Substrate holding robot and substrate handling robot

Abstract

A substrate holding robot and a substrate handling robot are disclosed. The substrate holding robot (1) includes: blades (31) including support portions (311, 312) for supporting a substrate (W); a movable support unit (32) for moving forward and backward to support the substrate; a movable pressing unit (33, 34) for moving forward and backward to press the substrate; and a positioning unit (35) for positioning the movable support unit and the movable pressing unit together.

Description

Technical Field

[0001] This invention relates to a substrate holding manipulator and a substrate handling robot, specifically a substrate holding manipulator and a substrate handling robot having a movable support unit and a movable pressing unit. Background Technology

[0002] Previously, it was known that there were substrate holding robots equipped with movable support units and movable pressing units. For example, such a robot was disclosed in Japanese Patent Application Publication No. 2013-69914.

[0003] The aforementioned Japanese Patent Application Publication No. 2013-69914 discloses a substrate handling robot (substrate holding robot) for handling substrates. The substrate handling robot includes a movable support unit including a base-side support portion for supporting the substrate by moving forward and backward, and a movable pressing unit including a pressing portion for pressing the substrate by moving forward and backward.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2013-69914

[0005] Here, although not described in the aforementioned Japanese Patent Application Publication No. 2013-69914, in the conventional substrate handling robot described in that publication, the movable support unit and the movable pressing unit are positioned separately. In this case, positioning parts for the movable support unit and the movable pressing unit are required separately, thus creating a problem where it is difficult to simplify the structure of the positioning parts. In addition, positioning the movable support unit and the movable pressing unit is quite time-consuming, thus creating a problem where it is difficult to easily assemble the substrate handling robot (substrate holding robot). Summary of the Invention

[0006] The objective of this invention is to provide a substrate holding robot and a substrate handling robot that can simplify the construction of the positioning part and can be easily assembled.

[0007] The substrate holding robot based on the first aspect of the invention comprises: a blade including a support portion for supporting the substrate; a movable support unit for moving forward and backward for supporting the substrate; a movable pressing unit for moving forward and backward for pressing the substrate; and a positioning portion for jointly positioning the movable support unit and the movable pressing unit.

[0008] The substrate handling robot based on the second aspect of the invention includes: a substrate holding manipulator; and an arm for moving the substrate holding manipulator, the substrate holding manipulator including: a blade including a support portion for supporting the substrate; a movable support unit for moving forward and backward to support the substrate; a movable pressing unit for moving forward and backward to press the substrate; and a positioning portion for positioning the movable support unit and the movable pressing unit together.

[0009] According to the present invention, as described above, by providing a positioning part that jointly positions the movable support unit and the movable pressing unit, the structure of the positioning part can be simplified, and compared with the case where the movable support unit and the movable pressing unit are positioned separately, the time spent positioning the movable support unit and the movable pressing unit can be saved. Therefore, the substrate holding robot can be easily assembled. In addition, even if the movable support unit and the movable pressing unit are removed during the maintenance of the substrate holding robot, the movable support unit and the movable pressing unit can be easily reinstalled (assembled), thus making the maintenance of the substrate holding robot easier. Attached Figure Description

[0010] Figure 1 This is a diagram showing the structure of a substrate handling robot based on one embodiment of the present invention.

[0011] Figure 2 This is a perspective view showing the structure of a substrate holding robot based on one embodiment of the present invention.

[0012] Figure 3 This is a top view showing the structure of a substrate holding robot based on one embodiment of the present invention.

[0013] Figure 4 yes Figure 3 The diagram shows a partial enlarged view of the positioning part and the positioned part of the substrate holding robot.

[0014] Figure 5 This is an exploded perspective view showing a movable support unit, a first movable pressing unit, a second movable pressing unit, and a positioning part of a substrate holding robot according to one embodiment of the present invention.

[0015] Figure 6 This is a perspective view showing a movable support unit, a first movable pressing unit, a second movable pressing unit, and a positioning part of a substrate holding robot according to one embodiment of the present invention. Detailed Implementation

[0016] Hereinafter, an embodiment of the present invention, which is embodied in the accompanying drawings, will be described.

[0017] Reference Figures 1-6 The structure of the substrate handling robot 100 based on this embodiment will be described.

[0018] like Figure 1 As shown, the substrate handling robot 100 includes a substrate holding manipulator 1 and an arm 2 for moving the substrate holding manipulator 1. Figures 2-6 As shown, the substrate holding robot 1 includes: blades 31, including support portions 311 and 312 for supporting substrate (semiconductor wafer) W; movable support unit 32 for moving forward and backward to support substrate W; movable pressing units 33 and 34 for moving forward and backward to press substrate W; and positioning portion 35 for jointly positioning movable support unit 32 and movable pressing units 33 and 34.

[0019] According to this embodiment, as described above, by providing a positioning part 35 for co-positioning the movable support unit 32 and the movable pressing units 33 and 34, the structure of the positioning part 35 can be simplified. Furthermore, compared to positioning the movable support unit 32 and the movable pressing units 33 and 34 separately, the time spent positioning the movable support unit 32 and the movable pressing units 33 and 34 can be saved, thus making it easier to assemble the substrate holding robot 1. In addition, even when the movable support unit 32 and the movable pressing units 33 and 34 are removed during maintenance of the substrate holding robot 1, they can be easily installed (assembled), thus facilitating the maintenance of the substrate holding robot 1.

