Beam deflection device and beam deflection method

Abstract

The present invention provides a beam deflection device and a beam deflection method. The device includes a base, a main seat, a flat mirror seat with a light passing hole, a flat mirror, and a projection objective lens. The main seat is fixed on the base through a main seat three-point push and three-point pull mechanism. The projection objective lens is installed on the main seat. The flat mirror is fixed on the flat mirror seat. The flat mirror seat is fixed on the inclined surface of the main seat through a flat mirror three-point push and three-point pull mechanism. By adjusting the base through the main seat three-point push and three-point pull mechanism and adjusting the flat mirror seat through the flat mirror three-point push and three-point pull mechanism, the beam deflected by the flat mirror is perpendicular to the horizontal plane and coaxial with the optical axis of the projection objective lens. Using the present invention, the beam can be quickly and efficiently deflected from the horizontal direction to the vertical direction, and the beam deflected by the flat mirror is coaxial with the optical axis of the projection objective lens and perpendicular to the horizontal plane.

Description

Technical Field

[0001] The present invention relates to the field of optical testing, and particularly to a beam deflection device and a beam deflection method. Background Art

[0002] In optical testing, according to the positions of the components of the optical system, a horizontal beam needs to be deflected into a vertical beam and be strictly perpendicular and coaxial with the vertical projection objective lens and its optical axis. The existing solution at present is to install a plane mirror with a beam turning function on a five-axis adjustment mechanism, install the projection objective lens on another five-axis adjustment mechanism, and place a semi-transparent paper on the upper end surface of the projection objective lens. If the projection light spot is not oval, then adjust the angles of the five dimensions in the five-axis adjustment mechanism to make the light spot on the semi-transparent paper oval. Then adjust these two five-axis adjustment mechanisms to achieve the vertical deflection of the optical axis, the verticality of the projection objective lens and its coaxiality with the vertical beam. However, this technology has cumbersome adjustment, complex mechanism, high cost and is not easy to achieve the expected adjustment requirements. Summary of the Invention

[0003] The purpose of the present invention is to overcome the defects of the existing technology such as cumbersome adjustment, complex mechanism and high cost, and propose a beam deflection device and a beam deflection method, so that the beam deflection can easily achieve the expected adjustment requirements.

[0004] The beam deflection device provided by the present invention includes a base, a main seat, a plane mirror seat with a light passing hole, a plane mirror and a projection objective lens. The main seat is fixed on the base through a main seat three-top-three-pull mechanism. The projection objective lens is installed on the main seat. The plane mirror is fixed on the plane mirror seat. The plane mirror seat is fixed on the inclined plate of the main seat through a plane mirror three-top-three-pull mechanism. Through the adjustment of the base by the main seat three-top-three-pull mechanism and the adjustment of the plane mirror seat by the plane mirror three-top-three-pull mechanism, the beam deflected by the plane mirror is perpendicular to the horizontal plane and coaxial with the optical axis of the projection objective lens.

[0005] Preferably, the main seat is a hollow structure, specifically including a horizontally placed bottom plate, a group of side plates and an inclined plate. The bottom plate is fixed on the base through a main seat three-top-three-pull mechanism. A group of side plates are vertically fixed on the bottom plate at intervals. The inclined plate is fixed on the side plates obliquely relative to the horizontal plane with at least two bolts. A second light passing hole is opened at a position corresponding to the first light passing hole on the inclined plate. The plane mirror seat is fixed at the second light passing hole through a plane mirror three-top-three-pull mechanism.

[0006] Preferably, the plane mirror three-top-three-pull mechanism includes three in-rotation bolts of the plane mirror seat and three out-rotation bolts of the plane mirror seat evenly distributed on the plane mirror seat. The three in-rotation bolts of the plane mirror seat are tightened inward relative to the inclined plate, and the three out-rotation bolts of the plane mirror seat are tightened outward relative to the inclined plate to adjust the spatial position of the plane mirror.

[0007] Preferably, the three externally-rotating bolts of the plane mirror base and the three internally-rotating bolts of the plane mirror base are arranged at intervals.

[0008] Preferably, the three-top-three-pull mechanism of the main base includes three internally-rotating bolts and three externally-rotating bolts evenly distributed on the main base. The three internally-rotating bolts of the main base are tightened inward relative to the inclined plate, and the three externally-rotating bolts of the main base are tightened outward relative to the inclined plate, so as to adjust the spatial position of the projection objective lens.

