Lamination device and vacuum lamination system

Abstract

The present invention provides a lamination device suitable for a vacuum lamination system. The lamination device includes a shell and a first flexible pad module. The shell includes a snap-fit ​​groove and a plurality of stoppers, the snap-fit ​​groove includes an opening and an annular inner side wall, the stopper protrudes from the annular inner side wall near the opening, and a plurality of radial notches are formed between the stoppers. The first flexible pad module is detachably arranged on the shell, and includes a first frame and a first flexible pad, the first flexible pad is arranged on the first frame, and the first frame includes a plurality of protrusions, the size of the protrusions being smaller than the size of the radial notches of the shell. When the protrusions are aligned with the radial notches of the shell, the first flexible pad module can enter the snap-fit ​​groove through the opening. The first flexible pad module can be rotated so that the protrusions overlap with the stopper of the shell, so that the first flexible pad module stays in the snap-fit ​​groove. The lamination device of the present invention has a flexible pad module that can be quickly disassembled and assembled to achieve the goal of improving the time and efficiency required for the replacement operation.

Description

Technical Field

[0001] The present invention relates to a film pressing device and a film pressing system, and in particular to a film pressing device suitable for a vacuum film pressing system and a vacuum film pressing system. Background Art

[0002] Vacuum lamination systems are suitable for laminating thin films onto substrates (such as wafers) to protect them. Vacuum lamination systems are often used in integrated circuit (IC) packaging, flexible printed circuit boards (FPCBs), and light-emitting diodes (LEDs).

[0003] The vacuum lamination system includes a laminating mechanism with an expandable gasket. During the vacuum lamination process, the system inflates the gasket through a pipeline into the laminating mechanism to expand and contact the film. The gasket continues to expand until the film is pressed onto the substrate.

[0004] The size of the gasket used in the vacuum lamination system needs to be replaced according to the different substrate sizes (for example, 8-inch wafers or 12-inch wafers). The gasket is a consumable material and needs to be replaced when damaged. Conventional gaskets are fixed to the lamination mechanism by screws or other fastening methods. When replaced, it is not only time-consuming but also requires more than two people to perform the replacement operation. Therefore, how to improve the time and efficiency of the gasket replacement operation is an urgent problem that needs to be solved. Summary of the Invention

[0005] The present invention provides a lamination device and a vacuum lamination system, which have a flexible pad module that can be quickly disassembled and assembled, so as to achieve the goal of improving the time and efficiency required for replacement operation.

[0006] The present invention provides a lamination device suitable for a vacuum lamination system. The lamination device includes a housing and a first flexible pad module. The housing includes a snap-fit ​​groove concave along an axis and a plurality of stoppers. The snap-fit ​​groove includes an opening and an annular inner sidewall surrounding the axis. The stoppers protrude from the annular inner sidewall near the opening, and a plurality of radial notches are formed between the stoppers. The first flexible pad module is detachably mounted on the housing. The first flexible pad module includes a first frame and a first flexible pad mounted on the first frame. The first frame includes an annular outer sidewall and a plurality of protrusions protruding from the annular outer sidewall. The dimensions of these protrusions are respectively smaller than the dimensions of the radial notches of the housing. When the protrusions are aligned with the radial notches of the housing, the first flexible pad module is adapted to pass through the opening along the axis and enter the snap-fit ​​groove. The first flexible pad module is adapted to be rotated so that the protrusions are offset from the radial notches of the housing and are restricted by the stoppers on the axis line, so that the first flexible pad module remains in the snap-fit ​​groove.

[0007] In one embodiment of the present invention, the laminating device further includes a sealing member, the housing includes an annular groove connected to the engaging groove, and the sealing member is disposed in the annular groove. When the first flexible pad module is assembled to the housing, the sealing member can selectively abut against the first frame.

[0008] In one embodiment of the present invention, the housing includes a first surface, a second surface, and at least one air hole. The engaging groove is recessed in the first surface, and the at least one air hole is exposed on the second surface and communicated with the annular groove.

[0009] In one embodiment of the present invention, the housing includes a main channel, the main channel is exposed on the second surface and communicates with the engaging groove, and the at least one air hole includes a plurality of air holes symmetrically arranged relative to the main channel.

