Chemical supply device and method for operating the same

Abstract

A chemical supply device includes a protective structure, a peristaltic pump, and a fluid tube. The protective structure has a first opening and a second opening, with the second opening located above the first opening. The peristaltic pump is disposed on the protective structure. The fluid tube is disposed in the protective structure and the peristaltic pump. The first opening and the second opening face the same direction. The fluid tube connects the first opening and the second opening. The peristaltic pump is used to control the solution in the fluid tube. The protective structure is suitable for covering the outlet of the chemical solution container. The present disclosure also provides an operating method for the chemical supply device.

Description

Technical Field

[0001] The present disclosure generally relates to a supply device, and more particularly to a chemical supply device. Background Art

[0002] In recent years, intensive research on high electron mobility transistors (HEMTs) has become widespread, particularly for high-power switching and high-frequency applications. Group III nitride-based HEMTs utilize a quantum well-like structure formed by a heterojunction interface between two materials with different band gaps to accommodate a two-dimensional electron gas (2DEG) region, meeting the demands of high-power / high-frequency devices. In addition to HEMTs, examples of devices with heterostructures include heterojunction bipolar transistors (HBTs), heterojunction field-effect transistors (HFETs), and modulation-doped FETs (MODFETs).

[0003] The manufacturing process requires metal ions. Currently, high-purity metal ion solutions can be prepared and stored in barrels, allowing operators to transfer these solutions using delivery devices such as droppers, pipettes, and siphons. However, these solutions can become contaminated during transfer, and impurities in the metal ions can affect the electrical properties of the wafers containing multiple HEMTs. Direct contact between operators and the delivery device's tubing or the opening of the barrel can also contaminate the solution. Therefore, a portable delivery device is needed that prevents contamination of the delivery lines. Summary of the Invention

[0004] In one aspect, the present disclosure provides a chemical supply device. The chemical supply device includes a protective structure, a peristaltic pump, and a fluid tube. The protective structure has a first opening and a second opening, with the second opening located above the first opening. The peristaltic pump is disposed on the protective structure. The fluid tube is disposed within the protective structure and the peristaltic pump. The first opening and the second opening face the same direction. The fluid tube connects the first opening and the second opening. The peristaltic pump is used to control a solution in the fluid tube. The protective structure is adapted to cover the outlet of a chemical solution container.

[0005] In another aspect, the present disclosure provides an operating method for a chemical supply device. This operating method includes the following steps: configuring the chemical supply device on a chemical solution container; extending a portion of a fluid tube from a protective structure of the chemical supply device and entering the chemical solution container through the outlet of the chemical solution container; and turning on a peristaltic pump installed on the fluid tube. The chemical supply device covers the outlet of the chemical solution container. The chemical supply device includes a protective structure, a fluid tube and a peristaltic pump. The peristaltic pump is configured on the protective structure. The fluid tube is configured in the protective structure and the peristaltic pump. The second opening of the protective structure is located above the first opening of the protective structure. The first opening and the second opening face the same direction. The fluid tube connects the first opening and the second opening. The peristaltic pump is used to control the solution in the fluid tube.

[0006] In another aspect, the present disclosure provides a chemical supply device. The chemical supply device includes a protective structure, a peristaltic pump, and a fluid tube. The protective structure has a first opening and a second opening. The second opening is located above the first opening. The peristaltic pump is disposed on the protective structure. The fluid tube is disposed between the protective structure and the peristaltic pump. The second end of the fluid tube is located adjacent to the second opening. The protective structure extends the second end of the fluid tube by reducing the distance between the peristaltic pump and the first opening.

[0007] Based on the above configuration, a better configuration is made. Because the protective structure can cover the outlet of the chemical solution container, the protection of the fluid pipe is improved, and the operator can transfer the fluid without touching the fluid pipe. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Various aspects of the present disclosure will be readily understood from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that various features may not be drawn to scale. That is, the dimensions of various features may be arbitrarily increased or decreased for clarity of discussion. Embodiments of the present disclosure are described in greater detail below with reference to the accompanying drawings, in which:

[0009] Figure 1 is a perspective view of a chemical supply device in some embodiments of the present disclosure;

[0010] Figure 2 Based on Figure 1 The cross-section diagram drawn by the cutting line 2 in ;

[0011] Figure 3 and Figure 4 is a cross-sectional view of a chemical supply device and a chemical solution container in some embodiments of the present disclosure;

[0012] Figure 5 Based on Figure 1 A cross-sectional view drawn along the cutting line 5 in FIG; and

[0013] Figure 6 is a perspective view of a chemical supply device in some embodiments of the present disclosure. DETAILED DESCRIPTION

[0014] Throughout the drawings and detailed description, common reference numerals are used to designate the same or similar components.The embodiments of the present disclosure can be easily understood through the following detailed description taken in conjunction with the accompanying drawings.

