Signaling method and apparatus

Abstract

The application provides a signal sending method and device, and belongs to the technical field of semiconductor manufacturing. The signal sending method is applied to an equipment automation control EAP device, and comprises the following steps: obtaining a communication state of a processing equipment, wherein the communication state comprises online and offline, and the processing equipment comprises a main equipment and an auxiliary equipment corresponding to the main equipment; receiving a material monitoring signal of the processing equipment, wherein the material monitoring signal comprises a conveying signal of the auxiliary equipment and an unloading signal of the main equipment; judging whether a preset condition is met according to the communication state and the received material monitoring signal; and in the case that the preset condition is met, sending a material conveying signal for the main equipment to a manufacturing execution system MES client. The technical scheme of the application can send the conveying signal of the processing equipment.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a signal transmission method and apparatus. Background Technology

[0002] In current semiconductor manufacturing processes, Equipment Automation Programming (EAP) applications are typically deployed on server hardware to control the automated processing of all wafer cells on the processing equipment.

[0003] In related technologies, one processing device corresponds to one EAP application and one process in the Manufacturing Execution System. The processing device sends transfer signals to the EAP application, which then forwards them to the Manufacturing Execution System process, thereby achieving automated material handling. However, some processing devices cannot send transfer signals, requiring the design of a solution for automated material handling specifically for these devices. Summary of the Invention

[0004] To address the aforementioned technical problems, the present invention provides a signal transmission method and apparatus capable of transmitting transport signals for processing equipment.

[0005] To achieve the above objectives, the technical solution adopted in the embodiments of the present invention is as follows:

[0006] A signal transmission method, applied to an equipment automation control (EAP) device, includes:

[0007] The communication status of the processing equipment is obtained, including online and offline status, and the processing equipment includes a main device and auxiliary devices corresponding to the main device.

[0008] Receive material monitoring signals from the processing equipment, the material monitoring signals including conveying signals from auxiliary equipment and loading / unloading signals from the main equipment;

[0009] Based on the communication status and the received material monitoring signals, it is determined whether the preset conditions are met. If the preset conditions are met, a material transfer signal for the main equipment is sent to the Manufacturing Execution System (MES) client.

[0010] In some embodiments, the preset conditions include any one of the following:

[0011] The main device receives a transfer signal from the auxiliary device, and the main device's communication status is online.

[0012] The system receives loading / unloading signals from the main device, and the auxiliary device is online.

[0013] In some embodiments, when a material transfer signal is received from the auxiliary device and the main device is online, sending a material transfer signal for the main device to the MES client includes:

[0014] Based on the correspondence between the stored auxiliary devices and the main devices, determine the identifier of the main device corresponding to the auxiliary device;

[0015] Replace the identifier of the auxiliary device in the transfer signal with the identifier of the main device to generate a material transfer signal including the identifier of the main device, and send the material transfer signal to the Manufacturing Execution System (MES) client.

[0016] In some embodiments, the conveying signal includes:

[0017] The markings on the wafer box;

[0018] The identifier of the auxiliary equipment.

[0019] In some embodiments, when a loading / unloading signal is received from the main device and the auxiliary device is online, sending a material transfer signal for the main device to the MES client includes:

[0020] Generate a material transfer signal including the identifier of the master device, and send the material transfer signal to the MES client.

[0021] In some embodiments, the loading / unloading signals include:

[0022] The labeling for the loading port of the wafer cassette;

[0023] The markings on the wafer box;

[0024] The identifier of the master device.

[0025] This invention also provides a signal transmitting device for use in an Equipment Automation and Control (EAP) device, comprising:

[0026] The acquisition module is used to acquire the communication status of the processing equipment, the communication status including online and offline, and the processing equipment includes a main device and auxiliary devices corresponding to the main device.

[0027] The receiving module is used to receive material monitoring signals from the processing equipment, including conveying signals from auxiliary equipment and loading / unloading signals from the main equipment.

[0028] The sending module interacts with the acquisition module and the receiving module respectively. It is used to determine whether the preset conditions are met based on the communication status and the received material monitoring signal. If the preset conditions are met, it sends a material transfer signal for the main equipment to the Manufacturing Execution System (MES) client.

