Dry space manufacturing device and dry space manufacturing method

Abstract

A dry space creation device 100 is designed to minimize the amount of dry air supplied, the time required for gas exchange, and the pressure resistance requirements of the treatment tank. The dry space creation device 100 includes a treatment tank 20, telescopic members 31-34, exhaust units 25, 50, a dry gas supply device 70, and a control device 80. The treatment tank 20 has an internal space Sa. The telescopic members 31-34 are positioned within the treatment tank 20 and expand while leaving a portion of the internal space Sa untouched. The exhaust units 25, 50 exhaust gas G from the internal space Sa to the exterior of the treatment tank 20. The dry air supply device 70 supplies dry gas D to the internal space Sa. After executing a first control C1, the control device 80 executes a second control C2. The first control C1 causes the telescopic members 31-34 to expand while the exhaust units 25, 50 exhaust the gas G from the internal space Sa to the exterior of the treatment tank 20. The second control C2 causes the telescopic members 31-34 to contract while the dry air supply device 70 supplies dry gas D to the internal space Sa.

Description

Technical Field

[0001] The invention relates to a device and a method for manufacturing a dry space. Background Art

[0002] In recent years, electric vehicles, such as electric vehicles (EVs) and hybrid electric vehicles (HEVs), have become increasingly common to reduce carbon dioxide emissions and mitigate adverse impacts on the global environment. For electric vehicles, research and development is underway with the goal of practically implementing batteries with solid electrolytes (such as all-solid-state batteries).

[0003] Among solid electrolytes, there are sulfide-based solid electrolytes that are sensitive to moisture. In such cases, a dry space manufacturing device for manufacturing a dry space (dry environment) is required in a production line of a solid-state battery.

[0004] [Prior Art Literature]

[0005] (Patent Document)

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 2005-61719 Summary of the Invention

[0007] [Problems to be solved by the invention]

[0008] There are two main methods for creating a dry space: normal gas replacement and vacuum gas replacement.

[0009] In the first method (normal gas exchange), dry air is simply supplied to the interior of the treatment tank, which should be a dry space. Simultaneously, an amount of existing gas, such as the normally humid air in the interior, equivalent to the amount of dry air supplied, is discharged to the exterior of the treatment tank. In this case, because the gas exchange involves a mixture of existing and dry gas, some of the dry gas is directly discharged to the exterior of the treatment tank along with the existing gas. This requires a large amount of dry gas and increases the time required for gas exchange.

[0010] In the second method (vacuum gas replacement), the original gas in the internal space is forcibly discharged to the outside of the treatment tank using a pump, and then dry gas is supplied to the internal space. According to this method, compared with the first method (normal gas replacement), the mixing of the original gas and the dry gas can be suppressed. Therefore, the supply amount of dry gas and the time required for gas exchange can be suppressed. However, since the internal space is negative pressure (negative pressure), the pressure resistance requirement for the treatment tank will become higher.

[0011] The present invention has been made in view of the above circumstances, and an object of the present invention is to create a dry space while suppressing any one of the dry air supply amount, the time required for gas exchange, and the pressure resistance requirement for the treatment tank.

[0012] [Technical means to solve the problem]

[0013] The present inventors have discovered that by expanding a telescopic member disposed within a treatment tank to discharge the existing gas in the internal space to the outside of the treatment tank, and then contracting the telescopic member while simultaneously supplying dry gas to the internal space, a dry space can be created while suppressing any of the dry air supply amount, the time required for gas exchange, and the pressure resistance requirement for the treatment tank. This has led to the completion of the present invention. The present invention comprises the following dry space creation devices (1) to (9) and the dry space creation method (10).

[0014] (1) A dry space manufacturing device comprising:

[0015] a processing tank having an internal space;

[0016] a telescopic member disposed in the aforementioned processing tank and expanding while retaining a portion of the aforementioned internal space;

[0017] an exhaust portion for exhausting the gas in the internal space to the outside of the treatment tank;

[0018] a dry gas supply device for supplying dry gas to the internal space; and

[0019] The control device executes a second control after executing the first control, wherein the first control causes the telescopic component to expand while using the exhaust portion to discharge the gas in the internal space to the outside of the treatment tank, and the second control causes the telescopic component to contract while using the dry air supply device to supply dry gas to the internal space.

