining seed crystal up together. Finally, the furnace cover is lifted. Therefore, the rising and falling movements of the seed crystal lifting structure are relative to the furnace cover.

[0042] Traditional crystal production equipment has long suffered from the following problems: the seed crystal lifting structure bends and deforms under the weight of the crystal, altering the trajectory and direction of its lifting motion. Similarly, the furnace lid separation lifting structure also bends and deforms under the weight of the furnace lid, changing its trajectory and direction as well. This leads to easy scraping or jamming between the seed crystal lifting structure and the furnace lid, between the seed crystal and the furnace lid, and even between the seed crystal and the furnace lid separation lifting structure. This makes it difficult to re-insert the seed crystal lifting structure through the furnace lid and into the furnace body. The current solution is to adjust the structure or posture of the seed crystal lifting structure and the furnace lid separation lifting structure after removing the crystal rod and cleaning the furnace body. This corrects the offset or deformation caused by the weight of the crystal or furnace lid, eliminating the deviation in the lifting trajectory and direction of the seed crystal lifting structure and the furnace lid separation lifting structure. However, this increases the workload, is difficult to adjust, requires repeated debugging, and results in significant time waste.

[0043] In view of this, the crystal production equipment provided by the present invention further includes a synchronous transfer unit 40, which is movably connected to the lifting guide unit 30 and is configured to move up and down in the lifting direction defined by the lifting guide unit 30. The crystal extraction unit 21 and the lid lifting unit 22 are both installed on the synchronous transfer unit 40, so that the synchronous transfer unit 40 can drive the crystal extraction unit 21 and the lid lifting unit 22 to move up and down synchronously relative to the furnace body 12 and the frame 60. That is, the synchronous transfer unit 40 can move up and down as a whole with the crystal extraction unit 21 and the lid lifting unit 22, and the weight of the crystal 200, the weight of the furnace lid 11, and the weight of the crystal extraction unit 21 and the lid lifting unit 22 are all borne by the synchronous transfer unit 40.

[0044] Specifically, the synchronous transfer unit 40 includes a lifting seat 41 movably connected to the lifting guide unit 30, and a lifting cantilever 42 located laterally to the lifting guide unit 30 and rotatably connected to the lifting seat 41. The lifting seat 41 is configured to move along the lifting direction defined by the lifting guide unit 30, that is, the lifting seat 41 can move vertically relative to the lifting guide unit 30. The crystal extraction unit 21 and the cover lifting unit 22 are installed at the end of the lifting cantilever 42 that is relatively away from the lifting seat 41. The lifting cantilever 42 rotates relative to the lifting guide unit 30, changing the angle between itself and the lifting guide unit 30, thereby causing the crystal extraction unit 21 and the cover lifting unit 22 to rotate relative to the lifting guide unit 30, so that the crystal extraction unit 21 and the cover lifting unit 22 can be moved vertically above the opening of the furnace body 12 to remove the crystal rod 220.

[0045] The lifting guide unit 30 includes a side column 31 located on the side of the crystal furnace 10, and a vertically extending lifting guide rail 32 fixed to the side column 31. The lifting seat 41 is slidably engaged with the lifting guide rail 32. The axis of the crystal furnace 10 does not pass through the side column 31 and the lifting guide rail 32. In the radial direction of the furnace body 12, there is a preset distance between the side column 31 and the lifting guide rail 32 and the crystal furnace 10. The lifting guide rail 32 is used to define the lifting direction and ideal lifting trajectory of the crystal lifting unit 21 and the lid lifting unit 22. The lifting direction is the ideal movement direction of the two during lifting movements.

[0046] Furthermore, the synchronous transfer unit 40 also includes a crystal rotation drive 44 installed on the lifting arm 42. The crystal rotation drive 44 is connected to the crystal lifting unit 21 and is used to drive the crystal lifting unit 21 to rotate around its own axis, that is, around the axis of the upper shaft 211. The purpose of setting the crystal rotation drive 44 is to rotate the crystal lifting unit 21 during the crystal growth process, so that the seed crystal connecting section 212 located in the crucible 14 and immersed in the molten material can stir the molten material, thereby improving the crystallization effect and efficiency.

