An optical measuring instrument and its real-time automatic calibration system

Abstract

The present invention discloses an optical measuring instrument and its real-time automatic calibration system. A first lens is fixed between the adapter and the sleeve of the optical measuring instrument. The mirror is fixed by a pressure plate. The objective lens is fixed on the prism carrier through an objective lens conversion interface. The beam splitter prism is installed on the prism carrier. The second lens is installed between the first sleeve and the second sleeve. The cylindrical adapter block is installed at the first threaded hole of the first sleeve by screw extrusion. The cylindrical lens is fixed on the groove body of the cylindrical adapter block. The sliding sleeve is installed on the second sleeve by a tight fit. The quadrant detector is installed on the sliding sleeve through the second threaded hole provided on the sliding sleeve. The structure of the present invention is simple, with low cost, good integration and high precision. At the same time, it provides a detection system for the small offset of the fiber array during the optical packaging process of the optical switching chip, which helps to reset the fiber array in real time to maintain the stable coupling between the fiber array and the chip, and the working loss is stably maintained at the minimum value.

Description

Technical Field

[0001] The present invention relates to the technical fields of optical measurement, observation technology, and packaged integrated circuit technology, and particularly relates to an optical measurement instrument and its real-time automatic calibration system. Background Art

[0002] Real-time measurement of the micro-nano displacement and vibration of an object is crucial in the fields of information technology and microelectromechanical systems (MEMS). There are many measurement methods that can achieve sub-micron displacement resolution. As an important non-contact and non-destructive detection technology, optical measurement has the advantages of simple structure, high precision, good stability, and easy implementation, and has been widely used. The main technologies include differential interference method, confocal microscope, coherent interference method, and astigmatism method. In the packaging process of a silicon photonics chip, an external optical signal is often transmitted into an optical waveguide on the chip through an optical fiber array in the form of grating coupling. After the optical fiber array is coupled to the on-chip grating port in the best state, there is the minimum loss. However, during the entire packaging process, sometimes the optical fiber array does not work in a very stable environment. For example, after the electrical packaging is completed, the optical fiber array needs to be coupled with the silicon photonics chip only to test the static operating point of the on-chip optical switch. The entire test time is relatively long, and it is impossible to ensure that the position of the optical fiber array does not drift. When drift occurs, the traditional calibration method is to monitor the increase in loss through an optical power meter and manually adjust it or adjust it by scanning the loss at surrounding positions through a computer. Such a calibration method often takes a long time. Therefore, a detection and self-calibration system that can monitor in real time, respond quickly, and adjust quickly is needed to reset the optical fiber array and keep the coupling in the state of minimum loss. Summary of the Invention

[0003] The purpose of the present invention is to provide an optical measurement instrument and its real-time automatic calibration system in view of the deficiencies of the prior art. The present invention is used to monitor the small displacements of the optical fiber array in two dimensions due to various external interference factors during the chip packaging process and automatically calibrate them, so that the coupling between the optical fiber array and the on-chip grating port is always in the state of minimum loss, and at the same time, the calibration speed is faster, which is conducive to realizing real-time automatic calibration.

[0004] The object of the present invention is achieved by the following technical solutions: In the first aspect of the embodiments of the present invention, an optical measuring instrument is provided, including an adapter for connecting an external laser, a sleeve, a reflecting mirror, a pressure plate, an objective lens, an objective lens conversion interface, a beam splitter prism, a prism carrier, a first sleeve, a second sleeve, a sliding sleeve, a second lens, a cylindrical lens, a cylindrical adapter block, a first threaded hole, a second threaded hole, a first lens, and a quadrant detector; a first lens is fixed between the adapter and the sleeve, the reflecting mirror is fixed on the optical measuring instrument by the pressure plate, the objective lens is fixed on the prism carrier through the objective lens conversion interface, the beam splitter prism is installed on the prism carrier, the second lens is embedded and installed between the first sleeve and the second sleeve and pressed tightly, the first sleeve and the second sleeve are rotationally connected by threads, the first sleeve is provided with a first threaded hole, the cylindrical adapter block is installed at the first threaded hole by screw extrusion, the cylindrical adapter block is provided with a groove and a through hole for light to pass through the cylindrical lens, the cylindrical lens is fixed on the groove by quick-drying glue, the sliding sleeve is installed on the second sleeve by a tight fit, the sliding sleeve is provided with a second threaded hole, and the quadrant detector is installed on the sliding sleeve through the second threaded hole.