[0020] According to the invention of (1) above, after the gas (original gas) in the internal space is exhausted to the outside of the treatment tank by the first control, dry air can be supplied to the internal space by the second control, etc. Therefore, compared with the case where dry gas is directly supplied to the internal space without exhausting the original gas (normal gas replacement), the mixing of the original gas and the dry gas can be suppressed, and the exhaust of the dry gas to the outside of the treatment tank together with the original gas can be suppressed. Therefore, a dry space can be created while suppressing the supply amount of dry gas and the time required for gas exchange.

[0021] However, in the first control, when the gas in the internal space is discharged outside the treatment tank, the telescopic member is expanded, so compared with the case where the gas is forcibly discharged without expansion (vacuum gas replacement), the negative pressure in the internal space can be suppressed. Therefore, the pressure resistance requirement for the treatment tank can also be reduced.

[0022] As described above, according to the invention of (1), a dry space can be created while suppressing any of the dry air supply amount, the time required for gas exchange, and the pressure resistance requirement for the treatment tank. Moreover, since the second control retracts the telescopic member after the first control, it is possible to ensure a sufficiently large working space in the internal space without any problems.

[0023] (2) A drying control manufacturing device according to (1), wherein the control device performs the following replacement control between the first control and the second control: while the telescopic member remains in an expanded state, dry gas is supplied to the internal space by the drying supply device, and at the same time, the gas in the internal space is discharged to the outside of the treatment tank by the exhaust portion.

[0024] According to the invention of (2) above, more original gas can be discharged to the outside of the treatment tank compared to the case where the second control is started immediately after the first control without performing the replacement control. However, since the telescopic member expands and the internal space becomes smaller during the replacement control, gas exchange can be performed efficiently.

[0025] (3) The dry space creating device according to (1) or (2), further comprising a detection unit for detecting the dew point temperature of the internal space.

[0026] After the parameter that varies according to the dew point temperature of the internal space becomes equal to or lower than a threshold value, the control device starts the second control accordingly.

[0027] According to the invention of (3) above, since the second control is started based on the dew point temperature, the second control can be started at an appropriate timing.

[0028] (4) The dry space manufacturing device according to any one of (1) to (3), further comprising: a work device fixed to the inner bottom surface of the treatment tank; and a glove mounted on a work surface that is one of the inner wall surfaces of the treatment tank and configured so that an operator can operate the work device from outside the treatment tank;

[0029] The telescopic member is arranged on the inner wall surface outside the working surface.

[0030] According to the invention of (4) above, interference between the glove and the stretchable member can be avoided.

[0031] (5) The dry space manufacturing device according to (4) above, wherein the telescopic member is provided on all of the inner wall surfaces other than the working surface and the top surface of the processing tank.

[0032] According to the invention of (5) above, the internal space can be effectively compressed in the first control by means of these telescopic members.

[0033] (6) The dry space manufacturing device according to any one of (1) to (5), further comprising an air intake device for forcibly sucking the gas outside the treatment tank into the telescopic space for telescoping the telescopic member.

[0034] In the first control, the air intake device forcibly draws gas into the telescopic space, thereby expanding the telescopic member.

[0035] According to the invention of (6) above, the telescopic member can be expanded by the air intake device.

[0036] (7) The dry space manufacturing device according to any one of (1) to (6), wherein the discharge portion includes a discharge device for forcibly discharging the gas in the internal space to the outside of the treatment tank.

[0037] In the first control, while allowing the gas outside the treatment tank to flow into the telescopic space for telescoping the telescopic component, the gas in the internal space is forcibly discharged to the outside of the treatment tank by the exhaust device, thereby causing the telescopic component to expand by the negative pressure of the internal space.

[0038] According to the invention of (7) above, the telescopic member can be expanded by the discharge device.

[0039] (8) The dry space manufacturing device according to any one of (1) to (7), further comprising an exhaust device for forcibly exhausting the gas in the expansion space for expanding and contracting the expansion member to the outside of the treatment tank.

[0040] In the second control, the gas in the telescopic space is forcibly exhausted to the outside of the processing tank by the exhaust device, thereby contracting the telescopic member.

[0041] According to the invention of (8) above, the telescopic member can be contracted by the exhaust device.

