A piezoelectrically driven optical attitude adjustment and imaging system

By using piezoelectric drive and bending composite drivers in the posture adjustment and imaging system, the problems of poor accuracy and slow response speed of traditional systems are solved, and an optical posture adjustment and imaging system with fast response, high resolution and high stability are realized.

CN116027544BActive Publication Date: 2025-04-25HARBIN INST OF TECH
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Patent Information

Application Number
CN202310082497.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-02-08
Publication Date
2025-04-25
Estimated Expiration
2043-02-08

AI Technical Summary

Technical Problem

The traditional posture adjustment and imaging systems have poor accuracy and slow response speed, making it difficult to adapt to the working environment of moving targets and random jitters.

Method used

The optical posture adjustment and imaging system with piezoelectric drive is adopted to achieve multi-degree of freedom optical posture adjustment through bent composite drivers and flexible hinges, without the need for traditional gears, worm gears and other transmissions.

Benefits of technology

It achieves fast response, high resolution and high stability, and is suitable for optical posture adjustment and imaging systems, avoiding transmission errors and electromagnetic interference in traditional systems.

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Abstract

A piezoelectric driven optical attitude adjustment and imaging system belongs to the field of optical imaging technology and solves the problems of poor accuracy and slow response speed of traditional attitude adjustment and imaging systems. The system of the present invention comprises: a motion platform comprising a platform base, two horizontally and symmetrically arranged bending composite drivers, a linear bearing and a mover. The bending composite driver can generate motion output in orthogonal directions and drive the camera to achieve linear motion and rotational motion. The tilting mirror comprises a lens, a mirror frame, four flexible hinges, sixteen bolts, four bending drivers and a mirror base. The four bending drivers cooperate to drive the lens to output a two-degree-of-freedom deflection motion. The present invention realizes the rapid response and high resolution of the optical attitude adjustment and imaging system through the two-degree-of-freedom motion output of the camera in linear and rotational directions and the two-degree-of-freedom deflection motion output of the tilting mirror in orthogonal directions. The present invention is suitable for an optical attitude adjustment and imaging system.
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Description

Technical Field

[0001] The present application relates to the field of optical imaging technology, and in particular to optical posture adjustment and imaging. Background Art

[0002] As the core equipment in the fields of adaptive optical tracking, optical communication and image stabilization, the optical attitude adjustment and imaging system can guide the light beam to the target position with high precision and speed, requiring the actuator to have a large stroke, fast response, high resolution and high stability. Traditional attitude adjustment and imaging systems require the use of a large number of transmission mechanisms and transmission pairs, and the existing transmission errors affect the accuracy and performance of the imaging system. In addition, the response speed of traditional attitude adjustment and imaging systems is difficult to adapt to the working environment of moving targets and random jitter. Summary of the invention

[0003] The purpose of the present invention is to solve the problems of poor accuracy and slow response speed of traditional attitude adjustment and imaging systems, and to provide a piezoelectric driven optical attitude adjustment and imaging system.

[0004] The present invention is implemented by the following technical solutions. On the one hand, the present invention provides a piezoelectric driven optical posture adjustment and imaging system, the system comprising: a system base, a motion platform, a camera and a tilt mirror, wherein the motion platform comprises a platform base, two horizontally and symmetrically arranged bending composite drivers, a linear bearing and a mover;

[0005] The platform base is fixedly mounted on the system base;

[0006] The bending composite driver comprises a first driver base, a bending composite piezoelectric unit and a driving foot, one end of the bending composite piezoelectric unit is connected to the driving foot and the other end is connected to the first driver base, and the bending composite driver is fixedly mounted on the platform base through the first driver base;

[0007] The linear bearing is installed at the central through hole of the platform base through interference fit;

[0008] The mover is in frictional contact with the linear bearing and in contact and compression with the driving foot;

[0009] The camera is fixed on the mover, and the camera can realize linear and rotational motion displacement;

[0010] The tilt mirror comprises a lens, a mirror frame, four flexible hinges, sixteen bolts, four bending actuators and a mirror base;

[0011] The mirror base is fixedly mounted on the system base;

[0012] The bending actuator comprises a second actuator base, a bending piezoelectric unit and a horn, one end of the bending piezoelectric unit is connected to the horn, and the other end is connected to the second actuator base, and four bending actuators are evenly fixed on the mirror base along the circumferential direction through the second actuator base; the output end of the horn is provided with a threaded hole;

[0013] The mirror frame is provided with a threaded hole;

[0014] The bottom and top of the flexible hinge are both provided with through holes, the bottoms of the four flexible hinges are evenly connected to the output ends of the four amplitude transformers along the circumferential direction by bolts, and the tops of the four flexible hinges are connected to the mirror frame by bolts;

[0015] The lens is fixed on the frame.