[0047] Optionally, one end of the hook element 221 is rotatably connected to the lifting arm 42, and the other end forms a curved hook. Both ends of the pneumatic telescopic element 222 are rotatably connected to the lifting arm 42 and the hook element 221, respectively. Thus, the lifting arm 42, the hook element 221 and the pneumatic telescopic element 222 are arranged together to form a linkage mechanism, so that the rotation amplitude and rotation limit position of the hook element 221 are determined, which is more conducive to multiple hooking or releasing of the furnace cover 11, and can still ensure the consistency of the action in long-term use.

[0048] Optional, see below Figure 3 The lifting seat 41 includes a pivot seat 411 protruding away from the lifting guide rail 32. The synchronous transfer unit 40 also includes a pivot center shaft 43 passing through the pivot seat 411 and the lifting cantilever 42, so that the pivot seat 411 and the lifting cantilever 42 form a pivotal engagement. The axis of the pivot center shaft 43 is the pivot center between the lifting seat 41 and the lifting cantilever 42, and the pivot center shaft 43 extends in a direction parallel to the lifting guide rail 32. As a result, the crystal lifting unit 21 and the cover lifting unit 22 can maintain a constant vertical height when rotating with the lifting cantilever 42, which is safer when the furnace cover 11 moves vertically away from the opening of the furnace body 12.

[0049] Optionally, the lifting cantilever 42 includes a reinforcing rib 421, which extends along the length of the lifting cantilever 42, i.e., in the direction in which the lifting cantilever 42 protrudes beyond the lifting guide rail 32. When the crystal lifting unit 21 is connected to the crystal 200, or the lid lifting unit 22 is connected to the furnace lid 11, the reinforcing rib 421 can enhance the lifting cantilever 42's ability to bear the weight of the crystal 200 or the furnace lid 11, and reduce the amplitude of tensile bending deformation under gravity.

[0050] It is worth noting that the present invention does not specifically limit the number of lifting guide rails 32; there can be one or more lifting guide rails 32. When multiple lifting guide rails 32 are provided, the lifting seat 41 and the multiple lifting guide rails 32 form a sliding fit, as long as the multiple lifting guide rails 32 are parallel to each other and extend in the vertical direction. Even if multiple lifting guide rails 32 are provided, only one sliding pair is formed between the lifting seat 41 and the lifting guide unit 30. In addition, the lifting guide rail 32 in this application refers to the structure used to slide the lifting seat 41 to define the lifting trajectory of the crystal lifting unit 21 and the lid lifting unit 22. The furnace lifting unit can be connected to the lifting guide rail 32 or other lifting guide structures. The direction of the lifting movement of the lifting unit is preferably the vertical direction.

[0051] Optionally, the lifting guide unit 30 also includes a screw drive mechanism 33 mounted on the side column 31. The screw drive mechanism 33 is connected to the lifting seat 41 and is used to generate power to drive the synchronous transfer unit 40 to slide along the lifting guide rail 32.

[0052] Although the synchronous transfer unit 40 bears the weight of the crystal lifting assembly, the lid lifting assembly, the crystal 200, or the furnace lid 11, increasing the range of tension and bending of the synchronous transfer unit 40, since the crystal lifting unit 21 and the lid lifting unit 22 are both installed on the same lifting arm 42, the lifting arm 42 provides an installation and positioning reference for both the crystal lifting unit 21 and the lid lifting unit 22. When the crystal lifting unit 21 and the lid lifting unit 22 follow the synchronous transfer unit 40 up and down, they remain relatively stationary, so that the offset of the crystal lifting assembly relative to the lifting guide rail 32 is consistent with the offset of the lid lifting assembly relative to the lifting guide rail 32.

[0053] If the angle between the axis of the crystal extraction unit 21 and the extension direction of the lifting guide rail 32 is taken as the offset α of the crystal extraction unit 21 relative to the lifting guide rail 32, and the angle between the axis of the furnace cover 11 and the extension direction of the lifting guide rail 32 is taken as the offset β of the cover lifting unit 22 relative to the lifting guide rail 32, then the offset α = the offset β, and the axis of the crystal extraction unit 21 and the axis of the furnace cover 11 can be kept coincident or parallel. This can avoid the seed crystal 210 scraping the furnace cover 11 or the crystal extraction unit 21 scraping the furnace cover 11 during the process of lifting the crystal 200 or the crucible 14 below the crystal 200, and also eliminates the need to adjust the structure and orientation of the crystal extraction unit 21 and the cover lifting unit 22 before the new round of crystal 200 growth preparation, reducing time consumption and manual adjustment costs.

