PE-CVD hot plate testing device

Abstract

The application discloses a PE-CVD heating plate detection device, which comprises a workbench arranged horizontally and a heating plate, a thermal induction glass and a cover plate arranged in sequence on the workbench. A plurality of heating wires and temperature sensors corresponding to the heating wires are arranged in the heating plate. The heating wires and the temperature sensors are connected to a control box respectively. The thermal induction glass is connected to a display device. The application has simple structure, can quickly detect the heat release distribution of the heating plate, form a heat release distribution diagram and directly obtain the state of the heating wires and the temperature sensors in the heating plate.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of PE-CVD equipment detection, in particular to a PE-CVD heating plate detection device. BACKGROUND

[0002] Plasma enhanced chemical vapor deposition (PE-CVD) is to make a gas containing film component atoms ionize by means of microwaves or radio frequency, and to form a local plasma, and the plasma is very active in chemistry and is prone to reaction, so that a desired film is deposited on a substrate. In a corresponding PE-CVD equipment, a heating plate is an indispensable component and is used for heating glass and moving up and down in a cavity. After a regeneration operation is completed, whether internal heating wires and temperature sensors of the heating plate continue to work normally cannot be confirmed, and a defective heating plate causes a product to be unqualified, and only each component and process can be checked in turn, so that resources are wasted. SUMMARY

[0003] The application aims to provide a PE-CVD heating plate detection device which can quickly detect heat release distribution of a heating plate, form a heat release distribution diagram, and directly obtain a state of internal heating wires of the heating plate, so that a defective heating plate is avoided to be used for production.

[0004] To achieve the above object, the application provides the following technical scheme.

[0005] The application discloses a PE-CVD heating plate detection device, which comprises a workbench arranged horizontally and a heating plate, a heat-sensitive glass and a cover plate arranged in sequence on the workbench.

[0006] Preferably, in the PE-CVD heating plate detection device, the workbench comprises a support frame and an aluminum base fixed to the top of the support frame, and the top surface of the base is provided with a plurality of aluminum supporting blocks.

[0007] Preferably, in the PE-CVD heating plate detection device, the base is provided with a threading hole for connecting the heating wires and the temperature sensors with the control box.

[0008] Preferably, in the PE-CVD heating plate detection device, the bottom surface of the cover plate is concavely provided with a heat preservation cavity.

[0009] Preferably, in the PE-CVD heating plate detection device, the inner wall of the heat preservation cavity is provided with heat preservation cotton.

[0010] Preferably, in the PE-CVD heating plate detection device, the side walls of the heat preservation cavity are respectively provided with windows, the windows penetrate the heat preservation cotton, and transparent glass is arranged in the windows.

[0011] Preferably, in the PE-CVD heating plate detection device, the control box is provided with a heating plate control circuit, the heating plate control circuit comprises a primary circuit connected with a power supply and a plurality of secondary circuits connected with the primary circuit respectively, and the corresponding heating wire and temperature sensor are connected with the same secondary circuit.

[0012] Preferably, in the PE-CVD heating plate detection device, the secondary circuit comprises a contactor, a power supply controller and a temperature adjustment controller connected with the primary circuit in sequence, the heating wire is connected with the power supply controller, and the temperature sensor is connected with the corresponding temperature adjustment controller.

[0013] Preferably, in the PE-CVD heating plate detection device, the secondary circuit comprises a self-locking circuit for controlling the contactor to be opened and closed simultaneously.

[0014] Preferably, in the PE-CVD heating plate detection device, the secondary circuit is respectively connected with an ammeter and a voltmeter.

[0015] Compared with the prior art, the PE-CVD heating plate detection device has the advantages that the structure is simple, the heat release distribution of the heating plate can be quickly detected, the heat release distribution diagram is formed, and the state of the heating wire and the temperature sensor in the heating plate can be directly obtained. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0017] Figure 1 The structure schematic diagram of the PE-CVD heating plate detection device in the embodiment of the present application is shown.

[0018] Figure 2 The structure schematic diagram of the workbench in the embodiment of the present application is shown.