[0020] like Figures 2-6 As shown, the substrate holding robot 1 has multiple (4) blades 31, a movable support unit 32, movable pressing units 33 and 34, and a positioning part 35.

[0021] like Figures 3-6 As shown, the positioning part 35 includes a positioning pin 35a. The movable support unit 32 and the movable pressing units 33 and 34 each include a positioning part having a pin insertion hole capable of inserting the positioning pin 35a along its length. Specifically, the movable support unit 32 includes a positioning part 32a having pin insertion holes 321 and 322 capable of inserting the positioning pin 35a along its length. Additionally, the movable pressing unit 33 includes a positioning part 33a having pin insertion holes 331 and 332 capable of inserting the positioning pin 35a along its length. Furthermore, the movable pressing unit 34 includes a positioning part 34a having pin insertion holes 341 and 342 capable of inserting the positioning pin 35a along its length.

[0022] The positioning pin 35a is configured to extend in a direction perpendicular to the main surface 31c of the blade 31 (Z direction). By arranging the positioning pins 35a in a direction perpendicular to the main surface 31c of the blade 31 (Z direction), the positioning pins 35a are inserted into the pin insertion holes 321, 322, 331, 332, 341, and 342 of the positioned portions 32a, 33a, and 34a, thereby positioning the movable support unit 32 and the movable pressing units 33 and 34 together.

[0023] The movable support unit 32 includes a support member 32b for supporting the base plate W. The movable pressing units 33 and 34 each include pressing members 33b and 34b for pressing the base plate W. Viewed from a direction perpendicular to the main surface 31c of the blade 31 (Z direction), the support member 32b and the pressing members 33b and 34b are arranged in a non-overlapping manner, and the positioning portions 32a of the movable support unit 32 having pin insertion holes 321 and 322, the positioning portions 33a of the movable pressing unit 33 having pin insertion holes 331 and 332, and the positioning portions 34a of the movable pressing unit 34 having pin insertion holes 341 and 342 are arranged in an overlapping manner.

[0024] Support member 32b includes a pair of support members 32b. Pressing members 33b and 34b each include a pair of pressing members 33b and 34b. Viewed from a direction perpendicular to the main surface 31c of blade 31 (Z direction), the pair of support members 32b and the pair of pressing members 33b and 34b are arranged symmetrically with respect to the centerline L1 extending in the forward and backward direction (Y direction) of movable support unit 32 and movable pressing units 33 and 34. Viewed from a direction perpendicular to the main surface 31c of blade 31 (Z direction), pin insertion holes 321, 322, 331, 332, 341, and 342 are arranged on one side (X1 direction side) with respect to the centerline L1.

[0025] The locating pin 35a includes a pair of locating pins 35a. The pin insertion hole includes a pair of pin insertion holes 321 and 322 (331 and 332, 341 and 342) corresponding to the pair of locating pins 35a. One of the pair of pin insertion holes 321 and 322 (331 and 332, 341 and 342) (322, 332, 342) is formed as an elongated hole. Specifically, when viewed in the direction perpendicular to the main surface 31c of the blade 31 (Z direction), the pin insertion hole 322 (332, 342) is formed as an elongated hole with its long side facing in the direction orthogonal to the forward and backward direction (Y direction) of the movable support unit 32 and the movable pressing units 33 and 34 (X direction). In addition, when viewed in the direction perpendicular to the main surface 31c of the blade 31 (Z direction), the pin insertion hole 321 (331, 341) has a generally circular shape.

[0026] The substrate holding robot 1 also has a fixing component 36, which fixes the movable support unit 32 and the movable pressing units 33 and 34, which are jointly positioned by the positioning part 35.

[0027] The positioning portion 32a of the movable support unit 32 has pin insertion holes 321 and 322, and a fixing member insertion hole 323 into which a fixing member 36 can be inserted. The positioning portion 33a of the movable pressing unit 33 has pin insertion holes 331 and 332, and a fixing member insertion hole 333 into which a fixing member 36 can be inserted. The positioning portion 34a of the movable pressing unit 34 has pin insertion holes 341 and 342, and a fixing member insertion hole 343 into which a fixing member 36 can be inserted. The pin insertion holes 321 and 322 (331 and 332, 341 and 342) and the fixing member insertion holes 323 (333, 343) of the positioning portions 32a (33a, 34a) are arranged adjacent to each other in the forward and backward direction (Y direction) of the movable support unit 32 and the movable pressing units 33 and 34.

[0028] like Figure 3 As shown, support portions 311 and 312 have a front support portion 311 disposed on the front end portion 31a side (Y1 direction side) of blade 31, and a rear support portion 312 disposed on the base end portion 31b side (Y2 direction side) of blade 31. The movable support unit 32 is a movable support unit for supporting the substrate W together with the front support portion 311. Movable pressing units 33 and 34 include a first movable pressing unit 33 for pressing the substrate W supported by the front support portion 311 and the movable support unit 32, and a second movable pressing unit 34 for pressing the substrate W supported by the front support portion 311 and the rear support portion 312.