[0054] In one embodiment, the crystal production equipment further includes a counterweight structure detachably connected to the synchronous transfer unit 40. The counterweight structure is connected to the synchronous transfer unit 40 on the side of the synchronous transfer unit 40 that is relatively far away from the crystal lifting unit 21 and the lid lifting unit 22. When the crystal lifting unit 21 connects the seed crystal 210 and the crystal rod 220, and the lid lifting unit 22 connects the furnace lid 11, the counterweight structure connected to the synchronous transfer unit 40 can alleviate the tensile bending deformation of the synchronous transfer unit 40 caused by the gravity of the crystal 200 or the furnace lid 11. This can offset or reduce the deviation between the actual lifting trajectory of the crystal 200 or the furnace lid 11 and the ideal lifting trajectory defined by the lifting guide rail 32. After the crystal rod 220 is removed and the crystal furnace 10 is cleaned, the furnace lid 11 can be connected to the furnace body 12 more smoothly and accurately.

[0055] In one embodiment, the crystal production equipment further includes a lid alignment mechanism 17, which includes a correction element and a sliding element. The correction element is connected to the top furnace 121 and can be conical, elliptical, or pyramidal in shape, with a pointed tip pointing away from the furnace bottom 15. The sliding element is connected to the furnace cover 11. To accommodate the correction element, the sliding element can have a conical groove with an opening facing the furnace bottom 15 and the frame 60. The groove can be conical, elliptical, or pyramidal, and the inner wall shape of the groove matches that of the correction element. The correction element can slide and engage with the sliding element during the lowering and reconnection of the furnace cover 11 to the top furnace 121. When the correction element is fully inserted into the conical groove of the sliding element and fixedly engaged with it, the furnace cover 11 and the top furnace 121 form a sealed fit.

[0056] The cone tip of the correcting element is smaller than the opening size of the cone groove of the sliding element, which facilitates guiding the correcting element into the sliding element. When the lid lifting unit 22 lowers the furnace lid 11 to the top furnace 121, as long as the coaxiality deviation between the furnace lid 11 and the furnace body 12 is within the allowable range, the correcting element can extend into the sliding element. Finally, under the sliding cooperation of the correcting element and the sliding element, the furnace lid 11 is guided to be coaxial with the furnace body 12. The lid closing alignment mechanism 17 further increases the allowable upper limit of the coaxiality deviation between the furnace lid 11 and the furnace body 12.

[0057] It is understood that in other embodiments, the correction element may also be provided on the furnace cover 11, and correspondingly, the sliding element may also be provided on the top furnace 121.

[0058] In one embodiment, the crystal production equipment further includes a furnace alignment mechanism, which comprises a centering element and a sliding element. The centering element is connected to the bottom furnace 122 and can be conical, elliptical, or pyramidal in shape, with a pointed tip pointing away from the furnace bottom 15. The sliding element is connected to the top furnace 121. To accommodate the centering element, the sliding element can have a conical groove with an opening facing the furnace bottom 15 and the frame 60. The conical groove can be conical, elliptical, or pyramidal, and the inner wall shape of the groove matches that of the centering element. The centering element can slide and engage with the sliding element during the lowering of the top furnace 121 and reconnection to the bottom furnace 122. When the centering element is fully inserted into the conical groove of the sliding element and fixedly engaged with it, the top furnace 121 and the bottom furnace 122 form a sealed engagement.

[0059] The cone tip size of the centering element is smaller than the cone groove opening size of the sliding element, which is beneficial to guiding the centering element into the sliding element. When the furnace lifting unit lowers the top furnace 121 to the bottom furnace 122, as long as the coaxiality deviation between the top furnace 121 and the bottom furnace 122 is within the allowable range, the centering element can be inserted into the sliding element. Finally, under the sliding cooperation of the centering element and the sliding element, the top furnace 121 is guided to be coaxial with the bottom furnace 122. The setting of the furnace closing centering mechanism increases the allowable upper limit of the coaxiality deviation between the top furnace 121 and the bottom furnace 122.