[0005] Further, the laser is a He-Ne laser with a wavelength of 632.8 nm.

[0006] Further, the numerical aperture of the objective lens is 0.55.

[0007] Further, the beam splitting ratio of the beam splitter prism is 50 / 50.

[0008] Further, the laser wavelength of the collimator of the first lens is 633 nm, and the collimation diameter is 1 mm - 4 mm.

[0009] Further, the collimation diameter of the collimator is 2.24 mm.

[0010] Further, the working wavelength of the quadrant detector is 630 nm - 650 nm, and the working voltage is less than 25 V.

[0011] Further, the quadrant detector is controlled and adjusted by the three-screw fixing method.

[0012] In the second aspect of the embodiments of the present invention, a real-time automatic calibration system is provided, including:

[0013] An electric displacement platform for controlling the movement of the fiber array in the xy direction;

[0014] The above-mentioned optical measuring instrument;

[0015] An optical power meter for monitoring the coupling loss of the fiber array; and

[0016] A computer, connected to the optical measuring instrument.

[0017] Furthermore, the electrically controlled displacement platform is provided with a fixture.

[0018] The beneficial effects of the present invention are as follows: The optical measuring instrument of the present invention has a simple structure, which helps to reduce costs, has good integration and high precision. The highest offset measurement precision can reach the nanometer level, which helps to accurately measure the small offsets that occur in two dimensions on the horizontal plane of the fiber array after coupling during the packaging process of the silicon photon chip due to external interference; Through the real-time automatic calibration system including the optical measuring instrument, when the optical measuring instrument measures the small offset of the fiber array, the real-time automatic calibration system can perform real-time correction on the fiber array, so that the fiber array is reset to the optimal coupling position. The real-time automatic calibration system has the advantages of fast response, fast calibration speed and high precision. Description of the Drawings

[0019] Figure 1 is a schematic diagram of the working principle of the optical measuring instrument in the present invention;

[0020] Figure 2 is the front view of the optical measuring instrument in the present invention;

[0021] Figure 3 is a schematic diagram of the semi-sectional structure of the optical measuring instrument in the present invention;

[0022] Figure 4 is the top view of the second lens, cylindrical lens and corresponding sleeve in the present invention;

[0023] Figure 5 is of the present invention Figure 4 the schematic diagram of the sectional structure in the B-B direction;

[0024] Figure 6 is the schematic diagram of the structure of the cylindrical adapter block equipped with a cylindrical lens in the present invention;

[0025] Figure 7 is the relationship diagram between the defocus signal SFE and the defocus amount Δz in the present invention;

[0026] Figure 8 is the schematic diagram of the working structure of the optical measuring instrument in the present invention;

[0027] Figure 9 is the schematic diagram of the structure of the real-time automatic calibration system in the present invention.

[0028] In the figure, there are optical fiber array 1, lens group 2, optical system 3, adapter 4, sleeve 5, mirror 6, pressure plate 7, objective lens 8, objective lens conversion interface 9, beam splitter prism 10, prism carrier 11, first sleeve 12, second sleeve 13, sliding sleeve 14, second lens 15, cylindrical lens 16, cylindrical adapter block 17, groove body 171, through hole 172, first threaded hole 18, second threaded hole 19, laser 20, first lens 21, and quadrant detector 22. Detailed implementation mode

[0029] Here, the exemplary embodiments will be described in detail, and the examples are shown in the drawings. When the following description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The implementation modes described in the following exemplary embodiments do not represent all implementation modes consistent with the present invention. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present invention as detailed in the appended claims.

[0030] The terms used in the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The singular forms "a", "the", and "said" used in the present invention and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0031] It should be understood that although the terms first, second, third, etc. may be used in the present invention to describe various information, such information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present invention, the first information may also be referred to as the second information, and similarly, the second information may also be referred to as the first information. Depending on the context, the word "if" as used herein may be interpreted as "when" or "while" or "in response to determining".