[0016] Furthermore, the bending compound actuator can generate motion output in orthogonal directions. When a positive voltage is applied, the bending compound actuator outputs positive motion. When a negative voltage is applied, the bending compound actuator outputs negative motion.

[0017] Furthermore, the bending composite piezoelectric unit is one of a stacked structure, a patch structure or a piezoelectric tube, and is used to achieve bending motion.

[0018] Furthermore, the linear bearing is in the shape of a straight-cylindrical type, a flange type or an open type, and is used in conjunction with a mover to achieve linear motion.

[0019] Furthermore, four bending actuators are used to drive the lens to output a deflection motion with two degrees of freedom.

[0020] Furthermore, the bending piezoelectric unit is a stacked structure, a patch structure or a piezoelectric tube, and is used to achieve bending motion.

[0021] Furthermore, the hinge type of the flexible hinge is one of blade-shaped, semicircular or elliptical, and the four flexible hinges are used to transmit and decouple motion.

[0022] Furthermore, the system base is provided with a plurality of assembly holes, and the motion platform and the tilt mirror can adjust the relative position and angle on the system base.

[0023] Further, when a positive voltage is applied, the bending actuator outputs a positive motion, and when a negative voltage is applied, the bending actuator outputs a negative motion.

[0024] Furthermore, when the two bending compound driver outputs move in the positive direction along the Z axis, they are used to drive the mover and the camera to move in the positive direction along the Z axis; when one bending compound driver moves in the positive direction along the Y axis and the other bending compound driver moves in the negative direction along the Y axis, it is used to drive the camera to move around the Z axis.

[0025] Beneficial effects of the present invention:

[0026] The present invention provides a piezoelectric driven optical attitude adjustment and imaging system, which realizes multi-degree-of-freedom optical attitude adjustment through a piezoelectric driver, does not require traditional transmission parts such as gears and worm gears, and is directly driven by a flexible hinge. It has the characteristics of fast response, high resolution, self-locking when power is off, no electromagnetic interference, simple structure and high stability.

[0027] The system of the present invention can realize linear and rotational two-degree-of-freedom motion output of the camera. After power failure, the position of the camera remains unchanged under the action of static friction. The tilt mirror realizes two-degree-of-freedom deflection motion output in orthogonal directions by means of a piezoelectrically driven flexible hinge. After power failure, the deflection angle of the tilt mirror is the same as the working zero angle, which makes it easy to achieve fast response and high resolution.

[0028] The present invention is applicable to optical posture adjustment and imaging systems. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the embodiments are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0030] Figure 1 A three-dimensional schematic diagram of the piezoelectric driven optical attitude adjustment and imaging system of the present invention;

[0031] Figure 2 A schematic diagram of the flexible hinge structure of the piezoelectrically driven optical posture adjustment and imaging system of the present invention;

[0032] Figure 3 (a) is a schematic diagram of the structure of the bending composite actuator moving along the positive direction of the Z axis; (b) is a schematic diagram of the structure of the motion platform moving along the positive direction of the Z axis;

[0033] Figure 4 (a) is a schematic diagram of the structure of the bending composite actuator outputting clockwise motion around the Z axis; (b) is a schematic diagram of the structure of the motion platform outputting clockwise motion around the Z axis;

[0034] Figure 5 (a) is a schematic diagram of two bending actuators distributed in the Y-axis direction, one moving along the positive direction of the Z-axis and the other moving along the negative direction of the Z-axis; (b) is a schematic diagram of the structure of the tilt mirror moving clockwise around the X-axis output;

[0035] Figure 6(a) is a schematic diagram of two bending actuators distributed in the X-axis direction, one moving along the positive direction of the Z-axis and the other moving along the negative direction of the Z-axis; (b) is a schematic diagram of the structure of the tilt mirror moving clockwise around the Y-axis output.

