Liquid cooling device and linear motor

Abstract

The application provides a liquid cooling device and a linear motor. The liquid cooling device comprises: a first cooling assembly having a first inflow space and a first return flow space in communication with each other, the first inflow space and the first return flow space being arranged in sequence along a first direction, the first inflow space being configured to be capable of introducing cooling liquid and conveying the cooling liquid to the first return flow space; a second cooling assembly having a second inflow space and a second return flow space in communication with each other, the second return flow space and the second inflow space being arranged in sequence along the first direction, the second inflow space being configured to be capable of introducing cooling liquid and conveying the cooling liquid to the second return flow space; and a coil located between the first cooling assembly and the second cooling assembly. The liquid cooling device of the technical scheme of the application can solve the problem that it is difficult to control the temperature rise of the liquid cooling plate in the existing single-layer cooling mode, and the cooling liquid is easily affected by the external temperature.

Description

Technical Field

[0001] This invention relates to the field of heat dissipation equipment technology, and more specifically, to a liquid cooling device and a linear motor. Background Technology

[0002] The temperature rise requirements for motors in lithography machines are extremely stringent, generally requiring a surface temperature rise of no more than 1°C. Conventional technologies typically employ liquid cooling structures to cool the motor coils. Current cooling methods mainly include immersion liquid cooling and liquid-cooled plate cooling. Immersion liquid cooling directly submerges the motor coils in coolant, allowing the coolant to circulate and remove heat, resulting in high cooling efficiency but reduced motor reliability. Liquid-cooled plate cooling attaches a liquid-cooled plate to the surface of the motor coils. Heat is conducted to the liquid-cooled plate, and then the circulating coolant within the plate removes the heat. This method offers higher cooling efficiency and motor reliability, making it the most common technology used for linear motors in lithography machines.

[0003] In the prior art known to the inventor, there is a method of cooling motor coils using two liquid cooling plates, one on the top and one on the bottom. The heat from the coil is carried away by coolant flowing through the plates. However, since each liquid cooling plate has only one layer of coolant channel, the flow space is limited, making it difficult to ensure that the temperature rise of the liquid cooling plate does not exceed 1°C. Furthermore, the coolant used to remove heat from the coil is only isolated from the outside environment by the wall of the liquid cooling plate, resulting in insufficient insulation and making the coolant susceptible to external temperature fluctuations. Summary of the Invention

[0004] The main objective of this invention is to provide a liquid cooling device and a linear motor that can solve the problems of difficulty in controlling the temperature rise of the liquid cooling plate and the easy influence of external temperature on the coolant in the existing single-layer cooling method.

[0005] To achieve the above objectives, according to one aspect of the present invention, a liquid cooling device is provided, comprising: a first cooling assembly having a first inlet space and a first return space that are interconnected, the first inlet space and the first return space being arranged sequentially along a first direction, the first inlet space being configured to allow coolant to pass through and to transport coolant to the first return space; a second cooling assembly having a second inlet space and a second return space that are interconnected, the second return space and the second inlet space being arranged sequentially along the first direction, the second inlet space being configured to allow coolant to pass through and to transport coolant to the second return space; and a coil located between the first cooling assembly and the second cooling assembly, wherein the first direction is the arrangement direction of the first cooling assembly, the coil, and the second cooling assembly.

[0006] Furthermore, the first cooling assembly includes at least three first cooling plates, at least two adjacent first cooling plates cooperate to form a first inlet space, and at least two adjacent first cooling plates cooperate to form a first return space; the second cooling assembly includes at least three second cooling plates, at least two adjacent second cooling plates cooperate to form a second inlet space, and at least two adjacent second cooling plates cooperate to form a second return space.

[0007] Furthermore, there are three first cooling plates, namely a first upper plate, a first partition, and a first lower plate arranged sequentially along the first direction. The first upper plate and the first partition cooperate to form a first inflow space, and the first partition and the first lower plate cooperate to form a first return space.

[0008] Furthermore, there are three second cooling plates, namely a second upper plate, a second partition, and a second lower plate arranged sequentially along the first direction. The second upper plate and the second partition cooperate to form a second return space, and the second partition and the second lower plate cooperate to form a second inlet space. The first inlet space, the first return space, the coil, the second return space, and the second inlet space are arranged sequentially along the first direction.

[0009] Furthermore, the second cooling assembly also includes a mounting frame with a receiving groove, in which the iron core is located and the coil is mounted on the iron core.

[0010] Furthermore, the mounting frame is provided with a liquid inlet hole, a first connecting hole, and a second connecting hole, the liquid inlet hole being connected to both the first inlet space and the second inlet space; the first cooling component also includes a flow divider block, the flow divider block being provided with a liquid outlet hole, a third connecting hole, and a fourth connecting hole, the liquid outlet hole being connected to both the first return space and the second return space; the second connecting hole and the fourth connecting hole are both connected to the liquid inlet hole; the first connecting hole and the third connecting hole are both connected to the liquid outlet hole.

[0011] Furthermore, the first partition plate is provided with a first confluence hole and a fifth connecting hole, the first confluence hole being located at the first end of the first partition plate and the fifth connecting hole being located at the second end of the first partition plate; the first inlet space and the first return space are connected through the first confluence hole, and the fifth connecting hole is connected to the first inlet space; and / or, the second partition plate is provided with a second confluence hole and a sixth connecting hole, the second confluence hole being located at the first end of the second partition plate and the sixth connecting hole being located at the second end of the second partition plate; the second inlet space and the second return space are connected through the second confluence hole, and the sixth connecting hole is connected to the second inlet space.

[0012] Furthermore, a number of third flow channels are provided in the first inlet space; a number of first flow channels are provided in the first return space; a number of fourth flow channels are provided in the second inlet space; and a number of second flow channels are provided in the second return space.

