A device for peeling off an epitaxial layer of a thin-film solar cell of the inclined surface winding type

Abstract

The present application relates to a kind of inclined surface winding type thin film solar cell epitaxial layer stripping device, belong to solar cell process technical field;Including stripping component, drive component, circulation system, temperature control system and wafer;Wherein, corrosion liquid is built-in in circulation system;Temperature control system is arranged in circulation system, realizes to corrosion liquid and carries out heating treatment;Drive component drives the angle adjustment of stripping component;Wafer is set on stripping component;Circulation system realizes to internal corrosion liquid and is circulated to the output to wafer;Under the corrosion of corrosion liquid to wafer, stripping component realizes to wafer and is stripped;The present application solves the problem of low stripping rate, unstable quality and low efficiency in the process of epitaxial film stripping, with the function of real-time change tension auxiliary, temperature control and solution circulation.

Description

Technical Field

[0001] The invention belongs to the technical field of solar cell technology and relates to an oblique-surface winding type thin-film solar cell epitaxial layer stripping device. Background Art

[0002] In the fabrication of large-scale thin-film semiconductor devices, such as thin-film solar cells and LED light-emitting devices, epitaxial stripping technology is an effective method for achieving high-quality epitaxial film growth with reusable substrates. During thin-film growth, a sacrificial layer is pre-grown between the substrate and the epitaxial layer. Using an etchant that selectively etches different materials, the sacrificial layer is removed by etching after epitaxial growth is complete, achieving the purpose of stripping the epitaxial layer. Because the sacrificial layer is often only tens of nanometers, the reaction interface is small during the etching process, making it difficult to remove reaction products. Furthermore, the surface tension of the liquid slows the reaction, resulting in stripping times of dozens of hours, low efficiency, and unstable quality. Summary of the Invention

[0003] The technical problem solved by the present invention is: to overcome the shortcomings of the existing technology and propose a bevel-wound thin-film solar cell epitaxial layer stripping device, which solves the problems of low stripping rate, unstable quality and low efficiency during the epitaxial film stripping process, and has the functions of real-time variable tension assistance, temperature control and solution circulation.

[0004] The solution of the present invention is:

[0005] An oblique winding thin-film solar cell epitaxial layer stripping device comprises a stripping component, a driving component, a circulation system, a temperature control system and a wafer;

[0006] Among them, the circulation system has built-in corrosive liquid; the temperature control system is arranged in the circulation system to realize heating treatment of the corrosive liquid; the stripping component is arranged above the circulation system; the driving component drives the angle adjustment of the stripping component; the wafer is arranged on the stripping component; the circulation system realizes the circulation output of the internal corrosive liquid to the wafer; under the corrosion of the corrosive liquid on the wafer, the stripping component realizes the stripping of the wafer.

[0007] In the above-mentioned oblique-surface winding thin-film solar cell epitaxial layer stripping device, the corrosive liquid is hydrofluoric acid.

[0008] In the above-mentioned oblique-surface winding thin-film solar cell epitaxial layer stripping device, the temperature control system maintains the temperature of the corrosive liquid at 70° C.-80° C.

[0009] In the above-mentioned oblique winding thin-film solar cell epitaxial layer stripping device, the wafer includes a thin-film growth substrate and a thin-film battery epitaxial layer; the thin-film growth substrate and the thin-film battery epitaxial layer are both circular thin-film structures; the thin-film growth substrate is located at the bottom; the thin-film battery epitaxial layer is arranged above the thin-film growth substrate; and the thin-film growth substrate and the thin-film battery epitaxial layer are bonded together by an AlAs sacrificial layer.

[0010] In the above-mentioned inclined-surface winding thin-film solar cell epitaxial layer stripping device, the stripping assembly includes a drum, an inclined surface and a box; wherein the inclined surface is placed obliquely in the box; the wafer is arranged on the inclined surface; wherein the growth substrate of the thin film is mounted on the inclined surface; and the drum is arranged above the epitaxial layer of the thin-film cell.

[0011] In the above-mentioned inclined winding type thin film solar cell epitaxial layer stripping device, the working process of the stripping device is as follows:

[0012] In the initial state, the reel is located on the inclined surface and on one side of the wafer; the angle of the inclined surface is adjusted by the driving component to enable the reel to roll over the upper surface of the wafer; the reel sticks to the epitaxial layer of the thin-film battery, so that the epitaxial layer of the thin-film battery and the growth substrate of the thin film are opened; the corrosive liquid is output through the circulation system, and the corrosive liquid corrodes the AlAs sacrificial layer between the growth substrate of the thin film and the epitaxial layer of the thin-film battery; as the reel completely rolls over the upper surface of the wafer, the epitaxial layer of the thin-film battery is peeled off from the growth substrate of the thin film.