[0036] In the figure, 1-system base; 2-motion platform; 2-1-platform base; 2-2-bending composite actuator; 2-2-1-first actuator base; 2-2-2-bending composite piezoelectric unit; 2-2-3-driving foot; 2-3-linear bearing; 2-4-mover; 3-camera; 4-tilt mirror; 4-1 lens; 4-2 mirror frame; 4-3-flexible hinge; 4-4-bolt; 4-5-bending actuator; 4-5-1-second actuator base; 4-5-2-bending piezoelectric unit; 4-5-3-amplifier; 4-6-mirror base. DETAILED DESCRIPTION

[0037] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0038] Embodiment 1: A piezoelectric driven optical posture adjustment and imaging system, the system comprising: a system base 1, a motion platform 2, a camera 3 and a tilt mirror 4, wherein the motion platform 2 comprises a platform base 2-1, two horizontally and symmetrically arranged bending composite actuators 2-2, a linear bearing 2-3 and a mover 2-4;

[0039] The platform base 2-1 is fixedly mounted on the system base 1;

[0040] The bending composite driver 2-2 comprises a first driver base 2-2-1, a bending composite piezoelectric unit 2-2-2 and a driving foot 2-2-3. One end of the bending composite piezoelectric unit 2-2-2 is connected to the driving foot 2-2-3, and the other end is connected to the first driver base 2-2-1. The bending composite driver 2-2 is fixedly mounted on the platform base 2-1 through the first driver base 2-2-1.

[0041] The linear bearing 2-3 is installed at the central through hole of the platform base 2-1 by interference fit;

[0042] The mover 2-4 is in friction contact with the linear bearing 2-3 and is in contact and pressed with the driving foot 2-2-3;

[0043] The camera 3 is fixed on the mover 2-4, and the camera 3 can realize linear and rotational motion displacement;

[0044] The tilt mirror 4 includes a lens 4-1, a mirror frame 4-2, four flexible hinges 4-3, sixteen bolts 4-4, four bending drivers 4-5 and a mirror base 4-6;

[0045] The mirror base 4-6 is fixedly mounted on the system base 1;

[0046] The bending actuator 4-5 comprises a second actuator base 4-5-1, a bending piezoelectric unit 4-5-2 and a horn 4-5-3. One end of the bending piezoelectric unit 4-5-2 is connected to the horn 4-5-3 and the other end is connected to the second actuator base 4-5-1. Four bending actuators 4-5 are evenly fixed on the mirror base 4-6 along the circumferential direction through the second actuator base 4-5-1. The output end of the horn 4-5-3 is provided with a threaded hole.

[0047] The mirror frame 4-2 is provided with a threaded hole;

[0048] The bottom and top of the flexible hinge 4-3 are provided with through holes, the bottoms of the four flexible hinges 4-3 are evenly connected to the output ends of the four amplitude transformers 4-5-3 along the circumferential direction by bolts 4-4, and the tops of the four flexible hinges 4-3 are connected to the mirror frame 4-2 by bolts 4-4;

[0049] The lens 4-1 is fixed on the frame 4-2.

[0050] In this embodiment, multi-degree-of-freedom optical attitude adjustment is achieved through a piezoelectric drive. No traditional transmission parts such as gears and worm gears are required. It is directly driven by a flexible hinge and has the characteristics of fast response, high resolution, self-locking when power is off, no electromagnetic interference, simple structure and high stability.

[0051] The system of this embodiment can realize the camera's two-degree-of-freedom motion output of linear and rotation. After power failure, the camera's position remains unchanged due to static friction. The tilt mirror is driven by a piezoelectric flexible hinge to achieve two-degree-of-freedom deflection motion output in orthogonal directions. After power failure, the deflection angle of the tilt mirror is the same as the working zero angle, which makes it easy to achieve fast response and high resolution.