[0029] In some embodiments, the preset conditions include any one of the following:

[0030] The main device receives a transfer signal from the auxiliary device, and the main device's communication status is online.

[0031] The system receives loading / unloading signals from the main device, and the auxiliary device is online.

[0032] In some embodiments, when a transfer signal is received from the auxiliary device and the communication status of the master device is online, the sending module is specifically used to determine the identifier of the master device corresponding to the auxiliary device based on the stored correspondence between the auxiliary device and the master device; replace the identifier of the auxiliary device in the transfer signal with the identifier of the master device, generate a material transfer signal including the identifier of the master device, and send the material transfer signal to the manufacturing execution system (MES) client.

[0033] In some embodiments, when the main device sends a loading / unloading signal and the auxiliary device is online, the sending module is specifically used to generate a material transfer signal including the identifier of the main device and send the material transfer signal to the MES client.

[0034] This invention also provides a signal transmitting device for use in an Equipment Automation and Control (EAP) device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the program, it implements the signal transmitting method described above.

[0035] The beneficial effects of this invention are:

[0036] In this embodiment, the EAP device sends material transfer signals for the main equipment to the MES client based on the communication status of the processing equipment and material monitoring signals. This allows the EAP device to send material transfer signals to the MES client even when the main equipment cannot send transfer signals, thus facilitating automated material handling and improving automated continuous production. This embodiment requires no modification to the processing equipment or the MES system, reducing manpower and resource consumption, quickly meeting production needs, and lowering MES development pressure and the incidence of MES bugs. Attached Figure Description

[0037] Figure 1 This diagram illustrates an application scenario of an embodiment of the present invention.

[0038] Figure 2 A flowchart illustrating the signal transmission method according to an embodiment of the present invention;

[0039] Figure 3 This diagram illustrates the structure of the signal transmitting device according to an embodiment of the present invention.

[0040] Figure 4 This is a schematic diagram showing the composition of the signal transmitting device according to an embodiment of the present invention. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the described embodiments of the present invention are within the scope of protection of the present invention.

[0042] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0043] Figure 1 This diagram illustrates an application scenario of an embodiment of the present invention. The EAP device, or Equipment Automation Control Device, enables real-time monitoring of machines on the production line. MES, or Manufacturing Execution System, is a production information management system for the shop floor execution layer of manufacturing enterprises. It provides operators / managers with information on plan execution, tracking, and the current status of all resources (people, equipment, materials, customer needs, etc.). The processing equipment can process wafers, including but not limited to high and low temperature annealing, etching, and cleaning.

[0044] Specifically, the EAP device and the MES client can communicate via the Highway101 protocol; the EAP device and the processing equipment can communicate via the SECS / GEM (Semiconductor Equipment Communication Standard / Generic Equipment Model) protocol.

[0045] To achieve automated control of the production process, the processing equipment sends a transfer signal to the EAP device, which then forwards the transfer signal to the MES system to realize automated material transfer. However, in the existing technology, some processing equipment cannot send transfer signals. For these processing equipment, a solution to realize automated material transfer needs to be designed.

[0046] This invention provides a signal transmission method and apparatus capable of transmitting transport signals for processing equipment.

[0047] This invention provides a signal transmission method applied to an Equipment Automation and Assistance (EAP) device, such as... Figure 2 As shown, it includes:

[0048] Step 101: Obtain the communication status of the processing equipment, the communication status includes online and offline, and the processing equipment includes a main device and auxiliary devices corresponding to the main device;

[0049] Step 102: Receive the material monitoring signal from the processing equipment;

[0050] Step 103: Determine whether the preset conditions are met based on the communication status and the received material monitoring signal. If the preset conditions are met, send a material transfer signal for the main equipment to the Manufacturing Execution System (MES) client.

[0051] In this embodiment, the EAP device sends material transfer signals for the main equipment to the MES client based on the communication status of the processing equipment and material monitoring signals. This allows the EAP device to send material transfer signals to the MES client even when the main equipment cannot send transfer signals, thus facilitating automated material handling and improving automated continuous production. This embodiment requires no modification to the processing equipment or the MES system, reducing manpower and resource consumption, quickly meeting production needs, and lowering MES development pressure and the incidence of MES bugs.