[0010] In one embodiment of the present invention, the housing includes a limiting member, which is at least partially located between one of the stoppers and the bottom of the engaging slot.

[0011] In one embodiment of the present invention, the limiting member penetrates the stopper and extends toward the bottom of the groove, and is screwed to the stopper or the housing at a position close to the bottom of the groove.

[0012] In one embodiment of the present invention, the stoppers protrude from the annular inner wall at equal intervals, so that the radial recesses have the same size. The protrusions protrude from the annular outer wall at equal intervals, and the protrusions have the same size.

[0013] In one embodiment of the present invention, the first flexible pad is detachably mounted on the first frame, or the first flexible pad is fixedly mounted on the first frame.

[0014] In one embodiment of the present invention, the second flexible pad module is further included. The second flexible pad module is detachably mounted on the housing. The second flexible pad module includes a second frame and a second flexible pad fixed to the second frame. The inner diameter of the second frame is different from the inner diameter of the first frame.

[0015] The present invention provides a vacuum lamination system suitable for fixing a film on a substrate. The vacuum lamination system includes a carrier and a lamination device. The carrier is suitable for carrying the substrate, and the lamination device is as described in any of the above embodiments. The carrier is disposed below the lamination device, and the carrier and lamination device are suitable for relative movement. The film is suitable for being positioned between the substrate and the lamination device. When the first flexible pad module is disposed in the housing, gas is suitable for being filled into the engagement groove to expand the first flexible pad, so that the film is pushed against and adhered to the substrate.

[0016] Based on the above, the film pressing device of the present invention includes a shell and a first flexible pad module. The shell includes a snap-fit ​​groove concave along the axis and these stoppers protruding from the annular inner wall of the snap-fit ​​groove. These radial recesses are formed between these stoppers, and the snap-fit ​​groove forms an opening on the shell. The first frame of the first flexible pad module includes these protrusions. When the protrusions are aligned with these radial recesses of the shell, the first flexible pad module is suitable for entering the snap-fit ​​groove through the opening along the axis, and the first flexible pad module is suitable for being rotated so that the protrusions are staggered from the radial recesses of the shell and are restricted by the stoppers on the axis line, so that the first flexible pad module stays in the snap-fit ​​groove of the shell. In other words, the film pressing device of the present invention can have the function of quickly installing and quickly disassembling the first flexible pad module. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1A is a schematic diagram of a vacuum lamination system according to an embodiment of the present invention;

[0018] Figure 1B and Figure 1C for Figure 1A A schematic diagram of a vacuum lamination system during a vacuum lamination process;

[0019] Figure 2 is a perspective view of a lamination device according to an embodiment of the present invention;

[0020] Figure 3 for Figure 2 Exploded diagram of the lamination device;

[0021] Figure 4A and Figure 4B Schematic diagram of a process of installing a first flexible pad module of a lamination device on a housing according to an embodiment of the present invention;

[0022] Figure 5A is an exploded view of a first flexible pad module according to an embodiment of the present invention;

[0023] Figure 5B is an exploded view of a second flexible pad module according to another embodiment of the present invention;

[0024] Figure 6 for Figure 2 A top view of a housing of a lamination device;

[0025] Figure 7A for Figure 4B A cross-sectional view of a lamination device;

[0026] Figure 7B for Figure 4B Schematic diagram of the sealing part of the lamination device being sucked up.

[0027] Description of Reference Numerals

[0028] 50: Vacuum lamination system;

[0029] 60: film pressing device;

[0030] 70: carrying device;

[0031] 72: Accommodation space;

[0032] 74: Substrate;

[0033] 80: film;

[0034] 100: first flexible pad module;

[0035] 102: first flexible pad;

[0036] 104: First frame;

[0037] 106: Ontology;

[0038] 108: fixing parts;

[0039] 110: annular lateral wall;

[0040] 112: protrusion;

[0041] 120: medial wall;

[0042] 122, 322: opening;

[0043] 130, 330: perforation;

[0044] 132, 332: screw holes;

[0045] 200: shell;

[0046] 202: seal;

[0047] 204: limiter;

[0048] 206: first surface;

[0049] 208: second surface;

[0050] 210: axis;