[0013] In the above-mentioned inclined-surface winding type thin-film solar cell epitaxial layer stripping device, the driving assembly includes a driving motor, a first transmission rod, two transmission belts, a second transmission rod and two rollers; the driving motor is arranged on the outside of the stripping assembly; the output end of the driving motor is transmitted to the first transmission rod; the second transmission rod is arranged above the stripping assembly; the axial direction of the second transmission rod is parallel to the axial direction of the first transmission rod; the two transmission belts are respectively arranged at both ends of the first transmission rod; one end of the transmission belt is fixedly connected to the first transmission rod; the other end of the transmission belt is connected to the inclined surface after passing around the corresponding roller.

[0014] In the above-mentioned inclined winding type thin-film solar cell epitaxial layer stripping device, the working process of the driving component is as follows:

[0015] The driving motor drives the first transmission rod to rotate, and the two transmission belts are shortened under the winding of the first transmission rod; the two transmission belts pass around the two rollers to pull up the inclined surface and adjust the angle of the inclined surface.

[0016] In the above-mentioned inclined winding thin-film solar cell epitaxial layer stripping device, the circulation system includes a liquid storage tank and a circulation pipe; the liquid storage tank is a horizontally placed hollow box; the liquid storage tank contains corrosive liquid; the circulation pipe is arranged on the side wall of the liquid storage tank, and the outlet of the circulation pipe points to the stripping assembly.

[0017] In the above-mentioned inclined winding type thin film solar cell epitaxial layer stripping device, the working process of the circulation system is as follows:

[0018] The corrosive liquid heated by the temperature control system flows out of the liquid storage tank, enters the stripping component through the circulation pipe, and flows back to the liquid storage tank to realize circulation.

[0019] The beneficial effects of the present invention compared with the prior art are:

[0020] (1) The present invention uses an angle-variable inclined plane to effectively change the magnitude of the auxiliary stress when rolling along the inclined plane;

[0021] (2) The present invention utilizes cylindrical axis winding to evenly release the stress of the epitaxial layer, thus avoiding a large amount of accumulation at the lateral corrosion site;

[0022] (3) The present invention adopts a slope solution. When the HF acid solution is circulated, the product at the reaction interface can be taken away by the solution flow so that the reaction interface is always fresh. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of the overall structure of the stripping device of the present invention;

[0024] Figure 2 This is a schematic diagram of the working process of the stripping component of the present invention.

[0025] In the picture:

[0026] 1-peeling component; 2-driving component; 3-circulation system; 4-temperature control system;

[0027] 5-roll; 6-slant surface; 8-thin film growth substrate; 7-thin film battery epitaxial layer;

[0028] 21-driving motor; 22-first transmission rod; 23-transmission belt; 24-second transmission rod; 25-roller;

[0029] 31-Liquid storage tank; 32-Circulation pipeline. DETAILED DESCRIPTION

[0030] The present invention will be further described below in conjunction with the embodiments.

[0031] The present invention provides an oblique winding thin-film solar cell epitaxial layer stripping device, which solves the problems of low stripping rate, unstable quality and low efficiency in the epitaxial film stripping process, and has the functions of real-time variable tension assistance, temperature control and solution circulation.

[0032] Inclined winding thin film solar cell epitaxial layer stripping device, such as Figure 1 As shown, the system includes a stripping assembly 1, a drive assembly 2, a circulation system 3, a temperature control system 4, and a wafer. The circulation system 3 contains a corrosive liquid, which is hydrofluoric acid. The temperature control system 4 is located within the circulation system 3 to heat the corrosive liquid and maintain the temperature of the corrosive liquid at 70°C-80°C. The stripping assembly 1 is located above the circulation system 3; the drive assembly 2 drives the angle adjustment of the stripping assembly 1; the wafer is placed on the stripping assembly 1; the circulation system 3 circulates the internal corrosive liquid to the wafer; and under the corrosive effect of the corrosive liquid on the wafer, the stripping assembly 1 strips the wafer.

[0033] like Figure 2 As shown, the wafer includes a thin film growth substrate 8 and a thin film battery epitaxial layer 7; the thin film growth substrate 8 and the thin film battery epitaxial layer 7 are both circular thin film structures; the thin film growth substrate 8 is located at the bottom; the thin film battery epitaxial layer 7 is arranged above the thin film growth substrate 8; and the thin film growth substrate 8 and the thin film battery epitaxial layer 7 are bonded by an AlAs sacrificial layer.