[0032] The present invention will be described in detail below with reference to the drawings. Without conflict, the features in the following embodiments and implementation modes can be combined with each other.

[0033] The optical measurement instrument in the present invention includes adapter 4, sleeve 5, mirror 6, pressure plate 7, objective lens 8, objective lens conversion interface 9, beam splitter prism 10, prism carrier 11, first sleeve 12, second sleeve 13, sliding sleeve 14, second lens 15, cylindrical lens 16, cylindrical adapter block 17, first threaded hole 18, second threaded hole 19, first lens 21, and quadrant detector 22.

[0034] See Figures 2 - 6, the adapter 4 is used to connect the external laser 20. The laser 20 is installed on the adapter 4 through fiber optic connection. A first lens 21 is fixed between the adapter 4 and the sleeve 5. The pressure plate 7 fixes the mirror 6 on the optical measuring instrument. The objective lens 8 is fixed on the prism carrier 11 through the objective lens conversion interface 9. The beam splitter prism 10 is installed on the prism carrier 11. The second lens 15 is inlaid and installed between the first sleeve 12 and the second sleeve 13 and pressed tightly. The first sleeve 12 and the second sleeve 13 are rotationally connected by threads. The first sleeve 12 is provided with a first threaded hole 18. The cylindrical adapter block 17 is installed at the first threaded hole 18 by screw extrusion. The cylindrical adapter block 17 is provided with a groove 171 and a through hole 172. The cylindrical lens 16 is fixed on the groove 171 by quick-drying glue. The through hole 172 is used to achieve the function of light transmission so that light can pass through the cylindrical lens 16. The sliding sleeve 14 is installed on the second sleeve 13 by a tight fit. The sliding sleeve 14 is provided with a second threaded hole 19. The second threaded hole 19 is used to install the quadrant detector 22.

[0035] Preferably, the laser 20 is a He-Ne laser with a wavelength of 632.8 nm, which is used as the laser source in this embodiment. The objective lens 8 is a 50X Mitutoyo Plan Apo Infinity Corrected Long WD Objective with a numerical aperture of 0.55. When selecting the objective lens 8, an objective lens 8 with a larger numerical aperture should be preferred, which helps to increase the measurement resolution. That is to say, a smaller focal length should be selected as much as possible. In this embodiment, the selected focal length is 4 mm. Under the condition of this objective lens focal length, when the distance between the second lens 15 and the cylindrical lens 16 reaches 180 mm, the resolution of defocus amount detection can reach 1 nm, while when the distance between the second lens 15 and the cylindrical lens 16 is only 5 mm, the detection resolution of defocus amount is only 40 nm.

[0036] Preferably, the beam splitting ratio of the beam splitter prism 10 is 50 / 50.

[0037] In this embodiment, the laser wavelength of the collimator of the first lens 21 is 633 nm, and the collimation diameter is 1 mm - 4 mm. Further preferably, the collimation diameter of the collimator is 2.24 mm. In this embodiment, Thorlabs' FC260FC-B-633 is selected as the collimator, and its collimation diameter is 2.24 mm; it should be understood that other models that meet the requirements can also be selected for the collimator of the first lens 21.

[0038] In this embodiment, the working wavelength of the quadrant detector 22 is 630 nm - 650 nm, the working voltage is less than 25 V, and the size of the photosensitive surface can be a circle with a diameter of about 1 cm or a square with a side length of about 1 cm. In this embodiment, the quadrant detector 22 selects the QP50-6-42u SD2 of the first sensor; it should be understood that the quadrant detector 22 can also select other models that meet the requirements.

[0039] In this embodiment, the outer diameter of the cylindrical adapter block 17 is 20 mm; it should be understood that the cylindrical adapter block 17 can be designed with groove bodies 171 of different sizes for cylindrical lenses 16 of different sizes. Such a design facilitates the replacement of different cylindrical lenses 16, and can be specifically designed according to the actual situation.

[0040] In some other embodiments, a sleeve for adjusting the distance can also be added between the first sleeve 12 and the second sleeve 13. Since the first sleeve 12 and the second sleeve 13 are rotationally connected by threads, a threaded adapter sleeve can be added between the two, so that the distance between the second lens 15 and the cylindrical lens 16 can be arbitrarily adjusted at a distance greater than 5 mm. With such a design, the second lens 15, the cylindrical lens 16, and the distance between the two lenses can be quickly adjusted to change the accuracy and range of the optical measuring instrument (the larger the accuracy, the smaller the range), thereby adapting to the needs of different accuracies and measurement ranges.