[0015] Spatial descriptors such as "up," "above," "below," "upward," "left," "right," "downward," "top," "bottom," "vertical," "horizontal," "side," "higher," "lower," "upper," "above," "below," etc., are given for the orientation of components shown in the associated figures relative to a component or group of components or a plane of the components or group of components. It is understood that the spatial descriptors used herein are for illustrative purposes only and that actual embodiments of the structures described herein may be spatially arranged in any orientation or manner, provided that the advantages of the embodiments of the present disclosure do not deviate from such arrangements.

[0016] Furthermore, it should be noted that in actual devices, due to device manufacturing conditions, the actual shapes of various structures depicted as approximately rectangular may be curved, have rounded edges, have slightly uneven thicknesses, etc. Straight lines and right angles are used only for convenience in representing layers and features.

[0017] In the following description, a chemical supply device and its operating method are described as preferred examples. Those skilled in the art will appreciate that modifications, including additions and / or substitutions, can be made without departing from the scope and spirit of this disclosure. Certain details may be omitted to avoid obscuring the disclosure; however, this disclosure is prepared to enable those skilled in the art to practice the teachings herein without undue experimentation.

[0018] Figure 1 is a perspective view of a chemical supply device in some embodiments of the present disclosure, and Figure 2 Based on Figure 1 A cross-sectional view drawn along the midline 2. The chemical supply device 1 includes a protective structure 10, a peristaltic pump (roller pump) 11, and a fluid tube 12. The peristaltic pump 11 is disposed on the protective structure 10. The fluid tube 12 is disposed in the protective structure 10 and the peristaltic pump 11.

[0019] In this embodiment, the protective structure 10 has an opening 100 and an opening 105. Opening 105 is located above opening 100, and both openings 100 and 105 face the same direction. For example, opening 100 is located in the lower portion of the protective structure 10 and faces downward. Opening 105 is located in the upper portion of the protective structure 10 and also faces downward. In other words, the protective structure 10 covers the area above opening 100 and the area above opening 105, and the area above opening 100 is adjacent to the area above opening 105.

[0020] A peristaltic pump 11 is used to control fluid in a fluid tube 12. The fluid tube 12 is bendable (flexible) and is housed within the housing of the peristaltic pump 11. The peristaltic pump 11 has a plurality of rollers 110, which compress the fluid tube 12 as they roll. The peristaltic pump 11 pumps the fluid in the fluid tube 12. For example, the peristaltic pump 11 may have three rollers 110, which compress and pump the fluid in the fluid tube 12.

[0021] The fluid tube 12 connects the opening 100 and the opening 105 , and the protection structure 10 is used to extend the fluid tube 12 adjacent to the opening 100 . The fluid tube 12 is used to transport fluid through the opening 100 , the protection structure 10 and the peristaltic pump 11 , and release the fluid from the opening 105 .

[0022] Specifically, the fluid tube 12 has an end 123 and an end 124. The end 123 is used to pass through the opening 100, and the end 124 is located near the opening 105. The protective structure 10 reduces the distance between the peristaltic pump 11 and the opening 100, so that the end 123 of the fluid tube 12 extends through the opening 100.

[0023] The protective structure 10 is suitable for covering the outlet of the chemical solution container. The solution container can be a drum, and the drum is filled with chemical solution. Figure 3 and Figure 4 1 and 2 are two other cross-sectional views of the chemical supply device 1 and the chemical solution container 2. The chemical solution container 2 has an outlet 20, and the protection structure 10 is suitable for covering the outlet 20 of the chemical solution container 2.