[0013] Furthermore, the upper surface of the first lower plate is provided with a first outer groove, at least a portion of the first partition is located within the first outer groove, the bottom of the first outer groove is provided with a first inner groove and a seventh connecting hole, the first inner groove and the first partition form a first reflux space, the bottom of the first inner groove has a plurality of first bosses protruding, a first flow channel is formed between adjacent first bosses, and the bottom of the first inner groove is provided with an eighth connecting hole; and / or, the lower surface of the second upper plate is provided with a second outer groove, at least a portion of the second partition is located within the second outer groove, the bottom of the second outer groove has a second inner groove and a ninth connecting hole, the second inner groove and the second partition form a second reflux space, the bottom of the second inner groove has a plurality of second bosses protruding, a second flow channel is formed between adjacent second bosses, and the bottom of the second inner groove is provided with a tenth connecting hole.

[0014] Furthermore, a third outer groove is formed on the lower surface of the first upper plate, at least a portion of the first partition is located within the third outer groove, a third inner groove is formed at the bottom of the third outer groove, the third inner groove and the first partition form a first flow inlet space, a plurality of third bosses protrude from the bottom of the third inner groove, and a third flow channel is formed between adjacent third bosses; and / or, a fourth outer groove is formed on the upper surface of the second lower plate, at least a portion of the second partition is located within the fourth outer groove, a fourth inner groove is formed at the bottom of the fourth outer groove, the fourth inner groove and the second partition form a second flow inlet space, a plurality of fourth bosses protrude from the bottom of the fourth inner groove, and a fourth flow channel is formed between adjacent fourth bosses.

[0015] Furthermore, the distance between the lower surface of the first partition and the bottom surface of the first inner groove of the first lower plate is 0.4 mm to 0.6 mm; and / or, the distance between the bottom surface of the second inner groove of the second upper plate and the upper surface of the second partition is 0.4 mm to 0.6 mm.

[0016] Furthermore, the distance between the bottom surface of the third inner groove of the first upper plate and the bottom surface of the first inner groove of the first lower plate is less than or equal to 2 mm; and / or, the distance between the bottom surface of the second inner groove of the second upper plate and the bottom surface of the fourth inner groove of the second lower plate is less than 2 mm.

[0017] Furthermore, the third flow channel is staggered from the first flow channel; or, the third flow channel and the first flow channel have the same shape and size of their longitudinal sections; or, the third flow channel and the first flow channel have different shapes of their longitudinal sections; or, the third flow channel and the first flow channel have the same shape of their longitudinal sections but different sizes.

[0018] According to another aspect of the present invention, a linear motor is provided, including a stator assembly, a mover assembly, and the liquid cooling device described above.

[0019] Furthermore, the stator assembly is located in the liquid cooling device, and the mover assembly is movably disposed relative to the liquid cooling device. The stator assembly includes a coil and an iron core, both of which are located within the liquid cooling device.

[0020] Applying the technical solution of this invention, the coolant enters from the first inlet space and the second inlet space, flows into the first return space and the second return space respectively, carries away the heat from the upper and lower surfaces of the coil, and then flows out from the first return space and the second return space. Compared to single-layer cooling, the dual-return coolant design more easily meets the requirement that the temperature rise of the outer surfaces of the first and second cooling components does not exceed 1°C. Furthermore, the coolant in the first inlet space isolates the first return space from the outside, and the coolant in the second inlet space isolates the second return space from the outside, resulting in better heat insulation. This allows the coolant in the first and second return spaces to carry away the motor's heat through the return flow, preventing it from easily being transferred to the outer surface of the cooling components, thus making it easier to ensure that the motor surface temperature rise does not exceed 1°C. Attached Figure Description

[0021] The accompanying drawings, which form part of this specification, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0022] Figure 1 A schematic diagram of the structure of a linear motor according to an embodiment of the present invention is shown;

[0023] Figure 2 It shows Figure 1 An explosion diagram;

[0024] Figure 3 An exploded view of a liquid cooling device according to an embodiment of the present invention is shown;

[0025] Figure 4 It shows Figure 3 Schematic diagram of the central channel;

[0026] Figure 5 It shows Figure 1 A schematic diagram of heat dissipation and cooling in the middle;

[0027] Figure 6 Longitudinal cross-sectional views of four specific examples of the third and first flow channels of the liquid cooling device according to embodiments of the present invention are shown; and

[0028] Figure 7 A top view of the first inlet space and the first return space is shown.

[0029] The above figures include the following reference numerals:

[0030] 11. First cooling assembly; 111. First upper plate; 1111. First protrusion; 1112. Third flow channel; 112. First partition; 1121. First confluence hole; 1122. Fifth connecting hole; 113. First lower plate; 1131. Second protrusion; 1132. First outer groove; 1133. First inner groove; 1134. First flow channel; 1135. Seventh connecting hole; 1136. Eighth connecting hole; 114. Diverter block; 1141. Liquid outlet; 1142. Third connecting hole; 1143. Fourth connecting hole; 115. Connecting block; 116. First inlet space; 11 7. First reflux space; 12. Stator assembly; 121. Coil; 122. Iron core; 13. Second cooling assembly; 131. Mounting frame; 1311. Liquid inlet; 1312. First connecting hole; 1313. Second connecting hole; 132. Second upper plate; 1321. Ninth connecting hole; 1322. Tenth connecting hole; 133. Second partition; 1331. Second manifold; 1332. Sixth connecting hole; 134. Second lower plate; 1342. Fourth outer groove; 1343. Fourth inner groove; 135. Second inlet space; 136. Second reflux space; 20. Mover assembly. Detailed Implementation

[0031] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0032] See Figures 1 to 5 As shown, the present invention provides a liquid cooling device, comprising: a first cooling assembly 11 having a first inlet space 116 and a first return space 117 interconnected, the first inlet space 116 and the first return space 117 being arranged sequentially along a first direction, the first inlet space 116 being configured to allow coolant to pass through and transport coolant to the first return space 117; a second cooling assembly 13 having a second inlet space 135 and a second return space 136 interconnected, the second return space 136 and the second inlet space 135 being arranged sequentially along the first direction, the second inlet space 135 being configured to allow coolant to pass through and transport coolant to the second return space 136; and a coil 121 located between the first cooling assembly 11 and the second cooling assembly 13, wherein the first direction is the arrangement direction of the first cooling assembly 11, the coil 121 and the second cooling assembly 13.