[0051] 220: snap-fit ​​slot;

[0052] 222: Opening;

[0053] 224: annular medial wall;

[0054] 226: trough bottom;

[0055] 228: stopper;

[0056] 230: annular groove;

[0057] 232: radial notch;

[0058] 240: head;

[0059] 242: Subject;

[0060] 244: hole;

[0061] 250: Stomata;

[0062] 260: Main channel;

[0063] 262, 264: hole;

[0064] 282, 284: gap;

[0065] 286: Confined space;

[0066] 300: first flexible pad module;

[0067] 302: first flexible pad;

[0068] 304: First frame;

[0069] 306: Ontology;

[0070] 308: fixing parts;

[0071] 310: annular lateral wall;

[0072] 312: protrusion;

[0073] 320: medial wall;

[0074] DA1, DB1: outer diameter;

[0075] DA2, DB2: diameter;

[0076] DA3, DB3: inner diameter. DETAILED DESCRIPTION

[0077] Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Whenever possible, the same reference numerals are used in the drawings and the description to refer to the same or like parts.

[0078] Figure 1A FIG. 4 is a schematic diagram of a vacuum lamination system according to an embodiment of the present invention. Figure 1B and Figure 1C for Figure 1A Schematic diagram of the vacuum lamination system during the vacuum lamination process. Figure 1A and Figure 1B The vacuum lamination system 50 of this embodiment includes a lamination device 60 and a carrying device 70 .

[0079] The lamination device 60 includes a first flexible pad module 100 and a housing 200 . The first flexible pad module 100 is detachably assembled in the housing 200 . The first flexible pad module 100 includes a first flexible pad 102 .

[0080] The carrier device 70 is movably configured below the laminating device 60. In other embodiments, the laminating device 60 may be movably configured above the carrier device 70. The carrier device 70 includes a accommodating space 72, and the substrate 74 is suitable for being placed in the accommodating space 72. The substrate 74 is, for example, a wafer, but the type of substrate 74 is not limited thereto. The film 80 is suitable for passing between the carrier device 70 and the laminating device 60 and being located above the substrate 74. In other embodiments, the film 80 may also be a pre-laminated film and pre-attached to the substrate 74. The vacuum laminating system 50 is suitable for performing a vacuum laminating process to fix the film 80 on the substrate 74 through the laminating device 60.

[0081] Specifically, see Figure 1B and Figure 1C The housing 200 includes a main flow channel 260. During the vacuum lamination process, the carrier 70 carrying the substrate 74 and the lamination device 60 are moved into position. An external vacuum pump (not shown) is used to evacuate the chamber between the lamination device 60 and the carrier 70, creating a vacuum state within the chamber.

[0082] like Figure 1C As shown, gas is suitably introduced from the main flow channel 260 to expand the first flexible pad 102. The first flexible pad 102 expands toward the film 80 and pushes against the film 80 to press the film 80 onto the substrate 74.

[0083] It should be understood that this embodiment is only an example and not a limitation. Figure 1A This is a simplified schematic diagram of the vacuum lamination system 50. In other embodiments, the vacuum lamination system 50 further includes a heating device, a displacement device, etc.

[0084] In this embodiment, the laminating device 60 features a unique design that allows for quick assembly and disassembly of the flexible pad module, enabling rapid replacement. This allows users to quickly replace flexible pad modules of the same size, or to quickly replace flexible pad modules of corresponding sizes to accommodate substrates 74 of different sizes. This will be explained below.

[0085] Figure 2 FIG. 4 is a perspective view of a lamination device according to an embodiment of the present invention. Figure 3 for Figure 2 Exploded view of the lamination device. Figure 2 and Figure 3The housing 200 includes a first surface 206 and a second surface 208 facing each other. The housing 200 includes a locking groove 220 recessed from the first surface 206 along the axis 210. The locking groove 220 includes an opening 222 formed on the first surface 206 and an annular inner sidewall 224 surrounding the axis 210.

[0086] The housing 200 further includes a plurality of stoppers 228 protruding from the annular inner sidewall 224 near the opening 222 , and a plurality of radial recesses 232 are formed between the stoppers 228 .