[0024] For example, chemical solution container 2 contains sulfuric acid (H2SO4) for wet cleaning or wet etching of nitride-based semiconductor devices. In some embodiments, chemical solution container 2 may contain hydrochloric acid (HCl), ammonium hydroxide (NH4OH), hydrogen peroxide (H2O2), or hydrogen fluoride (HF), and chemical supply device 1 only delivers chemicals for the wet cleaning or wet etching process of nitride-based semiconductor devices. Nitride-based semiconductor devices include a gallium nitride (GaN) layer and an aluminum gallium nitride (AlGaN) layer. The AlGaN layer is disposed on the GaN layer. The AlGaN layer has a different bandgap than the GaN layer, thereby forming a two-dimensional electron gas (2DEG) region.

[0025] In this embodiment, the opening 100 has a width W1, and the outlet 20 has a width W2. Width W1 is greater than width W2, so that the protective structure 10 can completely cover the outlet 20 through the opening 100. For example, the width W1 of the opening 100 can be 15 centimeters, while the width W2 of the outlet 20 can be 10 centimeters. In some embodiments, the width W1 of the opening 100 ranges from 10 centimeters to 20 centimeters, while the width W2 of the outlet 20 ranges from 5 centimeters to 15 centimeters.

[0026] Reference Figures 2 to 4 The operating method of the chemical supply device 1 includes the following steps: configuring the chemical supply device 1 on the chemical solution container 2; extending a portion of the fluid tube 12 from the protective structure 10 of the chemical supply device 1 so that it enters the chemical solution container 2 through the outlet 20; and starting the peristaltic pump 11 installed on the fluid tube 12.

[0027] Protective structure 10 covers outlet 20 and fluid tube 12 of chemical solution container 2. Thus, protective structure 10 protects outlet 20 and fluid tube 12. By activating peristaltic pump 11, chemical supply device 1 can pump chemical fluid 21 through fluid tube 12 and peristaltic pump 11. When an operator uses chemical supply device 1 to deliver chemical fluid 21, the operator does not come into contact with fluid tube 12, thereby preventing contamination.

[0028] Specifically, the chemical supply device 1 can deliver the chemical fluid 21 from the chemical solution container 2 to the bottle 3, and the bottle 3 can receive the chemical fluid 21 from the end 124 of the fluid tube 12 adjacent to the opening 105. During the process, the fluid tube 12 and the outlet 20 of the chemical solution container 2 can be protected by the protective structure 10 to avoid contamination.

[0029] At the same time, the chemical supply device 1 can be easily removed from the chemical solution container 2. Therefore, the chemical supply device 1 is portable. For example, the height H1 of the chemical supply device 1 can be 50 cm, while the width W3 of the chemical supply device 1 can be 30 cm. In some embodiments, the height H1 of the chemical supply device 1 can be within the range of 40 cm to 60 cm, while the width W3 of the chemical supply device 1 can be within the range of 20 cm to 40 cm. Therefore, the chemical supply device 1 is easy to carry.

[0030] In this embodiment, the protective structure 10 includes a hollow portion 101, a hollow portion 102, a hollow portion 103, and a hollow portion 104. The hollow portion 102 is coupled to the hollow portion 101. The hollow portion 103 is connected to the hollow portion 102. The hollow portion 104 is connected to the hollow portion 103.

[0031] The opening 100 is located in the hollow portion 101, and the opening 105 is located in the hollow portion 104. Specifically, the opening 100 is formed at the bottom of the hollow portion 101, and the opening 105 is formed at the bottom of the hollow portion 104.

[0032] Peristaltic pump 11 is disposed within hollow portion 103. Specifically, peristaltic pump 11 is located at the top of hollow portion 103, with hollow portion 102 connected to the bottom of hollow portion 103. Hollow portions 101, 102, and 103 are located between opening 100 and peristaltic pump 11. A portion of fluid tube 12 extends from peristaltic pump 11, passing through hollow portion 103 and into hollow portion 102.

[0033] The hollow portion 102 is adapted to enter the hollow portion 101. Specifically, the protection structure 10 reduces the distance between the peristaltic pump 11 and the opening 100 by moving the hollow portion 102 into the hollow portion 101.

[0034] The hollow portion 102 connects the hollow portion 101 and the hollow portion 103. When the hollow portion 102 enters the hollow portion 101, the hollow portion 103 covers the top of the hollow portion 101. By moving the hollow portion 102 into the hollow portion 101, the distance between the hollow portion 103 and the hollow portion 101 can be adjusted. When most of the hollow portion 102 enters the hollow portion 101, the distance between the opening 100 and the peristaltic pump 11 will be shorter than the distance between the end 123 of the fluid tube 12 and the peristaltic pump 11. Therefore, part of the fluid tube 12 will extend from the opening 100. In other words, the end 123 of the fluid tube 12 extends from the hollow portion 101. In other words, the step of extending part of the fluid tube 12 includes: moving the hollow portion 102 into the hollow portion 101.