[0060] It is understood that in other embodiments, the centering element may also be provided in the top furnace 121, and correspondingly, the sliding element may also be provided in the bottom furnace 122.

[0061] In one embodiment, there are multiple hook elements 221 and hook adapters 112, with each hook adapter 112 corresponding to one hook element 221. The axis of the lifting unit, i.e., the axis of the upper shaft 211, extends through the line connecting the hinge points of the multiple hook elements 221 and the lifting arm 42, forming the shape. Please refer to... Figure 2 , Figure 2 In the illustrated embodiment, there are three hook elements 221 and three hook adapters 112. The projections of the three hook adapters 112 on the outer wall 113 of the furnace cover are f1, f2, and f3, respectively. The figure formed by the lines connecting f1, f2, and f3 is a triangle, the center of which is located between the center of the outer wall 113 of the furnace cover and the lifting guide unit 30. The axis of the furnace cover 11 passes through the center of the outer wall 113 of the furnace cover, which means that the center of the triangle with angles f1, f2, and f3 is located on the side of the axis of the furnace cover 11 that is relatively closer to the lifting guide rail 32.

[0062] The axis of the furnace cover 11 passes not only through the geometric center of the outer wall 113 of the furnace cover, but also through the center of the furnace cover 11. With this arrangement, when the furnace cover 11 is lifted by the lifting unit 22 via the hook element 221, the resultant force acting on the furnace cover 11 does not pass through its center of gravity, causing a slight tilt when the furnace cover 11 is lifted. Taking a circular furnace cover 11 as an example, this tilt can adjust the posture and axial direction of the furnace cover 11, and can better adapt to the situation where the actual lifting trajectory of the lifting arm 42 deviates from the ideal lifting trajectory defined by the lifting guide rail 32 due to the tensile and bending deformation caused by the weight of the furnace cover 11. Since both the crystal lifting unit 21 and the lid lifting unit 22 are installed on the same lifting arm 42, this will also cause the axis of the crystal lifting unit 21 to deviate relative to the vertical direction. Ultimately, the furnace cover 11 will be positioned such that the semicircular edge near the lifting guide unit 30 is higher than the semicircular edge away from the lifting guide unit 30. At this time, the axis of the furnace cover 11 and the axis of the crystal lifting unit 21 have the same tilting trend, which will not cause the furnace cover 11 and the crystal lifting unit 21 to get stuck.

[0063] Of course, in other embodiments, the number of hook elements 221 and hook adapters 112 can be two, four or more. Similarly, the center of the graphic formed by the projection lines of multiple hook adapters 112 on the outer wall 113 of the furnace cover is located between the geometric center of the outer wall 113 of the furnace cover and the lifting guide unit 30. When the number of hook elements 221 and hook adapters 112 is two, the midpoint of the projection line of the hook adapters 112 on the outer wall 113 of the furnace cover is located between the center of the outer wall 113 of the furnace cover and the lifting guide unit 30.

[0064] In one embodiment not shown in the figure, there is one hook adapter 112 and one hook element 221. The projection of the hook adapter 112 on the outer wall 113 of the furnace cover is located between the geometric center of the outer wall 113 of the furnace cover and the lifting guide unit 30.

[0065] The crystal production equipment also includes a seal for enclosing the portion of the crystal extraction unit 21 extending outside the crystal furnace 10. The seal can form a sealing fit with the crystal furnace 10. When the two are sealed together, the seal and the crystal furnace 10 can jointly seal and surround the crystal extraction unit 21. Optionally, the seal is connected to the furnace cover 11 and seals with the edge of the lifting opening 111. Since this application improves the problem of the seed crystal 210 or the crystal extraction unit 21 scraping the furnace cover 11 or the lifting cover unit 22 when being lifted, the lifting opening 111 through which the crystal extraction unit 21 extends into the crystal furnace 10 can be designed to be smaller. As a result, the seal for sealing and surrounding the crystal extraction unit 21 can also be designed to be thinner. In particular, the opening of the seal for fitting with the edge of the lifting opening 111 can be designed to be smaller, so that air leakage gaps are less likely to occur between the seal and the edge of the lifting opening 111.