[0087] In addition, the first flexible pad module 100 further includes a first frame 104 , and the first flexible pad 102 is disposed on the first frame 104 . The first frame 104 includes an annular outer wall 110 and a plurality of protrusions 112 protruding from the annular outer wall 110 .

[0088] Figure 4A and Figure 4B Schematic diagram of the process of installing the first flexible pad module of the lamination device on the housing according to one embodiment of the present invention. In order to clearly show the positional relationship between the protrusion 112 and the stopper 204 of the first flexible pad film assembly 100 assembled on the housing 200, Figure 4A and Figure 4B The housing 200 is drawn with a dotted line, and some components of the housing 200 are ignored.

[0089] See also Figure 3 and Figure 4A When the first flexible pad module 100 is to be assembled to the shell 200 , the first flexible pad module 100 and the shell 200 are aligned along the axis 210 , and the protrusions 112 of the first flexible pad module 100 are aligned with the radial recesses 232 of the shell 200 .

[0090] The protrusions 112 are smaller than the radial recesses 232, and the annular outer wall 110 of the first frame 104 is smaller than the opening 222. This allows the first flexible pad module 100 to pass through the opening 222 and enter the engaging groove 220 along the axis 210. At this point, the first flexible pad module 100 is in the first position P1.

[0091] In other words, at the first position P1 , the projections of the protruding portions 112 of the first flexible pad module 100 on the housing 200 and the projections of the stopping members 228 on the housing 200 do not overlap.

[0092] The first flexible pad module 100 at the first position P1 is adapted to be rotated to Figure 4BThe second position P2 shown is such that the protrusions 112 are offset from the radial recesses 232. When the first flexible pad module 100 is in the second position P2, the projections 112 projected onto the housing 200 at least partially overlap with the projections 228 projected onto the housing 200. Therefore, the movement of the protrusions 112 along the axis 210 is limited by the stops 228, causing the first flexible pad module 100 to remain within the engagement slot 220.

[0093] It should be noted that in this embodiment, the shapes, number, and positions of the protrusions 112 and the stoppers 228 complement each other. Furthermore, the protrusions 112 protrude from the annular outer wall 110 at equal intervals and have the same size. The stoppers 228 protrude from the annular inner wall 224 at equal intervals, ensuring that the radial recesses 232 have the same size. Of course, in other embodiments, the number and size of the protrusions 112 and the stoppers 228 are not limited to this embodiment.

[0094] In addition, in this embodiment, the housing 200 may further include a stopper 204. The stopper 204 of the housing 200 is at least partially located between one of the stoppers 228 and the bottom 226 of the engaging groove 220 ( Figure 3 )between.

[0095] See also Figure 3 and Figure 4A In this embodiment, the stopper 204 comprises a head 240 and a body 242. The diameter of the head 240 is larger than the diameter of the body 242, and the thickness of the head 240 is smaller than the thickness of the body 242, forming a T-shape. The stopper 204 may be a rivet or a screw. Of course, the shape and type of the stopper 204 are not limited to this. The stopper 204 may also be a set screw without a head. The stopper 204 only needs to function as a stopper for the flexible pad module.

[0096] One of the stops 228 of the housing 200 includes a hole 244 ( Figure 3 ), the limiting member 204 passes through the stopper 228 and extends toward the groove bottom 226, and is screwed to the stopper 228 or the portion of the housing 200 near the groove bottom 226. In other words, the main body 242 of the limiting member 204 passes through the hole 244 and extends toward the groove bottom 226, and the head 240 does not pass through the hole 224 and is exposed on the first surface 206 ( Figure 4A In addition, in one embodiment, the limiting member 204 may not penetrate the stop member 228, as long as it can limit the position of the flexible pad module.

[0097] when Figure 4A When the first flexible pad module 100 is rotated around the axis 210 in the direction of the arrow to the second position P2 ( Figure 4B), the protrusion 112 contacts the stopper 204 and stops the first flexible pad module 100 from rotating. In other words, the stopper 204 can serve as the rotation end point of the first flexible pad module 100 and limit the rotation range and rotation direction of the first flexible pad module 100.