[0035] Reference Figure 4By extending the end 123 of the fluid tube 12 , the chemical supply device 1 can place part of the fluid tube 12 into the chemical fluid 21 in the chemical solution container 2 , and the peristaltic pump 11 can pump the chemical fluid 21 in the fluid tube 12 under the protection of the protective structure 10 .

[0036] By adjusting the distance between the hollow portion 103 and the hollow portion 101 , the operator can extend the fluid tube 12 without touching the fluid tube 12 , and can deliver the chemical fluid 21 in the chemical solution container 2 without touching the fluid tube 12 and the outlet 20 .

[0037] In this embodiment, the hollow portion 101 is in the shape of a frustum. Therefore, the chemical supply device 1 can stand stably through the hollow portion 101 and stably fix the hollow portions 102, 103, 104 and the peristaltic pump 11.

[0038] The hollow portion 101 has a top opening 1010. The top opening 1010 is located at the top of the hollow portion 101, and the opening 100 is located at the bottom of the hollow portion 101. The top opening 1010 is directly above the opening 100, so the fluid tube 12 can pass through the top opening 1010 and the opening 100 without contacting the hollow portion 101.

[0039] Top opening 1010 is larger than the cross-section of hollow portion 102. Width W4 of top opening 1010 is larger than width W5 of hollow portion 102, and hollow portion 102 enters hollow portion 101 through top opening 1010. By moving hollow portion 102 into hollow portion 101, the distance between peristaltic pump 11 and opening 100 is reduced, and a portion of fluid tube 12 can extend from opening 100.

[0040] The top opening 1010 is smaller than the cross-section of the hollow portion 103. The width W4 of the top opening 1010 is smaller than the width W6 of the hollow portion 103, so the hollow portion 103 is suitable for covering the top opening 1010. The hollow portion 102 is connected to the hollow portion 103. When the hollow portion 102 enters the hollow portion 101, the distance between the hollow portion 101 and the hollow portion 103 is reduced. When the edge of the top opening 1010 touches the hollow portion 103, the hollow portion 102 stops in the hollow portion 101. In other words, the edge of the top opening 1010 is used to stop the hollow portion 103, and the hollow portion 103 is used to stop the hollow portion 102. Therefore, the hollow portion 102 and the hollow portion 103 can control the length of the portion of the fluid tube 12 extending from the opening 100.

[0041] Reference Figure 4, the length L1 of the portion of the fluid tube 12 extending from the opening 100 may be 20 cm. However, the present disclosure is not limited thereto. In some embodiments, the length L1 may range from 15 cm to 25 cm, allowing the fluid tube 12 to be inserted into the chemical fluid 21 in the chemical solution container 2.

[0042] Reference Figure 1 and Figure 4 In hollow portion 101, top opening 1010 is smaller than opening 100. Width W1 of opening 100 is larger than width W4 of top opening 1010. Therefore, opening 100 is adapted to cover most of outlet 20 of chemical solution container 2, while top opening 1010 is adapted to surround and guide hollow portion 102. Furthermore, chemical supply device 1 can stably stand on chemical solution container 2 through hollow portion 101.

[0043] Furthermore, the hollow portion 101 forms an edge 1012 around the opening 100. The edge 1012 protrudes horizontally inward. Therefore, the chemical supply device 1 can stand stably through the hollow portion 101.

[0044] In this embodiment, the hollow portion 102 is shaped like a cuboid. On a horizontal plane, the cross-section of the hollow portion 102 may be a square with four sides of equal length. On a vertical plane, the cross-section of the hollow portion 102 may be a rectangle with two longer sides parallel to direction d1. The hollow portion 102 is configured to move along direction d1.

[0045] The top opening 1010 of the hollow portion 101 is also square, and the square is similar to the cross-sectional shape of the hollow portion 102. Therefore, the hollow portion 102 can smoothly enter the hollow portion 101.