[0029] The front support portion 311 and the movable support unit 32 support the substrate W after processing (cleaning). The front support portion 311 and the rear support portion 312 support the substrate W before processing (cleaning). The first movable pressing unit 33 presses the substrate W after processing (cleaning) supported by the front support portion 311 and the movable support unit 32. The second movable pressing unit 34 presses the substrate W before processing (cleaning) supported by the front support portion 311 and the rear support portion 312. The first movable pressing unit 33 and the second movable pressing unit 34 are used separately for the substrate W before processing (cleaning) and the substrate W after processing (cleaning).

[0030] like Figure 1As shown, arm 2 is a horizontal multi-joint robotic arm. Arm 2 includes a first arm 2a and a second arm 2b. The first arm 2a is configured to rotate relative to the base 5 (described later) with one end as the center of rotation. Specifically, one end of the first arm 2a is rotatably connected to the base 5 via a first joint. The second arm 2b is configured to rotate relative to the first arm 2a with one end as the center of rotation. Specifically, one end of the second arm 2b is rotatably connected to the other end of the first arm 2a via a second joint. In addition, a base plate holding manipulator 1 is rotatably connected to the other end of the second arm 2b via a third joint. Each of the first, second, and third joints is provided with a drive mechanism including a servo motor as a drive source for rotation, a rotational position sensor for detecting the rotational position of the output shaft of the servo motor, and a power transmission mechanism for transmitting the output of the servo motor to the joint.

[0031] In addition, the substrate handling robot 100 also includes a base 5 for mounting the arm 2 and an arm lifting mechanism 6 for mounting the base 5. The base 5 is configured such that one end is connected to one end of the first arm 2a, and the other end is connected to the arm lifting mechanism 6. The arm lifting mechanism 6 is configured to lift the arm 2 by lifting the base 5. The arm lifting mechanism 6 includes a servo motor as a drive source for lifting, a rotational position sensor for detecting the rotational position of the output shaft of the servo motor, and a power transmission mechanism for transmitting the output of the servo motor to the base 5 (arm 2).

[0032] like Figure 2 As shown, the substrate holding robot 1 is provided with multiple (4) blades 31. That is, the substrate holding robot 1 is configured to be able to transport (hold) multiple (4) substrates W.

[0033] like Figures 3-6 As shown, the substrate holding robot 1 also includes a frame 37. The frame 37 is a support for supporting the blade 31. Additionally, a movable support unit 32, a first movable pressing unit 33, and a portion of a second movable pressing unit 34 (the portion on the Y2 direction side) are disposed inside the frame 37. Furthermore, a positioning part 35 is provided at the bottom of the frame 37. The positioning pin 35a of the positioning part 35 is configured to protrude from the bottom of the frame 37 in an upward direction (Z1 direction) perpendicular to the main surface 31c of the blade 31. Additionally, a fastening hole (threaded hole) 36a is provided at the bottom of the frame 37 for fastening the front end of a fixing member (fastening member) 36 extending in the Z direction. The positioning pin 35a and the fastening hole 36a are configured to be adjacent to the movable support unit 32 and the movable pressing units 33 and 34 in the forward and backward direction (Y direction).

[0034] like Figure 2As shown, the blade 31 is a thin plate-shaped support plate supporting the base plate W. The blade 31 has a shape that divides into two strands on the front end 31a side. On the blade 31, a pair of front support portions 311 are separately provided in the two strands. The pair of front support portions 311 have multiple (two) support surfaces set at different heights. In addition, a pair of rear support portions 312 have support surfaces set at approximately the same height as the support surfaces on the lower side (Z2 direction side) of the pair of front support portions 311. Furthermore, "height" refers to the distance from the main surface 31c of the blade 31 in the direction perpendicular to the main surface 31c of the blade 31 (Z direction).

[0035] A pair of front support portions 311 and a pair of rear support portions 312 are provided on the main surface 31c of the blade 31. Each support surface of the pair of front support portions 311 and the pair of rear support portions 312 is configured to support the back side (Z2 direction side) of the outer peripheral portion of the generally circular substrate W from the bottom side.

[0036] like Figures 2-6 As shown, the substrate holding robot 1 includes a movable support unit 32, a first movable pressing unit 33, and a second movable pressing unit 34. The movable support unit 32 includes a support member 32b, a cylinder 32c serving as an actuator for moving the support member 32b forward and backward in the Y direction, and a mounting portion 32d for mounting the support member 32b and connecting the support member 32b to the cylinder 32c. The movable support unit 32 is configured such that the support member 32b can be moved forward in the Y1 direction via the cylinder 32c and the mounting portion 32d to be positioned in a support position supporting the substrate W. Alternatively, the movable support unit 32 is configured such that the support member 32b can be moved backward in the Y2 direction via the cylinder 32c and the mounting portion 32d to be positioned in a retracted position not supporting the substrate W.