[0033] In the above technical solution, the coolant enters from the first inlet space 116 and the second inlet space 135, flows into the first return space 117 and the second return space 136 respectively, carries away the heat from the upper and lower surfaces of the coil 121, and then flows out from the first return space 117 and the second return space 136. Compared with the single-layer cooling method, the dual-return coolant design makes it easier to meet the requirement that the temperature rise of the outer surfaces of the first cooling component 11 and the second cooling component 13 does not exceed 1°C. Furthermore, the coolant in the first inlet space 116 isolates the first return space 117 from the outside, and the coolant in the second inlet space 135 isolates the second return space 136 from the outside, resulting in better heat insulation. This allows the coolant in the first return space 117 and the second return space 136 to carry away the heat of the motor through the return flow, rather than easily transferring it to the outer surface of the cooling components, thus making it easier to ensure that the temperature rise of the motor surface does not exceed 1°C.

[0034] In another embodiment, the coolant enters from the first return space 117 and the second return space 136, respectively carrying away the heat from the upper and lower surfaces of the coil 121, and then flows into the first inlet space 116 and the second inlet space 135, respectively, and flows out from the first inlet space 116 and the second inlet space 135.

[0035] See Figures 1 to 5 As shown, in one embodiment of the present invention, the first cooling assembly 11 includes at least three first cooling plates, at least two adjacent first cooling plates cooperate to form a first inlet space 116, and at least two adjacent first cooling plates cooperate to form a first return space 117; the second cooling assembly 13 includes at least three second cooling plates, at least two adjacent second cooling plates cooperate to form a second inlet space 135, and at least two adjacent second cooling plates cooperate to form a second return space 136.

[0036] In the above technical solution, the first inlet space 116 and the first return space 117 are formed by the first cooling plate. The sealing of the first inlet space 116 can be achieved by sealing two adjacent first cooling plates, which is convenient to manufacture. Similarly, the second inlet space 135 and the second return space 136 are formed by the second cooling plate. The sealing of the second inlet space 135 can be achieved by sealing two adjacent second cooling plates, which is also convenient to manufacture.

[0037] See Figures 1 to 5 As shown, in one embodiment of the present invention, there are three first cooling plates, namely a first upper plate 111, a first partition plate 112 and a first lower plate 113 arranged sequentially along a first direction. The first upper plate 111 and the first partition plate 112 cooperate to form a first inlet space 116, and the first partition plate 112 and the first lower plate 113 cooperate to form a first return space 117.

[0038] In the above technical solution, the first upper plate 111 and the first lower plate 113 are separated by the first partition 112. On the one hand, this facilitates the formation of the positional relationship between the first inflow space 116 and the first return space 117. On the other hand, it simplifies the structure of the first cooling component 11 and reduces the manufacturing cost.

[0039] See Figures 1 to 5 As shown, in one embodiment of the present invention, there are three second cooling plates, namely a second upper plate 132, a second partition plate 133, and a second lower plate 134 arranged sequentially along the first direction. The second upper plate 132 and the second partition plate 133 cooperate to form a second return space 136, and the second partition plate 133 and the second lower plate 134 cooperate to form a second inlet space 135. The first inlet space 116, the first return space 117, the coil 121, the second return space 136, and the second inlet space 135 are arranged sequentially along the first direction.

[0040] In the above technical solution, the second upper plate 132 and the second lower plate 134 are separated by the second partition 133. On the one hand, this facilitates the formation of the positional relationship between the second inlet space 135 and the second return space 136; on the other hand, it simplifies the structure of the second cooling assembly 13 and reduces manufacturing costs. The first inlet space 116 and the second inlet space 135 are located on the outermost layer of the entire cooling device, isolating the first return space 117 and the second return space 136 from the outside world, thus preventing the external temperature from affecting the temperature of the coolant in the first return space 117 and the second return space 136.

[0041] See Figure 2 and Figure 3 As shown, in one embodiment of the present invention, the second cooling assembly 13 further includes a mounting frame 131, on which a receiving groove is provided, the iron core 122 is located in the receiving groove, and the coil 121 is disposed on the iron core 122.

[0042] In the above technical solution, on the one hand, the arrangement of the receiving groove provides a receiving space for the iron core 122 and the coil 121, which facilitates the setting of the iron core 122 and the coil 121; on the other hand, the mounting frame 131 makes the entire liquid cooling device more compact and the fit between the various components is higher.

[0043] See Figures 2 to 5As shown, in one embodiment of the present invention, the mounting frame 131 is provided with a liquid inlet hole 1311, a first connecting hole 1312, and a second connecting hole 1313. The liquid inlet hole 1311 is connected to both the first inlet space 116 and the second inlet space 135. The first cooling assembly 11 also includes a flow divider block 114, which is provided with a liquid outlet hole 1141, a third connecting hole 1142, and a fourth connecting hole 1143. The liquid outlet hole 1141 is connected to both the first return space 117 and the second return space 136. The second connecting hole 1313 and the fourth connecting hole 1143 are both connected to the liquid inlet hole 1311. The first connecting hole 1312 and the third connecting hole 1142 are both connected to the liquid outlet hole 1141.