[0046] The hollow portion 103 is also in the shape of a cuboid, and its horizontal cross-section is larger than that of the hollow portion 102 and the area of the top opening 1010. Therefore, the hollow portion 103 can be stopped by the edge of the top opening 1010 of the hollow portion 101.

[0047] In this embodiment, the length L2 of the hollow portion 102 is shorter than the height H2 of the hollow portion 101. Therefore, when the hollow portion 102 is inserted into the hollow portion 101, the hollow portion 101 can accommodate the hollow portion 102.

[0048] Specifically, in the direction d1, the length L2 of the hollow portion 102 is shorter than the height H2 of the hollow portion 101. The hollow portion 102 is configured to move along the direction d1 and enter the hollow portion 101.

[0049] In this embodiment, the hollow portion 101 has a plurality of fasteners 1011 . For example, the hollow portion 101 has four fasteners 1011 , and these fasteners 1011 are located adjacent to four sides of the top opening 1010 .

[0050] Specifically, these fasteners 1011 extend through multiple side surfaces 1013 of the hollow portion 101 adjacent to the top opening 1010. These fasteners 1011 are dumbbell-shaped buttons. Each fastener 1011 has two enlarged members connected by a strip. The strip passes through the side surfaces 1013, with one of the two enlarged members located outside the hollow portion 101 and the remaining enlarged member located inside the hollow portion 101. The strip is longer than the side walls of the hollow portion 101 adjacent to the top opening 1010. Therefore, the side walls can stand vertically, while the fasteners 1011 can move horizontally.

[0051] The fasteners 1011 are used to secure the hollow portion 102 to the hollow portion 101 when the hollow portion 102 extends from the hollow portion 101. The hollow portion 102 has a plurality of fixing structures 1020, and the fixing structures 1020 are disposed near the bottom of the hollow portion 102. The fixing structures 1020 are adapted to couple with the fasteners 1011.

[0052] When the bottom of the hollow portion 102 is located in the top opening 1010, the fixing structures 1020 will be aligned with the fasteners 1011 of the hollow portion 101. By pushing the fasteners 1011, each fixing structure 1020 will receive a portion of the fastener 1011, so that the fasteners 1011 are fixed to the fixing structures 1020, thereby fixing the position between the hollow portion 101 and the hollow portion 102.

[0053] When the fasteners 1011 are fixed to the fixing structures 1020, most of the hollow portion 102 is not located in the hollow portion 101, and the protective structure 10 can cover and protect the entire fluid pipe 12. At the same time, the operator can move the chemical supply device 1 without touching the fluid pipe, so that the fluid pipe will not be contaminated.

[0054] In this embodiment, hollow portion 102 connects to the bottom of hollow portion 103, and hollow portion 104 connects to the side of hollow portion 103. Hollow portion 103 is a rectangular parallelepiped, with hollow portion 102 connecting to bottom surface 1030 of hollow portion 103, and hollow portion 104 connecting to side surface 1032 of hollow portion 103. The extension direction of the fluid tube changes from direction d1 to direction d2 within protective structure 10, allowing operators to easily access the chemical fluid in chemical solution container 2.

[0055] The hollow portion 103 has a bottom opening 1031 formed on the bottom surface 1030 . Therefore, the fluid pipe 12 can pass through the hollow portion 103 .

[0056] The hollow portion 102 extends along a direction d1, while the hollow portion 104 extends along a direction d2. The directions d1 and d2 are perpendicular to each other, so the hollow portion 104 provides enough space to place the bottle 3 thereunder.

[0057] In this embodiment, the chemical supply device 1 includes a pump housing 13 and a pump switch 14. The pump housing 13 covers the peristaltic pump 11, and the pump switch 14 is disposed above the pump housing 13. The pump switch 14 is electrically connected to the peristaltic pump 11 and controls the peristaltic pump 11.

[0058] The pump housing 13 and the peristaltic pump 11 are disposed on the top of the hollow portion 103. The fluid tube 12 extends from the peristaltic pump 11 and passes through the top of the hollow portion 103. A pump switch 14 is disposed on the top of the pump housing 13 so that an operator can easily control the peristaltic pump 11. The peristaltic pump 11 is covered by the pump housing 13 so that it cannot be touched during operation. The fluid in the fluid tube 12 can be controlled by the pump switch 14, and the fluid tube 12 and the peristaltic pump 11 are protected by the protective structure 10 and the pump housing 13.