[0034] The stripping assembly 1 includes a reel 5, a slope 6 and a box; wherein the slope 6 is placed obliquely in the box; the wafer is set on the slope 6; wherein the growth substrate 8 of the thin film is installed on the slope 6; the reel 5 is set above the epitaxial layer 7 of the thin film battery.

[0035] The working process of the stripping device is:

[0036] In the initial state, the reel 5 is located on the inclined surface 6 and on one side of the wafer; the angle of the inclined surface 6 is adjusted by the driving component 2 to enable the reel 5 to roll over the upper surface of the wafer; the reel 5 sticks the thin film battery epitaxial layer 7, so that the thin film battery epitaxial layer 7 and the thin film growth substrate 8 are opened; the corrosive liquid is output through the circulation system 3, and the corrosive liquid corrodes the AlAs sacrificial layer between the thin film growth substrate 8 and the thin film battery epitaxial layer 7; as the reel 5 completely rolls over the upper surface of the wafer, the thin film battery epitaxial layer 7 is peeled off from the thin film growth substrate 8.

[0037] like Figure 1As shown, the driving assembly 2 includes a driving motor 21, a first transmission rod 22, two transmission belts 23, a second transmission rod 24 and two rollers 25; the driving motor 21 is arranged on the outside of the peeling assembly 1; the output end of the driving motor 21 is driven by the first transmission rod 22; the second transmission rod 24 is arranged above the peeling assembly 1; the axial direction of the second transmission rod 24 is parallel to the axial direction of the first transmission rod 22; the two transmission belts 23 are respectively arranged at both ends of the first transmission rod 22; one end of the transmission belt 23 is fixedly connected to the first transmission rod 22; the other end of the transmission belt 23 passes around the corresponding roller 25 and is connected to the inclined surface 6.

[0038] The working process of drive component 2 is:

[0039] The driving motor 21 drives the first transmission rod 22 to rotate, and the two transmission belts 23 are shortened under the winding of the first transmission rod 22; the two transmission belts 23 pass around the two rollers 25 to pull up the inclined surface 6 and adjust the angle of the inclined surface 6.

[0040] The circulation system 3 includes a liquid storage tank 31 and a circulation pipe 32; the liquid storage tank 31 is a horizontally placed hollow box; the liquid storage tank 31 contains corrosive liquid; the circulation pipe 32 is set on the side wall of the liquid storage tank 31, and the outlet of the circulation pipe 32 points to the stripping component 1. The working process of the circulation system 3 is as follows:

[0041] The corrosive liquid heated by the temperature control system 4 flows out of the liquid storage tank 31, enters the stripping assembly 1 through the circulation pipe 32, and flows back to the liquid storage tank 31 to complete the circulation. Figure 1 shown.

[0042] The present invention adheres the thin-film battery epitaxial layer 7 to the roll 5, adjusts the inclined surface 6 to set the initial separation angle, and ensures a certain inclination of the inclined surface 6. The temperature control system 4 is activated to reach the optimal stripping temperature. The etching solution circulation system 3 is opened to pump the HF acid solution at the bottom into the upper solution tank, where it flows out along the solution tank opening and enters the stripping interface.

[0043] As the etching solution reacts with the sacrificial layer, it removes the reaction products. A displacement sensor located on the sidewall of inclined surface 6 records the displacement and analyzes the rolling distance of roller 5 to determine the extent of the peeling process. The inclination of inclined surface 6 is then adjusted based on the optimal peeling angle and applied force. The peeling process is complete when the thin-film battery epitaxial layer 7 is completely peeled off.

[0044] 1. The present invention adopts an angle-variable inclined plane to effectively change the magnitude of the auxiliary stress when rolling along the inclined plane;

[0045] 2. Using cylindrical axis winding can evenly release the stress of the epitaxial layer and avoid large accumulation of stress at the lateral corrosion site;

[0046] 3. By adopting the inclined plane scheme, when the HF acid solution is circulated, the product at the reaction interface can be taken away by the flow of the solution so that the reaction interface is always fresh.

[0047] Due to the above three characteristics, the present invention can shorten the traditional stripping process time from 96 hours to 4 hours, greatly reducing the time cost and improving the preparation efficiency of thin film batteries.

[0048] Although the present invention has been disclosed above in terms of preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art may make possible changes and modifications to the technical solutions of the present invention by using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall fall within the scope of protection of the technical solutions of the present invention.