[0019] Figure 3 The structure schematic diagram of the cover plate in the embodiment of the present application is shown.

[0020] Figure 4 The circuit diagram of the primary circuit in the embodiment of the present application is shown.

[0021] Figure 5 The wiring schematic diagram of the temperature adjustment controller in the specific embodiment of the present invention is shown.

[0022] Figure 6 The circuit diagram of the self-locking circuit in the specific embodiment of the present invention is shown.

[0023] Figure 7 The wiring schematic diagram of the heating wire in the specific embodiment of the present invention is shown.

[0024] Figure 8 The wiring schematic diagram of the temperature sensor in the specific embodiment of the present invention is shown.

[0025] Figure 9 The heat release distribution diagram of the heating plate in the specific embodiment of the present invention is shown. Specific embodiments

[0026] Next, the technical solutions in the embodiments of the present invention will be described in detail with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0027] Refer Figures 1 to 3 As shown, a PE-CVD heating plate detection device includes a horizontally arranged workbench 1, a heating plate 2, a thermal induction glass 3, and a cover plate 4 that are sequentially arranged on the workbench 1. Eight groups of heating wires (respectively H1 to H8) and eight groups of temperature sensors (thermocouples) corresponding to the heating wires are arranged in the heating plate 2. The heating wires and the temperature sensors are respectively connected to a control box 5, and the thermal induction glass 3 is connected to a display device (not shown).

[0028] In this technical solution, the thermal induction glass is selected with the structure recorded in the prior art, which can realize sensing the temperature on the surface of the heating plate. The control box starts the heating plate to work. The thermal induction glass senses the temperature of the heating plate and transmits the data to the display device through the control line. The display device is a computer installed with midas NFX software, and the heat release distribution of the heating plate can be directly obtained, so as to judge the working state of the heating wires and temperature sensors inside the heating plate.

[0029] Furthermore, the workbench 1 includes a support frame 11 and an aluminum base 12 fixed on the top of the support frame 11. A plurality of aluminum support blocks 13 are arranged on the top surface of the base 12.

[0030] In the technical solution, the PE-CVD heating plate is made of aluminum alloy material, the base 12 and the supporting block 13 are made of similar or same material, the base 12 can reduce heat loss of the heating plate bottom, and the supporting block 13 reduces the contact area of the heating plate and the base 12, thereby reducing heat loss caused by heat transfer.

[0031] Further, the base 12 is provided with a threading hole 121 at the center, which is used for connecting the heating wire and the temperature sensor with the control box 5.

[0032] In the technical solution, when the heating plate is placed, the internal heating wire and the wire and joint of the temperature sensor are arranged on the bottom surface and connected to the control box through the threading hole, and the control line of the thermal sensing glass can also be connected to the display device through the threading hole.

[0033] Further, the bottom surface of the cover plate 4 is concavely provided with a heat preservation cavity 41.

[0034] In the technical solution, after the cover plate is placed, the thermal sensing glass and the heating plate are packaged in the heat preservation cavity by cooperating with the top surface of the base, thereby reducing heat loss and improving detection accuracy.

[0035] Further, the inner wall of the heat preservation cavity is provided with heat preservation cotton (not shown).

[0036] In the technical solution, the heat preservation cotton can be selected from existing technologies, which is used to improve the heat preservation effect of the cover plate.

[0037] Further, the side wall of the heat preservation cavity is respectively provided with a window 42, the window penetrates the heat preservation cotton, and the window is provided with transparent glass.

[0038] In the technical solution, the transparent glass is made of high-temperature-resistant transparent glass, which is used to observe the placement state of the heating plate and the thermal sensing glass through the window, so as to avoid misplacement and interference, thereby reducing detection inaccuracy, and the transparent glass can reduce heat loss at the window.