[0098] In this embodiment, the first flexible pad module 100 rotates clockwise during assembly ( Figure 4A ( ) It should be understood that this embodiment is merely an example and not a limitation. For example, in other embodiments, the stopper 204 may be disposed on the other side of the stopper 228 to limit the rotation direction of the first flexible pad module 100 to a counterclockwise direction during assembly.

[0099] Similarly, when the first flexible pad module 100 is to be removed, the first flexible pad module 100 only needs to be rotated from the second position P2 to the first position P1 , and the first flexible pad module 100 can be separated from the housing 20 due to gravity.

[0100] It can be seen that the first flexible pad module 100 can be quickly assembled into the housing 200 or quickly disassembled from the housing 200 by switching between the first position P1 and the second position P2 .

[0101] Figure 5A FIG is an exploded view of a first flexible pad module according to an embodiment of the present invention. Figure 5A In this embodiment, the first flexible pad 102 is detachably mounted on the first frame 104. Of course, in other embodiments, the first flexible pad 102 may also be fixedly mounted on the first frame 104.

[0102] The first frame 104 further includes a body 106 and a fixing member 108. The body 106 includes an annular inner wall 120. The annular inner wall 120 surrounds the first flexible pad 102, so that the body 106 surrounds the first flexible pad 102. For example, in this embodiment, the first flexible pad 102 is circular and the body 106 is an annular structure.

[0103] The fixing member 108 of the first frame 104 extends a distance from the annular inner sidewall 120 toward the center, so that an opening 122 is formed in the first frame 104. The first flexible pad 102 is adapted to be fixed on the fixing member 108.

[0104] In this embodiment, the first flexible pad 102 further includes a plurality of through-holes 130, and the fixing member 108 further includes a plurality of screw holes 132 corresponding to the through-holes 130. The first flexible pad module 100 further includes a plurality of fasteners (not shown), which may be screws. These fasteners pass through the corresponding through-holes 130 and screw holes 132 to secure the first flexible pad 102 to the first frame 104.

[0105] In other embodiments, the first flexible pad 102 and the first frame 104 may be combined in other ways. For example, the first flexible pad 102 and the first frame 104 may be integrated.

[0106] See also Figure 5A The first flexible pad 102 has an outer diameter DA1, the opening 122 of the first frame 104 has a diameter DA2, and the annular inner sidewall 120 has an inner diameter DA3. The outer diameter DA1 is smaller than the inner diameter DA3, and the outer diameter DA1 is larger than the diameter DA2.

[0107] In other words, when the first flexible pad 102 is fixed in the first frame 104 , the first flexible pad 102 at least partially overlaps with the fixing element 108 , and the first flexible pad 102 is exposed to the opening 122 of the first frame 104 .

[0108] See also Figure 1C and Figure 5A During the vacuum lamination process, the first flexible pad 102 expands and protrudes from the opening 122 out of the first frame 104 to push against the film 80. Thus, the film 80 ( Figure 1C ) actually depends on the opening 122 ( Figure 5A The area of ​​the opening 122 is related to the diameter DA2.

[0109] Figure 5B FIG. 4 is an exploded view of a second flexible pad module according to another embodiment of the present invention. Figure 5B A second flexible pad module 300 and Figure 5A The first flexible pad module 100 has similar components. Figure 3 and Figure 5B , the plurality of protrusions 312 of the second flexible pad module 300 and the radial recesses 232 ( Figure 3 ) are aligned so that the first flexible pad module 100 and the second flexible pad module 300 are selectively and replaceably disposed on the shell 200.

[0110] Figure 5A and Figure 5B The difference is that the diameter DB2 of the opening 322 of the second frame 304 of the second flexible pad module 300 is smaller than the diameter DA2 of the opening 122 of the first frame 104 .

[0111] exist Figure 5A and Figure 5B In the embodiment, the outer diameter DA1 of the first flexible pad 102 is equal to the outer diameter DB1 of the second flexible pad 302, but the diameters DA2 and DB2 of the openings 122 and 322 are different, resulting in the film 80 ( Figure 1C) area changes.

[0112] Therefore, in this embodiment, the second flexible pad module 300 can be used for small-sized substrates (not shown). In other words, the user can choose to use the first flexible pad module 100 or the second flexible pad module 300 for substrates of different sizes. In other words, by replacing the first flexible pad module 100 or the second flexible pad module 300, the user can essentially achieve the effect of replacing flexible pads of different sizes without having to use flexible pads of multiple sizes, thereby reducing costs and increasing efficiency.