[0037] The support member 32b includes a pair of support members 32b arranged in the X direction. The pair of support members 32b are arranged in a number (4 sets) corresponding to the number of blades 31 in a direction perpendicular to the main surface 31c of the blade 31 (Z direction). Furthermore, the pair of support members 32b has a support surface set at approximately the same height as the support surface on the upper side (Z1 direction side) of the pair of front support portions 311. Each support surface of the pair of support members 32b is configured to support the back side (Z2 direction side) of the outer periphery of the approximately circular base plate W from below. The cylinder 32c has a rod 324 that moves forward and backward in the Y direction. The rod 324 of the cylinder 32c is connected to the base end of the mounting portion 32d. The mounting portion 32d has a shape that divides into two strands on the front end side (Y1 direction side). In the mounting portion 32d, a pair of support members 32b are separately arranged in the divided portion.

[0038] The first movable pressing unit 33 includes a pressing member 33b, a cylinder 33c serving as an actuator for moving the pressing member 33b forward and backward in the Y direction, and a mounting portion 33d for mounting the pressing member 33b and connecting the pressing member 33b to the cylinder 33c. The first movable pressing unit 33 is configured to press the substrate W by advancing the pressing member 33b in the Y1 direction via the cylinder 33c and the mounting portion 33d. Alternatively, the first movable pressing unit 33 is configured to retract the pressing member 33b in the Y2 direction via the cylinder 33c and the mounting portion 33d, thereby positioning it in a retracted position where it does not press the substrate W.

[0039] The pressing member 33b includes a pair of pressing members 33b arranged in the X direction. The pair of pressing members 33b are configured to extend in a direction perpendicular to the main surface 31c of the blade 31 (Z direction) so as to press down on the multiple base plates W supported on the multiple blades 31 together. The cylinder 33c has a rod 334 that moves forward and backward in the Y direction. The rod 334 of the cylinder 33c is connected to the base end of the mounting portion 33d. The mounting portion 33d has a shape that is divided into two strands on the front end side (Y1 direction side). In the mounting portion 33d, a pair of pressing members 33b are separately provided in the divided portion.

[0040] The second movable pressing unit 34 includes a pressing member 34b, a cylinder 34c serving as an actuator for moving the pressing member 34b forward and backward in the Y direction, and a mounting portion 34d for mounting the pressing member 34b and connecting the pressing member 34b to the cylinder 34c. The second movable pressing unit 34 is configured to press the substrate W by advancing the pressing member 34b in the Y1 direction via the cylinder 34c and the mounting portion 34d. Furthermore, the second movable pressing unit 34 is configured to retract the pressing member 34b in the Y2 direction via the cylinder 34c and the mounting portion 34d, thereby positioning it in a retracted position where it does not press the substrate W.

[0041] The pressing member 34b includes a pair of pressing members 34b arranged in the X direction. The pair of pressing members 34b are configured to extend in a direction perpendicular to the main surface 31c of the blade 31 (Z direction) so as to be able to press down on the multiple substrates W supported on the multiple blades 31 together. The cylinder 34c has a rod 344 that moves forward and backward in the Y direction. The rod 344 of the cylinder 34c is connected to the base end of the mounting portion 34d. The mounting portion 34d has a shape that is divided into two strands on the front end side (Y1 direction side). In the mounting portion 34d, a pair of pressing members 34b are separately provided in the divided portion.

[0042] The support member 32b of the movable support unit 32, the pressing member 33b of the first movable pressing unit 33, and the pressing member 34b of the second movable pressing unit 34 are arranged sequentially from the inside (the side closer to the center line L1) in the X direction to the outside (the side farther from the center line L1). Furthermore, viewed from a direction perpendicular to the main surface 31c of the blade 31 (Z direction), the support member 32b of the movable support unit 32, the pressing member 33b of the first movable pressing unit 33, and the pressing member 34b of the second movable pressing unit 34 are arranged in a non-overlapping manner.

[0043] Furthermore, the cylinders 32c of the movable support unit 32, 33c of the first movable pressing unit 33, and 34c of the second movable pressing unit 34 are arranged in a direction perpendicular to the main surface 31c of the blade 31 (Z direction). Specifically, when viewed from the direction perpendicular to the main surface 31c of the blade 31 (Z direction), the cylinders 32c of the movable support unit 32, 33c of the first movable pressing unit 33, and 34c of the second movable pressing unit 34 are arranged in an overlapping manner.

[0044] Reference Figure 5 and Figure 6 The installation methods of the movable support unit 32, the first movable pressing unit 33, and the second movable pressing unit 34 will be described.

[0045] like Figure 5 As shown, firstly, the second movable pressing unit 34, located at the lowest side (Z2 direction side, bottom side of frame 37), is positioned relative to frame 37 by the positioning part 35. Specifically, the second movable pressing unit 34 is moved from the upper side (Z1 direction side) to the lower side (Z2 direction side). As a result, the positioning pin 35a of the positioning part 35 is inserted from the lower side (Z2 direction side) to the upper side (Z1 direction side) into the pin insertion holes 341 and 342 of the positioned part 34a of the second movable pressing unit 34. Consequently, the positioning pin 35a of the positioning part 35 restricts the movement of the second movable pressing unit 34 in the XY direction, thus positioning the second movable pressing unit 34 relative to frame 37. Furthermore, when the second movable pressing unit 34 is positioned, the positioning pin 35a protrudes (exposes) upward (in the Z1 direction) from the pin insertion holes 341 and 342 of the positioned part 34a of the second movable pressing unit 34.