Claims

1. A device for peeling off the epitaxial layer of thin-film solar cells by winding on an inclined surface, characterized by: It includes a stripping component (1), a driving component (2), a circulation system (3), a temperature control system (4) and a wafer; The circulation system (3) has a built-in corrosive liquid; the temperature control system (4) is arranged in the circulation system (3) to heat the corrosive liquid; the stripping component (1) is arranged above the circulation system (3); the driving component (2) drives the angle adjustment of the stripping component (1); the wafer is arranged on the stripping component (1); the circulation system (3) realizes the circulation output of the internal corrosive liquid to the wafer; under the corrosion of the corrosive liquid on the wafer, the stripping component (1) realizes the stripping of the wafer; The wafer comprises a thin film growth substrate (8) and a thin film battery epitaxial layer (7); the thin film growth substrate (8) and the thin film battery epitaxial layer (7) are both circular thin film structures; the thin film growth substrate (8) is located below; the thin film battery epitaxial layer (7) is arranged above the thin film growth substrate (8); and the thin film growth substrate (8) and the thin film battery epitaxial layer (7) are bonded via an AlAs sacrificial layer; The stripping assembly (1) comprises a reel (5), an inclined plane (6) and a box; wherein the inclined plane (6) is placed obliquely in the box; the wafer is arranged on the inclined plane (6); wherein the growth substrate (8) of the thin film is mounted on the inclined plane (6); and the reel (5) is arranged above the epitaxial layer (7) of the thin film battery; The driving assembly (2) comprises a driving motor (21), a first transmission rod (22), two transmission belts (23), a second transmission rod (24) and two rollers (25); the driving motor (21) is arranged outside the stripping assembly (1); the output end of the driving motor (21) is belt-driven with the first transmission rod (22); the second transmission rod (24) is arranged above the stripping assembly (1); the axial direction of the second transmission rod (24) is parallel to the axial direction of the first transmission rod (22); the two transmission belts (23) are respectively arranged at both ends of the first transmission rod (22); one end of the transmission belt (23) is fixedly connected to the first transmission rod (22); the other end of the transmission belt (23) passes around the corresponding roller (25) and is connected to the inclined surface (6).

2. The device for peeling off the epitaxial layer of a thin-film solar cell by winding an inclined surface according to claim 1, characterized in that: The corrosive liquid is hydrofluoric acid.

3. The oblique-surface winding thin-film solar cell epitaxial layer stripping device according to claim 1, characterized in that: The temperature control system (4) maintains the temperature of the corrosive liquid at 70°C-80°C.

4. The device for peeling off the epitaxial layer of a thin-film solar cell by winding an inclined surface according to claim 1, characterized in that: The working process of the stripping device is: In an initial state, the reel (5) is located on the inclined surface (6) and on one side of the wafer; the angle of the inclined surface (6) is adjusted by the driving component (2) so that the reel (5) rolls over the upper surface of the wafer; the reel (5) sticks the thin film battery epitaxial layer (7) so that the thin film battery epitaxial layer (7) and the thin film growth substrate (8) are opened; the corrosive liquid is output through the circulation system (3), and the corrosive liquid corrodes the AlAs sacrificial layer between the thin film growth substrate (8) and the thin film battery epitaxial layer (7); as the reel (5) completely rolls over the upper surface of the wafer, the thin film battery epitaxial layer (7) is peeled off from the thin film growth substrate (8).

5. The oblique-surface winding thin-film solar cell epitaxial layer stripping device according to claim 1, characterized in that: The working process of the driving component (2) is as follows: The driving motor (21) drives the first transmission rod (22) to rotate, and the two transmission belts (23) are shortened under the winding of the first transmission rod (22); the two transmission belts (23) pass around the two rollers (25) to pull up the inclined surface (6) and adjust the angle of the inclined surface (6).

6. The oblique-surface winding thin-film solar cell epitaxial layer stripping device according to claim 1, characterized in that: The circulation system (3) comprises a liquid storage tank (31) and a circulation pipe (32); the liquid storage tank (31) is a horizontally placed hollow box; the liquid storage tank (31) contains a corrosive liquid; the circulation pipe (32) is arranged at a side wall of the liquid storage tank (31), and the outlet of the circulation pipe (32) points to the stripping assembly (1).

7. The oblique-surface winding thin-film solar cell epitaxial layer stripping device according to claim 1, characterized in that: The working process of the circulation system (3) is: The corrosive liquid heated by the temperature control system (4) flows out of the liquid storage tank (31), enters the stripping assembly (1) through the circulation pipe (32), and flows back to the liquid storage tank (31) to realize circulation.

Images