[0052] In this embodiment, the EAP device can establish multiple instances, each corresponding to a processing device, enabling monitoring of the SECS signals of the corresponding processing device. Additionally, the EAP device can acquire and display the communication status of the processing devices, including the communication status of the main device and the auxiliary devices. There is a one-to-one correspondence between the main device and the auxiliary devices. If the main device cannot send a transfer signal, the auxiliary device can send the transfer signal in place of the corresponding main device. For example, if the main device does not have a transfer function, the auxiliary device can perform material transfer and send the corresponding transfer signal. The material can be a wafer cassette.

[0053] In some embodiments, the preset conditions include any one of the following:

[0054] The main device receives a transfer signal from the auxiliary device, and the main device's communication status is online.

[0055] The system receives loading / unloading signals from the main device, and the auxiliary device is online.

[0056] In this embodiment, after receiving the transfer signal from the auxiliary device, the EAP device determines the communication status of the master device. If the master device's communication status is offline, the master device is not in a working state, and it would be unreasonable for the EAP device to send the master device's transfer signal to the MES system. Therefore, in this case, the EAP device will not send the master device's transfer signal to the MES system. If the master device's communication status is online, the master device is in a working state, and the EAP device sends the master device's transfer signal to the MES system to notify the MES system of the latest working status of the master device, thereby achieving coordinated operation between the master device and the auxiliary device.

[0057] In some cases, the EAP device may not receive a transfer signal from the auxiliary device, but it may receive a loading / unloading signal from the main device. The loading / unloading signal is sent by the main device after it detects that a wafer cassette has been loaded, indicating that the main device has moved the wafer cassette. The EAP device then checks the communication status of the auxiliary device. If the auxiliary device's communication status is offline, it is not in operation, and it would be unreasonable for the EAP device to send the main device's transfer signal to the MES system. If the auxiliary device's communication status is online, it is in operation, and the EAP device can then send the main device's transfer signal to the MES system to notify the MES system of the latest operating status of the main device, thus achieving coordinated operation between the main and auxiliary devices.

[0058] In some embodiments, when a material transfer signal is received from the auxiliary device and the main device is online, sending a material transfer signal for the main device to the MES client includes:

[0059] Based on the stored correspondence between auxiliary devices and main devices, the identifier of the main device corresponding to the auxiliary device is determined; the identifier of the auxiliary device in the transfer signal is replaced with the identifier of the main device, a material transfer signal including the identifier of the main device is generated, and the material transfer signal is sent to the Manufacturing Execution System (MES) client.

[0060] In some embodiments, the transfer signal sent by the auxiliary device includes: an identifier for the wafer cassette; and an identifier for the auxiliary device. However, the MES system cannot recognize the identifier of the auxiliary device. Therefore, it is necessary to convert the identifier of the auxiliary device into the identifier of the main device. The EAP device pre-stores the correspondence between auxiliary devices and main devices. Based on the identifier of the auxiliary device, the identifier of the main device corresponding to the auxiliary device is determined, a material transfer signal including the identifier of the main device is generated, and the material transfer signal is sent to the MES client.

[0061] This embodiment enables the transfer signals of auxiliary equipment to be sent to the upstream MES system in real time through the main equipment identifier, thereby achieving coordinated operation of the main equipment and auxiliary equipment, realizing automated equipment transfer, and improving the automated continuous production of equipment.

[0062] In some embodiments, when a loading / unloading signal is received from the main device and the auxiliary device is online, sending a material transfer signal for the main device to the MES client includes:

[0063] Generate a material transfer signal including the identifier of the master device, and send the material transfer signal to the MES client.

[0064] In some embodiments, the loading / unloading signals sent by the master device include: an identifier for the loading port carrying the wafer cassette; an identifier for the wafer cassette; and an identifier for the master device. The EAP device can generate a material handling signal including the identifier of the master device and send the material handling signal to the MES client.