[0066] The technical features of the above-described embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0067] Those skilled in the art should recognize that the above embodiments are merely illustrative of the present invention and are not intended to limit the present invention. Any appropriate changes and variations made to the above embodiments within the essential spirit of the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A crystal production apparatus, comprising a detachable furnace cover (11) and a furnace body (12), characterized in that, It also includes a lifting device (20) capable of lifting and lowering, a lifting guide unit (30) that defines the lifting direction of the lifting device (20), and a synchronous transfer unit (40) movably connected to the lifting guide unit (30); The lifting device (20) includes a crystal lifting unit (21) and a cover lifting unit (22), which are installed on the synchronous transfer unit (40). The synchronous transfer unit (40) is configured to move along the lifting direction defined by the lifting guide unit (30) to synchronously drive the crystal lifting unit (21) and the cover lifting unit (22) to rise and fall relative to the furnace body (12). The synchronous transfer unit (40) includes a lifting arm (42) movably disposed on the side of the lifting guide unit (30). The crystal lifting unit (21), the cover lifting unit (22) and the lifting arm (42) are installed as one unit. When the lifting arm (42) moves relative to the lifting guide unit (30) along the lifting direction, the crystal lifting unit (21) and the cover lifting unit (22) are relatively fixed. The furnace cover (11) includes a hook adapter (112), and the lid lifting unit (22) includes a hook element (221). The hook element (221) is used to hook the hook adapter (112) to suspend the furnace cover (11), wherein: The projection of the hook adapter (112) on the outer wall (113) of the furnace cover is located between the center of the outer wall (113) of the furnace cover and the lifting guide unit (30); or, The hook and hook adapter (112) and the hook and hook element (221) are multiple and correspond one to one. The center of the graphic formed by the projection line of the hook and hook adapter (112) on the outer wall (113) of the furnace cover is located between the center of the outer wall (113) of the furnace cover and the lifting guide unit (30).

2. The crystal production equipment according to claim 1, characterized in that, The synchronous transfer unit (40) further includes a lifting seat (41) movably connected to the lifting guide unit (30), the lifting seat (41) being configured to move along the lifting direction; The lifting arm (42) is rotatably connected to the lifting seat (41), and the lifting arm (42) rotates relative to the lifting guide unit (30) to change the included angle between them.

3. The crystal production equipment according to claim 2, characterized in that, The lifting arm (42) and the lifting seat (41) have a pivot center and form a pivotal engagement, and the extension direction of the pivot center is consistent with the lifting direction.

4. The crystal production equipment according to claim 1, characterized in that, The lifting unit (22) also includes a pneumatic telescopic element (222) with a degree of freedom of extension and retraction. The hook element (221) is rotatably connected to the lifting arm (42). The pneumatic telescopic element (222) is rotatably connected to the lifting arm (42) and the hook element (221), and together with the lifting arm (42), they form a linkage mechanism.

5. The crystal production equipment according to claim 1, characterized in that, The crystal production equipment also includes a counterweight structure detachably connected to the synchronous transfer unit (40), the counterweight structure being connected to the synchronous transfer unit (40) on the side of the synchronous transfer unit (40) that is relatively far away from the crystal lifting unit (21) and the cap lifting unit (22).

6. The crystal production equipment according to claim 1, characterized in that, The furnace body (12) includes a detachable top furnace (121) and a bottom furnace (122). The furnace cover (11) is detachably connected to the top furnace (121). The lifting device (20) also includes a furnace lifting unit for connecting the top furnace (121). The furnace lifting unit is movably connected to the lifting guide unit (30) and is configured to be able to move up and down along the lifting guide unit (30).

7. The crystal production equipment according to claim 6, characterized in that, The crystal production equipment further includes a cap-closing alignment mechanism (17), which includes: A correction element is connected to one of the top furnace (121) and the furnace cover (11); A sliding element is connected to the other of the top furnace (121) and the furnace cover (11); The sliding element can move along the correction element and form a sliding fit with it until the furnace cover (11) and the top furnace (121) form a sealed fit and are fixedly fitted.

8. The crystal production equipment according to claim 6, characterized in that, The crystal production equipment also includes a furnace alignment mechanism, which comprises: The centering element is connected to one of the top furnace (121) and the bottom furnace (122); A sliding contact element is connected to the other of the top furnace (121) and the bottom furnace (122); The sliding contact element can move along the centering element and form a sliding fit with it until the top furnace (121) and the bottom furnace (122) form a sealed fit and are fixedly fitted.

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