[0042] (9) A dry space manufacturing device according to any one of (1) to (8) above, wherein, in the second control, dry gas is supplied to the internal space by the dry gas supply device in a state in which the gas in the telescopic space for telescoping the telescopic member can flow out to the outside of the treatment tank and the gas in the internal space cannot be discharged from the discharge portion to the outside of the treatment tank, thereby causing the telescopic member to contract by the positive pressure of the internal space.

[0043] According to the invention of (9) above, the telescopic member can be contracted by the dry gas supply device.

[0044] (10) A method for manufacturing a dry space is performed using an apparatus having:

[0045] a processing tank having an internal space;

[0046] a telescopic member disposed in the aforementioned processing tank and expanding while retaining a portion of the aforementioned internal space;

[0047] a discharge portion for discharging the gas in the internal space to the outside of the treatment tank; and

[0048] a dry gas supply device for supplying dry gas to the aforementioned internal space;

[0049] The above-mentioned dry space manufacturing method has the following steps:

[0050] In a first step, the telescopic member is expanded, and the gas in the internal space is discharged to the outside of the treatment tank through the discharge portion; and

[0051] In the second step, the expansion member expanded in the first step is contracted, and the dry gas is supplied to the internal space by the dry gas supply device.

[0052] According to the method of the aforementioned (10), the same effect as that of the device of the aforementioned (1) can be obtained.

[0053] (Effects of the Invention)

[0054] As described above, according to the present invention, the second control or the second step is performed after the first control or the first step, thereby making it possible to create a dry space while suppressing any of the dry air supply amount, the time required for gas exchange, and the pressure resistance requirement for the processing tank. BRIEF DESCRIPTION OF THE DRAWINGS

[0055] Figure 1 It is a front view (front sectional view) showing the dry space creating device according to the first embodiment.

[0056] Figure 2 1 is a side view (side sectional view) showing the dry space manufacturing device.

[0057] Figure 3 This is the main view when the first control is drawn.

[0058] Figure 4 It is a side view showing the first control.

[0059] Figure 5 This is the main view when drawing the displacement control.

[0060] Figure 6 It is a side view showing the displacement control.

[0061] Figure 7 This is the main view when the second control is drawn.

[0062] Figure 8 FIG. 2 is a side view showing the second control.

[0063] Figure 9 It is a front view showing the first control in the second embodiment.

[0064] Figure 10 It is a side view showing the first control.

[0065] Figure 11 This is the main view when drawing the displacement control.

[0066] Figure 12 It is a side view showing the displacement control.

[0067] Figure 13 This is the main view when the second control is drawn.

[0068] Figure 14 FIG. 2 is a side view showing the second control.

[0069] Figure 15 This is a front view showing a modified example. DETAILED DESCRIPTION

[0070] Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments, and can be implemented with appropriate modifications without departing from the spirit of the present invention.

[0071] [First embodiment]

[0072] Figure 1 and Figure 2 1 and 2 show a front view (front sectional view) and a side view (side sectional view) of a dry space creating device 100 according to this embodiment. The dry space creating device 100 includes a working device 10 and a processing tank 20 for storing the working device 10.

[0073] The working equipment 10 is a device for handling moisture-sensitive materials such as sulfide-based solid electrolytes, etc. In other words, the working equipment 10 is a device that needs to be operated in a dry space (dry environment).

[0074] The treatment tank 20 has an internal space Sa, an outlet 25, a supply port 27, and a glove 22. The internal space Sa is a dry space. The outlet 25 and the supply port 27 connect the outside of the treatment tank 20 with the internal space Sa.

[0075] The work device 10 is fixed to the inner bottom surface of the treatment tank 20 within the internal space Sa. A glove 22 is attached to the work surface (the front surface in the figure), which is one of the inner walls of the treatment tank 20. Specifically, the work surface is provided with two through-holes 21 extending from the outer wall to the inner wall of the treatment tank 20 (that is, from the outside of the treatment tank 20 to the internal space Sa). A glove 22 is attached to each through-hole 21. The glove 22 allows the operator to operate the work device 10 from outside the treatment tank 20.

[0076] The dry space creating device 100 further includes: a discharge valve 50 ; a dry air supply device 70 ; telescopic members 31 to 34 ; an air intake and exhaust device 60 ; and a control device 80 .