[0009] Preferably, the three internally-rotating bolts and the three externally-rotating bolts of the main base are divided into three groups and arranged at intervals. Each group includes one internally-rotating bolt and one externally-rotating bolt of the main base. Moreover, the internally-rotating bolts of the main base are distributed at the edge of the bottom plate, and the externally-rotating bolts of the main base are placed inside the internally-rotating bolts of the main base.

[0010] The present invention also provides a beam folding method implemented by a beam folding mechanism, including the following steps:

[0011] S1. Fix the main base on the base through the three-top-three-pull mechanism of the main base, and install the projection objective lens on the main base;

[0012] S2. Place the horizontal two-dimensional scale on the upper end face of the projection objective lens. By adjusting the three-top-three-pull mechanism of the main base, make the two-dimensional directions of the horizontal two-dimensional scale both horizontal, and fix the position of the main base;

[0013] S3. Fix the plane mirror base on the inclined surface of the main base through the three-top-three-pull mechanism of the plane mirror;

[0014] S4. Turn on the light source, lay the semi-transparent paper flat on the upper end face of the projection objective lens. The light beam is projected onto the plane mirror, and is refracted by the plane mirror and projected onto the semi-transparent paper to form an elliptical light spot. Adjust the three-top-three-pull mechanism of the plane mirror to make the elliptical light spot coincide with the light inlet of the projection objective lens;

[0015] S5. Replace the semi-transparent paper with an auxiliary plane mirror. The light beam emitted by the light source is projected onto the plane mirror and is refracted by the plane mirror and projected onto the auxiliary plane mirror;

[0016] S6. Use the semi-transparent paper to find the light beam refracted back by the auxiliary plane mirror around the light source. Adjust the three-top-three-pull mechanism of the plane mirror to make the light beam received by the semi-transparent paper coincide with the light outlet of the light source, and fix the position of the plane mirror.

[0017] The present invention can achieve the following technical effects: The beam folding device proposed by the present invention uses a hollow structure with an inclined surface as the main base. A plane mirror and a projection objective lens are fixed on the main base for beam folding. The main base is fixed on the base to realize the adjustment of the projection objective lens. Overall, the structure is simple, the manufacturing cost is reduced, and the three-top-three-pull mechanism of the plane mirror and the three-top-three-pull mechanism of the main base for adjustment are only composed of six bolts, making the device easy to adjust and easy to meet the expected adjustment requirements. Description of the Drawings

[0018] Figure 1 is a front view of a beam deflecting device provided according to an embodiment of the present invention.

[0019] Figure 2 is a rear view of a beam deflecting device provided according to an embodiment of the present invention.

[0020] Figure 3 is a schematic flow chart of a beam deflecting method provided according to an embodiment of the present invention.

[0021] The reference numerals therein include: base 1, main seat 2, bottom plate 2-1, side plate 2-2, inclined plate 2-3, projection objective 3, main seat three-top-three-pull mechanism 4, flat mirror 5, flat mirror three-top-three-pull mechanism 6, and flat mirror seat 7. Detailed implementation manners

[0022] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, the same modules are denoted by the same reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, their detailed descriptions will not be repeated.

[0023] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention.

[0024] Figure 1 and Figure 2 show the structures of a beam deflecting device provided according to an embodiment of the present invention from two perspectives respectively.

[0025] As Figure 1 and Figure 2 shown, the beam deflecting device provided by the present invention includes a base 1, a main seat 2, a projection objective 3, a main seat three-top-three-pull mechanism 4, a flat mirror 5, a flat mirror three-top-three-pull mechanism 6, and a flat mirror seat 7. The main seat 2 is fixed on the base 1 through the main seat three-top-three-pull mechanism 4, the projection objective 3 is installed on the main seat 2, the flat mirror 5 is installed on the flat mirror seat 7, and the flat mirror seat 7 is fixed on the main seat 2 through the flat mirror three-top-three-pull mechanism 6. First, the spatial position of the projection objective 3 is adjusted through the main seat three-top-three-pull mechanism 4 to make the optical axis of the projection objective 3 perpendicular. Next, the spatial position of the flat mirror 5 is adjusted by adjusting the flat mirror three-top-three-pull mechanism 6 to make the flat mirror 5 deflect the beam into a vertical beam. At the same time, by adjusting the spatial position of the flat mirror 5, the vertical beam deflected by the flat mirror 5 is coaxial with the projection objective 3.