[0039] In the technical solution, a square tube is welded to form a frame with a length of 3073 mm, a width of 2743 mm and a height of 1018 mm, an aluminum plate with a thickness of 20 mm is fixed on the top of the frame as a base, the length and width of the base are not less than the corresponding length and width of the frame, a threading hole with a diameter of 175 mm is processed in the center of the base, sixteen square aluminum blocks with a side length of 100 mm are fixed on the top surface of the base as supporting blocks, a concave (heat preservation cavity) cover plate with a length of 3037 mm, a width of 2743 mm, a height of 200 mm and a wall thickness of 50 mm is made of a square tube and a plate material, heat preservation cotton is arranged on the inner wall of the heat preservation cavity, a window with a side length of 53 mm is processed on the side wall of the cover plate, the heat preservation cotton is processed with a through hole corresponding to the window, and transparent glass is arranged in the window, four lifting rings are arranged on the top of the cover plate, the cover plate is moved by a lifting device, and manpower is saved.

[0040] Referring toFigures 4 to 8 As shown in the figure, the control box 5 is provided with a heating plate 2 control circuit, which includes a primary circuit connected to a power supply and eight secondary circuits connected to the primary circuit respectively, and corresponding heating wires and temperature sensors are connected to the same secondary circuit.

[0041] In the technical solution, a terminal row or a junction box is arranged in the control box for facilitating the connection of the heating wires and the temperature sensors, and the components and lead wires of the secondary circuit are numbered according to the serial number of the heating wires. The signal transmission and execution can be realized through PLC control. The primary circuit at least includes an air switch 6 for controlling the on-off of the power supply, and the air switch of LS production ABS203b type 150A specification is selected. The eight secondary circuits are connected in parallel after the air switch, and the corresponding heating wires and temperature sensors are connected to the same secondary circuit, and each group of heating wires and temperature sensors is controlled independently.

[0042] Further, the secondary circuit includes a contactor (MC) 7, a power controller (SCR) 8 and a temperature adjustment controller (TEMP CONTROLLER) 9 connected to the primary circuit in sequence, the heating wires are connected to the power controller, and the temperature sensors are connected to the corresponding temperature adjustment controller.

[0043] In the technical solution, the air switch of LS production ABS52 type 50A specification is selected as the contactor, the power controller is selected as the three-phase power controller of P1E41 specification produced by PION, and the temperature adjustment controller is selected as the UT55A temperature adjustment controller produced by YOKOGAWA. In the actual detection process, the power supply is sequentially connected to the air switch, the contactor, the power controller and the heating wire (heating plate) to complete the simulation heating. The power controller is controlled by the 4-20mA (1A+ / 1A-) signal output by the temperature adjustment controller, each group of heating wires is controlled by an independent secondary circuit, the high temperature alarm point AL1 of the temperature adjustment controller is input by HT / 3, and the temperature sensor is connected to the TC+ / TC- of the temperature adjustment controller to control the actual heating temperature of the heating wire and avoid excessive heating.

[0044] Further, the secondary circuit further includes a self-locking circuit for controlling the on-off of the contactor.

[0045] The technical scheme is characterized in that the self-locking loop is used to ensure synchronous starting of each component and to ensure breaking, D11 / com of the temperature regulating controller is connected to the contactor through the self-locking loop, when the temperature exceeds the set temperature, the circuit is synchronously broken by the relay RY03 of the self-locking loop to avoid excessive heating, the circuit is synchronously connected by the relay RY02 of the self-locking loop, the relays and other controls are controlled by the conventional mode of PLC, the self-locking loop is further provided with an indicating lamp PBL and a stop button PB (a button PBL with an indicating lamp) to display the on-off state of the circuit and to manually control the start and stop of the machine.

[0046] Further, the current meter and the voltage meter are connected to each secondary loop respectively.

[0047] In the technical scheme, the current meter AM1 and the voltage meter VM1 are separately installed in each heating circuit to monitor the current and the voltage in the heating process.