[0113] Of course, the user can also replace the flexible pad module with the same size. In addition, even if the substrates have different sizes, the user can still use the flexible pad module of the original size to apply pressure to substrates of different sizes.

[0114] Figure 6 for Figure 2 The upper view of the housing of the lamination device. Figure 6 The housing 200 further includes a main channel 260 and at least one air hole 250. The main channel 260 is exposed to the second surface 208 through the hole 262, and the main channel 260 is connected to the engaging groove 220 ( Figure 3 The at least one air hole 250 includes a plurality of air holes 250, and these air holes 250 are symmetrically arranged relative to the main channel 260. In other embodiments, these air holes 250 may also be asymmetrically arranged relative to the main channel 260. In this embodiment, the second surface 208 of the housing 200 includes two air holes 250, but the number and position of the air holes 250 are not limited thereto.

[0115] like Figure 3 As shown, the main channel 260 is exposed to the groove bottom 226 of the engaging groove 220 through the hole 264. In other words, in this embodiment, the hole 262 is connected to these holes 264 through the main channel 260.

[0116] Please return Figure 1C The hole 262 of the main channel 260 is suitable for connecting to an external first pressure source (not shown) through a pipeline (not shown). During the vacuum lamination process, the vacuum lamination system 50 fills the main channel 260 of the lamination device 60 with gas through the first pressure source, and the gas enters the groove bottom 226 ( Figure 3 ) to perform the vacuum lamination process.

[0117] Figure 7A for Figure 4B Please also refer to the cross-sectional view of the lamination device. Figure 3 and Figure 7AThe laminating device 60 further includes a sealing member 202, and the housing 200 includes an annular groove 230 connected to the engaging groove 220. The sealing member 202 is disposed in the annular groove 230. In this embodiment, when the first flexible pad module 100 is assembled to the housing 200, the sealing member 202 can selectively abut against the first frame 104.

[0118] Specifically, see Figure 3 、 Figure 6 and Figure 7A The two air holes 250 extend from the second surface 208 to the first surface 206 and are connected to the annular groove 230 of the engaging groove 220. The two air holes 250 are suitable for connecting to an external second pressure source (not shown) through another pipeline (not shown).

[0119] The second pressure source fills the two air holes 250 with gas, and the gas enters the annular groove 230 through the air holes 250, causing the sealing member 202 in the annular groove 230 to press against the first frame 104 to maintain the seal between the engaging groove 220 and the flexible pad module 100, thereby preventing the gas in the engaging groove 220 from leaking from the edge of the first frame 104 when the first pressure source fills the main channel 260 of the lamination device 60 with gas.

[0120] Figure 7B for Figure 4B Schematic diagram of the seal of the lamination device being sucked up. Figure 3 、 Figures 6 to 7B The second pressure source can also suck air from the two air holes 250 , and the gas is sucked out from the annular groove 230 , causing the sealing member 202 to move in the annular groove 230 and separate from the first frame 104 to release the seal of the engaging groove 220 .

[0121] The following will take the first flexible pad module 100 as an example to illustrate the detailed movement of the two air holes 250 and the sealing member 202 in the annular groove 230 during the vacuum lamination process.

[0122] Specifically, before performing the vacuum lamination process, Figure 7B As shown, there is a gap 282 between the first frame 104 and the bottom 226 of the engaging groove 220, and a gap 284 between the protrusion 112 and the stopper 228. In other words, when the first pressure source injects gas into the main channel 260 of the lamination device 60, the gas can flow from the bottom 226 to the outside along the gaps 282 and 284.

[0123] In order to prevent the gas injected by the first pressure source from escaping from the gaps 282 and 284 , in this embodiment, a seal 202 is used to seal the gap 282 between the first frame 104 and the groove bottom 226 .

[0124] like Figure 7AAs shown, when gas is filled into the annular groove 230, the gas pushes against the seal 202, causing the seal 202 to move toward the first frame 104 until the seal 202 abuts against the first frame 104. At this point, a sealed space 286 is formed between the first frame 104 and the groove bottom 226 via the seal 202. The vacuum lamination process can then be performed.