[0026] The main seat 2 includes a bottom plate 2-1, side plates 2-2, and an inclined plate 2-3. The bottom plate 2-1 is fixed on the base 1 through the main seat three-top-three-pull mechanism 4. The projection objective lens 3 is placed on the upper surface of the bottom plate 2-1. A group of side plates 2-2 are placed vertically and spaced apart from the bottom plate 2-1. The inclined plate 2-3 is fixed in front of a group of side plates 2-2 by 8 bolts. A second light passing hole is provided at a position corresponding to the first light passing hole on the inclined plate 2-3. The flat mirror seat 7 is fixed at the second light passing hole on the inclined plate 2-3 through the flat mirror three-top-three-pull mechanism 6.

[0027] In order to describe in detail the usage method of the beam deflection device provided by the embodiments of the present invention, the specific structures of the flat mirror three-top-three-pull mechanism 6 and the main seat three-top-three-pull mechanism 4 will be introduced in detail below. The flat mirror three-top-three-pull mechanism 6 includes three flat mirror seat inner rotation bolts and three flat mirror seat outer rotation bolts evenly distributed on the flat mirror seat. The three flat mirror seat inner rotation bolts are tightened inward relative to the inclined plate 2-3, and the three flat mirror seat outer rotation bolts are tightened outward relative to the inclined plate 2-3. Moreover, the three flat mirror seat outer rotation bolts and the three flat mirror seat inner rotation bolts are arranged at intervals. Similarly, the main seat three-top-three-pull mechanism 4 also includes three main seat inner rotation bolts and three main seat outer rotation bolts. The difference is that the three main seat inner rotation bolts and the three main seat outer rotation bolts are divided into three groups and arranged at intervals. Each group includes one main seat inner rotation bolt and one main seat outer rotation bolt. The main seat inner rotation bolts are distributed at the edge of the bottom plate 2-1, and the main seat outer rotation bolts are placed inside the main seat inner rotation bolts.

[0028] Next, the specific usage methods of the three - top - three - pull mechanism 6 of the plane mirror and the three - top - three - pull mechanism 4 of the main seat will be introduced in detail. Fix the main seat 2 on the base 1 through the three - top - three - pull mechanism 4 of the main seat, install the projection objective lens 3 on the bottom plate 2 - 1, place the two - dimensional level on the upper end face of the projection objective lens 3, observe the states of the two bubbles on the horizontal two - dimensional level, and adjust the six bolts on the three - top - three - pull mechanism 4 of the main seat. That is, in the direction where the bubble is inclined, tighten the outer rotating bolt of the main seat and loosen the inner rotating bolt of the main seat. For the other two groups, do the opposite: tighten the inner rotating bolt of the main seat and loosen the outer rotating bolt of the main seat until the bubble is horizontally centered. At this time, the projection objective lens 3 is perpendicular to the main seat. Install the plane mirror 5 on the plane - mirror seat 7, and fix the plane - mirror seat 7 on the main seat 2 with the three - top - three - pull mechanism 6 of the plane mirror. Next, turn on the light source, lay a semi - transparent paper on the upper end face of the projection objective lens 3. The light beam is projected onto the plane mirror 5 and then refracted by the plane mirror 5 onto the semi - transparent paper. The semi - transparent paper can be semi - transparent papers such as sulfuric acid paper. Its function is to receive the light spot formed by the light beam projected onto the semi - transparent paper. Secondly, through the semi - transparent paper, the light - incident port of the projection objective lens below the paper can also be observed. Here, an elliptical light spot is formed on the semi - transparent paper. Observe the position of the light spot and the light - incident port of the projection objective lens 3. If part of the light spot coincides with and part overflows the light - incident port of the projection objective lens 3, then by observing the positional relationship between the light spot and the projection objective lens 3, adjust the outer rotating bolt and the inner rotating bolt of the plane - mirror seat simultaneously to make the elliptical light spot coincide with the light - incident port of the projection objective lens 3. Next, replace the semi - transparent paper on the upper end face of the projection objective lens 3 with an auxiliary plane mirror. The light beam emitted by the light source is projected onto the plane mirror 5 after passing through the collimator, and then refracted by the plane mirror 5 onto the auxiliary plane mirror. Use a semi - transparent paper to find the light beam reflected back by the auxiliary plane mirror 5 near the light source, and adjust the three - top - three - pull mechanism 6 of the plane mirror to make the light spot received on the semi - transparent paper coincide with the position of the light source. The method of adjusting the three - top - three - pull mechanism 6 here is the same as above and will not be elaborated further.