[0046] Furthermore, the first movable pressing unit 33, positioned in the middle, is positioned relative to the frame 37 via a common positioning part 35. Specifically, the first movable pressing unit 33 is moved from the upper side (Z1 direction side) to the lower side (Z2 direction side) and positioned on the second movable pressing unit 34, which has been positioned (fully positioned). At this time, the first movable pressing unit 33 is moved until the lower surface of the positioned part 33a of the first movable pressing unit 33 abuts against the upper surface of the positioned part 34a of the second movable pressing unit 34. As a result, the positioning pin 35a, which protrudes upward from the pin insertion holes 341 and 342 to the upper side (Z1 direction side), is inserted from the lower side (Z2 direction side) to the upper side (Z1 direction side) into the pin insertion holes 331 and 332 of the positioned part 33a of the first movable pressing unit 33. As a result, the movement of the first movable pressing unit 33 in the XY direction is restricted by the positioning pin 35a of the positioning part 35, thus positioning the first movable pressing unit 33 relative to the frame 37. Furthermore, in the positioned state, the positioning pin 35a protrudes (exposes) upward (in the Z1 direction) from the pin insertion holes 331 and 332 of the positioning part 33a of the first movable pressing unit 33.

[0047] Furthermore, the movable support unit 32, positioned at the uppermost (Z1 direction side), is positioned relative to the frame 37 via a common positioning part 35. Specifically, the movable support unit 32 is moved from the upper (Z1 direction side) to the lower (Z2 direction side) side and positioned on the first movable pressing unit 33 after positioning (positioning). At this time, the movable support unit 32 is moved until the lower surface of the positioned part 32a of the movable support unit 32 abuts against the upper surface of the positioned part 33a of the first movable pressing unit 33. As a result, the positioning pin 35a, which protrudes from the pin insertion holes 331 and 332 upwards (Z1 direction side), is inserted from the lower (Z2 direction side) to the upper (Z1 direction side) into the pin insertion holes 321 and 322 of the positioned part 32a of the movable support unit 32. As a result, the movement of the movable support unit 32 in the XY direction is restricted by the positioning pin 35a of the positioning part 35, thus positioning the movable support unit 32 relative to the frame 37. Furthermore, in the positioned state, the positioning pin 35a does not protrude upward from the pin insertion holes 321 and 322 of the positioned part 32a of the movable support unit 32 to the Z1 direction side.

[0048] Moreover, such as Figure 6As shown, the movable support unit 32, the first movable pressing unit 33, and the second movable pressing unit 34, which are positioned by a common positioning part 35, are fixed relative to the frame 37 by a common fixing member 36. Specifically, the fixing member 36 is inserted from the upper side (Z1 direction side) toward the lower side (Z2 direction side) into the fixing member insertion holes 323, 333, and 343 of the positioning part 32a, which are arranged in the vertical direction (Z direction). Furthermore, the front end of the fixing member 36, which has three fixing member insertion holes 323, 333, and 343 inserted in the vertical direction, is fastened to the fastening hole 36a (see reference). Figure 5 As a result, the movable support unit 32, the first movable pressing unit 33, and the second movable pressing unit 34 are fixed relative to the frame 37 in one step by a common fixing component 36.

[0049] [Effects of this implementation method]

[0050] In this embodiment, the following effects can be achieved.

[0051] In this embodiment, as described above, by providing a positioning part 35 that jointly positions the movable support unit 32 and the movable pressing units 33 and 34, the structure of the positioning part 35 can be simplified. Furthermore, compared to positioning the movable support unit 32 and the movable pressing units 33 and 34 separately, the time spent positioning the movable support unit 32 and the movable pressing units 33 and 34 can be saved. Therefore, the substrate holding robot 1 can be easily assembled. In addition, even if the movable support unit 32 and the movable pressing units 33 and 34 are removed during maintenance of the substrate holding robot 1, they can be easily reinstalled (assembled), thus facilitating the maintenance of the substrate holding robot 1.

[0052] Furthermore, in this embodiment, as described above, the positioning part 35 includes a positioning pin 35a. Additionally, the movable support unit 32 and the movable pressing units 33 and 34 each include a positioned part 32a, 33a, and 34a having pin insertion holes 321, 322, 331, 332, 341, and 342 along which the positioning pin 35a can be inserted. Therefore, by simply inserting the positioning pin 35a of the positioning part 35 into the pin insertion holes 321, 322, 331, 332, 341, and 342 of the positioned parts 32a, 33a, and 34a, the movable support unit 32 and the movable pressing units 33 and 34 can be positioned, thus making it easier to assemble the substrate holding robot 1.