[0077] The discharge valve 50 is provided at the discharge port 25. In the present embodiment, the discharge valve 50 is an electronic valve whose opening and closing is controlled by the control device 80. When the valve is opened, the discharge port 25 is opened, and when the valve is closed, the discharge port 25 is closed. However, a check valve as follows may be provided to replace this electronic valve: gas is allowed to pass (flow out) from the side of the internal space Sa to the outside of the treatment tank 20, but gas is not allowed to pass (flow in) from the outside of the treatment tank 20 to the side of the internal space Sa. The discharge port 25 and the discharge valve 50 constitute a discharge portion that discharges the original gas in the internal space Sa to the outside of the treatment tank 20.

[0078] The dry gas supply device 70 is a device that removes moisture from a gas such as a normally humid gas to generate a dry gas, and is connected to the supply port 27 .

[0079] The telescopic members 31 to 34 are provided on all inner wall surfaces other than the top surface and the working surface of the processing tank 20. Specifically, the telescopic members 31 to 34 are composed of a top telescopic member 31 provided on the top surface, a left telescopic member 32 provided on the left inner wall surface, a rear telescopic member 33 provided on the rear inner wall surface, and a right telescopic member 34 provided on the right inner wall surface.

[0080] Each telescopic member 31-34 is a sheet material, with its edges seamlessly connected (sealed) to the inner surface of the processing tank 20. This creates a telescopic space Sb between each telescopic member 31-34 and the inner surface of the processing tank 20, allowing the telescopic members 31-34 to expand and contract. Communication holes 26 are formed between the top surface of the processing tank 20 and all inner wall surfaces other than the working surface, connecting the exterior of the processing tank 20 to each telescopic space Sb.

[0081] The air intake and exhaust device 60 is an exhaust device such as a blower or pump, and is connected to each communication hole 26. The air intake and exhaust device 60 exhausts (i.e., forcibly draws) air from outside the processing tank 20 into the expansion space Sb to expand the expansion members 31-34, and exhausts (i.e., forcibly exhausts) air from the expansion space Sb to the outside of the processing tank 20 to contract the expansion members 31-34. In other words, the air intake and exhaust device 60 serves as both an air intake device and an air exhaust device for the expansion space Sb.

[0082] The control device 80 controls the exhaust valve 50, the air intake and exhaust device 60, and the dry gas supply device 70. When an operator or the like operates the dry space creating device 100 to instruct the creation of a dry space, the control device 80 sequentially executes the following first control C1 (first step), replacement control Cr (replacement step), and second control C2 (second step).

[0083] Figure 3 and Figure 4 1 is a front view and a side view of the dry space manufacturing device 100 during the first control C1. In the first control C1, the control device 80 sends a valve opening instruction α to the discharge valve 50, and simultaneously sends an air intake instruction βi to the air intake and exhaust device 60. Upon receiving the valve opening instruction α, the discharge valve 50 opens the valve to open the discharge port 25. That is, the original gas G in the internal space Sa can flow out to the outside of the treatment tank 20. Upon receiving the air intake instruction βi, the air intake and exhaust device 60 forcibly sucks the gas g outside the treatment tank 20 into the telescopic space Sb. As a result, the telescopic parts 31 to 34 expand while retaining a partial area of ​​the internal space Sa, and at the same time, discharge the original gas G in the internal space Sa corresponding to the expansion from the discharge port 25 to the outside of the treatment tank 20. When a predetermined amount of gas g is sucked into the telescopic space Sb, the control device 80 ends the first control C1 and starts the replacement control Cr.

[0084] Figure 5 and Figure 6The figures show the front and side views of the dry space creating device 100 during replacement control Cr. During replacement control Cr, the control device 80 continues issuing the valve opening command α to the discharge valve 50, stops issuing the air intake command β to the air intake and exhaust device 60, and simultaneously sends the supply command γ to the dry gas supply device 70. When the air intake command βi stops, the air intake and exhaust device 60 stops drawing gas g into the expansion space Sb. Upon receiving the supply command γ, the dry gas supply device 70 supplies dry gas D to the internal space Sa. Thus, while the expansion members 31-34 remain expanded, dry gas D is supplied from the dry gas supply device 70 to the internal space Sa, while the existing gas G in the internal space Sa, equivalent to the dry gas supply amount, is discharged from the discharge valve 50 to the exterior of the treatment tank 20. This allows gas exchange between the existing gas G and the dry gas D to occur within the internal space Sa.