[0125] When the user needs to replace the first flexible pad module 100, in order to facilitate the disassembly of the first flexible pad module 100, Figure 7B As shown, the second pressure source sucks out the gas in the annular groove 230 through the air hole 250 , so that the sealing member 202 leaves the first frame 104 , and the first flexible pad module 100 is adapted to be rotated from the second position P2 to the first position P1 .

[0126] The first flexible pad module 100 in the first position P1 can be removed from the housing 200 , so the user can replace the first flexible pad module 100 .

[0127] In summary, the present invention provides a laminating device for quickly removing and installing a flexible pad. The stopper of the laminating device's housing cooperates with the protrusion of the first flexible pad module to achieve quick removal and installation. While the present invention has been described above with reference to embodiments, this is not intended to limit the present invention. Any person skilled in the art may make modifications and alterations without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

[0128] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A film pressing device, suitable for a vacuum film pressing system, characterized in that: include: The housing comprises a snap-fitting groove concave along the axis and a plurality of stoppers, wherein the snap-fitting groove comprises an opening and an annular inner sidewall surrounding the axis, the plurality of stoppers protrude from the annular inner sidewall at a position close to the opening, and a plurality of radial notches are formed between the plurality of stoppers; The first flexible pad module is detachably mounted on the housing and includes a first frame and a first flexible pad mounted on the first frame, wherein the first frame includes an annular outer wall and a plurality of protrusions protruding from the annular outer wall, wherein the sizes of the plurality of protrusions are respectively smaller than the sizes of the plurality of radial notches, wherein When the plurality of protrusions are aligned with the plurality of radial notches, the first flexible pad module is adapted to enter the engaging groove through the opening along the axis, and the first flexible pad module is adapted to be rotated so that the plurality of protrusions are offset from the plurality of radial notches and are restricted by the plurality of stoppers on the axis line, so that the first flexible pad module stays in the engaging groove; and The second flexible pad module is detachably disposed on the shell, wherein the second flexible pad module includes a second frame and a second flexible pad fixed on the second frame, and the inner diameter of the second frame is different from the inner diameter of the first frame.

2. The lamination device according to claim 1, characterized in that It also includes a sealing member, wherein the shell includes an annular groove connected to the engaging groove, and the sealing member is arranged in the annular groove. When the first flexible pad module is assembled to the shell, the sealing member can selectively abut against the first frame.

3. The lamination device according to claim 2, characterized in that The housing includes a first surface, a second surface and at least one air hole opposite to each other. The engaging groove is recessed in the first surface. The at least one air hole is exposed on the second surface and communicated with the annular groove.

4. The lamination device according to claim 3, characterized in that The housing includes a main channel, the main channel is exposed on the second surface and communicates with the engaging groove, the at least one air hole includes a plurality of air holes, and the plurality of air holes are symmetrically arranged relative to the main channel.

5. The lamination device according to claim 1, characterized in that The housing includes a limiting member, at least part of which is located between one of the plurality of stop members and the bottom of the engaging slot.

6. The lamination device according to claim 5, characterized in that: The limiting member passes through the stop member and extends toward the bottom of the groove, and is screwed to the stop member or the housing at a position close to the bottom of the groove.

7. The lamination device according to claim 1, characterized in that The plurality of stoppers protrude from the annular inner wall at equal intervals, so that the plurality of radial recesses have the same size. The plurality of protrusions protrude from the annular outer wall at equal intervals, and have the same size.

8. The lamination device according to claim 1, characterized in that The first flexible pad is detachably mounted on the first frame, or the first flexible pad is fixedly mounted on the first frame.

9. A vacuum lamination system suitable for fixing a thin film on a substrate, characterized in that: include: a carrying device, adapted to carry the substrate; as well as The lamination device according to any one of claims 1 to 8, wherein the carrier device is disposed below the lamination device and the carrier device and the lamination device are adapted to move relative to each other, and the film is adapted to be located between the substrate and the lamination device, wherein When the first flexible pad module is disposed in the housing, gas is adapted to be filled into the engaging groove to expand the first flexible pad, so that the film is pushed and adhered to the substrate.

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