[0041] In this embodiment, the optical measuring instrument uses a laser with a wavelength of 632.8 nm generated by the He-Ne laser 20. After the light passes through the collimating mirror of the first lens 21 fixed between the adapter 4 and the sleeve 5, it reaches the reflecting mirror 6. The light enters the cube-shaped beam splitter prism 10 through the 45° reflecting mirror 6, and its beam splitting ratio is 50 / 50. The light reflected by the beam splitter prism 10 is focused by the objective lens 8 on the reflection coating on the surface of the fiber array 1. The reflected light passes through the beam splitter prism 10, and after being converged by the second lens 15 and the cylindrical lens 16 assembled between the first sleeve 12 and the second sleeve 13, a circular Gaussian spot is formed on the quadrant detector 22 fixed by the second threaded hole 19 above the sliding sleeve 14, as Figure 8 shown. This circular Gaussian spot is used to detect the defocus amount on the surface of the fiber array 1.

[0042] Among them, the quadrant detector 22 is controlled and adjusted using the three-screw fixing method. Further, the second threaded hole 19 is three threaded holes that are 120° apart from each other. Three screws can be used to fix the quadrant detector 22 and adjust its position so that the center of the Gaussian spot is at the center of the quadrant. Installation of the quadrant detector 22: First, place the object to be measured at a position 4 mm (focal length) away from the objective lens 8. Then, adjust the three screws to change the position of the quadrant detector 22 so that the center of the circular spot is at the center of the quadrant detector 22, and at this time, the voltage signals VA, VB, VC, and VD of all four quadrants need to be equal. Generally, since it is difficult to accurately place the object to be measured at a position 4 mm away from the objective lens, it is necessary to slightly rotate the first sleeve 12 and the second sleeve 13 at this time to cause a certain change in the distance between them. At the same time, move the sliding sleeve 14 to change the distance between the quadrant detector 22 and the cylindrical lens 16. Then, adjust the position of the quadrant detector 22 through the three screws to make the voltage signals of the four quadrants the same.

[0043] As Figure 1 shown, the lens group 2 includes a reflector 6, an objective lens 8, and a beam splitter prism 10, and the optical system 3 includes a second lens 15 and a cylindrical lens 16. As Figure 1 (a) shows, the light is focused on the reflective coating on the surface of the fiber array 1, and the reflected light passes through the lens group 2 and then through the optical system 3 to form a circular Gaussian spot on the rear quadrant detector 22. At this time, the Gaussian spot is a perfect circle, and the electrical signals of the four quadrants obtained by the quadrant detector 22 are (V A +V C )-(V B +V D ) = 0. When the surface of the fiber array 1 is far from the focus, as Figure 1 (b) shows, the electrical signals of the four quadrants obtained by the quadrant detector 22 are (V A +V C )-(V B +V D ) > 0. When the surface of the fiber array 1 is close to the focus, as Figure 1 (c) shows, the electrical signals of the four quadrants obtained by the quadrant detector 22 are (V A +V C )-(V B +V D ) < 0.

[0044] The quadrant detector 22 transmits the electrical signals of the four quadrants obtained to the computer, and the defocus signal can be obtained through processing using LabVIEW with the following formula:

[0045]

[0046] Among them, VA , V B , V C , V D respectively represent the electrical signals in four quadrants, V(SUM) = V A + V B + V C + V D .

[0047] As Figure 7 shown, within a certain defocus range (micrometer level), the defocus signal has a linear relationship with the defocus amount.

[0048] The defocus amount is obtained through computer processing of the defocus signal measured on the surface of the fiber array 1 by this optical measurement instrument, that is, the displacement amount of the fiber array in a certain axial direction.

[0049] The optical measurement instrument of the present invention has a simple structure, which helps to reduce costs, has good integration and high precision. The highest offset measurement precision can reach the nanometer level, which helps to accurately measure the small offsets that occur in two dimensions of the horizontal plane of the fiber array after coupling during the packaging process of the silicon photon chip due to external interference.