[0053] Furthermore, in this embodiment, as described above, the positioning pin 35a is configured to extend in a direction perpendicular to the main surface 31c of the blade 31. Additionally, by inserting the positioning pin 35a into the pin insertion holes 321, 322, 331, 332, 341, and 342 of the positioned portions 32a, 33a, and 34a in a direction perpendicular to the main surface 31c of the blade 31, the movable support unit 32 and the movable pressing units 33 and 34 are jointly positioned by the positioning pin 35a. Therefore, the movable support unit 32 and the movable pressing units 33 and 34 can be positioned (assembled) from a direction perpendicular to the main surface 31c of the blade 31, which has fewer structural elements, thus making it easier to assemble the substrate holding robot 1. Furthermore, the movable support unit 32 and the movable pressing unit 33 and 34 can be arranged in a direction perpendicular to the main surface 31c of the blade 31. Therefore, the movable support unit 32 and the movable pressing unit 33 and 34 can be arranged compactly in a direction parallel to the main surface 31c of the blade 31 and orthogonal to the forward and backward directions of the movable support unit 32 and the movable pressing unit 33 and 34.

[0054] In this embodiment, as described above, the movable support unit 32 includes a support member 32b for supporting the base plate W. The movable pressing units 33 and 34 include pressing members 33b and 34b for pressing the base plate W. Furthermore, viewed from a direction perpendicular to the main surface 31c of the blade 31, the support member 32b and the pressing members 33b and 34b are arranged in a non-overlapping manner, and the positioning portions 32a, 33a, and 34a of the movable support unit 32 having pin insertion holes 321, 322, 331, 332, 341, and 342, and the positioning portions 32a, 33a, and 34a of the movable pressing units 33 and 34 having pin insertion holes 321, 322, 331, 332, 341, and 342 are arranged in an overlapping manner. Therefore, the support member 32b of the movable support unit 32 can be offset from the pressing members 33b and 34b of the movable pressing units 33 and 34, so that the support member 32b of the movable support unit 32 and the pressing members 33b and 34b of the movable pressing units 33 and 34 will not interfere with each other during the positioning (assembly) of the movable support unit 32 and the movable pressing units 33 and 34. As a result, the movable support unit 32 and the movable pressing units 33 and 34 can be easily configured, and therefore the positioning (assembly) of the movable support unit 32 and the movable pressing units 33 and 34 can be easily performed. Furthermore, the positions of the support member 32b of the movable support unit 32 and the pressing members 33b and 34b of the movable pressing units 33 and 34 can be staggered, so that the substrate W can be supported and pressed at the same height position by means of the support member 32b of the movable support unit 32 and the pressing members 33b and 34b of the movable pressing units 33 and 34.

[0055] In this embodiment, as described above, the support member 32b includes a pair of support members 32b. Additionally, the pressing members 33b and 34b include a pair of pressing members 33b and 34b. Furthermore, viewed from a direction perpendicular to the main surface 31c of the blade 31, the pair of support members 32b and the pair of pressing members 33b and 34b are symmetrically positioned relative to the centerline L1 extending in the forward and backward directions of the movable support unit 32 and the movable pressing units 33 and 34. Furthermore, viewed from a direction perpendicular to the main surface 31c of the blade 31, the pin insertion holes 321, 322, 331, 332, 341, and 342 are positioned on one side relative to the centerline L1. Therefore, a pair of support members 32b of the movable support unit 32 and a pair of pressing members 33b and 34b of the movable pressing units 33 and 34 can be arranged in appropriate positions. Furthermore, when the drive units (cylinders 32c, 33c, 34c) of the movable support unit 32 and the movable pressing units 33 and 34 are arranged on the centerline L1, the pin insertion holes 321, 322, 331, 332, 341, and 342 of the positioning units 32a, 33a, and 34a can be arranged in appropriate positions by avoiding the drive units.

[0056] Furthermore, in this embodiment, as described above, the positioning pin 35a includes a pair of positioning pins 35a. Additionally, the pin insertion holes 321, 322, 331, 332, 341, and 342 include a pair of pin insertion holes 321, 322, 331, 332, 341, and 342 corresponding to the pair of positioning pins 35a. Furthermore, one of the pair of pin insertion holes 321, 322, 331, 332, 341, and 342 is formed as an elongated hole. Therefore, compared to the case where both of the pair of pin insertion holes 321, 322, 331, 332, 341, and 342 are circular, the insertion of the pair of positioning pins 35a into the pair of pin insertion holes 321, 322, 331, 332, 341, and 342 can be easily performed, thus facilitating the positioning (assembly) of the movable support unit 32 and the movable pressing units 33 and 34.

[0057] Furthermore, in this embodiment, as described above, the substrate holding robot 1 also includes a fixing member 36 that jointly fixes the movable support unit 32 and the movable pressing units 33 and 34, which are jointly positioned by the positioning part 35. Therefore, compared to fixing the movable support unit 32 and the movable pressing units 33 and 34 separately, the time required for fixing the movable support unit 32 and the movable pressing units 33 and 34 can be saved, and correspondingly, the substrate holding robot 1 can be assembled more easily. In addition, compared to fixing the movable support unit 32 and the movable pressing units 33 and 34 separately, the number of components in the fixing member 36 can be reduced.