[0029] The present invention also provides a light - beam refraction method. The light - beam refraction method implemented by the light - beam refraction device provided in the embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0030] Before using the light - beam refraction method implemented by the light - beam refraction device, first assemble the mechanism.

[0031] S1, as shown in Figure 1 and Figure 2 , fix the main seat 2 on the base 1 through the three - top - three - pull mechanism 4 of the main seat, and install the projection objective lens 3 on the bottom plate 2 - 1.

[0032] S2. Place the two - dimensional level on the upper end face of the projection objective lens 3, adjust the three - top - three - pull mechanism 4 to make the two - dimensional direction of the horizontal two - dimensional level horizontal, and then fix the three - top - three - pull mechanism 4.

[0033] S3. Install the plane mirror 5 on the plane mirror base 7, and use the three-point and three-pull mechanism 6 of the plane mirror to fix the plane mirror base on the main base 2. Thus, the mechanism assembly is completed.

[0034] Next, use a semi-transparent paper and an auxiliary plane mirror to confirm whether the positions of the plane mirror and the projection objective are properly adjusted. At the same time, use the semi-transparent paper and the auxiliary plane mirror to guide the adjustment direction and method of the three-point and three-pull mechanism.

[0035] S4. Turn on the light source, lay a semi-transparent paper flat on the upper end face of the projection objective 3, and the light beam 5 is projected onto the plane mirror 5 and then refracted by the plane mirror 5 onto the semi-transparent paper. Among them, the semi-transparent paper can observe both the light spot projected by the light beam and the light entrance of the projection objective 3 below the paper. The light beam will form an elliptical light spot on the semi-transparent paper. Adjust the three-point and three-pull mechanism 6 of the plane mirror so that the elliptical light spot on the semi-transparent paper coincides with the light entrance of the projection objective 3. At this time, the included angle between the plane mirror 5 and the upper end face of the projection objective 3 is not 45 degrees.

[0036] The light source can be visible light such as an LED lamp, a halogen lamp, or an integrating sphere.

[0037] S5. Replace the semi-transparent paper on the upper end face of the projection objective 3 with an auxiliary plane mirror. The light beam emitted by the light source is projected onto the plane mirror 5 and then refracted by the plane mirror 5 onto the auxiliary plane mirror. Since the light beam refracted by the plane mirror 5 is not perpendicular to the light entrance of the projection objective 3, the light beam reflected by the auxiliary plane mirror will appear around the light source and does not coincide with the light source.

[0038] S6. Use a semi-transparent paper to find the light beam returned by the auxiliary plane mirror around the light source, observe the deviation between the light beam received by the semi-transparent paper and the light source, and adjust the three-point and three-pull mechanism 6 of the plane mirror to make the light beam received by the semi-transparent paper approach the position of the light exit of the light source until the light beam received by the semi-transparent paper coincides with the light exit of the light source, and lock the three-point and three-pull mechanism 6 of the plane mirror.

[0039] At this time, the projection objective 3 is perpendicular to the bottom plate 2-1, the light emitted by the light source is refracted by the plane mirror 5 and is perpendicular to the light entrance of the projection objective 3, and the refracted light beam is coaxial with the optical axis of the projection objective.