[0085] The dry space creating device 100 further includes a detector (not shown) for detecting the dew point temperature of the internal space Sa. When the parameter that changes according to the dew point temperature detected by the detector becomes lower than a threshold, the control device 80 ends the replacement control Cr and starts the second control C2.

[0086] Figure 7 and Figure 8 The figures show the front and side views of the dry space creating device 100 during the second control C2. During the second control C2, the control device 80 continues issuing the supply command γ to the dry gas supply device 70, stops issuing the valve opening command α to the discharge valve 50, and simultaneously sends an exhaust command βe to the air intake and exhaust device 60. When the valve opening command α ceases, the discharge valve 50 closes, thereby closing the discharge port 25. This prevents the dry gas D in the internal space Sa from flowing out of the treatment tank 20. Upon receiving the exhaust command βe, the air intake and exhaust device 60 forcibly exhausts the gas g in the telescopic space Sb to the outside of the treatment tank 20. Thus, while the supply of dry gas D to the internal space Sa continues, the telescopic members 31-34 contract. Furthermore, at this point, the pressure increase caused by the supply of dry gas D and the pressure decrease caused by the contraction of the telescopic members 31-34 offset each other, maintaining a substantially constant pressure in the internal space Sa. This eliminates the need for exhausting the dry gas D in the internal space Sa to the outside of the treatment tank 20.

[0087] The effects of this embodiment are summarized below. According to this embodiment, the original gas G in the internal space Sa is exhausted to the exterior of the processing tank 20 through the first control C1, and then the dry gas D is supplied to the internal space Sa through the replacement control Cr and the second control C2. Therefore, compared to a case where the dry gas D is directly supplied to the internal space Sa without exhausting the original gas G (typically a gas replacement), mixing of the original gas G and the dry gas D can be suppressed, and the dry gas D can be prevented from being discharged to the exterior of the processing tank 20 along with the original gas G. As a result, the supply amount of the dry gas D and the time required for gas exchange can be reduced.

[0088] Furthermore, since the expansion members 31 to 34 are expanded in the first control C1, the negative pressure in the internal space Sa can be suppressed compared to a case where the original gas G in the internal space Sa is forcibly exhausted to the outside of the processing tank 20 (vacuum gas replacement) without expansion. Therefore, the pressure resistance requirement for the processing tank 20 can also be suppressed.

[0089] Furthermore, the telescopic members 31-34 are located on all inner wall surfaces of the processing tank 20, excluding the top surface and the working surface. Therefore, the internal space Sa can be efficiently contracted during the first control C1. Furthermore, during the first control C1, the air intake and exhaust device 60 forcibly draws gas g into the telescopic space Sb, thereby expanding the telescopic members 31-34.

[0090] Furthermore, in the replacement control Cr, while the internal spaces Sa of the telescopic members 31 to 34 remain expanded and reduced in size, gas exchange is performed between the original gas G and the dry gas D. Therefore, gas exchange can be performed efficiently.

[0091] Moreover, the control device 80 starts the second control C2 according to the dew point temperature of the internal space Sa. Therefore, the second control can be started at the right time. Moreover, in the second control C2, the gas g in the telescopic space Sb is discharged to the outside of the treatment tank 20 by the air intake and exhaust device 60, so that the telescopic parts 31 to 34 can be contracted by the negative pressure (negative pressure) of the telescopic space Sb. Moreover, the telescopic parts 31 to 34 are contracted in this way, so when operating the operating equipment 10, it can be ensured that the internal space Sa (working space) is large enough without any problems. Moreover, the telescopic parts 31 to 34 are contracted in this way, so in the first control C1, as shown Figure 3 As shown, the telescopic members 32 and 34 can be expanded to a position where they interfere with the glove 22 in a front view.

[0092] [Second embodiment]

[0093] Next, the second embodiment will be described. This embodiment will be described based on the first embodiment, focusing on the differences therefrom, and descriptions of the same or similar points as the first embodiment will be omitted as appropriate.

[0094] Figure 9 and Figure 10 The figures show the front and side views of the dry space creation device 100 during the first control C1 in this embodiment. The dry space creation device 100 includes an air intake and exhaust valve 602 in place of the air intake and exhaust device 60 described in the first embodiment, and an exhaust device 502 in place of the exhaust valve 50 described in the first embodiment. The air intake and exhaust valve 602 is an electronic valve whose opening and closing is controlled by the control device 80. Opening the valve opens the communication hole 26, and closing the valve closes the communication hole 26. The exhaust device 502, such as a blower or pump, exhausts (i.e., forcibly exhausts) the original gas G in the internal space Sa to the exterior of the treatment tank 20.