[0044] In the above technical solution, the inlet hole 1311 provides an inflow path for the coolant, allowing it to directly enter the first inflow space 116 and the second inflow space 135, ensuring the formation of a coolant flow path. This flow path is the coolant flowing from the first inflow space 116 to the first return space 117, and from the second inflow space 135 to the second return space 136. The outlet hole 1141 serves as a connector, linking the inflow space and the return space with the inlet and outlet ports on the mounting frame 131. It provides an outflow path for the coolant, allowing it to absorb heat from the first return space 117 and the second return space 136 and then flow out directly.

[0045] See Figures 2 to 5 As shown, in one embodiment of the present invention, a first partition 112 is provided with a first manifold 1121 and a fifth connecting hole 1122. The first manifold 1121 is located at the first end of the first partition 112, and the fifth connecting hole 1122 is located at the second end of the first partition 112. A first inlet space 116 and a first return space 117 are connected through the first manifold 1121, and the fifth connecting hole 1122 is connected to the first inlet space 116. A second partition 133 is provided with a second manifold 1331 and a sixth connecting hole 1332. The second manifold 1331 is located at the first end of the second partition 133, and the sixth connecting hole 1332 is located at the second end of the second partition 133. A second inlet space 135 and a second return space 136 are connected through the second manifold 1331, and the sixth connecting hole 1332 is connected to the second inlet space 135. Both the fifth connecting hole 1122 and the sixth connecting hole 1332 are connected to the liquid inlet 1311.

[0046] In the above technical solution, the first manifold 1121 provides a manifold for the coolant in the first inlet space 116 and allows the coolant in the first inlet space 116 to pass through the first manifold 1121 into the first return space 117, thus defining the flow path of the coolant and ensuring that the coolant fully achieves the effects of heat insulation and heat exchange. Similarly, the second manifold 1331 provides a manifold for the coolant in the first inlet space 116 and allows the coolant in the first inlet space 116 to pass through the second manifold 1331 into the second return space 136, thus defining the flow path of the coolant and ensuring that the coolant fully achieves the effects of heat insulation and heat exchange.

[0047] See Figure 5 As shown, in one embodiment of the present invention, a plurality of third channels are correspondingly provided in the first inlet space 116; a plurality of first channels are correspondingly provided in the first return space 117; a plurality of fourth channels are correspondingly provided in the second inlet space 135; and a plurality of second channels are correspondingly provided in the second return space 136.

[0048] In the above technical solution, the longitudinal sections of the first flow channel, the second flow channel, the third flow channel and the fourth flow channel can be circular, rectangular, oblong or a combination of several different shapes.

[0049] With the above settings, different shapes of flow channels can be selected according to the size of the liquid cooling space, making it widely applicable.

[0050] See Figures 2 to 5 As shown, in one embodiment of the present invention, a first outer groove 1132 is formed on the upper surface of the first lower plate 113, at least a portion of the first partition plate 112 is located within the first outer groove 1132, a first inner groove 1133 and a seventh connecting hole 1135 are formed at the bottom of the first outer groove 1132, the first inner groove 1133 and the first partition plate 112 form a first reflux space 117, a plurality of first bosses protrude from the bottom of the first inner groove 1133, and a first flow channel is formed between adjacent first bosses. The bottom of the groove 1133 is provided with an eighth connecting hole 1136; the lower surface of the second upper plate 132 is provided with a second outer groove, at least part of the second partition plate 133 is located in the second outer groove, the bottom of the second outer groove is provided with a second inner groove and a ninth connecting hole 1321, the second inner groove and the second partition plate 133 form a second reflux space 136, the bottom of the second inner groove has a plurality of second bosses protruding, a second flow channel is formed between adjacent second bosses, and the bottom of the second inner groove is provided with a tenth connecting hole 1322.

[0051] In this embodiment, the longitudinal cross-sectional shape of the first flow channel and the second flow channel formed by the first boss and the second boss respectively is rectangular or rectangular. The first flow channel is surrounded by the first partition 112, the first boss and the first inner groove 1133, and the second flow channel is surrounded by the second partition 133, the second boss and the second inner groove.

[0052] In the above technical solution, the first outer groove 1132 provides a receiving space for the first partition 112; the first inner groove 1133 provides a placement space for the first boss, preventing the first partition 112 from affecting the formation of the first boss; the first boss forms a first flow channel, increasing the flow path of the coolant, allowing the coolant to fill the entire first return space 117 in a split flow manner, fully utilizing the heat exchange performance of the coolant; the first boss also increases the pressure resistance of the first cooling assembly 11. Similarly, the second outer groove provides a receiving space for the second partition 133; the second inner groove provides a placement space for the second boss, preventing the second partition 133 from affecting the formation of the second boss; the second boss forms a second flow channel, increasing the flow path of the coolant, allowing the coolant to fill the entire second return space 136 in a split flow manner, fully utilizing the heat exchange performance of the coolant; the second boss also increases the pressure resistance of the second cooling assembly 13.

[0053] The first partition 112 and the first lower plate 113 are connected at the first boss by brazing or vacuum cold welding, and the second partition 133 and the second upper plate 132 are connected at the second boss by brazing or vacuum cold welding.

[0054] In one embodiment, the first boss and the second boss are not provided. The first flow channel and the second flow channel are formed by excavating the bottom of the first inner groove 1133 and the second inner groove, respectively. The longitudinal section of the excavated flow channel can be circular, waist-shaped or other shapes.

[0055] In another embodiment, the first boss and the second boss are respectively protrusions uniformly or unevenly distributed on the bottom of the first inner groove 1133 and the bottom of the second inner groove, forming irregular flow channels between the protrusions, such as... Figure 7 The first lower plate 113 shown has a second protrusion 1131 forming a first flow channel 1134. The irregular first flow channel 1134 is used to reduce the laminar flow of circulating coolant at the bottom of the first inner groove 1133 and the wall of the first partition 112, thereby improving heat transfer efficiency. The second upper plate 132 is similar.