[0040] In the description of this specification, reference terms such as "one embodiment", "some embodiments",

[0041] "example", "specific example", or "some examples", etc. are described to mean combined with this implementation

[0042] The specific features, structures, materials, or characteristics described in the examples or embodiments are included in at least one embodiment or example of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0043] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

[0044] The above specific implementation manners of the present invention do not constitute a limitation on the protection scope of the present invention. Any other corresponding changes and deformations made according to the technical concept of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A beam deflection method, implemented using a beam deflection device, characterized in that, The beam deflection device includes a base, a main seat, a flat mirror seat with a first light passing hole, a flat mirror, and a projection objective lens. The main seat is fixed on the base through a three-top-three-pull mechanism of the main seat. The projection objective lens is installed on the main seat. The flat mirror is fixed on the flat mirror seat. The flat mirror seat is fixed on the inclined plate of the main seat through a three-top-three-pull mechanism of the flat mirror. Through the adjustment of the base by the three-top-three-pull mechanism of the main seat and the adjustment of the flat mirror seat by the three-top-three-pull mechanism of the flat mirror, the beam deflected by the flat mirror is perpendicular to the horizontal plane and coaxial with the optical axis of the projection objective lens. The method includes the following steps: S1. Fix the main seat on the base through the three-top-three-pull mechanism of the main seat, and install the projection objective lens on the main seat. S2. Place a horizontal two-dimensional ruler on the upper end face of the projection objective lens. Make both two-dimensional directions of the horizontal two-dimensional ruler horizontal by adjusting the three-top-three-pull mechanism of the main seat, and fix the position of the main seat. S3. Fix the flat mirror seat on the inclined surface of the main seat through the three-top-three-pull mechanism of the flat mirror. S4. Turn on the light source. Lay a semi-transparent paper flat on the upper end face of the projection objective lens. The light beam is projected onto the flat mirror and deflected by the flat mirror to form an elliptical light spot on the semi-transparent paper. Adjust the three-top-three-pull mechanism of the flat mirror to make the elliptical light spot coincide with the light inlet of the projection objective lens. S5. Replace the semi-transparent paper with an auxiliary flat mirror. The light beam emitted by the light source is projected onto the flat mirror and deflected by the flat mirror to the auxiliary flat mirror. S6. Use the semi-transparent paper to find the light beam reflected back by the auxiliary flat mirror around the light source. Adjust the three-top-three-pull mechanism of the flat mirror to make the light beam received by the semi-transparent paper coincide with the light outlet of the light source, and fix the position of the flat mirror.

2. The beam deflection method according to claim 1, characterized in that, The main seat is a hollow structure, specifically including a horizontally placed bottom plate, a group of side plates, and an inclined plate. The bottom plate is fixed on the base through the three-top-three-pull mechanism of the main seat. The group of side plates are vertically fixed on the bottom plate at intervals. The inclined plate is fixed on the side plates obliquely relative to the horizontal plane with at least two bolts. A second light passing hole is opened at a position corresponding to the first light passing hole on the inclined plate. The flat mirror seat is fixed at the second light passing hole through the three-top-three-pull mechanism of the flat mirror.

3. The beam deflection method according to claim 1, characterized in that, The three-top-three-pull mechanism of the flat mirror includes three in-rotating bolts of the flat mirror seat and three out-rotating bolts of the flat mirror seat evenly distributed on the flat mirror seat. The three in-rotating bolts of the flat mirror seat are tightened inward relative to the inclined plate, and the three out-rotating bolts of the flat mirror seat are tightened outward relative to the inclined plate to adjust the spatial position of the flat mirror.

4. The beam deflection method according to claim 3, characterized in that, The three out-rotating bolts of the flat mirror seat and the three in-rotating bolts of the flat mirror seat are arranged at intervals.

5. The beam deflection method according to claim 2, characterized in that, The three-top-three-pull mechanism of the main seat includes three in-rotating bolts of the main seat and three out-rotating bolts of the main seat evenly distributed on the main seat. The three in-rotating bolts of the main seat are tightened inward relative to the bottom plate, and the three out-rotating bolts of the main seat are tightened outward relative to the bottom plate to adjust the spatial position of the projection objective lens.

6. The beam deflection method according to claim 5, characterized in that, The three main seat inner rotation bolts and the three main seat outer rotation bolts are arranged at intervals in three groups. Each group includes one main seat inner rotation bolt and one main seat outer rotation bolt. Moreover, the main seat inner rotation bolts are distributed on the edge of the bottom plate, and the main seat outer rotation bolts are placed inside the main seat inner rotation bolts.

7. The beam deflection method implemented by the beam deflection device according to claim 1, characterized in that, The semi-transparent paper is tracing paper.

Images