[0065] This embodiment can convert the loading and unloading signals of the main equipment that cannot send conveying signals into conveying signals and send them to the upstream MES system, thereby realizing the coordinated operation of the main equipment and auxiliary equipment, achieving automated conveying of equipment, and improving the automated continuous production of equipment.

[0066] In a specific example, the main equipment can send an E37 signal (loading / unloading signal), and the auxiliary equipment can send an E87 signal (transfer signal). Through the technical solution of this embodiment, the EAP device can convert the E37 signal and the E87 signal into transfer signals of the main equipment and send them to the MES system.

[0067] This invention also provides a signal transmitting device for use in equipment automation control (EAP) devices, such as... Figure 3 As shown, it includes:

[0068] The acquisition module 21 is used to acquire the communication status of the processing equipment, the communication status including online and offline, and the processing equipment including a main device and an auxiliary device corresponding to the main device;

[0069] Receiver module 22 is used to receive material monitoring signals from the processing equipment;

[0070] The sending module 23 interacts with the acquisition module 21 and the receiving module 22 respectively, and is used to determine whether the preset conditions are met based on the communication status and the received material monitoring signal. If the preset conditions are met, the sending module 23 sends a material transfer signal for the main equipment to the manufacturing execution system (MES) client.

[0071] In this embodiment, the EAP device sends material transfer signals for the main equipment to the MES client based on the communication status of the processing equipment and material monitoring signals. This allows the EAP device to send material transfer signals to the MES client even when the main equipment cannot send transfer signals, thus facilitating automated material handling and improving automated continuous production. This embodiment requires no modification to the processing equipment or the MES system, reducing manpower and resource consumption, quickly meeting production needs, and lowering MES development pressure and the incidence of MES bugs.

[0072] In this embodiment, the EAP device can establish multiple instances, each corresponding to a processing device, enabling monitoring of the SECS signals of the corresponding processing device. Additionally, the EAP device can acquire and display the communication status of the processing devices, including the communication status of the main device and the auxiliary devices. The main device and auxiliary devices are in a one-to-one correspondence; if the main device cannot send a transfer signal, the auxiliary device can send the transfer signal in place of the corresponding main device.

[0073] In some embodiments, the preset conditions include any one of the following:

[0074] The main device receives a transfer signal from the auxiliary device, and the main device's communication status is online.

[0075] The system receives loading / unloading signals from the main device, and the auxiliary device is online.

[0076] In this embodiment, after receiving the transfer signal from the auxiliary device, the EAP device determines the communication status of the master device. If the master device's communication status is offline, the master device is not in a working state, and it would be unreasonable for the EAP device to send the master device's transfer signal to the MES system. Therefore, in this case, the EAP device will not send the master device's transfer signal to the MES system. If the master device's communication status is online, the master device is in a working state, and the EAP device sends the master device's transfer signal to the MES system to notify the MES system of the latest working status of the master device, thereby achieving coordinated operation between the master device and the auxiliary device.

[0077] In some cases, the EAP device may not receive a transfer signal from the auxiliary device, but it may receive a loading / unloading signal from the main device. The loading / unloading signal is sent by the main device after it detects that a wafer cassette has been loaded, indicating that the main device has moved the wafer cassette. The EAP device then checks the communication status of the auxiliary device. If the auxiliary device's communication status is offline, it is not in operation, and it would be unreasonable for the EAP device to send the main device's transfer signal to the MES system. If the auxiliary device's communication status is online, it is in operation, and the EAP device can then send the main device's transfer signal to the MES system to notify the MES system of the latest operating status of the main device, thus achieving coordinated operation between the main and auxiliary devices.

[0078] In some embodiments, when a transfer signal is received from the auxiliary device and the communication status of the master device is online, the sending module 23 is specifically used to determine the identifier of the master device corresponding to the auxiliary device based on the stored correspondence between the auxiliary device and the master device; replace the identifier of the auxiliary device in the transfer signal with the identifier of the master device, generate a material transfer signal including the identifier of the master device, and send the material transfer signal to the manufacturing execution system (MES) client.