[0056] See Figures 2 to 5As shown, in one embodiment of the present invention, a third outer groove is formed on the lower surface of the first upper plate 111, at least a portion of the first partition plate 112 is located in the third outer groove, a third inner groove is formed at the bottom of the third outer groove, the third inner groove and the first partition plate 112 form a first inlet space 116, a plurality of third bosses protrude from the bottom of the third inner groove, and a third flow channel is formed between adjacent third bosses; a fourth outer groove 1342 is formed on the upper surface of the second lower plate 134, at least a portion of the second partition plate 133 is located in the fourth outer groove 1342, a fourth inner groove 1343 is formed at the bottom of the fourth outer groove 1342, the fourth inner groove 1343 and the second partition plate 133 form a second inlet space 135, a plurality of fourth bosses protrude from the bottom of the fourth inner groove 1343, and a fourth flow channel is formed between adjacent fourth bosses.

[0057] In this embodiment, the longitudinal cross-sectional shape of the third flow channel and the fourth flow channel formed by the third boss and the fourth boss respectively is rectangular or rectangular. The third flow channel is surrounded by the first partition 112, the third boss and the third inner groove, and the fourth flow channel is surrounded by the second partition 133, the fourth boss and the fourth inner groove 1343.

[0058] In the above technical solution, the third outer groove cooperates with the first outer groove 1132 to fix the first partition 112. The depth of the third outer groove and the first outer groove 1132 are both half the thickness of the first partition 112. Half the thickness of the first partition 112 is embedded in the third outer groove, and the other half of the thickness of the first partition 112 is embedded in the first outer groove 1132, ensuring the stability of the first partition 112 and the compactness of the first cooling assembly 11. The third inner groove is used to provide arrangement space for the second boss and prevent the first partition 112 from affecting the formation of the second boss. The third boss is used to form a third flow channel, increasing the flow path of the coolant, so that the coolant can fully fill the entire first inlet space 116 to achieve the best heat insulation effect. The third boss is also used to cooperate with the first boss to increase the pressure resistance of the first cooling assembly 11. Similarly, the fourth outer groove 1342 cooperates with the second outer groove to fix the second partition 133. The depth of both the fourth outer groove 1342 and the second outer groove is half the thickness of the second partition 133. Half the thickness of the second partition 133 is embedded in the fourth outer groove 1342, and the other half of the thickness of the second partition 133 is embedded in the first outer groove 1132, ensuring the stability of the second partition 133 and the compactness of the second cooling assembly 13. The fourth inner groove 1343 is used to provide space for the fourth boss and prevent the second partition 133 from affecting the formation of the fourth boss. The fourth boss is used to form the fourth flow channel, increase the flow path of the coolant, and enable the coolant to fully fill the entire second inlet space 135 to achieve the best heat insulation effect. The fourth boss is also used to cooperate with the second boss to increase the pressure resistance of the second cooling assembly 13.

[0059] The first partition 112 and the first upper plate 111 are connected at the third boss by brazing or vacuum cold welding, and the second partition 133 and the second lower plate 134 are connected at the fourth boss by brazing or vacuum cold welding.

[0060] In one embodiment, the third and fourth bosses are not provided. The third and fourth flow channels are formed by excavating the bottom of the third and fourth inner grooves 1343, respectively. The longitudinal section of the excavated flow channels can be circular, waist-shaped or other shapes.

[0061] In another embodiment, the third and fourth protrusions are protrusions that are uniformly or non-uniformly distributed on the bottom of the third and fourth inner grooves 1343, respectively, forming irregular flow channels between the protrusions, such as... Figure 7 The first upper plate 111 shown has a first protrusion 1111 forming a third flow channel 1112. The irregular third flow channel 1112 is used to reduce laminar flow of circulating coolant at the bottom of the third inner groove and the bottom wall of the first baffle 112, thereby improving heat transfer efficiency. The second lower plate 134 is similar.

[0062] See Figures 2 to 5 As shown, in one embodiment of the present invention, the distance between the lower surface of the first partition 112 and the bottom surface of the first inner groove 1133 of the first lower plate 113 is 0.4 mm to 0.6 mm; the distance between the bottom surface of the second inner groove of the second upper plate 132 and the upper surface of the second partition 133 is 0.4 mm to 0.6 mm.

[0063] In the above technical solution, the distance between the lower surface of the first partition 112 and the bottom surface of the first inner groove 1133 of the first lower plate 113 is the height of the first return space 117, which is also the depth of the first flow channel 1134. At this height, the flow rate of the coolant in the first return space 117 is not too fast, allowing for sufficient heat exchange with the coil 121 and maximizing the cooling effect. Similarly, the distance between the bottom surface of the second inner groove of the second upper plate 132 and the upper surface of the second partition 133 is the height of the second return space 136, which is also the depth of the second flow channel. At this height, the flow rate of the coolant in the second return space 136 is not too fast, allowing for sufficient heat exchange with the coil 121 and maximizing the cooling effect.

[0064] See Figures 2 to 5 As shown, in one embodiment of the present invention, the distance between the bottom surface of the third inner groove of the first upper plate 111 and the bottom surface of the first inner groove 1133 of the first lower plate 113 is less than or equal to 2 mm; the distance between the bottom surface of the second inner groove of the second upper plate 132 and the bottom surface of the fourth inner groove 1343 of the second lower plate 134 is less than 2 mm.

[0065] In the above technical solution, the distance between the bottom surface of the third inner groove of the first upper plate 111 and the bottom surface of the first inner groove 1133 of the first lower plate 113 is the sum of the height of the first inlet space 116, the thickness of the first partition plate 112, and the height of the second return space 136. This facilitates the control of the coolant flow rate, allowing the coolant to fill the first inlet space 116 within a controllable time, thus achieving the function of heat insulation. It also allows the coolant to flow through the first return space 117 within a controllable time, carrying away the heat of the coil 121. The distance between the bottom surface of the second inner groove of the second upper plate 132 and the bottom surface of the fourth inner groove 1343 of the second lower plate 134 is the sum of the height of the second inlet space 135, the thickness of the second partition plate 133, and the height of the second return space 136. Similarly, it is convenient to control the flow rate of the coolant, so that the coolant can fill the second inlet space 135 within a controllable time to achieve the function of heat insulation, and so that the coolant can flow through the second return space 136 within a controllable time to carry away the heat of the coil 121.