[0059] In this embodiment, fluid tube 12 includes portion 120, portion 121, and portion 122. Portion 120 passes through the interiors of hollow portions 101, 102, and 103. Portion 121 connects portion 120 and is disposed within peristaltic pump 11. Portion 121 connects portion 120 and portion 122, and portion 122 passes through the interiors of hollow portions 103 and 104. Therefore, peristaltic pump 11 can pump fluid from portion 120 through portion 121 to portion 122.

[0060] The protective structure 10 and the peristaltic pump 11 surround the fluid tube 12, and no other openings are formed in the protective structure 10 or the peristaltic pump 11. Therefore, the protective structure 10 and the peristaltic pump 11 can completely protect the fluid tube 12 and can also prevent contamination during operation.

[0061] In this embodiment, the chemical supply device 1 includes a shield 15 . Figure 5 is based on Figure 1 The hollow portion 104 has a pair of guide grooves 1040 formed on the inner wall of the opening 105. The shield 15 is used to slide along the guide grooves 1040 and shield the opening 105.

[0062] Thus, when the chemical supply device 1 is not supplying chemical fluid, the portion 122 of the fluid pipe 12 may be shielded by the shield 15. The shield 15 may provide further protection.

[0063] Reference Figure 1The hollow portion 102 is configured to move along a direction d1, and the guide grooves 1040 extend along a direction d2. The direction d1 is perpendicular to the direction d2. Therefore, the shield 15 can completely cover the opening 105 and can also be easily removed.

[0064] By shielding the opening 105 with the shield 15, the shield 15 can protect the portion 122 of the fluid tube 12 during storage or movement. Before starting the peristaltic pump 11, the method of operating the chemical supply device 1 includes removing the shield 15 shielding the opening 105. Figure 4 , the end 124 of the fluid tube 12 is exposed so that fluid can be provided through the fluid tube 12 .

[0065] Reference Figure 2 The chemical supply device 1 includes a shield 16 that shields the opening 100. Through the shield 15 and the shield 16, the protective structure 10 can completely surround the fluid pipe 12. The shield 16 shields the opening 100 and protects the end 123 of the fluid pipe 12.

[0066] By shielding the opening 100 with the shield 16 , the shield 16 can protect the portion 120 of the fluid tube 12 during storage or transport. Before the chemical solution container 2 is mounted on the chemical supply device 1 , the method of operating the chemical supply device 1 includes removing the shield 16 shielding the opening 100 .

[0067] Figure 6 The following is a perspective view of a chemical supply device in some embodiments of the present disclosure. Chemical supply device 1A is similar to chemical supply device 1 described above, and descriptions of the same components are not repeated here. In this embodiment, protective structure 10A includes hollow portion 101, hollow portion 102A, hollow portion 103, and hollow portion 104. Hollow portion 102A is a cylindrical structure, unlike hollow portion 102 of chemical supply device 1. Specifically, the horizontal cross-section of hollow portion 102A is circular. Therefore, hollow portion 102A can smoothly enter hollow portion 101.

[0068] The embodiments were chosen and described in order to best explain the principles of the disclosure and its practical applications, thereby enabling others skilled in the art to understand the disclosure for various embodiments and with various modifications as are suited to the particular use contemplated.

[0069] As used herein and not otherwise defined, the terms "substantially," "approximately," and "about" are used to describe and take into account minor variations. When used in connection with an event or circumstance, the terms may encompass situations where the event or circumstance definitely occurs as well as situations where the event or circumstance approximately occurs. For example, when used in connection with a numerical value, the terms may encompass a range of variation of less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. The term "substantially coplanar" may refer to two surfaces that are positioned along the same plane within a few microns, such as two surfaces that are within 40 μm, within 30 μm, within 20 μm, within 10 μm, or within 1 μm positioned along the same plane.

[0070] As used herein, the singular terms "a," "an," and "the" may include plural references unless the context clearly dictates otherwise. When describing some embodiments, a component being disposed "on or over" another component may encompass both the case where the former component is directly on (e.g., in physical contact with) the latter component and the case where one or more intermediate components are positioned between the former and the latter component.