[0079] In some embodiments, the transfer signal sent by the auxiliary device includes: an identifier for the wafer cassette; and an identifier for the auxiliary device. However, the MES system cannot recognize the identifier of the auxiliary device. Therefore, it is necessary to convert the identifier of the auxiliary device into the identifier of the main device. The EAP device pre-stores the correspondence between auxiliary devices and main devices. Based on the identifier of the auxiliary device, the identifier of the main device corresponding to the auxiliary device is determined, a material transfer signal including the identifier of the main device is generated, and the material transfer signal is sent to the MES client.

[0080] This embodiment enables the transfer signals of auxiliary equipment to be sent to the upstream MES system in real time through the main equipment identifier, thereby achieving coordinated operation of the main equipment and auxiliary equipment, realizing automated equipment transfer, and improving the automated continuous production of equipment.

[0081] In some embodiments, when the main device sends a loading / unloading signal and the auxiliary device is online, the sending module 23 is specifically used to generate a material transfer signal including the identifier of the main device and send the material transfer signal to the MES client.

[0082] In some embodiments, the loading / unloading signals sent by the master device include: an identifier for the loading port carrying the wafer cassette; an identifier for the wafer cassette; and an identifier for the master device. The EAP device can generate a material handling signal including the identifier of the master device and send the material handling signal to the MES client.

[0083] This embodiment can convert the loading and unloading signals of the main equipment that cannot send conveying signals into conveying signals and send them to the upstream MES system, thereby realizing the coordinated operation of the main equipment and auxiliary equipment, achieving automated conveying of equipment, and improving the automated continuous production of equipment.

[0084] This invention also provides a signal transmitting device for use in equipment automation control (EAP) devices, such as... Figure 4 As shown, it includes a memory 31, a processor 32, and a computer program stored in the memory 31 and executable on the processor 32; when the processor 32 executes the program, it implements the signal transmission method described above.

[0085] In some embodiments, the processor 32 is used to acquire the communication status of the processing equipment, the communication status including online and offline, the processing equipment including a main device and auxiliary devices corresponding to the main device; receive material monitoring signals from the processing equipment; determine whether preset conditions are met based on the communication status and the received material monitoring signals, and if the preset conditions are met, send a material transfer signal for the main device to the Manufacturing Execution System (MES) client.

[0086] In this embodiment, the EAP device sends material transfer signals for the main equipment to the MES client based on the communication status of the processing equipment and material monitoring signals. This allows the EAP device to send material transfer signals to the MES client even when the main equipment cannot send transfer signals, thus facilitating automated material handling and improving automated continuous production. This embodiment requires no modification to the processing equipment or the MES system, reducing manpower and resource consumption, quickly meeting production needs, and lowering MES development pressure and the incidence of MES bugs.

[0087] In some embodiments, the preset conditions include any one of the following:

[0088] The main device receives a transfer signal from the auxiliary device, and the main device's communication status is online.

[0089] The system receives loading / unloading signals from the main device, and the auxiliary device is online.

[0090] In some embodiments, the processor 32 is configured to determine the identifier of the main device corresponding to the auxiliary device based on the stored correspondence between auxiliary devices and main devices; replace the identifier of the auxiliary device in the transfer signal with the identifier of the main device, generate a material transfer signal including the identifier of the main device, and send the material transfer signal to the manufacturing execution system (MES) client.

[0091] In some embodiments, the conveying signal includes:

[0092] The markings on the wafer box;

[0093] The identifier of the auxiliary equipment.

[0094] In some embodiments, processor 32 is configured to generate a material handling signal including the identifier of the master device and send the material handling signal to the MES client.

[0095] In some embodiments, the loading / unloading signals include:

[0096] The labeling for the loading port of the wafer cassette;

[0097] The markings on the wafer box;

[0098] The identifier of the master device.

[0099] This application also provides a computer program / program product, which is stored in a storage medium and executed by at least one processor to implement the various processes of the above-described signal transmission method embodiments, and can achieve the same technical effect. To avoid repetition, it will not be described again here.

[0100] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element. Furthermore, it should be noted that the scope of the methods and apparatuses in the embodiments of this application is not limited to performing functions in the order shown or discussed, but may also include performing functions substantially simultaneously or in the reverse order, depending on the functions involved. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.