[0050] It is worth mentioning that the embodiment of the present invention also provides a real-time automatic calibration system.

[0051] As Figure 9 shown, this real-time automatic calibration system is used for optical detection and real-time automatic calibration of the small offsets of the fiber array during the optical packaging process of the optical switching chip. This system includes an electronically controlled displacement platform, the above-mentioned optical measurement instrument, an optical power meter, and a computer. Among them, the electronically controlled displacement platform can be used to control the movement of the fiber array 1 in the xy direction, the optical measurement instrument is used to detect small displacements in the xy direction, the optical power meter is used to monitor the coupling loss of the fiber array 1, and the computer is interconnected with the above-mentioned optical measurement instrument.

[0052] Specifically, as Figure 8 shown, the laser 20 serves as the external light source of the entire system, emitting laser with a wavelength of 632.8 nm. The laser passes through the collimating mirror of the first lens 21 and then reaches the reflecting mirror 6. The collimated laser is reflected by the reflecting mirror 6 and then enters the beam splitter prism 10. The laser is reflected by the beam splitter prism 10 and focused on the focal point by the objective lens 8. The laser is then reflected and transmitted through the beam splitter prism 10, and after being converged by the second lens 15 and the cylindrical lens 16, a circular Gaussian light spot is formed on the four-quadrant detector 22.

[0053] The four-quadrant detector 22 will detect and obtain the electrical signals in four quadrants, which are V A , V B , V C , V D, the four-quadrant detector 22 transmits the electrical signals of the four quadrants it acquires to the computer.

[0054] It should be understood that this real-time automatic calibration system also includes a data acquisition recorder. The four output electrical signal ports of the four-quadrant detector 22 are connected to the four input ports of the data acquisition recorder, and the data acquisition recorder is connected to the computer via a serial port. In this way, the electrical signals of the four quadrants acquired by the data acquisition recorder can be transmitted to the computer.

[0055] Preferably, the data acquisition recorder selects the USB-4431 data acquisition recorder of National Instrument, and the effect of collecting data is better.

[0056] The computer processes the defocus signal using labview according to the formula of the defocus signal:

[0057]

[0058] Among them, V A , V B , V C , V D respectively represent the electrical signals of the four quadrants, V(SUM)=V A +V B +V C +V D , then, the computer processes according to the relationship between the defocus signal and the defocus amount to obtain the defocus amount, that is, the displacement amount of the fiber optic array in a certain axial direction. Then the computer transmits the defocus amount signals in two dimensions on the horizontal plane to the electric control displacement platform. The electric control displacement platform and the computer use an RS232 or RJ45 control interface.

[0059] It should be understood that the computer can perform back-calculation to obtain the defocus amount based on the relationship as shown in Figure 7 when the defocus signal is known.

[0060] The electric control displacement platform is provided with a fixture. After receiving the defocus amount signal, it can control the fiber optic array 1 to move in the xy direction through the fixture. When the defocus amount signal is negative, it means that the fiber optic array 1 has moved closer to the optical measuring instrument, and the distance is the small displacement of the defocus amount; on the contrary, when the defocus amount signal is positive, the fiber optic array 1 has moved away from the optical measuring instrument, and the distance is the small displacement of the defocus amount; by processing the positive and negative and numerical values of the defocus amount, the computer will transmit corresponding movement instructions to the electric control displacement stage to correct the fiber optic array 1, so as to realize real-time reset of the fiber optic array 1, so that the fiber optic array 1 can work in a coupled manner in an environment with external interference, and keep the loss stable at the minimum value.

[0061] Examples are given for the application scenarios of the embodiments of the present invention: Currently, silicon photon chips tend to develop towards large scale. In the optical packaging process of large-scale optical chips, one step is the dispensing and curing of the fiber array 1. During this process, due to the curing shrinkage characteristics of the ultraviolet glue, a pulling force is often generated on the fiber array 1, which will destroy the original optimal coupling state, bring relatively large additional losses, and even directly lead to the failure of coupling. However, during this process, the pulling force is not in a single direction and may be multi-dimensional, making it difficult to detect this displacement and thus determine how to modify the dispensing sequence and position. The present invention can also be used as an effective means to detect what kind of displacement has occurred to the fiber array 1 during the process of dispensing and curing the fiber array 1. And it can be used to explore how different displacement amounts in different directions will affect the coupling loss.