[0066] See Figures 2 to 5 As shown, in one embodiment of the present invention, the thickness of the first partition 112 and the thickness of the second partition 133 are 0.2 mm to 0.4 mm.

[0067] In the above technical solution, the thickness of the first partition 112 serves two purposes: firstly, it isolates the first inlet space 116 and the first return space 117; secondly, it minimizes the volume of the first cooling component 11, thereby making the entire liquid cooling device more compact and aesthetically pleasing. Similarly, the thickness of the second partition 133 serves two purposes: firstly, it isolates the second inlet space 135 and the second return space 136; secondly, it minimizes the volume of the second cooling component 13, thereby making the entire liquid cooling device more compact and aesthetically pleasing.

[0068] In the first embodiment of the present invention, the third flow channel is staggered with the first flow channel, and the third flow channel and the first flow channel have the same shape and size in their longitudinal sections.

[0069] In the second embodiment of the present invention, the third flow channel is staggered with the first flow channel, and the longitudinal cross-sectional shapes of the third flow channel and the first flow channel are different, such as... Figure 6 As shown in Figure c, the third flow channel is rectangular H1, and the first flow channel is elliptical H4; as Figure 6 As shown in d, the third flow channel is rectangular H1, and the first flow channel is waist-shaped H5.

[0070] In a third embodiment of the present invention, the third flow channel is staggered with the first flow channel, and the third flow channel and the first flow channel have the same shape in their longitudinal cross-sections but different dimensions, such as... Figure 6 As shown in Figure a, the third flow channel is a rectangle H1, and the first flow channel is a rectangle H2; as Figure 6As shown in Figure b, the third flow channel is a small-sized elliptical shape H3, and the first flow channel is a large-sized elliptical shape H4.

[0071] In the three embodiments described above, the function of the staggered arrangement of the third flow channel and the first flow channel is to provide thermal resistance on the heat transfer path, that is, to prevent heat from being transferred to the outer surface of the water-cooled plate. The arrangement of the fourth flow channel and the second flow channel can also be the same as in the three embodiments described above.

[0072] See Figure 2 and Figure 3 As shown, in one embodiment of the present invention, the first cooling assembly 11 further includes a connecting block 115, which is located between the first lower plate 113 and the mounting frame 131, and is connected to both the first lower plate 113 and the mounting frame 131.

[0073] In the above technical solution, the connecting block 115 is used to support the first lower plate 113 and the mounting frame 131 to ensure the stability of the entire liquid cooling device.

[0074] See Figure 2 and Figure 3 As shown, in one embodiment of the present invention, the first partition 112 and the second partition 133 are made of heat-insulating material.

[0075] In the above technical solution, the materials used for the first partition 112 and the second partition 133 serve to provide heat insulation, ensuring that the temperature of the coolant exchanging heat with the coil 121 inside the first return space 117 and the second return space 136 will not affect the temperature of the coolant inside the first inlet space 116 and the second inlet space 135.

[0076] See Figures 1 to 4 There are two inlet holes 1311, which divide the coolant into two parts within the mounting frame 131. One part flows through the ninth connecting hole 1321 of the second upper plate 132 of the second cooling assembly 13 and the sixth connecting hole 1332 of the second partition plate 133, and then flows to the fourth inner groove 1343 of the second cooling assembly 13. The fourth inner groove 1343 is divided into two identical parts. Figure 3(As shown in the diagram), corresponding to two liquid inlet holes 1311, multiple parallel flow channels are formed in the second inlet space 135. The coolant in the second inlet space 135 flows through the second confluence hole 1331 to the second return space 136, where multiple parallel flow channels are also formed. The multiple parallel flow channels passing through the second inner groove pass through the tenth connecting hole 1322 of the second upper plate 132 and flow out from the liquid outlet hole 1141 of the mounting frame 131; another path passes through the fourth connecting hole 1143 of the diverter block 114 on the first cooling assembly 11, the seventh connecting hole 1135 of the first lower plate 113, and the first partition plate 112. The fifth connecting hole 1122 on the first cooling assembly 11 flows into the third inner groove of the first cooling assembly 11. The third inner groove is divided into two identical parts, corresponding to two liquid inlet holes 1311 respectively. Multiple parallel flow channels are formed in the first inlet space 116. The coolant in the first inlet space 116 enters the first return space 117 after passing through the first confluence hole 1121. Multiple parallel flow channels are also formed in the first return space 117. The multiple parallel flow channels passing through the first inner groove 1133 pass through the eighth connecting hole 1136 of the first lower plate 113 and merge with the tenth connecting hole 1322 of the second upper plate 132 and flow out from the liquid outlet hole 1141. Figure 4 This is a complete coolant flow path diagram. As can be seen from the diagram, the overall water path can be divided into an outer layer of first inlet space 116 and second inlet space 135, and an inner layer of first return space 117 and second return space 136. There are certain gaps between the first inlet space 116 and the first return space 117, the second inlet space 135 and the second return space 136, and heat conduction is carried out.

[0077] See Figure 1 , Figure 2 and Figure 5 As shown, the present invention also provides a linear motor, including a stator assembly 12, a mover assembly 20, and the liquid cooling device described above.