[0095] In the first control C1, the control device 80 sends a discharge instruction αe to the discharge device 502, and at the same time sends a valve opening instruction β to the intake and exhaust valve 602. When the discharge device 502 receives the discharge instruction αe, it forcibly discharges the original gas G in the internal space Sa to the outside of the processing tank 20. When the intake and exhaust valve 602 receives the valve opening instruction β, it opens the valve to open the connecting hole 26. In other words, the gas outside the processing tank 20 is allowed to flow into the telescopic space Sb. As a result, the original gas G in the internal space Sa is forcibly discharged to the outside of the processing tank 20, and at the same time, the telescopic parts 31 to 34 expand under the negative pressure in the internal space Sa, and the gas g outside the processing tank 20 equivalent to the discharge amount of the original gas G flows into the telescopic space Sb through the intake and exhaust valve 602.

[0096] Figure 11 and Figure 12 The figures show the front and side views of the dry space manufacturing device 100 during the replacement control Cr. During the replacement control Cr, the control device 80 continues issuing the discharge instruction α to the discharge device 502, stops issuing the valve opening instruction β to the intake and exhaust valve 602, and simultaneously sends the supply instruction γ to the dry gas supply device 70. When the valve opening instruction β stops, the intake and exhaust valve 602 closes the valve to close the connecting hole 26. In other words, the gas in the expansion space Sb is prevented from flowing out of the processing tank 20. Thus, while the expansion members 31-34 are expanded, the original gas G in the internal space Sa is continuously discharged to the outside of the processing tank 20 by the discharge device 502, while the dry gas D is supplied to the internal space Sa from the dry gas supply device 70. Thus, gas exchange between the original gas G and the dry gas D is performed in the internal space Sa.

[0097] Figure 13 and Figure 14 1 is a front view and a side view of the dry space manufacturing device 100 during the second control C2. In the second control C2, the control device 80 continues to issue the supply instruction γ to the dry gas supply device 70, stops issuing the discharge instruction αe to the discharge device 502, and simultaneously sends the valve opening instruction β to the intake and exhaust valve 602. When the discharge instruction αe stops, the discharge device 502 stops forcibly discharging the gas from the internal space Sa, preventing the gas from being discharged to the outside of the processing tank 20. Upon receiving the valve opening instruction β, the intake and exhaust valve 602 opens the valve to open the connecting hole 26. As a result, the dry gas D continues to be supplied to the internal space Sa, while the telescopic parts 31 to 34 contract due to the positive pressure in the internal space Sa. The gas g in the telescopic space Sb corresponding to the contraction amount of the telescopic parts is discharged from the intake and exhaust valve 602 to the outside of the processing tank 20.

[0098] According to this embodiment, even if the air intake and exhaust device 60 described in the first embodiment does not exist, in the first control C1, the telescopic parts 31 to 34 can still be expanded by the negative pressure (negative pressure) of the exhaust device 502 on the internal space Sa, and in the second control C2, the telescopic parts 31 to 34 can also be contracted by the positive pressure of the dry gas supply device 70 on the internal space Sa.

[0099] [Other embodiments]

[0100] The above embodiment can be implemented by changing the following method. In the case where it is difficult to completely seal the telescopic space Sb only by the inner surface of the processing tank 20 and the telescopic parts 31 to 34, Figure 15 As shown, a balloon 39 may be provided in the expansion space Sb, and gas g may be injected into the inside of the balloon 39 .

[0101] exist Figure 11 In the second embodiment shown in the figure, even if the connecting hole 26 is always open in the absence of the intake and exhaust valve 602, in the replacement control Cr, the connecting hole 26 can still be always opened in the absence of the intake and exhaust valve 602 without worrying about the contraction of the telescopic parts 31 to 34.