[0052] Embodiment 2: This embodiment further defines the piezoelectric driven optical posture adjustment and imaging system described in Embodiment 1. In this embodiment, the bending composite actuator 2-2 is further defined, specifically including:

[0053] The bending compound driver 2 - 2 can generate motion output in orthogonal directions. When a positive voltage is applied, the bending compound driver 2 - 2 outputs positive motion. When a negative voltage is applied, the bending compound driver 2 - 2 outputs negative motion.

[0054] By setting the bending composite driver 2-2 in this embodiment, the linear and rotational reciprocating motion of the mover 2-4 can be realized, thereby realizing the multi-degree-of-freedom motion of the camera.

[0055] Implementation method 3: This implementation method further defines the piezoelectric driven optical posture adjustment and imaging system described in Implementation method 1. In this implementation method, the curved composite piezoelectric unit 2-2-2 is further defined, specifically including:

[0056] The bending composite piezoelectric unit 2-2-2 is a stacked structure, a patch structure or a piezoelectric tube, and is used to achieve bending motion.

[0057] By means of the bending composite piezoelectric unit 2-2-2 in this embodiment, bending motion can be realized, thereby achieving optical posture adjustment with multiple degrees of freedom.

[0058] Embodiment 4: This embodiment further defines the piezoelectric driven optical posture adjustment and imaging system described in Embodiment 1. In this embodiment, the linear bearing 2-3 is further defined, specifically including:

[0059] The linear bearing 2-3 is in the shape of a straight cylinder, a flange or an open type, and is used in conjunction with the mover 2-4 to achieve linear motion.

[0060] Through the linear bearing 2-3 in this embodiment, the linear and rotational motion of the mover 2-4 can be realized, thereby realizing multi-degree-of-freedom optical posture adjustment.

[0061] Embodiment 5: This embodiment further defines the piezoelectric driven optical posture adjustment and imaging system described in Embodiment 1. In this embodiment, the driver bend 4-5 is further defined, specifically including:

[0062] The four bending actuators 4 - 5 are used to drive the lens 4 - 1 to output a two-degree-of-freedom deflection motion.

[0063] Through the bending driver 4 - 5 in this embodiment, it is possible to drive the lens 4 - 1 to output a deflection motion with two degrees of freedom, thereby achieving optical posture adjustment with multiple degrees of freedom.

[0064] Embodiment 6: This embodiment further defines the piezoelectric driven optical posture adjustment and imaging system described in Embodiment 1. In this embodiment, the bending piezoelectric unit 4-5-2 is further defined, specifically including:

[0065] The bending piezoelectric unit 4-5-2 is a stacked structure, a patch structure or a piezoelectric tube, and is used to achieve bending motion.

[0066] By means of the bending piezoelectric unit 4-5-2 in this embodiment, bending motion can be realized, thereby achieving optical posture adjustment with multiple degrees of freedom.

[0067] Embodiment 7: This embodiment further defines the piezoelectric driven optical posture adjustment and imaging system described in Embodiment 1. In this embodiment, the flexible hinge 4-3 is further defined, specifically including:

[0068] The hinge type of the flexible hinge 4 - 3 is one of blade-shaped, semicircular or elliptical, and the four flexible hinges 4 - 3 are used to transmit and decouple motion.

[0069] Through the flexible hinge 4-3 in this embodiment, transmission and decoupling motion can be achieved, thereby realizing multi-degree-of-freedom optical posture adjustment.

[0070] Embodiment 8: This embodiment further defines the piezoelectric driven optical posture adjustment and imaging system described in Embodiment 1. In this embodiment, the system base 1 is further defined, specifically including:

[0071] The system base 1 is provided with a plurality of assembly holes, and the motion platform 2 and the tilt mirror 4 can adjust the relative position and angle on the system base 1 .

[0072] In this embodiment, by adjusting the relative position and angle of the motion platform 2 and the tilt mirror 4, the optical posture adjustment and the volume adjustment of the imaging system can be achieved, thereby achieving adaptation to the installation space.

[0073] Embodiment 9: This embodiment further defines the piezoelectric driven optical posture adjustment and imaging system described in Embodiment 1. In this embodiment, the bending actuators 4-5 are further defined, specifically including:

[0074] When a positive voltage is applied, the bending actuator 4 - 5 outputs a positive motion, and when a negative voltage is applied, the bending actuator 4 - 5 outputs a negative motion.