[0078] In the above technical solution, the mover assembly 20 moves linearly on the surface of the stator assembly 12 under the action of electromagnetic force. When three-phase alternating current is applied to the coil 121 of the iron core 122, a traveling wave magnetic field is generated in the air gap, which interacts with the permanent magnet magnetic field of the mover assembly 20, thus forming the electromagnetic thrust for the linear motor to move forward. When three-phase alternating current is applied to the coil 121, a large amount of heat is generated due to the existence of internal resistance, requiring a liquid cooling device for heat dissipation.

[0079] Figure 5In the first cooling assembly 11 and the second cooling assembly 13, the stator assembly consisting of coil 121 and iron core 122 is located between the first cooling assembly 11 and the second cooling assembly 13. The heat generated by the coil 121 after being energized is conducted along the direction of the black arrow, first through the first return space 117 and the second return space 136, and then through the first partition 112 and the second partition 133 to the first inlet space 116 and the second inlet space 135. The coolant in the first cooling assembly 11 is divided into two layers by the first partition 112, and the coolant in the second cooling assembly 13 is divided into two layers by the second partition 133. The low-temperature coolant enters from the outer first inlet space 116 and the second inlet space 135, and returns to the inner first return space 117 and the second return space 136 at the end. The coolant in the inner first return space 117 and the second return space 136 absorbs most of the heat from the coil 121 and the iron core 122 and is carried out through the liquid outlet hole 1141. The outer first inlet space 116 and the second inlet space 135, since they preferentially pass through the low-temperature coolant, do not have a temperature rise or have a small temperature rise, thus playing a role in heat insulation and suppressing the temperature rise of the surface of the liquid cooling device, thereby achieving an extremely low temperature rise on the surface of the liquid cooling device.

[0080] See Figure 1 and Figure 2 As shown, in one embodiment of the present invention, the stator assembly 12 is located in a liquid cooling device, and the mover assembly 20 is movably disposed relative to the liquid cooling device. The stator assembly 12 includes a coil 121 and an iron core 122, both of which are located within the liquid cooling device.

[0081] In the above technical solution, the coil is in direct contact with the liquid cooling device, which facilitates rapid cooling of the coil.

[0082] It should be noted that, see Figure 2 and Figure 3 In the liquid cooling device of the present invention, apart from the liquid inlet 1311 and the liquid outlet 1141, all other connecting holes have the larger diameter holes as liquid inlets and the smaller diameter holes as liquid outlets. According to general design principles, due to pressure loss along the flow path, the pressure of the liquid inlet is generally greater, so the size of the liquid inlet is designed to be larger than that of the liquid outlet.

[0083] As can be seen from the above description, the embodiments of the present invention achieve the following technical effects:

[0084] (1) In existing liquid cooling plate technology, all liquid cooling channels have only one layer. When the cooling capacity is insufficient, the temperature rise on the surface of the liquid cooling plate can easily exceed 1°C. The dual-space cooling liquid cooling plate technology of this invention adds a composite cooling method of heat dissipation and insulation to the traditional heat dissipation cooling. The liquid cooling channel is divided into two layers: the outer layer is the liquid inlet layer, which also serves as the liquid cooling insulation layer, improving the heat insulation capacity of the liquid cooling plate and suppressing the temperature rise on the surface; the inner layer is the liquid return layer of the outer layer, which also serves as the heat dissipation cooling layer, carrying away the heat transferred from the coil. Through this two-layer liquid cooling technology, compared with existing technologies, the surface temperature rise of the liquid cooling plate can be reduced, while the coil temperature rise also meets the usage requirements.

[0085] (2) Existing flat liquid cooling plate technology generally uses rectangular or circular flow channels with smooth interiors. Such flow channel structures are prone to laminar flow on the inner wall surface, which reduces the heat transfer capacity of the system. However, the present invention uses flow channels of various shapes to avoid the generation of laminar flow.

[0086] Obviously, the embodiments described above are merely some, not all, embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort should fall within the scope of protection of the present invention.

[0087] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0088] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A liquid cooling device, characterized by, The application relates to a cooling device for a transformer, comprising: a first cooling assembly (11) having a first inflow space (116) and a first return flow space (117) in communication with each other, the first inflow space (116) and the first return flow space (117) being arranged in sequence along a first direction, the first inflow space (116) being configured to be capable of passing in cooling liquid and delivering the cooling liquid to the first return flow space (117); a second cooling assembly (13) having a second inflow space (135) and a second return flow space (136) in communication with each other, the second return flow space (136) and the second inflow space (135) being arranged in sequence along the first direction, the second inflow space (135) being configured to be capable of passing in cooling liquid and delivering the cooling liquid to the second return flow space (136); a coil (121) located between the first cooling assembly (11) and the second cooling assembly (13), wherein the first direction is the arrangement direction of the first cooling assembly (11), the coil (121) and the second cooling assembly (13); the first cooling assembly (11) comprises at least three first cooling plates, at least two adjacent first cooling plates cooperating to form the first inflow space (116), and at least two adjacent first cooling plates cooperating to form the first return flow space (117); the second cooling assembly (13) comprises at least three second cooling plates, at least two adjacent second cooling plates cooperating to form the second inflow space (135), and at least two adjacent second cooling plates cooperating to form the second return flow space (136); the first cooling assembly (11) comprises a first upper plate (111), a first partition plate (112) and a first lower plate (113) arranged in sequence along the first direction; the second cooling assembly (13) comprises a second upper plate (132), a second partition plate (133) and a second lower plate (134) arranged in sequence along the first direction; wherein: the first partition plate (112) is provided with a first flow collecting hole (1121) and a fifth communication hole (1122), the first flow collecting hole (1121) is located at a first end of the first partition plate (112), and the fifth communication hole (1122) is located at a second end of the first partition plate (112); the first inflow space (116) and the first return flow space (117) are in communication through the first flow collecting hole (1121), and the fifth communication hole (1122) is in communication with the first inflow space (116); and / or the second partition plate (133) is provided with a second flow collecting hole (1331) and a sixth communication hole (1332), the second flow collecting hole (1331) is located at a first end of the second partition plate (133), and the sixth communication hole (1332) is located at a second end of the second partition plate (133); the second inflow space (135) and the second return flow space (136) are in communication through the second flow collecting hole (1331), and the sixth communication hole (1332) is in communication with the second inflow space (135).