[0058] In this embodiment, as described above, the positioning part 35 includes a positioning pin 35a. Furthermore, the movable support unit 32 and the movable pressing units 33 and 34 each include a positioned part 32a, 33a, and 34a having pin insertion holes 321, 322, 331, 332, 341, and 342 for inserting the positioning pin 35a along its length, and a fixing member insertion hole 323, 333, and 343 for inserting the fixing member 36. Additionally, the pin insertion holes 321, 322, 331, 332, 341, and 342 and the fixing member insertion holes 323, 333, and 343 of the positioned parts 32a, 33a, and 34a are arranged adjacent to each other in the forward and backward directions of the movable support unit 32 and the movable pressing units 33 and 34. Therefore, the pin insertion holes 321, 322, 331, 332, 341 and 342 and the fixing member insertion holes 323, 333 and 343 of the positioning parts 32a, 33a and 34a can be compactly arranged in a direction parallel to the main surface 31c of the blade 31 and orthogonal to the aforementioned forward and backward direction. Thus, the positioning parts 32a, 33a and 34a can be compact in a direction parallel to the main surface 31c of the blade 31 and orthogonal to the aforementioned forward and backward direction.

[0059] Furthermore, in this embodiment, as described above, the support portions 311 and 312 have a front support portion 311 provided on the front end portion 31a side of the blade 31, and a rear support portion 312 provided on the base end portion 31b side of the blade 31. Additionally, the movable support unit 32 is a movable support unit for supporting the substrate W together with the front support portion 311. Furthermore, the movable pressing units 33 and 34 include a first movable pressing unit 33 for pressing the substrate W supported by the front support portion 311 and the movable support unit 32, and a second movable pressing unit 34 for pressing the substrate W supported by the front support portion 311 and the rear support portion 312. Thus, two (two types) substrates W can be held by one blade 31. Furthermore, when the substrate holding robot 1 includes three units—a movable support unit 32, a first movable pressing unit 33, and a second movable pressing unit 34—these three units can be jointly positioned using a common positioning part 35. As a result, the time spent positioning the movable support unit 32, the first movable pressing unit 33, and the second movable pressing unit 34 can be saved, and correspondingly, the substrate holding robot 1 can be assembled more easily.

[0060] [Variation Example]

[0061] Furthermore, all points in the disclosed embodiments should be considered illustrative and not intended to limit the invention. The scope of the invention is not limited by the above description of the embodiments, but is defined by the claims, and includes all modifications (variations) equivalent to the claims and within their scope.

[0062] For example, in the above embodiments, an example of a horizontal multi-joint robotic arm is shown, but the present invention is not limited thereto. For example, the arm may also be an arm other than a horizontal multi-joint robotic arm, such as a vertical multi-joint robotic arm.

[0063] Furthermore, the above embodiment illustrates an example where a substrate holding robot is provided with multiple blades, but the present invention is not limited thereto. For example, a substrate holding robot may also be provided with only one blade.

[0064] Furthermore, the above embodiment illustrates an example where the substrate holding robot has four blades, but the present invention is not limited thereto. For example, the substrate holding robot may also have more than four blades.

[0065] Furthermore, the above embodiments show an example of a blade having a bifurcated shape, but the present invention is not limited thereto. For example, the blade may also have a shape other than a bifurcated shape.

[0066] Furthermore, in the above embodiments, an example was shown where the blades were configured to support two substrates at different heights; however, the present invention is not limited thereto. For example, the blades may also be configured to support only one substrate (supporting the substrate at only one height).

[0067] Furthermore, the above embodiments illustrate an example where the movable support unit includes a pair of support members, but the invention is not limited thereto. For example, the movable support unit may also include a single support member.

[0068] Furthermore, the above embodiment shows an example with two pressing units, a first movable pressing unit and a second movable pressing unit, but the present invention is not limited thereto. For example, only one movable pressing unit may be provided.

[0069] Furthermore, the above embodiments illustrate an example where the movable pressing unit includes a pair of pressing members, but the present invention is not limited thereto. For example, the movable pressing unit may also include a single pressing member.

[0070] Furthermore, while the above embodiments show an example where the positioning part includes a positioning pin, the present invention is not limited thereto. For example, the positioning part may also include positioning structures such as a positioning wall other than a positioning pin. Additionally, the positioning part may be configured to perform positioning through a combination of multiple types of positioning structures such as positioning pins and positioning walls.

[0071] Furthermore, in the above embodiments, an example is shown where the locating pin extends in a direction perpendicular to the main surface of the blade; however, the present invention is not limited thereto. For example, the locating pin may also be configured to extend in a direction orthogonal to the direction perpendicular to the main surface of the blade.

[0072] Furthermore, the above embodiment shows an example with a pair (two) locating pins, but the present invention is not limited thereto. For example, one or more locating pins may also be provided.