[0075] In this embodiment, the bidirectional movement of the bending driver 4 - 5 can realize the reciprocating movement of the tilt mirror, thereby achieving that the deflection angle of the tilt mirror after power failure is the same as the working zero angle.

[0076] Embodiment 10: This embodiment further defines the piezoelectric driven optical posture adjustment and imaging system described in Embodiment 1. In this embodiment, two bending composite actuators 2-2 are further defined, specifically including:

[0077] When the outputs of the two bending compound drivers 2-2 move in the positive direction along the Z axis, they are used to drive the mover 2-4 and the camera 3 to move in the positive direction along the Z axis; when one bending compound driver 2-2 moves in the positive direction along the Y axis and the other bending compound driver 2-2 moves in the negative direction along the Y axis, it is used to drive the camera 3 to move around the Z axis.

[0078] In this embodiment, the bending motion of the two bending compound actuators 2 - 2 can realize the linear and rotational motion of the camera, thereby realizing multi-degree-of-freedom motion.

[0079] Embodiment 11: This embodiment is a specific embodiment of a piezoelectric driven optical attitude adjustment and imaging system as described above, and specifically includes:

[0080] Reference Figure 1 and Figure 2 A piezoelectric driven optical posture adjustment and imaging system, which mainly includes a system base 1, a motion platform 2, a camera 3 and a tilt mirror 4, wherein the motion platform 2 includes a platform base 2-1, two horizontally and symmetrically arranged bending composite drivers 2-2, a linear bearing 2-3 and a mover 2-4; the platform base 2-1 is fixed on the system base 1; the linear bearing 2-3 is installed at the central through hole of the platform base 2-1 by interference fit; the mover 2-4 and the linear bearing There is friction contact between 2-3, and contact and press with driving foot 2-2-3; the camera 3 is fixed on the mover 2-4, and the camera 3 can realize linear and rotational motion displacement; the tilt mirror 4 includes a lens 4-1, a frame 4-2, four flexible hinges 4-3, sixteen bolts 4-4, four bending drivers 4-5 and a mirror base 4-6; the mirror base 4-6 is fixed on the system base 1; the frame 4-2 is provided with a threaded hole; the lens 4-1 is fixed on the frame 4-2.

[0081] The bending composite driver 2-2 includes a first driver base 2-2-1, a bending composite piezoelectric unit 2-2-2 and a driving foot 2-2-3. The structure is symmetrical and can generate motion output in orthogonal directions. One end of the bending composite piezoelectric unit 2-2-2 is connected to the driving foot 2-2-3, and the other end is connected to the first driver base 2-2-1. The bending composite driver 2-2 is fixed on the platform base 2-1 through the first driver base 2-2-1. When a positive voltage is applied, the bending composite driver 2-2 outputs a positive motion. When a negative voltage is applied, the bending composite driver 2-2 outputs a negative motion. The bending composite piezoelectric unit 2-2-2 is a stacked structure for realizing bending motion.

[0082] The linear bearing 2-3 is a straight-cylindrical type and is used in conjunction with the mover 2-4 to achieve linear motion.

[0083] The bending actuator 4-5 includes a second actuator base 4-5-1, a bending piezoelectric unit 4-5-2 and a variable amplitude rod 4-5-3. One end of the bending piezoelectric unit 4-5-2 is connected to the variable amplitude rod 4-5-3, and the other end is connected to the second actuator base 4-5-1. Four bending actuators 4-5 are evenly fixed on the mirror base 4-6 along the circumferential direction through the second actuator base 4-5-1. When a positive voltage is applied, the bending actuator 4-5 outputs a positive motion. When a negative voltage is applied, the bending actuator 4-5 outputs a negative motion. The output end of the variable amplitude rod 4-5-3 is provided with a threaded hole.

[0084] The bending piezoelectric unit 4-5-2 is a stacked structure for realizing bending motion.

[0085] The hinge type of the flexible hinge 4-3 is blade-shaped, and through holes are provided at the bottom and top of the four flexible hinges 4-3. The bottoms of the four flexible hinges 4-3 are evenly connected to the output ends of the four amplitude transformers 4-5-3 along the circumferential direction by bolts 4-4, and the tops of the four flexible hinges 4-3 are connected to the mirror frame 4-2 by bolts 4-4. The flexible hinges 4-3 are used to transmit and decouple motion.