[0071] Although the present disclosure has been described and illustrated with reference to specific embodiments of the present disclosure, such descriptions and illustrations are not intended to be limiting. Those skilled in the art will appreciate that various changes may be made and equivalents substituted without departing from the true spirit and scope of the present disclosure as defined by the appended claims. The illustrations may not necessarily be drawn to scale. Due to manufacturing processes and tolerances, there may be differences between the process reproductions in this disclosure and the actual device. Furthermore, it should be understood that actual devices and layers may deviate from the rectangular layer depictions in the drawings and may include corners, surfaces or edges, rounded corners, etc. due to manufacturing processes such as conformal deposition and etching. Other embodiments of the present disclosure that are not specifically described may exist. This description and the drawings should be considered illustrative and not restrictive. Modifications may be made to adapt specific circumstances, materials, compositions of matter, methods, or processes to the objectives, spirit, and scope of the present disclosure. All such modifications are intended to be within the scope of the appended claims. Although the methods disclosed herein have been described with reference to specific operations performed in a specific order, it should be understood that these operations may be combined, subdivided, or reordered to form equivalent methods without departing from the teachings of the present disclosure. Thus, unless specifically indicated herein, the order and grouping of operations are not limiting.

Claims

1. A chemical supply device, characterized in that: include: Protective structure with: First opening; as well as a second opening located above the first opening; a peristaltic pump, disposed on the protective structure; as well as a fluid tube, disposed in the protective structure and the peristaltic pump; wherein the first opening and the second opening face the same direction; The fluid tube connects the first opening and the second opening, has a liquid inlet end disposed at the first opening and a liquid outlet end disposed at the second opening, and is used to transport the fluid through the first opening, the protective structure, and the peristaltic pump, and release the fluid from the second opening; wherein the peristaltic pump is used to control the fluid in the fluid tube; wherein the protective structure is adapted to cover an outlet of the chemical solution container; The protective structure includes: first hollow part; a second hollow portion, coupled to the first hollow portion; a third hollow portion connected to the second hollow portion; and a fourth hollow portion connected to the third hollow portion; wherein the first opening is located on the first hollow portion, and the second opening is located on the fourth hollow portion; wherein the second hollow portion is adapted to enter the first hollow portion; When the second hollow part does not enter the first hollow part, the liquid inlet end of the fluid tube is accommodated in the first hollow part; when the second hollow part enters the first hollow part, the third hollow part covers the top of the first hollow part, and the liquid inlet end of the fluid tube extends from the first hollow part and the first opening.

2. The chemical supply device according to claim 1, characterized in that: The first hollow portion is in the shape of a frustum.

3. The chemical supply device according to claim 1, characterized in that: The first hollow portion has a first top opening, and the first opening is located at the bottom of the first hollow portion. The first top opening is larger than the cross-section of the second hollow portion, and the first top opening is smaller than the cross-section of the third hollow portion.

4. The chemical supply device according to claim 3, characterized in that: The first top opening is smaller than the first opening.

5. The chemical supply device according to claim 3, characterized in that: The first hollow portion has a plurality of fasteners, and the plurality of fasteners pass through a plurality of side surfaces of the first hollow portion adjacent to the first top opening, and the second hollow portion has a plurality of fixing structures, which are arranged at a position adjacent to the bottom of the second hollow portion, and the plurality of fixing structures are suitable for coupling with the plurality of fasteners.

6. The chemical supply device according to claim 1, characterized in that: The second hollow portion is in the shape of a cuboid.

7. The chemical supply device according to claim 1, characterized in that: The length of the second hollow portion is shorter than the height of the first hollow portion.

8. The chemical supply device according to claim 1, characterized in that: The second hollow portion is connected to the bottom of the third hollow portion, and the fourth hollow portion is connected to the side of the third hollow portion.

9. The chemical supply device according to claim 1, characterized in that: Also includes: a pump housing, covering the peristaltic pump; as well as a pump switch, disposed on the pump housing; The pump switch is electrically connected to the peristaltic pump.

10. The chemical supply device according to claim 1, characterized in that: The second hollow portion extends along a first direction, and the fourth hollow portion extends along a second direction, and the first direction and the second direction are perpendicular to each other.

11. The chemical supply device according to claim 1, characterized in that: The fluid pipe comprises: a first portion passing through the first hollow portion, the second hollow portion, and the third hollow portion; a second part connected to the first part and disposed in the peristaltic pump; and The third portion passes through the third hollow portion and the fourth hollow portion.

12. The chemical supply device according to claim 1, characterized in that: A second shield is also included, wherein the fourth hollow portion has a pair of guide grooves formed on the inner wall of the second opening, and the second shield is used to slide along the guide grooves and shield the second opening.