[0101] Through the above description of the embodiments, those skilled in the art can clearly understand that the methods of the above embodiments can be implemented by means of software plus necessary general-purpose hardware platforms. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, can be embodied in the form of a computer software product. This computer software product is stored in a storage medium (such as ROM / RAM, magnetic disk, optical disk) and includes several instructions to cause a terminal (which may be a mobile phone, computer, server, air conditioner, or network device, etc.) to execute the methods described in the various embodiments of this application.

[0102] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.

Claims

1. A signal transmission method, characterized in that, Applications to equipment automation control EAP devices include: The communication status of the processing equipment is obtained, including online and offline status, and the processing equipment includes a main device and auxiliary devices corresponding to the main device. Receive material monitoring signals from the processing equipment, the material monitoring signals including conveying signals from auxiliary equipment and loading / unloading signals from the main equipment; Based on the communication status and the received material monitoring signal, determine whether the preset conditions are met. If the preset conditions are met, send a material transfer signal for the main equipment to the Manufacturing Execution System (MES) client. The preset conditions include any one of the following: The main device receives a transfer signal from the auxiliary device, and the main device's communication status is online. The system receives loading / unloading signals from the main device, and the auxiliary device is online.

2. The signal transmission method according to claim 1, characterized in that, Upon receiving a material transfer signal from the auxiliary equipment and with the main equipment's communication status being online, sending a material transfer signal for the main equipment to the Manufacturing Execution System (MES) client includes: Based on the correspondence between the stored auxiliary devices and the main devices, determine the identifier of the main device corresponding to the auxiliary device; Replace the identifier of the auxiliary device in the transfer signal with the identifier of the main device to generate a material transfer signal including the identifier of the main device, and send the material transfer signal to the Manufacturing Execution System (MES) client.

3. The signal transmission method according to claim 2, characterized in that, The transfer signals include: The markings on the wafer box; The identifier of the auxiliary equipment.

4. The signal transmission method according to claim 1, characterized in that, Upon receiving the loading / unloading signal from the main equipment and with the auxiliary equipment's communication status being online, sending a material transfer signal for the main equipment to the Manufacturing Execution System (MES) client includes: Generate a material transfer signal including the identifier of the master device, and send the material transfer signal to the Manufacturing Execution System (MES) client.

5. The signal transmission method according to claim 4, characterized in that, The loading and unloading signals include: The labeling for the loading port of the wafer cassette; The markings on the wafer box; The identifier of the master device.

6. A signal transmitting device, characterized in that, Applications to equipment automation control EAP devices include: The acquisition module is used to acquire the communication status of the processing equipment, the communication status including online and offline, and the processing equipment includes a main device and auxiliary devices corresponding to the main device. The receiving module is used to receive material monitoring signals from the processing equipment, including conveying signals from auxiliary equipment and loading / unloading signals from the main equipment. The sending module interacts with the acquisition module and the receiving module respectively, and is used to determine whether the preset conditions are met based on the communication status and the received material monitoring signal. If the preset conditions are met, the sending module sends a material transfer signal for the main equipment to the manufacturing execution system (MES) client. The preset conditions include any one of the following: The main device receives a transfer signal from the auxiliary device, and the main device's communication status is online. The system receives loading / unloading signals from the main device, and the auxiliary device is online.

7. The signal transmitting device according to claim 6, characterized in that, When the main device receives a transfer signal from the auxiliary device and its communication status is online, the sending module is specifically used for... Based on the stored correspondence between auxiliary devices and main devices, determine the identifier of the main device corresponding to the auxiliary device; replace the identifier of the auxiliary device in the conveying signal with the identifier of the main device, generate a material conveying signal including the identifier of the main device, and send the material conveying signal to the Manufacturing Execution System (MES) client; When the main device sends a loading / unloading signal and the auxiliary device is online, the sending module is specifically used to generate a material transfer signal including the identifier of the main device and send the material transfer signal to the MES client.

8. A signal transmitting device, characterized in that, An EAP device for equipment automation control includes a memory, a processor, and a computer program stored in the memory and executable on the processor; when the processor executes the program, it implements the signal transmission method as described in any one of claims 1-5.

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