2. The liquid cooling device of claim 1, wherein, The first upper plate (111) cooperates with the first partition plate (112) to form the first inflow space (116), and the first partition plate (112) cooperates with the first lower plate (113) to form the first return flow space (117).

3. The liquid cooling device of claim 2, wherein, The second upper plate (132) cooperates with the second partition plate (133) to form the second return flow space (136), and the second partition plate (133) cooperates with the second lower plate (134) to form the second inflow space (135), and the first inflow space (116), the first return flow space (117), the coil (121), the second return flow space (136) and the second inflow space (135) are sequentially arranged in a first direction.

4. The liquid cooling device of claim 2, wherein The second cooling assembly (13) further comprises a mounting frame (131), and the mounting frame (131) is provided with a containing groove, and the iron core (122) is located in the containing groove, and the coil (121) is arranged on the iron core (122).

5. The liquid cooling device of claim 4, wherein, The mounting frame (131) is provided with a liquid inlet hole (1311), a first communication hole (1312) and a second communication hole (1313), and the liquid inlet hole (1311) is in communication with the first inflow space (116) and the second inflow space (135); The first cooling assembly (11) further comprises a flow dividing block (114), and the flow dividing block (114) is provided with a liquid outlet hole (1141), a third communication hole (1142) and a fourth communication hole (1143), and the liquid outlet hole (1141) is in communication with the first return flow space (117) and the second return flow space (136); The second communication hole (1313) and the fourth communication hole (1143) are in communication with the liquid inlet hole (1311); The first communication hole (1312) and the third communication hole (1142) are in communication with the liquid outlet hole (1141).

6. The liquid cooling device of claim 3, wherein, A plurality of third flow channels are correspondingly arranged in the first inflow space (116); a plurality of first flow channels are correspondingly arranged in the first return flow space (117); a plurality of fourth flow channels are correspondingly arranged in the second inflow space (135); and a plurality of second flow channels are correspondingly arranged in the second return flow space (136).

7. The liquid cooling device of claim 6, wherein, A first outer groove (1132) is formed in the upper surface of the first lower plate (113), at least part of the first partition plate (112) is located in the first outer groove (1132), a first inner groove (1133) and a seventh communication hole (1135) are formed in the groove bottom of the first outer groove (1132), the first inner groove (1133) forms the first return flow space (117) with the first partition plate (112), a plurality of first bosses are protruded from the groove bottom of the first inner groove (1133), the first flow channels are formed between adjacent first bosses, and an eighth communication hole (1136) is formed in the groove bottom of the first inner groove (1133); And / or, a lower surface of the second upper plate (132) is provided with a second outer groove, at least part of the second partition plate (133) is located in the second outer groove, a groove bottom of the second outer groove is provided with a second inner groove and a ninth communication hole (1321), the second inner groove forms the second backflow space (136) with the second partition plate (133), a groove bottom of the second inner groove is protruded with a plurality of second bosses, the second flow channel is formed between adjacent second bosses, and a groove bottom of the second inner groove is provided with a tenth communication hole (1322).

8. The liquid cooling device of claim 7, wherein, A lower surface of the first upper plate (111) is provided with a third outer groove, at least part of the first partition plate (112) is located in the third outer groove, a groove bottom of the third outer groove is provided with a third inner groove, the third inner groove forms the first inflow space (116) with the first partition plate (112), a groove bottom of the third inner groove is protruded with a plurality of third bosses, and the third flow channel is formed between adjacent third bosses. And / or, an upper surface of the second lower plate (134) is provided with a fourth outer groove (1342), at least part of the second partition plate (133) is located in the fourth outer groove (1342), a groove bottom of the fourth outer groove (1342) is provided with a fourth inner groove (1343), the fourth inner groove (1343) forms the second inflow space (135) with the second partition plate (133), a groove bottom of the fourth inner groove (1343) is protruded with a plurality of fourth bosses, and the fourth flow channel is formed between adjacent fourth bosses.

9. The liquid cooling device of claim 8, wherein, A distance between a lower surface of the first partition plate (112) and a groove bottom surface of the first inner groove (1133) of the first lower plate (113) is 0.4mm to 0.6mm; And / or, a distance between a groove bottom surface of the second inner groove of the second upper plate (132) and an upper surface of the second partition plate (133) is 0.4mm to 0.6mm.

10. The liquid cooling device of claim 8, wherein, A distance between a groove bottom surface of the third inner groove of the first upper plate (111) and a groove bottom surface of the first inner groove (1133) of the first lower plate (113) is less than or equal to 2mm; And / or, a distance between a groove bottom surface of the second inner groove of the second upper plate (132) and a groove bottom surface of the fourth inner groove (1343) of the second lower plate (134) is less than 2mm.

11. The liquid cooling device of claim 6, wherein, The third flow channel is arranged in a staggered manner with the first flow channel, or the third flow channel has the same shape and size as a longitudinal section of the first flow channel, or the third flow channel has a different shape from a longitudinal section of the first flow channel, or the third flow channel has the same shape but different size from a longitudinal section of the first flow channel.

12. A linear motor, characterized by The liquid cooling device comprises a stator assembly (12), a rotor assembly (20), and the liquid cooling device according to any one of claims 1 to 11.

13. The linear motor of claim 12, wherein, The stator assembly (12) is located in the liquid cooling device, and the mover assembly (20) is movably arranged relative to the liquid cooling device, and the stator assembly (12) comprises a coil (121) and an iron core (122), and the coil (121) and the iron core (122) are both located in the liquid cooling device.

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