[0086] The system base 1 is provided with a plurality of assembly holes, and the relative positions and angles of the motion platform 2 and the tilt mirror 4 can be adjusted on the system base 1 .

[0087] Reference Figure 3 The outputs of the two bending composite actuators 2-2 move in the positive direction along the Z axis, and are used to drive the mover 2-4 and the camera 3 to move in the positive direction along the Z axis.

[0088] Reference Figure 4 The bending compound driver 2-2, one bending compound driver 2-2 moves along the positive direction of the Y axis, and the other bending compound driver 2-2 moves along the negative direction of the Y axis, is used to drive the camera 3 to move around the Z axis for output.

[0089] Reference Figure 5 The two bending actuators 4-5 are distributed in the Y-axis direction, one bending piezoelectric actuator 4-5 moves along the positive direction of the Z-axis, and the other bending piezoelectric actuator 4-5 moves along the negative direction of the Z-axis, driving the lens 4-1 to move around the X-axis for output.

[0090] Reference Figure 6 , two bending drivers 4-5 are distributed in the X-axis direction, one bending piezoelectric driver 4-2 moves along the positive direction of the Z-axis, and the other bending piezoelectric driver 4-5 moves along the negative direction of the Z-axis, driving the lens 4-1 to move around the Y-axis for output.

[0091] Reference Figures 1 to 6The optical path signal from the light source is reflected to the camera 3 through the lens 4-1 of the tilt mirror 4. After receiving the optical path signal and processing the information, the camera 3 feeds back the control signal to the bending compound driver 2-2 of the motion platform 2 and the bending driver 4-5 of the tilt mirror 4. The control signal is applied to the bending compound driver 2-2 to drive the motion platform 2 to adjust the posture of the linear and rotational degrees of freedom. The control signal is applied to the bending driver 4-5 to drive the tilt mirror 4 to adjust the posture of the two degrees of freedom deflection in the orthogonal directions until the image clarity obtained by processing the information by the camera 3 meets the requirements.

[0092] The system of the present invention can realize the two-degree-of-freedom motion output of the camera in linear and rotational directions, and the two-degree-of-freedom deflection motion output of the tilt mirror in the orthogonal direction, and can easily realize fast response and high resolution.

[0093] The above is a detailed introduction to the piezoelectric-driven optical attitude adjustment and imaging system proposed in the present invention, and the principles and implementation methods of the present invention are explained. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; at the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A piezoelectric driven optical posture adjustment and imaging system, characterized in that: The system comprises: a system base (1), a motion platform (2), a camera (3) and a tilt mirror (4), wherein the motion platform (2) comprises a platform base (2-1), two horizontally and symmetrically arranged bending composite drivers (2-2), a linear bearing (2-3) and a mover (2-4); The platform base (2-1) is fixedly mounted on the system base (1); The bending composite driver (2-2) comprises a first driver base (2-2-1), a bending composite piezoelectric unit (2-2-2) and a driving foot (2-2-3); one end of the bending composite piezoelectric unit (2-2-2) is connected to the driving foot (2-2-3) and the other end is connected to the first driver base (2-2-1); the bending composite driver (2-2) is fixedly mounted on the platform base (2-1) via the first driver base (2-2-1); The linear bearing (2-3) is installed at the central through hole of the platform base (2-1) through interference fit; The mover (2-4) is in frictional contact with the linear bearing (2-3), and is in contact with and pressed against the driving foot (2-2-3); The camera (3) is fixedly mounted on the mover (2-4), and the camera (3) can realize linear and rotational motion displacement; The tilting mirror (4) comprises a lens (4-1), a mirror frame (4-2), four flexible hinges (4-3), sixteen bolts (4-4), four bending drivers (4-5) and a mirror base (4-6); The mirror base (4-6) is fixedly mounted on the system base (1); The bending driver (4-5) comprises a second driver base (4-5-1), a bending piezoelectric unit (4-5-2) and a horn (4-5-3); one end of the bending piezoelectric unit (4-5-2) is connected to the horn (4-5-3) and the other end is connected to the second driver base (4-5-1); four bending drivers (4-5) are evenly fixed on the mirror base (4-6) along the circumferential direction via the second driver base (4-5-1); a threaded hole is provided at the output end of the horn (4-5-3); The mirror frame (4-2) is provided with a threaded hole; The bottom and top of the flexible hinge (4-3) are both provided with through holes, the bottoms of the four flexible hinges (4-3) are evenly connected to the output ends of the four amplitude change rods (4-5-3) along the circumferential direction via bolts (4-4), and the tops of the four flexible hinges (4-3) are connected to the mirror frame (4-2) via bolts (4-4); The lens (4-1) is fixedly mounted on the frame (4-2); The outputs of the two bending composite actuators (2-2) move in the positive direction along the Z axis, and are used to drive the mover (2-4) and the camera (3) to move in the positive direction along the Z axis; One bending compound driver (2-2) moves along the positive direction of the Y axis, and the other bending compound driver (2-2) moves along the negative direction of the Y axis, and is used to drive the camera (3) to move around the Z axis for output; Two bending actuators (4-5) are distributed in the Y-axis direction, one bending actuator (4-5) moves along the positive direction of the Z-axis, and the other bending actuator (4-5) moves along the negative direction of the Z-axis, driving the lens (4-1) to move around the X-axis for output; The two bending actuators (4-5) are distributed in the X-axis direction, one bending actuator (4-5) moves along the positive direction of the Z-axis, and the other bending actuator (4-5) moves along the negative direction of the Z-axis, driving the lens (4-1) to move around the Y-axis for output.