13. The chemical supply device according to claim 12, characterized in that: The second hollow portion is used to move along a first direction, and the plurality of guide grooves extend along a second direction, and the first direction is perpendicular to the second direction.

14. The chemical supply device according to claim 1, characterized in that: Also included is a first shield that shields the first opening.

15. A method for operating a chemical supply device, characterized in that: include: arranging the chemical supply device on the chemical solution container, wherein the chemical supply device covers the outlet of the chemical solution container; a fluid pipe extending from the protective structure of the chemical supply device and entering the chemical solution container through the outlet of the chemical solution container; starting a peristaltic pump mounted to the fluid tube; wherein the chemical supply device comprises the protective structure, the fluid tube, and the peristaltic pump, wherein the peristaltic pump is disposed on the protective structure, and the fluid tube is disposed in the protective structure and the peristaltic pump; wherein the second opening of the protective structure is located above the first opening of the protective structure, and the first opening and the second opening face the same direction; The fluid tube connects the first opening and the second opening, has a liquid inlet end disposed at the first opening and a liquid outlet end disposed at the second opening, and is used to transport the fluid through the first opening, the protective structure, and the peristaltic pump, and release the fluid from the second opening; wherein the peristaltic pump is used to control the fluid in the fluid tube; The protective structure includes: first hollow part; a second hollow portion, coupled to the first hollow portion; a third hollow portion connected to the second hollow portion; and a fourth hollow portion connected to the third hollow portion; The first opening is located on the first hollow portion, the second opening is located on the fourth hollow portion, and the step of partially extending the fluid tube includes: Move the second hollow part into the first hollow part; wherein, when the second hollow part does not enter the first hollow part, the liquid inlet end of the fluid tube is accommodated in the first hollow part; when the second hollow part moves into the first hollow part, the liquid inlet end of the fluid tube extends from the first hollow part and the first opening.

16. The operating method according to claim 15, characterized in that: in, When the second hollow portion enters the first hollow portion, the third hollow portion covers the top of the first hollow portion.

17. The operating method according to claim 15, characterized in that: Before configuring the chemical supply device to the chemical solution container, the method further includes: The first shield covering the first opening is removed.

18. The operating method according to claim 15, characterized in that: Before starting the peristaltic pump, the method further comprises: The second shield covering the second opening is removed.

19. A chemical supply device, characterized in that: include: Protective structure with: First opening; as well as a second opening located above the first opening; a peristaltic pump, disposed on the protective structure; as well as a fluid tube, disposed in the protective structure and the peristaltic pump; The fluid tube has a liquid inlet end disposed at the first opening and a liquid outlet end disposed at the second opening, for conveying the fluid through the first opening, the protective structure and the peristaltic pump, and releasing the fluid from the second opening; wherein the protective structure extends out of the liquid inlet end of the fluid tube by reducing the distance between the peristaltic pump and the first opening; The protective structure includes: a first hollow portion including the first opening; a second hollow portion coupled to the first hollow portion; and a third hollow portion connected to the second hollow portion; wherein the peristaltic pump is disposed on the third hollow portion, and the first hollow portion, the second hollow portion, and the third hollow portion are located between the first opening and the peristaltic pump; wherein the protective structure reduces the distance between the peristaltic pump and the first opening by moving the second hollow portion into the first hollow portion; When the second hollow part does not enter the first hollow part, the liquid inlet end of the fluid tube is accommodated in the first hollow part; when the second hollow part moves into the first hollow part, the liquid inlet end of the fluid tube extends from the first hollow part and the first opening.

20. The chemical supply device according to claim 19, characterized in that The first hollow part has a plurality of fasteners, and when the second hollow part moves into the first hollow part, the plurality of fasteners are used to fix the second hollow part to the first hollow part.

21. The chemical supply device according to claim 19, characterized in that The protective structure includes a fourth hollow portion, and the fourth hollow portion is connected to the third hollow portion, the fourth hollow portion includes the second opening, and the second hollow portion is connected to the bottom of the third hollow portion, and the fourth hollow portion is connected to the side of the third hollow portion.

22. The chemical supply device according to claim 19, characterized in that The protective structure and the peristaltic pump surround the fluid tube, and no other openings are formed in the protective structure and the peristaltic pump.

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