[0073] Furthermore, the above embodiment illustrates an example of fixing the movable support unit and the movable pressing unit, which are jointly positioned by the positioning part, using a common fixing component; however, the present invention is not limited to this. For example, the movable support unit and the movable pressing unit, which are jointly positioned by the positioning part, can also be fixed using separate fixing components.

[0074] Furthermore, the above embodiment illustrates an example where the second movable pressing unit, the first movable pressing unit, and the movable support unit are sequentially positioned using the positioning pins of the positioning part; however, the present invention is not limited to this. In the present invention, either the movable pressing unit or the movable support unit may be positioned first.

[0075] Explanation of reference numerals in the attached figures

[0076] 1…Substrate holding robot; 2…Arm; 31…Blade; 31a…Front end; 31b…Base end; 31c…Main surface; 32…Modible support unit; 32a, 33a, 34a…Positioned part; 32b…Support member; 33…First movable pressing unit (movable pressing unit); 33b, 34b…Pressing member; 34…Second movable pressing unit (movable pressing unit); 35…Positioning part; 35a…Positioning pin; 36…Fixing member; 311…Front support part (support part); 312…Rear support part (support part); 321, 322, 331, 332, 341, 342…Pin insertion hole; 323, 333, 343…Fixing member insertion hole; L1…Center line; W…Substrate.

Claims

1. A substrate holding robot, wherein, The substrate holding robot arm has: Blades, including the support portion of the support base plate; A movable support unit is provided for moving forward and backward to support the substrate. A movable pressing unit is used to press the substrate by moving forward and backward. as well as The positioning unit positions both the movable support unit and the movable pressing unit together. The movable support unit and the movable pressing unit move forward and backward in the same direction. The movable support unit is configured to support the substrate and not support the substrate by moving forward and backward. The movable pressing unit is configured to press the substrate and not press the substrate by moving forward and backward.

2. The substrate holding robot according to claim 1, wherein, The positioning part includes a positioning pin. The movable support unit and the movable pressing unit each include a positioning portion having a pin insertion hole capable of being inserted into the positioning pin along the positioning pin.

3. The substrate holding robot according to claim 2, wherein, The locating pin is configured to extend in a direction perpendicular to the main surface of the blade. The movable support unit and the movable pressing unit are positioned together by the positioning pins, which are inserted into the pin insertion holes of the positioned portion when the positioning pins are arranged in a direction perpendicular to the main surface of the blade.

4. The substrate holding robot according to claim 3, wherein, The movable support unit includes a support component that supports the substrate. The movable pressing unit includes a pressing component that presses the substrate. Viewed from a direction perpendicular to the main surface of the blade, the support member and the pressing member are arranged in a non-overlapping manner, and the positioning part of the movable support unit having the pin insertion hole and the positioning part of the movable pressing unit having the pin insertion hole are arranged in an overlapping manner.

5. The substrate holding robot according to claim 4, wherein, The support component includes a pair of support components. The pressing component includes a pair of pressing components. Viewed from a direction perpendicular to the main surface of the blade, the pair of support members and the pair of pressing members are arranged symmetrically with respect to the center lines extending in the forward and backward directions of the movable support unit and the movable pressing unit. Viewed from a direction perpendicular to the main surface of the blade, the pin insertion hole is positioned on one side relative to the centerline.

6. The substrate holding robot according to claim 2, wherein, The locating pins include a pair of locating pins. The pin insertion holes include a pair of pin insertion holes corresponding to the pair of positioning pins. One of the pair of pin insertion holes is formed into an elongated hole shape.

7. The substrate holding robot according to claim 1, wherein, It also includes a fixing component that fixes the movable support unit and the movable pressing unit together, which are jointly positioned by the positioning part.

8. The substrate holding robot according to claim 7, wherein, The positioning part includes a positioning pin. The movable support unit and the movable pressing unit each include a positioning portion having a pin insertion hole for inserting the positioning pin along the positioning pin and a fixing component insertion hole for inserting the fixing component. The pin insertion hole and the fixing component insertion hole of the positioning part are arranged adjacent to each other in the forward and backward direction of the movable support unit and the movable pressing unit.

9. The substrate holding robot according to claim 1, wherein, The support portion has a front support portion disposed on the front end side of the blade and a rear support portion disposed on the base end side of the blade. The movable support unit is a movable support unit used together with the front support portion to support the substrate. The movable pressing unit includes a first movable pressing unit for pressing the substrate supported by the front support portion and the movable support unit, and a second movable pressing unit for pressing the substrate supported by the front support portion and the rear support portion.

10. A substrate handling robot, wherein, The substrate handling robot has the following features: substrate holding robot; and The arm that holds the robotic arm in place to move the substrate. The substrate holding robot includes: Blades, including the support portion of the support base plate; A movable support unit is provided for moving forward and backward to support the substrate. A movable pressing unit performs forward and backward movement for pressing the substrate; and The positioning unit positions both the movable support unit and the movable pressing unit together. The movable support unit and the movable pressing unit move forward and backward in the same direction. The movable support unit is configured to support the substrate and not support the substrate by moving forward and backward. The movable pressing unit is configured to press the substrate and not press the substrate by moving forward and backward.

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