2. A piezoelectric driven optical attitude adjustment and imaging system according to claim 1, characterized in that: The bending compound driver (2-2) can generate motion output in an orthogonal direction; when a positive voltage is applied, the bending compound driver (2-2) outputs positive motion; when a negative voltage is applied, the bending compound driver (2-2) outputs negative motion.

3. The piezoelectric driven optical posture adjustment and imaging system according to claim 1, characterized in that: The bending composite piezoelectric unit (2-2-2) is a stacked structure, a patch structure or a piezoelectric tube, and is used to achieve bending motion.

4. The piezoelectric driven optical posture adjustment and imaging system according to claim 1, characterized in that: The linear bearing (2-3) is in the shape of a straight cylinder type, a flange type or an open type, and is used in conjunction with the mover (2-4) to achieve linear motion.

5. The piezoelectric driven optical posture adjustment and imaging system according to claim 1, characterized in that: Four bending actuators (4-5) are used to drive the lens (4-1) to output a two-degree-of-freedom deflection motion.

6. The piezoelectric driven optical attitude adjustment and imaging system according to claim 1, characterized in that: The bending piezoelectric unit (4-5-2) is a stacked structure, a patch structure or a piezoelectric tube, and is used to achieve bending motion.

7. The piezoelectric driven optical posture adjustment and imaging system according to claim 1, characterized in that: The hinge type of the flexible hinge (4-3) is one of a blade shape, a semicircular shape or an elliptical shape, and the four flexible hinges (4-3) are used for transmitting and decoupling motion.

8. The piezoelectric driven optical posture adjustment and imaging system according to claim 1, characterized in that: The system base (1) is provided with a plurality of assembly holes, and the relative position and angle of the motion platform (2) and the tilting mirror (4) can be adjusted on the system base (1).

9. The piezoelectric driven optical posture adjustment and imaging system according to claim 1, characterized in that: When a positive voltage is applied, the bending actuator (4-5) outputs a positive motion, and when a negative voltage is applied, the bending actuator (4-5) outputs a negative motion.

10. The piezoelectric driven optical attitude adjustment and imaging system according to claim 1, characterized in that: When the outputs of the two bending compound actuators (2-2) move in the positive direction along the Z axis, they are used to drive the mover (2-4) and the camera (3) to move in the positive direction along the Z axis; when one bending compound actuator (2-2) moves in the positive direction along the Y axis and the other bending compound actuator (2-2) moves in the negative direction along the Y axis, it is used to drive the camera (3) to move around the Z axis.

Citation Information

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