[0102] Reference numerals

[0103] 10: Operating equipment

[0104] 20: Processing tank

[0105] 22: Gloves

[0106] 25: discharge port (discharge portion)

[0107] 31: Telescopic components on the top

[0108] 32: Telescopic component on the left

[0109] 33: Telescopic part on the rear side

[0110] 34: Telescopic part on the right

[0111] 50: Discharge valve (discharge part)

[0112] 502: discharge device (discharge unit)

[0113] 60: Intake and exhaust devices (intake and exhaust devices)

[0114] 70: Drying gas supply device

[0115] 80: Control device

[0116] 100: Dry space manufacturing device

[0117] C1: First Control

[0118] C2: Second Control

[0119] Cr: Displacement Control

[0120] Sa: Interior Space

[0121] Sb: Telescopic Space

[0122] D: Dry gas

[0123] G: original gas

[0124] g: gas

Claims

1. A dry space manufacturing device, comprising: a processing tank having an internal space; a telescopic member disposed in the aforementioned processing tank and expanding while retaining a portion of the aforementioned internal space; a discharge portion for discharging the gas in the internal space to the outside of the treatment tank; a dry gas supply device for supplying dry gas to the aforementioned internal space; a detection unit for detecting the dew point temperature of the internal space; and The control device performs a second control after performing the first control, wherein: The first control causes the telescopic member to expand while the gas in the internal space is discharged to the outside of the treatment tank by the exhaust portion, and the second control causes the telescopic member to contract while the dry air supply device is used to supply dry gas to the internal space. After the parameter that varies according to the dew point temperature of the internal space becomes equal to or lower than a threshold value, the control device starts the second control accordingly.

2. The dry space manufacturing device according to claim 1, wherein: An air intake device is provided to forcibly draw the gas outside the treatment tank into the telescopic space for telescoping the telescopic member. In the first control, the air intake device forcibly draws gas into the telescopic space, thereby expanding the telescopic member.

3. The dry space manufacturing device according to claim 1, wherein: The exhaust portion includes an exhaust device for forcibly exhausting the gas in the internal space to the outside of the treatment tank. In the first control, while allowing the gas outside the treatment tank to flow into the telescopic space for telescoping the telescopic component, the gas in the internal space is forcibly discharged to the outside of the treatment tank by the exhaust device, thereby causing the telescopic component to expand by the negative pressure of the internal space.

4. The dry space manufacturing device according to claim 1 or 2, wherein: The control device performs the following replacement control between the first control and the second control: while the telescopic component remains in an expanded state, dry gas is supplied to the internal space by the drying supply device, and at the same time, the gas in the internal space is discharged to the outside of the treatment tank by the exhaust part.

5. The dry space manufacturing device according to claim 1 or 2, wherein: The invention comprises: an operating device fixed to the inner bottom surface of the treatment tank; and a glove mounted on a working surface which is one of the inner wall surfaces of the treatment tank and configured so that an operator can operate the operating device from the outside of the treatment tank; The telescopic member is arranged on the inner wall surface outside the working surface.

6. The dry space manufacturing device according to claim 5, wherein: The telescopic components are arranged on all the inner wall surfaces other than the working surface and the top surface of the processing tank.

7. The dry space manufacturing device according to claim 1 or 2, wherein: An exhaust device is provided for forcibly exhausting the gas in the telescopic space for telescoping the telescopic member to the outside of the treatment tank. In the second control, the gas in the telescopic space is forcibly exhausted to the outside of the processing tank by the exhaust device, thereby contracting the telescopic member.

8. The dry space manufacturing device according to claim 1 or 2, wherein: In the second control, dry gas is supplied to the internal space by the dry gas supply device in a state in which the gas in the telescopic space for telescoping the telescopic component can flow out to the outside of the treatment tank and the gas in the internal space cannot be discharged from the exhaust portion to the outside of the treatment tank, thereby causing the telescopic component to contract by the positive pressure of the internal space.

9. A method for manufacturing a dry space, comprising: a processing tank having an internal space; a telescopic member disposed in the aforementioned processing tank and expanding while retaining a portion of the aforementioned internal space; a discharge portion for discharging the gas in the internal space to the outside of the treatment tank; a dry gas supply device for supplying dry gas to the internal space; and a detection unit for detecting the dew point temperature of the aforementioned internal space; The above-mentioned dry space manufacturing method has the following steps: In a first step, the telescopic member is expanded, and the gas in the internal space is discharged to the outside of the treatment tank through the discharge portion; and In the second step, the expansion member expanded in the first step is contracted, and at the same time, the dry gas is supplied to the internal space by the dry gas supply device. After the parameter that varies according to the dew point temperature of the internal space becomes below a threshold value, the second step is started accordingly.

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