[0062] Through the provided real-time automatic calibration system, when the optical measuring instrument measures a small offset of the fiber array 1, the real-time automatic calibration system can perform real-time correction on the fiber array 1, enabling the fiber array 1 to reset to the optimal coupling position. The real-time automatic calibration system has the advantages of fast response, fast calibration speed, and high precision.

[0063] When the fiber array 1 generates a displacement, the displacement amount is calculated based on the signals of the elliptical light spot collected by the four-quadrant detector 22 in the four quadrants. After signal processing by the computer, a feedback signal is used to control the real-time reset of the fiber array 1. During this process, the corresponding loss can also be recorded by an optical power meter at the same time. The present invention provides a detection system for the small offset of the fiber array 1 during the packaging process of silicon photon chips, and provides real-time reset of the fiber array to maintain the stable coupling between the fiber array 1 and the chip, with the working loss always at the minimum value and stable. At the same time, it also solves the problem that it is difficult to specifically characterize the offset amount of the fiber array 1 during the optical packaging process of silicon photon chips.

[0064] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An optical measuring instrument, characterized in that, It includes an adapter (4) for connecting an external laser (20), a sleeve (5), a mirror (6), a pressure plate (7), an objective lens (8), an objective lens conversion interface (9), a beam splitter prism (10), a prism carrier (11), a first sleeve (12), a second sleeve (13), a sliding sleeve (14), a second lens (15), a cylindrical lens (16), a cylindrical adapter block (17), a first threaded hole (18), a second threaded hole (19), a first lens (21), and a quadrant detector (22); a first lens (21) is fixed between the adapter (4) and the sleeve (5), the pressure plate (7) fixes the mirror (6) on this optical measuring instrument, the objective lens (8) is fixed on the prism carrier (11) through the objective lens conversion interface (9), the beam splitter prism (10) is installed on the prism carrier (11), the second lens (15) is inlaid and installed between the first sleeve (12) and the second sleeve (13) and pressed tightly, the first sleeve (12) and the second sleeve (13) are rotationally connected by threads, the first sleeve (12) is provided with a first threaded hole (18), the cylindrical adapter block (17) is installed at the first threaded hole (18) by screw extrusion, the cylindrical adapter block (17) is provided with a groove body (171) and a through hole (172) facilitating light to pass through the cylindrical lens (16), the cylindrical lens (16) is fixed on the groove body (171) by quick-drying glue, the sliding sleeve (14) is installed on the second sleeve (13) by a tight fit, the sliding sleeve (14) is provided with a second threaded hole (19), and the quadrant detector (22) is installed on the sliding sleeve (14) through the second threaded hole (19).

2. The optical measuring instrument according to claim 1, characterized in that, The laser (20) selects a He-Ne laser with a wavelength of 632.8 nm.

3. The optical measuring instrument according to claim 1, characterized in that, The numerical aperture of the objective lens (8) is 0.

55.

4. The optical measuring instrument according to claim 1, characterized in that, The beam splitting ratio of the beam splitter prism (10) is 50 / 50.

5. The optical measuring instrument according to claim 1, characterized in that, The laser wavelength of the collimator of the first lens (21) is 633 nm, and the collimation diameter is 1 mm - 4 mm.

6. The optical measuring instrument according to claim 5, characterized in that, The collimation diameter of the collimator is 2.24 mm.

7. The optical measuring instrument according to claim 1, characterized in that, The working wavelength of the quadrant detector (22) is 630 nm - 650 nm, and the working voltage is less than 25 V.

8. The optical measuring instrument according to claim 1, characterized in that, The quadrant detector (22) uses a three-screw fixing method for control and adjustment.

9. A real-time automatic calibration system, characterized in that, It includes: An electric control displacement platform for controlling the movement of the fiber array (1) in the xy direction; The optical measuring instrument according to any one of claims 1 - 8; An optical power meter for monitoring the coupling loss of the fiber array (1); and A computer connected to the optical measuring instrument.

10. The real-time automatic calibration system according to claim 9, characterized in that The electric control displacement platform is provided with a fixture.

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