[0048] The method for using the detection device is as follows: first, the cover plate in the normal temperature state is lifted by a travelling crane, then the heating plate in the normal temperature state is placed on the support block of the base, the heating wire and the temperature sensor connector are ensured to be downward, the thermal sensing glass is placed on the top of the heating plate, and the control wire is connected to the external computer of the box, then the cover plate is placed on the heating plate and the thermal sensing glass, the heating wire and the temperature sensor wire are connected to the control box through the cable and the terminal, the control box is started, each heating wire is independently controlled and is started and stopped at the same time, when the temperature reaches the set temperature, the heat release distribution diagram of the heating plate can be monitored through the midas NFX software on the computer, as shown in Figure 9 The color area corresponding to different temperatures is judged to determine whether the corresponding set temperature is reached, so as to determine whether the heating plate and the temperature sensor work normally.

[0049] In summary, the PE-CVD heating plate detection device has the advantages of simple structure, fast detection of the heat release distribution of the heating plate, formation of the heat release distribution diagram, and intuitive determination of the state of the heating wire and the temperature sensor in the heating plate.

[0050] It is to be noted that, as used in this document, the term "indicia" is intended to encompass any type of data, information, or other content, whether in the form of text, graphics, images, video, audio, or otherwise. It is to be further noted that, as used in this document, the terms "coupled" and "connected," along with derivatives thereof, can be used to mean one or more of the following: in electrical communication with; physically contacting with; in long-distance communication with; and / or not in direct contact with. It is to be further noted that, as used in this document, the terms "include" and "comprise," along with derivatives thereof, can be used to indicate inclusion of one or more elements or steps; these terms are not intended to, nor do they, imply that any or all functionality can be included with any or all elements or steps; and / or any such elements or steps are each independently repeatable both logically and temporally. In addition, the term "exemplary" is intended to refer to a non-limiting example, embodiment, or aspect. Moreover, the term "in response to" is intended to mean that a particular action is performed in response to one or more events or conditions, but not necessarily directly or immediately in response to the one or more events or conditions.

[0051] The foregoing is merely illustrative of the principles of this application and various modifications can be made by those skilled in the art, without departing from the spirit and scope of the application. Accordingly, the above description is not intended to limit the scope of the application.

Claims

1. A PE-CVD hot plate detection device, characterized by, The workbench is horizontally arranged, and a heating plate, a thermal induction glass and a cover plate are sequentially arranged on the workbench, the heating plate is internally provided with a plurality of heating wires and temperature sensors corresponding to the heating wires, the heating wires and the temperature sensors are respectively connected to a control box, the thermal induction glass is connected to a display device, the workbench comprises a support frame and an aluminum base fixed to the top of the support frame, the top surface of the base is provided with a plurality of aluminum supporting blocks, and the bottom surface of the cover plate is concavely provided with a heat preservation cavity.

2. The PE-CVD hot plate inspection apparatus according to claim 1, characterized by: The base is internally provided with a threading hole for connecting the heating wires and the temperature sensors to the control box.

3. The PE-CVD hot plate inspection apparatus of claim 1, wherein: The inner wall of the heat preservation cavity is provided with heat preservation cotton.

4. The PE-CVD hot plate inspection apparatus of claim 1, wherein: The sidewall of the heat preservation cavity is respectively provided with a window, the window penetrates the heat preservation cotton, and the window is internally provided with transparent glass.

5. The PE-CVD hot plate inspection apparatus of claim 1, wherein: The control box is internally provided with a heating plate control circuit, the heating plate control circuit comprises a primary circuit connected to a power supply and a plurality of secondary circuits connected to the primary circuit, and the corresponding heating wires and temperature sensors are respectively connected to the same secondary circuit.

6. The PE-CVD hot plate inspection apparatus of claim 5, wherein: The secondary circuit comprises a contactor, a power supply controller and a temperature adjustment controller connected to the power supply controller in sequence, the heating wire is connected to the power supply controller, and the temperature sensor is connected to the corresponding temperature adjustment controller.

7. The PE-CVD hot plate inspection apparatus of claim 6, wherein: The secondary circuit further comprises a self-locking circuit for controlling the opening and closing of the contactor.

8. The PE-CVD hot plate inspection apparatus of claim 6, wherein: Each secondary circuit is respectively connected to an ammeter and a voltmeter.

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